Multi-cavity magnetron sputtering continuous coating machine

Abstract

The multi-cavity magnetron sputtering continuous coating machine comprises a first material taking and conveying module and a second material taking and conveying module, a limiting assembly is arranged at one end of the second material taking and conveying module, and supporting frames are symmetrically and fixedly installed at the bottom end of the first material taking and conveying module and the bottom end of the second material taking and conveying module correspondingly; a mounting frame is fixedly mounted in the middles of the two groups of supporting frames; the rotating motor drives the rotating disc to be linked with the eccentric shaft, the connecting arm drives the sliding block to stably move along the sliding guide rail, automatic clamping and positioning of the positioning plates are achieved, traditional manual positioning is replaced, operation errors and time consumption are greatly reduced, the symmetrically-arranged positioning plates are synchronously close to the two sides, it is guaranteed that the plates are evenly stressed, and the working efficiency is improved. The sliding guide rail is matched with the sliding block to guarantee movement stability, the plate is conveyed along the preset path all the time, a stable foundation is provided for follow-up film tearing, the whole mechanical transmission structure is accurate and reliable, manual repeated calibration is not needed, and the positioning efficiency and precision are effectively improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, specifically a multi-chamber magnetron sputtering continuous coating machine. Background Technology

[0002] Magnetron sputtering is a process for coating plates under vacuum, which can make the film layer on the plate surface uniform, thereby ensuring the coating effect and quality.

[0003] According to announcement number CN117737675B, a multi-chamber magnetron sputtering continuous coating machine includes a coating device and a feeding unit. The feeding unit includes a loading robot, a loading mechanism, a first transfer mechanism, a pick-up transfer mechanism, a second transfer mechanism, and a unloading mechanism. The loading robot is located between the loading rack, the unloading rack, the pick-up transfer mechanism, and the coating device. The loading mechanism, the first transfer mechanism, the pick-up transfer mechanism, the second transfer mechanism, and the unloading mechanism constitute a transfer loop for transporting the workpiece. This invention, by having the loading mechanism, the first transfer mechanism, the pick-up transfer mechanism, the second transfer mechanism, and the unloading mechanism form a transfer loop for transporting the workpiece, allows the workpiece to flow directly between the feeding units after the previous process, thereby maximizing the processing time between different processes and improving time utilization.

[0004] The above-mentioned device effectively reduces the processing time between various processes of the board, which is beneficial to improving time utilization. According to the instruction manual and the attached drawings, when the board is transferred to the second material handling and transfer module, a worker or device needs to tear off the film. However, the two ends of the second material handling and transfer module do not have a positioning structure for the board, which requires the worker to position the board first and then tear off the film, which is time-consuming. Summary of the Invention

[0005] The purpose of this invention is to solve the problem that the above-mentioned device achieves effective processing time between various processes of the board, which is beneficial to improving time utilization. According to the specification and drawings, when the board is transferred to the second material handling and transfer module, a worker or device needs to peel off the film. However, the two ends of the second material handling and transfer module are not provided with positioning structures for the board, which requires the worker to position the board first and then peel off the film, which is time-consuming. Therefore, this invention provides a multi-chamber magnetron sputtering continuous coating machine.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a multi-chamber magnetron sputtering continuous coating machine, comprising a first material handling and transfer module and a second material handling and transfer module. A limit component is provided at one end of the second material handling and transfer module. Support frames are symmetrically fixedly installed at the bottom ends of both the first and second material handling and transfer modules, and a mounting frame is fixedly installed in the middle of the two sets of support frames. A mounting base is fixedly installed at the top of the mounting frame, and a positioning base is fixedly installed at the top of the mounting base. A rotating disk is rotatably connected to the top of the positioning base. A cavity is opened inside the positioning base, and a rotating motor is fixedly installed inside the cavity. The output shaft at the top of the rotating motor passes through the cavity and is fixedly installed to the rotating disk. Sliding guide rails are symmetrically fixedly installed at the top of the positioning base, and sliding blocks are slidably connected to the top of the sliding guide rails. An eccentric shaft is fixedly installed at the top of the rotating disk, and a connecting arm is rotatably connected to the middle of the top of the eccentric shaft and the sliding block. A connecting rod is symmetrically fixedly installed at the top of the sliding block, and a positioning plate for positioning is fixedly installed at the top of the connecting rod.

[0007] As a further embodiment of the present invention: a through groove is provided at one end of the positioning plate, and a slider is slidably connected inside the through groove. An adjustment plate is slidably connected at one end of the slider, a diaphragm is fixedly installed at one end of the adjustment plate, and a sliding handle is fixedly installed at one end of the slider.

[0008] As a further embodiment of the present invention: a second cavity is provided inside the sliding handle, and symmetrical limiting grooves are provided inside the second cavity; a third cavity is provided inside the adjusting plate, and a sliding plate is slidably connected inside the third cavity; a limiting block is fixedly installed at one end of the sliding plate, and the limiting block is adapted to the limiting groove.

[0009] As a further embodiment of the present invention: a push rod is slidably connected to one end of the adjustment plate, and a connecting shaft is fixedly installed through the cavity of the push rod; an inclined groove is provided at the top of the slide plate, and the inclined groove is adapted to the connecting shaft.

[0010] As a further embodiment of the present invention: a telescopic rod is fixedly installed inside the cavity three, and one end of the telescopic rod is fixedly installed with the slide plate. A reset spring is sleeved on the outer periphery of the telescopic rod to allow the slide plate to reset.

[0011] As a further embodiment of the present invention: a sliding groove is provided inside the through groove, and the sliding groove is symmetrically provided inside the through groove; two sliders are symmetrically fixedly installed at both ends of the slider one, and the slider two is adapted to the sliding groove.

[0012] As a further embodiment of the present invention: one end of the slider is provided with a guide groove for the adjustment plate to be raised and lowered, and one end of the adjustment plate is fixedly installed with a guide block, and the guide block is adapted to the guide groove.

[0013] As a further embodiment of the present invention: one end of the positioning base is provided with a heat dissipation mesh for the rotating motor to dissipate heat, and the heat dissipation mesh is symmetrically opened at both ends of the positioning base.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] This invention uses a rotating motor to drive a rotating disk and an eccentric shaft, which in turn drives a sliding block to move smoothly along a sliding guide rail via a connecting arm. This achieves automated clamping and positioning of the positioning plate, replacing traditional manual positioning. This significantly reduces operational errors and time consumption. The symmetrically arranged positioning plates approach synchronously from both sides, ensuring uniform force on the plate. The sliding guide rail and sliding block work together to ensure smooth movement, ensuring that the plate is always transmitted along a preset path, providing a stable foundation for subsequent film removal. The overall mechanical transmission structure is precise and reliable, eliminating the need for repeated manual calibration and effectively improving positioning efficiency and accuracy.

[0016] This invention offers flexible adjustment of the diaphragm height and position. Height adaptation is achieved by sliding the guide block along the guide groove. Pressing the push rod releases the limit, and the reset spring automatically locks the height, making operation convenient. The horizontal position is adjusted synchronously with the slider, accurately aligning with the edge of the protective film. After the plate is positioned, the tip of the diaphragm is inserted into the gap, and the protective film is easily peeled off with the help of leverage, saving the time spent searching for the edge. Positioning and film peeling are carried out simultaneously, eliminating the need to wait for a specific station, greatly shortening the processing flow and improving operational efficiency and stability. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 This is a schematic diagram of the positioning plate and positioning base in this invention;

[0019] Figure 3 This is the present invention. Figure 2 A magnified schematic diagram of the partial structure at point A in the middle;

[0020] Figure 4 This is a cross-sectional structural diagram of the positioning base in this invention;

[0021] Figure 5 This is a partial structural schematic diagram of the positioning plate in this invention;

[0022] Figure 6 This is a cross-sectional structural diagram of the sliding handle in this invention;

[0023] Figure 7 This is the present invention. Figure 6 A magnified schematic diagram of the structure at point B in the middle.

[0024] In the diagram: 1. First material handling and transmission module; 2. Second material handling and transmission module; 3. Limiting component; 4. Support frame; 5. Mounting frame; 6. Mounting base; 7. Positioning base; 8. Rotary disk; 9. Cavity 1; 10. Rotary motor; 11. Eccentric shaft; 12. Sliding guide rail; 13. Sliding block; 14. Connecting arm; 15. Connecting rod; 16. Positioning plate; 17. Through groove; 18. Slider 1; 19. Adjusting plate; 20. Diaphragm lifting plate; 21. Sliding handle; 22. Cavity 2; 23. Limiting tooth groove; 24. Cavity 3; 25. Limiting block; 26. Slide plate; 27. Push rod; 28. Connecting shaft; 29. ​​Inclined groove; 30. Telescopic rod; 31. Return spring; 32. Slide groove; 33. Slider 2; 34. Guide groove; 35. Guide block; 36. Heat dissipation mesh. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this invention, it should be noted that unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," and "set up" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. The following describes embodiments of the invention based on its overall structure.

[0027] Reference Figures 1 to 7In this embodiment of the invention, a multi-chamber magnetron sputtering continuous coating machine includes a first material handling and transfer module 1 and a second material handling and transfer module 2. A limit component 3 is provided at one end of the second material handling and transfer module 2. Support frames 4 are symmetrically fixedly installed at the bottom ends of both the first and second material handling and transfer modules 1 and 2. A mounting frame 5 is fixedly installed in the middle of the two sets of support frames 4. A mounting base 6 is fixedly installed at the top of the mounting frame 5. A positioning base 7 is fixedly installed at the top of the mounting base 6. A rotating disk 8 is rotatably connected to the top of the positioning base 7. An opening is provided inside the positioning base 7. A cavity 9 is provided, and a rotating motor 10 is fixedly installed inside the cavity 9. The output shaft at the top of the rotating motor 10 passes through the cavity 9 and is fixedly installed with the rotating disk 8. A sliding guide rail 12 is symmetrically fixedly installed at the top of the positioning base 7, and a sliding block 13 is slidably connected to the top of the sliding guide rail 12. An eccentric shaft 11 is fixedly installed at the top of the rotating disk 8, and a connecting arm 14 is rotatably connected to the middle of the top of the eccentric shaft 11 and the top of the sliding block 13. A connecting rod 15 is symmetrically fixedly installed at the top of the sliding block 13, and a positioning plate 16 for positioning is fixedly installed at the top of the connecting rod 15.

[0028] The above-mentioned scheme employs the following: the first material handling and transmission module 1, the second material handling and transmission module 2, and the limiting component 3 are all prior art referenced in the prior art documents and are not described in detail in this application. The limiting component 3 includes a limiting cylinder, a contact element, and a baffle, etc. The mounting base 6 is made of gray cast iron, the positioning base 7 is made of steel, the rotating disk 8 is also made of steel, the rotating motor 10 is model Y90S-4, the sliding guide rail 12 is made of 40Cr chrome-plated material, the sliding block 13 is made of wear-resistant cast iron, the eccentric shaft 11 is made of 40Cr, the connecting arm 14 is made of steel, and the connecting rod 15 is made of stainless steel. The positioning plate 16 is made of steel. The steel rotating disk 8 is driven to rotate by the rotating motor 10. The 40Cr eccentric shaft 11 drives the steel connecting arm 14 to move, causing the wear-resistant cast iron sliding block 13 to slide back and forth along the 40Cr chrome-plated sliding guide rail 12. The stainless steel connecting rod 15 drives the positioning plate 16 to move synchronously. The sliding guide rail 12 and the sliding block 13 cooperate to ensure smooth sliding. The eccentric shaft 11 and the connecting arm 14 realize the conversion of rotational motion into linear motion. The rotating motor 10 provides stable power. The overall structure enables the positioning plate 16 to accurately reciprocate and position, adapting to the needs of automated operation, with stable operation and high transmission efficiency.

[0029] Reference Figures 1 to 7The positioning plate 16 has a through groove 17 at one end, and a slider 18 is slidably connected inside the through groove 17. An adjusting plate 19 is slidably connected to one end of the slider 18. A diaphragm 20 is fixedly installed at one end of the adjusting plate 19. A sliding handle 21 is fixedly installed at one end of the slider 18. A cavity 22 is opened inside the sliding handle 21. Limiting grooves 23 are symmetrically opened inside the cavity 22. A cavity 24 is opened inside the adjusting plate 19. A sliding plate 26 is slidably connected inside the cavity 24. A limiting block 25 is fixedly installed at one end, and the limiting block 25 is adapted to the limiting tooth groove 23. A push rod 27 is slidably connected to one end of the adjusting plate 19, and a connecting shaft 28 is fixedly installed through the cavity 24. A slanted groove 29 is opened at the top of the slide plate 26, and the slanted groove 29 is adapted to the connecting shaft 28. A telescopic rod 30 is fixedly installed inside the cavity 24, and one end of the telescopic rod 30 is fixedly installed to the slide plate 26. A reset spring 31 for the slide plate 26 to reset is sleeved on the outer periphery of the telescopic rod 30.

[0030] The above scheme is adopted: slider 18 is made of wear-resistant cast iron, adjusting plate 19 is made of steel, diaphragm 20 is made of polyurethane, sliding handle 21 is made of ABS plastic, sliding plate 26 is made of spring steel, limit block 25 is made of 65Mn, push rod 27 is made of stainless steel, connecting shaft 28 is made of stainless steel, the angle of inclined groove 29 is preset, and its tilt angle can cause limit block 25 to disengage from limit tooth groove 23 during adjustment, telescopic rod 30 is made of steel, and return spring 31 is made of 65Mn wear-resistant cast iron. The iron slider 18 slides along the through groove 17 to adjust its position. The ABS sliding handle 21 facilitates operation. Pushing the stainless steel push rod 27 causes the connecting shaft 28 to slide along the inclined groove 29, which in turn drives the 65Mn slide plate 26 to compress the return spring 31, causing the limit block 25 to disengage from the limit tooth groove 23. The height of the Q235 adjusting plate 19 can be adjusted. After being released, the return spring 31 pushes the limit block 25 into the tooth groove for fixation. The polyurethane diaphragm 20 is adapted to contact the workpiece. The overall cooperation enables the height adjustment of the diaphragm 20, ensuring reliable positioning, convenient operation, and improved positioning adaptability.

[0031] Reference Figures 1 to 7 The through groove 17 has a sliding groove 32 inside, and the sliding groove 32 is symmetrically opened inside the through groove 17. The two ends of the slider 18 are symmetrically fixedly installed with slider 2 33, and slider 2 33 is adapted to the sliding groove 32. One end of slider 18 has a guide groove 34 for adjusting plate 19 to lift and lower. One end of adjusting plate 19 has a guide block 35 fixedly installed, and guide block 35 is adapted to guide groove 34.

[0032] The above scheme is adopted: the second slider 33 is made of wear-resistant cast iron, and the guide block 35 is made of steel. The wear-resistant cast iron second slider 33 slides along the slide groove 32 of the through groove 17, which limits the offset of the first slider 18 and ensures that it moves smoothly along the through groove 17. The steel guide block 35 cooperates with the guide groove 34 to guide the adjustment plate 19 to rise and fall accurately along the first slider 18, avoiding shaking during adjustment. The slide groove 32 and the second slider 33 improve the sliding stability of the first slider 18, and the guide groove 34 and the guide block 35 ensure the rising and falling accuracy of the adjustment plate 19. The overall cooperation enhances the accuracy of the positioning plate 16 adjustment and the structural rigidity, making the position adjustment of the diaphragm 20 more reliable and adaptable to more working conditions.

[0033] Reference Figures 1 to 7 The positioning base 7 has a heat dissipation mesh 36 at one end for the rotating motor 10 to dissipate heat, and the heat dissipation mesh 36 is symmetrically opened at both ends of the positioning base 7.

[0034] The above solution employs a multi-set of symmetrical heat dissipation meshes 36 at both ends, which allows the heat generated by the rotating motor 10 to be quickly dissipated through convection, preventing the performance of the rotating motor 10 from being degraded or its lifespan shortened due to high temperature. The symmetrically opened heat dissipation meshes 36 form an air circulation channel, improving heat dissipation efficiency. In conjunction with the positioning base 7, they provide a stable working environment for the rotating motor 10, ensuring the stable operation of the rotating disk 8 and subsequent transmission structure, and enhancing the overall reliability and durability of the equipment.

[0035] The working principle of this invention is as follows: In the plate positioning stage, the equipment achieves precise positioning through mechanical transmission. The positioning base 7 at the top of the mounting frame 5 provides stable support for the positioning mechanism. Before the plate is transferred to the first material handling and conveying module 1, the rotating motor 10 in the cavity 9 inside the positioning base 7 starts, and its output shaft drives the rotating disk 8 at the top to rotate. The eccentric shaft 11 at the top of the rotating disk 8 rotates synchronously with the rotating disk, and pulls the sliding block 13 along the sliding guide rail 12 at the top of the positioning base 7 to make reciprocating linear motion through the connecting arm 14. The connecting rod 15 at the top of the sliding block 13 drives the positioning plate 16 to move synchronously. The two sets of symmetrically arranged positioning plates move synchronously. The plates 16 move closer together, clamping and positioning them from both sides. This automated positioning method replaces traditional manual positioning, avoiding errors and time-consuming manual operations. The cooperation between the sliding guide rail 12 and the sliding block 13 ensures the smooth movement of the positioning plate 16, guaranteeing that the plate remains on the preset path during transmission, providing a stable foundation for subsequent film-tearing operations. In the film-tearing auxiliary stage, the height and position of the film-lifting sheet 20 are flexibly and conveniently adjusted. The adjusting plate 19 slides along the guide groove 34 of the slider 18 via the guide block 35 to adjust the height of the film-lifting sheet 20 to accommodate plates of different thicknesses. During adjustment, press one end of the adjusting plate 19. Push rod 27 drives connecting shaft 28 to press the inclined groove 29 at the top of slide plate 26, causing slide plate 26 to slide into cavity 24, compressing telescopic rod 30 and return spring 31. Limiting block 25 at one end of slide plate 26 disengages from limiting tooth groove 23 in cavity 22 of sliding handle 21, releasing the height lock. When the height of diaphragm 20 is adapted to the edge of the protective film on the board, push rod 27 is released, return spring 31 pushes slide plate 26 to reset, and limiting block 25 re-engages into the corresponding limiting tooth groove 23, completing the height fixation. The horizontal position of diaphragm 20 can be adjusted synchronously with slider 18 to ensure accurate alignment with the protective film on the board. With the edge gap of the membrane, after the plate is fixed by the positioning plate 16, the tip of the lifting film 20 is inserted into the gap between the protective film and the plate. The operator only needs to pull the protective film lightly to easily peel it off with the leverage of the lifting film 20. This design avoids the tearing of the film or displacement of the plate caused by uneven force when tearing by hand in the traditional way. At the same time, it saves the time of finding the edge of the film. After positioning, the film tearing operation can be carried out simultaneously without waiting for the plate to be transferred to a specific station, which greatly shortens the overall processing time. In addition, the heat dissipation mesh 36 at both ends of the positioning base 7 ensures good heat dissipation when the rotating motor 10 is working, maintaining the long-term stable operation of the equipment.

[0036] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A multi-chamber magnetron sputtering continuous coating machine, comprising a first material handling and transfer module (1) and a second material handling and transfer module (2), wherein a limit component (3) is provided at one end of the second material handling and transfer module (2), and support frames (4) are symmetrically fixedly installed at the bottom ends of both the first material handling and transfer module (1) and the second material handling and transfer module (2), and an mounting frame (5) is fixedly installed in the middle of the two sets of support frames (4), characterized in that, The mounting bracket (5) is fixedly mounted with a mounting base (6) at its top. The mounting base (6) is fixedly mounted with a positioning base (7) at its top. The positioning base (7) is rotatably connected to a rotating disk (8) at its top. The positioning base (7) has a cavity (9) inside, and a rotating motor (10) is fixedly mounted inside the cavity (9). The output shaft of the rotating motor (10) passes through the cavity (9) and is fixedly mounted to the rotating disk (8). The positioning base (7) is symmetrically fixedly mounted with a sliding guide rail (12), and a sliding block (13) is slidably connected to the top of the sliding guide rail (12). The rotating disk (8) is fixedly mounted with an eccentric shaft (11), and a connecting arm (14) is rotatably connected to the middle of the top of the sliding block (13). The sliding block (13) is symmetrically fixedly mounted with a connecting rod (15), and a positioning plate (16) for positioning is fixedly mounted at the top of the connecting rod (15).

2. The multi-chamber magnetron sputtering continuous coating machine according to claim 1, characterized in that, The positioning plate (16) has a through groove (17) at one end, and a slider (18) is slidably connected inside the through groove (17). An adjustment plate (19) is slidably connected to one end of the slider (18). A diaphragm (20) is fixedly installed at one end of the adjustment plate (19), and a sliding handle (21) is fixedly installed at one end of the slider (18).

3. The multi-chamber magnetron sputtering continuous coating machine according to claim 2, characterized in that, The sliding handle (21) has a cavity two (22) inside, and a limiting tooth groove (23) is symmetrically opened inside the cavity two (22). The adjusting plate (19) has a cavity three (24) inside, and a sliding plate (26) is slidably connected inside the cavity three (24). A limiting block (25) is fixedly installed at one end of the sliding plate (26), and the limiting block (25) is adapted to the limiting tooth groove (23).

4. The multi-chamber magnetron sputtering continuous coating machine according to claim 3, characterized in that, The adjusting plate (19) is slidably connected to a push rod (27) at one end, and the push rod (27) is fixedly installed with a connecting shaft (28) through the cavity three (24). The top of the sliding plate (26) is provided with a slanted groove (29), and the slanted groove (29) is adapted to the connecting shaft (28).

5. A multi-chamber magnetron sputtering continuous coating machine according to claim 4, characterized in that, A telescopic rod (30) is fixedly installed inside the cavity three (24), and one end of the telescopic rod (30) is fixedly installed with the slide plate (26). A reset spring (31) is sleeved on the outer periphery of the telescopic rod (30) for the slide plate (26) to reset.

6. A multi-chamber magnetron sputtering continuous coating machine according to claim 5, characterized in that, The through groove (17) has a sliding groove (32) inside, and the sliding groove (32) is symmetrically opened inside the through groove (17). The two ends of the slider one (18) are symmetrically fixedly installed with slider two (33), and slider two (33) is adapted to the sliding groove (32).

7. A multi-chamber magnetron sputtering continuous coating machine according to claim 6, characterized in that, The slider (18) has a guide groove (34) at one end for the adjustment plate (19) to adjust the height. The adjustment plate (19) has a guide block (35) fixedly installed at one end, and the guide block (35) is compatible with the guide groove (34).

8. A multi-chamber magnetron sputtering continuous coating machine according to claim 7, characterized in that, The positioning base (7) has a heat dissipation mesh (36) at one end for the rotating motor (10) to dissipate heat, and the heat dissipation mesh (36) is symmetrically opened at both ends of the positioning base (7).

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