Induction type protection device for etching machine table
By employing an inductive protection device in the etching machine and utilizing non-contact sensing detection, the problems of particle contamination and reliability caused by mechanical limit switches have been solved, resulting in higher product yield and equipment stability.
Patent Information
- Application Number
- CN202511591435.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-03
- Publication Date
- 2026-01-27
AI Technical Summary
Existing mechanical limit switches are prone to generating wear debris in etching machines, leading to particle contamination, affecting product yield, and the mechanical structure is prone to fatigue and jamming, resulting in decreased reliability.
The inductive protection device utilizes the principle of non-contact inductive detection, where the sensor has no physical contact with the target object. The non-contact detection system, composed of the inductive sensor and mounting components, avoids mechanical wear and debris generation.
It completely avoids particulate contamination caused by mechanical wear, improves product yield, extends equipment life, enhances equipment stability and safety, and reduces equipment downtime and modification costs.
Smart Images
Figure CN121416396A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of etching machine protection technology, and in particular to an inductive protection device for etching machines. Background Technology
[0002] Etching is a critical process in semiconductor manufacturing and micro / nano fabrication. It involves selectively etching the surface of a wafer to form the desired microscopic circuit structure. Etching machines, especially plasma etching machines, create an extremely complex and precise reaction environment involving high vacuum, high temperature, high-frequency radio frequency power, and highly corrosive and toxic specialty process gases. Ensuring this process takes place within an absolutely sealed and safe chamber is crucial for protecting operator safety, preventing contamination and scrapping of expensive wafers, and maintaining the stable operation of costly equipment.
[0003] In existing technologies, to ensure that critical components such as the reaction chamber cover, maintenance door, and gas cabinet of the etching machine are completely sealed before and during the process, safety interlocking devices are generally installed. Most of these are mechanical limit switches or micro switches. These devices activate or deactivate internal contacts by pressing a physical probe or button when the cover is closed, thereby generating a switching signal. However, particulate contamination is prone to occur inside the etching machine, and mechanical switches are prone to generating wear debris during repeated pressing, becoming a source of contamination and directly affecting product yield. At the same time, their mechanical structure is prone to fatigue and jamming after long-term use, leading to a decrease in reliability. Summary of the Invention
[0004] Given that most existing mechanical limit switches or micro switches rely on the physical probe or button pressed when the cover is closed to connect or disconnect internal contacts, thereby generating a switch signal, the etching machine is prone to particulate contamination. Mechanical switches are also prone to generating wear debris during repeated pressing, becoming a source of contamination and directly affecting product yield. Furthermore, their mechanical structure is prone to fatigue and jamming after long-term use, leading to a decrease in reliability. Therefore, this invention is proposed.
[0005] Therefore, the purpose of this invention is to provide an inductive protection device for etching machines. Its purpose is to adopt a non-contact inductive detection principle, with no physical contact or mechanical pressure between the sensor and the target object, completely avoiding particle debris generated by mechanical wear, greatly reducing the potential threat of such contamination to the yield of wafer products, and meeting the extreme cleanliness requirements in semiconductor manufacturing.
[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an inductive protection device for an etching machine, comprising a device body, an installation cavity disposed inside the device body, a top cavity disposed on the top of the device body, a mounting top seat disposed above the top cavity, an inductive sensor disposed on the top of the mounting top seat, an installation component disposed in the inner cavity of the installation cavity, and a quick-fixing component disposed in the inner cavity of the top cavity; The mounting components include a blocking assembly disposed at the bottom of the inner cavity of the device body, a moving assembly disposed on the blocking assembly, a limiting assembly disposed above the moving assembly, and an auxiliary limiting assembly disposed on the surface of the device body. The blocking assembly includes four sets of communicating slots disposed at the bottom end of the surface of the device body, and the communicating slots are interconnected with the inner cavity of the mounting cavity. Two sets of positioning rods are disposed at the bottom of the inner cavity of the mounting cavity, and the two sets of positioning rods are staggered. A vertical plate is disposed on the surface of the positioning rods, and a blocking horizontal plate is disposed at the bottom of the vertical plate, with one end of the blocking horizontal plate extending into the inner cavity of the communicating slot.
[0007] As a preferred embodiment of the inductive protection device for etching machine table described in this invention, the positioning rod has a first spring sleeved at both ends, one end of the first spring is connected to the inner side wall of the mounting cavity, and the other end of the first spring is connected to the surface of the vertical plate, and a fan-shaped limiting block is provided at the top of the vertical plate.
[0008] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the moving component includes four sets of slide rails disposed on the inner sidewall of the mounting cavity, a sliding block disposed on the inner side of the slide rails, a connecting block disposed on the end of the sliding block away from the slide rails, and an inverted conical limiting post disposed in the inner cavity of the mounting cavity and above the fan-shaped limiting block, wherein the end of the connecting block away from the sliding block and the inverted conical limiting post are connected to each other.
[0009] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the moving component further includes a telescopic rod disposed on the top of the connecting block, and the top end of the telescopic rod is connected to the top end of the mounting cavity. A second spring is disposed on the surface of the telescopic rod, one end of the second spring is connected to the top end of the mounting cavity, and the other end of the second spring is connected to the top of the connecting block.
[0010] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the limiting component includes a connecting hole disposed at the bottom of the inner cavity of the top cavity, and the connecting hole and the inner cavity of the mounting cavity are interconnected, and a limiting post disposed at the top of the inverted conical limiting post, and the limiting post extends into the inner cavity of the top cavity through the connecting hole.
[0011] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the limiting component includes four sets of arc-shaped limiting grooves disposed on the inner sidewall of the connecting hole, four sets of arc-shaped limiting blocks disposed on the top surface of the limiting post, a rectangular groove disposed on the top of the limiting post, and a rectangular strip disposed in the inner cavity of the rectangular groove, wherein the top end of the rectangular strip extends to the outside of the limiting post.
[0012] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the top of the rectangular strip is fixedly equipped with a handle, circular iron blocks are disposed on both sides of the bottom of the handle, and an annular magnetic block is disposed at the bottom of the top cavity and located in the middle position, and the limiting post passes through the annular magnetic block.
[0013] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the auxiliary limiting component includes a threaded groove disposed on the surface of the equipment body, a limiting ring disposed on the surface of the equipment body, wherein the inner wall of the limiting ring is threadedly connected to the threaded groove, and a rubber ring disposed at the bottom of the limiting ring.
[0014] As a preferred embodiment of the inductive protection device for etching machine described in this invention, the quick-fixing component includes four sets of Z-shaped slots disposed on the inner sidewall of the top cavity, four sets of limiting blocks disposed on the surface of the mounting top seat, with one end of the limiting blocks extending into the inner cavity of the Z-shaped slots, four sets of arc-shaped magnetic blocks disposed at the top edge of the equipment body, and four sets of arc-shaped iron blocks disposed at the bottom edge of the mounting top seat.
[0015] Compared with the prior art, the present invention has at least the following beneficial effects: 1. This invention utilizes a non-contact sensing principle with an inductive sensor mounted on the top mount. There is no physical contact or mechanical pressure between the sensor and the target object, completely avoiding particle debris caused by mechanical wear. This significantly reduces the potential threat of such contamination to wafer product yield, meeting the extreme cleanliness requirements of semiconductor manufacturing. Furthermore, due to the absence of moving mechanical parts, this invention fundamentally overcomes the problems of metal fatigue and contact oxidation caused by long-term use in traditional mechanical switches, resulting in a longer service life, more stable operation, reduced machine downtime due to protection device malfunctions, and improved overall equipment efficiency. By precisely positioning the equipment body in key locations such as the reaction chamber cover and maintenance doors, a sensitive and reliable safety status sensing network can be constructed. Dangerous operations on the machine can only be permitted when all monitored points are confirmed to be in a "safe closed" state, thus providing more proactive and comprehensive multi-layered protection for personnel, products, and equipment.
[0016] 2. Through the design of the installation components, the present invention allows the equipment body to be quickly and conveniently installed in key locations such as the reaction chamber cover and maintenance door. This design demonstrates excellent versatility and adaptability, and can be added or upgraded without complex modifications to the existing etching machine structure, greatly reducing the cost and time of equipment upgrades and modifications, and achieving immediate use.
[0017] 3. This invention achieves a separate design between the inductive sensor and the equipment body by making the equipment body and the mounting base quick-detachable. After the equipment body is fixed for the first time, if the core inductive sensor needs to be replaced, repaired or calibrated, the operator can quickly remove the sensor body separately without disassembling the entire mounting base. This design simplifies the maintenance work from structural disassembly to modular replacement, significantly shortens the maintenance time and greatly improves the production efficiency of the equipment. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of the inductive protection device for etching machine of the present invention; Figure 2 This is a schematic diagram of the overall structure of the inductive protection device for etching machine of the present invention from another perspective. Figure 3 This is a first cross-sectional perspective view of the inductive protection device for etching machine of the present invention. Figure 4 This is a second cross-sectional perspective view of the inductive protection device for etching machine of the present invention. Figure 5 This is a top-view cross-sectional three-dimensional structural diagram of the inductive protection device for etching machine of the present invention. Figure 6 This is a three-dimensional schematic diagram of the exploded unfolded structure of the inductive protection device for etching machine of the present invention. Figure 7 This is a three-dimensional structural diagram of the mounting base of the inductive protection device for etching machine of the present invention; Figure 8 This invention relates to an inductive protection device for etching machines. Figure 6 A magnified structural diagram at point A.
[0019] Explanation of reference numerals in the attached figures: 1. Equipment body; 11. Mounting cavity; 12. Top cavity; 13. Mounting top seat; 14. Inductive sensor; 2. Installation components; 21. Blocking assembly; 211. Positioning rod; 212. Vertical plate; 213. Connecting slot; 214. Blocking horizontal plate; 215. First spring; 216. Fan-shaped limiting block; 22. Moving assembly; 221. Slide rail; 222. Sliding block; 223. Inverted cone-shaped limiting post; 224. Connecting block; 225. Telescopic rod; 226. Second spring; 23. Limiting assembly; 231. Connecting hole; 232. Limiting post; 233. Arc-shaped limiting groove; 234. Arc-shaped limiting block; 235. Rectangular strip; 236. Rectangular groove; 237. Annular magnetic block; 238. Handle; 239. Circular iron block; 24. Auxiliary limiting assembly; 241. Threaded groove; 242. Limiting ring; 243. Rubber ring; 3. Quick-fixing components; 31. Z-shaped slot; 32. Restricting block; 33. Arc-shaped magnetic block; 34. Arc-shaped iron block. Detailed Implementation
[0020] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0021] Example 1
[0022] Reference Figures 1-8 This is the first embodiment of the present invention, which provides an inductive protection device for an etching machine. The inductive protection device for the etching machine includes a machine body 1, a mounting cavity 11 opened inside the machine body 1, a top cavity 12 opened on the top of the machine body 1, a mounting top seat 13 set above the top cavity 12, an inductive sensor 14 installed on the top of the mounting top seat 13, and an inductive sensor 14 installed on the top of the mounting top seat 13. The inductive sensor 14 adopts a non-contact sensing detection principle, and there is no physical contact or mechanical pressure action between the sensor and the target object, which completely avoids particle debris caused by mechanical wear. The device also includes a mounting component 2 set inside the mounting cavity 11 and a quick-fixing component 3 set inside the top cavity 12. The mounting component 2 includes a blocking component 21 disposed at the bottom of the inner cavity of the device body 1, a moving component 22 disposed on the blocking component 21, a limiting component 23 disposed above the moving component 22, and an auxiliary limiting component 24 disposed on the surface of the device body 1. The blocking component 21 includes four sets of connecting slots 213 opened at the bottom end of the surface of the device body 1, and the connecting slots 213 are interconnected with the inner cavity of the mounting cavity 11. Two sets of positioning rods 211 are fixedly installed at the bottom of the inner cavity of the mounting cavity 11, and the two sets of positioning rods 211 are staggered. A vertical plate 212 is slidably sleeved on the surface of the positioning rods 211, and a blocking horizontal plate 214 is connected to the bottom of the vertical plate 212. One end of the blocking horizontal plate 214 extends into the inner cavity of the connecting slots 213. The positioning rods 211 are used to facilitate the restriction of the four sets of vertical plates 212.
[0023] The positioning rod 211 has a first spring 215 sleeved at both ends. One end of the first spring 215 is connected to the inner wall of the mounting cavity 11, and the other end of the first spring 215 is connected to the surface of the vertical plate 212. A fan-shaped limiting block 216 is fixedly installed on the top of the vertical plate 212. The inner walls of the fan-shaped limiting blocks 216 on the four sets of vertical plates 212 can be arranged into a ring shape to facilitate mutual adaptation with the bottom of the inverted cone-shaped limiting post 223. At the same time, the elastic force of the first spring 215 can make the two sets of vertical plates 212 on the positioning rod 211 move closer to each other.
[0024] The movable component 22 includes four sets of slide rails 221 embedded in the inner wall of the mounting cavity 11, a sliding block 222 slidably connected to the inner side of the slide rails 221, a connecting block 224 fixedly installed at the end of the sliding block 222 away from the slide rails 221, an inverted conical limiting post 223 disposed in the inner cavity of the mounting cavity 11 and located above the fan-shaped limiting block 216, and the end of the connecting block 224 away from the sliding block 222 is connected to the inverted conical limiting post 223. The movable component 22 also includes a telescopic rod 225 fixedly installed on the top of the connecting block 224, and the top end of the telescopic rod 225 is connected to the top end of the inner cavity of the mounting cavity 11. A second spring 226 is sleeved on the surface of the telescopic rod 225, one end of the second spring 226 is connected to the top of the inner cavity of the mounting cavity 11, and the other end of the second spring 226 is connected to the top of the connecting block 224.
[0025] The limiting component 23 includes a connecting hole 231 at the bottom of the inner cavity of the top cavity 12, which is connected to the inner cavity of the mounting cavity 11, and a limiting post 232 rotatably connected to the top of the inverted conical limiting post 223, which extends into the inner cavity of the top cavity 12 through the connecting hole 231. The limiting component 23 includes four sets of arc-shaped limiting grooves 233 on the inner sidewall of the connecting hole 231, four sets of arc-shaped limiting blocks 234 fixedly installed on the top surface of the limiting post 232, a rectangular groove 236 on the top of the limiting post 232, and a rectangular strip 235 slidably connected to the inner cavity of the rectangular groove 236, with the top end of the rectangular strip 235 extending to the outside of the limiting post 232.
[0026] A handle 238 is fixedly installed on the top of the rectangular bar 235, circular iron blocks 239 are provided on both sides of the bottom of the handle 238, and an annular magnetic block 237 is provided at the bottom of the inner cavity of the top cavity 12 and located in the middle position, and the limiting post 232 passes through the annular magnetic block 237.
[0027] During use, firstly, a hole slightly larger than the diameter of the equipment body 1 is drilled on the main chamber cover plate frame of the etching machine. Then, the bottom end of the equipment body 1 is passed through the drilled hole. After that, the rectangular bar 235 is rotated by rotating the handle 238, which causes the limiting post 232 to rotate. Then, the four sets of arc-shaped limiting blocks 234 on the limiting post 232 and the four sets of arc-shaped limiting grooves 233 on the inner side of the connecting hole 231 are aligned. Then, the restriction between the connecting hole 231 and the limiting post 232 is removed. Then, the elastic force of the second spring 226 is used to drive the telescopic rod 225 to extend, thereby pushing the connecting block 224 to move down. Then, the sliding block 222 slides down on the inner side of the slide rail 221. This can then synchronously drive the inverted cone-shaped limiting post 223 to move down, and then the four sets of fan-shaped limiting blocks 216 to abut against each other, thereby causing the vertical plate 212 to slide on the surface of the positioning rod 211 and compress the first spring 215. Then, the vertical plate 212 moves to drive the blocking horizontal plate 214 from the connecting slot 213 to the outside of the equipment body 1. Then, the four sets of blocking horizontal plates 214 on the surface of the equipment body 1 restrict one end of the equipment body 1 to the end of the drilled hole. When it is necessary to disassemble the device body 1 from the drill hole, by pulling the handle 238, the magnetic attraction between the circular iron block 239 and the annular magnetic block 237 on the handle 238 is released. Then, the top of the limiting post 232 moves upward and passes through the connecting hole 231. At this time, the four sets of arc-shaped limiting blocks 234 on the surface of the limiting post 232 also pass through the connecting hole 231 through the arc-shaped limiting groove 233. Then, rotating the rectangular bar 235 drives the limiting post 232 to rotate, thereby causing the arc-shaped limiting blocks to move. The 234 and the arc-shaped limiting groove 233 are misaligned, and then the limiting post 232 and the inverted cone-shaped limiting post 223 can be restricted and fixed. When the inverted cone-shaped limiting post 223 moves upward and moves out from between the four sets of fan-shaped limiting blocks 216, the rebound force of the first spring 215 drives the two sets of vertical plates 212 on the positioning rod 211 to move closer to each other, so that the blocking horizontal plate 214 on the vertical plate 212 can be retracted into the communicating groove 213, and then the equipment body 1 can be quickly disassembled from the drill hole.
[0028] Example 2
[0029] Reference Figures 1-8 This is the second embodiment of the present invention. The difference between this embodiment and the first embodiment is that the auxiliary limiting component 24 includes a threaded groove 241 formed on the surface of the device body 1, a limiting ring 242 threadedly sleeved on the surface of the device body 1, and the inner sidewall of the limiting ring 242 is threadedly connected to the threaded groove 241, and a rubber ring 243 disposed at the bottom of the limiting ring 242.
[0030] During use, since the thickness of the drilled holes in the frame may vary, the equipment body 1 is first passed through the drilled hole and the four sets of blocking horizontal plates 214 are unfolded. Then, by rotating the limiting ring 242, the limiting ring 242 is rotated and moved on the surface of the equipment body 1, so that the rubber ring 243 on the limiting ring 242 is close to one end of the frame and abuts against each other, which can improve the stability of the equipment body 1 installed at the drilled hole.
[0031] The remaining structure is the same as that in Example 1.
[0032] Example 3
[0033] Reference Figures 1-8 This is the third embodiment of the present invention. The difference between this embodiment and the second embodiment is that the quick-fixing component 3 includes four sets of Z-shaped slots 31 disposed on the inner sidewall of the top cavity 12, four sets of limiting blocks 32 disposed on the surface of the mounting top seat 13, and one end of the limiting blocks 32 extends into the inner cavity of the Z-shaped slots 31, four sets of arc-shaped magnetic blocks 33 disposed at the top edge of the device body 1, and four sets of arc-shaped iron blocks 34 disposed at the bottom edge of the mounting top seat 13.
[0034] During use, when the inductive sensor 14 on the mounting top 13 malfunctions and needs to be replaced or repaired, simply pull the mounting top 13 forcefully to release the magnetic attraction between the arc-shaped iron block 34 on the mounting top 13 and the arc-shaped magnetic block 33 on the equipment body 1. Then, the limiting block 32 on the mounting top 13 moves upward in the Z-shaped slot 31 cavity. Then, rotate the mounting top 13 to drive the limiting block 32 to rotate in the Z-shaped slot 31 cavity. Then, the mounting top 13 can be quickly removed from the top of the equipment body 1. When installation is required, simply align and insert the four sets of limiting blocks 32 on the mounting top 13 and the four sets of Z-shaped slots 31 on the equipment body 1, and rotate them in the opposite direction to fix the installation.
[0035] The remaining structure is the same as that in Example 2.
[0036] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.
Claims
1. An inductive protection device for an etching machine, comprising a machine body (1), characterized in that: It also includes a mounting cavity (11) disposed inside the device body (1), a top cavity (12) disposed on the top of the device body (1), a mounting top seat (13) disposed above the top cavity (12), an inductive sensor (14) disposed on the top of the mounting top seat (13), a mounting component (2) disposed in the inner cavity of the mounting cavity (11), and a quick-fixing component (3) disposed in the inner cavity of the top cavity (12). The mounting component (2) includes a blocking component (21) disposed at the bottom of the inner cavity of the device body (1), a moving component (22) disposed on the blocking component (21), a limiting component (23) disposed above the moving component (22), and an auxiliary limiting component (24) disposed on the surface of the device body (1). The blocking component (21) includes four sets of connecting slots (213) disposed at the bottom of the surface of the device body (1), and the connecting slots (213) and the inner cavity of the mounting cavity (11) are interconnected. Two sets of positioning rods (211) are disposed at the bottom of the inner cavity of the mounting cavity (11), and the two sets of positioning rods (211) are staggered. A vertical plate (212) is disposed on the surface of the positioning rods (211), and a blocking horizontal plate (214) is disposed at the bottom of the vertical plate (212), and one end of the blocking horizontal plate (214) extends into the inner cavity of the connecting slots (213).
2. The inductive protection device for etching machine table according to claim 1, characterized in that: The positioning rod (211) has a first spring (215) sleeved on both ends of its surface. One end of the first spring (215) is connected to the inner wall of the mounting cavity (11), and the other end of the first spring (215) is connected to the surface of the vertical plate (212). A fan-shaped limiting block (216) is set on the top of the vertical plate (212).
3. The inductive protection device for etching machine table according to claim 2, characterized in that: The movable component (22) includes four sets of slide rails (221) disposed on the inner wall of the mounting cavity (11), a sliding block (222) disposed on the inner side of the slide rails (221), a connecting block (224) disposed on the end of the sliding block (222) away from the slide rails (221), and an inverted cone-shaped limiting post (223) disposed in the inner cavity of the mounting cavity (11) and located above the fan-shaped limiting block (216), and the end of the connecting block (224) away from the sliding block (222) and the inverted cone-shaped limiting post (223) are connected to each other.
4. The inductive protection device for etching machine table according to claim 3, characterized in that: The movable component (22) further includes a telescopic rod (225) disposed on the top of the connecting block (224), and the top end of the telescopic rod (225) is connected to the top end of the inner cavity of the mounting cavity (11). A second spring (226) is disposed on the surface of the telescopic rod (225), one end of the second spring (226) is connected to the top of the inner cavity of the mounting cavity (11), and the other end of the second spring (226) is connected to the top of the connecting block (224).
5. The inductive protection device for etching machine table according to claim 4, characterized in that: The limiting component (23) includes a connecting hole (231) disposed at the bottom of the inner cavity of the top cavity (12), and the connecting hole (231) and the inner cavity of the mounting cavity (11) are interconnected, and a limiting post (232) disposed at the top of the inverted conical limiting post (223), and the limiting post (232) extends into the inner cavity of the top cavity (12) through the connecting hole (231).
6. The inductive protection device for etching machine table according to claim 5, characterized in that: The limiting component (23) includes four sets of arc-shaped limiting grooves (233) disposed on the inner sidewall of the connecting hole (231), four sets of arc-shaped limiting blocks (234) disposed on the top surface of the limiting post (232), a rectangular groove (236) disposed on the top of the limiting post (232), and a rectangular strip (235) disposed in the inner cavity of the rectangular groove (236), with the top end of the rectangular strip (235) extending to the outside of the limiting post (232).
7. The inductive protection device for etching machine table according to claim 6, characterized in that: A handle (238) is fixedly installed on the top of the rectangular strip (235), a circular iron block (239) is set on both sides of the bottom of the handle (238), and an annular magnetic block (237) is set at the bottom of the inner cavity of the top cavity (12) and located in the middle position, and a limiting post (232) passes through the annular magnetic block (237).
8. The inductive protection device for etching machine table according to claim 7, characterized in that: The auxiliary limiting component (24) includes a threaded groove (241) disposed on the surface of the device body (1), a limiting ring (242) disposed on the surface of the device body (1), and the inner wall of the limiting ring (242) and the threaded groove (241) are threadedly connected, and a rubber ring (243) disposed at the bottom of the limiting ring (242).
9. The inductive protection device for etching machine table according to claim 8, characterized in that: The quick-fixing component (3) includes four sets of Z-shaped slots (31) disposed on the inner side wall of the top cavity (12), four sets of limiting blocks (32) disposed on the surface of the mounting top seat (13), with one end of the limiting blocks (32) extending into the inner cavity of the Z-shaped slots (31), four sets of arc-shaped magnetic blocks (33) disposed at the top edge of the device body (1), and four sets of arc-shaped iron blocks (34) disposed at the bottom edge of the mounting top seat (13).