A multi-medium switching semiconductor shower device

Abstract

The application provides a multi-medium switching semiconductor spraying device, which comprises a sealed machine body, a preloading mounting plate is arranged in the middle of the sealed machine body, the preloading mounting plate divides the sealed machine body into an inlet layer located at the upper part and a spraying layer located at the lower part, an inlet transplanting mechanism is arranged outside the preloading mounting plate, a rotating centering alignment mechanism is arranged on the preloading mounting plate, a multi-medium switching spraying device is arranged in the spraying layer and corresponds to the rotating centering alignment mechanism, the multi-medium switching spraying device comprises a lifting rotating jig and a cleaning mechanism, a spraying cavity is arranged outside the lifting rotating jig and the cleaning mechanism, a plurality of gas-liquid spraying modules are uniformly distributed around the spraying cavity, a process chemical liquid spraying mechanism is arranged between every two gas-liquid spraying modules, and a clean air introduction mechanism is sleeved on the spraying cavity in a lifting mode. The application relates to the technical field of semiconductor spraying devices.

Description

Technical Field

[0001] This invention relates to the field of semiconductor spraying equipment technology, and in particular to a semiconductor spraying equipment with multi-media switching. Background Technology

[0002] As semiconductor manufacturing processes advance towards finer nodes, the requirements for cleaning and surface treatment of critical components such as photomasks are becoming increasingly stringent. In existing technologies, semiconductor spraying equipment is widely used in the wet cleaning process of photomasks. It removes contaminants, particles, or modifies the surface by spraying chemical solutions or ultrapure water onto the workpiece surface. To meet the demands of complex process sequences, support multiple media switching, and process both sides of the workpiece, the industry is continuously optimizing the functional integration, processing accuracy, and anti-contamination capabilities of spraying equipment.

[0003] However, existing multi-media spraying equipment often faces the following continuity issues when pursuing functional integration: the equipment layout makes the transfer path of workpieces between multiple stations such as loading and alignment, front spraying, flipping, and back spraying complex, which not only increases the equipment's footprint and cycle time, but also increases the risk of collision and contamination caused by multiple robotic arm transfers and positioning; at the same time, the fixtures used to fix workpieces for rotating spraying mostly adopt mechanical clamping or vacuum adsorption methods. Mechanical clamping poses a risk of damaging the workpiece edges and may block the spraying area, while traditional vacuum adsorption channels are easily invaded by process liquids, leading to contamination or blockage, and making maintenance and cleaning difficult; in addition, when integrating spraying pipelines and switching mechanisms of multiple media in a narrow spraying chamber, how to avoid cross-contamination between different media, achieve efficient online cleaning of the chamber and the back of the workpiece after spraying, and ensure the stability of the cleanliness of the workpiece environment during the process remains a serious challenge for existing designs.

[0004] Therefore, the inventors urgently need a semiconductor spraying device that can integrate efficient alignment, stable adsorption, multi-media sequential spraying, front and back surface treatment, and online cleaning functions, and can minimize the risk of cross-contamination and workpiece damage, in order to solve the above problems. Summary of the Invention

[0005] To address the shortcomings of the prior art, this invention provides a semiconductor spraying device with multi-media switching, aiming to solve the problems of long workpiece transport paths and high contamination risks caused by the dispersion of functional modules in existing semiconductor spraying devices, the easy damage to workpieces or contamination of traditional fixtures by them, and the difficulty of cross-contamination control and online cleaning in multi-media spraying environments.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a semiconductor spraying device with multi-media switching, comprising a sealed body, a preload mounting plate disposed in the middle of the sealed body, the preload mounting plate dividing the sealed body into an upper feeding layer and a lower spraying layer, a feeding transfer mechanism disposed on the outer side of the preload mounting plate, a rotation centering and alignment mechanism disposed on the preload mounting plate, and a multi-media switching spraying device disposed in the spraying layer corresponding to the rotation centering and alignment mechanism, the multi-media switching spraying device comprising a lifting and rotating fixture and a cleaning mechanism, a spraying cavity covered by the lifting and rotating fixture and the cleaning mechanism, a plurality of gas-liquid spraying modules evenly distributed around the spraying cavity, a process chemical liquid spraying mechanism spaced between every two gas-liquid spraying modules, and a clean air introduction mechanism lifted and sleeved in the spraying cavity.

[0007] Based on the above, the beneficial effects of a multi-media switching semiconductor spraying device are that it solves the problems of long workpiece transport paths and high contamination risks caused by the dispersed functional modules in existing semiconductor spraying devices, the easy damage to workpieces or contamination of traditional fixtures by traditional fixtures, and the difficulty of cross-contamination control and online cleaning in multi-media spraying environments; mainly reflected in:

[0008] 1. This invention divides the sealing body into an upper feeding layer and a lower spraying layer by using a preloaded mounting plate. A feeding transfer mechanism is set on one side of the feeding layer, a rotating centering and alignment mechanism is set on the preloaded mounting plate, and a multi-media switching spraying device is set in the spraying layer. This layout allows the functions of workpiece transfer, alignment, spraying and cleaning to be highly integrated in a compact vertical space. This enables the entire process of workpiece from feeding to completion of front or double-sided treatment to be completed continuously inside the sealing body, thereby greatly shortening the transmission path of workpiece between different functional modules and reducing the risk of collision and contamination caused by long distance and multiple transfers.

[0009] 2. The lifting and rotating fixture and cleaning mechanism of the present invention utilize the special aerodynamic contour of its internal aerodynamic disc fixture to form a low-pressure zone above the working surface when rotating at high speed, so as to stably adsorb the workpiece in a non-contact manner. This replaces the traditional mechanical clamping or vacuum adsorption channel, and realizes that the workpiece can be firmly fixed without physical contact or opening adsorption channels that are easily contaminated during the spraying process. This completely avoids the risk of mechanical damage to the edge of the workpiece by the fixture, and eliminates the problem of fixture contamination and blockage caused by process liquid intrusion into traditional vacuum channels.

[0010] 3. This invention integrates and partitions several gas-liquid spray modules, spaced process chemical liquid spray mechanisms, and a lifting and sleeved clean air introduction mechanism within a multi-media switching spray device. These modules and mechanisms are respectively responsible for spraying and cleaning media (such as carbon dioxide pure water, high-temperature pure water, etc.), process chemical liquids, and introducing clean air. Through the lifting action and the isolation design of the spray cavity, the orderly switching and physical isolation of different media sprays in time and space are achieved. At the same time, combined with the lifting and rotating fixture and the lifting inner wall cleaning plate and the gas-liquid spray head on the inner wall of the cavity included in the cleaning mechanism, online cleaning of the inner wall of the spray cavity is achieved during equipment maintenance, thereby effectively controlling cross-contamination in the multi-media spray environment and providing efficient online cleaning capabilities.

[0011] Furthermore, the spray chamber includes an upper gas-liquid inlet chamber and a lower spray chamber. Several gas-liquid spray modules are evenly embedded around the gas-liquid inlet chamber. The gas-liquid spray modules are connected to an external gas-liquid source through gas-liquid hoses. A process chemical liquid pipeline extension inlet extending vertically is provided between every two gas-liquid spray modules on the gas-liquid inlet chamber. Each process chemical liquid spray mechanism corresponds to one process chemical liquid pipeline extension inlet.

[0012] Based on the above, the beneficial effects of the gas-liquid inlet chamber are that, together with the lower spray chamber, they form spray chambers with different zones, achieving spatial separation between the media introduction and distribution area and the workpiece spraying operation area, which is beneficial for the pre-distribution and mixing of the media; the beneficial effects of the spray chamber are that, as the lower working area, it accommodates the lifting and rotating fixture, cleaning mechanism, and workpiece, and collects the waste liquid after spraying, achieving closed spraying treatment of the workpiece and centralized diversion of waste liquid; the beneficial effects of the gas-liquid spraying module are that it is uniformly embedded around the gas-liquid inlet chamber and connected to the external gas-liquid source through a gas-liquid hose, realizing the spraying of carbon dioxide pure water, high-temperature pure water, room-temperature pure water, or dry nitrogen into the spray chamber from multiple directions. The system utilizes various gas and liquid media, providing uniform and switchable cleaning and drying functions. The beneficial effect of the process chemical liquid pipeline inlet is that it is positioned between every two gas-liquid spray modules in the gas-liquid inlet chamber and extends vertically, providing a vertically sliding channel for the spray pipe structure of the process chemical liquid spraying mechanism. This achieves spatial spacing and physical isolation between the process chemical liquid spray pipeline and the gas-liquid spray modules. The beneficial effect of the process chemical liquid spraying mechanism is that, through its spray pipe structure sliding vertically within the process chemical liquid pipeline inlet, it enables the independent and precise delivery of different process chemical liquids to the workpiece surface within the spray chamber for spraying, supporting multi-step and differentiated chemical treatment processes.

[0013] Furthermore, the process chemical liquid spraying mechanism includes a lifting mounting frame, a lifting electric cylinder mounted on the lifting mounting frame, a spray displacement direct drive assembly mounted on the upper output end of the lifting electric cylinder, and a spray pipe structure mounted on the output end of the spray displacement direct drive assembly. The spray pipe structure is vertically slidably adapted to the inlet of the process chemical liquid pipeline, and the spray pipe structure is connected to the external process chemical liquid output equipment through a liquid hose.

[0014] Based on the above, the beneficial effects of the lifting mounting frame are: the installation of lifting electric cylinders; the beneficial effects of the lifting electric cylinders are: precise adjustment of the overall height of the spray pipe structure, thereby adapting to different process requirements or workpiece position spray height requirements; the beneficial effects of the spray displacement direct drive component are: driving the spray pipe structure to make precise extension and retraction displacement in the horizontal direction, so that it can be aligned with and pass through the process chemical liquid pipeline inlet to enter the spray chamber, or exit from it; the beneficial effects of the spray pipe structure are: accurately delivering specific process chemical liquids to the workpiece surface in the spray chamber during spraying operations, and exiting to isolate the chamber environment when not in operation.

[0015] Furthermore, the lifting and rotating fixture and cleaning mechanism include a lifting and rotating fixture base plate, a lifting direct-drive spray assembly, and a rotating fixture assembly disposed on the upper output end of the lifting direct-drive spray assembly. The lifting direct-drive spray assembly includes a lead screw motor installed at the bottom of the lifting and rotating fixture base plate, an inner wall cleaning disc lifting frame threaded onto the lead screw at the output end of the lead screw motor, and an inner wall cleaning disc fixed to the upper end of the inner wall cleaning disc lifting frame. The inner wall cleaning disc lifting frame is slidably fitted onto a vertical frame plate of the lifting and rotating fixture base plate. The inner wall cleaning disc is circumferentially provided with a plurality of cavity inner wall gas-liquid spray heads. The bottom end of the inner wall cleaning disc is connected to an external cleaning liquid device through a gas-liquid hose. The rotating fixture assembly includes a rotating motor installed at the center of the bottom of the inner wall cleaning disc and an aerodynamic disc fixture located above the inner wall cleaning disc. The output end of the rotating motor passes through the inner wall cleaning disc and is connected to the aerodynamic disc fixture.

[0016] Based on the above, the beneficial effects of the lifting and rotating fixture base plate are that it provides a stable installation foundation and support for the lifting direct-drive spray assembly and the rotating fixture assembly; the beneficial effect of the screw motor is that it provides a smooth and precise linear drive force to control the lifting position and speed of the inner wall cleaning disc and the rotating fixture assembly; the beneficial effect of the inner wall cleaning disc lifting frame is that it is threaded onto the screw of the screw motor and slidably fitted onto the vertical frame plate of the lifting and rotating fixture base plate, with the inner wall cleaning disc fixed at its upper part, thus realizing the conversion of the rotational motion of the screw motor into stable vertical linear motion, and reliably transmitting the lifting power to the inner wall cleaning disc and the rotating fixture assembly connected thereto; the beneficial effect of the inner wall cleaning disc is that it serves as the core carrier for both cleaning and rotational drive functions, allowing the spray head to... The cleaning spray chamber's inner wall also provides support and a rotational power interface for the rotating fixture. The beneficial effect of the gas-liquid spray head on the inner wall is that it is circumferentially positioned on the inner wall cleaning disc and connected to the external cleaning liquid equipment, enabling comprehensive and efficient online spray cleaning of the inner wall of the spray chamber during equipment maintenance, as the inner wall cleaning disc rises and falls. The beneficial effect of the rotating motor is that it is installed at the center of the bottom of the inner wall cleaning disc, and its output end passes through the inner wall cleaning disc and connects to the aerodynamic disc fixture, enabling the aerodynamic disc fixture to rotate at high speed to generate non-contact adsorption force to fix the workpiece. The beneficial effect of the aerodynamic disc fixture is that it forms a low-pressure zone above its working surface during high-speed rotation, thereby stably holding the workpiece for spraying operations through non-contact adsorption.

[0017] Furthermore, the aerodynamic disc fixture is provided with a ring structure, a positioning support column structure disposed around the ring structure, a support structure located in the middle, and a plurality of cantilever rods connecting the support structure and the ring structure. The cantilever rods are provided with a working surface facing the product side. The contour of the working surface includes a high curvature leading area located at the front in the rotation direction and a low curvature smooth area connected to the high curvature leading area. The curvature radius of the high curvature leading area is smaller than the curvature radius of the low curvature smooth area, and a plurality of grooves are arrayed on the low curvature smooth area.

[0018] Based on the above, the beneficial effects of the ring structure are: providing main structural support and shape positioning for the entire fixture; the beneficial effect of the positioning support column structure is: providing initial, unobstructed positioning and support for the product when the aerodynamic disc fixture rises to receive it, ensuring smooth product transfer; the beneficial effect of the support structure is: serving as the core force-bearing and transmission hub of the fixture, transmitting the rotational power of the rotary motor from the center to the surrounding cantilever rods; the beneficial effect of the cantilever rods is: forming an adsorption gap with the bottom surface of the product through the working surface; the beneficial effect of the working surface is: located on the side of the cantilever rod facing the product, its contour includes a high-curvature leading area and a low-curvature smooth area, realizing smooth flow during fixture rotation. The airflow on its surface is guided by a specific contour; the beneficial effect of the high curvature leading zone is that it is located at the front of the working surface in the direction of rotation, and its radius of curvature is smaller than that of the low curvature smooth zone, which effectively separates the incoming flow in front during high-speed rotation and creates conditions for subsequent airflow acceleration; the beneficial effect of the low curvature smooth zone is that it is connected to the high curvature leading zone, and its radius of curvature is larger than that of the leading zone, which enables the airflow flowing over its surface to be accelerated and maintain a smooth flow attached to the wall; the beneficial effect of the grooves is that they are arrayed on the low curvature smooth zone, which increases the turbulence intensity of the airflow flowing over its surface, thereby promoting the formation and stabilization of the low-pressure zone above the working surface.

[0019] Furthermore, the upper perimeter of the inner wall cleaning tray is provided with anti-pollution spray heads on the back of the product.

[0020] Based on the above, the beneficial effect of the anti-contamination spray head on the back of the product is to prevent the process chemical liquid from contaminating the back of the product online and in real time while the front of the product is being processed, thus ensuring the processing quality and yield of the product.

[0021] Furthermore, the preload mounting plate has a placement opening in the middle corresponding to the upper opening of the spray chamber. The rotary alignment mechanism includes an alignment placement frame located near the feeding and transfer mechanism, rotary alignment components symmetrically arranged on both sides of the placement opening, and alignment sensor components symmetrically arranged on the other two sides of the placement opening. The rotary alignment component includes a forward-pushing direct-drive positioning module, a product flipping motor located at the output end of the forward-pushing direct-drive positioning module, a dry-wet separation motor located at the output end of the product flipping motor, and a double-headed fixture structure located at the output end of the dry-wet separation motor. The double-headed fixture structure includes... Two dry product fixture heads and a wet product fixture head are positioned at a 90-degree angle to each other. The output end of the dry-wet separation motor is used to switch between the dry product fixture head and the wet product fixture head. The alignment and placement frame includes a column mounting platform and column alignment groups set at the four corners of the column mounting platform. Each column alignment group includes two alignment columns. The upper end of each alignment column is provided with an alignment stepped protrusion. In the same column alignment group, one corner of the product is positioned by the two alignment columns and the corresponding two alignment stepped protrusions. Two alignment sensor assemblies are arranged opposite each other and are used to detect the horizontal posture of the product when the rotating alignment assembly clamps the product.

[0022] Based on the above, the beneficial effects of the placement opening are: it provides a vertical channel for transferring products between the rotary alignment mechanism and the spray chamber; the beneficial effects of the rotary alignment mechanism are: it integrates all alignment functions—receiving, coarse positioning, fine clamping, horizontal detection, and flipping preparation—within a compact space; the beneficial effects of the alignment placement rack are: it smoothly transitions products from the transfer mechanism to the precise alignment station; the beneficial effects of the rotary alignment component are: it clamps and centers products from both sides, and can switch fixture heads and complete product flipping according to process requirements; the beneficial effects of the alignment sensor component are: it performs non-contact detection of the product's horizontal attitude during clamping, ensuring placement accuracy; the beneficial effects of the forward-push direct-drive positioning module are: it drives the double-head fixture structure to perform linear reciprocating motion to complete product clamping and releasing; the beneficial effects of the product flipping motor are: it drives the double-head fixture structure at its end and the clamped product to flip 180 degrees to meet the requirements of double-sided product processing; the beneficial effects of the dry-wet separation motor are: it drives the double-head fixture structure to rotate and switch. The dual-head fixture structure allows for the selection of either a dry or wet product fixture head to address different product conditions. The dual-head fixture structure integrates two different types of fixture heads in a compact design, allowing for switching between them to accommodate clamping needs in both dry and wet states, avoiding cross-contamination. The dry product fixture head provides stable and contamination-free clamping in dry environments, while the wet product fixture head provides stable clamping in humid environments, minimizing impact or contamination on the product's surface liquid film. The column mounting platform provides a stable and level base for precise angular positioning of the product. The column alignment assembly provides coordinated positioning and support for the product's four corners from the bottom. The alignment column, in conjunction with the alignment stepped protrusion, limits the product's edges vertically. The alignment stepped protrusion, working together with the alignment column, forms a positioning structure to hold the product's corners, enabling rapid and accurate pre-positioning.

[0023] Furthermore, the clean air introduction mechanism includes an introduction cavity adapted to the inner wall of the spray chamber, a clean air introduction frame disposed on one side of the spray chamber, and a clean air introduction lifting electric cylinder disposed on the clean air introduction frame. The output end of the clean air introduction lifting electric cylinder is connected to the introduction cavity. A clean air filter is disposed on the top of the sealed body. Before the spraying operation, the clean air introduction lifting electric cylinder drives the introduction cavity to rise, so that the upper end of the introduction cavity is connected to the output end of the clean air filter.

[0024] Based on the above, the beneficial effects of the inlet cavity are that a closed channel connected to the top clean air source can be quickly established in the upper part of the spray cavity before the spraying operation, thereby directly and efficiently introducing clean air into the spraying operation area; the beneficial effect of the clean air inlet frame is that it can install a clean air inlet lifting cylinder; the beneficial effect of the clean air inlet lifting cylinder is that it can provide precise linear driving force to control the inlet cavity's rising docking before the spraying operation and its lowering reset after the operation; the beneficial effect of the clean air filter is that it can continuously provide clean air and guide the clean air downward into the spraying cavity through the inlet cavity, creating and maintaining a local high cleanliness processing environment for the workpiece.

[0025] Furthermore, the feeding and transplanting mechanism includes a transplanting robotic arm and a product placement box, and the output end of the transplanting robotic arm is provided with a product lifting frame.

[0026] Based on the above, the beneficial effects of the transplanting robotic arm are that it automatically and accurately transplants products between the product placement box and the rotating centering and alignment mechanism inside the sealed body; the beneficial effects of the product placement box are that it safely and centrally stores the products to be processed and provides an opening structure for the picking and placing operations of the transplanting robotic arm; the beneficial effects of the product lifting frame are that it directly contacts and lifts the bottom of the product, completing the picking, transporting and placing of the product in a stable and safe manner, avoiding damage to the edges or surface of the product that may be caused by clamping or adsorption methods.

[0027] Furthermore, a waste liquid discharge mechanism is connected to the bottom of the spray chamber, and a negative pressure exhaust mechanism is provided on one side of the spray chamber.

[0028] Based on the above, the beneficial effects of the waste liquid discharge mechanism are to collect and discharge various chemical waste liquids and cleaning waste liquids generated in the spray chamber in a timely and centralized manner during and after the spraying operation, keep the bottom of the spray chamber clean, and provide conditions for continuous spraying operation; the beneficial effects of the negative pressure exhaust mechanism are to actively extract and discharge the mist, steam or volatile gases generated in the spray chamber during the spraying operation, maintain a suitable negative pressure or flow environment in the chamber, prevent harmful substances from accumulating in the chamber or spreading to the outside of the equipment, and ensure process safety and stability.

[0029] To make the above features of the present invention and the objectives to be achieved clearer, the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0030] Figure 1 : This is a perspective view of the present invention;

[0031] Figure 2 : This is a perspective view of the present invention from another angle;

[0032] Figure 3: This is a perspective view of the transplanting robotic arm of the present invention;

[0033] Figure 4 : This is a perspective view of the column mounting platform of the present invention;

[0034] Figure 5 : This is a perspective view of the rotational alignment mechanism of the present invention;

[0035] Figure 6 : This is a perspective view of the multi-media switching spray device of the present invention;

[0036] Figure 7 : This is a perspective view of the multi-media switching spray device of the present invention from another angle;

[0037] Figure 8 : This is a schematic diagram of the lifting and rotating fixture and cleaning mechanism of the present invention;

[0038] Figure 9 : This is a schematic diagram of the internal structure of the rotary fixture assembly of the present invention;

[0039] Figure 10 : This is a schematic diagram of the aerodynamic disc fixture of the present invention;

[0040] Figure 11 : This is a cross-sectional view of the cantilever rod of the present invention;

[0041] Figure 12 : This is a schematic diagram of the clean air introduction mechanism of the present invention;

[0042] Figure 13 This is a partial schematic diagram of the multi-media switching spray device of the present invention;

[0043] Figure 14 : This is a schematic diagram of the chemical liquid spraying mechanism of the present invention.

[0044] Reference numerals: 1-Sealed body, 11-Feeding layer, 12-Spray layer, 13-Clean air filter, 14-Preload mounting plate, 141-Placement opening, 2-Feeding and transplanting mechanism, 21-Transplanting robotic arm, 211-Product lifting frame, 22-Product placement box, 3-Rotational centering and alignment mechanism, 31-Alignment placement frame, 311-Column mounting platform, 312-Column alignment assembly, 3121-Alignment column, 3122-Alignment stepped protrusion, 32-Rotational centering Components: 321-Forward push direct drive positioning module, 322-Product flipping motor, 323-Dry and wet separation motor, 324-Dual-head fixture structure, 3241-Dry product fixture head, 3242-Wet product fixture head, 33-Alignment sensor assembly, 4-Multi-media switching spray device, 41-Lifting and rotating fixture and cleaning mechanism, 411-Lifting and rotating fixture base plate, 412-Lifting direct drive spray assembly, 4121-Screw motor, 4122-Inner wall cleaning disc lifting frame, 4123 - Inner wall cleaning disc, 41231- Cavity inner wall gas-liquid spray head, 41232- Product back anti-contamination spray head, 413- Rotary jig assembly, 4131- Rotary motor, 4132- Aerodynamic disc jig, 41321- Ring structure, 41322- Positioning support column structure, 41323- Support structure, 41324- Cantilever rod, 41325- High curvature leading area, 41326- Low curvature smooth area, 41327- Groove, 42- Spray cavity, 421-Gas-liquid inlet chamber, 4211-Process chemical liquid pipeline inlet, 422-Spray chamber, 43-Gas-liquid spray module, 44-Process chemical liquid spray mechanism, 441-Lifting mounting frame, 442-Lifting electric cylinder, 443-Spray displacement direct drive assembly, 444-Spray pipe structure, 45-Clean air inlet mechanism, 451-Inlet chamber, 452-Clean air inlet frame, 453-Clean air inlet lifting electric cylinder, 5-Waste liquid discharge mechanism, 6-Negative pressure exhaust mechanism. Detailed Implementation

[0045] See Figures 1-12 As shown,

[0046] This invention provides a semiconductor spraying device with multi-media switching, including a sealed body 1. A preload mounting plate 14 is provided in the middle of the sealed body 1, which divides the sealed body 1 into an upper feed layer 11 and a lower spray layer 12. A feed transfer mechanism 2 is provided on the outside of the preload mounting plate 14. A rotation centering and alignment mechanism 3 is provided on the preload mounting plate 14. A multi-media switching spraying device 4 is provided in the spray layer 12 corresponding to the rotation centering and alignment mechanism 3. The multi-media switching spraying device 4 includes a lifting and rotating fixture and cleaning mechanism 41, a spraying cavity 42 covering the lifting and rotating fixture and cleaning mechanism 41, a plurality of gas-liquid spraying modules 43 evenly distributed around the spraying cavity 42, a process chemical liquid spraying mechanism 44 spaced between every two gas-liquid spraying modules 43, and a clean air introduction mechanism 45 lifted and sleeved in the spraying cavity 42.

[0047] In this embodiment, the spray chamber 42 includes an upper gas-liquid inlet chamber 421 and a lower spray chamber 422. A plurality of gas-liquid spray modules 43 are evenly embedded around the gas-liquid inlet chamber 421. The gas-liquid spray modules 43 are connected to an external gas-liquid source through gas-liquid hoses. A process chemical liquid pipeline inlet 4211 extending vertically is provided between every two gas-liquid spray modules 43 on the gas-liquid inlet chamber 421. Each process chemical liquid spray mechanism 44 corresponds to one process chemical liquid pipeline inlet 4211.

[0048] In this embodiment, the process chemical liquid spraying mechanism 44 includes a lifting mounting frame 441, a lifting electric cylinder 442 disposed on the lifting mounting frame 441, a spray displacement direct drive assembly 443 disposed on the upper output end of the lifting electric cylinder 442, and a spray pipe structure 444 disposed on the output end of the spray displacement direct drive assembly 443. The spray pipe structure 444 is vertically slidably adapted to the process chemical liquid pipeline inlet 4211. The spray pipe structure 444 is connected to an external process chemical liquid output device through a liquid hose and is used to spray the upper surface of the product.

[0049] In this embodiment, the lifting and rotating fixture and cleaning mechanism 41 includes a lifting and rotating fixture base plate 411, a lifting direct-drive spray assembly 412, and a rotating fixture assembly 413 disposed on the upper output end of the lifting direct-drive spray assembly 412. The lifting direct-drive spray assembly 412 includes a lead screw motor 4121 mounted on the bottom of the lifting and rotating fixture base plate 411, an inner wall cleaning disc lifting frame 4122 threaded onto the lead screw at the output end of the lead screw motor 4121, and an inner wall cleaning disc 4123 fixed to the upper end of the inner wall cleaning disc lifting frame 4122. The inner wall cleaning disc 4123 is slidably fitted onto the vertical frame plate of the lifting and rotating fixture base plate 411. A plurality of cavity inner wall air-liquid spray heads 41231 are arranged circumferentially. The bottom end of the inner wall cleaning disc 4123 is connected to the external cleaning liquid equipment through an air-liquid hose. The rotating fixture assembly 413 includes a rotating motor 4131 installed at the bottom center of the inner wall cleaning disc 4123 and an aerodynamic disc fixture 4132 located above the inner wall cleaning disc 4123. The output end of the rotating motor 4131 passes through the inner wall cleaning disc 4123 and is connected to the aerodynamic disc fixture 4132.

[0050] In this embodiment, the aerodynamic disc fixture 4132 is provided with a ring structure 41321, positioning support column structures 41322 disposed around the ring structure 41321, a support structure 41323 located in the middle, and a plurality of cantilever rods 41324 connecting the support structure 41323 and the ring structure 41321. Each cantilever rod 41324 has a working surface facing the product. The contour of the working surface includes a high-curvature leading area 41325 located at the front in the rotation direction and a connecting point to the product. The high-curvature leading region 41325 has a low-curvature smooth region 41326, wherein the radius of curvature of the high-curvature leading region 41325 is smaller than the radius of curvature of the low-curvature smooth region 41326. The high-curvature leading region 41325 is used to effectively divide the airflow during rotation. The low-curvature smooth region 41326 has a plurality of grooves 41327 arranged in an array. The low-curvature smooth region 41326 accelerates the airflow. The plurality of grooves 41327 are used to increase gas turbulence, so that a low-pressure area is formed above the working surface.

[0051] In this embodiment, the high-curvature leading zone 41325 is defined as a section with a small radius of curvature and a relatively rapid change in curvature in the contour of the working surface. Its core function is to strongly divide the attached airflow in front when the fixture rotates at high speed, and guide the airflow to quickly transition to the working surface. The low-curvature smooth zone 41326 is defined as a section connected to the high-curvature leading zone 41325, with a larger radius of curvature and a gently extending contour. Its function is to accelerate the airflow in the attached state, forming a high-speed airflow layer that is closely attached to the working surface. The grooves 41327 arrayed on the low-curvature smooth zone 41326 are designed to break the boundary layer of the smooth surface and significantly increase the turbulence intensity of the airflow. The enhanced turbulence can more effectively carry the airflow along the direction perpendicular to the working surface, thereby forming and maintaining a stable low-pressure zone in the narrow space between the working surface of the cantilever rod 41324 and the bottom surface of the product. The pressure difference generated by this low-pressure zone is the non-contact clamping force for adsorbing the product.

[0052] In this embodiment, the upper periphery of the inner wall cleaning tray 4123 is provided with a product back anti-contamination spray head 41232, which is used to prevent the process chemical liquid from contaminating the back of the product when spraying the upper surface of the product with process chemical liquid.

[0053] In this embodiment, the preload mounting plate 14 has a placement opening 141 in the middle corresponding to the upper opening of the spray chamber 42. The rotary alignment mechanism 3 includes an alignment placement frame 31 disposed near the feeding and transfer mechanism 2, rotary alignment components 32 symmetrically disposed on both sides of the placement opening 141, and alignment sensor components 33 symmetrically disposed on the other two sides of the placement opening 141. The rotary alignment component 32 includes a forward-pushing direct-drive positioning module 321, a product flipping motor 322 disposed at the output end of the forward-pushing direct-drive positioning module 321, a dry-wet separation motor 323 disposed at the output end of the product flipping motor 322, and a double-headed fixture structure 324 disposed at the output end of the dry-wet separation motor 323. The double-headed fixture structure 324 includes two fixtures that are 90 degrees apart. The dry product fixture head 3241 and wet product fixture head 3242 are at an angle. The output end of the dry and wet separation motor 323 is used to switch between the dry product fixture head 3241 and the wet product fixture head 3242. The alignment placement frame 31 includes a column mounting platform 311 and column alignment groups 312 set at the four corners of the column mounting platform 311. The column alignment group 312 includes two alignment columns 3121. Each alignment column 3121 has an alignment stepped protrusion 3122 at its upper end. In the same column alignment group 312, one corner of the product is positioned by the two alignment columns 3121 and the corresponding two alignment stepped protrusions 3122. The two alignment sensor assemblies 33 are arranged opposite each other and are used to detect the horizontal posture of the product when the rotating centering assembly 32 clamps the product.

[0054] In this embodiment, the clean air introduction mechanism 45 includes an introduction cavity 451 adapted to the inner wall of the spray cavity 42, a clean air introduction frame 452 disposed on one side of the spray cavity 42, and a clean air introduction lifting cylinder 453 disposed on the clean air introduction frame 452. The output end of the clean air introduction lifting cylinder 453 is connected to the introduction cavity 451. A clean air filter 13 is disposed on the top of the sealed body 1. Before the spraying operation, the clean air introduction lifting cylinder 453 drives the introduction cavity 451 to rise, so that the upper end of the introduction cavity 451 is connected to the output end of the clean air filter 13.

[0055] In this embodiment, the clean air filter 13 is an ultra-low penetration air (ULPA) filter, which can provide ultra-clean air reaching ISO Class 1 or better cleanliness level, creating a stable environment with local ultra-high cleanliness for spraying operations.

[0056] In this embodiment, the feeding and transplanting mechanism 2 includes a transplanting robotic arm 21 and a product placement box 22, and the output end of the transplanting robotic arm 21 is provided with a product lifting frame 211.

[0057] In this embodiment, the product placement box 22 is specifically a standard mechanical interface (SMIF) box opener, which is specially designed to carry and store semiconductor photomask products to be processed, ensuring that the products are in a controlled microenvironment before and after transplantation to prevent external contamination.

[0058] In this embodiment, a waste liquid discharge mechanism 5 is connected to the bottom of the spray chamber 422, and a negative pressure exhaust mechanism 6 is provided on one side of the spray chamber 422.

[0059] In summary, the specific embodiments of the present invention are as follows:

[0060] At the start of the work, the transplanting robotic arm 21 extends into the product placement box 22 through the product lifting frame 211 at its output end, lifts and removes the product, and then transfers the product to the alignment placement frame 31. The four corners of the product are positioned by four sets of column alignment groups 312. After positioning, the transplanting robotic arm 21 continues to lift the product and move it to the top of the rotating centering components 32 symmetrically set on both sides of the placement opening 141 and then descends. Next, the product flipping motor 322 drives the double-headed fixture structure 324 to rotate to a horizontal clamping state. At the same time, the dry and wet separation motor 323 drives the double-headed fixture structure 324 to make the dry product fixture head 3241 face the product. The forward push direct drive positioning modules 321 of the two rotating centering components 32 are driven synchronously, and the product is clamped by the dry product fixture head 3241. The transplanting robotic arm 21 then resets.

[0061] At the same time, the screw motor 4121 of the lifting direct drive spray assembly 412 starts, driving the inner wall cleaning disc lifting frame 4122 to rise, thereby driving the inner wall cleaning disc 4123 and the rotating fixture assembly 413 fixed thereon to rise together, until the four positioning support column structures 41322 of the aerodynamic disc fixture 4132 are respectively supported under the four corners of the product. Then, the two rotating centering components 32 are released and reset, and the screw motor 4121 drives the inner wall cleaning disc lifting frame 4122 to fall, so that the aerodynamic disc fixture 4132 carrying the product is lowered to the spray position in the spray chamber 422.

[0062] Before the spraying operation begins, the clean air introduction lifting cylinder 453 of the clean air introduction mechanism 45 drives the introduction chamber 451 to rise, so that its upper end aligns with the output end of the clean air filter 13 on the top of the sealed body 1. Subsequently, the rotary motor 4131 of the rotary fixture assembly 413 drives the aerodynamic disc fixture 4132 to rotate at high speed. The special contour and grooves 41327 of the working surface of its cantilever 41324 generate an adsorption effect to stably adsorb the product. At the same time, according to the preset process sequence, the required process chemical liquid spraying mechanism 4... 4. Upon starting operation, the spray displacement direct drive component 443 drives the spray pipe structure 444 through the process chemical liquid pipeline inlet 4211 into the spray chamber 422. The lifting electric cylinder 442 adjusts the spray height to spray the upper surface of the product with a specific chemical liquid. During the process, the gas-liquid spray module 43 can spray carbon dioxide pure water, high temperature pure water, room temperature pure water, or dry nitrogen and other media according to instructions. Simultaneously, the anti-contamination spray heads 41232 around the upper part of the inner wall cleaning disc 4123 spray protective liquid on the back of the product to prevent it from being contaminated.

[0063] After the top surface of the product is sprayed, if the product does not need to be sprayed on the back, the gas-liquid spray module 43 sprays dry nitrogen to dry the product. Then, each spray pipe structure 444 resets and exits the spray chamber 422. Next, the screw motor 4121 drives the inner wall cleaning disc lifting frame 4122 to rise, while the clean air introduction lifting cylinder 453 drives the introduction chamber 451 to fall and reset, so that the aerodynamic disc fixture 4132 carries the product to rise between the rotating centering components 32. The dry and wet separation motor 323 of the rotating centering components 32 still selects the dry product fixture head 3241 to clamp the product. Finally, the transfer robotic arm 21 moves the product back into the product placement box 22.

[0064] If the product requires spraying on its back side, after the top surface spraying is completed and the spray pipe structure 444 is reset, the lead screw motor 4121 drives the inner wall cleaning disc lifting frame 4122 to rise, while the clean air introduction lifting cylinder 453 drives the introduction cavity 451 to descend and reset, allowing the aerodynamic disc fixture 4132 to carry the product upward. The dry and wet separation motor 323 of the rotating centering component 32 then switches to the wet product fixture head 3242 to clamp the product, and then the product flipping motor 322 drives the product to flip 180 degrees so that its back side faces upward. The above-mentioned receiving, descending, adsorption, and multi-media spraying process is then repeated to complete the treatment of the back side of the product. In addition, during equipment maintenance, the inner wall cleaning disc 4123 and the gas-liquid spray head 41231 on the inner wall of the cavity can be moved up and down in the spray cavity 422 by driving the inner wall cleaning disc lifting frame 4122 to clean the inner wall of the cavity.

[0065] The above description is merely the optimal embodiment of the present invention and is not intended to limit the present invention. Any modifications or substitutions made by those skilled in the art without departing from the essence and scope of protection of the present invention should also be within the scope of protection of the present invention.

Claims

1. A multi-medium switching semiconductor shower device comprising a sealed machine body (1), characterized in that: The middle part of the sealing machine body (1) is provided with a preloading mounting plate (14), which divides the sealing machine body (1) into an upper material feeding layer (11) and a lower spraying layer (12), the outer side of the preloading mounting plate (14) is provided with a material feeding transplanting mechanism (2), the preloading mounting plate (14) is provided with a rotary centering alignment mechanism (3), the spraying layer (12) is provided with a multi-medium switching spraying device (4) corresponding to the rotary centering alignment mechanism (3), the multi-medium switching spraying device (4) comprises a lifting rotary jig and cleaning mechanism (41), a spraying cavity (42) covering the outside of the lifting rotary jig and cleaning mechanism (41), a plurality of gas-liquid spraying modules (43) uniformly distributed around the spraying cavity (42), a process chemical liquid spraying mechanism (44) arranged between every two gas-liquid spraying modules (43), and a clean air introduction mechanism (45) sleeved on the spraying cavity (42). The spraying cavity (42) comprises a gas-liquid introduction cavity (421) at the upper part and a spraying cavity (422) at the lower part, a plurality of gas-liquid spraying modules (43) are uniformly embedded around the gas-liquid introduction cavity (421), the gas-liquid spraying modules (43) are connected with external gas-liquid sources through gas-liquid hoses, process chemical liquid pipeline extension openings (4211) extending in the vertical direction are arranged between every two gas-liquid spraying modules (43) on the gas-liquid introduction cavity (421), and each process chemical liquid spraying mechanism (44) corresponds to one process chemical liquid pipeline extension opening (4211).

2. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The process chemical liquid spraying mechanism (44) comprises a lifting mounting frame (441), a lifting electric cylinder (442) arranged on the lifting mounting frame (441), a spraying displacement direct drive assembly (443) arranged on the upper output end of the lifting electric cylinder (442), and a spraying pipe structure (444) arranged on the output end of the spraying displacement direct drive assembly (443), the spraying pipe structure (444) is vertically slidably fitted in the process chemical liquid pipeline extension opening (4211), and the spraying pipe structure (444) is connected with external process chemical liquid output equipment through a liquid pipeline hose.

3. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The lifting rotary jig and cleaning mechanism (41) comprises a lifting rotary jig bottom plate (411), a lifting direct-drive spraying assembly (412), and a rotary jig assembly (413) arranged on the output end of the upper part of the lifting direct-drive spraying assembly (412). The lifting direct-drive spraying assembly (412) comprises a lead screw motor (4121) mounted on the bottom of the lifting rotary jig bottom plate (411), an inner wall cleaning disc lifting frame body (4122) threaded on the output end of the lead screw motor (4121), and an inner wall cleaning disc (4123) fixed on the upper end of the inner wall cleaning disc lifting frame body (4122). The inner wall cleaning disc lifting frame body (4122) is slidingly fitted on the vertical frame plate of the lifting rotary jig bottom plate (411), and the inner wall cleaning disc (4123) is circumferentially provided with a plurality of cavity inner wall gas-liquid spraying heads (41231). The bottom end of the inner wall cleaning disc (4123) is connected to an external cleaning liquid device through a gas-liquid hose. The rotary jig assembly (413) comprises a rotary motor (4131) mounted on the bottom center of the inner wall cleaning disc (4123) and an aerodynamic disc jig (4132) located above the inner wall cleaning disc (4123). The output end of the rotary motor (4131) penetrates the inner wall cleaning disc (4123) and is connected to the aerodynamic disc jig (4132).

4. A multi-media switching semiconductor sprinkler according to claim 3, wherein: The aerodynamic disc jig (4132) is provided with a circular ring structure (41321), a positioning support column structure (41322) arranged around the circular ring structure (41321), a support structure (41323) located in the middle, and a plurality of cantilever rods (41324) connected between the support structure (41323) and the circular ring structure (41321). The cantilever rods (41324) are provided with a working surface facing the product side. The profile of the working surface comprises a high-curvature leading area (41325) located in the front of the rotation direction and a low-curvature smooth area (41326) connected to the high-curvature leading area (41325). The curvature radius of the high-curvature leading area (41325) is smaller than that of the low-curvature smooth area (41326), and a plurality of grooves (41327) are arranged on the low-curvature smooth area (41326).

5. A multi-media switching semiconductor sprinkler device according to claim 3, wherein: A product back anti-pollution spraying head (41232) is arranged around the upper end of the inner wall cleaning disc (4123).

6. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The middle part of the preloaded mounting plate (14) is provided with a placing opening (141) corresponding to the upper opening of the spray cavity (42), the rotating centering and positioning mechanism (3) comprises a positioning placing rack (31) arranged on the side close to the feeding and transplanting mechanism (2), rotating centering assemblies (32) symmetrically arranged on both sides of the placing opening (141), and positioning sensor assemblies (33) symmetrically arranged on the other two sides of the placing opening (141), the rotating centering assembly (32) comprises a front pushing straight drive positioning module (321), a product overturning motor (322) arranged on the output end of the front pushing straight drive positioning module (321), a dry-wet separation motor (323) arranged on the output end of the product overturning motor (322), and a double-head jig structure (324) arranged on the output end of the dry-wet separation motor (323), the double-head jig structure (324) comprises two dry product jig heads (3241) and wet product jig heads (3242) which are at an angle of 90 degrees with each other, the output end of the dry-wet separation motor (323) is used for switching the dry product jig head (3241) and the wet product jig head (3242), the positioning placing rack (31) comprises a column mounting platform (311) and column positioning groups (312) arranged on the four corners of the column mounting platform (311), the column positioning group (312) comprises two positioning columns (3121), the upper end of each positioning column (3121) is provided with a positioning stepped convex body (3122), in the same column positioning group (312), one corner of the product is positioned by the two positioning columns (3121) and the corresponding two positioning stepped convex bodies (3122), and the two positioning sensor assemblies (33) are oppositely arranged and used for detecting the horizontal posture of the product when the rotating centering assembly (32) clamps the product.

7. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The clean air introduction mechanism (45) comprises an introduction cavity (451) matched with the inner wall of the spray cavity (42), a clean air introduction rack (452) arranged on one side of the spray cavity (42), and a clean air introduction lifting electric cylinder (453) arranged on the clean air introduction rack (452), the output end of the clean air introduction lifting electric cylinder (453) is connected with the introduction cavity (451), and the top of the sealing machine body (1) is provided with a clean air filter (13); before the spraying operation, the clean air introduction lifting electric cylinder (453) drives the introduction cavity (451) to rise, so that the upper end of the introduction cavity (451) is connected with the output end of the clean air filter (13).

8. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The feeding and transplanting mechanism (2) comprises a transplanting mechanical arm (21) and a product placing box (22), and the output end of the transplanting mechanical arm (21) is provided with a product lifting rack (211).

9. A multi-media switching semiconductor sprinkler according to claim 1, wherein: The bottom of the spray cavity (422) is connected with a waste liquid discharge mechanism (5), and one side of the spray cavity (422) is provided with a negative pressure exhaust mechanism (6).

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