A leak self-checking vacuum evaporation machine

Abstract

The present application relates to the technical field of vacuum evaporation, in particular to a leakage self-checking type vacuum evaporation machine, which comprises an evaporation machine shell and a carrier rotating mechanism installed through the top of the evaporation machine shell, and the bottom surface of the evaporation machine shell is internally provided with an evaporation assembly; the rear side of the evaporation machine shell is fixed with a vacuum pumping chamber, the upper rear side of the vacuum pumping chamber is connected with a preliminary vacuum pumping mechanism through a vacuum pumping pipe, which is used for preliminarily pumping the working environment of the evaporation machine, and the bottom rear side of the vacuum pumping chamber is installed with a high vacuum pumping mechanism through a vacuum pumping frame, which is used for high vacuum pumping the working environment of the evaporation machine; and the outer side of the vacuum pumping pipe is installed with a self-checking assembly. The leakage self-checking type vacuum evaporation machine is convenient for leakage self-checking of the gas in the vacuum pumping pipe, timely reminds the staff to repair, avoids affecting the effect and efficiency of the later vacuum pumping, and makes the vacuum evaporation machine well manufacture the electronic special materials.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum evaporation, in particular to a leakage self-checking type vacuum evaporation machine. BACKGROUND

[0002] Electronic special materials are widely used in electronic products, information communication, national security and other fields. Electronic special materials need to use a vacuum evaporation machine during manufacturing. The vacuum evaporation machine heats materials in a high-vacuum environment, evaporates or sputters the materials onto a substrate, and then forms a thin film through condensation. Therefore, the vacuum evaporation machine is suitable for manufacturing various electronic special materials.

[0003] For example, the patent application with the title "A new vacuum evaporation machine" disclosed in the prior art with the publication number "CN120291024A" discloses an evacuation system including a preliminary evacuation device and a high-vacuum evacuation device. The preliminary evacuation device is connected to one side of the evacuation chamber and is used to preliminarily evacuate the working environment of the evaporation machine. The high-vacuum evacuation device is connected to the bottom of the evacuation chamber and is used to evacuate the working environment of the evaporation machine to a high vacuum. When preliminary evacuation is performed, the high-vacuum evacuation device is connected to the bottom of the evacuation chamber in a closed state. The high-vacuum evacuation device and the bottom of the evacuation chamber are provided with a switch valve cover. The top of the switch valve cover is connected to a telescopic cylinder for controlling the opening and closing of the switch valve cover. The switch valve cover has a structure that protrudes upward, which can shorten the stroke of the telescopic cylinder.

[0004] When the sealing ring in the connecting flange outside the pipeline connected to one side of the evacuation chamber of the vacuum evaporation machine in the prior art ages, gas will leak from the connecting flange, which not only affects the evacuation effect, but also affects the evacuation efficiency, and then affects the evaporation quality of the vacuum evaporation machine in the later stage. Therefore, the present application provides a leakage self-checking type vacuum evaporation machine to solve the above problems. SUMMARY

[0005] The present application aims to provide a leakage self-checking type vacuum evaporation machine to solve the problem that the vacuum evaporation machine on the market currently evacuates when the sealing ring in the connecting flange outside the pipeline connected to one side of the evacuation chamber of the preliminary evacuation device ages, which causes gas to leak from the connecting flange, which not only affects the evacuation effect, but also affects the evacuation efficiency, and then affects the evaporation quality of the vacuum evaporation machine in the later stage.

[0006] In order to achieve the above object, the present application provides the following technical scheme: a leakage self-checking type vacuum evaporation machine, comprising an evaporation machine shell and a carrier rotating mechanism installed through the top thereof, and the bottom surface of the evaporation machine shell is internally provided with an evaporation assembly, and the front side of the evaporation machine shell is connected with an observation door, the rear side of the evaporation machine shell is fixed with an evacuation chamber, the upper side of the rear side of the evacuation chamber is connected with a preliminary evacuation mechanism through an evacuation pipe, for preliminarily evacuating the working environment of the evaporation machine, and the bottom of the rear side of the evacuation chamber is installed with a high vacuum evacuation mechanism through an evacuation frame, for evacuating the working environment of the evaporation machine to high vacuum, and the outer side of the evacuation pipe is installed with a self-checking assembly.

[0007] Preferably, the evaporation machine shell of the evaporation assembly is provided with a water cooling assembly on the four peripheral side walls, for cooling and cooling the evaporation assembly, and the water cooling assembly is an annular manifold.

[0008] Preferably, the top of the evacuation chamber is installed with a telescopic air cylinder, the bottom of the evacuation chamber is connected with a switch valve cover in sealing and close connection, the top of the switch valve cover is connected with the output end of the telescopic air cylinder, and the telescopic air cylinder is used for controlling the opening and closing of the switch valve cover.

[0009] Preferably, the upper inner diameter of the evacuation chamber is greater than the lower inner diameter of the evacuation chamber, the switch valve cover is upwardly protruding, and the lower outer side of the switch valve cover is sealingly and closely connected with the lower inner side wall of the evacuation chamber.

[0010] Preferably, the self-checking assembly comprises a detection sealing frame, a monitoring sealing cover and a blocking block which are arranged through the outer side of the evacuation pipe, the inner sides of the detection sealing frame, the monitoring sealing cover and the blocking block are sealingly connected with the outer side of the evacuation pipe through sealing rings, the side close to the detection sealing frame of the monitoring sealing cover is installed with the blocking block, the outer side of the blocking block is sealingly connected with the inner side wall of the detection sealing frame through a sealing ring, the upper surface of the detection sealing frame is internally installed with a detection cavity, the inside of the detection cavity is connected with a first piston assembly in close connection, the upper end of the first piston assembly is connected with a limiting disc through the upper surface of the detection cavity, the diameter of the limiting disc is greater than the diameter of the upper end of the first piston assembly, and a pressure sensor is installed on the inner side wall of the detection cavity above the first piston assembly.

[0011] Preferably, the side close to the monitoring sealing cover of the detection sealing frame is provided with a containing groove and a clamping groove, the outer side of the containing groove is communicated with the clamping groove, the monitoring sealing cover is connected with the containing groove in concave-convex matching, the outer side of the monitoring sealing cover is installed with a connecting column and a pressing block, the outer side of the connecting column is fixed with the pressing block, one end of the connecting column is connected with the inside of the monitoring sealing cover through a return spring, and the other end of the connecting column is inserted into the clamping groove.

[0012] Preferably, the four walls of the connection between the vacuum chamber and the evaporation machine shell are spirally installed with cooling mechanisms, which are coil structures, for cooling the air entering the initial vacuum mechanism and the high vacuum mechanism of the evaporation machine shell to prevent the high temperature of the air from damaging the initial vacuum mechanism and the high vacuum mechanism.

[0013] Preferably, the outer side of the cooling mechanism is installed with a cooling conduction assembly.

[0014] Preferably, the cooling conduction assembly comprises a conduction plate installed on the outer side of the cooling mechanism, the conduction plate is horizontally provided with two groups, and the conduction plate is made of copper.

[0015] Preferably, the cooling conduction assembly comprises a fixed plate installed on the outer side of the cooling mechanism, the fixed plate is provided in a U shape, a rotating rod is rotatably installed on the inner side of the fixed plate, one end of the rotating rod is fixedly installed with a guide plate, a transmission gear is installed on the outer side of the rotating rod in the fixed plate, a gas storage cavity is installed in the inner side of the rear side of the left end of the fixed plate, a second piston assembly is connected to the inner side of the gas storage cavity, a rack assembly is connected to the front end of the second piston assembly, the rack assembly is meshingly connected with the transmission gear, a control pipe is installed through the rear end of the gas storage cavity, an inclined flow groove is formed in the inner side of the guide plate, and the guide plate and the fixed plate are made of copper.

[0016] Compared with the prior art, the vacuum evaporation machine with the leakage self-checking function is convenient for the leakage self-checking of the gas in the vacuum pipe, is convenient for timely reminding the staff to repair, avoids affecting the effect and efficiency of the later vacuuming, and makes the vacuum evaporation machine well manufacture the electronic special materials, and the specific content is as follows:

[0017] (1) The sealing and clamping connection of the detection sealing frame and the monitoring sealing cover is convenient for sealing and blocking the connecting flange outside the vacuum pipe, the inner side of the detection sealing frame and the monitoring sealing cover is connected with the outer side of the vacuum pipe through the sealing ring, and when the sealing ring in the connecting flange outside the vacuum pipe is aged and the gas leaks, the leaked gas is in the space between the detection sealing frame and the monitoring sealing cover, the gas enters the detection cavity in the later period, the first piston assembly is pushed upward, the first piston assembly applies a certain pressure to the pressure sensor, the alarm outside the evaporation machine shell gives an alarm, and therefore, the leakage self-checking of the gas in the vacuum pipe is convenient, the staff can be timely reminded to repair, the effect and efficiency of the later vacuuming are avoided from being affected, and the vacuum evaporation machine well manufactures the electronic special materials.

[0018] (2) The manual operation is used to take the monitoring sealing cover, and the finger is used to press the pressing block, so that the pressing block drives the connecting column to move into the monitoring sealing cover, and then the connecting column is separated from the clamping groove, so that the monitoring sealing cover is quickly separated from the detection sealing frame, and the sealing ring in the connecting flange outside the vacuumizing pipe is replaced.

[0019] (3) The cooling conduction assembly comprises a conduction plate, and the copper conduction plate can conduct heat in the surrounding air to the cooling mechanism, thereby improving the cooling efficiency and effect of the cooling mechanism.

[0020] (4) The cooling conduction assembly comprises a fixed plate and a guide plate, both of which are made of copper. The meshing connection of the rack assembly and the transmission gear can drive the guide plate to reciprocatingly rotate and swing at a certain angle, so that the guide plate can not only increase the contact area with air, but also stir the surrounding air, so that the air can be well contacted with the cooling mechanism, thereby further improving the cooling efficiency and effect. Meanwhile, the air flow is facilitated by the setting of the flow guide groove. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 It is a left perspective structure schematic view of the present application.

[0022] Figure 2 It is an internal structure schematic view of the evaporation machine shell.

[0023] Figure 3 It is a sectional structure schematic view of the vacuumizing chamber.

[0024] Figure 4 It is a sectional structure schematic view of the connection between the detection sealing frame and the monitoring sealing cover.

[0025] Figure 5 It is a structure schematic view of the separation between the detection sealing frame and the monitoring sealing cover.

[0026] Figure 6 It is a three-dimensional structure schematic view of the cooling mechanism in the second embodiment of the present application.

[0027] Figure 7 It is a three-dimensional structure schematic view of the cooling mechanism in the third embodiment of the present application.

[0028] Figure 8 It is a rear view structure schematic view of the cooling mechanism in the third embodiment of the present application.

[0029] Figure 9 It is a sectional structure schematic view of the fixed plate.

[0030] Figure 10 It is a sectional structure schematic view of the gas storage cavity.

[0031] In the figure: 1, evaporation machine shell; 2, observation door; 3, carrier rotation mechanism; 4, water cooling assembly; 5, vacuum chamber; 6, cooling mechanism; 7, telescopic cylinder; 8, initial vacuum mechanism; 9, high vacuum mechanism; 10, vacuum pipe; 11, vacuum frame; 12, detection sealing frame; 121, accommodating groove; 122, clamping groove; 13, switch valve cover; 14, monitoring sealing cover; 15, blocking block; 16, detection cavity; 17, limiting disc; 18, first piston assembly; 19, pressure sensor; 20, connecting column; 21, return spring; 22, pressing block; 23, conducting plate; 24, fixed plate; 25, guide plate; 251, rotating rod; 252, transmission gear; 253, flow guide groove; 26, control pipe; 27, gas storage cavity; 28, second piston assembly; 29, rack assembly. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0033] Please refer to Figures 1-10 The present application provides the following technical solutions:

[0034] Embodiment one: the leakage self-checking type vacuum evaporation machine in the embodiment can self-check the gas leakage in the vacuum pipe 10, which is convenient for timely reminding the staff to maintain, avoids affecting the effect and efficiency of the later vacuuming, and enables the vacuum evaporation machine to well manufacture electronic special materials. For specific structure, please refer to the accompanying drawings. Figures 1-5 As shown in the accompanying drawings, the leakage self-checking type vacuum evaporation machine comprises an evaporation machine shell 1 and a carrier rotation mechanism 3 penetratingly installed at the top of the evaporation machine shell 1, the bottom surface of the evaporation machine shell 1 is internally provided with an evaporation assembly, the front side of the evaporation machine shell 1 is connected with an observation door 2, the rear side of the evaporation machine shell 1 is fixed with a vacuum chamber 5, the rear side upper portion of the vacuum chamber 5 is connected with an initial vacuum mechanism 8 through a vacuum pipe 10, which is used for initially vacuumizing the working environment of the evaporation machine, the rear side bottom of the vacuum chamber 5 is provided with a high vacuum mechanism 9 through a vacuum frame 11, which is used for high vacuumizing the working environment of the evaporation machine, a self-checking assembly is installed on the outer side of the vacuum pipe 10, the evaporation machine shell 1 around the evaporation assembly is provided with a water cooling assembly 4 for cooling the evaporation assembly, the water cooling assembly 4 is an annular manifold, a telescopic cylinder 7 is penetratingly installed at the top of the vacuum chamber 5, a switch valve cover 13 is sealingly and tightly connected with the bottom of the vacuum chamber 5 in connection with the high vacuum mechanism 9, the top of the switch valve cover 13 is connected with the output end of the telescopic cylinder 7, and the telescopic cylinder 7 is used for controlling the opening and closing of the switch valve cover 13.

[0035] The upper inner diameter of the vacuumizing chamber 5 is larger than the lower inner diameter of the vacuumizing chamber 5, and the switch valve cover 13 is arranged upwardly protruding, and the lower outer side of the switch valve cover 13 is sealingly connected with the lower inner side wall of the vacuumizing chamber 5, the self-checking assembly comprises a detection sealing frame 12, a monitoring sealing cover 14 and a blocking block 15 which are arranged penetratingly outside the vacuumizing pipe 10, and the inner sides of the detection sealing frame 12, the monitoring sealing cover 14 and the blocking block 15 are sealingly connected with the outer side of the vacuumizing pipe 10 through sealing rings, the monitoring sealing cover 14 is installed with the blocking block 15 on the side close to the detection sealing frame 12, and the outer side of the blocking block 15 is sealingly connected with the inner side wall of the detection sealing frame 12 through a sealing ring, the detection cavity 16 is installed penetratingly inside the upper surface of the detection sealing frame 12, and the first piston assembly 18 is connected with the detection cavity 16 inside, and the upper end of the first piston assembly 18 is connected with the limiting disc 17 penetratingly through the upper surface of the detection cavity 16, and the diameter of the limiting disc 17 is larger than the diameter of the upper end of the first piston assembly 18, and the pressure sensor 19 is installed on the inner side wall of the detection cavity 16 above the first piston assembly 18, the accommodation groove 121 and the clamping groove 122 are arranged on the side of the detection sealing frame 12 close to the monitoring sealing cover 14, the clamping groove 122 is communicated with the outer side of the accommodation groove 121, the monitoring sealing cover 14 is connected with the accommodation groove 121 inside in a concave-convex matching mode, the connecting column 20 and the pressing block 22 are installed in the form of a groove on the outer side of the monitoring sealing cover 14, the pressing block 22 is fixed on the outer side of the connecting column 20, and the connecting column 20 is connected with the inside of the monitoring sealing cover 14 through the reset spring 21 on one end, and the other end of the connecting column 20 is inserted into the clamping groove 122, and the cooling mechanism 6 is installed in layers on the four walls of the connecting part between the vacuumizing chamber 5 and the evaporation machine shell 1, and the cooling mechanism 6 is in the form of a coil pipe, for cooling the air entering the initial vacuumizing mechanism 8 and the high vacuumizing mechanism 9 of the evaporation machine shell 1, to prevent the high temperature of the air from damaging the initial vacuumizing mechanism 8 and the high vacuumizing mechanism 9.

[0036] The evaporation assembly in the vacuum evaporation machine comprises a crucible evaporation mechanism and a thermal resistance heating evaporation mechanism, the crucible evaporation mechanism cooperates with the electron beam to heat and evaporate the target material, and the thermal resistance cooperates with the tungsten wire to heat and evaporate the target material, and one of the evaporation assemblies or both of them can be selected, and since this part is prior art, it will not be described in detail here.

[0037] When the vacuum evaporation machine needs to be initially evacuated, at this time the output end below the telescopic air cylinder 7 drives the switch valve cover 13 to move downward, so that the outer side of the switch valve cover 13 is sealingly connected with the inner side wall below the vacuum chamber 5, the switch valve cover 13 closes the lower part of the vacuum chamber 5, and then the high vacuum mechanism 9 is connected with the bottom of the vacuum chamber 5 in a closed state, and then the initial evacuation mechanism 8 cooperates with the vacuum pipe 10 to start the evacuation operation in the evaporation machine shell 1. During the evacuation process, when the sealing ring in the connecting flange outside the vacuum pipe 10 is aged and gas leaks, the leaked gas is in the space between the detection sealing frame 12 and the monitoring sealing cover 14, and then the gas enters the detection cavity 16 to push the first piston assembly 18 upward, so that the first piston assembly 18 applies a certain pressure to the pressure sensor 19. The pressure sensor 19 transmits the signal to the PLC controller installed outside the evaporation machine shell 1, and the PLC controller controls the alarm installed outside the evaporation machine shell 1 to issue an alarm. The worker hears the alarm and stops the evacuation operation of the evaporation machine shell 1 in time, so that the gas in the vacuum pipe 10 can be self-checked for leakage, the effect and efficiency of the later evacuation are avoided, and the vacuum evaporation machine can well manufacture electronic special materials.

[0038] When the detection sealing frame 12 and the monitoring sealing cover 14 need to be separated later, the monitoring sealing cover 14 is manually taken, the fingers press the pressing block 22, the connecting column 20 is driven by the pressing block 22 to move into the monitoring sealing cover 14, the pressing block 22 is separated from the clamping groove 122, the reset spring 21 is pressed and stored, then the monitoring sealing cover 14 is pulled outward, so that the monitoring sealing cover 14 and the sealing block 15 are separated from the detection sealing frame 12, and the sealing ring in the connecting flange outside the vacuum pipe 10 can be replaced later.

[0039] Embodiment two: the leakage self-checking type vacuum evaporation machine in the embodiment, on the basis of embodiment one, a cooling conduction assembly is installed outside the cooling mechanism 6, which can improve the cooling efficiency and effect of the cooling mechanism 6, and the specific structure is disclosed with reference to the attached Figure 6 The cooling conduction assembly includes a conduction plate 23 installed outside the cooling mechanism 6, and the conduction plate 23 is horizontally provided in two groups and made of copper.

[0040] During the evacuation process, the cooling mechanism 6 cools the air to prevent the air temperature from being too high to damage the initial evacuation mechanism 8 and the high vacuum mechanism 9. At this time, the heat in the surrounding air can be conducted to the cooling mechanism 6 through the copper conduction plate 23, thereby improving the cooling efficiency and efficiency of the cooling mechanism 6.

[0041] Embodiment three: the leakage self-checking type vacuum evaporation machine in this embodiment, on the basis of embodiment one, discloses another structure of cooling conduction assembly, which can further improve the cooling efficiency and effect, and the specific structure is referred to the drawings of the embodiment Figures 7-10 As shown in the drawings, the cooling conduction assembly comprises a fixed plate 24 mounted outside the cooling mechanism 6, the fixed plate 24 is arranged in a "U" shape, and the inner side of the fixed plate 24 is rotatably mounted with a rotating rod 251, one end of the rotating rod 251 is fixedly mounted with a guide plate 25, the outer side of the rotating rod 251 inside the fixed plate 24 is mounted with a transmission gear 252, the left end rear side of the fixed plate 24 is internally slottedly mounted with a gas storage cavity 27, the inside of the gas storage cavity 27 is connected with a second piston assembly 28, the front end of the second piston assembly 28 is connected with a rack assembly 29, the rack assembly 29 is engagedly connected with the transmission gear 252, the rear end of the gas storage cavity 27 is penetratively mounted with a control pipe 26, the inside of the guide plate 25 is provided with an inclined flow guide groove 253, and the guide plate 25 and the fixed plate 24 are both made of copper.

[0042] During the vacuumizing process, when the cooling mechanism 6 cools the air, the gas storage and injection of the gas storage cavity 27 can be intermittently controlled through the external gas suction and injection mechanism through the control pipe 26, so that the second piston assembly 28 in the gas storage cavity 27 reciprocally drives the rack assembly 29 to move, the rack assembly 29 drives the transmission gear 252 engagedly connected below to reciprocally rotate by a certain angle, the transmission gear 252 drives the rotating rod 251 and the guide plate 25 to reciprocally rotate and swing by a certain angle, so that the guide plate 25 can not only increase the contact area with the air, but also agitate the surrounding air, so that the air can well contact with the cooling mechanism 6, which is convenient for further improving the cooling efficiency and efficiency, and the air can flow well through the setting of the flow guide groove 253, avoiding affecting the vacuumizing efficiency.

[0043] Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can modify the technical solutions described in the foregoing embodiments, or make equivalent replacements to part of the technical features, and any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A leak-proof self-checking vacuum evaporation coating machine, comprising a evaporation coating machine housing (1) and a carrier rotation mechanism (3) installed through and on its top, wherein an evaporation coating assembly is installed inside the bottom surface of the evaporation coating machine housing (1), and an observation door (2) is connected to the front side of the evaporation coating machine housing (1), characterized in that: A vacuum chamber (5) is fixed to the rear side of the vapor deposition machine housing (1), and a preliminary vacuuming mechanism (8) is connected to the upper rear side of the vacuum chamber (5) through a vacuuming tube (10) for performing preliminary vacuuming of the working environment of the vapor deposition machine. A high vacuuming mechanism (9) is installed at the bottom rear side of the vacuum chamber (5) through a vacuuming frame (11) for performing high vacuuming of the working environment of the vapor deposition machine. A self-testing component is installed on the outside of the vacuuming tube (10). The self-testing assembly includes a detection sealing frame (12), a monitoring sealing cover (14), and a blocking block (15) that are disposed through the outside of the vacuum tube (10). The inner sides of the detection sealing frame (12), the monitoring sealing cover (14), and the blocking block (15) are all sealed to the outer side of the vacuum tube (10) through sealing rings. A blocking block (15) is installed on the side of the monitoring sealing cover (14) near the detection sealing frame (12), and the outer side of the blocking block (15) is sealed to the inner wall of the detection sealing frame (12) through sealing rings. A detection cavity (16) is installed through the upper surface of the detection sealing frame (12), and a first piston assembly (18) is fitted inside the detection cavity (16). The upper end of the first piston assembly (18) penetrates the upper surface of the detection cavity (16) and is connected to a limiting plate (17). The limiting plate (17) is connected to the limiting plate (17). The diameter of the detection chamber (16) is larger than the upper diameter of the first piston assembly (18), and a pressure sensor (19) is installed on the inner wall of the detection chamber (16) above the first piston assembly (18). The detection sealing frame (12) has a receiving groove (121) and a snap-fit ​​groove (122) on the side near the monitoring sealing cover (14). The outer side of the receiving groove (121) is connected to the snap-fit ​​groove (122), and the monitoring sealing cover (14) is connected to the inner side of the receiving groove (121) with a concave-convex fit. The outer side of the monitoring sealing cover (14) has a slot for installing a connecting post (20) and a pressing block (22). The outer side of the connecting post (20) is fixed with the pressing block (22). One end of the connecting post (20) is connected to the inside of the monitoring sealing cover (14) through a reset spring (21), and the other end of the connecting post (20) is inserted into the snap-fit ​​groove (122).

2. The self-detecting vacuum evaporation machine according to claim 1, characterized in that: A water-cooling component (4) is provided on the four sides of the vapor deposition machine housing (1) near the vapor deposition component to cool down the vapor deposition component. The water-cooling component (4) is an annular manifold.

3. The self-detecting vacuum evaporation machine according to claim 1, characterized in that: A telescopic cylinder (7) is installed through the top of the vacuum chamber (5). A switch valve cover (13) is connected to the bottom of the vacuum chamber (5) in a sealed fit. The top of the switch valve cover (13) is connected to the output end of the telescopic cylinder (7). The telescopic cylinder (7) is used to control the opening and closing of the switch valve cover (13).

4. A leak-detecting vacuum evaporation machine according to claim 3, characterized in that: The upper inner diameter of the vacuum chamber (5) is larger than the lower inner diameter of the vacuum chamber (5), and the switch valve cover (13) is convex upward, and the lower outer side of the switch valve cover (13) is sealed and fitted to the lower inner wall of the vacuum chamber (5).

5. A leak-detecting vacuum evaporation machine according to claim 1, characterized in that: Cooling mechanisms (6) are coiled around the four walls at the connection between the vacuum chamber (5) and the vapor deposition machine housing (1). The cooling mechanisms (6) are coiled structures used to cool the air entering the initial vacuum mechanism (8) and the high vacuum mechanism (9) from the vapor deposition machine housing (1), preventing the air temperature from being too high and causing damage to the initial vacuum mechanism (8) and the high vacuum mechanism (9).

6. A leak-detecting vacuum evaporation machine according to claim 5, characterized in that: A cooling conduction component is installed on the outside of the cooling mechanism (6).

7. A leak-detecting vacuum evaporation machine according to claim 6, characterized in that: The cooling conduction assembly includes a conduction plate (23) installed on the outside of the cooling mechanism (6). Two sets of conduction plates (23) are arranged horizontally, and the conduction plates (23) are made of copper.

8. A leak-detecting vacuum evaporation machine according to claim 7, characterized in that: The cooling conduction assembly includes a fixed plate (24) installed on the outside of the cooling mechanism (6). The fixed plate (24) is U-shaped and a rotating rod (251) is rotatably installed on the inner side of the fixed plate (24). One end of the rotating rod (251) is fixedly installed with the guide plate (25). A transmission gear (252) is installed on the outer side of the rotating rod (251) located in the fixed plate (24). A gas storage chamber (27) is installed in the groove on the left rear side of the fixed plate (24). A second piston assembly (28) is fitted inside the gas storage chamber (27). A rack assembly (29) is connected to the front end of the second piston assembly (28). The rack assembly (29) meshes with the transmission gear (252). A control tube (26) is installed through the rear end of the gas storage chamber (27). An inclined guide groove (253) is opened inside the guide plate (25). Both the guide plate (25) and the fixed plate (24) are made of copper.

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