Cartridge

Abstract

The invention provides a cartridge, comprising: a shading chamber, the shading chamber comprising a plurality of light-proof and mutually hermetically connected assembly plates, one side surface of the shading chamber having a substrate inlet / outlet; the movable door assembly comprises a lightproof shading door; under the state that the shading door seals the substrate inlet and outlet, the joint of the shading door and the substrate inlet and outlet is light-proof. According to the invention, the substrate can be prevented from being scrapped due to irradiation of white light in the circulation process from the coating machine to the exposure machine, and the yield of the substrate is improved.

Description

Technical Field

[0001] This invention relates to the field of display device manufacturing equipment, and more specifically, to a cartridge. Background Technology

[0002] During the production of display panel substrates, the substrates are transferred between various processes (such as coating, exposure, and development) via cassettes. Due to the requirements of the manufacturing process, the substrate cannot be exposed to white light during the coating and exposure stages; otherwise, the substrate will be prematurely exposed, resulting in scrap. Therefore, the coating machine and the exposure machine are generally placed together in the yellow light zone to prevent the substrate from being exposed.

[0003] However, due to space constraints and other factors, sometimes the coating machine and the exposure machine cannot be placed in the same yellow light area, and there is a white light area between the coating machine and the exposure machine. Ordinary cassettes do not have the ability to block light, which will cause the substrate to be scrapped during the transfer process from the coating machine to the exposure machine.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of the present invention, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides a cartridge to at least solve the technical problem in the prior art that substrates are scrapped due to exposure to white light during the transfer process from the coating machine to the exposure machine.

[0006] The present invention provides a cartridge, comprising: a light-shielding chamber, the light-shielding chamber comprising a plurality of opaque and mutually sealed assembly plates, one side of the light-shielding chamber having a substrate inlet and outlet; a movable door assembly, the movable door assembly comprising an opaque light-shielding door; when the light-shielding door seals the substrate inlet and outlet, the connection between the light-shielding door and the substrate inlet and outlet is opaque.

[0007] Compared with the prior art, the cartridge provided by the present invention achieves at least the following beneficial effects: The cartridge provided by this invention includes: a light-shielding chamber comprising multiple opaque and mutually sealed assembly plates, one side of which has a substrate inlet / outlet; and a movable door assembly comprising an opaque light-shielding door. When the light-shielding door seals the substrate inlet / outlet, the connection between the light-shielding door and the substrate inlet / outlet is opaque. By setting up a light-shielding chamber composed of multiple opaque and mutually sealed assembly plates, and by sealing the substrate inlet / outlet of the light-shielding chamber with an opaque light-shielding door, this invention ensures that all surfaces of the cartridge are opaque when the substrate inlet / outlet is sealed. Compared to ordinary cartridges that are not fully enclosed and lack light-shielding properties, the cartridge of this invention can prevent substrates from being damaged by white light during the transfer from the coating machine to the exposure machine, thus improving substrate yield. Attached Figure Description

[0008] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0009] Figure 1 This is a three-dimensional structural diagram of a cartridge provided in an embodiment of the present invention.

[0010] Figure 2 This is a three-dimensional structural schematic diagram of another cartridge provided in an embodiment of the present invention.

[0011] Figure 3 This is a three-dimensional structural schematic diagram of another cartridge provided in an embodiment of the present invention.

[0012] Figure 4 This is a three-dimensional structural schematic diagram of another cartridge provided in an embodiment of the present invention.

[0013] Figure 5 yes Figure 1 Structural diagram of section AA' in the middle.

[0014] Figure 6 This is a schematic diagram of a sealing strip disposed on a sealing plate according to an embodiment of the present invention.

[0015] Figure 7 This is a partial structural diagram of a cartridge provided in an embodiment of the present invention.

[0016] Figure 8 yes Figure 7 A magnified view of a portion of region B in the middle.

[0017] Figure 9 This is a side view of a sliding door assembly for a card holder provided in an embodiment of the present invention.

[0018] Figure 10 This is a structural schematic diagram of a movable door assembly provided in an embodiment of the present invention.

[0019] Figure 11 This is a schematic diagram of a light-blocking door provided in an embodiment of the present invention.

[0020] Figure 12 This is a schematic diagram of one corner of a cartridge provided in an embodiment of the present invention.

[0021] Figure 13 This is a three-dimensional structural schematic diagram of another cartridge provided in an embodiment of the present invention.

[0022] Figure 14 This is a schematic diagram of the observation port portion of a cartridge provided in an embodiment of the present invention.

[0023] Figure 15 yes Figure 14 A magnified view of a portion of region C.

[0024] Figure 16 This is a schematic diagram of the bottom structure of a cartridge provided in an embodiment of the present invention.

[0025] Figure 17 yes Figure 16 A schematic diagram of the bottom assembly plate of the middle cartridge.

[0026] Figure 18 yes Figure 17 A magnified view of a portion of region D.

[0027] Figure 19 This is a three-dimensional structural schematic diagram of another cartridge provided in an embodiment of the present invention.

[0028] Figure 20 yes Figure 19 A schematic diagram of the structure of the cleaning ladder.

[0029] Figure 21 This is a schematic diagram of the assembly of the support member and adjustment fixture provided in the embodiment of the present invention.

[0030] Figure 22 This is a schematic diagram of the structure of an adjustment fixture provided in an embodiment of the present invention.

[0031] Figure label: Detailed Implementation

[0032] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the invention will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0033] The use of terms such as "first," "second," and similar terms in the specific description does not indicate any order, quantity, or importance, but is merely used to distinguish different components. Furthermore, in the description of this invention, terms such as "upper," "lower," etc., indicate orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on the invention.

[0034] It should be noted that, unless otherwise specified, the embodiments of the present invention and the features in different embodiments can be combined with each other.

[0035] like Figures 1 to 4 As shown, an embodiment of the present invention provides a card holder, which includes a light-shielding chamber 100 and a sliding door assembly 200.

[0036] The light-shielding chamber 100 includes multiple opaque and mutually sealed assembly plates 110. One side of the light-shielding chamber 100 has a substrate inlet / outlet 120. Specifically, as shown in the figure, the light-shielding chamber 100 can be a cube, where five sides of the cube are assembly plates 110, and one side is not provided with an assembly plate 110, thus forming the substrate inlet / outlet 120. That is, the substrate inlet / outlet 120 can be formed by the edges of multiple assembly plates 110. The light-shielding chamber 100 can also be formed by other shapes composed of straight or curved assembly plates 110, as long as one side has a substrate inlet / outlet 120 for the substrate to enter and exit the light-shielding chamber 100. This invention does not limit this. The material of the assembly plates 110 can be aluminum or steel, or other opaque metal or non-metal materials. This invention does not limit this.

[0037] The movable door assembly 200 includes an opaque light-shielding door 210; when the light-shielding door 210 seals the substrate inlet / outlet 120, the connection between the light-shielding door 210 and the substrate inlet / outlet 120 is opaque. Specifically, the light-shielding door 210 is movable, thereby achieving the sealing and opening of the substrate inlet / outlet 120 of the light-shielding chamber 100. The material of the light-shielding door 210 can also be aluminum or steel, or other opaque metal or non-metal materials; this invention is not limited in this regard. When the substrate enters the light-shielding chamber 100 through the substrate inlet / outlet 120, the light-shielding door 210 of the movable door assembly 200 seals the substrate inlet / outlet 120, making all surfaces of the cartridge opaque, thereby enabling the transfer of the substrate from the coating machine to the exposure machine. Optionally, the light-shielding door 210 can be automatically opened or sealed by mechanical control, or it can be manually opened or sealed.

[0038] This invention constructs a light-shielding chamber 100 consisting of multiple opaque and mutually sealed assembly plates 110, and seals the substrate inlet and outlet 120 of the light-shielding chamber 100 with an opaque light-shielding door 210. This ensures that all surfaces of the cartridge are opaque when the light-shielding door 210 seals the substrate inlet and outlet 120. Compared to ordinary cartridges that are not sealed on all sides and do not have light-shielding properties, the cartridge of this invention can prevent the substrate from being scrapped due to exposure to white light during the transfer from the coating machine to the exposure machine, thereby improving the substrate yield.

[0039] like Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments, a blocking edge 121 of the substrate inlet / outlet 120 has a blocking member 122 protruding from the substrate inlet / outlet 120; when the light-shielding door 210 seals the substrate inlet / outlet 120, the blocking member 122 at least partially overlaps with the light-shielding door 210 in a direction perpendicular to the surface of the light-shielding door 210. Specifically, the substrate inlet / outlet 120 can be formed by the edges of multiple assembly plates 110, one of which can serve as a blocking edge 121, and a blocking member 122 is provided on the blocking edge 121 to block the movement of the light-shielding door 210. That is, when the blocking member 122 and the light-shielding door 210 come into contact, the interior of the light-shielding chamber 100 is opaque. In this embodiment, by sealing the substrate inlet / outlet 120 with the light-shielding door 210, and by at least partially overlapping the blocking member 122 with the light-shielding door 210 in the direction perpendicular to the surface of the plate where the light-shielding door 210 is located, all light entering the light-shielding chamber 100 from the substrate inlet / outlet 120 can be blocked by the blocking member 122 and the light-shielding door 210. This ensures that the connection between the light-shielding door 210 and the substrate inlet / outlet 120 is opaque when the light-shielding door 210 seals the substrate inlet / outlet 120, thereby preventing the substrate from being scrapped due to exposure to white light during the transfer process from the coating machine to the exposure machine.

[0040] In some embodiments, the blocking member 122 is part of one of the assembly plates 110 constituting the substrate inlet / outlet 120, or the blocking member 122 is detachably connected to the assembly plate 110. Specifically, in embodiments where the blocking member 122 is part of one of the assembly plates 110 constituting the substrate inlet / outlet 120 (e.g.) Figure 2 and Figure 4As shown in the diagram, the assembly plate 110 protrudes from the substrate inlet / outlet 120 along a direction perpendicular to the plane of the substrate inlet / outlet 120, thus forming a blocking member 122 for cooperating with the light-shielding door 210 to seal the light-shielding chamber 100. This embodiment simplifies the cartridge configuration. In an embodiment where the blocking member 122 is detachably connected to the assembly plate 110, i.e., the blocking member 122 is mounted on the assembly plate 110, causing it to protrude from the substrate inlet / outlet 120 along a direction perpendicular to the plane of the substrate inlet / outlet 120, it can also cooperate with the light-shielding door 210 to seal the light-shielding chamber 100. This embodiment improves the versatility of the cartridge by replacing different blocking members 122 to adapt to different light-shielding doors 210.

[0041] like Figure 5 and Figure 6 As shown, in some embodiments, the cartridge further includes a sealing strip 300. The sealing strip 300 is opaque; it is positioned between the light-shielding door 210 and the blocking member 122; with the light-shielding door 210 sealing the inlet / outlet 120 of the substrate, the sealing strip 300 abuts against both the light-shielding door 210 and the blocking member 122. Specifically, the sealing strip 300 can be positioned on the blocking member 122, on the light-shielding door 210, or on other structures, or can be positioned independently; this invention does not limit this. The sealing strip 300 can be made of flexible or elastic materials such as silicone, providing a buffer between the light-shielding door 210 and the blocking member 122 when the light-shielding door 210 is sealed at the inlet / outlet 120 of the substrate, preventing damage caused by direct collision between the light-shielding door 210 and the blocking member 122; simultaneously, since the sealing strip 300 is opaque, it also ensures that the contact point between the light-shielding door 210 and the blocking member 122 is opaque. In some other embodiments, in addition to the sealing strip 300, other structures may be provided between the light-shielding door 210 and the blocking member 122 to further achieve the effects of buffering and light-shielding.

[0042] like Figures 1 to 4 As shown, in some embodiments, the blocking member 122 protrudes from the substrate inlet / outlet 120 along a direction perpendicular to the plane where the substrate inlet / outlet 120 is located; the assembly plate 110 with the blocking member 122 is located at the top of the light-shielding chamber 100. Specifically, taking the light-shielding chamber 100 of the cartridge as a cube as an example, the assembly plate 110 with the blocking member 122 is located at the top of the light-shielding chamber 100, and the blocking member 122 protrudes from the substrate inlet / outlet 120 along a direction perpendicular to the plane where the substrate inlet / outlet 120 is located, which allows the substrate inlet / outlet 120 to be located on the side of the light-shielding chamber 100, thereby facilitating the substrate to enter and exit the light-shielding chamber 100 through the substrate inlet / outlet 120. In addition, since the substrate inlet / outlet 120 is located on the side of the light-shielding chamber 100, the light-shielding door 210 moves in the vertical direction accordingly. In other embodiments, the substrate inlet / outlet 120 may also be located on other surfaces of the light-shielding chamber 100, and the present invention does not limit this.

[0043] like Figure 2 and Figure 5 As shown, in some embodiments, the blocking member 122 includes a groove 123, which is located on the side of the blocking member 122 facing the substrate inlet / outlet 120 and parallel to the blocking edge 121 of the substrate inlet / outlet 120; a sealing strip 300 is disposed in the groove 123 and protrudes from the groove 123. Specifically, the groove 123 is opened along the blocking edge 121 of the substrate inlet / outlet 120 and has the same length as the blocking edge 121, for the purpose of setting the sealing strip 300. The length of the sealing strip 300 is also the same as the length of the blocking edge 121, so that when the light-shielding door 210 seals the substrate inlet / outlet 120 and abuts against the light-shielding door 210 and the blocking member 122 respectively, the interior of the light-shielding chamber 100 can be kept opaque. In this embodiment, the sealing strip 300 is partially located within the groove 123 and partially protrudes from the groove 123. This protruding portion provides a buffer for the light-shielding door 210 and the blocking member 122, preventing damage caused by direct collision between the light-shielding door 210 and the blocking member 122.

[0044] like Figure 6 As shown, in some embodiments, the light-shielding door 210 includes an opaque sealing plate 211, which is located at the top of the light-shielding door 210; a sealing strip 300 is disposed on the side of the sealing plate 211 away from the top of the light-shielding door 210; when the light-shielding door 210 is in the state of sealing the substrate inlet / outlet 120, the sealing strip 300 abuts against the sealing plate 211 and the blocking member 122 respectively. Specifically, the sealing strip 300 can be attached to the sealing plate 211. The length of the sealing strip 300 can be the same as the blocking edge 121 of the substrate inlet / outlet 120, which is used to make the interior of the light-shielding chamber 100 opaque and to avoid damage caused by direct collision between the light-shielding door 210 and the blocking member 122; at the same time, since the sealing strip 300 is opaque, it can also be used to make the contact point between the light-shielding door 210 and the blocking member 122 opaque. In other embodiments, in addition to the sealing strip 300, other structures can be provided between the light-shielding door 210 and the blocking member 122 to further achieve the buffering and light-shielding effects. In addition, the cross-section of the sealing plate 211 perpendicular to the plane of the blocking edge 121 is L-shaped. The L-shaped sealing plate 211 can prevent light leakage at the contact point between the sealing strip 300 and the sealing plate 211, further improving the light-blocking effect of the light-blocking chamber 100.

[0045] like Figures 7 to 10As shown, in some embodiments, the sliding door assembly 200 further includes: a motor 220, a drive shaft 230 connected to the motor 220, linear guide rails 240 disposed on both sides of the light-shielding door 210, a transmission element 250, a counterweight 260, and a slider 270. The slider 270 is fixedly connected to both sides of the light-shielding door 210 and the transmission element 250, and is slidably connected to the linear guide rails 240; the counterweight 260 is fixedly connected to the transmission element 250; the motor 220 drives the transmission element 250 located on both sides of the light-shielding door 210 to move via the drive shaft 230, and the transmission element 250 drives the slider 270 to move on the linear guide rails 240, while simultaneously driving the counterweight 260 to move up and down, so as to control the movement of the light-shielding door 210. Specifically, two linear guide rails 240 are arranged opposite each other on both sides of the light-shielding door 210. Each transmission element 250 is arranged on one linear guide rail 240, and the transmission element 250 is arranged along the extension direction of the linear guide rail 240. Each linear guide rail 240 is provided with a counterweight 260 and a slider 270 connected to the counterweight 260. A motor 220 is arranged between the two linear guide rails 240, and the motor 220 drives the transmission element 250 to move through drive shafts 230 arranged on both sides of the motor 220. The transmission element 250 can be a rubber synchronous belt or a steel wire rope, and the present invention does not limit it. The light-shielding door 210 can be raised or lowered or moved left or right through the above arrangement, and the present invention does not limit it either. In this embodiment, through the above arrangement, the movement control of the light-shielding door 210 in the moving door assembly 200 is realized, thereby realizing the opening and sealing of the substrate inlet and outlet 120.

[0046] Furthermore, the sliding door assembly 200 may also include: a drive shaft protective cover, a drive shaft observation window, a module protective cover, a dust collection groove, and a module protective groove. The drive shaft protective cover is used to cover the drive shaft 230 to protect it. The drive shaft protective cover may have a drive shaft observation window for the operator to observe the drive shaft 230 located inside the protective cover. The module protective cover is used to cover at least a portion of the surface of the linear guide rail 240 to at least partially protect it. The dust collection groove is located at the bottom of the transmission element 250 to collect dust and prevent dust accumulation from affecting the operation of the sliding door assembly 200. The module protective groove is located at the connection between the drive shaft and the transmission element 250 to protect that connection.

[0047] like Figures 10 to 11As shown, in some embodiments, the light-shielding door 210 includes connecting plates 212 disposed on both sides and close to the substrate inlet / outlet 120, and the connecting plates 212 are fixedly connected to the slider 270. Specifically, the plane of the connecting plates 212 can be perpendicular to the plane of the substrate inlet / outlet 120, and correspondingly, the plane of the connecting plates 212 can also be perpendicular to the plane of the main body of the light-shielding door 210. The light-shielding door 210 is connected to the slider 270 through the connecting plates 212, and then moves under the drive of the motor 220 to seal the substrate inlet / outlet 120. The connecting plates 212 are disposed on both sides of the light-shielding door 210 and close to the substrate inlet / outlet 120. Along a direction perpendicular to the plane of the connecting plates 212, the connecting plates 212 cover the sides of the substrate inlet / outlet 120 to prevent white light from entering the light-shielding chamber 100 from the sides of the substrate inlet / outlet 120, thereby further increasing the light-shielding effect of the light-shielding chamber 100.

[0048] like Figures 10 to 11 As shown, in some embodiments, the light-shielding door 210 includes a first frame 213 and at least one first sealing cover 214 disposed between the first frames 213; the light-shielding door 210 is provided with at least one front stop 215 on the side near the substrate inlet / outlet 120, and the front stop 215 is also fixed to the first frame 213. Specifically, the light-shielding door 210 may include a plurality of first frames 213 arranged in a vertical direction, and a plurality of first sealing covers 214 may be disposed in a rectangular area formed between the plurality of first frames 213. The material of the first frame 213 may be aluminum, and the material of the first sealing cover 214 may be aluminum or steel, and the present invention is not limited thereto. The number of front stops 215 may be plurality, and they may be arranged along the extending direction of the first frame 213. The front stops 215 may be made of a rigid material. Optionally, the material of the front stops 215 may be polyetheretherketone (PEEK). It is understood that the front stops 215 are used to prevent the substrate in the light-shielding chamber 100 from colliding with the light-shielding door 210 and being damaged in the event of cartridge movement, thereby improving the substrate yield.

[0049] like Figure 12 As shown, in some embodiments, the cartridge further includes a sealing strip 400. The sealing strip 400 is opaque; the sealing strip 400 is disposed on at least one side of the inner and outer sides of the connecting edge of the two assembly plates 110, covering the connecting edge and being fixedly connected to the two assembly plates 110. Specifically, the cartridge may include multiple sealing strips 400, with both the inner and outer sides of the connecting edge of each pair of assembly plates 110 covered by the sealing strip 400. The material of the sealing strip 400 can be aluminum, or other opaque metal or non-metal materials, and the present invention does not limit this. The sealing strip 400 can be screwed onto the two assembly plates 110 respectively, thereby completely sealing the gap at the connecting edge of the two assembly plates 110, preventing light leakage, and improving the connection strength of the two assembly plates 110.

[0050] like Figures 13 to 15 As shown, in some embodiments, one side of the light-shielding chamber 100 has an observation port 130; the observation port 130 is provided with an opaque second sealing cover 131, and the second sealing cover 131 is fixedly connected to the observation port 130 by an opaque sealing strip 400; the surface of the second sealing cover 131 is provided with a first handle 132. Specifically, the material of the second sealing cover 131 can be aluminum or steel, or other opaque metal or non-metal materials; the material of the sealing strip 400 can be aluminum, or other opaque metal or non-metal materials, and the present invention does not limit this. The sealing strip 400 can be screwed to the observation port 130 and the second sealing cover 131 respectively, thereby completely sealing the gap at the connection edge of the observation port 130 and the second sealing cover 131, preventing light leakage, and improving the connection strength of the observation port 130 and the second sealing cover 131. It should be noted that the observation port 130 is normally sealed by the sealing strip 400. The sealing strip 400 will only be removed when it is necessary to observe the inside of the light-shielding chamber 100 through the observation port 130 or when the light-shielding door 210 of the moving door assembly 200 cannot be opened. The second sealing cover plate 131 will then be opened by the first handle 132 to allow observation of the inside of the light-shielding chamber 100 or to allow the operator or the substrate to enter the light-shielding chamber 100.

[0051] like Figures 16 to 18As shown, in some embodiments, an assembly plate 110 of the light-shielding chamber 100 includes a second frame 111, at least one third sealing cover 112 disposed between the second frames 111, and at least one cleaning door 113; a first side of the cleaning door 113 is pivotally connected to the second frame 111, and a second side of the cleaning door 113 is detachably connected to the second frame 111, with the first and second sides disposed opposite to each other; the cleaning door 113 seals the cleaning inlet / outlet 114 of the assembly plate 110, the cleaning inlet / outlet 114 being located at the bottom of the light-shielding chamber 100, and the opening direction of the cleaning door 113 facing the outside of the light-shielding chamber 100. Specifically, the assembly plate 110 may be disposed at the bottom of the light-shielding chamber 100. The assembly plate 110 may include a plurality of second frames 111 disposed in a vertical direction, and a plurality of third sealing covers 112 and a plurality of cleaning doors 113 may be disposed in a rectangular area formed between the plurality of second frames 111. The material of the second frame 111 may be aluminum, and the material of the third sealing cover 112 and the plurality of cleaning doors 113 may be steel; the present invention does not limit this. The cleaning door 113 can be opened and connected to the second frame 111 by means of pivoting and locking, allowing operators to enter the light-shielding chamber 100 through the cleaning door 113 to clean the interior of the light-shielding chamber 100. Multiple cleaning doors 113 can be respectively set in different positions on the assembly plate 110, so that operators can enter the cleaning door 113 from different positions to clean different parts of the interior of the light-shielding chamber 100.

[0052] like Figures 19 to 20 As shown, in some embodiments, the cartridge further includes a base frame 500 and a cleaning ladder 600. A light-shielding chamber 100 is disposed above the base frame 500, and a movable door assembly 200 is connected to the base frame 500. The cleaning ladder 600 includes a ladder 610 and a fixing part 620 interconnected in the working state. In the working state of the cleaning ladder 600, the fixing part 620 is engaged with a limiting member of the base frame 500, and a section of the ladder 610 away from the fixing part 620 abuts against one side of the cleaning inlet / outlet 114. Specifically, the base frame 500 can be composed of multiple fixing rods perpendicularly connected to each other in a three-dimensional direction, and the fixing rods can be made of high-strength materials such as steel. The light-shielding chamber 100 is disposed above the base frame 500 to facilitate operator access to the light-shielding chamber 100 through the cleaning door 113 located at the bottom of the light-shielding chamber 100. Furthermore, the space formed by the base frame 500 can also be used to accommodate components such as the motor 220, battery, and cleaning ladder 600. Understandably, when the cleaning ladder 600 is in operation, the ladder 610 and the fixing part 620 are assembled, with the fixing part 620 fixedly connected to the base frame 500. One end of the ladder 610 is connected to the fixing part 620, and the other end abuts against the cleaning interface, facilitating the operator's access to the cleaning room using the ladder 610. When the cleaning ladder 600 is not in operation, the ladder 610 and the fixing part 620 are disassembled and stored in the base frame 500 or another location.

[0053] like Figures 21 to 22 As shown, in some embodiments, the cartridge further includes multiple supports 700 and an adjustment fixture 800. The supports 700 are arranged in an array inside the light-shielding chamber 100; the supports 700 are used to place substrates; the adjustment fixture 800 extends into the light-shielding chamber 100 through the substrate inlet / outlet 120 in the detection state to adjust the supports 700. Specifically, multiple uncut substrates are stacked on the supports 700 in the light-shielding chamber 100 to complete substrate transfer. In the detection state, the adjustment fixture 800 corrects the position of the supports 700 to prevent substrate displacement and affect substrate yield. In the detection state, after the light-shielding door 210 opens the substrate inlet / outlet 120, the adjustment fixture 800 extends into the light-shielding chamber 100 through the substrate inlet / outlet 120. In the non-detection state, the adjustment fixture 800 can be stored inside the bottom frame 500.

[0054] In some embodiments, the cartridge further includes a sensor. The sensor is disposed at the bottom of the light-shielding chamber. An identifier for sensor identification is provided on the light-shielding door 210 of the moving door assembly 200 to facilitate the sensor monitoring the position of the light-shielding door 210. The sensor is communicatively connected to the moving door assembly 200 to control the movement of the light-shielding door via the identifier.

[0055] The automatic opening and closing process of the card reader is as follows: First, when the card reader receives a closing command, it executes the closing command through the moving door assembly 200, that is, it controls the light-shielding chamber 100 of the moving door assembly 200 to seal the inlet and outlet 120 of the substrate until the command is completed; second, the card reader reports a closing completion command and waits for the card reader to be transported to realize the transfer of the substrate; then, the card reader receives an opening command, confirms whether the other sensor at the front end of the substrate has detected it, and if the sensor is normal, executes the opening command until the command is completed; finally, the card reader reports the opening command completed. In addition, the card reader also has a fault alarm function. The opening and closing command will stop executing and manual operation is required in the following situations: insufficient battery power, abnormal sensor at the front end of the substrate, failure to reach the preset opening and closing time, and motor 220 fault alarm.

[0056] In some embodiments, the cartridge further includes: an information reporting system. Battery information is communicated with the information reporting system in real time. The information reporting system sends a message to the industrial control computer (ICC) every 20% decrease in battery power. Upon power-up, the ICC automatically starts and initiates information reporting. The information reporting system sends battery level and temperature messages to the ICC. The ICC receives the battery information from the information reporting system and sends the message to the client server. After processing, the ICC sends a power-off signal to the information reporting system, and the ICC automatically shuts down. The information reporting system then cuts off power to the ICC. In case of abnormal battery information (voltage, current, temperature, etc.), the information reporting system immediately turns on the ICC, and the ICC reports the information to the client server.

[0057] In summary, as can be seen from the above embodiments, compared with the prior art, the cartridge provided by the present invention achieves at least the following beneficial effects: The cartridge provided by this invention includes: a light-shielding chamber 100, comprising multiple opaque and mutually sealed assembly plates 110, one side of which has a substrate inlet / outlet 120; and a movable door assembly 200, comprising an opaque light-shielding door 210. When the light-shielding door 210 seals the substrate inlet / outlet 120, the connection between the light-shielding door 210 and the substrate inlet / outlet 120 is opaque. By providing a light-shielding chamber 100 composed of multiple opaque and mutually sealed assembly plates 110, and by sealing the substrate inlet / outlet 120 of the light-shielding chamber 100 with the opaque light-shielding door 210, this invention ensures that all surfaces of the cartridge are opaque when the substrate inlet / outlet 120 is sealed by the light-shielding door 210. Compared to ordinary cartridges that are not fully enclosed and lack light-shielding properties, the cartridge of this invention can prevent substrates from being damaged by white light during the transfer from the coating machine to the exposure machine, thus improving substrate yield.

[0058] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A cartridge, characterized in that, include: A light-shielding chamber, comprising multiple opaque and mutually sealed assembly plates, with a substrate inlet / outlet on one side of the light-shielding chamber; A sliding door assembly, the sliding door assembly including an opaque light-blocking door; when the light-blocking door seals the inlet and outlet of the substrate, the connection between the light-blocking door and the inlet and outlet of the substrate is opaque.

2. The cartridge according to claim 1, characterized in that, One of the blocking edges of the substrate inlet and outlet has a blocking member protruding from the substrate inlet and outlet; With the light-shielding door sealing the inlet and outlet of the substrate, the blocking member at least partially overlaps with the light-shielding door in a direction perpendicular to the surface of the light-shielding door.

3. The cartridge according to claim 2, characterized in that, The blocking member is part of one of the assembly plates constituting the inlet and outlet of the substrate, or the blocking member is detachably connected to the assembly plate.

4. The cartridge according to claim 2, characterized in that, The cartridge also includes: A sealing strip, which is opaque; the sealing strip is disposed between the light-shielding door and the blocking member; when the light-shielding door seals the inlet and outlet of the substrate, the sealing strip abuts against the light-shielding door and the blocking member respectively.

5. The cartridge according to claim 2, characterized in that, The blocking member protrudes from the substrate inlet and outlet along a plane perpendicular to the plane containing the substrate inlet and outlet; the assembly plate with the blocking member is located at the top of the light-shielding chamber.

6. The cartridge according to claim 4, characterized in that, The blocking member includes a groove located on the side of the blocking member facing the substrate inlet and outlet and parallel to the blocking edge of the substrate inlet and outlet; The sealing strip is disposed within the groove, and the sealing strip protrudes from the groove.

7. The cartridge according to claim 4, characterized in that, The light-blocking door includes an opaque sealing plate located at the top of the light-blocking door; The sealing strip is located on the side of the sealing plate away from the top of the light-blocking door; With the light-shielding door sealing the inlet and outlet of the substrate, the sealing strip abuts against the sealing plate and the blocking member respectively.

8. The cartridge according to claim 1, characterized in that, The sliding door assembly also includes: a motor, a drive shaft connected to the motor, linear guide rails disposed on both sides of the light-blocking door, transmission elements, counterweights, and sliders; The slider is fixedly connected to both sides of the light-blocking door and the transmission element, and is slidably connected to the linear guide rail; The counterweight is fixedly connected to the transmission element; The motor drives the transmission elements located on both sides of the light-blocking door via the drive shaft. The transmission elements drive the slider to move on the linear guide rail and simultaneously drive the counterweight to move up and down, thereby controlling the movement of the light-blocking door.

9. The cartridge according to claim 8, characterized in that, The light-shielding door includes connecting plates disposed on both sides and close to the inlet and outlet of the substrate, and the connecting plates are fixedly connected to the slider.

10. The cartridge according to claim 1, characterized in that, The light-blocking door includes a first frame and at least one first sealing cover plate disposed between the first frames; The light-shielding door is provided with at least one front stop on the side near the inlet and outlet of the substrate, and the front stop is also fixed to the first frame.

11. The cartridge according to claim 1, characterized in that, The cartridge also includes: A sealing strip, which is opaque; the sealing strip is disposed on at least one side of the inner and outer sides of the connecting edge of the two assembly plates, the sealing strip covers the connecting edge and is fixedly connected to the two assembly plates.

12. The cartridge according to claim 1, characterized in that, The light-shielding chamber has an observation port on one side; the observation port is provided with a second opaque sealing cover, and the second sealing cover is fixedly connected to the observation port by an opaque sealing strip; the surface of the second sealing cover is provided with a first handle.

13. The cartridge according to claim 1, characterized in that, The assembly panel of the light-shielding chamber includes a second frame, at least one third sealing cover disposed between the second frames, and at least one cleaning door; The first side of the cleaning door is pivotally connected to the second frame, and the second side of the cleaning door is detachably connected to the second frame. The first side and the second side are arranged opposite to each other. The cleaning door seals the cleaning inlet and outlet of the assembly plate. The cleaning inlet and outlet are located at the bottom of the light-shielding chamber, and the opening direction of the cleaning door faces the outside of the light-shielding chamber.

14. The cartridge according to claim 13, characterized in that, The cartridge also includes: A base frame, the light-shielding chamber is disposed above the base frame, and the movable door assembly is connected to the base frame; A cleaning ladder includes a ladder and a fixing part that are connected to each other in the working state; in the working state of the cleaning ladder, the fixing part is engaged with the limiting member of the bottom frame, and the section of the ladder away from the fixing part abuts against one side of the cleaning inlet / outlet.

15. The cartridge according to claim 1, characterized in that, The cartridge also includes: Multiple support members are arranged in an array inside the light-shielding chamber; the support members are used to place the substrate. An adjustment fixture, which, in the detection state, extends into the light-shielding chamber through the substrate inlet and outlet to adjust the support member.

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