Multi-model chip mounter

By designing feeding, dispensing, and chip loading devices for multiple chip placement machines, the automation and precise placement of multi-chip packages were achieved, solving the problems of low efficiency and insufficient precision in existing technologies and improving the signal transmission efficiency of optical communication modules.

CN121484641APending Publication Date: 2026-02-06SHENZHEN KYUSHU OPTOELECTRONICS TECH CO LTD
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Patent Information

Application Number
CN202511692943.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-11-18
Publication Date
2026-02-06

AI Technical Summary

Technical Problem

Existing multi-chip die bonders suffer from low mounting efficiency and insufficient precision in high-density integration and heterogeneous integration scenarios. In particular, the alignment of laser chips and optical fibers is difficult in optical communication modules, which affects signal transmission efficiency.

Method used

A multi-model chip placement machine was designed, including a feeding and discharging device, a dispensing device, a chip loading device, and a bonding device. It realizes automated tray feeding and discharging, precise dispensing, and chip placement. By automating the bonding and precise alignment of various chip models, the stability and accuracy of the placement process are improved.

Benefits of technology

It improves the placement efficiency and quality of multi-chip packages to meet the needs of large-scale production, and enhances the alignment accuracy of laser chips and optical fibers in optical communication modules to ensure signal transmission efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

A multi-type chip mounter comprises a shell, a feeding and discharging device is arranged at one end of a table top on the shell, a dispensing device is arranged at the feeding end of the feeding and discharging device, a chip feeding device is arranged at the other end in the shell, a chip mounting device is arranged between the dispensing device and the chip feeding device, and the feeding and discharging device is used for feeding and discharging of trays. According to the invention, the feeding and discharging device can automatically provide the pasting substrate, namely the heat sink, placed on the tray for the chip mounter, so that the subsequent chip mounting operation is facilitated, and the feeding and discharging device can also receive the patching tray and the heat sink on the patching tray, so that the automation degree in the chip mounting process is realized.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical communication packaging equipment, and particularly to a multi-model chip mounter. BACKGROUND

[0002] Evolution of semiconductor packaging technology: With the development of the semiconductor industry, traditional single-chip packaging mode gradually approaches the physical and economic limit, and advanced packaging technologies such as SiP, Fan-Out, 2.5D / 3D packaging are rapidly developing, and the demand for multi-chip die bonder is increasing. Multi-chip die bonder, as an automated device that precisely bonds multiple chips to a substrate or lead frame during the semiconductor packaging process, plays a key role in high-density integration, heterogeneous integration, and flip-chip packaging scenarios.

[0003] Demand for heterogeneous integration: Chiplet mode, which splits a large chip into multiple small chips and integrates them together through advanced packaging technology, has become the mainstream path for the semiconductor industry to continue Moore's Law. This heterogeneous integration method requires the integration of chips with different process nodes, different functions, different sizes, and different thicknesses in a package, which puts high demands on the precision and coplanarity control of multi-chip die bonder.

[0004] The need to improve production efficiency: Traditional die bonding methods have significant defects for substrates that require the mounting of a large number of chips. For example, the time interval between dipping glue and completing all chip mounting can be long, causing some glue to begin to solidify during the waiting period, thereby affecting the mounting quality and efficiency. Therefore, a multi-chip die bonder is needed to improve mounting efficiency and quality to meet the needs of mass production.

[0005] The need to improve precision: In the field of optical communication modules, the alignment between laser chips and optical fibers must be within microns. If the precision of the die bonder is not sufficient, the optical path will not be aligned, and the signal transmission efficiency will decrease dramatically, or even completely fail. This requires a multi-chip die bonder with higher precision to meet the requirements of chip mounting precision in different application scenarios. SUMMARY

[0006] The present application provides a multi-model chip mounter to solve the above-mentioned deficiencies of the prior art, and solves the low efficiency of multi-chip packaging and the problems existing in the mounting process, which has strong practicality.

[0007] In order to achieve the purpose of the present application, the following technologies are adopted: A multi-model chip mounter comprises a housing, a feeding and discharging device arranged at one end of a table of the housing, a dispensing device arranged at a feeding end of the feeding and discharging device, a chip feeding device arranged at the other end of the housing, and a mounting device arranged between the dispensing device and the chip feeding device. The feeding and discharging device is used for feeding and discharging a tray. The tray has a rectangular structure and is provided with a rectangular placement groove. A heat sink is arranged in the placement groove. The dispensing device is used for dispensing glue at corresponding positions on the heat sink. The chip feeding device is used for providing a plurality of models of chips arranged in a wafer box to the mounting device, so that the plurality of models of chips are adhered to the heat sink by the mounting device, and the heat sink with the adhered chips is transferred to the feeding and discharging device.

[0008] Further, the feeding and discharging device comprises a first linear mechanism fixed to the table, a first moving plate fixed to an output end of the first linear mechanism, a second moving plate arranged on the first moving plate, a placement plate fixed to an upper end of the second moving plate, a first hole arranged at each end of the placement plate, a first screw movably arranged in the first hole, an end clamping plate connected to an upper end of the first screw at the same end, and a limiting vertical plate arranged outside the end of the placement plate for discharging. A fixed strip is arranged outside the other end of the placement plate for feeding. An end of the fixed strip is fixed to the table. A first vertical arm is arranged on the end of the fixed strip. An inner pushing mechanism is fixed to an upper end of the first vertical arm. A pair of second air cylinders are fixed to the placement plate. A movable clamping plate is fixed to a movable end of the second air cylinder. The movable clamping plate is arranged opposite to the end clamping plate at the same end.

[0009] Further, the inner pushing mechanism comprises a first base plate arranged on the upper end of the first vertical arm. A first air cylinder is fixed to the first base plate. A pushing disc is fixed to a movable end of the first air cylinder.

[0010] Further, the dispensing device comprises a first linear motor arranged on the table. A second linear motor is fixed to an output end of the first linear motor. The moving direction of the output end of the second linear motor is perpendicular to the moving direction of the output end of the first linear motor. A second linear mechanism is fixed to the output end of the second linear motor. A conveying mechanism is arranged below the second linear motor. A glue pot, a second camera, and a placement rack are arranged between the first linear motor and the conveying mechanism. The output end of the second linear motor is further fixed with a first camera with a lens arranged downward and a first linear rotary actuator. A glue dipping head is fixed to an output end of the first linear rotary actuator. The output end of the second linear mechanism is fixed with a first back plate. A moving sliding block is slidably arranged on the first back plate. First hanging pins are arranged on both sides of the upper end of the moving sliding block. A pair of second hanging pins are arranged on the first back plate. A tension spring is hung on the first hanging pin and the second hanging pin at the same side. A jacking rod is connected to the upper end of the moving sliding block. A pressure sensor is arranged on the upper end of the jacking rod. The pressure sensor is fixed to the first back plate through a fixed block. A pair of fixed sleeves are fixed to the moving sliding block. A dispensing tube is fixed in the fixed sleeve.

[0011] Further, the conveying mechanism comprises a conveying base plate fixed on the table top, two conveying side plates are fixed on the two sides of the conveying base plate, the inner wall of one of the conveying side plates is fixed with a first motor, a first synchronous wheel is connected to the output shaft of the first motor, two ends of an adjusting screw rod are rotatably arranged on the conveying side plate, the threads of the two ends of the adjusting screw rod are opposite, one end of the adjusting screw rod is connected with a second synchronous wheel, the first synchronous wheel and the second synchronous wheel are driven by a first synchronous belt, one end of each of the two adjusting guide rods is fixed to the two ends of the conveying side plate, two adjusting sleeve plates are fixed on the two ends of the adjusting screw rod, a second motor is fixed on the inner side of the conveying side plate, a third synchronous wheel is connected to the output shaft of the second motor, a first rotating shaft is rotatably arranged on the conveying side plate, a fourth synchronous wheel is fixed to one end of the first rotating shaft, the third synchronous wheel and the fourth synchronous wheel are driven by a second synchronous belt, the first rotating shaft is rotatably arranged on the adjusting sleeve plate, a first gear wheel is fixed to the first rotating shaft, the first gear wheel is located on the inner side of the adjusting sleeve plate, a second gear wheel is rotatably arranged on the inner side of one end of the adjusting sleeve plate, a third gear wheel is rotatably arranged on the inner side of the other end of the adjusting sleeve plate, the third gear wheel, the second gear wheel and the first gear wheel are driven by a third synchronous belt, a second back plate is fixed to the end of the conveying base plate, a third cylinder is mounted on the second back plate, a movable end block is movably arranged on the third cylinder, an upper pressing block is fixed to the upper end of the movable end block, the upper pressing block is fixed to the movable end of the third cylinder, a mounting vertical plate is fixed to the upper pressing block, an upper cover is fixed to the upper end of the conveying side plate, the upper cover is located on the upper side of the adjusting sleeve plate, a rectangular window is formed in the upper cover, a pair of fourth cylinders are fixed on the conveying base plate, a pad plate is fixed to the movable end of the fourth cylinder, and the pad plate is located directly below the upper cover.

[0012] Further, the glue pot comprises a third vertical plate fixed on the table top, an upper wall plate is fixed to the upper end of the third vertical plate, a scraper is formed on the inner side end of the upper wall plate, the scraper has a concave structure, and one end of the scraper is open, a third motor is fixed on the other side of the third vertical plate, a rotating seat is fixed to the upper end of the third motor, a storage pot is fixed to the output shaft of the third motor, the upper end of the storage pot is open, the storage cavity of the storage pot has a ring structure, the lower end of the scraper abuts against the bottom of the storage pot, and the inner and outer circumferences of the scraper abut against the inner and outer circumferences of the storage cavity.

[0013] Further, the placing rack comprises a fixed arm fixed on the table top, a hanging plate is fixed to the upper end of the fixed arm, a plurality of U-shaped placing grooves are formed in the hanging plate, and the glue head is placed in the placing groove.

[0014] Furthermore, the chip loading device includes a third linear motor fixed on the table, and a fourth linear motor is provided at the output end of the third linear motor. The moving direction of the output end of the third linear motor is perpendicular to the moving direction of the output end of the fourth linear motor. A fifth vertical plate is fixed at the output end of the fourth linear motor. A second linear rotary actuator and a third camera are fixed on the fifth vertical plate. A suction nozzle is connected to the lower output end of the second linear rotary actuator, and the lens of the third camera is set downward.

[0015] Below the third linear motor is a fifth linear motor, which is fixed to the table surface with screws. The output end of the fifth linear motor is connected to a sixth linear motor. The movement direction of the output end of the fifth linear motor is perpendicular to the movement direction of the output end of the sixth linear motor. The output end of the sixth linear motor is fixed to an upper fixing base, and a chip placement board is fixed on the upper fixing base. Multiple rectangular slots are evenly distributed on the chip placement board, and waffle boxes are placed in the rectangular slots. A fourth camera is provided on the inner side of the chip placement board, with the lens of the fourth camera facing upwards; The inner end of the chip placement board is equipped with a nozzle placement bracket, which is fixed to the table surface.

[0016] Furthermore, the patch assembly includes a fixed end piece fixed to the table surface. A seventh linear motor is fixed to the inner side of the fixed end piece. A crossbeam is fixed to the output end of the seventh linear motor. An eighth linear motor is fixed to the crossbeam. The movement direction of the output end of the seventh linear motor is perpendicular to the movement direction of the output end of the eighth linear motor. A vertical back plate is fixed to the output end of the eighth linear motor. A vertically arranged third linear mechanism is fixed to the vertical back plate. A vertical moving block is fixed to the output end of the third linear mechanism by screws. A moving back plate is fixed to the vertical moving block. A fifth camera is fixed to the moving back plate. The lens of the fifth camera is set downwards. A third linear rotary actuator and a fourth linear rotary actuator are fixed to the moving back plate. The lower movable ends of the third linear rotary actuator and the fourth linear rotary actuator are respectively provided with suction heads.

[0017] Furthermore, a fourth linear mechanism is installed on the platform. The fourth linear mechanism is located between the seventh linear motors. The moving direction of the output end of the fourth linear mechanism is parallel to the moving direction of the output end of the seventh linear motor. The output end of the fourth linear mechanism is fixed with a transfer mechanism to transfer the tray to the bottom of the eighth linear motor. The fifth cylinder is vertically arranged on the table top, and the movable end of the fifth cylinder is fixed with a moving-out mechanism, the moving-out mechanism is provided with an external pushing mechanism, the external pushing mechanism is used for pushing the tray on the moving-out mechanism to the feeding and discharging device, the fifth linear mechanism is further arranged between the seventh linear motors, the moving direction of the output end of the fifth linear mechanism is parallel to the moving direction of the output end of the fourth linear mechanism, the fifth linear mechanism is located on one side of the fourth linear mechanism, the output end of the fifth linear mechanism is fixed with a moving block, and the first suction cup is fixed on the moving block. The upper extension table is further arranged on the table top, the upper extension table is located on one side of the fifth linear mechanism, the second suction cup is arranged on the upper extension table, a plurality of suction tables are formed on the second suction cup, and the waffle box is arranged on the suction table. The sixth camera is arranged between the fifth linear mechanism and the fourth linear mechanism, and the lens of the sixth camera is upwardly arranged.

[0018] The above technical scheme has the following advantages: The present application can provide the substrate on the tray to the chip mounter automatically through the feeding and discharging device, so that the subsequent chip mounting operation is facilitated, and the tray and the substrate after mounting can be received, so that the automation degree in the mounting process is realized.

[0019] The glue is extruded on the substrate through the glue dispensing device, and then the glue head of the corresponding type is used to make the glue flat according to the shape structure of the chip, so as to improve the stability and accuracy after mounting.

[0020] The chip feeding device can automatically provide the chip placed in the waffle box to the mounting device according to the shape structure or type of the chip, so as to facilitate the mounting operation and improve the efficiency during mounting.

[0021] The mounting device can automatically complete the mounting operation of multiple chips, improve the mounting efficiency, improve the accuracy during mounting through the setting of the camera, and improve the mounting effect of the chip after mounting through the pressing mode. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to make the purpose, technical scheme and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings.

[0023] Figure 1 A perspective view of the multi-type chip mounter is shown.

[0024] Figure 2 A perspective view of the inside of the multi-type chip mounter is shown.

[0025] Figure 3The diagram shows the three-dimensional structure of the feeding and discharging device from different perspectives.

[0026] Figure 4 The three-dimensional structure of the dispensing device is shown from different perspectives. Figure Four .

[0027] Figure 5 The diagram shows a three-dimensional structural view of a portion of the dispensing device from different perspectives.

[0028] Figure 6 The diagram shows a three-dimensional structure of the chip loading device from a first-view perspective.

[0029] Figure 7 The diagram shows a three-dimensional structure of the chip loading device from a second perspective.

[0030] Figure 8 A three-dimensional structural diagram of the bonding device is shown from a first-view perspective.

[0031] Figure 9 A three-dimensional structural diagram of the bonding device is shown from a second perspective.

[0032] Figure 10 A three-dimensional structural diagram of the bonding device is shown from a first-view perspective.

[0033] Figure 11 A three-dimensional structural diagram of part of the bonding device is shown from a second perspective.

[0034] Figure 12 A three-dimensional structural diagram of part of the bonding device is shown from a third-person perspective. Detailed Implementation

[0035] like Figure 1 and Figure 2 As shown, a multi-model chip placement machine is characterized by comprising a housing 1, an infeed / outfeed device 2 at one end of the housing 1, a dispensing device 3 at the infeed end of the infeed / outfeed device 2, a chip loading device 4 at the other end of the housing 1, and a placement device 5 between the dispensing device 3 and the chip loading device 4. The infeed / outfeed device 2 is used for feeding and discharging tray 6. The tray 6 has a rectangular structure and a rectangular placement groove on it. The heat sink is placed in the placement groove. The dispensing device 3 is used to apply adhesive to corresponding points on the heat sink below it. The chip loading device 4 is used to provide multiple models of chips placed on a waffle box to the bonding device 5, so that the bonding device 5 can attach the multiple models of chips to the heat sink and transfer the heat sink with the attached chips to the infeed / outfeed device 2.

[0036] like Figure 1 and Figure 2As shown, the housing 1 includes a lower box 10, with adjustable support legs 11 fixed to the lower end of the lower box 10. Multiple casters 12 are also fixed to the lower end of the lower box 10. During operation, the support legs 11 are in contact with the ground. The lower box 10 contains equipment such as an air pump and a controller hub. An upper cover 13 is fixed to the upper end of the lower box 10. Windows are provided on the four side walls of the upper cover 13, and each window is equipped with an opening and closing window 15. The opening and closing window 15 is fixed to the upper cover 13 by hinges. A tabletop 16 made of marble is fixed to the upper end of the lower box 10. The feeding and discharging device 2, the dispensing device 3, the chip loading device 4, and the bonding device 5 are all fixed to the tabletop 16 and inside the upper cover 13.

[0037] like Figure 2 As shown, tray 6 has a rectangular structure and an open placement slot at the top, which is used for placing the heat sink. In addition, waffle box 7 has a rectangular structure with a rectangular bottom groove on its lower wall and multiple embedding slots at its upper end that match the shape of the chip. The chip is placed in the embedding slot on its corresponding waffle box 7.

[0038] like Figure 3As shown, the feeding / discharging device 2 includes a first mounting plate 200 fixed to the table 16 by screws. A pair of first ribs 201 are mounted on the first mounting plate 200 by screws. A first vertical plate 202 is fixed to the outer end of the first mounting plate 200 by screws. A first linear mechanism 203 is mounted on the first vertical plate 202. A first moving plate 204 is fixed to the output end of the first linear mechanism 203. A second moving plate 205 is mounted on the first moving plate 204 by screws. A second rib 206 is fixed to the second moving plate 205 by screws. The upper end of 205 is fixed with a placement plate 207 by screws. The second rib 206 is fixed to the lower side of the placement plate 207 by screws. The placement plate 207 has a long rectangular structure. A pair of first holes 208 parallel to its length direction are opened at both ends of the placement plate 207. A first screw 209 is movably installed in the first hole 208. The upper ends of the pair of first screws 209 at the same end are connected to an end clamp 210 by threads. A first limiting strip 211 is fixed to the upper end of the inner wall of the end clamp 210 by screws. One end of the placement plate 207 is used for The tray 6 is placed for unloading, and the other end of the placement plate 207 is used for loading the tray 6. A limiting vertical plate 212 is provided on the outer side of the unloading end of the placement plate 207. An inclined plate 213 is formed by bending the upper end of the limiting vertical plate 212 outwards. The upper end of the inclined plate 213 extends outwards at an angle. A fixing strip 226 is provided on the outer side of the loading end of the placement plate 207. The fixing strip 226 is fixed to the table surface 16 by bolts. A first vertical arm 227 is installed at one end of the fixing strip 226. An inward pushing mechanism is fixed to the upper end of the first vertical arm 227 by screws. A pair of second cylinders 214 are fixed to the placement plate 207 by screws. The movable ends of the second cylinders 214 are arranged opposite each other. A movable clamping plate 215 is fixed to the movable end of the second cylinder 214 by screws. The movable clamping plate 215 is arranged opposite to the end clamping plate 210 at the same end. A second limiting strip 216 is fixed to the upper end of the movable clamping plate 215 by screws. A first groove 217 is opened at both ends of the placement plate 207. A sensor 218 is fixed in the first groove 217. The sensor 218 is used to sense whether a tray 6 is placed on the placement plate 207.

[0039] The first linear mechanism 203 includes a second mounting plate 219 mounted on the lower end of the first vertical plate 202 by screws. A lead screw 221 is connected to the output shaft of the second mounting plate 219. A movable seat 223 is threaded onto the lead screw 221. A pair of movable sleeves 225 are fixed to the movable seat 223 by screws. A pair of guide rails 224 are mounted on the outer side of the first vertical plate 202 by screws. The movable sleeves 225 are sleeved on the guide rails 224. The movable seat 223 is the output end of this type of linear mechanism.

[0040] The push mechanism includes a first base plate 228 mounted on the upper end of the first vertical arm 227, a first cylinder 229 fixed on the first base plate 228, and a movable nozzle 230 fixed on the movable end of the first cylinder 229.

[0041] like Figure 4 and Figure 5 As shown, the dispensing device 3 includes a dispensing controller 300 fixed inside the upper cover 13. Two pairs of parallel first mounting bases 301 are fixed on the table 16. A first linear motor 302 is fixed to the upper end of one of the first mounting bases 301. A second linear motor 305 is fixed to the output end of the first linear motor 302. The internal structure of the second linear motor 305 is identical to that of the first linear motor 302. The moving direction of the output end of the second linear motor 305 is perpendicular to the moving direction of the output end of the first linear motor 302. A first sliding sleeve 304 is fixed to the lower side of the other end of 5. A second guide rail 303 is installed on another first mounting base 301. The first sliding sleeve 304 is sleeved on the second guide rail 303. A second vertical plate 306 is fixed to the output end of the second linear motor 305. A second linear mechanism 307 is fixed on the second vertical plate 306. The internal structure of the second linear mechanism 307 is the same as that of the first linear mechanism 203. The moving direction of the output end of the second linear mechanism 307 is perpendicular to the moving direction of the output end of the second linear motor 305 and moves along the vertical direction.

[0042] A first camera 318 with its lens facing downwards is fixed on the second vertical plate 306.

[0043] The second vertical plate 306 is also fixed with a first linear rotary actuator 319. The output end of the first linear rotary actuator 319 is fixed with a glue-applying head 320. The output end of the first linear rotary actuator 319 has the functions of longitudinal movement and rotation.

[0044] The output end of the second linear motor 305 is fixed with a first movable block 309. A first back plate 348 is fixed to the front side of the first movable block 309. A sliding block 351 is slidably provided on the lower end of the first back plate 348 via a track. First hooks 352 are provided on the upper ends of both sides of the sliding block 351. A pair of second hooks 349 are provided on the first back plate 348. Tension springs 350 are hung on the first hooks 352 and second hooks 349 on the same side. A push rod 353 is threadedly connected to the upper end of the sliding block 351. A pressure sensor is provided at the upper end of the push rod 353. The pressure sensor is fixed to the first back plate 348 via a fixing block 354. A pair of fixing sleeves 356 are fixed on the sliding block 351. A dispensing tube 357 is fixed inside the fixing sleeves 356 by screws. A needle is provided at the lower end of the dispensing tube 357. An air inlet pipe is connected to the upper end of the dispensing tube 357. The air inlet pipe is used to inject air into the dispensing tube 357 to squeeze out the glue inside the dispensing tube 357.

[0045] The first linear motor 302 includes a long strip-shaped base plate, on which a stator and a pair of guide rails are mounted. A sliding sleeve is movably mounted on the guide rails, and a sliding seat is fixed on the sliding sleeve. A moving part is fixed on the lower side of the sliding seat. The moving part moves on the stator, and the sliding seat is the output end of this type of linear motor.

[0046] Below the second linear motor 305 is a conveying mechanism, which includes a conveying base plate 310 fixed to the platform 16. Conveying side plates 330 are fixed to both sides of the conveying base plate 310 by screws. A first motor 332 is fixed to the inner wall of one of the conveying side plates 330. A first synchronous pulley 333 is connected to the output shaft of the first motor 332. An adjusting screw 336 with oppositely oriented threads is rotatably mounted on the conveying side plate 330. One end of the adjusting screw 336 is connected to a second synchronous pulley 335. The first synchronous pulley 333 and the second synchronous pulley 335 are driven by a first synchronous belt 334. Both ends of the conveying side plate 330 are fixed by screws. There is an adjusting guide rod 331. The two ends of the adjusting screw 336 are threadedly connected to adjusting sleeves 361. Adjusting side plates 337 are fixed to the adjusting sleeves 361. A second motor 362 is fixed to the inner side of the conveying side plate 330. A third synchronous pulley 363 is connected to the output shaft of the second motor 362. A first rotating shaft 366 is rotatably mounted on the conveying side plate 330. A fourth synchronous pulley 365 is fixed to one end of the first rotating shaft 366. The third synchronous pulley 363 and the fourth synchronous pulley 365 are driven by a second synchronous belt 364. The first rotating shaft 366 is rotatably mounted on the adjusting side plate 337. A first rotating pulley 367 is fixed to the first rotating shaft 366. The first rotating wheel 367 is located inside the adjusting side plate 337. Tensioning wheels 368 are respectively provided on both sides of the first rotating wheel 367. The tensioning wheels 368 are rotatably mounted on the inner side of the adjusting side plate 337 via a shaft. A second rotating wheel 369 is rotatably mounted on the inner side of one end of the adjusting side plate 337 via a shaft, and a third rotating wheel 339 is rotatably mounted on the inner side of the other end of the adjusting side plate 337 via a shaft. The third rotating wheel 339, the second rotating wheel 369, the first rotating wheel 367, and the tensioning wheels 368 are driven by a third synchronous belt 360. A second back plate 341 is fixed to the end of the conveying base plate 310 along the conveying direction by screws. A third cylinder is mounted on the second back plate 341 by screws. 342, The third cylinder 342 is movably provided with a movable end block 343 via a slider and guide groove. The upper end of the movable end block 343 is fixed with an upper top block 344 by screws. The upper top block 344 is fixed to the movable end of the third cylinder 342. The upper top block 344 is fixed with a mounting vertical plate 345 by screws. The upper end of the conveying side plate 330 is fixed with an upper cover 346 via a pair of lugs. The upper cover 346 is located above the adjusting side plate 337. A rectangular window 347 is opened on the upper cover 346. A pair of fourth cylinders 359 are fixed on the conveying base plate 310. The movable end of the fourth cylinder 359 is fixed with a pad 370. The pad 370 is located directly below the upper cover 346.

[0047] A glue tray, a second camera 317, and a placement rack are provided between the first linear motor 302 and the conveying mechanism. The glue tray is close to the second linear motor 305, and the second camera 317 is located between the glue tray and the placement rack.

[0048] The plastic basin includes a third vertical plate 321 fixed to the tabletop 16 by screws. An adjusting seat 380 is fixed to the upper end of one side of the third vertical plate 321 by screws. An adjusting block 322 is movably mounted on the adjusting seat 380. The adjusting seat 380 and the adjusting block 322 are slidably connected by a guide rail and a guide groove. Limiting side plates are fixed to both sides of the adjusting seat 380 by screws. Vertical slots are provided on the limiting side plates, and movable screws pass through these slots. The movable screws are threaded onto the adjusting block 322. An upper wall plate 324 is fixed to the upper end of the adjusting block 322 by screws. A scraper is formed on the inner end of the upper wall plate 324. Plate 325, scraper 325 has a concave structure and one end of scraper 325 is open. The other side of the third vertical plate 321 is fixed with a third motor 326 by screws. The upper end of the third motor 326 is fixed with a rotating seat 327 by screws. The rotating seat 327 is fixed to the third vertical plate 321 by screws. The upper end of the output shaft of the third motor 326 is fixed with a storage basin 328. The upper end of the storage basin 328 is open and the storage cavity of the storage basin 328 has an annular structure. The lower end of scraper 325 abuts against the bottom of storage basin 328, and the inner and outer circumferences of scraper 325 abut against the inner and outer circumferences of storage cavity, respectively.

[0049] A fourth vertical plate 314 is fixed to the tabletop 16 by screws. A shifting seat 315 is fixed to the inner wall of the fourth vertical plate 314 by screws. A shifting block 316 is movably mounted on the shifting seat 315 via a guide rail and a guide groove. The shifting block 316 and the shifting seat 315 are connected and locked by screws. The second camera 317 is fixed on the shifting block 316, and the lens of the second camera 317 is set upwards.

[0050] The placement rack includes a fixed arm 311 that is fixed to the table 16 by screws. The upper end of the fixed arm 311 is fixed with a hanging plate 312 by screws. The hanging plate 312 has multiple U-shaped placement slots, and various types of glue-applying heads 320 are placed in the placement slots.

[0051] like Figure 6 and Figure 7As shown, the chip loading device 4 includes a pair of parallel second mounting bases 400, which are fixed to the table surface 16 by screws. A third linear motor 401 is fixed to one of the second mounting bases 400 by screws. A fourth linear motor 402 is provided at the output end of the third linear motor 401. The moving direction of the output end of the third linear motor 401 is perpendicular to the moving direction of the output end of the fourth linear motor 402. The internal structure of the third linear motor 401 and the fourth linear motor 402 is the same as that of the first linear motor 302. The other end of the fourth linear motor 402... A second slider 403 is fixed to the lower side of the first linear motor 402. A third guide rail 404 is fixed to the second mounting base 400 by screws. The second slider 403 is slidably mounted on the third guide rail 404. A first movable plate 405 is fixed to the output end of the fourth linear motor 402 by screws. A fifth vertical plate 406 is fixed to the first movable plate 405 by screws. A second linear rotary actuator 407 and a third camera 409 are fixed to the fifth vertical plate 406 by screws. A suction nozzle 410 is connected to the lower output end of the second linear rotary actuator 407. The lens of the third camera 409 is set downwards.

[0052] Below the third linear motor 401 is a fifth linear motor 412, which is fixed to the table 16 with screws. The output end of the fifth linear motor 412 is connected to a sixth linear motor 413. The movement direction of the output end of the fifth linear motor 412 is perpendicular to the movement direction of the output end of the sixth linear motor 413. The internal structure of the fifth linear motor 412 and the sixth linear motor 413 is the same as that of the first linear motor 302. The output end of the sixth linear motor 413 is fixed to a movable lower plate 414 with screws. An upper fixed seat 415 is fixed to the movable lower plate 414 with screws. A chip placement board 416 is fixed to the upper fixed seat 415 with screws. Multiple rectangular slots 417 are evenly distributed on the chip placement board 416. The waffle box 7 is placed in the rectangular slot 417. A rectangular ring 419 is formed at the bottom of the rectangular slot 417. The rectangular ring 419 passes through the rectangular bottom slot. A rectangular hole 418 is opened between two adjacent rectangular slots.

[0053] A fourth camera 411 is provided on the inner side of the chip placement board 416. The lens of the fourth camera 411 is set upward. The fourth camera 411 is fixed to the table 16 by a fixing component that is the same as that of the second camera 317.

[0054] The inner end of the chip placement board 416 is provided with a nozzle placement frame 420, which has the same structure as the placement frame. The nozzle placement frame 420 is fixed on the table surface 16.

[0055] like Figure 8 and Figure 12As shown, the patch assembly 5 includes a pair of parallel third mounting bases 500. The third mounting bases 500 are fixed to the table surface 16 by screws. A fixing end piece 501 is fixed to the upper end of the third mounting base 500. A seventh linear motor 502 is fixed to the inner side of the fixing end piece 501. A crossbeam 503 is fixed to the output end of the seventh linear motor 502. An eighth linear motor 504 is fixed to the crossbeam 503. The movement direction of the output end of the seventh linear motor 502 is perpendicular to the movement direction of the output end of the eighth linear motor 504. The internal structure of the seventh linear motor 502 and the eighth linear motor 504 is the same as that of the first linear motor 302. A vertical back plate 505 is fixed to the output end of the eighth linear motor 504. A vertically arranged third linear motor 504 is fixed to the vertical back plate 505. The linear mechanism 521 and the first linear mechanism 203 of the third linear mechanism 521 have the same structure. A vertical moving block 522 is fixed to the output end of the third linear mechanism 521 by screws. A moving back plate 529 is fixed to the vertical moving block 522 by screws. A connecting back plate 520 is fixed to the front side of the vertical back plate 505. The connecting back plate 520 and the moving back plate 529 are slidably connected by guide rails and guide sleeves. A fifth camera 528 is fixed to the moving back plate 529 by screws. The lens of the fifth camera 528 is set downward. A third linear rotary actuator 526 and a fourth linear rotary actuator 525 are fixed to the moving back plate 529 by screws. The lower movable ends of the third linear rotary actuator 526 and the fourth linear rotary actuator 525 are respectively provided with suction heads 527.

[0056] A fourth linear mechanism 507 is installed on the platform 16. The fourth linear mechanism 507 is located between the seventh linear motors 502. The moving direction of the output end of the fourth linear mechanism 507 is parallel to the moving direction of the output end of the seventh linear motor 502. The fourth linear mechanism 507 has the same structure as the first linear mechanism 203. The output end of the fourth linear mechanism 507 is fixed with a transfer mechanism 508 that has the same structure as the conveying mechanism, so as to transfer the tray 6 to the bottom of the eighth linear motor 504.

[0057] Multiple fifth cylinders are installed on the table 16. The fifth cylinders are arranged vertically, and the movable end of the fifth cylinder is fixed with a removal mechanism 506 that is consistent with the structure of the conveying mechanism. The removal mechanism 506 is consistent with the structure of the inner push mechanism and the outer push mechanism 519. The outer push mechanism 519 is used to push the tray 6 located on the removal mechanism 506 onto the placement plate 207. A fifth linear mechanism 509 is also provided between the seventh linear motors 502. The structure of the fifth linear mechanism 509 is the same as that of the first linear mechanism 203. The moving direction of the output end of the fifth linear mechanism 509 is parallel to the moving direction of the output end of the fourth linear mechanism 507. The fifth linear mechanism 509 is located on one side of the fourth linear mechanism 507. The output end of the fifth linear mechanism 509 is fixed with a moving block 518 by screws. A first suction cup 530 is fixed on the moving block 518. Multiple first suction grooves are opened at the upper end of the first suction cup 530. The first suction grooves match the shape structure of one of the chips.

[0058] An upper extension stage 515 is also installed on the table 16. The upper extension stage 515 is located on one side of the fifth linear mechanism 509. A second suction cup 516 is installed on the upper extension stage 515. Multiple suction tables 517 are formed on the second suction cup 516. The waffle box 7 is placed on the suction table 517.

[0059] Multiple suction head placement racks 511 are also installed on the tabletop 16. The suction head placement racks 511 have the same structure as the placement racks and are used to place various types of suction heads.

[0060] A sixth camera 510 is provided between the fifth linear mechanism 509 and the fourth linear mechanism 507. The lens of the sixth camera 510 is set upward, and the sixth camera 510 is fixed to the table 16 by a fixing component with the same structure as the fixing component of the second camera 317.

[0061] A plastic basin is also provided between the fifth linear mechanism 509 and the fourth linear mechanism 507, and the plastic basin is fixed on the table 16.

[0062] In this embodiment, the following method is used for application: Step 01: The operator places the rectangular heat sink or substrate into the placement slot of the tray 6, and then places the tray 6 into the feeding placement area of ​​the placement plate 207. During placement, the trays 6 can be stacked on the placement plate 207. After placement, the second cylinder 214 is activated to clamp and fix the tray 6 through the movable clamping plate 215 and the end clamping plate 210. Furthermore, according to the chip model, it is placed in the corresponding waffle box 7, and the waffle box 7 containing the chip is placed in the rectangular slot 417 of the chip placement board 416. The above operations can be completed in one step or in steps, as they are all the starting point of the entire method execution, and therefore are executed within the same step.

[0063] Step 02: Activate the first linear mechanism 203 so that the bottom surface of the top tray 6 is above the third synchronous belt 360, and activate the first cylinder 229 to push the top tray 6 onto the third synchronous belt 360.

[0064] Step 03: Start the second motor 362 to transfer the tray 6 to one end of the mounting plate 345 via the third synchronous belt 360. The inner end of the tray 6 abuts against the inner side of the mounting plate 345 and the pad 370. At this time, the mounting plate 345 is in a high position under the drive of the third cylinder 342.

[0065] Step 04: Activate the fourth cylinder 359 to move the pad 370 upwards, so that the upper wall of the tray 6 abuts against the lower side of the upper cover 346, and the heat sink is located at the rectangular window 347. The first motor 332 is started synchronously, causing the adjusting screw 336 to rotate. When the adjusting screw 336 rotates, the adjusting side plates 337 will move closer to each other and abut against the two sides of the tray 6.

[0066] Step 05: Driven by the first linear motor 302, the second linear motor 305, and the second linear mechanism 307, the needle is first positioned at the location where the chip is to be bonded to the heat sink. Then, by injecting air, adhesive is squeezed from the needle to the chip bonding location. The first linear rotary actuator 319 drives the adhesive applicator 320 to modify the adhesive to match the shape and structure of the chip. During operation, the appropriate adhesive applicator 320 can be picked up from the placement rack as needed. During the dispensing process, the first camera 318 is used to determine the shape and quantity of the adhesive, while the second camera 317 is used to verify whether the selected adhesive applicator 320 is suitable. This improves the accuracy of dispensing. If there is no glue in the dispensing tube 357, the dispensing tube 357 is moved to the storage basin 328 and glue is filled in the dispensing tube 357 by suction. In addition, in order to avoid glue clumping, the storage basin 328 is rotated under the drive of the third motor 326 during the operation, and the glue in the storage cavity is scraped off by the scraper 325 during the rotation to prevent the glue from adhering to the inner wall of the storage cavity.

[0067] Step 06: Activate the third cylinder 342, the fourth cylinder 359, and the first motor 332 to remove the limit on the pallet 6. After that, the pallet 6 will move to the transfer mechanism 508 under the drive of the third synchronous belt 360, and will be transferred to the end of the fourth linear mechanism 507, i.e., near the cross frame 503, under the drive of the fourth linear mechanism 507.

[0068] On the other hand, the fifth linear mechanism 509 is activated so that the first suction cup 530 and the suction nozzle set on the moving block 518 are moved to the chip loading device 4.

[0069] Next, the third linear motor 401, the fourth linear motor 402, the fifth linear motor 412, and the sixth linear motor 413 are activated. The second linear rotary actuator 407 and its suction nozzle 410 pick up the chip and place it onto the corresponding waffle box 7. During chip transfer, the corresponding waffle box 7 can be placed at the location of the first suction cup 530 according to the chip's shape. During operation, the suction nozzle 410 is changed according to the chip's shape, and the transfer process is monitored by the third camera 409, while the changed suction nozzle 410 is confirmed by the fourth camera 411.

[0070] Step 07: Start the seventh linear motor 502, the eighth linear motor 504, the third linear mechanism 521, the third linear rotary actuator 526, and the fourth linear rotary actuator 525. Transfer the chip to the heat sink chip placement position through the pick-up head 527. After placement, the chip needs to be pressed to ensure the placement effect. During the placement process, the fifth camera 528 monitors the placement process and changes the pick-up head 527 according to the shape and structure of the chip. Finally, the placement operation is completed on the heat sink.

[0071] Step 08: Activate the transfer mechanism 508 and transfer the heat sink with the adhered chip to the removal mechanism 506. Transfer the tray 6 to the placement plate 207 through the removal mechanism 506. Activate the first cylinder 229 on the push mechanism 519 to completely push the tray 6 out of the third synchronous belt 360 on the removal mechanism 506, so that the outer end of the tray 6 abuts against the limiting vertical plate 212. When the sensor 218 detects the presence of the tray 6, activate the second cylinder 214 to clamp the tray 6 through the movable clamping plate 215 and the end clamping plate 210, and wait for the tray 6 to be removed.

[0072] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Obviously, those skilled in the art can make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and variations.

Claims

1. A multi-model chip eutectic reactor, characterized in that, Includes a housing (1), a table (16) on the housing (1) is provided with a feeding device (2) at one end, a dispensing device (3) is provided at the feeding end of the feeding device (2), a chip loading device (4) is provided at the other end inside the housing (1), and a chip mounting device (5) is provided between the dispensing device (3) and the chip loading device (4). The feeding device (2) is used for feeding and discharging the tray (6). The tray (6) has a rectangular structure and a rectangular placement groove is provided on it. The heat sink is placed in the placement groove. The dispensing device (3) is used to apply glue to the corresponding position on the heat sink below it. The chip loading device (4) is used to provide multiple types of chips placed on the waffle box (7) to the bonding device (5) so that multiple types of chips can be pasted on the heat sink through the bonding device (5) and the heat sink with the pasted chips can be transferred to the feeding device (2).

2. The multi-chip eutectic reactor according to claim 1, characterized in that, The feeding / discharging device (2) includes a first linear mechanism (203) fixed on the table (16), with a first moving plate (204) fixed at its output end. A second moving plate (205) is installed on the first moving plate (204). A placement plate (207) is fixed at the upper end of the second moving plate (205). A first hole (208) is opened at both ends of the placement plate (207). A first screw (209) is movably installed in the first hole (208). An end clamp (210) is connected to the upper end of the first screw (209) located at the same end. One end of the placement plate (207) is used for placing the tray (6) when it is discharging. The other end of the placement plate (207) is used for placing the tray (6) when it is discharging. The end is used for placing the tray (6) when feeding. The outer side of the end of the placement plate (207) used for discharging is provided with a limiting vertical plate (212). The outer side of the end of the placement plate (207) used for feeding is provided with a fixing strip (226). The fixing strip (226) is fixed on the table (16). One end of the fixing strip (226) is equipped with a first vertical arm (227). The upper end of the first vertical arm (227) is fixed with an inward pushing mechanism. A pair of second cylinders (214) are fixed on the placement plate (207). The movable end of the second cylinder (214) is fixed with a movable clamping plate (215). The movable clamping plate (215) is set opposite to the end clamping plate (210) at the end.

3. The multi-chip eutectic reactor according to claim 2, characterized in that, The push mechanism includes a first base plate (228) mounted on the upper end of the first vertical arm (227), a first cylinder (229) fixed on the first base plate (228), and a push plate (230) fixed on the movable end of the first cylinder (229).

4. The multi-chip eutectic reactor according to claim 1, characterized in that, The dispensing device (3) includes a first linear motor (302) mounted on a table (16), a second linear motor (305) with a stroke direction perpendicular to it fixed at its output end, a second linear mechanism (307) fixed at the output end of the second linear motor (305), a conveying mechanism provided below the second linear motor (305), and a glue basin, a second camera (317) and a placement rack provided between the first linear motor (302) and the conveying mechanism; a first camera (318) with its lens facing downward and a first linear rotary actuator (319) fixed at the output end of the second linear motor (305), and a glue-dipping head (320) fixed at the output end of the first linear rotary actuator (319); The output end of the second linear mechanism (307) is fixed with a first back plate (348). The first back plate (348) is slidably provided with a slider (351). The upper ends of both sides of the slider (351) are provided with first hooks (352). The first back plate (348) is provided with a pair of second hooks (349). The first hooks (352) and the second hooks (349) on the same side are provided with tension springs (350). The upper end of the slider (351) is connected with a push rod (353). The upper end of the push rod (353) is provided with a pressure sensor. The pressure sensor is fixed to the first back plate (348) by a fixing block (354). The slider (351) is fixed with a pair of fixing sleeves (356), and a dotted tube (357) is fixed inside them.

5. The multi-chip eutectic reactor according to claim 4, characterized in that, The conveying mechanism includes a conveying base plate (310) fixed on a table (16), with conveying side plates (330) fixed on both sides. A first motor (332) is fixed to the inner wall of one of the conveying side plates (330). A first synchronous pulley (333) is connected to the output shaft of the first motor (332). An adjusting screw (336) with opposite threads at both ends is rotatably provided on the conveying side plate (330). A second synchronous pulley (335) is connected to one end of the adjusting screw (336). A first synchronous belt (334) connects the first synchronous pulley (333) and the second synchronous pulley (335). The transmission is as follows: an adjusting guide rod (331) is fixed at both ends of the conveying side plate (330); an adjusting screw (336) is connected to both ends of the adjusting screw (336); an adjusting side plate (337) is fixed on the adjusting screw (361); a second motor (362) is fixed inside the conveying side plate (330); a third synchronous pulley (363) is connected to the output shaft of the second motor (330); a first rotating shaft (366) is rotatably mounted on the conveying side plate (330); a fourth synchronous pulley (365) is fixed at one end of the first rotating shaft (366); and the third synchronous pulley (363) and the fourth synchronous pulley (365) are connected to each other. 65) are driven by a second synchronous belt (364). The first rotating shaft (366) is rotatably mounted on the adjusting side plate (337). A first rotating wheel (367) located inside the adjusting side plate (337) is fixed on the first rotating shaft (366). A second rotating wheel (369) is rotatably mounted on the inner side of one end of the adjusting side plate (337) via a shaft. A third rotating wheel (339) is rotatably mounted on the inner side of the other end. The third rotating wheel (339), the second rotating wheel (369), and the first rotating wheel (367) are driven by a second synchronous belt (360). A third rotating wheel (369) is mounted on the conveying base plate (310). The third cylinder (342) has a movable end block (343) on its movable end block (343), and an upper top block (344) is fixed on the upper end of the movable end block (343). The upper top block (344) is fixed to the movable end of the third cylinder (342). The upper end of the conveying side plate (330) is fixed with an upper cover (346) located on the upper side of the adjusting side plate (337), and a rectangular window (347) is opened on it. A pair of fourth cylinders (359) are fixed on the conveying base plate (310), and a pad (370) is fixed on its movable end. The pad (370) is located directly below the upper cover (346).

6. The multi-chip eutectic reactor according to claim 4, characterized in that, The plastic basin includes a third vertical plate (321) fixed on the tabletop (16). An upper wall plate (324) is fixed to the upper end of the third vertical plate (321). A scraper (325) is formed on the inner side of the upper wall plate (324). The scraper (325) has a concave structure and one end of the scraper (325) is open. A third motor (326) is fixed to the other side of the third vertical plate (321). A rotating seat (327) is fixed to the upper end of the third motor (326). A storage basin (328) is fixed to the upper end of the output shaft of the third motor (326). The upper end of the storage basin (328) is open, and the storage cavity of the storage basin (328) has an annular structure. The lower end of the scraper (325) abuts against the bottom of the storage basin (328), and the inner and outer circumferences of the scraper (325) abut against the inner and outer circumferences of the storage cavity, respectively.

7. The multi-chip eutectic reactor according to claim 4, characterized in that, The placement rack includes a fixed arm (311) fixed on the table (16), and a hanging plate (312) fixed at the upper end of the fixed arm (311). The hanging plate (312) has multiple U-shaped placement slots, and the glue applicator (320) is placed in the placement slot.

8. The multi-chip eutectic reactor according to claim 1, characterized in that, The chip loading device (4) includes a third linear motor (401) fixed on the table (16), and a fourth linear motor (402) with a stroke direction perpendicular to it at its output end. The output end of the fourth linear motor (402) is fixed with a second linear rotary actuator (407) and a third camera (409) with its lens facing downward. The output end of the second linear rotary actuator (407) is connected to a suction nozzle (410). Below the third linear motor (401) is a fifth linear motor (412) mounted on the table (16), and its output end is connected to a sixth linear motor (413) with a stroke direction perpendicular to it. The output end of the sixth linear motor (413) is mounted with a chip placement board (416). Multiple rectangular slots (417) are evenly distributed on the chip placement board (416), and a waffle box (7) is placed in the rectangular slot (417). The inner end of the chip placement board (416) is provided with a fourth camera (411) with its lens facing upward. The chip placement board (416) has a nozzle placement rack (420) fixed to the table surface (16) on its inner side.

9. The multi-chip eutectic reactor according to claim 1, characterized in that, The patch assembly (5) includes a seventh linear motor (502) fixed on a table (16), with a crossbeam (503) fixed at its output end. An eighth linear motor (504) with a stroke direction perpendicular to the seventh linear motor (502) is fixed on the crossbeam (503). A vertical backplate (505) is fixed at the output end of the eighth linear motor (504). A third linear mechanism (521) is fixed on the vertical backplate (505) and is arranged vertically. A vertical moving block (522) is fixed at the output end of the third linear mechanism (521). A fifth camera (528) with its lens facing downward is mounted on the vertical moving block (522). A third linear rotary actuator (526) and a fourth linear rotary actuator (525) are fixed on the moving backplate (529). The lower movable ends of the third linear rotary actuator (526) and the fourth linear rotary actuator (525) are respectively provided with suction heads (527).

10. The multi-chip eutectic reactor according to claim 9, characterized in that, A fourth linear mechanism (507) is installed on the table (16). The fourth linear mechanism (507) is located between the seventh linear motor (502), and its stroke direction is parallel to the stroke direction of the seventh linear motor (502). A transfer mechanism (508) is fixed at the output end of the fourth linear mechanism (507) to transfer the tray (6) to the bottom of the eighth linear motor (504). Multiple vertically arranged fifth cylinders are installed on the table (16), and their movable ends are connected to a removal mechanism (506). The removal mechanism (506) is equipped with an external push mechanism (519). The external push mechanism (519) is used to push the tray (6) located on the removal mechanism (506) onto the feeding and discharging device (2). A fifth linear mechanism (509) is also provided between the seventh linear motors (502). The stroke direction of the fifth linear mechanism (509) is parallel to the stroke direction of the fourth linear mechanism (507). The fifth linear mechanism (509) is located on one side of the fourth linear mechanism (507). A moving block (518) is fixed at the output end of the fifth linear mechanism (509), and a first suction cup (530) is fixed on it. Multiple first suction grooves are opened at the upper end of the first suction cup (530). An upper extension stage (515) is also installed on the table (16). The upper extension stage (515) is located on one side of the fifth linear mechanism (509). A second suction cup (516) is installed on the upper extension stage (515), and multiple suction tables (517) are formed on it. The waffle box (7) is placed on the suction table (517). A sixth camera (510) with its lens facing upward is provided between the fifth linear mechanism (509) and the fourth linear mechanism (507). A glue basin is also provided between the fifth linear mechanism (509) and the fourth linear mechanism (507), and the glue basin is fixed to the table (16).

Citation Information

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