Crystal growth equipment and dust catching mechanism

Abstract

The invention discloses crystal growth equipment and a dust catching mechanism. The dust catching mechanism comprises an exhaust pipeline, a fixed dust catching piece and a movable dust catching piece, wherein the fixed dust catching piece and the movable dust catching piece are located in the exhaust pipeline. The inner edge of the fixed dust catching piece and the inner edge of the movable dust catching piece respectively form two occlusal surfaces with up-and-down structures, and the occlusal surfaces are opposite to each other and are complementary in shape. The movable dust catching piece can move relative to the fixed dust catching piece so that the two meshing faces can be spaced or meshed with each other. When the two occlusal surfaces are spaced from each other, a dust catching channel is formed, so that a plurality of dust can be attached to at least one of the two occlusal surfaces to form an aggregation body. And when the two occlusal surfaces are occluded with each other, the assembly body is stripped from the two occlusal surfaces. Therefore, the dust catching mechanism can be used for effectively reducing the internal pressure of the crystal growth furnace and prolonging the service life of internal components of the dust collecting device.

Description

Technical Field

[0001] The present invention relates to a crystal growth device, and particularly to a crystal growth device with a dust collection function and a dust collection mechanism. Background Art

[0002] Existing crystal growth devices include a crystal growth furnace and a cyclone dust collector configured with the crystal growth furnace. During the crystal growth operation, the crystal growth furnace discharges gas through an exhaust pipeline, and the cyclone dust collector can remove the dust. However, the cyclone dust collector can remove dust with larger particle sizes, which causes dust with smaller particle sizes to easily adhere to the exhaust pipeline, thereby causing blockage of the exhaust pipeline, increasing the exhaust resistance, and making it difficult to control the internal pressure of the crystal growth furnace. Furthermore, due to the poor dust collection efficiency of the cyclone dust collector for dust with smaller particle sizes, the service life of the cyclone dust collector is shortened; if the cyclone dust collector is not configured, it is likely to impose a great burden on the equipment for air extraction and even cause it to fail.

[0003] Therefore, the inventor believes that the above defects can be improved. After painstaking research and application of scientific principles, the inventor finally proposed the present invention with a reasonable design and effective improvement of the above defects. Summary of the Invention

[0004] Embodiments of the present invention aim to provide a crystal growth device and a dust collection mechanism, which can effectively improve the defects of the existing crystal growth device that may cause attachments on the exhaust pipe and reduced dust collection efficiency of the cyclone dust collector during the crystal growth process.

[0005] This invention discloses a crystal growth apparatus, comprising: a crystal growth furnace having an exhaust port; a dust collection device installed at the exhaust port of the crystal growth furnace, the dust collection device comprising: a dust collection mechanism, including: an exhaust pipe having an inlet end and an outlet end, the inlet end of the exhaust pipe being connected to the exhaust port; a fixed dust collector located within the exhaust pipe, the inner edge of the fixed dust collector forming a first engagement surface with a raised and lower undulating structure; and a movable dust collector located within the exhaust pipe, the inner edge of the movable dust collector forming a second engagement surface with a raised and lower undulating structure, facing and having a shape complementary to the first engagement surface; wherein, the movable dust collector can, compared to the fixed dust collector, [achieve certain advantages]. The dust collector moves between a separated position and an engaged position; wherein, when the movable dust collector is in the separated position, a first engaged surface and a second engaged surface are spaced apart to form a dust collection channel, so that multiple dust particles flowing from the inlet end to the dust collection channel can adhere to at least one of the first engaged surface and the second engaged surface to form an agglomerate; wherein, when the movable dust collector is in the engaged position, the second engaged surface engages with the first engaged surface, so that the agglomerate detaches from it and flows to the outlet end after leaving the first engaged surface on the second engaged surface; a cyclone dust collector is connected to the outlet end of the exhaust pipe; an exhaust mechanism is connected to the cyclone dust collector for exhausting air from the dust collection mechanism and the cyclone dust collector.

[0006] Optionally, the dust collection mechanism includes a cooler, and the cooler is installed in both the fixed and movable dust collection components to introduce a cooling medium into both components.

[0007] Optionally, when the movable dust collector is in the engaged position, a temporary channel is formed between the movable dust collector and the inner wall of the exhaust pipe; wherein the dust collection mechanism includes an inert gas supplier and the inert gas supplier is connected to the exhaust pipe to provide inert gas to the temporary channel when the movable dust collector is in the engaged position.

[0008] Optionally, an inert gas supplier is used to supply inert gas to the exhaust line, and the flow rate of the inert gas supplied by the inert gas supplier is inversely proportional to the distance between the first mating surface and the second mating surface.

[0009] Optionally, the inner diameter of the dust collection channel is between 50% and 100% of the inner diameter of the outlet end.

[0010] Optionally, the exhaust pipe is defined in an axial direction with an inlet end and an outlet end, and the movable dust collector moves in a radial direction perpendicular to the axial direction.

[0011] Optionally, at least 40% of the area of ​​the first occlusal surface is located in the region between the inlet end and the outlet end in the axial direction.

[0012] Optionally, the dust collection device includes a dust collection element, which is connected between the cyclone dust collector and the extraction mechanism.

[0013] This invention also discloses a dust collection mechanism, comprising: an exhaust pipe having an inlet end and an outlet end; a fixed dust collector located within the exhaust pipe, wherein the inner edge of the fixed dust collector forms a first engagement surface with an undulating structure; and a movable dust collector located within the exhaust pipe, wherein the inner edge of the movable dust collector forms a second engagement surface with an undulating structure, the second engagement surface being oriented towards and complementary in shape to the first engagement surface; wherein the movable dust collector is separable from the fixed dust collector. The movable dust collector moves between a position and an engagement position; wherein, when the movable dust collector is in the disengaged position, the first engagement surface and the second engagement surface are spaced apart to form a dust collection channel, so that multiple dust particles flowing from the inlet end to the dust collection channel can adhere to at least one of the first engagement surface and the second engagement surface to form an agglomerate; wherein, when the movable dust collector is in the engagement position, the second engagement surface engages with the first engagement surface, so that the agglomerate peels off from it and flows to the outlet end after the second engagement surface leaves the first engagement surface.

[0014] Optionally, when the movable dust collector is in the engaged position, a temporary channel is formed between the movable dust collector and the inner wall of the exhaust pipe; wherein, the dust collection mechanism includes: a cooler installed between the fixed dust collector and the movable dust collector for introducing a cooling medium into the fixed dust collector and the movable dust collector; and an inert gas supplier connected to the exhaust pipe for providing inert gas to the temporary channel when the movable dust collector is in the engaged position.

[0015] In summary, the crystal growth equipment and dust collection mechanism disclosed in the embodiments of the present invention, through the cooperation of the first and second meshing surfaces, enable the multiple dust particles flowing out of the exhaust port to form an agglomerate within the dust collection mechanism during the crystal growth process in the crystal growth furnace. This facilitates filtration by the cyclone dust collector, thereby improving the dust collection efficiency and preventing the exhaust pipe from being blocked by the dust deposits and reducing the exhaust volume. This effectively reduces the internal pressure of the crystal growth furnace and increases the service life of the internal components of the dust collection device (such as the cyclone dust collector and the exhaust mechanism).

[0016] Furthermore, the crystal growth equipment and dust collection mechanism disclosed in the embodiments of the present invention can effectively reduce the amount of dust passing through the cyclone dust collector, thereby reducing the use of related consumables (such as waste oil and filter screens) downstream of the cyclone dust collector, so as to achieve the research and development direction of reducing environmental pollution.

[0017] To further understand the features and technical content of this invention, please refer to the following detailed description and drawings of this invention. However, these descriptions and drawings are only for illustrating this invention and are not intended to limit the scope of protection of this invention in any way. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of a crystal growth device according to an embodiment of the present invention.

[0019] Figure 2 This is a three-dimensional schematic diagram of the dust collection mechanism according to an embodiment of the present invention.

[0020] Figure 3 This is a partial cross-sectional schematic diagram of the crystal growth device according to an embodiment of the present invention.

[0021] Figure 4 for Figure 3 The diagram shows the subsequent actions.

[0022] Figure 5 for Figure 4 The diagram shows the subsequent actions.

[0023] Figure 6 This is a graph showing the inert gas flow distribution according to an embodiment of the present invention.

[0024] Figure 7 This is a partial cross-sectional schematic diagram of another mode of the crystal growth device according to an embodiment of the present invention.

[0025] Figure 8 This is a partial cross-sectional schematic diagram of another mode of the crystal growth device according to an embodiment of the present invention. Detailed Implementation

[0026] The following specific embodiments illustrate the implementation of the "crystal growth equipment and dust collection mechanism" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, it should be noted beforehand that the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions based on actual dimensions. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0027] It should be understood that while terms such as “first,” “second,” and “third” may be used in this document to describe various components or features, these components or features should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one feature from another. Furthermore, the term “or” as used herein may, as appropriate, include any combination of one or more related items listed.

[0028] Please see Figures 1 to 8 As shown, this is an embodiment of the present invention. Figures 1 to 3 As shown, this embodiment discloses a crystal growth apparatus 1000, which can be applied to crystal growth equipment in the semiconductor industry, but is not limited thereto. The crystal growth apparatus 1000 includes a crystal growth furnace 200 and a dust collection device 100 connected to the crystal growth furnace 200. The crystal growth furnace 200 has an exhaust port 201 for discharging multiple dust particles P1 generated during the crystal growth process (e.g., generated by the evaporation gas from molten silicon).

[0029] It should be noted that, in this embodiment, the exhaust port 201 is described as being formed on the side edge of the bottom plate of the crystal growth furnace 200, but its specific position can be adjusted and varied according to actual needs. For example, in other embodiments of the present invention not shown, the exhaust port 201 may also be formed on the lower edge of the bottom plate of the crystal growth furnace 200.

[0030] The dust collection device 100 is installed at the exhaust port 201 of the crystal growth furnace 200 to allow multiple dust particles P1 to flow into it. In this embodiment, the dust collection device 100 preferably includes a dust collection mechanism 1, a cyclone dust collector 2 connected to the dust collection mechanism 1, an exhaust mechanism 3 connected to the cyclone dust collector 2, and a dust collection element 4 connected between the cyclone dust collector 2 and the exhaust mechanism 3, but the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the dust collection element 4 (e.g., a dust collection tank or filter) of the dust collection device 100 may be omitted or replaced with other components according to actual needs; or, the number of exhaust ports 201 may be multiple, the number of dust collection devices 100 may also be multiple, and multiple dust collection devices 100 may be installed at multiple exhaust ports 201 respectively.

[0031] Furthermore, the extraction mechanism 3 can be used to extract air from the dust collection mechanism 1 and the cyclone dust collector 2 to control the flow rate of the plurality of dust particles P1 within the dust collection mechanism 1. Moreover, although the dust collection mechanism 1 in this embodiment is used in conjunction with the cyclone dust collector 2, the extraction mechanism 3, and the dust collection component 4, the present invention is not limited thereto. For example, in other embodiments of the present invention not shown, the dust collection mechanism 1 can also be used alone (e.g., for sale) or in conjunction with other components.

[0032] In this embodiment, the dust collection mechanism 1 includes an exhaust pipe 11, a fixed dust collection element 12 and a movable dust collection element 13 located within the exhaust pipe 11, an inert gas supplier 14 connected to the exhaust pipe 11, and a cooler 15 installed on the fixed dust collection element 12 and the movable dust collection element 13. However, in other embodiments of the present invention not shown, at least one of the inert gas supplier 14 and the cooler 15 may be omitted or replaced with other components according to actual needs.

[0033] The exhaust pipe 11 has an inlet end 111, an outlet end 112, and a dust-collecting section 113 located between the inlet end 111 and the outlet end 112. In this embodiment, the inlet inner diameter D111 of the inlet end 111 is substantially equal to the outlet inner diameter D112 of the outlet end 112, and less than or equal to the inner diameter of the dust-collecting section 113, but the invention is not limited thereto. Furthermore, the exhaust pipe 11 defines an axial direction D1 with respect to the inlet end 111 and the outlet end 112 (for example, the axial direction D1 passes through the center of the inlet end 111 and the center of the outlet end 112).

[0034] Furthermore, the inlet end 111 of the exhaust pipe 11 is connected to the exhaust port 201 of the crystal growth furnace 200, while the outlet end 112 of the exhaust pipe 11 is connected to the cyclone dust collector 2. The fixed dust collector 12 and the movable dust collector 13 are disposed within the dust collection section 113 of the exhaust pipe 11, and a portion of the fixed dust collector 12 is located in the axial direction D1; that is, the portion of the fixed dust collector 12 is located between the inlet end 111 and the outlet end 112 along the axial direction D1.

[0035] The fixed dust collector 12 has an inner edge forming a first engagement surface 121 with an undulating structure, and the fixed dust collector 12 also has a first cooling space 122 located inside it, preferably adjacent to the first engagement surface 121. Furthermore, the movable dust collector 13 has an inner edge forming a second engagement surface 131 with an undulating structure, which faces and is complementary in shape to the first engagement surface 121. In this embodiment, the movable dust collector 13 also has a second cooling space 132 located inside it, preferably adjacent to the second engagement surface 131.

[0036] Furthermore, the cooler 15 can be used to input a cooling medium 151 (such as cooling water or liquid nitrogen) into the fixed dust collector 12 and the movable dust collector 13 (such as the first cooling space 122 and the second cooling space 132), thereby facilitating the cooling of the first mating surface 121 and the second mating surface 131.

[0037] In this embodiment, the cooler 15 has a plurality of first pipes 152 and a plurality of second pipes 153. The plurality of first pipes 152 are connected to the first cooling space 122, and the plurality of second pipes 153 pass through a plurality of perforations 1131 of the dust collection section 113 and are connected to the second cooling space 132, such that a gap is left between each second pipe 153 and the wall of the corresponding perforation 1131. In addition, each second pipe 153 is preferably provided with a limiting end portion 1531 away from the dust collection section 113.

[0038] Furthermore, the inert gas supplier 14 includes a plurality of telescopic tubes 141 respectively sleeved on a plurality of second pipes 153. Each telescopic tube 141 is clamped between the outer surface of the dust collection section 113 and the limiting end portion 1531 corresponding to the second pipe 153, and one end of each telescopic tube 141 surrounds the outside of the corresponding perforation 1131, so that the internal space of each telescopic tube 141 can be connected to the interior of the dust collection section 113 through the corresponding perforation 1131.

[0039] The above content describes the structure of the dust collection mechanism 1. The function and operation of the dust collection mechanism 1 will be described below. The movable dust collection component 13 can be in a separated position from the fixed dust collection component 12 (e.g., ...). Figure 3 and Figure 5 ) and a biting position (e.g.: Figure 4The movable dust collector 13 moves between the fixed dust collector 12 and the fixed dust collector 13, and preferably moves along a radial direction D2 perpendicular to the axial direction D1. The movable dust collector 13 can be driven by a motor to rotate a screw, thereby driving it to move relative to the fixed dust collector 12. Furthermore, the moving position of the movable dust collector 13 can be precisely controlled by upper and lower limit switches (such as infrared switches), and the moving frequency of the movable dust collector 13 can be 1 to 30 times / hour, but the present invention is not limited thereto.

[0040] like Figure 1 and Figure 3 As shown, when in the separated position, the first occlusal surface 121 and the second occlusal surface 131 are spaced apart to form a dust-collecting channel 16, so that the plurality of dust particles P1 flowing from the inlet end 111 to the dust-collecting channel 16 can adhere to at least one of the first occlusal surface 121 and the second occlusal surface 131 to form an aggregate P2 with a particle size greater than 10 micrometers (μm).

[0041] Furthermore, the inner diameter D16 of the dust collection channel 16 is preferably between 50% and 100% of the outlet inner diameter D112 of the outlet end 112, and at least 40% of the area of ​​the first engagement surface 121 is preferably located in the region between the inlet end 111 and the outlet end 112 in the axial direction D1 (that is, at least 40% of the area of ​​the first engagement surface 121 falls within an extension space of the inlet end 111 extending along the axial direction D1 to the outlet end 112), thereby facilitating the flow of multiple dust particles P1 along the first engagement surface 121 and the second engagement surface 131, thereby increasing the adhesion ratio of the multiple dust particles P1.

[0042] Furthermore, when in the separated position, the first engagement surface 121 and the second engagement surface 131 can also effectively cool down through the first cooling space 122 and the second cooling space 132 injected therein by the cooling medium 151, thereby facilitating the adhesion of multiple dust particles P1 to the first engagement surface 121 and the second engagement surface 131.

[0043] like Figure 1 and Figure 4 As shown, when in the occlusal position, the second occlusal surface 131 engages with the first occlusal surface 121, so that the aggregate P2 is detached from it and after the second occlusal surface 131 leaves the first occlusal surface 121 (e.g.: Figure 5The particles P2 with a diameter greater than 10 micrometers flowing out from the outlet end 112 can be captured by the cyclone dust collector 2, while dust P1 with a diameter less than 10 micrometers that is not attached to the first contact surface 121 and the second contact surface 131 and flows out from the outlet end 112 can be filtered out by the dust collection element 4, thereby effectively improving the collection efficiency of dust P1 (e.g., by about 20%).

[0044] Furthermore, the multiple dust particles P1 discharged from the crystal growth furnace 200 can be almost completely filtered out by the cyclone dust collector 2 and the dust collection component 4, thereby effectively reducing the waste oil generated by the exhaust mechanism 3 (e.g., pump) due to the dust particles P1 (by about 33%), thus achieving the goal of reducing environmental pollution through equipment development.

[0045] In addition, since most of the dust collection components 4 are disposable filters, this embodiment uses the cooperation of the first engagement surface 121 and the second engagement surface 131 to allow multiple dust particles P1 to first gather into the aggregate P2 that can be filtered out by the cyclone dust collector 2, thereby reducing the burden on the dust collection components 4 and reducing the amount of dust collection components 4 used, so as to further realize the research and development direction of equipment that reduces environmental pollution.

[0046] From another perspective, when in the engagement position, a temporary channel 17 is formed between the movable dust collector 13 and the inner wall of the exhaust pipe 11. The inert gas supplier 14 is used to provide inert gas 142 (e.g., argon) to the temporary channel 17 when in the engagement position (e.g., the inert gas supplier 14 supplies the inert gas 142 toward the temporary channel 17 through multiple telescopic tubes 141 and multiple perforations 1131). This reduces the activity of dust P1 through the inert gas 142, thereby preventing dust P1 from igniting and also preventing dust P1 from adhering to the temporary channel 17.

[0047] It should be noted that, as Figure 1 ,and Figures 4 to 6As shown, the inert gas supplier 14 is preferably used to continuously supply the inert gas 142 to the exhaust pipe 11, and the flow rate of the inert gas 142 supplied by the inert gas supplier 14 is inversely proportional to the distance between the first engagement surface 121 and the second engagement surface 131. That is, when in the engagement position, the flow rate of the inert gas 142 is the maximum, which allows the temporary channel 17 to maintain positive pressure, so that evaporating materials (such as dust P1) are less likely to enter the temporary channel 17; when in the separation position, the flow rate of the inert gas 142 is the minimum. In this embodiment, the flow rate of the inert gas 142 is preferably between 0 and 20 slpm (Standard Liters Per Minute), but is not limited thereto.

[0048] Furthermore, the configuration of the first occlusal surface 121 and the second occlusal surface 131 in this embodiment is as follows. Figure 3 The design is illustrated using a columnar structure with a triangular cross-section, but it can be adjusted and varied according to design requirements, and this invention does not impose limitations on it. For example, the configuration of the first occlusal surface 121 and the second occlusal surface 131 can be as follows: Figure 7 The columnar structure shown has an arc-shaped cross-section, or it could be as follows: Figure 8 The diagram shows a columnar structure with a rectangular cross-section.

[0049] Furthermore, when in the occlusal position, the occlusion between the second occlusal surface 131 and the first occlusal surface 121 means that the second occlusal surface 131 applies force to the first occlusal surface 121 to force the aggregate P2 to separate from the second occlusal surface 131 and / or the first occlusal surface 121. However, the second occlusal surface 131 may or may not contact the first occlusal surface 121, which is not limited here.

[0050] [Technical Effects of the Embodiments of the Invention]

[0051] In summary, the crystal growth equipment and dust collection mechanism disclosed in the embodiments of the present invention, through the cooperation of the first and second meshing surfaces, enable the multiple dust particles flowing out of the exhaust port to form an agglomerate within the dust collection mechanism during the crystal growth process in the crystal growth furnace. This facilitates filtration by the cyclone dust collector, thereby improving the dust collection efficiency and preventing the exhaust pipe from being blocked by the dust deposits and reducing the exhaust volume. This effectively reduces the internal pressure of the crystal growth furnace and increases the service life of the internal components of the dust collection device (such as the cyclone dust collector and the exhaust mechanism).

[0052] Furthermore, the crystal growth equipment and dust collection mechanism disclosed in the embodiments of the present invention can effectively reduce the amount of dust passing through the cyclone dust collector, thereby reducing the use of related consumables (such as waste oil and filter screens) downstream of the cyclone dust collector, so as to achieve the research and development direction of reducing environmental pollution.

[0053] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the patent scope of the present invention.

Claims

1. A crystal growth device, characterized in that, The crystal growth equipment includes: A crystal growth furnace having an exhaust port; and A dust collection device is installed at the exhaust port of the crystal growth furnace, and the dust collection device comprises: A dust collection device, comprising: An exhaust pipe having an inlet end and an outlet end, wherein the inlet end of the exhaust pipe is connected to the exhaust port; A fixed dust collector is located within the exhaust pipe, and the inner edge of the fixed dust collector forms a first engagement surface with an undulating structure; and A movable dust collector is located within the exhaust pipe, and the inner edge of the movable dust collector forms a second engagement surface with an undulating structure, the second engagement surface facing and having a shape complementary to the first engagement surface; wherein the movable dust collector is movable relative to the fixed dust collector between a disengaged position and an engaged position. When the movable dust collector is in the separated position, the first engagement surface and the second engagement surface are spaced apart to form a dust collection channel, so that multiple dust particles flowing from the inlet end to the dust collection channel can adhere to at least one of the first engagement surface and the second engagement surface to form an aggregate. When the movable dust collector is in the biting position, the second biting surface bites the first biting surface, so that the aggregate is peeled off from the first biting surface or the second biting surface and flows to the outlet end after the second biting surface leaves the first biting surface; A cyclone dust collector is connected to the outlet end of the exhaust pipe; and An air extraction mechanism, connected to the cyclone dust collector, is used to extract air from the dust collection mechanism and the cyclone dust collector.

2. The crystal growth equipment according to claim 1, characterized in that, The dust collection mechanism includes a cooler, which is installed on the fixed dust collection component and the movable dust collection component to introduce a cooling medium into the fixed dust collection component and the movable dust collection component.

3. The crystal growth equipment according to claim 1, characterized in that, When the movable dust collector is in the engaged position, a temporary channel is formed between the movable dust collector and the inner wall of the exhaust pipe; wherein, the dust collection mechanism includes an inert gas supplier, and the inert gas supplier is connected to the exhaust pipe to provide inert gas to the temporary channel when the movable dust collector is in the engaged position.

4. The crystal growth equipment according to claim 3, characterized in that, The inert gas supplier is used to supply the inert gas to the exhaust pipe, and the flow rate of the inert gas supplied by the inert gas supplier is inversely proportional to the distance between the first mating surface and the second mating surface.

5. The crystal growth equipment according to claim 1, characterized in that, The inner diameter of the dust collection channel is between 50% and 100% of the inner diameter of the outlet end.

6. The crystal growth equipment according to claim 1, characterized in that, The exhaust pipe is defined in an axial direction with the inlet end and the outlet end, and the movable dust collector moves in a radial direction perpendicular to the axial direction.

7. The crystal growth equipment according to claim 6, characterized in that, At least 40% of the area of ​​the first occlusal surface is located in the region between the inlet end and the outlet end in the axial direction.

8. The crystal growth equipment according to claim 1, characterized in that, The dust collection device includes a dust collection component, and the dust collection component is connected between the cyclone dust collector and the air extraction mechanism.

9. A dust collection mechanism, characterized in that, The dust collection mechanism includes: An exhaust pipe has an inlet end and an outlet end; A fixed dust collector is located within the exhaust pipe, and the inner edge of the fixed dust collector forms a first engagement surface with an undulating structure; and A movable dust collector is located within the exhaust pipe, and the inner edge of the movable dust collector forms a second engagement surface with an undulating structure, the second engagement surface facing and having a shape complementary to the first engagement surface; wherein the movable dust collector is movable relative to the fixed dust collector between a disengaged position and an engaged position. When the movable dust collector is in the separated position, the first engagement surface and the second engagement surface are spaced apart to form a dust collection channel, so that multiple dust particles flowing from the inlet end to the dust collection channel can adhere to at least one of the first engagement surface and the second engagement surface to form an aggregate. When the movable dust collector is in the biting position, the second biting surface bites the first biting surface, so that the aggregate is detached from the first biting surface or the second biting surface and flows to the outlet end after the second biting surface leaves the first biting surface.

10. The dust collection mechanism according to claim 9, characterized in that, When the movable dust collector is in the engaged position, a temporary channel is formed between the movable dust collector and the inner wall of the exhaust pipe; wherein, the dust collection mechanism includes: A cooler, installed between the fixed dust collector and the movable dust collector, is used to introduce a cooling medium into the fixed dust collector and the movable dust collector; and An inert gas supplier, connected to the exhaust pipe, is used to provide inert gas to the temporary passage when the movable dust collector is in the engaged position.

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