Symmetrically-arranged vacuum pipeline for single crystal furnace

Abstract

The invention discloses a symmetrically arranged vacuum pipeline for a single crystal furnace. The device comprises a pipeline structure used for being in butt joint with a furnace chassis, the pipeline structure comprises four evenly-distributed water-cooling vacuum pipes, every two water-cooling vacuum pipes in the four water-cooling vacuum pipes form a pipe set, and the two water-cooling vacuum pipes in the same pipe set are in butt joint with a primary confluence three-way pipe through a first corrugated hose; the bottoms of the primary confluence three-way pipes at the bottoms of the two pipe groups are in butt joint with a pressure regulating pipeline; the pressure regulating pipeline comprises a second corrugated hose, a three-way pipe, a vacuum ball valve, a first adapter pipe and a third corrugated hose which are in butt joint in sequence from the primary confluence three-way pipe; a first pressure relief device is mounted on the three-way pipe; the butt joint pressure regulating pipelines at the bottoms of the two pipe sets are in butt joint with a secondary confluence three-way pipe through a third corrugated hose. The rear end of the secondary confluence three-way pipe is sequentially in butt joint with a vacuum ball valve, a second adapter pipe, a baffle valve, a right-angle connector and a butterfly valve. According to the invention, the gas flow uniformity is ensured.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace technology, specifically to vacuum pipelines. Background Technology

[0002] Semiconductor-grade silicon single crystal furnaces have extremely high requirements for the crystal growth environment, and the uniformity of the atmosphere within the cavity has a significant impact on the quality of crystal growth. Large-size single crystal furnaces require larger cavity dimensions, necessitating an increase in the number of vacuum channels. Currently, four vacuum ports are commonly used to increase exhaust volume. However, the vacuum channels are typically connected close together, which to some extent affects the uniformity of exhaust. Summary of the Invention

[0003] To address the problems existing in the prior art, the present invention provides a symmetrically arranged vacuum pipeline for a single crystal furnace to solve at least one of the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention provides a symmetrically arranged vacuum pipeline for a single crystal furnace, including a pipeline structure for connecting to the furnace chassis. The pipeline structure comprises four uniformly distributed water-cooled vacuum tubes, with each pair of water-cooled vacuum tubes forming a tube group. The two water-cooled vacuum tubes in the same tube group are connected to a primary manifold tee via a first corrugated flexible tube. The bottom of the primary manifold tee at the bottom of the two tube groups is connected to a pressure regulating pipeline. The pressure regulating pipeline includes a second corrugated flexible tube, a tee, a vacuum ball valve, a first adapter tube, and a third corrugated flexible tube sequentially connected from the primary manifold tee.

[0005] A first pressure relief device is installed on the tee pipe;

[0006] The pressure regulating pipes at the bottom of the two pipe groups are connected to the secondary manifold tee pipe through the third corrugated hose;

[0007] The rear end of the secondary manifold tee is sequentially connected to a vacuum ball valve, a second adapter pipe, a baffle valve, a right-angle connector, and a butterfly valve.

[0008] The angle between the adjacent branch pipes of the primary manifold tee and the secondary manifold tee is an obtuse angle.

[0009] This invention ensures uniform gas flow by using four evenly distributed water-cooled vacuum tubes;

[0010] By adding a vacuum ball valve to the pipeline to achieve cavity sealing, the vacuum pipeline can be cleaned separately when necessary.

[0011] A butterfly valve is installed at the rear end of the pipeline, which can adjust and control the pressure of the vacuum chamber in real time.

[0012] More preferably, the water-cooled vacuum tube includes a first bend, a second bend, a third bend, and a fourth bend arranged sequentially from top to bottom;

[0013] The flow guiding direction of the first bend and the fourth bend is vertical, and the vertical projection of the fourth bend is located radially outside the vertical projection of the first bend.

[0014] The angle between the second bend and the third bend is an obtuse angle.

[0015] The water-cooled vacuum tubes are extended radially outward along the furnace chassis, increasing the usable internal space under the furnace chassis.

[0016] More preferably, the angle between the second bend and the third bend is greater than 140°.

[0017] More preferably, the first bend, the second bend, and the third bend all include an inner tube and an outer tube disposed inside and outside, and the inner tube and the outer tube form a water-cooling channel for introducing cooling water.

[0018] This protects the sealing rings at the pipe joints and the vacuum tube itself, extending its service life.

[0019] In a further preferred embodiment, the four water-cooled vacuum jackets are arranged in pairs in a mirror-symmetrical manner on mutually perpendicular surfaces A and B.

[0020] The vacuum piping is symmetrical about both sides A and B. This symmetrical arrangement of the vacuum pipes allows for more uniform gas flow within the furnace cavity during vacuuming, avoiding localized pressure fluctuations and ensuring a more stable pressure distribution across all areas of the furnace. The symmetrical structure simplifies the piping layout, reduces the number of parts, and standardizes installation.

[0021] More preferably, the included angle between the top two branches of the primary manifold tee is 130°, and the bottom branch of the primary manifold tee extends vertically downward.

[0022] More preferably, the second corrugated hose is bent at 90°.

[0023] When cleaning is needed, simply detach the second corrugated hose to clean the three openings at both ends of the hose. Because the included angles in all three directions are no less than 130°, there are no blind spots, resulting in a more thorough and convenient cleaning process.

[0024] More preferably, the first pressure relief device includes a first blind plate for sealing the pressure relief port of the tee pipe, and a sealing ring is installed on the first blind plate;

[0025] The first blind plate is installed on the pressure relief port by mounting bolts. A spring is sleeved on the mounting bolts. The spring is located on the outside of the first blind plate, with one end of the spring abutting against the head of the mounting bolt and the other side of the spring abutting against the first blind plate.

[0026] The overpressure unloading force inside the pipeline can be adjusted by regulating the compression of the spring.

[0027] In a further preferred embodiment, the secondary manifold tee pipe has symmetrically opened air holes on the branch pipes used to connect the two pressure regulating pipes, and is equipped with a second pressure relief device for controlling the opening and closing of the air holes.

[0028] More preferably, the second pressure relief device includes a second blind plate for gravity sealing of the vent, a sealing ring is installed on the second blind plate, and the second blind plate is hinged to the secondary manifold tee.

[0029] The second blind flange is connected by a hinge and serves as a pressure relief structure. When the pressure inside the vacuum tube exceeds the weight of the second blind flange, the second blind flange opens to relieve pressure.

[0030] Compared with the prior art, the beneficial effects of the present invention are:

[0031] 1) The vacuum tubes directly connected to the cavity are designed with a symmetrical structure; the symmetrical arrangement of the pipes ensures uniform gas flow.

[0032] 2) The vacuum tube has a bent structure, which expands the installation space at the furnace bottom. The bending angle must be obtuse to facilitate cleaning; ash removal is also easier and cleaner. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of one structure of the present invention;

[0034] Figure 2 This is a schematic diagram of the furnace bottom plate of the present invention;

[0035] Figure 3 This is a cross-sectional view of the water-cooled vacuum tube of the present invention.

[0036] In the diagram, 1 is the furnace bottom plate, 2 is the water-cooled vacuum tube, 3 is the first corrugated hose, 4 is the primary manifold tee, 5 is the second corrugated hose, 6 is the tee, 7 is the first blind flange, 8 is the ball valve, 9 is the first adapter pipe, 10 is the third corrugated hose, 11 is the secondary manifold tee, 12 is the second blind flange, 13 is the second adapter pipe, 14 is the baffle valve, 15 is the right-angle connector, and 16 is the butterfly valve. Detailed Implementation

[0037] The present invention will now be further described with reference to the accompanying drawings.

[0038] See Figures 1 to 3 Specific Embodiment 1: A symmetrically arranged vacuum pipeline for a single crystal furnace includes a pipeline structure for connecting to the furnace chassis 1. The pipeline structure includes four evenly distributed water-cooled vacuum tubes 2. Every two water-cooled vacuum tubes 2 form a tube group. The two water-cooled vacuum tubes 2 in the same tube group are connected to a primary manifold tee 4 through a first corrugated flexible tube 3. The bottom of the primary manifold tee 4 at the bottom of the two tube groups is connected to a pressure regulating pipeline. The pressure regulating pipeline includes a second corrugated flexible tube connected sequentially from the primary manifold tee 4. The system comprises a flexible hose 5, a three-way pipe 6, a vacuum ball valve 8, a first adapter pipe 9, and a third corrugated hose 10. A first pressure relief device is installed on the three-way pipe 6. The pressure regulating pipes at the bottom of the two pipe groups are connected to a secondary manifold three-way pipe 11 via the third corrugated hose 10. The rear end of the secondary manifold three-way pipe 11 is sequentially connected to the vacuum ball valve 8, the second adapter pipe 13, a baffle valve 14, a right-angle connector 15, and a butterfly valve 16. The included angle between adjacent branch pipes of the primary manifold three-way pipe 4 and the secondary manifold three-way pipe 11 is an obtuse angle. This invention ensures uniform gas flow through four evenly distributed water-cooled vacuum pipes 2. By adding vacuum ball valves 8 to the pipes, the vacuum pipes can be cleaned separately when needed while maintaining a sealed cavity. The butterfly valve 16 at the rear end of the pipes allows for real-time adjustment and control of the vacuum cavity pressure.

[0039] See Figure 3 The water-cooled vacuum tube 2 includes a first bend, a second bend, a third bend, and a fourth bend arranged sequentially from top to bottom. The flow direction of the first and fourth bends is vertical, and the vertical projection of the fourth bend is located radially outside the vertical projection of the first bend. The angle between the second and third bends is obtuse. This allows the water-cooled vacuum tube 2 to extend radially outward along the furnace base 1, increasing the internal usable space under the furnace base 1. The angle α between the second and third bends is greater than 140°. Each of the first, second, and third bends includes an inner tube and an outer tube, with a water-cooling channel between the inner and outer tubes for introducing cooling water. This protects the sealing ring at the pipe joints and the vacuum tube itself, improving its service life.

[0040] See Figure 2 The furnace base has four vacuum ports evenly distributed around a central point. These ports connect to water-cooled vacuum tubes, ensuring a uniform arrangement of the piping. Specifically, the four evenly distributed water-cooled vacuum tubes are symmetrical about virtual planes A and B.

[0041] Four water-cooled vacuum jackets are arranged in pairs, mirror-symmetrically on mutually perpendicular surfaces A and B. They are also symmetrical about surfaces A and B. This symmetrical arrangement of the vacuum pipes ensures more uniform gas flow within the furnace cavity during vacuuming, avoiding localized pressure fluctuations and ensuring a more stable pressure distribution throughout the furnace. The symmetrical structure simplifies the piping layout, reduces the number of parts, and standardizes installation.

[0042] The angle between the two top branches of the primary manifold tee 4 is 130°, and the bottom branch of the primary manifold tee 4 extends vertically downward.

[0043] The second corrugated hose 5 is bent at a 90° angle. When cleaning is required, the second corrugated hose 5 can be removed, allowing for cleaning of the three openings at both ends of the hose. Because the included angles in all three directions are no less than 130°, there are no blind spots, resulting in a more thorough and convenient cleaning process.

[0044] The first pressure relief device includes a first blind flange 7 for sealing the pressure relief port of the tee pipe 6. A sealing ring is installed on the first blind flange 7. The first blind flange 7 is installed on the pressure relief port by mounting bolts. A spring is sleeved on the mounting bolts, with the spring located outside the first blind flange 7. One end of the spring abuts against the head of the mounting bolt, and the other end of the spring abuts against the first blind flange 7. By adjusting the compression of the spring, the overpressure unloading force in the pipeline can be adjusted.

[0045] The secondary manifold tee 11 has symmetrically arranged vent holes on its branch pipes for connecting two pressure regulating pipelines, and a second pressure relief device is installed to control the opening and closing of the vent holes. The second pressure relief device includes a second blind flange 12 for gravity sealing of the vent holes. A sealing ring is installed on the second blind flange 12, and the second blind flange 12 is hinged to the secondary manifold tee 11. The second blind flange 12 is connected by a hinge and serves as a pressure relief structure. When the pressure inside the vacuum tube exceeds the weight of the second blind flange, the second blind flange opens, thus relieving pressure.

[0046] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A symmetrically arranged vacuum pipeline for a single crystal furnace, comprising a pipeline structure for connecting to the furnace chassis, characterized in that, The pipeline structure includes four evenly distributed water-cooled vacuum tubes. Every two water-cooled vacuum tubes in the four tubes form a tube group. The two water-cooled vacuum tubes in the same tube group are connected to a primary manifold tee pipe through a first corrugated hose. The bottom of the primary manifold tee pipe at the bottom of the two tube groups is connected to a pressure regulating pipeline. The pressure regulating pipeline includes a second corrugated hose, a tee pipe, a vacuum ball valve, a first adapter pipe, and a third corrugated hose connected sequentially from the primary manifold tee pipe. A first pressure relief device is installed on the tee pipe; The pressure regulating pipes at the bottom of the two pipe groups are connected to the secondary manifold tee pipe through the third corrugated hose; The rear end of the secondary manifold tee is sequentially connected to a vacuum ball valve, a second adapter pipe, a baffle valve, a right-angle connector, and a butterfly valve. The angle between the adjacent branch pipes of the primary manifold tee and the secondary manifold tee is an obtuse angle.

2. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: The water-cooled vacuum tube includes a first bend, a second bend, a third bend, and a fourth bend arranged sequentially from top to bottom; The flow guiding direction of the first bend and the fourth bend is vertical, and the vertical projection of the fourth bend is located radially outside the vertical projection of the first bend. The angle between the second bend and the third bend is an obtuse angle.

3. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 2, characterized in that: The angle between the second bend and the third bend is greater than 140°.

4. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 2, characterized in that: The first bend, the second bend, and the third bend all include an inner tube and an outer tube arranged inside and outside, and the inner tube and the outer tube form a water-cooling channel for introducing cooling water.

5. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: Four water-cooled vacuum jackets are arranged in pairs in a mirror-symmetrical manner on mutually perpendicular surfaces A and B.

6. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: The included angle between the two top branches of the primary manifold tee is 130°, and the bottom branch of the primary manifold tee extends vertically downward.

7. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: The second corrugated hose is bent at a 90° angle.

8. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: The first pressure relief device includes a first blind plate for sealing the pressure relief port of the tee pipe, and a sealing ring is installed on the first blind plate; The first blind plate is installed on the pressure relief port by mounting bolts. A spring is sleeved on the mounting bolts. The spring is located on the outside of the first blind plate, with one end of the spring abutting against the head of the mounting bolt and the other side of the spring abutting against the first blind plate.

9. The symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 1, characterized in that: The secondary manifold tee has symmetrically opened air holes on the branch pipes used to connect the two pressure regulating pipelines, and a second pressure relief device is installed to control the opening and closing of the air holes.

10. A symmetrically arranged vacuum pipeline for a single crystal furnace according to claim 9, characterized in that: The second pressure relief device includes a second blind plate for gravity sealing of the vent, a sealing ring is installed on the second blind plate, and the second blind plate is hinged to the secondary manifold tee.

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