Method and device for realizing X-ray interference light beam

Abstract

The invention provides an X-ray interference light beam implementation method and device. The method comprises the steps that a filtering film and a detector are sequentially arranged on an emergent light path of an X-ray machine; filtering membranes with different parameters are replaced, and an X-ray machine is driven to emit X-rays, so that a detector collects energy spectrum data corresponding to each filtering membrane within a preset time, a target filtering membrane is selected, and the filtering membranes are replaced in situ; after a target filtering membrane is arranged between the X-ray machine and the detector, determining a target pose of the X-ray machine; a light splitting crystal is arranged between a detector and a target filtering film, and the position and posture of the light splitting crystal and the position and posture of the detector are adjusted, so that the detector obtains the X-rays respectively when moving close to an initial position and moving away from the initial position, and a first beam of coherent light and a second beam of coherent light split by the light splitting crystal are obtained. By adopting the scheme, the light beam coherence can be improved, and the test efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of X-ray optical technology, and in particular to a method and apparatus for realizing an X-ray interference beam. Background Technology

[0002] Since its discovery, X-rays have been widely used in biomedicine, materials science, nanotechnology, and other fields due to their unique physical properties, such as extremely short wavelengths at the atomic scale. However, the continuous spectrum of X-rays generated by bremsstrahlung has poor monochromaticity and extremely low coherence, making it difficult to produce atomic-scale interference effects. Consequently, it is impossible to capture sub-nanometer-level information such as lattice distortions and changes in molecular structure at the atomic scale through interference effects.

[0003] X-ray interferometry (XI) sources, with their unique coherence characteristics, can utilize the interference effect to transform the phase difference in the interaction between X-rays and matter into observable bright and dark fringes. This enables ultra-high resolution characterization of material lattice defects, the spatial configuration of biomolecules, and material strain distribution. Therefore, XI sources play a crucial role in lattice research in materials science, life sciences, and precision metrology. They provide clearer, more accurate, more microscopic, and more informative detection results than ordinary X-ray sources, becoming a key technological support for advancing nanomaterials, atomic-level manufacturing, and nanoimaging.

[0004] Currently, the method for obtaining X-ray interferometric sources is to use synchrotron radiation sources. However, when using synchrotron radiation, the X-ray optical engine has large divergence and low brightness, resulting in insufficient photon flux, which leads to weak interference signal intensity, long experimental time, and low testing efficiency. Summary of the Invention

[0005] In view of this, this application provides a method and apparatus for realizing X-ray interference beams, which can improve beam coherence and enhance testing efficiency.

[0006] In a first aspect, this application provides a method for realizing an X-ray interference beam, comprising:

[0007] Step S1: A filter membrane and a detector are sequentially arranged in the output light path of the X-ray machine. The X-rays emitted from the X-ray machine pass through the filter membrane to the detector, and the detector has an initial position.

[0008] Step S2: Replace the filter membrane with one of different parameters and drive the X-ray machine to emit X-rays, so that the detector collects the energy spectrum data corresponding to each filter membrane within a preset time to select the target filter membrane and replace the filter membrane in situ.

[0009] Step S3: After setting the target filter membrane between the X-ray machine and the detector, determine the target pose of the X-ray machine;

[0010] Step S4: When the X-ray machine is in the target pose, a beam splitter is placed between the detector and the target filter membrane. By adjusting the pose of the beam splitter and the pose of the detector, the detector acquires the X-rays when it moves near the initial position and when it moves away from the initial position, respectively, to obtain the first coherent beam and the second coherent beam after being split by the beam splitter.

[0011] Optionally, when performing step S1, a collimating optical device is also provided in the outgoing optical path, and the collimating optical device is located between the X-ray optical engine and the filter membrane;

[0012] Specifically, by using a laser collimator, when the detector is in the initial position, the center of the detector probe, the center of the collimating optics, and the center of the filter membrane are aligned on the same straight line indicated by the outgoing light path.

[0013] Optionally, step S2 includes:

[0014] When any filter membrane is placed in situ, within the preset time period, the percentage of single-energy peak photons in the energy spectrum data detected by the detector after the X-rays pass through each filter membrane is obtained.

[0015] By comparing the proportion of single-energy peak photons when each filter membrane is placed, the filter membrane layer with the largest proportion of single-energy peak photons is taken as the target filter membrane.

[0016] During any two replacements of the filter membrane, the X-ray machine does not emit X-rays.

[0017] Optionally, step S3 includes:

[0018] The position of the X-ray optical engine is adjusted so that when the X-ray passes through the target filter membrane to the detector, the photon count value of the X-ray in each position is obtained through the detector.

[0019] The pose of the X-ray when the photon count is at its maximum is taken as the target pose, and the target pose of the X-ray optical machine is maintained.

[0020] Optionally, step S4 includes:

[0021] A beam-splitting crystal is disposed between the detector and the target filter membrane, so that the X-rays emitted by the X-ray optical machine at the target position can pass through the target filter membrane and the beam-splitting crystal to the detector.

[0022] The pose of the beam splitter is adjusted to change the relative angle between the beam splitter and the X-ray, and the pose of the detector is adjusted synchronously so that the detector moves near the initial position to obtain the characteristic energy spectrum peak of the X-ray after passing through the beam splitter, and in response to the characteristic energy spectrum peak, the first coherent beam is obtained, while maintaining the current pose of the beam splitter.

[0023] The detector is further adjusted so that it moves away from the initial position, and the characteristic energy spectrum peak of the X-rays after passing through the spectroscopic crystal is acquired again. In response to the characteristic energy spectrum peak, a second coherent beam is obtained.

[0024] Optionally, the response to the characteristic energy spectrum peak means that the detector can acquire X-rays that satisfy the Bragg condition during the adjustment process; wherein, the Bragg condition is 2d·sinθ=nλ, d is the interplanar spacing of the spectroscopic crystal, n is the diffraction order, and λ is the wavelength of the X-ray;

[0025] The movement of the detector toward a direction away from the initial position refers to the position indicated by another beam path after the X-ray passes through the beam-splitting crystal, while the beam-splitting crystal is kept in the current pose.

[0026] Optionally, before placing the spectroscopic crystal between the detector and the target filter membrane, an aperture mechanism is placed between the detector and the target filter membrane. The aperture mechanism has an adjustable slit, and the intensity of X-rays passing through the slit varies when the slit has different widths. When the spectroscopic crystal is placed, it is located between the aperture mechanism and the detector.

[0027] The method further includes: obtaining the intensity of X-rays passing through the slit, comparing the intensity with a preset intensity, and changing the width of the slit when the intensity is not the preset intensity.

[0028] Secondly, this application provides an apparatus for realizing an X-ray interference beam, comprising:

[0029] An X-ray optical machine for providing X-rays, wherein the X-ray optical machine has a target orientation;

[0030] The target filter membrane is arranged along the output light path of the X-ray optical machine to generate monochromatic monoenergetic X-rays;

[0031] The detector is arranged along the output light path of the X-ray optical machine, and the X-rays pass through the target filter membrane to the detector;

[0032] A spectroscopic crystal, located between the target filter membrane and the detector, is used to split a single X-ray into a first coherent beam and a second coherent beam; wherein the first coherent beam and the second coherent beam are acquired when the detector detects a characteristic energy spectrum peak and the characteristic energy spectrum peak shows a preset peak value;

[0033] The controller is configured to execute the X-ray interference beam implementation method described in any of the foregoing embodiments, so as to obtain a first coherent beam and a second coherent beam after being split by the beam splitter by controlling the X-ray optomechanical system, the detector and the beam splitter.

[0034] Optionally, the apparatus for realizing the X-ray interference beam also includes:

[0035] A collimating optical device is disposed between the X-ray optical engine and the target filter membrane;

[0036] An aperture mechanism is disposed between the spectroscopic crystal and the target filter membrane. The aperture mechanism has an adjustable slit, and the intensity of X-rays passing through the slit varies when the slit has different widths.

[0037] The controller is also used to acquire the intensity of the X-rays passing through the slit, compare the intensity with a preset intensity, and output a control signal to the aperture mechanism when the preset intensity is not the preset intensity. The control signal is used to change the width of the slit.

[0038] Optionally, the apparatus for realizing the X-ray interference beam satisfies one or more of the following:

[0039] The X-ray machine is a line focal spot copper target X-ray machine; the power of the X-ray light is 1.3kW; the X-ray machine is mounted on a multi-degree-of-freedom adjustable support.

[0040] The detector is a silicon drift detector (SDD); the energy response of the detector has been calibrated; the detector is mounted on a first turntable;

[0041] The spectroscopic crystal is a Laue spectroscopic crystal; the spectroscopic crystal is mounted on the second turntable;

[0042] The target filter membrane is a nickel metal filter membrane;

[0043] The aperture mechanism is an electrically adjustable slit;

[0044] The device for realizing the X-ray interference beam is placed on a vibration-isolated optical platform.

[0045] Compared with the prior art, the technical solution of this application has the following advantages:

[0046] In the method for measuring the parallelism of a crystal surface provided in this application embodiment, an X-ray machine can generate a continuous spectrum X-ray source. These X-rays pass through a filter membrane, which improves the monochromaticity of the X-rays. Furthermore, the filter membrane is selectively chosen to further increase the coherence length, thereby enhancing temporal coherence. This allows the X-ray machine to be positioned at the target orientation, enabling the transmission of coherent X-rays to the detector. Simultaneously, using a beam-splitting crystal, the X-ray beam can be split via a transmission mechanism. By changing the detector's position, a first coherent beam and a second coherent beam meeting the requirements can be detected at different locations. In other words, after position calibration, changing the detector's position determines the coherent beam, thus improving beam coherence and increasing testing efficiency. Attached Figure Description

[0047] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0048] Figure 1 A flowchart illustrating a method for implementing an X-ray interference beam according to an embodiment of this application is shown;

[0049] Figure 2 A schematic diagram of the structure of an X-ray interference beam realization device according to an embodiment of this application is shown;

[0050] Figure 3 A detailed flowchart of a method for implementing an X-ray interference beam according to an embodiment of this application is shown. Detailed Implementation

[0051] As described in the background section, the method for obtaining X-ray interferometric sources is to utilize synchrotron radiation sources.

[0052] Specifically, the principle of a synchrotron radiation source is that high-energy electrons are deflected by a magnetic field in a storage ring and emit X-rays in synchrotron radiation. It naturally has high coherence and is monochromated by a crystal monochromator. After being enhanced by an insert, it is split into two beams by a beam splitter. Due to the optical path difference, stable interference fringes are formed, which can realize X-ray interference. However, it requires that the performance parameters of the insert, the crystal orientation accuracy of the beam splitter, the stability of the optical path, and the control accuracy of the optical path difference are all at extremely high levels.

[0053] However, in practical applications, due to the large scale of synchrotron radiation facilities, high construction and operating costs, the need to apply for and queue for use, and the tight availability of equipment, ordinary laboratories find it difficult to build and use them independently. Furthermore, experiments are easily affected by factors such as the facility's operating schedule, making it difficult to meet the increasing demands of scientific research and manufacturing.

[0054] In addition, in practical applications, due to the large scale of synchrotron radiation facilities, high construction and operating costs, and the need to apply for and queue for use, ordinary laboratories find it difficult to build and use them independently.

[0055] Based on this, this application utilizes a laboratory-grade X-ray optical engine to develop an X-ray interferometric source. The X-ray optical engine employs an X-ray continuous spectrum generated by electron bombardment of an anode target, which is then collimated and collected by X-ray optics to significantly increase photon flux. Filtering techniques are used to monochromate the beam, improving temporal coherence. Micrometer-level adjustable slits enhance spatial coherence. Subsequently, a Laue crystal beam splitter divides the beam into two coherent beams, thus achieving two laboratory-grade coherent light sources with the same frequency. The entire system is mounted on a vibration-isolated optical platform, thereby reducing the impact of vibration. This method eliminates the need for large-scale equipment, significantly reducing costs and enabling miniaturization and portability of the instrument. It offers flexible mobility and control, has a wide range of applications, and can meet the needs of various production and research scenarios.

[0056] To enable those skilled in the art to better understand and implement this solution, the following detailed description of the specific solution, principles, advantages, and effects of this application is provided with reference to the accompanying drawings and specific embodiments.

[0057] It should be noted that the technical solution of this application can be used in the fields of X-ray scattering, diffraction analysis, X-ray imaging, X-ray absorption fine structure, X-ray small angle scattering, X-ray scattering and nanomaterial structure characterization.

[0058] See Figure 1 and Figure 2 ,in, Figure 1 This is a flowchart illustrating a method for implementing an X-ray interference beam in an embodiment of this application. Figure 2 This is a schematic diagram of the structure of an X-ray interference beam realization device in an embodiment of this application.

[0059] In this embodiment, the X-ray optical engine is mounted on a multi-degree-of-freedom adjustable support, the detector is mounted on the first turntable, and the spectroscopic crystal is mounted on the second turntable. The core purpose of this arrangement is to achieve precise alignment and fine-tuning of the optical path to meet the Bragg diffraction conditions.

[0060] Specifically, the multi-degree-of-freedom adjustable support is used to adjust the horizontal angle of the X-ray machine to ensure that the X-ray beam is incident in the optimal direction and maximize the photon flux; the first turntable allows the detector to move in multiple dimensions, making it easy to accurately find the coherent beam at different positions; the second turntable is used to adjust the angle of the beam-splitting crystal, changing the relative angle between the crystal and the incident light to trigger diffraction.

[0061] In other words, generating two coherent beams requires strict optical alignment. Bragg diffraction demands specific relationships between the incident angle, interplanar spacing, and wavelength. These adjustment mechanisms allow for incremental fine-tuning: first, the light source direction is optimized using a support; then, the detector is moved using a turntable to position the beam; and finally, the diffraction angle is locked using a crystal stage. Any deviation will lead to dispersive failure; therefore, the adjustment mechanism is crucial for achieving spatial coherence and dispersive beams.

[0062] Accordingly, such as Figure 1 and Figure 2 As shown, methods for realizing an X-ray interference beam may include:

[0063] Step S1: A filter membrane and a detector are sequentially arranged in the output light path of the X-ray machine. The X-rays emitted from the X-ray machine pass through the filter membrane to the detector, and the detector has an initial position.

[0064] In this embodiment, the X-ray machine 201, filter membrane 202, and detector 203 are configured such that the X-rays emitted from the X-ray machine 201 are detected by the detector 203 after passing through the filter membrane 202. At this point, the position of the X-rays detected by the detector 203 can be used as the initial position. This initial position serves as the reference position for subsequent movement of the detector 203.

[0065] In this embodiment, the X-ray machine is a line-focal copper target X-ray machine. X-rays are provided by the line-focal copper target X-ray machine.

[0066] In this embodiment, the X-ray optical engine is a high-power optical engine. The power of the X-ray light can be 1.3 kW.

[0067] In this embodiment, the X-ray machine is mounted on a multi-degree-of-freedom adjustable support. By driving the multi-degree-of-freedom adjustable support to move, the orientation of the X-rays emitted from the X-ray machine can be changed, ensuring that a coherent beam can be obtained.

[0068] Among them, the multi-degree-of-freedom adjustable support can be a publicly available and mature support in the existing solution, and the control signal output by the controller is also a mature solution.

[0069] The target filter membrane / filter membrane is a nickel metal filter membrane. Through this filter membrane, monochromatic monoenergetic X-rays can be generated, improving temporal coherence.

[0070] In this embodiment, the detector is a silicon drift detector (SDD). The silicon drift detector (SDD) is a high-performance X-ray detector with excellent high count rate performance and energy resolution.

[0071] In this embodiment, the detector's energy response has been calibrated. Calibration refers to adjusting the detector's energy response so that the detector can detect X-rays more accurately.

[0072] In this embodiment, the detector is mounted on the first turntable. Thus, by changing the position of the detector, both coherent beams can be detected.

[0073] Therefore, in this embodiment, the poses of both the detector and the X-ray machine are changed.

[0074] In this embodiment, in order to further reduce the divergence of X-rays (i.e., the light source), improve spatial coherence, and increase photon collection effect and flux, a collimating optical device 205 is also provided in the outgoing optical path when performing step S1. The collimating optical device 205 is located between the X-ray optical engine 201 and the filter membrane 202.

[0075] The collimation function of the collimating optics 205 is used to collect divergent X-rays, so that more X-rays are gathered together, thereby improving spatial coherence.

[0076] In this embodiment, when the collimating optical device 205 is set and the detector 203 is in the initial position by means of a laser collimator, the probe of the detector 203, the center of the collimating optical device 205 and the center of the filter film 202 can be on the same straight line indicated by the outgoing light path.

[0077] One end of the collimating optics 205 is fixed behind the light outlet of the X-ray machine 201. The installation position of the collimating optics 205 is calibrated using a laser collimator until the collimating optics 205 and the light outlet are aligned in a straight line. Furthermore, the collimating effect of the collimating optics 205 ensures that the collimating optics 205, the probe of the detector 203, and the filter membrane 202 are all in a straight line.

[0078] In other words, preliminary calibration is achieved by setting up the X-ray optical engine 201, filter membrane 202, detector 203 and collimating optics 205.

[0079] Step S2: Replace the filter membrane with one of different parameters and drive the X-ray machine to emit X-rays, so that the detector collects the energy spectrum data corresponding to each filter membrane within a preset time to select the target filter membrane and replace the filter membrane in situ.

[0080] In this embodiment, different filter membranes are required for different testing needs. This application also provides a method for selecting a target filter membrane, and when the target filter membrane is selected, it can replace the pre-set filter membrane in situ, which can improve X-ray monochromaticity and thus improve coherence.

[0081] Conversely, step S2 may include:

[0082] When any filter membrane is placed in situ, within the preset time period, the percentage of single-energy peak photons in the energy spectrum data detected by the detector after the X-rays pass through each filter membrane is obtained; by comparing the percentage of single-energy peak photons when each filter membrane is placed, the filter membrane layer with the largest percentage of single-energy peak photons is taken as the target filter membrane.

[0083] Specifically, when any filter membrane is placed, the energy spectrum data of the filtered X-rays under each filter membrane can be acquired. Based on the energy spectrum data, the proportion of single-energy peak photons can be determined. The higher the proportion of single-energy peak photons, the better the monochromaticity of the filtered X-rays.

[0084] In this way, by changing the filter membrane with different parameters, multiple single-energy peak photon count percentages can be obtained, and each single-energy peak photon count percentage corresponds to a filter membrane. By performing a comparison operation, the single-energy peak photon count with the largest value can be obtained, and the filter membrane corresponding to the single-energy peak photon count with the largest value can be used as the target filter membrane.

[0085] Then, replace the initially set filter membrane with the target filter membrane.

[0086] In this case, even if the continuous spectrum of X-rays generated by the X-ray optical engine contains multiple wavelengths, the filter membrane absorbs X-rays outside of specific wavelengths, making the output beam nearly monochromatic (e.g., a characteristic peak at 8.04 keV), which directly improves temporal coherence.

[0087] Furthermore, based on the proportion of photons in a single-energy peak, the filter film with the highest ratio can be selected. This ensures maximum monochromaticity, providing a pure input beam for subsequent spectral splitting. If monochromaticity is insufficient, the frequencies of the two beams after splitting will deviate, leading to reduced coherence.

[0088] In other words, monochromaticity is fundamental to achieving two beams of light with the same frequency. Only highly monochromatic incident light can be split into two coherent beams with the same frequency by a beam splitting crystal through Bragg diffraction. Therefore, the optimization of the filter membrane is a prerequisite for the entire process.

[0089] In this embodiment, the X-ray machine does not emit X-rays during any two filter membrane replacements. That is, during the replacement interval, there is no need to turn on the X-ray machine, and naturally, there is no need to turn on the detector.

[0090] It is also understandable that if the initial filter membrane has the largest proportion of single-energy peak photons, then it is used as the target filter membrane.

[0091] In this embodiment, the preset time can be 100 seconds. Of course, it can also be other values.

[0092] Step S3: After setting the target filter membrane between the X-ray machine and the detector, determine the target pose of the X-ray machine.

[0093] In this embodiment, by executing steps S1 and S2, the target filter membrane can be selected, and the relative positional relationship between the detector, the X-ray machine, and the filter membrane is established for the first time. Then, by changing the pose of the X-ray machine, the detector can generate signals with different response intensities, thereby selecting a pose that allows the detector to generate the maximum intensity signal.

[0094] Accordingly, step S3 includes:

[0095] The pose of the X-ray optical machine is adjusted so that when the X-ray passes through the target filter membrane to the detector, the detector acquires the photon count value of the X-ray in each pose; the pose of the X-ray when the photon count value is the largest is taken as the target pose, and the target pose of the X-ray optical machine is maintained.

[0096] Specifically, during the movement of the X-ray machine, X-rays are directed onto the target filter membrane, and after passing through the filter membrane, they are received by the detector. The detector can count the photon count at each pose (specifically, the detector can display the detected signal through a processor, thereby enabling the counting of photons at each pose).

[0097] In this way, by changing the pose multiple times, the horizontal rotation angle of the optomechanism when the photon count of the SDD detector is at its maximum can be found. The support remains at this angle, that is, the X-ray optomechanism is held at the target pose and the pose of the X-ray optomechanism is not changed afterward.

[0098] The reason for determining the target filter membrane first and then the X-ray machine pose in this application is as follows:

[0099] The target filter membrane optimizes monochromaticity (i.e., temporal coherence), which is fundamental to coherent light. If the angle is adjusted first, but the monochromaticity is poor, subsequent beam splitting may not produce clear characteristic peaks. Then, the angle of the X-ray machine is adjusted to maximize photon count, which optimizes the spatial directionality and flux of the beam. After monochromaticity optimization, the beam is pure, and adjusting the angle at this point ensures the strongest signal input, providing sufficient intensity for the slit and beam splitting.

[0100] This sequence avoids the cycle of "weak signal - ineffective adjustment". For example, as mentioned below, the slit width needs to be adjusted based on signal strength feedback; if the angle is adjusted first and then the filter membrane is selected, the signal may be weakened due to insufficient monochromaticity, affecting subsequent steps. Therefore, the sequence ensures that each step is built upon the optimization of the previous step.

[0101] Step S4: When the X-ray machine is in the target pose, a beam splitter is placed between the detector and the target filter membrane. By adjusting the pose of the beam splitter and the pose of the detector, the detector acquires the X-rays when it moves near the initial position and when it moves away from the initial position, respectively, to obtain the first coherent beam and the second coherent beam after being split by the beam splitter.

[0102] In this embodiment, by executing steps S1 to S3, it can be ensured that the target filter membrane is selected and the X-ray optical engine is located at the target orientation. At this time, a beam splitter 204 can be placed between the detector 203 and the target filter membrane. The beam splitter 204 can split the X-rays transmitted by the target filter membrane into two coherent beams.

[0103] More specifically, after setting up the beam-splitting crystal, the poses of the beam-splitting crystal and the detector are adjusted so that the detector can acquire two beams when it moves to different positions. When both beams satisfy the Bragg condition, the first and second coherent beams are determined.

[0104] Accordingly, step S4 includes:

[0105] A spectroscopic crystal is disposed between the detector and the target filter membrane, so that the X-rays emitted by the X-ray machine at the target position can pass through the target filter membrane and the spectroscopic crystal to the detector; the pose of the spectroscopic crystal is adjusted to change the relative angle between the spectroscopic crystal and the X-rays, and the pose of the detector is simultaneously adjusted so that the detector moves near the initial position, acquires the characteristic energy spectrum peak of the X-rays after passing through the spectroscopic crystal, and obtains the first coherent beam in response to the characteristic energy spectrum peak, while maintaining the current pose of the spectroscopic crystal; the detector is further adjusted so that it moves away from the initial position, and acquires the characteristic energy spectrum peak of the X-rays after passing through the spectroscopic crystal again, and obtains the second coherent beam in response to the characteristic energy spectrum peak.

[0106] In this embodiment, by adjusting the detector's pose, X-rays can be acquired at or near the detector's initial position. Furthermore, through the aforementioned adjustment steps, characteristic energy spectrum peaks after passing through the spectrophotometer (e.g., an 8.04 keV characteristic peak) can be obtained, indicating that the first coherent beam has been obtained. At this point, the current pose of the spectrophotometer is maintained.

[0107] Then, the detector's pose is adjusted further, and since the first coherent beam was obtained near the initial position, the detector is moved away from the initial position while maintaining the current pose of the beam-splitting crystal. During this movement, the characteristic energy spectrum peaks after passing through the beam-splitting crystal can be obtained again (e.g., an 8.04 keV characteristic peak appears), indicating that a second coherent beam has been obtained, meaning that the second coherent beam and the first coherent beam are interference beams.

[0108] In this embodiment, the movement of the detector toward a direction away from the initial position refers to the position indicated by another beam path after the X-ray passes through the beam-splitting crystal while the beam-splitting crystal is kept in the current pose.

[0109] For example, while the spectroscopic crystal remains in its current position, the transmission path of the X-rays after they are split can be determined, and the detector can be moved along this transmission path.

[0110] Specifically, see Figure 2 When setting up the beam-splitting crystal 204, it can be determined that one of the beam-splitting paths of the beam-splitting crystal 204 points to the lower right. Therefore, following the arrow shown by the dotted line in the figure, the detector 203 is moved to detect the second coherent beam. That is... Figure 2 There is actually only one detector 203. The two detectors 203 shown refer to the detectors being in different positions.

[0111] In this embodiment, the spectroscopic crystal is a Laue spectroscopic crystal. "Laue" refers to the ability of a crystal to split an incident beam into multiple outgoing beams using the diffraction effect of the crystal. The "transmission-type Laue spectroscopic crystal" used in this invention means that X-rays diffract as they pass through the crystal, potentially generating another coherent beam on the other side of the crystal. This is the core mechanism for achieving two coherent light sources with the same frequency.

[0112] Of course, the spectroscopic crystal can also be other types of spectroscopic crystals.

[0113] In this embodiment, the beam-splitting crystal is mounted on a second turntable. By driving the second turntable to move, the orientation of the beam-splitting crystal is changed.

[0114] The first and second turntables can use established mechanisms.

[0115] The response to the characteristic energy spectrum peak means that the detector can acquire X-rays that satisfy the Bragg condition during the adjustment process; wherein, the Bragg condition is 2d·sinθ=nλ, d is the interplanar spacing of the spectroscopic crystal, n is the diffraction order, and λ is the wavelength of the X-ray.

[0116] Bragg's law is the core principle of X-ray diffraction, describing the conditions for constructive interference of X-rays in crystal diffraction. The following is a detailed explanation of each parameter:

[0117] d (interplanar spacing): Represents the perpendicular distance between adjacent diffractive crystal planes in a crystal, typically measured in angstroms or nanometers. The value of d is determined by the internal structure of the crystal (e.g., the interplanar spacing of a single-crystal silicon is fixed) and is an intrinsic parameter of the material. In measurements, d is known in advance or obtained through calibration.

[0118] θ (Bragg diffraction angle): refers to the angle between the incident direction of X-rays and the diffraction crystal plane, and the unit is degrees.

[0119] n (diffraction order): This is an integer (e.g., n = 1, 2, 3, ...) representing the order of diffraction. n = 1 corresponds to the first-order diffraction, which has the strongest intensity; higher-order diffractions are weaker. In practical measurements, n = 1 is usually chosen to simplify calculations.

[0120] λ (X-ray wavelength): This is the wavelength of the X-ray source, measured in d (d). λ is determined by the laboratory X-ray source and must be kept stable to ensure the accuracy of the formula.

[0121] The physical meaning of Bragg's formula is that when X-rays are incident at an angle θ, the diffracted beam will only coherently enhance and form a detectable peak if the formula is satisfied.

[0122] More specifically, the reason why the above method can obtain an interference light source is that:

[0123] When an X-ray machine is turned on, rotating the spectrophotometer changes the relative angle between the spectrophotometer and the incident beam. Bragg diffraction is a reflection-based process, meaning the exit angle of the diffracted beam equals the incident angle. Therefore, changing the angle of the spectrophotometer alters the propagation direction of the diffracted beam.

[0124] If diffraction occurs, the beam will no longer propagate in a straight line, but will deflect at an angle. By synchronously and gradually moving the detector from its initial position to capture this weak diffracted light, a characteristic peak of 8.04 keV can be observed. This constitutes a closed-loop feedback system of adjustment-observation-readjustment.

[0125] When the characteristic peak appears, it means that the first coherent beam has been found. The position of the spectroscopic crystal is then fixed. Based on this, a similar detection process is repeated to find the second coherent beam with the same frequency.

[0126] As mentioned above, the interference signal strength in the synchrotron radiation scheme is relatively weak, resulting in a long experimental time and low testing efficiency.

[0127] Based on this, before placing the spectroscopic crystal 204 between the detector 203 and the target filter membrane, an aperture mechanism 206 is placed between the detector 203 and the target filter membrane. The aperture mechanism 206 has an adjustable slit. When the slit has different widths, the intensity of the X-rays passing through the slit is different. When the spectroscopic crystal 204 is placed, it is located between the aperture mechanism 206 and the detector 203, at which time the detector 203 is in its initial position.

[0128] Specifically, the aperture mechanism 206 can be installed behind the light-emitting end of the target filter membrane. By electrically adjusting the slit width in the aperture mechanism 206, the width of the light source can be modulated at the micrometer level, thereby reducing the effective size and divergence angle of the light source and improving the coherence of the light source.

[0129] However, if the slit is too narrow, it will affect the amount of light transmitted through the beam and the strength of the test signal. Therefore, the slit width needs to be adjusted based on the test signal strength. In subsequent steps, the slit needs to be adjusted according to the actual signal strength; if the signal is too weak, the slit width will be increased.

[0130] In this embodiment, the aperture mechanism 206 can refer to an electrically operated strip-shaped adjustable slit mechanism. This mechanism is placed on the vibration-isolation optical platform and mainly consists of a base plate, a mounting plate, a tool holder and blades, a drive assembly (such as a lead screw, motor, nut, linear guide rail, slider, and tension spring), and a control system. The tool holder is positioned along the length of the mounting plate, and the blades are horizontally mounted. The motor drives the lead screw to rotate, which in turn moves the tool holder via the nut, adjusting the slit size.

[0131] It should be noted that for further description of the electric strip adjustment slit mechanism, please refer to the description in the existing examples. This application only adopts the electric strip adjustment slit mechanism and does not make any improvements to its own structure.

[0132] Accordingly, the method further includes: obtaining the intensity of the X-rays passing through the slit, comparing the intensity with a preset intensity, and changing the width of the slit when the intensity is not the preset intensity.

[0133] In some embodiments, the width of the slit can be adjusted multiple times in a certain step size until the light intensity detected by the detector is the preset intensity.

[0134] In practical applications, the inventors, through numerous experiments, discovered the relationship between light source intensity and slit width. Thus, when the intensity is not the preset value, the slit width can be deduced from the detected light intensity.

[0135] For example, the intensity E = k·w·e -α / w ·C coh ·P norm ·M mono .

[0136] Where w is the slit width, k is the flux constant, α is the diffraction effect coefficient, and C coh P is the coherence correction factor. norm M is the power normalization factor for the X-ray machine. mono This is the monochromatic efficiency factor of the filter membrane.

[0137] The flux constant k can be understood as the basic flux per unit width, characterizing the combined effect of the collection efficiency of the X-ray optical engine and collimating optical device, as well as the transmittance of the target filter membrane.

[0138] When the slit width is large, the linear relationship between E and w is measured, and the value of k is obtained by fitting.

[0139] For example, by keeping other parameters fixed and varying w to measure E, k can be calculated.

[0140] The diffraction effect coefficient α can be understood as the signal loss caused by diffraction when the quantization slit is too narrow. The larger the value of α, the more significant the diffraction loss.

[0141] Specifically, the decay of E is measured over a narrow range, and the exponential term e is fitted by nonlinear regression. -α / w Determine the diffraction effect coefficient α.

[0142] Coherence correction factor C cohThis can be understood as the impact of spatial coherence on signal effectiveness (range 0-1). C coh When the value approaches 1, it indicates high coherence, which is beneficial for Bragg diffraction.

[0143] It can be defined as the ratio of the actual coherence length to the theoretical maximum value. For example, the coherence length can be calculated based on the full width at half maximum (FWHM) of the 8.04 keV characteristic peak.

[0144] X-ray machine power normalization factor P norm This can be understood as the ratio (dimensionless) of real-time power to rated power (1.3kW), used to compensate for optomechanical fluctuations. Specifically, P is determined by detecting the real-time power of the X-rays and through data fitting. norm .

[0145] Filter membrane monochromatic efficiency factor M mono This can be understood as the effect of target monochromaticity, defined as the ratio of the number of photons in a single energy peak to the total number of photons.

[0146] In this embodiment, the aperture mechanism is an electrically adjustable strip slit.

[0147] In this embodiment, the reason for placing the beam-splitting crystal only after the X-ray optical machine has the target orientation is that: after the exit angle of the X-ray optical machine is fixed, the beam direction is stable. At this time, the introduction of a slit (see below) can finely adjust the beam width and divergence angle, further improving spatial coherence without being affected by changes in the direction of the light source.

[0148] Then, the beam-splitting crystal is placed, because beam splitting requires extremely high collimation and monochromaticity. The slit has reduced the divergence angle, allowing the crystal to efficiently split the beam. If the beam-splitting crystal were placed first, the beam might have an excessively large divergence angle or unstable direction, resulting in a blurred diffraction signal and failing to meet the Bragg condition.

[0149] The second turntable needs to be fixed after the beam is satisfied, and the adjustment of the slit is a prerequisite, balancing flux and coherence. In this way, the second coherent beam can be found and the entire process can be completed.

[0150] In other words, this application utilizes the following collaborative process: X-ray machine generates X-rays → collimating optics improves flux and spatial coherence → filter membrane optimizes monochromaticity (i.e., temporal coherence) → slit fine-tunes beam size → beam splitter generates two coherent beams. Furthermore, the adjustment device is present throughout to ensure alignment.

[0151] In this way, the angle optimization of the target filter membrane and the X-ray optical engine provides a "clean, strong signal input" to the beam-splitting crystal, while the slit and beam-splitting crystal refine the beam on a fixed basis. Finally, two 8.04 keV coherent beams are captured by the detector. That is, the success of this system depends on the tight coupling of its components and steps.

[0152] To better illustrate and understand the implementation process of the X-ray interference beam in the embodiments of this application, a specific embodiment is described.

[0153] See Figure 3 The flowchart shown in this application illustrates a specific method for implementing an X-ray interference beam, as illustrated in the embodiment. Figure 3 As shown, the following steps can be performed:

[0154] S301, the X-ray machine is mounted on a multi-degree-of-freedom adjustable support, and a filter membrane, collimating optics and detector are sequentially arranged along the output light path of the X-ray machine.

[0155] S302, replace the filter membrane with different parameters, and obtain the percentage of single-energy peak photons in the energy spectrum data of X-rays filtered by each filter membrane through the detector within 100s, and take the filter membrane corresponding to the largest percentage of single-energy peak photons as the target filter membrane.

[0156] S303, adjust the pose of the X-ray machine, obtain the photon count value of the X-ray in each pose through the detector, and take the pose of the X-ray when the photon count value is the largest as the target pose, so that the X-ray machine stays in the target pose.

[0157] S304, an aperture mechanism is provided at the light-emitting end of the target filter membrane, and by changing the width of the slit in the aperture mechanism, the X-rays passing through the aperture mechanism have a preset intensity and a width corresponding to the preset intensity.

[0158] The preset intensity can be a specific value or a range of values.

[0159] S305, an aperture mechanism is provided at the light-emitting end of the target filter membrane, and the X-rays passing through the aperture mechanism are made to have a preset intensity by changing the width of the slit in the aperture mechanism, and the width of the slit corresponding to the preset intensity is fixed.

[0160] S306, a beam splitter is placed between the aperture mechanism and the detector, and the positions of the detector and the beam splitter are adjusted synchronously. When the detector acquires the characteristic energy spectrum peak of the X-ray after passing through the beam splitter, the first coherent beam is obtained, and the current position of the beam splitter is maintained.

[0161] S307, continue adjusting the detector until the characteristic energy spectrum peak reappears, and obtain the second coherent beam.

[0162] In summary, the present invention has at least the following advantages:

[0163] First, laboratory X-ray sources have improved system integration, high mobility, and greatly reduced measurement costs. They do not have the high construction and operation costs associated with synchrotron radiation, meaning they are low-cost.

[0164] Second, using collimating optics to collect diverging X-rays reduces light source divergence, improves collimation, and enhances spatial coherence. It also increases photon collection efficiency and beam flux, greatly improving testing efficiency and effectively compensating for the shortcomings of traditional laboratory light sources, such as low photon flux and insufficient coherence.

[0165] The implementation method of X-ray interference beam has been described in detail above through some embodiments. To enable those skilled in the art to better understand and implement it, the corresponding apparatus is also described in detail below through some embodiments.

[0166] It should be noted that, Figure 2 The simplified diagram illustrates the structure of the device and is intended to show the relative positional relationships between the components and the coordination between them. It should not be construed as a limitation of this application.

[0167] See Figure 2 The apparatus for realizing an X-ray interference beam includes:

[0168] X-ray optical machine 201, used to provide X-rays, wherein the X-ray optical machine has a target pose;

[0169] A target filter membrane (e.g., filter membrane 202 as shown in the figure) is disposed along the output light path of the X-ray optical machine to generate monochromatic monoenergetic X-rays;

[0170] Detector 203 is arranged along the output light path of the X-ray optical machine, and the X-rays pass through the target filter membrane to the detector 203;

[0171] The spectroscopic crystal 204, located between the target filter membrane and the detector 203, is used to split a single X-ray into a first coherent beam and a second coherent beam; wherein the first coherent beam and the second coherent beam are obtained when the detector 203 detects a characteristic energy spectrum peak and the characteristic energy spectrum peak shows a preset peak value;

[0172] A controller (not shown) is used to execute the method for realizing an X-ray interference beam as described in any of the foregoing embodiments, so as to obtain a first coherent beam and a second coherent beam after being split by the beam splitter 204 by controlling the X-ray optomechanical 201, the detector 203 and the beam splitter 204.

[0173] The controller, for example, is a general-purpose processor, such as a central processing unit (CPU), and the memory can be internal or external to the device. Alternatively, the above units can be implemented as hardware circuits. The functionality of some or all units can be achieved through the design of these hardware circuits, which can be understood as one or more processors. For example, in one implementation, the hardware circuit is an application-specific integrated circuit (ASIC), which implements the functionality of some or all of the above units through the design of the logical relationships between its internal components. In another implementation, the hardware circuit can be implemented using a programmable logic device (PLD), which can include a large number of logic gates. The logical relationships between these logic gates are configured through configuration files, thereby achieving the functionality of some or all of the above units. All units of the above system can be implemented entirely through processor-invoked programs, entirely through hardware circuits, or partially through processor-invoked programs with the remaining parts implemented through hardware circuits.

[0174] In this embodiment, the device for realizing the X-ray interference beam may further include:

[0175] A collimating optical device 205 is disposed between the X-ray optical engine 201 and the target filter membrane 202;

[0176] An aperture mechanism 206 is disposed between the spectroscopic crystal 204 and the target filter membrane. The aperture mechanism 206 has an adjustable slit, and the intensity of X-rays passing through the slit varies when the slit has different widths.

[0177] The controller is also used to acquire the intensity of the X-rays passing through the slit, compare the intensity with a preset intensity, and output a control signal to the aperture mechanism 206 when the preset intensity is not the preset intensity. The control signal is used to change the width of the slit.

[0178] Accordingly, the apparatus for realizing an X-ray interference beam satisfies one or more of the following:

[0179] The X-ray machine is a line focal spot copper target X-ray machine; the power of the X-ray light is 1.3kW; the X-ray machine is mounted on a multi-degree-of-freedom adjustable support.

[0180] The detector is a silicon drift detector (SDD); the energy response of the detector has been calibrated; the detector is mounted on the first turntable.

[0181] The spectroscopic crystal is a Laue spectroscopic crystal; the spectroscopic crystal is mounted on the second turntable.

[0182] The target filter membrane is a nickel metal filter membrane.

[0183] The aperture mechanism is an electrically adjustable strip slit.

[0184] The device for realizing the X-ray interference beam is placed on the vibration-isolated optical platform 207. By setting up the vibration-isolated optical platform 207, the influence of external vibrations on the system is reduced, and the accuracy is improved.

[0185] For a more detailed description of the apparatus for realizing the X-ray interference beam, please refer to the method section of the aforementioned example.

[0186] While the embodiments disclosed in this specification are as described above, the present invention is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A method for realizing an X-ray interference beam, characterized in that, include: Step S1: A filter membrane and a detector are sequentially arranged in the output light path of the X-ray machine. The X-rays emitted from the X-ray machine pass through the filter membrane to the detector, and the detector has an initial position. Step S2: Replace the filter membrane with one of different parameters and drive the X-ray machine to emit X-rays, so that the detector collects the energy spectrum data corresponding to each filter membrane within a preset time to select the target filter membrane and replace the filter membrane in situ. Step S3: After setting the target filter membrane between the X-ray machine and the detector, determine the target pose of the X-ray machine; Step S4: When the X-ray machine is in the target pose, a beam splitter is placed between the detector and the target filter membrane. By adjusting the pose of the beam splitter and the pose of the detector, the detector acquires the X-rays when it moves near the initial position and when it moves away from the initial position, respectively, to obtain the first coherent beam and the second coherent beam after being split by the beam splitter.

2. The method for realizing an X-ray interference beam according to claim 1, characterized in that, When performing step S1, a collimating optical device is also provided in the outgoing optical path, and the collimating optical device is located between the X-ray optical engine and the filter membrane; Specifically, by using a laser collimator, when the detector is in the initial position, the center of the detector probe, the center of the collimating optics, and the center of the filter membrane are aligned on the same straight line indicated by the outgoing light path.

3. The method for realizing an X-ray interference beam according to claim 1, characterized in that, Step S2 includes: When any filter membrane is placed in situ, within the preset time period, the percentage of single-energy peak photons in the energy spectrum data detected by the detector after the X-rays pass through each filter membrane is obtained. By comparing the proportion of single-energy peak photons when each filter membrane is placed, the filter membrane layer with the largest proportion of single-energy peak photons is taken as the target filter membrane. During any two replacements of the filter membrane, the X-ray machine does not emit X-rays.

4. The method for realizing an X-ray interference beam according to claim 1, characterized in that, Step S3 includes: The position of the X-ray optical engine is adjusted so that when the X-ray passes through the target filter membrane to the detector, the photon count value of the X-ray in each position is obtained through the detector. The pose of the X-ray when the photon count is at its maximum is taken as the target pose, and the target pose of the X-ray optical machine is maintained.

5. The method for realizing an X-ray interference beam according to claim 1, characterized in that, Step S4 includes: A beam-splitting crystal is disposed between the detector and the target filter membrane, so that the X-rays emitted by the X-ray optical machine at the target position can pass through the target filter membrane and the beam-splitting crystal to the detector. The pose of the beam splitter is adjusted to change the relative angle between the beam splitter and the X-ray, and the pose of the detector is adjusted synchronously so that the detector moves near the initial position to obtain the characteristic energy spectrum peak of the X-ray after passing through the beam splitter, and in response to the characteristic energy spectrum peak, the first coherent beam is obtained, while maintaining the current pose of the beam splitter. The detector is further adjusted so that it moves away from the initial position, and the characteristic energy spectrum peak of the X-rays after passing through the spectroscopic crystal is acquired again. In response to the characteristic energy spectrum peak, a second coherent beam is obtained.

6. The method for realizing an X-ray interference beam according to claim 5, characterized in that, The response to the characteristic energy spectrum peak means that the detector can acquire X-rays that satisfy the Bragg condition during the adjustment process; wherein, the Bragg condition is 2d·sinθ=nλ, d is the interplanar spacing of the spectroscopic crystal, n is the diffraction order, and λ is the wavelength of the X-ray. The movement of the detector toward a direction away from the initial position refers to the position indicated by another beam path after the X-ray passes through the beam-splitting crystal, while the beam-splitting crystal is kept in the current pose.

7. The method for realizing an X-ray interference beam according to claim 1 or 5, characterized in that, Before placing a spectroscopic crystal between the detector and the target filter membrane, an aperture mechanism is placed between the detector and the target filter membrane. The aperture mechanism has an adjustable slit, and the intensity of X-rays passing through the slit varies when the slit has different widths. When the spectroscopic crystal is placed, it is located between the aperture mechanism and the detector. The method further includes: obtaining the intensity of X-rays passing through the slit, comparing the intensity with a preset intensity, and changing the width of the slit when the intensity is not the preset intensity.

8. A device for realizing an X-ray interference beam, characterized in that, include: An X-ray optical machine for providing X-rays, wherein the X-ray optical machine has a target orientation; The target filter membrane is arranged along the output light path of the X-ray optical machine to generate monochromatic monoenergetic X-rays; The detector is arranged along the output light path of the X-ray optical machine, and the X-rays pass through the target filter membrane to the detector; A spectroscopic crystal, located between the target filter membrane and the detector, is used to split a single X-ray into a first coherent beam and a second coherent beam; wherein the first coherent beam and the second coherent beam are acquired when the detector detects a characteristic energy spectrum peak and the characteristic energy spectrum peak shows a preset peak value; A controller is configured to execute the method for realizing an X-ray interference beam according to any one of claims 1 to 7, so as to obtain a first coherent beam and a second coherent beam after being split by the beam splitter by controlling the X-ray optomechanic, the detector and the beam splitter.

9. The apparatus for realizing an X-ray interference beam according to claim 8, characterized in that, Also includes: A collimating optical device is disposed between the X-ray optical engine and the target filter membrane; An aperture mechanism is disposed between the spectroscopic crystal and the target filter membrane. The aperture mechanism has an adjustable slit, and the intensity of X-rays passing through the slit varies when the slit has different widths. The controller is also used to acquire the intensity of the X-rays passing through the slit, compare the intensity with a preset intensity, and output a control signal to the aperture mechanism when the preset intensity is not the preset intensity. The control signal is used to change the width of the slit.

10. The apparatus for realizing an X-ray interference beam according to claim 9, characterized in that, Meet one or more of the following conditions: The X-ray machine is a line focal spot copper target X-ray machine; the power of the X-ray light is 1.3kW; the X-ray machine is mounted on a multi-degree-of-freedom adjustable support. The detector is a silicon drift detector (SDD); the energy response of the detector has been calibrated. The detector is mounted on the first turntable; The spectroscopic crystal is a Laue spectroscopic crystal; the spectroscopic crystal is mounted on the second turntable; The target filter membrane is a nickel metal filter membrane; The aperture mechanism is an electrically adjustable slit; The device for realizing the X-ray interference beam is placed on a vibration-isolated optical platform.

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