Lifting device applied to semiconductor storage system

Abstract

The invention provides a lifting device applied to a semiconductor storage system. The lifting device comprises a containing space, a driving wheel, a driven wheel, a transmission belt, a connecting mechanism, a balance weight mechanism and a stand column, wherein the periphery of the containing space is defined by sealing plates, and the transmission belt, the connecting mechanism, the balance weight mechanism and the stand column are arranged in the containing space. The driven wheel and the driving wheel are distributed on the upper side and the lower side of the containing space and connected with the transmission belt to form a transmission structure. The transmission belt comprises a first transmission belt and a second transmission belt, one end of the first transmission belt is connected with the connecting mechanism, the other end is connected with the counterweight mechanism through the driven wheel, one end of the second transmission belt is connected with the counterweight mechanism, and the other end is connected with the connecting mechanism through the driving wheel; the balance weight mechanism and the connecting mechanism are arranged on the two sides of the stand column respectively, and a plurality of suction channels are formed in the stand column. A suction filtration mechanism is arranged on the outer wall surface of the sealing plate. The lifting device can achieve the sealing and dustproof effects and can purify dust in the device so as to meet the requirements of semiconductor material transmission; meanwhile, the lifting device has high lifting efficiency.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor manufacturing equipment, and relates to an enhancement device applied to semiconductor memory systems. Background Technology

[0002] With the rapid growth of domestic semiconductor industry demand, semiconductor manufacturing has placed higher demands on the efficiency, security, and cleanliness of wafer transport and storage. However, existing semiconductor storage and transmission technologies have significant limitations, particularly in terms of sealing and dustproof performance and transmission efficiency, both of which fail to meet the needs of high-end manufacturing. Specifically: 1) Traditional wafer box handling relies heavily on manual operation, which is costly and slow, and cannot meet the needs of large-scale continuous production, thus restricting the overall transfer efficiency; at the same time, manual contact is prone to introducing contamination and bumps, affecting product yield and the maintenance of a clean environment. 2) Existing lifting mechanisms often use chain or wire rope drives, which generate dust through friction during operation. Moreover, most of these mechanisms are open designs, which cannot effectively seal off the dust source, causing dust to escape into the clean area. This makes it difficult to meet the cleanroom environment standards of CLASS 10 and above (particle concentration >100 particles / ft³), severely restricting the sealing and dust prevention effect in high-cleanliness environments. In addition, the transmission components wear out quickly and require regular lubrication and maintenance. The wire ropes are also prone to stretching and deformation, further affecting operational stability and efficiency. 3) In terms of equipment structure, traditional hoist columns mostly adopt segmented splicing guide bodies, which are complicated to assemble and inconvenient to maintain. They also affect the overall rigidity and operational stability, indirectly reducing transmission efficiency and equipment reliability. 4) The positioning method relies heavily on single-point photoelectric sensors, which have insufficient repeatability and make it difficult to achieve high-precision and rapid docking between the wafer cell and the process equipment.

[0003] In summary, existing technologies have significant shortcomings in both sealing and dust prevention and transmission efficiency, and cannot meet the increasingly demanding requirements of semiconductor manufacturing for clean environments and efficient logistics, thus requiring further improvement. Summary of the Invention

[0004] To overcome the above problems, the present invention provides a lifting device for use in semiconductor memory systems. This lifting device achieves a sealing and dustproof effect and can purify the dust inside the device to meet the requirements of semiconductor material transport; simultaneously, the lifting device has high lifting efficiency.

[0005] The present invention achieves the above objectives through the following technical solutions: This invention provides a lifting device for a semiconductor memory system, comprising: a receiving space enclosed by a sealing plate, a driving wheel and a driven wheel, and a transmission belt, a connecting mechanism, a counterweight mechanism, and a column disposed within the receiving space; the driven wheel and the driving wheel are distributed on the upper and lower sides of the receiving space, and both the driving wheel and the driven wheel are connected to the transmission belt to form a transmission structure; the transmission belt includes a first transmission belt and a second transmission belt, one end of the first transmission belt is connected to the connecting mechanism, and the other end is connected to the counterweight mechanism via the driven wheel; one end of the second transmission belt is connected to the counterweight mechanism, and the other end is connected to the connecting mechanism via the driving wheel; the counterweight mechanism and the connecting mechanism are respectively disposed on both sides of the column, and the column has a plurality of suction channels; the outer wall of the sealing plate is provided with a filtration mechanism; the filtration mechanism is used to form a negative pressure chamber in the closed cavity of the column, and to remove impurities inside the lifting device through the suction channels.

[0006] In some embodiments, the column includes a first hollow section and a second hollow section with a guiding function. The first hollow section is provided with the lifting guide wheel of the connecting mechanism, and the second hollow section is provided with the counterweight mechanism.

[0007] In a specific implementation, the connecting mechanism includes a first lifting guide wheel and a second lifting guide wheel. The first lifting guide wheel and the second lifting guide wheel are used to restrict the degrees of freedom of the connecting mechanism in the x-axis direction and the y-axis direction, respectively, so that the connecting mechanism can move in the z-axis direction. Herein, the x-axis direction, the y-axis direction, and the z-axis direction refer to the length direction, the width direction, and the height direction of the connecting mechanism, respectively.

[0008] In a specific implementation, the connecting mechanism is connected to a robotic arm disposed on the outer wall of the sealing plate, the robotic arm being used to grasp the semiconductor carrier.

[0009] In a specific embodiment, the cross-section of the column is an integral structure, and the column is provided with two first hollow portions and one second hollow portion; the cross-sections of the two first hollow portions are U-shaped and symmetrically arranged on the first and second sides of the column; a plurality of second lifting guide wheels are respectively abutted in the two first hollow portions; the second hollow portion is located on the third side of the column; through the second hollow portion, the third side and the bent portions at both ends form a receiving cavity; the counterweight mechanism is disposed in the receiving cavity, and the counterweight guide wheel of the counterweight mechanism abuts against the wall of the receiving cavity.

[0010] In a specific implementation, the fourth side of the column is provided with a limiting part, which is used to limit the position of the connecting mechanism in the y-axis direction; wherein, the y-axis direction refers to the width direction of the connecting mechanism.

[0011] In a specific embodiment, the counterweight mechanism includes a first counterweight guide wheel, a second counterweight guide wheel, a belt pressure plate, and a counterweight block disposed between the belt pressure plates; the first counterweight guide wheel is connected to the belt pressure plate through a first counterweight guide wheel fixing plate, and the second counterweight guide wheel is connected to the belt pressure plate through a second counterweight guide wheel fixing plate; the first and second counterweight guide wheels are disposed in a receiving cavity to restrict the degree of freedom of the counterweight mechanism in the y-axis and x-axis directions, so that the counterweight mechanism can move in the z-axis direction; wherein, the x-axis direction, y-axis direction, and z-axis direction refer to the width direction, length direction, and height direction of the counterweight mechanism 7, respectively.

[0012] In a specific embodiment, each of the suction channels is arranged along the height direction of the column; a first suction port is opened on the first side of the column, a second suction port is opened on the second side of the column, a third suction port and a fourth suction port are opened on the fourth side of the column, the third suction port and the fourth suction port are respectively located on both sides of the limiting part, a fifth suction port and a sixth suction port are opened on the third side of the column, the fifth suction port and the sixth suction port are respectively symmetrically arranged with the third suction port and the fourth suction port; the first suction port, the second suction port, the third suction port, the fourth suction port, the fifth suction port and the sixth suction port are interconnected to form the suction channel; or, the first suction port, the third suction port and the fifth suction port are interconnected to form the first suction channel, and the second suction port, the fourth suction port and the sixth suction port are interconnected to form the second suction channel.

[0013] In some embodiments, the lifting device further includes a positioning component disposed on the connecting mechanism. The positioning component matches a positioning structure fixed inside the receiving space to record and provide feedback on the displacement when the connecting mechanism moves.

[0014] In a specific implementation, the positioning component includes a positioning gear, which is connected to a guide seat and an encoder via a coupling. The guide seat is mounted on a positioning fixed seat via a guide shaft with a spring. The positioning fixed seat is mounted on the connecting mechanism. The positioning structure includes a positioning toothed belt, and the positioning gear matches the positioning toothed belt so that the positioning component records and provides feedback on the displacement when it moves with the connecting mechanism.

[0015] In some embodiments, the lifting device further includes a drive mechanism and a cable chain assembly; the drive mechanism is connected to the drive wheel and is used to drive the drive wheel; the cable chain assembly is provided with a cable for supplying power to the lifting device.

[0016] In some embodiments, the driven wheel is equipped with a brake to provide mechanical braking protection in the event of a loss of control of the lifting device; when the drive belt becomes loose or breaks, and the brake detects that the rotational speed of the driven wheel exceeds a threshold, the brake is activated and brakes the driven wheel.

[0017] In some embodiments, the driving wheel and the driven wheel are isolated from the connecting mechanism and the counterweight mechanism by a first partition and a second partition, respectively; a first buffer is provided on the side of the first partition away from the driving wheel, and a second buffer is provided on the side of the second partition away from the driven wheel.

[0018] Compared with the prior art, the present invention has the following significant advantages: 1. The lifting device of the present invention can achieve sealing and dust prevention and dust purification; it solves the problem of sealing arrangement and connection of moving parts, controls dust inside the equipment through a fully enclosed structure design, and achieves rapid dust adsorption by a suction mechanism, thus meeting the cleanroom air quality standards.

[0019] 2. The lifting device of the present invention can meet the requirements of high acceleration / deceleration performance; for the scenario of rapid transfer across floors, it solves the problem of power output response speed of the lifting mechanism, overcomes the defects of slow acceleration and poor deceleration performance of traditional chain and wire rope transmission, and meets the time requirements for efficient entry and exit of semiconductor wafer boxes.

[0020] 3. The lifting device of the present invention has the advantages of structural stability and high installation and maintenance efficiency; in addition, in the limited shaft space across floors, to solve the contradiction between the stability and compactness of the main structure, it is necessary to reduce splicing errors through integrated molding and other processes, and avoid the high-altitude operation risks and long-term operation deformation problems of traditional splicing structures. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the internal structure of a lifting device according to an embodiment of this application; Figure 2 This is a side view of a lifting device according to an embodiment of this application; Figure 3 This is a top view of a lifting device according to an embodiment of this application; Figure 4 This is a cross-sectional view of the column of the lifting mechanism according to an embodiment of this application; Figure 5 This is a schematic diagram of the connecting mechanism in a lifting device according to an embodiment of this application; Figure 6 This is a side view of the connecting mechanism in a lifting device according to an embodiment of this application; Figure 7 This is a cross-sectional view of the connecting mechanism in a lifting device according to an embodiment of this application; Figure 8This is a diagram showing the positional relationship between the column and the connecting mechanism of a lifting mechanism according to an embodiment of this application; Figure 9 This is a front view of the counterweight mechanism in a lifting mechanism according to an embodiment of this application; Figure 10 This is a side view of the counterweight mechanism in a lifting mechanism according to an embodiment of this application; Figure 11 This is a diagram showing the positional relationship between the column and the counterweight mechanism of a lifting mechanism according to an embodiment of this application; Figure 12 This is a schematic diagram of the suction channel on the column of the lifting mechanism according to an embodiment of this application; Figure 13 This is a schematic diagram of the suction channel on the column of the lifting mechanism according to another embodiment of this application; Figure 14 This is a diagram showing the positional relationship between the positioning component and the positioning structure in a lifting mechanism according to an embodiment of this application; Figure 15 This is a perspective structural diagram of the positioning component in a lifting mechanism according to an embodiment of this application; Figure 16 This is a side view of the positioning component in a lifting mechanism according to an embodiment of this application.

[0022] Explanation of reference numerals in the attached figures: 1. Accommodation space; 101. Sealing plate; 2. Column; 21. First side; 22. Second side; 23. Third side; 24. Fourth side; 201. Suction channel; 2011. First suction port; 2012. Second suction port; 2013. Third suction port; 2014. Fourth suction port; 2015. Fifth suction port; 2016. Sixth suction port; 2017. First suction channel; 2018. Second suction channel; 202. First hollow part; 203. Second hollow part; 204. Bending part; 205. Limiting part; 3. Driving wheel; 4. Driven wheel; 5. Transmission belt; 501. First transmission belt; 502. Second transmission belt; 6. Connecting mechanism; 601. First lifting guide wheel; 602. Lifting guide wheel 602, counterweight mechanism 7, first counterweight guide wheel 701, second counterweight guide wheel 702, belt pressure plate 703, first counterweight guide wheel fixing plate 704, second counterweight guide wheel fixing plate 705, counterweight block 706, suction filter mechanism 8, positioning assembly 9, positioning gear 901, coupling 902, guide seat 903, encoder 904, spring 905, guide shaft 906, positioning fixing seat 907, positioning structure 10, positioning toothed belt 1001, drive mechanism 11, drag chain assembly 12, brake 13, first partition 14, first buffer 15, second partition 16, second buffer 17, robot arm 18, support frame 19. Detailed Implementation

[0023] The present invention will be further described in detail below through preferred embodiments, but the scope of protection of the present invention is not limited thereto.

[0024] The present invention discloses an enhancement device for a semiconductor memory system. The semiconductor memory system in this application includes: a tower stocker, a reticle stocker, and a wafer stocker.

[0025] Figure 1 This is a schematic diagram of the internal structure of the lifting device; Figure 2 A side view of the lifting device; Figure 3 This is a top view of the lifting device.

[0026] In this invention, the lifting device is applicable to the handling of storage devices, especially semiconductor material storage devices; wherein, semiconductor materials include wafers, and also include containers containing semiconductor materials, such as wafer cassettes; the lifting device can be installed across floors to enable displacement and transmission of semiconductor materials in the vertical direction and between different floors.

[0027] like Figure 1-3 As shown, the lifting device includes: a receiving space 1 enclosed by a sealing plate 101, a driving wheel 3 and a driven wheel 4, and a transmission belt 5, a connecting mechanism 6, a counterweight mechanism 7, and a column 2 disposed inside the receiving space 1; the driven wheel 4 and the driving wheel 3 are distributed on the upper and lower sides of the receiving space 1, and both the driving wheel 3 and the driven wheel 4 are connected to the transmission belt 5 to form a transmission structure; the transmission belt 5 includes a first transmission belt 501 and a second transmission belt 502, one end of the first transmission belt 501 is connected to the connecting mechanism 6, and the other end is connected to the counterweight mechanism 7 through the driven wheel 4, and one end of the second transmission belt 502 is connected to the counterweight mechanism 7, and the other end is connected to the connecting mechanism 6 through the driving wheel 3; the counterweight mechanism 7 and the connecting mechanism 6 are respectively disposed on both sides of the column 2, and a plurality of suction channels 201 are opened on the column 2; a suction and filtration mechanism 8 is provided on the outer wall of the sealing plate 101; the suction and filtration mechanism 8 is used to form a negative pressure chamber in the closed cavity of the column 2, and to remove impurities inside the lifting device through the suction channels 201. This lifting device can achieve a sealing and dustproof effect to meet the requirements of semiconductor material transport; at the same time, the lifting device has a high lifting efficiency.

[0028] In this invention, the components of the lifting device can be made of materials suitable for Class 100 cleanrooms.

[0029] In this invention, the accommodating space 1 formed by the sealing plate 101 is close to a closed space. These spaces may contain dust generated by the movement of the guide wheel or the transmission belt. The dust inside the device can be purified by the filtration mechanism.

[0030] In this invention, "the driving wheel, driven wheel, transmission belt, connecting mechanism, counterweight mechanism and column located inside the accommodating space" can be understood as at least some components of the lifting device being located inside the accommodating space 1, such as the transmission belt 5, connecting mechanism 6, counterweight mechanism 7 and column 2 being located inside the accommodating space 1, and other components (such as the driving wheel 3 and driven wheel 4) being located outside the accommodating space 1.

[0031] like Figure 1 As shown, a transmission belt 5 connects the driving wheel 3 and the driven wheel 4. When the driving wheel 3 rotates, it drives the driven wheel 4 to rotate through the transmission belt 5, causing the counterweight mechanism 7 and the connecting mechanism 6 connected to the transmission belt to move up and down relative to each other; that is, when the connecting mechanism 6 rises, the counterweight mechanism 7 falls, and when the connecting mechanism 6 falls, the counterweight mechanism 7 rises.

[0032] In this invention, the column 2 can be positioned on the central axis inside the accommodating space 1, dividing the accommodating space 1 into a counterweight area and a connecting area, such as... Figure 1 As shown, the counterweight area is located on the left side of the column 2, where a counterweight mechanism 7 is installed, and the connecting area is located on the right side of the column 2, where a connecting mechanism 6 is installed; the first transmission belt 501 is located on one side of the driven wheel 4, and its two ends are respectively connected to the upper ends of the counterweight mechanism 7 and the connecting mechanism 6; the second transmission belt 502 is located on one side of the driving wheel 3, and its two ends are respectively connected to the lower ends of the counterweight mechanism 7 and the connecting mechanism 6.

[0033] In this invention, the filtration mechanism 8 can be a fan filter unit (FFU); through the semi-sealed structural arrangement and in conjunction with the FFU, it can be ensured that the entire lifting device does not emit dust to the outside.

[0034] Figure 4 A cross-sectional view of the column for lifting the mechanism.

[0035] like Figure 4 As shown, the column 2 includes a first hollow section 202 and a second hollow section 203 with guiding function. The first hollow section 202 is equipped with a lifting guide wheel connected to the mechanism 6, and the second hollow section 203 is equipped with a counterweight mechanism 7. By setting the hollow section with guiding function on the column 2, the accuracy and safety of the lifting device can be ensured, so that the transported object can reach the target position quickly and accurately. This solves the problem of precise vertical positioning (such as docking with floor storage racks) and ensures that the positioning accuracy meets the standard during high-speed operation (such as millimeter-level docking error in CLASS 10 environment).

[0036] Among them, column 2 can be made of 6005 aluminum alloy, 7075 aluminum alloy and 304 stainless steel, which have high strength and corrosion resistance, avoid the generation of dust particles from metal corrosion, and are suitable for cleanroom requirements of CLASS 10 and above.

[0037] The transmission belt is made of low-friction polyurethane material to reduce friction and dust generation; and it is combined with the driven pulley's deviation adjustment function to avoid slippage or jamming and improve operational stability.

[0038] Among them, the drive wheel, driven wheel and each guide wheel are made of low-noise, low-wear engineering plastics. Each guide wheel can provide lifting guidance and force support for the robot, ensuring no jamming during high-speed operation and reducing power loss.

[0039] Figure 5 This is a schematic diagram of the connecting mechanism in the lifting device; Figure 6 A side view of the connecting mechanism in the lifting device; Figure 7 This is a cross-sectional view of the connecting mechanism in the lifting device.

[0040] like Figure 5-7 As shown, the connecting mechanism 6 includes a first lifting guide wheel 601 and a second lifting guide wheel 602. The first lifting guide wheel 601 and the second lifting guide wheel 602 are used to restrict the degrees of freedom of the connecting mechanism 6 in the x-axis and y-axis directions, respectively, so that the connecting mechanism 6 can move in the z-axis direction; at the same time, the first lifting guide wheel 601 and the second lifting guide wheel 602 have a guiding function. Wherein, as... Figure 6 As shown, the "x-axis direction" refers to the length direction of the connecting mechanism 6; the "y-axis direction" refers to the width direction of the connecting mechanism 6; and the height direction of the connecting mechanism 6 is the "z-axis direction," which is the direction in which the connecting mechanism 6 moves up and down. When the connecting mechanism 6 moves up and down, the first lifting guide wheel 601 rolls against the inner wall of the accommodating space 1, and the second lifting guide wheel 602 rolls against the wall of the first hollow part 202, thereby improving the accuracy of the up and down displacement of the connecting mechanism 6.

[0041] like Figure 1 As shown, the connecting mechanism 6 is connected to the robotic arm 18 disposed on the outer wall of the sealing plate 1. The robotic arm 18 is used to grasp the semiconductor carrier. Through the up and down displacement of the connecting mechanism 6, the robotic arm is driven to accurately transport the object to be transported to the target position.

[0042] In this invention, the connecting mechanism 6 has a fall protection design to solve the safety problem of falling in emergency situations, and avoids the risk of equipment loss of control through multiple protection mechanisms.

[0043] In this invention, such as Figure 4 As shown, in order to clearly illustrate the structure of the column 2, the side of the column 2 is divided into a first side 21, a second side 22, a third side 23 and a fourth side 24. The first side 21 and the second side 22 are the surfaces of the column 2 that are perpendicular to the transmission belt 5; the third side 23 is the side that is close to the counterweight mechanism 7; and the fourth side 24 is the side that is close to the connecting mechanism 6.

[0044] Figure 8This diagram illustrates the positional relationship between the support column and the connecting mechanism of the lifting device.

[0045] like Figure 4 and Figure 8 As shown, the cross-section of the column 2 is an integral structure, and the column 2 is provided with two first hollow parts 202 and one second hollow part 203; the cross-section of the two first hollow parts 202 is U-shaped and is symmetrically arranged on the first side 21 and the second side 22 of the column 2; multiple second lifting guide wheels 602 are respectively abutted in the two first hollow parts 202; the second hollow part 203 is located on the third side 23 of the column 2; through the second hollow part 203, the third side 23 and the bent parts 204 at both ends form a receiving cavity; the counterweight mechanism 7 is provided in the receiving cavity, and the counterweight guide wheel of the counterweight mechanism 7 abuts against the wall of the receiving cavity. The structure of the aforementioned column 2 can simultaneously guide the lifting and lowering movements of the counterweight mechanism 7 and the connecting mechanism 6, improving the accuracy of the lifting position of the connecting mechanism in the lifting device. Furthermore, the integrated column structure not only solves the defects of multi-segment splicing and assembly, but also takes into account the vertical installation flexibility, effectively improving the stability and maintenance convenience of the structure, solving the compatibility problem between materials (such as corrosion-resistant and low-dust-generating materials) and structure (sealing and dustproof design), and avoiding dust pollution caused by friction of traditional metal parts.

[0046] In addition, since column 2 runs through multiple floors, its longitudinal section is a spliced ​​structure; that is, along the height direction of the lifting device, column 2 is a spliced ​​structure.

[0047] The fourth side 24 of the column 2 is provided with a limiting part 205, which is used to limit the position of the connecting mechanism 6 in the y-axis direction. For example, Figure 8 As shown, the "y-axis direction" refers to the width direction of the connecting mechanism 6.

[0048] The fourth side 24 of the column 2 is provided with a position detection component, which is used to detect the distance between the connecting mechanism 6 and the column 2.

[0049] Figure 9 To enhance the main view of the counterweight mechanism in the system; Figure 10 A side view of the counterweight mechanism in the lifting mechanism.

[0050] like Figure 9 and 10 As shown, the counterweight mechanism 7 includes a first counterweight guide wheel 701, a second counterweight guide wheel 702, a belt pressure plate 703, and a counterweight block 706 disposed between the belt pressure plates 703; the first counterweight guide wheel 701 is connected to the belt pressure plate 703 through a first counterweight guide wheel fixing plate 704, and the second counterweight guide wheel 702 is connected to the belt pressure plate 703 through a second counterweight guide wheel fixing plate 705; Figure 11 Diagram showing the positional relationship between the column and the counterweight mechanism of the lifting device.

[0051] The first counterweight guide wheel 701 and the second counterweight guide wheel 702 are disposed in the receiving cavity to restrict the degrees of freedom of the counterweight mechanism 7 in the x-axis and y-axis directions, so that the counterweight mechanism 7 can move in the z-axis direction; at the same time, the first counterweight guide wheel 701 and the second counterweight guide wheel 702 have a guiding function. Wherein, as... Figure 11 As shown, the "x-axis direction" refers to the width direction of the counterweight mechanism 7; the "y-axis direction" refers to the length direction of the counterweight mechanism 7; and the height direction of the counterweight mechanism 7 is the "z-axis direction," which is the direction in which the counterweight mechanism 7 moves up and down. When the counterweight mechanism 7 moves up and down, the first counterweight guide wheel 701 abuts against the bottom surface and the bent part 204 of the U-shaped structure and rolls, while the second counterweight guide wheel 702 abuts against the side of the U-shaped structure and rolls, thereby improving the accuracy of the vertical displacement of the counterweight mechanism 7.

[0052] Figure 12 A schematic diagram of the suction channel on the column of a lifting mechanism; Figure 13 This is a schematic diagram of the suction channel on the column of another type of lifting mechanism.

[0053] Each suction channel 201 is provided with at least one set along the height direction of the column 2; the first side 21 of the column 2 is provided with a first suction port 2011, the second side 22 of the column 2 is provided with a second suction port 2012, the fourth side 24 of the column 2 is provided with a third suction port 2013 and a fourth suction port 2014, the third suction port 2013 and the fourth suction port 2014 are respectively provided on both sides of the limiting part 205, and the third side 23 of the column 2 is provided with a fifth suction port 2015 and a sixth suction port 2016; in some embodiments, the fifth suction port 2015 and the sixth suction port 2016 are symmetrically arranged with the third suction port 2013 and the fourth suction port 2014, respectively.

[0054] like Figure 12 As shown, the first suction port 2011, the second suction port 2012, the third suction port 2013, the fourth suction port 2014, the fifth suction port 2015, and the sixth suction port 2016 are interconnected to form a suction channel 201. Due to the suction effect of the filtration mechanism 8, the second hollowed-out part 203 where the counterweight mechanism 7 is located becomes a negative pressure chamber; or, at least one suction port is connected to the negative pressure chamber formed by the filtration mechanism 8 to direct the airflow from the multiple spaces separated by the column in the accommodating space 1 to the filtration mechanism 8 for purification, thereby removing the dust generated by the guide wheels and drive belt on both sides of the column.

[0055] like Figure 13As shown, the first suction port 2011, the third suction port 2013, and the fifth suction port 2015 are interconnected to form the first suction channel 2017, and the second suction port 2012, the fourth suction port 2014, and the sixth suction port 2016 are interconnected to form the second suction channel 2018. The first suction channel 2017 can handle the dust generated by the guide wheel and the drive belt on one side of the column, and the second suction channel 2018 can handle the dust generated by the guide wheel and the drive belt on the other side of the column, so as to direct the airflow of the multiple spaces separated by the column to the filtration mechanism 8 for purification. By setting multiple sets of suction channels 201 on the column 2, not only can the cleaning of each cavity inside the accommodating space 1 be achieved, but the impact on the structural rigidity of the column 2 can also be minimized, thereby ensuring the service life of the column and improving the overall performance of the lifting device.

[0056] Figure 14 To improve the positional relationship between the positioning component 9 and the positioning structure 10 in the mechanism. Figure 15 A three-dimensional structural diagram of positioning component 9 in the mechanism is provided. Figure 16 A side view of positioning component 9 in the mechanism.

[0057] like Figure 3 As shown, the lifting mechanism also includes a positioning component 9, which is mounted on the connecting mechanism 6. The positioning component 9 matches the positioning structure 10 fixed inside the accommodating space 1 to record and provide feedback on the displacement when it moves with the connecting mechanism 6.

[0058] like Figure 14-16 As shown, the positioning component 9 includes a positioning gear 901, which is connected to a guide seat 903 and an encoder 904 via a coupling 902. The guide seat 903 is mounted on a positioning fixing seat 907 via a guide shaft 906 with a spring 905. The positioning fixing seat 907 is mounted on the connecting mechanism 6. The positioning structure 10 includes a positioning toothed belt 1001, which matches the positioning gear 901 to record and provide feedback on the displacement of the positioning component 9 as it moves with the connecting mechanism 6. When the spring 905 is in a partially compressed state, its extension force constantly pushes the positioning gear 901 and the positioning toothed belt 1001 to mesh tightly, thereby accurately recording and providing feedback on the displacement of the connecting mechanism 6. This achieves repeatable positioning in the vertical direction, allowing the control system to accurately and in real time detect abnormal movements of the connecting mechanism 6 based on the feedback information. Timely repair of these abnormalities ensures the efficiency of the transported items entering and leaving the warehouse.

[0059] like Figure 2 and 3As shown, the lifting device also includes a drive mechanism 11 and a cable chain assembly 12; the drive mechanism 11 is connected to the drive wheel 3 and is used to drive the drive wheel 3; the cable chain assembly 12 is provided with a cable for powering the lifting device. The drive mechanism 11 includes a servo motor to drive the drive wheel 3. The cable chain assembly 12 can be made of dust-free, quiet nylon material to avoid friction sparks and dust pollution from traditional metal cable chains; at the same time, it optimizes the appearance and wiring layout to avoid dust accumulation on the outside of the cable trays, ensuring a clean and low-pollution interior for the equipment.

[0060] like Figure 3 As shown, the lifting device is also provided with a support frame 19, which is located at the bottom of the sealing plate 101.

[0061] like Figure 1 As shown, a brake 13 is provided on the driven wheel 4; the brake 13 is used to provide mechanical braking protection when the lifting device is out of control, to prevent the connecting mechanism connected to the robotic arm and the transported object from falling. When the transmission belt 5 becomes loose or breaks, and the brake 13 detects that the rotational speed of the driven wheel 4 exceeds the threshold, the brake 13 is activated and brakes the driven wheel 4.

[0062] like Figure 1 As shown, the driving wheel 3 and the driven wheel 4 are each surrounded by a casing, and the driving wheel 3 and the driven wheel 4 are isolated from the connecting mechanism 6 and the counterweight mechanism 7 by the first partition 14 and the second partition 16, respectively. The transmission belt 5 passes through the casing of the driving wheel 3, the first partition 14, the receiving space 1 enclosed by the sealing plate 101, the second partition 16, and the casing of the driven wheel 4. A first buffer 15 is provided on the side of the first partition 14 away from the driving wheel 3, and a second buffer 17 is provided on the side of the second partition 16 away from the driven wheel 4. When the connecting mechanism 6 and the robot arm 18 overshoot relative to the upper limit position or the lower limit position set on the column 2, the first buffer 15 or the second buffer 17 can prevent the connecting mechanism 6 from rigidly colliding with the first partition 14 or the second partition 16, thereby reducing the damage to the materials carried on the robot arm 18 in the above-mentioned abnormal scenarios.

[0063] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A lifting device applied to a semiconductor memory system, characterized in that, It includes: the periphery The enclosure consists of a space enclosed by a sealing plate, a drive wheel and a driven wheel, and a transmission belt, a connecting mechanism, a counterweight mechanism, and a column located inside the enclosure. The driven wheel and the drive wheel are distributed on the upper and lower sides of the enclosure, and both the drive wheel and the driven wheel are connected to the transmission belt to form a transmission structure. The transmission belt includes a first transmission belt and a second transmission belt. One end of the first transmission belt is connected to the connecting mechanism, and the other end is connected to the counterweight mechanism via the driven pulley. One end of the second transmission belt is connected to the counterweight mechanism, and the other end is connected to the connecting mechanism via the driving pulley. The counterweight mechanism and the connecting mechanism are respectively located on both sides of the column, and the column is provided with several suction channels. The outer wall of the sealing plate is provided with a filtration mechanism; the filtration mechanism is used to form a negative pressure chamber in the closed cavity of the column, and remove impurities inside the lifting device through the suction channel.

2. The lifting device as described in claim 1, characterized in that, The column includes a first hollow section and a second hollow section with guiding function. The first hollow section is provided with the lifting guide wheel of the connecting mechanism, and the second hollow section is provided with the counterweight mechanism.

3. The lifting device as described in claim 2, characterized in that, The connecting mechanism includes a first lifting guide wheel and a second lifting guide wheel. The first lifting guide wheel and the second lifting guide wheel are used to restrict the degrees of freedom of the connecting mechanism in the x-axis direction and the y-axis direction, respectively, so that the connecting mechanism can move in the z-axis direction; wherein, the x-axis direction, the y-axis direction, and the z-axis direction refer to the length direction, the width direction, and the height direction of the connecting mechanism, respectively. The connecting mechanism is connected to a robotic arm disposed on the outer wall of the sealing plate, the robotic arm being used to grasp the semiconductor carrier.

4. The lifting device as described in claim 3, characterized in that, The cross-section of the column is a one-piece structure, and the column is provided with two first hollow parts and one second hollow part; The cross-sections of the two first hollow sections are both U-shaped and symmetrically arranged on the first and second sides of the column; a plurality of second lifting guide wheels are respectively abutted in the two first hollow sections; The second hollow portion is located on the third side of the column; through the second hollow portion, the third side and the bent portions at both ends form a receiving cavity; the counterweight mechanism is disposed in the receiving cavity, and the counterweight guide wheel of the counterweight mechanism abuts against the wall of the receiving cavity; The fourth side of the column is provided with a limiting part, which is used to limit the position of the connecting mechanism in the y-axis direction; wherein, the y-axis direction refers to the width direction of the connecting mechanism.

5. The lifting device as described in claim 4, characterized in that, The counterweight mechanism includes a first counterweight guide wheel, a second counterweight guide wheel, a belt pressure plate, and a counterweight block disposed between the belt pressure plates; the first counterweight guide wheel is connected to the belt pressure plate through a first counterweight guide wheel fixing plate, and the second counterweight guide wheel is connected to the belt pressure plate through a second counterweight guide wheel fixing plate. The first and second counterweight guide wheels are disposed in the receiving cavity to restrict the degree of freedom of the counterweight mechanism in the y-axis and x-axis directions, so that the counterweight mechanism can move in the z-axis direction; wherein, the x-axis direction, y-axis direction, and z-axis direction refer to the width direction, length direction, and height direction of the counterweight mechanism 7, respectively.

6. The lifting device as described in claim 4, characterized in that, Each of the suction channels is arranged along the height direction of the column; The first side of the column has a first suction port, the second side of the column has a second suction port, the fourth side of the column has a third suction port and a fourth suction port, the third suction port and the fourth suction port are respectively located on both sides of the limiting part, the third side of the column has a fifth suction port and a sixth suction port, the fifth suction port and the sixth suction port are respectively symmetrically arranged with the third suction port and the fourth suction port; The first suction port, the second suction port, the third suction port, the fourth suction port, the fifth suction port and the sixth suction port are interconnected to form the suction channel; Alternatively, the first suction port, the third suction port, and the fifth suction port are interconnected to form a first suction channel, and the second suction port, the fourth suction port, and the sixth suction port are interconnected to form a second suction channel.

7. The lifting device as described in claim 1, characterized in that, The lifting device also includes a positioning component, which is mounted on the connecting mechanism and matches a positioning structure fixed inside the accommodating space to record and provide feedback on the displacement when the connecting mechanism moves.

8. The lifting device as described in claim 7, characterized in that, The positioning assembly includes a positioning gear, which is connected to a guide seat and an encoder via a coupling. The guide seat is mounted on a positioning fixed seat via a guide shaft with a spring. The positioning fixed seat is mounted on the connecting mechanism. The positioning structure includes a positioning toothed belt, and the positioning gear matches the positioning toothed belt so that the positioning component records and provides feedback on the displacement when it moves with the connecting mechanism.

9. The lifting device as described in claim 1, characterized in that, The lifting device also includes a drive mechanism and a cable chain assembly; The drive mechanism is connected to the drive wheel and is used to drive the drive wheel; The cable chain assembly includes a cable for supplying power to the lifting device; The driven wheel is equipped with a brake to provide mechanical braking protection when the lifting device is out of control; when the transmission belt is loose or broken, and the brake detects that the rotational speed of the driven wheel exceeds a threshold, the brake is activated and brakes the driven wheel.

10. The lifting device as claimed in claim 1, characterized in that, The driving wheel and the driven wheel are isolated from the connecting mechanism and the counterweight mechanism by the first partition and the second partition, respectively; a first buffer is provided on the side of the first partition away from the driving wheel, and a second buffer is provided on the side of the second partition away from the driven wheel.

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