Material frame rotating stand bearing system and coating equipment

Abstract

The invention relates to the technical field of vacuum treatment, and discloses a material frame rotating stand bearing system and coating equipment. A carrying module and a cavity are correspondingly arranged, a linear driving assembly is used for carrying a material frame module to an adjacent cavity, a lifting driving assembly controls the linear driving assembly to descend by a preset distance, and a rotating stand and a conveying tray are vertically separated; the rotating stand is in contact with the bottom rotating platform base to stop descending; the lifting driving assembly continues to control the linear driving assembly to descend until the conveying tray and the rotating stand are completely disconnected, the linear driving assembly can stably bear the conveying tray, the bottom rotating platform base independently and stably bears the rotating stand, and the bottom rotating platform base rotates to drive the rotating stand to synchronously rotate; according to the material frame rotating stand bearing system, a substrate installed on the rotating stand can rotate to carry out the required coating process, the stress of the rotating driving module located at the bottom is small, the rotating stand can be independently positioned and rotate, relative abrasion between the rotating stand and the carrying module in the rotating process is avoided, the stability of the material frame rotating stand bearing system is improved, and the material frame rotating stand bearing system can bear larger gravity loads.

Description

Technical Field

[0001] This invention relates to the field of vacuum processing technology, and in particular to a material frame rotating support system and coating equipment. Background Technology

[0002] In the field of precision optics, such as vacuum coating and other vacuum processing technologies, multi-chamber continuous automated production lines are often used to improve production efficiency. These production lines require the precise transport of a rotating frame used to mount the substrate between each process chamber, and the frame must be able to rotate within each chamber to ensure coating uniformity. To achieve the transport and rotation functions of the rotating frame, a mechanism is often required to drive its transport and rotation. However, in existing technologies, the heavy-duty rotating frame suffers from poor stability during long-term operation. The rotation drive mechanism, due to excessive load, experiences unstable driving performance and significant wear, severely shortening the service life of the coating equipment. Summary of the Invention

[0003] The purpose of this invention is to provide a material frame rotating support system and coating equipment that can adapt well to heavy-duty working conditions, has a simple and stable structure, is not easy to wear, and ensures service life.

[0004] To achieve this objective, the present invention adopts the following technical solution:

[0005] A feed frame rotating support system for mounting substrates in multiple chambers, the feed frame rotating support system comprising:

[0006] The material frame module includes a rotating frame and a transport pallet, wherein the rotating frame and the transport pallet are movably connected in the vertical direction;

[0007] A conveying module is provided, which is configured one-to-one with each of the chambers. The conveying module includes a linear drive assembly and a lifting drive assembly. The linear drive assembly can carry the transport pallet and is used to convey the material frame module to the adjacent chamber. The lifting drive assembly can control the lifting height of the linear drive assembly.

[0008] A rotary drive module includes a bottom rotary platform base, which can selectively rotate and support the rotating frame. When the lifting drive assembly controls the linear drive assembly to lower its lifting height by a preset distance, the bottom of the rotating frame contacts the bottom rotary platform base. When the lifting drive assembly controls the linear drive assembly to continue lowering its lifting height until the transport pallet disengages from the rotating frame, the bottom rotary platform base supports the rotating frame.

[0009] As an optional technical solution for the material frame rotating support system, the transport pallet is provided with an opening that allows at least a portion of the bottom rotating platform seat to pass through; the rotating frame and the transport pallet are concentrically arranged in a horizontal plane, and the rotating frame abuts against the upper surface of the transport pallet.

[0010] As an optional technical solution for the material frame rotating frame carrying system, one of the two ends of the rotating frame and the bottom rotating platform seat facing each other is provided with a docking groove, and the other is provided with a docking protrusion. When the transport pallet is disengaged from the rotating frame, the docking groove and the docking protrusion are coaxially inserted.

[0011] As an optional technical solution for the material frame rotating frame support system, the top of the rotating frame is provided with a docking guide sleeve. The material frame rotating frame support system also includes a top pressing auxiliary module. The top pressing auxiliary module includes a top pressing guide shaft and a pressing drive component. The pressing drive component is located at the top of the chamber. The pressing drive component selectively controls the top pressing guide shaft to be coaxially placed on the docking guide sleeve and press the rotating frame.

[0012] As an optional technical solution for the material frame rotating frame support system, the linear drive component includes multiple rolling wheels and a guide drive component. The moving direction of the material frame module is tangent to the rotation direction of the rolling wheels. The multiple rolling wheels are spaced apart along the moving direction of the material frame module. The guide drive component can control the rotation of the rolling wheels.

[0013] As an optional technical solution for the material frame rotating frame carrying system, the linear drive assembly is provided on both sides perpendicular to the moving direction of the material frame module. The linear drive assembly also includes a track component, which extends along the moving direction of the material frame module. A portion of the multiple rolling wheels is rotatably embedded in the track component. Two track components are symmetrically arranged, and the sides of the two track components that are far apart from each other are arranged parallel to each other on the lower side of the transport pallet.

[0014] As an optional technical solution for the material frame rotating frame support system, the lifting drive assembly includes multiple lifting cylinders. The output end of the lifting cylinder is connected to the bottom of the track component. The output end of the lifting cylinder can extend and retract to control the lifting of the track component. The multiple lifting cylinders are spaced apart along the extension direction of the track component.

[0015] As an optional technical solution for the material frame rotating frame support system, at least a portion of the material frame module in the cavity has two moving directions, each moving direction corresponds to at least one linear drive component, and the linear drive component and the lifting drive component are arranged in a one-to-one correspondence.

[0016] As an optional technical solution for the material frame rotating frame support system, one linear drive component is respectively provided on each of the two sides perpendicular to the moving direction of the material frame module; in the material frame module with two moving directions, the length of the linear drive component in one of the moving directions is less than the distance between the linear drive components on both sides of the other moving direction.

[0017] As an optional technical solution for the material frame rotating frame carrying system, the distance between the two linear drive components located in adjacent chambers is less than half the length of the transport pallet along the corresponding moving direction.

[0018] A coating apparatus includes a material frame rotating support system as described in any of the above claims, and further includes one or more chambers connected in sequence; the conveying module is fixed in the chamber to allow the material frame module to move in and out of the chamber; the multiple chambers include an infeed chamber, a first coating chamber, a second coating chamber, and an outfeed chamber; the infeed chamber and the first coating chamber are located on a first straight line, the outfeed chamber and the second coating chamber are located on a second straight line, and the first coating chamber and the second coating chamber are located on a third straight line; the first straight line and the third straight line are arranged at an angle, and the second straight line and the third straight line are arranged at an angle.

[0019] The beneficial effects of this invention are:

[0020] The material frame rotating support system provided by this invention is used to place substrates in multiple chambers, including a material frame module, a conveying module, and a rotation drive module. The material frame module includes a rotating frame and a transport pallet. The rotating frame and the transport pallet are non-fixed structures and can be movably connected in the vertical direction. The conveying module is arranged one-to-one with each chamber. The conveying module includes a linear drive assembly and a lifting drive assembly. The linear drive assembly can carry the transport pallet and is used to convey the material frame module to adjacent chambers. The lifting drive assembly can control the lifting height of the linear drive assembly. The linear drive assembly and the lifting drive assembly can respectively power-control the forward and downward movement of the material frame module. The rotation drive module includes a bottom rotating platform seat. The bottom rotating platform seat can selectively rotate and carry the rotating frame, ensuring that the substrates mounted on the rotating frame can rotate for the coating process.

[0021] The linear drive assembly controls the material frame module to be positioned at the center of the coating chamber. When the lifting drive assembly begins to descend, and the lifting height of the linear drive assembly decreases by a preset distance, the rotating frame in the material frame module separates from the transport pallet. The rotating frame lands on the rotary drive module, and the bottom of the rotating frame contacts the bottom rotating platform seat, stopping its descent. When the lifting drive assembly controls the linear drive assembly to continue descending until the transport pallet and the rotating frame are completely disengaged, the linear drive assembly stably supports the transport pallet, while the bottom rotating platform seat stably supports the rotating frame alone. The rotary drive module drives the bottom rotating platform seat through a rotary drive component. The rotation of the bottom rotating platform seat causes the rotating frame to rotate synchronously. The rotary drive module at the bottom experiences less force, allowing the rotating frame to be positioned and rotated independently, avoiding relative wear with the conveying module during rotation and improving the stability of the material frame rotating frame support system. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the rotating frame of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0023] Figure 2 This is a structural schematic diagram of the material frame module of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the rotation drive module of the material frame rotating support system provided in a specific embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the top pressing auxiliary module of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0026] Figure 5 This is a cross-sectional view of the top clamping auxiliary module of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0027] Figure 6 This is a schematic diagram showing the cooperation between the material frame module, the rotation drive module, and the top clamping auxiliary module of the material frame rotating frame bearing system provided in a specific embodiment of the present invention after the material frame module is in place.

[0028] Figure 7 This is a schematic diagram of a structure of multiple continuous chambers of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0029] Figure 8 This is another structural schematic diagram of multiple continuous chambers of the material frame rotating frame bearing system provided in a specific embodiment of the present invention;

[0030] Figure 9 This is a schematic diagram of the material frame module conveying in multiple continuous chambers of the material frame rotating frame carrying system provided in a specific embodiment of the present invention;

[0031] Figure 10 This is a schematic diagram of the conveying module in the cavity of the material frame rotating frame bearing system provided in a single direction of movement, according to a specific embodiment of the present invention.

[0032] Figure 11 This is a schematic diagram of the conveying module in the chambers of the material frame rotating frame bearing system in two moving directions provided in a specific embodiment of the present invention;

[0033] Figure 12 This is an assembly diagram of the conveying module of the material frame rotating support system provided in a specific embodiment of the present invention.

[0034] In the picture:

[0035] X, first direction; Y, second direction;

[0036] 100. Material frame module; 110. Turning frame; 111. Docking guide sleeve; 120. Transport pallet;

[0037] 200. Conveying module; 210. Linear drive assembly; 211. Rolling wheel; 212. Guide drive component; 213. Track component; 221. Lifting cylinder;

[0038] 300. Rotary drive module; 310. Bottom rotating platform base; 311. Docking protrusion; 320. Rotary drive component;

[0039] 400. Top clamping auxiliary module; 410. Top clamping guide shaft; 411. Clamping shaft; 412. Rotating shaft; 413. Bearing; 420. Clamping drive component;

[0040] 901. Film inlet chamber; 902. Film outlet chamber; 903. First coating chamber; 904. Second coating chamber; 905. Intermediate buffer chamber; 906. Blocking gate valve. Detailed Implementation

[0041] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0042] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0044] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0045] like Figures 1 to 12As shown, this invention discloses a material frame rotating support system for placing substrates in multiple chambers. The material frame rotating support system includes a material frame module 100, a conveying module 200, and a rotation drive module 300. The material frame module 100 includes a rotating frame 110 and a transport pallet 120. The transport pallet 120 has a large area profile, enabling it to more stably support the material frame module 100 under heavy loads. The rotating frame 110 and the transport pallet 120 are non-fixed structures and can be movably connected in the vertical direction. Specifically, the rotating frame 110 can be placed in a matching groove on the upper surface of the transport pallet 120 to achieve the aforementioned non-fixed structure. The conveying module 200 is configured one-to-one with each chamber. The conveying module 200 includes a linear drive assembly 210 and a lifting drive assembly. The linear drive assembly 210 can carry the transport pallet 120 and is used to convey the material frame module 100 to adjacent chambers. The lifting drive assembly can control the lifting height of the linear drive assembly 210. The linear drive assembly 210 and the lifting drive assembly respectively provide power control for the forward movement and lifting / lowering of the material frame module 100. The rotary drive module 300 includes a bottom rotary platform base 310. The bottom rotary platform base 310 can selectively rotate and support the rotating frame 110, ensuring that the substrate mounted on the rotating frame 110 can rotate for the coating process.

[0046] The linear drive assembly 210 controls the material frame module 100 to be positioned in the coating position within the chamber. When the lifting drive assembly begins to descend, and the lifting height of the linear drive assembly 210 decreases by a preset distance, the rotating frame 110 in the material frame module 100 separates vertically from the transport pallet 120. At this time, the rotating frame 110 falls onto the rotary drive module 300, and the bottom of the rotating frame 110 contacts the bottom rotating platform seat 310, stopping the descent of the rotating frame 110. Meanwhile, the transport pallet 120 continues to descend following the lifting drive assembly and the linear drive assembly 210. When the lifting drive assembly controls the lifting height of the linear drive assembly 210 to continue decreasing until a safe height difference is achieved between the transport pallet 120 and the rotating frame 110, causing them to completely disengage, the linear drive assembly 210 stabilizes. The fixed-load transport pallet 120, while the bottom rotating platform seat 310 independently and stably supports the rotating frame 110. The rotation drive module 300 drives the bottom rotating platform seat 310 through the rotation drive component 320. The rotation of the bottom rotating platform seat 310 drives the rotating frame 110 to rotate synchronously. The substrate will complete the various processes required for coating as the rotating frame 110 rotates. The rotation drive module 300 located at the bottom is subjected to less force, and apart from the rotation drive module 300, there is no need to set other load-bearing components at the bottom of the rotating frame 110. The rotating frame 110 can be positioned and rotated independently, avoiding relative wear with the conveying module 200 during rotation, improving the stability of the material frame rotating frame support system and extending its service life.

[0047] Specifically, the top of the rotating frame 110 is provided with a docking guide sleeve 111. The material frame rotating frame support system also includes a top clamping and straightening module 400. The top clamping and straightening module 400 includes a top clamping guide shaft 410 and a clamping drive component 420. The clamping drive component 420 is located at the top of the chamber. The clamping drive component 420 selectively controls the top clamping guide shaft 410 to be coaxially positioned in the docking guide sleeve 111 and clamp the rotating frame 110. The top clamping and straightening module 400 inserts the top clamping guide shaft 410 downward into the docking guide sleeve 111 located at the top of the rotating frame 110 through the clamping drive component 420, ensuring the vertical alignment of the rotating frame 110 and limiting the upward force generated by the rotating frame 110 during rotation.

[0048] like Figure 5 As shown, the top clamping guide shaft 410 includes a clamping shaft 411 and a rotating shaft 412. The rotating shaft 412 is sleeved on the outer periphery of the clamping shaft 411. A bearing 413 is provided between the clamping shaft 411 and the rotating shaft 412. The clamping shaft 411 and the rotating shaft 412 can rotate relatively flexibly. The clamping drive component 420 can drive the clamping shaft 411 to shorten or extend to drive the rotating shaft 412 to rise and fall. When the material frame module 100 moves to the point where the docking guide sleeve 111 on the top of the rotating frame 110 is directly opposite the top clamping guide shaft 410, the clamping shaft 411 is pressed down until the rotating shaft 412 is coaxially placed inside the docking guide sleeve 111. While vertically aligning the rotating frame 110, the rotation of the rotating frame 110 is not affected, thus avoiding the top clamping guide shaft 410 being driven to twist or experiencing resistance friction, which could damage the top clamping alignment module 400. It is important to note that after the rotating shaft 412 is connected to the rotating frame 110, direct contact should be avoided or a certain space gap should be maintained between the clamping shaft 411 and the connecting guide sleeve 111. This is sufficient to ensure that the portion of the top clamping guide shaft 410 that connects to the rotating frame 110 and the clamping drive component 420 can rotate freely relative to each other, thus preventing relative interference or wear. For example, the lower surface of the clamping shaft 411 can be set higher than the lower surface of the rotating shaft 412, which also ensures that the structure of the rotating frame 110 will not interfere with each other during rotation.

[0049] The rotating frame 110 and the transport pallet 120 are concentrically arranged in the horizontal plane. The rotating frame 110 abuts against the upper surface of the transport pallet 120 to fix them relative to each other. The transport pallet 120 is provided with an opening that allows at least a portion of the bottom rotating platform seat 310 to pass through, and the rotating frame 110 can contact the bottom rotating platform seat 310.

[0050] For example, the transport pallet 120 has a contact inner ring as an opening, the diameter of which is larger than the outer contour of the bottom rotating platform seat 310; the rotating frame 110 is concentrically arranged with the transport pallet 120 and connected by a rotating shaft, and a portion of the rotating frame 110 is exposed outside the contact inner ring, the rotating frame 110 abutting against the upper surface of the transport pallet 120. In this embodiment, one of the two opposing ends of the rotating frame 110 and the bottom rotating platform seat 310 is provided with a mating groove, and the other is provided with a mating protrusion 311. When the transport pallet 120 is disengaged from the rotating frame 110, the mating groove and the mating protrusion 311 are coaxially inserted.

[0051] Furthermore, the lower surface of the rotating frame 110 is provided with a toothed portion, and the upper surface of the bottom rotating platform base 310 is provided with a docking slot. When the rotating frame 110 descends to contact the bottom rotating platform base 310, the toothed portion can gradually fall and be automatically guided into the docking slot, so that the rotating frame 110 and the bottom rotating platform base 310 can complete unidirectional rotation docking in the bearing position. The rotating frame 110 and the bottom rotating platform base 310 have a docking structure that rotates synchronously and stably.

[0052] like Figures 7 to 11 As shown, the present invention also discloses a coating apparatus, including the aforementioned material frame rotating frame 110 support system, and further including one or more chambers connected in sequence; a conveying module 200 is fixed in the chamber to allow the material frame module 100 to move in and out of the chamber. The multiple chambers include an infeed chamber 901, a first coating chamber 903, a second coating chamber 904, and an outfeed chamber 902; the infeed chamber 901 and the first coating chamber 903 are located on a first straight line, the outfeed chamber 902 and the second coating chamber 904 are located on a second straight line, and the first coating chamber 903 and the second coating chamber 904 are located on a third straight line. In one embodiment, the first straight line and the third straight line are arranged at an angle, the second straight line and the third straight line are arranged at an angle, the infeed chamber 901 and the outfeed chamber 902 are located on the same side of the third straight line, and the multiple chambers form a C-shaped layout, effectively saving space occupied by the coating apparatus. For example, the angle is a right angle.

[0053] In another embodiment, an intermediate buffer chamber 905 is provided between the first coating chamber 903 and the second coating chamber 904, so that there is a layout of at least 5 chambers, and at least two material frame modules 100 can move simultaneously within the coating equipment.

[0054] Multiple consecutive chambers are arranged counterclockwise as follows: wafer inlet chamber 901, first coating chamber 903, intermediate buffer chamber 905, second coating chamber 904, and wafer outlet chamber 902. At least some of the material frame modules 100 in the chambers have two directions of movement, with the angle between the first direction X and the second direction Y being 90°. The material frame modules 100 in the wafer inlet chamber 901 and the wafer outlet chamber 902 use the first direction X and the opposite direction of the first direction X as their single direction of movement, respectively. The material frame module 100 in the intermediate buffer chamber 905 uses the second direction Y as its single direction of movement. The material frame modules 100 in the first coating chamber 903 and the second coating chamber 904 both have two directions of conveying action. Each direction of movement corresponds to at least one linear drive component 210. The linear drive components 210 and the lifting drive components are set in a one-to-one correspondence. The material frame module 100 can be reversed by the staggered lifting of the linear drive components 210 set in different angle directions. This can satisfy the requirement that the rotation drive of the rotating frame 110 is not affected under heavy load, and at the same time realize the movement and reversal of the material frame module 100. The rotation and reversal of the material frame module 100 can be carried out at the same time, which improves work efficiency.

[0055] Specifically, one linear drive assembly 210 is provided on each of the two sides perpendicular to the moving direction of the material frame module 100. In the material frame module 100 with two moving directions, the length of the linear drive assembly 210 in one moving direction is less than the distance between the linear drive assemblies 210 on both sides of the other moving direction, so as to avoid interference between the linear drive assemblies 210 in the two directions and save the arrangement space of the linear drive assemblies 210. Generally, the distance between two linear drive assemblies 210 located in adjacent chambers is less than half the length of the transport pallet 120 along the corresponding moving direction. When the material frame module 100 leaves one chamber and enters the next adjacent chamber, the material frame module 100 always maintains at least half of its part bearing the linear drive assemblies 210 located in one or two chambers to ensure that the material frame module 100 can be stably transported and transferred.

[0056] Optionally, a blocking gate valve 906 is provided between two adjacent chambers, which can be selectively opened or closed to ensure that the two adjacent chambers can perform coating operations without interfering with each other under different working conditions. During the coating process, the blocking gate valves 906 on both sides of the first coating chamber 903 and the second coating chamber 904 are closed, achieving an isolation effect. When the material frame module 100 is transported from the first coating chamber 903 to the intermediate buffer chamber 905 through the linear drive assembly 210 of the conveying module 200, the blocking gate valve 906 on this side can be opened to allow passage; the same applies to the second coating chamber 904.

[0057] Specifically, such as Figure 12As shown, the linear drive assembly 210 includes multiple rollers 211 and guide drive members 212. The moving direction of the material frame module 100 is tangential to the rotation direction of the rollers 211. The multiple rollers 211 are spaced apart along the moving direction of the material frame module 100. The guide drive members 212 can control the rotation of the rollers 211. The transport pallet 120 is supported on the rollers 211 and can be moved forward by following the rollers 211. One linear drive assembly 210 is provided on each of the two sides perpendicular to the moving direction of the material frame module 100. The linear drive assemblies 210 on both sides jointly support and drive the material frame module 100, balancing the force on the transport module 200.

[0058] Understandably, in order to control the material frame module 100 to move more accurately along the moving direction, the linear drive assembly 210 also includes a track component 213. The track component 213 extends along the moving direction of the material frame module 100. A portion of the multiple rollers 211 are partially embedded in the track component 213. The two track components 213 are symmetrically arranged. The side of the two track components 213 that is far away from each other is arranged parallel to the lower side of the transport pallet 120. The transport pallet 120 is placed on the track component 213 and is provided with a groove guide docking between it and the rollers 211. This can limit the movement of the material frame module 100 and prevent the material frame module 100 from gradually deviating from the moving direction due to uneven load distribution.

[0059] In this embodiment, the lifting drive assembly includes multiple lifting cylinders 221. The output end of the lifting cylinder 221 is connected to the bottom of the track component 213. The output end of the lifting cylinder 221 can extend and retract to control the lifting and lowering of the track component 213. The multiple lifting cylinders 221 are spaced apart along the extension direction of the track component 213. Two sets of lifting cylinders 221 are fixedly connected to the linear drive assembly 210 in the first direction X and the linear drive assembly 210 in the second direction Y, respectively. When the material frame module 100 needs to move in the first direction X, the linear drive assembly 210 in the first direction X is raised by the lifting cylinder 221, and the linear drive assembly 210 in the second direction Y is lowered by the lifting cylinder 221. The linear drive assembly 210 in the first direction X is higher than the linear drive assembly 210 in the second direction Y, so that the linear drive assembly 210 in the first direction X contacts the transport pallet 120 to control its movement in the first direction X. At the same time, the transport pallet 120 is re-connected to the rotating frame 110. Similarly, when the material frame module 100 needs to move in the second direction Y, the linear drive component 210 in the second direction Y is raised by the lifting cylinder 221, and the linear drive component 210 in the first direction X is lowered by the lifting cylinder 221. The linear drive component 210 in the second direction Y is higher than the linear drive component 210 in the first direction X, so that the linear drive component 210 in the second direction Y contacts the transport pallet 120 and controls it to move in the second direction Y, thereby realizing the conversion of the material frame module 100 moving in the first direction X and the second direction Y.

[0060] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A material frame rotating support system, characterized in that, The feed frame carrier system is used to place substrates in multiple chambers and includes: The material frame module (100) includes a rotating frame (110) and a transport pallet (120), wherein the rotating frame (110) and the transport pallet (120) are movably connected in the vertical direction; A conveying module (200) is provided, which is configured one-to-one with each of the chambers. The conveying module (200) includes a linear drive assembly (210) and a lifting drive assembly. The linear drive assembly (210) can carry the transport pallet (120) and is used to convey the material frame module (100) to the adjacent chamber. The lifting drive assembly can control the lifting height of the linear drive assembly (210). A rotary drive module (300) includes a bottom rotary platform base (310), which can selectively rotate and carry the rotating frame (110). When the lifting drive assembly controls the linear drive assembly (210) to lower its lifting height by a preset distance, the bottom of the rotating frame (110) contacts the bottom rotary platform base (310). When the lifting drive assembly controls the linear drive assembly (210) to continue lowering its lifting height until the transport pallet (120) disengages from the rotating frame (110), the bottom rotary platform base (310) carries the rotating frame (110).

2. The material frame rotating support system according to claim 1, characterized in that, The transport pallet (120) is provided with an opening that allows at least a portion of the bottom rotating platform seat (310) to pass through; the rotating frame (110) is concentrically arranged with the transport pallet (120) in a horizontal plane and abuts against the upper surface of the transport pallet (120).

3. The material frame rotating support system according to claim 2, characterized in that, One of the two ends of the rotating frame (110) facing the bottom rotating platform base (310) is provided with a docking groove, and the other is provided with a docking protrusion (311). When the transport pallet (120) is disengaged from the rotating frame (110), the docking groove and the docking protrusion (311) are coaxially inserted.

4. The material frame rotating support system according to claim 1, characterized in that, The top of the rotating frame is provided with a docking guide sleeve (111). The material frame rotating frame bearing system also includes a top pressing auxiliary module (400). The top pressing auxiliary module (400) includes a top pressing guide shaft (410) and a pressing drive (420). The pressing drive (420) is located at the top of the chamber. The pressing drive (420) selectively controls the top pressing guide shaft (410) to be coaxially placed on the docking guide sleeve (111) and press the rotating frame (110).

5. The material frame rotating support system according to claim 1, characterized in that, The linear drive assembly (210) includes multiple rollers (211) and a guide drive (212). The moving direction of the material frame module (100) is tangent to the rotation direction of the rollers (211). The multiple rollers (211) are spaced apart along the moving direction of the material frame module (100). The guide drive (212) can control the rotation of the rollers (211).

6. The material frame rotating support system according to claim 5, characterized in that, The linear drive assembly (210) is provided on both sides perpendicular to the moving direction of the material frame module (100). The linear drive assembly (210) also includes a track component (213). The track component (213) extends along the moving direction of the material frame module (100). A portion of the multiple rolling wheels (211) is rotatably embedded in the track component (213). The two track components (213) are symmetrically arranged. The side of the two track components (213) that is far away from each other is arranged parallel to the lower side of the transport pallet (120).

7. The material frame rotating support system according to claim 6, characterized in that, The lifting drive assembly includes multiple lifting cylinders (221). The output end of the lifting cylinder (221) is connected to the bottom of the track component (213). The output end of the lifting cylinder (221) can extend and retract to control the lifting of the track component (213). The multiple lifting cylinders (221) are spaced apart along the extension direction of the track component (213).

8. The material frame rotating support system according to claim 1, characterized in that, At least a portion of the material frame module (100) within the chamber has two movement directions, each movement direction corresponding to at least one linear drive assembly (210), and the linear drive assembly (210) and the lifting drive assembly are arranged in a one-to-one correspondence.

9. The material frame rotating support system according to claim 8, characterized in that, The linear drive assembly (210) is provided on both sides of the moving direction perpendicular to the material frame module (100); in the material frame module (100) with two moving directions, the length of the linear drive assembly (210) in one of the moving directions is less than the distance between the linear drive assemblies (210) on both sides of the other moving direction.

10. The material frame rotating support system according to claim 8, characterized in that, The distance between the two linear drive assemblies (210) located in adjacent chambers is less than half the length of the transport pallet (120) along the corresponding direction of movement.

11. A coating equipment, characterized in that, The system includes a material frame rotating frame (110) carrying system as described in any one of claims 1-10, and further includes one or more chambers connected in sequence; the conveying module (200) is fixed in the chamber so that the material frame module (100) can move in and out of the chamber; The plurality of chambers include a wafer entry chamber (901), a first coating chamber (903), a second coating chamber (904), and a wafer exit chamber (902); the wafer entry chamber (901) and the first coating chamber (903) are located on a first straight line, the wafer exit chamber (902) and the second coating chamber (904) are located on a second straight line, and the first coating chamber (903) and the second coating chamber (904) are located on a third straight line; the first straight line and the third straight line are arranged at an angle, and the second straight line and the third straight line are arranged at an angle.

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