Butt-joint device and butt-joint system for automatic material hanging and taking of single crystal furnace

Abstract

The invention discloses a butt-joint device and a butt-joint system for automatic material hanging and taking of a single crystal furnace, the butt-joint device comprises a locking sleeve, a guide sleeve, an elastic device, a driving device and a limiting ball, the limiting ball is positioned in a through hole of the locking sleeve and freely moves and rotates; at the beginning, the driving device drives the guide sleeve to be close to the locking sleeve, the elastic device is compressed and deformed until the limiting ball is partially located in the guide sleeve groove, during butt joint locking, the charging barrel connector is inserted into the locking sleeve, the groove of the charging barrel connector corresponds to the through hole of the locking sleeve, the driving device is retracted, the elastic device recovers the shape, and the limiting ball is partially located in the charging barrel connector groove. During butt joint unlocking, the driving device drives the guide sleeve to approach the locking sleeve, the elastic device is compressed and deformed, the guide sleeve groove corresponds to the through hole of the locking sleeve, and the charging barrel connector is pulled out. The butt joint device is driven by the driving device to automatically clamp and release the feeding cylinder so as to complete connection and release of the feeding cylinder, the production efficiency is high, and the safety risk is small.

Description

Technical Field

[0001] This invention relates to a material changing device for semiconductor crystal growth furnaces, specifically to a docking device and docking system for automatic material loading and unloading in single crystal furnaces. Background Technology

[0002] During the single-crystal furnace crystal growth process, if the silicon material in the quartz crucible is insufficient, secondary feeding is required. During this feeding process, a silicon material cylinder is manually placed below the auxiliary chamber, a tungsten wire rope descends to the cylinder, and a manual chuck is used to replace the cylinder. After the cylinder is properly connected, the secondary feeding procedure is initiated. Once feeding is complete, the cylinder is manually removed, completing the feeding task. Existing technologies require manual operation, resulting in high labor costs and the need for personnel management. Manual operation also leads to low production efficiency. Furthermore, it poses safety risks to operators in the event of an accident. Summary of the Invention

[0003] Purpose of the invention: To address the above-mentioned shortcomings, the present invention provides a highly efficient and safe docking device and docking system for automatic material loading and unloading in single crystal furnaces.

[0004] Technical Solution: To solve the above problems, the present invention employs a docking device for automatic material loading and unloading in a single crystal furnace, comprising a locking sleeve with a through hole, a guide sleeve sleeved outside the locking sleeve, an elastic device disposed between the locking sleeve and the guide sleeve, a driving device, and a limiting ball. A first top plate is provided at one end of the locking sleeve, and a second top plate is provided at one end of the guide sleeve. The elastic device is disposed between the first and second top plates. The limiting ball is positioned within the through hole of the locking sleeve and can move and rotate freely. The diameter of the limiting ball is larger than the length of the through hole. A first groove is provided on the inner side of the guide sleeve. Initially, the driving device drives the first top plate of the guide sleeve to approach the second top plate of the locking sleeve, and the elastic device... The elastic device compresses and deforms until the limiting ball is located in the first slot. During docking and locking, the barrel connector with the second slot is inserted into the locking sleeve. The second slot of the barrel connector corresponds to the through hole of the locking sleeve. The driving device retracts, and the elastic device restores its shape, driving the first top plate of the guide sleeve away from the second top plate of the locking sleeve. The limiting ball disengages from the first slot and comes into close contact with the inner wall of the guide sleeve, with the limiting ball part located in the second slot. During docking and unlocking, the driving device drives the first top plate of the guide sleeve closer to the second top plate of the locking sleeve. The elastic device compresses and deforms until the first slot corresponds to the through hole of the locking sleeve. When the barrel connector is pulled out, the limiting ball moves towards the first slot and disengages from the second slot.

[0005] Furthermore, the driving device includes an electromagnet fixing plate, an electromagnet, a driving rod, and a metal plate. The electromagnet fixing plate is provided with a through hole. One end of the driving rod passes through the through hole of the electromagnet fixing plate and contacts the second top plate of the guide sleeve. The metal plate is fixed to the other end of the driving rod. The electromagnet is fixedly installed on the electromagnet fixing plate. When the electromagnet is energized, it attracts the metal plate, and the metal plate drives the driving rod to push the second top plate closer to the first top plate.

[0006] Furthermore, the driving device also includes an upper guide sleeve, which includes a lower base plate with a through hole. One end of the driving rod extends out of the metal plate and is inserted into the through hole of the lower base plate. When the electromagnet is de-energized, the metal plate abuts against the lower base plate. The upper guide sleeve is used for limiting and guiding the driving rod.

[0007] Furthermore, the elastic device is a spring.

[0008] Furthermore, the limiting ball is made of steel ball.

[0009] The present invention also employs a docking system using the above-mentioned docking device for automatic material loading and unloading in a single crystal furnace, comprising a detection module, a wireless communication module, and a control module. The detection module is used to detect whether the barrel joint is inserted into the locking sleeve of the docking device. The wireless communication module is used for communication between the detection module and the control module. The control module is used to determine the state of the barrel joint based on the detection result of the detection module, and is also used to control the drive device to drive the guide sleeve.

[0010] Furthermore, the docking device includes a housing, and the locking sleeve, guide sleeve, and driving device are installed inside the housing. The detection module includes two symmetrical observation windows, a baffle pin, a photoelectric signal transmitter, and a photoelectric signal receiver, all disposed on the housing. The photoelectric signal transmitter and the photoelectric signal receiver are respectively disposed outside the two symmetrical observation windows. The photoelectric signal receiver receives signals transmitted by the photoelectric signal transmitter through the two symmetrical observation windows. The first top plate and the second top plate are provided with through holes. The baffle pin passes through the through holes of the first top plate and the second top plate, and the baffle pin is fixed to the elastic device. When the barrel joint is not docked, one end of the baffle pin extends out of the first top plate and is located inside the locking sleeve. The photoelectric signal receiver receives the signal transmitted by the photoelectric signal transmitter. When the barrel joint is docked, the end of the barrel joint pushes the end of the baffle pin, and the other end of the baffle pin extends out of the second top plate and is located between the photoelectric signal transmitter and the photoelectric signal receiver, blocking the transmission signal of the photoelectric signal transmitter.

[0011] Furthermore, a guide plate is fixedly installed inside the outer shell, and the guide plate is sleeved outside the guide sleeve. A shoulder is provided on the outer side of the guide sleeve. When the end of the baffle pin is pushed at the end of the barrel connector, the movement distance of the guide sleeve is limited by the guide plate and the shoulder of the guide sleeve.

[0012] Furthermore, a light-transmitting glass is provided on the outside of the observation window, which is fixedly connected to the outer shell, and a sealing ring is provided between the light-transmitting glass and the outer shell.

[0013] Furthermore, the driving device includes an electromagnet fixing plate, an electromagnet, a driving rod, and a metal plate. The electromagnet fixing plate has a through hole, and one end of the driving rod passes through the through hole of the electromagnet fixing plate and contacts the second top plate of the guide sleeve. The metal plate is fixed to the other end of the driving rod, and the electromagnet is fixedly installed on the electromagnet fixing plate. When the barrel joint is connected, the control module controls the electromagnet to be energized, attracting the metal plate. The metal plate drives the driving rod to push the second top plate closer to the first top plate. When the detection module detects that the barrel joint is inserted into the locking sleeve, the control module controls the electromagnet to be de-energized, and the barrel joint connection is completed. When the barrel joint is separated, the control module controls the electromagnet to be energized, attracting the metal plate. The metal plate drives the driving rod to push the second top plate closer to the first top plate. When the detection module detects that the barrel joint is disengaged from the locking sleeve, the control module controls the electromagnet to be de-energized, and the barrel joint separation is completed.

[0014] Beneficial effects: Compared with the prior art, the present invention has the advantage of automatically clamping and releasing the feeding cylinder by driving the docking device through the driving device to complete the connection and release of the feeding cylinder, without the need for manual intervention, resulting in high production efficiency and low safety risk. Attached Figure Description

[0015] Figure 1 This is a cross-sectional view of the docking device of the present invention in the locked state.

[0016] Figure 2 This is a cross-sectional view of the docking device of the present invention in the unlocked state.

[0017] Figure 3 This is a cross-sectional view of the docking system of the present invention.

[0018] Figure 4 This is a three-dimensional view of the docking system of the present invention. Detailed Implementation

[0019] like Figure 1As shown in this embodiment, a docking device for automatic material loading and unloading in a single crystal furnace locks the material cylinder before lifting and feeding, and releases and unlocks it after feeding. It includes a locking sleeve 5 with a through hole, a guide sleeve 3 sleeved outside the locking sleeve 5, an elastic device 2 disposed between the locking sleeve 5 and the guide sleeve 3, a driving device, and a limiting ball 4. A first top plate is provided at one end of the locking sleeve 5, and a second top plate is provided at one end of the guide sleeve 3. A first groove is provided inside the guide sleeve 3. The elastic device 2 is disposed between the first and second top plates. In this embodiment, the elastic device 2 is a spring. The limiting ball 4 is positioned within the through hole of the locking sleeve 5 and can move and rotate freely. The limiting balls 4 are made of steel balls, and there are four of them. The diameter of the limiting balls 4 is larger than the length of the through hole. The through hole of the locking sleeve 5 narrows near the barrel connector 7, and the radius of the cross-section at the end of the through hole is smaller than the radius of the steel ball, so that the steel ball can move in the through hole without falling out. When the guide sleeve 3 is pressed, the spring is compressed, and after the first groove on the guide sleeve 3 is aligned with the through hole on the locking sleeve 5, the steel ball can partially extend out of the through hole and enter the first groove. When the guide sleeve 3 is released, the compressed spring returns to its original position, and the guide sleeve 3 returns to its original position, and the steel ball enters the through hole on the locking sleeve 5. When the barrel connector 7 is inserted into the locking sleeve 5, the steel ball is locked into the second groove on the barrel connector 7, thereby locking the barrel connector 7 and preventing it from being pulled out. When the guide sleeve 3 is pressed to the end, the steel ball slides out of the second groove, unlocking the barrel connector 7, and the barrel connector 7 can be pulled out downwards.

[0020] The driving device includes an electromagnet fixing plate 10, an electromagnet 1, a driving rod, a metal plate, and an upper guide sleeve 11. The upper guide sleeve 11 includes a lower base plate with a through hole. The electromagnet fixing plate has a through hole. One end of the driving rod passes through the through hole of the electromagnet fixing plate and contacts the second top plate of the guide sleeve 3. One end of the driving rod extends out of the metal plate and is inserted into the through hole of the lower base plate. The metal plate is fixedly connected to the driving rod. The electromagnet 1 is fixedly installed on the electromagnet fixing plate 10. When the electromagnet 1 is energized, it attracts the metal plate. The metal plate drives the driving rod to push the second top plate closer to the first top plate. When the electromagnet 1 is de-energized, the metal plate abuts against the lower base plate. The upper guide sleeve 11 is used for limiting and guiding the driving rod and restricting the movement stroke of the driving rod.

[0021] Initially, electromagnet 1 is energized and attracts the metal plate. The metal plate drives the drive rod to move the first top plate of guide sleeve 3 closer to the second top plate of locking sleeve 5. The elastic device 2 is compressed and deformed until the limiting ball 4 is partially located in the first slot. Figure 1 As shown, during the locking process, the barrel connector 7 is inserted into the locking sleeve 5, the second slot of the barrel connector 7 corresponds to the through hole of the locking sleeve 5, the electromagnet 1 is de-energized, the elastic device 2 returns to its shape, driving the first top plate of the guide sleeve 3 away from the second top plate of the locking sleeve 5, and pushing the drive rod to move the metal plate closer to the lower bottom plate of the upper guide sleeve 11. The limiting ball 4 disengages from the first slot and makes tight contact with the inner wall of the guide sleeve 3, and part of the limiting ball 4 is located in the second slot; Figure 2As shown, during docking and unlocking, the electromagnet 1 is energized and attracts the metal plate. The metal plate drives the drive rod to drive the first top plate of the guide sleeve 3 to approach the second top plate of the locking sleeve 5. The elastic device 2 is compressed and deformed until the first slot corresponds to the through hole of the locking sleeve 5. When the barrel connector 7 is pulled out, the limiting ball 4 moves towards the first slot and disengages from the second slot.

[0022] Example 2

[0023] This embodiment describes a docking system for an automatic material loading and unloading device in a single crystal furnace. The system includes a detection module, a wireless communication module 13, and a control module. The detection module detects whether the barrel connector 7 is inserted into the locking sleeve 5 of the docking device. The wireless communication module 13 facilitates communication between the detection module and the control module. The control module determines the state of the barrel connector 7 based on the detection results and also controls the drive device to drive the guide sleeve 3. The wireless communication module 13 primarily receives automatic barrel loading and unloading signals wirelessly.

[0024] The docking device in the above embodiment includes a housing, a locking sleeve 5, a guide sleeve 3, and a driving device installed inside the housing. The detection module includes two symmetrical observation windows, a baffle pin 9, a photoelectric signal transmitter, and a photoelectric signal receiver, all disposed on the housing. The photoelectric signal transmitter and the photoelectric signal receiver are respectively disposed outside the two symmetrical observation windows. The photoelectric signal receiver receives signals transmitted by the photoelectric signal transmitter through the two symmetrical observation windows. The first top plate and the second top plate are provided with through holes. The baffle pin 9 passes through the through holes of the first top plate and the second top plate, and the baffle pin 9 is fixed to the elastic device 2. When the barrel connector 7 is not docked, one end of the baffle pin 9 extends out of the first top plate and is located inside the locking sleeve 5. The photoelectric signal receiver receives the signal transmitted by the photoelectric signal transmitter. When the barrel connector 7 is docked, the end of the barrel connector 7 pushes the end of the baffle pin 9, and the other end of the baffle pin 9 extends out of the second top plate and is located between the photoelectric signal transmitter and the photoelectric signal receiver, blocking the transmission signal of the photoelectric signal transmitter. In this embodiment, the photoelectric signal transmitting unit and the photoelectric signal receiving unit are the transmitting end and receiving end of the photoelectric switch 15. Through-beam photoelectric switches 15 are installed on both sides of the housing, one being the transmitting end of the photoelectric switch 15 and the other being the receiving end of the photoelectric switch 15.

[0025] A translucent glass 18 is installed on the outer side of the observation window on each side of the outer casing, and a small sealing ring 20 is used to seal and separate the inside and outside of the outer casing. The photoelectric switch 15 is fixed on the switch bracket 19 and performs detection through the translucent glass 18. The side cover plate 14, together with the sealing ring 16, is fixed to the side of the outer casing to seal both sides and form a small sealed cavity. The adapter 12 is used to connect the weight, and the tungsten wire rope is used to lift and extract the entire device.

[0026] After the barrel connector 7 is inserted into the locking sleeve 5, the end of the barrel connector 7 moves upward against the baffle pin 9. Once the baffle pin 9 blocks the light emitted from the transmitter of the photoelectric switch 15, the barrel connector 7 is considered to be properly connected, and the barrel can be removed. When the barrel connector 7 is pulled out, the spring resets the baffle pin 9, the receiver of the photoelectric switch 15 detects the light emitted from the transmitter of the photoelectric switch 15, and the barrel connector 7 is pulled out.

[0027] A guide plate 8 is fixedly installed inside the outer casing. The guide plate 8 is sleeved outside the guide sleeve 3. A shoulder is provided on the outside of the guide sleeve 3. When the end of the baffle pin 9 is pushed at the end of the barrel connector 7, the movement distance of the guide sleeve 3 is limited by the guide plate 8 and the shoulder of the guide sleeve 3.

[0028] The working process of the docking system is as follows:

[0029] Once the AGV has positioned the material cylinder, the control module receives a docking command and powers the solid-state battery 17 to supply power to the electromagnet 1. The energized electromagnet 1 attracts a metal plate, which in turn drives the drive rod downwards, pushing the guide sleeve 3. The tungsten wire rope descends above the material cylinder and connects with the material cylinder connector 7. (The force required to insert the material cylinder connector 7 into the locking sleeve 5 can be the gravity of the docking device or the pressing force of other auxiliary structures.) When the photoelectric switch 15 detects that the material cylinder connector 7 has been inserted into the locking sleeve 5, the electromagnet 1 is de-energized, the guide sleeve 3 resets, and the docking of the material cylinder connector 7 is complete. The tungsten wire rope then rises, lifting the material cylinder for feeding. After feeding is completed, the auxiliary chamber rotates out, placing the material cylinder in place. When material needs to be changed again, the AGV trolley is driven into position. Upon receiving the wireless command to separate from the material cylinder, the tungsten wire rope descends. The control module again controls the solid-state battery 17 to power the electromagnet 1 via the wireless communication module 13. The electromagnet 1 is energized and attracts the metal plate. The metal plate drives the drive rod downward to the guide sleeve 3, separating the docking device from the material cylinder connector 7. Then, the electromagnet 1 is de-energized, and the guide sleeve 3 resets. The solid-state battery 17 powers the wireless communication module 13 and the photoelectric switch 15. The solid-state battery 17 and the wireless module 13 are respectively installed on both sides of the docking device, and are sealed in a small cavity by the side cover plate 14 and the sealing ring 16, thus avoiding exposure to a vacuum environment and allowing normal operation in a normal environment. The power supply lines of the solid-state battery 17 and the wireless module 13 are connected through the small wire hole 6 at the bottom of the outer casing. Through automated intelligent control, labor costs can be greatly reduced.

[0030] The electrical control process of the docking system is as follows:

[0031] (1) After receiving the feeding signal, the auxiliary chamber rotates out, the AGV trolley positions the material cylinder, and the tungsten wire rope descends to the top of the material cylinder;

[0032] (2) Send a wireless signal to energize the electromagnet, and the tungsten wire rope descends to connect with the barrel connector;

[0033] (3) After the photoelectric switch detects that the barrel joint is connected, the tungsten wire rope rises, the lifting barrel enters the feeding program, the auxiliary chamber is screwed in, and the electromagnet is de-energized at the same time;

[0034] (4) After feeding is completed, the auxiliary chamber is rotated out, the material cylinder is lowered and placed on the AGV trolley, a wireless signal is sent to energize the electromagnet, the tungsten wire rope rises, the material cylinder is separated from the docking device, and then the electromagnet is de-energized.

Claims

1. A docking device for automatic material loading and unloading in a single crystal furnace, characterized in that, The system includes a locking sleeve with a through hole, a guide sleeve fitted outside the locking sleeve, an elastic device disposed between the locking sleeve and the guide sleeve, a driving device, and a limiting ball. One end of the locking sleeve has a first top plate, and one end of the guide sleeve has a second top plate. The elastic device is disposed between the first and second top plates. The limiting ball is positioned within the through hole of the locking sleeve and can move and rotate freely. The diameter of the limiting ball is larger than the length of the through hole. A first groove is provided on the inner side of the guide sleeve. Initially, the driving device drives the first top plate of the guide sleeve closer to the second top plate of the locking sleeve, and the elastic device compresses and deforms until the limiting ball is partially located within the first... During docking and locking, the barrel connector with the second slot is inserted into the locking sleeve. The second slot of the barrel connector corresponds to the through hole of the locking sleeve. The driving device retracts, and the elastic device returns to its shape, driving the first top plate of the guide sleeve away from the second top plate of the locking sleeve. The limiting ball disengages from the first slot and comes into close contact with the inner wall of the guide sleeve, with part of the limiting ball located in the second slot. During docking and unlocking, the driving device drives the first top plate of the guide sleeve closer to the second top plate of the locking sleeve. The elastic device is compressed and deformed until the first slot corresponds to the through hole of the locking sleeve. When the barrel connector is pulled out, the limiting ball moves towards the first slot and disengages from the second slot.

2. The docking device for automatic material loading and unloading in a single crystal furnace according to claim 1, characterized in that, The driving device includes an electromagnet fixing plate, an electromagnet, a driving rod, and a metal plate. The electromagnet fixing plate has a through hole. One end of the driving rod passes through the through hole of the electromagnet fixing plate and contacts the second top plate of the guide sleeve. The metal plate is fixed to the other end of the driving rod. The electromagnet is fixedly installed on the electromagnet fixing plate. When the electromagnet is energized, it attracts the metal plate, and the metal plate drives the driving rod to push the second top plate closer to the first top plate.

3. The docking device for automatic material loading and unloading in a single crystal furnace according to claim 2, characterized in that, The driving device also includes an upper guide sleeve, which includes a lower base plate with a through hole. One end of the driving rod extends out of the metal plate and is inserted into the through hole of the lower base plate. When the electromagnet is de-energized, the metal plate abuts against the lower base plate. The upper guide sleeve is used for limiting and guiding the driving rod.

4. The docking device for automatic material loading and unloading in a single crystal furnace according to claim 1, characterized in that, The elastic device is a spring.

5. The docking device for automatic material loading and unloading in a single crystal furnace according to claim 1, characterized in that, The limiting ball is made of steel ball.

6. A docking system employing the docking device for automatic material loading and unloading in a single crystal furnace as described in claim 1, characterized in that, It includes a detection module, a wireless communication module, and a control module. The detection module is used to detect whether the barrel connector is inserted into the locking sleeve of the docking device. The wireless communication module is used for communication between the detection module and the control module. The control module is used to determine the state of the barrel connector based on the detection result of the detection module, and also to control the drive device to drive the guide sleeve.

7. The docking system for automatic material loading and unloading in a single crystal furnace according to claim 6, characterized in that, The docking device includes a housing, and the locking sleeve, guide sleeve, and driving device are installed inside the housing. The detection module includes two symmetrical observation windows, a baffle pin, a photoelectric signal transmitter, and a photoelectric signal receiver, all disposed on the housing. The photoelectric signal transmitter and receiver are respectively disposed outside the two symmetrical observation windows. The photoelectric signal receiver receives signals transmitted by the photoelectric signal transmitter through the two symmetrical observation windows. The first and second top plates are provided with through holes, and the baffle pin passes through the through holes of the first and second top plates. The baffle pin is fixed to the elastic device. When the barrel joint is not docked, one end of the baffle pin extends out of the first top plate and is located inside the locking sleeve. The photoelectric signal receiver receives the signal transmitted by the photoelectric signal transmitter. When the barrel joint is docked, the end of the barrel joint pushes the end of the baffle pin, and the other end of the baffle pin extends out of the second top plate and is located between the photoelectric signal transmitter and the photoelectric signal receiver, blocking the transmission signal of the photoelectric signal transmitter.

8. The docking system for automatic material loading and unloading in a single crystal furnace according to claim 7, characterized in that, A guide plate is fixedly installed inside the outer shell and is sleeved on the outside of the guide sleeve. A shoulder is provided on the outside of the guide sleeve. When the end of the baffle pin is pushed at the end of the barrel connector, the movement distance of the guide sleeve is limited by the guide plate and the shoulder of the guide sleeve.

9. The docking system for automatic material loading and unloading in a single crystal furnace according to claim 8, characterized in that, The observation window is provided with light-transmitting glass on the outside, which is fixedly connected to the outer shell, and a sealing ring is provided between the light-transmitting glass and the outer shell.

10. The docking system for automatic material loading and unloading in a single crystal furnace according to claim 8, characterized in that, The driving device includes an electromagnet fixing plate, an electromagnet, a driving rod, and a metal plate. The electromagnet fixing plate has a through hole. One end of the driving rod passes through the through hole of the electromagnet fixing plate and contacts the second top plate of the guide sleeve. The metal plate is fixed to the other end of the driving rod. The electromagnet is fixedly installed on the electromagnet fixing plate. When the barrel joint is connected, the control module controls the electromagnet to be energized, attracting the metal plate. The metal plate drives the driving rod to push the second top plate closer to the first top plate. When the detection module detects that the barrel joint is inserted into the locking sleeve, the control module controls the electromagnet to be de-energized, and the barrel joint connection is completed. When the barrel joint is separated, the control module controls the electromagnet to be energized, attracting the metal plate. The metal plate drives the driving rod to push the second top plate closer to the first top plate. When the detection module detects that the barrel joint is disengaged from the locking sleeve, the control module controls the electromagnet to be de-energized, and the barrel joint separation is completed.

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