Micro-channel plate, corrosion method thereof and corrosion clamp

By using microchannel plates composed of core glass and skin glass, and sealing the surrounding area during corrosion, the structural defects and performance changes of microchannel plates are solved, achieving low-cost and high-efficiency production.

CN121528841APending Publication Date: 2026-02-13DONGGUAN ZHONGKE ATOMICALLY PRECISE MANUFACTURING TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202511353635.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-09-22
Publication Date
2026-02-13

AI Technical Summary

Technical Problem

In the manufacturing process of existing microchannel plates, structural defects and performance changes occur due to the mismatch of thermal expansion and contraction of different glass materials and the problem of component compatibility, which increases production costs and research and development difficulties.

Method used

Microchannel plates are composed of core glass and skin glass. By sealing the periphery of the microchannel plate blank during the etching process, only the core glass in the central area is retained. Fixtures and sealing rings are used to ensure that the etching liquid only acts on the central area, thus forming a channel array.

Benefits of technology

This reduces the thermal property mismatch and composition compatibility issues between glass materials, lowers production costs and R&D difficulty, and improves the structural strength and production efficiency of microchannel plates.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a micro-channel plate and a corrosion method and a corrosion clamp thereof, a base body of the micro-channel plate is a piece of leather glass, a channel array is densely distributed in a central area of the base body of the micro-channel plate, and core glass forming a supporting part of the micro-channel plate is densely distributed in a peripheral area of the base body of the micro-channel plate. The micro-channel plate can keep a certain structural strength and is only composed of the core material glass and the skin material glass, the problems of mismatching of thermal properties and component compatibility between glass materials of the micro-channel plate are reduced, the structural defects and performance changes of the micro-channel plate are reduced, and the service life of the micro-channel plate is prolonged. And meanwhile, the production cost and research and development difficulty of the micro-channel plate are reduced.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro-optical element manufacturing, in particular to a microchannel plate and a corrosion method and a corrosion clamp thereof. BACKGROUND

[0002] The microchannel plate (MCP) is a special electron optical device with two-dimensional array and secondary electron multiplication function, which can amplify extremely weak signals (such as single electron or photon) by millions or even hundreds of millions of times, and is the core component of image intensifier, night vision device, mass spectrometer, etc. The microchannel plate generally has a channel array composed of millions of glass channels with a diameter of 4-20 μm and a pitch of 6-25 μm arranged in parallel, and is a glass sheet with a thickness of 0.25-1 mm which is cut at a certain angle.

[0003] The manufacturing process of the microchannel plate generally includes the following steps: first, using the fused fiber optical manufacturing method to fuse the lead silicate glass tube and the acid-soluble glass rod, then removing the core by red acid etching to form the channel array, then obtaining the surface conductive property by hydrogen reduction treatment, and finally plating metal electrodes on the upper and lower end faces to apply working voltage, thereby forming a compact and independent dynode multiplier array with two-dimensional spatial resolution capability.

[0004] At present, the microchannel plate blank before corrosion includes three kinds of special glasses, which are: the core material glass corroded by acid and alkali to form channels in the acid treatment process, the skin material glass which forms the channel wall and provides conditions for secondary electron emission, and the solid glass which is resistant to acid and alkali corrosion and has high thermal performance. However, the use of three kinds of glass materials to manufacture the microchannel plate has the following problems: 1. In the process of high temperature fusion, annealing or subsequent use, the thermal expansion and contraction degrees of different glass materials are different, the thermal properties are not matched, and stress is generated at the interface of the microchannel plate blank, which may cause structural defects such as cracks, delamination and even overall fragmentation; 2. During high temperature fusion, there are compatibility problems between the components of different glass materials and chemical reactions occur, generating bubbles, impurity phases or low melting point eutectics, and forming diffusion layers at the interfaces between different glass materials, which causes changes in the performance of the glass materials and potential impact on the subsequent process; 3. The temperature and pressure parameters of the core steps such as fusion and fusion need to be repeatedly adjusted to adapt to the characteristics of different glass materials, and the processing technology is complex and the production cost is high; 4. When the product is developed and iterated, the matching between different glass materials needs to be considered, which greatly increases the development difficulty and iteration period. SUMMARY

[0005] The present application aims to provide a micro-channel plate which can be composed of only core glass and skin glass and maintain certain structural strength, and is beneficial to reduce thermal performance mismatch and composition compatibility problems between glass materials of the micro-channel plate, and further reduce structural defects and performance changes of the micro-channel plate, and reduce production cost and R&D difficulty of the micro-channel plate.

[0006] Another object of the present application is to provide a micro-channel plate etching method which can make the micro-channel plate composed of only core glass and skin glass and maintain certain structural strength by sealing the peripheral area of the micro-channel plate blank during etching, and is beneficial to reduce thermal performance mismatch and composition compatibility problems between glass materials of the micro-channel plate, and further reduce structural defects and performance changes of the micro-channel plate, and reduce production cost and R&D difficulty of the micro-channel plate.

[0007] Still another object of the present application is to provide a micro-channel plate etching jig which can make the micro-channel plate composed of only core glass and skin glass and maintain certain structural strength by sealing the peripheral area of the micro-channel plate blank during etching, and is beneficial to reduce thermal performance mismatch and composition compatibility problems between glass materials of the micro-channel plate, and further reduce structural defects and performance changes of the micro-channel plate, and reduce production cost and R&D difficulty of the micro-channel plate.

[0008] In order to achieve the above-mentioned objects, the present application discloses a micro-channel plate which is composed of skin glass and core glass, the skin glass is the base of the micro-channel plate, the core glass is densely arranged in the peripheral area of the base of the micro-channel plate to form a micro-channel plate support part, and the central area of the base of the micro-channel plate is densely arranged with a channel array. In order to achieve the above-mentioned another object, the present application discloses a micro-channel plate etching method which comprises the following steps: S101, providing a micro-channel plate blank which is composed of skin glass and core glass, the skin glass is the base of the micro-channel plate blank, and the core glass is densely arranged in the peripheral area and the central area of the base; S102, placing the micro-channel plate blank into a jig, and sealing the peripheral area of the base in the jig while exposing the central area of the base; and S103, placing the jig into an etching liquid to etch the micro-channel plate blank, the core glass in the central area of the base is etched away, the core glass in the peripheral area of the base is reserved, and a micro-channel plate is prepared.

[0009] To achieve the above-mentioned further purpose, the present application discloses a kind of microchannel plate corrosion clamps, it includes: the first clamping plate and the second clamping plate of parallel arrangement, the first clamping plate and the second clamping plate are detachably fixed connection to hold microchannel plate blank, the first clamping plate is provided with at least one first through hole, the second clamping plate is provided with at least one second through hole corresponding to the first through hole to expose the central region of microchannel plate blank, the first clamping plate is provided with the first annular groove surrounding the first through hole to the second clamping plate, the second clamping plate is provided with the second annular groove surrounding the second through hole to the first clamping plate corresponding the first annular groove, the first clamping plate is provided with the third annular groove surrounding the first annular groove to the second clamping plate; At least one first sealing ring and at least one second sealing ring, the first sealing ring is arranged in the first annular groove, the second sealing ring is arranged in the second annular groove, and the first sealing ring and the second sealing ring can cover the peripheral region of the microchannel plate blank; At least one third sealing ring, the third sealing ring is arranged in the third annular groove, and the two ends of the third sealing ring respectively abut against the bottom wall of the third annular groove and the side of the second clamping plate facing the first clamping plate.

[0010] Preferably, a first annular slope is formed between the inner side wall of the first through hole and the outward side of the first clamping plate, and a second annular slope is formed between the inner side wall of the second through hole and the outward side of the second clamping plate.

[0011] Preferably, a first annular surface is formed between the first through hole and the first annular groove, and the distance between the first annular surface and the bottom wall of the first annular groove is smaller than the distance between the side of the first clamping plate facing the second clamping plate and the bottom wall of the first annular groove; and / or, A second annular surface is formed between the second through hole and the second annular groove, and the distance between the second annular surface and the bottom wall of the second annular groove is smaller than the distance between the side of the second clamping plate facing the first clamping plate and the bottom wall of the second annular groove.

[0012] Preferably, the material of the first clamping plate and / or the second clamping plate is metal material, plastic material or glass ceramic material.

[0013] Preferably, the material of the first sealing ring, the second sealing ring and / or the third sealing ring is acid and alkali resistant rubber.

[0014] Preferably, a plurality of threaded holes are arranged around the first through hole on the first clamping plate, a plurality of connecting holes are arranged around the second through hole on the second clamping plate, one end of a bolt is threadedly connected with the threaded hole through the connecting hole, and the other end is crimped to the outward side of the second clamping plate.

[0015] Preferably, the system also includes a support frame, which comprises a support frame and two handles respectively disposed on opposite sides of the support frame. The support frame comprises an upper frame, a lower frame, and a plurality of support columns whose two ends are respectively fixedly connected to the upper frame and the lower frame. The upper frame has at least one snap-fit ​​opening on each of its two inner sidewalls opposite to each other along a first direction. The lower frame has a support rod extending along a second direction perpendicular to the first direction in its middle. The two ends of the support rod are respectively fixedly connected to the two inner sidewalls opposite to each other along the second direction of the lower frame. The first clamping plate and the second clamping plate, which are fixedly connected, are respectively vertically inserted through the corresponding snap-fit ​​openings along their two edges in the first direction. The bottom surfaces of the first clamping plate and the second clamping plate are pressed onto the support rod.

[0016] Preferably, the support is made of metal, plastic, or glass-ceramic material.

[0017] Compared with the prior art, the substrate of the microchannel plate of the present invention is a sheath glass. The central region of the substrate of the microchannel plate is densely covered with channel arrays, and the peripheral region of the substrate of the microchannel plate is densely covered with core glass forming the support part of the microchannel plate. This allows the microchannel plate to maintain a certain structural strength and is composed only of core glass and sheath glass. This helps to reduce the thermal performance mismatch and composition compatibility problems between the glass materials of the microchannel plate, thereby reducing the occurrence of structural defects and performance changes in the microchannel plate, while reducing the production cost and R&D difficulty of the microchannel plate. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the microchannel plate according to an embodiment of the present invention.

[0019] Figure 2 This is a cross-sectional view of the microchannel plate according to an embodiment of the present invention.

[0020] Figure 3 This is a flowchart of the microchannel plate corrosion method according to an embodiment of the present invention.

[0021] Figure 4 This is a three-dimensional structural diagram of a fixture for etching microchannel plates according to an embodiment of the present invention.

[0022] Figure 5 This is an exploded structural diagram of the microchannel plate etching fixture according to an embodiment of the present invention, omitting the support bracket.

[0023] Figure 6 for Figure 5 A three-dimensional structural diagram from another perspective.

[0024] Figure 7 This is a cross-sectional view of the microchannel plate etching fixture according to an embodiment of the present invention, omitting the support bracket. Detailed Implementation

[0025] To illustrate the technical content, structural features, objectives, and effects of the present invention in detail, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0026] Please see Figure 1 and Figure 2 The present invention discloses a microchannel plate 20, which is composed of a skin glass and a core glass. The skin glass is the substrate 201 of the microchannel plate 20, and the core glass is densely distributed in the peripheral area 2011 of the substrate 201 of the microchannel plate 20 to form a microchannel plate support 202. The central area 2012 of the substrate 201 of the microchannel plate 20 is densely distributed with a channel array 203.

[0027] Compared with the prior art, the substrate 201 of the microchannel plate 20 of the present invention is a skin glass, the central region 2012 of the substrate 201 of the microchannel plate 20 is densely covered with channel array 203, and the peripheral region 2011 of the substrate 201 of the microchannel plate 20 is densely covered with core glass forming the microchannel plate support 202. This allows the microchannel plate 20 to maintain a certain structural strength and is composed only of core glass and skin glass. This helps to reduce the thermal performance mismatch and composition compatibility problems between the glass materials of the microchannel plate 20, thereby reducing the occurrence of structural defects and performance changes in the microchannel plate 20, while reducing the production cost and R&D difficulty of the microchannel plate 20.

[0028] Please see Figures 1 to 7 This invention discloses a microchannel plate etching method, which includes the following steps: S101. Provide a microchannel plate blank 200, which is composed of a skin glass and a core glass. The skin glass is the substrate 201 of the microchannel plate blank 200, and the core glass is densely distributed in the peripheral area 2011 and the central area 2012 of the substrate 201. S102. The microchannel plate blank 200 is placed into a fixture, in which the peripheral region 2011 of the substrate 201 is sealed and the central region 2012 of the substrate 201 is exposed; and S103. The fixture is placed in the etching solution to etch the microchannel plate blank 200. The core glass in the central region 2012 of the substrate 201 is etched away, while the core glass in the peripheral region 2011 of the substrate 201 is retained, thus forming the microchannel plate 20.

[0029] Please see Figures 1 to 7 This invention discloses a fixture for etching microchannel plates, comprising: A first clamping plate 1 and a second clamping plate 2 are arranged in parallel and are detachably fixedly connected to clamp a microchannel plate blank 200. The first clamping plate 1 is provided with at least one first through hole 11, and the second clamping plate 2 is provided with at least one second through hole 21 corresponding to the first through hole 11 to expose the central region 2012 of the microchannel plate blank 200. The side of the first clamping plate 1 facing the second clamping plate 2 is provided with a first annular groove 12 surrounding the first through hole 11, and the side of the second clamping plate 2 facing the first clamping plate 1 is provided with a second annular groove 22 surrounding the second through hole 21 corresponding to the first annular groove 12. The side of the first clamping plate 1 facing the second clamping plate 2 is provided with a third annular groove 13 surrounding the first annular groove 12. At least one first sealing ring 3 and at least one second sealing ring 4, the first sealing ring 3 is disposed in the first annular groove 12, the second sealing ring 4 is disposed in the second annular groove 22, the first sealing ring 3 and the second sealing ring 4 can cover the peripheral area 2011 of the microchannel plate blank 200; At least one third sealing ring 5 is provided in the third annular groove 13, and the two ends of the third sealing ring 5 abut against the bottom wall of the third annular groove 13 and the side of the second clamping plate 2 facing the first clamping plate 1, respectively.

[0030] See Figures 1 to 7 A first annular inclined surface 14 is formed between the inner wall of the first through hole 11 and the outward side of the first clamping plate 1, and a second annular inclined surface 23 is formed between the inner wall of the second through hole 21 and the outward side of the second clamping plate 2. This facilitates the corrosion liquid to flow fully into the central region 2012 of the microchannel plate blank 200 and corrode the core glass in the central region 2012 when the first clamping plate 1 and the second clamping plate 2 are immersed in the corrosion liquid, thereby improving the corrosion effect and efficiency.

[0031] See Figures 1 to 7 In this embodiment, a first annular surface 15 is formed between the first through hole 11 and the first annular groove 12. The distance between the first annular surface 15 and the bottom wall of the first annular groove 12 is less than the distance between the side of the first clamping plate 1 facing the second clamping plate 2 and the bottom wall of the first annular groove 12. A second annular surface 24 is formed between the second through hole 21 and the second annular groove 22. The distance between the second annular surface 24 and the bottom wall of the second annular groove 22 is less than the distance between the side of the second clamping plate 2 facing the first clamping plate 1 and the bottom wall of the second annular groove 22. This helps to prevent the first annular surface 15 and the second annular surface 24 from contacting the central area 2012 of the microchannel plate blank 200 after the microchannel plate blank 200 is placed in the fixture, thus affecting the sealing effect of the first sealing ring 3 and the second sealing ring 4 on the peripheral area 2011 of the microchannel plate blank 200.

[0032] See Figures 1 to 7The first clamping plate 1 and / or the second clamping plate 2 are made of metal, plastic or glass ceramic materials, which gives the first clamping plate 1 and the second clamping plate 2 acid corrosion resistance, improves their durability, and is not limited to this.

[0033] Specifically, in this embodiment, the first clamping plate 1 is provided with a plurality of first through holes 11 arranged in an array, the second clamping plate 2 is provided with a plurality of second through holes 21 arranged in an array, and the first annular groove 12, the second annular groove 22, the third annular groove 13, the first sealing ring 3, the second sealing ring 4 and the third sealing ring 5 are also provided with a plurality of first through holes 11 and second through holes 21, so that the fixture can place a plurality of microchannel plate blanks 200 to realize the mass production of microchannel plates 20, but is not limited thereto.

[0034] See Figures 1 to 7 The first sealing ring 3, the second sealing ring 4 and / or the third sealing ring 5 are made of acid and alkali resistant rubber, which gives the first sealing ring 3, the second sealing ring 4 and the third sealing ring 5 the characteristics of acid corrosion resistance, ensuring that the peripheral area 2011 of the microchannel plate blank 200 is effectively sealed, and is not limited thereto.

[0035] Specifically, in this embodiment, when performing step S102, the first through hole 11 of the first clamping plate 1 and the second through hole 21 of the second clamping plate 2 correspond to the central region 2012 of the microchannel plate blank 200, respectively. The first sealing ring 3 and the second sealing ring 4 abut against the peripheral region 2011 of the microchannel plate blank 200, respectively. The first sealing ring 3 and the second sealing ring 4 cooperate to isolate the corrosive liquid (acid) flowing in through the first through hole 11 and the second through hole 21, ensuring that the corrosive liquid only erodes the central region 2012 of the microchannel plate blank 200. The core glass within 12 does not diffuse into the peripheral area 2011 of the microchannel plate blank 200, while the third sealing ring 5 can isolate the corrosive liquid flowing in through the gap between the first clamping plate 1 and the second clamping plate 2, further ensuring that the core glass in the peripheral area 2011 of the microchannel plate blank 200 will not be corroded by the corrosive liquid, thus forming the microchannel plate support 202, ensuring that the microchannel plate 20 has a certain structural strength, thereby eliminating the need to set up a solid glass that can form a support and is resistant to acid and alkali corrosion as the edge of the microchannel plate 20.

[0036] See Figures 1 to 7 The first clamping plate 1 is provided with a plurality of threaded holes 16 at intervals around the first through hole 11, and the second clamping plate 2 is provided with a plurality of connecting holes 25 at intervals around the second through hole 21. One end of the bolt passes through the connecting hole 25 and is threadedly connected to the threaded hole 16, and the edge of the other end is pressed against the outward side of the second clamping plate 2, so that the first clamping plate 1 and the second clamping plate 2 can be detachably fixedly connected and the peripheral area 2011 of the microchannel plate blank 200 is effectively sealed.

[0037] Specifically, in this embodiment, the threaded holes 16 and the connecting holes 25 are arranged in an array. Every four adjacent threaded holes 16 are arranged around a third annular groove 13. The connecting holes 25 are arranged in the second clamping plate 2 in the same way as the threaded holes 16. When performing the above step S102, multiple bolts are used to pass through the connecting holes 25 corresponding to the second clamping plate 2 and are threadedly connected to the threaded holes 16 corresponding to the first clamping plate 1, so as to achieve tight locking between the first clamping plate 1 and the second clamping plate 2, thereby enabling the first sealing ring 3, the second sealing ring 4 and the third sealing ring 5 to effectively seal the peripheral area 2011 of the microchannel plate blank 200.

[0038] See Figures 1 to 7 The microchannel plate etching fixture also includes a support 6, which includes a support frame 61 and two handles 62 respectively disposed on opposite sides of the support frame 61. The support frame 61 includes an upper frame 611, a lower frame 612, and a plurality of support columns 613 whose ends are fixedly connected to the upper frame 611 and the lower frame 612 respectively. The upper frame 611 has at least one snap-fit ​​opening 614 on each of its two opposite inner sidewalls along the first direction A. The lower frame 612 has a support rod 615 extending along a second direction B perpendicular to the first direction A in the middle. The two ends of the support rod 615 are respectively connected to the lower frame 612 along the second direction B. The two inner sidewalls are fixedly connected. The first clamping plate 1 and the second clamping plate 2 are respectively vertically inserted into the corresponding snap-fit ​​openings 614 along the two edges of the first direction A. The bottom surfaces of the first clamping plate 1 and the second clamping plate 2 are pressed on the support rod 615, which is conducive to the stable placement of the first clamping plate 1 and the second clamping plate 2 in the bracket 6. The first clamping plate 1 and the second clamping plate 2 placed on the bracket 6 can be conveniently immersed in the etching liquid through the handle 62, so as to etch away the core glass in the central area 2012 of the microchannel plate blank 200, thereby realizing the efficient production of microchannel plate 20.

[0039] Specifically, in this embodiment, the handle 62 is frame-shaped, and one end of the handle 62 near the support frame 61 is fixedly connected to the outer side wall of the upper frame 611 and the lower frame 612, but is not limited thereto.

[0040] Specifically, in this embodiment, the snap-fit ​​opening 614 is provided with multiple openings and is arranged at intervals along the second direction B on the two inner sidewalls of the upper frame 611, so that the bracket 6 can place multiple fixedly connected first clamping plates 1 and second clamping plates 2, and complete the production of multiple microchannel plates 20 in batches at one time, thereby improving production efficiency.

[0041] Furthermore, the support 6 is made of metal, plastic, or glass-ceramic materials, which gives the support 6 acid corrosion resistance and improves its durability, and is not limited to this.

[0042] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the claims of the present invention are still within the scope of the present invention.

Claims

1. A microchannel plate, characterized in that, The microchannel plate is composed of a sheath glass and a core glass. The sheath glass is the substrate of the microchannel plate, and the core glass is densely distributed in the peripheral area of ​​the substrate of the microchannel plate to form a microchannel plate support. The central area of ​​the substrate of the microchannel plate is densely distributed with a channel array.

2. A method for etching microchannel plates, characterized in that, Includes the following steps: S101. Provide a microchannel plate blank, the microchannel plate blank being composed of a skin glass and a core glass, the skin glass being the substrate of the microchannel plate blank, and the core glass being densely distributed in the peripheral and central areas of the substrate; S102. Place the microchannel plate blank into a fixture, and seal the peripheral area of ​​the substrate in the fixture to expose the central area of ​​the substrate. and S103. The fixture is placed in the etching solution to etch the microchannel plate blank. The core glass in the central area of ​​the substrate is etched away, while the core glass in the peripheral area of ​​the substrate is retained, thus forming a microchannel plate.

3. A fixture for etching microchannel plates, characterized in that, include: A first clamping plate and a second clamping plate are arranged in parallel and are detachably fixedly connected to clamp a microchannel plate blank. The first clamping plate is provided with at least one first through hole, and the second clamping plate is provided with at least one second through hole corresponding to the first through hole to expose the central area of ​​the microchannel plate blank. The side of the first clamping plate facing the second clamping plate is provided with a first annular groove surrounding the first through hole, and the side of the second clamping plate facing the first clamping plate is provided with a second annular groove surrounding the second through hole corresponding to the first annular groove. The side of the first clamping plate facing the second clamping plate is provided with a third annular groove surrounding the first annular groove. At least one first sealing ring and at least one second sealing ring, the first sealing ring being disposed in the first annular groove and the second sealing ring being disposed in the second annular groove, the first sealing ring and the second sealing ring being able to cover the peripheral area of ​​the microchannel plate blank; At least one third sealing ring is disposed in the third annular groove, and the two ends of the third sealing ring abut against the bottom wall of the third annular groove and the side of the second clamping plate facing the first clamping plate, respectively.

4. The fixture for etching microchannel plates according to claim 3, characterized in that, A first annular inclined surface is formed between the inner wall of the first through hole and the outward side of the first clamping plate, and a second annular inclined surface is formed between the inner wall of the second through hole and the outward side of the second clamping plate.

5. The fixture for etching microchannel plates according to claim 3, characterized in that, A first annular surface is formed between the first through hole and the first annular groove. The distance between the first annular surface and the bottom wall of the first annular groove is less than the distance between the side of the first clamping plate facing the second clamping plate and the bottom wall of the first annular groove; and / or, A second annular surface is formed between the second through hole and the second annular groove. The distance between the second annular surface and the bottom wall of the second annular groove is less than the distance between the side of the second clamping plate facing the first clamping plate and the bottom wall of the second annular groove.

6. The fixture for etching microchannel plates according to claim 3, characterized in that, The first clamp and / or the second clamp are made of metal, plastic or glass-ceramic materials.

7. The fixture for etching microchannel plates according to claim 3, characterized in that, The first sealing ring, the second sealing ring, and / or the third sealing ring are made of acid and alkali resistant rubber.

8. The fixture for etching microchannel plates according to claim 3, characterized in that, The first clamping plate has a plurality of threaded holes spaced around the first through hole, and the second clamping plate has a plurality of connecting holes spaced around the second through hole. One end of the bolt passes through the connecting hole and is threadedly connected to the threaded hole, and the edge of the other end is pressed against the outward side of the second clamping plate.

9. The fixture for etching microchannel plates according to claim 3, characterized in that, It also includes a bracket, which includes a support frame and two handles respectively disposed on opposite sides of the support frame. The support frame includes an upper frame, a lower frame, and a plurality of support columns whose two ends are respectively fixedly connected to the upper frame and the lower frame. The upper frame has at least one snap-fit ​​opening on each of its two inner sidewalls opposite to each other along a first direction. The lower frame has a support rod extending along a second direction perpendicular to the first direction in its middle. The two ends of the support rod are respectively fixedly connected to the two inner sidewalls opposite to each other along the second direction of the lower frame. The first clamping plate and the second clamping plate fixedly connected are respectively vertically inserted through the corresponding snap-fit ​​openings along their two edges along the first direction. The bottom surfaces of the first clamping plate and the second clamping plate fixedly connected are pressed on the support rod.

10. The fixture for etching microchannel plates according to claim 9, characterized in that, The bracket is made of metal, plastic, or glass-ceramic materials.