Drawing device, optical-mechanical system and semiconductor equipment

Abstract

The invention relates to the technical field of equipment storage, in particular to a drawing device, an optical-mechanical system and semiconductor equipment. The drawing device comprises a fixing module and a drawing module, wherein the fixing module is provided with a blocking assembly; the drawing module is arranged on the fixing module in a sliding mode, the drawing module is provided with at least one limiting piece and at least one functional connecting piece, and the at least one limiting piece corresponds to the at least one functional connecting piece; the blocking assembly is used for abutting against all the limiting pieces in the sliding process of the drawing module in the sliding direction so as to prevent the drawing module from continuously sliding. The distance between each limiting piece and the blocking assembly in the sliding direction is smaller than or equal to the safe moving distance generated when the corresponding functional connecting piece slides along the sliding direction along with the drawing module.

Description

Technical Field

[0001] This application relates to the field of device storage technology, and more particularly to pull-out devices, optomechanical systems, and semiconductor devices. Background Technology

[0002] In the semiconductor field, such as in optical measurement equipment, many devices require regular maintenance, and pull-out structures are a common solution to expand maintainable space. However, during the pull-out process, the tubing connected to the device is prone to interference with other structures (such as the frame of a storage device), especially when its bending radius is large, such as when the bending radius of optical fiber exceeds 100 mm. In situations with extremely limited space (crowded layout), tubing with excessively large bending radii has a higher probability of interfering with other structural components and causing damage during the pull-out process. Also due to space constraints, such tubing cannot be separated from the device before pull-out, making it impossible to avoid tubing interference problems by separating it from the device. Summary of the Invention

[0003] To address the problem that functional connectors (such as pipelines) are prone to interference with other structures and may be damaged during the pull-out process, this application discloses a pull-out device, an optomechanical system, and a semiconductor device.

[0004] In a first aspect, this application provides a pull-out device, comprising: a fixed module, the fixed module being provided with a blocking component; and a pull-out module, the pull-out module being slidably disposed on the fixed module, the pull-out module being provided with at least one limiting member and at least one functional connector, the at least one limiting member corresponding to the at least one functional connector; the blocking component being used to abut against each of the limiting members during the sliding of the pull-out module in a sliding direction, thereby preventing the pull-out module from continuing to slide; the distance between each of the limiting members and the blocking component in the sliding direction is less than or equal to the safe movement distance of the corresponding functional connector as the pull-out module slides in the sliding direction.

[0005] Because the pull-out device includes a fixed module and a pull-out module, the fixed module is equipped with a blocking component, and the pull-out module is equipped with a limiting component. This allows the pull-out module to stop in a controlled manner during sliding by the blocking component contacting the limiting component. Simultaneously, by setting the maximum distance between the limiting component and the blocking component to be less than or equal to the safe movement distance of the functional connector as it slides along the sliding direction S with the pull-out module, it is ensured that the limiting component is blocked by the blocking component before the functional connector is stretched to its physical limit. This physically prevents excessive stretching of the functional connector and stops movement before harmful interference occurs, avoiding wear, short circuits, and breakage of the functional connector, thus improving the reliability and stability of the pull-out device.

[0006] In one possible implementation, the fixing module includes a frame, and the blocking component includes a fixing member and a blocking member. The fixing member is fixedly connected to the frame, and the blocking member is retractably disposed on the fixing member. The blocking member is used to block the limiting member that slides with the pull-out module when the blocking member is in the extended state, so that the pull-out module stops sliding. The blocking member is used to avoid the limiting member that slides with the pull-out module when the blocking member is in the retracted state, so that the pull-out module can continue to slide.

[0007] This application achieves dynamic limiting through the extension and retraction mechanism of the blocking component, which facilitates segmented pull-out. This allows the pull-out module to be pulled out in segments, thereby facilitating the segmented removal of functional connectors on the pull-out module and avoiding the problem of interference and damage to functional connectors with other components during the traditional one-shot pull-out process.

[0008] In one possible implementation, the fixing member is a mounting base, and the blocking member is a movable rod. The movable rod is telescopically mounted on the mounting base to switch between an extended state and a retracted state. The pin structure is simple, low in cost, and facilitates the engagement operation.

[0009] In one possible implementation, the limiting member is a pin structure fixedly connected to or detachably connected to the pull-out module, and the movable rod, after extending, can abut against the pin structure. The limiting member is a common pin structure, which is simple in structure, low in cost, and facilitates the abutment operation.

[0010] In one possible implementation, the fixing member includes a pin sleeve, the blocking member is a spring pin, and the limiting member includes an arc-shaped groove. The spring pin is used to extend into the groove under the action of elastic force when the limiting member moves to the spring pin, thereby preventing the sliding of the pull-out module. The groove is used to overcome the elastic force of the spring pin after the pull-out module continues to be applied in the sliding direction of the pull-out module, and to retract the spring pin and leave the groove, so that the pull-out module can continue to slide.

[0011] The spring pin and the arc-shaped groove work together to automatically stop the movement using spring force, while releasing the block requires an additional force to overcome the spring force. Therefore, this structure achieves automatic locking while allowing smooth sliding even after a larger manual pulling force is applied. The spring pin and groove combination is simple and eliminates the hassle of manually or electrically adjusting the extension and retraction of the blocking component. Furthermore, this structure provides clear tactile feedback and operational control, enhancing the perceptibility and safety of operation.

[0012] In one possible implementation, one end of the pull-out module is provided with a connector, and a blocking member in the blocking assembly can extend and insert into the connector, so that the pull-out module is fixed relative to the fixed module in the sliding direction of the pull-out module.

[0013] The cooperation between the blocking component and the connector can fix the position of the pull-out module, for example, when the pull-out module is not being pulled out. Furthermore, the blocking component in this application serves two purposes: it can cooperate with the limiting component for limiting position, and it can also cooperate with the connector for limiting position, resulting in fewer parts and a simpler structure overall.

[0014] In one possible implementation, at least one of the limiting members is disposed on the side wall of the pull-out module, and the at least one limiting member extends to the left or right side of the pull-out module. The blocking component is disposed at the end of the fixed module, and the blocking member in the blocking component is capable of horizontal extension and retraction. Alternatively, at least one of the limiting members is disposed on the side wall of the pull-out module, and the at least one limiting member extends to the left or right side of the pull-out module. The blocking component is disposed at the end of the fixed module, and the blocking member in the blocking component is capable of vertical extension and retraction. Alternatively, at least one of the limiting members is disposed on the side wall of the pull-out module, and the at least one limiting member extends to the upper or lower side of the pull-out module. The blocking component is disposed at the end of the fixed module, and the blocking member in the blocking component is capable of horizontal extension and retraction. Alternatively, at least one of the limiting members is disposed on the side wall of the pull-out module, and the at least one limiting member extends to the upper or lower side of the pull-out module. The blocking component is disposed at the end of the fixed module, and the blocking member in the blocking component is capable of vertical extension and retraction. Alternatively, at least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends towards the upper or lower side of the pull-out module; the blocking component is disposed at the end of the fixed module and the blocking member in the blocking component is capable of vertical extension and retraction; or, at least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends towards the upper or lower side of the pull-out module; the blocking component is disposed at the end of the fixed module and the blocking member in the blocking component is capable of horizontal extension and retraction; or, at least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends towards the left or right side of the pull-out module; the blocking component is disposed at the end of the fixed module and the blocking member in the blocking component is capable of vertical extension and retraction; or, at least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends towards the left or right side of the pull-out module; the blocking component is disposed at the end of the fixed module and the blocking member in the blocking component is capable of horizontal extension and retraction.

[0015] The purely mechanical limit method has a simple structure, strong anti-interference ability compared with the electronic sensor, convenient maintenance, and provides a direct and clear collision sound when blocking a collision, providing clear feedback.

[0016] In one possible implementation, the number of the at least one limiting member is multiple, and the multiple limiting members are spaced apart along the sliding direction. By spaced apart multiple limiting members along the sliding direction, segmented limiting protection can be provided at different positions of the pull-out stroke.

[0017] In one possible implementation, the pull-out module has a connection point for connecting with a functional connector. In the sliding direction of the pull-out module, a limiting member is provided at the connection point facing one end of the pull-out module. This application positions the limiting member in front of the connection point, allowing the connection point, which is prone to interference, to stop moving with the pull-out module before interference occurs. This facilitates operations such as wire pulling by the operator, thus avoiding interference.

[0018] In one possible implementation, the pull-out module has multiple connection points for connecting with functional connectors. The pull-out module includes multiple limiting members. In the sliding direction of the pull-out module, at least one limiting member is provided between two adjacent connection points, and at least one limiting member is also provided on the side of the connection point closest to one end of the pull-out module facing that end. When there are multiple connection points, this application provides a limiting member in front of each connection point, so that each connection point prone to interference can stop moving with the pull-out module before interference occurs, facilitating the operator to perform operations such as pulling wires, thereby avoiding interference.

[0019] In one possible implementation, the fixing module includes a frame with a hollow area, and when one of the limiting members interacts with the blocking assembly, the connection point on the side of the limiting member away from one end of the pull-out module is located in the hollow area. In embodiments where the pipeline at the connection point is prone to interference with the frame, this application sets the distance between the limiting member and the connection point such that the pull-out module can stop moving before interference occurs, thereby facilitating operations such as wire pulling by the operator to avoid interference.

[0020] Secondly, this application provides an optomechanical system that includes the pull-out device provided in the aforementioned embodiments. By integrating the pull-out device, the optomechanical system provides physical protection for the light source filter module, which is internally delicate and connected to various cables (such as power lines, signal lines, cooling water pipes required to stabilize the temperature of optical components, etc., i.e., functional connectors). This ensures that the various functional connectors connected to the light source filter module are not damaged by excessive stretching, thereby improving the reliability of the optomechanical system and reducing maintenance costs.

[0021] Thirdly, this application provides a semiconductor device that includes the optomechanical system provided in the embodiments described above.

[0022] Because the semiconductor equipment integrates an optomechanical system, damage to the light source filter module connection cables caused by improper maintenance is avoided, thus reducing downtime caused by module failures. Furthermore, when pulling out the light source filter module, operators do not need to precisely judge the remaining cable length; the segmented stop function of the pulling device prevents errors and provides guidance, making maintenance work faster and safer. This effectively solves the safety and reliability issues in the maintenance of precision optical modules, providing strong support for the stable operation of high-end semiconductor manufacturing equipment. Attached Figure Description

[0023] Figure 1 This is an isometric view of a pull-out device according to an embodiment of this application.

[0024] Figure 2 for Figure 1 Side view of the pull-out device.

[0025] Figure 3 This is an isometric view of a pull-out device according to an embodiment of this application, which hides the frame.

[0026] Figure 4 for Figure 3 Side view of the pull-out device.

[0027] Figure 5 for Figure 3 A magnified view of a portion of the blocking component.

[0028] Figure 6 This is an isometric view of the drag chain and slide rail of the pull-out device according to an embodiment of this application.

[0029] Figure 7 for Figure 6 Side view of the cable chain and slide rail of the pull-out device.

[0030] Figure 8 This is a flowchart illustrating the pull-out method according to an embodiment of this application.

[0031] Figures 9A to 9H This is a schematic diagram showing the blocking component and the limiting member in an abutting relationship according to an embodiment of this application.

[0032] Figure 10 This is a schematic diagram of the optomechanical system according to an embodiment of this application.

[0033] Figure 11 This is a schematic diagram of a semiconductor device according to an embodiment of this application.

[0034] Explanation of reference numerals in the attached figures:

[0035] 2-Pull-out device; 11-Optical-mechanical system; 1-Semiconductor equipment; 111-Light source filtering module;

[0036] 10- Fixed module;

[0037] 110 - Fixed module at one end;

[0038] 120-Blocking assembly;

[0039] 121-Fixed component; 122-Blocking component;

[0040] 20 - Pull-out module;

[0041] 210 - Side view;

[0042] 220 - Limiting component;

[0043] 221 - First limiting component; 222 - Second limiting component;

[0044] 230 - One end of the pull-out module;

[0045] 240-Connector;

[0046] 250-connection site;

[0047] 30 - Functional connector;

[0048] 310 - First functional connector;

[0049] 320 - Secondary Function Connector;

[0050] 40-Frame;

[0051] 410 - Frame column;

[0052] 420 - Mid-altitude region;

[0053] 50-Drag chain;

[0054] 510 - Cable Carrier Support Plate;

[0055] 520 - One end of the cable chain;

[0056] 530 - The other end of the cable chain;

[0057] S - Sliding direction. Detailed Implementation

[0058] The embodiments of this application are described below with reference to the accompanying drawings.

[0059] For ease of understanding, the relevant technical terms involved in the embodiments of this application will be explained and described below.

[0060] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0061] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0062] It should be understood that the term "and / or" used in this document is merely a description of the same field in the related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0063] Depending on the context, the word "if" as used here can be interpreted as "when" or "when" or "in response to determination" or "in response to detection." Similarly, depending on the context, the phrase "if determination" or "if detection (of the stated condition or event)" can be interpreted as "when determination" or "in response to determination" or "when detection (of the stated condition or event)" or "in response to detection (of the stated condition or event)."

[0064] It should be understood that the terms "first," "second," etc., used in this application are for distinguishing purposes only and should not be construed as indicating or implying relative importance or order.

[0065] The phrase "within the range" used in this application, unless otherwise specified, includes both endpoints of the range by default. For example, in the range of 1 to 5, it includes the values ​​1 and 5.

[0066] In the description of this application, the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0067] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation", "connection" and "joining" should be interpreted broadly, for example, they can be fixed connections, detachable connections, mating connections or integral connections; those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0068] Pull-out mechanisms are used in the field of device storage technology, primarily in precision electronic equipment with complex internal structures requiring frequent maintenance. Specifically, these mechanisms are widely used in various semiconductor devices, such as optical measurement equipment, enterprise-level or data center-level hard drive arrays, and servers. In these devices, many critical components require regular maintenance or replacement; pull-out mechanisms, by providing slidable expansion space, greatly improve the convenience of maintenance operations. Furthermore, this technology extends to optical communication equipment (forming part of an optomechanical system), network switches, routers, and industrial control cabinets. In these applications, pull-out mechanisms are typically associated with the device's fixed frame and functional connectors (such as conduits and cables) that power or transmit data to the device. Their core function is to ensure smooth device removal while managing and protecting the moving functional connectors, preventing them from colliding or interfering with the static structure such as the frame within the limited device space.

[0069] In a semiconductor memory device pull-out device understood by the applicant, slide rails are provided on both sides of the device to be pulled out, allowing the device to be pulled out for maintenance. However, the slide rails lack segmented protection capabilities, and the tubing is prone to interference with the frame of the pull-out device during the pulling process. Additionally, the pull-out device is equipped with bolt fixing plates for securing the device's position; the bolt fixing method has room for further optimization.

[0070] Another type of pull-out device for semiconductor memory devices, known to the applicant, includes an outer pull-out beam and an inner pull-out beam slidably connected to the outer pull-out beam. Multiple pin holes are correspondingly provided on the outer and inner pull-out beams. After determining the pull-out length, pins can be inserted into these pin holes to fix the inner and outer pull-out beams. The multiple pin holes can be arranged along the pull-out direction to achieve fixation at different pull-out lengths. However, it lacks a limiting protection structure during the pull-out process; limiting is only implemented after the pull-out is complete. This still allows for over-pulling by the operator, and the tubing is prone to interference with the frame during the pull-out process.

[0071] Example 1

[0072] This application provides a pull-out device, an optomechanical system, and a semiconductor device. See also Figure 1According to one embodiment of this application, the pull-out device 2 may include a fixed module 10 and a pull-out module 20. The fixed module 10 may be in the form of a fixed frame for a server rack or equipment enclosure, and its shape may be cubic, providing a base for the sliding of the pull-out module 20. The pull-out module 20 may be in the form of a drawer containing components such as a hard drive, motherboard, processor, and power module, and may reciprocate within the fixed module 10.

[0073] More specifically, the pull-out module 20 is slidably disposed on the fixed module 10, and can slide in the sliding direction S (e.g., Figure 2 The reciprocating motion occurs in the left and right directions (the direction in which the pull-out module 20 is pulled out and pushed in). The fixed module 10 is provided with a blocking component 120, for example, the blocking component 120 is located at one end 110 of the fixed module of the fixed module 10 (e.g., Figure 3 The pull-out module 20 is provided with at least one limiting member 220 and at least one functional connector 30. During the sliding process of the pull-out module 20, the functional connector 30 may interfere with the fixed module 10. The limiting member 220 provided in this application is used to pre-interfere with the fixed module 10 (e.g., with the blocking component 120) before the functional connector 30 interferes with the fixed module 10, thus pre-limiting the interference. The functional connector 30 can be, for example, a wire, optical fiber, or other conduit, and can be used to provide signal transmission or power supply to components on the pull-out module 20. The functional connector 30 can be connected to the side 210 of the pull-out module 20 via connection points 250 (described later). In one example, the number of limiting members 220 and functional connectors 30 can correspond, for example, one-to-one. Of course, a one-to-many form can also be adopted, for example, one limiting member 220 corresponding to multiple functional connectors 30.

[0074] See Figure 2 The blocking component 120 is used to abut against each of the limiting members 220 during the sliding of the pull-out module 20 along the sliding direction S, thereby preventing the pull-out module 20 from continuing to slide. The distance between each limiting member 220 and the blocking component 120 in the sliding direction S is set to be less than or equal to the safe movement distance of the corresponding functional connector 30 when it slides with the pull-out module 20. The safe movement distance of the functional connector 30 refers to the allowable sliding distance of the functional connector 30 before collision interference occurs, and this distance can be measured according to the actual situation. Thus, the limiting member 220 and the blocking component 120 abut first, and then the functional connector 30 can be pulled out to prevent the functional connector 30 from colliding and interfering with other components. The abutment state between the limiting member 220 and the blocking component 120 can be controlled and adjusted (specific implementation details are described later). For example, the abutment state can be canceled after the functional connector 30 is pulled out, allowing the pull-out module 20 to continue moving.

[0075] For example, see Figure 2The pull-out module 20 includes two limiting members 220 (first limiting member 221 and second limiting member 222), and two functional connectors 30 (first functional connector 310 and second functional connector 320) are also connected to the pull-out module 20. In the sliding direction S, for example, in the initial position before pulling out, if the actual measured safe movement distance of the first functional connector 310 is A1, then the distance B1 between the first limiting member 221 and the blocking component 120 should be set such that A1 ≥ B1. If the safe movement distance of the second functional connector 320 is A2, then the distance B2 between the second limiting member 222 and the blocking component 120 should be set such that A2 ≥ B2. For example, in the initial position, after the functional connectors 30 are connected and the specific parameters of A1 and A2 are determined, the limiting members 220 can be installed on the pull-out module 20 to ensure that B1 and B2 meet the requirements.

[0076] In this application, because the pull-out structure includes a fixed module 10 and a pull-out module 20, the fixed module 10 is provided with a blocking component 120, and the pull-out module 20 is provided with a limiting component 220, so that the pull-out module 20 can be stopped in a controlled manner by the blocking component 120 abutting against the limiting component 220 during the sliding process. At the same time, by setting the maximum distance between the limiting component 220 and the blocking component 120 to be less than or equal to the safe movement distance of the functional connector 30 when it slides with the pull-out module 20 in the sliding direction S, it is ensured that the limiting component 220 is blocked by the blocking component 120 before the functional connector 30 slides with the pull-out module 20 and is stretched to its physical limit (before interfering with or colliding with other components), thereby physically preventing the functional connector 30 from being overstretched. At the same time, the movement can be stopped before harmful interference occurs, avoiding wear, short circuits, breakage, etc. of the functional connector 30 caused by this, thus improving the reliability and stability of the pull-out device 2.

[0077] In some implementations, see Figure 2 The fixed module 10 includes a frame 40. The frame 40 is typically a cubic-shaped metal structure (such as aluminum alloy or steel), with dimensions customized according to equipment requirements, used to provide a stable supporting foundation. Exemplarily, the frame 40 includes a base plate on which multiple frame columns 410 can be mounted, the base plate and frame columns 410 generally forming a cubic structure. The base plate provides an mounting foundation for the pull-out module 20, and the frame columns 410 provide protection against collisions between structures outside the frame 40 and, for example, the pull-out module 20 within the frame 40.

[0078] See Figure 5The blocking assembly 120 includes a fixing member 121 and a blocking member 122, with the fixing member 121 fixedly connected to the frame 40. Exemplarily, the fixing member 121 can be an L-shaped mounting base fixed to the frame 40 by screws or a mounting boss integrally formed with the frame 40. The blocking member 122 is telescopically disposed on the fixing member 121, and the telescopic movement of the blocking member 122 can be achieved by manual push-pull, cylinder drive, or electromagnetic drive. For example, for the manual push-pull type, the blocking member 122 can be a manually rotatable eccentric wheel or lever structure. For the cylinder drive type, the blocking assembly 120 is a cylinder, the blocking member 122 can be a piston rod, and the fixing member 121 can be a cylinder body, with the telescopic state of the blocking member 122 controlled by an air circuit. In the case of electromagnetic drive, the blocking component 120 can be an electromagnet, the fixing component 121 is the main body of the electromagnet, and the blocking component 122 can be the moving iron core of the electromagnet. The iron core can perform the logic of being pulled back (retracted) when energized and popped out (extended) when de-energized. The extension and retraction state of the blocking component 122 can be controlled by controlling the energization and de-energization conditions.

[0079] When the blocking member 122 is in the extended state, it blocks the limiting member 220 that slides with the pull-out module 20, thus stopping the pull-out module 20 from sliding. When the blocking member 122 is in the retracted state, it avoids the limiting member 220 that slides with the pull-out module 20, allowing the pull-out module 20 to continue sliding, thus realizing a dynamically adjustable limiting function. More specifically, when the blocking member 122 is in the extended state, its end extends into the sliding path of the pull-out module 20. As the pull-out module 20 continues to move along the sliding direction S, the limiting member 220, for example, its column, collides with the blocking member 122, for example, its end, generating mechanical resistance and hindering the pull-out module 20 from continuing to slide until the operator intervenes manually. For example, the functional connector 30 can be released at this time, and after releasing the functional connector 30, the blocking member 122 is put back into the retracted state. When the blocking member 122 is in the retracted state, it retracts at least partially into the fixing member 121, creating a clearance space between the moving trajectories of the blocking member 122 and the limiting member 220 that does not obstruct the movement path of the limiting member 220. The limiting member 220 then smoothly slides past the position of the blocking member 122 without contact, allowing the pull-out module 20 to continue sliding freely in the sliding direction S. This application achieves dynamic limiting through the extension and retraction mechanism of the blocking member 122, enabling precise control of the sliding stroke of the pull-out module 20. This facilitates segmented pulling, stopping the movement before interference occurs with the functional connector 30, thus avoiding pipeline wear, short circuits, or breakage, and improving the reliability and maintenance convenience of the pull-out device 2. It also facilitates the segmented removal of the functional connector 30 on the pull-out module 20, avoiding the problem of interference and damage to the functional connector 30 with other components during the traditional one-shot pulling process.

[0080] In some implementations, see Figure 5The blocking component 120 is formed in the form of a pin, and the fixing member 121 is a mounting base, which can be connected to the frame 40 of the fixing module 10. The mounting base can be provided with axial guide holes or embedded linear bearings to constrain the linear reciprocating motion of the blocking component 122. The blocking component 122 is a movable rod, such as a cylindrical rod, which is telescopically mounted on the mounting base. The movable rod and the mounting base can be fitted with a clearance fit or a sliding fit to achieve smooth switching between extended and retracted states. The end of the movable rod can be hemispherical to reduce instantaneous impact wear during collision; or the end can be beveled to guide the movable rod to retract when the pull-out module 20 applies a thrust; or the end can be planar to provide the maximum blocking area to adapt to different collision requirements. This pin structure is relatively simple, low in cost, and easy to implement abutment operation. For example, the movable rod can be driven by a miniature linear motor, which is fixed inside the mounting base. When energized, the motor push rod drives the movable rod to extend or retract. Alternatively, the movable rod is connected to a compression spring. Under normal conditions, the spring pushes the movable rod to remain extended. When manually pressed, the spring force can be overcome to retract the movable rod.

[0081] In some implementations, see Figure 3 The limiting member 220 is a pin structure that is fixedly connected to or detachably connected (e.g., threaded) to the pull-out module 20. Exemplarily, the limiting member 220 can be made of aluminum alloy or steel, and can be cylindrical with a diameter ranging from 5 to 15 mm. Its connection to the pull-out module 20 can be by welding, threaded connection, or connection via a quick-release pin seat to achieve quick assembly and disassembly. The end of the movable rod can be configured to abut against the pin. Specifically, when the movable rod of the blocking member 122 is in the extended state, its end extends into the movement path of the limiting member 220, interfering with and abutting against the pin structure of the limiting member 220, thus preventing the pull-out module 20 from continuing to slide; when the movable rod retracts, the end of the movable rod avoids the movement trajectory of the pin structure, allowing the pin structure to pass smoothly. The pin structure is simple in structure, low in cost, and facilitates the abutment operation.

[0082] In some implementations, the engagement between the limiting member 220 and the blocking assembly 120 can be designed in various ways according to actual installation requirements and spatial layout, exhibiting high adaptability and flexibility. This design allows the limiting member 220 and the blocking assembly 120 to be configured in multiple directions (such as left and right, up and down) to adapt to the structural constraints of different devices. Specifically, the "extending direction" refers to the axial direction in which the limiting member 220 protrudes outward from the body of the pull-out module 20, while the "telescopic direction" refers to the direction of movement of the blocking member 122, which can be... Figures 9A to 9H The view shown is the reference plane.

[0083] Specifically, see Figure 9AIn one example, a limiting member 220 is disposed on the side wall of the pull-out module 20, and the limiting member 220 extends to the left or right side of the pull-out module 20. A blocking component 120 is disposed on the fixing module 10 (see [reference]). Figure 3 , Figure 4 The end of the blocking assembly 120 and the blocking member 122 in the blocking assembly 120 can extend and retract vertically. It uses the vertically extending blocking member 122 and the horizontally extending limiting member 220 to form a vertical interference surface, which has a large collision area and reliable blocking, and is suitable for scenarios where there is sufficient side wall space in the pull-out module 20.

[0084] Or see Figure 9B The limiting member 220 is disposed on the side wall of the pull-out module 20, and extends to the left or right side of the pull-out module 20. The blocking component 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking component 120 can extend and retract left and right. The unidirectional telescopic layout can reduce the overall height occupation, making it easy to install in compact equipment with limited height, while the lateral blocking facilitates manual operation.

[0085] Or see Figure 9C The limiting member 220 is disposed on the side wall of the pull-out module 20, and extends to the upper or lower side of the pull-out module 20. The blocking component 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking component 120 can extend and retract left and right. The vertically extending limiting member 220 can avoid the pipelines on the side wall, and the horizontally extending blocking member 122 has a fast response speed, which is suitable for layouts with congested side wall space but large top and bottom margins.

[0086] Or see Figure 9D The limiting member 220 is disposed on the side wall of the pull-out module 20, and the limiting member 220 extends to the upper or lower side of the pull-out module 20. The blocking component 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking component 120 can extend and retract vertically. The unidirectional vertical layout can achieve minimal lateral occupation, the blocking force direction is consistent with gravity, and the structure has high stability.

[0087] Or see Figure 9E The limiting member 220 is disposed at the bottom or top of the pull-out module 20, and extends to the upper or lower side of the pull-out module 20. The blocking component 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking component 120 can extend and retract vertically. The limiting member 220 installed at the bottom or top can use the equipment base plate or top plate as a bearing surface to improve stability. The vertically retractable blocking facilitates concealed design and improves the overall aesthetics.

[0088] Or see Figure 9FThe limiting member 220 is disposed at the bottom or top of the pull-out module 20, and extends to the upper or lower side of the pull-out module 20. The blocking component 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking component 120 can extend and retract left and right. This achieves low-level blocking, which is convenient for hidden design and improves the overall aesthetics.

[0089] Alternatively, referring to 9G, the limiting member 220 is disposed at the bottom or top of the pull-out module 20, extending to the left or right side of the pull-out module 20. The blocking assembly 120 is disposed at the end of the fixed module 10, and the blocking member 122 in the blocking assembly 120 can extend and retract vertically. The laterally extending limiting member 220 and the vertically extending blocking member 122 form a large-span interference, which is suitable for wide-body pull-out modules 20 and provides stronger anti-rollover stability.

[0090] Or see Figure 9H The limiting member 220 is set at the bottom or top of the pull-out module 20 and extends to the left or right side of the pull-out module 20. The blocking component 120 is set at the end of the fixed module 10 and the blocking member 122 in the blocking component 120 can extend and retract left and right, occupying little vertical space, which is suitable for scenarios that require multi-layer stacked pull-out devices 2.

[0091] The purely mechanical limit method has a simple structure, strong anti-interference ability compared with the electronic sensor, convenient maintenance, and provides a direct and clear collision sound when blocking a collision, providing clear feedback.

[0092] In some embodiments, optionally (not shown in the figure), when the blocking member 122 and the limiting member 220 abut, a bidirectional blocking mechanism is formed in the sliding direction S to enhance the stability of the pull-out module 20. For example, the fixing member 121 includes a pin sleeve, and the blocking member 122 is a spring pin. The spring pin may include a compression spring and a steel ball, or the blocking member 122 may be an elastic pin that can be compressed as a whole. The limiting member 220 includes a groove, which may match the shape of the steel ball or the head of the elastic pin of the spring pin. The shape of the groove may be conical or arc-shaped. Taking the spring pin as an example, when the limiting member 220 moves to the spring pin position, the end of the spring pin (steel ball) automatically extends into the groove under the action of the spring force and makes a "click" sound, achieving precise positioning and hindering the sliding of the pull-out module 20; during the passing stage, the user continues to apply a pulling force greater than the spring preload along the sliding direction S. The inclined surface of the groove squeezes the end of the spring pin, forcing the spring to compress, the pin to retract and disengage from the groove, allowing the pull-out module 20 to continue sliding smoothly. The spring pin and the arc-shaped groove work together to automatically achieve the blocking action through the spring force, while releasing the block requires an additional force to overcome the spring force. Therefore, this structure achieves automatic locking while allowing smooth sliding after a larger pulling force is applied manually. The spring pin and groove combination is simple and eliminates the hassle of manually or electrically adjusting the extension and retraction of the blocking component. This structure provides clear stopping feel and tactile and audible feedback (a "click" sound when engaged and resistance release when disengaged), improving operational perceptibility and safety. This groove and spring pin design provides bidirectional blocking in the sliding direction S, increasing the stability of the pull-out module 20 when disassembling / pulling out the functional connector 30 and preventing accidental sliding.

[0093] In some embodiments, optionally (not shown in the figures), both the blocking component 120 and the limiting component 220 may include magnets, with the limiting effect achieved by the mutual attraction of the magnets when they approach each other. For example, both the blocking component 122 and the limiting component 220 of the blocking component 120 integrate permanent magnets (such as neodymium iron boron magnets), which are fixed to the corresponding components by adhesive or embedding. When the pull-out module 20 slides and the limiting component 220 approaches the blocking component 122, the magnets attract each other, generating an adsorption force that prevents the pull-out module 20 from sliding further; to release it, a pulling force to overcome the magnetic force must be applied. Assembly is simple; the magnets are simply installed in the predetermined positions, and the limiting function is achieved based on the interaction of magnetic fields. This design eliminates the need for physical contact, reducing wear. Because of the use of magnetic features, these features achieve limiting through non-contact attraction, thus avoiding mechanical collision noise, achieving the technical effects of quiet operation and extended component life.

[0094] In some implementations, see Figure 1 and Figure 5One end 230 of the pull-out module is provided with a connector 240. The connector 240 is, for example, a perforated lug, U-shaped clip, or locking hole fixed to one end 230 of the pull-out module, providing a slot or groove that can mate with the blocking member 122. The blocking member 122 can extend and insert into the connector 240, so that the pull-out module 20 is fixed relative to the fixed module 10 in the sliding direction S. Specifically, when the pull-out module 20 slides to the fully pushed-back or fully pulled-out position, the blocking member 122 is extended manually or automatically, and the blocking member 122 is precisely inserted into the slot or groove of the connector 240. The cooperation between the blocking member 120 and the connector 240 also provides a bidirectional blocking effect in the sliding direction S, fixing the position of the pull-out module 20 when, for example, it is not being pulled out, to prevent accidental sliding. Furthermore, the blocking member 122 in this application serves a dual purpose: it can cooperate with the limiting member 220 for limiting movement, and it can also cooperate with the plug-in member 240 for limiting movement. Overall, it has fewer parts and a simpler structure. It can be understood that the cooperation between the blocking member 122 and the limiting member 220 mainly serves to resist and obstruct movement, emphasizing temporary stopping protection, while the cooperation between the blocking member 122 and the plug-in member 240 serves to lock and fix the movement, which requires relatively higher precision.

[0095] In some implementations, see Figure 3 , Figure 4 Multiple limiting members 220 are arranged along the sliding direction S on the side plate of the pull-out module 20, with equidistant or non-equidistant intervals between them. The interval distance can be customized according to the safe movement distance of the functional connector 30. Each limiting member 220 is installed independently and corresponds to the blocking member 122, realizing multiple pull-out stop positions. Each pull-out stop position can correspond to the safe working area of ​​a functional connector 30. For example, when the pull-out module 20 has two first limiting members 221 and two interfaces of functional connectors 30, the first limiting member 221 can correspond to the interface (e.g., network cable interface) of the first functional connector 30 at the front end of the pull-out module 20, and the second limiting member 222 can correspond to the interface (e.g., power interface) of the second functional connector 30 at the rear end of the pull-out module 20, thereby providing segmented limiting at different positions of the pull-out stroke. By setting multiple limiters 220 at intervals along the sliding direction, the operator can handle the functional connector 30 (such as unplugging the wire) at the stop position, avoiding interference.

[0096] In some implementations, see Figure 3The pull-out module 20 has a connection point 250 for connecting to the functional connector 30. The connection point 250 can be a mounting hole or a standard interface (such as a USB hub, network port, or power socket) on the side plate of the pull-out module 20. In the sliding direction S of the pull-out module 20, a limiting member 220 is disposed between the connection point and one end 230 of the pull-out module. In this application, the limiting member 220 is positioned in front of the connection point 250 (in front in the pull-out direction) to ensure that when the limiting member 220 is blocked by the blocking component 120, the functional connector 30 on the connection point 250 remains in a safe state without interfering with the fixed module 10 and without being excessively pulled, facilitating the operator to perform operations such as unplugging cables to avoid interference.

[0097] In some implementations, see Figure 3 The pull-out module 20 has multiple connection points 250 for connecting to the functional connector 30. These connection points 250 can be mounting holes or standard interfaces (such as USB hubs, network ports, or power sockets) located on the side plate of the pull-out module 20. The pull-out module 20 includes multiple limiting members 220. In the sliding direction S of the pull-out module 20, at least one limiting member 220 can be provided in front of and behind each connection point 250. Alternatively, at least one limiting member 220 can be provided between each two adjacent connection points 250, and at least one limiting member 220 can also be provided on the side of the connection point 250 closest to one end 230 of the pull-out module facing that end 230. By providing a limiting member 220 in front of each connection point 250, the connection points 250 that are prone to interference can stop moving with the pull-out module 20 before interference occurs, facilitating operations such as unplugging cables and avoiding interference. More specifically, alternating limiters 220 and connection points 250 can be sequentially arranged from front to back in the sliding direction S (with the end 230 of the pull-out module being the front). At a certain position, if the safe movement distance of the functional connector 30 is 200mm, the distance between the limiter 220 in front of the functional connector 30 and the blocking member 122 can be set to 150mm. This ensures that when the limiter 220 abuts and stops the pull-out module 20, the corresponding functional connector 30 still has a 50mm safety margin, facilitating the operator's wire-pulling operation.

[0098] Alternatively, multiple connection points 250 can be grouped together, each corresponding to a limiting member 220. For example, when the pull-out module 20 is pulled out to the limiting member 220 and abuts, wire pulling or other processing can be performed simultaneously on the multiple connection points 250 in this group.

[0099] In some implementations, see Figure 2The frame 40 includes frame columns 410, each containing a hollow area 420, which is a rectangular or circular cavity. The hollow area 420 serves both as storage space for the pull-out module 20 and as a space allowing the functional connector 30 to bend and be stored freely. For example, when a limiting member 220 abuts against the blocking assembly 120, the connection point 250 (protected by the limiting member 220) on the side of the limiting member 220 away from one end 230 of the pull-out module is located in the hollow area 420. The functional connector 30 can then hang loosely and coil within the hollow area 420 without being stretched, enabling safe wire pulling operations. Therefore, this application sets the distance between the limiting member 220 and the connection point 250 so that the pull-out module 20 can stop moving before interference, thus facilitating wire pulling operations and avoiding interference.

[0100] In some implementations, see Figure 6 , Figure 7 The pull-out mechanism includes a cable chain 50 and a cable chain support plate 510. The cable chain 50 is typically a link-type structure, long and narrow, composed of multiple hinged links. One end 520 of the cable chain 50 is fixed to the pull-out module 20 and can move along the sliding direction S with the pull-out module 20. The other end 530 of the cable chain 50 is fixed to the cable chain support plate 510, which is fixed relative to the fixed module 10. The cable chain 50 is horizontally positioned, ensuring that the distance between the cable chain 50 and the pull-out module 20 remains constant. This application uses a cable chain to facilitate the convergence of pipelines, and the horizontal positioning of the pipelines improves space utilization.

[0101] When using the aforementioned pull-out mechanism, the corresponding pull-out method may include: moving the pull-out module 20 until the limiting member 220 abuts against the blocking member 122, causing the pull-out module 20 to stop moving; disassembling the functional connector 30 connected to the pull-out module 20; releasing the abutment between the limiting member 220 and the blocking member 122, and continuing to move the pull-out module 20. This segmented pull-out design facilitates operations such as wire unplugging by the operator, thus avoiding interference.

[0102] More specifically, see Figure 8 The entire pull-out process is as follows:

[0103] First, the operator manually or through the control system retracts the blocking member 122 to the retracted state, thereby releasing the pull-out module 20 and disengaging it from the blocking member 122, so that the pull-out module 20 is in an initial state where it can slide freely.

[0104] Subsequently, the operator extends the blocking member 122 to the extended state, at which point the end of the blocking member 122 extends into the preset blocking path.

[0105] Next, the operator pulls the pull-out module 20 along the sliding direction S, and the pull-out module 20 drives the limiting member 220 and the functional connector 30 on it to move synchronously; when the first limiting member 220 (e.g., the first limiting member 221) slides to the position of the blocking component 120, it abuts against the extended blocking member 122, and the pull-out module 20 is forcibly stopped at that position.

[0106] At this point, the pull-out module 20 has sufficient maintenance space, and the operator can safely disassemble the functional connector 30 corresponding to the stop position (e.g., unplug the network cable or power cord). Because the distance between the limiter 220 and the blocking member 122 is pre-designed for this position, it ensures that the functional connector 30 is still in a relaxed state and will not be damaged due to excessive tension or interfere with the frame 40 of the fixed module 10.

[0107] After the functional connector 30 is disassembled, the operator retracts the blocking part 122 again to make it retract and avoid, releases the current limiting part 220, and the pull-out module 20 returns to the sliding state.

[0108] The operator continues to pull the pull-out module 20, and the system or operator determines whether there are still unpassed limit pieces 220 behind the pull-out module 20 in the direction of movement (i.e., the pull-out direction). If there are, for example, a second limit piece 222, the above process is repeated.

[0109] If it is determined that there are no remaining limiting parts 220 behind the pull-out module 20 in the direction of movement, the operator continues to pull the pull-out module 20 until it reaches the sliding limit position (e.g., fully pulled out or stopped by other limiting devices). At this time, all functional connecting parts 30 have been safely removed, and the pull-out module 20 can be completely removed for maintenance or replacement.

[0110] The entire process achieves segmented, controllable, and safe pull-out operation, avoiding the risks of interference, breakage, or equipment damage to functional connectors caused by the traditional "pull all the way" method.

[0111] Example 2

[0112] Reference Figure 10This application also provides an optomechanical system 11. The optomechanical system 11 includes a pull-out device 2 as described in the above embodiments and a light source filtering module 111. The pull-out device 2 is rigidly fixed to the main frame or substrate of the optomechanical system 11 by bolts, clips, or other means, becoming an integrated part of the optomechanical system 11. The light source filtering module 111 is fixedly mounted on the pull-out device 2. The light source filtering module 111 typically contains precision optical components such as filters, lenses, and aperture stops, used for wavelength selection, beam shaping, or intensity control of the incident light source. Since these optical components require regular cleaning, replacement, or calibration, integrating them into the pull-out device 2 greatly facilitates maintenance operations. Under normal operating conditions of the optomechanical system 11, the pull-out device 2 is in the fully pushed-in position. At this time, the light source filter module 111 is located in the optical path. The plug 240 at the end of the pull-out device 2 can cooperate with the blocking part 122 (such as a movable rod) on the fixed module 10 to lock, ensuring that the optical path remains stable and aligned under the vibration environment of the equipment operation. When maintenance is required, the operator first releases the lock (so that the blocking part 122 retracts and disengages from the plug 240), and then the pull-out device 2 together with the light source filter module 111 on it can be pulled outward along the sliding direction S.

[0113] In this embodiment, the optomechanical system 11 integrates a pull-out device 2, which provides physical protection for the light source filter module 111, which is internally delicate and connected to various cables (such as power lines, signal lines, cooling water pipes required to stabilize the temperature of optical components, i.e., functional connectors 30). During the pulling process, each contact between the limiting member 220 and the blocking component 120 signifies a clear operation prompt or cessation, ensuring that the various functional connectors 30 connected to the light source filter module 111 are not excessively stretched and damaged, thereby improving the reliability of the optomechanical system 11 and reducing maintenance costs.

[0114] Example 3

[0115] Reference Figure 11 This application further provides a semiconductor device 1. The semiconductor device 1 may be a lithography machine, a dry etching machine, a thin film deposition equipment, or an optical inspection equipment, etc. The semiconductor device 1 includes an optomechanical system 11 as provided in the above embodiments.

[0116] The optomechanical system 11 is installed inside the equipment cavity or on the worktable. The light beam with a specific wavelength and shape output by the light source filtering module 111 in the optomechanical system 11 ensures the core steps of the semiconductor manufacturing process. For example, it is used for the exposure optical path in a lithography machine and for providing an illumination source in a detection device.

[0117] Because the optomechanical system 11 is integrated into the semiconductor equipment 1, damage to the connection cables of the light source filter module 111 caused by improper maintenance operations is avoided, thereby reducing the downtime of the entire machine caused by module failure. At the same time, when the operator pulls out the light source filter module 111, there is no need to accurately judge the remaining length of the cable. The segmented stop function provided by the pull-out device 2 plays a role in preventing errors and guiding, making the maintenance work faster and safer. It effectively solves the safety and reliability problems in the maintenance process of precision optical modules and provides strong support for the stable operation of high-end semiconductor manufacturing equipment.

[0118] The above embodiments further illustrate the purpose, technical solution, and advantages of this application. It should be understood that the above descriptions are merely embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the principles of this application should be included within the protection scope of this application.

Claims

1. A pull-out device, characterized in that, include: A fixed module, wherein the fixed module is provided with a blocking component; A pull-out module is slidably disposed on the fixed module. The pull-out module is provided with at least one limiting member and at least one functional connector, and the at least one limiting member corresponds to the at least one functional connector. The blocking component is used to abut against each of the limiting members during the sliding of the pull-out module in the sliding direction, so as to prevent the pull-out module from continuing to slide. The distance between each of the limiting members and the blocking components in the sliding direction is less than or equal to the safe movement distance of the corresponding functional connector when it slides along the sliding direction with the pull-out module.

2. The pull-out device according to claim 1, characterized in that, The fixed module includes a frame, and the blocking component includes a fixing member and a blocking member. The fixing member is fixedly connected to the frame, and the blocking member is retractably disposed on the fixing member. When the blocking member is in the extended state, the blocking member blocks the limiting member that slides with the pull-out module to stop the pull-out module from sliding. When the blocking member is in the retracted state, the blocking member avoids the limiting member that slides with the pull-out module so that the pull-out module can continue to slide.

3. The pull-out device according to claim 2, characterized in that, The fixing component is a mounting base, and the blocking component is a movable rod. The movable rod is telescopically mounted on the mounting base to switch between an extended state and a retracted state.

4. The pull-out device according to claim 3, characterized in that, The limiting member is a pin structure that is fixedly connected to or detachably connected to the pull-out module, and the movable rod can abut against the pin structure after it extends.

5. The pull-out device according to claim 2, characterized in that, The fixing component includes a pin sleeve, the blocking component is a spring pin, and the limiting component includes an arc-shaped groove. The spring pin is used to extend into the groove under the action of elastic force when the limiting component moves to the spring pin, thereby preventing the sliding of the pull-out module. The groove is used to overcome the elastic force of the spring pin after the pull-out module continues to be applied in the sliding direction of the pull-out module, and to retract the spring pin and leave the groove, so that the pull-out module can continue to slide.

6. The pull-out device according to any one of claims 1 to 4, characterized in that, The pull-out module has a connector at one end, and the blocking component in the blocking assembly can extend and insert into the connector, so that the pull-out module is fixed relative to the fixed module in the sliding direction of the pull-out module.

7. The pull-out device according to any one of claims 1 to 6, characterized in that, At least one of the limiting members is disposed on the side wall of the pull-out module, and at least one of the limiting members extends to the left or right side of the pull-out module. The blocking assembly is disposed at the end of the fixed module and the blocking member in the blocking assembly can extend and retract left and right. or, At least one of the limiting members is disposed on the side wall of the pull-out module, and at least one of the limiting members extends to the left or right side of the pull-out module. The blocking assembly is disposed at the end of the fixed module and the blocking member in the blocking assembly can extend and retract vertically. or, At least one of the limiting members is disposed on the side wall of the pull-out module, and at least one of the limiting members extends to the upper or lower side of the pull-out module. The blocking assembly is disposed at the end of the fixed module and the blocking member in the blocking assembly can extend and retract left and right. or, At least one of the limiting members is disposed on the side wall of the pull-out module, and at least one of the limiting members extends towards the upper or lower side of the pull-out module; the blocking assembly is disposed at the end of the fixed module, and the blocking member in the blocking assembly is capable of vertical extension and retraction; or... At least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends towards the upper or lower side of the pull-out module; the blocking assembly is disposed at the end of the fixed module, and the blocking member in the blocking assembly is capable of vertical extension and retraction; or... At least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends to the upper or lower side of the pull-out module. The blocking assembly is disposed at the end of the fixed module and the blocking member in the blocking assembly is capable of extending and retracting left and right. or, At least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends to the left or right side of the pull-out module. The blocking assembly is disposed at the end of the fixed module, and the blocking member in the blocking assembly is capable of vertical extension and retraction. or, At least one of the limiting members is disposed at the bottom or top of the pull-out module, and at least one of the limiting members extends to the left or right side of the pull-out module. The blocking assembly is disposed at the end of the fixed module, and the blocking member in the blocking assembly is capable of extending and retracting left and right.

8. The pull-out device according to any one of claims 1 to 7, characterized in that, The number of the at least one limiting member is multiple, and the multiple limiting members are spaced apart along the sliding direction.

9. The pull-out device according to any one of claims 1 to 8, characterized in that, The pull-out module has a connection point for connecting with a functional connector. In the sliding direction of the pull-out module, the limiting member is provided on the connection point in the direction toward one end of the pull-out module.

10. The pull-out device according to any one of claims 1 to 9, characterized in that, The pull-out module has multiple connection points for connecting with functional connectors. The pull-out module includes multiple limiting members. In the sliding direction of the pull-out module, at least one limiting member is provided between two adjacent connection points. At least one limiting member is also provided on the side of the connection point closest to one end of the pull-out module that faces one end of the pull-out module.

11. The pull-out device according to claim 9 or 10, characterized in that, The fixed module includes a frame having a hollow area, and when one of the limiting members interacts with the blocking assembly, the connection point on the side of the limiting member away from one end of the pull-out module is located in the hollow area.

12. An optomechanical system, characterized in that, include: The pull-out device as described in any one of claims 1 to 11.

13. A semiconductor device, characterized in that, include: The optomechanical system as described in claim 12.

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