Nitrogen protection equipment for storing large number of large vertical support plates

Abstract

The invention provides nitrogen protection equipment for storing a large number of large vertical carrying plates, the nitrogen protection equipment is used for storing a carrying plate assembly, the nitrogen protection equipment comprises a sealing frame body composed of a sealing square tube frame and a sealing plate fixed on the sealing square tube frame, a notch is formed in the side wall of the sealing frame body, and a nitrogen hole is formed in the bottom of the sealing frame body; the overturning sealing assembly is arranged on the sealing frame body, and the notch in the sealing frame body is closed or opened through overturning of the overturning sealing assembly; the ventilation assembly is arranged on the upper portion of the sealing frame body, one end of the ventilation assembly extends into the cavity formed by the sealing plates, and the other end of the ventilation assembly extends outwards; a carrier plate driving assembly is installed on the side wall of the sealing frame and used for driving the carrier plate assembly to move so that the carrier plate assembly can be completely contained in the sealing frame. The overturning sealing assembly is opened when the carrier plate needs to enter and exit and closed when sealing is needed, and the effect of process automation is achieved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of storage equipment, in particular to a nitrogen protection equipment for storing a large number of large vertical carrier plates. BACKGROUND

[0002] In the photovoltaic industry, the film coating of silicon wafers is one of the most important processes in the industry chain. However, because the equipment is large and complex, regular maintenance is required before production. The suddenness of equipment failure will produce many silicon wafers that are not completely coated with four layers of film on the production line. If these silicon wafers are not processed, the film coated on them will be contaminated and scrapped. This not only causes cost losses for the enterprise, but also requires time, effort and money to remove the scrapped products from the carrier plate.

[0003] Therefore, there is an urgent need for an equipment for temporarily storing a large number of carrier plates using nitrogen. SUMMARY

[0004] Therefore, the main purpose of the present application is to protect a large number of vertical carrier plates with easy oxidation during equipment maintenance, and to quickly go online after equipment maintenance is completed to continue film coating.

[0005] The present application provides a nitrogen protection equipment for storing a large number of large vertical carrier plates, which is used for storing a carrier plate assembly, the carrier plate assembly comprising a rack, a connecting block fixed below the rack, and a carrier plate mounted on the connecting block, and the nitrogen protection equipment comprising:

[0006] The sealing frame body is composed of a sealing square frame and a sealing plate fixed on the sealing square frame, a slot is formed in the side wall of the sealing frame body, and a nitrogen hole is formed in the bottom of the sealing frame body;

[0007] A turnover sealing assembly is arranged on the sealing frame body, and the slot on the sealing frame body is closed or opened by turning the turnover sealing assembly;

[0008] A gas exchange assembly is arranged on the upper part of the sealing frame body, one end of the gas exchange assembly extends into the cavity composed of the sealing plate, and the other end of the gas exchange assembly extends outward;

[0009] A carrier plate driving assembly is mounted on the side wall of the sealing frame body, and the carrier plate driving assembly is used to drive the carrier plate assembly to move, so that the carrier plate assembly is completely accommodated in the sealing frame body.

[0010] In some embodiments of the present application, the turnover sealing assembly comprises:

[0011] A valve mounting plate is mounted on the sealing frame body by bolts;

[0012] A rotary air cylinder is fixedly mounted on the side wall of the sealing frame body.

[0013] a transmission shaft coaxially connected with an output shaft of the rotary cylinder;

[0014] a bearing seat movably sleeved on the transmission shaft, the bearing seat being installed on the side wall of the valve mounting plate;

[0015] a pressing assembly fixedly sleeved on the transmission shaft; and

[0016] a gate valve plate fixedly connected with the pressing assembly;

[0017] Wherein, the transmission shaft is driven to reciprocate by the rotary cylinder, so that the pressing assembly fixedly sleeved on the transmission shaft drives the gate valve plate to synchronously rotate along the transmission shaft, and then the gate valve plate closes or opens the slot on the sealing frame body.

[0018] In some embodiments of the present application, the carrier plate driving assembly comprises:

[0019] a support assembly fixed on the inner wall of the upper part of the sealing frame body;

[0020] a gear assembly arranged on the support frame, the gear assembly being engaged with the rack;

[0021] a driving assembly fixed on the side wall of the sealing frame body, the driving assembly being in transmission connection with the gear assembly.

[0022] In some embodiments of the present application, the support assembly comprises:

[0023] a fixing seat, a positioning plate being arranged below the fixing seat, the bottom of the positioning plate being fixedly connected with two groups of bearing positioning plates, one group of the bearing positioning plates comprising two bearing positioning plates arranged at intervals;

[0024] support rails respectively arranged on the two bearing positioning plates, the two support rails being oppositely arranged and used for abutting against the bottom of the connecting block;

[0025] guide wheels installed on the side edges of the two support rails, the guide wheels being in contact with the surface of the carrier plate.

[0026] In some embodiments of the present application, the gear assembly comprises a connecting shaft and a gear fixedly sleeved on the connecting shaft;

[0027] Wherein, the connecting shaft is installed on the fixing seat through a bearing, and the connecting shaft is coaxially connected with the output shaft of the driving assembly.

[0028] In some embodiments of the present application, the driving assembly comprises:

[0029] A motor mounting plate fixed on the side wall of the sealed frame body;

[0030] A motor mounted on the motor mounting plate; and

[0031] A shaft coupling coaxially connected with the output shaft of the motor, which is coaxially connected with the connecting shaft.

[0032] In some embodiments of the present application, a base square channel is fixedly mounted on the bottom of the sealed frame body.

[0033] In some embodiments of the present application, the ventilation assembly comprises a fan arranged inside the sealed frame body, and a wind pipe sleeved on the fan.

[0034] The nitrogen protection equipment for storing a large number of large vertical carrier plates provided by the present application adopts a ventilation assembly to discharge the air in the sealed frame body, accelerate the nitrogen filling speed below, and accelerate the nitrogen content rising speed in the sealed frame body, so as to accelerate the rhythm; and the turnover sealing assembly is opened when the carrier plate needs to be in and out, and is closed when it needs to be sealed, thereby playing a role of automatic flow process; and the sealed frame body is used to retain the nitrogen, so that the carrier plate is in a high-nitrogen-concentration sealed space. BRIEF DESCRIPTION OF DRAWINGS

[0035] Fig. 1 An assembly diagram of the nitrogen protection equipment for storing a large number of large vertical carrier plates according to an embodiment of the present application;

[0036] Fig. 2 An assembly diagram of the carrier plate driving assembly of the nitrogen protection equipment for storing a large number of large vertical carrier plates according to an embodiment of the present application;

[0037] Fig. 3 An assembly diagram of the support assembly of the nitrogen protection equipment for storing a large number of large vertical carrier plates according to an embodiment of the present application.

[0038] In the above drawings, the following reference signs are used:

[0039] 1-1, air exchange assembly; 1-2, turnover sealing assembly; 1-2-1, valve mounting plate; 1-2-2, gate valve plate; 1-2-3, transmission shaft; 1-2-4, pressing assembly; 1-2-5, rotary cylinder; 1-2-6, bearing seat; 1-3, carrier plate driving assembly; 1-4, sealing frame; 1-4-1, driving assembly; 1-4-2, gear assembly; 1-4-21, gear; 1-4-22, connecting shaft; 1-4-3, supporting assembly; 1-4-31, fixing seat; 1-4-32, bearing positioning plate; 1-4-33, positioning plate; 1-4-34, supporting guide rail; 1-4-35, guide wheel; 1-4-4, carrier plate assembly; 1-4-41, rack; 1-4-42, connecting block; 1-4-43, carrier plate; 1-5, base square channel frame. DETAILED DESCRIPTION

[0040] The application will be further described below in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related application, and are not a limitation on the application. In addition, it should be noted that only the parts related to the application are shown in the drawings for ease of description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The application will be described in detail below with reference to the drawings and in conjunction with the embodiments.

[0041] Please refer to Figs. 1-3 , which shows a nitrogen protection equipment for storing a large number of large vertical carrier plates, which is used for storing a carrier plate assembly 1-4-4, the carrier plate assembly 1-4-4 includes a rack 1-4-41, a connecting block 1-4-42 fixed below the rack 1-4-41, and a carrier plate 1-4-43 mounted on the connecting block 1-4-42, and the nitrogen protection equipment includes: the sealing frame 1-4 composed of a sealing square channel frame and a sealing plate fixed on the sealing square channel frame, a notch is formed on the side wall of the sealing frame 1-4, and a nitrogen hole is formed on the bottom of the sealing frame 1-4; a turnover sealing assembly 1-2 is arranged on the sealing frame 1-4, the turnover sealing assembly 1-2 is turned to close or open the notch on the sealing frame 1-4; an air exchange assembly 1-1 is arranged on the upper part of the sealing frame 1-4, one end of the air exchange assembly 1-1 extends into the cavity composed of the sealing plate, and the other end of the air exchange assembly 1-1 extends outward; a carrier plate driving assembly 1-3 is mounted on the side wall of the sealing frame 1-4, and the carrier plate driving assembly 1-3 is used to drive the carrier plate assembly 1-4-4 to move, so that the carrier plate assembly 1-4-4 is completely accommodated in the sealing frame 1-4.

[0042] Applying the technical solution of this embodiment, when it is necessary to store the carrier plate 1-4-43 in the carrier plate assembly 1-4-4, the slot on the sealing frame 1-4 is opened by flipping the sealing assembly 1-2. At this time, the carrier plate driving assembly 1-3 works to drive the carrier plate assembly 1-4-4 to move. When the carrier plate assembly 1-4-4 is completely contained in the sealing frame 1-4, the sealing assembly 1-2 is flipped again to close the slot on the sealing frame 1-4. After closing, nitrogen is introduced into the sealing frame 1-4 through the nitrogen port and the gas exchange assembly 1-1 is turned on to accelerate the gas exchange in the sealing frame 1-4.

[0043] Regarding the specific structure of the flip-sealing assembly 1-2, the flip-sealing assembly 1-2 includes: a valve mounting plate bolted to the sealing frame 1-4; a rotary cylinder fixedly mounted on the side wall of the sealing frame 1-4; a transmission shaft coaxially connected to the output shaft of the rotary cylinder; a bearing seat movably sleeved on the transmission shaft, the bearing seat being mounted on the side wall of the valve mounting plate; a clamping assembly fixedly sleeved on the transmission shaft; and a valve plate fixedly connected to the clamping assembly; wherein, the rotary cylinder drives the transmission shaft to reciprocate, causing the clamping assembly fixedly sleeved on the transmission shaft to drive the valve plate to rotate synchronously along the transmission shaft, thereby the valve plate closing or opening the slot on the sealing frame 1-4.

[0044] For the specific structure of carrier board drive assemblies 1-3, please refer to [link / reference]. Fig. 2 The carrier plate driving assembly 1-3 includes: a support assembly 1-4-3 fixed to the upper inner wall of the sealing frame 1-4; a gear assembly 1-4-2 disposed on the support frame, the gear assembly 1-4-2 meshing with the rack; and a driving assembly 1-4-1 fixed to the side wall of the sealing frame 1-4, the driving assembly 1-4-1 being connected to the gear assembly 1-4-2 in a transmission manner.

[0045] For the specific structure of support component 1-4-3, please refer to [link / reference]. Fig. 3 The support assembly 1-4-3 includes: a fixed base 1-4-31, a positioning plate 1-4-33 disposed below the fixed base 1-4-31, and two sets of bearing positioning plates 1-4-32 fixedly connected to the bottom of the positioning plate 1-4-33, each set of bearing positioning plates including two bearing positioning plates 1-4-32 arranged at intervals; support guide rails 1-4-34 respectively disposed on the two bearing positioning plates 1-4-32, the two support guide rails 1-4-32 being arranged opposite to each other and used to abut against the bottom of the connecting block; and guide wheels 1-4-35 installed on the sides of the two support guide rails, the guide wheels 1-4-35 contacting the surface of the carrier plate.

[0046] Specifically, the gear assembly 1-4-2 includes a connecting shaft 1-4-22 and a gear 1-4-21 fixedly sleeved on the connecting shaft 1-4-22; wherein, the connecting shaft 1-4-22 is mounted on the fixed seat 1-4-31 by bearings, and the connecting shaft 1-4-22 is coaxially connected to the output shaft of the drive assembly 1-4-1.

[0047] Specifically, the drive assembly 1-4-1 includes: a motor mounting plate fixed on the side wall of the sealing frame 1-4; a motor mounted on the motor mounting plate; and a coupling coaxially connected to the output shaft of the motor, the coupling being coaxially connected to the connecting shaft.

[0048] Specifically, a base square tube frame 1-5 is fixedly installed at the bottom of the sealing frame 1-4.

[0049] Specifically, the ventilation assembly 1-1 includes a fan disposed inside the sealing frame 1-4, and a duct sleeved on the fan.

[0050] The above descriptions are merely some embodiments of the present invention. Those skilled in the art can make various modifications and improvements without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. A nitrogen-protected device for storing a large number of large vertical carrier plates, used for storing carrier plate assemblies, the carrier plate assembly comprising a rack, a connecting block fixed below the rack, and carrier plates mounted on the connecting block, characterized in that, Nitrogen protection equipment includes: The sealing frame is composed of a sealing square tube frame and a sealing plate fixed on the sealing square tube frame. The sealing frame has a slot on its side wall and a nitrogen hole at its bottom. The flip-up sealing component installed on the sealing frame can be flipped to close or open the slot on the sealing frame. A ventilation assembly is provided on the upper part of the sealing frame, one end of which extends into the cavity formed by the sealing plate, and the other end of which extends outward. A carrier plate driving assembly is installed on the side wall of the sealing frame. The carrier plate driving assembly is used to drive the carrier plate assembly to move so that the carrier plate assembly is completely housed in the sealing frame.

2. The nitrogen protection device for storing a large number of large vertical carrier plates according to claim 1, characterized in that, The flip-sealing assembly includes: Valve mounting plate that is bolted to the sealing frame; A rotary cylinder fixedly installed on the side wall of the sealing frame; A drive shaft coaxially connected to the output shaft of the rotary cylinder; A bearing housing is movably sleeved on the drive shaft, and the bearing housing is mounted on the side wall of the valve mounting plate; A clamping assembly fixedly sleeved on the drive shaft; and The valve plate is fixedly connected to the clamping assembly; The rotary cylinder drives the transmission shaft to reciprocate, causing the clamping assembly fixedly sleeved on the transmission shaft to drive the valve plate to rotate synchronously along the transmission shaft, thereby the valve plate closing or opening the slot on the sealing frame.

3. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 1, characterized in that, The carrier board driving assembly includes: A support assembly fixed to the upper inner wall of the sealing frame; A gear assembly is mounted on the support frame, and the gear assembly meshes with the rack. A drive assembly is fixed to the side wall of the sealing frame, and the drive assembly is connected to the gear assembly for transmission.

4. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 3, characterized in that, The support components include: A fixed base is provided with a positioning plate below the fixed base. Two sets of bearing positioning plates are fixedly connected to the bottom of the positioning plate. Each set of bearing positioning plates includes two bearing positioning plates arranged at intervals. Supporting guide rails are respectively set on the two bearing positioning plates, the two supporting guide rails are arranged opposite to each other, and the two supporting guide rails are used to abut against the bottom of the connecting block; Guide wheels are mounted on the sides of the two supporting guide rails, and the guide wheels are in contact with the surface of the carrier plate.

5. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 3, characterized in that, The gear assembly includes a connecting shaft and a gear fixedly sleeved on the connecting shaft; The connecting shaft is mounted on the fixed base via bearings, and the connecting shaft is coaxially connected to the output shaft of the drive assembly.

6. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 5, characterized in that, The driving component includes: A motor mounting plate fixed to the side wall of the sealing frame; The motor mounted on the motor mounting plate; and A coupling coaxially connected to the output shaft of the motor, wherein the coupling is coaxially connected to the connecting shaft.

7. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 1, characterized in that, A base square tube frame is fixedly installed at the bottom of the sealing frame.

8. A nitrogen protection device for storing a large number of large vertical carrier plates according to claim 1, characterized in that, The ventilation assembly includes a fan disposed inside the sealed frame and a duct sleeved on the fan.

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