A vacuum glass thickness measuring instrument

By combining a laser thickness measuring instrument with multiple detectors and a PLC control system, the measurement error caused by sealing leakage in vacuum glass thickness measurement has been solved, achieving accurate detection of vacuum level and thickness, and improving the reliability of measurement results and production efficiency.

CN121540067BActive Publication Date: 2026-04-10LIANYUNGANG RUNHETONG ENERGY SAVING GLASS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2026-01-21
Publication Date
2026-04-10

AI Technical Summary

Technical Problem

Existing vacuum glass thickness measuring instruments cannot accurately determine the accuracy of measurement results when the vacuum level decreases due to sealing leakage, resulting in unreliable measurement results and affecting the accuracy of the final thickness result.

Method used

A laser thickness measuring device is used in combination with a main scattering detector, a forward small-angle scattering detector, and a transmission signal detector to form a full-angle scattering field acquisition matrix, which enables accurate detection of vacuum degree. The PLC control system judges invalid measurement results to prevent them from being mixed with accurate results. At the same time, a dual-wavelength laser system is used for multi-parameter measurement.

Benefits of technology

It achieves precision and comprehensiveness in vacuum glass thickness measurement, avoids measurement errors caused by sealing leaks, improves the reliability and accuracy of measurement results, and reduces the generation of defective products.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a kind of vacuum glass thickness measuring instrument, it is related to vacuum glass thickness measurement technical field, including base and PLC control system, the top of the base is provided with thickness measuring mechanism.The application uses, while laser thickness measurement, main scattering detector circumferential rotation is collected the scattering signal when laser passes through vacuum cavity in different positions;Forward small-angle scattering detector accurately collects small-angle region scattered light;Backward transmission signal detector collects the direct transmission light signal after laser penetration cavity, as laser energy benchmark value, eliminate the vacuum degree misjudgment caused by laser power fluctuation, form full-angle scattering field acquisition matrix, realize vacuum degree accurate detection.When PLC control system determines that vacuum degree appears drop, first time triggers thickness measuring mechanism to stop thickness measurement, and judges this time as invalid measurement result, not included in accurate measurement result.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum glass thickness measurement, in particular to a vacuum glass thickness measuring instrument. BACKGROUND

[0002] Vacuum glass is a new type of energy-saving glass, which is made of two or more flat glass plates separated by an array of supports, and the glass is sealed around the perimeter with low-melting-point glass to form a sealed cavity, and the air in the cavity is then pumped out to a vacuum state to produce a glass product. It is widely used in fields such as building doors and windows, curtain walls, cold chain equipment, and rail transit. The thickness parameter of vacuum glass is directly related to product performance, production process stability and safety in use. By measuring the thickness deviation data of vacuum glass, problems in the production process can be located and process parameters can be adjusted.

[0003] In the prior art, traditional measuring instruments can generally only measure thickness. When vacuum glass leaks, it will cause the vacuum degree to drop, which will affect the accuracy of the thickness measurement of the vacuum glass cavity, resulting in that the measurement results of this time do not have reference value. However, since the measuring instrument cannot judge the accuracy of each measurement result of the vacuum glass, the measurement results without reference value will be mixed with the accurate measurement results, causing the final thickness result analysis to deviate, thereby affecting the accuracy of the thickness measurement result of the vacuum glass.

[0004] Therefore, we propose a vacuum glass thickness measuring instrument to solve the problems raised in the background art. SUMMARY

[0005] The purpose of the present application is to provide a vacuum glass thickness measuring instrument to solve the problem that when the vacuum degree drops due to sealing leakage during the thickness measurement of vacuum glass, the measurement results of this time do not have reference value, and the traditional measuring instrument cannot judge the accuracy of each measurement result, resulting in that the measurement results without reference value are mixed with the accurate measurement results, causing the final thickness result analysis to deviate.

[0006] To achieve the above purpose, the present application provides the following technical scheme: a vacuum glass thickness measuring instrument, comprising a base and a PLC control system, the top of the base is provided with a thickness measuring mechanism, the inside of the thickness measuring mechanism is provided with an auxiliary measuring mechanism and a cleaning mechanism;

[0007] The thickness measuring mechanism comprises a laser thickness measuring device for laser thickness measurement of vacuum glass;

[0008] The auxiliary measuring mechanism comprises a first measuring assembly and a second measuring assembly, the first measuring assembly comprises a main scattering detector for collecting scattering signals when laser passes through the vacuum cavity to detect the vacuum degree;

[0009] The first measurement component further comprises a small-angle scattering detector arranged at a small angle for capturing weak scattering signals when the vacuum degree slightly decreases, thereby realizing early warning of the vacuum degree.

[0010] The second measurement component comprises a transmission signal detector coaxial with the laser emission light path for collecting direct transmission signals after the laser penetrates the vacuum cavity, calibrating laser energy attenuation, and eliminating system errors.

[0011] Preferably, the thickness measurement mechanism further comprises a first servo moving system, a moving frame is arranged on the top of the first servo moving system, a second servo moving system is fixedly installed on the top of the outer surface of one side of the moving frame, a moving block is arranged on the bottom of the second servo moving system, the laser thickness gauge is installed on the bottom of the moving block, the PLC control system is installed on the other side of the outer surface of the moving frame, and the first servo moving system is installed on the top of the base.

[0012] Preferably, the first measurement component further comprises a ring-shaped plate, an inner ring gear is fixedly installed in the inner part of the ring-shaped plate, a movable frame is movably embedded in the inner part of the inner ring gear, a first forward-reverse motor is fixedly installed on the top surface in the inner part of the movable frame, an outer gear is fixedly installed on the output end of the first forward-reverse motor, slide rod pieces are fixedly installed on the edges of the top and bottom surfaces in the inner part of the movable frame, and grooves are formed in the top and bottom of the inner ring gear.

[0013] Preferably, a small-angle mounting plate is fixedly installed on the outer surface of the small-angle scattering detector, the top of the small-angle mounting plate is fixedly installed on the edge of the bottom of the moving block, a plurality of reinforcing rods are fixedly installed on the outer surface of the ring-shaped plate, one end of each of the reinforcing rods is fixedly installed on the four sides of the moving block, the outer gear is meshingly connected with the inner ring gear, a rotating column is fixedly installed on the bottom of the outer gear, and the bottom end of the rotating column is movably embedded in the bottom surface in the inner part of the movable frame.

[0014] Preferably, a main mounting plate is fixedly installed on the bottom of the movable frame, the main scattering detector is fixedly installed on the outer surface of the main mounting plate, a ring-shaped rail is arranged on the top of the movable frame, a sliding block is movably embedded in the inner part of the ring-shaped rail, the bottom of the sliding block is fixedly installed on the top of the movable frame, a fixed rod is fixedly installed on the top of the ring-shaped rail, and the top end of each of a plurality of fixed rods is fixedly installed on the outer surface of each of a plurality of reinforcing rods.

[0015] Preferably, the second measuring assembly further comprises a connecting frame, the top and bottom of the connecting frame are movably embedded with two guide rails, the transmission signal detector is fixedly installed on the bottom surface in the connecting frame, and the outer surface of the connecting frame is fixedly installed with an annular frame, the inner wall of the annular frame is fixedly installed on the outer surface of the plurality of reinforcing rods, and the two guide rails are fixedly installed on the top surface and the bottom surface in the moving frame, respectively.

[0016] Preferably, the auxiliary measuring mechanism further comprises a pushing assembly, the pushing assembly comprises a carrying table, the front surface of the carrying table is fixedly installed with an extension plate, the rear surface of the carrying table is fixedly installed with a fixing frame, the inside of the fixing frame is fixedly installed with a multi-stage electric push rod, one end of the multi-stage electric push rod is fixedly installed with a positioning frame, and the bottom end of the carrying table is fixedly installed on the top of the base.

[0017] Preferably, the cleaning mechanism comprises a second forward-reverse motor, the output end of the second forward-reverse motor is fixedly installed with a cleaning frame, the inside of the cleaning frame is movably embedded with a movable strip, the bottom of the movable strip is respectively installed with anti-static cotton and cleaning cotton, the edge of the bottom of the cleaning frame is fixedly installed with an ion generator, a plurality of pressing grooves are formed in the top of the movable strip, the two sides of the bottom of the movable strip are provided with elastic plates, the bottom of the two elastic plates is fixedly connected with a plurality of springs, and one end of the plurality of springs is respectively fixedly installed at the two sides of the inside bottom of the cleaning frame.

[0018] Preferably, the outer surface of the cleaning frame is fixedly installed with a supporting frame, the top surface in the supporting frame is fixedly installed with a hydraulic cylinder, one end of the hydraulic cylinder is fixedly installed with a fixed strip, and the bottom of the fixed strip is fixedly installed with a plurality of pressing rods.

[0019] Preferably, the top of the cleaning frame is provided with an arc-shaped rail, the inside of the arc-shaped rail is movably embedded with a limiting rod, the bottom end of the limiting rod is fixedly installed at the front surface of the top of the cleaning frame, the second forward-reverse motor is installed at the edge of the front surface of the carrying table through an auxiliary frame, the bottom end of the plurality of pressing rods is movably penetrated into the inside of the cleaning frame and movably embedded in the plurality of pressing grooves.

[0020] Compared with the prior art, the present application has the following advantages:

[0021] 1、The application uses, laser thickness measurement, the main scattering detector maintains 45° angle position, the circumferential rotation collects the scattering signal of laser passing through the vacuum cavity at different positions, calculates the vacuum degree; The forward small-angle scattering detector accurately collects the scattered light in the small-angle area, realizes the early prediction of the vacuum degree drop; The backward transmission signal detector collects the direct transmission light signal after the laser penetrates the cavity, as the laser energy benchmark value, eliminates the vacuum degree misjudgment caused by the laser power fluctuation, forms a full-angle scattering field collection matrix, realizes the accurate detection of the vacuum degree. When the PLC control system determines that the vacuum degree decreases, the thickness measurement mechanism stops thickness measurement at the first time, and judges that this is an invalid measurement result, which is not included in the accurate measurement result for unified analysis and processing, so as to avoid mixing invalid results into accurate results.

[0022] 2、The application uses, the laser thickness measurement device adopts a dual-wavelength laser system, a combination of red light and infrared light, which undertakes different interface measurement tasks, can measure the upper glass thickness, vacuum cavity thickness and overall thickness of vacuum glass at the same time, without the need to replace the measurement mode or adjust the equipment multiple times. Through the driving of the first servo moving system and the second servo moving system, the dual-wavelength laser thickness measurement of the vacuum glass at different positions is realized.

[0023] 3、The application uses, the hydraulic cylinder pushes the fixed bar and the pressing rod to move downward, the movable bar pushes the cleaning cotton and the anti-static cotton to move downward, and the top surface of the vacuum glass is kept consistent. The second forward and reverse motor drives the cleaning frame to rotate, so that the cleaning cotton and the anti-static cotton wipe the glass surface twice and conduct static electricity, then the ion generator releases a large amount of ions, eliminates static electricity, prevents dust resorption, improves the cleanliness of the vacuum glass surface, and avoids the adverse effect of dust and impurities on subsequent laser thickness measurement.

[0024] 4、The application uses, when the first measurement assembly and the second measurement assembly detect that the vacuum degree in the vacuum cavity decreases, the PLC control system controls the thickness measurement mechanism to close, stops the laser thickness measurement, and at the same time, the multi-stage electric push rod starts, moves the unqualified vacuum glass from the measurement area to the extension plate through the positioning frame, prompts the staff to replace the vacuum glass for detection, at the same time, analyzes the sealing leakage of the unqualified vacuum glass, adjusts the related parameters of the vacuum glass sealing processing, and avoids more unqualified products. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is a whole structure schematic view of the vacuum glass thickness measurement instrument of the application;

[0026] Figure 2 It is a structure schematic view of the thickness measurement mechanism in the vacuum glass thickness measurement instrument of the application;

[0027] Figure 3 It is a structure schematic view of the second measuring component in the vacuum glass thickness measuring instrument of the present application;

[0028] Figure 4 It is a structure schematic view of the first measuring component in the vacuum glass thickness measuring instrument of the present application;

[0029] Figure 5 It is a structure sectional view schematic of the inner ring gear in the vacuum glass thickness measuring instrument of the present application;

[0030] Figure 6 It is a structure schematic view of the second measuring component in the vacuum glass thickness measuring instrument of the present application;

[0031] Figure 7 It is a structure development schematic view of the cleaning mechanism in the vacuum glass thickness measuring instrument of the present application;

[0032] Figure 8 It is a structure schematic view of the cleaning frame in the vacuum glass thickness measuring instrument of the present application;

[0033] Figure 9 It is a structure schematic view of the cleaning cotton in the vacuum glass thickness measuring instrument of the present application;

[0034] Figure 10 It is a structure development schematic view of the elastic plate in the vacuum glass thickness measuring instrument of the present application.

[0035] In the figure:

[0036] 1, base; 2, thickness measuring mechanism; 201, first servo moving system; 202, moving frame; 203, second servo moving system; 204, moving block; 205, laser thickness measuring device; 3, auxiliary measuring mechanism; 31, first measuring assembly; 3101, small-angle scattering detector; 3102, small-angle mounting plate; 3103, main scattering detector; 3104, annular plate; 3105, inner ring gear; 3106, movable frame; 3107, first forward-reverse motor; 3108, outer gear; 3109, sliding rod piece; 3110, sliding groove; 3111, rotating column; 3112, main mounting plate; 3113, annular rail; 3114, sliding block; 3115, reinforcing rod; 3116, fixed rod; 32, second measuring assembly; 3201, connecting frame; 3202, transmission signal detector; 3203, guide rail; 3204, annular frame; 33, pushing assembly; 3301, object table; 3302, extension plate; 3303, fixed frame; 3304, multi-stage electric push rod; 3305, positioning frame; 4, cleaning mechanism; 401, second forward-reverse motor; 402, cleaning frame; 403, arc-shaped rail; 404, limiting rod; 405, support frame; 406, hydraulic cylinder; 407, fixed bar; 408, pressing rod; 409, ion generator; 410, movable bar; 411, anti-static cotton; 412, cleaning cotton; 413, elastic plate; 414, spring; 415, pressing groove; 5, PLC control system. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0038] Embodiment one: please refer to Figures 1-10The invention provides a technical scheme: a vacuum glass thickness measuring instrument, comprising a base 1 and a PLC control system 5, the top of the base 1 is provided with a thickness measuring mechanism 2, the inside of the thickness measuring mechanism 2 is provided with an auxiliary measuring mechanism 3 and a cleaning mechanism 4; the thickness measuring mechanism 2 comprises a laser thickness measuring device 205 for laser thickness measurement of the vacuum glass; the auxiliary measuring mechanism 3 comprises a first measuring assembly 31 and a second measuring assembly 32, the first measuring assembly 31 comprises a main scattering detector 3103 for collecting scattering signals when laser passes through the vacuum cavity to detect the vacuum degree; the first measuring assembly 31 further comprises a small-angle scattering detector 3101 which is arranged at a small angle for capturing weak Rayleigh scattering signals when the vacuum degree slightly decreases to realize early warning of the vacuum degree; the second measuring assembly 32 comprises a transmission signal detector 3202 coaxial with the laser emission light path for collecting direct transmission signals after the laser penetrates the vacuum cavity to calibrate laser energy attenuation and eliminate system error. The thickness measuring mechanism 2 further comprises a first servo moving system 201, the top of the first servo moving system 201 is provided with a moving frame 202, the top of one side of the outer surface of the moving frame 202 is fixedly installed with a second servo moving system 203, the bottom of the second servo moving system 203 is provided with a moving block 204, the laser thickness measuring device 205 is installed at the bottom of the moving block 204, the PLC control system 5 is installed on the other side of the outer surface of the moving frame 202, and the first servo moving system 201 is installed on the top of the base 1. The first measuring assembly 31 further comprises an annular plate 3104, the inside of the annular plate 3104 is fixedly installed with an inner ring gear 3105, the inside of the inner ring gear 3105 is movably embedded with a movable frame 3106, the top surface inside the movable frame 3106 is fixedly installed with a first reversible motor 3107, the output end of the first reversible motor 3107 is fixedly installed with an outer gear 3108, the edges of the top surface and the bottom surface inside the movable frame 3106 are both fixedly installed with a sliding rod 3109, the top and the bottom of the inner ring gear 3105 are both provided with a sliding groove 3110, and the outer surfaces of the two sliding rods 3109 are movably embedded in the interiors of the two sliding grooves 3110. The outer surface of the small-angle scattering detector 3101 is fixedly installed with a small-angle mounting plate 3102, the top of the small-angle mounting plate 3102 is fixedly installed at the edge of the bottom of the moving block 204, the outer surface of the annular plate 3104 is fixedly installed with a plurality of reinforcing rods 3115, one end of the plurality of reinforcing rods 3115 is respectively fixedly installed on the four sides of the moving block 204, the outer gear 3108 is in meshing connection with the inner ring gear 3105, the bottom of the outer gear 3108 is fixedly installed with a rotating column 3111, and the bottom end of the rotating column 3111 is movably embedded in the bottom surface inside the movable frame 3106.The bottom of the movable frame 3106 is fixedly installed with a main mounting plate 3112, and the main scattering detector 3103 is fixedly installed on the outer surface of the main mounting plate 3112. The top of the movable frame 3106 is provided with an annular rail 3113, the inside of the annular rail 3113 movably embeds a sliding block 3114, the bottom of the sliding block 3114 is fixedly installed on the top of the movable frame 3106, the top of the annular rail 3113 is fixedly installed with a fixed rod 3116, and the top ends of a plurality of fixed rods 3116 are respectively fixedly installed on the outer surfaces of a plurality of reinforcing rods 3115. The second measurement assembly 32 further comprises a connecting frame 3201, the top and bottom of the connecting frame 3201 movably embed two guide rails 3203, the transmission signal detector 3202 is fixedly installed on the bottom surface inside the connecting frame 3201, the outer surface of the connecting frame 3201 is fixedly installed with an annular frame 3204, the inner wall of the annular frame 3204 is fixedly installed on the outer surfaces of a plurality of reinforcing rods 3115, and the two guide rails 3203 are respectively fixedly installed on the top surface and the bottom surface inside the moving frame 202.

[0039] In this embodiment, in use, the laser thickness gauge 205 is started, a laser beam is emitted to the surface of the upper glass, part of the signal is captured after the laser beam is reflected by the surface of the upper glass, and another part of the laser is transmitted through the upper glass, reflected by the interface between the vacuum cavity and the lower glass, and then the captured signal is transmitted to the PLC control system 5 for identification and analysis processing, the thickness of the upper glass, the thickness of the vacuum cavity and the overall thickness are calculated, and the thickness measurement of the vacuum glass is realized. The first servo moving system 201 is started to drive the laser thickness gauge 205 and the auxiliary measurement mechanism 3 to move laterally, and the second servo moving system 203 drives the laser thickness gauge 205 and the auxiliary measurement mechanism 3 to move longitudinally, so as to measure the thickness of the vacuum glass at different positions and improve the accuracy and comprehensiveness of the thickness measurement result. The laser thickness gauge 205 adopts a dual-wavelength laser system, a combination of red light and infrared light, which respectively undertakes the measurement task of different interfaces, and can simultaneously measure the thickness of the upper glass, the thickness of the vacuum cavity and the overall thickness of the vacuum glass. The measurement mode does not need to be replaced or the equipment does not need to be adjusted for multiple times. While the thickness is measured, the auxiliary measurement mechanism 3 is started. When the vacuum cavity of the vacuum glass is sealed and leaks, the concentration of residual gas molecules in the cavity will increase, Rayleigh scattering occurs between the laser and the gas molecules, the laser energy is dispersed to the surrounding, a scattered light field is formed, the main scattering detector 3103 is located at an angle of 45° with the laser emission light path, and is specially used to collect the scattering signal when the laser passes through the vacuum cavity and transmit the scattering signal to the PLC control system 5. The logarithmic relationship curve between the scattering signal intensity and the vacuum degree is calibrated in advance, the scattering signal intensity is substituted into the curve to calculate the vacuum degree value, and the consistency between the scattering signal intensity and the thickness fluctuation is verified by combining the thickness measurement data, so as to realize the change of the vacuum degree in the vacuum cavity. The angle between the forward small-angle scattering detector 3101 and the laser emission light path is 15°, which is closer to the laser direct light path. When the vacuum degree decreases slightly, the residual gas molecules in the cavity are few, the scattered light is mainly concentrated in the small-angle range close to the laser direct light path, and the forward small-angle scattering detector 3101 can accurately collect the scattered light in the area when the main scattering detector 3103 cannot capture the weak signal, so as to realize the early prediction of the decrease of the vacuum degree. The scattered light generated by the scratch and coating defect on the surface of the glass is mainly large-angle diffuse reflection, and the signal intensity in the forward small-angle range is extremely low. The Rayleigh scattering of the gas molecules is dominant in the small-angle range, the interference of the glass defect can be excluded by the difference in signal intensity, and the misjudgment can be avoided.The transmission signal detector 3202 is located below the vacuum glass and coaxial with the laser emission light path (the included angle is 180°), the probe is directly opposite the transmission light path after the laser penetrates the glass, and it is ensured that the transmission signal collected is the direct transmission light after the laser penetrates the cavity; when the laser penetrates the vacuum glass, the energy attenuation caused by the absorption of the glass substrate or the reflection of the coating will occur, and the transmission signal strength collected by the backward transmission signal detector 3202 can be used as a laser energy reference value to correct the scattering signal strength of the main scattering detector 3103 and the forward small-angle scattering detector 3101, and eliminate the false judgment of the vacuum degree caused by the fluctuation of the laser power; when the transmission signal strength is normal but the scattering signal is abnormally high, it can be judged that the vacuum degree is decreased; if the transmission signal and the scattering signal are abnormal at the same time, it can be judged that the glass or the coating is defective, and the signal cross verification is formed, which improves the reliability of the detection result. The main scattering detector 3103, the forward small-angle scattering detector 3101 and the backward transmission signal detector 3202 in the auxiliary measurement mechanism 3 are combined to form a full-angle scattering field acquisition matrix, the forward small-angle scattering detector 3101 is responsible for early warning of low vacuum deviation and capturing weak scattering signals, the main scattering detector 3103 is responsible for quantitative detection of medium and high vacuum deviation, the scattering signal strength at this angle has a linear relationship with the vacuum degree, and is the core data source for calculating the vacuum degree, and the backward transmission signal detector 3202 is responsible for signal calibration and interference elimination, and realizes accurate detection of the vacuum degree. When the PLC control system 5 judges that the vacuum degree decreases, the thickness measurement mechanism 2 stops thickness measurement at the first time, and judges that this measurement result is invalid and is not included in the accurate measurement result for unified analysis and processing, then the unqualified vacuum glass is pushed out of the measurement area by the pushing assembly 33, prompting the staff to replace the vacuum glass for detection, at the same time, the unqualified vacuum glass is analyzed for sealing leakage, the related parameters of the vacuum glass sealing process are adjusted, and more unqualified products are avoided, solving the problem that when the vacuum degree decreases due to sealing leakage during the thickness measurement process of the vacuum glass, the measurement result at this time does not have reference value, and the traditional measuring instrument cannot judge the accuracy of each measurement result, resulting in that the measurement result without reference value is mixed into the accurate measurement result, causing deviation in the final thickness result analysis.

[0040] Further, the first positive and negative motor 3107 is started, the outer gear 3108 is driven to rotate inside the inner ring gear 3105, and then the movable frame 3106 is driven to rotate in the inner ring gear 3105, so that the main scattering detector 3103 rotates around the circumference of the laser thickness measuring device 205, and the scattering signal at different angles and positions can be collected, and the accuracy of the scattering signal collection of the main scattering detector 3103 is improved.

[0041] Embodiment two: as Figure 3 and Figures 6-10As shown, the cleaning mechanism 4 comprises a second reversible motor 401, the output end of the second reversible motor 401 is fixedly installed with a cleaning frame 402, the inside of the cleaning frame 402 is movably embedded with a movable strip 410, the bottom of the movable strip 410 is respectively installed with anti-static cotton 411 and cleaning cotton 412, the edge of the bottom of the cleaning frame 402 is fixedly installed with an ion generator 409, the top of the movable strip 410 is provided with a plurality of pressing grooves 415, the two sides of the bottom of the movable strip 410 are both provided with elastic plates 413, the bottom of the two elastic plates 413 are both fixedly connected with a plurality of springs 414, one end of the plurality of springs 414 are respectively fixedly installed at the two sides of the inside bottom of the cleaning frame 402. The outer surface of the cleaning frame 402 is fixedly installed with a supporting frame 405, the top surface of the inside of the supporting frame 405 is fixedly installed with a hydraulic cylinder 406, one end of the hydraulic cylinder 406 is fixedly installed with a fixed strip 407, the bottom of the fixed strip 407 is fixedly installed with a plurality of pressing rods 408. The top of the cleaning frame 402 is provided with an arc-shaped rail 403, the inside of the arc-shaped rail 403 is movably embedded with a limiting rod 404, the bottom end of the limiting rod 404 is fixedly installed at the front surface of the top of the cleaning frame 402, the second reversible motor 401 is installed at the edge of the front surface of the object table 3301 through an auxiliary frame, the bottom end of the plurality of pressing rods 408 are all movably penetrated into the inside of the cleaning frame 402 and movably embedded in the inside of the plurality of pressing grooves 415.

[0042] In this embodiment, when in use, the vacuum glass is placed in the positioning frame 3305 and falls into the positioning inside the object table 3301, the hydraulic cylinder 406 is started, the fixed bar 407 is pushed to move downward, the pressing rod 408 is pushed to move downward, the pressure on the movable bar 410 is generated, the movable bar 410 is moved downward inside the cleaning frame 402, and the spring 414 is retracted together by pressing the two elastic plates 413. Through the downward movement of the movable bar 410, the cleaning cotton 412 and the anti-static cotton 411 are pushed to move downward, when the hydraulic cylinder 406 is automatically closed, the height of the cleaning cotton 412 and the anti-static cotton 411 is consistent with the top surface of the vacuum glass. Then the second forward and reverse motor 401 is started, the output end drives the cleaning frame 402 to rotate towards the vacuum glass, at the same time, the limiting rod 404 rotates in the arc-shaped rail 403, thereby driving the cleaning cotton 412 and the anti-static cotton 411 to rotate. The cleaning cotton 412 first wipes the dust on the surface of the glass, and the cleaning cotton 412 adopts ultra-fine fiber dust-free cleaning cotton, which has a wedge-shaped cross section and is filled with capillary channels inside. The wedge-shaped fiber can deeply enter the gap of the dust particles, and the capillary force can “hook” and lock the dust into the fiber. The capillary channels between the fibers can store dust, avoiding the dust from falling and flying during wiping. Then the anti-static cotton 411 performs secondary cleaning to eliminate residual impurities and improve cleanliness. The anti-static cotton 411 adopts polyester fiber anti-static wiping cotton, which is woven with conductive carbon fiber inside. During wiping, the static electricity generated on the surface of the glass due to friction can be discharged in real time, reducing the re-adsorption of dust in the air due to static electricity. The ion generator 409 is started in advance and rotates with the cleaning frame 402. After the surface of the glass is wiped and the static electricity is discharged, the ion generator 409 releases a large amount of ions to completely eliminate static electricity and prevent dust from being re-absorbed, thereby improving the cleanliness of the surface of the vacuum glass and avoiding the adverse effects of dust and impurities on subsequent laser thickness measurement.

[0043] Further, when the surface of the glass is cleaned, the hydraulic cylinder 406 is started again to pull the fixed bar 407 and the pressing rod 408 to move upward, the movable bar 410 loses pressure, and the movable bar 410 is lifted upward to reset under the rebound of the spring 414, so that the anti-static cotton 411 and the cleaning cotton 412 move upward and maintain a certain distance from the vacuum glass. When the output end of the second forward and reverse motor 401 rotates in the reverse direction to reset, the cleaning frame 402 drives the anti-static cotton 411 and the cleaning cotton 412 to rotate and reset in a non-contact manner, avoiding wiping the dust to the surface of the glass.

[0044] Further, the hydraulic cylinder 406 is started, the output end of the hydraulic cylinder 406 is continuously pulled upward, the fixed bar 407 drives the pressing rod 408 to move out of the pressing groove 415, at this time the movable bar 410 loses the limit, and finally the movable bar 410 is pulled outwards, so that the anti-static cotton 411 and the cleaning cotton 412 can be taken off for cleaning or replacement, which is simple and convenient.

[0045] Example 3: Figures 2-7 As shown, a thickness measuring mechanism 2 is provided on the top of the base 1. Inside the thickness measuring mechanism 2, an auxiliary measuring mechanism 3 and a cleaning mechanism 4 are provided. The thickness measuring mechanism 2 includes a laser thickness measuring device 205 for measuring the laser thickness of the vacuum glass. The auxiliary measuring mechanism 3 includes a first measuring component 31 and a second measuring component 32. The first measuring component 31 includes a main scattering detector 3103 for collecting the scattering signal when the laser passes through the vacuum cavity to detect the vacuum level. The first measuring component 31 also includes a small-angle scattering detector 3101, which is tilted at a small angle to capture the weak Rayleigh scattering signal when the vacuum level slightly decreases, enabling early warning of the vacuum level. The second measuring component 32 includes a transmission signal detector 3202, which is coaxial with the laser emission optical path and is used to collect the direct transmission signal after the laser penetrates the vacuum cavity, calibrate the laser energy attenuation, and eliminate system errors. The auxiliary measuring mechanism 3 also includes a pushing component 33, which includes a stage 3301. An extension plate 3302 is fixedly installed on the front surface of the stage 3301, and a fixing frame 3303 is fixedly installed on the rear surface of the stage 3301. A multi-stage electric push rod 3304 is fixedly installed inside the fixing frame 3303. A positioning frame 3305 is fixedly installed at one end of the multi-stage electric push rod 3304, and the bottom end of the stage 3301 is fixedly installed on the top of the base 1.

[0046] In this embodiment, during use, when the first measuring component 31 and the second measuring component 32 detect a decrease in the vacuum level in the vacuum chamber (i.e., a seal leak, indicating that the vacuum glass is a defective product), the PLC control system 5 controls the thickness measuring mechanism 2 to close, stopping the laser thickness measurement. At the same time, the multi-stage electric push rod 3304 is activated, pushing the positioning frame 3305 to move towards the extension plate 3302, thereby pushing the defective vacuum glass from the measuring area to the extension plate 3302, preventing the defective glass from continuing to be measured for thickness.

[0047] The effect and working principle of the whole mechanism are as follows: the vacuum glass is placed in the positioning frame 3305 and falls into the positioning inside the object table 3301, the hydraulic cylinder 406 is started, the fixed strip 407 and the pressing rod 408 are pushed to move downward, the movable strip 410 is forced to move downward, the elastic plate 413 and the spring 414 are extruded, the cleaning cotton 412 and the anti-static cotton 411 are further pushed to move downward and keep consistent with the top surface of the vacuum glass. The second forward-reverse motor 401 is started, the cleaning frame 402 is driven to rotate, the cleaning cotton 412 and the anti-static cotton 411 are sequentially used to wipe the dust and conduct static electricity on the glass surface, then the ion generator 409 releases a large amount of ions to completely eliminate static electricity. When the glass surface is wiped clean, the hydraulic cylinder 406 pulls the fixed strip 407 and the pressing rod 408 to move upward, under the rebound of the spring 414, the movable strip 410 is lifted to reset upward, so that the anti-static cotton 411 and the cleaning cotton 412 keep a certain distance from the vacuum glass, finally the second forward-reverse motor 401 drives the cleaning frame 402 to rotate and reset. The laser thickness measurer 205 is started, a laser beam is emitted to the surface of the vacuum glass, the laser signal is identified, analyzed and processed through the PLC control system 5, the thickness of the upper glass, the thickness of the vacuum cavity and the overall thickness are calculated, so that the thickness measurement of the vacuum glass is realized. The first servo moving system 201 and the second servo moving system 203 drive the laser thickness measurer 205 and the auxiliary measurement mechanism 3 to move horizontally and longitudinally respectively. At the same time, the auxiliary measurement mechanism 3 is started, the main scattering detector 3103 collects the scattering signal when the laser passes through the vacuum cavity, and transmits the scattering signal to the PLC control system 5 to calculate the vacuum degree value. The forward small-angle scattering detector 3101 is responsible for accurately collecting the scattered light in the small-angle region, and realizes the early prediction of the vacuum degree drop. The transmission signal detector 3202 collects the direct transmission light signal intensity after the laser penetrates the cavity, which is used as the laser energy reference value to correct the scattering signal intensity of the main scattering detector 3103 and the forward small-angle scattering detector 3101. When the PLC control system 5 determines that the vacuum degree decreases, the thickness measurement mechanism 2 is stopped for thickness measurement at the first time, and it is judged that this measurement result is invalid and is not included in the accurate measurement result for unified analysis and processing, then the multi-stage electric push rod 3304 is started, the unqualified vacuum glass is moved from the measurement area to the extension plate 3302 by the positioning frame 3305, prompting the staff to replace the vacuum glass for detection, at the same time, the unqualified vacuum glass is analyzed for sealing leakage, the related parameters of vacuum glass sealing processing are adjusted to avoid more unqualified products. The first forward-reverse motor 3107 is started to drive the outer gear 3108 to rotate inside the inner ring gear 3105, and then drive the movable frame 3106 to rotate in the inner ring gear 3105, so that the main scattering detector 3103 rotates around the circumference of the laser thickness measurer 205, which can collect scattering signals at different angles and positions, and improve the accuracy of scattering signal collection of the main scattering detector 3103.

[0048] Among them, the first servo moving system 201, the second servo moving system 203, the laser thickness gauge 205, the small-angle scattering detector 3101, the main scattering detector 3103, the first positive and negative motor 3107, the transmission signal detector 3202, the multi-stage electric push rod 3304, the second positive and negative motor 401, the hydraulic cylinder 406, the ion generator 409 and the PLC control system 5 are all prior arts, and their components and use principles are all disclosed technologies, and will not be explained in detail here.

[0049] Although the present application has been described in detail with reference to the foregoing embodiments, technical solutions recorded in the foregoing embodiments can be modified or some technical features can be replaced by equivalent ones by those skilled in the art, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum glass thickness measuring instrument comprising a base (1) and a PLC control system (5), characterized in that: The top of the base (1) is provided with a thickness measuring mechanism (2), the inside of the thickness measuring mechanism (2) is provided with an auxiliary measuring mechanism (3) and a cleaning mechanism (4); The thickness measuring mechanism (2) comprises a laser thickness measuring device (205) for laser thickness measurement of the vacuum glass; The auxiliary measuring mechanism (3) comprises a first measuring assembly (31) and a second measuring assembly (32), the first measuring assembly (31) comprises a main scattering detector (3103) for collecting scattering signals when laser passes through the vacuum cavity, and detecting the vacuum degree condition; The first measuring assembly (31) further comprises a small-angle scattering detector (3101) which is arranged at a small angle, for capturing weak scattering signals when the vacuum degree slightly decreases, and realizing early warning of the vacuum degree; The second measuring assembly (32) comprises a transmission signal detector (3202) coaxial with the laser emission light path, for collecting direct transmission signals after laser penetrates the vacuum cavity, calibrating laser energy attenuation, and eliminating system error.

2. The vacuum glass thickness gauge according to claim 1, characterized in that: The thickness measuring mechanism (2) further comprises a first servo moving system (201), the top of the first servo moving system (201) is provided with a moving frame (202), the top of one side outer surface of the moving frame (202) is fixedly installed with a second servo moving system (203), the bottom of the second servo moving system (203) is provided with a moving block (204), the laser thickness measuring device (205) is installed at the bottom of the moving block (204), a PLC control system (5) is installed on the other side outer surface of the moving frame (202), and the first servo moving system (201) is installed on the top of the base (1).

3. The vacuum glass thickness gauge of claim 2, wherein: The first measuring assembly (31) further comprises an annular plate (3104), the inside of the annular plate (3104) is fixedly installed with an inner ring gear (3105), the inside of the inner ring gear (3105) is movably embedded with a movable frame (3106), the top surface in the movable frame (3106) is fixedly installed with a first forward and reverse motor (3107), the output end of the first forward and reverse motor (3107) is fixedly installed with an outer gear (3108), the edges of the top surface and the bottom surface in the movable frame (3106) are fixedly installed with slide rod pieces (3109), and the top and the bottom of the inner ring gear (3105) are provided with sliding grooves (3110), and the outer surfaces of the two slide rod pieces (3109) are movably embedded in the interiors of the two sliding grooves (3110).

4. The vacuum glass thickness gauge of claim 3, wherein: The outer surface of the small-angle scattering detector (3101) is fixedly installed with a small-angle mounting plate (3102), the top of the small-angle mounting plate (3102) is fixedly installed at the edge of the bottom of the moving block (204), the outer surface of the annular plate (3104) is fixedly installed with a plurality of reinforcing rods (3115), one end of each of the plurality of reinforcing rods (3115) is fixedly installed on the four sides of the moving block (204), the outer gear (3108) is in meshing connection with the inner ring gear (3105), the bottom of the outer gear (3108) is fixedly installed with a rotating column (3111), and the bottom end of the rotating column (3111) is movably embedded in the bottom surface inside the movable frame (3106).

5. The vacuum glass thickness gauge of claim 4, wherein: The bottom of the movable frame (3106) is fixedly installed with a main mounting plate (3112), the main scattering detector (3103) is fixedly installed on the outer surface of the main mounting plate (3112), the top of the movable frame (3106) is provided with an annular rail (3113), the inner part of the annular rail (3113) is movably embedded with a sliding block (3114), the bottom of the sliding block (3114) is fixedly installed on the top of the movable frame (3106), and the top of the annular rail (3113) is fixedly installed with a fixed rod (3116). The top end of each of the plurality of fixed rods (3116) is fixedly installed on the outer surface of the plurality of reinforcing rods (3115).

6. The vacuum glass thickness gauge of claim 5, wherein: The second measuring assembly (32) further comprises a connecting frame (3201), both the top and the bottom of the connecting frame (3201) are movably embedded with two guide rails (3203), the transmission signal detector (3202) is fixedly installed on the bottom surface inside the connecting frame (3201), the outer surface of the connecting frame (3201) is fixedly installed with an annular frame (3204), the inner wall of the annular frame (3204) is fixedly installed on the outer surface of the plurality of reinforcing rods (3115), and the two guide rails (3203) are fixedly installed on the top surface and the bottom surface inside the moving frame (202) respectively.

7. The vacuum glass thickness gauge of claim 6, wherein: The auxiliary measuring mechanism (3) further comprises a pushing assembly (33), the pushing assembly (33) comprises a carrier table (3301), the front surface of the carrier table (3301) is fixedly installed with an extension plate (3302), the rear surface of the carrier table (3301) is fixedly installed with a fixed frame (3303), the inside of the fixed frame (3303) is fixedly installed with a multi-stage electric push rod (3304), one end of the multi-stage electric push rod (3304) is fixedly installed with a positioning frame (3305), and the bottom end of the carrier table (3301) is fixedly installed on the top of the base (1).

8. The vacuum glass thickness gauge of claim 7, wherein: The cleaning mechanism (4) comprises a second forward-reverse motor (401), the output end of the second forward-reverse motor (401) is fixedly installed with a cleaning frame (402), the inside of the cleaning frame (402) is movably embedded with a movable strip (410), the bottom of the movable strip (410) is respectively installed with anti-static cotton (411) and cleaning cotton (412), the edge of the bottom of the cleaning frame (402) is fixedly installed with an ion generator (409), the top of the movable strip (410) is provided with a plurality of pressing grooves (415), the two sides of the bottom of the movable strip (410) are provided with elastic plates (413), the bottom of the two elastic plates (413) is fixedly connected with a plurality of springs (414), and one end of the plurality of springs (414) is respectively fixedly installed at the two sides of the inside bottom of the cleaning frame (402).

9. The vacuum glass thickness gauge of claim 8, wherein: The outer surface of the cleaning frame (402) is fixedly installed with a supporting frame (405), the top surface of the inside of the supporting frame (405) is fixedly installed with a hydraulic cylinder (406), one end of the hydraulic cylinder (406) is fixedly installed with a fixed strip (407), and the bottom of the fixed strip (407) is fixedly installed with a plurality of pressing rods (408).

10. The vacuum glass thickness gauge of claim 9, wherein: The top of the cleaning frame (402) is provided with an arc-shaped rail (403), the inside of the arc-shaped rail (403) is movably embedded with a limiting rod (404), the bottom end of the limiting rod (404) is fixedly installed at the front surface of the top of the cleaning frame (402), the second forward-reverse motor (401) is installed at the edge of the front surface of the object table (3301) through an auxiliary frame, the bottom end of the plurality of pressing rods (408) is movably penetrated into the inside of the cleaning frame (402) and movably embedded in the inside of the plurality of pressing grooves (415).

Citation Information

Patent Citations

  • Apparatus for inspecting substrate and method thereof

    CN109974599A

  • Vacuum coating online monitoring system

    CN120558879A