Information verification method and device based on authority card control

Abstract

The invention discloses an information verification method and device based on authority card control. The method comprises the steps that identity information of an operator in the semiconductor manufacturing process is verified, and after the identity information passes verification, a cartridge Casset and a package type carrier Pod are automatically separated through the physical operation function of an automatic box opener VPO; after it is determined that the cartridge Casset and the package type carrier Pod are separated, RFID information on a base of the package type carrier Pod is removed; before the cartridge Casset and the package type carrier Pod are recombined, dual identity verification is carried out on the cartridge Casset and the package type carrier Pod, and a second verification result is obtained; and after the second verification result shows that the verification of the cartridge Casset and the package type carrier Pod is passed, the cartridge Casset and the package type carrier Pod are recombined. According to the invention, the technical problem that the separation and recombination of Casset and POD and the management of RFID information often depend on manual inspection and recording and the reliability is low in the prior art is solved.

Description

Technical Field

[0001] This invention relates to the field of automated production technology, and more specifically, to an information verification method and apparatus based on access control. Background Technology

[0002] In the semiconductor manufacturing industry, chip production and transportation rely on precise automated equipment and systems to ensure high efficiency and product quality. Cassettes and PODs (packaging containers) are two key carriers used to load and protect chips throughout the manufacturing and packaging process. A cassette is a container used directly for storing and transporting chips, marked with a unique barcode to identify its ID. A POD is an external container used not only for chip transportation but also for protection; it is also equipped with barcodes and RFID (Radio Frequency Identification) tags to record its unique ID for automated management and tracking.

[0003] However, in certain process flows, such as in the carbon film zone or carrier cleaning zone, Cassette and POD need to be separated and processed independently. Such separation and subsequent reassembly can lead to a range of problems, including but not limited to:

[0004] 1) Confusion of identity information: Due to the complexity of manual operation or shift handover, mismatch between Cassette and POD can easily occur during recombination, which leads to inconsistencies in accounting information and affects subsequent automated operation processes.

[0005] 2) Lack of access control: The existing process lacks an effective VPO (Virtual Permission Operator) access control system, which cannot ensure that only authorized personnel can perform critical operations, such as separating, reassembling, clearing and writing RFID information. This increases the risk of operational errors and the possibility of unauthorized access.

[0006] 3) Incomplete operation records: There is a lack of detailed records and tracking mechanisms for each separation, recombination, clearing and writing of RFID information, making it difficult to trace the operation history and hindering quality and safety management.

[0007] Given the aforementioned problems, traditional solutions often rely on manual inspection and recording, which is not only inefficient but also prone to errors, especially when dealing with a large number of vehicles and frequent shift changes.

[0008] There is currently no effective solution to the above problems. Summary of the Invention

[0009] This invention provides an information verification method and apparatus based on access control, which at least solves the technical problems in related technologies where the separation and reassembly of Cassette and POD, as well as the management of RFID information, often rely on manual inspection and recording, resulting in low reliability.

[0010] According to one aspect of the present invention, an information verification method based on access control is provided, applied to the information processing of cassettes and pods in semiconductor manufacturing, comprising: under the control of an Equipment Automation System (EAP), verifying the identity information of operators in the semiconductor manufacturing process through communication between an Automatic Box Opener (VPO) and a Manufacturing Execution System (MES), and obtaining a first verification result; after the first verification result indicates that the identity information has been verified, automatically separating the cassette and the pod using the physical operation function of the VPO; and determining the cassette and the pod... After separation, the RFID information on the base of the packaged carrier Pod is cleared; or, before the card cassette is placed into the packaged carrier Pod, the first identification information of the card cassette is scanned and recorded into the packaged carrier Pod. Before reassembling the card cassette and the packaged carrier Pod, the card cassette and the packaged carrier Pod undergo dual authentication to obtain a second authentication result. After the second authentication result indicates that the card cassette and the packaged carrier Pod have passed authentication, the card cassette and the packaged carrier Pod are reassembled.

[0011] Optionally, under the control of the Equipment Automation System (EAP), the identity information of the operator during the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES) to obtain a first verification result. This includes: after determining that the first carrier is placed on the placement table of the Automatic Box Opener (VPO), listening to the separation event to obtain a first listening result, wherein the first carrier includes the cassette and the packaged carrier pod; when the first listening result indicates that the separation event has been detected, the EAP reads the operator's account information and sends the account information to the MES, so that the MES can authenticate the operator based on the account information to obtain the first verification result.

[0012] Optionally, after the first verification result indicates that the identity information has been verified, the physical operation function of the automatic box opener (VPO) is used to automatically separate the cassette and the packaged carrier pod, including: opening the cassette and the packaged carrier pod through the separation function in the physical operation function of the automatic box opener (VPO); and when it is detected that the cassette has been removed from the packaged carrier pod, synchronizing the separation operation to the manufacturing execution system (MES) through the equipment automation system (EAP).

[0013] Optionally, the reassembly of the cassette and the wrap-around carrier Pod includes: after determining that the second carrier is placed on the placement table of the automatic box opener VPO, listening for a combination event to obtain a second listening result, wherein the second carrier includes the combined cassette and the wrap-around carrier Pod; after the second listening result indicates that the combination event has been detected, reading the second identification information of the second carrier and obtaining the third identification information through the Equipment Automation System (EAP), comparing the second identification information with the third identification information to obtain a first comparison result; when the first comparison result indicates that the second identification information and the third identification information are consistent, controlling the cassette and the wrap-around carrier Pod to separate and open through the automatic box opener VPO; after determining that the cassette and the wrap-around carrier Pod have separated and opened, detecting that the cassette has been placed into the wrap-around carrier Pod, controlling the wrap-around carrier Pod to close through the automatic box opener VPO.

[0014] Optionally, after detecting that the cassette has been placed into the encapsulated carrier Pod, the encapsulated carrier Pod is closed via the automatic opener (VPO), including: after detecting that the cassette has been placed into the encapsulated carrier Pod, scanning the cassette placed in the encapsulated carrier Pod to obtain a first identifier of the cassette; comparing the second identifier recorded in the encapsulated carrier Pod with the first identifier to obtain a second comparison result; when the second comparison result indicates that the first identifier and the second identifier are consistent, the encapsulated carrier Pod is closed via the automatic opener (VPO), and the recombination operation information is recorded simultaneously.

[0015] Optionally, after reassembling the Cassette and the Pod, the information verification method further includes: after determining the reassembled Cassette and the Pod, listening for an emptying event to obtain a third listening result; after the third listening result indicates that the emptying event has been detected, obtaining the operator's account information and verifying the account information to obtain a third verification result; after the third verification result indicates that the account information has been verified, sending the first sensing information on the base of the Pod to the Manufacturing Execution System (MES) for verification via the Equipment Automation System (EAP) to verify whether the first carrier contains a chip, obtaining a first verification result; when the first verification result indicates that the first carrier contains the chip, clearing the information on the base.

[0016] Optionally, after reassembling the Cassette and the Pod, the information verification method further includes: after determining the reassembled Cassette and the Pod, listening for a binding event to obtain a fourth listening result; after the fourth listening result indicates that the binding event has been detected, reading the sensor on the base of the Pod through the placement table of the automatic box opener VPO; when the reading result indicates that the sensor is empty, obtaining the operator's account information, verifying the operator's permissions through the account information, and obtaining a permission verification result; in the... When the permission verification result indicates that the operator has the necessary permissions, the operator opens the packaged carrier Pod via the automatic box opener (VPO), scans the packaged carrier Pod to obtain its third identifier, and simultaneously reads the fourth identifier of the cassette. The third and fourth identifiers are then sent to the Manufacturing Execution System (MES) for verification, and the packaged carrier Pod is closed via the VPO. Finally, the third and fourth identifiers are written to the Equipment Automation System (EAP), and the write event is reported to the MES.

[0017] According to another aspect of the present invention, an information verification device based on access control is also provided, applied to the information processing of cassettes and pods in semiconductor manufacturing, comprising: a first verification unit, configured to verify the identity information of operators in the semiconductor manufacturing process through communication between an automatic cassette opener (VPO) and a manufacturing execution system (MES) under the control of an equipment automation system (EAP), and obtain a first verification result; a separation unit, configured to automatically separate the cassette and the pod using the physical operation function of the automatic cassette opener (VPO) after the first verification result indicates that the identity information has been verified; and a first processing unit, configured to, after determining the identity information of the cassette and the pod, automatically separate the cassette and the pod using the physical operation function of the automatic cassette opener (VPO); and a first processing unit, configured to, after determining the identity information of the cassette and the pod, automatically separate the cassette and the pod. After the carrier Pod is separated, the RFID information on the base of the wrap-around carrier Pod is cleared, or, before the card cassette is placed into the wrap-around carrier Pod, the first identification information of the card cassette is scanned and recorded into the wrap-around carrier Pod; the second verification unit is used to perform dual authentication on the card cassette and the wrap-around carrier Pod before recombining the card cassette and the wrap-around carrier Pod to obtain a second verification result; the second processing unit is used to reassemble the card cassette and the wrap-around carrier Pod after the second verification result indicates that the card cassette and the wrap-around carrier Pod have been verified.

[0018] Optionally, the first verification unit includes: a first monitoring module, configured to monitor a separation event after determining that the first carrier is placed on the placement table of the automatic box opener VPO, and obtain a first monitoring result, wherein the first carrier includes the cassette and the packaged carrier Pod; and a first verification module, configured to read the operator's account information through the Equipment Automation System (EAP) when the first monitoring result indicates that the separation event has been detected, and send the account information to the Manufacturing Execution System (MES) to use the MES to authenticate the operator based on the account information, thereby obtaining the first verification result.

[0019] Optionally, the separation unit includes: an opening module for opening the cassette and the packaged carrier Pod through the separation function in the physical operation function of the automatic box opener VPO; and a synchronization module for synchronizing the separation operation to the manufacturing execution system MES through the equipment automation system EAP when the cassette is detected to be removed from the packaged carrier Pod.

[0020] Optionally, the second processing unit includes: a second monitoring module, configured to monitor the combination event and obtain a second monitoring result after determining that the second carrier is placed on the placement table of the automatic box opener VPO, wherein the second carrier includes the combined cassette and the wrap-around carrier Pod; a first comparison module, configured to read the second identification information of the second carrier and obtain the third identification information through the Equipment Automation System (EAP) after the second monitoring result indicates that the combination event has been detected, and compare the second identification information with the third identification information to obtain a first comparison result; a first control module, configured to control the cassette and the wrap-around carrier Pod to separate and open through the automatic box opener VPO when the first comparison result indicates that the second identification information and the third identification information are consistent; and a first control module, configured to control the wrap-around carrier Pod to close through the automatic box opener VPO after determining that the cassette and the wrap-around carrier Pod have separated and opened, and after detecting that the cassette has been placed on the wrap-around carrier Pod.

[0021] Optionally, the first control module includes: a scanning submodule, configured to scan the cassette placed in the packaged carrier Pod after detecting that the cassette has been placed in the packaged carrier Pod, and obtain a first identification code of the cassette; a comparison submodule, configured to compare a second identification code recorded in the packaged carrier Pod with the first identification code, and obtain a second comparison result; and a control submodule, configured to control the packaged carrier Pod to close via the automatic box opener VPO when the second comparison result indicates that the first identification code and the second identification code are consistent, and simultaneously record the recombination operation information.

[0022] Optionally, the information verification device further includes: a first listening unit, configured to listen to the clearing event after reassembling the Cassette and the Pod, and after determining the reassembled Cassette and the Pod, to obtain a third listening result; a first acquisition unit, configured to acquire the operator's account information and verify the account information after the third listening result indicates that the clearing event has been detected, to obtain a third verification result; a third verification unit, configured to send the first sensing information on the base of the Pod sensed by the Equipment Automation System (EAP) to the Manufacturing Execution System (MES) for verification after the third verification result indicates that the account information has been verified, so as to use the MES to verify whether the first carrier is loaded with a chip, and obtain a first verification result; and a clearing unit, configured to clear the information on the base when the first verification result indicates that the first carrier is loaded with the chip.

[0023] Optionally, the information verification device further includes: a second monitoring unit, configured to monitor the binding event after reassembling the Cassette and the Pod, and obtain a fourth monitoring result; a second acquisition unit, configured to read the sensor on the base of the Pod through the placement table of the automatic box opener VPO after the fourth monitoring result indicates that the binding event has been detected, and when the reading result indicates that the sensor is empty, acquire the operator's account information, and perform permission verification on the operator through the account information to obtain a permission verification result; a third acquisition unit. The system comprises: a first unit, used to open the packaged carrier Pod via the automatic box opener (VPO) and scan the packaged carrier Pod to obtain its third identification code, and simultaneously read the fourth identification code of the cassette; a second unit, used to send the third and fourth identification codes to the manufacturing execution system (MES) for verification, and to control the packaged carrier Pod to close via the automatic box opener (VPO); and a third unit, used to write the third and fourth identification codes via the equipment automation system (EAP) and report the write event to the manufacturing execution system (MES).

[0024] According to another aspect of the present invention, a computer-readable storage medium is also provided, the computer-readable storage medium including a stored program, wherein the program executes the information verification method based on access control described in any one of the above embodiments.

[0025] According to another aspect of the present invention, a processor is also provided, the processor being used to run a program, wherein the program, when running, executes the information verification method based on permission control described in any one of the above embodiments.

[0026] According to another aspect of the present invention, a computer program product is also provided, including computer instructions, which, when executed by a processor, perform the information verification method based on access control described in any one of the above embodiments.

[0027] In this embodiment of the invention, under the control of the Equipment Automation System (EAP), the identity information of the operator during the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES), resulting in a first verification result. After the first verification result indicates that the identity information has been verified, the physical operation function of the VPO is used to automatically separate the cassette and the packaged carrier pod. After confirming that the cassette and the packaged carrier pod are separated, the RFID information on the base of the packaged carrier pod is cleared, or, before the cassette is placed into the packaged carrier pod, the first identification information of the cassette is scanned and recorded into the packaged carrier pod. Before reassembling the cassette and the packaged carrier pod, the cassette and the packaged carrier pod undergo dual authentication to obtain a second verification result. After the second verification result indicates that the cassette and the packaged carrier pod have been verified, the cassette and the packaged carrier pod are reassembled. The technical solution provided by this invention achieves dual authentication and access control for Cassettes and Pods during separation, reassembly, relationship clearing, and relationship binding by integrating VPO, EAP, and MES. Furthermore, through automated physical operations and RFID information management, it significantly improves the efficiency, security, and accuracy of carrier management in semiconductor manufacturing. It effectively manages and controls the separation and reassembly of Cassettes and Pods, as well as the management of RFID information, while ensuring operator access rights to prevent operational errors and unauthorized access. This enhances the automation level and overall efficiency of semiconductor production lines, thereby solving the technical problem in related technologies where the separation and reassembly of Cassettes and Pods, as well as the management of RFID information, often rely on manual inspection and recording, resulting in low reliability. Attached Figure Description

[0028] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this application, illustrate exemplary embodiments of the invention and, together with their description, serve to explain the invention and do not constitute an undue limitation thereof. In the drawings:

[0029] Figure 1 This is a hardware structure block diagram of a mobile terminal for an information verification method based on permission control according to an embodiment of the present invention.

[0030] Figure 2 This is a flowchart of an information verification method based on access control according to an embodiment of the present invention;

[0031] Figure 3 This is a flowchart of the VPO operation in the carbon film region according to an embodiment of the present invention;

[0032] Figure 4 This is a flowchart of the VPO (Vehicle Cleaning Area) operation according to an embodiment of the present invention;

[0033] Figure 5 This is a flowchart illustrating the separation of POD and Cassette according to an embodiment of the present invention;

[0034] Figure 6 This is a flowchart of the POD and Cassette recombination according to an embodiment of the present invention;

[0035] Figure 7 This is a flowchart illustrating the clearing of the POD and Cassette relationship according to an embodiment of the present invention;

[0036] Figure 8 This is a flowchart illustrating the binding relationship between POD and Cassette according to an embodiment;

[0037] Figure 9 This is a schematic diagram of an information verification device based on access control according to an embodiment of the present invention.

[0038] The above figures include the following reference numerals:

[0039] 102. Processor; 104. Memory; 106. Transmission device; 108. Input / output device. Detailed Implementation

[0040] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0041] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0042] As described in the background section, the separation and reassembly of Cassettes and PODs, as well as the management of RFID information in related technologies, often rely on manual inspection and recording, resulting in low reliability. This invention provides an information verification method and apparatus based on access control, a computer-readable storage medium, and a computer program product.

[0043] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0044] The methods and embodiments provided in this invention can be executed on a mobile terminal, a computer terminal, or a similar computing device. Taking running on a mobile terminal as an example, Figure 1 This is a hardware structure block diagram of a mobile terminal using an information verification method based on access control according to an embodiment of the present invention. Figure 1 As shown, a mobile terminal may include one or more ( Figure 1 Only one is shown in the diagram. A processor 102 (which may include, but is not limited to, a microprocessor MCU or a programmable logic device FPGA, etc.) and a memory 104 for storing data are also shown. The mobile terminal may further include a transmission device 106 for communication functions and an input / output device 108. Those skilled in the art will understand that... Figure 1 The structure shown is for illustrative purposes only and does not limit the structure of the mobile terminal described above. For example, the mobile terminal may also include components that are more... Figure 1 The more or fewer components shown, or having the same Figure 1 The different configurations shown.

[0045] The memory 104 can be used to store computer programs, such as application software programs and modules, like the computer program corresponding to the information verification method based on permission card control in this embodiment of the invention. The processor 102 executes various functional applications and data processing by running the computer program stored in the memory 104, thereby implementing the above-described method. The memory 104 may include high-speed random access memory and non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some instances, the memory 104 may further include memory remotely located relative to the processor 102, and these remote memories can be connected to the mobile terminal via a network. Examples of the aforementioned networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof. The transmission device 106 is used to receive or send data via a network. Specific examples of the aforementioned networks may include wireless networks provided by the mobile terminal's communication provider. In one example, the transmission device 106 includes a network interface controller (NIC), which can be connected to other network devices via a base station to communicate with the Internet. In one example, the transmission device 106 may be a radio frequency (RF) module, which is used to communicate with the Internet wirelessly.

[0046] Example 1

[0047] According to an embodiment of the present invention, a method embodiment of an information verification method based on access control is provided. It should be noted that the information processing applied to cassettes and pods in semiconductor manufacturing, the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0048] Figure 2 This is a flowchart of an information verification method based on access control according to an embodiment of the present invention, such as... Figure 2 As shown, the information verification method based on access control includes the following steps:

[0049] In step S202, under the control of the Equipment Automation System (EAP), the identity information of the operator in the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES), and the first verification result is obtained.

[0050] Optional, the specific functions of the automatic box opener (VPO) include, but are not limited to:

[0051] 1) Access Control and Authentication: The Automated Cart Opener (VPO) integrates an employee authentication mechanism to control and verify operator permissions, ensuring that only authorized personnel can perform specific carrier operations (such as separating, combining, and clearing RFID information). This involves communication and data exchange with the enterprise's Manufacturing Execution System (MES), Access Control Panel (EAP), and other systems.

[0052] 2) Carrier Separation and Reassembly: The Automated Carrier Opener (VPO) can automatically separate or reassemble the Cassette and POD after authorization verification. This process includes physical operations and RFID information updates to maintain consistency of carrier and material information in the production process.

[0053] 3) RFID Information Management: The Automatic Box Opener (VPO) can clear and write RFID information to the POD base, ensuring the accurate binding relationship between the Cassette and the POD. When the Cassette or POD needs to be re-bound, the VPO can accurately update the RFID information, maintaining the continuity and reliability of material tracking.

[0054] 4) Operation Recording and Tracking: After each operation, the automatic box opener VPO will record the operation history through MES, including the operator, operation type, operation time and carrier status changes, which is crucial for material tracking, production scheduling and quality management.

[0055] 5) Two-factor authentication: Before the Cassette and POD are reassembled, the automatic box opener VPO will perform two authentications to ensure that the vehicle is correctly paired and avoid production problems caused by misoperation.

[0056] The introduction of the Automated Box Opener (VPO) significantly reduces the risks associated with human error and improper access control on semiconductor production lines. It enables intelligent and automated carrier operation, thereby improving production efficiency, reducing costs, and enhancing the controllability and traceability of the production process. This system integrates advanced hardware (such as RFID readers, touchscreen control panels, and robotic arms) and software (such as access control logic and data synchronization algorithms) to ensure the precise execution of every operational step.

[0057] Optionally, the core functions of the Equipment Automation System (EAP) are as follows:

[0058] 1) Access Control: The Equipment Automation System (EAP) can verify the permissions of received operation requests, ensuring that only authorized users can perform specific operations such as carrier separation, reassembly, and RFID information reading / writing. This access control is achieved through interaction with the Manufacturing Execution System (MES), verifying the operator's account and password to confirm their operating permissions.

[0059] 2) Operation Records: The Equipment Automation System (EAP) records detailed information for each vehicle operation, including operation time, operation type, vehicle ID, operator identity, etc. These records help to trace operation history, analyze operation trends, and quickly locate and resolve problems when abnormal situations occur.

[0060] 3) User Interface: EAP provides an intuitive graphical user interface (GUI) that allows operators to easily enter necessary information, such as account password, vehicle ID, and select specific operation types. In addition, the user interface may include step-by-step instructions and real-time feedback on operation results to ensure accuracy.

[0061] 4) Safety Controls: The Equipment Automation System (EAP) has safety control mechanisms to prevent unauthorized access and operation, thereby protecting the carrier and chip from damage. For example, in specific areas (such as the carbon film area or the carrier cleaning area), unverified operators will not be able to use the EAP to operate the carrier.

[0062] 5) Automated Operation Assistance: The Equipment Automation System (EAP) and VPO functions are combined to achieve semi-automation of vehicle operation. For example, when separating the POD and Cassette, after receiving the instruction, the VPO will automatically perform the physical separation operation. However, during reassembly, the operator needs to place the Cassette according to the instructions, and the EAP will confirm and record the results.

[0063] When an operator initiates an operation, such as separating or reassembling the Cassette and POD, the Equipment Automation System (EAP) captures the operation request and prompts the operator to enter account information. This account information, along with the operation instructions, is sent to the Manufacturing Execution System (MES) for authorization and status verification. The MES then sends the verification results back to the EAP. If both authorization and status are satisfactory, the EAP guides the operator to the next step and triggers the VPO to perform the physical operation. Upon completion of the operation, the EAP records the operation details in its database and synchronizes the operation records with the MES to ensure consistency of vehicle status information across all systems.

[0064] In this embodiment, under the control of the automated box opener (VPO), the operator's authorization and identity are verified through communication between the Equipment Automation Platform (EAP) and the Manufacturing Execution System (MES). On the semiconductor production line, the operator first places the first carrier containing the Cassette and POD onto the placement table of the specially designed automated box opener (VPO). The automated box opener (VPO) begins listening for separation events, and once carrier placement is detected, it immediately initiates the verification process. The operator enters their account information through the Equipment Automation Platform (EAP), which is collected by the system and sent to the Manufacturing Execution System (MES) for authorization verification. The MES compares the received account information to confirm whether the operator has the authorization to perform the separation operation.

[0065] Step S204: After the first verification result indicates that the identity information has been verified, the physical operation function of the automatic box opener VPO is used to automatically separate the cassette and the packaged carrier Pod.

[0066] In this embodiment, once the Manufacturing Execution System (MES) feedback verification is successful, the Automatic Box Opener (VPO) will activate its physical operation function to automatically open and separate the Cassette and POD, ensuring the efficiency and accuracy of the separation process.

[0067] After the physical operation is completed, the Automated Box Opener (VPO) transmits the operation information, including operation time, operator ID, and vehicle ID, to the Manufacturing Execution System (MES) via the EAP (Electronic Access Point) for subsequent tracking and analysis.

[0068] Step S206: After confirming that the Cassette and the Pod are separated, clear the RFID information on the base of the Pod, or scan and record the first identification information of the Cassette into the Pod before the Cassette is placed into the Pod.

[0069] After separation, the automatic box opener (VPO) can clear the RFID information from the POD base, or scan and record the Cassette's initial identification information into the POD before the Cassette is reinserted.

[0070] This operation is completed using the RFID reader / writer built into the VPO, which can either clear or write the data depending on the specific requirements. After the clearing or writing operation is completed, the VPO automatically opens the box and synchronizes the operation results to the Manufacturing Execution System (MES) via the EAP (Enterprise Application Program).

[0071] In step S208, before recombining the Cassette and the Pod, perform dual authentication on the Cassette and the Pod to obtain a second authentication result.

[0072] In this embodiment, when the operator prepares to reassemble the Cassette and POD, the Automated Box Opener (VPO) listens for and waits for the assembly event. Upon receiving the event, the operator places the Cassette and POD on the VPO's placement table. The EAP reads their respective identification information and performs dual verification. If the verification is successful—that is, the identification information matches and the operator's authorization is successfully verified—the VPO will automatically open the carrier for assembly and send the operation record to the Manufacturing Execution System (MES).

[0073] That is, before reassembling the Cassette and Pod, two-factor authentication is used, which involves scanning the Cassette's ID and comparing it with the information on the Pod's base chip to ensure correct assembly.

[0074] Step S210: After the second verification result indicates that the Cassette and the Pod have passed verification, the Cassette and the Pod are reassembled.

[0075] During the above process, all operation history will be recorded, including separation, recombination, clearing and writing of RFID information, as well as operator authorization verification information, to achieve operation traceability.

[0076] It is worth noting that the principle is based on identity authentication and access control, ensuring that only verified operators can perform specific operations, preventing unauthorized operations. RFID information reading and writing utilizes electromagnetic induction or radio waves, enabling information exchange without physical contact, making it suitable for high-speed automated environments. The automatic box opener (VPO) combines mechanical and electronic control principles to automatically separate and reassemble Cassettes and Devices (PODs), reducing manual physical intervention and enhancing operational accuracy and speed. Through communication between EAP and MES, real-time synchronization of operational data is achieved, facilitating production process monitoring and traceability, and ensuring data consistency and accuracy.

[0077] Furthermore, automated separation and reassembly operations significantly reduce manual processing time and improve production line efficiency. Dual authentication ensures the correct combination of Cassettes and PODs, while RFID data clearing and writing further prevents material confusion and information errors, enhancing production line security and product consistency. Integrated Manufacturing Execution System (MES) information synchronization enables real-time updates of vehicle logistics status, optimizing logistics and production scheduling and reducing management chaos. The access control system prevents unauthorized operations, reduces production errors caused by operators, and improves production yield.

[0078] As described above, in this embodiment of the invention, under the control of the Equipment Automation System (EAP), the identity information of the operator during the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES), resulting in a first verification result. After the first verification result indicates that the identity information has been verified, the physical operation function of the VPO is used to automatically separate the cassette and the packaged carrier pod. After confirming that the cassette and the packaged carrier pod are separated, the RFID information on the base of the packaged carrier pod is cleared, or, before the cassette is placed into the packaged carrier pod, the first identification information of the cassette is scanned and recorded into the packaged carrier pod. Before reassembling the cassette and the packaged carrier pod, the cassette is... The system performs dual authentication with the Pod and obtains a second authentication result. After the second authentication result indicates that the Cassette and the Pod have passed authentication, they are reassembled. This achieves the goal of dual authentication and permission checks for Cassette and Pod during separation, reassembly, relationship clearing, and relationship binding by integrating VPO, EAP, and MES. Moreover, through automated physical operations and RFID information management, it significantly improves the efficiency, security, and accuracy of carrier management in the semiconductor manufacturing process. It can effectively manage and control the separation and reassembly of Cassette and Pod, as well as the management of RFID information, while ensuring the operator's permissions to prevent operational errors and unauthorized access, thereby improving the automation level and overall efficiency of the semiconductor production line.

[0079] Therefore, the technical solutions provided by the embodiments of the present invention solve the technical problems in the related technologies where the separation and recombination of Cassette and POD, as well as the management of RFID information, often rely on manual inspection and recording, resulting in low reliability.

[0080] According to the above embodiments of the present invention, under the control of the Equipment Automation System (EAP), the identity information of the operator in the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES) to obtain a first verification result. This includes: after determining that the first carrier is placed on the placement table of the Automatic Box Opener (VPO), listening to the separation event to obtain a first listening result, wherein the first carrier includes a cassette and a packaged carrier pod; when the first listening result indicates that a separation event has been detected, the EAP reads the operator's account information and sends the account information to the Manufacturing Execution System (MES) so that the MES can verify the operator's identity based on the account information to obtain the first verification result.

[0081] In this example, when the first vehicle (carrying the Cassette and POD) is placed on the VPO placement table of the automated box opener, the VPO begins listening for separation events. Upon detecting an event, the operator enters their personal account information via EAP, and the system sends this information to the MES for real-time authentication. The MES verifies the operator's eligibility to perform the separation operation based on a pre-stored permission list. If authentication is successful, the EAP interface displays permission for the separation operation; otherwise, it indicates that the operator is not authorized. In other words, when the operator places the vehicle on the VPO platform and triggers the separation event, the EAP panel reads the operator's account and password and sends this information to the MES for authorization verification via a secure communication protocol.

[0082] The Vehicle Ownership Point (VPO), acting as an intermediary layer, receives verification requests from the Equipment Ownership Platform (EAP). The Manufacturing Execution System (MES) performs real-time comparisons based on a pre-defined user permission database. Upon successful verification, the MES sends a confirmation signal to the VPO, which then executes the separation operation. This process ensures that only operators with the appropriate permissions can perform vehicle separation, enhancing system security, preventing unauthorized operations, and reducing material mixing and operational errors during production.

[0083] Figure 3 This is a flowchart of the VPO operation in the carbon film region according to an embodiment of the present invention, as follows: Figure 3As shown, a carrier containing production chips and an empty carrier simultaneously enter the carbon film zone. Chip batch LOT01 is loaded into carrier A (Cassette ID: AC01, POD ID: AP01) and enters the carbon film zone; carrier B without production chips is placed in the carbon film zone (steps 1-1 and 1-2, empty carrier AC02 enters the carbon film zone and is pre-unbound by VPO to cassette ID: AC02, POD ID: AP02). Carrier A containing chips is split into cassette AC01 and POD AP01 using one of the VPO functions of this invention (POD and cassette separation). Chip batch LOT01 is loaded into the cassette AC01 without POD, which has been separated from carrier A, and normal production operations are performed. After production is completed, chip batch LOT01 is replaced with a clean cassette AC02 instead of cassette AC01. Cassette AC02 is reassembled from VPO and POD AC02 using VPO function two (POD and Cassette recombination), which includes dual authentication to prevent assembly errors. Carrier B AC02 and AP02 recombination is complete, and the carrier leaves the carbon film area. Carrier A's separated Cassette AC01 and Pod AP01, due to excessive post-operation contamination, will be recycled to the carrier cleaning area for cleaning.

[0084] Figure 4 This is a flowchart of the VPO (Vehicle Cleaning Area) operation according to an embodiment of the present invention, such as... Figure 4 As shown, vehicles used in Scenario 1 or other areas need to be cleaned in the cleaning area after being contaminated during the production process before they can be reused. For example, if vehicle A (cassette id: AC01, POD id: AP01, RFID recorded by the Pod base sensor: AC01) needs to have its Cassette and Pod relationship unbound by the VPO before cleaning, the third VPO function (clearing the Pod and Cassette relationship) is used. The entity Carrier is split into cassette AC01 and Pod AP01, and the RFID recorded by the POD base sensor is cleared. The POD and base are manually separated. The operator uses a cleaning machine to clean the separated Pod and Cassette. After cleaning, the disassembly of vehicle A remains unchanged, and the POD and base are manually reassembled. The VPO binds the Cassette and Pod, using the fourth VPO function of this invention (POD and Cassette relationship binding). Cassette AC01 and POD AP01 are bound together, and RFID AC01 is written to the Pod base sensor.

[0085] According to the above embodiments of the present invention, after the first verification result indicates that the identity information has been verified, the physical operation function of the automatic box opener (VPO) is used to automatically separate the cassette and the packaged carrier pod, including: opening the cassette and the packaged carrier pod through the separation function in the physical operation function of the automatic box opener (VPO); when it is detected that the cassette has been removed from the packaged carrier pod, the separation operation is synchronized to the manufacturing execution system (MES) through the equipment automation system (EAP).

[0086] In this embodiment, the Automated Box Opener (VPO) automatically opens and separates the Cassette and POD via an electric or pneumatic mechanism. Once separation is complete, the system detects the change in the Cassette's status after it has been removed from the POD. The Automatic Box Opener (EAP) synchronizes the separation operation information, including the carrier ID and operation time, to the Manufacturing Execution System (MES). The MES stores this information for later traceability and data analysis. Specifically, after receiving a successful verification signal, the VPO automatically opens and separates the Cassette and POD using its built-in mechanical device, while the EAP synchronizes the operation status and time information to the MES.

[0087] The physical operation of the VPO is based on preset mechanical commands and sensor feedback to ensure the accuracy and safety of the separation process; information synchronization relies on network communication between the VPO and the MES, and data encryption and error checking mechanisms are used to ensure the reliability of information transmission.

[0088] The aforementioned automated separation not only improves operational efficiency and reduces the error rate of manual operation, but also ensures the accuracy and timeliness of production data through real-time synchronization with MES, facilitating production line scheduling and management.

[0089] Figure 5 This is a flowchart illustrating the separation of POD and Cassette according to an embodiment of the present invention, such as... Figure 5 As shown, the user places the assembled pod on the VPO placement platform. The user clicks the "Separate" button on the computer screen. The user enters their account and password on the computer. The Equipment Automation System (EAP) sends the RFID data read from the base sensor, the equipment number, and the user's account and password to the Manufacturing Execution System (MES) for authorization verification and an opening request. After successful verification, the Pod and Cassette are automatically separated and opened by the VPO. The user removes the Cassette from the Pod. The user clicks the "Close" button on the computer. The EAP synchronizes the user's actions with the MES, which records the user's operation information and the corresponding pod's opening history. The Pod is then automatically closed by the VPO. The process ends.

[0090] According to the above embodiments of the present invention, the reassembly of the cassette and the packaged carrier Pod includes: after determining that the second carrier is placed on the placement table of the automatic box opener VPO, listening to the combination event to obtain a second listening result, wherein the second carrier includes the combined cassette and the packaged carrier Pod; after the second listening result indicates that the combination event has been detected, reading the second identification information of the second carrier and obtaining the third identification information through the equipment automation system EAP, comparing the second identification information with the third identification information to obtain a first comparison result; when the first comparison result indicates that the second identification information and the third identification information are consistent, controlling the cassette and the packaged carrier Pod to separate and open through the automatic box opener VPO; after determining that the cassette and the packaged carrier Pod have separated and opened, detecting that the cassette has been placed into the packaged carrier Pod, controlling the packaged carrier Pod to close through the automatic box opener VPO.

[0091] In this embodiment, when the second carrier is placed on the VPO platform, the system listens for a combination event. The EAP reads the barcode or RFID tag on the carrier to obtain its identification information and compares it with pre-stored information or information obtained from the MES. Only when the information matches will the VPO allow the automatic opening operation so that the operator can reassemble the Cassette and POD. That is, before the Cassette and POD are reassembled, the operator needs to authenticate themselves through the EAP panel and scan the barcode or RFID information of the Cassette, and the automatic box opener VPO performs a secondary verification.

[0092] In the above technical solution, the identity information of Cassette and POD is collected and compared in real time using the EAP reader and the RFID sensing device built into the VPO. Only when the information matches can the VPO allow the reassembly operation.

[0093] Dual authentication ensures the correct combination of Cassette and POD, avoids material errors in production, improves the yield and efficiency of the production line, and provides operators with a more intuitive operation confirmation process.

[0094] Figure 6 This is a flowchart of the POD and Cassette recombination according to an embodiment of the present invention, such as Figure 6As shown, the user places the assembled container on the VPO placement platform. The user clicks the "Assemble" button on the computer screen. The user enters their account password and scans the barcode on the Cassette. The Equipment Automation System (EAP) compares the barcode information scanned by the user with the information read by the sensor on the Pod base chip on the VPO placement platform. After successful verification, the Pod and Cassette are automatically separated and opened by the VPO. The user puts the Cassette back into the Pod and reassembles it. The user needs to scan the Cassette ID barcode already placed in the Pod with a barcode scanner. After comparing the RFID recorded on the Pod base sensor with the Cassette ID scanned by the user, the Pod will close only after successful verification. If verification fails, it will not close to avoid assembly errors. After the Pod closes, the EAP sends a message to the MES indicating that the Pod has closed, records the operation, and the process ends.

[0095] According to the above embodiments of the present invention, after detecting that a cassette has been placed into a packaged carrier Pod, the packaged carrier Pod is closed by controlling the automatic opener (VPO), including: after detecting that a cassette has been placed into a packaged carrier Pod, scanning the cassette placed in the packaged carrier Pod to obtain a first identification code of the cassette; comparing a second identification code recorded in the packaged carrier Pod with the first identification code to obtain a second comparison result; when the second comparison result indicates that the first identification code and the second identification code are consistent, the packaged carrier Pod is closed by controlling the automatic opener (VPO), and the recombination operation information is recorded simultaneously.

[0096] In this embodiment, after the Cassette is correctly placed into the POD, the VPO's sensors reconfirm that the information matches. Once confirmed, the VPO automatically closes the POD, completing the reassembly process. The EAP synchronously records the reassembly operation to the MES, including the new binding information. That is, after the Cassette is placed into the POD, the automatic box opener (VPO) detects the placement status of the Cassette using its built-in sensors, and automatically closes the POD upon confirmation.

[0097] The aforementioned automatic box opener (VPO) uses sensor data to monitor the position of the Cassette in real time. When the system confirms that the Cassette has been correctly placed in the POD, it automatically completes the closing operation through a mechanical device. The entire process is precisely controlled by the VPO's electronic control unit.

[0098] The automated closing process reduces manual operation time, ensures the accuracy of the reassembly operation, avoids production problems caused by incomplete closing or incorrect assembly, and further improves production efficiency and quality control.

[0099] According to the above embodiments of the present invention, after the Cassette and the Pod are reassembled, the information verification method further includes: after determining the reassembled Cassette and the Pod, listening to the clearing event to obtain a third listening result; after the third listening result indicates that the clearing event has been detected, obtaining the operator's account information and verifying the account information to obtain a third verification result; after the third verification result indicates that the account information has been verified, sending the first sensing information on the base of the Pod to the Manufacturing Execution System (MES) for verification through the Equipment Automation System (EAP) to verify whether the first carrier is loaded with a chip, obtaining a first verification result; when the first verification result indicates that the first carrier is loaded with a chip, clearing the information on the base.

[0100] In this embodiment, the Automated Box Opener (VPO) listens for emptying events. The operator places the carrier and submits an emptying request. The operator's identity is verified again via the Equipment Access Point (EAP) and the Manufacturing Execution System (MES) to confirm they have emptying authority. The MES checks if the carrier contains a chip; if the carrier is empty, it performs RFID information clearing. After clearing, the EAP synchronizes the operation record to the MES. In other words, before carrier cleaning, the operator sends a request to clear RFID information via the EAP; after verifying the operator's authority, the VPO removes the information from the RFID tag on the carrier base.

[0101] After the authorization verification is passed, the RFID reader / writer of the above-mentioned VPO performs an RFID information clearing operation. It interacts with the RFID tag through electromagnetic waves to clear the original information and prepare to receive new binding information.

[0102] The RFID information clearing process ensures that the RFID tags on the vehicle can be rewritten after cleaning, avoiding duplicate or incorrect RFID tag information and improving the accuracy of production material tracking.

[0103] Figure 7 This is a flowchart illustrating the clearing of the POD and Cassette relationship according to an embodiment of the present invention, as follows: Figure 7 As shown, the user places the assembled carrier on the VPO placement platform. The user clicks the "Bind Clear" button on the computer screen. The user enters their account password on the computer. The Equipment Automation System (EAP) sends the information read by the sensors on the Pod base chip from the VPO placement platform to the Manufacturing Execution System (MES) for verification. The MES verifies whether the carrier contains the production chip. After successful verification, it automatically clears the RFID tags on the Pod base. After clearing, the EAP sends a completion message to the MES, records the operation, and the process ends.

[0104] According to the above embodiments of the present invention, after the cassette and the packaged carrier Pod are reassembled, the information verification method further includes: after determining the reassembled cassette and the packaged carrier Pod, listening to the binding event to obtain a fourth listening result; after the fourth listening result indicates that the binding event has been detected, reading the sensor on the base of the packaged carrier Pod through the placement table of the automatic box opener VPO; when the reading result indicates that the sensor is empty, obtaining the operator's account information, verifying the operator's permissions through the account information, and obtaining a permission verification result; when the permission verification result indicates that the operator has operating permissions, opening the packaged carrier Pod through the automatic box opener VPO and scanning the packaged carrier Pod to obtain the third identification code of the packaged carrier Pod, while reading the fourth identification code of the cassette; sending the third identification code and the fourth identification code to the manufacturing execution system MES for verification, and controlling the packaged carrier Pod to close through the automatic box opener VPO; writing the third identification code and the fourth identification code through the equipment automation system EAP, and reporting the writing event to the manufacturing execution system MES.

[0105] In this embodiment, when the carrier is reassembled and placed on the VPO platform, the system listens for a binding event. The EAP first verifies whether the RFID information on the carrier base is empty. If it is empty, it then verifies the operator's authorization. After successful authorization verification, the EAP reads the Cassette's identification information and matches it with the POD's information. After confirming that the information matches, the EAP writes the Cassette's ID into the RFID tag on the POD base using the VPO's RFID reader / writer. After the writing operation is completed, the EAP reports the event to the Manufacturing Execution System (MES) and records the new binding information. That is, after the Cassette and POD are reassembled, the operator triggers a binding event, the VPO verifies that the RFID information on the carrier base and Cassette is empty or not bound, confirms the operator's authorization, and writes the Cassette's ID into the POD base's RFID tag.

[0106] The aforementioned Automated Box Opener (VPO) utilizes RFID readers and sensor technology, combined with operator authorization verification, to ensure the correct writing of RFID information. Through electromagnetic induction, the RFID reader writes the Cassette's ID information into the RFID tag on the POD base, and simultaneously synchronizes the operation result to the Manufacturing Execution System (MES) via the EAP.

[0107] Accurate binding of RFID information ensures the tracking and management of production materials, improves the level of production automation, and reduces production failures and material waste caused by information mismatch.

[0108] Figure 8This is a flowchart illustrating the binding relationship between POD and Cassette according to an embodiment, such as... Figure 8 As shown, the user places the assembled pod onto the VPO placement platform. The user clicks the "Binding Write" button on the computer screen. The VPO placement platform reads the sensor on the Pod base to check if the RFID tag is empty; only if it is empty can the writing operation proceed. The user enters their account and password, and the Manufacturing Execution System (MES) verifies their permissions. After successful verification, the VPO opens the Pod, revealing the Cassette inside for the user to scan the barcode. The user scans the barcodes on both the Cassette and the Pod using their computer. The Equipment Automation Platform (EAP) sends the scanned barcode information and the Pod's barcode information to the MES for verification. Regardless of whether the verification passes, the Pod automatically closes. After successful verification, the EAP writes the scanned Cassette ID into the RFID tag on the Pod base. The EAP reports the write event to the MES, which then updates the binding relationship, completing the process.

[0109] It's important to note that the Equipment Automation System (EAP) manages the VPO equipment with a heartbeat, monitoring its offline status every few seconds. No work can be performed while the equipment is offline. All VPO equipment operations require permission from the Manufacturing Execution System (MES). Therefore, all requests and actions of the VPO equipment are recorded in the MES, including the time, user, and specific actions performed on each vehicle. Corresponding reports are provided for viewing and analysis.

[0110] The technical solutions provided by the above embodiments of the present invention address the issue that special processes, such as the carbon film zone, require the separation of Cassettes and Pods. After these processes, the reassembly process can easily lead to confusion, discrepancies between inventory and records, affecting subsequent automated operations and even causing scrap. It is necessary to control the opening permissions of each VPO in different areas, such as simple opening and writing RFID tags, and clearing RFID tags. Operator permissions need to be controlled to prevent unauthorized personnel from opening Pods, which could lead to inventory discrepancies. The system needs to record and track every opening, writing, and clearing of RFID tags. Since the VPO is a semi-automatic machine, a secondary verification process is needed during reassembly to ensure correct placement. User operations often involve disassembling multiple PODs and Cassettes in one area, and shift handover issues frequently lead to confusion and forgetting which items are paired. RFID clearing, unbinding, and binding / writing are performed in the Carrier cleaning area. To address the issue of duplicate RFID entries written on-site, the RFID information, which is the Cassette number, is recorded in the Pod's base chip. This information also needs to be manually recorded in the MES. This feature optimizes the manual recording step in the MES by automatically recording the Cassette ID obtained from the scan into the Pod's base sensor chip and simultaneously recording the information into the MES.

[0111] The aforementioned technical solution achieves a crucial step in fully automating chip manufacturing. The Pod's base has a sensor chip that records RFID data. During fully automated production, mixing Pods and Cassettes can cause discrepancies between the production batch read by the sensor base and the actual batch, leading to serious consequences such as production scrap. Simultaneously, this function optimizes workflows, eliminating the need for manual input of Cassette and Pod binding relationships into the MES system, significantly improving production efficiency. Solving this problem prevents production failures caused by human error, greatly improving production yield and operational efficiency. Furthermore, through multi-system integrated communication and logical interaction technologies, it efficiently and accurately achieves VPO access control, accurate separation and combination of Pods and Cassettes, and multi-system information synchronization, resolving the information synchronization issue related to Pod and Cassette binding relationships.

[0112] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that this application is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to this application. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to this application.

[0113] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods according to the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk), and includes several instructions to cause a terminal device (which may be a mobile phone, computer, server, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0114] Example 2

[0115] According to embodiments of the present invention, an information verification device based on access control is also provided for implementing the above-described information verification method based on access control. Figure 9 This is a schematic diagram of an information verification device based on access control according to an embodiment of the present invention, such as... Figure 9 As shown, the access control-based information verification device includes: a first verification unit 901, a separation unit 903, a first processing unit 905, a second verification unit 907, and a second processing unit 909. The access control-based information verification device will be described below.

[0116] The first verification unit 901 is used to verify the identity information of operators in the semiconductor manufacturing process and obtain the first verification result through communication between the automatic box opener (VPO) and the manufacturing execution system (MES) under the control of the equipment automation system (EAP).

[0117] The separation unit 903 is used to automatically separate the cassette and the packaged carrier Pod by utilizing the physical operation function of the automatic box opener VPO after the first verification result indicates that the identity information has been verified.

[0118] The first processing unit 905 is used to clear the RFID information on the base of the packaged carrier Pod after determining that the cassette and the packaged carrier Pod are separated, or to scan and record the first identification information of the cassette into the packaged carrier Pod before the cassette is placed into the packaged carrier Pod.

[0119] The second verification unit 907 is used to perform dual authentication on the Cassette and the Pod before recombining them, and obtain a second verification result.

[0120] The second processing unit 909 is used to reassemble the Cassette and the Pod after the second verification result indicates that the Cassette and the Pod have passed verification.

[0121] It should be noted that the first verification unit 901, separation unit 903, first processing unit 905, second verification unit 907 and second processing unit 909 mentioned above correspond to steps S202 to S210 in the above embodiments. The three modules and the corresponding steps implement the same instances and application scenarios, but are not limited to the content disclosed in the above embodiments.

[0122] As can be seen from the above, in the scheme described in the above embodiments of the present invention, the first verification unit, under the control of the Equipment Automation System (EAP), verifies the identity information of the operator during the semiconductor manufacturing process through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES), and obtains a first verification result; after the first verification result indicates that the identity information has been verified, the separation unit automatically separates the cassette and the packaged carrier pod using the physical operation function of the automatic box opener (VPO); after determining that the cassette and the packaged carrier pod are separated, the first processing unit clears the RFID information on the base of the packaged carrier pod, or scans and records the first identification information of the cassette into the packaged carrier pod before the cassette is placed into the packaged carrier pod; the second verification unit reassembles the cassette and the packaged carrier pod. Before assembly, the Cassette and Pod undergo dual authentication to obtain a second authentication result. After the second authentication result indicates that the Cassette and Pod have passed authentication, the second processing unit reassembles them. This achieves dual authentication and access control during the separation, reassembly, relationship clearing, and relationship binding of the Cassette and Pod by integrating VPO, EAP, and MES. Furthermore, through automated physical operations and RFID information management, it significantly improves the efficiency, security, and accuracy of carrier management in semiconductor manufacturing. It effectively manages and controls the separation and reassembly of Cassettes and Pods, as well as the management of RFID information, while ensuring operator access rights to prevent operational errors and unauthorized access, thereby enhancing the automation level and overall efficiency of the semiconductor production line.

[0123] Therefore, the technical solutions provided by the embodiments of the present invention solve the technical problems in the related technologies where the separation and recombination of Cassette and POD, as well as the management of RFID information, often rely on manual inspection and recording, resulting in low reliability.

[0124] Optionally, the first verification unit includes: a first monitoring module, configured to monitor the separation event after determining that the first carrier is placed on the placement table of the automatic box opener VPO, and obtain a first monitoring result, wherein the first carrier includes a cassette and a packaged carrier Pod; and a first verification module, configured to, when the first monitoring result indicates that a separation event has been detected, read the operator's account information through the Equipment Automation System (EAP) and send the account information to the Manufacturing Execution System (MES) to use the MES to authenticate the operator based on the account information, and obtain a first verification result.

[0125] Optionally, the separation unit includes: an opening module for opening the cassette and the packaged carrier pod via the separation function in the physical operation function of the automatic box opener (VPO); and a synchronization module for synchronizing the separation operation to the manufacturing execution system (MES) via the equipment automation system (EAP) when the cassette is detected to be removed from the packaged carrier pod.

[0126] Optionally, the second processing unit includes: a second listening module, configured to listen to the combination event and obtain a second listening result after determining that the second carrier is placed on the placement table of the automatic box opener VPO, wherein the second carrier includes a combined cassette and a packaged carrier Pod; a first comparison module, configured to read the second identification information of the second carrier and obtain the third identification information through the equipment automation system EAP after the second listening result indicates that a combination event has been detected, and compare the second identification information with the third identification information to obtain a first comparison result; a first control module, configured to control the cassette and the packaged carrier Pod to separate and open through the automatic box opener VPO when the first comparison result indicates that the second identification information and the third identification information are consistent; and a first control module, configured to control the packaged carrier Pod to close through the automatic box opener VPO after determining that the cassette and the packaged carrier Pod have separated and opened, and after detecting that the cassette has been placed into the packaged carrier Pod.

[0127] Optionally, the first control module includes: a scanning submodule, used to scan the cassette placed in the packaged carrier Pod after detecting that the cassette has been placed in the packaged carrier Pod, and obtain a first identification code of the cassette; a comparison submodule, used to compare a second identification code recorded in the packaged carrier Pod with the first identification code, and obtain a second comparison result; and a control submodule, used to control the packaged carrier Pod to close via an automatic box opener (VPO) when the second comparison result indicates that the first identification code and the second identification code are consistent, and simultaneously record the recombination operation information.

[0128] Optionally, the information verification device further includes: a first listening unit, used to listen for an emptying event after reassembling the Cassette and the Pod, and after determining the reassembled Cassette and Pod, to obtain a third listening result; a first acquisition unit, used to acquire the operator's account information and verify the account information after the third listening result indicates that an emptying event has been detected, to obtain a third verification result; a third verification unit, used to send the first sensing information on the base of the Pod to the Manufacturing Execution System (MES) for verification through the Equipment Automation System (EAP) after the third verification result indicates that the account information has been verified, so as to use the MES to verify whether a chip is loaded in the first carrier, and to obtain a first verification result; and an emptying unit, used to empty the information on the base when the first verification result indicates that a chip is loaded in the first carrier.

[0129] Optionally, the information verification device further includes: a second listening unit, used to listen for binding events after reassembling the Cassette and the Pod, and after determining the reassembled Cassette and Pod, to obtain a fourth listening result; a second acquisition unit, used to read the sensor on the base of the Pod via the placement table of the automatic box opener VPO after the fourth listening result indicates that a binding event has been detected, and to acquire the operator's account information when the reading result indicates that the sensor is empty, and to verify the operator's permissions through the account information to obtain the permission verification result; a third The acquisition unit is used to open the packaged carrier Pod via the automatic box opener (VPO) and scan the packaged carrier Pod to obtain its third identification code, while simultaneously reading the fourth identification code of the cassette. The verification unit is used to send the third and fourth identification codes to the manufacturing execution system (MES) for verification and to control the packaged carrier Pod to close via the automatic box opener (VPO). The reporting unit is used to write the third and fourth identification codes via the equipment automation system (EAP) and report the write event to the manufacturing execution system (MES).

[0130] According to another aspect of the present invention, a processor is also provided, which is used to run a program, wherein the program executes any of the above-described information verification methods based on access control.

[0131] According to another aspect of the present invention, a computer program product is also provided, including computer instructions, which, when executed by a processor, perform any of the above-described information verification methods based on access control.

[0132] According to another aspect of the present invention, a computer-readable storage medium is also provided, the computer-readable storage medium including a stored program, wherein the program executes any of the above-described information verification methods based on access control.

[0133] Optionally, in this embodiment, the computer-readable storage medium may be located in any computer terminal in a group of computer terminals in a computer network, or in any communication device in a group of communication devices.

[0134] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: under the control of the Equipment Automation System (EAP), the identity information of the operator during the semiconductor manufacturing process is verified through communication between the Automatic Box Opener (VPO) and the Manufacturing Execution System (MES) to obtain a first verification result; after the first verification result indicates that the identity information has been verified, the physical operation function of the Automatic Box Opener (VPO) is used to automatically separate the cassette and the packaged carrier pod; after confirming that the cassette and the packaged carrier pod are separated, the RFID information on the base of the packaged carrier pod is cleared, or, before the cassette is placed into the packaged carrier pod, the first identification information of the cassette is scanned and recorded into the packaged carrier pod; before reassembling the cassette and the packaged carrier pod, the cassette and the packaged carrier pod are subjected to dual authentication to obtain a second verification result; after the second verification result indicates that the cassette and the packaged carrier pod have been verified, the cassette and the packaged carrier pod are reassembled.

[0135] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: after determining that the first carrier is placed on the placement table of the automatic box opener VPO, the separation event is monitored to obtain a first monitoring result, wherein the first carrier includes a cassette and a package carrier Pod; when the first monitoring result indicates that a separation event has been detected, the operator's account information is read through the Equipment Automation System (EAP) and sent to the Manufacturing Execution System (MES) to use the MES to authenticate the operator based on the account information to obtain a first verification result.

[0136] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: opening the cassette and the packaged carrier Pod through the separation function in the physical operation function of the automatic box opener VPO; and synchronizing the separation operation to the manufacturing execution system MES through the equipment automation system EAP when it is detected that the cassette has been removed from the packaged carrier Pod.

[0137] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: after determining that the second carrier is placed on the placement table of the automatic box opener VPO, a combination event is monitored to obtain a second monitoring result, wherein the second carrier includes a combined cassette and a packaged carrier Pod; after the second monitoring result indicates that a combination event has been detected, the second identification information of the second carrier is read and the third identification information is obtained through the Equipment Automation System (EAP), and the second identification information is compared with the third identification information to obtain a first comparison result; when the first comparison result indicates that the second identification information and the third identification information are consistent, the cassette and the packaged carrier Pod are separated and opened by the automatic box opener VPO; after determining that the cassette and the packaged carrier Pod are separated and opened, and after detecting that the cassette is placed into the packaged carrier Pod, the packaged carrier Pod is closed by the automatic box opener VPO.

[0138] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: after detecting that the cassette is placed into the packaged carrier Pod, scanning the cassette placed in the packaged carrier Pod to obtain a first identification code of the cassette; comparing the second identification code recorded in the packaged carrier Pod with the first identification code to obtain a second comparison result; when the second comparison result indicates that the first identification code and the second identification code are consistent, controlling the packaged carrier Pod to close via the automatic box opener VPO, and simultaneously recording the recombination operation information.

[0139] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: after reassembling the Cassette and the Pod, after determining the reassembled Cassette and Pod, listening for an emptying event to obtain a third listening result; after the third listening result indicates that an emptying event has been detected, obtaining the operator's account information and verifying the account information to obtain a third verification result; after the third verification result indicates that the account information has been verified, sending the first sensing information on the base of the Pod to the Manufacturing Execution System (MES) for verification via the Equipment Automation System (EAP) to verify whether a chip is loaded in the first carrier, obtaining a first verification result; when the first verification result indicates that a chip is loaded in the first carrier, clearing the information on the base.

[0140] Optionally, in this embodiment, the computer-readable storage medium is configured to store program code for performing the following steps: after reassembling the cassette and the packaged carrier Pod, after determining the reassembled cassette and packaged carrier Pod, a binding event is monitored to obtain a fourth monitoring result; after the fourth monitoring result indicates that a binding event has been detected, the sensor on the base of the packaged carrier Pod is read through the placement table of the automatic box opener (VPO); when the reading result indicates that the sensor is empty, the operator's account information is obtained, and the operator's permissions are verified through the account information to obtain a permission verification result; when the permission verification result indicates that the operator has operating permissions, the packaged carrier Pod is opened through the automatic box opener (VPO), and the packaged carrier Pod is scanned to obtain the third identification code of the packaged carrier Pod, while the fourth identification code of the cassette is read; the third and fourth identification codes are sent to the manufacturing execution system (MES) for verification, and the packaged carrier Pod is closed through the automatic box opener (VPO); the third and fourth identification codes are written through the equipment automation system (EAP), and the writing event is reported to the manufacturing execution system (MES).

[0141] The sequence numbers of the above embodiments of the present invention are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0142] In the above embodiments of the present invention, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0143] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units can be a logical functional division, and in actual implementation, there may be other division methods. For instance, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling, direct coupling, or communication connection may be through some interfaces; the indirect coupling or communication connection between units or modules may be electrical or other forms.

[0144] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0145] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0146] Furthermore, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0147] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, read-only memory (ROM), random access memory (RAM), portable hard drives, magnetic disks, or optical disks.

[0148] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for verifying information based on authority card control, characterized in that, The application relates to information processing of a cassette and a pod in semiconductor manufacturing, comprising: Under the control of an equipment automation system (EAP), verifying identity information of an operator in a semiconductor manufacturing process through communication between an automatic pod opener (VPO) and a manufacturing execution system (MES) to obtain a first verification result; After the first verification result indicates that the identity information is verified, automatically separating the cassette and the pod by using a physical operation function of the automatic pod opener (VPO); After it is determined that the cassette and the pod are separated, clearing RFID information on a base of the pod, or scanning and recording first identification information of the cassette into the pod before the cassette is placed into the pod; Before the cassette and the pod are recombined, performing double identity verification on the cassette and the pod to obtain a second verification result; After the second verification result indicates that the cassette and the pod are verified, recombining the cassette and the pod.

2. The information verification method based on the authority card control according to claim 1, characterized in that, Under the control of an equipment automation system (EAP), verifying identity information of an operator in a semiconductor manufacturing process through communication between an automatic pod opener (VPO) and a manufacturing execution system (MES) to obtain a first verification result, comprising: After it is determined that a first carrier is placed on a placement table of the automatic pod opener (VPO), listening to a separation event to obtain a first listening result, wherein the first carrier comprises the cassette and the pod; When the first listening result indicates that the separation event is listened to, reading account information of the operator by using the equipment automation system (EAP) and sending the account information to the manufacturing execution system (MES) to perform identity verification on the operator based on the account information by using the manufacturing execution system (MES) to obtain the first verification result.

3. The method of claim 1, wherein the method further comprises: After the first verification result indicates that the identity information is verified, automatically separating the cassette and the pod by using a physical operation function of the automatic pod opener (VPO), comprising: Opening the cassette and the pod by using a separation function in the physical operation function of the automatic pod opener (VPO); When it is monitored that the cassette is taken out of the pod, synchronizing a separation operation to the manufacturing execution system (MES) by using the equipment automation system (EAP).

4. The method of claim 1, wherein the method further comprises: Recombining the cassette and the pod, comprising: After determining that the second carrier is placed on the placement table of the automatic unpacking device VPO, a combination event is monitored to obtain a second monitoring result, wherein the second carrier includes the combined cassette and the pod; After the second monitoring result indicates that the combination event is monitored, the second identification information of the second carrier is read by the equipment automation system EAP to obtain third identification information, the second identification information is compared with the third identification information to obtain a first comparison result; When the first comparison result indicates that the second identification information is consistent with the third identification information, the cassette and the pod are separated and opened by the automatic unpacking device VPO; After determining that the cassette and the pod are separated and opened, it is detected that the cassette is placed in the pod, and the pod is closed by the automatic unpacking device VPO.

5. The method of claim 4, wherein the information verification is performed based on the authority card. After detecting that the cassette is placed in the pod, the pod is closed by the automatic unpacking device VPO, comprising: After detecting that the cassette is placed in the pod, the cassette placed in the pod is scanned to obtain a first identification code of the cassette; The second identification code recorded by the pod is compared with the first identification code to obtain a second comparison result; When the second comparison result indicates that the first identification code is consistent with the second identification code, the pod is closed by the automatic unpacking device VPO, and the operation information of the recombination is recorded.

6. The method of claim 2, wherein the information verification is based on a permission card. After the cassette and the pod are recombined, the information verification method further comprises: After determining the recombined cassette and the pod, an emptying event is monitored to obtain a third monitoring result; After the third monitoring result indicates that the emptying event is monitored, the account information of the operator is obtained, and the account information is verified to obtain a third verification result; After the third verification result indicates that the account information is verified, the first sensing information sensed on the base of the pod is sent to the manufacturing execution system MES for verification by the equipment automation system EAP, so as to check whether the chip is loaded in the first carrier by the manufacturing execution system MES to obtain a first checking result; When the first checking result indicates that the chip is loaded in the first carrier, the information on the base is emptied.

7. The method of claim 4, wherein the information verification is performed by using a permission card. After the cassette and the pod are recombined, the information verification method further comprises: After determining the recombined cassette and the pod, a binding event is listened to, and a fourth listening result is obtained; After the fourth listening result indicates that the binding event is listened to, a sensor on the base of the pod is read by the placement table of the VPO, and when the reading result indicates that the sensor is empty, the account information of the operator is obtained, the operator is verified by the account information, and a permission verification result is obtained; When the permission verification result indicates that the operator has operation permission, the pod is opened by the VPO, and the pod is scanned to obtain a third identification code of the pod and a fourth identification code of the cassette; The third identification code and the fourth identification code are sent to the MES for verification, and the pod is closed by the VPO; The third identification code and the fourth identification code are written by the EAP, and a writing event is reported to the MES.

8. An information verification device based on access control, characterized in that, The information processing of the cassette and the pod applied to semiconductor manufacturing includes: A first verification unit is configured to verify the identity information of an operator in a semiconductor manufacturing process by communication between a VPO and an MES under the control of an EAP, and obtain a first verification result; A separation unit is configured to automatically separate the cassette and the pod by a physical operation function of the VPO when the first verification result indicates that the identity information is verified; A first processing unit is configured to clear RFID information on the base of the pod after determining that the cassette and the pod are separated, or scan and record first identification information of the cassette into the pod before the cassette is put into the pod; A second verification unit is configured to perform double identity verification on the cassette and the pod before recombining the cassette and the pod, and obtain a second verification result; A second processing unit is configured to recombine the cassette and the pod when the second verification result indicates that the cassette and the pod are verified.

9. A computer-readable storage medium, characterized in that, The computer readable storage medium includes a stored program, wherein the program executes the information verification method based on permission card control according to any one of claims 1 to 7.

10. A computer program product comprising computer instructions, characterized in that, The computer instructions are executed by the processor to execute the information verification method based on permission card control according to any one of claims 1 to 7.

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