Calibration and debugging method for light path of five-axis galvanometer laser processing system

Abstract

The invention relates to the field of laser processing, provides a calibration and debugging method for a light path of a five-axis galvanometer laser processing system, and aims to realize accurate collimation of the light path of a five-axis galvanometer. Comprising a laser generator, a reflector, a beam expander, a dynamic deflection scanning module and a motion platform. The dynamic deflection scanning module comprises a focusing module, a galvanometer module and a focusing field lens module; the galvanometer module comprises a galvanometer I, a galvanometer II, a galvanometer III and a galvanometer IV; the focusing field lens module comprises a focusing field lens; the optical path calibration and debugging method comprises the following steps: S1, setting a light beam limiting structure; s2, electrically-controlled fine adjustment of the angles of the mirror surfaces of the four galvanometers; s3, optical axis collinearity verification; s4, the deflection coefficients of the third galvanometer and the fourth galvanometer are calibrated; s5, galvanometer cooperative deflection coefficient calibration; key problems of light path transmission, focusing, collimation and the like can be systematically solved, and the five-axis galvanometer laser processing equipment has important significance in effectively improving the overall performance of processing precision, stability and the like of the five-axis galvanometer laser processing equipment.

Description

Technical Field

[0001] This application relates to the field of laser processing, and in particular to a method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system. Background Technology

[0002] Laser processing technology is one of the most widely used applications of lasers, applied in almost everything from computer chips to the manufacture of large aircraft structural components. Compared with traditional machining techniques, laser processing technology has many outstanding advantages, including being non-contact, having high energy concentration, being simple to operate, being highly efficient, and being energy-saving and environmentally friendly.

[0003] Currently, commonly used two-axis or three-axis galvanometer laser processing can only control the laser focal point position, not the laser beam attitude, resulting in limited degrees of freedom. Furthermore, because the laser beam's energy is Gaussian distributed, the processed microholes or surfaces are often conical, making it difficult to control and eliminate the conical surface. It also cannot process complex microstructures such as straight-walled holes or negative-tapered microstructures. Five-axis galvanometer lasers, however, can control the angle between the laser beam and the processing surface. The beam tilt angle can be adjusted in real-time based on structural characteristics and processing depth to control the shape and morphology of the workpiece, thereby achieving high-quality processing of various complex microstructures, such as high aspect ratio straight-walled holes, negative-tapered holes, irregularly shaped grooves, and positive and negative-tapered surface microstructures.

[0004] In a five-axis galvanometer laser processing system, the calibration and adjustment of the optical path are prerequisites for ensuring that the laser focus and beam attitude move along the preset path. If the beam focus and attitude deviate from the ideal trajectory, it will not only lead to a decrease in processing quality but may even cause damage to the substrate. Currently, there is a lack of systematic methods for optical path calibration and adjustment in five-axis galvanometer laser processing systems in published patents. Therefore, developing a complete method for optical path calibration and adjustment in five-axis galvanometer laser processing systems is of great significance for effectively improving the overall performance of five-axis galvanometer laser processing systems. Summary of the Invention

[0005] In view of the above practical problems and the shortcomings of the existing technology, the main technical problem to be solved by the present invention is to provide a method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system, so as to achieve precise control of the five-axis galvanometer laser processing system.

[0006] To address the aforementioned technical problems, this application provides a method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system, employing the following technical solution:

[0007] A method for calibrating and debugging the optical path of a five-axis laser processing system is disclosed. The five-axis galvanometer laser processing system includes a laser generator, a reflector, a beam expander, a dynamic deflection scanning module, and a motion platform. The reflector includes an adjustment device for adjusting the direction of the laser beam. The beam expander is used to adjust the diameter and divergence angle of the laser beam so that the laser beam enters the dynamic deflection scanning module in a collimated state. The dynamic deflection scanning module includes a focusing module, a galvanometer module, and a focusing field lens module for controlling the position of the laser focal point and the attitude of the laser beam. The galvanometer module includes galvanometer one, galvanometer two, galvanometer three, and galvanometer four. The focusing field lens module includes a focusing field lens. A processing surface is provided on the motion platform.

[0008] The optical path calibration and debugging method includes the following steps:

[0009] S1. Set up a beam limiting structure: Install a shield with a light aperture of ≤0.5mm at the light inlet and light outlet of the focusing field lens to limit the spot range of the incident and emitted laser beams.

[0010] S2, Electronic fine-tuning of the angles of the four galvanometer mirrors:

[0011] Power on the four galvanometers and turn on the laser generator to output a low-power indicator laser;

[0012] Observe the projection position of the laser beam output from the galvanometer module onto the field mirror entrance shield;

[0013] When the laser beam's projection point deviates from the light inlet in the X-axis direction, the mirror angles of galvanometers two and four are adjusted synchronously to gradually bring the laser projection point closer to the light inlet; or when the laser beam's projection point deviates from the light inlet in the Y-axis direction, the mirror angles of galvanometers one and three are adjusted synchronously to gradually bring the laser projection point closer to the light inlet.

[0014] S3, Optical axis collinearity verification:

[0015] A laser spot position detection sensor (PSD) is installed on the motion platform below the focusing field lens to detect the position coordinates of the laser spot projected onto it in the X and Y axes. First, the position data of the spot on the PSD is collected at the initial position of the motion platform. Then, the motion platform is operated to rise by 1 mm, and the position data of the spot on the PSD is collected again.

[0016] If the deviation of the two acquired light spot positions in the X and Y axes is controlled within 10 μm, it can be determined that the laser beam output from the galvanometer module is collinear with the central axis of the focusing field mirror, and proceed to the next step; otherwise, return to step S3 for iterative calibration.

[0017] Calibration of deflection coefficients for S4, galvanometers three and four:

[0018] Keep galvanometers 1, 2 and 4 fixed, and send an angle change command to galvanometer 3. According to the optical theory of five-axis galvanometer laser processing, the angle change of galvanometer 3 corresponds to the linear distance of the laser beam scanning on the processing surface. This distance has a theoretically calculated value.

[0019] The actual linear distance of the laser beam output from the galvanometer module, after passing through the focusing field lens, is obtained by measuring the image using an optical microscope. The actual scanning distance of the laser beam on the processing surface is compared with the theoretical scanning distance. The angle change command of the galvanometer is multiplied by a deflection coefficient, so that the actual scanning distance on the processing surface gradually approaches the theoretical scanning distance.

[0020] Similarly, galvanometer four should be calibrated independently;

[0021] S5. Calibration of galvanometer-coordinated deflection coefficients;

[0022] An angle change command is sent to galvanometer three or galvanometer four, at which point the position of the light spot projected on the PSD will shift accordingly; at the same time, an angle change command is sent to galvanometer one or galvanometer two until the light spot on the PSD returns to the initial light spot position acquired in step S3.

[0023] Analyze the correspondence between the angular changes of galvanometer three and galvanometer one or galvanometer two and galvanometer four, calculate their proportional coefficients, establish the proportional coefficient relationship between them, and form a collaborative control model for independent compensation control of the angular axis in five-axis motion.

[0024] In a preferred embodiment, the first galvanometer is installed in the mounting hole of the corresponding galvanometer fixture, the main axis of the first galvanometer is collinear with the Y-axis, and the projection of the mirror surface of the first galvanometer in the XOZ plane makes an angle of approximately 135° with the X-axis.

[0025] The second galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the second galvanometer is collinear with the X-axis. The projection of the mirror surface of the second galvanometer in the YOZ plane has an angle of approximately 45° with the Y-axis.

[0026] The third galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the third galvanometer is collinear with the Z-axis. The projection of the mirror surface of the third galvanometer in the XOY plane makes an angle of approximately 135° with the X-axis.

[0027] The fourth galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the fourth galvanometer is collinear with the Y-axis. The projection of the mirror surface of the fourth galvanometer in the XOZ plane has an angle of approximately 135° with the X-axis.

[0028] In a preferred embodiment, the adjustment of the optical path includes the three-axis movement of the laser focus in the X, Y, and Z directions, and the angles α and β between the projections of the laser beam onto the XOZ and YOZ planes and the X and Z axes, respectively.

[0029] The three and four galvanometers work together with the focusing module to control the movement of the laser focus in the X, Y, and Z directions. The coordinated deflection coefficient calibration of the three galvanometers is used to control the angle α between the projection of the laser beam on the XOZ plane and the X-axis. The coordinated deflection coefficient calibration of the two galvanometers is used to control the angle β between the projection of the laser beam on the YOZ plane and the Z-axis.

[0030] In summary, this application has the following beneficial effects:

[0031] The method provided by this invention includes setting a beam limiting structure, electronically controlled fine-tuning of the mirror angles of the four galvanometers, verification of optical axis collinearity, calibration of the deflection coefficients of galvanometers three and four, and calibration of the galvanometer collaborative deflection coefficients. It provides a complete and practical method for calibrating and debugging the optical path of a five-axis laser processing system, which can systematically solve key problems such as optical path transmission, focusing, and collimation. It is of great significance for effectively improving the overall performance of five-axis laser processing equipment, such as processing accuracy and stability. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the five-axis laser processing system in a preferred embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the five-axis laser processing principle in a preferred embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram illustrating the initial installation position of the four galvanometers in a preferred embodiment of the present invention;

[0035] Figure 4 This is a schematic diagram of the beam limiting structure in a preferred embodiment of the present invention;

[0036] Figure 5 This is a schematic diagram illustrating the principle of the electrically controlled fine-tuning of the four-mirror angle in a preferred embodiment of the present invention, wherein... Figure 5 a is a schematic diagram showing the projection position of the laser beam output from the galvanometer module onto the entrance shield. Figure 5 b is a schematic diagram showing that the laser cannot be emitted from the output port when there is a monotonic galvanometer with two or four galvanometers. Figure 5 c is a schematic diagram showing that the laser beam and the central axis of the focusing field mirror are collinear;

[0037] Figure 6 This is a schematic diagram illustrating the principle of deflection coefficient calibration for galvanometers three and four in a preferred embodiment of the present invention, wherein... Figure 6 a is a schematic diagram of the theoretical scanning distance Δd. Figure 6 b is a schematic diagram of the actual straight-line distance Δd' of the scan;

[0038] Figure 7 This is a schematic diagram illustrating the principle of coordinated deflection coefficient calibration of galvanometers one / three or two / four in a preferred embodiment of the present invention, wherein... Figure 7 a is a schematic diagram showing that the initial transmission path is collinear with the central axis of the field lens module. Figure 7 b is a schematic diagram showing the shift in the position of the light spot. Figure 7 c is a schematic diagram showing the light spot position returning to the initial light spot position.

[0039] Figure reference numerals: 1. Laser generator; 2. Laser beam; 27. Laser beam output from the galvanometer module; 271. Laser projection point; 28. Laser beam output from the field lens module; 281. Projection onto the YOZ plane; 282. Laser focus; 283. Projection onto the XOZ plane; 3. First reflecting mirror; 4. Beam expander; 5. Second reflecting mirror; 6. Third reflecting mirror; 7. Focusing module; 8. Galvanometer module; 81. Galvanometer fixture; 82. Main spindle; 83. Mirror surface; 9. Field lens module; 91. Inlet shield; 911. Inlet; 92. Focusing field lens; 93. Outlet shield; 931. Outlet; 10. Motion platform; 11. Laser spot position detection sensor (PSD). Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0041] The following is in conjunction with the appendix Figures 1-7 This application will be described in further detail.

[0042] This embodiment provides a method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system, standardizing the adjustment process and significantly improving the adjustment efficiency and processing accuracy of the five-axis galvanometer laser processing equipment. This method can systematically solve key problems such as optical path transmission, focusing, and collimation, and is of great significance for effectively improving the overall performance of the five-axis galvanometer laser processing equipment, including processing accuracy and stability.

[0043] In this embodiment, as Figure 1As shown, the five-axis galvanometer laser processing system includes a laser generator 1, a reflector, a beam expander 4, a dynamic deflection scanning module, and a motion platform 10. The laser generator 1 outputs the laser beam 2 required for processing. The reflector adjusts the direction of the laser beam 2. The beam expander 4 adjusts the diameter and divergence angle of the laser beam 2, so that the laser beam 2 enters the dynamic deflection scanning module in a collimated state. The dynamic deflection scanning module controls the position of the laser focus 282 (which is the laser focus of the laser beam output from the field lens module) and the attitude of the laser beam 28 output from the field lens module. The dynamic deflection scanning module includes a focusing module 7, a galvanometer module 8, and a focusing field lens module 9. The galvanometer module includes galvanometer one, galvanometer two, galvanometer three, and galvanometer four. The focusing field lens module includes a focusing field lens 92. A processing surface is provided on the motion platform 10.

[0044] In this embodiment, the coordinate system of the five-axis galvanometer laser processing system is established with the direction of the laser beam 2 output from the laser generator as the negative X-axis. The coordinates of the system include the projection 281 of the laser beam 28 output from the field lens module onto the YOZ plane, the projection 283 of the laser beam 28 onto the XOZ plane, and the laser focus 282 of the laser beam 28 output from the field lens module on the processing surface. The angle between the projection of the laser beam 28 output from the field lens module onto the XOZ plane and the X-axis is set to α, and the angle between the projection of the laser beam 28 output from the field lens module onto the YOZ plane and the Z-axis is set to β. The "five axes" of the five-axis galvanometer laser processing system specifically include two parts of motion: one is the three-axis movement of the laser focus 282 in the X, Y, and Z directions; the other is the adjustment of two angular axes (α angle and β angle) (e.g., ...). Figure 2 (As shown).

[0045] The laser beam 28 output from the field mirror module is controlled along these five axes using a galvanometer module 8. The galvanometer module 8 includes four galvanometers and four galvanometer fixtures 81 for mounting the galvanometers, such as... Figure 3 The spindle 82 of the galvanometer is mounted in the preset mounting hole of the galvanometer fixture 81. The galvanometer and the galvanometer fixture 81 are installed using a hole-shaft fit method, and the hole-shaft fit tolerance is ≤0.016mm. The spindle 82 is connected to a drive motor. The four galvanometers are galvanometer one, galvanometer two, galvanometer three, and galvanometer four. The control functions of each galvanometer are as follows: galvanometer three and galvanometer four work in conjunction with the focusing module 7 to jointly control the movement of the laser focus 282 in the X, Y, and Z directions; galvanometer one and galvanometer three work together to control the adjustment of the β angle, and galvanometer two and galvanometer four work together to control the adjustment of the α angle.

[0046] In this embodiment, the installation of the four galvanometers at their initial positions includes the following steps:

[0047] Step 1: Install the first galvanometer onto the corresponding galvanometer fixture 81. The spindle 82 of the first galvanometer is collinear with the Y-axis. After powering on the first galvanometer, rotate the spindle 82 of the first galvanometer so that the projection of the mirror surface 83 of the first galvanometer in the XOZ plane makes an angle of approximately 135° with the X-axis. Figure 3 Taking galvanometer one as an example;

[0048] Step 2: Install the second galvanometer on the corresponding galvanometer fixture 81. The main shaft 82 of the second galvanometer is collinear with the X-axis. After powering on the second galvanometer, rotate the main shaft 82 of the second galvanometer so that the projection of the mirror surface 83 of the second galvanometer in the YOZ plane has an angle of approximately 45° with the Y-axis.

[0049] Step 3: Install the third galvanometer on the corresponding galvanometer fixture 81. The main shaft 82 of the third galvanometer is collinear with the Z-axis. After powering on the third galvanometer, rotate the main shaft 82 of the third galvanometer so that the projection of the mirror surface 83 of the third galvanometer in the XOY plane makes an angle of approximately 135° with the X-axis.

[0050] Step 4: Install the fourth galvanometer on the corresponding galvanometer fixture 81. The main shaft 82 of the fourth galvanometer is collinear with the Y-axis. After powering on the fourth galvanometer, rotate the main shaft 82 of the fourth galvanometer so that the projection of the mirror surface 83 of the fourth galvanometer in the XOZ plane makes an angle of approximately 135° with the X-axis.

[0051] In this embodiment, the optical path calibration and debugging method includes the following steps:

[0052] S1. Set the beam limiting structure: such as Figure 4 The focusing field lens module 9 includes a focusing field lens 92, which is provided with an entrance light shield 91 and an exit light shield 93 to limit the spot range of the incident and emitted laser beam 2; the aperture size of the light-transmitting holes of the entrance light shield 91 and the exit light shield 93 is 0.5mm.

[0053] S2, Electronic fine-tuning of the angles of the four galvanometer mirrors:

[0054] The electronically controlled fine-tuning of the mirror angle of the galvanometer, based on the initial position of the galvanometer, includes the following steps:

[0055] Step 11: Power on the four galvanometers after they have been installed in their initial positions, and turn on the laser generator 1 to output a low-power indicator laser. Observe the projection position of the laser beam 27 output from the galvanometer module on the entrance light-blocking plate 91, which is the light spot projected onto the entrance light-blocking plate of the field lens, and record it as the laser projection point 271. Figure 5 a);

[0056] Step 12: When the laser projection point 271 of the laser beam 27 output from the galvanometer module deviates from the light inlet 911 of the light inlet baffle 91 in the X-axis direction, an adjustment command is sent to the second and fourth galvanometers. The corresponding drive motors rotate to change the mirror angle of the second and fourth galvanometers, so that the laser projection point 271 gradually approaches the light inlet 911; or when the laser projection point 271 deviates from the light inlet 911 of the light inlet baffle 91 in the Y-axis direction, an adjustment command is sent to the first and third galvanometers. The corresponding drive motors rotate to change the mirror angle of the first and third galvanometers, so that the laser projection point 271 gradually approaches the light inlet 911.

[0057] In step 12, both galvanometer one and galvanometer three have the function of controlling the movement of the laser projection point 271 in the Y-axis direction. However, when only galvanometer one or galvanometer three is adjusted, although the laser projection point 271 can be brought closer to the light inlet 911 of the light inlet baffle 91, the laser cannot be emitted from the light outlet 931 of the light outlet baffle 93 and transmitted to the processing surface. Figure 5 (b) The reason is that the laser beam 27 output from the galvanometer module is not collinear with the central axis of the focusing field lens 92 at this time; therefore, the mirror angles of galvanometer one and galvanometer three are adjusted simultaneously to ensure that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field lens 92, such as Figure 5 c).

[0058] In step 12, both galvanometers two and four have the function of controlling the movement of the laser projection point 271 in the X-axis direction. However, when only galvanometers two or four are adjusted, although the laser projection point 271 can be brought closer to the light inlet 911 of the light inlet baffle 91, the laser cannot be emitted from the light outlet 931 of the light outlet baffle 93 and transmitted to the processing surface (e.g., Figure 5 (b) The reason is that the laser beam 27 output from the galvanometer module is not collinear with the central axis of the focusing field lens 92 at this time; therefore, the mirror angles of galvanometers two and four are adjusted simultaneously to ensure that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field lens 92, such as Figure 5 c).

[0059] S3, Optical axis collinearity verification:

[0060] like Figure 5c) A laser spot position detection sensor PSD11 is installed on the motion platform 10 below the focusing field lens 92. The laser spot position detection sensor PSD11 is used to detect the position coordinates of the laser spot formed by the laser focus 282 projected on it in the X and Y directions. First, the spot position data on the laser spot position detection sensor PSD11 is collected at the initial position of the motion platform 10. Then, the motion platform 10 is operated to rise by 1 mm, and the spot position data on the laser spot position detection sensor PSD11 is collected again.

[0061] If the deviation of the spot positions in the X and Y axes of the two acquisitions is controlled within 10 μm, it can be determined that the laser beam 27 output from the galvanometer module is collinear with the central axis of the focusing field mirror 92.

[0062] If the deviation of the two acquired light spot positions in the X-axis and Y-axis directions exceeds 10μm, it is necessary to return to step S3 for iterative calibration until the deviation is controlled within 10μm and the deviation requirement is met.

[0063] Calibration of deflection coefficients for S4, galvanometers three and four:

[0064] In this embodiment, the deflection coefficient calibration of galvanometers three and four includes the following steps (taking galvanometer three as an example):

[0065] Step (1): Set the laser power that can realize material processing and turn on the laser generator 1. The output and closing of the laser generator 1 are linked with the control of the galvanometer module 8. That is, when the galvanometer module 8 is controlled, the laser generator 1 outputs light, and when the galvanometer module 8 stops controlling the galvanometer, the laser generator 1 closes the light.

[0066] Step (2): Keep galvanometers 1, 2, and 4 fixed, and send an angle change command θ to galvanometer 3. According to the optical theory of five-axis galvanometer laser processing, the angle change of galvanometer 3 corresponds to the linear distance scanned by the laser beam 28 output from the field mirror module on the processing surface. This distance has a theoretical calculation value, and the theoretical scanning distance Δd can be calculated. Figure 6 a)

[0067] Step (3): Observe and analyze the actual linear distance Δd' scanned on the processing surface by the laser beam 27 output from the galvanometer module after passing through the focusing field lens 92 using an optical microscope, such as... Figure 6 b)

[0068] Step (4): The actual scanning distance Δd' of the laser beam 28 output from the field mirror module on the processing surface is compared with the theoretical scanning distance Δd. The angle change command of the three galvanometers is multiplied by a deflection coefficient so that the actual scanning distance Δd' on the processing surface gradually approaches the theoretical scanning distance Δd.

[0069] The deflection coefficient of the fourth galvanometer is calibrated according to the calibration method in steps (1) to (4).

[0070] S5. Calibration of galvanometer-coordinated deflection coefficients;

[0071] The calibration of the coordinated deflection coefficients of galvanometer one and galvanometer three includes the following steps:

[0072] Step (11): A laser spot position detection sensor PSD11 is installed on the motion platform below the focusing field lens 92. The laser spot position detection sensor PSD11 is used to detect the position coordinates of the laser spot projected on it in the X-axis and Y-axis directions.

[0073] Step (12): Turn on laser generator 1 to output a low-power indicator laser to provide a light source for laser spot position detection;

[0074] Step (13): After the optical axis collinearity verification, the initial transmission path of the laser beam 27 output from the galvanometer module is collinear with the central axis of the field mirror module 9, as shown in step (13). Figure 7 As shown in a), at this time, the spot position data on the laser spot position detection sensor PSD11 is collected, and this data is used as the initial spot position data, which serves as the reference position for subsequent adjustments.

[0075] Step (14): Send an angle change command to galvanometer three. At this time, the laser beam 27 output from the galvanometer module will shift accordingly, and the laser beam 28 output from the field lens module, as well as the spot position projected on the laser spot position detection sensor PSD11, will also shift accordingly, such as... Figure 7 As shown in b), simultaneously, an angle change command is sent to the galvanometer until the position of the laser spot projected onto the laser spot position detection sensor PSD11 returns to the initial spot position acquired in step (13), as shown in b). Figure 7 As shown in c);

[0076] Step (15): Analyze the correspondence between the angle changes of galvanometer 3 and galvanometer 1, calculate the proportional coefficient between the two, and complete the coefficient coordination calibration of galvanometer 3 and galvanometer 1. By adjusting galvanometer 1 and galvanometer 3, the angle between the laser beam 28 output from the field mirror module and the central axis of the field mirror module 9 can be adjusted while keeping the position of the laser focus 282 unchanged, thereby realizing the attitude control of the laser beam 28 output from the field mirror module.

[0077] The co-calibration of the deflection coefficient relationship between galvanometer 2 and galvanometer 4 is performed by referring to the method in steps (11)-(15).

[0078] The above description is merely a preferred embodiment of the present invention, but the design concept of the present invention is not limited thereto. Any non-substantial modifications made to the present invention by those skilled in the art within the scope of the technology disclosed in the present invention using this concept shall be deemed as an infringement of the protection scope of the present invention.

Claims

1. A method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system, characterized in that: The five-axis galvanometer laser processing system includes a laser generator, a reflector, a beam expander, a dynamic deflection scanning module, and a motion platform. The reflector includes an adjustment device for adjusting the direction of the laser beam. The beam expander is used to adjust the diameter and divergence angle of the laser beam so that it enters the dynamic deflection scanning module in a collimated state. The dynamic deflection scanning module includes a focusing module, a galvanometer module, and a focusing field lens module for controlling the position of the laser focal point and the attitude of the laser beam. The galvanometer module includes galvanometer one, galvanometer two, galvanometer three, and galvanometer four. The focusing field lens module includes a focusing field lens. A processing surface is provided on the motion platform. The optical path calibration and debugging method includes the following steps: S1. Set up a beam limiting structure: Install a shield with a light aperture of ≤0.5mm at the light inlet and light outlet of the focusing field lens to limit the spot range of the incident and emitted laser beams. S2, Electronic fine-tuning of the angles of the four galvanometer mirrors: Power on the four galvanometers and turn on the laser generator to output a low-power indicator laser; Observe the projection position of the laser beam output from the galvanometer module onto the entrance shield of the focusing field mirror; When the laser beam's projection point deviates from the light inlet in the X-axis direction, the mirror angles of galvanometers two and four are adjusted synchronously to gradually bring the laser projection point closer to the light inlet; or when the laser beam's projection point deviates from the light inlet in the Y-axis direction, the mirror angles of galvanometers one and three are adjusted synchronously to gradually bring the laser projection point closer to the light inlet. S3, Optical axis collinearity verification: A laser spot position detection sensor (PSD) is installed on the motion platform below the focusing field lens to detect the position coordinates of the laser spot projected onto it in the X and Y axes. First, the position data of the spot on the PSD is collected at the initial position of the motion platform. Then, the motion platform is operated to rise by 1 mm, and the position data of the spot on the PSD is collected again. If the deviation of the two acquired light spot positions in the X and Y axes is controlled within 10 μm, it can be determined that the laser beam output from the galvanometer module is collinear with the central axis of the focusing field mirror, and proceed to the next step; otherwise, return to step S3 for iterative calibration. Calibration of deflection coefficients for S4, galvanometers three and four: Keep galvanometers 1, 2 and 4 fixed, and send an angle change command to galvanometer 3. According to the optical theory of five-axis galvanometer laser processing, the angle change of galvanometer 3 corresponds to the linear distance of the laser beam scanning on the processing surface. This distance has a theoretically calculated value. The actual linear distance of the laser beam output from the galvanometer module, after passing through the focusing field lens, is obtained by measuring the image using an optical microscope. The actual scanning distance of the laser beam on the processing surface is compared with the theoretical scanning distance. The angle change command of the galvanometer is multiplied by a deflection coefficient, so that the actual scanning distance on the processing surface gradually approaches the theoretical scanning distance. Similarly, galvanometer four should be calibrated independently; S5. Calibration of galvanometer-coordinated deflection coefficients; An angle change command is sent to galvanometer three or galvanometer four, at which point the position of the light spot projected on the PSD will shift accordingly; at the same time, an angle change command is sent to galvanometer one or galvanometer two until the light spot on the PSD returns to the initial light spot position acquired in step S3. Analyze the correspondence between the angular changes of galvanometer three and galvanometer one or galvanometer two and galvanometer four, calculate their proportional coefficients, establish the proportional coefficient relationship between them, and form a collaborative control model for independent compensation control of the angular axis in five-axis motion.

2. The method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system according to claim 1, characterized in that: The galvanometer module includes a galvanometer fixture for mounting four galvanometers. The spindle of the galvanometer is fitted into a preset mounting hole in the galvanometer fixture, and the spindle is connected to a drive motor. The galvanometer and galvanometer fixture are installed using a hole-shaft fit method, and the hole-shaft fit tolerance is ≤0.016mm.

3. The method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system according to claim 2, characterized in that: The first galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the first galvanometer is collinear with the Y-axis. The projection of the mirror surface of the first galvanometer in the XOZ plane has an angle of approximately 135° with the X-axis. The second galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the second galvanometer is collinear with the X-axis. The projection of the mirror surface of the second galvanometer in the YOZ plane has an angle of approximately 45° with the Y-axis. The third galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the third galvanometer is collinear with the Z-axis. The projection of the mirror surface of the third galvanometer in the XOY plane makes an angle of approximately 135° with the X-axis. The fourth galvanometer is installed in the mounting hole of the corresponding galvanometer fixture. The main axis of the fourth galvanometer is collinear with the Y-axis. The projection of the mirror surface of the fourth galvanometer in the XOZ plane has an angle of approximately 135° with the X-axis.

4. The method for calibrating and adjusting the optical path of a five-axis galvanometer laser processing system according to claim 1, characterized in that: The adjustment of the optical path includes the three-axis movement of the laser focus in the X, Y, and Z directions, as well as the angles α and β between the projection of the laser beam on the XOZ and YOZ planes and the X and Z axes, respectively. The three and four galvanometers work together with the focusing module to control the movement of the laser focus in the X, Y, and Z directions. The coordinated deflection coefficient calibration of the three galvanometers is used to control the angle α between the projection of the laser beam on the XOZ plane and the X-axis. The coordinated deflection coefficient calibration of the two galvanometers is used to control the angle β between the projection of the laser beam on the YOZ plane and the Z-axis.

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