Zero-dust-generation dust-free linear motor

Abstract

The invention provides a zero-dust-generation dust-free linear motor. The zero-dust-generation dust-free linear motor comprises a driving base, a plurality of exhaust pipes, a plurality of oil pipes, a sliding seat, a sliding table, a first steel belt, a second steel belt, two mounting frames and a magnetic pole encoder. According to the zero-dust-generation dust-free linear motor provided by the invention, gaps exist between the first steel belt and the sliding table and between the second steel belt and the sliding seat, so that dust generated by friction of the first steel belt and the second steel belt is avoided from the source through a non-contact transmission design, and zero-dust-generation operation is realized; meanwhile, through a sealing structure formed by combining a plurality of air pipes with multi-directional exhaust holes of an external vacuum pump and negative pressure, particulate pollutants are prevented from directly escaping from the linear motor, the cleaning requirement of a hundred-grade dust-free workshop is met, a magnetic pole encoder is installed in front of the rotor to replace a magnetic railing ruler / grating ruler, the installation space is saved, the influence of the external environment is not likely to happen, and the working efficiency is improved. And the method is wide in adaptive scene and can be applied to industries with extremely high requirements on cleanliness, such as semiconductors, electronics and biological medicines.

Description

Technical Field

[0001] This invention relates to the field of linear motors, and more particularly to a zero-dust, dust-free linear motor. Background Technology

[0002] Linear motors, as high-precision linear transmission devices, are widely used in automated manufacturing due to their advantages such as fast response and high accuracy. With the development of high-precision industries such as electronics, semiconductors, precision manufacturing, and biomedicine, the requirements for cleanliness, load capacity, and motion accuracy of production equipment are facing the challenge of simultaneous improvement. Dust generated by ordinary linear motors during operation can adhere to the surface of the equipment, potentially causing short circuits or contaminating products, leading to product scrap. To solve this problem, the industry has optimized the structure to reduce dust generation and emission.

[0003] Currently, most cleanroom linear motors on the market use steel belt / cleanroom hood devices. This protective structure itself may introduce new sources of pollution. The steel belt generates a large amount of metal dust through friction during repeated movement. Even with the air extraction system, it is still difficult to completely prevent micron-sized dust from escaping from the linear motor, ultimately affecting the processing accuracy and quality of the product.

[0004] Therefore, it is necessary to provide a zero-dust, dust-free linear motor to solve the above-mentioned technical problems. Summary of the Invention

[0005] This invention provides a zero-dust, dust-free linear motor, which solves the problem that current linear motors generate a large amount of metal dust through friction during repeated movement of the steel belt, and even with the help of an air extraction system, it is still difficult to completely prevent micron-sized dust from escaping.

[0006] To solve the above-mentioned technical problems, the present invention provides a zero-dust-generating, dust-free linear motor, comprising: a drive base, multiple air extraction pipes, multiple oil pipes, a sliding seat, a sliding table, a first steel belt, a second steel belt, two mounting brackets, and a magnetic pole encoder;

[0007] Multiple air extraction pipes are fixedly installed on both sides of the drive base, two mounting brackets are fixedly installed on both ends of the drive base, and multiple oil pipes are fixedly installed on one side of the two mounting brackets.

[0008] The sliding seat is fixedly installed at the output end of the drive base, the sliding platform is fixedly installed on the top of the sliding seat, the first steel strip and the second steel strip are both disposed inside the sliding platform, and the magnetic pole encoder is disposed on one side of the sliding seat.

[0009] Preferably, the drive base, the sliding seat, the sliding platform, the first steel strip, the second steel strip, and the two mounting brackets are all provided with multiple mounting holes inside.

[0010] Preferably, guide devices are provided on both sides of the drive base. Each guide device includes a guide rail and a guide block. The guide rail is fixedly installed on one side of the drive base, and the guide block is slidably connected to the surface of the guide rail.

[0011] Preferably, the guide block is internally slidably connected to a fixing frame, and the fixing frame is internally provided with a fixing device, which is used to limit the movement between the fixing frame and the guide block.

[0012] Preferably, the fixing device includes a movable groove, a fixing pin, a fixing spring, a fixing groove, and a fixing handle. The movable groove is formed inside the fixing frame, the fixing pin is slidably connected to the inside of the movable groove, the fixing spring is disposed inside the movable groove, the fixing groove is formed inside the fixing frame, and one end of the fixing handle is fixedly installed to one end of the fixing pin.

[0013] Preferably, the sliding seat is provided with a locking device inside, the locking device including a slot and a block, the slot being formed inside the sliding seat, and the block being slidably connected to the inside of the slot.

[0014] Preferably, the mounting bracket is provided with a limiting device inside. The limiting device includes a limiting groove, a limiting block, and a limiting member. The limiting groove is opened inside the mounting bracket, the limiting block is slidably connected to the inside of the limiting groove, and the limiting member is disposed inside the limiting block.

[0015] Preferably, the limiting block is provided with a positioning device inside. The positioning device includes multiple positioning grooves, multiple positioning blocks and a positioning plate. The multiple positioning grooves are all opened inside the limiting block. The multiple positioning blocks are slidably connected to the interior of the multiple positioning grooves. The positioning plate is fixedly connected to one end of the multiple positioning blocks.

[0016] Preferably, the positioning plate is provided with a connecting device inside, the connecting device including a connecting groove, a connecting block and a fixing member, the connecting groove being opened inside the positioning plate, the connecting block being slidably connected to the inside of the connecting groove, and the fixing member being disposed inside the connecting block.

[0017] Preferably, the connecting groove is provided inside both the positioning plate and the limiting block.

[0018] Compared with related technologies, the zero-dust, dust-free linear motor provided by this invention has the following beneficial effects:

[0019] This invention provides a zero-dust cleanroom linear motor. By establishing gaps between the first and second steel belts and the sliding table and seat, a contactless transmission design is achieved, preventing dust generation from friction between the first and second steel belts and enabling zero-dust operation. Simultaneously, a sealed structure formed by multiple air pipes combined with multi-directional air extraction holes from an external vacuum pump and negative pressure prevents particulate contaminants from escaping directly from the linear motor, meeting the cleanroom requirements of Class 100 cleanrooms. A magnetic encoder is installed in front of the mover, replacing the magnetic / optical scale, saving installation space and reducing susceptibility to external environmental influences. This makes it suitable for a wider range of applications, including industries with extremely high cleanliness requirements such as semiconductors, electronics, and biomedicine. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a first embodiment of a zero-dust-generating, dust-free linear motor provided by the present invention;

[0021] Figure 2 for Figure 1 The diagram shows the structure of the drive base;

[0022] Figure 3 This is a schematic diagram of the structure of a second embodiment of a zero-dust-generating, dust-free linear motor provided by the present invention;

[0023] Figure 4 for Figure 3 A cross-sectional structural schematic diagram of the drive base shown;

[0024] Figure 5 for Figure 3 The diagram shows the structure of the guiding device.

[0025] Figure 6 for Figure 4 The enlarged schematic diagram of part A shown below;

[0026] Figure 7 This is a schematic diagram of the structure of a second embodiment of a zero-dust-generating, dust-free linear motor provided by the present invention;

[0027] Figure 8 for Figure 7 The enlarged schematic diagram of part B is shown.

[0028] The diagram labels are as follows: 1. Drive base, 2. Air extraction pipe, 3. Oil pipe, 4. Sliding seat, 5. Sliding table, 6. First steel strip, 7. Second steel strip, 8. Mounting bracket, 9. Mounting hole.

[0029] 10. Guiding device; 101. Guide rail; 102. Guide block; 11. Fixing frame; 12. Fixing device; 121. Moving groove; 122. Fixing pin; 123. Fixing spring; 124. Fixing groove; 125. Fixing handle; 13. Snap-fit ​​device; 131. Snap groove; 132. Snap block; 14. Limiting device; 141. Limiting groove; 142. Limiting block; 143. Limiting component.

[0030] 15. Positioning device; 151. Positioning groove; 152. Positioning block; 153. Positioning plate; 16. Connecting device; 161. Connecting groove; 162. Connecting block; 163. Fixing component; 17. Magnetic pole encoder. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0032] First Embodiment

[0033] Please refer to the following: Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram of the structure of a first embodiment of a zero-dust-generating, dust-free linear motor provided by the present invention; Figure 2 for Figure 1 The diagram shows the structure of the drive base. A zero-dust-generating, dust-free linear motor includes: a drive base 1, multiple air extraction pipes 2, multiple oil pipes 3, a sliding seat 4, a sliding table 5, a first steel strip 6, a second steel strip 7, two mounting brackets 8, and a magnetic pole encoder 17;

[0034] Multiple air extraction pipes 2 are fixedly installed on both sides of the drive base 1, two mounting brackets 8 are fixedly installed on both ends of the drive base 1, and multiple oil pipes 3 are fixedly installed on one side of the two mounting brackets 8.

[0035] The sliding seat 4 is fixedly installed at the output end of the drive base 1, the sliding platform 5 is fixedly installed on the top of the sliding seat 4, the first steel strip 6 and the second steel strip 7 are both disposed inside the sliding platform 5, and the magnetic pole encoder 17 is disposed on one side of the sliding seat 4.

[0036] The drive base 1 is equipped with a drive component, which is a permanent magnet synchronous linear motor, motor and lead screw commonly used in the prior art, while the sliding seat 4 is fixedly installed at the output end of the drive mechanism.

[0037] There are gaps between the first steel strip 6 and the second steel strip 7 and the sliding table 5 and the sliding seat 4, so that the non-contact steel strip eliminates mechanical contact friction and prevents dust generation from the source.

[0038] The magnetic pole encoder 17 is fixed to the center position of the front end of the mover with bolts, eliminating the need for additional slots to be cut on the outside or inside of the housing to reserve installation space. Compared with the existing external grating ruler / magnetic grating ruler plus reading head system, this design saves installation space, reduces the overall width of the module, and effectively reduces the risk of contamination.

[0039] The oil pipe 3 connects to an externally equipped dust-free guide rail oil storage and metering supply module. The guide rail oil uses a high-purity dust-free formula with no volatile impurities. It is precisely delivered to the guide rail contact surface through a micro pump, which not only ensures the lubrication effect but also eliminates dust pollution caused by lubricating oil.

[0040] The drive base adopts a fully enclosed sealed shell structure to prevent external dust from entering and internal dust from escaping. The shell has evenly distributed air extraction pipes 2 on both sides and both ends, and these air extraction holes are directly connected to the negative pressure air extraction system.

[0041] One end of the air extraction pipe 2 is connected to an external air extraction pump. By creating a stable negative pressure environment inside the housing, it can quickly adsorb the trace amounts of dust that may be generated during the operation of the guide rail and discharge them through the pipe, ensuring zero dust escape.

[0042] The drive base 1, the sliding seat 4, the sliding platform 5, the first steel strip 6, the second steel strip 7, and the two mounting brackets 8 are all provided with multiple mounting holes 9 inside.

[0043] Mounting hole 9 is used to fit bolts to fix the mounting bracket 8 and drive base 1, and the sliding seat 4 and sliding table 5, etc.

[0044] The working principle of the zero-dust, dust-free linear motor provided by this invention is as follows:

[0045] In use, the drive base 1 is activated, which drives the sliding seat 4 connected to the sliding table 5 to move, thereby causing the sliding table 5 to move on the surfaces of the first steel belt 6 and the second steel belt 7.

[0046] Compared with related technologies, the zero-dust, dust-free linear motor provided by this invention has the following beneficial effects:

[0047] This invention provides a zero-dust-generating, dust-free linear motor. The absence of gaps between the first steel belt 6 and the second steel belt 7 and the sliding table 5 and sliding seat 4 enables a contactless transmission design, preventing dust generation from friction between the first and second steel belts 6 and 7, thus achieving zero-dust operation. Simultaneously, a sealed structure formed by multiple air pipes combined with multi-directional air extraction holes from an external vacuum pump and negative pressure prevents particulate contaminants from escaping directly from the linear motor, meeting the cleanliness requirements of a Class 100 cleanroom. A magnetic pole encoder 17 is installed in front of the mover, replacing the magnetic / optical scale, saving installation space and reducing susceptibility to external environmental influences. This makes it suitable for a wider range of applications, including industries with extremely high cleanliness requirements such as semiconductors, electronics, and biomedicine.

[0048] Second Embodiment

[0049] Please refer to the following: Figure 3 , Figure 4 , Figure 5 and Figure 6 Based on the zero-dust-generating cleanroom linear motor provided in the first embodiment of this application, the second embodiment of this application proposes another zero-dust-generating cleanroom linear motor. The second embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the separate implementation of the first embodiment.

[0050] Specifically, the second embodiment of this application provides a zero-dust-generating, dust-free linear motor that differs in that it also includes two guide devices 10. The two guide devices 10 are disposed on both sides of the drive base 1. Each guide device 10 includes a guide rail 101 and a guide block 102. The guide rail 101 is fixedly installed on one side of the drive base 1, and the guide block 102 is slidably connected to the surface of the guide rail 101.

[0051] The guide block 102 works with the fixed frame 11 and the sliding table 5 to limit the movement. At the same time, when the sliding table 5 moves to one side, it drives the fixed frame 11 and the guide block 102 to move to one side on the surface of the guide rail 101.

[0052] The guide block 102 is slidably connected to a fixing frame 11, and the fixing frame 11 is provided with a fixing device 12, which is used to limit the movement between the fixing frame 11 and the guide block 102.

[0053] Two fixed brackets 11 are fixedly installed on both sides of the sliding table 5.

[0054] The fixing device 12 is a bolt. The fixing bracket 11 and the guide block 102 are both provided with threaded holes that are compatible with the bolt. After the bolt is installed into the threaded hole, the fixing bracket 11 and the guide block 102 are limited.

[0055] The fixing device 12 includes a movable groove 121, a fixing pin 122, a fixing spring 123, a fixing groove 124, and a fixing handle 125. The movable groove 121 is formed inside the fixing frame 11. The fixing pin 122 is slidably connected to the inside of the movable groove 121. The fixing spring 123 is disposed inside the movable groove 121. The fixing groove 124 is formed inside the fixing frame 11. One end of the fixing handle 125 is fixedly installed on one end of the fixing pin 122.

[0056] The guide block 102 also has a fixing groove 124 inside. One end of the fixing bracket 11 is U-shaped, so that one end of the U-shaped bracket is inserted into the inside of the guide block 102, while the other end is fitted onto the outside of the guide block 102.

[0057] The two ends of the fixed handle 125 are respectively fixedly connected to one end of two fixed pins 122 on one side of the sliding table 5.

[0058] When disassembling the sliding table 5, by pulling the fixed handle 125 to one side, the two fixed pins 122 move to one side inside the two moving slots 121 respectively, while squeezing the two fixed springs 123. After the fixed pins 122 move to one side and separate from the fixed slots 124, the fixed handle 125 is moved upward to take out the fixed frame 11 inside the guide block 102, and the sliding table 5 is disassembled.

[0059] When installing the sliding table 5, after inserting the fixing bracket 11 into the guide block 102, the fixing handle 125 is released. The fixing spring 123 pushes the fixing pin 122 into the fixing groove 124, thereby limiting the movement between the guide block 102 and the fixing bracket 11.

[0060] The sliding seat 4 is provided with a locking device 13, which includes a locking groove 131 and a locking block 132. The locking groove 131 is opened inside the sliding seat 4, and the locking block 132 is slidably connected to the inside of the locking groove 131.

[0061] The top of the locking block 132 is fixedly connected to the bottom of the sliding table 5 for positioning during the installation of the sliding table 5.

[0062] The mounting bracket 8 is provided with a limiting device 14 inside. The limiting device 14 includes a limiting groove 141, a limiting block 142, and a limiting member 143. The limiting groove 141 is opened inside the mounting bracket 8. The limiting block 142 is slidably connected to the inside of the limiting groove 141. The limiting member 143 is disposed inside the limiting block 142.

[0063] The limiting block 142 is a T-shaped block. The mounting bracket 8 has a limiting groove 141 inside that is adapted to the limiting block 142. After the limiting block 142 is pulled out from inside the limiting groove 141, one end of the first steel strip 6 can be disassembled.

[0064] The limiting component 143 is a bolt. Both the mounting bracket 8 and the limiting block 142 have threaded holes that are compatible with the bolt. After the bolt is installed into the threaded hole, the mounting bracket 8 and the limiting block 142 are limited.

[0065] Fastener 163 can also be a snap-fit ​​or a lock.

[0066] The working principle of the zero-dust, dust-free linear motor provided by this invention is as follows:

[0067] In use, after the limiting member 143 is released and the fixing device 12 is released, the cover sliding table 5 moves upward, causing the locking block 132 to move upward and separate inside the locking groove 131. After the limiting block 142 moves upward and separates inside the limiting groove 141, the sliding table 5, the first steel strip 6, and the second steel strip 7 can be disassembled.

[0068] When installing the sliding platform 5, after inserting the locking block 132 at the bottom of the sliding platform 5 into the slot 131, inserting the two limiting blocks 142 into the two limiting slots 141 respectively, the limiting member 143 and the fixing device 12 can be installed.

[0069] Compared with related technologies, the zero-dust, dust-free linear motor provided by this invention has the following beneficial effects:

[0070] This invention provides a zero-dust, dust-free linear motor. The first steel belt 6, the second steel belt 7, and the sliding table 5 are fixed by a fixing frame 11 in conjunction with a fixing device 12, a snap-fit ​​device 13, and a limiting device 14. This allows for convenient and quick disassembly of the first steel belt 6, the second steel belt 7, and the sliding table 5, enabling internal inspection of the drive base 1 and increasing work efficiency.

[0071] Third Embodiment

[0072] Please refer to the following: Figure 7 and Figure 8 Based on the zero-dust cleanroom linear motor provided in the first embodiment of this application, the third embodiment of this application proposes another zero-dust cleanroom linear motor. The third embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the third embodiment will not affect the separate implementation of the first embodiment.

[0073] Specifically, the third embodiment of this application provides a zero-dust, dust-free linear motor that differs in that it also includes a positioning device 15. The positioning device 15 is disposed inside the limiting block 142. The positioning device 15 includes a plurality of positioning grooves 151, a plurality of positioning blocks 152, and a positioning plate 153. The plurality of positioning grooves 151 are all opened inside the limiting block 142. The plurality of positioning blocks 152 are slidably connected to the interior of the plurality of positioning grooves 151. The positioning plate 153 is fixedly connected to one end of the plurality of positioning blocks 152.

[0074] The first steel strip 6 and the second steel strip 7 each have multiple positioning grooves 151 inside. After the positioning block 152 is inserted into the positioning groove 151, the first steel strip 6 and the limiting block 142 are limited.

[0075] The positioning plate 153 is provided with a connecting device 16 inside. The connecting device 16 includes a connecting groove 161, a connecting block 162 and a fixing member 163. The connecting groove 161 is opened inside the positioning plate 153. The connecting block 162 is slidably connected to the inside of the connecting groove 161. The fixing member 163 is disposed inside the connecting block 162.

[0076] The fastener 163 is a bolt. Both the connecting block 162 and the limiting block 142 have threaded holes that are compatible with the bolt, which are used to limit the connecting block 162 after the bolt is installed into the threaded hole.

[0077] Fastener 163 can also be a snap-fit ​​or a lock.

[0078] One end of the connecting groove 161 is a through port, which is used to facilitate the insertion of the connecting block 162 into the interior of the connecting groove 161.

[0079] The positioning plate 153 and the limiting block 142 both have the connecting groove 161 inside.

[0080] After the two protrusions on one side of the connecting block 162 are respectively inserted into the connecting groove 161 inside the positioning plate 153 and the limiting block 142, the positioning plate 153 is limited.

[0081] The working principle of the zero-dust, dust-free linear motor provided by this invention is as follows:

[0082] In use, after removing the fastener 163, the two connecting blocks 162 are pulled to one side, so that the two connecting blocks 162 move to one side and separate inside the two connecting grooves 161 respectively. Then, the positioning plate 153 is moved upward, which drives the multiple positioning blocks 152 to move upward and separate inside the multiple positioning grooves 151 respectively. After that, one end of the first steel strip 6 and the second steel strip 7 can be separated from the limiting block 142.

[0083] When installing the first steel strip 6, after placing one end of the first steel strip 6 in a suitable position on the limiting block 142, insert the multiple positioning blocks 152 at the bottom of the positioning plate 153 into the multiple positioning grooves 151 respectively, insert the connecting block 162 into the connecting groove 61, and install the fastener 163.

[0084] Compared with related technologies, the zero-dust, dust-free linear motor provided by this invention has the following beneficial effects:

[0085] The present invention provides a zero-dust-generating, dust-free linear motor. The positioning device 15 and the connecting device 16 limit the two ends of the first steel belt 6 and the second steel belt 7 between the two limit blocks 142, thereby facilitating the replacement of the first steel belt 6 and the second steel belt 7.

[0086] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A zero-dust, dust-free linear motor, characterized in that, include: Drive base, multiple air extraction pipes, multiple oil pipes, sliding seat, sliding table, first steel belt, second steel belt, two mounting brackets and magnetic pole encoder; Multiple air extraction pipes are fixedly installed on both sides of the drive base, two mounting brackets are fixedly installed on both ends of the drive base, and multiple oil pipes are fixedly installed on one side of the two mounting brackets. The sliding seat is fixedly installed at the output end of the drive base, the sliding platform is fixedly installed on the top of the sliding seat, the first steel strip and the second steel strip are both disposed inside the sliding platform, and the magnetic pole encoder is disposed on one side of the sliding seat.

2. The zero-dust, dust-free linear motor according to claim 1, characterized in that, The drive base, the sliding seat, the sliding platform, the first steel strip, the second steel strip, and the two mounting brackets all have multiple mounting holes inside.

3. The zero-dust, dust-free linear motor according to claim 2, characterized in that, Guide devices are provided on both sides of the drive base. Each guide device includes a guide rail and a guide block. The guide rail is fixedly installed on one side of the drive base, and the guide block is slidably connected to the surface of the guide rail.

4. A zero-dust, dust-free linear motor according to claim 3, characterized in that, The guide block is internally slidably connected to a fixing frame, and the fixing frame is internally provided with a fixing device, which is used to limit the movement between the fixing frame and the guide block.

5. A zero-dust, dust-free linear motor according to claim 4, characterized in that, The fixing device includes a movable groove, a fixing pin, a fixing spring, a fixing groove, and a fixing handle. The movable groove is opened inside the fixing frame, the fixing pin is slidably connected to the inside of the movable groove, the fixing spring is disposed inside the movable groove, the fixing groove is opened inside the fixing frame, and one end of the fixing handle is fixedly installed on one end of the fixing pin.

6. A zero-dust, dust-free linear motor according to claim 1, characterized in that, The sliding seat is provided with a locking device inside. The locking device includes a slot and a block. The slot is opened inside the sliding seat, and the block is slidably connected to the inside of the slot.

7. A zero-dust, dust-free linear motor according to claim 1, characterized in that, The mounting bracket is provided with a limiting device inside. The limiting device includes a limiting groove, a limiting block, and a limiting member. The limiting groove is opened inside the mounting bracket. The limiting block is slidably connected to the inside of the limiting groove. The limiting member is disposed inside the limiting block.

8. A zero-dust, dust-free linear motor according to claim 7, characterized in that, The limiting block is provided with a positioning device inside. The positioning device includes multiple positioning grooves, multiple positioning blocks and a positioning plate. The multiple positioning grooves are all opened inside the limiting block. The multiple positioning blocks are slidably connected to the inside of the multiple positioning grooves. The positioning plate is fixedly connected to one end of the multiple positioning blocks.

9. A zero-dust, dust-free linear motor according to claim 8, characterized in that, The positioning plate is provided with a connecting device inside. The connecting device includes a connecting groove, a connecting block and a fixing member. The connecting groove is opened inside the positioning plate, the connecting block is slidably connected to the inside of the connecting groove, and the fixing member is disposed inside the connecting block.

10. A zero-dust, dust-free linear motor according to claim 9, characterized in that, The connecting groove is provided inside both the positioning plate and the limiting block.

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