Probe

Abstract

A probe is provided with: a tip member having a support part; and a base material in which a part of the side surface is retracted in the thickness direction perpendicular to the axial direction from one end within a certain range in the axial direction to form a joining region. A first side surface of the support portion of the tip member is in contact with a recessed opposing side surface of the base material exposed in the bonding region, and the tip member and the base material are bonded in this manner. A protruding portion protruding in the thickness direction is formed on one of the first side surface and the facing side surface, and a recessed portion fitted to the protruding portion is formed on the other of the first side surface and the facing side surface.

Description

Technical Field

[0001] This invention relates to a probe for inspecting the electrical properties of an object. Background Technology

[0002] To inspect the electrical characteristics of semiconductor integrated circuits and other objects under inspection in a wafer state, an electrical connection device including probes is used. In inspections using probes, one end of the probe contacts the electrode of the object under inspection, and the other end of the probe contacts a terminal (hereinafter referred to as a "pad") disposed on a printed circuit board or similar surface. The pad is electrically connected to inspection devices such as testers.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2007-147518 Summary of the Invention

[0006] The problem the invention aims to solve

[0007] To prevent the tip of the probe from wearing away due to contact with the object being inspected, a probe is used, for example, by attaching a front end component made of a hard material with a hardness higher than that of the base material to one end of a cylindrical base material. The object of this invention is to provide a probe that prevents the front end component from detaching from the base material.

[0008] Solution for solving the problem

[0009] According to one aspect of the present invention, a probe is provided, comprising: a front end member having a support portion; and a base material, wherein a portion of a side side is retracted in a thickness direction perpendicular to the axial direction within a certain range from one end to form a mating region. A first side surface of the support portion of the front end member abuts against a retracted side surface of the base material exposed in the mating region, thereby mating the front end member and the base material. A protrusion in the thickness direction is formed on one of the first side surface and the retracted side surface, and a recess that engages with the protrusion is formed on the other of the first side surface and the retracted side surface.

[0010] The effects of the invention

[0011] According to the present invention, a probe that can suppress the detachment of the front end component from the base material can be provided. Attached Figure Description

[0012] Figure 1 This is a schematic cross-sectional view showing the structure of the probe according to the first embodiment of the present invention.

[0013] Figure 2 This is a schematic perspective view showing the structure of the probe according to the first embodiment of the present invention.

[0014] Figure 3 This is a schematic diagram showing the structure of an electrical connection device using a probe according to the first embodiment of the present invention.

[0015] Figure 4 This is a schematic diagram showing the state of contact between the probe and the object being inspected according to the first embodiment of the present invention.

[0016] Figure 5 This is a schematic cross-sectional view showing the structure of a probe according to a modified example of the first embodiment of the present invention.

[0017] Figure 6A This is a schematic cross-sectional view showing the structure of the protrusion and concave portion of a probe according to a modified example of the first embodiment of the present invention.

[0018] Figure 6B This is a schematic cross-sectional view showing other structures of the protrusions and recesses of a probe, which is a modified example of the first embodiment of the present invention.

[0019] Figure 7 This is a schematic cross-sectional view showing the structure of the probe according to the second embodiment of the present invention.

[0020] Figure 8 This is a schematic cross-sectional view showing the structure of the probe according to the third embodiment of the present invention.

[0021] Figure 9 This is a schematic cross-sectional view showing the structure of a probe according to a modified example of the third embodiment of the present invention.

[0022] Figure 10 This is a schematic diagram illustrating the structure of a probe according to another embodiment of the present invention. Detailed Implementation

[0023] Next, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description of the drawings, the same or similar parts are labeled with the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the thickness ratios of the various parts differ from reality. Furthermore, it is self-evident that the drawings also include parts with different dimensional relationships and ratios. The embodiments shown below illustrate apparatus and methods for embodying the technical concept of the present invention; the embodiments of the present invention do not specify the materials, shapes, structures, arrangements, and manufacturing methods of the constituent parts as described below.

[0024] (First Implementation)

[0025] Figure 1The probe 1 shown in the first embodiment is used to inspect the electrical properties of an object. The probe 1 includes a front end member 10 and a base material 20. The front end member 10 has a protrusion 11 that contacts the object being inspected and a support portion 12 connected to the protrusion 11. The front end member 10 engages with the base material 20 at the support portion 12. Figure 1 It is a cross-sectional view along the central axis of probe 1.

[0026] like Figure 1 as well as Figure 2 As shown, the direction in which the column-shaped base material 20 extends is defined as the axial direction D1, the direction perpendicular to the axial direction D1 and opposite to the base material 20 is defined as the thickness direction D2, and the direction perpendicular to both the axial direction D1 and the thickness direction D2 is defined as the width direction D3.

[0027] In the base material 20, a joint region 200 is formed by retracting a portion of a side surface along the axial direction D1 within a certain range from one end (hereinafter also referred to as "first end 21") in the thickness direction D2. The joint region 200 is a space created by retracting a portion of the side surface of the base material 20 towards the central axis, exposing the retracted side surface in the joint region 200. Figure 1 As shown, the support portion 12 is arranged to be embedded in the engagement region 200. Hereinafter, the retracted side opposite to the support portion 12 will also be referred to as the "opposing side 201".

[0028] A support portion 12 of the front end member 10 is disposed in the joint region 200 such that a protrusion 11 protrudes from the first end 21 of the base material 20. More specifically, the first side 121 of the support portion 12 of the front end member 10 abuts against the opposing side 201 of the base material 20 exposed in the joint region 200. Furthermore, a protrusion protruding along the thickness direction D2 is formed on one of the first side 121 and the opposing side 201, and a recess that engages with the protrusion is formed on the other of the first side 121 and the opposing side 201.

[0029] exist Figure 1 The diagram illustrates, exemplarily, a structure in which a protrusion 210 is formed on the opposing side 201 and a recess 110 is formed on the first side 121. Alternatively, a protrusion may be formed on the first side 121 and a recess on the opposing side 201. Figure 1 In the structure shown, the contact surface between the protrusion and the concave portion formed at the interface between the first side 121 and the opposite side 201 is a rectangle formed by sides parallel and perpendicular to the axial direction D1 in a cross section.

[0030] Of the multiple sides of the support portion 12 parallel to the axial direction D1, only the first side surface 121 abuts against the base material 20. Furthermore, the end face of the support portion 12 facing the direction opposite to the direction of protrusion of the protrusion 11 abuts against the end face of the base material 20 exposed in the mating region 200 (hereinafter also referred to as "opposing end face 202"). The second side surface 122 of the support portion 12, opposite to the first side surface 121, is continuous with the side surface of the base material 20 without any steps.

[0031] Alternatively, the materials of the front-end component 10 and the base material 20 can be selected such that the conductivity of the front-end component 10 is the same as that of the base material 20, or that the conductivity of the front-end component 10 is higher than that of the base material 20. By selecting the materials of the front-end component 10 and the base material 20 in this way, the resistance of the probe 1 can be reduced. For example, the material of the front-end component 10 can be rhodium (Rh), platinum (Pt), or other precious metals. The base material 20 can be nickel (Ni), nickel alloy, gold (Au), silver (Ag), copper (Cu), palladium (Pd), palladium alloy, rhodium (Rh), rhodium alloy, or other precious metals. The front-end component 10 and the base material 20 can also be bonded together, for example, with an adhesive material such as gold (Au).

[0032] Figure 1 The probe 1 shown is used, for example, for Figure 3 The electrical connection device 100 is shown. In the electrical connection device 100, the probe 1 is held by the probe head 120. Specifically, a plurality of probes 1 are successively inserted into the guide holes of the first guide plate 1201, the second guide plate 1202, and the third guide plate 1203 included in the probe head 120, and are held in the probe head 120. Hereinafter, without specifically defining the first guide plate 1201, the second guide plate 1202, and the third guide plate 1203, they will be referred to as guide plates. The probe head 120 has a structure in which the first guide plate 1201, the second guide plate 1202, and the third guide plate 1203, which are multiple guide plates, are arranged separately from each other in the direction of the surface normal (Z direction) of the main surface of the guide plate. In the probe head 120, a spacer 1204 is provided between the outer edge region of the first guide plate 1201 and the outer edge region of the third guide plate 1203 to form a hollow region 1205 between the first guide plate 1201 and the second guide plate 1202. The second guide plate 1202 is disposed inside the hollow region 1205 on the side closer to the third guide plate 1203. The material of the probe head 120 is, for example, ceramic.

[0033] When inspecting the object 4, the electrical connection device 100 moves relative to the object 4 along the Z direction, and the front end part 10 of the probe 1 comes into contact with the object 4. Figure 3The image shows the probe 1 separated from the object under inspection 4. The second end 22 of the base material 20 contacts the pad 131 of the substrate 130. The pad 131 is electrically connected to an inspection device such as an IC tester (not shown). The object under inspection 4 is electrically connected to the inspection device via the protrusion 11 of the probe 1.

[0034] like Figure 3 As shown, for the guide hole through which the same probe 1 passes, the position of the guide hole of the first guide plate 1201 is offset in the -X direction relative to the guide hole of the second guide plate 1202 and the main surface of the second guide plate 1202. Figure 3 This is a side view viewed from the Y direction, which is orthogonal to both the X and Z directions. Hereinafter, the configuration that offsets the positions of the guide holes will be referred to as the "offset configuration." Furthermore, the direction in which the positions of the guide holes are offset will be referred to as the "offset direction." Figure 3 In this configuration, the offset direction is the -X direction. Through this offset configuration, the base material 20 of probe 1 is bent inside the probe head 120. Specifically, in the hollow region 1205 between the first guide plate 1201 and the second guide plate 1202, the base material 20 is in a bent state due to elastic deformation. The position of the guide hole in the second guide plate 1202 coincides with the position of the guide hole in the third guide plate 1203 when viewed from the Z direction.

[0035] By offsetting the guide holes of the first guide plate 1201 and the second guide plate 1202, when the probe 1 contacts the object to be inspected 4, the probe 1 bends in the hollow region 1205. That is, in the contact state where the probe 1 contacts the object to be inspected 4, the probe 1 further bends relative to its bent shape in the non-contact state where the probe 1 is not in contact with the object to be inspected 4 due to flexural deformation. Through further bending, the probe 1 contacts the object to be inspected 4 with a predetermined pressure. Therefore, by offsetting the configuration, the electrical characteristics of the object to be inspected 4 can be stably measured using the probe 1. The probe 1 has the elasticity to recover its shape before contacting the object to be inspected 4 when it becomes in a non-contact state.

[0036] When inspecting the object 4, the protrusion 11 of the front end component 10 protruding from the first end 21 of the base material 20, for example, Figure 4 As shown, the probe 11 contacts the electrode 40 disposed on the object to be inspected 4. After the protrusion 11 contacts the electrode 40, the position of the protrusion 11 shifts in a direction parallel to the surface of the electrode 40 due to the pressing of the probe 1 against the object to be inspected 4. On the other hand, after the inspection of the object to be inspected 4 is completed, from the contact state to the non-contact state, the position of the protrusion 11 shifts in the opposite direction to that at the beginning of the inspection while still in contact with the object to be inspected 4. Figure 4As shown, the direction of displacement of the protrusion 11 while it is in contact with the object 4 being inspected is defined as the "scraping direction DS". The scraping direction DS is consistent with the offset direction. In other words, the scraping direction DS is the direction in which the probe 1 can bend.

[0037] As already explained, the support portion 12 and the base material 20 overlap in the direction in which the probe 1 can bend, and the front end component 10 and the base material 20 are joined in this manner. In other words, as Figure 4 As shown, the support portion 12 of the front end component 10 overlaps with the base material 20 along the scraping direction DS.

[0038] As the front end 10 moves while in contact with the object to be inspected 4, stress along the scraping direction DS is generated at the joint between the front end 10 and the base material 20, making it easy for the front end 10 to detach from the base material 20. Furthermore, during the inspection of the object to be inspected 4, loads such as pressing along the axial direction D1 are applied to the joint between the front end 10 and the base material 20. Therefore, as the number of contacts between the object to be inspected 4 and the probe 1 increases, the adhesive strength of the bonding material that joins the front end 10 and the base material 20 decreases, making it easy for the front end 10 to detach from the base material 20. Since the number of probes 1 disposed in the electrical connection device 100 increases, the cost of replacing probes 1 due to the front end 10 detaching from the base material 20 cannot be underestimated.

[0039] In contrast, in probe 1, the protrusion and concave portion formed at the interface between the first side 121 of the support portion 12 and the opposing side 201 of the base material 20 engage, thus preventing the front end member 10 from falling off the base material 20. That is, since the protrusion is formed in the protruding direction and the concave portion in the recessed direction in the thickness direction D2, the concave-convex shape functions as a stop to prevent the front end member 10 from falling off the base material 20.

[0040] In addition, the uneven shape formed at the interface between the first side 121 of the support portion 12 and the opposing side 201 of the base material 20 also functions as a limiting part to restrict the positional displacement between the front end member 10 and the base material 20 when the probe 1 contacts the object to be inspected 4.

[0041] Furthermore, in probe 1, the support portion 12 of the front end member 10 overlaps with the base material 20 along the scraping direction DS. In other words, in the direction of positional displacement of the protrusion 11 that contacts the inspection object 4 at the start of inspection, the support portion 12 overlaps with the base material 20, and the front end member 10 and the base material 20 are joined in this manner. Therefore, the protrusion direction of the protrusion formed at the interface between the first side surface 121 and the opposing side surface 201 is the direction of positional displacement of the protrusion 11. Therefore, even if stress in the scraping direction DS is generated at the joint portion of the front end member 10 and the base material 20, the front end member 10 is difficult to detach from the base material 20.

[0042] As explained above, in the probe 1 of the first embodiment, at the interface between the first side 121 of the support portion 12 and the opposing side 201 of the base material 20, a recess fits into a protrusion that protrudes in the thickness direction D2 perpendicular to the axial direction D1, and the front end member 10 is joined to the base material 20 in this manner. Therefore, according to the probe 1, it is possible to prevent the front end member 10, which is joined to one end of the base material 20, from falling off the base material 20.

[0043] Furthermore, the support portion 12 only engages with the base material 20 on its first side 121 in the thickness direction D2. Therefore, compared to a structure in which, for example, the front end member 10 is engaged with the base material 20 on both sides in a manner that allows it to be sandwiched between the base material 20 and the support portion 12 along the thickness direction D2, the engagement area between the support portion 12 and the base material 20 can be increased. That is, the area of ​​the support portion 12 that engages with the opposing end face 202 of the base material 20 can be increased. As a result, the resistance at the engagement surface between the support portion 12 and the base material 20 can be reduced.

[0044] like Figure 2 As shown, the first end 21 of the base material 20, which overlaps with the support portion 12 when viewed from the thickness direction D2, and the support portion 12 can also be tapered in shape, with the width gradually widening from the first end 21 along the axial direction D1 when viewed from the thickness direction D2. By making the support portion 12 and the first end 21 tapered, it is easy to insert the probe 1 into the guide hole of the guide plate when assembling the electrical connection device 100.

[0045] <Variation Example>

[0046] like Figure 5 As shown, the contact surface between the convex and concave portions can also be a conical shape formed by sides that intersect the axial direction D1 at an angle in the cross section along the axial direction D1. In other words, even if the contact surface between the convex and concave portions is a shape other than a rectangle, the front end member 10 can be prevented from falling off the base material 20 by the convex and concave portions fitting together in the thickness direction D2.

[0047] Furthermore, the above example illustrates a case where a protrusion and a recess formed at the interface between the first side surface 121 of the support portion 12 and the opposing side surface 201 of the base material 20 are grouped together. However, multiple protrusions and multiple recesses respectively fitting into the protrusions may also be formed at the interface between the first side surface 121 and the opposing side surface 201. By forming multiple groups of protrusions and recesses, it is possible to further suppress the front end member 10 from the base material 20. The groups of protrusions and recesses may also be arranged along the axial direction D1. For example, as shown... Figure 6A As shown, multiple protrusions and recesses with rectangular contact surfaces can also be formed at the interface between the first side surface 121 and the opposite side surface 201. Alternatively, as... Figure 6B As shown, multiple protrusions and recesses with a cone-shaped contact surface can also be formed at the interface between the first side 121 and the opposite side 201.

[0048] exist Figure 5 , Figure 6A as well as Figure 6B The diagram shows a structure in which a protrusion 210 is formed on the opposing side 201 and a recess 110 is formed on the first side 121. However, it is also possible to form a protrusion on the first side 121 and a recess on the opposing side 201. Alternatively, a protrusion and a recess may be formed on the opposing side 201 respectively, and a recess and a protrusion may be formed on the first side 121 that respectively engage with the protrusion and the recess formed on the opposing side 201.

[0049] (Second Implementation)

[0050] like Figure 7 As shown, in the second embodiment, the probe 1 has an embedded portion 123 formed in the support portion 12 of the front end member 10, and an embedded groove 203 formed in the opposing end face 202 of the base material 20. The embedded portion 123 extends along the axial direction D1 in a direction opposite to the direction of the protrusion 11. The embedded groove 203 is formed in the opposing end face 202 of the base material 20, which is opposite to the support portion 12 in the axial direction D1. The embedded portion 123 of the support portion 12 is embedded in the embedded groove 203 of the base material 20. Regarding other structures, the probe 1 of the second embodiment and Figure 1 The first embodiment shown is the same.

[0051] exist Figure 7 In the probe 1 shown, the area enclosed by the uneven shape of the interface between the first side surface 121 and the opposing side surface 201 and the uneven shape of the interface between the support portion 12 and the opposing end surface 202 functions as a stopper to prevent the front end member 10 from falling off the base material 20. Therefore, according to Figure 7 The probe 1 shown can further increase the holding strength of the base material 20 for the front end component 10. Furthermore, in Figure 7 In the probe 1 shown, the embedded part 123 is embedded in the embedded groove 203, thereby increasing the joint area between the support part 12 and the base material 20. Therefore, according to Figure 7 The probe 1 shown can further suppress the front end part 10 from the base material 20 when inspecting the object 4.

[0052] Apart from this, the probe 1 in the second embodiment is substantially the same as that in the first embodiment, and repeated descriptions are omitted. For example, a protrusion may be formed on the first side surface 121, and a recess may be formed on the opposite side surface 201. In addition, the contact surface between the protrusion and the recess may be conical, or a group of multiple protrusions and recesses may be formed.

[0053] (Third Implementation)

[0054] like Figure 8As shown, the probe 1 of the third embodiment includes a transmission member 30, which is disposed on the side of the base material 20 extending axially along D1 from the end of the mating region 200. The transmission member 30 can be made of a material with a lower resistance than the base material 20. The end face of the support portion 12 of the front end member 10 facing axially D1 is connected to the end face of the transmission member 30 facing axially. Figure 8 The probe 1 shown differs from the first embodiment in that it includes a transmission component 30. Regarding other structures, the probe 1 of the third embodiment differs from... Figure 1 The first embodiment shown is the same.

[0055] exist Figure 8 In the probe 1 shown, by arranging a transmission member 30 with a lower resistance than the base material 20 on the side of the base material 20, the resistance of the probe 1 relative to the electrical signal propagating in the probe 1 can be reduced. For example, if the base material 20 is made of Ni material, the resistance of the probe 1 can be reduced by using Au material in the transmission member 30.

[0056] Apart from this, the probe 1 in the third embodiment is substantially the same as that in the first embodiment, and repeated descriptions are omitted. For example, a protrusion may be formed on the first side surface 121, and a recess may be formed on the opposite side surface 201. In addition, the contact surface between the protrusion and the recess may be conical, or a group of multiple protrusions and recesses may be formed.

[0057] <Variation Example>

[0058] like Figure 9 As shown in the modified example, a portion of the transmission member 30 can also extend in a direction protruding towards the protrusion 11 along the axial direction D1, overlapping with the engagement region 200. Figure 9 In the probe 1 shown, a portion of the support portion 12 of the front end component 10 is sandwiched between the transmission component 30 and the base material 20. In other words, a portion of the support portion 12 is positioned closer to the central axis of the probe 1 than the transmission component 30. Figure 9 The probe 1 shown is... Figure 8 Compared to the probe 1 shown, the contact area between the front end component 10 and the transmission component 30 is larger, thus reducing the resistance of the probe 1.

[0059] (Other implementation methods)

[0060] As described above, the present invention has been described through embodiments, but it should not be construed as limiting the invention to the extent that the discussion and drawings constitute a part of this disclosure. Various alternative embodiments, examples, and techniques will become apparent to those skilled in the art based on this disclosure.

[0061] For example, such as Figure 10As shown, the end face of the protrusion 11 that contacts the object being inspected can also be made curved. By making the end face of the protrusion 11 curved, damage to the object being inspected due to contact between the protrusion 11 and the object being inspected can be suppressed.

[0062] The above description illustrates a scenario where the protrusion 11 of the front end component 10 protrudes from the first end 21 of the base material 20 and contacts the object to be inspected 4. However, it is also possible that both the front end component 10 and the base material 20 are in contact with the object to be inspected 4.

[0063] As such, it is self-evident that the present invention includes various embodiments not described herein.

[0064] Explanation of reference numerals in the attached figures

[0065] 1. Probe; 10. Front end component; 11. Protrusion; 12. Support; 20. Base material; 21. First end; 22. Second end; 30. Transmission component; 110. Recess; 121. First side; 122. Second side; 123. Embedded part; 200. Joint area; 201. Opposing side; 202. Opposing end face; 203. Embedded groove; 210. Protrusion.

Claims

1. A probe used for inspecting the electrical properties of an object, wherein, The probe has the following features: A front-end component having a support portion and contacting the object being inspected; and The base material, from one end along the axial direction within a certain range, has its side portion recessed in a thickness direction perpendicular to the axial direction to form a joint area. The first side of the support portion of the front end component abuts against the rearward side of the base material exposed in the joint area, thereby engaging the support portion with the base material. A protrusion is formed on one of the first side surface and the retracted side surface, protruding in the thickness direction, and a recess is formed on the other side of the first side surface and the retracted side surface, which engages with the protrusion.

2. The probe according to claim 1, wherein, The front end component has a protrusion that connects to the support portion and contacts the object being inspected. The support portion of the front end component has an embedded portion extending in a direction opposite to the direction of the protrusion. An embedded groove is formed on the opposing end face of the base material that is opposite to the support portion in the axial direction. The embedded part is embedded in the embedded groove.

3. The probe according to claim 1, wherein, The probe also includes a transmission component disposed on a side of the base material extending axially from the end of the bonding region. The transmission component is made of a material with lower resistivity than the base material. The support portion of the front-end component is connected to the transmission component.

4. The probe according to claim 3, wherein, A portion of the transmission component extends along the axial direction in a manner that overlaps with the engagement region. A portion of the support portion of the front-end component is sandwiched between the extended portion of the transmission component and the parent material.

5. The probe according to claim 1, wherein, The second side of the support portion, which is opposite to the first side, is continuous with the base material without any steps.

6. The probe according to any one of claims 1 to 5, wherein, A plurality of protrusions and a plurality of recesses respectively fitted into the first side and the rearward side are formed thereon.

7. The probe according to any one of claims 1 to 5, wherein, The contact surface between the protrusion and the recess is rectangular in shape in a cross section along the axial direction, formed by sides parallel and perpendicular to the axial direction.

8. The probe according to any one of claims 1 to 5, wherein, The contact surface between the convex portion and the concave portion is a cone shape formed by sides that intersect the axial direction obliquely in a cross section along the axial direction.

9. The probe according to any one of claims 1 to 5, wherein, In the direction of displacement of the front end component that contacts the object being inspected at the start of the inspection, the support portion overlaps with the base material, and the front end component and the base material are joined in this manner, with the protrusion direction of the protrusion being the direction of the displacement.

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