Dismounting device suitable for graphite boat

Abstract

The invention relates to the field of graphite boat disassembly and assembly, in particular to a disassembly device suitable for a graphite boat, and aims to solve the problem that the disassembly and assembly efficiency of an existing graphite boat is low. The integrated dismounting mechanism is mounted on the driving mechanism, and the integrated dismounting mechanism is used for dismounting at least one of a ceramic rod, a nut and a flat spring washer of the graphite boat; the suction cup dismounting mechanism is mounted on the driving mechanism, and the suction cup dismounting mechanism is used for adsorbing and dismounting boat blades of the graphite boat; the boat foot dismounting mechanism comprises a manipulator and a boat foot clamping assembly; and the placing mechanism comprises a graphite boat placing platform, a nut flat spring washer placing platform, a ceramic sleeve placing platform, a ceramic rod placing platform, a boat blade placing platform and a boat foot placing platform. The automatic disassembly of the nut, the flat spring washer, the ceramic rod, the ceramic sleeve and the boat blade is realized through the integrated disassembly mechanism and the suction cup disassembly mechanism, and the disassembly and assembly efficiency of the graphite boat is improved.

Description

Technical Field

[0001] This application relates to the field of graphite boat disassembly and assembly, and in particular to a disassembly device suitable for graphite boats. Background Technology

[0002] The coating process is a crucial step in the production of solar cells, playing a vital role. During the coating process on silicon wafers, uncoated silicon wafers are inserted into graphite boats, which are then placed in a PECVD vacuum coating machine to coat the silicon wafers using the PECVD process.

[0003] The graphite boat is a crucial carrier in the solar cell coating process, assembled from various components such as boat blades, boat feet, ceramic rods, ceramic sleeves, nuts, and flat spring washers. Because the graphite boat blades experience wear during silicon wafer insertion and removal, it's necessary to periodically remove old clips from their holes and replace them with new ones to ensure the graphite boat is in good condition and thus guarantees the coating quality of the silicon wafers. Simultaneously, the graphite boat itself also needs to be disassembled for cleaning, replacement of worn parts (such as clips, nuts, and ceramic sleeves), and alignment.

[0004] In traditional processes, the disassembly of graphite boats typically employs a set of automated equipment comprising multiple independent modules, such as a dedicated nut-removing and installing robot and a boat-piece suction and handling mechanism. These modules are distributed across different workstations, requiring the graphite boat to move between them to complete the disassembly of all components. While this "division of labor and cooperation" model achieves automation, the entire disassembly process is lengthy, requires a large area, and the transfer and waiting times between modules limit overall efficiency. Particularly when disassembling the boat blades, the method of picking up and handling each blade individually is inefficient and requires improvement. Summary of the Invention

[0005] To improve the efficiency of disassembling and assembling graphite boats, this application provides a disassembly device suitable for graphite boats.

[0006] The disassembly device for graphite boats provided in this application adopts the following technical solution: A disassembly device for graphite boats, including a drive mechanism; An integrated disassembly mechanism is mounted on the drive mechanism and is driven to move by the drive mechanism. The integrated disassembly mechanism is used to disassemble at least one of the ceramic rod, nut and flat spring washer of the graphite boat. A suction cup disassembly mechanism is mounted on the drive mechanism and is driven to move by the drive mechanism. The suction cup disassembly mechanism is used to adsorb and disassemble the blades of the graphite boat. A boat foot disassembly mechanism, comprising a robotic arm and a boat foot clamping assembly; The placement mechanism includes a graphite boat placement platform, a nut flat spring washer placement platform, a ceramic sleeve placement platform, a ceramic rod placement platform, a boat blade placement platform, and a boat foot placement platform.

[0007] By adopting the above technical solution, the graphite boat assembly to be disassembled is placed on the graphite boat placement platform, at which point the ceramic rods are in a vertical position. The drive mechanism drives the integrated disassembly mechanism to move above the graphite boat placement platform, first loosening the nuts and removing them from the top of the ceramic rods, then clamping the two flat spring pads on each ceramic rod and removing them from the top of the ceramic rods, and then pulling out the ceramic rods while still clamping the top of the ceramic rods. The drive mechanism then drives the integrated disassembly mechanism to the ceramic rod placement platform and the nut and flat spring pad placement platform to place and store the ceramic rods, nuts, and flat spring pads respectively. The above steps are repeated until all ceramic rods have been disassembled.

[0008] The robotic arm drives the boat foot clamping assembly to clamp and remove the four boat feet of the first layer from both sides of the graphite boat and place them on the boat foot placement platform. Then, the drive mechanism drives the suction cup disassembly mechanism to move to the top of the graphite boat, locate and adsorb the first boat blade at the top, and place the first boat blade on the boat blade placement platform. The robotic arm drives the boat-foot gripping assembly to clamp and remove the four boat feet of the second layer from both sides of the graphite boat and place them on the boat-foot placement platform. The drive mechanism then drives the suction cup disassembly mechanism back above the graphite boat to position the second boat blade and clamp all the ceramic sleeves of the second layer, then perform boat blade adsorption. The drive mechanism then drives the suction cup disassembly mechanism to remove the second boat blade and all the ceramic sleeves of the second layer. The second boat blade is then aligned with the first boat blade and placed on the boat blade placement platform, and then all the ceramic sleeves of the second layer are placed on the ceramic sleeve placement platform. These steps are repeated to remove all boat blades and their ceramic sleeves in sequence, achieving automated disassembly.

[0009] Optionally, the integrated disassembly mechanism includes a Z-axis linear movement module, a first base plate, a nut disassembly assembly, a flat spring pad disassembly assembly, and a ceramic rod disassembly assembly; The Z-axis linear motion module is connected to the drive mechanism, which drives the Z-axis linear motion module to move in the horizontal direction. The first substrate is connected to the Z-axis linear motion module, which drives the first substrate to move in the vertical direction. The nut removal assembly is disposed on the first base plate and is used to loosen and remove the nut; The flat spring pad removal assembly is disposed on the first base plate and is used to clamp and remove the flat spring pad; The ceramic rod disassembly assembly is disposed on the first substrate and is used to clamp and disassemble the ceramic rod.

[0010] By adopting the above technical solution, the drive mechanism drives the first substrate to move above the graphite boat placement platform. After the nut removal assembly is aligned with the ceramic rod, the Z-axis linear motion module drives the nut removal assembly to descend and loosen the nut, removing the nut from the top of the ceramic rod. Subsequently, the drive mechanism and the Z-axis linear motion module drive the first substrate to make a fine-tuning adjustment, causing the flat spring pad removal assembly to clamp the two flat spring pieces on each ceramic rod and remove them from the top of the ceramic rod. The drive mechanism and the Z-axis linear motion module drive the first substrate to make a fine-tuning adjustment, so that the ceramic rod removal assembly clamps the top of the ceramic rod and pulls the ceramic rod out.

[0011] Optionally, the nut removal assembly includes an anti-rotation pin unit and a rotating gripper. The anti-rotation pin unit provides a downward pressing force to the ceramic rod to prevent the ceramic rod and nut from rotating together. The rotating gripper is used to clamp the nut and drive it to rotate. An adaptive spring is provided on the first base plate, and the rotating gripper is mounted on the adaptive spring. The rotating gripper is elastically connected to the first base plate through the adaptive spring, thereby controlling the nut to rotate and rise to disengage from the ceramic rod.

[0012] Optionally, the adaptive spring component includes a first pressing cylinder, a slider, an upper spring, and a lower spring. The first pressing cylinder is mounted on the side wall of the first base plate. The slider is connected to the cylinder shaft of the first pressing cylinder. The rotating gripper is fixedly connected to the slider. The first pressing cylinder is driven to move vertically by the slider. The upper spring and the lower spring are respectively disposed on the top and bottom walls of the slider, and their other ends are respectively connected to the first base plate. The slider is elastically connected to the first base plate through the upper spring and the lower spring. The anti-rotation pin unit includes a follower bearing, a sleeve, an anti-rotation spring, and an anti-rotation pin. The follower bearing and the sleeve are disposed between the two jaws of the rotating jaw. The sleeve is rotatably connected to the rotating jaw body through the follower bearing. The anti-rotation pin is inserted into the hollow inner cavity of the sleeve. The top end of the anti-rotation pin is elastically connected to the inner wall of the sleeve through the anti-rotation spring. The bottom end of the anti-rotation pin protrudes from the sleeve, and the bottom wall of the anti-rotation pin can abut against the top end of the ceramic rod.

[0013] By adopting the above technical solution, when disassembling the nut, the graphite boat is placed on a graphite boat placement platform, which is equipped with a fixture that can hold the bottom end of the ceramic rod from below. The crossbar and gear rack drive module drives the anti-rotation pin to align with the top end of the ceramic rod. At this time, the rotating gripper is also aligned with the nut. The Z-axis linear motion module drives the first base plate to descend to a suitable position. The first pressing cylinder drives the slider to descend, causing the rotating gripper to descend until the anti-rotation pin is pressed against the ceramic rod. The two grippers of the rotating gripper engage with the outer wall of the nut from the outside. At this time, the upper spring is stretched, the lower spring is compressed, and the anti-rotation spring is also compressed. Then the rotating gripper starts, and the gripper rotates, causing the nut to rotate. However, at this time, both ends of the ceramic rod are pressed and will not rotate with the nut, causing the nut to rotate relative to the ceramic rod and begin to loosen. During the loosening process, the rotating gripper tends to move upward under the combined force of the upper and lower springs, causing the nut to rotate and rise to disengage from the ceramic rod. After the nut is completely loosened, the first pressing cylinder drives the nut to rise and disengage from the ceramic rod. Rotate the jaws to maintain the clamping state and continue to hold the nut.

[0014] Optionally, the flat spring pad disassembly assembly includes a second pressing cylinder, a clamping cylinder, and two flat spring pad grippers. The second pressing cylinder is mounted on the first base plate, and the cylinder shaft of the second pressing cylinder is connected to the cylinder body of the clamping cylinder to drive the clamping cylinder to move in the vertical direction. The two flat spring pad grippers are connected to the cylinder shaft of the clamping cylinder, and the clamping cylinder drives the two flat spring pad grippers to clamp the flat spring pad. The bottom of the two flat spring pad grippers is provided with an anti-flying groove, and the flat spring pad can be locked in the anti-flying groove. The ceramic rod disassembly unit includes a third pressing cylinder, a clamping cylinder, and two ceramic rod grippers. The third pressing cylinder is mounted on the first base plate, and its cylinder shaft is connected to the cylinder body of the clamping cylinder to drive the clamping cylinder to reciprocate in the vertical direction. The two ceramic rod grippers are connected to the cylinder shaft of the clamping cylinder, and the clamping cylinder drives the two ceramic rod grippers to clamp the top of the ceramic rod.

[0015] By adopting the above technical solution, after the nut is removed, the crossbar, gear and rack drive module, and Z-axis linear movement module drive the first base plate to make a fine-tuning of its position, so that the flat spring pad grippers are aligned with the flat spring pad. The second pressing cylinder drives the clamping cylinder to descend until the flat spring pad grippers are located on both sides of the flat spring pad. The clamping cylinder is activated, driving the two flat spring pad grippers to move closer to each other and clamp the flat spring pad from the outside. Subsequently, the second pressing cylinder drives the clamping cylinder and the flat spring pad grippers to lift the flat spring pad and disengage it from the ceramic rod. The clamping cylinder and the flat spring pad grippers maintain the clamping state and continue to hold the flat spring pad. After the flat spring pad is removed, the crossbar, rack and pinion drive module, and Z-axis linear movement module drive the first substrate to make a fine-tuning adjustment so that the ceramic rod grippers are aligned with the ceramic rod. The third pressing cylinder drives the clamping cylinder to descend until the ceramic rod grippers are on both sides of the ceramic rod. The clamping cylinder is activated, driving the two ceramic rod grippers to move closer together and clamp the ceramic rod from the outside. At this time, the nut at the bottom of the ceramic rod has been loosened by the fixture on the graphite boat placement platform. The third pressing cylinder drives the clamping cylinder and the ceramic rod grippers to lift the ceramic rod a short distance. Then, the Z-axis linear movement module drives the first substrate to rise, causing the ceramic rod to continue to rise until it is completely detached from the graphite boat.

[0016] Optionally, the suction cup disassembly mechanism includes a Z-axis linear motion module, a second base plate, multiple suction cup assemblies, multiple positioning pin assemblies, and multiple ceramic sleeve disassembly assemblies; The Z-axis linear motion module is connected to the drive mechanism, which drives the Z-axis linear motion module to move in the horizontal direction. The second substrate is connected to the Z-axis linear motion module, which drives the second substrate to move in the vertical direction. Multiple suction cup assemblies are disposed on the second substrate for adsorbing the boat blade and making the boat blade adhere tightly to the substrate; Multiple positioning pin assemblies are disposed on the second substrate for positioning the boat blade before adsorption. Multiple ceramic sleeve removal components are disposed on the second substrate for clamping the ceramic sleeve.

[0017] By adopting the above technical solution, the drive mechanism moves the second substrate above the graphite boat. As the Z-axis linear motion module drives its descent, the positioning pin assembly positions the second boat blade. At this time, the ceramic sleeve removal assembly clamps all the ceramic sleeves of the second layer, and then the suction cup assembly adsorbs them. The crossbar, rack and pinion drive module, and Z-axis linear motion module work together to drive the suction cup assembly and the ceramic sleeve removal assembly, causing the second boat blade and all the ceramic sleeves of the second layer to separate.

[0018] Optionally, the positioning pin assembly includes a pin body and an elastic element. The elastic element provides pre-pressure to the pin body, so that when adsorbing the boat blade, multiple pin bodies can be inserted into the ceramic rod holes on the boat blade to accurately position the boat blade through the ceramic rod holes.

[0019] Optionally, the ceramic sleeve disassembly assembly includes a clamping cylinder, two ceramic sleeve grippers, and an optical fiber detection component. The two ceramic sleeve grippers are respectively connected to the clamping cylinder. The clamping cylinder drives the two ceramic sleeve grippers to grip the ceramic sleeve. The optical fiber detection component is embedded in one of the ceramic sleeve grippers. The vertical projection of the ejector pin body falls between the two ceramic sleeve grippers.

[0020] By adopting the above technical solution, when disassembling the boat blade, the crossbar and rack and pinion drive module drives the second substrate to move above the graphite boat and adjusts its position so that the ejector pin body aligns with the ceramic rod hole on the boat blade. At this time, the Z-axis linear motion module drives the second substrate to descend until the top of the ejector pin body inserts into the ceramic sleeve and ceramic rod hole. As the second substrate continues to descend, the boat blade is aligned under the joint correction action of the positioning ejector pin. Subsequently, the second substrate continues to descend until the suction cup assembly is in contact with the boat blade and the ceramic sleeve grippers are located on both sides of the ceramic sleeve. The clamping cylinder drives the two ceramic sleeve grippers to clamp the ceramic sleeve, and the suction cup assembly adsorbs the boat blade. The Z-axis linear motion module drives the second substrate to rise vertically first, and then the crossbar and rack and pinion drive modules cooperate to drive the second substrate to move the boat blade and all the ceramic sleeves on it away. First, the boat blade is aligned with the previous boat blade and placed on the boat blade placement platform. During placement, the ejector pin body performs secondary positioning on the placed boat blade. Next, place the ceramic sleeve on the ceramic sleeve placement platform. During placement, the ejector pin body performs a secondary positioning of the ceramic sleeve, based on the same principle as above. Repeat the above steps to remove all boat blades and their ceramic sleeves in sequence.

[0021] Optionally, the suction cup assembly is provided in 28 groups, symmetrically distributed on the four edges of the substrate; and / or, the positioning pin assembly is provided in 16 groups; the ceramic sleeve removal assembly is provided in 16 groups.

[0022] By adopting the above technical solutions, the accuracy of positioning and the stability of adsorption are improved.

[0023] Optionally, the driving mechanism includes a crossbar, with gear structures driven by a motor installed at both ends of the crossbar. The two gear structures are engaged with two parallel racks in the existing frame, thereby driving the crossbar to reciprocate along the length of the racks. Two sets of gear and rack drive modules are installed on the top and side walls of the crossbar, respectively, with the driving direction of both sets of gear and rack drive modules parallel to the length of the crossbar. The integrated disassembly mechanism is connected to the gear and rack drive module on the top surface, and the suction cup disassembly mechanism is connected to the gear and rack drive module on the side surface. The crossbar and the two sets of gear and rack drive modules jointly drive the integrated disassembly mechanism and the suction cup disassembly mechanism to move horizontally.

[0024] In summary, this application includes at least one of the following beneficial technical effects: 1. When disassembling the boat blade, the crossbar and rack and pinion drive module moves the second substrate above the graphite boat and adjusts its position so that the ejector pin body aligns with the ceramic rod hole on the boat blade. At this time, the Z-axis linear motion module drives the second substrate to descend until the top of the ejector pin body inserts into the ceramic sleeve and ceramic rod hole. As the second substrate continues to descend, the boat blade is aligned by the combined correction action of 16 positioning ejector pins. Subsequently, the second substrate continues to descend until the suction cup assembly is in contact with the boat blade and the ceramic sleeve grippers are located on both sides of the ceramic sleeve. The clamping cylinder drives the two ceramic sleeve grippers to hold the ceramic sleeve, and the suction cup assembly adsorbs the boat blade. The Z-axis linear motion module drives the second substrate to rise vertically first, and then the crossbar and rack and pinion drive modules work together to drive the second substrate, moving the boat blade and all the ceramic sleeves on it away. First, align the boat blade with the previous boat blade and place it on the boat blade placement platform. During placement, the ejector pin body performs secondary positioning on the placed boat blade. Next, place the ceramic sleeve on the ceramic sleeve placement platform. During placement, the ejector pin body performs secondary positioning of the ceramic sleeve, based on the same principle as above. Repeat the above steps to remove all boat blades and their ceramic sleeves in sequence. 2. During nut removal, the graphite boat is placed on a graphite boat placement platform, which is equipped with a fixture that holds the bottom end of the ceramic rod from below. The crossbar and rack and pinion drive module drives the anti-rotation pin to align with the top end of the ceramic rod. At this time, the rotating gripper is also aligned with the nut. The Z-axis linear motion module drives the first base plate to descend to the appropriate position. The first pressing cylinder drives the slider to descend, causing the rotating gripper to descend until the anti-rotation pin is pressed against the ceramic rod. The two grippers of the rotating gripper engage with the outer wall of the nut from the outside. At this time, the upper spring is stretched, the lower spring is compressed, and the anti-rotation spring is also compressed. Then the rotating gripper starts to rotate, causing the nut to rotate. However, at this time, both ends of the ceramic rod are pressed against the nut and will not rotate with it, causing the nut to rotate relative to the ceramic rod and begin to loosen. During the loosening process, the rotating gripper tends to move upward under the combined force of the upper and lower springs, causing the nut to rotate and rise to disengage from the ceramic rod. After the nut is completely loosened, the first pressing cylinder drives the nut to rise and disengage from the ceramic rod. Rotate the grippers to maintain the clamping state and continue to hold the nut; 3. After the nut is removed, the crossbar, gear and rack drive module, and Z-axis linear movement module drive the first base plate to make a fine-tuning adjustment so that the flat spring pad grippers are aligned with the flat spring pad. The second pressing cylinder drives the clamping cylinder to descend until the flat spring pad grippers are located on both sides of the flat spring pad. The clamping cylinder is activated, driving the two flat spring pad grippers to move closer together and clamp the flat spring pad from the outside. Subsequently, the second pressing cylinder drives the clamping cylinder and the flat spring pad grippers to lift the flat spring pad and disengage it from the ceramic rod. The clamping cylinder and the flat spring pad grippers maintain the clamping state and continue to hold the flat spring pad. After the flat spring pad is removed, the crossbar, rack and pinion drive module, and Z-axis linear movement module drive the first substrate to make a fine-tuning adjustment so that the ceramic rod grippers are aligned with the ceramic rod. The third pressing cylinder drives the clamping cylinder to descend until the ceramic rod grippers are on both sides of the ceramic rod. The clamping cylinder is activated, driving the two ceramic rod grippers to move closer together and clamp the ceramic rod from the outside. At this time, the nut at the bottom of the ceramic rod has been loosened by the fixture on the graphite boat placement platform. The third pressing cylinder drives the clamping cylinder and the ceramic rod grippers to lift the ceramic rod a short distance. Then, the Z-axis linear movement module drives the first substrate to rise, causing the ceramic rod to continue to rise until it is completely detached from the graphite boat. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of a disassembly device for a graphite boat according to an embodiment of this application.

[0026] Figure 2 This is a schematic diagram showing the positions of the integrated disassembly mechanism and the suction cup disassembly mechanism in an embodiment of this application.

[0027] Figure 3 This is a schematic diagram of the drive mechanism in an embodiment of this application.

[0028] Figure 4 This is a schematic diagram of the integrated disassembly mechanism according to an embodiment of this application.

[0029] Figure 5 This is a structural schematic diagram of the nut removal assembly and the adaptive spring component according to an embodiment of this application.

[0030] Figure 6 This is a schematic diagram of the anti-rotation ejector pin unit in an embodiment of this application.

[0031] Figure 7 This is a schematic diagram of the structure of the flat spring pad disassembly assembly according to an embodiment of this application.

[0032] Figure 8 This is a schematic diagram of the structure of the ceramic rod disassembly assembly according to an embodiment of this application.

[0033] Figure 9 This is a schematic diagram of the structure of the second substrate and suction cup assembly in an embodiment of this application.

[0034] Figure 10 This is a schematic diagram of the structure of the bottom surface of the second substrate in an embodiment of this application.

[0035] Figure 11 This is a structural schematic diagram of the positioning pin assembly and the ceramic sleeve disassembly assembly in an embodiment of this application.

[0036] Explanation of reference numerals in the attached figures: 1. Drive mechanism; 11. Crossbar; 12. Gear structure; 13. Gear and rack drive module; 14. Z-axis linear motion module; 2. Integrated disassembly mechanism; 21. First base plate; 22. Nut disassembly assembly; 221. Anti-rotation pin unit; 2211. Rotating bearing; 2212. Sleeve; 2213. Anti-rotation spring; 2214. Anti-rotation pin; 222. Rotating gripper; 223. Adaptive spring component; 2231. First pressing cylinder; 2232. Slider; 2233. Slide rail; 2234. Upper spring; 2235. Lower spring; 23. Flat spring pad disassembly assembly; 231. Second pressing cylinder; 232. Clamping cylinder; 233. Flat spring pad gripper; 234. Anti-flying groove; 24. Ceramic rod disassembly assembly; 241. Third pressing cylinder; 242. Ceramic rod gripper; 3. Suction cup removal mechanism; 31. Second substrate; 311. Mounting base; 32. Suction cup assembly; 33. Positioning pin assembly; 331. Pin body; 3311. Mounting piece; 332. Elastic element; 34. Ceramic sleeve removal assembly; 341. Clamping cylinder; 342. Ceramic sleeve gripper; 343. Fiber optic detection component; 4. Nut; 5. Flat spring washer; 6. Ceramic rod; 7. Ceramic sleeve; 8. Boat blade. Detailed Implementation

[0037] The following is in conjunction with the appendix Figure 1-11 This application will be described in further detail.

[0038] This application discloses a disassembly device suitable for graphite boats. (Refer to...) Figure 1 and Figure 2 A disassembly device for graphite boats includes a drive mechanism 1, which is mounted on an existing frame. An integrated disassembly mechanism 2 and a suction cup disassembly mechanism 3 are mounted on the drive mechanism 1, which respectively drives the integrated disassembly mechanism 2 and the suction cup disassembly mechanism 3 to move. The integrated disassembly mechanism 2 is used to disassemble at least one of the following: ceramic rod 6, nut 4, and flat spring washer 5 of the graphite boat; the suction cup disassembly mechanism 3 is used to adsorb and disassemble the boat blades 8 of the graphite boat.

[0039] Reference Figure 2 and Figure 3The drive mechanism 1 includes a crossbar 11 installed within the existing frame. Two parallel racks are mounted on the frame, with the length of the crossbar 11 perpendicular to the racks. Two motor-driven gear structures 12 are mounted at both ends of the crossbar 11, meshing with the racks. The two motors work together to drive the crossbar 11 to reciprocate along the length of the racks. Two sets of rack and pinion drive modules 13 are mounted on the top and side walls of the crossbar 11, respectively, with their driving directions parallel to the length of the crossbar 11. An integrated disassembly mechanism 2 is connected to the rack and pinion drive modules 13 on the top surface, and a suction cup disassembly mechanism 3 is connected to the rack and pinion drive modules 13 on the side surface. The crossbar 11 and the two rack and pinion drive modules 13 together drive the integrated disassembly mechanism 2 and the suction cup disassembly mechanism 3 to move horizontally.

[0040] Reference Figure 1 and Figure 4 The integrated disassembly mechanism 2 includes a Z-axis linear motion module 14 and a first base plate 21 driven by it. The first base plate 21 is equipped with: a nut disassembly assembly 22 for loosening and disassembling the nut 4; a flat spring pad disassembly assembly 23 for clamping and disassembling the flat spring pad 5; and a ceramic rod disassembly assembly 24 for clamping and disassembling the ceramic rod 6.

[0041] Reference Figure 1 and Figure 3 The suction cup disassembly mechanism 3 includes a Z-axis linear motion module 14 and a second base plate 31 driven by it. The second base plate 31 is equipped with: a suction cup assembly 32 for adsorbing the boat blade 8; a positioning pin assembly 33 for positioning the boat blade 8 before adsorbing it; and a ceramic sleeve disassembly assembly 34 for clamping the ceramic sleeve 7.

[0042] In this embodiment, the Z-axis linear motion module 14 can be a lead screw module or a gear and rack drive structure, both of which are existing technologies and will not be described in detail here.

[0043] The graphite boat assembly to be disassembled is placed on the graphite boat placement platform, with the ceramic rod 6 in a vertical position. The crossbar 11 and the rack and pinion drive module 13 drive the first substrate 21 to move above the graphite boat placement platform. When the nut removal assembly 22 aligns with the ceramic rod 6, the Z-axis linear motion module 14 drives the nut removal assembly 22 to descend, loosen the nut 4, and then rise to remove the nut 4 from the top of the ceramic rod 6. Subsequently, the flat spring pad removal assembly 23 clamps the two flat spring pieces on each ceramic rod 6 and removes them from the top of the ceramic rod 6. The ceramic rod removal assembly 24 clamps the top of the ceramic rod 6 and pulls it out. The crossbar 11 and the rack and pinion drive module 13 drive the first substrate 21 to the ceramic rod 6 placement platform and the nut 4 flat spring pad 5 placement platform, respectively placing and storing the ceramic rod 6, nut 4, and flat spring pad 5. The above steps are repeated until all ceramic rods 6 have been disassembled.

[0044] The robotic arm drives the boat foot clamping assembly to clamp and remove the four boat feet of the first layer from both sides of the graphite boat and place them on the boat foot placement platform. Then, the crossbar 11 and the gear and rack drive module 13 drive the second substrate 31 to move above the graphite boat. During the descent of the second substrate 31, the positioning pin assembly 33 first positions the topmost first boat blade 8, and then the suction cup assembly 32 adsorbs it. Subsequently, the crossbar 11, the gear and rack drive module 13 and the Z-axis linear movement module 14 cooperate to drive the suction cup assembly 32 to place the first boat blade 8 on the boat blade 8 placement platform.

[0045] The robotic arm drives the boat-foot clamping assembly to clamp and remove the four boat feet of the second layer from both sides of the graphite boat and place them on the boat-foot placement platform. The crossbar 11 and the rack and pinion drive module 13 drive the second substrate 31 back above the graphite boat. The Z-axis linear motion module 14 drives it to descend, and the positioning pin assembly 33 positions the second boat blade 8. At this time, the ceramic sleeve removal assembly 34 clamps all the ceramic sleeves 7 of the second layer, and then the suction cup assembly 32 adsorbs them. The crossbar 11, rack and pinion drive module 13, and Z-axis linear motion module 14 work together to drive the suction cup assembly 32 and the ceramic sleeve removal assembly 34, causing the second boat blade 8 and all the ceramic sleeves 7 of the second layer to separate. Then, the second boat blade 8 is aligned with the first boat blade 8 and placed on the boat blade 8 placement platform, and then all the ceramic sleeves 7 of the second layer are placed on the ceramic sleeve 7 placement platform. The above steps are repeated to remove all the boat blades 8 and their ceramic sleeves 7 in sequence.

[0046] Reference Figure 4 and Figure 5 The nut removal assembly 22 includes an adaptive spring 223 mounted on the first base plate 21. A rotating gripper 222 is mounted on the movable end of the adaptive spring 223. The rotating gripper 222 grips the nut 4 and drives it to rotate. The rotating gripper 222 is elastically connected to the first base plate 21 via the adaptive spring 223, thereby controlling the nut 4 to rotate and rise simultaneously to detach from the ceramic rod 6. An anti-rotation pin unit 221 is provided on the rotating gripper 222, which provides a downward pressing force to the ceramic rod 6 to prevent the ceramic rod 6 and nut 4 from rotating together.

[0047] Reference Figure 5 and Figure 6The adaptive spring component 223 includes a first pressing cylinder 2231, the cylinder body of which is bolted to the side wall of the first base plate 21. A slider 2232 is connected to the cylinder shaft of the first pressing cylinder 2231. Two vertical slide rails 2233 are fixedly installed on the side wall of the first base plate 21, and the slider 2232 is slidably connected to the slide rails 2233. A rotating gripper 222 is fixedly connected to the slider 2232. The first pressing cylinder 2231 drives the slider 2232 to move up and down along the slide rails 2233, thereby driving the rotating gripper 222 to move up and down. A circular hole is provided in the middle of the slider 2232, and a vertical rod is inserted into the circular hole. The upper and lower ends of the vertical rod are fixedly connected to the first base plate 21. An upper spring 2234 is provided between the top of the vertical rod and the top wall of the slider 2232, and a lower spring 2235 is provided between the bottom of the vertical rod and the bottom wall of the slider 2232. When the slider 2232 moves relative to the first substrate 21, the upper spring 2234 and the lower spring 2235 are compressed and stretched by the slider 2232, respectively.

[0048] Reference Figure 5 and Figure 6 The anti-rotation ejector unit 221 includes a follower bearing 2211, a sleeve 2212, an anti-rotation spring 2213, and an anti-rotation ejector pin 2214. The follower bearing 2211 and the sleeve 2212 are positioned between the two jaws of the rotating gripper 222. The sleeve 2212 is rotatably connected to the body of the rotating gripper 222 via the follower bearing 2211. The anti-rotation ejector pin 2214 is inserted into the hollow inner cavity of the sleeve 2212. The top end of the anti-rotation ejector pin 2214 is elastically connected to the inner wall of the sleeve 2212 via the anti-rotation spring 2213, and the bottom end of the anti-rotation ejector pin 2214 protrudes from the sleeve 2212. The bottom wall of the anti-rotation ejector pin 2214 can abut against the top end of the ceramic rod 6. A fixture is provided on the graphite boat placement platform. The fixture can abut against the bottom end of the ceramic rod 6 from below. When the top end of the ceramic rod 6 is pressed against by the anti-rotation ejector pin 2214, it is difficult for it to rotate.

[0049] It should be noted that, under special circumstances, when nut 4 and ceramic rod 6 are fully tightened, due to excessive friction, the rotation of nut 4 will still cause ceramic rod 6 to rotate. In this case, the follower bearing 2211 at the top of sleeve 2212 will operate, allowing sleeve 2212 and anti-rotation pin 2214 to rotate together, preventing damage to sleeve 2212 and anti-rotation pin 2214. In this situation, operator intervention is required before disassembly.

[0050] When disassembling nut 4, the graphite boat is placed on the graphite boat placement platform. The crossbar 11 and the gear and rack drive module 13 drive the anti-rotation pin 2214 to align with the top of the ceramic rod 6. At this time, the rotating gripper 222 is also aligned with nut 4. The Z-axis linear movement module 14 drives the first substrate 21 to descend to the appropriate position. The first pressing cylinder 2231 drives the slider 2232 to descend, causing the rotating gripper 222 to descend until the anti-rotation pin 2214 is pressed against the ceramic rod 6. The two grippers of the rotating gripper 222 engage with the outer wall of nut 4 from the outside. At this time, the upper spring 2234 is stretched, the lower spring 2235 is compressed, and the anti-rotation spring 2213 is also compressed. Then the rotating gripper 222 starts, and the gripper rotates, causing nut 4 to rotate. However, at this time, both the upper and lower ends of the ceramic rod 6 are pressed against each other and will not rotate with nut 4, causing nut 4 to rotate relative to ceramic rod 6 and begin to loosen.

[0051] During the loosening process, the rotating jaw 222 tends to move upward under the combined force of the upper spring 2234 and the lower spring 2235, causing the nut 4 to rotate and rise to disengage from the ceramic rod 6. After the nut 4 is completely loosened, the first pressing cylinder 2231 drives the nut 4 to rise and disengage from the ceramic rod 6. The rotating jaw 222 remains clamped and continues to hold the nut 4.

[0052] Reference Figure 7 The flat spring pad disassembly assembly 23 includes a second pressing cylinder 231, a clamping cylinder 232, and two flat spring pad grippers 233. The cylinder body of the second pressing cylinder 231 is bolted to the side wall of the first base plate 21. The cylinder shaft of the second pressing cylinder 231 is connected to the cylinder body of the clamping cylinder 232 to drive the clamping cylinder 232 to reciprocate vertically. The two flat spring pad grippers 233 are connected to the cylinder shaft of the clamping cylinder 232. The clamping cylinder 232 drives the two flat spring pad grippers 233 to clamp the flat spring pad 5. The bottom of the two flat spring pad grippers 233 is provided with an anti-flying groove 234, which allows the flat spring pad 5 to be locked in the anti-flying groove 234.

[0053] After nut 4 is removed, the crossbar 11, the gear and rack drive module 13, and the Z-axis linear movement module 14 drive the first base plate 21 to make a fine-tuning adjustment, so that the flat spring pad gripper 233 aligns with the flat spring pad 5. The second pressing cylinder 231 drives the clamping cylinder 232 to descend until the flat spring pad gripper 233 is located on both sides of the flat spring pad 5. The clamping cylinder 232 is activated, driving the two flat spring pad grippers 233 to move closer to each other, clamping the flat spring pad 5 from the outside. Subsequently, the second pressing cylinder 231 drives the clamping cylinder 232 and the flat spring pad gripper 233 to lift the flat spring pad 5 and disengage it from the ceramic rod 6. The clamping cylinder 232 and the flat spring pad gripper 233 maintain the clamping state and continue to hold the flat spring pad 5.

[0054] Reference Figure 8The ceramic rod 6 disassembly unit includes a third pressing cylinder 241, a clamping cylinder 232, and two ceramic rod grippers 242. The cylinder body of the third pressing cylinder 241 is bolted to the side wall of the first base plate 21, and the cylinder shaft of the third pressing cylinder 241 is connected to the cylinder body of the clamping cylinder 232 to drive the clamping cylinder 232 to reciprocate vertically. The two ceramic rod grippers 242 are connected to the cylinder shaft of the clamping cylinder 232, and the clamping cylinder 232 drives the two ceramic rod grippers 242 to clamp the top of the ceramic rod 6. The side walls of the ceramic rod grippers 242 are set to be concave arc-shaped to fit the ceramic rod 6.

[0055] After the flat spring pad 5 is removed, the crossbar 11, the gear and rack drive module 13, and the Z-axis linear movement module 14 drive the first substrate 21 to make a slight position adjustment so that the ceramic rod gripper 242 is aligned with the ceramic rod 6. The third pressing cylinder 241 drives the clamping cylinder 232 to descend until the ceramic rod gripper 242 is located on both sides of the ceramic rod 6. The clamping cylinder 232 is activated, and the two ceramic rod grippers 242 move closer to each other, clamping the ceramic rod 6 from the outside. At this time, the nut 4 at the bottom of the ceramic rod 6 has been loosened by the fixture on the graphite boat placement platform. The third pressing cylinder 241 drives the clamping cylinder 232 and the ceramic rod gripper 242 to lift the ceramic rod 6 a short distance. Then, the Z-axis linear movement module 14 drives the first substrate 21 to rise, causing the ceramic rod 6 to continue to rise until it is completely detached from the graphite boat.

[0056] At this time, the crossbar 11 and the gear and rack drive module 13 drive the first base plate 21 and the nut 4, flat spring pad 5 and ceramic rod 6 on it to leave the graphite boat together, and cooperate with the Z-axis linear movement module 14 to place the ceramic rod 6 into the ceramic rod 6 placement platform, and place the nut 4 and flat spring pad 5 into the nut 4 flat spring pad 5 placement platform for storage.

[0057] Then, repeat the above steps until all ceramic rods 6 have been removed.

[0058] Reference Figure 9 and Figure 10 In this embodiment, 28 sets of suction cup assemblies 32 are provided on the second substrate 31, with 12 sets symmetrically arranged on each side of the second substrate 31 along its length and 2 sets symmetrically arranged on each side of the second substrate 31 along its width. 16 sets of ceramic sleeve removal assemblies 34 are provided, and 16 sets of positioning pin assemblies 33 are correspondingly provided.

[0059] The suction cup assembly 32 is a common vacuum suction cup with an air pump connected to it. This is a conventional technique well known to those skilled in the art and will not be described in detail here.

[0060] Reference Figure 10 and Figure 11The positioning pin assembly 33 includes a pin body 331 and an elastic element 332. A mounting base 311 is fixed to the top edge of the second substrate 31 by bolts. The mounting base 311 has a circular hole in the vertical direction. The pin body 331 is inserted into the mounting base 311 through the circular hole, and the bottom end of the pin body 331 is outside the projection of the second substrate 31 in the vertical direction. A mounting piece 3311 is provided at the top end of the pin body 331. The diameter of the mounting piece 3311 is larger than the diameter of the pin to prevent the pin from detaching from the mounting base 311. The elastic element 332 is sleeved on the pin body 331. The top end of the elastic element 332 is connected to the bottom wall of the mounting base 311, and the other end is connected to the outer wall of the pin body 331. The elastic element 332 provides pre-pressure to the pin body 331, so that when adsorbing the boat blade 8, multiple pin bodies 331 can be inserted into the holes of the ceramic rod 6 on the boat blade 8, and the boat blade 8 is accurately positioned through the holes of the ceramic rod 6. In this embodiment, the elastic element 332 is a spring.

[0061] Reference Figure 11 The ceramic sleeve removal assembly 34 includes a clamping cylinder 341 and two ceramic sleeve grippers 342. The clamping cylinder 341 is inverted and mounted on the mounting base 311. The two ceramic sleeve grippers 342 are respectively connected to the cylinder shaft of the clamping cylinder 341. The clamping cylinder 341 drives the two ceramic sleeve grippers 342 to move closer or further away in the horizontal direction. The ceramic sleeve grippers 342 are L-shaped, with one end of the ceramic sleeve gripper 342 away from the clamping cylinder 341 positioned horizontally. The vertical projection of the ejector pin body 331 falls between the horizontal sections of the two ceramic sleeve grippers 342. The inner walls of the two ceramic sleeve grippers 342 on opposite sides of the horizontal section are set as concave arcs to fit the ceramic sleeve 7. An optical fiber detection element 343 is embedded in the ceramic sleeve gripper 342 away from the second substrate 31 in the horizontal direction to detect whether the ceramic sleeve gripper 342 is clamping the ceramic sleeve 7.

[0062] When disassembling the boat blade 8, the crossbar 11 and the rack and pinion drive module 13 drive the second substrate 31 to move above the graphite boat and adjust its position so that the ejector pin body 331 aligns with the ceramic rod 6 hole on the boat blade 8. At this time, the Z-axis linear motion module 14 drives the second substrate 31 to descend until the top of the ejector pin body 331 first inserts into the ceramic sleeve 7 and the ceramic rod 6 hole. As the second substrate 31 continues to descend, the boat blade 8 is aligned by the combined alignment action of the 16 positioning ejector pins. Subsequently, the second substrate 31 continues to descend until the suction cup assembly 32 is in contact with the boat blade 8 and the ceramic sleeve grippers 342 are located on both sides of the ceramic sleeve 7. The clamping cylinder 341 drives the two ceramic sleeve grippers 342 to clamp the ceramic sleeve 7, and the suction cup assembly 32 adsorbs the boat blade 8. The Z-axis linear motion module 14 drives the second substrate 31 to rise vertically first, and then the crossbar 11 and the rack and pinion drive module 13 cooperate to drive the second substrate 31 to move the boat blade 8 and all the ceramic sleeves 7 on it away. First, align the boat blade 8 with the previous boat blade 8 and place it on the boat blade 8 placement platform. During placement, the ejector body 331 performs secondary positioning of the placed boat blade 8. Next, place the ceramic sleeve 7 on the ceramic sleeve 7 placement platform. During placement, the ejector body 331 performs secondary positioning of the ceramic sleeve 7, for the same reason. Repeat the above steps to remove all boat blades 8 and their ceramic sleeves 7 in sequence.

[0063] The implementation principle of a disassembly device for a graphite boat according to an embodiment of this application is as follows: The graphite boat assembly to be disassembled is placed on a graphite boat placement platform, at which time the ceramic rod 6 is in a vertical state. The crossbar 11 and the gear and rack drive module 13 drive the first substrate 21 to move above the graphite boat placement platform. When the nut disassembly assembly 22 is aligned with the ceramic rod 6, the Z-axis linear movement module 14 drives the nut disassembly assembly 22 to descend, loosen the nut 4, and then rise to remove the nut 4 from the top of the ceramic rod 6. Subsequently, the flat spring pad disassembly assembly 23 clamps the two flat spring pieces on each ceramic rod 6 and removes them from the top of the ceramic rod 6. The ceramic rod disassembly assembly 24 clamps the top of the ceramic rod 6 and pulls the ceramic rod 6 out. The crossbar 11 and the gear and rack drive module 13 drive the first substrate 21 to the ceramic rod 6 placement platform and the nut 4 flat spring pad 5 placement platform in turn to place and store the ceramic rod 6, nut 4, and flat spring pad 5 respectively. The above steps are repeated until all ceramic rods 6 have been disassembled.

[0064] The robotic arm drives the boat foot clamping assembly to clamp and remove the four boat feet of the first layer from both sides of the graphite boat and place them on the boat foot placement platform. Then, the crossbar 11 and the gear and rack drive module 13 drive the second substrate 31 to move above the graphite boat. During the descent of the second substrate 31, the positioning pin assembly 33 first positions the topmost first boat blade 8, and then the suction cup assembly 32 adsorbs it. Subsequently, the crossbar 11, the gear and rack drive module 13 and the Z-axis linear movement module 14 cooperate to drive the suction cup assembly 32 to place the first boat blade 8 on the boat blade 8 placement platform.

[0065] The robotic arm drives the boat-foot clamping assembly to clamp and remove the four boat feet of the second layer from both sides of the graphite boat and place them on the boat-foot placement platform. The crossbar 11 and the rack and pinion drive module 13 drive the second substrate 31 back above the graphite boat. The Z-axis linear motion module 14 drives it to descend, and the positioning pin assembly 33 positions the second boat blade 8. At this time, the ceramic sleeve removal assembly 34 clamps all the ceramic sleeves 7 of the second layer, and then the suction cup assembly 32 adsorbs them. The crossbar 11, rack and pinion drive module 13, and Z-axis linear motion module 14 work together to drive the suction cup assembly 32 and the ceramic sleeve removal assembly 34, causing the second boat blade 8 and all the ceramic sleeves 7 of the second layer to separate. Then, the second boat blade 8 is aligned with the first boat blade 8 and placed on the boat blade 8 placement platform, and then all the ceramic sleeves 7 of the second layer are placed on the ceramic sleeve 7 placement platform. The above steps are repeated to remove all the boat blades 8 and their ceramic sleeves 7 in sequence. The automated disassembly of the nut 4, flat spring washer 5, ceramic rod 6, ceramic sleeve 7 and boat blade 8 is achieved through the integrated disassembly mechanism 2 and suction cup disassembly mechanism 3, thereby improving the efficiency of graphite boat assembly and disassembly.

[0066] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A disassembly device suitable for graphite boats, characterized in that: include Drive mechanism (1); An integrated disassembly mechanism (2) is installed on the drive mechanism (1) and is driven to move by the drive mechanism (1). The integrated disassembly mechanism (2) is used to disassemble at least one of the ceramic rod, nut and flat spring washer of the graphite boat. The suction cup disassembly mechanism (3) is installed on the driving mechanism (1) and is driven to move by the driving mechanism (1). The suction cup disassembly mechanism (3) is used to adsorb and disassemble the blades of the graphite boat. A boat foot disassembly mechanism, comprising a robotic arm and a boat foot clamping assembly; The placement mechanism includes a graphite boat placement platform, a nut flat spring washer placement platform, a ceramic sleeve placement platform, a ceramic rod placement platform, a boat blade placement platform, and a boat foot placement platform.

2. The disassembly device for a graphite boat according to claim 1, characterized in that: The integrated disassembly mechanism (2) includes a Z-axis linear motion module (14), a first base plate (21), a nut disassembly assembly (22), a flat spring pad disassembly assembly (23), and a ceramic rod disassembly assembly (24); The Z-axis linear motion module (14) is connected to the drive mechanism (1), and the drive mechanism (1) drives the Z-axis linear motion module (14) to move in the horizontal direction. The first substrate (21) is connected to the Z-axis linear motion module (14), and the Z-axis linear motion module (14) is used to drive the first substrate (21) to move in the vertical direction. The nut removal assembly (22) is disposed on the first base plate (21) for loosening and removing the nut; The flat spring pad disassembly assembly (23) is disposed on the first base plate (21) and is used to clamp and disassemble the flat spring pad; The ceramic rod disassembly assembly (24) is disposed on the first substrate (21) and is used to clamp and disassemble the ceramic rod.

3. The disassembly device for a graphite boat according to claim 2, characterized in that: The nut removal assembly (22) includes an anti-rotation pin unit (221) and a rotating gripper (222). The anti-rotation pin unit (221) provides a downward pressing force to the ceramic rod to prevent the ceramic rod and nut from rotating together. The rotating gripper (222) is used to clamp the nut and drive the nut to rotate. An adaptive spring (223) is provided on the first base plate (21). The rotating gripper (222) is mounted on the adaptive spring (223). The rotating gripper (222) is elastically connected to the first base plate (21) through the adaptive spring (223), thereby controlling the nut to rotate and rise to disengage from the ceramic rod.

4. The disassembly device for a graphite boat according to claim 3, characterized in that: The adaptive spring component (223) includes a first pressing cylinder (2231), a slider (2232), an upper spring (2234), and a lower spring (2235). The first pressing cylinder (2231) is mounted on the side wall of the first base plate (21). The slider (2232) is connected to the cylinder shaft of the first pressing cylinder (2231). The rotating gripper (222) is fixedly connected to the slider (2232). The first pressing cylinder (2231) is driven to move vertically by the slider (2232). The upper spring (2234) and the lower spring (2235) are respectively disposed on the top wall and bottom wall of the slider (2232), and their other ends are respectively connected to the first base plate (21). The slider (2232) is elastically connected to the first base plate (21) through the upper spring (2234) and the lower spring (2235). The anti-rotation pin unit (221) includes a follower bearing (2211), a sleeve (2212), an anti-rotation spring (2213), and an anti-rotation pin (2214). The follower bearing (2211) and the sleeve (2212) are disposed between the two jaws of the rotating jaw (222). The sleeve (2212) is rotatably connected to the body of the rotating jaw (222) through the follower bearing (2211). The anti-rotation pin (2214) is inserted into the hollow inner cavity of the sleeve (2212). The top end of the anti-rotation pin (2214) is elastically connected to the inner wall of the sleeve (2212) through the anti-rotation spring (2213). The bottom end of the anti-rotation pin (2214) protrudes from the sleeve (2212). The bottom wall of the anti-rotation pin (2214) can abut against the top end of the ceramic rod.

5. A disassembly device suitable for graphite boats according to claim 2, characterized in that: The flat spring pad disassembly assembly (23) includes a second pressing cylinder (231), a clamping cylinder (232), and two flat spring pad grippers (233). The second pressing cylinder (231) is mounted on the first base plate (21). The cylinder shaft of the second pressing cylinder (231) is connected to the cylinder body of the clamping cylinder (232) to drive the clamping cylinder (232) to move in the vertical direction. The two flat spring pad grippers (233) are connected to the cylinder shaft of the clamping cylinder (232). The clamping cylinder (232) drives the two flat spring pad grippers (233) to clamp the flat spring pad. The bottom of the two flat spring pad grippers (233) is provided with an anti-flying groove (234), and the flat spring pad can be stuck in the anti-flying groove (234). The ceramic rod disassembly unit includes a third pressing cylinder (241), a clamping cylinder (232), and two ceramic rod grippers (242). The third pressing cylinder (241) is mounted on the first base plate (21). The cylinder shaft of the third pressing cylinder (241) is connected to the cylinder body of the clamping cylinder (232) to drive the clamping cylinder (232) to reciprocate in the vertical direction. The two ceramic rod grippers (242) are connected to the cylinder shaft of the clamping cylinder (232). The clamping cylinder (232) drives the two ceramic rod grippers (242) to clamp the top end of the ceramic rod.

6. The disassembly device for a graphite boat according to claim 1, characterized in that: The suction cup disassembly mechanism (3) includes a Z-axis linear motion module (14), a second base plate (31), multiple suction cup assemblies (32), multiple positioning pin assemblies (33), and multiple ceramic sleeve disassembly assemblies (34); The Z-axis linear motion module (14) is connected to the drive mechanism (1), and the drive mechanism (1) drives the Z-axis linear motion module (14) to move in the horizontal direction. The second substrate (31) is connected to the Z-axis linear motion module (14), and the Z-axis linear motion module (14) is used to drive the second substrate (31) to move in the vertical direction. Multiple suction cup assemblies (32) are disposed on the second substrate (31) for adsorbing the boat blade and making the boat blade adhere tightly to the substrate; Multiple positioning pin assemblies (33) are disposed on the second substrate (31) for positioning the boat blade before adsorbing it; Multiple ceramic sleeve removal assemblies (34) are disposed on the second substrate (31) for clamping the ceramic sleeve.

7. A disassembly device suitable for graphite boats according to claim 6, characterized in that: The positioning pin assembly (33) includes a pin body (331) and an elastic element (332). The elastic element (332) provides pre-pressure to the pin body (331) so that when adsorbing the boat blade, multiple pin bodies (331) can be inserted into the ceramic rod holes on the boat blade to accurately position the boat blade through the ceramic rod holes.

8. A disassembly device suitable for graphite boats according to claim 7, characterized in that: The ceramic sleeve disassembly assembly (34) includes a clamping cylinder (341), two ceramic sleeve clamps (342), and an optical fiber detection component (343). The two ceramic sleeve clamps (342) are respectively connected to the clamping cylinder (341). The clamping cylinder (341) drives the two ceramic sleeve clamps (342) to clamp the ceramic sleeve. The optical fiber detection component (343) is embedded in one of the ceramic sleeve clamps (342). The projection of the ejector pin body (331) in the vertical direction falls between the two ceramic sleeve clamps (342).

9. A disassembly device suitable for graphite boats according to claim 6, characterized in that: The suction cup assembly (32) is provided in 28 groups, symmetrically distributed on the four edges of the substrate; and / or, the positioning pin assembly (33) is provided in 16 groups; the ceramic sleeve removal assembly (34) is provided in 16 groups.

10. A disassembly device suitable for graphite boats according to claim 1, characterized in that: The driving mechanism (1) includes a crossbar (11), and gear structures (12) driven by a motor are respectively installed at both ends of the crossbar (11). The two gear structures (12) are engaged with two parallel racks in the existing frame, which can drive the crossbar (11) to move back and forth along the length of the racks. Two sets of gear and rack drive modules (13) are respectively installed on the top wall and side wall of the crossbar (11). The driving direction of the two sets of gear and rack drive modules (13) is parallel to the length of the crossbar (11). The integrated disassembly mechanism (2) is connected to the gear and rack drive module (13) on the top surface, and the suction cup disassembly mechanism (3) is connected to the gear and rack drive module (13) on the side. The crossbar (11) and the two sets of gear and rack drive modules (13) jointly drive the integrated disassembly mechanism (2) and the suction cup disassembly mechanism (3) to move in the horizontal direction.

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