Processing method of quartz tube with arc-shaped end part

Abstract

The invention relates to the technical field of quartz tube processing, and particularly discloses a processing method of a quartz tube with an arc-shaped end part, and the method comprises the following steps: arranging a quartz plate on one side of the end part of the quartz tube, taking a gap between the quartz tube and the quartz plate as a connecting gap, heating the connecting gap to a first preset temperature, melting the end part of the quartz tube and the edge of the quartz plate; moving the quartz plate along the axial direction of the quartz tube, so that the quartz tube is connected with the quartz plate; the quartz plate is heated to a second preset temperature, and working gas is introduced into the quartz tube, so that the quartz plate protrudes outwards to form an arc-shaped plate. According to the method, the quartz plate and the end part of the quartz tube are welded, and then air pressure blowing forming is utilized, so that the strength of the connecting position can be close to the strength of a quartz material, the structural strength and the use performance of the finally formed quartz tube are guaranteed, and the production cost is also reduced.

Description

Technical Field

[0001] This application relates to the field of quartz tube processing technology, and in particular to a processing method for quartz tubes with arc-shaped ends. Background Technology

[0002] In high-tech fields such as semiconductors and photovoltaics, quartz furnace tubes are core thermal devices, and the processing quality of their top arc structure directly affects the device's sealing performance, thermal stability, and service life.

[0003] Currently, the processing of the top arc of quartz furnace tubes mostly adopts the steps of material pulling, material collection, and forming. However, in the material pulling and collection stages, in order to ensure the quality of arc forming, it is necessary to stretch out excess material. This excess material will become waste in subsequent cutting and trimming, resulting in a high raw material loss rate and thus increasing production costs. Summary of the Invention

[0004] To address the aforementioned problems, this application provides a method for processing a quartz tube with an arc-shaped end.

[0005] To achieve the above objectives, this application adopts the following technical solution: This application provides a method for processing a quartz tube with an arc-shaped end, comprising the following steps: A quartz plate is provided on one side of the end of the quartz tube, and the gap between the quartz tube and the quartz plate is the connection gap; The connection gap is heated to a first preset temperature so that the end of the quartz tube and the edge of the quartz plate are both melted; The quartz plate is moved along the axial direction of the quartz tube to connect the quartz tube to the quartz plate; A certain flow rate of working gas is introduced into the quartz tube to pressurize the quartz tube to a first gas pressure, so that the quartz plate forms an outwardly convex arc surface; The heating flame is moved away from the quartz tube so that it wraps around the convex arc surface of the quartz plate, thereby heating the quartz plate evenly to the second preset temperature. The flow rate of the working gas entering the quartz tube is increased, so that the pressure inside the quartz tube rises to the second pressure, thereby causing the quartz plate to convex outward to form an arc-shaped plate.

[0006] In one embodiment, the provision of a quartz plate on one side of the end of the quartz tube includes: The quartz tube is fixed to the first movable end of the machine tool, and the quartz plate is fixed to the second movable end of the machine tool, wherein the second movable end and the first movable end are coaxial. The second movable end is moved along its own axis toward the direction of the quartz tube.

[0007] In one embodiment, before heating the connection gap to a first preset temperature, the method further includes: The first and second movable ends are controlled to rotate synchronously and in the same direction.

[0008] In one embodiment, before heating the quartz plate to a second preset temperature, the second movable end is removed from fixing the quartz plate; During the process of heating the quartz plate to the second preset temperature, the first movable end is controlled to rotate, driving the quartz plate to rotate synchronously, so as to achieve uniform heating.

[0009] In one embodiment, after introducing the working gas into the quartz tube, the method further includes: The heating position of the quartz plate is adjusted in real time according to the deformation shape of the quartz plate.

[0010] In one embodiment, after the step of causing the quartz plate to bulge outward to form an arc-shaped plate, the method further includes: A graphite mold is used to contact the arc-shaped plate to fix the shape and size of the arc-shaped plate.

[0011] In one embodiment, the thickness of the quartz plate is 1 to 1.2 times the wall thickness of the quartz tube.

[0012] In one embodiment, before heating the connection gap to a first preset temperature, the method further includes: A reactive solder is coated on the end face of the quartz tube and the edge of the quartz plate. The reactive solder includes a network-forming oxide, a network-modifying oxide, and a reactive crystallizing agent. Heating the connection gap to a first preset temperature to melt both the end of the quartz tube and the edge of the quartz plate includes: heating the connection gap coated with the reactive solder to a third preset temperature, wherein the third preset temperature is higher than the melting point of the reactive solder and lower than the softening point of the quartz material, so that the reactive solder melts and connects the quartz tube to the quartz plate, and the quartz material at the end of the quartz tube and the edge of the quartz plate does not melt; During the process of uniformly heating the quartz plate to a second preset temperature, the reactive solder reacts with the quartz material to form a microcrystalline reinforcement layer at the connection between the quartz plate and the quartz tube.

[0013] In one embodiment, after connecting the quartz tube to the quartz plate, the method further includes: An infrared-reflective sacrificial coating is applied to the inner surface of the quartz plate facing the quartz tube. During the process of uniformly heating the quartz plate to a second preset temperature, the infrared reflective sacrificial coating creates a temperature gradient on the outer surface of the quartz plate that is higher than the inner surface temperature. The infrared reflective sacrificial coating decomposes or volatilizes at the second preset temperature.

[0014] In one embodiment, when the reactive solder melts at the third preset temperature, it has a selective wetting and slight erosion effect on the quartz material; during the process of reacting to form a microcrystalline reinforcement layer at the second preset temperature, a diffusion interlocking structure in which the microcrystalline phase and the quartz material interpenetrate is formed at the interface between the microcrystalline reinforcement layer and the quartz material.

[0015] According to an embodiment of this application, a method for processing a quartz tube with an arc-shaped end is provided. By fusing a quartz plate with the end of the quartz tube and then using air pressure to blow it into shape, the strength of the connection position can be close to the strength of the quartz material itself. This not only ensures the structural strength and performance of the final formed quartz tube, but also reduces production costs. Attached Figure Description

[0016] Figure 1 This document illustrates a flowchart of the processing method for a quartz tube with an arc-shaped end, according to an embodiment of this application. Figure 2 This document illustrates a flowchart of one embodiment of a processing method for a quartz tube with an arc-shaped end, as provided in this application. Figure 3 This diagram illustrates a step flowchart of another embodiment of a method for processing a quartz tube with an arc-shaped end, as provided in this application. Figure 4 This diagram illustrates a step flowchart of yet another embodiment of a processing method for a quartz tube with an arc-shaped end, as provided in this application. Figure 5 This diagram illustrates a step flowchart of another embodiment of a processing method for a quartz tube with an arc-shaped end, as provided in this application. Figure 6 This document illustrates a flowchart of the steps in another embodiment of a processing method for a quartz tube with an arc-shaped end, as provided in this application. Figure 7 This diagram illustrates the relative positions of the quartz tube and the quartz plate in a processing method for a quartz tube with an arc-shaped end, as provided in an embodiment of this application. Figure 8 This illustration shows a schematic diagram of the structure in which a quartz plate is connected to the end of a quartz tube in a processing method for a quartz tube with an arc-shaped end, according to an embodiment of this application. Figure 9This diagram illustrates the structure of a quartz tube after shaping, as provided in an embodiment of this application for processing a quartz tube with an arc-shaped end.

[0017] Explanation of reference numerals in the attached figures: 10. Quartz tube; 20. Quartz plate. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0019] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0020] The structures, proportions, sizes, etc., illustrated in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should fall within the scope of the technical content disclosed in the present invention.

[0021] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "lateral," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] like Figure 1 , Figures 7-9 As shown, this embodiment provides a method for processing a quartz tube with an arc-shaped end, the method including the following steps: S200: A quartz plate 20 is provided on one side of the end of the quartz tube 10, and the gap between the quartz tube 10 and the quartz plate 20 is the connection gap; S400: Heat the connection gap to a first preset temperature so that the end of the quartz tube 10 and the edge of the quartz plate 20 are both melted; S600: Move the quartz plate 20 along the axial direction of the quartz tube 10 so that the quartz tube 10 is connected to the quartz plate 20; S800: A certain flow rate of working gas is introduced into the quartz tube 10 to pressurize the quartz tube 10 to the first gas pressure, so that the quartz plate 20 forms an outward convex arc surface. S1000: Move the heating flame away from the quartz tube 10 so that the heating flame wraps around the convex arc surface of the quartz plate 20, so that the quartz plate 20 is uniformly heated to the second preset temperature. Increase the flow rate of the working gas entering the quartz tube 10 so that the pressure inside the quartz tube 10 is increased to the second gas pressure, so that the quartz plate 20 convexes outward to form an arc plate.

[0023] First, a quartz plate 20 is placed on one side of the end of the quartz tube 10. The gap between the quartz tube 10 and the quartz plate 20 is a connection gap, which ensures that the distance between the quartz tube 10 and the quartz plate 20 is small. This allows the heating device to heat both the end of the quartz tube 10 and the edge of the quartz plate 20 simultaneously by heating only the connection gap. Both can reach a molten state at the same time, which improves processing efficiency and ensures the integrity and continuity of the subsequent connection interface. In addition, it can reduce the internal stress caused by the difference in thermal expansion coefficients and cooling rates.

[0024] The connection gap can be a minute distance, such as millimeters or micrometers, which can be detected by a length measuring device or observed with the naked eye. However, for ease of operation during processing, the connection gap in this embodiment is the distance between the quartz tube 10 and the quartz plate 20 when they are in a state of gentle contact after movement. Specifically, as the quartz tube 10 and the quartz plate 20 are about to come into contact, they are controlled to slowly approach each other, allowing them to make gentle contact.

[0025] Subsequently, by controlling the heating temperature at a first preset temperature, the quartz material can reach its optimal melting state without becoming overly softened or deformed, which helps to form a uniform molten layer. The first preset temperature range is 1500 degrees Celsius to 1850 degrees Celsius to ensure that the quartz plate 20 is connected to the quartz tube 10.

[0026] Optionally, the first preset temperature range can also be 1650 degrees Celsius to 1850 degrees Celsius. By setting the first preset temperature to above 1650 degrees Celsius, sufficient melt flow of the quartz material can be ensured. Setting the first preset temperature to below 1850 degrees Celsius can maintain a certain shape retention capability of the quartz tube 10 and the quartz plate 20, avoiding processing failures caused by excessive flow of the quartz tube 10 and the quartz plate 20.

[0027] Then, by axially moving the quartz plate 20, the quartz tube 10 and the quartz plate 20 can be precisely connected, ensuring that the connection surface is flat, thereby ensuring the mechanical strength and sealing of the connection part.

[0028] Finally, by controlling the second preset temperature and introducing working gas, the pressure difference can be used to make the quartz plate 20 bulge outward uniformly to form an arc-shaped structure, thus achieving the forming of the arc shape at the end of the quartz tube 10. The second preset temperature range is 1500 degrees Celsius to 1800 degrees Celsius to ensure the melting and deformation requirements of the quartz plate 20.

[0029] Optionally, the second preset temperature range is 1500 degrees Celsius to 1700 degrees Celsius, thereby heating the quartz plate 20 to a plastic deformation state while maintaining shape stability.

[0030] Currently, the processing of the top arc of quartz tube 10 mostly adopts the process steps of material drawing, material collection, and forming. Specifically, the material at the end of quartz tube 10 is heated, stretched, and then cut off. Stretching will make the wall thickness at the end of quartz tube 10 thinner. The heating and stretching process will introduce uneven thermal stress and plastic deformation, resulting in internal stress concentration, which makes the product prone to cracking or breaking during use.

[0031] The processing method provided in this application involves fusing an independent quartz plate 20 with the end of a quartz tube 10, and then using air pressure to blow it into shape. This allows the strength of the connection point to be close to the strength of the quartz material. The final formed arc end does not have the problem of wall thickness reduction, thus ensuring the structural strength and performance of the quartz tube 10 with the final formed arc end.

[0032] In addition, no waste is generated during the manufacturing process, which greatly reduces the cost of raw materials and solves the problem of high raw material loss in the current method of forming quartz tubes with curved ends by drawing materials.

[0033] Optionally, the working gas is an inert gas or compressed air, including inert gases such as argon or nitrogen; the compressed air is preferably a dry compressed gas. The quartz tube 10 is very stable at room temperature, but its chemical activity increases dramatically at the high temperatures required for shaping. By introducing an inert gas or dry compressed air, the presence of oxygen and water vapor can be eliminated, thus creating an inert protective environment during the shaping process of the quartz tube 10. Furthermore, by introducing a working gas into the quartz tube 10, the air pressure causes the quartz plate 20 to form a smooth spherical surface, thereby ensuring the arc shape of the end face of the quartz tube 10. This method is also easy to automate.

[0034] Furthermore, after the quartz tube 10 softens at high temperatures, its shape is affected by the internal and external pressure difference. By introducing a controllable inert gas or compressed air, a stable internal pressure higher than the external atmospheric pressure can be established inside the quartz tube 10, thereby supporting the quartz tube 10 and preventing it from collapsing during softening. By finely adjusting the pressure of the introduced working gas, the softened quartz plate 20 can be smoothly blown into the desired arc shape, thus obtaining the target product.

[0035] After the quartz plate 20 and the quartz tube 10 are joined, a certain flow rate of working gas is blown into the quartz tube 10, causing the quartz plate 20 to bulge outward by a certain arc, thus forming an outwardly convex arc surface. This not only increases the speed of uniform heating of the quartz plate and improves the preparation efficiency, but also avoids the shape instability, asymmetric deformation, or local tearing that may occur when directly changing from a flat plane to a large curvature arc surface.

[0036] The first air pressure ranges from 400Pa to 700Pa. The force exerted by this air pressure on the heated and softened quartz plate can overcome its initial stiffness, allowing it to bulge outwards smoothly and slowly from the plane, forming a small-radius convex arc surface.

[0037] After the quartz plate 20 is blown into a convex arc surface by the introduced working gas and is uniformly heated, the flow rate of the working gas into the quartz tube 10 is increased, causing the pressure inside the quartz tube 10 to rise to a second pressure, thus shaping the quartz plate 20 into an arc shape. By increasing the air pressure inside the quartz tube 10, it is ensured that the quartz plate 20 is stably blown into an arc shape, ensuring the accuracy of its shaped form.

[0038] The second pressure ranges from 1500 Pa to 5000 Pa. Under this high-pressure environment, the tensile stress in each region of the quartz plate 20 increases synchronously, resulting in a greater plastic strain rate. This facilitates compensatory flow of material from thick to thin areas, thereby reducing the thickness difference across the entire curved surface and ensuring the uniformity of the thickness of the quartz plate 20 after molding.

[0039] like Figure 2 , Figures 7-9 As shown, in some embodiments, the provision of a quartz plate 20 on one side of the end of the quartz tube 10 includes: S220: Fix the quartz tube 10 to the first movable end of the machine tool, and fix the quartz plate 20 to the second movable end of the machine tool, wherein the second movable end and the first movable end are coaxial; S240: Move the second movable end along its own axis toward the direction close to the quartz tube 10.

[0040] By using the first and second movable ends of the machine tool coaxial line to fix the quartz tube 10 and the quartz plate 20 respectively, the coaxiality of the quartz tube 10 and the quartz plate 20 during movement and connection can be ensured, reducing offset and tilt, thereby ensuring accurate alignment and uniform force distribution at the connection position, effectively preventing connection defects caused by misalignment, and improving processing accuracy and product consistency.

[0041] The first movable end is equipped with a clamp that holds and fixes the quartz tube 10 to the first movable end, so that rotation of the first movable end can drive synchronous rotation of the quartz tube 10, and movement of the first movable end can drive synchronous movement of the quartz tube 10. The second movable end is equipped with a vacuum suction cup that adsorbs and fixes the quartz plate 20 to the second movable end, so that rotation of the second movable end can drive synchronous rotation of the quartz plate 20, and movement of the second movable end can drive synchronous movement of the quartz plate 20.

[0042] Using a vacuum chuck to hold the quartz plate 20 in place ensures uniform force distribution and prevents it from being crushed by mechanical clamping. Furthermore, the vacuum chuck exposes the entire surface of the quartz plate 20 to the maximum extent, facilitating heating and handling, while ensuring the quartz plate 20 does not shift during subsequent rotation and processing.

[0043] The step of moving the second movable end along its own axis toward the direction of the quartz tube 10 specifically involves the machine tool controlling the movement of the second movable end, thereby driving the quartz plate 20 to move toward the direction of the quartz tube 10 until the gap between the quartz tube 10 and the quartz plate 20 is the connection gap.

[0044] Of course, the machine tool can also control the first and second movable ends to move synchronously, so that the quartz tube 10 and the quartz plate 20 move synchronously toward each other, thereby reducing the movement path and improving work efficiency.

[0045] Specifically, the machine tool is a glass machine tool. Quartz tube 10 and quartz plate 20 are respectively installed at both ends of the glass machine tool. The two spindles of the glass machine tool can rotate synchronously and in the same direction, thereby ensuring the reliability of subsequent processing. The rotational speed range of the two spindles of the glass machine tool is 80 r / min to 120 r / min. The heating area of ​​the oxyhydrogen flame or plasma torch is relatively fixed. By rotating quartz tube 10 and quartz plate 20 at a speed of 80 r / min-120 r / min, heat can be evenly input to the entire mating area, causing the material at the interface to reach a molten state synchronously and uniformly. In this embodiment, the rotational speed of both spindles of the glass machine tool is 100 r / min.

[0046] like Figure 3 , Figures 7-9As shown, in some embodiments, before heating the connection gap to a first preset temperature, the process further includes: S300: Control the first movable end and the second movable end to rotate synchronously and in the same direction.

[0047] By rotating the quartz tube 10 and the quartz plate 20 synchronously and in the same direction, the connection gap can be heated evenly during the heating process, avoiding local overheating or uneven cooling, facilitating the formation of a uniform melting area, ensuring the structural strength of the connection, reducing thermal stress concentration, and reducing the risk of crack formation.

[0048] In some embodiments, heating the connection gap to a first preset temperature includes: arranging multiple heating devices at circumferential intervals around the connection gap; the heating devices include oxyhydrogen flames or plasma torches. The connection gap is heated by the multiple heating devices until it reaches the first preset temperature. The arrangement of multiple heating devices achieves a uniform heat field distribution, improving heating efficiency. Furthermore, during the heating process, the opening and closing of each heating device can be controlled according to the post-heating shape of the quartz tube 10 and the quartz plate 20 to ensure their structural integrity.

[0049] like Figure 4 , Figures 7-9 As shown, in some embodiments, before heating the quartz plate 20 to the second preset temperature, the fixation of the second movable end to the quartz plate 20 is removed; during the heating of the quartz plate 20 to the second preset temperature, the first movable end is controlled to rotate, driving the quartz plate 20 to rotate synchronously, so as to achieve uniform heating. By removing the fixation and controlling the quartz plate 20 to rotate synchronously with the quartz tube 10, it can be ensured that the quartz plate 20 is heated uniformly in all directions during the heating process, avoiding uneven deformation or local overheating caused by static heating, thereby ensuring the consistency of the formed shape of the arc plate.

[0050] like Figures 5-9 As shown, in some embodiments, after introducing working gas into the quartz tube 10, the method further includes: adjusting the heating position of the quartz plate 20 in real time according to the deformation shape of the quartz plate 20. By monitoring and adjusting the heating position in real time, dynamic adjustment can be made during the deformation process of the quartz plate 20 to ensure the forming accuracy of the arc plate under air pressure.

[0051] Specifically, a heating device is used to heat the quartz plate 20 to a second preset temperature. Multiple heating devices can be set up to simultaneously heat different positions of the quartz plate 20 to improve heating efficiency. Afterwards, the operator can hold the heater by hand or use a robotic arm to grasp the heater and adjust the heating position of the quartz plate 20 in real time according to its deformation shape. For example, if a continuous area of ​​the quartz plate 20 has bulges at both ends and no bulge in the middle, the heater is aimed at the non-bulging part for localized heating, making its temperature higher than that of the bulging parts at both ends. Under the pressure inside the quartz tube 10, the non-bulging part can be pushed outward, causing its deformation to be greater than that of the bulging parts at both ends, thereby forming a complete and smooth arc shape in that area.

[0052] After the end of the quartz tube 10 is machined into an arc shape, the dimensions of the arc plate can be measured using measuring tools to determine whether the formed quartz tube 10 meets the process requirements. If it does not meet the requirements, the quartz plate 20 is heated further, and working gas is introduced into the quartz tube 10 to adjust the curvature formed on the quartz plate 20.

[0053] like Figures 6-9 As shown, in some embodiments, after the step of causing the quartz plate 20 to convex outward to form an arc-shaped plate, the method further includes: S1200: A graphite mold is used to contact the arc-shaped plate to fix the shape and size of the arc-shaped plate.

[0054] By using a graphite mold for shaping, the shape of the curved plate can be fixed, ensuring the dimensional accuracy of the arc. In actual operation, the curved plate is shaped simply by lightly touching the graphite mold to it, which ensures that the surface of the final curved plate is smooth and avoids mold marks.

[0055] like Figures 1-9 As shown, in some embodiments, the thickness of the quartz plate 20 is 1 to 1.2 times the wall thickness of the quartz tube 10. That is, the thickness of the quartz plate 20 can be 1.0 times, 1.05 times, 1.1 times, 1.15 times or 1.2 times the wall thickness of the quartz tube 10.

[0056] When the thickness of the quartz plate 20 is the same as the wall thickness of the quartz tube 10, they have the same heat capacity and thermal conductivity. When the butt joint edge is heated by flame, the quartz tube 10 and the quartz plate 20 will heat up and soften at almost the same rate, and can reach the ideal melting state at the same time. This allows the materials at the fusion interface to fully diffuse and fuse with each other, reducing the internal stress caused by poor butt joint and reducing the risk of cracking at the joint of the formed quartz tube 10.

[0057] During the blown arc process, the quartz plate 20 is stretched and thinned, resulting in a final thickness at the thinnest point of the arc top that is less than the initial thickness of the quartz plate 20. Therefore, to ensure the structural strength of the arc top and to guarantee that even with slight wear during subsequent polishing or use, it will not fall below the wall thickness of the quartz tube 10 and become the weakest point, in this embodiment, the thickness of the quartz plate 20 is greater than the wall thickness of the quartz tube 10. For example, the thickness of the quartz tube 10 is 5 mm, and the thickness of the quartz plate 20 is 5.5 mm.

[0058] Of course, the diameter of the quartz plate 20 can be greater than or equal to the diameter of the quartz tube 10. When the diameter of the quartz plate 20 is the same as the diameter of the quartz tube 10, their outer circular contours are basically aligned, facilitating precise alignment of the end face of the quartz tube with the edge of the quartz plate. During the synchronous rotation of the glass lathe, an oxyhydrogen flame or other heat source can simultaneously and uniformly heat the mating area of ​​equal thickness, ensuring that the quartz plate 20 and the quartz tube 10 can reach the melting temperature synchronously at similar rates, thereby achieving full diffusion and fusion of the interface materials.

[0059] When the diameter of the quartz plate 20 is larger than the diameter of the quartz tube 10, the end face of the quartz tube 10 is aligned with the central area of ​​the quartz plate 20, forming a uniform edge region around the perimeter of the quartz plate 20. This edge region provides tolerance for the fusion process, allowing the operator to ensure that the quartz plate 20 completely covers the end face of the quartz tube 10 without requiring absolutely precise alignment, effectively reducing connection failures due to alignment deviations. During heating and melting, the molten glass flows naturally towards and fills the joint due to surface tension, thereby improving structural strength. Preferably, the diameter of the quartz plate 20 is 4 to 6 millimeters larger than the diameter of the quartz tube 10; that is, the diameter of the quartz plate 20 can be 4, 5, or 6 millimeters larger than the diameter of the quartz tube 10. For example, the diameter of the quartz plate 20 can be 5 millimeters larger than the diameter of the quartz tube 10.

[0060] In some embodiments, before setting the quartz plate 20 on one side of the end of the quartz tube 10, the method further includes: grinding the end of the quartz tube 10 until it is smooth and flat. By pre-grinding the end of the quartz tube 10, surface defects and burrs can be removed, ensuring the flatness and cleanliness of the connection surface, reducing the introduction of air bubbles and impurities, and ensuring the overall quality after connection.

[0061] In some embodiments, after connecting the quartz tube 10 to the quartz plate 20, the method further includes: shaping the connection position between the quartz plate 20 and the quartz tube 10. By shaping the connection position, any unevenness or irregularities that may exist at the connection position can be corrected, ensuring a smooth transition at the connection position, thereby guaranteeing the overall aesthetics and avoiding stress concentration.

[0062] In some embodiments, before heating the connection gap to a first preset temperature, the method further includes: A reactive solder is applied to the end face of the quartz tube 10 and the edge of the quartz plate 20. The reactive solder includes a network-forming oxide, a network-modifying oxide, and a reactive crystallizing agent. Heating the connection gap to a first preset temperature to melt both the end of the quartz tube 10 and the edge of the quartz plate 20 includes: heating the connection gap coated with the reactive solder to a third preset temperature, wherein the third preset temperature is higher than the melting point of the reactive solder and lower than the softening point of the quartz material, so that the reactive solder melts and connects the quartz tube 10 and the quartz plate 20, and the quartz material at the end of the quartz tube 10 and the edge of the quartz plate 20 does not melt; During the process of uniformly heating the quartz plate 20 to the second preset temperature, the reactive solder reacts with the quartz material to form a microcrystalline reinforcement layer at the connection between the quartz plate 20 and the quartz tube 10.

[0063] The third preset temperature can be between 1100 degrees Celsius and 1300 degrees Celsius, and optionally, the third preset temperature is 1200 degrees Celsius.

[0064] The network-forming oxide includes at least one of silicon dioxide, boron oxide, or phosphorus pentoxide. The network-modifying oxide includes at least one of sodium oxide, potassium oxide, lithium oxide, and calcium oxide. The reaction crystallizing agent includes at least one of titanium dioxide, zirconium dioxide, aluminum oxide, and yttrium oxide.

[0065] Optionally, the reactive solder has the following composition: 50 parts silicon dioxide, 8 parts boron oxide, 22 parts sodium oxide, 5 parts potassium oxide, and 15 parts titanium dioxide. The reactive solder with this composition has a melting temperature of approximately 1150 degrees Celsius, significantly lower than the softening point of quartz material (approximately 1600 degrees Celsius), enabling low-temperature bonding.

[0066] The quartz tube 10 and quartz plate 20 are clamped at both ends of a glass lathe and precisely aligned. The lathe is started so that both rotate in the same direction at 100 revolutions per minute. Using an oxyhydrogen flame torch, only the joint gap area coated with reactive solder is heated, and the temperature of this area is controlled to be stable at a third preset temperature for a certain period of time, such as 60 seconds or 90 seconds. At the third preset temperature, the reactive solder fully melts and wets the quartz material, filling the joint gap through capillary action to achieve a firm initial connection. In addition, since the third preset temperature is much lower than the softening point of the quartz material, the quartz material at the end of the quartz tube 10 and the edge of the quartz plate 20 does not melt, thus fundamentally avoiding the problem of overheating of the main body of the quartz plate 20 caused by traditional high-temperature welding, which affects subsequent molding.

[0067] Furthermore, when the reactive solder melts at the third preset temperature, it exhibits selective wetting and slight erosion of the quartz material. During the process of reacting to form a microcrystalline reinforcing layer at the second preset temperature, a diffusion-interlocked structure consisting of interpenetrating microcrystalline phases and quartz material is formed at the interface between the microcrystalline reinforcing layer and the quartz material. The reactive solder may also include phosphorus pentoxide, lithium fluoride, sodium fluoride, or boron oxide, etc. In this embodiment, the reactive solder also includes phosphorus pentoxide, which slightly enhances the erosion of the amorphous network of quartz during the low-temperature melting stage. Due to the slight selective erosion at the interface in the early stage, the generated microcrystalline phase is not a completely straight layer, but rather forms dendritic or needle-like crystals at the interface, forming an interpenetrating diffusion-interlocked structure with the unreacted quartz material, further enhancing the structural strength.

[0068] Optionally, an infrared reflective sacrificial coating is applied to the inner surface of the quartz plate 20 facing the quartz tube 10; During the process of uniformly heating the quartz plate 20 to the second preset temperature, the infrared reflective sacrificial coating causes the quartz plate 20 to form a temperature gradient where the outer surface temperature is higher than the inner surface temperature, and the infrared reflective sacrificial coating decomposes or volatilizes at the second preset temperature.

[0069] An infrared reflective sacrificial coating can be deposited on the inner surface of the quartz plate 20 facing the inside of the quartz tube 10 using a process such as magnetron sputtering.

[0070] The infrared reflective sacrificial coating can be a single-layer structure, which may include yttrium-stabilized zirconia or gadolinium-stabilized zirconia doped with aluminum or other metals. Alternatively, it can be a double-layer structure, including an adhesive layer and a functional layer. The adhesive layer can be silica or alumina; in this embodiment, the adhesive layer is a silica film to ensure a strong bond with the quartz material. The functional layer can be yttrium-stabilized zirconia or gadolinium-stabilized zirconia; in this embodiment, the functional layer is an alumina-doped yttrium-stabilized zirconia ceramic film. This infrared reflective sacrificial coating has an average reflectivity greater than 80% in the infrared band of 2.5 μm to 15 μm, while the main radiation wavelength of the quartz heating flame is also within this infrared band. Furthermore, the infrared reflective sacrificial coating begins to decompose at approximately 1550 degrees Celsius and completely volatilizes above 1650 degrees Celsius.

[0071] During the initial heating phase, as the temperature rises from 1200 degrees Celsius to approximately 1500 degrees Celsius, the high infrared reflectivity of the infrared-reflective sacrificial coating on the inner surface of the quartz plate 20 efficiently confines heat to the outer side of the quartz plate 20. This allows the quartz plate 20 to rapidly form and maintain a stable temperature gradient along its thickness, with a higher outer surface temperature and a lower inner surface temperature. For example, when the outer surface reaches 1550 degrees Celsius, the inner surface temperature is only about 1350 degrees Celsius. This protects the interface on the inner surface from excessive thermal shock before the entire quartz plate 20 reaches the blowing temperature. Furthermore, the material that softens first on the outer surface flows preferentially, causing the entire quartz plate 20 to deform uniformly. Simultaneously, the rotation and enveloping heating of the flame ensures that the quartz plate 20 is heated uniformly to the target temperature in both the radial and circumferential directions.

[0072] When the outer surface temperature of the quartz plate 20 reaches the second preset temperature, the temperature of the inner surface connection area also rises with heat conduction. At this time, the molten reactive solder and the silicon dioxide in the quartz material undergo a solid-phase reaction at the interface, and the reaction crystallizing agent generates a microcrystalline phase mainly composed of titanate silica. This reaction process forms a microcrystalline reinforcing layer in situ at the connection interface, significantly improving the high-temperature creep resistance. At the same time, the infrared reflective sacrificial coating on the inner surface begins to volatilize after reaching its decomposition temperature, no longer hindering the inward transfer of heat. At this time, the working gas pressure inside the quartz tube 10 is steadily increased to the second pressure, and the quartz plate 20 is blown into a smooth arc surface while in a uniformly softened state. The heat required for the blowing process simultaneously drives the in-situ reaction of the interface microcrystalline layer.

[0073] Optionally, the reactive solder contains trace amounts of rare earth element tracers; the formed microcrystalline reinforcement layer produces characteristic fluorescence under ultraviolet light excitation at a specific wavelength; and / or, the infrared reflective sacrificial coating contains components that generate colored products after decomposition, leaving characteristic imprints on the inner surface of the quartz plate 20 that are only visible at a microscopic level and are related to the initial thickness distribution of the coating. The reactive solder may also include europium oxide, allowing for non-destructive quality inspection by observing the fluorescence emitted by the activated microcrystalline reinforcement layer when the connection area is irradiated with an ultraviolet lamp after forming. The infrared reflective sacrificial coating is doped with iron oxide; after decomposition, the iron oxide residue forms a very faint microscopic coloring pattern on the inner surface of the quartz plate, corresponding to the coating thickness distribution. Observing this pattern with an optical microscope allows for inferring the uniformity of the thermal field during forming, which can be used for process diagnosis and optimization.

[0074] It should be noted that, in this invention, uniformly heating the quartz plate 20 to the second preset temperature ensures a uniform temperature distribution on the convex surface of the quartz plate 20 in both the circumferential and radial directions, thereby guaranteeing the symmetry of the shape and the uniformity of the wall thickness during subsequent air-blowing. In a preferred embodiment, by using an infrared-reflective sacrificial coating, a beneficial temperature gradient can be formed in the thickness direction of the quartz plate 20, i.e., a higher external temperature and a lower internal temperature. This temperature gradient is beneficial for material flow control and interface protection during the molding process. This thickness-direction temperature gradient, combined with the aforementioned uniform heating within the convex surface, achieves superior heating effect and molding quality.

[0075] In summary, the processing method for a quartz tube with an arc-shaped end provided in this embodiment involves first grinding the end of the quartz tube 10 to ensure a flat and clean end face, and then fixing it on a fixture. Next, a circular, uniformly thick, high-purity quartz plate 20 with a diameter matching that of the quartz tube 10 is taken and fixed using a vacuum chuck. The fixture with the quartz tube 10 fixed is mounted on the first movable end of the machine tool, and the vacuum chuck with the quartz plate 20 fixed is mounted on the second movable end of the machine tool. The machine tool is started, and the first and second movable ends are driven to rotate slowly and synchronously in the same direction, causing the quartz tube 10 and the quartz plate 20 to rotate slowly and synchronously in the same direction. Then, the first and second movable ends are driven to slowly approach each other, bringing the quartz tube 10 and the quartz plate 20 closer together until the end face of the quartz tube 10 and the edge of the quartz plate 20 gently contact each other. A heating device is used to heat the connection gap to a first preset temperature. Then, a slight axial force is applied to fuse the edges of the quartz tube 10 and the quartz plate 20 together. After that, the suction cup releases its suction and fixation of the quartz plate 20, and the quartz plate 20 is fixedly connected to the end face of the quartz tube 10.

[0076] Then, the heating device is moved to the quartz plate 20 to concentrate the heating of the quartz plate 20. At the same time, the first movable end rotates, causing the quartz plate 20 to rotate synchronously, so that the quartz plate 20 is heated evenly. A low-pressure and stable working gas is introduced into the quartz tube 10. The heated quartz plate 20 softens and bulges outward under the pressure generated by the working gas to form an arc-shaped plate.

[0077] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0078] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A method of processing a quartz tube having a circular arc shape at an end portion, characterized by, The method comprises the following steps: a quartz plate (20) is arranged at one side of the end of a quartz tube (10), and a gap between the quartz tube (10) and the quartz plate (20) is a connecting gap; the connecting gap is heated to a first preset temperature, so that the end of the quartz tube (10) and the edge of the quartz plate (20) are both melted; the quartz plate (20) is moved along the axial direction of the quartz tube (10), so that the quartz tube (10) is connected with the quartz plate (20); a working gas is introduced into the quartz tube (10) at a certain flow rate, and the quartz tube (10) is pressurized to a first gas pressure, so that the quartz plate (20) forms an outward convex arc surface; the heating flame is moved away from the quartz tube (10), so that the heating flame wraps the outward convex arc surface of the quartz plate (20), the quartz plate (20) is uniformly heated to a second preset temperature, the flow rate of the working gas introduced into the quartz tube (10) is increased, and the quartz tube (10) is pressurized to a second gas pressure, so that the quartz plate (20) forms an arc plate.

2. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 1, characterized by, The quartz plate (20) is arranged at one side of the end of the quartz tube (10), which comprises: the quartz tube (10) is fixed on a first movable end of a machine tool, and the quartz plate (20) is fixed on a second movable end of the machine tool, the second movable end is coaxial with the first movable end; the second movable end is moved along the axial direction thereof towards the quartz tube (10).

3. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 2, characterized by, Before the connecting gap is heated to the first preset temperature, the method further comprises: the first movable end and the second movable end are controlled to rotate synchronously and in the same direction.

4. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 2, wherein Before the quartz plate (20) is heated to the second preset temperature, the fixation of the second movable end on the quartz plate (20) is cancelled; during the heating of the quartz plate (20) to the second preset temperature, the first movable end is controlled to rotate, so as to drive the quartz plate (20) to rotate synchronously and be uniformly heated.

5. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 4, wherein After the working gas is introduced into the quartz tube (10), the method further comprises: the heating position of the quartz plate (20) is adjusted in real time according to the deformed shape of the quartz plate (20).

6. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 5, wherein After the quartz plate (20) is formed into an arc plate, the method further comprises: a graphite mold is used to contact the arc plate, so as to fix the shape and size of the arc plate.

7. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 1, wherein The thickness of the quartz plate (20) is 1 to 1.2 times the wall thickness of the quartz tube (10).

8. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 1, wherein Before the connecting gap is heated to the first preset temperature, the method further comprises: reactive solder is coated on the end surface of the quartz tube (10) and the edge of the quartz plate (20), and the reactive solder comprises network-forming oxides, network-modifying oxides and reaction crystallization agents. The heating of the connecting gap to the first preset temperature to melt the end of the quartz tube (10) and the edge of the quartz plate (20) comprises: heating the connecting gap coated with the reactive solder to a third preset temperature, which is higher than the melting point of the reactive solder and lower than the softening point of the quartz material, to melt the reactive solder and realize the connection of the quartz tube (10) and the quartz plate (20), and the quartz material of the end of the quartz tube (10) and the edge of the quartz plate (20) is not melted. During the process of uniformly heating the quartz plate (20) to the second preset temperature, the reactive solder reacts with the quartz material to form a microcrystalline reinforced layer at the connecting part of the quartz plate (20) and the quartz tube (10).

9. The method of processing a quartz tube having a circular arc-shaped end portion according to claim 8, wherein After the connection of the quartz tube (10) and the quartz plate (20), the process further comprises: coating an infrared reflective sacrificial coating on the inner surface of the quartz plate (20) facing the quartz tube (10); During the process of uniformly heating the quartz plate (20) to the second preset temperature, the infrared reflective sacrificial coating causes the quartz plate (20) to form a temperature gradient with the outer surface temperature higher than the inner surface temperature, and the infrared reflective sacrificial coating decomposes or volatilizes at the second preset temperature.

10. The method of processing a quartz tube having a rounded end shape according to claim 8, wherein The reactive solder has selective wetting and slight etching effect on the quartz material when it is melted at the third preset temperature; during the process of reacting to form the microcrystalline reinforced layer when heated to the second preset temperature, a diffusion interlocking structure formed by the interpenetration of the microcrystalline phase and the quartz material is formed at the connecting interface between the microcrystalline reinforced layer and the quartz material.

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