Time resolved anisotropic sphere probe measurement apparatus and method

Abstract

The application provides a time-resolved anisotropic sphere probe measuring device and method, which comprises an insulating member, a protection member and a collecting member; the insulating member has a first insulating part and a second insulating part; the protection member comprises a protection pole and a first conductor; the protection pole is arranged on the second end surface of the first insulating part, and the protection pole is connected with a power supply through the first conductor; the collecting member comprises a second conductor and a collecting pole with a preset arc; the collecting pole is arranged in the arc space respectively; one end of the second conductor is connected with the collecting pole, and the other end of the second conductor penetrates through the protection member and is connected with the power supply. The second conductor in the collecting member adopts a printed circuit board and a conductive rod structure, so that the utilization rate of the internal space of the collecting member is increased, and the spatial resolution is improved. In addition, the arrangement of the protection pole ensures the consistency and flatness of the plasma sheath layer of each collecting pole under a fixed negative bias, so that the measured current signal is accurate and available.

Description

Technical Field

[0001] This application relates to the field of time-resolved measurement technology of velocity direction in Hall thruster plume region, and particularly to a time-resolved anisotropic spherical probe measurement device and method. Background Technology

[0002] To meet the mission requirements of deep space exploration, space electric propulsion technology, represented by Hall thrusters, characterized by long lifespan and high specific impulse, is rapidly developing. Hall thrusters are a type of space electric propulsion technology that uses orthogonal electromagnetic fields to ionize the working gas and generate thrust. They offer advantages such as long lifespan, simple and adjustable design, and precisely adjustable thrust, making them one of the ideal power choices for space missions. However, low-frequency oscillations with unclear mechanisms exist within Hall thrusters. Current research indicates that these oscillations affect the ionization and acceleration processes of the working gas, thereby influencing thruster performance. Therefore, studying low-frequency oscillations in Hall thrusters is of significant importance.

[0003] Time-resolved probes (such as the three-lanmuir probe and time-resolved hindrance potential analyzer) are one of the main methods for studying low-frequency oscillations by observing the changes in internal parameters (discharge current, discharge voltage, etc.) of Hall thrusters over time. They mainly focus on specific plasma parameters, such as the changes in plasma density and the most likely ion energy over time.

[0004] However, there is currently no method to study the effect of low-frequency oscillations on velocity by directly measuring the change of velocity direction (an anisotropic parameter) in the Hall thruster plume region over time (fluctuations in the velocity direction of the plume region will affect the fluctuation of the thrust vector, thus affecting performance).

[0005] Therefore, there is an urgent need for time-distinguishing anisotropic sphere probe measurement devices and methods to solve the above-mentioned technical problems to a certain extent. Summary of the Invention

[0006] The purpose of this application is to provide a time-resolved anisotropic sphere probe measurement device and method, which to some extent solves the technical problems existing in the prior art.

[0007] This application provides a time-resolved anisotropic spherical probe measurement device, comprising:

[0008] An insulating component has a first insulating portion and a second insulating portion. The first insulating portion has a first end face and a second end face that are opposite to each other. With the central axis of the first insulating portion as the standard axis, the second insulating portions are arranged in a radiating pattern at equal intervals on the first end face. The exposed end face of the second insulating portion has a preset curvature, so that an arcuate space is formed between adjacent second insulating portions.

[0009] A protective component includes a protective electrode and a first conductor; the protective electrode is disposed on the second end face of the first insulating part, and the protective electrode is connected to a power source through the first conductor.

[0010] The collecting component includes a second conductor and a collecting electrode having the preset curvature; the collecting electrode is respectively disposed in the curvature space, so that the collecting component has a hemispherical structure; one end of the second conductor is connected to the collecting electrode, and the other end passes through the protective component and is connected to the power source.

[0011] In the above technical solution, the first insulating part is an insulating circular plate, and the first end face of the insulating circular plate is divided into eight mounting positions at equal intervals with the center of the insulating circular plate as the reference center.

[0012] The second insulating part is an insulating arc plate, which has a first edge, a second edge, and a third edge; the first edge is perpendicular to the second edge, and the third edge is connected to the first edge and the second edge by the preset curvature; a plurality of first edges are focused on the standard axis, and a plurality of second edges are respectively located at the mounting position, so that an arc space for placing the collecting electrode is formed between adjacent insulating arc plates.

[0013] In the above technical solution, the protective electrode is further shaped like a bowl, which includes a main body and a fixing base. The main body extends from the fixing base toward the second end face of the first insulating part and is connected to the second end face.

[0014] The first conductor is a bias copper sheet, which is fixed to the side of the fixing base away from the main body by a connector, and can supply power to the protection electrode through the bias copper sheet.

[0015] In the above technical solution, the second conductor further includes a printed circuit board and a conductive rod;

[0016] One end of the conductive rod is connected to the collecting electrode, and the other end passes through the insulating circular plate;

[0017] The printed circuit board includes an insulator and a conductive body; the insulator includes a first insulating segment connected to the second end face of the insulating circular plate and a second insulating segment connected to the first insulating end in an inverted L shape and passing through the bias copper sheet; the conductive body is arranged in an inverted L shape with the insulator and one end connected to the conductive rod, and the other end extends along the extension direction of the second insulating segment and is connected to the power supply through an electrical connector.

[0018] In the above technical solution, there are eight collecting electrodes, each corresponding to one of the eight arc spaces enclosed by the insulating arc plate.

[0019] The apex angle of the collecting electrode is 45°, the thickness is 0.2mm, and the end face diameter of the hemispherical structure surrounded by the eight collecting electrodes is 6mm.

[0020] In the above technical solution, further, the bias copper sheet has a protruding pin extending radially away from the center of the bias copper sheet at a preset point, and the protruding pin is connected to the power supply through a signal transmission line.

[0021] The thickness of the bias copper sheet is set to 0.2 mm.

[0022] In the above technical solution, the connecting member is a screw; the diameter of the fixing seat is 4mm, and threaded blind holes with a height of 1.5mm and adapted to the screw are spaced apart along its circumferential direction.

[0023] In the above technical solution, both the protective electrode and the collecting electrode are made of titanium alloy, and the surface of the titanium alloy is nitrided to form a titanium nitride coating.

[0024] In the above technical solution, both the insulating circular plate and the insulating arc plate are made of PEEK material, and the thickness of both the insulating circular plate and the insulating arc plate is 0.2mm.

[0025] This application also provides a time-resolved anisotropic spherical probe measurement method, based on the time-resolved anisotropic spherical probe measurement device, the time-resolved anisotropic spherical probe measurement method comprising the following steps:

[0026] Data Acquisition and Marking Steps: The power supply is set to have a preset bias voltage; under the preset bias voltage, the current values ​​of multiple collectors at different times are acquired; the current values ​​of multiple collectors at the same time are sorted, and the largest main current is selected and recorded as... The current values ​​of the two collectors adjacent to this collector are denoted as follows: and ;

[0027] Steps for constructing current density and collector current values: Construct the current density and collector current values ​​respectively according to the collector current formula (1) and the current density formula (2). The relationship between the current density and the current is shown in formula (3). The relationship with current density is shown in equation (4) and current The relationship with current density is shown in formula (5);

[0028] (1);

[0029] (2);

[0030] Among them, the spherical normal vector spherical surface area micro-element , For the apex angle of the collecting pole, For azimuth, (Considering the spherical radius of the sheath).

[0031] (3);

[0032] (4);

[0033] (5);

[0034] Current density calculation steps: Calculate the current density at different times using formula (7) through the following steps. , , ;

[0035] (6);

[0036] Wherein, the radius of the sphere passes through Make corrections. , For the thickness of the sheath, there is , For Debye length, there are , The electron temperature at that point. The ion density at that point. , This is the negative bias voltage of the power supply. The potential at that point can be determined by launching a probe.

[0037] Since the ion velocity in the plume region of the Hall thruster is approximately 20 km / s, and according to the ion sound velocity formula... ,in This refers to the ion mass. For a conventional xenon Hall thruster, the internal electron temperature of the plasma is... The sound velocity of ions is approximately 1 km / s, therefore the ions flow at supersonic speeds at this time.

[0038] When the probe is fixed with a negative bias, the collected ion current density ,in The ion density at that point. Therefore, the direction of ion velocity is consistent with the direction of ion current density. Based on the calculated values ​​at different times... , , This allows us to obtain the variation of the ion velocity direction over time.

[0039] To further determine the variation of ion velocity over time, a Langmuir probe can be used to measure ion density. Perform time-resolved measurements, and then combine The law governing the change of velocity magnitude over time was obtained.

[0040] Compared with the prior art, this application has the following beneficial effects:

[0041] This application provides a time-resolved anisotropic spherical probe measurement device, comprising:

[0042] An insulating component has a first insulating portion and a second insulating portion. The first insulating portion has a first end face and a second end face that are opposite to each other. With the central axis of the first insulating portion as the standard axis, the second insulating portions are arranged in a radiating pattern at equal intervals on the first end face. The exposed end face of the second insulating portion has a preset curvature, so that an arcuate space is formed between adjacent second insulating portions.

[0043] A protective component includes a protective electrode and a first conductor; the protective electrode is disposed on the second end face of the first insulating part, and the protective electrode is connected to a power source through the first conductor.

[0044] The collecting component includes a second conductor and a collecting electrode having the preset curvature; the collecting electrode is respectively disposed in the curvature space, so that the collecting component has a hemispherical structure; one end of the second conductor is connected to the collecting electrode, and the other end passes through the protective component and is connected to the power source.

[0045] In summary, the collector component incorporates a second conductor, employing a printed circuit board and conductive rod structure. This increases the internal space utilization of the collector component, thereby improving spatial resolution. Furthermore, the placement of the guard electrode ensures the consistency and flatness of the plasma sheath at each collector electrode under a fixed negative bias, guaranteeing the accuracy and usability of the measured current signal. Additionally, based on the current signals from the eight collector electrodes under a fixed negative bias, a time-resolved image of the velocity direction can be obtained, leading to the determination of the axial velocity component percentage and thus thruster performance information.

[0046] This application also provides a time-resolved anisotropic spherical probe measurement method. Based on the time-resolved anisotropic spherical probe measurement device, it is able to acquire the current signal of each collector electrode in the time-resolved anisotropic spherical probe measurement device under a fixed negative bias condition, and obtain a time-resolved image in the velocity direction based on the current signal. Attached Figure Description

[0047] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0048] Figure 1 A schematic diagram of the time-resolved anisotropic sphere probe measurement device provided in this application;

[0049] Figure 2 A schematic diagram of the hidden collecting electrode in the time-resolved anisotropic spherical probe measuring device provided in this application;

[0050] Figure 3 A schematic diagram of the time-resolved anisotropic spherical probe measuring device provided in this application, showing the hidden collecting electrode and part of the protective electrode from a first-view perspective.

[0051] Figure 4 A schematic diagram of the time-resolved anisotropic spherical probe measuring device provided in this application, showing the hidden collecting electrode and part of the protective electrode from a second perspective.

[0052] Figure 5 A half-section schematic diagram of the time-resolved anisotropic spherical probe measurement device provided in this application;

[0053] Figure 6 A plan view of the time-resolved anisotropic spherical probe measurement device provided in this application;

[0054] Figure 7 A schematic diagram of the time-resolved anisotropic sphere probe measurement device provided in this application.

[0055] Reference numerals: 101-First insulating part; 102-Second insulating part; 103-First end face; 104-Second end face; 105-Curved space; 106-Insulating circular plate; 107-Insulating arc plate; 108-First edge; 109-Second edge; 110-Third edge;

[0056] 203-Protective electrode; 204-First conductor; 205-Main body; 206-Fixing base; 207-Bias copper sheet; 208-Connector; 209-Protruding pin; 210-Signal transmission line; 211-Screw;

[0057] 301-Second conductor; 302-Collector; 303-Printed circuit board; 304-Conductive rod; 305-Insulator; 306-Conductive body; 307-First insulating section; 308-Second insulating section; 309-Electrical connector. Detailed Implementation

[0058] The following detailed embodiments are provided to aid the reader in gaining a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent upon understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order presented herein; rather, changes that will be apparent upon understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, descriptions of features known in the art may be omitted for clarity and brevity. The features described herein may be implemented in different forms and should not be construed as limited to the examples described herein. Rather, the examples described herein are provided only to illustrate some of the many possible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application. Throughout this specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. Conversely, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between. As used herein, the term "and / or" includes any one of the relevant items listed and any combination of any two or more of them. Although terms such as "first," "second," and "third" may be used herein to describe individual components, assemblies, regions, layers, or portions, these components, assemblies, regions, layers, or portions are not limited by these terms. More precisely, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as such in the examples may also be referred to as the second component, assembly, region, layer, or part. For ease of description, spatial relational terms such as “above,” “upper,” “below,” and “lower” may be used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relational terms are intended to include not only the orientation depicted in the drawings but also the different orientations of the device in use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element.Therefore, the term "above" includes both "above" and "below" depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., oscillating 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly. The terminology used herein is for describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms "comprising," "including," and "having" enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof. Variations in the shapes shown in the figures may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the figures but include changes in shape that occur during manufacturing. The features of the examples described herein may be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible as will be apparent upon understanding the disclosure of this application.

[0059] Example 1

[0060] The following combination Figures 1-6 The time-resolved anisotropic spherical probe measurement device and method provided in this application are further described below.

[0061] This application mainly includes an insulating component, a protective component, and a collecting component. The insulating component is used to support and isolate the electrodes, and includes a first insulating portion 101 and a second insulating portion 102. The first insulating portion 101 is a circular insulating plate with a first end face 103 and a second end face 104 facing each other. In order to achieve a uniform spatial distribution of the collecting electrodes and ensure the anisotropy of ion collection, this application uses the central axis of the first insulating portion 101 as the standard axis and arranges the second insulating portions 102 at equal intervals diverging from the first end face 103. The exposed end face of the second insulating portion 102 is designed with a structure with a preset curvature, so that an arcuate space 105 is formed between adjacent second insulating portions 102 for mounting the collecting electrode 302. Specifically, the second insulating part is an insulating arc plate 107, which has a first edge 108, a second edge 109, and a third edge 110; the first edge is perpendicular to the second edge, and the third edge is connected to the first edge and the second edge by the preset curvature; a plurality of first edges are focused on the standard axis, and a plurality of second edges are respectively located at the mounting position, such that an arc space for placing the collecting electrode is formed between adjacent insulating arc plates.

[0062] Considering that the insulating components need to remain stable under high temperature and strong electromagnetic environments, both the first insulating part 101 and the second insulating part 102 in this application are made of PEEK (polyetheretherketone) material, with a preferred thickness of 0.2 mm, balancing insulation performance and structural strength. Furthermore, to adapt to different installation environments or improve space adaptability, the second insulating part 102 may also be made of ceramic matrix composite material or aluminum nitride material to enhance high temperature resistance and plasma erosion resistance.

[0063] In addition to the insulating components, a protective component is provided to further ensure the consistency and flatness of the sheaths of each collecting electrode in the plasma environment. The protective component includes a protective electrode 203 and a first conductor 204. The protective electrode 203 has a bowl-shaped structure, consisting of a main body 205 and a mounting base 206. The main body 205 extends from the mounting base 206 and connects to the second end face 104 of the insulating circular plate 106. The protective electrode 203 is connected to an external power source via the first conductor 204 to create a uniform electric field environment around the collecting electrodes.

[0064] For ease of installation and signal transmission, the first conductor 204 is preferably a bias copper sheet 207, which is fixed to the mounting base 206 by a connector 208 (such as a screw 211). The thickness of the bias copper sheet 207 is set to 0.2 mm, and protruding pins 209 extend radially at predetermined points, connecting to the power supply via a signal transmission line 210. Furthermore, the mounting base 206 has a diameter of 4 mm and threaded blind holes with a height of 1.5 mm circumferentially to facilitate stable connection with insulating components. In other alternative embodiments, the protective electrode 203 can also be designed as a segmented or multi-layer shielded structure to further suppress edge electric field interference; the first conductor 204 can also be a flexible printed circuit or gold-plated copper strip to adapt to complex wiring environments.

[0065] The collecting component is the core part of this application, used to receive ion current and output a time-resolved signal. The collecting component includes a second conductor 301 and a collecting electrode 302. The collecting electrode 302 has a preset curvature that matches the second insulating portion 102 and is installed in the curvature space 105, making the entire collecting component present a hemispherical structure. One end of the second conductor 301 is connected to the collecting electrode 302, and the other end passes through the protective component and is connected to the power supply.

[0066] To improve space utilization and signal transmission efficiency, the second conductor 301 adopts a combination structure of a printed circuit board 303 and a conductive rod 304. One end of the conductive rod 304 is connected to the collector 302, and the other end passes through the insulating circular plate 106. The printed circuit board 303 includes an insulator 305 and a conductive body 306. The insulator 305 is composed of a first insulating section 307 and a second insulating section 308 connected in an inverted L shape. The conductive body 306 is also arranged in an inverted L shape on the insulator 305 and is connected to the power supply through an electrical connector 309.

[0067] Specifically, the manufacturing process for the aforementioned insulator 305 can be as follows: First, the insulator 305 is manufactured using high-resolution SLA / DLP photopolymerization 3D printing technology, which is easier to chemically plate copper. Then, ultrasonic cleaning or plasma treatment is used to ensure that the channels are clean and the surface is activated.

[0068] Then, a SnCl2 (sensitization) and PdCl2 (activation) solution was injected into the insulator 305 using a syringe to ensure complete adsorption of Pd nanocatalytic sites on the channel surface without bubbles. The chemical equation for this step is: .

[0069] Finally, the copper plating solution was slowly injected into the channel using a syringe pump until a uniform copper-red color was produced (maintained at a flow rate of 0.3 mL / min for 1 hour). The copper plating solution was a standard formaldehyde system containing 5 g / L copper sulfate, 2 mL / L formaldehyde, 12 g / L EDTA, and 8 g / L sodium hydroxide. The chemical equation for this step is as follows: .

[0070] In this application, the collecting electrodes 302 are preferably configured as eight, corresponding to eight arc-shaped spaces 105, each with a 45° apex angle and a thickness of 0.2 mm. The diameter of the end face of the hemispherical structure formed by the eight collecting electrodes is 6 mm. This structure can achieve simultaneous eight-directional monitoring of ion flow while ensuring spatial resolution. To improve the corrosion resistance and service life of the electrodes, both the collecting electrodes 302 and the guard electrode 203 are made of titanium alloy, and a titanium nitride coating is formed on the surface by nitriding. Specifically, both the collecting electrodes 302 and the guard electrode 203 are processed by magnetron sputtering technology to form a titanium nitride coating (1 μm) on the surface of titanium alloy. The advantages of titanium alloy, such as high conductivity, weak magnetism, high structural strength, and light weight, are utilized as the main material for the collecting electrodes. In addition, the titanium nitride coating has higher corrosion resistance, sputtering resistance, and a more uniform surface work function than titanium alloy, hence this process is adopted.

[0071] Furthermore, with a fixed voltage of -30V, the collector is used to receive ion currents from different orientations. To improve the spatial resolution of the ball probe, its diameter must be reduced; however, this can cause end-effect interference from the lead wires, such as the end connectors, affecting the sheath area of ​​the collector. ,in It is ion current. It is the ion current density. It is the sheath area. When the sheath area changes, the received ion current will have errors. Therefore, a guard electrode with the same material, bias voltage and collector electrode is introduced to eliminate the end effect.

[0072] In other embodiments, the number of collecting electrodes can be adjusted to six or twelve depending on the resolution requirements; the electrode material can also be molybdenum, tungsten or their alloys to adapt to higher temperature or more corrosive plasma environments.

[0073] Example 2

[0074] This application also provides a time-resolved anisotropic spherical probe measurement method. Based on a time-resolved anisotropic spherical probe measurement device, the time-resolved anisotropic spherical probe measurement method includes the following steps:

[0075] Acquisition and Marking Step 100: Set the power supply to a bias voltage of -30 V; acquire the current values ​​of eight collectors at different times under the preset bias voltage, sort the current values ​​of the eight collectors at the same time, and select the maximum main current as... The current values ​​of the two collectors adjacent to this collector are denoted as follows: and Combining Figure 7 As shown, main current The corresponding collector electrode is denoted as "1". The currents collected by its two adjacent collector electrodes are denoted as "2" and "3" respectively, and the corresponding secondary currents are denoted as... and ( Still combined Figure 7 As shown, a coordinate system is established with the line where "1" and "2" intersect as the x-axis and the axis perpendicular to the x-axis on the side of "3" as the y-axis. The current density is denoted as... In the xy plane, the angle between it and the x-axis is... And because and Therefore, there is .

[0076] Step 200: Construct the current density and collector current value according to the collector current formula (1) and the current density formula (2) respectively. The relationship between the current density and the current is shown in formula (3). The relationship with current density is shown in equation (4) and current The relationship with current density is shown in formula (5);

[0077] (1);

[0078] (2);

[0079] Among them, the spherical normal vector spherical surface area micro-element , For the apex angle of the collecting pole, For azimuth, (Considering the spherical radius of the sheath).

[0080] (3);

[0081] (4);

[0082] (5);

[0083] Current density calculation steps: Calculate the current density at different times using formula (6) through the following steps. , , ;

[0084] (6);

[0085] Wherein, the radius of the sphere passes through Make corrections. , For the thickness of the sheath, there is , For Debye length, there are , The electron temperature at that point. The ion density at that point. , This is the negative bias voltage of the power supply. The potential at that point can be determined by launching a probe.

[0086] Furthermore, since the ion velocity in the plume region of the Hall thruster is approximately 20 km / s, and according to the ion sound velocity formula... ,in This refers to the ion mass. For a conventional xenon Hall thruster, the internal electron temperature of the plasma is... The sound velocity of ions is approximately 1 km / s, therefore the ions flow at supersonic speeds at this time.

[0087] When the probe is fixed with a negative bias, the collected ion current density ,in The ion density at that point. Therefore, the direction of ion velocity is consistent with the direction of ion current density. Based on the calculated values ​​at different times... , , This allows us to obtain the variation of ion velocity direction over time.

[0088] Furthermore, to obtain the variation of ion velocity over time, the ion density can be measured using a three-Lanmuir probe. Perform time-resolved measurements, and then combine The law governing the change of velocity magnitude over time was obtained.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A time-resolved anisotropic spherical probe measurement method, based on a time-resolved anisotropic spherical probe measurement device, wherein the time-resolved anisotropic spherical probe measurement device includes an insulating component, a protective component, and a collecting component; The insulating component has a first insulating part and a second insulating part. The first insulating part has a first end face and a second end face that are opposite to each other. With the central axis of the first insulating part as the standard axis, the second insulating parts are arranged in a radiating pattern at equal intervals on the first end face. The exposed end face of the second insulating part has a preset curvature, so that an arc space is formed between adjacent second insulating parts. The protective component includes a protective electrode and a first conductor; the protective electrode is disposed on the second end face of the first insulating part, and the protective electrode is connected to the power supply through the first conductor; The collecting component includes a second conductor and a collecting electrode having the preset curvature; The collecting electrodes are respectively disposed in the arc space, making the collecting component a hemispherical structure; one end of the second conductor is connected to the collecting electrode, and the other end passes through the protective component and is connected to the power supply; The time-resolved anisotropic spherical probe measurement method is characterized by comprising the following steps: Data Acquisition and Marking Steps: The power supply is set to have a preset bias voltage; under the preset bias voltage, the current values ​​of multiple collectors at different times are acquired; the current values ​​of multiple collectors at the same time are sorted, and the largest main current is selected and recorded as... The current values ​​of the two collectors adjacent to this collector are denoted as follows: and ; Steps for constructing current density and collector current values: Construct the current density and collector current values ​​respectively according to the collector current formula (1) and the current density formula (2). The relationship between the current density and the current is shown in formula (3). The relationship with current density is shown in equation (4) and current The relationship with current density is shown in formula (5); （1）； （2）； Among them, the spherical normal vector spherical surface area micro-element , For the apex angle of the collecting pole, For azimuth, To take into account the spherical radius of the sheath; For current density, Current density exist Projection in the direction; Current density exist Projection in the direction; Current density exist Projection in the direction; （3）； （4）； （5）； Current density calculation steps: Calculate the current density at different times using formula (6). , , ; （6）； Wherein, the radius of the sphere passes through Make corrections. , For the thickness of the sheath, there is , For Debye length, there are , The electron temperature at that point. The ion density at that point. , The vacuum permittivity, The elementary charge, This is the negative bias voltage of the power supply. The potential at that point is obtained by launching a probe.

2. The time-resolved anisotropic spherical probe measurement method according to claim 1, characterized in that, The first insulating part is an insulating circular plate, and eight mounting positions are equally spaced and diverged on the first end face of the insulating circular plate with the center of the insulating circular plate as the reference center. The second insulating part is an insulating arc plate, which has a first edge, a second edge, and a third edge; the first edge is perpendicular to the second edge, and the third edge is connected to the first edge and the second edge by the preset curvature; a plurality of first edges are focused on the standard axis, and a plurality of second edges are respectively located at the mounting position, so that an arc space for placing the collecting electrode is formed between adjacent insulating arc plates.

3. The time-resolved anisotropic spherical probe measurement method according to claim 2, characterized in that, The protective electrode has a bowl-shaped structure, which includes a main body and a fixing base. The main body extends from the fixing base toward the second end face of the first insulating part and is connected to the second end face. The first conductor is a bias copper sheet, which is fixed to the side of the fixing base away from the main body by a connector, and can supply power to the protection electrode through the bias copper sheet.

4. The time-resolved anisotropic spherical probe measurement method according to claim 3, characterized in that, The second conductor includes a printed circuit board and a conductive rod; One end of the conductive rod is connected to the collecting electrode, and the other end passes through the insulating circular plate; The printed circuit board includes an insulator and a conductive body; the insulator includes a first insulating segment connected to the second end face of the insulating circular plate and a second insulating segment connected to the first insulating end in an inverted L shape and passing through the bias copper sheet; the conductive body is arranged in an inverted L shape with the insulator and one end connected to the conductive rod, and the other end extends along the extension direction of the second insulating segment and is connected to the power supply through an electrical connector.

5. The time-resolved anisotropic spherical probe measurement method according to claim 2, characterized in that, The collection electrode is provided in eight parts, and the eight collection electrodes respectively correspond to the eight arc spaces enclosed by the insulating arc plate; The apex angle of the collecting electrode is 45°, the thickness is 0.2mm, and the end face diameter of the hemispherical structure surrounded by the eight collecting electrodes is 6mm.

6. The time-resolved anisotropic spherical probe measurement method according to claim 3, characterized in that, The bias copper sheet has a protruding pin extending radially from the center of the bias copper sheet at a preset point, and the protruding pin is connected to the power supply through a signal transmission line. The thickness of the bias copper sheet is set to 0.2 mm.

7. The time-resolved anisotropic spherical probe measurement method according to claim 3, characterized in that, The connector is a screw; the fixing seat has a diameter of 4mm and is provided with threaded blind holes of 1.5mm in height that are adapted to the screw at intervals along its circumferential direction.

8. The time-resolved anisotropic spherical probe measurement method according to claim 5, characterized in that, Both the protective electrode and the collecting electrode are made of titanium alloy, and the surface of the titanium alloy is nitrided to form a titanium nitride coating.

9. The time-resolved anisotropic spherical probe measurement method according to claim 2, characterized in that, Both the insulating circular plate and the insulating arc plate are made of PEEK material, and the thickness of both the insulating circular plate and the insulating arc plate is 0.2mm.

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