Vacuum coating machine for optical lens coating

Abstract

The invention relates to the technical field of coating, in particular to a vacuum coating machine for optical lens coating, which comprises a coating box, an aerosol spraying nozzle, a plane coating frame and a planetary coating frame, a rotating shaft for driving the coating frame to rotate is arranged at the top end in the coating box, and the aerosol spraying nozzle is arranged at the bottom end in the coating box. And the outer wall of the rotating shaft is fixedly connected with three supports at equal intervals, and the lower portions of the three supports are each provided with a containing ring used for containing a plane film coating frame, through arrangement of the vertical frame, the upper electric telescopic cylinder, the adjusting mechanism and other structures, the vacuum film coating machine can not only adapt to the plane film coating frame, but also can be matched with the plane film coating frame; according to the device, the plane coating frame is driven to rotate on the aerosol spraying nozzle, plane coating treatment on an optical lens or a wafer is achieved, the device can be rapidly adjusted to be in an installation form matched with the planetary coating frames, the three planetary coating frames are driven in a planetary mode to conduct rotary coating, the replacement efficiency of the device is greatly improved, and the convenience of the device is improved.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and in particular to a vacuum coating machine for coating optical lenses. Background Technology

[0002] Vacuum coating machines are specifically designed for precision coating of optical lenses. They employ an innovative aerosol jetting-vacuum reactive deposition process. The equipment has a built-in vacuum chamber, with the lens horizontally clamped on a rotating platform at the top of the chamber. Ultrasonic atomizing nozzles are arranged below, and the precursor solution is atomized into submicron droplets, which are then sent into the vacuum chamber by a carrier gas and sprayed upwards onto the lower surface of the lens under low pressure. The droplets undergo pyrolysis / hydrolysis reactions upon heating, generating nanoscale oxide films, which are deposited layer by layer to form a uniform and dense optical film. This process is not only applicable to optical lenses but can also be extended to the preparation of functional thin films on precision surfaces such as semiconductor wafers, meeting their needs for functional coatings such as antireflection, insulation, protection, or conductivity.

[0003] The chamber is equipped with a heating system, atmosphere control, and real-time film thickness monitoring, which can precisely control the deposition rate and film thickness. The in-situ annealing function eliminates internal stress, improves adhesion and optical performance, and the entire process is target-free sputtering. Low-temperature deposition is suitable for heat-sensitive substrates such as optical glass, resin lenses, and semiconductor wafers. Moreover, it only coats one side of the lens to avoid cross-contamination. The equipment has a compact structure and is easy to operate. It is suitable for various optical coating needs such as anti-reflection coatings, hard coatings, and filter coatings, providing an efficient and low-cost coating solution for the manufacturing of optical lenses and semiconductor wafers.

[0004] In the process of coating optical lenses and semiconductor wafers, traditional vacuum coating machines usually adopt a single rotation method, such as a planar coating rack or a planetary coating rack. In the planar coating rack mode, although the lens can be coated evenly, it is not very adaptable to lenses with complex shapes or large sizes, and uneven coating is prone to occur. While the planetary coating rack can improve some of the unevenness problem, it has a complex structure, high cost, and inconvenient switching. These two modes are fixed and cannot be flexibly adjusted according to the specific shape and size of the wafer or lens, which limits the coating efficiency and quality and makes it difficult to meet the diverse production needs.

[0005] Therefore, a vacuum coating machine for optical lens coating is proposed to solve the above problems. Summary of the Invention

[0006] The purpose of this invention is to address the shortcomings of the prior art by providing a vacuum coating machine for optical lens coating.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a vacuum coating machine for optical lens coating, comprising a coating box, an aerosol jet nozzle, a planar coating frame, and a planetary coating frame. The coating box has a rotating shaft at its top for driving the coating frame to rotate. The aerosol jet nozzle is located at the bottom of the coating box. Three supports are equidistantly fixed to the outer wall of the rotating shaft. Each of the three supports has a placement ring for placing the planar coating frame below it. An electromagnet is fixedly connected to the inner side of the coating box relative to the position below the placement ring. A flipping seat is longitudinally slidably connected to the side wall of each support. A vertical frame is rotatably connected to the inner side of each flipping seat. A moving block is longitudinally slidably connected to the inner side of each vertical frame. Rollers are provided on the side wall of each moving block. A round rod is rotatably connected through the moving block. The roller is fixedly connected to one end of the round rod. A magnetic mounting shaft for mounting the planetary coating frame is fixedly connected to the other end of the round rod. A connecting structure is provided between the vertical frame and the placement ring. An adjustment mechanism for quickly adjusting to a planetary coating structure is also provided.

[0008] In the above technical solution, the top of each support is fixedly connected to an upper electric telescopic cylinder, the output end of each upper electric telescopic cylinder is fixedly connected to the top of the flip seat, and the bottom of the support is provided with a storage groove for storing the magnetic mounting shaft.

[0009] In the above technical solution, the top of the placement ring is provided with a groove, and the groove is inclined on the side away from the center.

[0010] In the above technical solution, the adjusting mechanism further includes a lower electric telescopic cylinder. A lower plate is fixedly connected to the bottom of each of the tilting seats. Three lower electric telescopic cylinders are provided, and each of the three lower electric telescopic cylinders is obliquely fixedly connected to the side wall of the lower plate. An L-shaped plate is fixedly connected to the output end of each lower electric telescopic cylinder. The L-shaped plate has the same inclination angle as the lower electric telescopic cylinder. An upper inclined groove is formed through the side wall of the L-shaped plate, and a straight groove is formed at the top of the upper inclined groove. A gear is fixedly connected to the rotating end of the vertical frame through the outer wall of the tilting seat. A top frame is fixedly connected to the outer wall of each of the tilting seats. A rack that meshes with the gear is slidably connected laterally to the top of the top frame. A horizontal groove is formed through the side wall of the top frame. An upper rod is fixedly connected to the side wall of the rack relative to the inner side of the horizontal groove. The upper rod is inserted into the inner side of the upper inclined groove. A lower rod is fixedly connected to the side wall of the moving block.

[0011] In the above technical solution, an upper spring is fixedly connected between the top end of the vertical frame and the top end of the movable block, and a lower spring is fixedly connected between the inner side of the top frame and the side wall of the rack.

[0012] In the above technical solution, the connecting mechanism further includes connecting blocks, and three connecting blocks are provided. Each of the three connecting blocks is provided with a connecting groove at the bottom end of the vertical frame. The three connecting blocks are fixedly connected to the top of the placement ring at a position relative to the inside of the connecting groove. Each of the side walls of the vertical frame is provided with a pair of bolts, and the bolts are threadedly connected to the inside of the connecting blocks.

[0013] In the above technical solution, a pair of planar coating frames are provided, each planar coating frame is in the shape of a semi-circular arc frame, the placement ring is made of iron, and the placement ring is provided with a vacuum suction cup for adsorbing and fixing the planar coating frame.

[0014] In the above technical solution, the top of the aerosol spray nozzle is provided with several straight nozzles, and the outer wall of the aerosol spray nozzle is provided with an annular inclined groove. Several inclined nozzles are provided on the annular inclined groove. The spraying of the several straight nozzles and the several inclined nozzles is individually controlled by the valve inside the aerosol spray nozzle.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention, through the design of the vertical frame, the upper electric telescopic cylinder and the adjustment mechanism, enables the vacuum coating machine to not only adapt to the flat coating frame and drive the flat coating frame to rotate on the aerosol jet nozzle to achieve flat coating treatment of optical lenses or wafers, but also to quickly adjust to the installation form to adapt to the planetary coating frame, and drive the three planetary coating frames to rotate and coat in a planetary manner, which greatly improves the replacement efficiency of the device and increases the convenience of the device.

[0016] 2. By setting a straight nozzle and an angled nozzle on the aerosol spray nozzle, the present invention can quickly adjust the spray angle of the aerosol spray nozzle according to the planar coating or planetary coating process, thereby quickly matching the corresponding coating process and further improving the convenience of the device. Attached Figure Description

[0017] Figure 1 This is a three-dimensional view of the front of the coating box of the present invention when it is opened; Figure 2 This is a front perspective view of the placement ring and rotating shaft of the present invention; Figure 3 Appendix of the present invention Figure 2 A magnified view of the structure at point A in the middle; Figure 4 This is a bottom-view three-dimensional structural diagram of the vertical frame and support of the present invention; Figure 5 This is a schematic diagram of the three-dimensional structure of the placement ring and rotating shaft after partial cross-section adjustment according to the present invention; Figure 6This is a partial cross-sectional three-dimensional structural diagram of the coating box of the present invention; Figure 7 This is a schematic diagram of the three-dimensional structure of the support and the flip frame of the present invention. Figure 8 This is a schematic diagram of the overall appearance structure of the moving block and roller of the present invention; Figure 9 This is a schematic diagram of the three-dimensional structure of the vertical frame, L-shaped plate and top frame of the present invention.

[0018] In the diagram: 1. Coating box; 2. Rotating shaft; 3. Aerosol jet nozzle; 4. Support; 5. Flat coating rack; 6. Placement ring; 7. Electromagnet; 8. Tilting seat; 9. Vertical frame; 10. Moving block; 11. Roller; 12. Round rod; 13. Planetary coating rack; 14. Magnetic mounting shaft; 15. Upper electric telescopic cylinder; 16. Groove; 17. Lower electric telescopic cylinder; 18. Lower plate; 19. L-shaped plate; 20. Upper inclined groove; 21. Straight groove; 22. Gear; 23. Top frame; 24. Rack; 25. Horizontal groove; 26. Upper rod; 27. Lower rod; 28. Upper spring; 29. ​​Lower spring; 30. Connecting block; 31. Connecting groove; 32. Bolt; 33. Straight nozzle; 34. Annular inclined groove; 35. Inclined nozzle; 36. Storage slot. Detailed Implementation

[0019] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] Numerous specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the invention is not limited to the specific embodiments disclosed below.

[0021] In practical use, it has been found that traditional vacuum coating machines typically employ a single rotation method during the coating process of optical lenses or wafers, such as a planar coating rack 5 or a planetary coating rack 13. In the planar coating rack 5 mode, although the lens can be coated evenly, it is less adaptable to lenses with complex shapes or large sizes, and uneven coating is prone to occur. While the planetary coating rack 13 can improve some of the unevenness problems, it has a complex structure, high cost, and is inconvenient to switch. These two modes are fixed and cannot be flexibly adjusted according to the specific shape and size of the lens, resulting in limited coating efficiency and quality, making it difficult to meet diverse production needs. To solve the above problems, the following structure was invented.

[0022] like Figures 1-9The vacuum coating machine for optical lens coating shown includes a coating chamber 1, an aerosol jet nozzle 3, a planar coating frame 5, and a planetary coating frame 13. A rotating shaft 2 for driving the coating frame is located at the top of the coating chamber 1. The rotation of the rotating shaft 2 is mainly achieved by direct drive of a motor inside the coating chamber 1, a mature technology in the prior art, and will not be described in detail here. The aerosol jet nozzle 3 is located at the bottom of the coating chamber 1. Three supports 4 are equidistantly fixed to the outer wall of the rotating shaft 2. Each of the three supports 4 has a placement ring 6 for placing the planar coating frame 5 below it. The inner side of the coating chamber 1... An electromagnet 7 is fixedly connected to the lower position of the placement ring 6. A flip seat 8 is longitudinally slidably connected to the side wall of the support 4. A vertical frame 9 is rotatably connected to the inner side of the flip seat 8. A moving block 10 is longitudinally slidably connected to the inner side of the vertical frame 9. Rollers 11 are provided on the side wall of the moving block 10. A round rod 12 is rotatably connected through the moving block 10. The roller 11 is fixedly connected to one end of the round rod 12. A magnetic mounting shaft 14 for mounting the planetary coating frame 13 is fixedly connected to the other end of the round rod 12. A connection structure is provided between the vertical frame 9 and the placement ring 6. An adjustment mechanism for quickly adjusting to the planetary coating structure is also provided. A pair of planar coating holders 5 are provided, each planar coating holder 5 is in the shape of a semi-circular arc frame, and the placement ring 6 is made of iron. The placement ring 6 is equipped with a vacuum suction cup for adsorbing and fixing the planar coating holder 5. When coating optical lenses or wafers, two planar coating holders 5, each containing an optical lens or wafer, are first placed sequentially between vertical frames 9 onto a placement ring 6. It should be noted that the placement ring 6 is equipped with a vacuum suction cup, which adheres and fixes the planar coating holders 5 to the ring 6 after placement, ensuring stability during the coating process. Then, the coating chamber 1 door is closed, a vacuum is drawn, and a mechanical pump is used to evacuate to 10⁻³ Pa. Ar carrier gas is then introduced to maintain a low pressure. Next, the lens is heated, and the aerosol jet nozzle 3 is opened, releasing the precursor solution mist. The liquid is converted into submicron droplets, which are then sprayed upwards onto the surface of a rotating lens with the carrier gas. The droplets undergo instantaneous pyrolysis / hydrolysis to generate nano-oxides that are deposited into a film. The thickness is measured in real time by QCM. At the same time, the rotating shaft 2 drives the support 4 to rotate, which in turn drives the flip seat 8, the vertical frame 9, and the placement ring 6 to rotate. This, in turn, drives the planar coating frame 5 to rotate on the aerosol spray nozzle 3, achieving uniform coating of the optical lens or wafer. Finally, the spraying stops when the set value is reached, and the lens is removed after in-situ annealing to relieve stress and nitrogen purging to break the vacuum. The single-sided low-temperature deposition is then completed.

[0023] The top of each support 4 is fixedly connected to an upper electric telescopic cylinder 15. The output end of the upper electric telescopic cylinder 15 is fixedly connected to the top of the flip seat 8. The bottom of the support 4 is provided with a storage groove 36 for storing the magnetic mounting shaft 14. The storage groove 36 is provided to avoid obstructing the magnetic mounting shaft 14 from moving to the bottom of the support 4 and affecting the normal operation of the equipment. The top of the placement ring 6 has a groove 16, and the groove 16 is inclined on the side away from the center; The adjustment mechanism includes a lower electric telescopic cylinder 17. The bottom of the flipping seat 8 is fixedly connected to a lower plate 18. There are three lower electric telescopic cylinders 17. The three lower electric telescopic cylinders 17 are all fixedly connected to the side wall of the lower plate 18 at an incline. The output end of the lower electric telescopic cylinder 17 is fixedly connected to an L-shaped plate 19. The L-shaped plate 19 has the same incline angle as the lower electric telescopic cylinder 17. The side wall of the L-shaped plate 19 is provided with an upper inclined groove 20. The top of the upper inclined groove 20 is provided with a straight groove 21. The rotating end of the vertical frame 9 is fixedly connected to a gear 22 through the outer wall of the flipping seat 8. The outer wall of the flipping seat 8 is fixedly connected to a top frame 23. The top of the top frame 23 is laterally slidably connected to a rack 24 that meshes with the gear 22. The side wall of the top frame 23 is provided with a horizontal groove 25. The side wall of the rack 24 is fixedly connected to an upper rod 26 relative to the inner side of the horizontal groove 25. The upper rod 26 is inserted into the inner side of the upper inclined groove 20. The side wall of the moving block 10 is fixedly connected to a lower rod 27. An upper spring 28 is fixedly connected between the top of the inner end of the vertical frame 9 and the top of the movable block 10, and a lower spring 29 is fixedly connected between the inner side of the top frame 23 and the side wall of the rack 24. The connecting mechanism includes a connecting block 30, and three connecting blocks 30 are provided. Each of the three connecting blocks 30 has a connecting groove 31 at the bottom of the vertical frame 9. The three connecting blocks 30 are fixedly connected to the top of the placement ring 6 at the position relative to the inside of the connecting groove 31. Each of the vertical frame 9 has a pair of bolts 32 through it, and the bolts 32 are threaded through and connected to the inside of the connecting block 30. When adjusting to a planetary coating structure, first, start the upper electric telescopic cylinder 15 to move the tilting seat 8 downwards, simultaneously moving the lower plate 18 and the lower electric telescopic cylinder 17 downwards. At the same time, move the vertical frame 9 and the placement ring 6 downwards until the placement ring 6 moves above the electromagnet 7. Then, energize the electromagnet 7 to attract and fix the placement ring 6. Next, the operator uses tools to unscrew multiple bolts 32 from the connecting block 30. After removing the bolts 32, the lower electric telescopic cylinder 17 can be started. The telescopic cylinder 17 will drive the L-shaped plate 19 to move diagonally downward. At this time, under the action of the upper inclined groove 20, the inclined surface of the upper inclined groove 20 will squeeze the upper rod 26 to move. Since the upper rod 26 can only slide in the horizontal groove 25 at this time, under the squeezing of the inclined surface of the upper inclined groove 20, the upper rod 26 will be pushed to slide in the horizontal groove 25, while driving the rack 24 to move and compressing the lower spring 29. Thus, the movement of the rack 24 will drive the meshing gear 22 to rotate, thereby driving the vertical frame 9 to flip. At this time, the upper rod 26 slides out from the upper inclined groove 20 and slides into the straight groove 21 to keep the upper rod 26 pressed, ensuring the restriction of the vertical frame 9 flip position. During the flipping process of the vertical frame 9, the moving block 10, roller 11 and magnetic mounting shaft 14 will rotate simultaneously. Then, as the L-shaped plate 19 continues to move down, the bottom of the L-shaped plate 19 will press the lower rod 27, pushing the lower rod 27 and the moving block 10 to slide diagonally downward in the vertical frame 9, and driving the roller 11, round rod 12 and magnetic mounting shaft 14 to move, so that the magnetic mounting shaft 14 slides out from the storage groove 36, while gradually stretching the upper spring 28. At this time, the upper rod 26 will continue to slide in the straight groove 21 until the outer wall of the roller 11 contacts the inclined surface of the groove 16, and the lower electric telescopic cylinder 17 can be controlled to stop running. Then the planetary coating frame 13 with optical lens or wafer can be installed on the magnetic mounting shaft 14. Then, during the operation of the equipment, the rotation of the rotating shaft 2 will drive the support 4 to rotate, which in turn will drive the flip seat 8 and the vertical frame 9 to rotate. At this time, the roller 11 will roll on the inclined surface of the groove 16, causing the roller 11 to rotate. This will then drive the magnetic mounting shaft 14 to rotate through the round rod 12, thereby driving the planetary coating frame 13 to rotate, realizing planetary coating of optical lenses or wafers. When it is necessary to adjust back, the above operation can be repeated in reverse.

[0024] In summary, through the design of the above structure, the vacuum coating machine can not only be adapted to the flat coating rack 5, driving the flat coating rack 5 to rotate on the aerosol jet nozzle 3 to achieve flat coating treatment of optical lenses or wafers, but also can be quickly adjusted to adapt to the installation form of the planetary coating rack 13, and drive the three planetary coating racks 13 to rotate and coat in a planetary manner, which greatly improves the replacement efficiency of the device and increases the convenience of the device.

[0025] Based on the above embodiments, it was found during use that the above structure can only adjust the installation method of the coating frame, but in the actual coating process, it cannot adjust the aerosol spray nozzle 3. If the spray angle is not changed, it is impossible to coat the optical lens or wafer on the planetary coating frame 13. To solve the above problem, the above structure has been further improved.

[0026] The top of the aerosol spray nozzle 3 is provided with several straight nozzles 33, and the outer wall of the aerosol spray nozzle 3 is provided with an annular inclined groove 34. Several inclined nozzles 35 are provided on the annular inclined groove 34. The spraying of the several straight nozzles 33 and the several inclined nozzles 35 is individually controlled by the valve inside the aerosol spray nozzle 3. When adjusted to planetary coating, the valve of the inclined nozzle 35 of the aerosol jet nozzle 3 is opened and the valve of the straight nozzle 33 is closed, so that the optical lens or wafer can be coated. When it is necessary to adjust back, the above operation is repeated in reverse.

[0027] In summary, the above structural design allows for rapid adjustment of the aerosol jet nozzle 3's spray angle according to planar or planetary coating processes, thereby quickly matching the corresponding coating process and further improving the device's convenience.

[0028] The foregoing has shown and described the basic principles, main features, and advantages of the present invention.

[0029] Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed.

Claims

1. A vacuum coating machine for coating optical lenses, comprising a coating chamber (1), an aerosol jet nozzle (3), a planar coating rack (5) and a planetary coating rack (13), a rotating shaft (2) for driving the rotation of the coating rack being arranged at the top end of the coating chamber (1), and the aerosol jet nozzle (3) being arranged at the bottom end of the coating chamber (1), characterized in that: The top of the aerosol jet nozzle (3) is provided with a plurality of straight nozzles (33), the outer wall of the aerosol jet nozzle (3) is provided with an annular chute (34), and the annular chute (34) is provided with a plurality of inclined nozzles (35). The jet of a plurality of straight nozzles (33) and a plurality of inclined nozzles (35) is controlled by a valve inside the aerosol jet nozzle (3). The outer wall of the rotating shaft (2) is equidistantly fixedly connected with three supports (4). The lower side of each of the three supports (4) is provided with a placing ring (6) for placing a flat film coating frame (5). The inner side of the film coating box (1) is fixedly connected with an electromagnet (7) relative to the position below the placing ring (6). The side wall of the support (4) is longitudinally and slidably connected with a turnover seat (8). The inner side of the turnover seat (8) is rotatably connected with a vertical frame (9). The inner side of the vertical frame (9) is longitudinally and slidably connected with a moving block (10). The side wall of the moving block (10) is provided with a roller (11). The moving block (10) is rotatably connected with a circular rod (12). The roller (11) is fixedly connected to one end of the circular rod (12). The other end of the circular rod (12) is fixedly connected with a magnetic mounting shaft (14) for mounting a planetary film coating frame (13). A connecting structure is arranged between the vertical frame (9) and the placing ring (6). An adjusting mechanism for quickly adjusting the planetary film coating structure is further arranged.

2. The vacuum coating machine for coating optical lenses according to claim 1, characterized in that: The top of each of the supports (4) is fixedly connected with an upper electric telescopic cylinder (15). The output end of the upper electric telescopic cylinder (15) is fixedly connected to the top of the turnover seat (8). The bottom of the support (4) is provided with a receiving groove (36) for receiving the magnetic mounting shaft (14).

3. The vacuum coating machine for coating optical lenses according to claim 1, characterized in that: The top of the placing ring (6) is provided with a groove (16), and the groove (16) is inclined away from the center side.

4. The vacuum coating machine for coating optical lenses according to claim 1, characterized in that: The adjusting mechanism comprises a lower electric telescopic cylinder (17). The bottom of the turnover seat (8) is fixedly connected with a lower plate (18). The lower electric telescopic cylinder (17) is provided with three. The lower electric telescopic cylinder (17) is fixedly connected to the side wall of the lower plate (18) at an angle. The output end of the lower electric telescopic cylinder (17) is fixedly connected with an L-shaped plate (19). The inclination angle of the L-shaped plate (19) and the lower electric telescopic cylinder (17) is the same. The side wall of the L-shaped plate (19) is provided with an upper inclined groove (20). The top of the upper inclined groove (20) is provided with a straight groove (21). The rotating end of the vertical frame (9) is fixedly connected with a gear (22) penetrating through the outer wall of the turnover seat (8). The outer wall of the turnover seat (8) is fixedly connected with a top frame (23). The inner top of the top frame (23) is transversely and slidably connected with a rack (24) engaged with the gear (22). The side wall of the top frame (23) is provided with a horizontal groove (25). The side wall of the rack (24) is fixedly connected with an upper rod (26) relative to the inner side of the horizontal groove (25). The upper rod (26) is inserted into the inner side of the upper inclined groove (20). The side wall of the moving block (10) is fixedly connected with a lower rod (27).

5. The vacuum coating machine for coating optical lenses according to claim 4, characterized in that: The upper spring (28) is fixedly connected between the inner top end of the vertical frame (9) and the top end of the moving block (10), and the lower spring (29) is fixedly connected between the inner side of the top frame (23) and the side wall of the rack (24).

6. The vacuum coating machine for coating optical lenses according to claim 1, characterized in that: The connecting mechanism comprises three connecting blocks (30), the bottom end of the vertical frame (9) is provided with a connecting groove (31), the three connecting blocks (30) are fixedly connected to the top end of the placing ring (6) relative to the inner side of the connecting groove (31), and a pair of bolts (32) are penetratingly arranged in the side wall of the vertical frame (9) and are threadedly connected to the inner side of the connecting block (30).

7. The vacuum coating machine for coating optical lenses according to claim 1, characterized in that: The planar coating frame (5) is provided with a pair of half-circular arc-shaped frames, the placing ring (6) is made of iron, and the placing ring (6) is provided with a vacuum suction cup for adsorbing and fixing the planar coating frame (5).

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