Device and method for measuring diameter of molecular pump turbine

Abstract

The invention belongs to the technical field of molecular pump diameter measurement, and discloses a device and method for measuring the diameter of a molecular pump turbine, the device for measuring the diameter of the molecular pump turbine comprises a frame, a clamping mechanism and a micrometer, the clamping mechanism and the micrometer are both connected to the frame, the measuring axis of the micrometer is horizontally arranged, and the measuring axis of the micrometer is perpendicular to the frame. The clamping mechanism and a frame of the micrometer enclose a measuring area, the frame can be placed outside the molecular pump to be measured, so that the molecular pump is located in the measuring area, the clamping mechanism is used for locking a moving blade to be measured of the molecular pump, and the positions of the clamping mechanism and the micrometer in the vertical direction are adjustable. The device can measure the diameter of the multi-layer moving blade of the molecular pump in a mode of locking the moving blade of the molecular pump, the measurement process is convenient and rapid, the result is accurate, and the device is suitable for single-person operation. Meanwhile, the invention further provides a method for measuring the diameter of the molecular pump turbine.

Description

Technical Field

[0001] This application belongs to the field of molecular pump diameter measurement technology, specifically a device and method for measuring the diameter of a molecular pump turbine. Background Technology

[0002] As a cornerstone of the modern semiconductor industry, the core value of molecular pumps lies in their ability to create and maintain the ultra-high vacuum environment necessary for manufacturing processes. In this field, the turbine blades face particularly severe challenges during long-term, high-speed operation. Under prolonged operation, the moving blades continuously endure enormous centrifugal forces and temperature rises, leading to slow and continuous plastic flow within the material—a phenomenon known as creep—ultimately causing deformation of the moving blades. Because the gap between the moving and stationary blades in a molecular pump is extremely small, and the pump body rotates at extremely high speeds, it is crucial to ensure that they do not come into contact under any circumstances; otherwise, serious accidents could occur.

[0003] Currently, measuring the turbine diameter of molecular pumps typically involves using a large-range outside micrometer. While this method can measure the turbine diameter, it requires two people to operate: one person holds the turbine firmly while the other stabilizes the micrometer, operates it, and reads the data. Finally, the data is written into a test table. The entire process is time-consuming and labor-intensive. When dealing with a large number of molecular pumps to be tested, this not only consumes a significant amount of manpower and resources but also slows down the research and development or testing progress. Summary of the Invention

[0004] The purpose of this application is to solve the above-mentioned problems and provide a device for measuring the diameter of a molecular pump turbine. This device can measure the diameter of the multi-layered moving blades of a molecular pump by locking the moving blades. The measurement process is convenient, fast, and accurate, and is suitable for single-person operation. Simultaneously, this application also provides a method for measuring the diameter of a molecular pump turbine.

[0005] To achieve the above objectives, this application provides the following technical solution:

[0006] A device for measuring the diameter of a molecular pump turbine includes a frame, a clamping mechanism, and a micrometer. The clamping mechanism and the micrometer are both connected to the frame. The measuring axis of the micrometer is arranged horizontally. The clamping mechanism and the micrometer frame form a measuring area. The frame can be placed outside the molecular pump to be measured, so that the molecular pump is located in the measuring area. The clamping mechanism is used to lock the moving blade of the molecular pump to be measured. The clamping mechanism and the micrometer are both adjustable in the vertical direction.

[0007] In the aforementioned device for measuring the diameter of a molecular pump turbine, the frame includes an annular rod, a first longitudinal rod, and a second longitudinal rod. There are two first and two longitudinal rods. The axis of the annular rod is vertically arranged. Both the first and second longitudinal rods are connected to the annular rod and are parallel to the axis of the annular rod. A clamping mechanism is connected to the first longitudinal rod via a connector. The position of the clamping mechanism along the length of the first longitudinal rod is adjustable. A micrometer is simultaneously connected to the two second longitudinal rods, and the position of the micrometer along the length of the second longitudinal rod is adjustable.

[0008] In the aforementioned device for measuring the diameter of a molecular pump turbine, the clamping mechanism includes a fixed block, a movable block, and an elastic element. One end of the fixed block has a through groove, and the two side walls of the through groove have first through holes. The first longitudinal rod has a strip-shaped through hole, the length of which extends along the length direction of the first longitudinal rod. The through groove is used to embed the first longitudinal rod. When the first longitudinal rod is located in the through groove, the positions of the first through hole and the strip-shaped through hole correspond. The connecting element passes through the first through hole and the strip-shaped through hole in sequence to fix the fixed block at a preset height.

[0009] The other end of the fixed block is inserted into one end of the movable block. The elastic element is located between the fixed block and the movable block. The other end of the movable block has a groove for locking the moving blade to be tested. The movable block can extend and retract horizontally under the action of the elastic element. The position of the fixed block along the length of the first longitudinal rod is adjustable.

[0010] In the aforementioned apparatus for measuring the diameter of a molecular pump turbine, the fixed block has a receiving groove at the end away from the connector, with the axis of the receiving groove arranged horizontally. The movable block has a connecting groove at the end near the connector, with the size of the connecting groove matching the size of the fixed block. The movable block is inserted into the fixed block through the connecting groove. One end of the elastic element is located in the receiving groove and connected to the fixed block; the other end of the elastic element is located in the connecting groove and connected to the movable block.

[0011] In the aforementioned device for measuring the diameter of a molecular pump turbine, the end of the movable block away from the fixed block also has two inserts. The two inserts are arranged symmetrically at the end of the fixed block with the center of the end face of the movable block as the axis. The gap between the two inserts is a groove, which is used to embed the moving blade to be measured. The inserts are used to embed the angle between the moving blade to be measured and the upper stationary blade, as well as the angle between the moving blade to be measured and the lower stationary blade.

[0012] In the aforementioned device for measuring the diameter of a molecular pump turbine, the device further includes two connecting rods. One end of the connecting rod has a second through hole, and the other end of the connecting rod has a vertically arranged connecting post. The micrometer frame has two third through holes that match the connecting posts. The two connecting rods are slidably connected to the two second vertical rods through the second through holes, and the micrometer frame is rotatably connected to the two connecting posts through the two third through holes.

[0013] In the aforementioned device for measuring the diameter of a molecular pump turbine, the micrometer is a digital micrometer, which is electrically connected to an external recording device.

[0014] In the aforementioned apparatus for measuring the diameter of a molecular pump turbine, both the moving and stationary probes of the micrometer have anvils.

[0015] In the aforementioned apparatus for measuring the diameter of a molecular pump turbine, both the bottom ends of the first and second longitudinal rods have suction cups.

[0016] This application also provides a method for measuring the diameter of a molecular pump turbine. This method relates to the aforementioned apparatus for measuring the diameter of a molecular pump turbine, and specifically comprises:

[0017] Step (1): Place the frame outside the molecular pump to be tested, so that the molecular pump to be tested is located in the measurement area;

[0018] Step (2): Adjust the clamping mechanism to the position of the moving blade to be tested, and lock the moving blade to be tested;

[0019] Step (3): Adjust the micrometer to the height of the moving blade to be measured, and measure the outer diameter of the moving blade;

[0020] Step (4): Loosen the clamping mechanism, rotate the blade to be measured to change the relative position of the blade to be measured and the micrometer, and then re-lock the blade to be measured.

[0021] Step (5): Measure the outer edge diameter of the moving blade to be tested again;

[0022] Step (6): Repeat steps (2) to (5) to complete the outer diameter measurement of all moving blades.

[0023] Compared with the prior art, the beneficial effects of this application are:

[0024] 1. The clamping mechanism and micrometer of this application are both adjustable in the vertical direction, which can measure the diameter of the multi-layer moving blades of the molecular pump by locking the moving blades of the molecular pump. The measurement process is convenient, fast and accurate, and suitable for single-person operation.

[0025] 2. This application uses a retractable movable block to facilitate locking and unlocking of the moving blades of the molecular pump;

[0026] 3. This application provides a centrally symmetrically arranged insert on the end face of the moving block, which is adapted to the arrangement of the moving blade and the stationary blade. The moving blade is conveniently locked by inserting the insert into the included angle position of the moving blade and the stationary blade. Attached Figure Description

[0027] Figure 1 This is a perspective view of the device for measuring the diameter of a molecular pump turbine according to the present invention;

[0028] Figure 2 This is a top view of the device for measuring the diameter of a molecular pump turbine according to the present invention;

[0029] Figure 3 This is an exploded view of the apparatus for measuring the diameter of a molecular pump turbine according to the present invention;

[0030] Figure 4 This is a perspective view of the clamping mechanism of the device for measuring the diameter of a molecular pump turbine according to the present invention;

[0031] Figure 5 This is a side view of the clamping mechanism of the device for measuring the diameter of a molecular pump turbine according to the present invention;

[0032] Figure 6 yes Figure 5 AA section view;

[0033] The labels for each item are as follows:

[0034] Frame 1; Clamping mechanism 2; Micrometer 3; Measuring area 4; Connecting rod 5; Ring rod 11; First longitudinal rod 12; Second longitudinal rod 13; Suction cup 14; Fixing block 21; Movable block 22; Connector 23; Elastic element 24; Third through hole 31; Anvil 32; Second through hole 51; Connecting post 52; Strip through hole 121; Receiving groove 211; Through groove 212; First through hole 213; Embedded groove 221; Embedded block 222; Connecting groove 223. Detailed Implementation

[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0036] Example 1

[0037] refer to Figures 1-6 A device for measuring the diameter of a molecular pump turbine includes a frame 1, a clamping mechanism 2, and a micrometer 3. The clamping mechanism 2 and the micrometer 3 are both connected to the frame 1. The measuring axis of the micrometer 3 is arranged horizontally. The clamping mechanism 2 and the micrometer 3 form a measuring area 4. The frame 1 can be placed outside the molecular pump to be measured, so that the molecular pump is located in the measuring area 4. The clamping mechanism 2 is used to lock the moving blade of the molecular pump to be measured. The positions of the clamping mechanism 2 and the micrometer 3 are adjustable in the vertical direction.

[0038] It should be noted that, regarding the molecular pump measured in this embodiment, the molecular pump needs to be placed on a smooth table or platform, the molecular pump housing removed, and the device, i.e., frame 1, vertically inserted into the molecular pump so that the molecular pump is located in the measurement area 4.

[0039] In this design, a mark is first made on the moving blade to be measured, which can be done using a marker. The moving blade to be measured is preferably the bottommost or topmost moving blade. Then, the clamping mechanism 2 is adjusted to the height of the moving blade to be measured and the moving blade is locked. Next, the micrometer 3 is adjusted to the height of the moving blade to be measured, and the outer diameter of the moving blade is measured. After measuring one layer, the height of the clamping mechanism 2 and the micrometer 3 is adjusted again to measure the second layer, until multiple layers of measurements are completed.

[0040] It should also be noted that the micrometer 3 is preferably a large outside diameter micrometer 3 well known to those skilled in the art, and has a digital display function.

[0041] In this embodiment, the frame 1 includes a ring rod 11, a first longitudinal rod 12, and a second longitudinal rod 13. There are two first longitudinal rods 12 and two longitudinal rods 13. The axis of the ring rod 11 is arranged vertically. The first longitudinal rod 12 and the second longitudinal rod 13 are both connected to the ring rod 11. The first longitudinal rod 12 and the second longitudinal rod 13 are parallel to the axis of the ring rod 11. The clamping mechanism 2 is connected to the first longitudinal rod 12 through a connector 23. The position of the clamping mechanism 2 along the length direction of the first longitudinal rod 12 is adjustable. The micrometer 3 is connected to both second longitudinal rods 13. The position of the micrometer 3 along the length direction of the second longitudinal rod 13 is adjustable.

[0042] Specifically, the two first longitudinal rods 12 and the two second longitudinal rods 13 are preferably arranged in a cross shape, that is, the two first longitudinal rods 12 and the two second longitudinal rods 13 are arranged radially opposite each other along the annular rod 11, and the connections between the two first longitudinal rods 12 and the two second longitudinal rods 13 and the annular rod 11 are all fixed connections, specifically welding. Implicitly, there are also two clamping mechanisms 2, but in actual use, the two clamping mechanisms 2 can be at different heights. That is to say, the moving blade under test only needs one clamping mechanism 2 to lock it. More specifically, there can also be one first longitudinal rod 12, but it is necessary to ensure that the total number of first longitudinal rods 12 and second longitudinal rods 13 is three.

[0043] Furthermore, the clamping mechanism 2 includes a fixed block 21, a movable block 22, and an elastic element 24. One end of the fixed block 21 has a through groove 212, and the two side walls of the through groove 212 have first through holes 213. The first longitudinal rod 12 has a strip-shaped through hole 121. The length of the strip-shaped through hole 121 extends along the length direction of the first longitudinal rod 12. The through groove 212 is used to embed the first longitudinal rod 12. When the first longitudinal rod 12 is located in the through groove 212, the positions of the first through hole 213 and the strip-shaped through hole 121 correspond. The connecting element 23 passes through the first through hole 213 and the strip-shaped through hole 121 in sequence to fix the fixed block 21 at a preset height.

[0044] The other end of the fixed block 21 is inserted into one end of the movable block 22. The elastic element 24 is located between the fixed block 21 and the movable block 22. The other end of the movable block 22 has a groove 221 for locking the moving blade to be tested. The movable block 22 can extend and retract horizontally under the action of the elastic element 24. The position of the fixed block 21 along the length direction of the first longitudinal rod 12 is adjustable.

[0045] Specifically, the connector 23 can be made using a bolt and nut, with the nut preferably being a wing nut. After the bolt passes through the first through hole 213 and the strip-shaped through hole 121 in sequence, it is locked with the wing nut. In this embodiment, the through groove 212 can restrict the swing of the fixed block 21. More specifically, the upper end, lower end, and one side of the through groove 212 are open. The first longitudinal rod 12 is embedded in the open side, and at this time, the first longitudinal rod 12 is in contact with the closed side to ensure that the fixed block 21 is horizontal. The movable block 22 can elastically extend and retract in the horizontal direction under the action of the elastic member 24. The movable block 22 can only be adjusted in the retracted state. In the extended state, the moving blade can be embedded in the groove 221 to lock the moving blade.

[0046] Preferably, the fixed block 21 has a receiving groove 211 at the end away from the connector 23, and the axis of the receiving groove 211 is arranged horizontally. The movable block 22 has a connecting groove 223 at the end near the connector 23. The size of the connecting groove 223 matches the size of the fixed block 21. The movable block 22 is inserted into the fixed block 21 through the connecting groove 223. One end of the elastic member 24 is located in the receiving groove 211 and connected to the fixed block 21. The other end of the elastic member 24 is located in the connecting groove 223 and connected to the movable block 22.

[0047] It should be noted that in this embodiment, the elastic element 24 is a spring; in actual use, the movable block 22 is connected to the fixed block 21 via the connecting groove 223. During the extension and retraction of the movable block 22, the fixed block 21 provides guidance and stability for the movable block 22. Furthermore, the ends of the spring should be fixedly connected, that is, the end of the spring located in the receiving groove 211 is fixedly connected to the fixed block 21, and the end of the spring located in the connecting groove 223 is fixedly connected to the movable block 22.

[0048] In this embodiment, the end of the movable block 22 away from the fixed block 21 also has an insert 222. There are two inserts 222. The two inserts 222 are arranged symmetrically at the end of the fixed block 21 with the center of the end face of the movable block 22 as the axis. The gap between the two inserts 222 is a groove 221. The groove 221 is used to embed the moving blade to be tested. The insert 222 is used to embed the angle position between the moving blade to be tested and the upper stationary blade and the angle position between the moving blade to be tested and the lower stationary blade.

[0049] Specifically, the insert 222 is preferably designed with a corner, or it can be a triangular structure. This is because the moving and stationary blades of the molecular pump are not only staggered in the vertical direction, but also designed as complementary structures based on the tilt angle of the moving blades. In other words, there is an angle between the moving blade and the stationary blade above it, and there is also an angle between the moving blade and the stationary blade below it. The angles here are not formed by contact, but rather by their spatial extension. The function of the insert 222 is to match these angles, ensuring that the moving blade under test is blocked by the insert 222 in both clockwise and counterclockwise directions, thereby locking the moving blade under test.

[0050] Preferably, the device for measuring the diameter of the molecular pump turbine further includes two connecting rods 5. One end of the connecting rod 5 has a second through hole 51, and the other end of the connecting rod 5 has a vertically arranged connecting post 52. The frame of the micrometer 3 has two third through holes 31 that match the connecting post 52. The two connecting rods 5 are slidably connected to the two second vertical rods 13 through the second through holes 51 respectively. The frame of the micrometer 3 is rotatably connected to the two connecting posts 52 through the two third through holes 31 respectively.

[0051] In practical use, the micrometer 3 is connected to two second vertical rods 13 by two connecting rods 5 respectively. The principle of forming a parallelogram by the two connecting rods 5 gives the micrometer 3 a certain position adjustment space, which can be finely adjusted according to the position of the molecular pump. However, if the fine adjustment still cannot ensure that the measuring axis of the micrometer 3 is perpendicular to and intersects the axis of the molecular pump, the operator needs to adjust the position of the frame 1.

[0052] Furthermore, the micrometer 3 is a digital micrometer 3, which is electrically connected to an external recording device. This external recording device can be a computer. In existing technology, digital micrometers 3 are equipped with a Digimatic interface, using a dedicated USB-ITN cable. One end of the cable connects to the Digimatic interface on the micrometer 3, and the other end is a standard USB-A connector for connecting to a computer. Even further, both the moving and fixed measuring heads of the micrometer 3 have anvils 32. During measurement, the micrometer screw on the micrometer 3 is rotated until the digital display stops; at this point, the measurement data is transmitted to the computer for recording.

[0053] In this embodiment, both the bottom ends of the first vertical rod 12 and the second vertical rod 13 have suction cups 14. Preferably, suction cups 14 with handles are used, as the molecular pump needs to be placed on a smooth table or platform for measurement. The suction cups 14, in conjunction with the pump's function, ensure the stability of the frame 1.

[0054] Example 2

[0055] refer to Figures 1-6 A method for measuring the diameter of a molecular pump turbine, relating to the apparatus for measuring the diameter of a molecular pump turbine as described in Example 1, wherein the method specifically comprises:

[0056] Step (1): Place frame 1 outside the molecular pump to be tested, so that the molecular pump to be tested is located in measurement area 4;

[0057] Step (2): Adjust the clamping mechanism 2 to the position of the moving blade to be tested, and lock the moving blade to be tested;

[0058] Step (3): Adjust the micrometer 3 to the height of the moving blade to be measured, and measure the outer diameter of the moving blade;

[0059] Step (4): Loosen the clamping mechanism 2, rotate the blade to be tested to change the relative position of the blade to be tested and the micrometer 3, and then re-lock the blade to be tested;

[0060] Step (5): Measure the outer edge diameter of the moving blade to be tested again;

[0061] Step (6): Repeat steps (2) to (5) to complete the outer diameter measurement of all moving blades.

[0062] Before proceeding to step (1), the molecular pump needs to be placed on a smooth table or platform, the pump housing removed, and the micrometer 3 and computer connected via a USB-ITN interface cable for measurement data transmission. In step (1), after the frame 1 is placed outside the molecular pump to be tested, the two first vertical rods 12 and the two second vertical rods 13 are arranged around the molecular pump. The molecular pump is located in the measurement area 4 enclosed by the clamping mechanism 2 and the micrometer 3 frame. The positions of the first vertical rods 12 and the second vertical rods 13 are adjusted so that the axis of the molecular pump is as close as possible to the axis of the ring rod 11.

[0063] In step (2), by loosening the connector 23 and simultaneously pulling the movable block 22, the movable block 22 is brought into a retracted state. Then, the fixed block 21 is adjusted to the position of the blade to be tested. After locking the fixed block 21, the movable block 22 is released. The two inserts 222 of the movable block 22 are embedded in the angle between the blade to be tested and the stationary blade above it, as well as the angle between the blade to be tested and the stationary blade below it. The second clamping mechanism 2 can use the same method to pre-lock the next blade to be tested.

[0064] In step (3), the operator holds the micrometer 3 and adjusts it to the position of the moving blade to be measured. The position is finely adjusted by the connecting rod 5 so that the fixed measuring head on the micrometer 3 contacts the outer edge of the moving blade to be measured, ensuring the accuracy of the measurement position. Then, the micrometer screw on the micrometer 3 is rotated until the digital display stops, and the measurement data is transmitted to the computer for the first recording.

[0065] In step (4), first reset the micrometer 3 to its initial state, then pull the movable block 22 to release the locking relationship between the movable block 22 and the measured moving blade, then rotate the measured moving blade to change the relative position between the measured moving blade and the micrometer 3, then relock the measured moving blade, and finally adjust the micrometer 3 to the height of the measured moving blade.

[0066] In step (5), after fine-tuning in step (3), a second measurement is performed, and the measurement data is transmitted to the computer for a second recording.

[0067] Using the methods described above, multiple layers of testing are performed sequentially.

[0068] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. An apparatus for measuring the diameter of a molecular pump turbine, characterized by, The frame, clamping mechanism and micrometer are connected to the frame, the measuring axis of the micrometer is horizontally arranged, the clamping mechanism and the micrometer frame form a measuring area, the frame can be placed outside the molecular pump to be measured, the molecular pump is located in the measuring area, the clamping mechanism is used for locking the blade to be measured of the molecular pump, and the positions of the clamping mechanism and the micrometer in the vertical direction are adjustable.

2. The device for measuring the diameter of a molecular pump turbine according to claim 1, characterized in that, The frame comprises a ring-shaped rod, two first longitudinal rods and two second longitudinal rods, the axis of the ring-shaped rod is vertically arranged, the first longitudinal rods and the second longitudinal rods are connected to the ring-shaped rod, the first longitudinal rods and the second longitudinal rods are parallel to the axis of the ring-shaped rod, the clamping mechanism is connected to the first longitudinal rod through a connecting piece, the position of the clamping mechanism along the length direction of the first longitudinal rod is adjustable, and the micrometer is connected to the two second longitudinal rods at the same time, and the position of the micrometer along the length direction of the second longitudinal rod is adjustable.

3. The device for measuring the diameter of a molecular pump turbine according to claim 2, characterized in that, The clamping mechanism comprises a fixed block, a movable block and an elastic piece, one end of the fixed block is provided with a through slot, the two side walls of the through slot are provided with first through holes, the first longitudinal rod is provided with a strip-shaped through hole, the length of the strip-shaped through hole extends along the length direction of the first longitudinal rod, the through slot is used for embedding the first longitudinal rod, when the first longitudinal rod is located in the through slot, the positions of the first through holes and the strip-shaped through hole correspond, and the connecting piece passes through the first through holes and the strip-shaped through hole in sequence to fix the fixed block at a preset height. The other end of the fixed block is inserted with one end of the movable block, the elastic piece is located between the fixed block and the movable block, the other end of the movable block is provided with an embedding groove for locking the blade to be measured, the movable block can be horizontally expanded and contracted under the action of the elastic piece, and the position of the fixed block along the length direction of the first longitudinal rod is adjustable.

4. The device for measuring the diameter of a molecular pump turbine according to claim 3, characterized in that, The end of the fixed block away from the connecting piece is provided with an accommodating groove, the axis of the accommodating groove is horizontally arranged, the end of the movable block close to the connecting piece is provided with a connecting groove, the size of the connecting groove matches the size of the fixed block, the movable block is inserted with the fixed block through the connecting groove, one end of the elastic piece is located in the accommodating groove and connected with the fixed block, and the other end of the elastic piece is located in the connecting groove and connected with the movable block.

5. The apparatus for measuring the diameter of a molecular pump turbine according to claim 3, wherein The end of the movable block away from the fixed block is further provided with an embedding block, the embedding block is two blocks, the two blocks of the embedding block are symmetrically arranged at the end of the fixed block with the center of the end face of the movable block as the axis, the gap between the two blocks of the embedding block is the embedding groove, the embedding groove is used for embedding the blade to be measured, and the embedding block is used for embedding the included angle position of the blade to be measured and the upper static blade and the included angle position of the blade to be measured and the lower static blade.

6. The apparatus for measuring the diameter of a molecular pump turbine according to claim 2, wherein The device for measuring the diameter of the molecular pump turbine further comprises two connecting rods, one end of the connecting rods is provided with a second through hole, the other end of the connecting rods is provided with a connecting column arranged vertically, the frame of the micrometer is provided with two third through holes matched with the connecting columns, the two connecting rods are respectively slidably connected to the two second vertical rods through the second through holes, and the frame of the micrometer is rotatably connected to the two connecting columns through the two third through holes.

7. The apparatus for measuring the diameter of a molecular pump turbine according to claim 1, wherein The micrometer is a digital micrometer, and the digital micrometer is electrically connected with a recording device of an external device.

8. The apparatus for measuring the diameter of a molecular pump turbine according to claim 1, wherein The movable measuring head and the fixed measuring head of the micrometer are both provided with measuring anvils.

9. The apparatus for measuring the diameter of a molecular pump turbine according to claim 2, wherein The first vertical rod and the second vertical rod are both provided with suction cups at the bottom ends.

10. A method of measuring the diameter of a molecular pump turbine, characterized by, The method relates to the device for measuring the diameter of the molecular pump turbine, and specifically relates to the following method: Step (1): placing the frame outside the molecular pump to be measured so that the molecular pump to be measured is located in the measurement area; Step (2): adjusting the clamping mechanism to the position of the blade to be measured, and locking the blade to be measured; Step (3): adjusting the micrometer to the height of the blade to be measured, and measuring the outer diameter of the blade to be measured; Step (4): loosening the clamping mechanism, rotating the blade to be measured, and then locking the blade to be measured again after the relative position between the blade to be measured and the micrometer is changed; Step (5): measuring the outer diameter of the blade to be measured again; Step (6): repeating steps (2) to (5) to complete the measurement of the outer diameters of all the blades.

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