Supporting device, anti-vibration device, lens moving device and anti-vibration lens driving device

Abstract

The present invention addresses the problem of providing a technique for supporting a specific member at a specific position, the technique having good versatility and excellent power saving performance. [Solution] A support device (20) is provided with a fixed-side first member (21) and a movable-side second member (22). The two members are arranged in a non-contact manner, one of the two members includes a permanent magnet (28) that forms a magnetic field that causes the two members to attract each other, and one or the other of the two members includes a coil (24) that forms a magnetic field that causes the two members to attract each other or repel each other when energized.

Description

Technical Field

[0001] The present invention relates to a support device and a vibration damping device having the support device, a lens moving device, and a vibration damping lens driving device. Background Technology

[0002] As a position adjustment device that utilizes magnetic force, various devices (such as conveying devices or suspension devices) that utilize the magnetic force of permanent magnets and the magnetic field formed by electromagnets are known to be capable of zero-power control (see, for example, Patent Documents 1-3).

[0003] In addition, as a device for controlling the position of the lens using magnetic force (vibration stabilization), it is known to use a structure with two or three actuators equipped with a voice coil motor (see, for example, Patent Documents 4 and 5).

[0004] In addition, there is a known technique in which two magnet units, consisting of a pair of electromagnet units and a permanent magnet suspended therebetween, are arranged opposite each other and in such a way that they can move relative to each other in the opposite direction, and an electromagnetic force based on zero power control is applied to an iron ring arranged between the magnet units to levitate the ring by using magnetism (see, for example, Patent Document 6).

[0005] Prior art literature

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2023-174388

[0008] Patent Document 2: Japanese Patent Application Publication No. 2011-125200

[0009] Patent Document 3: Japanese Utility Model Registration No. 3163639

[0010] Patent Document 4: Japanese Patent Application Publication No. 2020-112636

[0011] Patent Document 5: Japanese Patent Application Publication No. 2006-119249

[0012] Patent Document 6: Japanese Patent Application Publication No. 2011-158021 Summary of the Invention

[0013] The problem that the invention aims to solve

[0014] However, in the conventional position adjustment device capable of zero-power control as described above, the structure of the permanent magnet and electromagnet becomes complex or special depending on the specific object whose position is to be adjusted, and there is still room for discussion on improving the versatility of the position adjustment device.

[0015] Furthermore, as mentioned above, conventional lens anti-vibration devices control the lens position in different radial directions of the lens through actuators of two or more voice coil motors, thus always being in operation (always continuously maintaining the lens in a specific position), leaving room for discussion from the perspective of energy saving.

[0016] One objective of this invention is to provide a technique for supporting specific components in specific locations that is versatile and energy-efficient.

[0017] Methods for solving problems

[0018] To address the aforementioned issues, one aspect of the present invention relates to a support device comprising: a first component disposed on a fixed portion; and a second component disposed on a movable portion capable of moving relative to the fixed portion at least in the vertical direction, and disposed below the first component in a non-contact manner opposite to the first component. One of the first component and the second component includes a permanent magnet that forms a magnetic field that attracts the first component and the second component to each other. One or the other of the first component and the second component includes a coil that forms a magnetic field that attracts or repels the first component and the second component by means of an energizer.

[0019] In addition, to solve the above-mentioned problems, one aspect of the present invention relates to a vibration damping device comprising: a fixed part; a movable part capable of moving relative to the fixed part at least in the vertical direction; and the aforementioned support device having a first component disposed on the fixed part and a second component disposed on the movable part, supporting the movable part on the fixed part.

[0020] In addition, to solve the above-mentioned problems, one aspect of the present invention relates to a lens moving device comprising: a guiding member for guiding movement in a direction intersecting the vertical direction; a lens holding member for holding the lens, the movement in the direction intersecting the vertical direction being guided by the guiding member; a moving device for moving the lens holding member in the direction guided by the guiding member; and the aforementioned supporting device having a first member disposed on the guiding member and a second member disposed on the lens holding member.

[0021] In addition, to solve the above-mentioned problems, one aspect of the present invention relates to a lens stabilization drive device comprising: a fixed frame; a lens frame having a lens and being supported on the fixed frame in a manner capable of moving in a direction intersecting the optical axis of the lens; and two or more actuators for moving the lens frame relative to the fixed frame to a specific position in a direction intersecting the optical axis of the lens, wherein one of the actuators for moving the lens frame relative to the fixed frame in a vertical direction has a first component disposed on the fixed frame and a second component disposed on the movable frame.

[0022] Invention Effects

[0023] According to one aspect of the present invention, a technique is provided that is versatile and energy-efficient for supporting specific components in specific locations. Attached Figure Description

[0024] Figure 1 This is a schematic diagram illustrating the structure of the vibration damping device according to Embodiment 1 of the present invention.

[0025] Figure 2 It is a schematic representation Figure 1 A diagram showing the structure of the legs in a vibration isolation table.

[0026] Figure 3 A diagram schematically illustrating the structure of the support device according to Embodiment 1 of the present invention.

[0027] Figure 4 This is a diagram schematically illustrating the structure of the support device according to Embodiment 2 of the present invention.

[0028] Figure 5 This is a schematic diagram illustrating the structure of the support device according to Embodiment 3 of the present invention.

[0029] Figure 6 This is a diagram schematically illustrating the structure of the support device according to Embodiment 4 of the present invention.

[0030] Figure 7 This is a schematic diagram illustrating the structure of the vibration damping device according to Embodiment 5 of the present invention.

[0031] Figure 8 This is a schematic diagram illustrating the structure of the vibration damping device according to Embodiment 6 of the present invention.

[0032] Figure 9 This is a schematic diagram illustrating the structure of the lens moving device according to Embodiment 7 of the present invention.

[0033] Figure 10This is a perspective view schematically illustrating the structure of the lens moving device according to Embodiment 8 of the present invention.

[0034] Figure 11 This is a side view schematically illustrating the structure of the lens moving device according to Embodiment 8 of the present invention.

[0035] Figure 12 This is a schematic diagram illustrating the structure of the voice coil actuator in Embodiment 8 of the present invention.

[0036] Figure 13 This is a diagram schematically illustrating the structure of the support device in Embodiment 8 of the present invention.

[0037] Figure 14 This is a schematic diagram illustrating the structure of the anti-vibration lens driving device according to Embodiment 9 of the present invention.

[0038] Figure 15 This is a diagram schematically illustrating the structure of the fixed frame in Embodiment 9 of the present invention.

[0039] Figure 16 This is a schematic diagram illustrating the structure of the lens frame in Embodiment 9 of the present invention.

[0040] Figure 17 This is a diagram illustrating the lens position control of the equilibrium state in Embodiment 9 of the present invention.

[0041] Figure 18 This is a diagram illustrating the lens position control to the first position in Embodiment 9 of the present invention.

[0042] Figure 19 This is a diagram illustrating the lens position control to the second position in Embodiment 9 of the present invention.

[0043] Figure 20 This is a diagram illustrating the lens position control to the third position in Embodiment 9 of the present invention.

[0044] Figure 21 This is a perspective view schematically illustrating an example of the structure of the support device according to Embodiment 10 of the present invention.

[0045] Figure 22 yes Figure 21 The front view of the support device shown.

[0046] Figure 23 This is a diagram illustrating an example of the attractive force exerted on the second component that moves laterally in the support device according to Embodiment 10 of the present invention.

[0047] Figure 24This is a diagram illustrating an example of the attractive force experienced by a second component that moves laterally when no current flows through the coil of the support device according to Embodiment 10 of the present invention.

[0048] Figure 25 This is a diagram illustrating an example of the attractive force experienced by a second component that moves laterally when a positive current of 0.1A flows through the coil of the support device according to Embodiment 10 of the present invention.

[0049] Figure 26 This is a diagram illustrating an example of the attractive force exerted on the second component that moves laterally when a negative current of 0.1A flows through the coil of the support device according to Embodiment 10 of the present invention.

[0050] Figure 27 This is a diagram illustrating an example of the attractive force exerted on a second component that moves longitudinally when no current flows through the coil of the support device according to Embodiment 10 of the present invention.

[0051] Figure 28 This is a diagram illustrating an example of the attractive force experienced by a longitudinally moving second component when a positive current of 0.1A flows through the coil of the support device according to Embodiment 10 of the present invention.

[0052] Figure 29 This is a diagram illustrating an example of the attractive force experienced by a longitudinally moving second component when a negative current of 0.1A flows through the coil of the support device according to Embodiment 10 of the present invention.

[0053] Figure 30 This is a diagram illustrating an example of the cogging force in the support device according to Embodiment 10 of the present invention.

[0054] Figure 31 This is a diagram illustrating an example of the distribution of magnetic flux density in the second component at the first position of the support device according to Embodiment 10 of the present invention.

[0055] Figure 32 This is a diagram illustrating an example of the distribution of magnetic flux density in a second component at a second position in a support device according to Embodiment 10 of the present invention.

[0056] Figure 33 This is a diagram illustrating an example of the magnetic flux lines in the support device according to Embodiment 10 of the present invention.

[0057] Figure 34 This is a schematic diagram illustrating an example of the structure of a vibration-damping lens drive device having the support device according to Embodiment 10 of the present invention.

[0058] Figure 35 It is Figure 34The diagram shows the support device and its surrounding area in the anti-vibration lens drive device.

[0059] Figure 36 This is a schematic diagram illustrating a variation of the support device according to Embodiment 10 of the present invention.

[0060] Explanation of reference numerals in the attached figures

[0061] 1. Vibration isolation table

[0062] 2 Vibration Isolation Tables

[0063] 3. Vibration isolation stage

[0064] 4 anti-vibration device

[0065] 5. Lens Movement Device

[0066] 6. Anti-vibration lens drive device

[0067] 11 Tabletop

[0068] 12 legs

[0069] 13. Protuberance

[0070] 14, 71 Base

[0071] 15 Isolators

[0072] 16 Support section

[0073] Support devices for 20, 40, 50, 59, 60, 73, 83, 92, 100, and 200

[0074] 21, 51, 74, 84, 94, 110, 210, 611 First Component

[0075] 22, 42, 52, 62, 75, 85, 95, 120, 622 Second Component

[0076] 23, 43, 111, 211, 614 cores

[0077] 24, 44, 54, 64A, 64B, 112, 533, 544, 615, 623, 624 coils

[0078] 25, 45 Main body sections

[0079] 26, 46, 115, 116, 216 protrusions

[0080] 27, 546, 625 Magnetic Material Components

[0081] 28, 55, 113, 213, 541, 626 permanent magnets

[0082] 31 Spring

[0083] 32 Air damper

[0084] 58 substrate

[0085] 53 Voice coil actuator

[0086] 56A, 56B, 531, 542 magnetic yokes

[0087] 57, 67 lens frames

[0088] 61 Fixed frame

[0089] 70 and 80 microscopes

[0090] 71 Base Frame

[0091] 72 countertops (stage)

[0092] 76, 86, 96 Restriction Section

[0093] 77, 87, 88, 616 opening

[0094] 81 frame

[0095] 82. Observation table (observation stage)

[0096] 91. Shell

[0097] 93 Surveillance cameras

[0098] 511, 512 guide rods

[0099] 521, 621 lenses

[0100] 524, 525 guide holes

[0101] 532, 612, 613 magnets

[0102] 534 cover

[0103] 810 Observation Light Source Detailed Implementation

[0104] [Implementation Method 1]

[0105] The following describes one embodiment of the present invention in detail.

[0106] [Structure of the vibration damping device in this embodiment]

[0107] Figure 1The diagram schematically illustrates the structure of the vibration damping device according to Embodiment 1 of the present invention. The vibration-damping table 1 has a tabletop 11 and four legs 12 supporting the tabletop 11. The tabletop 11 is rectangular in shape when viewed in plan view (hereinafter also referred to as "planar shape"), and each of its four corners has a protruding tab 13 that protrudes outward from both ends along the length of the tabletop 11. The protruding tab 13 is, for example, a SUS-made component fixed to the tabletop 11 by screws, and its planar shape is, for example, rectangular.

[0108] Each of the four legs 12 has a base 14 and an isolator 15 or support device 20 disposed thereon. Some of the four legs 12, for example, two legs, have isolators 15, while the remaining legs, for example, two legs, have support devices 20.

[0109] The isolator 15 is a component disposed on the base 14 and supporting the tab 13, and it is a component that maintains the distance between the base 14 and the tab 13 at a set value. The isolator 15 may be, for example, a component with a specific length corresponding to its own physical properties, such as an air spring, or it may be a component composed of a sensor and an actuator that can extend and retract in a manner that maintains the aforementioned set value.

[0110] Figure 2 The structure of the leg 12 of the vibration-damping table 1, which has support devices 20, is schematically shown. The leg 12 has a base 14 and a support portion 16 disposed thereon. The support portion 16 is a component with a generally C-shaped cross-section and is fixed to the top of the base 14 with an opening at the top. A tab portion 13 is inserted inside the support portion 16. Two support devices 20 are disposed inside the support portion 16. For example, a support device 20 is disposed on the inner surface of the upper part of the generally C-shape of the support portion 16 at two different locations. The support devices 20 support the tab portion 13 at specific positions in the height direction in a non-contact manner.

[0111] [Structure of the support device]

[0112] Figure 3 The structure of the support device 20 is schematically shown. The support device 20 has a first component 21 disposed on the lower part of the support portion 16, and a second component 22 disposed on the protrusion portion 13 below it.

[0113] The first component 21 consists of a magnetic material component 27 and two permanent magnets 28. The magnetic material component 27 is a rectangular component in planar shape and is made of a magnetic material such as iron. It is fixed to the inner surface of the aforementioned upper part of the support portion 16. The permanent magnets 28 are disposed at both ends of the magnetic material component 27. The permanent magnets 28 have an N pole (dark gray) on the side of the second component 22 (lower side in the figure) and an S pole (light gray) on the side of the support portion 16 (upper side in the figure).

[0114] The second component 22 consists of a core 23 and a coil 24. The core 23 is a component that is roughly E-shaped when viewed from the front, and is made of a magnetic material such as iron. The core 23 has a main body 25 extending in a direction intersecting the vertical direction, and three protrusions 26, 26, 26 protruding toward the first component 21 from both ends and the center of the main body 25, respectively. The coil 24 is composed of a wire wound around the protrusion 26 in the center of the main body 25.

[0115] Furthermore, the vibration isolation table 1 also includes: a power supply (not shown) connected to the coil 24, an acceleration sensor (not shown) for detecting the vibration and tilt of the tabletop 11, and a control unit (not shown) capable of adjusting the height of the tabletop 11 (protrusion 13) in real time. This control unit is configured to supply the aforementioned power supply to the coil 24 with a current in a direction and amount corresponding to the vibration and tilt of the tabletop 11. When the isolator 15 includes the aforementioned sensor and actuator, this control unit also controls the operation of the actuator corresponding to the detection signal of the sensor.

[0116] The support device 20 typically supports the protruding portion 13 (tabletop 11) at a position where the weight of the tabletop 11 and the protruding portion 13 in the vertical direction is balanced with the magnetic force between the permanent magnets 28, 28 and the core 23 (protrusion 26). At this time, the height of the protruding portion 13 is substantially the same as the height of the protruding portion 13 supported by the isolator 15.

[0117] In this way, the vibration isolation table 1 has: a support portion 16 that is stationary in the vertical direction, a tabletop 11 that is movable in the vertical direction relative to the support portion 16, and a support device 20 consisting of a first component 21 on the support portion 16 and a second component 22 on the side of the tabletop 11 (protrusion portion 13).

[0118] [Vibration damping mechanism in this embodiment]

[0119] As described above, typically, the support device 20 supports the protruding portion 13 (tabletop 11) at a position where the gravity acting on the tabletop 11 and the protruding portion 13 is balanced by the magnetic force between the permanent magnets 28, 28 and the core 23. In the permanent magnets 28, 28, the core 23 and the magnetic material component 27, a structure is formed... Figure 3 The two loops, indicated by the arrows, represent the magnetic field. Either loop can be represented as follows: starting from the permanent magnet 28, passing through the core 23 from the opposite protrusion 26, reaching the magnetic material component 27 from the central protrusion 26, and then passing through the magnetic material component 27 to reach the permanent magnet 28.

[0120] If the tabletop 11 vibrates or tilts, each isolator 15 automatically returns to its original position according to a set value, supporting the tab 13 at the set position. On the other hand, in each support device 20, the distance between the first component 21 and the second component 22 changes. If the first component 21 and the second component 22 move further apart, the control unit of the support device 20 causes current to flow through the coil 24, generating a magnetic field that strengthens (in the same direction) the magnetic field generated by the permanent magnets 28, 28, thus increasing the attraction between the first component 21 and the second component 22. As a result, the distance between the first component 21 and the second component 22 decreases, returning to its original distance. Conversely, if the vibration or tilt of the tabletop 11 causes the first component 21 and the second component 22 to move closer together, the support device 20 causes current to flow through the coil 24, generating a magnetic field that weakens (in the opposite direction) the magnetic field generated by the permanent magnets 28, 28, thus creating a repulsive force between the first component 21 and the second component 22. As a result, the distance between the first component 21 and the second component 22 increases, and the distance between the first component 21 and the second component 22 returns to its original distance.

[0121] The vibration and tilt of the tabletop 11 are detected by the aforementioned accelerometer. The detection signal from the accelerometer is input to a control device (not shown), which obtains the current value in each support device 20 corresponding to the detected physical quantity, outputs the signal of this current value to the power supply, and the power supply outputs a current corresponding to this signal to each support device 20. As a result, the effects of the vibration and tilt of the tabletop 11 are canceled out, and the tabletop 11 is unaffected by the vibration and tilt. Therefore, regardless of the work done on the tabletop 11 or the tilt or vibration caused by the surrounding environment of the vibration isolation table 1, the tabletop 11 is always kept in a horizontal state.

[0122] In this way, if the distance between the first component 21 and the second component 22 in each support device 20 changes, current flows through the coil 24. However, as described above, the protrusion 13 is normally supported in a position where the gravity acting on the tabletop 11 and the protrusion 13 is balanced by the magnetic force between the permanent magnets 28, 28 and the core 23 (protrusion 26). Therefore, if the change in distance between the first component 21 and the second component 22 converges, and the first component 21 and the second component 22 return to their normal positions, the protrusion 13 is supported in its normal position due to the magnetic force of the permanent magnets 28, 28. Thus, by means of so-called zero-power control—where no current flows in the coil 24 while the tabletop 11 is not tilted or vibrating—the position of the tabletop 11 is maintained in a fixed position.

[0123] As described above, the support device 20 has a core 23 with a generally E-shaped frontal profile. Consequently, a protrusion 26 is present at the center of the coil 24, making it suitable for generating a strong magnetic force when current flows through the coil 24. This further facilitates the generation of a large attractive or repulsive force between the first component 21 and the second component 22, making it more suitable from the viewpoint of supporting objects with greater mass and also achieving vibration damping.

[0124] Generally, interference can significantly impact testing, measurement, experimentation, manufacturing, and overall environmental quality. In this embodiment, to address this issue, a vibration isolation system utilizing the magnetic force of an electromagnet to control a permanent magnet is incorporated into the proposed method. This system effectively stabilizes vibrations through excellent efficiency and energy savings. The vibration isolation table 1 is applicable to a wide variety of technical fields that emphasize stability and accuracy, such as precision measurement, medical equipment, interferometry, or semiconductor manufacturing. By optimizing its design and performance according to the applicable technical field, the vibration isolation table 1 can significantly improve the accuracy and efficiency of delicate equipment or processes.

[0125] [Modifications of this embodiment]

[0126] In each support device 20, the first component may be composed of an E-shaped core 23 and a coil 24, while the second component is supported on the side of the tab portion 13.

[0127] Alternatively, in the first component 21, the permanent magnet 28 on the left side of the figure may have an S pole on the lower side and an N pole on the upper side, while the permanent magnet 28 on the right side may have an N pole on the lower side and an S pole on the upper side.

[0128] Alternatively, all four legs 12 may have support devices 20. Furthermore, the number of support devices 20 can be suitably determined within a range capable of vibration prevention or tilt correction. For example, according to this embodiment, each of the three legs 12 may have a support device 20.

[0129] There can also be three legs 12. In this case, from the viewpoint of being able to prevent vibration or correct tilt, at least one leg 12 may have a support device 20.

[0130] To keep the tabletop 11 in a fixed position, a specific amount of current can always flow through the coil 24. This method is effective when the tabletop 11 is heavy or under a large load.

[0131] Hereinafter, other embodiments of the present invention will be described. For ease of explanation, in the following embodiments, components that have the same function as those described in the above embodiments will be given the same reference numerals and will not be described repeatedly.

[0132] [Implementation Method 2]

[0133] The vibration-damping table described in this embodiment has the same structure as the vibration-damping table in Embodiment 1, except for the different structure of the support device. Figure 4 The structure of the support device according to this embodiment is schematically shown. The support device 40 has the same structure as the support device 20 of Embodiment 1 described above, except that the arrangement of the magnetic poles of the permanent magnet 28 in the first component 21 is somewhat different and a second component 42 is used to replace the second component 22.

[0134] In the support device 40, one of the permanent magnets 28 in the first component 21 (left side relative to the paper in the drawing) has an N pole (dark gray) on the side (lower side) of the second component 42 and an S pole (light gray) on the side (upper side) of the support portion 16. The other permanent magnet 28 (right side relative to the paper in the drawing) has an S pole (light gray) on the lower side and an N pole (dark gray) on the upper side. The permanent magnets 28, 28, the core 43, and the magnetic material component 27 are formed from... Figure 4 The magnetic field is represented by a loop in the direction indicated by the arrow. This loop can be represented as follows: starting from one permanent magnet 28, passing through the core 43 from the protrusion 46 on the opposite side, reaching the other permanent magnet 28 from the protrusion 26 on the other side, and passing through the magnetic material component 27 from the other permanent magnet 28 to the permanent magnet 28 on one side.

[0135] The second component 42 consists of a core 43 and a coil 44. The core 43 is a component that is roughly C-shaped when viewed from the front, and is made of a magnetic material such as iron. The core 43 has a main body 45 extending in a direction intersecting the vertical direction, and two protrusions 46, 46 protruding from both ends of the main body 45 toward the second component 22. The coil 44 is made of a wire wound around an axis in the vertical direction, and is positioned between the two protrusions 46, 46 at both ends of the main body 45.

[0136] The support device 40 also operates in the same way as the support device 20 and achieves the same effect.

[0137] Furthermore, the support device 40 has a generally C-shaped core 43, which is advantageous compared to the support device 20 in terms of reducing cogging effect and weight reduction. Additionally, the support device 40 has a coil 44 between two protrusions 46, 46 in the generally C-shaped core 43. Therefore, the change in magnetic field strength caused by the energization of the coil 44 is smaller than that of the support device 20. Thus, compared to the support device 20, the support device 40 is advantageous in terms of smoothly and precisely achieving vibration control, reducing the movable distance between the second component 42 and the first component 21, and suppressing magnetic flux leakage.

[0138] [Implementation Method 3]

[0139] The vibration-damping table described in this embodiment has the same structure as the vibration-damping table in Embodiment 1, except for the different structure of the support device. Figure 5 The structure of the support device involved in this embodiment is shown schematically.

[0140] The support device 50 has a first component 51 replacing the first component 21 and a second component 52 replacing the second component 22. Furthermore, it is configured similarly to the support device 20 of Embodiment 1 described above. The support device 50 has a first component 51 fixed to the upper part of the support portion 16 and a second component 52 disposed on the protrusion portion 13.

[0141] The first component 51 consists only of a magnetic material component 27. The second component 52 consists of a permanent magnet 55, two yokes 56A and 56B, and a coil 54. The permanent magnet 55 is rod-shaped and extends in a direction intersecting the vertical direction. The yokes 56A and 56B are made of magnetic materials such as iron and are arranged to protrude from both ends of the permanent magnet 55 toward the first component 51. The coil 54 is made of a wire wound around an axis in the vertical direction and is positioned between the two yokes 56A and 56B.

[0142] In the permanent magnet 55, there is an S pole (light gray) on the left side relative to the plane of the paper in the figure, and an N pole (dark gray) on the right side. Between the first component 51 and the second component 52, the permanent magnet 55 forms... Figure 5 The magnetic field is in the direction indicated by the arrow. Furthermore, in the support device 50, the protrusion 13 (tabletop 11) is typically supported at a position where, for example, the weight of the tabletop 11 and the protrusion 13 in the vertical direction is balanced with the magnetic force between the permanent magnet 55 and the magnetic material component 27. The support device 50 operates in the same manner as the support device 20 and achieves the same effect.

[0143] Since the second component 52 of the support device 50 is composed of a permanent magnet 55 and magnetic yokes 56A and 56B, the second component 52 can be further reduced in size compared to the first component of the support device 20 and support device 40, which include a core, thus being advantageous for miniaturization. In addition, the support device 50 is easier to manufacture than the support device 20 and support device 40.

[0144] Furthermore, in the support device 50, similar to the support device 40, the proportion of change in magnetic field strength caused by the energization of the coil 54 is smaller than that in the support device 20. Therefore, compared to the support device 20, the support device 50 is advantageous in terms of achieving smooth and precise vibration control, reducing the movable distance between the first component 51 and the second component 52, and suppressing magnetic flux leakage.

[0145] [Implementation Method 4]

[0146] The vibration damping table in this embodiment has the same structure as the vibration damping table in Embodiment 3, except that the structure of the support device is different. The support device in this embodiment has the same structure as the support device 50 in Embodiment 3, except that two coils are respectively arranged corresponding to the two magnetic yokes and the second component arranged on the protrusion 13 is supported by the spring 31 and the air damper 32. Figure 6 The structure of the support device involved in this embodiment is shown schematically.

[0147] The support device 60 has a first component 51 and a second component 62. The second component 62 has two coils 64A and 64B formed by wires wound around the magnetic yokes 56A and 56B at both ends of the permanent magnet 55. The permanent magnet 55 is disposed on the tab portion 13, which is supported on the bottom surface of the support portion 16 by a spring 31 and an air damper 32. In this way, the second component 62 is supported in the vertical direction by the spring 31 and the air damper 32 at a specific height position across the tab portion 13.

[0148] The spring 31, which supports the tab 13 on which the second component 62 is disposed, is an elastic member that supports the tab 13 in the vertical direction. Through its elasticity, the spring 31 allows the tab 13 (i.e., the permanent magnet 55) to move downwards and supports the permanent magnet 55 at a specific height from the bottom surface of the support portion 16. The air damper 32, which supports the tab 13 on which the second component 62 is disposed, allows the tab 13 to move downwards to a certain extent, but restricts its movement downwards beyond a specific position. Thus, the support device 60 also has a limiting portion that supports the second component 62 in the vertical direction and restricts the movement of the second component 62 in the vertical direction to a specific distance.

[0149] Furthermore, in the support device 60, the tab portion 13 on which the second component 62 is placed is connected to the bottom of the support portion 16 by a spring 31. Therefore, when the second component 62 moves away from the first component 51, the spring 31 exerts a force that brings the second component 62 closer to the first component 51 (a force that pushes the second component 62 upward) and restricts the downward movement of the second component 62. Conversely, when the second component 62 moves closer to the first component 51, it exerts a force that pulls the second component 62 away from the first component 51 (a force that pulls the second component 62 downward) and restricts the upward movement of the second component 62.

[0150] Furthermore, in the support device 60, the tab portion 13 on which the second component 62 is placed is connected to the bottom of the support portion 16 by the air damper 32. Therefore, the downward movement of the second component 62 stops at the lower end of the piston in the air damper 32. In this way, the downward movement of the second component 62 is restricted to a specific position. Additionally, even when the load applied to the tabletop 11 increases sharply, or when the first component 51 approaches the second component 62 rapidly, the closer the first component 51 is to the lower end of its movement range, the smaller the piston's movement speed becomes, converging to zero. Thus, the impact when the movement stops is mitigated.

[0151] In addition, the spring 31 and the air damper 32 may also be located between the upper part of the support 16 and the first component 51, and limit the vertical movement of the first component 51.

[0152] The support device 60 operates in the same manner as the support device 50 and achieves the same effect. Furthermore, the support device 60 has two coils 64A and 64B. Therefore, compared to the support device 50, which has only one coil, the support device 60 can further increase the thrust generated by the coil, further increase the load to be supported, and further increase the movable distance of the first component 51 and the second component 62. Thus, compared to the support device 50, the support device 60 is advantageous from the perspective of miniaturizing the coil and consequently miniaturizing the entire support device while maintaining the same output, and from the perspective of increasing output within the same scale.

[0153] [Implementation Method 5]

[0154] Figure 7 The structure of the vibration damping device according to this embodiment is schematically shown. Vibration isolation table 2 is shown below. Figure 7 As shown, it has a base frame 71, a tabletop 72, and a support device 73. The vibration isolation table 2 has the same structure as the vibration isolation table 1, except that it has a base frame 71 to replace the legs 12 and a tabletop 72 to replace the table board 11.

[0155] The base frame 71 is a rigid component. The base frame 71 has a rectangular planar shape, and an opening 77 with a rectangular planar shape is formed on the upper surface of the base frame 71. The cross-sectional shape of the base frame 71 is approximately C-shaped with an upward opening.

[0156] The platform 72 is a plate-shaped component housed inside the base frame 71, and its planar shape is, for example, rectangular. The planar shape of the platform 72 is larger than the opening of the base frame 71, and the opening edge of the base frame 71 overlaps with the side edge of the platform 72 in the vertical direction.

[0157] The platform 72 is connected to the base frame 71 at its four corners via support devices 73, for example. That is, support devices 73 are respectively arranged at the four corners of the platform 72. When viewed in plan view, the support devices 73 are arranged at the portion where the opening edge of the base frame 71 overlaps with the side edge of the platform 72. In this way, each support device 73 is arranged on the inner side (inner surface) of the upper part of the base frame 71 and supports the platform 72 from above at a specific height.

[0158] The support device 73 consists of a first component 74, a second component 75, and a limiting part 76. The first component 74 is constructed in the same way as the first component in the above embodiment, and the second component 75 is constructed in the same way as the second component in the above embodiment. The limiting part 76 is located between the platform 72 and the second component 75 and connects the second component 75 to the platform. The limiting part 76 is, for example, one or both of the spring 31 and the air damper 32 in the above embodiment.

[0159] In this way, the vibration isolation table 2 has: a base frame 71, a table surface 72 that can move in the vertical direction within the base frame 71, and a support device 73 formed by arranging a first component 74 on the base frame 71 and arranging a second component 75 on the table surface 72 with a limiting part 76.

[0160] The vibration isolation stage 2 can be used, for example, to mount a microscope 70 on the stage 72 and perform observations based on the microscope 70. In the microscope 70, small specimens surrounded by water may float between the slide and the coverslip. If the stage 72 on which the microscope 70 is placed is gently touched, these specimens will begin to vibrate. Furthermore, the optical system of the microscope 70 amplifies even the smallest vibrations. These vibrations can sometimes become problematic when photographing specimens using a camera directly mounted on the microscope 70. The vibration isolation stage 2 can effectively reduce the vibration of the microscope 70, improving stability and image quality.

[0161] Furthermore, in the vibration isolation table 2, similar to the embodiment described above, vibrations or tilting in the table surface 72 are canceled out, and microscopic observation is unaffected. In this way, the vibration isolation table 2, like the embodiment described above, can also cope with ground vibrations or direct disturbances.

[0162] Since the base frame 71 is the aforementioned component with a generally C-shaped form, the vibration isolation table 2 is suitable for supporting the table surface 72 at a lower height relative to the surface on which the base frame 71 is placed (e.g., the top surface of the workbench). Therefore, it is suitable for use as a table for tabletop work where it is necessary to avoid the effects of vibration or tilting, such as for microscopic observation.

[0163] [Implementation Method 6]

[0164] Figure 8 The structure of the vibration damping device according to this embodiment is schematically shown. The vibration isolation platform 3 is shown as... Figure 8 As shown, it has a frame 81, an observation table 82, and a support device 83 mounted on the microscope 80.

[0165] The frame 81 is, for example, a clamp mounted on the observation light source 810 of the microscope 80. It extends from the observation light source 810 along the optical axis of the lens of the microscope 80 to the lens side, and then extends in a direction intersecting the optical axis of the lens. When viewed from the side, its shape is approximately L-shaped. When viewed along the optical axis of the lens, the shape (planar shape) of the frame 81 is, for example, rectangular, with a rectangular opening 87 formed in its center.

[0166] The observation table 82 is a component disposed inside the frame 81 and has a rectangular planar shape. The observation table 82 has an opening 88 in its center for allowing light from the observation light source 810 to pass through.

[0167] The observation table 82 is supported by three support devices 83 inside the frame 81. For example, the support devices 83 are arranged on the inner side (inner surface) of the upper part of the frame 81 at three points: each of the two corners on one end side of the observation table 82 and the center on the other end side, so as to support the observation table 82 at a specific height from above.

[0168] The support device 83 is, for example, composed of a first component 84, a second component 85, and a limiting part 86. When viewed in plan view, the support device 83 is positioned across the edge of the opening 87 in the frame 81 and the edge of the observation table 82. When viewed in plan view, two or more such supports are positioned at the overlapping portion of the edge of the opening 87 in the frame 81 and the edge of the observation table 82. The first component 84 is constructed in the same manner as the first component in the above embodiment, and the second component 85 is also constructed in the same manner as the second component in the above embodiment. The limiting part 86 is located between the observation table 82 and the second component 85, connecting the second component 85 to the observation table 82. The limiting part 86 is, for example, one or both of the spring 31 and the air damper 32 in the above embodiment.

[0169] In this manner, the vibration isolation stage 3 includes: a frame 81 fixed to the microscope 80, an observation stage 82 movable in the vertical direction within the frame 81, and a support device 83 including a first component 84 disposed on the side of the frame 81 and a second component 85 disposed on the side of the observation stage 82. Furthermore, the second component 85 is supported on the observation stage 82 via a limiting portion 86.

[0170] The specimen to be observed is placed on the vibration-damping stage 3. As mentioned above, the specimen on the microscope 80 is prone to vibration, and the optical system of the microscope 80 amplifies even the smallest vibrations. The camera of the microscope 80 is sometimes adversely affected when photographing the specimen. In the vibration-damping stage 3, even if the microscope 80 experiences vibrations associated with the adjustment of the lens position or the observation operation, similar to the embodiment described above, the vibration or tilt of the observation stage 82 is also canceled out, and the microscope observation is not affected. In addition, like the vibration-damping stage 2, the vibration-damping stage 3 can also cope with ground vibrations or direct interference.

[0171] From the viewpoint that it is easy to observe through a microscope 80, the vibration isolation stage 3 is as follows Figure 8 As shown, sometimes the arrangement is tilted to some extent relative to the horizontal. In this case, the observation platform 82 can be supported in such an tilted direction by always supplying current to the coil, thereby always enhancing the attraction between the first component 84 and the second component 85 in the support device 83. Thus, in embodiments of the invention, the movable part can also be properly supported in the vertical direction other than the vertical direction by supplying current to the coil.

[0172] [Implementation Method 7]

[0173] Figure 9 The structure of the vibration damping device according to this embodiment is schematically shown. The vibration damping device 4 of the surveillance camera is shown as follows: Figure 9 As shown, the device includes a housing 91, a surveillance camera 93 housed within the housing 91, and a support device 92 that supports the surveillance camera 93 on the housing 91. The surveillance camera 93 is supported on the housing 91 by the support device 92 in a manner that allows it to be suspended from the top plate of the housing 91.

[0174] The housing 91 is, for example, a metal box, supported on a pedestal in a manner that allows it to rotate horizontally and tilt vertically. Alternatively, the housing 91 may be suspended from a frame and fixed to the frame in a specific direction.

[0175] A support device 92 is disposed at one end of the housing 91 and one end of the monitoring camera 93, connecting the housing 91 and the monitoring camera 93. The support device 92 includes a first component 94 disposed on the lower part of the housing 91 and a second component 95 disposed on the upper part of the monitoring camera 93 with a limiting portion 96 as a partition. The first component 94 is configured similarly to the first component in the above embodiment, and the second component 95 is also configured similarly to the second component in the above embodiment. The limiting portion 96 is also configured similarly to the limiting portion in the above embodiment.

[0176] As shown, the anti-vibration device 4 for the surveillance camera includes: a surveillance camera 93 holding a lens group, a housing 91 guiding the movement of the surveillance camera 93 in the direction of the optical axis, an actuator (not shown) for moving the surveillance camera 93 in the direction of the optical axis, and a support device 92 disposed between the surveillance camera 93 and the housing 91. A first component 94 is disposed on the lower part of the housing 91, and a second component 95 is disposed on the upper part of the surveillance camera 93.

[0177] In the anti-vibration device 4 for the surveillance camera, the surveillance camera 93 is suspended from the housing 91 via a support device 92. The current to the coil of the first or second component in the support device 92 is controlled so that even if the housing 91 is vibrated, the vibration is absorbed. Thus, the vibration of the housing 91 does not substantially reach the surveillance camera 93. The anti-vibration device 4 for the surveillance camera is advantageous in substantially eliminating vibrations from the outside. In this way, because the anti-vibration device 4 effectively eliminates the effects of vibration, it can be applied to the anti-vibration of devices exposed to various vibrations, and is also effective for the anti-vibration of surveillance cameras in highways, industrial areas, construction sites, or mines.

[0178] [Implementation Method 8]

[0179] Figure 10 This is a perspective view schematically illustrating the structure of the lens moving device according to this embodiment. Additionally, Figure 11 This is a side view schematically illustrating the structure of the lens moving device according to this embodiment. The lens moving device 5 includes a base plate 58, a lens frame 57, a voice coil actuator 53, and a support device 59.

[0180] The substrate 58 is a generally annular plate-shaped component. The substrate 58 has a large circular opening at its center. A support device 59 is disposed above the opening in the substrate 58, and a voice coil actuator 53 is disposed below the opening. In addition, guide rods 511 and 512 extending axially along the opening are fixed to the sides of the opening in the substrate 58.

[0181] The lens frame 57 is a generally circular plate-shaped component. A lens 521 is located at the central opening of the lens frame 57. Generally rectangular notches 522 and 523 are formed at the upper and lower parts of the planar shape of the lens frame 57, respectively. Furthermore, guide holes 524 and 525 are located on the sides of the central opening of the lens frame 57. A guide rod 511 is inserted into the guide hole 524, and a guide rod 512 is inserted into the guide hole 525.

[0182] Figure 12 The structure of the voice coil actuator in this embodiment is schematically shown. The voice coil actuator 53 includes: a generally U-shaped yoke 531, a magnet 532 disposed on a plate portion below the yoke 531, a coil 533 inserted through the other plate portion of the yoke 531, and a cover portion 534 that closes the opening of the yoke 531. The cover portion 534 is fixed to the lower part of the opening in the substrate 58, and the yoke 531 extends along the optical axis of the lens 521. The coil 533 is fixed to the notch portion 523 at the lower part of the lens frame 57. The magnet 532 is divided into magnetic poles in the vertical direction, for example, the lower side (dark gray) is the N pole, and the upper side (light gray) is the S pole.

[0183] Figure 13 The structure of the support device in this embodiment is schematically shown. The support device 59 includes: a permanent magnet 541 fixed to the upper part of the substrate 58 and extending in the direction along the optical axis of the lens 521; magnetic yokes 542 and 543 disposed on each side of the permanent magnet 541; coils 544 and 545 wound on each magnetic yoke 542 and 543; and a magnetic material component 546 disposed below the magnetic yokes 542 and 543. The magnetic material component 546 is an elongated rectangular plate-shaped component extending in a direction orthogonal to the optical axis of the lens 521, and is fixed to a notch 512 on the upper part of the lens frame 57. The permanent magnet 541 is divided into magnetic poles in a direction orthogonal to the optical axis of the lens 521, with one side (dark gray) being the N pole and the other side (light gray) being the S pole. The permanent magnet 541 and the yokes 542 and 543 extend along the optical axis of the lens 521 to the same position as the guide rods 511 and 512 and the yoke 531 of the voice coil actuator 53. The permanent magnets 541, yokes 542 and 543, and coils 544 and 545 constitute the first component of the aforementioned support device. The magnetic material component 546 constitutes the second component of the aforementioned support device.

[0184] In addition, an unshown power source is connected to the coil 533 of the voice coil actuator 53 and the coils 544 and 545 of the support device 59, respectively, to supply a specific amount of current.

[0185] As such, the lens moving device 5 includes: a substrate 58, a lens frame 57 guided by the substrate 58 along the optical axis of the lens 521, a voice coil actuator 53 that moves the lens frame 57 along the optical axis, and a support device 59 having a first component fixed to the substrate 58 and a second component fixed to the lens frame 57. Furthermore, in the lens moving device 5, the permanent magnet 541 in the support device 59 extends within the movement range of the lens frame 57 along the movement direction of the lens frame 57.

[0186] If current is supplied to the coil 533 of the voice coil actuator 53, a Lorentz force is generated, and the lens frame 57 moves to any position and stops along the optical axis of the lens 521 according to the amount and direction of the supplied current.

[0187] In the support device 59, the lens frame 57 is pulled upward against gravity because the permanent magnet 541, which is fixed to the substrate 58, attracts the magnetic material component 546. Since the permanent magnet 541 extends along the optical axis of the lens 521, the lens frame 57 is pulled upward against gravity at any position within its movable range. Furthermore, if current is supplied to the coils 544 and 545 of the support device 59 in the direction that enhances the magnetic field of the permanent magnet 541, the lens frame 57 is pulled upward further. Thus, when the voice coil actuator 53 moves the lens frame 57, if current is supplied to the coils 544 and 545 in the direction that enhances the magnetic field of the permanent magnet 541, the friction between the guide hole and the guide rod in the lens frame 57 is further reduced, and the lens frame 57 moves more smoothly and with less power. Furthermore, when the lens frame 57 is stopped, a minimum current (e.g., approximately 0 A) can be consumed at a stable equilibrium position. Therefore, compared with a lens moving device that moves the lens frame by means of two or more voice coil actuators installed at the upper and lower parts of the lens frame, the lens moving device 5 can significantly reduce power consumption.

[0188] [Implementation Method 9]

[0189] Figure 14 The structure of the anti-shake lens driving device according to this embodiment is schematically shown. Additionally, Figure 15 The diagram schematically illustrates the structure of the mounting frame in the anti-vibration lens drive device. Figure 16 The structure of the lens frame is schematically shown. The anti-vibration lens drive device 6 has a fixing frame 61 and a lens frame 67.

[0190] The fixing frame 61 is a generally annular, plate-shaped component composed of two components arranged axially. Regarding the lens frame 67, it is rotatably supported in the position sandwiched between the two components constituting the fixing frame 61. The fixing frame 61 has a circular opening 616 at its center. Furthermore, the fixing frame 61 has a first component 611 and two sets of magnets 612 and 613 on the surface of the fixing frame 61 on the side of the lens frame 67. The first component 611 and the two sets of magnets 612 and 613 are respectively arranged in a triple-symmetrical position relative to the center of the opening 616 (their axes intersect at 120°).

[0191] One of the two components constituting the fixing frame 61 is a first component 611. The first component 611 has the same structure as the second component 22 of the support device 20 described above, having the aforementioned E-shaped core 614 fixed to the fixing frame 61, and a coil 615 composed of wires wound around the protrusion in the central part. A power source supplying a specific amount of current is electrically connected to the coil 615.

[0192] Magnets 612 and 613 are disposed on the other side of the two components constituting the fixed frame 61. Magnets 612 and 613 are each composed of two permanent magnets. Each permanent magnet is arranged with its magnetic poles divided radially. In addition, the radial magnetic poles are arranged differently in magnet 612 and magnet 613. For example, the two permanent magnets of magnet 612 have an S pole (light gray) disposed on the rear side in the clockwise rotation direction and an N pole (dark gray) disposed on the front side in the clockwise rotation direction.

[0193] Lens frame 67 is a generally annular, plate-like component supported on one surface relative to the fixing frame 61 and configured to move along that surface. Lens frame 67 has a circular opening at its center, in which lens 621 is inserted. Additionally, on the surface of lens frame 67 on the side of fixing frame 61, there is a second component 622 and two coils 623 and 624. The second component 622 and the two coils 623 and 624 are respectively arranged in a triple-symmetrical position relative to the optical axis (center) of lens 621 (their axes intersect at 120° intervals).

[0194] The second component 622 has the same structure as the first component 21 of the support device 20 described above, and has a magnetic material component 625 fixed to the surface of the lens frame 67, and two permanent magnets 626 and 627 fixed to its two ends.

[0195] Coils 623 and 624 are each wound with wires in a planar rectangular shape, with the sides of the rectangles extending approximately radially and circumferentially. Each coil 623 and 624 is energized with a power source to independently supply a specific amount of current. Furthermore, a Hall element (not shown) serving as a position detection sensor is disposed at the center of each of the planar shapes of coils 623 and 624.

[0196] In the correspondence between the fixed frame 61 and the lens frame 67, the first component 611 and the second component 622 are positioned vertically opposite each other. The second component 622 is positioned below the first component 611. The magnet 612 and the coil 624 overlap in the optical axis direction of the lens 621, and the magnet 613 and the coil 623 overlap in the optical axis direction. The two permanent magnets of the magnet 612 are arranged to overlap with the coil 624 in a manner that sandwiches a straight line that radially divides the planar shape of the coil 624 in two, and the two permanent magnets of the magnet 613 are arranged to overlap with the coil 623 in a manner that sandwiches a straight line that radially divides the planar shape of the coil 623 in two.

[0197] When the lens frame 67 is mounted on the fixed frame 61, the first component 611 and the second component 622 constitute an actuator that moves the lens frame 67 relative to the fixed frame 61 in the vertical direction. Taking the perpendicular direction of the opposing directions of the first component 611 and the second component 622 as a reference, the magnet 612 and the coil 624 constitute an actuator (voice coil motor) that generates a thrust in a direction radially orthogonal (tangential direction) at 120° relative to the vertical direction. The magnet 613 and the coil 623 constitute an actuator (voice coil motor) that generates a thrust in a direction radially orthogonal (tangential direction) at 240° relative to the vertical direction.

[0198] The amount of vibration experienced by the anti-vibration lens drive device 6 (fixed frame 61) is detected by a gyroscope sensor (not shown). The position of the lens frame 67 relative to the fixed frame 61 is detected by the aforementioned Hall element. The output signals of the gyroscope sensor and the Hall element are connected to a control unit (not shown). The control unit is configured, for example, to acquire a required amount of movement of the lens frame 67 in response to the vibration, which is generated through feedback control, corresponding to the amount of movement of the fixed frame 61, and to generate signals of the current amounts of each coil corresponding to this movement, and output these signals to the aforementioned power supply.

[0199] [Controlling the position of the lens frame corresponding to the position of the camera]

[0200] (1) Lens 621 is only subject to gravity

[0201] Figure 17This schematically illustrates the position of the lens 621 when it is subjected only to gravity and the thrust generated by each actuator. The force fcenter acting on the lens 621 at this time is expressed by the following formula. Figure 17 In the image, CP0 represents the center position of the lens in a balanced state (a state subject only to gravity).

[0202] [Formula 1]

[0203] f center = f1(f0,N)+f2(0,N)+f3(0,N)

[0204] In the formula, f1 represents the force exerted by the support device on the lens 621 in the vertical direction. f2 represents the force exerted by the actuator of one voice coil motor (e.g., a combination of magnet 612 and coil 624) in the direction that moves the lens 621, for example, a force orthogonal to an axis at 120° relative to the vertical direction. f3 represents the force exerted by the actuator of the other voice coil motor (e.g., a combination of magnet 613 and coil 623) in the direction that moves the lens 621, for example, a force orthogonal to an axis at 240° relative to the vertical direction. Additionally, f0 represents the static attraction in the support device (the magnetic force generated by permanent magnets 626 and 627).

[0205] Furthermore, when the current value for supporting the lens 621 in the vertical direction is set as if1, the current value for generating a force in a direction orthogonal to the axis at 120° relative to the vertical direction by the actuator of one voice coil motor is set as if2, and the current value for generating a force in a direction orthogonal to the axis at 240° relative to the vertical direction by the actuator of the other voice coil motor is set as if3, the aforementioned current values ​​if1, if2, and if3 are all approximately 0 (A). This is because the passive static force f0 generated by the permanent magnets 626 and 627 is balanced by the gravity acting on the lens 621.

[0206] In this way, when the lens 621 in the anti-vibration lens drive device 6 is only subjected to gravity, the power consumption for maintaining the lens 621 in the central position is approximately zero. This control algorithm is also called the "zero-power algorithm".

[0207] The gyroscope sensor detects vibrations caused by hand tremors or other reasons and sends the detection signal to the control unit. The control unit generates a control signal based on the gyroscope sensor's detection signal and the current position of the lens 621, and supplies it as current to each actuator (coil). As a result, the actuators move the lens frame 67 relative to the fixed frame 61 to counteract the effects of the aforementioned vibrations. The control of changing the lens position based on vibration will be explained below.

[0208] (2) The case where vibration occurred in the +XY direction.

[0209] When the gyroscope sensor detects vibration in the +XY direction, the control unit outputs a current value that moves the lens frame 67 in the direction that cancels it out (-XY direction). Figure 18 The diagram schematically illustrates the thrust generated by each actuator when the lens 621 is moved in the -XY direction. Furthermore, in Figures 18 to 20 In the middle, regarding structural elements and Figure 17 The same diagram is shown, but its markings are omitted. The force fradial that moves lens 621 in the -XY direction is expressed by the following formula. Figure 18 In the middle, CP1 represents the center position of the lens after control.

[0210] [Number 2]

[0211] f radial = f1(N) - f2(N) - f3(N)

[0212] The current value if1 at this time is generated by energizing the coil, creating a magnetic force that repels the permanent magnet in the same direction, thus adding a downward force equivalent to the difference between f1 and f0. Furthermore, the current values ​​if2 and if3 at this time are significantly smaller than conventionally (when all three actuators are voice coil motor actuators). This is because, due to the influence of the magnetic force of the permanent magnets 626 and 627 in the vertical direction and the aforementioned control based on the zero-power algorithm, in each actuator, only the current corresponding to the amount of movement of the lens relative to its position in the equilibrium state during control is required. Moreover, the direction of the force can be adjusted by changing the direction of the current supplied to the coil.

[0213] (3) Vibration occurs in the -Y direction

[0214] When the gyroscope sensor detects vibration in the -Y direction, the control unit outputs a current value that moves the lens frame 67 in the direction that cancels it out (+Y direction). Figure 19 The diagram schematically illustrates the thrust generated by each actuator when the lens 621 moves in the +Y direction. The force (fvertical) acting on the lens 621 in the vertical direction when it moves in the +Y direction is expressed by the following formula.

[0215] [Number 3]

[0216] f vertical = f1(N) + f2(0,N) + f3(0,N)

[0217] At this point, the current value if1 is generated by energizing the coil, producing a magnetic force in the same direction as the permanent magnet's magnetic force, thus adding an upward force equivalent to the difference between f1 and f0. Furthermore, if2 and if3 are approximately zero at this point. This is because, due to the influence of the magnetic force of the permanent magnets 626 and 627 in the vertical direction, and the aforementioned control based on the zero-power algorithm, in any actuator, only the current corresponding to the amount of movement in the +Y direction relative to the lens position in the equilibrium state is needed.

[0218] (4) Vibration occurred in the -X direction

[0219] When the gyroscope sensor detects vibration in the -X direction, the control unit outputs a current value that moves the lens frame 67 in the direction that cancels it out (+X direction). Figure 20 This schematically illustrates the thrust generated by each actuator when the lens 621 moves in the +X direction. The horizontal force fhorizontal acting on the lens 621 at this time is expressed by the following formula.

[0220] [Number 4]

[0221] f horizontal = f1(f0,N)+f2(N)-f3(N)

[0222] At this point, the current value if1 is approximately 0, and if2 and if3 are significantly smaller than the previous conventional current values. This is because, through the influence of the magnetic force of the permanent magnets 626 and 627 in the vertical direction and the control based on the zero-power algorithm mentioned above, in any voice coil motor actuator, only the amount of current corresponding to the lateral movement of the lens relative to the position in the equilibrium state is required.

[0223] [Effects]

[0224] In camera devices, vibrations from various sources can sometimes cause changes in the optical axis of the camera optical system, resulting in blurred images. To capture high-resolution, high-quality, sharp images, mechanisms to suppress the effects of such vibrations are needed. Image-stabilized lenses are indispensable optical components in optical image stabilization systems used to correct vibrations. The image-stabilized lens drive device in this embodiment is applicable to image-stabilized lenses in such camera optical systems.

[0225] As actuators for driving the lens, voice coil motor actuators are conventionally known. However, in conventional image-stabilized lenses consisting solely of voice coil motor actuators, these actuators are always driven regardless of their position to control the lens at the desired location. In the image-stabilized lens driving device of this embodiment, the magnetic force generated by a permanent magnet to counteract gravity is used for lens position control. Therefore, compared to conventional image-stabilized lenses consisting solely of voice coil motor actuators, the image-stabilized lens driving device of this embodiment exhibits the same level of functionality, thereby saving power.

[0226] [Implementation Method 10]

[0227] [structure]

[0228] Figure 21 and Figure 22 The structure of the support device according to this embodiment is schematically shown. The support device 100 has a first component 110 and a second component 120.

[0229] The first component 110 includes a core 111, a coil 112, and a permanent magnet 113. The core 111 is a component with a generally E-shaped shape when viewed from the front, and is made of a magnetic material such as iron. The core 111 has: a main body portion 114 extending in a direction intersecting the vertical direction (e.g., the Y direction in the figure) (e.g., the X direction in the figure); two protrusions 115, 115 protruding from the ends of the main body portion 114 toward the second component 120; and a protrusion 116 protruding from the center of the main body portion 114 toward the second component 120.

[0230] The coil 112 is made of wire wound around the protrusion 116.

[0231] The permanent magnet 113 is a plate-shaped permanent magnet fixed to the front end of each of the protrusions 115. The magnetic pole of the permanent magnet 113 on the side near the second component 120 is the N pole, and the magnetic pole on the side near the protrusion 115 is the S pole. In this way, the core 111 is configured such that the magnetic fields in the protrusions 115 at both ends of the main body 114 are in the same direction.

[0232] The permanent magnets 113 and 113 have the same cross-sectional shape and area in the Y direction, as well as the same magnetic force. Furthermore, the protrusions 115 and 115 have the same cross-sectional shape and area as the permanent magnets 113 and 113. For example, both the permanent magnet 113 and the protrusions 115 have the same rectangular cross-sectional shape. Additionally, both protrusions 115 and 115 have a specific (rectangular) cross-sectional shape in the Y direction and the same length. Moreover, the length of the protrusion is the dimension of the portion in the Y direction that is lower than the main body 114.

[0233] The protrusion 116 has a larger cross-sectional shape and area than the protrusion 115. Furthermore, the length of the protrusion 116 is the same as the sum of the length of the protrusion 115 and the thickness of the permanent magnet 113 at its front end. The protrusion 116, or the protrusion 115 and the permanent magnet 113, constitute a portion of the magnetic circuit in the Y direction that forms a magnetic field in the core 111. The sum of the length of the protrusion and the thickness of the permanent magnet is also referred to as the "length of the magnetic circuit" or "magnetic circuit length". That is, in the first component 110, the lengths of the magnetic circuits including the respective protrusions 115, 115, and 116 are all the same.

[0234] The second component 120 is a plate-shaped magnetic material component with a dumbbell-shaped planar shape and made of a magnetic material such as iron. Through holes are formed at both ends of the second component 120. The second component 120 is configured to have a specific gap (e.g., approximately 0.2 mm) with the first component 110. That is, the distances from the front ends of the permanent magnets 113 and 116 to the surface of the second component 120 are all the same.

[0235] [Features Summary]

[0236] Typically, the first component 110 is fixed to the fixed part, while the second component 120 is fixed to the movable part that can move in the X direction. Since the distances from the front ends of the permanent magnets 113, 113 and the protrusion 116 to the surface of the second component 120 are all the same, the distances from the front ends of the permanent magnets 113, 113 and the protrusion 116 to the surface of the second component 120 are fixed regardless of the position of the second component 120 in the X direction.

[0237] Furthermore, since the protrusion 115 and the permanent magnet 113 have the same cross-sectional area and cross-sectional shape, and the permanent magnets 113 and 113 have the same magnetism, the magnetic flux density of each of the protrusions 115 and 115 is substantially the same regardless of the position of the second component 120 in the X direction.

[0238] Furthermore, in the support device 100, a magnetic field is formed through the second component 120, the protrusion 116, the main body 114, and the protrusion 115 via each permanent magnet 113. Since the cross-sectional area of ​​the protrusion 116 is larger than that of the protrusion 115, the magnetic flux density in each of the protrusions 115, 115, and 116 can be made approximately uniform.

[0239] Due to the characteristics resulting from such structural features, the support device 100 can exhibit various superior characteristics compared to the support device of the above-described embodiment, as described below.

[0240] [Attraction]

[0241] The second component 120 is pulled toward the first component 110 by the magnetic force of the permanent magnet 113. The force (also called the "attraction force") that attracts the second component 120 toward the first component 110 is theoretically fixed. In practice, however, the effect of the magnetic force of the permanent magnet 113 on the second component 120 varies as the second component 120 moves in the X direction. Figure 23 This illustrates an example of the attractive force exerted on the second component 120 when it is moved 2 mm in the X direction within the support device 100.

[0242] In the support device 100, at the front ends of the protrusions 115, 115 of the core 111, permanent magnets 113, 113 with the same magnetic properties are arranged with the same gap size relative to the second component 120. Therefore, as Figure 23 As shown, the difference ΔF between the maximum and minimum attractive forces is relatively small, at 0.21 N. This attractive force value can be approximately 0.4 times the ΔF of the support device of the structure described in Embodiment 1 (also referred to as the "support device of Embodiment 1 type"). In this way, the support device 100 can exhibit a substantially uniform attractive force regardless of the position of the second component 120 in the X direction, compared to the support device of the embodiment described above. This shows that a stable attractive force of the permanent magnet 113 can be obtained regardless of the position of the second component 120 in the X direction, which is suitable from the viewpoint of further improving the stability of the equilibrium state obtained by the control based on the zero-power algorithm described above.

[0243] [Dynamic force in the X direction]

[0244] On the other hand, the force (attraction force) generated in coil 112 that attracts the second component 120 depends on the direction of the current flowing in coil 112. Generally speaking, if the magnetic flux generated through coil 112 is the same as the magnetic flux generated through permanent magnets 113, the attraction force increases, and conversely, if the two magnetic fluxes are opposite to each other, the attraction force decreases.

[0245] Figures 24 to 26 This section describes an example of the magnitude of the attractive force experienced by the second component 120 when it moves 2 mm relative to the first component 110 in the X direction.

[0246] Figure 24This illustrates an example of the attractive force when no current flows through coil 112. In this case, only permanent magnets 113 contribute to the attractive force, thus the attractive force remains approximately constant. Furthermore, in the support device 100, the second component 120 is constructed solely of magnetic material (achieving weight reduction). Moreover, since the permanent magnets 113 at both ends are aligned in the same Y-direction with the central protrusion 116, the gap between the first component 110 and the second component 120 decreases regardless of the thickness of the permanent magnet 113. Furthermore, the positions of the permanent magnets 113 and 113 and coil 112 are fixed regardless of the movement of the second component 120, so the permanent magnets 113 and coil 112 do not overlap in the Y-direction with the movement of the second component 120. Therefore, the generation of eddy currents in and around the protrusion 116 due to the overlap of the permanent magnets 113 and coil 112 in the Y-direction is suppressed, and the reduction in magnetic excitation force caused by these eddy currents is also suppressed. For these reasons, the attractive force of the support device 100 can be increased by 53% compared with the support device of the above-described embodiment 1.

[0247] Figure 25 This illustrates an example of the attractive force when a positive current of 0.1A flows through coil 112. When a positive current flows through coil 112, the magnetic flux generated by coil 112 and the magnetic flux generated by permanent magnet 113 are in opposite directions. Therefore, the attractive force decreases in both the support device 100 and the support device of Embodiment 1. In this case, the attractive force of support device 100 can be increased by approximately 26% compared to the support device of Embodiment 1 described above.

[0248] Figure 26 This illustrates an example of the attractive force when a negative current of 0.1A flows through coil 112. When a negative current flows through coil 112, the direction of the magnetic flux generated by coil 112 is the same as the direction of the magnetic flux generated by permanent magnet 113. Therefore, the attractive force increases in both the support device 100 and the support device of Embodiment 1. The support device 100 is configured such that the gap between the protrusion 116 and the second component 120 and the gap between permanent magnet 113 and the second component 120 are the same size. As a result, the magnetic properties of the electromagnet generated by coil 112 are more effectively manifested as the attractive force of the support device 100, increasing by 87% compared to the support device of Embodiment 1 described above.

[0249] From the viewpoint of precisely controlling the position of the movable part installed on the second component 120, the attractive force when supplying current to the coil 112 is important. The support device 100 is independent of the presence or absence and direction of current, and can exhibit a greater attractive force than the support device of Embodiment 1. Compared with the support device of Embodiment 1, it is more suitable from the viewpoint of precisely controlling the position of the movable part.

[0250] [Dynamic force in the Y direction]

[0251] If the distance between the first component 110 and the second component 120 in the Y direction increases, the attractive force shows a significant tendency to decrease. Figures 27 to 29 This section describes an example of the magnitude of the attractive force exerted on the second component 120 when it is moved 2 mm relative to the first component 110 in the Y direction.

[0252] Figure 27 This illustrates an example of the attractive force when no current flows through coil 112. Figure 28 This illustrates an example of the attractive force when a positive current of 0.1A flows through coil 112. Additionally, Figure 29 This illustrates an example of the attractive force when a negative current of 0.1A flows through coil 112. In any case, the attractive force of the support device 100, compared to the support device of Embodiment 1 described above, increases with a gap (movement distance) of 0.5 mm or less. This demonstrates that the effect of the magnetic properties achieved by the structure of the support device 100 is significantly manifested in the Y direction within a range of 0.5 mm or less. Furthermore, if the gap in the Y direction is greater than 0.5 mm, the attractive force of the support device 100 is equivalent to that of the support device of Embodiment 1 described above.

[0253] By appropriately setting the size of the gap in the Y direction between the first component 110 and the second component 120 (setting it to be small), the support device 100 can exhibit a greater attractive force than the support device of Embodiment 1, and is more suitable from the viewpoint of precisely controlling the position of the heavier movable part compared to the support device of Embodiment 1.

[0254] [Alveolar force]

[0255] In support devices, uneven magnetic flux density or magnetic field inhomogeneity can sometimes cause uneven movement and other undesirable behaviors during the movement of a second component in the X direction. The magnetic force that causes such undesirable behaviors in the support device is also called "cogging force." Cogging force can be manifested by the magnitude or unevenness of the difference in attractive force.

[0256] Figure 30 This is a diagram illustrating an example of the cogging force in the support device 100. Figure 30 This illustrates an example of the attractive force generated when the second component 120 is moved 2 mm in the X direction. Although some irregularity was observed in the performance of the attractive force of the support device 100, the variation range of the attractive force is sufficiently small at about 0.2 N, and the variation period is also sufficiently short. In this way, the support device 100 exhibits a roughly uniform attractive force, which can substantially suppress the undesirable performance of the second component 120.

[0257] In contrast, in the support device of Embodiment 1, the greater the deviation between the protrusion in the first component and the position of the second component in the X direction, the more the influence of the permanent magnet changes, resulting in significant fluctuations in the attractive force over a long period. Such fluctuations in the attractive force are abruptly eliminated depending on the position of the permanent magnet in the X direction, sometimes causing the aforementioned undesirable performance in the support device. In the support device 100, the magnetic field distribution in the X direction is more uniform, and the migration of the second component between adjacent magnetic poles is smoother. Thus, the support device 100 is suitable from the viewpoint of further reducing uneven movement of the second component that causes cogging forces.

[0258] [Magnetic flux density]

[0259] The magnetic flux density in the second component in the X direction shows a symmetrical pattern based on the centerline of the protrusion 116 extending in the Y direction. Such a highly symmetrical pattern generally indicates the generation of an attractive force that is balanced under static conditions, and a minimum cogging force. On the other hand, if the symmetry of the pattern decreases, it indicates a decrease in the attractive force and an increase in the cogging force, which can sometimes adversely affect the smooth and stable operation of the support device.

[0260] Figure 31 and Figure 32 This section illustrates an example of the magnetic flux density distribution in the second component of the support device 100. The center line extending in the X direction of the second component 120 is the measurement position for the magnetic flux density. The length (measurement length) in the X direction at this measurement position is 20 mm. Figure 31 A pattern representing the magnetic flux density when the center of the second component in the X direction coincides with the center of the first component (the center of the protrusion 116) (position x = 0 mm). Figure 32 The diagram shows the magnetic flux density when the second component is moved further in the X direction (to the right relative to the paper in the figure) by 2 mm (position x = 2 mm). Each diagram shows high symmetry with respect to the central axis of the support device, and the other two diagrams are similar to each other.

[0261] In this way, in the support device 100, a uniform cross-sectional area and a uniform magnetic circuit length are ensured in each of the protrusions 115, enabling a uniform magnetic flux density to be achieved throughout the magnetic circuit of the support device 100. As a result, almost complete uniformity and symmetry of the magnetic flux density are achieved in the support device 100. Therefore, the support device 100 is suitable from the viewpoint of further improving the overall balance and stability.

[0262] [Magnetic flux leakage]

[0263] Magnetic flux leakage means that the magnetic flux deviates from the intended path of the magnetic circuit in the support device. The leaked magnetic flux does not contribute to generating a useful force in the support device. It is quantified by the following formula. In the formula, This means the total magnetic flux generated by the permanent magnet and the coil. This means the portion of the total magnetic flux that contributes to generating the attractive force.

[0264]

[0265] In addition, the magnetic efficiency η in the support device is expressed by the following formula.

[0266]

[0267] Figure 33 This illustrates an example of magnetic flux lines in the support device 100. In the support device 100, the geometry of the core 111 is configured to position the permanent magnet 113 at the front end of the protrusion 115, and the gap between the first component 110 and the second component 120 is fixed. Therefore, the magnetic efficiency η of the support device 100 can be 0.95 or higher. Regarding this, in the support device of Embodiment 1, magnetic flux leakage... Sometimes it exceeds 0.5. In this way, compared with the support device of Embodiment 1, the support device 100 suppresses the occurrence of wasteful magnetic flux that does not contribute to the generation of attractive force, and is suitable from the viewpoint of generating attractive force more effectively.

[0268] [Other Features]

[0269] Generally speaking, in order to move an object with a specific mass, as shown by Newton's second law, the greater the mass of the object, the greater the force required.

[0270] In the support device 100, the second component 120 can be constructed solely of a magnetic material component. In this way, the support device 100 is suitable from the viewpoint of achieving and promoting the lightweighting of the second component 120, which is the movable part. By minimizing the mass of the second component, which is the moving part, the force required to move the second component relative to acceleration is reduced. For example, the second component 120 of the support device 100 can be 8% lighter than the second component of the support device of Embodiment 1. Therefore, the support device 100 is more suitable than the support device of Embodiment 1 from the viewpoints of accelerated response of the second component 120 on the movable side and energy-efficient movement of the second component 120. Thus, the support device 100 can be expected to achieve better results in high-speed camera systems or industrial applications where there are rapid vibration changes, by being suitable for faster and more accurate vibration compensation.

[0271] [Applicable Examples]

[0272] Figure 34 and Figure 35 The structure of the anti-vibration lens drive device equipped with the support device 100 of this embodiment is schematically shown. This anti-vibration lens drive device is configured the same as the anti-vibration lens drive device 6 of Embodiment 9, except that a first component 110 is provided to replace the first component 611 and a second component 120 is provided to replace the second component 622.

[0273] In this anti-vibration lens drive device, the zero-power algorithm-based control performed by the support device 100 enables labor-saving operation, and the coordinated operation of the support device 100 and the voice coil motor enables rapid and precise lens frame drive. Based on the above description, it can be determined that the anti-vibration lens drive device of this embodiment is superior to the anti-vibration lens drive device of the embodiments described above in terms of both rapid and precise drive and labor-saving operation.

[0274] [Variation Example]

[0275] Figure 36 This illustrates a variation of the support device in this embodiment. For example... Figure 36 As shown, the support device 200 has the same structure as the support device 100 described above, except that a permanent magnet 213 is also provided at the front end of the protrusion 216 that protrudes from the center of the main body 114.

[0276] The core 211 has a protrusion 216 extending from the center of the main body 114. The length of the protrusion 216 is the same as the length of the protrusion 115. A permanent magnet 213 is disposed at the front end of the protrusion 216. The permanent magnet 213 has the same thickness as the permanent magnet 113. That is, in the first component 210, the lengths of the magnetic circuits including the respective protrusions 115, 115, and 216 are all the same. The permanent magnet 213 has an N pole on the first component 210 side and an S pole on the second component 120 side. The gaps between the permanent magnets 113, 213 and the second component 120 are all of the same size, for example, 0.2 mm.

[0277] The support device 200 also has a permanent magnet 213 in the protrusion 216 at the center. As a result, the magnetic flux and magnetic force are increased compared to the support device 100. As a result, the support device 200 can achieve the same rapid, precise and smooth drive of the second component 120 as the support device 100, and can also exhibit higher output than the support device 100.

[0278] As support devices 100 and 200, the distance from the base end connected to the main body to the front end of the protrusion in the core is fixed. That is, in support device 100, the sum of the length of protrusion 115 and the thickness of permanent magnet 113 is the same as the length of protrusion 116; in support device 200, the sum of the length of protrusion 115 and the thickness of permanent magnet 113 is the same as the sum of the length of protrusion 216 and the thickness of permanent magnet 213. Both the protrusion and the permanent magnet are part of the magnetic circuit in the first component. Thus, in this embodiment, the protrusions of the support devices all have the same length of magnetic circuit. As a result, the gap between the first component and the second component becomes fixed, which further improves the effect obtained by increasing the attractive force and suppressing its variation, etc.

[0279] In this embodiment, the cross-sectional shape and area of ​​the permanent magnet 113 are the same as those of the protrusion 115. This structure is preferred, for example, from the viewpoint of achieving weight reduction of the first component and making the magnetic flux density in the protrusions 115 consistent. However, in this embodiment, the cross-sectional shape and size of the permanent magnet 113 and the protrusion 115 may also be different, within the range where the magnetic flux density can be made equal to achieve this effect. For example, the cross-sectional shape of the protrusion 115 may also be larger than that of the permanent magnet 113.

[0280] Furthermore, in this embodiment, permanent magnets 113, 113 having substantially the same magnetic properties are used from the viewpoint of easy selection of permanent magnets and control of dimensions in the first component. However, in this embodiment, the magnetic properties of permanent magnets 113, 113 may differ from each other within the range that allows the effects of this embodiment to be achieved. In this case, the dimensions (cross-sectional shape, etc.) of the protrusions of the permanent magnets may be appropriately changed according to the magnetic properties of the permanent magnets.

[0281] [Other Implementation Methods]

[0282] The support device described in this embodiment is applicable to various uses as described above, and its applicability is not limited to the embodiments described above. For example, in this invention, coils can also be wound at each of the protrusions at both ends of the generally E-shaped or generally C-shaped core in the same manner as in Embodiment 4. Arranging coils at each of the protrusions in this way, compared to having a single coil between the protrusions, further increases the thrust generated by the coils, makes it easier to manufacture the coils, further increases the movable distance (stroke) in the opposing directions of the first and second components, and is also more advantageous from the viewpoint of miniaturizing the support device.

[0283] Furthermore, in the aforementioned anti-vibration device 4 for the surveillance camera, the surveillance camera 93 can also be a zoom lens. A zoom lens has multiple lenses, and several lenses move as a group. Therefore, the axial drive of the zoom lens requires a sufficiently large thrust. The support device according to the embodiments of the present invention, applicable to such a zoom lens, can be configured such that when the lens group in the zoom lens moves in the optical axis direction, the support device supports the lens group in the vertical direction. With this configuration, by energizing the coil of the second component, the lens group can be lifted to a certain extent in the vertical direction, reducing the power consumption for moving the lens group in the optical axis direction. It is also suitable from the viewpoint of achieving smoother movement of the lens group in the optical axis direction.

[0284] 〔Summarize〕

[0285] The first aspect of the present invention is a support device (20) comprising: a first component (21) disposed on a fixed portion; and a second component (22) disposed on a movable portion capable of moving relative to the fixed portion at least in the vertical direction, and disposed below the first component in a non-contact manner opposite to the first component. One of the first and second components includes a permanent magnet (28) that forms a magnetic field that attracts the first and second components to each other, and one or the other of the first and second components includes a coil (24) that forms a magnetic field that attracts or repels the first and second components by energizing them. According to the first aspect of the present invention, a specific component can be supported in a specific position, and a support device with good versatility and excellent energy saving can be realized.

[0286] In the second aspect of the invention, in the first aspect, one of the first and second components includes a core (23) and a coil, and the other of the first and second components includes a magnetic material component (27) and a permanent magnet. The core has a main body (25) extending in a direction intersecting the vertical direction, and protrusions (26) protruding from both ends and the center of the main body towards the other side of the first and second components, respectively. The coil is composed of wire wound around the protrusion in the center of the main body. Two permanent magnets are disposed on the magnetic material component opposite to the protrusions at both ends of the main body, and each permanent magnet has an N pole on the protrusion side and an S pole on the magnetic material component side. The second aspect is more effective from the viewpoint of supporting a heavier object at a specific position (height) and also in achieving vibration isolation.

[0287] In the third aspect of the present invention, in the first aspect, one of the first and second components includes: a permanent magnet extending in a direction intersecting the vertical direction; protrusions extending from both ends of the permanent magnet toward the other side of the first and second components, respectively; and a coil disposed between or around the protrusions. The other of the first and second components is made of a magnetic material component. The third aspect is more effective from the perspectives of achieving smooth and precise vibration control, reducing the movable distance between the first and second components, and suppressing magnetic flux leakage.

[0288] In the fourth aspect of the present invention, the coil is composed of a wire wound around an axis in the vertical direction and is disposed between the protrusions in the first component. The fourth aspect is more effective from the perspectives of achieving smooth and precise vibration control, reducing the movable distance between the first and second components, and suppressing magnetic flux leakage.

[0289] In the fifth aspect of the present invention, compared to the third aspect, two coils are arranged, each coil consisting of a wire wound around the protrusion of the first component. Compared to arranging a single coil between the core or the yoke, the fifth aspect increases the thrust generated by the coil and also facilitates coil weight reduction. Therefore, the fifth aspect is more effective from the viewpoints of further increasing the movable distance between the first and second components and assembling into a smaller device.

[0290] In the sixth aspect of the present invention, in the first aspect, one of the first and second components includes a core and a coil, and the other of the first and second components includes a magnetic material component and a permanent magnet. The core has a main body extending in a direction intersecting the vertical direction, and protrusions extending from both ends of the main body toward the other side of the first and second components, respectively. The coil is composed of a wire wound around an axis in the vertical direction and is disposed between the protrusions at both ends of the main body. The sixth aspect is more effective from the perspectives of smoothly and precisely achieving vibration control, reducing the movable distance between the first and second components, and suppressing magnetic flux leakage.

[0291] In the seventh embodiment of the present invention, compared with the sixth embodiment, two permanent magnets and two protruding portions at both ends of the main body are respectively disposed on a magnetic material component. One permanent magnet has an N pole on the protruding portion side and an S pole on the magnetic material component side, and the other permanent magnet has an S pole on the protruding portion side and an N pole on the magnetic material component side. The seventh embodiment is more effective from the viewpoints of smoothly and precisely achieving vibration control, reducing the movable distance between the first and second components, and suppressing magnetic flux leakage.

[0292] In the support device of the eighth embodiment of the present invention, in the first embodiment, the first component includes a core, a coil, and a permanent magnet; the second component includes a magnetic material component; the core has a main body extending in a direction intersecting the vertical direction, and protrusions protruding from both ends and the center of the main body toward the second component; the coil is composed of a wire wound around the protrusion in the center of the main body; and the permanent magnet is disposed at the front ends of the protrusions at both ends of the main body, with the magnetic field in the protrusions at both ends having the same direction. The eighth embodiment is more effective from the viewpoints of increasing the attractive force generated by the permanent magnet, reducing tooth groove size, and increasing output.

[0293] In the ninth aspect of the present invention, compared with the eighth aspect, the lengths of the various magnetic circuits, including the respective protrusions, are the same in the core. The ninth aspect is more effective from the viewpoint of suppressing changes in magnetic properties associated with the movement of the second component.

[0294] The tenth aspect of the present invention, in any one of the first to ninth aspects, further includes a limiting part (76) that supports the first or second component in the vertical direction and restricts the movement of the first or second component in the vertical direction to a specific distance. The tenth aspect is more effective from the viewpoint of preventing collision between the first and second components or from the viewpoint of mitigating the impact generated during the movement of the first or second component.

[0295] The eleventh aspect of the present invention is a vibration damping device (e.g., a vibration isolation table 1), comprising: a fixed part; a movable part capable of moving relative to the fixed part at least in the vertical direction; and a support device of any one of the first to tenth aspects, having a first component disposed on the fixed part and a second component disposed on the movable part, supporting the movable part on the fixed part. According to the eleventh aspect of the present invention, specific components can be supported in specific positions, thereby achieving a vibration damping device with good versatility and excellent energy saving.

[0296] The twelfth aspect of the present invention is a lens moving device (5) comprising: a guiding member (e.g., guide rods 511, 512) for guiding movement in a direction intersecting the vertical direction; a lens holding member (e.g., lens frame 57) for holding the lens, the movement in the direction intersecting the vertical direction being guided by the guiding member; a moving device (e.g., voice coil actuator 53) for moving the lens holding member in the direction guided by the guiding member; and a support device of any one of the first to tenth aspects, having a first component disposed on the guiding member and a second component disposed on the lens holding member. According to the twelfth aspect of the present invention, a moving lens holding member can be supported in a specific position, thereby realizing a lens moving device with good versatility and excellent power saving.

[0297] In the thirteenth aspect of the present invention, compared to the twelfth aspect, the permanent magnet in the support device extends along the moving direction of the lens holding member within the moving range of the lens holding member. The thirteenth aspect is more efficient from the viewpoint of achieving smooth and energy-saving position control at any position within the moving range of the lens holding member.

[0298] The fourteenth aspect of the present invention is a lens stabilization drive device (6), comprising: a fixed frame (61); a lens frame having a lens (521) and supported on the fixed frame in a manner capable of moving in a direction intersecting the optical axis of the lens; and two or more actuators for moving the lens frame relative to the fixed frame to a specific position in a direction intersecting the optical axis of the lens, wherein one of the actuators for moving the lens frame relative to the fixed frame in a vertical direction is a support device having a first component disposed on the fixed frame and a second component disposed on the lens frame, which is a support device of any one of the first to tenth aspects. According to the fourteenth aspect of the present invention, the lens frame can be supported in a specific position, and a lens stabilization drive device with good versatility and excellent power saving can be realized.

[0299] This invention is not limited to the embodiments described above, and various modifications can be made within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included within the technical scope of this invention.

[0300] According to the above-described embodiments, this invention enables the energy-saving, rapid, and precise adjustment of the position of various objects using permanent magnets and electromagnets. Furthermore, this adjustment can be achieved through a versatile structure. This invention, achieving these effects, is expected to contribute to the development and advancement of various technical fields requiring or demanding vibration damping, and for example, is expected to contribute to achieving Goal 9 of the United Nations Sustainable Development Goals (SDGs) on "Industry, Innovation and Infrastructure".

Claims

1. A support device having: a first member configured to a fixed portion; and a second member configured to a movable portion capable of moving at least in a vertical direction with respect to the fixed portion, and disposed in a non-contact manner opposite to the first member below the first member, one of the first member and the second member includes a permanent magnet that forms a magnetic field that attracts the first member and the second member to each other, one or the other of the first member and the second member includes a coil that forms a magnetic field that attracts or repels the first member and the second member to or from each other by energization.

2. The support device according to claim 1, one of the first member and the second member includes a core and the coil, the other of the first member and the second member includes a magnetic material member and the permanent magnet, the core has a main body portion extending in a direction intersecting the vertical direction, and a protruding portion protruding from both end portions and a central portion of the main body portion to the other side of the first member and the second member respectively, the coil is constituted by a wire wound around the protruding portions at the central portion of the main body portion, and the permanent magnet is disposed on the magnetic material member in opposition to the protruding portions of both end portions of the main body portion respectively, and either one of the permanent magnets has an N pole on the protruding portion side and an S pole on the magnetic material member side.

3. The support device according to claim 1, the permanent magnet extending in a direction intersecting the vertical direction, the protruding portions protruding from both ends of the permanent magnet to the other side of the first member and the second member respectively, and the coil disposed between or around the protruding portions, the other of the first member and the second member is constituted by a magnetic material member.

4. The support device according to claim 3, the coil is constituted by a wire wound with the vertical direction as an axis, and is disposed between the protruding portions in the first member.

5. The support device according to claim 3, the coil is disposed two, and each of the coils is constituted by a wire wound around each of the protruding portions of the first member.

6. The support device according to claim 1, one of the first member and the second member includes a core and the coil, the other of the first member and the second member includes a magnetic material member and the permanent magnet, the core has a main body portion extending in a direction intersecting the vertical direction, and a protruding portion protruding from both end portions of the main body portion to the other side of the first member and the second member respectively, the coil is constituted by a wire wound with the vertical direction as an axis, and is disposed between the protruding portions of both end portions of the main body portion.

7. The support device according to claim 6, ​ ​ ​ ​ ​ One of the first and second components comprises: ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ The permanent magnets are arranged on the magnetic material member in opposition to the protruding portions of both end portions of the main body portion, respectively, and the permanent magnet on one side has an N pole on the side of the protruding portion and an S pole on the side of the magnetic material member, and the permanent magnet on the other side has an S pole on the side of the protruding portion and an N pole on the side of the magnetic material member.

8. The support device according to claim 1, The first member includes a core, the coil, and the permanent magnets, The second member includes a magnetic material member, The core has a main body portion extending in a direction intersecting the up-down direction, and protruding portions protruding from both end portions and a central portion of the main body portion toward the second member, respectively, The coil is composed of a wire wound around the protruding portions of the central portion of the main body portion, The permanent magnets are arranged at the front ends of the protruding portions of both end portions of the main body portion, respectively, The directions of magnetic fields in the protruding portions of both end portions are the same.

9. The support device according to claim 8, In the core, the lengths of the respective magnetic circuits including the respective protruding portions are the same.

10. The support device according to claim 1, further comprising: a restriction portion that supports the first member or the second member in the up-down direction and restricts movement of the first member or the second member in the up-down direction within a certain distance.

11. A vibration isolation device having: a fixed portion; a movable portion that is movable relative to the fixed portion at least in the up-down direction; and the support device according to any one of claims 1 to 10, having the first member arranged on the fixed portion and the second member arranged on the movable portion, which supports the movable portion on the fixed portion.

12. A lens moving device having: a guide member that guides movement in a direction intersecting the up-down direction; a lens holding member that holds a lens, the movement in the direction intersecting the up-down direction being guided by the guide member; a moving device that moves the lens holding member in the direction guided by the guide member; and the support device according to any one of claims 1 to 10, having the first member arranged on the guide member and the second member arranged on the lens holding member.

13. The lens moving device according to claim 12, The permanent magnets in the support device extend in the moving direction of the lens holding member within the moving range of the lens holding member.

14. A vibration isolation lens driving device having: a fixed frame; a lens frame that holds a lens and is supported on the fixed frame in a manner so as to be movable in a direction intersecting the optical axis of the lens; and two or more actuators that move the lens frame relative to the fixed frame to a certain position in the direction intersecting the optical axis of the lens, The actuator that moves the lens frame relative to the fixed frame in the up-down direction among the actuators is the support device according to any one of claims 1 to 10, having the first member arranged on the fixed frame and the second member arranged on the lens frame.

Images