Transmission mechanism for arc-shaped and special-shaped coating

Abstract

The invention relates to a transmission mechanism for arc-shaped and special-shaped coating, and relates to the technical field of vacuum coating, the transmission mechanism comprises a rotary table, the axial direction of the rotary table is arranged in the vertical direction, the rotary table is coaxially connected with a rotation driving assembly, and the rotation driving assembly is used for driving the rotary table to rotate; the friction flange is coaxially arranged on the outer side of the rotating disc in a sleeving mode, a friction curved surface is arranged on the inner wall of the friction flange, and a lifting driving assembly is arranged on the friction flange and used for driving the friction flange to move in the vertical direction; one end of the transmission rod is located outside the friction flange and used for connecting a workpiece, the other end of the transmission rod is located in the friction flange and coaxially connected with a friction wheel, and the outer side wall of the friction wheel abuts against the friction curved surface; the connecting rod assembly is located in the friction flange, one end of the connecting rod assembly is rotationally connected with the transmission rod, and the other end of the connecting rod assembly is rotationally connected with the rotary disc. Revolution, rotation and inclination angle adjustment of the workpiece can be achieved, and therefore the coating uniformity of the arc-shaped special-shaped workpiece is improved.

Description

Technical Field

[0001] This application relates to the technical field of vacuum coating, and in particular to a transmission mechanism for arc-shaped irregular coating. Background Technology

[0002] In the field of vacuum coating technology, in order to form a film layer of uniform thickness on the surface of a workpiece, it is usually necessary to set a workpiece transmission mechanism in the vacuum chamber of the vacuum coating machine. The workpiece transmission mechanism can drive the workpiece to maintain a specific composite motion relative to the evaporation source during the coating process.

[0003] Currently, the evaporation process of most evaporation sources follows the cosine law, meaning that the emission flux of the evaporated substance is strongest in the direction normal to the surface of the evaporation source and decreases as the angle with the normal increases. Therefore, if the workpiece remains stationary during the coating process, it will result in uneven film thickness. To compensate for this unevenness, existing vacuum coating machines employ a workpiece drive mechanism that, after fixing the workpiece, not only makes it revolve around the evaporation source but also rotates it around its own axis. Through the time-averaging effect of this combined motion, the uniformity of the film thickness on the workpiece is improved.

[0004] Regarding the aforementioned technologies, existing workpiece transmission mechanisms are only used to drive the workpiece's revolution and rotation, resulting in a fixed motion trajectory of the workpiece within the vacuum coating machine. Consequently, when dealing with workpieces with complex curved or irregular arc surfaces, such as curved optical lenses, reflectors, hollow parts, or wings, existing workpiece transmission mechanisms cannot adjust the workpiece's tilt angle according to its surface shape during the coating process. This causes certain areas of the workpiece surface to remain in unfavorable positions relative to the evaporation source's incident angle, ultimately making it difficult to achieve uniform full-surface coating thickness on the workpiece. Summary of the Invention

[0005] This application provides a transmission mechanism for coating arc-shaped irregular shapes, the purpose of which is to adjust the tilt angle of the workpiece to adapt to the coating requirements of different areas of the arc-shaped irregular shape workpiece and improve the coating uniformity of the arc-shaped irregular shape workpiece.

[0006] This application provides a technical solution for a transmission mechanism used in arc-shaped coating processes, which employs the following approach: A transmission mechanism for arc-shaped coating includes a turntable, the turntable being axially arranged in a vertical direction, and a rotary drive assembly coaxially connected to the turntable for driving the turntable to rotate; a friction flange, the friction flange being coaxially sleeved on the outside of the turntable, the inner wall of the friction flange being provided with a friction curved surface, and a lifting drive assembly being provided on the friction flange for driving the friction flange to move in a vertical direction; a transmission rod, one end of the transmission rod being located outside the friction flange and used to connect to a workpiece, and the other end being located inside the friction flange and coaxially connected to a friction wheel, the outer wall of the friction wheel abutting against the friction curved surface; and a connecting rod assembly, the connecting rod assembly being located inside the friction flange, one end of the connecting rod assembly being rotatably connected to the transmission rod, and the other end being rotatably connected to the turntable, and the connecting rod assembly being used to press the friction wheel against the friction curved surface.

[0007] By adopting the above technical solution, the workpiece is coaxially mounted on the transmission rod, and then the rotary drive assembly drives the turntable to rotate. The turntable drives the transmission rod to rotate around the central axis of the turntable through the connecting rod assembly, which enables the workpiece to revolve.

[0008] During the revolution, the connecting rod assembly presses the friction wheel on the transmission rod against the friction surface of the friction flange. Since the friction flange is stationary during the revolution, relative motion occurs between the friction wheel and the friction surface. Under the action of friction, the friction wheel rolls along the friction surface, driving the transmission rod to rotate, thereby realizing the rotation of the workpiece.

[0009] Based on this, the lifting drive assembly can drive the friction flange to move vertically. When the friction flange rises or falls, since the friction wheel is always pressed against the friction surface by the connecting rod assembly, the contact point of the friction wheel is forced to move along the friction surface. Under the geometric constraints of the connecting rod assembly, the change in the position of the friction wheel is converted into a change in the tilt angle of the transmission rod. This enables the adjustment of the workpiece tilt angle.

[0010] Therefore, by controlling the lifting height of the friction flange, the tilt angle of the workpiece can be dynamically adjusted online while the workpiece revolves and rotates, so as to adapt to the coating requirements of different areas of the arc-shaped workpiece and ensure the uniformity of coating on the complex curved surface of the workpiece.

[0011] Optionally, the turntable is provided with a counterweight, and the counterweight and the connecting rod assembly are arranged at corresponding radial intervals along the turntable, with the central axis of the turntable located between the counterweight and the connecting rod assembly.

[0012] By adopting the above technical solution, since the mass of the transmission rod, connecting rod assembly, and workpiece is not uniformly distributed on the turntable, an eccentric load will be formed on the turntable. At this time, the counterweight generates a balancing torque through its mass relative to the turntable, thereby offsetting or partially offsetting the inertial force generated by the eccentric load during high-speed rotation, ensuring smooth turntable operation, and reducing mechanism vibration and noise.

[0013] Optionally, the linkage assembly includes a first linkage and an elastic linkage. One end of the first linkage and the elastic linkage are rotatably connected to the transmission rod, and the other end is rotatably connected to the turntable. The elastic linkage is used to apply elastic force to the transmission rod so that the outer wall of the friction wheel abuts against the friction surface.

[0014] By adopting the above technical solution, the linkage assembly utilizes the combined design of a first link and an elastic link. The first link, acting as the primary rigid support and motion guide, stably transmits the rotational motion of the turntable and guides the angular trajectory of the transmission rod during lifting and lowering. The elastic link, on the other hand, applies elastic force to ensure that the friction wheel remains pressed against the friction surface, guaranteeing the reliable transmission of rotational friction. This combination of rigid support and elastic pressure ensures both the accuracy of motion transmission and the reliability of frictional rotation.

[0015] Optionally, the elastic connecting rod includes a telescopic rod and a sleeve. The sleeve is coaxially sleeved on the telescopic rod and is slidably connected to the telescopic rod along its own axial direction. A compression spring is coaxially disposed inside the sleeve. One end of the compression spring is connected to the telescopic rod, and the other end is connected to the sleeve. The end of the sleeve opposite to the telescopic rod is rotatably connected to the turntable, and the end of the telescopic rod opposite to the sleeve is rotatably connected to the transmission rod.

[0016] By adopting the above technical solution, the elastic connecting rod, through the structural design of the telescopic rod, sleeve, and compression spring, constitutes a spring telescopic structure. The compression spring is set to a compressed state, so that through the cooperation of the telescopic rod and sleeve, the elastic force of the compression spring can be converted into a continuous thrust applied to the transmission rod. This thrust can adaptively compensate for the changes in length requirements caused by the geometric position changes of the connecting rod assembly due to the lifting and lowering of the friction flange, ensuring that the friction wheel can be stably pressed against the friction surface regardless of the inclination angle of the transmission rod.

[0017] Optionally, the first connecting rod includes a first rod and a second rod, one end of the first rod is rotatably connected to the turntable, the other end of the first rod is rotatably connected to one end of the second rod, and the end of the second rod opposite to the first rod is rotatably connected to the transmission rod.

[0018] By adopting the above technical solution, the first connecting rod, through the structural design of the first and second rods, forms a two-stage hinge structure. Compared with a single rigid rod, this two-stage hinge structure increases the degree of freedom of movement. Thus, when the friction flange rises and falls, forcing the transmission rod to move, the hinge structure can adaptively change its configuration, enabling the transmission rod to smoothly perform complex tilt angle adjustments and avoid movement jamming.

[0019] Optionally, an adjusting seat is provided on the first rod, the adjusting seat is slidably connected to the first rod along the length direction of the first rod, and one end of the second rod is rotatably connected to the adjusting seat; a locking member is provided between the adjusting seat and the first rod, the locking member being used to lock the adjusting seat on the first rod.

[0020] By adopting the above technical solution, based on the cooperative design of the adjusting seat and the locking component, the position of the hinge point of the first rod and the second rod on the first rod becomes adjustable. This allows the effective total length of the first connecting rod to be changed during assembly or debugging. This adjustment function makes it easy to set the initial tilt angle of the transmission rod or its total stroke range during the lifting process to adapt to workpieces of different shapes or sizes, thereby improving the process adaptability of the transmission mechanism.

[0021] Optionally, the lifting drive assembly includes a lifting device and a lifting shaft. The lifting shaft is vertically arranged, with its lower end connected to the friction flange and its upper end connected to the lifting device. The lifting device is used to drive the lifting shaft to move in the vertical direction. The lifting device is used to be installed outside the vacuum coating machine. A corrugated pipe is sleeved on the outside of the lifting shaft. One end of the corrugated pipe is connected to the lifting device, and the other end is used to connect to the outer wall of the vacuum coating machine.

[0022] By adopting the above technical solution, the lifting drive assembly drives the lifting shaft to move through the lifting device, thereby realizing the lifting of the friction flange.

[0023] Based on this, since the transmission mechanism is usually located inside the vacuum coating machine, while the lifting device is installed on the outside, the lifting shaft needs to pass through the side wall of the vacuum chamber of the vacuum coating machine. At this time, the bellows, as a dynamic seal, is sleeved on the outside of the lifting shaft. It compensates for the displacement of the lifting shaft through its own elastic expansion and contraction, allowing the transmission of linear motion while strictly ensuring that the airtightness of the vacuum chamber of the vacuum coating machine is not compromised.

[0024] Optionally, a plurality of transmission rods and connecting rod assemblies are provided. The plurality of transmission rods are arranged sequentially at intervals along the circumference of the turntable. Each transmission rod and each connecting rod assembly is arranged in a one-to-one correspondence. One end of each connecting rod assembly is rotatably connected to the corresponding transmission rod, and the other end is rotatably connected to the turntable.

[0025] By adopting the above technical solution, several sets of transmission rods and corresponding connecting rod assemblies are set on the turntable along its circumference. This design enables the transmission mechanism to load multiple workpieces simultaneously for revolution, rotation and tilt angle adjustment, thereby greatly improving the workpiece loading capacity and production efficiency of a single coating.

[0026] Optionally, the friction flange includes a rigid outer ring and a functional inner ring, the rigid outer ring being sleeved on the outside of the functional inner ring, and the rigid outer ring being detachably connected to the functional inner ring; the lifting drive assembly is connected to the rigid outer ring, and the friction surface is disposed on the inside of the functional inner ring.

[0027] By adopting the above technical solution, in the structural design of the friction flange, the rigid outer ring serves as the main structural support and moving component, bearing the connection of the lifting drive assembly; the functional inner ring is specifically designed to support the friction surface. This satisfies the mechanical function of the friction flange.

[0028] Based on this, since the friction surface is the key working surface for achieving rotation and angle adjustment, it may wear down due to long-term friction, or require replacement with different contours depending on the process. Therefore, a detachable connection design is adopted between the functional inner ring and the rigid outer ring. When problems occur with the friction surface or it does not meet process requirements, a new functional inner ring can be replaced, allowing the friction flange to quickly return to operation. This reduces maintenance costs and improves process compatibility.

[0029] Optionally, a damping interlayer is provided between the inner wall of the rigid outer ring and the outer wall of the functional inner ring.

[0030] By adopting the above technical solution, since the friction between the friction wheel and the friction surface will generate high-frequency vibration during high-speed revolution and rotation, a damping interlayer is added between the rigid outer ring and the functional inner ring. This damping interlayer absorbs and dissipates the vibration energy, effectively isolates the transmission of vibration between the functional inner ring and the rigid outer ring, suppresses structural resonance, improves the smoothness of the transmission rod movement, and helps to improve the coating quality.

[0031] In summary, this application includes at least one of the following beneficial technical effects: 1. This application combines the workpiece's revolution and rotation with tilt angle adjustment through the synergistic action of the rotary drive assembly, lifting drive assembly, friction flange, and connecting rod assembly. This allows the transmission mechanism to dynamically adjust the angle of the workpiece facing the evaporation source during the coating process, based on the complex curved surface shape of the arc-shaped workpiece. This solves the problem of uneven film layer on the workpiece surface caused by a fixed incident angle in the prior art, thereby improving the coating uniformity of arc-shaped workpieces.

[0032] 2. This application employs a structural design incorporating a counterweight, a damping interlayer, and a connecting rod assembly. The counterweight balances the eccentric load during turntable rotation; the connecting rod assembly ensures that the friction wheel continuously presses against the friction surface at various inclination angles, guaranteeing the reliability of rotation; and the damping interlayer absorbs the high-frequency vibrations caused by friction. The combination of these three elements improves the smoothness and stability of the transmission mechanism under complex motions, thereby enhancing the coating quality of the workpiece surface.

[0033] 3. By setting up a combination design of several sets of transmission rods and several connecting rod assemblies, as well as the structural design of the friction flange, this application enables the transmission mechanism to not only improve production efficiency by loading multiple workpieces, but also to adapt to different processes by changing the functional inner ring, thereby improving the process flexibility, maintainability and economy of the vacuum coating machine using the transmission mechanism of this application. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the overall structure of the transmission mechanism of Embodiment 1 of this application installed on a vacuum coating machine.

[0035] Figure 2 This is a schematic diagram of the overall structure of the transmission mechanism in Embodiment 1 of this application.

[0036] Figure 3 This is a schematic diagram of the overall structure of the turntable, connecting rod assembly, transmission rod, and friction flange in Embodiment 1 of this application.

[0037] Figure 4 This is a partial cross-sectional view of the elastic link of Embodiment 1 of this application.

[0038] Figure 5 This is a schematic diagram of the overall structure of the friction flange, lifting drive assembly, and lifting guide assembly of Embodiment 1 of this application.

[0039] Figure 6 This is a schematic diagram of the overall structure of the transmission mechanism in Embodiment 2 of this application.

[0040] Figure 7 This is a partial structural schematic diagram of the first link in Embodiment 2 of this application.

[0041] Figure 8 This is a partial cross-sectional view of the elastic link in Embodiment 2 of this application.

[0042] Figure 9 This is a schematic diagram of the overall structure of the friction flange in Embodiment 3 of this application.

[0043] In the diagram, 1. Turntable; 11. Counterweight; 2. Friction flange; 21. Friction surface; 22. Rigid outer ring; 221. Support ring; 23. Functional inner ring; 24. Damping interlayer; 25. Damping washer; 26. Mounting bolt; 3. Transmission rod; 31. Friction wheel; 4. Rotary drive assembly; 41. First motor; 42. Driving pulley; 43. Driven pulley; 44. Transmission belt; 45. Magnetohydrodynamic seal; 5. Lifting drive assembly; 51. Lifter; 52. Lifting shaft; 53. Bellows; 6. Connecting rod assembly; 61. First connecting rod; 611. First rod; 612. Second rod; 613. Hinge seat; 614. Adjusting seat; 6141. Clamping block; 6142. Slot; 615. Locking element; 6151. Locking bolt; 6152. Nut; 62. Elastic connecting rod; 621. Telescopic rod; 6211. Rigid rod; 6212. Telescopic tube; 622. Sleeve; 623. Sleeve seat; 624. Compression spring; 63. Mounting seat; 7. Lifting guide assembly; 71. Guide column; 72. Linear bearing; 100. Vacuum coating machine. Detailed Implementation

[0044] The following is in conjunction with the appendix Figure 1 -Appendix Figure 9 This application will be described in further detail below.

[0045] Example 1: A transmission mechanism for arc-shaped irregular coating, referring to... Figure 1 The transmission mechanism is installed on the vacuum coating machine 100.

[0046] Reference Figure 1 and Figure 2 The transmission mechanism includes a turntable 1, which is axially arranged vertically. A rotary drive assembly 4 is coaxially connected to the upper side of the turntable 1. A friction flange 2 is coaxially sleeved on the outer side of the turntable 1, with the turntable 1 located above the friction flange 2. A friction curved surface 21 is provided on the inner wall of the friction flange 2, and a lifting drive assembly 5 is provided on the friction flange 2. A transmission rod 3 is provided between the friction flange 2 and the turntable 1. The transmission rod 3 is inclined vertically, with its upper end located between the friction flange 2 and the turntable 1, and its lower end extending downwards inclined towards the central axis of the turntable 1. A friction wheel 31 is coaxially connected to the upper end of the transmission rod 3. The friction wheel 31 is located inside the friction flange 2, and its outer wall abuts against the friction curved surface 21. A connecting rod assembly 6 is provided between the transmission rod 3 and the turntable 1. One end of the connecting rod assembly 6 is rotatably connected to the upper end of the transmission rod 3, and the other end is rotatably connected to the turntable 1.

[0047] Under the structural design of the above transmission mechanism, after the workpiece is coaxially installed at the lower end of the transmission rod 3, the rotary drive assembly 4 can drive the turntable 1 to rotate around its own central axis. Thus, under the action of the connecting rod assembly 6, the transmission rod 3 rotates synchronously around the turntable 1, thereby realizing the revolution of the workpiece.

[0048] During the rotation of the transmission rod 3 around the turntable 1, the friction wheel 31 moves synchronously with the transmission rod 3, while the friction surface 21 remains relatively stationary. This causes relative motion between the friction wheel 31 and the friction surface 21, resulting in the friction wheel 31 rolling along the friction surface 21 under the action of friction. This causes the friction wheel 31 to rotate, which in turn causes the friction wheel 31 to drive the transmission rod 3 to rotate, thus realizing the rotation of the workpiece.

[0049] Based on this, when it is necessary to adjust the tilt angle of the workpiece online, i.e., when it is necessary to adjust the tilt angle of the transmission rod 3, the lifting drive assembly 5 is activated, driving the friction flange 2 to rise or fall vertically. Since the inner wall of the friction flange 2 is designed as a friction surface 21 with a specific contour, the friction wheel 31, under its own weight and the action of the connecting rod assembly 6, will always be in contact with and press firmly against the friction surface 21. Therefore, when the friction flange 2 rises or falls, the contact point of the friction wheel 31 is forced to move along a specific trajectory of the friction surface 21. Under the geometric constraints of the connecting rod assembly 6, the change in position of the friction wheel 31 on the friction surface 21 is precisely translated into a change in the tilt angle of the transmission rod 3. By controlling the lifting height of the friction flange 2, the angle of the workpiece facing the evaporation source can be dynamically adjusted to adapt to the coating requirements of different areas of the arc-shaped workpiece, thereby ensuring the uniformity of the coating on complex curved surfaces.

[0050] Reference Figure 1 and Figure 2 In this embodiment, the turntable 1, friction flange 2, transmission rod 3, friction wheel 31 and connecting rod assembly 6 are all located in the vacuum chamber of the vacuum coating machine 100, and the rotation drive assembly 4 and lifting drive assembly 5 are both installed on the outside of the vacuum coating machine 100.

[0051] Reference Figure 1 and Figure 2 The rotary drive assembly 4 includes a first motor 41, a driving pulley 42, a driven pulley 43, a transmission belt 44, and a magnetic fluid seal 45. The magnetic fluid seal 45 is axially arranged in the vertical direction and is vertically installed on the outside of the vacuum coating machine 100. The lower end of the transmission shaft inside the magnetic fluid seal 45 extends into the vacuum coating machine 100 and is coaxially connected to the turntable 1. The upper end of the transmission shaft inside the magnetic fluid seal 45 is coaxially connected to the driven pulley 43. The first motor 41 is installed on the vacuum coating machine 100, and the drive end of the first motor 41 is coaxially connected to the driving pulley 42. The transmission belt 44 is sleeved on the outside of the driving pulley 42 and the driven pulley 43, and both the driving pulley 42 and the driven pulley 43 are connected to the transmission belt 44 for transmission.

[0052] When the first motor 41 starts, it transmits power to the driven pulley 43 through the driving pulley 42 and the transmission belt 44. The driven pulley 43 drives the transmission shaft inside the magnetic fluid seal 45 to rotate. Under the premise of ensuring the sealing of the vacuum coating machine 100, the magnetic fluid seal 45 transmits the rotational motion to the turntable 1 inside the vacuum coating machine 100, so that the turntable 1 rotates stably, thereby driving the workpiece to revolve.

[0053] Reference Figure 2 and Figure 3 A counterweight 11 is provided on the turntable 1. The counterweight 11 is installed on the upper side of the turntable 1. The counterweight 11 and the connecting rod assembly 6 are arranged radially at intervals along the turntable 1, and the central axis of the turntable 1 is located between the connecting rod assembly 6 and the counterweight 11.

[0054] The main function of the counterweight 11 is for dynamic balance adjustment. Since the mass of the connecting rod assembly 6, the transmission rod 3 and the end workpiece are not evenly distributed on the turntable 1, an eccentric load will be generated during rotation. The counterweight 11 generates a balancing torque through its mass relative to the turntable 1, thereby counteracting the inertial force generated by the entire rotating system when rotating at high speed, ensuring the smooth operation of the turntable 1 and reducing vibration and noise.

[0055] Reference Figure 2 and Figure 3 The linkage assembly 6 includes a first linkage 61 and an elastic linkage 62. Both the first linkage 61 and the elastic linkage 62 are inclined in the vertical direction. The upper end of the first linkage 61 is rotatably connected to the outer wall of the turntable 1, and the lower end extends downwards in an inclined direction away from the central axis of the turntable 1 to be rotatably connected to the transmission rod 3. The first linkage 61 is connected to the upper end of the transmission rod 3. The elastic linkage 62 is located below the first linkage 61 in the vertical direction. The upper end of the elastic linkage 62 is rotatably connected to the lower side of the turntable 1, and the lower end extends downwards in an inclined direction away from the central axis of the turntable 1 to be rotatably connected to the transmission rod 3. The friction wheel 31 is located between the elastic linkage 62 and the first linkage 61 along its own axial direction.

[0056] The linkage assembly 6, through the parallel design of the first link 61 and the elastic link 62, jointly achieves motion constraint and force transmission for the transmission rod 3. The first link 61, as the main rigid support and motion guide, stably transmits the revolution of the turntable 1 and guides the angular trajectory of the transmission rod 3 during lifting and lowering. The elastic link 62, on the other hand, provides auxiliary support and applies preload, ensuring that the friction wheel 31 remains pressed against the friction surface 21.

[0057] Reference Figure 3In this embodiment, the first connecting rod 61 includes a first rod 611, a second rod 612, and a hinge seat 613. One end of the first rod 611 is rotatably connected to the outer wall of the turntable 1, and the other end is rotatably connected to one end of the second rod 612. The end of the second rod 612 away from the first rod 611 along its own length direction is rotatably connected to the hinge seat 613. The hinge seat 613 is sleeved on the upper end of the transmission rod 3, and the transmission rod 3 is rotatably connected to the hinge seat 613.

[0058] The first connecting rod 61, through the coordinated design of the first rod 611, the second rod 612, and the hinge seat 613, forms a multi-degree-of-freedom hinge structure. This design allows for a variable geometric relationship between the upper end of the transmission rod 3 and the connection point of the turntable 1. When the friction flange 2 rises or falls, forcing the upper end of the transmission rod 3 to move along the friction surface 21, the hinge structure can adaptively change its configuration, thereby enabling the transmission rod 3 to smoothly perform complex tilt angle adjustments and avoid movement jamming.

[0059] Reference Figure 3 and Figure 4 In this embodiment, the elastic connecting rod 62 includes a telescopic rod 621, a sleeve 622, and a connecting seat 623. One end of the telescopic rod 621 is rotatably connected to the connecting seat 623, and the other end is coaxially inserted into the sleeve 622. The sleeve 622 is slidably connected to the telescopic rod 621 along its own axial direction. A compression spring 624 is coaxially disposed inside the sleeve 622. One end of the compression spring 624 is connected to the telescopic rod 621, and the other end is connected to the sleeve 622. The end of the sleeve 622 that is away from the telescopic rod 621 along its own axial direction is rotatably connected to the lower side of the turntable 1. The connecting seat 623 is sleeved on the outside of the transmission rod 3, and the connecting seat 623 is rotatably connected to the transmission rod 3.

[0060] The elastic connecting rod 62, through the coordinated design of the telescopic rod 621, sleeve 622, and socket 623, ensures that the compression spring 624 is always in a pre-compressed state. The telescopic rod 621 and socket 623 apply a continuous thrust towards the friction flange 2 to the transmission rod 3. This thrust ensures that the friction wheel 31 remains pressed firmly against the friction surface 21 of the friction flange 2. Regardless of the height of the friction flange 2 or the angle of inclination of the transmission rod 3, this elastic force compensates for mechanical clearances and positional changes, guaranteeing stable and sufficient friction between the friction wheel 31 and the friction surface 21. This is crucial for achieving reliable and uniform rotation of the workpiece.

[0061] Reference Figure 5 The friction surface 21 inside the friction flange 2 extends vertically upward on the upper side and extends in an arc towards its own central axis on the lower side. Furthermore, the opening diameter at the upper end of the friction flange 2 is larger than the opening diameter at the lower end.

[0062] The friction surface 21 is designed with a specific nonlinear profile, and the combination of its upper vertical portion and lower arc portion defines the position of the friction wheel 31 at different vertical heights. When the friction flange 2 is raised or lowered, the friction wheel 31 rolls along this friction surface 21, and the position of the friction wheel 31 changes continuously. This change is then converted into a continuous change in the inclination angle of the transmission rod 3 by the constraint of the connecting rod assembly 6.

[0063] Reference Figure 5 The lifting drive assembly 5 includes a lifter 51, a lifting shaft 52, and a bellows 53. The lifter 51 is vertically mounted on the outside of the vacuum coating machine 100. The lifting shaft 52 is vertically positioned, with its lower end connected to the friction flange 2 and its upper end extending through the vacuum coating machine 100 and coaxially connected to the lifter 51. A bellows 53 is coaxially sleeved on the outside of the lifting shaft 52. The bellows 53 is located on the outside of the vacuum coating machine 100, with one end connected to the lifter 51 and the other end connected to the outer wall of the vacuum coating machine 100. In this embodiment, the lifter 51 uses a stepper motor or servo motor in conjunction with a high-precision ball screw pair to ensure precise control of the lifting motion and position holding.

[0064] When the lifting device 51 is activated, it drives the lifting shaft 52 to rise and fall vertically. At this time, the lifting shaft 52 drives the friction flange 2 to rise or fall vertically as a whole. The bellows 53 acts as a dynamic seal, with one end connected to the side wall of the vacuum coating machine 100 and the other end moving with the lifting shaft 52. It compensates for displacement through its own elastic expansion and contraction, allowing the transmission of linear motion while strictly ensuring that the sealing of the vacuum coating machine 100 is not compromised.

[0065] Reference Figure 5 The friction flange 2 is also provided with a lifting guide assembly 7, which includes a guide post 71 and a linear bearing 72. The guide post 71 is vertically arranged and its upper end is connected to the vacuum coating machine 100. The linear bearing 72 is arranged on the outer wall of the friction flange 2 and is sleeved on the guide post 71. The linear bearing 72 is slidably connected to the guide post 71 in the vertical direction.

[0066] The guide column 71 and the linear bearing 72 are designed together to provide a high-rigidity guide for the friction flange 2, which limits the horizontal swaying or rotation that may occur during the lifting and lowering process, and ensures that the friction flange 2 moves smoothly along the predetermined vertical trajectory, thereby ensuring the accuracy of angle adjustment.

[0067] The implementation principle of this application embodiment is as follows: Under the power input of the rotary drive component 4 and the lifting drive component 5, the workpiece can simultaneously realize revolution, rotation and tilt angle adjustment, and each point on the surface of the workpiece can receive the evaporated material at an optimized incident angle, thereby improving the coating uniformity on complex curved surfaces.

[0068] The principle of workpiece revolution and rotation is as follows: the rotary drive assembly 4 drives the turntable 1 to rotate, and the turntable 1 drives the transmission rod 3 to revolve around the central axis of the turntable 1 via the connecting rod assembly 6. Simultaneously, the friction wheel 31 on the transmission rod 3 rubs against the friction surface 21 of the stationary friction flange 2. The revolution of the transmission rod 3 causes relative motion between the friction wheel 31 and the stationary friction surface 21, thereby driving the friction wheel 31 to rotate, which in turn drives the transmission rod 3 to rotate. Therefore, since the workpiece is coaxially mounted at the lower end of the transmission rod 3, the revolution and rotation of the workpiece can be achieved when the transmission rod 3 revolves and rotates.

[0069] The principle for adjusting the tilt angle of the workpiece is as follows: During the coating process, the lifting drive assembly 5 activates the lifting device 51 according to the coating requirements of the workpiece surface. The lifting device 51 drives the friction flange 2 to rise or fall vertically. Due to the specific contour of the friction surface 21, the rising and falling of the friction flange 2 causes a continuous change in the contact point between the friction wheel 31 and the friction surface 21. Thus, under the constraint of the connecting rod assembly 6, the positional change of the friction wheel 31 is converted into a change in the tilt angle of the transmission rod 3. Therefore, the change in the tilt angle of the transmission rod 3 realizes the change in the tilt angle of the workpiece, thereby enabling online adjustment of the angle of the workpiece facing the evaporation source.

[0070] Therefore, in the design of this embodiment, the transmission mechanism dynamically combines three motions: revolution, rotation, and tilt angle adjustment, so that every point on the surface of the workpiece can receive the evaporated material at an optimized incident angle. This solves the problem of uneven coating caused by the cosine law of the evaporation source for workpieces with complex curved surfaces.

[0071] Example 2: A transmission mechanism for arc-shaped irregular coating, referring to... Figure 6 The difference between this embodiment and embodiment 1 is that: there are several connecting rod assemblies 6 and transmission rods 3. The connecting rod assemblies 6 and transmission rods 3 are arranged in a one-to-one correspondence. One end of the connecting rod assembly 6 is rotatably connected to the turntable 1 and is detachably connected. The other end is rotatably connected to the transmission rod 3. Several transmission rods 3 are arranged at intervals along the circumference of the turntable 1.

[0072] Since the connecting rod assembly 6 is detachably connected to the turntable 1, multiple sets of transmission rods 3 and corresponding connecting rod assemblies 6 can be flexibly installed according to production needs, which greatly improves the workpiece loading capacity and production efficiency of a single coating.

[0073] In this embodiment, the linkage assembly 6 further includes a mounting base 63, the first link 61 and the elastic link 62 are rotatably connected to the mounting base 63, and the mounting base 63 is connected to the turntable 1 by bolts.

[0074] The connecting rod assembly 6 is mounted to the turntable 1 via a mounting base 63. The mounting base 63 and the turntable 1 are detachably connected by bolts, allowing the connecting rod assembly 6 and the corresponding transmission rod 3 on the turntable 1 to be disassembled and assembled by removing and installing the mounting base 63. Therefore, the design of the mounting base 63 makes each set of connecting rod assemblies 6 and transmission rods 3 an independent module. When a transmission rod 3 or connecting rod assembly 6 at a certain station malfunctions, the corresponding mounting base 63 can be quickly disassembled, and the corresponding transmission rod 3 and connecting rod assembly 6 can be removed and replaced. This facilitates the installation, debugging, and maintenance of the transmission mechanism, reducing downtime.

[0075] In this embodiment, the counterweight 11 is arranged in a one-to-one correspondence with the connecting rod assembly 6. A plurality of counterweights 11 are arranged sequentially at intervals along the circumference of the turntable 1. The counterweights 11 are installed on the turntable 1 or the mounting base 63 according to the position layout design of the connecting rod assembly 6. The counterweights 11 and the corresponding connecting rod assembly 6 are arranged at intervals along the corresponding radial direction of the turntable 1, and the central axis of the turntable 1 is located between the counterweights 11 and the corresponding connecting rod assembly 6.

[0076] Reference Figure 6 and Figure 7 Within the first connecting rod 61, an adjusting seat 614 is provided on the first rod 611, and the end of the second rod 612 facing the first rod 611 is rotatably connected to the adjusting seat 614. The adjusting seat 614 is slidably connected to the first rod 611 along the length direction of the first rod 611, and a locking member 615 is provided between the adjusting seat 614 and the first rod 611.

[0077] With the design of the adjusting seat 614 and the locking member 615, the connection position of the first rod 611 and the second rod 612 can be adjusted, which facilitates the adjustment of the total length of the first connecting rod 61 to accurately set the initial tilt angle of the transmission rod 3 or its total stroke range during the lifting process, thereby adapting to workpieces of different shapes or sizes, which improves the process adaptability of the transmission mechanism.

[0078] Reference Figure 7In this embodiment, the adjusting seat 614 includes two clamping blocks 6141, which are spaced apart along the thickness direction of the first rod 611. A slot 6142 is provided on the side of the clamping block 6141 facing the first rod 611. The slot 6142 passes through the corresponding clamping block 6141 along the length direction of the first rod 611. The first rod 611 engages with the slot 6142 and slides along its own length against the inner wall of the slot 6142. The locking member 615 includes several locking bolts 6151. Several connecting holes are provided through the clamping blocks 6141. The locking bolts 6151 are correspondingly arranged with the connecting holes, and each locking bolt 6151 passes through the corresponding connecting holes on the two clamping blocks 6141 along its own axial direction. Nuts 6152 are screwed onto the locking bolts 6151, and the two clamping blocks 6141 are located between the nuts of the locking bolts 6151 and the nuts 6152. Furthermore, the end of the second rod 612 facing the first rod 611 is rotatably connected to a clamping block 6141.

[0079] Based on the specific structural design of the adjusting seat 614 and the locking element 615, when the locking bolt 6151 is loosened, the clamping of the two clamping blocks 6141 on the first rod 611 is released, and the adjusting seat 614 can slide along the length direction of the first rod 611; when the adjusting seat 614 is adjusted to the appropriate position, the locking bolt 6151 is tightened, and the two clamping blocks 6141 re-clamp and lock the first rod 611. This enables the adjustment seat 614 and the locking element 615 to perform their functions.

[0080] Reference Figure 6 and Figure 8 In the elastic link 62, the telescopic rod 621 includes a rigid rod 6211 and a telescopic tube 6212. The telescopic tube 6212 is sleeved on the outside of the rigid rod 6211, and the telescopic tube 6212 and the rigid rod 6211 are connected by threads. The end of the rigid rod 6211 away from the telescopic tube 6212 along its own axis is rotatably connected to the sleeve seat 623. The end of the telescopic tube 6212 away from the rigid rod 6211 along its own axis is inserted into the sleeve 622. The telescopic tube 6212 and the sleeve 622 are rotatably connected, and the telescopic tube 6212 is slidably connected to the sleeve 622 along its own axis. One end of the compression spring 624 abuts against the telescopic tube 6212.

[0081] Based on the structural design of the telescopic rod 621, the length of the rigid rod 6211 inserted into the telescopic tube 6212 can be adjusted by rotating the telescopic tube 6212, thereby adjusting the total length of the elastic connecting rod 62. This allows for adjustment of the initial total length of the elastic connecting rod 62 during assembly or debugging, thus adjusting the initial installation position of the transmission rod 3 when not under pressure. This adjustment function ensures that after installing different workpieces or replacing the functional inner ring 23, the elastic connecting rod 62 remains within a suitable working stroke range to coordinate with the movement of the first connecting rod 61, jointly achieving precise attitude control of the transmission rod 3.

[0082] The implementation principle of this embodiment is as follows: through the cooperation of several connecting rod assemblies 6 and several transmission rods 3, the number of transmission rods 3 can be freely selected, thereby enabling the transmission mechanism of this embodiment to load multiple workpieces for coating at the same time, thereby improving the processing efficiency of the vacuum coating machine 100 equipped with the transmission mechanism of this embodiment.

[0083] By cooperating with the first connecting rod 61 and the elastic connecting rod 62, the initial position of the travel stroke of the transmission rod 3 and the initial total length of the elastic connecting rod 62 can be adjusted accordingly, thereby changing the initial state of the installed transmission rod 3. This allows the transmission mechanism of this embodiment to adapt to arc-shaped workpieces of different specifications and coating process requirements, improving the applicability of the vacuum coating machine 100 equipped with the transmission mechanism of this embodiment.

[0084] Example 3: A transmission mechanism for arc-shaped irregular coating, referring to... Figure 9 The difference between this embodiment and Embodiment 1 is that the friction flange 2 includes a rigid outer ring 22 and a functional inner ring 23. The rigid outer ring 22 is coaxially sleeved on the outside of the functional inner ring 23, and the inner sidewall of the functional inner ring 23 forms a friction surface 21. The rigid outer ring 22 and the functional inner ring 23 are detachably connected. The lifting shaft 52 and the linear bearing 72 are both connected to the rigid outer ring 22.

[0085] Based on the structural design of the friction flange 2, the rigid outer ring 22 serves as the main structural support and moving component, bearing the lifting drive and guiding functions, while the functional inner ring 23 specifically supports the friction surface 21. When the friction surface 21 wears down due to long-term use, or when the contour of the friction surface 21 needs to be changed due to process changes, only the lower-cost functional inner ring 23 needs to be replaced, without replacing the entire friction flange 2. This reduces maintenance costs and improves process compatibility.

[0086] Reference Figure 9 In this embodiment, the friction flange 2 further includes a damping interlayer 24, which is sleeved on the outside of the functional inner ring 23, and the rigid outer ring 22 is sleeved on the outside of the damping interlayer 24. The damping interlayer 24 is made of a high-temperature resistant elastomer or viscoelastic material, specifically fluororubber (FKM) or high-temperature silicone rubber (VMQ).

[0087] A damping interlayer 24 is disposed between the rigid outer ring 22 and the functional inner ring 23, which can be used to absorb and dissipate the vibration energy between the rigid outer ring 22 and the functional inner ring 23. During high-speed revolution and rotation, the friction between the friction wheel 31 and the friction surface 21 inevitably generates high-frequency vibrations. The damping interlayer 24 can effectively isolate the radial transmission of this vibration between the functional inner ring 23 and the rigid outer ring 22, suppress structural resonance, and improve the smoothness of the transmission rod 3's movement, thus contributing to improved coating quality.

[0088] Reference Figure 9 In this embodiment, a support ring 221 is coaxially disposed at the lower end of the rigid outer ring 22. The support ring 221 is fixedly connected to the rigid outer ring 22, and the lower end of the functional inner ring 23 abuts against the support ring 221. A damping washer 25 is filled between the lower end of the functional inner ring 23 and the support ring 221. The upper side of the damping washer 25 abuts against the functional inner ring 23, and the lower side abuts against the support ring 221. A plurality of mounting bolts 26 are disposed on the support ring 221. The mounting bolts 26 pass through the support ring 221 and the damping washer 25 sequentially from bottom to top, and are screwed to the functional inner ring 23.

[0089] With the cooperation of the support ring 221, damping washer 25, and mounting bolt 26, the functional inner ring 23 is placed on the damping washer 25 and locked to the support ring 221 by the mounting bolt 26, thereby achieving a detachable connection between the rigid outer ring 22 and the functional inner ring 23. Furthermore, the damping washer 25 isolates vibrations between the functional inner ring 23 and the support ring 221.

[0090] The implementation principle of this application embodiment is as follows: by designing the friction flange 2 as a detachable combination of a rigid outer ring 22 and a functional inner ring 23, the friction surface 21 is easily replaceable and maintained, reducing usage costs and improving process flexibility. Simultaneously, by introducing a damping interlayer 24 and a damping washer 25 between the rigid outer ring 22 and the functional inner ring 23, a complete vibration reduction structure is formed, which can effectively suppress high-frequency vibrations generated by friction, improving the smoothness of mechanism operation and coating quality.

[0091] The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Identical components are represented by the same reference numerals. Therefore, all equivalent changes made to the structure, shape, and principle of this application should be covered within the scope of protection of this application.

Claims

1. A transmission mechanism for arc-shaped irregular coating, characterized in that, include: Turntable (1), the turntable (1) is arranged axially in the vertical direction, and the turntable (1) is coaxially connected to a rotation drive assembly (4), the rotation drive assembly (4) is used to drive the turntable (1) to rotate; Friction flange (2), the friction flange (2) is coaxially sleeved on the outside of the turntable (1), the inner wall of the friction flange (2) is provided with a friction curved surface (21), and a lifting drive assembly (5) is provided on the friction flange (2), the lifting drive assembly (5) is used to drive the friction flange (2) to move in the vertical direction; A transmission rod (3) has one end located outside the friction flange (2) and used to connect the workpiece, and the other end located inside the friction flange (2) and coaxially connected to a friction wheel (31). The outer wall of the friction wheel (31) abuts against the friction surface (21). Linkage assembly (6), which is located inside the friction flange (2), is rotatably connected at one end to the transmission rod (3) and at the other end to the turntable (1), and is used to press the friction wheel (31) against the friction surface (21).

2. The transmission mechanism for arc-shaped irregular coating according to claim 1, characterized in that, A counterweight (11) is provided on the turntable (1). The counterweight (11) and the connecting rod assembly (6) are arranged at a distance from each other along the corresponding radial direction of the turntable (1). The central axis of the turntable (1) is located between the counterweight (11) and the connecting rod assembly (6).

3. The transmission mechanism for arc-shaped irregular coating according to claim 1, characterized in that, The linkage assembly (6) includes a first linkage (61) and an elastic linkage (62). One end of the first linkage (61) and the elastic linkage (62) are rotatably connected to the transmission rod (3), and the other end is rotatably connected to the turntable (1). The elastic linkage (62) is used to apply elastic force to the transmission rod (3) so that the outer wall of the friction wheel (31) abuts against the friction surface (21).

4. A transmission mechanism for arc-shaped irregular coating according to claim 3, characterized in that, The elastic link (62) includes a telescopic rod (621) and a sleeve (622). The sleeve (622) is coaxially sleeved on the telescopic rod (621) and the sleeve (622) is slidably connected to the telescopic rod (621) along its own axial direction. A compression spring (624) is coaxially arranged inside the sleeve (622). One end of the compression spring (624) is connected to the telescopic rod (621), and the other end is connected to the sleeve (622). The end of the sleeve (622) away from the telescopic rod (621) is rotatably connected to the turntable (1), and the end of the telescopic rod (621) away from the sleeve (622) is rotatably connected to the transmission rod (3).

5. A transmission mechanism for arc-shaped irregular coating according to claim 3, characterized in that, The first connecting rod (61) includes a first rod (611) and a second rod (612). One end of the first rod (611) is rotatably connected to the turntable (1), and the other end is rotatably connected to one end of the second rod (612). The end of the second rod (612) away from the first rod (611) is rotatably connected to the transmission rod (3).

6. A transmission mechanism for arc-shaped irregular coating according to claim 5, characterized in that, An adjusting seat (614) is provided on the first rod (611), the adjusting seat (614) is slidably connected to the first rod (611) along the length direction of the first rod (611), and one end of the second rod (612) is rotatably connected to the adjusting seat (614); a locking member (615) is provided between the adjusting seat (614) and the first rod (611), the locking member (615) is used to lock the adjusting seat (614) on the first rod (611).

7. A transmission mechanism for arc-shaped irregular coating according to claim 1, characterized in that, The lifting drive assembly (5) includes a lifter (51) and a lifting shaft (52). The lifting shaft (52) is vertically arranged. The lower end of the lifting shaft (52) is connected to the friction flange (2), and the upper end is connected to the lifter (51). The lifter (51) is used to drive the lifting shaft (52) to move in the vertical direction. The lifting device (51) is used to be installed outside the vacuum coating machine (100). A corrugated pipe (53) is sleeved on the outside of the lifting shaft (52). One end of the corrugated pipe (53) is connected to the lifting device (51), and the other end is used to connect to the outer wall of the vacuum coating machine (100).

8. A transmission mechanism for arc-shaped irregular coating according to claim 1, characterized in that, The transmission rod (3) and the connecting rod assembly (6) are provided in multiples. The transmission rods (3) are arranged sequentially at intervals along the circumference of the turntable (1). The transmission rods (3) and the connecting rod assemblies (6) are arranged in a one-to-one correspondence. One end of the connecting rod assembly (6) is rotatably connected to the corresponding transmission rod (3), and the other end is rotatably connected to the turntable (1).

9. A transmission mechanism for arc-shaped irregular coating according to claim 1, characterized in that, The friction flange (2) includes a rigid outer ring (22) and a functional inner ring (23). The rigid outer ring (22) is sleeved on the outside of the functional inner ring (23), and the rigid outer ring (22) and the functional inner ring (23) are detachably connected. The lifting drive assembly (5) is connected to the rigid outer ring (22), and the friction surface (21) is disposed inside the functional inner ring (23).

10. A transmission mechanism for arc-shaped irregular coating according to claim 9, characterized in that, A damping interlayer (24) is provided between the inner wall of the rigid outer ring (22) and the outer wall of the functional inner ring (23).

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