A sample transmission device for an angle-resolved photoelectron spectroscopy experiment

Abstract

The application discloses a kind of vacuum cavity transmission sample devices of angle-resolved photoelectron spectroscopy experiment, including transfer chamber, transfer chamber side is connected with analysis cavity and sample cavity respectively by communicating cavity, first gate valve and second gate valve are equipped in communicating cavity.Transferring arm is equipped in transfer chamber, and support seat is equipped with multiple section transmission sample arms, first trigger, second trigger and trigger lever are equipped on support seat.Drive device is driven multiple section transmission sample arms telescopic, trigger lever is synchronously driven first trigger or second trigger when triggering.During the switching of alignment of trigger and trigger lever in steering process, sleeve lower end is realized by connecting rod.The application realizes the logical synchronization of gate valve and transmission sample stroke by physical linkage mechanism: only when transmission sample arm runs to predetermined position, corresponding gate valve is opened immediately, and it is closed immediately after transmission sample is finished.The design effectively reduces the diffusion of residual gas between cavity, maintains the ultrahigh vacuum environment of analysis cavity, significantly improves the experimental accuracy and system operation safety.

Description

Technical Field

[0001] This invention belongs to the technical field of synchrotron radiation experimental equipment, and in particular relates to a vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments. Background Technology

[0002] Angle-resolved photoelectron spectroscopy (ARPES), utilizing synchrotron radiation sources, has become a super "microscope" for revealing the microscopic structure and dynamic processes of matter, thanks to its high brightness, high collimation, and tunable polarization. It is widely used in materials science, physics, chemistry, and biology. ARPES's extremely high energy and momentum resolution places stringent demands on the experimental environment: experiments must be conducted in an ultra-high vacuum (UHV) environment to extend the "lifetime" of the sample surface and eliminate the scattering of photoelectron signals by gas molecules, thereby ensuring the accuracy and reliability of the measurement data.

[0003] ARPES is a key experimental technique for revealing the microscopic electronic structure of materials such as metals and semiconductor compounds. To ensure measurement accuracy and eliminate gas molecule interference, the analytical chamber needs to be maintained at a level better than 8 × 10⁻⁶. -11 The ultra-high vacuum environment of the Torr (or similar equipment) is crucial. However, in actual scientific research, frequent sample introduction and extraction inevitably introduce trace amounts of gas, potentially damaging the equipment's seal and affecting the vacuum level and the accuracy of experimental results. To improve and protect the vacuum environment of the analytical chamber while allowing for frequent sample introductions, experimental equipment typically requires a layered sample transfer method. Based on this requirement, the standard ARPES experimental setup consists of an introduction chamber, a transfer chamber, and an analytical chamber: the introduction chamber is used to introduce samples from the atmospheric environment and pre-evacuate them to a high vacuum; the transfer chamber serves as a pressure buffer zone, preventing the analytical chamber from being directly exposed to a high-pressure environment during sample introduction. The chambers are connected by a connecting chamber equipped with a gate valve. Currently, sample transfer at beamlines largely relies on manual operation of the transfer arm. Researchers must visually determine the position through the observation window and manually open the gate valve to allow the transfer arm to pass through. However, in this complex, layered sample transfer path, manual operation has the following significant drawbacks:

[0004] 1. Poor coordination and risk of collision damage: There is no physical linkage mechanism between manually opening the gate valve and advancing the sample transfer arm. When operators are fatigued or when multiple people are not coordinating properly, it is easy for the gate valve to not be fully opened before the sample transfer arm has arrived, causing the end of the sample transfer arm or the sample holder to directly hit the valve plate, resulting in damage to the precision sample transfer system and failure of the vacuum seal, resulting in high maintenance costs and seriously affecting the experimental progress.

[0005] 2. The contradiction between vacuum environment maintenance and experimental efficiency: Due to the lack of precise control with real-time linkage, the timing of opening and closing the gate valve is difficult to grasp. On the one hand, to avoid the risk of collision, operators often tend to open the gate valve in advance or fail to close it in time after sample transfer, resulting in prolonged communication between the analysis chamber and the low vacuum chamber. This increases the diffusion and cross-contamination of gas molecules, leading to a deterioration of the vacuum level in the analysis chamber and prolonging the vacuum recovery time. On the other hand, delaying opening or attempting to close too early due to concerns about vacuum can cause frequent interruptions in the sample transfer process and even mechanical clamping risks, severely reducing experimental efficiency.

[0006] Therefore, developing a device that can work with the progressive sample transfer logic, operate smoothly between chambers, and enable real-time linkage control of the gate valve based on the sample transfer arm stroke is an urgent need to improve the safety and vacuum stability of ARPES experiments. Summary of the Invention

[0007] The purpose of this invention is to provide a vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments. When the sample transfer device reaches the gate valve, the gate valve can be opened immediately to prevent the gate valve from opening untimely or for a long time, thus maintaining a high-standard vacuum test environment in the analysis cavity.

[0008] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:

[0009] A vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments includes a transfer cavity, and an analysis cavity and a sample injection cavity are connected to the side of the transfer cavity through a connecting cavity, and a first gate valve and a second gate valve are respectively provided in the two connecting cavities.

[0010] A steering arm is coaxially mounted on the transfer cavity, the lower end of which extends into the interior of the transfer cavity and is suspended by a support base.

[0011] The support base is equipped with multiple sample transfer arms. The first and last ends of the multiple sample transfer arms are connected to each other and extend and retract. The last sample transfer arm is installed on the support base, and the free end of the first sample transfer arm is equipped with a clamping device for clamping and fixing the sample holder.

[0012] The support base is equipped with a first trigger, a second trigger, and a trigger rod. The first trigger is used to trigger and control the opening and closing of the first gate valve, and the second trigger is used to trigger and control the opening and closing of the second gate valve. It includes a drive device for driving the multi-segment sample transfer arm to extend and retract, and synchronously driving the trigger rod to drive the first trigger or the second trigger.

[0013] A sleeve is fitted onto the outer side of the steering arm, and a second motor is provided on the side of the sleeve to drive the steering arm to adjust the horizontal angle of the steering. A connecting rod is installed at the lower end of the sleeve. The connecting rod is used to drive the first trigger and the second trigger to generate a switching displacement as a whole during the steering of the steering arm, so as to align the target trigger with the trigger rod.

[0014] Furthermore, all the sample transfer arms are long strip-shaped plate structures with a toothed rail arranged along the length direction at the center line. The driving device includes a toothed disc, which is hinged to the support base via a hinged arm. A tension spring is installed between the hinged arm and the support base, and the tension spring drives the end of the toothed disc to always maintain engagement with the toothed rail of each sample transfer arm.

[0015] Furthermore, the sample transfer arm has side walls on the upper and lower sides, and a groove is formed on one side of the sample transfer arm for the first and last ends of the sample transfer arm to be nested together. Both ends of the side walls are equipped with pulleys, and the inner and outer sides of the side walls are provided with wheel grooves for limiting the sliding of the pulleys.

[0016] Furthermore, a spring sheet is connected between the pulley and the side wall for the pulley to be elastically mounted on the side wall, and the end of the wheel groove has an arc-shaped groove for limiting the pulley.

[0017] Furthermore, the drive device also includes a first motor, which is located at the upper end of the steering arm. The steering arm has a hollow structure. The shaft corresponding to the first motor extends through the steering arm and extends to the support seat. A rotating shaft is fixed at the axis of the gear plate. Sprockets are respectively arranged at the same plane position as the shaft and the rotating shaft. The two sprockets are driven by a chain.

[0018] Furthermore, the support base has an arc-shaped groove that limits the movement of the end of the rotating shaft, the end of the rotating shaft is fitted with a bushing, and a tension spring is installed between the bushing and the support base.

[0019] Furthermore, the trigger rod is mounted on the bushing. The trigger rod is arc-shaped, with one end fixed to the bushing and the other end serving as the trigger end for aligning the first trigger or the second trigger.

[0020] Furthermore, the first and second triggers are fixedly arranged in a row as a whole, and the first and second triggers are mounted as a whole on a positioning frame. The positioning frame is provided with a sliding groove for the first and second triggers to slide along the length direction. The positioning frame is equipped with a sleeve that fits onto the end of the trigger rod to limit the telescopic movement of the trigger rod.

[0021] The first and second triggers are integrated as a whole, with a positioning rod fixed on the upper side. The positioning frame has a positioning groove to accommodate the positioning rod. One end of the connecting rod is hinged to the sleeve, and the other end is hinged to the positioning rod.

[0022] This invention offers the following advantages: During the extension and retraction of the sample transfer arm, the drive system simultaneously drives the trigger rod. This invention achieves physical coupling between the gate valve opening / closing and the sample transfer arm's trajectory. The corresponding gate valve is only opened instantaneously at a specific stage of the sample transfer process; otherwise, the trigger signal disappears immediately after the sample transfer arm retracts, causing the gate valve to close instantly. This mechanism ensures that the analytical chamber maintains a consistently high-standard ultra-high vacuum environment, effectively preventing the diffusion of residual atmospheric gas molecules into the analytical chamber due to prolonged gate valve opening time, reducing the risk of cross-contamination between chambers, and significantly improving the accuracy of experimental results and the operational safety of the equipment. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0024] Figure 1 : Schematic diagram of the vacuum cavity installation structure of the present invention.

[0025] Figure 2 : Schematic diagram of the back structure of the corresponding sample transfer arm in this invention.

[0026] Figure 3 : A schematic diagram of the front and partially enlarged structure of the corresponding sample transfer arm of this invention.

[0027] Figure 4 : A schematic diagram of the support base and its upper part enlarged structure of the present invention.

[0028] Figure 5 : A partially enlarged structural diagram of the transmission device corresponding to the support base of this invention.

[0029] Figure 6 : Schematic diagram of the sample transfer arm portion and a partially enlarged structure of the present invention.

[0030] Figure 7 : Schematic diagram of the clamping device of the present invention.

[0031] The components represented by each number in the attached diagram are listed below: transfer chamber 1, connecting chamber 3, analysis chamber 2, first gate valve 31, second gate valve 32, steering arm 43, support base 5, sample transfer arm 6, sample holder 9, base 8, solenoid valve 81, slider 82, clamping arm 83, clamping rod 84, limit rod 85, first trigger 71, second trigger 72, trigger rod 73, sleeve 4, second motor 42, connecting rod 44, gear rail 61, gear plate 51, hinge arm 52, tension spring 50, side wall 62, pulley 65, wheel groove 63, spring piece 66, arc groove 64, first motor 41, rotating shaft 53, sprocket 54, chain 55, bushing 56, arc waist groove 57, positioning frame 7, slide groove 74. Detailed Implementation

[0032] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0033] like Figure 1 As shown: A vacuum chamber sample transfer device for angle-resolved photoelectron spectroscopy experiments includes a transfer chamber 1. The transfer chamber 1 is connected to an analysis chamber 2 and a sample injection chamber via connecting chambers 3 on its side. The two connecting chambers 3 are respectively equipped with a first gate valve 31 and a second gate valve 32. The transfer chamber 1 serves as a pre-vacuum buffer chamber and has an approximately ellipsoidal structure. It is provided with flange-type connection windows on its periphery. The analysis chamber 2 is connected to the transfer chamber 1 via the first gate valve 31.

[0034] like Figure 2 As shown: A steering arm 43 is coaxially arranged in the transfer cavity 1. The lower end of the steering arm 43 extends into the interior of the transfer cavity 1 and is suspended and mounted on a support seat 5. The support seat serves as the overall support part, and its cross-sectional projection is U-shaped.

[0035] like Figure 6 As shown: The support base 5 is equipped with multiple sample transfer arms 6. The first and last ends of the multiple sample transfer arms 6 are connected to each other and extend and retract. The last sample transfer arm 6 is installed on the support base 5, and the free end of the first sample transfer arm 6 is equipped with a clamping device for clamping and fixing the sample holder 9. The sample transfer arm 6 is a multi-segment combination structure. After being driven, it extends or retracts in the horizontal direction and is at the same level as the corresponding connecting cavity 3. By turning the steering arm 43, the extension direction of the sample transfer arm 6 is aligned with the corresponding connecting cavity 3, so that it can extend through the corresponding connecting cavity 3, thereby transferring the sample holder 9 clamped and fixed at the end to the corresponding cavity.

[0036] like Figure 7 As shown: The clamping device includes a base 8, a solenoid valve 81 mounted on the rear side of the base 8, and a slider 82 mounted on the front side. The solenoid valve 81 drives the slider 82 to slide along the length of the base 8. The front end of the slider 82 has a clamping arm 83, and the front end of the clamping arm 83 has a clamping rod 84. The rear end is hinged to the slider 82. The base 8 has a limiting rod 85 corresponding to the clamping arm 83, which is used to limit the clamping arm 83 to rotate along the hinge end to complete the clamping operation. A first roller is installed between the slider 82 and the base 8, and a second roller is installed on the limiting rod 85.

[0037] like Figure 4As shown: The support base 5 is equipped with a first trigger 71, a second trigger 72, and a trigger rod 73. The first trigger 71 is used to trigger and control the opening and closing of the first gate valve 31, and the second trigger 72 is used to trigger and control the opening and closing of the second gate valve 32. A drive device is included to drive the multi-segment sample transfer arm 6 to extend and retract, and simultaneously drive the trigger rod 73 to drive either the first trigger 71 or the second trigger 72. Both the first and second triggers are push-button type electronic signal switches, with push-button trigger ends. They are connected to the corresponding gate valves via signal connection, enabling short-distance linkage control of the opening and closing of the corresponding gate valves. A trigger rod is also synchronously provided; when the drive device drives the sample transfer arm to extend and retract, it simultaneously drives the trigger rod, causing the end of the trigger rod to press the corresponding trigger, thereby controlling the opening and closing of the corresponding gate valve.

[0038] like Figure 2 , Figure 4 As shown: A sleeve 4 is sleeved on the outer side of the steering arm 43, and a second motor 42 is provided on the side of the sleeve 4 to drive the steering arm 43 to adjust the horizontal angle of the steering. A connecting rod 44 is installed at the lower end of the sleeve 4, which is used to drive the first trigger 71 and the second trigger 72 to slide as a whole during the steering process of the steering arm 43, thereby switching the alignment position of different triggers with the trigger rod 73.

[0039] A circular flange interface is coaxially provided on the upper side of the transfer chamber 1 for the sleeve 4 to pass through. The sleeve 4 serves as a connecting structure, improving the sealing performance of external equipment connected to the transfer chamber 1. The output end of the second motor 42 is a first gear structure. The corresponding sleeve 4 and steering arm 43 are coaxially arranged. The steering arm 43 is fitted with a second gear structure at the position corresponding to the first gear. Through the meshing transmission action of the first gear structure and the second gear structure, the steering arm 43 rotates in a circular motion, which is used to adjust the extension direction of the sample transfer arm 6.

[0040] The second motor 42 drives the steering arm 43 to adjust its angle, aligning the sample transfer direction with the corresponding connecting cavity. The second motor 42 is a stepper motor, and its rotation angle can be perfectly adapted to the alignment direction of the sample transfer arm. The steering arm 43 is also equipped with a connecting rod 44, which drives the first trigger 71 and the second trigger 72 to switch between each other.

[0041] When the steering arm 43 rotates to align the sample transfer arm 6 with the window of the analysis chamber 2, the connecting rod 44 drives the first trigger 71 to align with the trigger rod 73. Under the action of the driving device, the sample transfer arm extends and simultaneously controls the trigger rod 73 to press and activate the first trigger 71, thereby controlling the corresponding first gate valve 31 to open. The sample transfer arm 6 passes through the first gate valve 31 and arrives in the analysis chamber 2. When the sample transfer arm 6 retracts, the trigger rod 73 is simultaneously disengaged from the first trigger 71, so that the first gate valve 31 automatically closes when the sample transfer arm 6 retracts.

[0042] Similarly, when the steering arm 43 drives the sample transfer arm to extend and retract in the direction of aligning with the sample inlet chamber, the steering arm 43, while turning, synchronously switches to the second trigger 72 to align with the trigger rod 73 via the connecting rod 44. During the process of the driving device driving the sample transfer arm 6 to extend and retract, the trigger rod 73 is driven synchronously, thereby activating the second trigger 72 and controlling the opening and closing of the second gate valve 32.

[0043] like Figure 6 As shown: The sample transfer arms 6 are all long strip-shaped plate structures, with a toothed rail 61 set along the length direction at the center line. The driving device includes a toothed disc 51, which is hinged to the support base 5 via a hinged arm 52. A tension spring 50 is installed between the hinged arm 52 and the support base 5. The tension spring 50 drives the end of the toothed disc 51 to always maintain a meshing state with the toothed rail 61 of each sample transfer arm 6. Since the sample transfer arms 6 transmit power through the toothed rail 61, and the sample transfer arms 6 have a multi-segment structure, overlap may occur during the extension and retraction process, causing the corresponding toothed rails 61 of the sample transfer arms 6 to not be located on the same plane. Therefore, the toothed disc 51 used for driving is installed through the hinged arm 52, and the elastic tension of the tension spring 50 keeps the toothed disc 51 and the toothed rail 61 in a constant state of transmission meshing. During the process of the toothed disc 51 driving the sample transfer arm 6, it will only engage with a single sample transfer arm 6, driving the single segment of the sample transfer arm 6 to extend along the length direction. When it extends to the end of the sample transfer arm 6, the toothed disc 51 will automatically press and switch to the adjacent segment of the sample transfer arm 6 under the action of the tension spring 50, thereby driving the extension of the second segment of the sample transfer arm until the sample transfer arm is fully extended, and the clamping device extends into the corresponding cavity.

[0044] Specifically, a slot is cut at the center line position of the sample transfer arm 6. The upper and lower sides of the slot are connected with toothed rods evenly, equidistantly, and in rows. Rotating rollers are sleeved on the outside of the toothed rods to form a toothed roller structure arranged in rows. The rotation between the rotating rollers and the toothed rods reduces the friction force in the meshing state with the toothed disc. The spacing between the toothed rods matches the tooth pitch of the toothed disc.

[0045] The sample transfer arm 6 has side walls 62 on its upper and lower sides, forming grooves on one side of the sample transfer arm 6 for the end of the sample transfer arm 6 to be nested together. Pulleys 65 are installed at both ends of the side walls 62, and wheel grooves 63 are provided on both the inner and outer sides of the side walls 62 to limit the sliding of the pulleys 65. The pulleys 65 at both ends are located on the upper and lower side walls 62, corresponding to the wheel grooves of the adjacent end of the sample transfer arm 6. The pulleys 65 at both ends of a single segment of the sample transfer arm 6 roll outwards and inwards respectively, reducing the friction between adjacent sample transfer arms 6 during extension and retraction, and improving smoothness.

[0046] A spring plate 66 connects the pulley 65 to the side wall 62, allowing the pulley 65 to be elastically mounted on the side wall 62. The end of the wheel groove 63 has an arc-shaped groove 64 that limits the pulley 65. The spring plate 66 has a U-shaped structure and is located between the pulley 65 and the sample transfer arm 6, making the corresponding contact sides of adjacent sample transfer arms 6 elastic, maintaining the tightness of the sample transfer arms 6, reducing shaking, and improving stability. At the same time, the end of the wheel groove 63 has an arc-shaped groove 64, the depth of which is lower than that of the wheel groove 63. With the elastic action of the spring plate 66, the pulley 65 slides to the end of the wheel groove 63 and then gets into the arc-shaped groove 64, which has a quick limiting effect. At the same time, the toothed disc 51 synchronously switches to the toothed roller of the next sample transfer arm 6, entering the driving process of the next sample transfer arm 6. By using the simple limiting operation of the arc groove 64 corresponding to the pulley 65, the sample transfer arms 6 can be kept from sliding against each other after losing the engagement state of the toothed disc 51, ensuring that the length of the sample transfer arms 6 in the stretched state is the standard value.

[0047] When the length of the sample transfer arm after stretching is kept at the standard value, the installation position of the end sample transfer arm 6 and the support base 5 can be adjusted during the debugging stage so that when the sample transfer arm is stretched to a fixed value, the clamping device can deliver the sample holder to the designated position.

[0048] like Figure 2 and Figure 5 As shown, the drive device also includes a first motor 41, which is located at the upper end of the steering arm 43. The steering arm 43 has a hollow structure. The shaft corresponding to the first motor 41 extends through the steering arm 43 and extends to the support seat 5. A rotating shaft 53 is fixed at the axis of the gear disk 51. Sprockets 54 are respectively arranged at the same plane as the shaft and the rotating shaft. The two sprockets 54 are driven by a chain 55. The sprockets can be pulleys, and the corresponding chain can be adjusted to a drive belt. The hinge axis of the articulated arm 52 is approximately coaxial with the shaft. When the articulated arm hinges and flips, the corresponding gear disk 51 moves and rotates in an arc around the hinge axis, thus not affecting the first motor 41 driving the gear disk 51 to rotate.

[0049] like Figure 4 As shown: The support base 5 has an arc-shaped groove 57 that limits the movement of the end of the rotating shaft 53. A bushing 56 is sleeved on the end of the rotating shaft 53, and a tension spring 50 is installed between the bushing 56 and the support base 5. The arc of the arc-shaped groove 57 is the same as the rotation path of the rotating shaft, which limits the movement of the rotating shaft 53, making the rotation of the rotating shaft 53 more stable. At the same time, the bushing 56 prevents the fixing point of the tension spring 50 from hindering the rotation of the rotating shaft 53.

[0050] The trigger rod 73 is mounted on the bushing 56. The trigger rod 73 is arc-shaped, with one end fixed to the bushing 56 and the other end serving as the trigger end for aligning with the first trigger 71 or the second trigger 72. When the gear plate 51 drives the sample transfer arm 6 to extend and retract, the linkage hinge arm 52 and the rotating shaft 53 move along an arc-shaped trajectory, thereby driving the trigger rod 73 to move in an arc-shaped direction in the horizontal direction. The end of the trigger rod 73 triggers the corresponding trigger along with this movement, completing the opening and closing of the corresponding gate valve.

[0051] like Figure 4 As shown: The first trigger 71 and the second trigger 72 are fixedly arranged in a row as a whole. The first trigger 71 and the second trigger 72 are mounted as a whole on a positioning frame 7. The positioning frame 7 is provided with a sliding groove 74 for the first trigger 71 and the second trigger 72 to slide along the length direction. The positioning frame 7 is equipped with a sleeve that fits onto the end of the trigger rod 73 to limit the telescopic movement of the trigger rod 73. The positioning frame 7 is used to install the triggers and also has a sliding groove 74 to limit the sliding switching of the first trigger 71 and the second trigger 72 along a preset trajectory. The pressing point of the trigger rod 73 is located by the sleeve installed on the positioning frame 7. Among them, the connecting rod 44 acts on the trigger as a whole. The end of the connecting rod 44 is hinged to the sleeve 4 and the trigger. During the equipment debugging process, the driving angle of the connecting rod 44 is adjusted. When the support base 5 is rotated, the sliding adaptive angle adjustment of the trigger meets the sliding switching requirements of the first trigger 71 and the first trigger 72.

[0052] The first trigger 71 and the second trigger 72 are integrated as a whole, with a positioning rod fixed to the upper side. The positioning frame 7 has a positioning groove to accommodate the positioning rod. One end of the connecting rod 44 is hinged to the sleeve 4, and the other end is hinged to the positioning rod. The positioning rod is a cylindrical rod structure, fixed to the trigger assembly. On one hand, it serves as the driving end of the connecting rod 44, causing the trigger assembly to slide and switch through the driving action of the connecting rod 44. On the other hand, it can limit the reaction action on the sleeve 4 and the support seat 5. The support seat 5 is driven by the steering arm 43 to turn. The connecting rod 44 connects to the sleeve 4, further limiting the precise steering angle of the steering arm 43.

[0053] Additional details regarding the mechanical structure of this invention:

[0054] [Three-cavity structural layout] such as Figure 1 As shown, a vacuum chamber sample transfer device for angle-resolved photoelectron spectroscopy experiments includes a transfer chamber 1. An analysis chamber 2 and a sample inlet chamber (sample transfer chamber) are connected to the side of the transfer chamber 1 via connecting chambers 3. The two connecting chambers 3 are respectively equipped with a first gate valve 31 and a second gate valve 32. The transfer chamber 1 serves as a pre-vacuum buffer chamber and has an approximately ellipsoidal structure with flange-type connection windows on its periphery. The analysis chamber 2 is connected to the transfer chamber 1 via the first gate valve 31.

[0055] [Support and Steering Mechanisms] such as Figure 2 As shown, a steering arm 43 is coaxially mounted on the transfer chamber 1. The lower end of the steering arm 43 extends into the interior of the transfer chamber 1 and is suspended by a support base 5. The cross-sectional projection of the support base 5 is approximately "U"-shaped. A sleeve 4 is sleeved on the outside of the steering arm 43, and a second motor 42 is provided on the side of the sleeve 4 to drive the steering arm 43 to adjust its horizontal angle. The output end of the second motor 42 is driven by a first gear meshing with a second gear on the steering arm 43, driving the steering arm 43 to rotate in the circumferential direction to adjust the direction of the transfer arm 6.

[0056] [Multi-segment telescopic transfer arm] such as Figure 6 As shown, the support base 5 is equipped with multiple sample transfer arms 6, with the beginning and end of each sample transfer arm interlocked and telescopically coordinated. The end sample transfer arm 6 is fixed to the support base 5, and the free end of the beginning sample transfer arm 6 is equipped with a clamping device. The sample transfer arm 6 is a long strip-shaped plate structure with a toothed rail 61 at its center. The toothed rail 61 consists of a row of toothed bars and a rotating roller sleeved on the outside. The rotation of the toothed roller can reduce the friction when meshing with the toothed disc 51.

[0057] [Adaptive meshing drive logic] such as Figure 6 As shown, the drive system includes a gear disk 51, which is mounted on a support base 5 via a hinged arm 52. A tension spring 50 connects the hinged arm 52 and the support base 5. Because the multiple transfer arms 6 overlap during extension and retraction, causing changes in the plane height of the gear rail 61, the gear disk 51 maintains a pressed engagement with the gear rail 61 of the current power segment through the swing of the hinged arm 52 and the elastic compensation of the tension spring 50. When a single transfer arm extends to its end, the gear disk 51 automatically presses down and switches to the gear rail of the adjacent transfer arm segment under the action of the tension spring, achieving continuous extension.

[0058] [Pulley Limiting and Stability Design] For example Figure 6 As shown, pulleys 65 are installed at both ends of the sidewall 62 of the sample transfer arm 6, corresponding to the wheel grooves 63 of the adjacent sample transfer arms. The pulleys 65 are elastically installed via U-shaped spring pieces 66. The end of the wheel groove 63 is provided with a slightly shallow arc-shaped groove 64. When the pulley 65 slides to the end and engages with the arc-shaped groove 64, a pre-tightening limit is generated under the action of the spring piece 66 to prevent the sample transfer arm from sliding again after losing the meshing force of the gear plate, thus ensuring the precise and constant total extension length of the sample transfer arm.

[0059] [Linkage Trigger Control Logic] such as Figure 4 As shown, the support base 5 is equipped with a first trigger 71, a second trigger 72, and a trigger rod 73. Both the first trigger 71 and the second trigger 72 are push-button type signal switches. The first motor 41 drives the geared disc 51 to rotate via a sprocket 54 and a chain 55. The geared disc shaft 53 passes through the arc-shaped groove 57 on the support base 5 and is fitted with a bushing 56. Figure 4As shown, the arc-shaped trigger rod 73 is fixed to the bushing 56. During the extension and retraction of the drive sample transfer arm 6, the displacement of the gear disk 51 within the arc-shaped waist groove 57 synchronously drives the trigger rod 73 to move in an arc shape.

[0060] [Target cavity switching logic] such as Figure 2 and Figure 4 As shown, the lower end of the sleeve 4 is connected to a trigger assembly consisting of a first trigger 71 and a second trigger 72 via a connecting rod 44. The trigger assembly is installed in the slide groove 74 of the positioning frame 7. When the second motor 42 drives the support base 5 to align with the analysis chamber 2, the first trigger 71 is switched to the position of aligning the trigger rod 73 through the linkage of the connecting rod 44. At this time, the sample transfer arm 6 extends, and the trigger rod 73 simultaneously presses the first trigger 71, instructing the first gate valve 31 to open; when the sample transfer arm 6 retracts, the trigger rod 73 disengages, and the first gate valve 31 immediately closes. Similarly, when turning to the sample inlet chamber, the connecting rod 44 switches the second trigger 72 to align with the trigger rod 73, realizing the synchronous linkage control of the second gate valve 32.

[0061] [Clamping device details] such as Figure 7 As shown, the clamping device includes a base 8, a solenoid valve 81, and a slider 82. The solenoid valve 81 drives the slider 82 to move, which in turn causes the clamping arm 83, which is hinged at the front end, to rotate in conjunction with the limiting rod 85, thereby achieving rapid clamping and release of the sample holder 9.

[0062] These embodiments are selected and specifically described in this specification in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can better understand and utilize the present invention.

Claims

1. A vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments, comprising a transfer cavity (1), wherein an analysis cavity (2) and a sample injection cavity are respectively connected to the side of the transfer cavity (1) via connecting cavities (3), and the two connecting cavities (3) are respectively provided with a first gate valve (31) and a second gate valve (32); characterized in that: A steering arm (43) is coaxially provided in the transfer cavity (1). The lower end of the steering arm (43) extends into the interior of the transfer cavity (1) and is suspended and mounted with a support seat (5). The support base (5) is equipped with multiple sample transfer arms (6). The first and last ends of the multiple sample transfer arms (6) are connected to each other and extend and retract. The last sample transfer arm (6) is installed on the support base (5), and the free end of the first sample transfer arm (6) is equipped with a clamping device for clamping and fixing the sample holder (9). The support base (5) is equipped with a first trigger (71), a second trigger (72) and a trigger rod (73). The first trigger (71) is used to trigger the opening and closing of the first gate valve (31), and the second trigger (72) is used to trigger the opening and closing of the second gate valve (32). It includes a drive device for driving the multi-segment sample transfer arm (6) to perform telescopic cooperation, and synchronously driving the trigger rod (73) to drive the first trigger (71) or the second trigger (72). A sleeve (4) is sleeved on the outside of the steering arm (43), and a second motor (42) is provided on the side of the sleeve (4) to drive the steering arm (43) to adjust the horizontal angle of the steering. A connecting rod (44) is installed at the lower end of the sleeve (4). The connecting rod (44) is used to drive the first trigger (71) and the second trigger (72) to generate a switching displacement as a whole during the steering process of the steering arm (43) so as to align the target trigger with the trigger rod (73). The first trigger (71) and the second trigger (72) are fixed together as a whole. The first trigger (71) and the second trigger (72) are installed as a whole on a positioning frame (7). The positioning frame (7) is provided with a slide groove (74) for the first trigger (71) and the second trigger (72) to slide along the length direction. The positioning frame (7) is equipped with a sleeve that fits the end of the contact rod (73) to limit the telescopic movement of the trigger rod (73). The first trigger (71) and the second trigger (72) are integrated as a whole, with a positioning rod fixed on the upper side. The positioning frame (7) has a positioning groove for accommodating the positioning rod. One end of the connecting rod (44) is hinged to the sleeve (4), and the other end is hinged to the positioning rod.

2. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 1, characterized in that: The sample transfer arms (6) are all long strip plate structures with a toothed rail (61) set along the length of the center line. The driving device includes a toothed disc (51), which is hinged to the support base (5) via a hinged arm (52). A tension spring (50) is installed between the hinged arm (52) and the support base (5). The tension spring (50) drives the end of the toothed disc (51) to always maintain meshing with the toothed rail (61) of each sample transfer arm (6).

3. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 2, characterized in that: The sample transfer arm (6) has side walls (62) on the upper and lower sides, and a groove is formed on one side of the sample transfer arm (6) for the first and last ends of the sample transfer arm (6) to be connected to each other. Both ends of the side wall (62) are equipped with pulleys (65), and the inner and outer sides of the side wall (62) are provided with wheel grooves (63) for the sliding of the limit pulleys (65).

4. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 3, characterized in that: A spring piece (66) is connected between the pulley (65) and the side wall (62) for the pulley (65) to be elastically installed on the side wall (62). The end of the wheel groove (63) has an arc groove (64) for limiting the pulley (65).

5. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 2, characterized in that: The drive device also includes a first motor (41), which is located at the upper end of the steering arm (43). The steering arm (43) is a hollow structure. The shaft corresponding to the first motor (41) extends through the steering arm (43) and extends to the support seat (5). The gear plate (51) has a rotating shaft (53) fixed at its axis. The shaft and the rotating shaft are respectively provided with sprockets (54) at the same plane position. The two sprockets (54) are driven by a chain (55).

6. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 5, characterized in that: The support base (5) has an arc-shaped waist groove (57) that limits the movement of the end of the rotating shaft (53). The end of the rotating shaft (53) is fitted with a bushing (56), and a tension spring (50) is installed between the bushing (56) and the support base (5).

7. The vacuum cavity sample transfer device for angle-resolved photoelectron spectroscopy experiments according to claim 6, characterized in that: The trigger rod (73) is installed on the bushing (56). The trigger rod (73) is arc-shaped, with one end fixed to the bushing (56) and the other end serving as the trigger end for aligning the first trigger (71) or the second trigger (72).

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