Plasma processing equipment

Abstract

The invention provides plasma processing equipment. The plasma processing equipment comprises a base and a cavity, the gas distribution part is arranged on the base; the moving part is movably arranged above the cavity in the moving direction; the locked device is arranged on the base; the locking device is arranged on the moving part and used for locking the locked device in the first maintenance state; or in the second maintenance state, the locking device is unlocked from the locked device; the gas conveying device comprises a gas conveying pipeline and at least one joint module, and the gas conveying pipeline and the joint module are connected with the gas distribution part to convey process gas to the gas distribution part; the gas conveying pipeline comprises a movable pipeline body and a fixed pipeline body, the movable pipeline body moves along with the moving part in the first maintenance state or the second maintenance state, and the movable pipeline body and the fixed pipeline body are connected through the connector module. The problem that different opening modes are switched according to different installation and maintenance requirements is solved, meanwhile, the gas conveying pipeline does not need to be disassembled, and rapid sealing butt joint of the pipeline is achieved.

Description

Technical Field

[0001] This invention relates to the field of plasma treatment equipment technology, and in particular to a plasma treatment equipment system that is easy to maintain. Background Technology

[0002] Semiconductor equipment requires assembly and regular maintenance, such as installation or replacement of parts. However, the parts that need to be removed or installed are different for each type of maintenance, so it is not necessary to open the entire device every time.

[0003] In the existing technology, although there are multiple ways to open the equipment, the gas pipeline is provided to deliver process gas into the cavity, so the gas pipeline must be disconnected before the opening operation can be performed.

[0004] At the same time, switching between different opening methods cannot guarantee safe operation.

[0005] Therefore, there is a need to provide a safe way to open the gas pipeline without having to remove it. Summary of the Invention

[0006] The purpose of this invention is to provide a plasma processing device that solves the problem of quick and safe switching between different opening methods.

[0007] To achieve the above objectives, the present invention is implemented through the following technical solution: A plasma treatment apparatus is provided, comprising: cavity; A base is disposed above the cavity; A gas distribution component, which is disposed on the base, is used to input process gas into the cavity; A movable part is movably disposed above the cavity along the moving direction; A locking device is disposed on the base; A locking device is disposed on the moving part for locking the locked device in a first maintenance state; or unlocking the locked device in a second maintenance state. A gas delivery device includes a gas delivery pipeline and at least one connector module. The gas delivery pipeline and the connector module are connected to a gas distribution component to deliver process gas to the gas distribution component. The gas delivery pipeline includes a movable pipeline and a fixed pipeline. The movable pipeline is configured such that, in a first maintenance state or a second maintenance state, the movable pipeline and the fixed pipeline are connected via the connector module as the movable part moves.

[0008] Optionally, the connector module includes a gas delivery front end, a gas delivery tail end, and an adjustment and fixing part; The gas delivery tail end is connected to the downstream end of the movable pipeline, and the gas delivery front end is connected to the upstream end of the fixed pipeline; the adjusting and fixing part is disposed on the movable part and is used to fix the gas delivery tail end and adjust the gap between the gas delivery front end and the gas delivery tail end.

[0009] Optionally, the gas supply front end is provided with a gas supply surface, and the gas supply tail end is provided with a gas supply surface. The gas supply surface of the gas supply front end and the gas supply surface of the gas supply tail end are arranged opposite to each other, and the gap is formed between the gas supply surface of the gas supply front end and the gas supply surface of the gas supply tail end. The gap is adjustable in the moving direction of the moving part.

[0010] Optionally, the adjusting and fixing part includes a main body, the main body being provided with a guide post extending along the moving direction, and the gas delivery tail end being provided with a guide hole that cooperates with the guide post.

[0011] Optionally, the adjusting and fixing part may further include an adjusting drive, which is used to drive the gas delivery tail end to move along the guide post.

[0012] Optionally, the main body is provided with a threaded hole extending along the moving direction, and the adjusting drive unit cooperates with the threaded hole to drive the gas delivery tail end to move along the moving direction in a rotating manner.

[0013] Optionally, the adjusting and fixing part may further include a fixing member, which is used to fix the gas delivery tail end after the movement adjustment.

[0014] Optionally, the main body includes a vertical plate and a horizontal plate, the horizontal plate being disposed at the upper end of the vertical plate, and the vertical plate being fixed to the movable part.

[0015] Optionally, the guide post is disposed on the lower surface of the horizontal plate, and the threaded hole is disposed on the horizontal plate; the gas delivery tail end and the gas delivery front end are disposed sequentially below the horizontal plate.

[0016] Optionally, the gas delivery tail end is provided with a side, an upper surface, and a lower surface; the gas delivery surface is provided on the lower surface, and the guide hole is provided on the upper surface; the fixing member is connected to the side of the gas delivery tail end adjacent to the vertical plate to fix the gas delivery tail end and the vertical plate on the moving part.

[0017] Optionally, the movable pipeline is connected to the upper surface of the gas delivery tail end, and the cross plate is provided with a receiving groove to allow the movable pipeline to pass through.

[0018] Optionally, the vertical plate is also provided with a strip groove, through which the fixing member passes and connects to the side of the gas delivery tail end.

[0019] Optionally, the gas delivery device further includes a gas control module, which is located upstream of the connector module and is used to control the flow rate of the process gas entering the cavity.

[0020] Optionally, the gas control module is disposed on the moving part; The fixed pipeline includes a first fixed pipeline, the upstream end of which is connected to the connector module, and the downstream end of which is connected to the gas distribution component. The movable pipeline includes a first movable pipeline, the upstream end of which is connected to the gas control module, and the downstream end of which is connected to the connector module.

[0021] Optionally, the fixed pipeline further includes a second fixed pipeline, the downstream end of which is connected to another connector module to provide a process gas source to the cavity; The movable pipeline includes a second movable pipeline, the upstream end of which is connected to the other connector module, and the downstream end of which is connected to the gas control module.

[0022] Optionally, the locking device is a lifting lug; The locking device includes a plunger cylinder and a manual reversing valve. The plunger cylinder is located on the moving part and cooperates with the lifting lug. The manual reversing valve is connected to the plunger cylinder and is used to control the direction of air input to the plunger cylinder to achieve extension or retraction.

[0023] Optionally, the locking device further includes a position sensor and a control valve, wherein the position sensor is used to detect whether the moving part has reached a predetermined position; The control valve is connected to the position sensor and the manual directional valve respectively, and is used to control the on / off of the air input to the manual directional valve according to the signal from the position sensor.

[0024] Optionally, the moving part is a housing.

[0025] Optionally, the position sensor is disposed in the housing or cavity, located at the contact surface between the housing and the cavity.

[0026] Compared with the prior art, the present invention has the following advantages: The gas supply pipeline of this invention is connected through at least one connector module. Therefore, when switching between different opening modes during installation and maintenance, it is not necessary to remove the gas supply pipeline, and the pipeline can be quickly sealed and connected. At the same time, the gas control module of this invention is located on the outer surface of the side wall of the housing, close to the gas distribution component, which can improve the gas pulse effect and reduce the impact of mixing two gases. In addition, the locking device is equipped with a position sensor and a control valve to avoid the risk of the base falling due to accidental operation of the operating handle during maintenance. The operating handle is only effective when it is in the predetermined position. Attached Figure Description

[0027] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the drawings described below are one embodiment of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort: Figure 1 This is a schematic diagram of the structure of the semiconductor device of the present invention; Figure 2 This is a schematic diagram of the cavity structure (moving part not shown) of the semiconductor device of the present invention; Figure 3 This is a schematic diagram of the connector module of the present invention.

[0028] Figure 4 This is an exploded view of the connector module of the present invention; Figure 5 This is a schematic diagram of the locking device of the present invention. Detailed Implementation

[0029] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the solution proposed by the present invention. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the embodiments of the present invention. Please refer to the drawings to make the objectives, features, and advantages of the present invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the present invention, should still fall within the scope of the technical content disclosed in the present invention.

[0030] Figure 1 A schematic diagram of a semiconductor device is shown, such as Figure 1 As shown, the semiconductor device can be a thin film device, an etching device, or a photolithography device.

[0031] Taking a plasma processing device, particularly an ICP device, as an example, the plasma processing device includes: a cavity 110, a base 120, a gas distributor 121, a moving part 131, a locking device 210, a locking device, and a gas delivery device. The cavity 110 is used to place the wafer and to introduce process gas into it for surface treatment. The base 120 is disposed above the cavity 110. The gas distributor 121 is disposed on the base 120 and is used to input process gas into the cavity. The moving part 131 is movably disposed above the cavity 110 along a moving direction. Specifically, the moving part 131 is configured to be movable along the moving direction in a maintenance state (which may include a first maintenance state and a second maintenance state). The locking device 210 is disposed on the base. The locking device is disposed on the moving part. 131 is used to lock the locked device 210 in a first maintenance state, or to unlock the locked device in a second maintenance state; the gas delivery device includes a gas delivery pipeline and at least one connector module, the gas delivery pipeline and the connector module being connected to a gas distribution component to deliver process gas to the gas distribution component; wherein, the gas delivery pipeline includes a movable pipeline and a fixed pipeline, the movable pipeline being configured such that in the maintenance state, as the movable part moves, the fixed pipeline does not move in the maintenance state, and the movable pipeline and the fixed pipeline are connected through the connector module.

[0032] The cavity contains a wafer carrier (not shown in the figure) and a ring assembly (not shown in the figure). The wafer carrier is used to place the processed wafer, such as an ESC. The ring assembly is arranged around the wafer carrier. A sealed process environment is formed within the cavity through the cavity 110, the base 120, and the gas distribution component 121.

[0033] The plasma treatment equipment also includes a pump (not shown in the figure), a cover, a cover opening device (not shown in the figure), a coil 122, and a support 123. The coil 122 is horizontally mounted on the upper surface of the gas distribution component 121 via the support 123. The gas distribution component 121 can be, for example, a medium window or a gas showerhead. The pump is connected to the cavity and is used to extract the process gas from the cavity after processing and to control the pressure inside the cavity, such as negative pressure or even a near-vacuum state. The cover is located above the cavity and is used to cover and protect the components above the cavity. The cover opening device is used to drive the cover to open and close along the direction of movement in maintenance mode. The cover opening device is prior art and will not be described in detail here.

[0034] Preferably, the movable part is a housing or other component that moves under the drive of the opening device; preferably, the housing constitutes part or all of the cover.

[0035] The aforementioned maintenance states can refer to the installation of the equipment or the maintenance, replacement, cleaning, and other upkeep of components after a period of use. The first maintenance state refers to the state of components within the maintenance chamber, such as the open-chamber maintenance state. In the first maintenance state, the locking device locks the locked device 210, and the opening device drives the moving part 131, thereby moving the base 120 and the gas distribution component 121 together. The chamber is opened, allowing operators to easily maintain components such as the wafer carrier and ring assembly within the chamber 110, achieving the open-chamber maintenance state. The second maintenance state refers to the state of components on the gas distribution component 121, such as maintaining the coil 122 on the gas distribution component 121, achieving the open-chamber maintenance state. In the second maintenance state, the locking device releases the locked device, and the base 120 and the gas distribution component 121 remain fixed to the chamber. The opening device drives the moving part 131 to move, thereby moving only the moving part 131 and the components connected to it, such as simply opening the cover. In this state, operators can only maintain components such as the upper surface of the medium window, the coil 122, and the support 123.

[0036] The system includes at least one connector module, at least one movable pipeline, and at least one fixed pipeline. Each connector module connects one movable pipeline and one fixed pipeline. The connector module can divide the gas pipeline into multiple segments, allowing some segments to move with the movable part during maintenance, while others remain stationary. Process gas is input into the cavity through the gas pipeline. Because the connector module can quickly connect the movable and fixed pipelines, maintenance can be achieved without pre-disassembling the gas pipeline, allowing for opening the cavity or cover.

[0037] Figures 3-4 A schematic diagram of the connector module's specific structure is shown, such as... Figures 3-4 As shown, the connector module includes a gas supply front end 310, a gas supply tail end 320, and an adjustment and fixing part 330.

[0038] The gas delivery tail end 320 is connected to the downstream end of the movable pipeline, and the gas delivery front end 310 is connected to the upstream end of the fixed pipeline. The adjusting and fixing part 330 is disposed on the movable part 131 and is used to fix the gas delivery tail end 320 and adjust the gap between the gas delivery front end 310 and the gas delivery tail end 320. Optionally, the gas delivery front end 310 is connected to the base 120 or to other components that do not move in the maintenance state, such as the cavity 110. The adjusting and fixing part 330 can adjust the gap between the gas delivery front end 310 and the gas delivery tail end 320, so that when the maintenance state ends and the usage state begins, the gap between the gas delivery front end 310 and the gas delivery tail end 320 can be precisely controlled, thereby adjusting the sealing performance between them. In use, since the gas delivery tail end 320 is fixed to the moving part 131 by the adjusting fixing part 330 and the moving part is relatively heavy, the gas delivery front end 310 and the gas delivery tail end 320 are pressed together by their own weight to achieve a pre-tight seal.

[0039] That is, the gas delivery front end and the gas delivery tail end are configured to receive the force provided by external gravity (such as the gravity of at least the moving part) to achieve compression and gas sealing.

[0040] The gas delivery front end 310 is provided with a gas delivery surface 313, and the gas delivery tail end 320 is provided with a gas delivery surface 321. The gas delivery surface 313 of the gas delivery front end 310 and the gas delivery surface 321 of the gas delivery tail end 320 are arranged opposite to each other, and a gap is formed between the gas delivery surface 313 of the gas delivery front end and the gas delivery surface 321 of the gas delivery tail end. The gap is adjustable in the moving direction of the moving part.

[0041] The adjusting and fixing part 330 includes a main body and an adjusting drive (not shown in the figure). The main body is provided with a guide post 334 extending along the moving direction, and the gas delivery tail end 320 is provided with a guide hole 324 that cooperates with the guide post 334. The adjusting drive is used to drive the gas delivery tail end 320 to move along the guide post 334.

[0042] Optionally, the main body is provided with a threaded hole extending along the moving direction, and the adjusting drive component engages with the threaded hole to drive the gas delivery tail end to move along the moving direction in a rotational manner. More preferably, the adjusting drive component is a bolt.

[0043] In some embodiments, the moving direction is vertical, i.e., moving along the vertical direction. In the maintenance state, the moving part moves upward first under the drive of the opening device, thereby opening the cavity or opening the cover. At this time, the gas delivery surface 313 of the gas delivery front end 310 and the gas delivery surface 321 of the gas delivery tail end 320 are disengaged. In the use state, the moving part moves downward under the drive of the opening device, and the gas delivery surface 313 of the gas delivery front end 310 and the gas delivery surface 321 of the gas delivery tail end 320 are connected to form an airtight connection, thereby allowing process gas to be introduced into the cavity.

[0044] Optionally, the gas delivery tail end 320 is provided with a side surface, an upper surface 323, and a lower surface; the gas delivery surface is opposite to the upper surface 323, that is, the gas delivery surface is located on the lower surface, and the guide hole 324 is located on the upper surface 323. The downstream end of the movable pipeline communicates with the upper surface 323 of the gas delivery tail end 320, and the connector vent of the gas delivery tail end 320 is located on the gas delivery surface, that is, the lower surface. Optionally, the gas delivery tail end can be, for example, a rectangular block.

[0045] Optionally, the gas delivery front end 310 is provided with a side, an upper surface, and a lower surface 311; the gas delivery surface 313 is opposite to the lower surface 311, that is, the gas delivery surface 313 is provided on the upper surface; the upstream end of the fixed pipeline is connected to either side, and the connector vent of the gas delivery front end 310 is provided on the gas delivery surface, that is, the upper surface; optionally, the gas delivery front end 310 can be, for example, a rectangular block.

[0046] A sealing element, such as a sealing ring, is provided on at least one of the gas delivery surface of the gas delivery front end 310 or the gas delivery surface 321 of the gas delivery tail end 320. The joint vent of the gas delivery tail end 320 and the joint vent of the gas delivery front end 310 are positioned correspondingly, and they are sealed and connected in the use state to realize the delivery of process gas; the area of ​​the gas delivery surface 313 of the gas delivery front end 310 and the area of ​​the gas delivery surface 321 of the gas delivery tail end 320 are the same.

[0047] The adjusting and fixing part 330 also includes a fixing member (not shown in the figure), which is used to fix the gas supply tail end 320 after the movement adjustment, specifically, it is fixed to the moving part.

[0048] The main body of the adjusting and fixing part 330 includes a vertical plate 331 and a horizontal plate 332. The horizontal plate 332 is disposed at the upper end of the vertical plate 331, and the vertical plate 331 is fixed to the moving part. The vertical plate is parallel to the moving part. The air supply tail end 320 and the air supply front end 310 are sequentially disposed below the horizontal plate. The guide post 334 is disposed on the lower surface of the horizontal plate 332, and the threaded hole is disposed on the horizontal plate. The head of the adjusting drive member (bolt) is located above the upper surface of the horizontal plate 332, and the end of the screw of the adjusting drive member (bolt) abuts against the upper surface of the air supply tail end 320.

[0049] The horizontal plate is provided with a receiving groove 333, through which a movable pipe is connected to the upper surface of the gas delivery tail end. The receiving groove 333 allows the movable pipe to pass through. Optionally, the receiving groove 333 extends along the width direction of the horizontal plate 332. There is at least one receiving groove 333, and the number of receiving grooves 333 is the same as the number of movable pipes. The receiving groove 333 divides the horizontal plate 332 into multiple finger sections. The threaded hole is provided in the middle finger section, and the guide post 334 is provided in the two side fingers. This allows the force exerted on the gas delivery tail end 320 by the adjusting drive component to be more even during adjustment, and also ensures smoother guidance. Preferably, there are two receiving grooves 333 and three fingers. In this embodiment, the middle finger section is provided with one threaded hole, and each of the two side fingers is provided with one guide post 334.

[0050] The vertical plate 331 is also provided with a strip groove 336, through which the fixing member passes and connects to the side of the air supply tail end 320. The strip groove 336 extends along the moving direction, i.e., the vertical direction. Preferably, there are two strip grooves 336, and the two strip grooves 336 are set at the same height and are located near the side of the vertical plate 331.

[0051] The fixing member is connected to the side of the gas delivery tail end 320 adjacent to the vertical plate 331 to fix the gas delivery tail end 320 to the moving part, and at the same time, it also has a clamping and fixing effect on the vertical plate. The fixing member is, for example, a bolt. A first fixing threaded hole 325 is provided on the side of the gas delivery tail end 320 adjacent to the vertical plate 331. The first fixing threaded hole 325 cooperates with the fixing member (bolt). The head of the bolt is stuck on one side of the moving part. The bolt shank passes through the moving part and the strip groove 336 in sequence and is fixed with the first fixing threaded hole 325.

[0052] The upstream end of the fixed pipeline is connected to the side of the gas transmission front end 310 away from the moving part, thus avoiding collision between the fixed pipeline and the regulating fixed part 330.

[0053] The adjusting fixing part 330 is fixed on the moving part. Optionally, the vertical plate 331 is provided with a second fixing threaded hole 335. The vertical plate 331 is fixed to the moving part by bolts. Specifically, the head of the bolt is stuck on one side of the moving part, and the bolt thread passes through the moving part and is fixed with the second fixing threaded hole 335.

[0054] In some embodiments, such as Figure 3 As shown, a portion of the connector module is disposed on the inner surface of the movable part 131 (e.g., the housing), for example, fixing the adjustment fixing part 330 to the inner surface of the housing. The movable part is provided with an operating hole (not shown in the figure), which is used by an operator to reach into the operating part to adjust the adjustment drive member. The operating part can be, for example, a wrench or a hand.

[0055] In this embodiment, during adjustment, the operator inserts their hand or wrench into the operating hole and screws on the adjustment drive (e.g., a bolt). The adjustment drive moves downward against the gas delivery tail end 320. Since at least one of the gas delivery surface of the gas delivery front end 310 or the gas delivery surface 321 of the gas delivery tail end 320 is provided with a sealing element (e.g., a sealing ring), loosening the adjustment drive allows the gas delivery tail end 320 to move upward, thereby adjusting the gap between the gas delivery surface of the gas delivery front end 310 and the gas delivery surface 321 of the gas delivery tail end 320. After the gap is adjusted, the locking fastener is tightened to fix the gas delivery tail end 320.

[0056] In some embodiments, such as Figures 1-2 As shown, the gas delivery device further includes a gas control module 132, which is located upstream of the connector module and is used to control the flow rate of the process gas entering the cavity. The gas control module includes a Flow Ratio Controller (FRC), which includes at least one MFC and a valve, for controlling the flow rate and switching of the process gas entering different areas of the cavity. Optionally, the gas distributor 121 is divided into two-zone inlet, namely a central zone and an edge zone; or, the gas distributor 121 is divided into three-zone inlet, namely a central zone, an intermediate zone, and an edge zone.

[0057] The gas control module 132 is disposed on the movable part 131; preferably, as shown in the example Figure 1 As shown, the gas delivery front end 310 is disposed on the base and near the outer edge of the gas distributor 121. The gas control module 132 is disposed on the outer surface of the side wall of the housing, which is the side wall close to the gas delivery front end 310. In some etching processes, such as the Bosch process, etching and passivation steps need to be performed alternately. Therefore, etching process gas and passivation process gas need to be alternately introduced into the cavity. The flow rate and switching of the process gas are controlled by the gas control module 132. Therefore, the closer the gas control module 132 is to the outlet of the process gas (such as the gas distributor 121), the better it can improve the gas pulse effect, reduce the time, and reduce the impact of mixing the two gases.

[0058] The housing is a cuboid housing, including four vertical sidewalls; the base is a perforated plate, the outer contour of which is rectangular and the inner contour is a circular hole; the gas distributor 121 is circular, and the process gas outlet of the gas distributor 121 enters the cavity through the circular hole of the perforated plate. The sidewalls of the cuboid housing are arranged around the rectangular base, and the rectangular outer contour of the base is adapted to the inner contour of the sidewalls of the cuboid housing.

[0059] See also Figures 1-2In some embodiments, preferably, two connector modules are provided, which are respectively located near opposite sides of the rectangular base. The gas supply front end 310 of one connector module is located on the base, and the gas supply front end 310' of the other connector module is located in the cavity.

[0060] Specifically, the fixed pipeline includes a first fixed pipeline 342, the upstream end of which is connected to a connector module, and the downstream end of which is connected to a gas distribution component 121. Preferably, the downstream end of the first fixed pipeline 342 is connected to the center of the gas distribution component 121. The fixed pipeline also includes a second fixed pipeline 344, the downstream end of which is connected to another connector module, and the upstream end of which is connected to a process gas source to supply process gas to the cavity.

[0061] The movable pipeline includes a first movable pipeline 341, the upstream end of which is connected to the gas control module 132, and the downstream end of which is connected to the connector module. The movable pipeline also includes a second movable pipeline 343, the upstream end of which is connected to another connector module, for example, to the gas delivery tail end 320' of that connector module, and the downstream end of which is connected to the gas control module.

[0062] The process gas in the process gas source passes through the second fixed pipeline 344, the connector module, the second movable pipeline 343, the gas control module 132, the first movable pipeline 341, the connector module, and the first fixed pipeline 342 before entering the gas distribution component 121 and finally being input into the cavity.

[0063] In some alternative embodiments, the locking device 210 is a lug, and there is at least one lug, for example, four lugs; wherein the four lugs are respectively located near the four corners of the rectangle, and each pair of lugs forms a pair; in a pair of lugs, two lugs are respectively located on opposite sides of the rectangular base, the holes of the two lugs are opposite each other, and the extension direction of the holes is perpendicular to the side.

[0064] Figure 5 A schematic diagram of the locking device is shown, such as Figure 5As shown, the locking device includes a plunger cylinder 220 and a manual directional valve 230. The plunger cylinder 220 extends or retracts by receiving air from two opposite directions. The plunger cylinder 220 is located in the moving part and cooperates with the lifting lug. The manual directional valve 230 has one inlet and two outlets. Air enters from the inlet, and air exits from one of the outlets depending on the position of the operating handle of the manual directional valve 230. The manual directional valve 230 is connected to the plunger cylinder and controls the direction of air input to the plunger cylinder, thereby controlling the extension or retraction of the plunger. When air is input from one direction, the plunger of the plunger cylinder 220 extends and cooperates with the lifting lug to lock; when air is input from the opposite direction, the plunger of the plunger cylinder 220 retracts, disengages from the lifting lug, and releases the lock. Figure 5 For example, without specific limitations, when the manual reversing valve 230 is in the first position, air is discharged from an outlet at the bottom of the diagram, and air enters the plunger cylinder 220 from the left, causing the plunger to extend under air pressure. Conversely, when the operating handle is manually rotated to the second position, air is discharged from an outlet at the right of the diagram, and air enters the plunger cylinder 220 from the right, causing the plunger to retract under air pressure. Preferably, there are four plunger cylinders 220, which are disposed on the outer surfaces of two opposite side walls of the housing and extend laterally through the side walls. Each plunger cylinder 220 corresponds to a lifting lug. Preferably, the manual reversing valve 230 can also be disposed, for example, on the outer surface of the side wall for convenient manual operation.

[0065] join Figure 5The locking device further includes a position sensor 250 and a control valve 240. The position sensor 250 is used to detect whether the moving part has reached a predetermined position. The control valve 240 is connected to both the position sensor 250 and a manual reversing valve 230, and is used to control the flow of air into the manual reversing valve 230 based on the signal from the position sensor. The position sensor 250 is disposed in the housing or cavity, located at the contact surface between the housing and the cavity. Optionally, the predetermined position may be, for example, the closed position of the housing and the cavity. Based on the signal from the position sensor, the control valve 240 controls the flow of air into the manual directional valve 230. Specifically, when the valve is in the predetermined position (i.e., when the housing and cavity are closed), the control valve 240 controls the flow of air into the manual directional valve 230. At this time, the operation handle of the manual directional valve 230 can be operated. When the operation handle is in the first position, the plunger extends under air drive and engages with the lifting lug to lock, providing a basis for entering the first maintenance state. When the operation handle is switched to the second position, the plunger retracts under air drive, disengages from the lifting lug, and unlocks, providing a basis for entering the second maintenance state. When the valve is not in the predetermined position, the opening device drives the housing to move upward, i.e., the housing separates from the cavity, in other words, it is in the maintenance state. At this time, the control valve 240 controls the flow of air into the manual directional valve 230. In this state, the operation handle of the manual directional valve 230 is prohibited. When the operator operates the operation handle, the plunger cylinder 220 will not move. This avoids the risk of the base falling due to accidental operation of the operating handle during maintenance. The operating handle is only effective when it is in the predetermined position.

[0066] Optional, see appendix. Figure 1 The cover also includes an adapter 134 and an RF unit 133. The adapter 134 is disposed above the housing, and the RF unit 133 is disposed above the adapter 134. The RF unit 133 includes an RF source and an RF matching unit connected thereto. The RF unit 133 is connected to the coil 122 through the adapter 134 to provide RF power to the coil 122, thereby forming plasma in the cavity.

[0067] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. Additionally, the term "connection" in this document indicates a direct connection between A and B, or an indirect connection between A and B, such as an indirect connection between A and B via C, or even via C and D, or more components. The connection between A and B can be integral or separate, detachable or fixed. The term "optional" in this document indicates that the technical feature can be combined with or not combined with any feature in the document.

[0068] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A plasma treatment device, characterized in that, include: cavity; A base is disposed above the cavity; A gas distribution component, which is disposed on the base, is used to input process gas into the cavity; A movable part is movably disposed above the cavity along the moving direction; A locking device is disposed on the base; A locking device is disposed on the moving part for locking the locked device in a first maintenance state; or unlocking the locked device in a second maintenance state. A gas delivery device includes a gas delivery pipeline and at least one connector module. The gas delivery pipeline and the connector module are connected to a gas distribution component to deliver process gas to the gas distribution component. The gas delivery pipeline includes a movable pipeline and a fixed pipeline. The movable pipeline is configured such that, in a first maintenance state or a second maintenance state, the movable pipeline and the fixed pipeline are connected via the connector module as the movable part moves.

2. The plasma treatment equipment as described in claim 1, characterized in that, The connector module includes a gas delivery front end, a gas delivery tail end, and an adjustment and fixing part; The gas delivery tail end is connected to the downstream end of the movable pipeline, and the gas delivery front end is connected to the upstream end of the fixed pipeline; the adjusting and fixing part is disposed on the movable part and is used to fix the gas delivery tail end and adjust the gap between the gas delivery front end and the gas delivery tail end.

3. The plasma treatment equipment as described in claim 2, characterized in that, The gas delivery front end is provided with a gas delivery surface, and the gas delivery tail end is provided with a gas delivery surface. The gas delivery surface of the gas delivery front end and the gas delivery surface of the gas delivery tail end are arranged opposite to each other, and the gap is formed between the gas delivery surface of the gas delivery front end and the gas delivery surface of the gas delivery tail end. The gap is adjustable in the moving direction of the moving part.

4. The plasma treatment equipment as described in claim 3, characterized in that, The adjusting and fixing part includes a main body, the main body is provided with a guide post extending along the moving direction, and the gas supply tail end is provided with a guide hole that cooperates with the guide post.

5. The plasma treatment equipment as described in claim 4, characterized in that, The adjusting and fixing part also includes an adjusting drive component, which is used to drive the gas delivery tail end to move along the guide column.

6. The plasma treatment equipment as described in claim 5, characterized in that, The main body is provided with a threaded hole extending along the moving direction, and the adjustment drive unit cooperates with the threaded hole to drive the gas delivery tail end to move along the moving direction in a rotating manner.

7. The plasma treatment equipment as described in claim 6, characterized in that, The adjusting and fixing part also includes a fixing member, which is used to fix the gas supply tail end after the movement adjustment.

8. The plasma treatment equipment as described in claim 7, characterized in that, The main body includes a vertical plate and a horizontal plate, the horizontal plate being disposed at the upper end of the vertical plate, and the vertical plate being fixed to the movable part.

9. The plasma treatment equipment as described in claim 8, characterized in that, The guide post is disposed on the lower surface of the horizontal plate, and the threaded hole is disposed on the horizontal plate; the gas delivery tail end and the gas delivery front end are disposed sequentially below the horizontal plate.

10. The plasma treatment equipment as described in claim 9, characterized in that, The gas delivery tail end is provided with a side, an upper surface and a lower surface; the gas delivery surface is provided on the lower surface and the guide hole is provided on the upper surface; the fixing member is connected to the side of the gas delivery tail end adjacent to the vertical plate to fix the gas delivery tail end and the vertical plate to the moving part.

11. The plasma treatment equipment as described in claim 10, characterized in that, The movable pipeline is connected to the upper surface of the gas delivery tail end, and the horizontal plate is provided with a receiving groove so that the movable pipeline can pass through.

12. The plasma treatment equipment as described in claim 10, characterized in that, The vertical plate is also provided with a strip groove, through which the fixing member passes and connects to the side of the gas delivery tail end.

13. The plasma treatment equipment as described in claim 1, characterized in that, The gas delivery device also includes a gas control module, which is located upstream of the connector module and is used to control the flow rate of the process gas entering the cavity.

14. The plasma treatment equipment as described in claim 2, characterized in that, The gas control module is disposed on the moving part; The fixed pipeline includes a first fixed pipeline, the upstream end of which is connected to the connector module, and the downstream end of which is connected to the gas distribution component. The movable pipeline includes a first movable pipeline, the upstream end of which is connected to the gas control module, and the downstream end of which is connected to the connector module.

15. The plasma treatment apparatus as described in claim 14, characterized in that, The fixed pipeline also includes a second fixed pipeline, the downstream end of which is connected to another connector module to provide a process gas source to the cavity; The movable pipeline includes a second movable pipeline, the upstream end of which is connected to the other connector module, and the downstream end of which is connected to the gas control module.

16. The plasma treatment equipment as described in claim 1, characterized in that, The locking device is a lifting lug; The locking device includes a plunger cylinder and a manual reversing valve. The plunger cylinder is located on the moving part and cooperates with the lifting lug. The manual reversing valve is connected to the plunger cylinder and is used to control the direction of air input to the plunger cylinder to achieve extension or retraction.

17. The plasma treatment apparatus as described in claim 16, characterized in that, The locking device further includes a position sensor and a control valve, wherein the position sensor is used to detect whether the moving part has reached a predetermined position; The control valve is connected to the position sensor and the manual directional valve respectively, and is used to control the on / off of the air input to the manual directional valve according to the signal from the position sensor.

18. The plasma treatment apparatus according to any one of claims 1-17, characterized in that, The moving part is the housing.

19. The plasma treatment apparatus as described in claim 18, characterized in that, The position sensor is disposed in the housing or cavity, located at the contact surface between the housing and the cavity.

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