A device for experimental study of performance parameters of a grating sensor

Abstract

The application discloses a device for experimental study on performance parameters of a grating sensor, which comprises an aluminum alloy fixing plate, a displacement table fixing base one and a displacement table fixing base two located at the top of the aluminum alloy fixing plate, and a translation assembly one, a translation assembly two and a frame assembly arranged at the top of the aluminum alloy fixing plate. The device for experimental study on performance parameters of the grating sensor can change the CCD imaging after adjusting the distance of the structure, can study the influence of the performance parameters of the grating sensor on the imaging result by observing the CCD image change, solves the problem of lacking experimental study on the performance parameters of the grating sensor, lays a foundation for the research and development of high-precision, high-resolution and fast-response grating measurement products, and meets the practical needs of the research and development of the grating sensor.

Description

Technical Field

[0001] This invention relates to the field of parameter experiment technology, specifically to a device for experimental research on the performance parameters of a grating sensor. Background Technology

[0002] With the rapid advancement of modern industrial technology towards high-end precision manufacturing, automation, and intelligence, unprecedented demands are being placed on the performance of displacement measurement, especially in terms of measurement accuracy, response speed, and dynamic performance. Grating displacement measurement technology, as a mainstream solution, addresses this challenge with its superior performance. When the grating ruler and the indicating grating move relative to each other, the precise geometric optical effects between their grating lines generate alternating bright and dark "moiré fringes" optical signals. These optical signals are converted into periodic electrical signals by photoelectric elements. By accurately counting the number of cycles of these electrical signals, and supplemented by precise electronic subdivision technology, the displacement and direction can be calculated in real time. Thanks to this non-contact measurement mechanism, grating sensors possess advantages such as strong anti-interference capabilities, fast response speed, and long lifespan, making it easy to automate displacement measurement and data processing.

[0003] Currently, the global market for grating measurement and positioning is basically dominated by Heidenhain of Germany and Renishaw of the UK. Leveraging their deep technological foundation and continuous R&D investment, their grating ruler products have established a leading advantage in measurement accuracy, response speed, resolution, and product iteration speed, thus building technological barriers. Research on grating precision measurement technology in China started relatively late, and there is a significant gap compared to international research on cutting-edge grating techniques.

[0004] The performance parameters of grating sensors are the core elements that directly determine the performance of displacement measurement systems. Accurate modeling and optimization of these parameters are the key to systematically improving measurement accuracy, resolution, and dynamic response speed.

[0005] Currently, domestic research on the performance parameters of grating sensors is limited and mostly remains theoretical, lacking experimental research and sufficient performance parameter data. This restricts the independent development and industrialization of grating measurement instruments with high precision, high resolution, and fast response capabilities for high-end applications in my country.

[0006] Therefore, there is an urgent need to develop a device for experimental research on the performance parameters of grating sensors. Summary of the Invention

[0007] The purpose of this section is to outline some aspects of the embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0008] 1. Technical problems to be solved:

[0009] To address the problem of insufficient performance parameter data for grating sensors mentioned above, this invention is proposed.

[0010] Therefore, the purpose of this invention is to provide an apparatus for experimental research on the performance parameters of grating sensors, which solves the problem of lack of experimental research on the performance parameters of grating sensors, lays the foundation for the development of high-precision, high-resolution, and fast-response grating measurement products, and meets the practical needs of grating sensor development.

[0011] 2. Technical Solution:

[0012] To address the aforementioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution:

[0013] An apparatus for experimental research on the performance parameters of a grating sensor includes an aluminum alloy fixing plate, and a displacement stage fixing base one and a displacement stage fixing base two located on the top of the aluminum alloy fixing plate. The top of the aluminum alloy fixing plate is provided with a translation component one, a translation component two, and a frame component.

[0014] in:

[0015] The translation component includes a ball bearing translation stage disposed on the top of the displacement stage fixed base and an indicator grating fixing frame disposed on the top of the ball bearing translation stage.

[0016] The translation component two includes a ball bearing translation stage two disposed on the top of the displacement stage fixed base two and a front grating fixing frame disposed on the top of the ball bearing translation stage two;

[0017] The frame assembly includes a first scale grating fixing frame and a second scale grating fixing frame arranged opposite each other, with scale gratings inserted into the top of the first scale grating fixing frame and the second scale grating fixing frame.

[0018] As a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, one side of the scale grating has an indicator grating, which is attached to the groove of the indicator grating holder, and the other side of the scale grating is provided with a front grating module connected to the side wall of the front grating holder.

[0019] As a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, a plate-level camera is provided on the indicator grating holder, and an adjustment shim is provided between the indicator grating and the plate-level camera.

[0020] As a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the front grating module includes a front grating and a light source, which are coaxially fixed relative to each other by an aluminum alloy structure. The front grating module is fixed on the front grating mounting bracket. The light source, the front grating module, the scale grating, the indicator grating, and the plate-level camera are coaxially arranged according to a transmissive grating structure.

[0021] As a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the plate-level camera receives images in real time, observes the Talbot effect, and measures the influence of geometric position on the imaging results by adjusting the distance between the scale grating and the front grating module, the distance between the scale grating and the indicator grating, and the distance between the indicator grating and the plate-level camera.

[0022] In a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the distance between the scale grating and the front grating module, and the distance between the scale grating and the indicator grating, are adjusted by the first ball translation stage and the second ball translation stage.

[0023] In a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the distance between the indicator grating and the plate-level camera is adjusted by adding or subtracting shims.

[0024] As a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the first ball translation stage and the second ball translation stage have a resolution of 0.01 mm and a stroke of 3.25 mm.

[0025] In a preferred embodiment of the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention, the thickness of the adjusting shim 6 is 0.3 mm to 0.7 mm.

[0026] 3. Beneficial effects:

[0027] Compared with the prior art, the beneficial effects of the present invention are:

[0028] The apparatus for experimentally studying the performance parameters of this type of grating sensor consists of a light source, a front grating module, a scale grating, an indicator grating, and a plate-level camera, all coaxially arranged according to a transmissive grating structure to simulate the internal structure of the grating sensor. Collimated light emitted from the light source passes sequentially through the front grating module, the scale grating, and the indicator grating before being imaged onto the plate-level camera, where the Talbot effect can be observed.

[0029] The apparatus for experimental research on the performance parameters of this type of grating sensor has a fixed relative position between the light source and the front grating module. The distance between the front grating module and the scale grating, and the distance between the scale grating and the indicator grating, are adjusted using two ball-bearing translation stages with a resolution of 0.01 mm. The distance between the indicator grating and the plate-level camera is adjusted by adding or subtracting shims. The shims are shaped to match the camera housing and have a thickness between 0.3 mm and 0.7 mm. After adjusting the distance of the structure, the CCD imaging changes. By observing the changes in the CCD image, the influence of the grating sensor performance parameters on the imaging results is studied. This solves the problem of the lack of experimental research on the performance parameters of grating sensors, lays the foundation for the development of high-precision, high-resolution, and fast-response grating measurement products, and meets the practical needs of grating sensor development. Attached Figure Description

[0030] To more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0031] Figure 1 This is a schematic diagram of the device for experimental research on the performance parameters of a grating sensor according to the present invention;

[0032] Figure 2 This is a schematic diagram of a Tambo imaging device with spherical wave illumination for experimental research on the performance parameters of a grating sensor according to the present invention.

[0033] Figure 3 A schematic diagram of a spherical wave illumination for experimental research on the performance parameters of a grating sensor according to the present invention;

[0034] Figure 4 This is a schematic diagram of a CCD image obtained from an experiment using a device for experimental research on the performance parameters of a grating sensor according to the present invention.

[0035] Figure 5 This is a schematic diagram demonstrating the apparatus for experimental research on the performance parameters of a grating sensor according to the present invention.

[0036] The following are the labels in the diagram: 1. Aluminum alloy fixing plate; 2. Displacement stage fixing base one; 3. Ball bearing translation stage one; 4. Indicator grating fixing bracket; 5. Scale grating fixing bracket one; 6. Adjustment shim; 7. Board-level camera; 8. Indicator grating; 9. Scale grating; 10. Front grating module; 11. Scale grating fixing bracket two; 12. Front grating fixing bracket; 13. Ball bearing translation stage two; 14. Displacement stage fixing base two. Detailed Implementation

[0037] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0038] This invention is described in detail with reference to the schematic diagrams. When describing the embodiments of this invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not be construed as limiting the scope of protection of this invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0039] The orientation or positional relationship indicated in the terminology is based on the orientation or positional relationship shown in the accompanying drawings and is only for the convenience of describing the invention and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention.

[0040] The term "connection method" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0041] The embodiments of the present invention will now be described in further detail with reference to the accompanying drawings.

[0042] This invention provides a schematic diagram of the overall structure of an embodiment of a device for experimental research on the performance parameters of a grating sensor, comprising:

[0043] Please see Figures 1-5 The apparatus for experimental research on the performance parameters of a grating sensor according to this embodiment includes an aluminum alloy fixing plate 1, and also includes a displacement stage fixing base 1 2 and a displacement stage fixing base 2 14 located on the top of the aluminum alloy fixing plate 1. The top of the aluminum alloy fixing plate 1 is provided with a translation component 1, a translation component 2 and a frame component.

[0044] in:

[0045] The translation component includes a ball-bearing translation stage 3 disposed on the top of the displacement stage fixed base 2 and an indicator grating fixing frame 4 disposed on the top of the ball-bearing translation stage 3.

[0046] Translation component two includes a ball-bearing translation stage 2 13 disposed on the top of the translation stage fixed base 2 14 and a front grating fixing frame 12 disposed on the top of the ball-bearing translation stage 2 13;

[0047] The frame assembly includes a scale grating fixing frame 1 (5) and a scale grating fixing frame 2 (11) arranged opposite to each other, with a scale grating 9 inserted into the top of the scale grating fixing frame 1 (5) and the scale grating fixing frame 2 (11).

[0048] It is worth noting that, specifically, one side of the scale grating 9 has an indicator grating 8, which is attached to the groove of the indicator grating holder 4, and the other side of the scale grating 9 is provided with a front grating module 10 connected to the side wall of the front grating holder 12.

[0049] Next, specifically, a board-level camera 7 is installed on the indicator grating holder 4, and an adjustment shim 6 is installed between the indicator grating 8 and the board-level camera 7.

[0050] Specifically, the front grating module 10 includes a front grating and a light source, which are coaxially fixed together by an aluminum alloy structure. The front grating module 10 is fixed on the front grating mounting bracket 12. The light source, the front grating module 10, the scale grating 9, the indicator grating 8, and the board-level camera 7 are coaxially arranged according to the transmissive grating structure.

[0051] Furthermore, specifically, the board-level camera 7 receives images in real time and observes the Talbot effect. By adjusting the distance between the scale grating 9 and the front grating module 10, the distance between the scale grating 9 and the indicator grating 8, and the distance between the indicator grating 8 and the board-level camera 7, the influence of geometric position on the imaging results is measured.

[0052] It is worth noting that, specifically, the distance between the scale grating 9 and the front grating module 10, and the distance between the scale grating 9 and the indicator grating 8, are adjusted by the ball translation stage 1 3 and the ball translation stage 2 13.

[0053] Subsequently, specifically, the distance between the indicator grating 8 and the plate-level camera 7 is adjusted by adding or subtracting the adjustment shims 6.

[0054] Specifically, the resolution of ball translation stage 1 (3) and ball translation stage 2 (13) is 0.01 mm, and the stroke is 3.25 mm.

[0055] Finally, specifically, the thickness of the adjusting shim 6 is 0.3mm to 0.7mm.

[0056] Example 1

[0057] An apparatus for experimental research on the performance parameters of a grating sensor includes an aluminum alloy fixing plate 1, and a displacement stage fixing base 1-2 and a displacement stage fixing base 2-14 located on the top of the aluminum alloy fixing plate 1. The top of the aluminum alloy fixing plate 1 is provided with a translation component 1, a translation component 2 and a frame component.

[0058] in:

[0059] The translation component includes a ball-bearing translation stage 3 disposed on the top of the displacement stage fixed base 2 and an indicator grating fixing frame 4 disposed on the top of the ball-bearing translation stage 3.

[0060] Translation component two includes a ball-bearing translation stage 2 13 disposed on the top of the translation stage fixed base 2 14 and a front grating fixing frame 12 disposed on the top of the ball-bearing translation stage 2 13;

[0061] The frame assembly includes a scale grating fixing frame 1 (5) and a scale grating fixing frame 2 (11) arranged opposite to each other, with a scale grating 9 inserted into the top of the scale grating fixing frame 1 (5) and the scale grating fixing frame 2 (11).

[0062] It is worth noting that, specifically, one side of the scale grating 9 has an indicator grating 8, which is attached to the groove of the indicator grating holder 4, and the other side of the scale grating 9 is provided with a front grating module 10 connected to the side wall of the front grating holder 12.

[0063] Next, specifically, a board-level camera 7 is installed on the indicator grating holder 4, and an adjustment shim 6 is installed between the indicator grating 8 and the board-level camera 7.

[0064] Specifically, the front grating module 10 includes a front grating and a light source, which are coaxially fixed together by an aluminum alloy structure. The front grating module 10 is fixed on the front grating mounting bracket 12. The light source, the front grating module 10, the scale grating 9, the indicator grating 8, and the board-level camera 7 are coaxially arranged according to the transmissive grating structure.

[0065] Furthermore, specifically, the board-level camera 7 receives images in real time and observes the Talbot effect. By adjusting the distance between the scale grating 9 and the front grating module 10, the distance between the scale grating 9 and the indicator grating 8, and the distance between the indicator grating 8 and the board-level camera 7, the influence of geometric position on the imaging results is measured.

[0066] It is worth noting that, specifically, the distance between the scale grating 9 and the front grating module 10, and the distance between the scale grating 9 and the indicator grating 8, are adjusted by the ball translation stage 1 3 and the ball translation stage 2 13.

[0067] Subsequently, specifically, the distance between the indicator grating 8 and the plate-level camera 7 is adjusted by adding or subtracting the adjustment shims 6.

[0068] Specifically, the resolution of ball translation stage 1 (3) and ball translation stage 2 (13) is 0.01 mm, and the stroke is 3.25 mm.

[0069] Finally, specifically, the thickness of shim 6 is adjusted to 0.3mm.

[0070] Example 2

[0071] Please refer to Figure 3 , Figure 3 This is a schematic diagram of spherical wave illumination. In the diagram, x0y0 is the point source surface, x1y1 is the object plane, and the light field distribution at the image plane x2y2 is as follows:

[0072] .

[0073] In the formula, λ is the wavelength of light; d is the grating period; m and n are the diffraction orders of the grating in the x and y directions, respectively; A3 is a constant amplitude factor, which is related to factors such as light source intensity and propagation distance; z0 is the distance from the point source surface x0y0 to the object plane x1y1; and z1 is the distance from the object plane x1y1 to the image plane x2y2.

[0074] When the image of Taibo is formed, z1 and z0 satisfy: ,

[0075] The amplitude observed on the surface at this time is:

[0076] .

[0077] When forming the negative image of Taibo, z1 and z0 satisfy: ,

[0078] The amplitude on the observed surface is: .

[0079] Please refer to Figure 2 , Figure 2 This is a Talbot image for spherical wave illumination. By gradually increasing Z0 from top to bottom while keeping z0 = z1, the following conclusions are drawn: when z1 and z0 satisfy the spherical wave Talbot image, a 2x Talbot image is formed; when z1 and z0 satisfy the spherical wave inverted Talbot image, a 2x inverted Talbot image is formed; when z1 and z0 satisfy the spherical wave Talbot sub-image, a 4x Talbot sub-image is formed; the Talbot image possesses a certain depth of field.

[0080] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the experimental setup for studying the performance parameters of a grating sensor. The displacement stage fixing base 12, displacement stage fixing base 24, and scale grating fixing brackets 15 and 21 are fixed to the aluminum alloy fixing plate 1. Two ball bearing translation stages 13 and 23 are fixed to the displacement stage fixing base 12 and displacement stage fixing base 24, respectively. The light source of the front grating module 10, which contains the light source, and the front grating fixing bracket 12 are fixed to the ball bearing translation stage 23. The indicator grating fixing bracket 4, which holds the indicator grating 8, is fixed to the ball bearing translation stage 13. The scale grating 9 is installed in the grooves of the scale grating fixing brackets 15 and 21, and can move laterally along the grooves. The plate-level camera 7 can be directly mounted on the indicator grating fixing bracket 4, or it can be fixed to the indicator grating fixing bracket 4 together with the adjusting shim 6.

[0081] In this embodiment, the relative positions between the light source and the front grating module 10 are fixed, and the light source, front grating module 10, scale grating 9, indicator grating 8, and board-level camera 7 are always coaxial. According to the transmissive grating structure, the light source is an LED. The collimated light emitted by the LED light source passes sequentially through the front grating module 10, scale grating 9, and indicator grating 8, and is imaged onto the board-level camera 7 to obtain the image shown below. Figure 4 The CCD image shown.

[0082] This experiment primarily investigates three performance parameters: the distance between the front grating module 10 and the scale grating 9, the distance between the scale grating 9 and the indicator grating 8, and the distance between the indicator grating 8 and the board-level camera 7. One of these distances was adjusted while keeping the other two constant, and the optimal distance was selected based on changes in the CCD image. The distance between the front grating module 10 and the scale grating 9 was adjusted by turning the lead screw of the ball bearing translation stage 2 13; the distance between the scale grating 9 and the indicator grating 8 was adjusted by turning the lead screw of the ball bearing translation stage 1 3; and the distance between the indicator grating 8 and the board-level camera 7 was adjusted by adding or subtracting shims 6. The ball bearing translation stages 1 3 and 2 13 have a resolution of 0.01 mm and a stroke of 3.25 mm. The shims come in five thicknesses: 0.3 mm, 0.4 mm, 0.5 mm, 0.6 mm, and 0.7 mm. Three experiments were conducted on each of the three performance parameters, and the optimal performance parameters of the grating sensor were obtained by achieving the best imaging effect. The grating sensor structure was designed based on the optimal performance parameters obtained from the experiment, which improved the accuracy, resolution and response speed of the grating sensor and provided an important guarantee for the development of high-performance grating sensors.

[0083] Combination Figures 1-5 The apparatus for experimental research on the performance parameters of a grating sensor according to this embodiment is used in the following specific process:

[0084] 1. The system includes a light source, a front grating module 10, a scale grating 9, an indicator grating 8, a board-level camera 7, a displacement stage, and an optical fixing device. The displacement stage consists of two ball bearing translation stages, 3 and 13, each with a resolution of 0.01 mm. The optical fixing device includes an aluminum alloy fixing plate 1, a light source and front grating fixing bracket 12, a scale grating fixing bracket 5 and 11, and an indicator grating fixing bracket 4. The displacement stage fixing base 2 and 14, as well as the scale grating fixing brackets 5 and 11, are fixed to the aluminum alloy fixing plate 1.

[0085] 2. The light source and the front grating module 10 are coaxially fixed by an aluminum housing, which is fixed to the light source and front grating mounting bracket 12. The other side of the light source and front grating mounting bracket 12 is fixed to a displacement stage. When the displacement stage moves a certain distance, the light source and front grating mounting bracket 12 move a corresponding distance, thereby changing the distance between the front grating module 10 and the scale grating 9. The scale grating 9 is installed in the grooves of the scale grating mounting bracket 11 and the scale grating mounting bracket 21, and can be moved along the direction perpendicular to the light path.

[0086] 3. The indicator grating 8 is attached to the indicator grating holder 4, and the board-level camera 7 is fixed on the other side of the indicator grating holder 4. The distance between the indicator grating 8 and the board-level camera 7 is adjusted by adding or subtracting shims 6. Another displacement stage is fixed to the indicator grating holder 4. When the displacement stage moves a certain distance, the indicator grating holder 4 moves a corresponding distance, thereby changing the distance between the indicator grating 8 and the scale grating 9.

[0087] In addition, the circuits, electronic components and modules involved in this invention are all existing technologies, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The content protected by this invention does not involve any improvement to the internal structure and method.

[0088] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the invention. In particular, as long as there is no structural conflict, the features in the disclosed embodiments can be combined with each other in any manner. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An apparatus for experimental research on the performance parameters of a grating sensor, comprising an aluminum alloy fixing plate (1), characterized in that, It also includes a displacement stage fixing base one (2) and a displacement stage fixing base two (14) located on the top of the aluminum alloy fixing plate (1). The top of the aluminum alloy fixing plate (1) is provided with a translation component one, a translation component two and a frame component. in: The translation component includes a ball-bearing translation stage (3) disposed on the top of the displacement stage fixed base (2) and an indicator grating fixing frame (4) disposed on the top of the ball-bearing translation stage (3). The translation component two includes a ball bearing translation stage two (13) disposed on the top of the displacement stage fixed base two (14) and a front grating fixing frame (12) disposed on the top of the ball bearing translation stage two (13). The frame assembly includes a first scale grating fixing frame (5) and a second scale grating fixing frame (11) arranged opposite to each other. A scale grating (9) is inserted into the top of the first scale grating fixing frame (5) and the second scale grating fixing frame (11). The scale grating (9) has an indicator grating (8) on one side, and the indicator grating (8) is pasted in the groove of the indicator grating holder (4). The other side of the scale grating (9) is provided with a front grating module (10) connected to the side wall of the front grating holder (12). A plate-level camera (7) is provided on the indicator grating holder (4), and an adjustment shim (6) is provided between the indicator grating (8) and the plate-level camera (7). The front grating module (10) includes a front grating and a light source, which are coaxially fixed relative to each other by an aluminum alloy structure. The front grating module (10) is fixed on the front grating mounting bracket (12). The light source, the front grating module (10), the scale grating (9), the indicator grating (8), and the plate-level camera (7) are coaxially arranged according to the transmissive grating structure. The plate-level camera (7) receives images in real time and observes the Talbot effect. By adjusting the distance between the scale grating (9) and the front grating module (10), the distance between the scale grating (9) and the indicator grating (8), and the distance between the indicator grating (8) and the plate-level camera (7), the influence of geometric position on the imaging results is measured.

2. The apparatus for experimental research on the performance parameters of a grating sensor according to claim 1, characterized in that, The distance between the scale grating (9) and the front grating module (10), and the distance between the scale grating (9) and the indicator grating (8) are adjusted by the ball translation stage one (3) and the ball translation stage two (13).

3. The apparatus for experimental research on the performance parameters of a grating sensor according to claim 2, characterized in that, The distance between the indicator grating (8) and the plate-level camera (7) is adjusted by adding or subtracting shims (6).

4. The apparatus for experimental research on the performance parameters of a grating sensor according to claim 3, characterized in that, The resolution of the ball translation stage one (3) and the ball translation stage two (13) is 0.01mm, and the stroke is 3.25mm.

5. The apparatus for experimental research on the performance parameters of a grating sensor according to claim 4, characterized in that, The thickness of the adjusting shim (6) is 0.3mm to 0.7mm.

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