Automatic door opening device and method for semiconductor repository

Abstract

The invention discloses an automatic door opening device and method for a semiconductor storage warehouse, the device comprises a storage cabinet structure, a material moving assembly and a door opening assembly integrated on the material moving assembly, and the storage cabinet structure is provided with a bin door with a connecting bulge and a mechanical bin door locking mechanism. The door opening assembly comprises a door opening clamping assembly and a door opening power assembly, the door opening clamping assembly is used for clamping the connecting protrusion, the door opening power assembly is matched with the inclined face of the locking mechanism through linear pushing and a tail end rotating piece, linear motion is converted into rotating unlocking force, and lossless automatic unlocking of the bin door is achieved. Efficient integrated cooperation of material carrying and bin door opening is achieved, actions are clean and reliable, the structure is compact, the device can be easily integrated into an automatic semiconductor material carrying system, and the storage and taking efficiency and the automation level of the storage cabinet are remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor manufacturing and automated storage technology, in particular, to a device and method for realizing automatic, accurate and reliable opening and closing of the door of an independent bin in a high-density storage cabinet for semiconductor wafers, reticles and other materials. BACKGROUND

[0002] In an advanced semiconductor manufacturing plant, an automated material handling system (AMHS) is the core of achieving high efficiency and high yield. Wafers, reticles and other expensive and extremely sensitive materials to cleanliness are usually stored in dedicated high-clean storage cabinets (Stocker). With the increasing complexity of manufacturing processes and the degree of automation, seamless, fast and reliable connection between material storage nodes and handling robots (such as manipulators, automated guided vehicles, autonomous mobile robots) becomes crucial. Among them, the automatic opening and closing of the thousands of independent bin doors of the storage cabinet is one of the key bottlenecks to realize fully automated operation in the whole process.

[0003] Currently, the following problems exist in this field: The mainstream AMHS manipulator is responsible for material handling, but the storage cabinet door needs to be controlled separately. In the existing solution, the manipulator needs to wait for the response of an external actuator after reaching the station, or needs to carry a complex door opening end tool itself, resulting in a prolonged access cycle and affecting the overall equipment efficiency. There is a lack of a special door opening device that can efficiently cooperate with the handling manipulator and realize "open as soon as it arrives".

[0004] The semiconductor production environment usually requires a hundred-level cleanliness or even higher cleanliness. Some door opening mechanisms that use direct impact, electromagnet adsorption or friction transmission have the risk of generating particulate contamination or metal debris. At the same time, under long-term high-frequency operation, the mechanical structure is prone to wear and tear, the positioning accuracy is easily lost, and maintenance is frequent, affecting the continuous operation of the production line.

[0005] The existing storage cabinet door opening methods are mostly whole or manual, which are difficult to adapt to the rapid switching needs of multi-specification boxes (such as wafer transfer boxes and reticle transfer boxes) in flexible production. Modularizing and standardizing the automatic door opening function and integrating it into the existing or newly built storage cabinet system is an urgent need in the industry.

[0006] In summary, it is of great significance to develop an automatic door opening device specially used for semiconductor storage library, which is high-clean, high-reliable and easy to integrate. SUMMARY

[0007] The application aims to overcome the shortcomings of the prior art and provide a semiconductor storage library automatic door opening device and method.

[0008] To achieve the above object, the application adopts the following technical scheme: A semiconductor storage library automatic door opening device comprises: A storage cabinet structure comprises a storage cabinet fixed frame and a plurality of arrayed independent bins arranged thereon. Each independent bin comprises a bin body and a bin door body mounted thereon, and the outer side of the bin door body is provided with a connecting protrusion.

[0009] A bin door locking mechanism is fixedly installed on the storage cabinet fixed frame and arranged corresponding to the opening end of each independent bin. The mechanism comprises a reversible locking part and an elastic limiting component for mechanically locking the bin door in the closed state.

[0010] A material moving assembly comprises a movable connecting base, a multi-axis manipulator installed thereon, and a material inserting assembly connected to the end of the manipulator, for performing material taking and placing operations.

[0011] A door opening assembly is fixedly installed on the connecting base of the material moving assembly and moves integrally with the material moving assembly. The door opening assembly further comprises: A door opening fixed frame serves as the installation base of other components.

[0012] A door opening clamping assembly is installed on the door opening fixed frame and comprises a linearly movable driving module and a clamping jaw mechanism driven by the module, for accurately moving and clamping the connecting protrusion on the bin door body.

[0013] A door opening power assembly is installed on the door opening fixed frame near the door opening clamping assembly. It comprises another linearly movable driving module and a push rod mechanism driven by the module, and the end of the push rod mechanism is provided with a special rotating contact piece for positively pushing the reversible locking part of the bin door locking mechanism to release the mechanical locking of the bin door.

[0014] Further, the bin door locking mechanism comprises a fixed base plate, an upper fixed plate, a reversible locking part, a return spring, and an elastic limiting column. The reversible locking part is rotatably installed on the upper fixed plate through a pin shaft, and one end is provided with a clamping part for clamping the bin door locking block, and the other end is provided with an inclined guide slope. The elastic limiting column is always in contact with the reversible locking part under the action of the return spring, so as to keep the locking posture.

[0015] Further, the rotating contact piece at the end of the door opening power assembly comprises a fixed shaft and a freely rotatable shaft sleeve sleeved thereon, which is in contact with the inclined guide slope of the flip locking part during the advancing process to convert the linear thrust into a torque for rotating the flip locking part, with smooth action and small wear.

[0016] The application also provides an automatic door opening method based on the above device, comprising the following steps: S1: The material moving assembly carries the door opening assembly to a predetermined position in front of the target independent bin.

[0017] S2: The drive module of the door opening clamping assembly is actuated to adjust the position of the clamping jaw so that it is aligned with and clamps the connecting protrusion on the bin door.

[0018] S3: The drive module of the door opening power assembly is actuated to advance the rotating contact piece at the end thereof, which is in contact with and moves along the inclined guide slope of the flip locking part of the bin door locking mechanism, forcing the flip locking part to rotate against the pressure of the elastic limiting column.

[0019] S4: When the flip locking part is rotated to a specific angle, the clamping part thereof is completely separated from the locking block on the bin door, and the bin door is mechanically unlocked. At the same time, the elastic limiting column is clamped into a groove or inclined surface platform on the flip locking part under the action of the spring, temporarily keeping the flip locking part in the unlocked position.

[0020] S5: The door opening clamping assembly drives the clamped bin door to move backward or laterally, realizing the opening of the bin door. Subsequently, the manipulator of the material moving assembly can perform the material taking and placing operation.

[0021] S6: When closing the door, the process is reversed, the door opening clamping assembly sends the bin door back, the door opening power assembly reverses and retracts, and the flip locking part is automatically reset to the locked position under the action of the elastic limiting column, re-clamping the bin door locking block.

[0022] Compared with the prior art, the semiconductor storage bin automatic door opening device and method provided by the application has the following advantages: Efficient cooperation and seamless connection: the door opening assembly is directly integrated on the material moving assembly, realizing the integration and synchronization of the carrying and door opening actions, and the manipulator can immediately start the door opening process after being positioned, greatly shortening the material access cycle and improving the overall operation efficiency of AMHS.

[0023] High cleanliness and high reliability: the inclined surface guide and rotary unlocking principle is used, which is smooth in action, without impact and friction debris, meeting the requirements of the semiconductor clean environment. The mechanical structure is simple and robust, and the key moving parts are durable, ensuring the reliability of long-term high-frequency use and reducing maintenance costs.

[0024] Precise locking and non-destructive operation: The unique flip-locking mechanism and flexible limit design ensure secure locking and precise unlocking. The rotating contact design reduces stress at the contact points, preventing scratches or wear on the locking mechanism surface and enabling non-destructive operation of the door.

[0025] Modular design and strong compatibility: The entire door opening device is a standalone module that can be easily added to existing material handling robots or AGVs, or integrated as a standard module into newly built automated storage systems. Its design is adaptable to standardized silo doors of different sizes and specifications, offering excellent flexibility. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall structure of one embodiment of the present invention.

[0027] Figure 2 for Figure 1 A three-dimensional structural diagram of the independent silo in the middle.

[0028] Figure 3 for Figure 2 A three-dimensional structural diagram of the locking mechanism of the central warehouse door.

[0029] Figure 4 This is a perspective view of the material transfer assembly and the door opening assembly in one embodiment.

[0030] Figure 5 This is a three-dimensional structural diagram of a door opening assembly in one embodiment.

[0031] Figure 6 for Figure 5 A three-dimensional structural diagram of the center-opening door assembly from another angle.

[0032] Explanation of the labels in the diagram: 1-Storage cabinet structure; 11-Storage cabinet mounting frame; 12-Independent hopper; 121-Hhopper door body; 122-Hhopper body; 123-Hhopper door locking block; 13-Connecting protrusion; 14-Hhopper door locking mechanism; 141-Fixed base plate; 142-Upper fixed plate; 143-Flip locking part; 1431-Inclined guide part; 1432-Snap-fit ​​part; 144-Flip base; 145-Elastic connecting groove; 146-Reset spring; 147-Rotary connecting hole; 148-Elastic limiting component; 2-Transfer assembly; 21-Connecting base; 22-Robot arm; 23-Insertion assembly; 24-Door opening bracket; 25-Door opening power assembly; 251-First linear module; 252-First linear slide rail; 253-First guide connecting plate; 254-Linear cylinder; 255-Door opening frame; 256-Rotating connector; 26-Door opening clamping assembly; 261-Second linear slide rail; 262-Second linear module; 263-Second guide connecting plate; 264-Clamping motor; 265-Gripper. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention.

[0034] like Figure 1 As shown, the automatic door opening device for the semiconductor storage warehouse of the present invention is composed of a fixed part and a moving part. The fixed part is the storage cabinet structure 1, the core of which is a storage cabinet fixing frame 11 formed by welding or bolting. Dozens to hundreds of independent hoppers 12 are densely installed on the fixing frame in a matrix. The moving part is the material transfer assembly 2, which includes a connecting base 21 that can move along a preset track on the ground or through autonomous navigation, a multi-joint robot arm 22, and a material insertion assembly 23 for grasping standard material boxes (such as FOUPs). The core innovation of the present invention—the door opening assembly—is an integrated functional module, rigidly mounted on the connecting base 21 and located to the side of the robot arm 22, thus forming an integrated moving unit with the material transfer assembly 2.

[0035] In the initial standby state, the material transfer assembly 2 is located in the standby area of ​​the warehouse or the previous working position. The hopper doors 121 of all independent hoppers 12 are closed and securely locked by the hopper door locking mechanisms 14 at the four corners. The grippers 265 of the door opening assembly are in the open state, and the rotating connectors 256 of the door opening power assembly 25 are in the retracted and raised position to avoid interference with movement.

[0036] See Figure 2 Each independent hopper 12 has a hopper body 122 made of aluminum alloy profile, with internal guide grooves that match standard hopper boxes. A cylindrical connecting protrusion 13 is located at the center of the outer surface of the hopper door body 121; this protrusion surface can be knurled or covered with rubber to increase friction. Sealing strips are embedded around the inner perimeter of the hopper door to ensure airtightness when closed.

[0037] See Figure 3 The door locking mechanism 14 is the core component ensuring the safety and sealing of the door. Its fixed base plate 141 is fastened to the crossbeam of the storage cabinet mounting frame 11 with screws. The upper fixed plate 142 is vertically connected to the fixed base plate, forming a stable support structure. The flip locking part 143 is rotatably mounted on the flip base 144 through a hardened steel pin passing through the rotating connection hole 147.

[0038] Locking principle: Under the action of spring force, the snap-fit ​​part 1432 (a precision-machined hook-shaped boss) of the flip-locking part 143 is embedded in the corresponding groove of the door locking block 123 on the side of the door, so as to achieve mechanical locking.

[0039] Unlocking dynamics: The inclined guide 1431 is a polished bevel with an angle (denoted as θ) carefully designed, typically between 35° and 50°. This angle balances two aspects: if the angle is too small, the linear travel required for unlocking is too long; if the angle is too large, the linear thrust required for unlocking is too large and prone to wear. This bevel efficiently converts the horizontal linear thrust applied by the subsequent door opening power assembly into a torque that rotates the flip-lock 143 about the pin.

[0040] The elastic limiting component 148 contains a return spring 146 (preferably a stainless steel compression coil spring). This spring provides a preload of 5 to 15 N, which normally pushes the limiting post against the side of the flip-lock part 143, serving as the primary force source for maintaining the locked state. When the flip-lock part is pushed to the unlocked position, the limiting post slides into a shallow positioning recess on its back (not shown in the figure), using the spring force to create a temporary self-lock, preventing the locking part from accidentally springing back during door opening; this is the "unlock holding" function. When the door is closed and reset, the reverse thrust causes the limiting post to slide out of the recess, and the spring force then drives the locking part to rotate back to the locked position.

[0041] like Figure 4 , 5 As shown in Figure 6, the door opening assembly is supported by a rigid door opening bracket 24 and consists of two subsystems arranged side by side and with independent functions.

[0042] 1. Door opening clamping assembly 26: Precise positioning: The second linear module 262 (preferably a precision ball screw module driven by a servo motor) is responsible for providing the horizontal feed motion of the gripper 265. It and the second linear guide rail 261 form a high-rigidity, low-friction kinematic pair, ensuring positioning accuracy within ±0.1mm. The second guide connecting plate 263 serves as a load-bearing platform.

[0043] Intelligent clamping: The clamping motor 264 is a servo motor with integrated encoder and brake functions, driving a pair of grippers 265. Flexible clamping blocks (such as polyurethane) are embedded inside the grippers, and miniature pressure sensors are integrated. During operation, the grippers close to clamp the connecting protrusion 13. When the pressure sensor feedback value reaches a preset range (such as 20-30N), the motor stops, achieving "reliable and non-destructive" clamping.

[0044] 2. Door opening power component 25: Two-stage propulsion: The first linear module 251 provides the main horizontal stroke required for unlocking. The linear cylinder 254, mounted on the first guide connecting plate 253, provides a short vertical stroke to accurately align the rotating connector 256 to the height of the tilting guide 1431 before horizontal propulsion.

[0045] Low-friction contact: The rotary connector 256 is the direct actuator of the unlocking action. Its fixed shaft is made of stainless steel, while the fitted rotary bushing is made of high-performance engineering plastics (such as PEEK or oil-impregnated POM). This design allows the bushing to roll or slide freely when in contact with the metal inclined guide 1431, converting sliding friction into rolling friction or low-friction sliding, greatly reducing wear and particle generation, and meeting the cleanliness requirements of semiconductor equipment.

[0046] The following section, in conjunction with the control logic, details a complete automatic door opening, material retrieval, and door closing cycle: Step 1: Receive instructions and move / position.

[0047] The control system receives an instruction from the Material Management System (MCS) to retrieve material from the designated independent silo 12. The drive mechanism of the material transfer assembly 2 is activated, moving the entire integrated unit (including the robotic arm and door opening assembly) to the front of the target silo. Coarse positioning is performed using a machine vision camera or laser rangefinder mounted on the connecting base 21, ensuring that the door opening assembly is roughly aligned with the target silo door.

[0048] Step 2: Door clamping and precise alignment.

[0049] The door opening clamping assembly 26 is activated: the second linear module 262 drives the gripper 265 to move forward until the gripper enters the adjacent area of ​​the connecting protrusion 13.

[0050] A vision system or another set of sophisticated photoelectric position sensors (such as through-beam fiber optic sensors) confirms the relative position of the gripper and the protrusion.

[0051] The clamping motor 264 starts, driving the gripper 265 to close. A pressure sensor integrated within the gripper provides real-time force feedback. The control system employs closed-loop control to ensure the clamping force smoothly increases to and maintains the preset value. Upon completion of clamping, the sensor sends a "clamping successful" signal to the main controller.

[0052] Step 3: Mechanical unlocking.

[0053] This step can be partially parallel to step two, or it can be initiated after receiving a "clamping successful" signal to form a safety interlock.

[0054] Height alignment: The linear cylinder 254 of the door opening power assembly 25 is activated first, the piston rod extends, and drives the rotary connector 256 to descend to a preset height, so that the center of its bushing is aligned with the midpoint of the inclined surface of the inclined guide 1431 of the door locking mechanism 14.

[0055] Unlocking: The first linear module 251 is activated, propelling the entire assembly forward smoothly at a low speed (e.g., 50 mm / s). After the bushing of the rotating connector 256 contacts the inclined surface of the inclined guide 1431, it rolls / slides forward along the inclined surface.

[0056] Mechanical process: The horizontal thrust (F_h) is decomposed into a normal force (F_n) and an effective component force that rotates the flip-locking part 143 through the inclined plane. This component force overcomes the preload of the return spring 146 and the frictional torque, driving the locking part to rotate at a constant speed.

[0057] Unlock Confirmation: When the first linear module 251 moves to the preset unlock completion position (which can be located by an encoder), or when a miniature proximity sensor installed near the locking mechanism detects that the flip locking part 143 has reached the unlock angle, the control system determines that "mechanical unlocking is complete". At this time, the latching part 1432 has completely disengaged from the door locking block 123, and the limiting post of the elastic limiting component has been engaged in the positioning recess.

[0058] Step 4: Open the compartment door.

[0059] The control system will only allow the door to open after receiving both "clamping successful" and "unlocking completed" confirmation signals simultaneously.

[0060] The second linear module 262 of the door clamping assembly 26 moves in the opposite direction, causing the door body 121, which is firmly clamped, to move smoothly backward and open to a preset safe opening angle (such as 60°).

[0061] The door opening angle can be precisely controlled by the encoder of the second linear module 262.

[0062] Step 5: Material storage and retrieval.

[0063] Once the hopper door is fully open, the control system sends a "access ready" signal to the robotic arm 22. The robotic arm 22 then moves, driving the end-effector insertion component 23 to enter the hopper through the opened doorway and perform the operation of removing or placing materials into the hopper. This process is independent of the door opening component and is completed independently by the robotic arm.

[0064] Step 6: Close the door and reset the lock.

[0065] After the material storage and retrieval are completed, the process is reversed: Robotic arm 22 has completely exited the hopper.

[0066] The second linear module 262 of the door opening clamping assembly 26 moves forward, precisely pushing the door back to the closed position.

[0067] The first linear module 251 of the door opening power assembly 25 retracts in the opposite direction, causing the rotating connector 256 to separate from the inclined surface of the inclined guide 1431.

[0068] Once disengaged, the flip-locking part 143 automatically rotates instantly under the strong action of the return spring 146, and its locking part 1432 re-engages with the door locking block 123, producing a clear "click" mechanical locking sound. A sensor installed nearby can provide a "lock confirmation" signal.

[0069] The linear cylinder 254 retracts, lifting the rotary connecting piece 256.

[0070] The clamping motor 264 drives the gripper 265 to open, releasing the connecting protrusion 13.

[0071] Both the door opening clamping assembly and the door opening power assembly returned to their initial positions. The entire integrated unit was then moved aside, ready to perform the next task.

[0072] The compartment door is detachable and can be moved away as a whole after unlocking.

[0073] In this invention, such as Figure 2 As shown, when the independent hopper 12's door body 121 is closed, it is mechanically locked by the locking blocks 123 at its four corners and the engaging parts 1432 of the door locking mechanism 14 mounted on the storage cabinet frame 11. There is no physical hinge connection between the door body 121 and the hopper body 122; its sealing and positioning rely entirely on the precise engagement of the locking mechanism.

[0074] To illustrate this more accurately, the entire automatic door opening process is briefly summarized as follows: Positioning and clamping: The transfer assembly with integrated door opening component moves to the target independent hopper. The jaws 265 of the door opening clamping assembly 26 move and align with the connecting protrusion 13 on the hopper door body 121, and then clamp and fix it. At this time, the hopper door is still fixed to the opening of the hopper body 122 by the hopper door locking mechanism 14.

[0075] Mechanical unlocking: The rotating connector 256 of the door opening power assembly 25 moves forward, contacts and slides along the inclined guide portion 1431 of the flip-lock portion 143 in the door locking mechanism 14. This inclined plane action converts the linear thrust into rotational torque, forcing the flip-lock portion 143 to rotate against the elastic force, and the locking portion 1432 at its end lifts upward, thereby releasing the latching of the door locking block 123 on the door body 121. At this time, all mechanical connections between the door body 121 and the hopper body 122 are released.

[0076] Key steps of the detachable door opening: After the unlocking action is completed, the door opening clamping component 26 directly drives the clamped and now completely unlocked hopper door body 121 to move backward or sideways along a straight line or a preset trajectory, completely removing the entire hopper door from the front of the opening of the hopper body 122, thereby making a complete and unobstructed material storage and retrieval channel.

[0077] Reset and Locking: After material storage and retrieval are completed, the door clamping assembly 26 drives the hopper door body 121 to precisely reset to the hopper opening. The door opening power assembly 25 retracts, and the flip locking part 143 automatically rotates and resets under the action of the internal elastic element such as the reset spring 146. Its locking part 1432 presses down again and locks into the hopper door locking block 123, achieving automatic locking. Finally, the grippers release, and the device moves away.

[0078] The basic principles of this invention can be implemented in various ways, and are not limited to the foregoing preferred embodiments: Alternative drive methods: The first and second linear modules can be directly driven by linear motors, synchronous belt modules, or cylinders. The linear cylinder 254 can also be replaced by a miniature electric cylinder or a servo module to achieve more precise displacement control.

[0079] Locking mechanism variation: The mechanical tilting door locking mechanism 14 can be replaced with other linear moving pin mechanisms utilizing the inclined plane principle. In another embodiment, the door opening component of the present invention can be retained as the triggering mechanism, while the lock is changed to an electromechanical integrated lock, that is, the action of the door opening power component 25 is changed to trigger a micro switch, which controls the energization and de-energization of an electromagnetic lock, thereby realizing unlocking and locking.

[0080] Application Scenarios Expanded: The "mobile platform integrated end-point tool" and "mechanical inclined plane force conversion unlocking" concepts embodied in this device have universal applicability. It can be widely applied to other high-end manufacturing fields, such as glass substrate storage storage in the flat panel display (FPD) industry, silicon wafer cleanrooms in the photovoltaic industry, low-temperature sample libraries in the biomedical field, and any system requiring automated access to densely packed independent cabinet doors.

[0081] The technical scope of this invention is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this invention, and all such modifications and variations should fall within the protection scope of this invention.

Claims

1. An automatic door opening device for a semiconductor storage warehouse, comprising: The storage cabinet structure (1) includes a storage cabinet frame (11) and a plurality of independent hoppers (12) installed on the frame; each of the independent hoppers (12) includes a hopper body (122) and a hopper door body (121) that is openable and closable at the opening end of the hopper body, and the hopper door body (121) is provided with a connecting protrusion (13). Its characteristic is that it further includes: The door locking mechanism (14) is fixedly installed on the storage cabinet mounting frame (11) and is provided corresponding to the opening end of each of the independent hoppers (12) for locking the door body (121) in the closed position. The material transfer assembly (2) includes a connecting base (21), a robot arm (22) mounted on the connecting base, and a material insertion assembly (23) connected to the end of the robot arm. The door opening assembly is fixedly installed on the connecting base (21), and includes a door opening fixing bracket (24), a door opening power assembly (25) installed on the fixing bracket, and a door opening clamping assembly (26). The door opening clamping assembly (26) is used to clamp the connecting protrusion (13); the door opening power assembly (25) is used to drive and engage with the door locking mechanism (14) to release its lock on the door body (121).

2. The automatic door opening device for a semiconductor storage warehouse according to claim 1, characterized in that, The door locking mechanism (14) includes: A fixed base plate (141) is fixed to the storage cabinet mounting frame (11); The upper fixing plate (142) is installed on the fixing base plate (141); The flip-locking part (143) is rotatably mounted on the upper fixing plate (142) through the rotating connecting hole (147). An elastic limiting component (148) is mounted on the upper fixing plate (142) and is used to provide elastic limiting to the flip locking part (143); The flip-locking part (143) includes an inclined guide part (1431) for engaging with the door opening power assembly and a locking part (1432) for engaging with the door locking block (123) on the door body in the locked position.

3. The automatic door opening device for a semiconductor storage warehouse according to claim 2, characterized in that, The elastic limiting component (148) includes a limiting post and a return spring (146); the upper fixing plate (142) is provided with an elastic connecting groove (145) for accommodating the return spring; one end of the return spring (146) abuts against the bottom of the elastic connecting groove, and the other end acts on the limiting post, so that it has an elastic biasing force toward the flip locking part (143).

4. The automatic door opening device for a semiconductor storage warehouse according to claim 2, characterized in that, The door opening power assembly (25) includes: The first linear drive unit is installed on the door opening bracket (24). The first guide connecting plate (253) is connected to the output end of the first linear drive unit; A linear cylinder (254) has its cylinder body fixedly mounted on the first guide connecting plate (253); The opening frame (255) is connected to the piston rod of the linear cylinder (254); A rotating connector (256) is mounted on the opening frame (255) for contacting and pushing the tilting guide (1431) of the flip-locking part (143).

5. The automatic opening device for a semiconductor storage warehouse according to claim 4, characterized in that, The first linear drive unit includes a first linear module (251) and a first linear slide rail (252); the first guide connecting plate (253) is slidably connected to the first linear slide rail (252) through a slider and is driven by the first linear module (251).

6. The automatic opening device for a semiconductor storage warehouse according to claim 4, characterized in that, The rotating connector (256) includes a rotating connecting column fixed to the opening frame and a rotating bushing that is rotatably fitted onto the rotating connecting column.

7. The automatic door opening device for a semiconductor storage warehouse according to claim 1, characterized in that, The door opening clamping assembly (26) includes: The second linear drive unit is installed on the door opening bracket (24). The second guide connecting plate (263) is connected to the output end of the second linear drive unit; A clamping motor (264) is mounted on the second guide connecting plate (263); The gripper (265) is connected to the output shaft of the clamping motor (264) for performing clamping and releasing actions.

8. The automatic opening device for a semiconductor storage warehouse according to claim 7, characterized in that, The second linear drive unit includes a second linear module (262) and a second linear slide rail (261); the second guide connecting plate (263) is slidably connected to the second linear slide rail (261) via a slider and is driven by the second linear module (262).

9. The automatic opening device for a semiconductor storage warehouse according to any one of claims 1 to 8, characterized in that, Each of the independent hoppers (12) is provided with a hopper door locking mechanism (14) at the four corners of the opening end.

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