Vacuum coating device based on cooperative control of multiple electronic guns

Abstract

The invention belongs to the technical field of vacuum coating devices, and particularly relates to a vacuum coating device based on multi-electron gun cooperative control, which comprises an annular crucible, a material melting shell is installed on one side wall of the annular crucible in an embedded mode, a material melting electronic gun is installed on the outer side wall of the material melting shell, a material melting area matched with the material melting electronic gun to melt raw materials is arranged on the inner wall of the material melting shell, and wire feeding devices are arranged on the two sides of the annular crucible. A film coating shell is mounted on the other side wall of the annular crucible in an embedded manner; by means of the driving effect of a first air cylinder and a servo motor on a material carrying assembly, molten raw materials on the material carrying assembly are moved to the position near a second electromagnetic valve, the molten raw materials flow into a coating shell through a feeding hole by means of opening of the second electromagnetic valve, the raw materials in the coating shell can be conveniently taken by a coating electronic gun, and the coating efficiency is improved. The coating electron gun is used for evaporating and coating materials in a molten state.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of vacuum coating devices, and particularly relates to a vacuum coating device based on coordinated control of multiple electron guns. BACKGROUND

[0002] Vacuum coating technology is widely used in the fields of optics, electronics and precision manufacturing due to its strong adhesion and high purity. In the current mainstream coating process, a single electron gun system is the traditional core configuration. This system needs to simultaneously undertake the tasks of raw material melting and evaporation coating, and has many technical bottlenecks. In the pre-melting stage, the material needs to be completely melted, which leads to a significant reduction in production efficiency. During the coating process, the state of the molten material is prone to fluctuation, which causes uneven evaporation rate and seriously affects the uniformity of the coating. After long-term high-temperature melting, alloy materials may also have composition segregation problems. In addition, the high-power continuous working mode of the single electron gun significantly accelerates the wear of the gun body and shortens the service life of the equipment.

[0003] Therefore, in order to solve the deficiencies of the single electron gun system in the vacuum coating process in the prior art, a device is needed that can effectively transport and utilize the molten material through coordinated control of multiple electron guns to improve production efficiency. SUMMARY

[0004] To solve the above problems, the application provides a vacuum coating device based on coordinated control of multiple electron guns, which comprises a ring-shaped crucible. A molten material shell is embedded and installed on one side wall of the ring-shaped crucible. A molten material electron gun is installed on the outer side wall of the molten material shell. A molten material area for melting raw materials in cooperation with the molten material electron gun is arranged on the inner wall of the molten material shell. A wire feeding device is arranged on both sides of the ring-shaped crucible. A coating shell is embedded and installed on the other side wall of the ring-shaped crucible. A coating electron gun is installed on the outer side wall of the coating shell. A coating area for coating raw materials in cooperation with the coating electron gun is arranged on the inner wall of the coating shell. A material conveying inner cylinder is further arranged on the inner wall of the ring-shaped crucible. A load carrying assembly is slidably connected to the inner wall of the material conveying inner cylinder. A first air cylinder is embedded and installed at the bottom of the material conveying inner cylinder. A servo motor is drivingly connected to the output end of the first air cylinder. The output end of the servo motor is drivingly connected to the bottom end of the load carrying assembly.

[0005] Further, the outer wall of the material conveying inner cylinder is fixedly connected to the other end of the molten material shell and the coating shell.

[0006] Further, wire feeding holes are formed on both sides of the outer wall of the ring-shaped crucible. Feeding holes are formed on both sides of the outer wall of the molten material shell and are in communication with the wire feeding holes. The two groups of feeding holes are in communication with the wire feeding holes.

[0007] Further, the material delivered by the wire feeding devices on both sides is fed into the molten material area through the wire feeding holes, a first electromagnetic valve is embeddedly installed on one side wall of the annular crucible, a discharge hole is formed on one side of the outer wall of the coating shell and is in communication with the first electromagnetic valve, a second electromagnetic valve is embeddedly installed on the other side wall of the annular crucible, and a feeding hole is formed on one side of the outer wall of the coating shell and is in communication with the second electromagnetic valve.

[0008] Further, the material feeding assembly comprises a material feeding platform, the bottom of the material feeding platform is drivingly connected with the output end of the servo motor at the central axis center, and a material lifting hole is formed on the outer wall of the material feeding platform and away from the center.

[0009] Further, a spiral feeding rod is arranged on the inner wall of the material lifting hole, a second receiving shell is sleeved on the bottom end of the spiral feeding rod, the top end of the second receiving shell is fixedly connected to the bottom of the material feeding platform, and an adding groove is formed on the outer wall of the second receiving shell and close to one side of the inner wall of the material feeding inner cylinder.

[0010] Further, the adding groove is in communication with the first electromagnetic valve or the second electromagnetic valve, a discharging shell sleeved on the top end of the spiral feeding rod is fixedly connected to the top end of the material feeding platform, a stepping motor is fixedly connected to the top end of the inner wall of the discharging shell, and the output end of the stepping motor is drivingly connected with the top end of the spiral feeding rod.

[0011] Further, a discharging groove is formed on one side wall of the discharging shell, and a discharging inclined surface is arranged on one side of the outer wall of the discharging shell and close to the discharging groove.

[0012] Further, limit baffles are fixedly connected to the two side walls of the discharging inclined surface, a material guiding hole is further formed on the bottom end of the discharging shell and away from the discharging groove, and the material guiding hole is sleeved on the spiral feeding rod.

[0013] Further, second air cylinders are fixedly connected to the outer walls of the discharging shell on both sides, and the output ends of the two groups of second air cylinders are horizontally drivingly connected with guide outer shells, the inner walls of the guide outer shells are slidingly and tightly connected with two groups of linkage baffles, and the two groups of linkage baffles are elastically abuttingly connected with compression springs.

[0014] The beneficial effects of the present application are: 1. The raw material to be melted is transported into the molten material shell by the wire feeding device, and the raw material in the molten material shell is melted by the continuous operation of the molten material electron gun. After the raw material is melted, the first electromagnetic valve is opened to make the molten raw material flow to the top of the carrier assembly. The first cylinder and the servo motor drive the carrier assembly to move the molten raw material on the carrier assembly to the vicinity of the second electromagnetic valve. The second electromagnetic valve is opened to make the molten raw material flow into the coating shell through the feeding hole, so that the coating electron gun can take the raw material in the coating shell, and the coating electron gun can evaporate the material in the molten state for coating.

[0015] 2. During the rotation of the carrier platform by 180°, the second storage shell can be synchronously driven to be transported to the vicinity of the first electromagnetic valve and the discharge hole. After the first electromagnetic valve is opened, the continuously transported molten material in the molten material shell can enter the second storage shell through the addition groove, so that the molten material in the molten material shell can be discharged during the replenishment of the coating shell, and the wire feeding device and the molten material electron gun can be in a state of uninterrupted continuous operation, thereby improving the yield of molten material.

[0016] 3. The molten material in the second storage shell is lifted upward during the rotation of the spiral feeding rod, and the lifted molten material is transferred to the discharge inclined surface through the discharge groove. The molten material is transferred to the side wall of the guide outer shell away from the discharge shell by the action of the inclined surface guide. This process must be in the state that the guide outer shell is attached to the side wall of the discharge shell. Then the output end of the second cylinder horizontally pushes the guide outer shell to transport the lifted molten material to the second electromagnetic valve and the feeding hole, so that the molten material can be continuously transported into the coating shell.

[0017] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. The objects and other advantages of the present application can be realized and attained by the structure particularly pointed out in the description, claims and drawings. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without any creative labor.

[0019] Figure 1 The structure of the vacuum coating device based on the multi-electron gun cooperative control according to the embodiment of the present application is shown in the top view; Figure 2A structural schematic diagram of a vacuum coating device based on the coordinated control of multiple electron guns according to an embodiment of the present application is shown. Figure 3 A structural sectional view of the structure of a vacuum coating device based on the coordinated control of multiple electron guns according to an embodiment of the present application is shown. Figure 4 A connection schematic diagram of a melt shell and a melt electron gun according to an embodiment of the present application is shown. Figure 5 A connection schematic diagram of a coating shell and a coating electron gun according to an embodiment of the present application is shown. Figure 6 A connection schematic diagram of a material conveying inner cylinder and a material carrying assembly according to an embodiment of the present application is shown. Figure 7 A structural schematic diagram of a material carrying assembly according to an embodiment of the present application is shown. Figure 8 A structural schematic diagram of a material unloading shell according to an embodiment of the present application is shown. Figure 1 Figure 9 A structural schematic diagram of a material unloading shell according to an embodiment of the present application is shown. Figure 2

[0020] In the figure: 1, annular crucible; 2, melt shell; 3, melt electron gun; 4, wire feeding device; 5, coating shell; 6, coating electron gun; 7, material conveying inner cylinder; 8, material carrying assembly; 81, material carrying platform; 82, material lifting hole; 83, spiral material feeding rod; 84, second storage shell; 85, adding groove; 86, material unloading shell; 87, material unloading groove; 88, material unloading slope; 89, limiting baffle; 810, second air cylinder; 811, guiding outer shell; 812, linkage baffle; 813, material guiding hole; 9, wire feeding hole; 10, crucible cover; 11, first air cylinder; 12, servo motor; 13, material feeding slope; 14, material feeding hole; 15, material discharging hole; 16, material feeding hole; 17, first electromagnetic valve; 18, second electromagnetic valve. DETAILED DESCRIPTION

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings of the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0022] The embodiments of the present application provide a vacuum coating device based on the coordinated control of multiple electron guns, which comprises an annular crucible 1. Figures 1-6

[0023] ​​​The side wall of the ring-shaped crucible 1 is embedded with a molten material shell 2, the outer wall of the molten material shell 2 is provided with a molten material electron gun 3, and the inner wall of the molten material shell 2 is provided with a molten material area matched with the molten material electron gun 3 for melting raw materials, both sides of the ring-shaped crucible 1 are provided with wire feeding devices 4, the other side wall of the ring-shaped crucible 1 is embedded with a film coating shell 5, the outer wall of the film coating shell 5 is provided with a film coating electron gun 6, and the inner wall of the film coating shell 5 is provided with a film coating area matched with the film coating electron gun 6 for coating raw materials. The inner wall of the ring-shaped crucible 1 is further provided with a material conveying inner cylinder 7, and the outer wall of the material conveying inner cylinder 7 is fixedly connected with the other end of the molten material shell 2 and the film coating shell 5, the inner wall of the material conveying inner cylinder 7 is slidably connected with a material carrying assembly 8, the bottom of the material conveying inner cylinder 7 is embedded with a first air cylinder 11, and the output end of the first air cylinder 11 is drivingly connected with a servo motor 12, and the output end of the servo motor 12 is drivingly connected with the bottom end of the material carrying assembly 8. The outer wall of the ring-shaped crucible 1 is provided with wire feeding holes 9 on both sides, the outer wall of the molten material shell 2 is provided with feeding holes 14 which are in communication with the wire feeding holes 9, and the two groups of feeding holes 14 are in communication with the wire feeding holes 9, the materials fed by the wire feeding devices 4 on both sides pass through the wire feeding holes 9 and the feeding holes 14 into the molten material area, one side wall of the ring-shaped crucible 1 is embedded with a first electromagnetic valve 17, and the outer wall of the molten material shell 2 is provided with a discharging hole 15 which is in communication with the first electromagnetic valve 17, the other side wall of the ring-shaped crucible 1 is embedded with a second electromagnetic valve 18, and the outer wall of the film coating shell 5 is provided with a feeding hole 16 which is in communication with the second electromagnetic valve 18.

[0024] Further, the film coating shell 5 and the film coating electron gun 6 are connected to the film coating area of the vacuum film coating device.

[0025] Specifically, the wire feeding device 4 feeds the raw materials to be melted into the molten material shell 2, and the raw materials in the molten material shell 2 are melted by the continuous operation of the molten material electron gun 3, then the molten raw materials flow to the top of the material carrying assembly 8 by opening the first electromagnetic valve 17, and the molten raw materials on the material carrying assembly 8 are moved to the vicinity of the second electromagnetic valve 18 by the driving action of the first air cylinder 11 and the servo motor 12 on the material carrying assembly 8, and then the molten raw materials flow into the film coating shell 5 through the feeding hole 16 by opening the second electromagnetic valve 18, so that the film coating electron gun 6 can take the raw materials in the film coating shell 5, and the film coating electron gun 6 evaporates the materials in the molten state for film coating.

[0026] The material carrying assembly 8 includes a material carrying platform 81. Figure 7 , Figure 8 and Figure 9 as shown.

[0027] The bottom of the loading platform 81 is in transmission connection with the output end of the servo motor 12 at the center of the axis, the outer wall of the loading platform 81 is provided with a lifting hole 82 away from the center, the inner wall of the lifting hole 82 is provided with a spiral feeding rod 83, the bottom end of the spiral feeding rod 83 is sleeved with a second receiving shell 84, and the top end of the second receiving shell 84 is fixedly connected to the bottom of the loading platform 81, the outer wall of the second receiving shell 84 is provided with an adding groove 85 close to one side of the inner wall of the material conveying inner cylinder 7, the adding groove 85 is in communication with the first electromagnetic valve 17 or the second electromagnetic valve 18, and the top end of the loading platform 81 is fixedly connected with a discharging shell 86 sleeved at the top end of the spiral feeding rod 83, the inner wall of the discharging shell 86 is fixedly connected with a stepping motor at the top end, and the output end of the stepping motor is in transmission connection with the top end of the spiral feeding rod 83; One side wall of the discharging shell 86 is provided with a discharging groove 87, the outer wall of the discharging shell 86 is provided with a discharging slope 88 close to one side of the discharging groove 87, the two side walls of the discharging slope 88 are fixedly connected with limiting baffles 89, and the bottom end of the discharging shell 86 is further provided with a material guiding hole 813 away from the discharging groove 87, and the material guiding hole 813 is sleeved on the spiral feeding rod 83, the outer wall of the discharging shell 86 is fixedly connected with second air cylinders 810 on both sides, and the output ends of the two groups of second air cylinders 810 are in horizontal transmission connection with guide outer shells 811, the inner walls of the guide outer shells 811 are in sliding fit connection with two groups of linkage baffles 812, and the two groups of linkage baffles 812 are in elastic abutting connection with compression springs.

[0028] Specifically, after the first air cylinder 11 drives the loading platform 81 to fall to a position lower than the first electromagnetic valve 17, the molten material is guided to the top surface of the loading platform 81 by the feeding slope 13, and the molten material is stored on one side of the top surface of the loading platform 81 by the cooperation of the guide outer shell 811 and the two linkage baffles 812 on both sides, and the molten material is prevented from being concentrated on the side away from the discharging shell 86. The first cylinder 11 is matched with the servo motor 12, so that after the material loading platform 81 rotates 180 degrees, the molten material on the material loading platform 81 is transported to the vicinity of the second electromagnetic valve 18, the output end of the second cylinder 810 is used to horizontally push the guide outer shell 811, so that the guide outer shell 811 drives the linkage baffle 812 on both sides to extrude the compression spring in the guide outer shell 811, and the linkage baffle 812 on both sides is stored in the guide outer shell 811, in this process, the length of the guide outer shell 811 and the linkage baffle 812 on both sides is reduced, so that the molten material on the material loading platform 81 is pushed to the second electromagnetic valve 18 and the feeding hole 16, and the coating area is replenished during the rotation of the material loading platform 81 each time. During the rotation of the material loading platform 81 by 180 degrees, the second storage shell 84 can be synchronously driven to be transported to the vicinity of the first electromagnetic valve 17 and the discharge hole 15, and after the first electromagnetic valve 17 is opened, the molten material continuously delivered in the molten material shell 2 can enter the second storage shell 84 through the adding groove 85, so that the molten material in the molten material shell 2 can be discharged, the wire feeding device 4 and the molten material electron gun 3 are in a state of uninterrupted continuous work, and the yield of the molten material is improved. The molten material in the second storage shell 84 is lifted upward during the rotation of the spiral feeding rod 83, and is delivered to the discharge inclined surface 88 by the discharge groove 87, and is delivered to the side wall of the guide outer shell 811 away from the discharge shell 86 by the inclined surface guide, and the guide outer shell 811 is connected to the side wall of the discharge shell 86, and the output end of the second cylinder 810 is used to horizontally push the guide outer shell 811, so that the lifted molten material is delivered to the second electromagnetic valve 18 and the feeding hole 16 again, and the molten material is continuously delivered to the coating shell 5.

[0029] The vacuum coating device based on the multi-electron gun cooperative control provided by the embodiment of the application has the following working principle: After the material loading platform 81 is lowered to a horizontal position lower than the first electromagnetic valve 17 by the first cylinder 11, the molten material is guided to the top surface of the material loading platform 81 by the feeding inclined surface 13, and the molten material is stored on one side of the top surface of the material loading platform 81 by the cooperation of the guide outer shell 811 and the linkage baffle 812 on both sides, and the molten material is prevented from being concentrated in the direction away from the discharge shell 86. By using the first cylinder 11 in conjunction with the servo motor 12, the loading platform 81 is rotated 180° to move the molten material on the loading platform 81 to the vicinity of the second solenoid valve 18. While facilitating the opening of the second solenoid valve 18, the output end of the second cylinder 810 horizontally pushes the guide housing 811, causing the guide housing 811 to drive the linkage baffles 812 on both sides. During the compression process of the compression spring inside the guide housing 811, the linkage baffles 812 on both sides are retracted into the guide housing 811. In this process, the length of the guide housing 811 and the linkage baffles 812 on both sides is reduced, which can push the molten material on the loading platform 81 into the second solenoid valve 18 and the feed hole 16, so as to replenish the coating area during each rotation of the loading platform 81. During the 180° rotation of the material loading platform 81, the second receiving shell 84 can be driven synchronously, and it can be transferred to the vicinity of the first solenoid valve 17 and the discharge port 15. After the first solenoid valve 17 is opened, the molten material continuously supplied from the molten material shell 2 can be fed into the second receiving shell 84 through the addition groove 85. This is to meet the needs of replenishing the coating shell 5 with molten material, and also to complete the unloading of molten material from the molten material shell 2, so that the wire feeding device 4 and the molten material electron gun 3 are in a state of uninterrupted continuous operation, thereby increasing the output of molten material. The molten material inside the second receiving housing 84 is lifted upwards as the screw feeder 83 rotates, and then transferred to the discharge ramp 88 by the discharge chute 87. The ramp guides the molten material to the side wall of the guide housing 811 away from the discharge housing 86. During this process, the guide housing 811 must be in close contact with the side wall of the discharge housing 86. Then, the output end of the second cylinder 810 pushes the guide housing 811 horizontally to transport the lifted molten material back into the second solenoid valve 18 and the feed hole 16, so as to continuously transport the molten material into the coating housing 5.

[0030] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum coating apparatus based on multi-electron gun cooperative control, characterized in that: The system includes an annular crucible (1); a molten material shell (2) is embedded in one side wall of the annular crucible (1), a molten material electron gun (3) is installed on the outer side wall of the molten material shell (2), and the inner wall of the molten material shell (2) is provided with a molten material area for melting the raw material in conjunction with the molten material electron gun (3); wire feeding devices (4) are provided on both sides of the annular crucible (1); a coating shell (5) is embedded in the other side wall of the annular crucible (1), a coating electron gun (6) is installed on the outer side wall of the coating shell (5), and the inner wall of the coating shell (5) is provided with a coating area for coating the raw material in conjunction with the coating electron gun (6); The inner wall of the annular crucible (1) is also provided with a material conveying inner cylinder (7). The inner wall of the material conveying inner cylinder (7) is slidably connected to a material carrying component (8). A first cylinder (11) is embedded in the bottom of the material conveying inner cylinder (7), and a servo motor (12) is driven to the output end of the first cylinder (11). The output end of the servo motor (12) is driven to the bottom end of the material carrying component (8).

2. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 1, characterized in that: The outer wall of the material conveying inner cylinder (7) is fixedly connected to the other end of the molten material shell (2) and the coating shell (5).

3. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 2, characterized in that: The outer walls of the annular crucible (1) are provided with wire feeding holes (9) on both sides, and the outer walls of the molten material shell (2) are provided with feeding holes (14) that communicate with the wire feeding holes (9), and both sets of feeding holes (14) are communicated with the wire feeding holes (9).

4. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 3, characterized in that: The material fed by the wire feeding devices (4) on both sides enters the melting area through the wire feeding hole (9) and the feeding hole (14). A first solenoid valve (17) is embedded in one side wall of the annular crucible (1), and a discharge hole (15) communicating with the first solenoid valve (17) is opened on one side of the outer wall of the melting shell (2). A second solenoid valve (18) is embedded in the other side wall of the annular crucible (1), and a feed hole (16) communicating with the second solenoid valve (18) is opened on one side of the outer wall of the coating shell (5).

5. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 1, characterized in that: The material loading assembly (8) includes a material loading platform (81); the center of the bottom central axis of the material loading platform (81) is connected to the output end of the servo motor (12), and a lifting hole (82) is provided on the outer wall of the material loading platform (81) away from the center.

6. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 5, characterized in that: The inner wall of the lifting hole (82) is provided with a spiral feeding rod (83), the bottom end of the spiral feeding rod (83) is sleeved with a second storage shell (84), and the top end of the second storage shell (84) is fixedly connected to the bottom of the loading platform (81). An adding groove (85) is opened on the outer wall of the second storage shell (84) and on the side close to the inner wall of the conveying inner cylinder (7).

7. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 6, characterized in that: The adding groove (85) is connected to the first solenoid valve (17) or the second solenoid valve (18). The top of the loading platform (81) is fixedly connected to the unloading housing (86) sleeved on the top of the screw feed rod (83). The top of the inner wall of the unloading housing (86) is fixedly connected to the stepper motor, and the output end of the stepper motor is connected to the top of the screw feed rod (83) in a transmission connection.

8. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 7, characterized in that: The unloading housing (86) has a discharge groove (87) on one side wall, and a discharge ramp (88) is provided on the outer wall of the unloading housing (86) and on the side near the discharge groove (87).

9. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 8, characterized in that: Limiting baffles (89) are fixedly connected to both sides of the unloading inclined surface (88). A feeding hole (813) is also provided at the bottom of the unloading housing (86) and on the side away from the unloading trough (87), and the feeding hole (813) is sleeved on the spiral feeding rod (83).

10. The vacuum coating apparatus based on multi-electron gun cooperative control according to claim 9, characterized in that: The outer walls of the unloading housing (86) are fixedly connected to two second cylinders (810), and the output ends of the two sets of second cylinders (810) are horizontally connected to guide housings (811). The inner walls of the guide housings (811) are slidably connected to two sets of linkage baffles (812), and the two sets of linkage baffles (812) are elastically connected to each other by compression springs.

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