Resonant pressure sensor high-temperature frequency measurement system and method based on reference beam
By adding a reference frequency resonator inside the resonant pressure sensor and using frequency ratio calculation, the problem of frequency measurement error caused by insufficient crystal oscillator stability under high temperature environment is solved, realizing high-precision pressure and temperature calculation, which is suitable for high-temperature closed environment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-02-06
- Publication Date
- 2026-03-27
Smart Images
Figure CN121740294A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of resonant pressure sensor technology, specifically relating to a high-temperature frequency measurement system and method for a resonant pressure sensor based on a reference beam. It can achieve high-precision calculation of pressure and temperature under high-temperature conditions, and solve the problems of frequency measurement error and sensor calculation error caused by insufficient crystal oscillator stability in high-temperature environments. Background Technology
[0002] A resonant pressure sensor is a high-precision pressure measurement device. Its core principle is to convert external pressure into stress changes in an internal resonator (such as a resonant beam), which in turn causes a change in the resonant frequency. By accurately measuring this frequency, the measured pressure value can be calculated. Therefore, the accuracy of the resonant frequency measurement is crucial to the performance of this type of sensor.
[0003] Currently, high-precision frequency measurements generally rely on a stable clock reference provided by an external crystal oscillator (CSO). Under normal temperature conditions, a cryogenic crystal oscillator (OCXO) can be used, with frequency stability reaching the 10ppb level, fully meeting the requirements for high-precision measurements. However, in special high-temperature applications such as oil and gas exploration downholes and aero-engine monitoring, ambient temperatures often exceed 150°C, even reaching over 200°C. Under these extreme conditions, conventional high-precision crystal oscillators cannot function properly, necessitating the use of specially designed high-temperature crystal oscillators. Existing commercially available high-temperature crystal oscillators generally have poor frequency stability, typically between 100ppm and 250ppm. This frequency drift is directly and proportionally transmitted to the resonant frequency measurement results, leading to significant errors in pressure calculations and making it difficult to meet the high-precision measurement requirements under high-temperature environments.
[0004] To address the issue of insufficient crystal oscillator stability, existing technologies primarily employ a "passive compensation" strategy. For example, one approach calibrates the crystal oscillator's temperature characteristic curve experimentally and then uses complex algorithms such as genetic algorithms for software compensation. However, this approach has significant limitations: firstly, the compensation algorithm is computationally complex, requiring additional high-performance computing modules, increasing system cost and power consumption; secondly, its maximum operating temperature is typically limited to 100°C, failing to meet the application requirements of higher-temperature environments (such as above 150°C). Another approach proposes using a GPS receiver module to acquire high-precision pulse-per-second (PPS) signals for real-time crystal oscillator error calibration. However, this approach is highly dependent on external GPS signals and cannot be reliably used in environments such as underground, confined spaces, or signal shielding. Furthermore, this approach is designed for general analog-to-digital conversion (AD acquisition) scenarios and is not optimized for the frequency measurement mechanism specific to resonant pressure sensors, resulting in poor adaptability and failing to directly solve the core challenge of resonant frequency measurement.
[0005] In summary, the core shortcomings of existing technologies lie in the lack of high-precision crystal oscillators in high-temperature environments, and the insufficient stability of available high-temperature crystal oscillators. Existing compensation schemes either suffer from insufficient temperature limits or rely on external signals and are incompatible with the sensor's operating principle, thus failing to effectively solve the frequency measurement error problem of resonant pressure sensors at high temperatures. The fundamental reason is that existing solutions all use a single crystal oscillator frequency as the measurement reference; any fluctuation in the crystal oscillator directly leads to measurement errors. Therefore, there is an urgent need for a new frequency measurement scheme for resonant pressure sensors that can avoid the influence of crystal oscillators at the measurement principle level, is independent of external conditions, and is suitable for high-temperature, enclosed environments. Summary of the Invention
[0006] To address the aforementioned technical problems, this invention provides a high-temperature frequency measurement system and method for a resonant pressure sensor based on a reference beam. A reference frequency resonator is added inside a conventional resonant pressure sensor. The ratio of the pressure-sensitive resonant beam frequency to the reference resonant beam frequency replaces the single pressure-sensitive resonant beam frequency as the calculation basis, fundamentally eliminating the crystal oscillator frequency term and avoiding the influence of crystal oscillator fluctuations. (The reference resonant beam does not need to be forced to satisfy "insensitivity to pressure and temperature," and conventional structures can also achieve this function through algorithm adaptation.)
[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows:
[0008] A high-temperature frequency measurement system for a resonant pressure sensor based on a reference beam, the system comprising:
[0009] The sensor core integrates three resonant beams: a first pressure-sensitive resonant beam, a second pressure-sensitive resonant beam, and a reference resonant beam.
[0010] The closed-loop control module is used to maintain the stable vibration of the three resonant beams in the sensor core and convert the corresponding resonant signal into a square wave signal for output.
[0011] The frequency acquisition module is used to perform cycle counting on the three square wave signals output by the closed-loop control module and the reference clock signal output by the high-temperature crystal oscillator connected to the frequency acquisition module within the same measurement cycle.
[0012] The frequency calculation module is used to calculate the frequency ratio between the first and second pressure-sensitive beams and the reference beam based on the period counting results, and to calculate the measured pressure and ambient temperature based on the frequency ratio. The high-temperature crystal oscillator frequency term is eliminated when calculating the frequency ratio.
[0013] Furthermore, the structure of the reference resonant beam includes a pair of resonant beams, and a longitudinal support beam and a transverse support beam for connecting and supporting the resonant beams, wherein the longitudinal support beam is configured to isolate the axial stress applied to the transverse support beam from the resonant beams.
[0014] Furthermore, a heterogeneous material layer is integrated on or inside the resonant beam to regulate its temperature characteristics, making it insensitive to ambient temperature.
[0015] Furthermore, the heterogeneous material layer is a silicon dioxide layer.
[0016] On the other hand, the present invention provides a high-temperature frequency measurement method for a resonant pressure sensor based on a reference beam, comprising:
[0017] Three resonant signals from the sensor core are acquired. The sensor core integrates a first pressure-sensitive resonant beam, a second pressure-sensitive resonant beam, and a reference resonant beam.
[0018] Within the same measurement cycle, the three square wave signals converted from the three resonant signals are periodically counted to obtain the first to third counting results, and the reference clock signal output by the high-temperature crystal oscillator is periodically counted to obtain the fourth to sixth counting results corresponding to the first to third counting results respectively.
[0019] Based on the first to sixth counting results, a first frequency ratio between the first pressure-sensitive beam and the reference beam, and a second frequency ratio between the second pressure-sensitive beam and the reference beam are calculated; wherein the high-temperature crystal oscillator frequency term is eliminated when calculating the frequency ratio; specifically: the frequency of the first pressure-sensitive resonant beam is calculated using the first counting result, the corresponding fourth counting result, and the high-temperature crystal oscillator frequency; the frequency of the second pressure-sensitive resonant beam is calculated using the second counting result, the corresponding fifth counting result, and the high-temperature crystal oscillator frequency; and the frequency of the first reference resonant beam is calculated using the third counting result, the corresponding sixth counting result, and the high-temperature crystal oscillator frequency.
[0020] The measured pressure and ambient temperature are calculated based on the first frequency ratio and the second frequency ratio.
[0021] Furthermore, by dividing the numerator of the crystal oscillator frequency term by the denominator, the calculation results of the first frequency ratio and the second frequency ratio are made independent of the frequency stability of the high-temperature crystal oscillator.
[0022] Furthermore, the calculated measured pressure and ambient temperature are obtained through a preset calculation model that characterizes the mapping relationship between frequency ratio and pressure and temperature.
[0023] Furthermore, the reference resonant beam is a resonant beam that is insensitive to both pressure and temperature.
[0024] Thirdly, the present invention provides an electronic device comprising: one or more processors; and a memory for storing one or more programs; wherein, when the one or more programs are executed by the one or more processors, the one or more processors implement the aforementioned high-temperature frequency measurement method of a reference beam-based resonant pressure sensor.
[0025] Fourthly, the present invention provides a computer-readable storage medium having executable instructions stored thereon, which, when executed by a processor, enable the processor to implement the aforementioned high-temperature frequency measurement method of a resonant pressure sensor based on a reference beam.
[0026] The beneficial effects of this invention are as follows:
[0027] This invention fundamentally eliminates errors from the measurement principle, significantly improving the accuracy of high-temperature measurements: The core of this invention lies in proposing a new approach of "frequency ratio calculation," which uses the frequency ratio of the pressure-sensitive resonant beam to the reference resonant beam as the basis for calculating pressure and temperature. This ratio completely eliminates the crystal oscillator frequency as a common term in the mathematical derivation, making the final calculation result independent of the crystal oscillator's own frequency stability. This means that even using ordinary commercial high-temperature crystal oscillators with frequency stability of only 100ppm~250ppm, high-precision frequency measurement can be achieved, fundamentally solving the problem of measurement accuracy degradation caused by unstable reference clocks in high-temperature environments.
[0028] The system boasts a more compact and reliable structure with lower implementation costs: Compared to existing solutions that rely on external GPS signals or require complex compensation algorithms, this invention creatively integrates the reference resonant beam directly into the sensor core, making it part of the sensing unit. This design eliminates the need for any external signal source or expensive ultra-stable external clocks or high-performance computing modules; it only requires adding simple cycle counting and ratio calculation functions to the original signal processing circuit. This significantly simplifies the system hardware structure, reduces overall cost and size, and avoids the failure risks of external modules in harsh environments such as downhole drilling, greatly improving the system's environmental adaptability and long-term operational reliability.
[0029] The technical implementation path is flexible, and the application prospects are broad: This invention offers flexibility in the requirements for the reference resonant beam. The optimal implementation scheme is to design a dedicated reference beam that is insensitive to both pressure and temperature. This is achieved by isolating pressure through a longitudinally localized support beam structure and offsetting the temperature effect through heterogeneous material modification, thus providing the most stable reference benchmark. However, the technical solution itself is not limited to this. Even if the reference beam exhibits some sensitivity to pressure and temperature, it can still be effectively compensated for through calibration and the establishment of a solution model. This provides diverse implementation methods for different process conditions and application requirements, enhancing the universality and engineering practicality of the solution. Attached Figure Description
[0030] Figure 1 This is a schematic diagram of the reference frequency resonant beam structure of the present invention;
[0031] Figure 2 This is a schematic diagram of the high-temperature frequency measurement and compensation system module of the resonant pressure sensor based on the reference beam of the present invention.
[0032] Figure 3 Here is a flowchart of the frequency calculation process;
[0033] Figure 4 To test the frequency stability error of the high-temperature crystal oscillator;
[0034] Figure 5 To solve the error of the calculated value at different temperatures using existing technology;
[0035] Figure 6 To measure the error in the calculated value at different temperatures using the frequency ratio calculation scheme of this invention. Detailed Implementation
[0036] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0037] This invention provides a high-temperature frequency measurement compensation system for a resonant pressure sensor based on a reference resonant beam, aiming to eliminate the influence of high-temperature crystal oscillator frequency fluctuations on resonant frequency measurement from a fundamental perspective. This scheme adds a reference frequency resonator inside a conventional resonant pressure sensor. Instead of directly using a single frequency as the calculation basis, it calculates the ratio between the frequency of the pressure-sensitive resonant beam and the frequency of the reference resonant beam, thereby eliminating the crystal oscillator frequency term in the calculation formula and avoiding its fluctuation influence. It should be noted that the reference resonant beam does not necessarily have to meet the ideal condition of being "completely insensitive to pressure and temperature." A conventionally structured resonant beam can also achieve its reference function through subsequent algorithm adaptation. Figure 1 As shown, this is the reference frequency resonant beam structure exemplified by the present invention:
[0038] The reference resonant beam is a composite structure, with a pair of resonant beams 101 at its core, serving as vibration units. It is connected to anchor points 104 for fixation and stress transmission via longitudinal support beams 102 and transverse support beams 103. External stresses on the reference resonant beam are transmitted to the transverse support beams 103 through the anchor points 104. A key design feature is the effective mechanical isolation of the stress on the transverse support beams 103 from the core vibration elements (resonant beams 101) via the longitudinal support beams 102, thus making the reference resonant beam as a whole insensitive to changes in external pressure.
[0039] Connecting the two resonant beams 101 via longitudinal support beam 102 enables coupled vibration of the two beams. This structure helps improve the mechanical quality factor (Q value) of the reference resonant beam, thereby enhancing the stability of its resonant frequency. To further insulate the reference resonant beam from ambient temperature, a layer of heterogeneous material, such as silicon dioxide, with a different coefficient of thermal expansion than silicon can be grown at corresponding positions on the resonant beam 101 using micro / nano fabrication processes such as epitaxial growth or vapor deposition. This heterogeneous material layer can regulate the temperature characteristics of the resonant beam, offsetting thermal stress caused by temperature changes, thus achieving temperature insensitivity of the reference resonant beam.
[0040] The reference resonant beam is driven and detected by an external circuit, specifically including: a bias electrode 201 for providing electrostatic bias, two driving electrodes 202 for applying an alternating signal to drive its vibration, the two driving electrodes 202 being connected to the same driving signal and simultaneously applying a driving force to the two resonant beams 101 through electrostatic force, and a detection electrode 203 for detecting the vibration signal of the resonant beam 101 based on capacitance change and outputting an electrical signal.
[0041] like Figure 2 The diagram shown is an overall schematic of the high-temperature frequency measurement compensation system for a resonant pressure sensor based on a reference resonant beam, as described in this invention. It mainly includes the following functional modules:
[0042] Sensor Core: This module is the sensing core of the entire system. It integrates three parallel resonant beams: a first pressure-sensitive resonant beam I, a second pressure-sensitive resonant beam II, and a reference resonant beam (either conventional or optimized) as described above. Its main function is to generate resonant frequency signals related to the external measured pressure (P) and ambient temperature (T). The signals generated by the first and second pressure-sensitive resonant beams I and II are directly correlated with P and T. For the optimized reference resonant beam, which is insensitive to temperature and pressure, its generated resonant frequency signal can be approximated as a constant. While the signal generated by the conventional reference resonant beam is also affected by P and T, it can still serve as a reference for subsequent error correction calculations. This module establishes an electrical connection with the subsequent closed-loop control module via electrode leads.
[0043] Closed-loop control module: The core function of this module is to perform independent closed-loop automatic gain control on the three resonant beams within the sensor core, ensuring that each resonant beam vibrates stably in its operating mode. Simultaneously, this module amplifies and shapes the weak sinusoidal electrical signal generated by the resonant beam vibration, converting it into a regular square wave signal for output, facilitating subsequent frequency measurement. The input of this module is connected to the sensor core via electrode leads, and the output is directly connected to the frequency acquisition module.
[0044] Frequency acquisition module: This module is a key hardware component for implementing the present invention. Its core function is to simultaneously complete the following two types of counting within the same measurement cycle:
[0045] The number of cycles of the three square wave signals output by the closed-loop control module (corresponding to the first pressure-sensitive resonant beam I, the second pressure-sensitive resonant beam II, and the reference beam, respectively) are counted to obtain the count values n1, n2, and n3.
[0046] The reference clock signal f0 output by the crystal oscillator module is synchronously counted within the same time period to obtain the crystal oscillator cycle numbers N1, N2, and N3 corresponding to the counting periods of the three square wave signals, respectively. It should be noted that the crystal oscillator cycle number is consistent with the physical duration corresponding to the square wave counting, thereby achieving accurate frequency measurement.
[0047] The input terminals of this module are connected to the closed-loop control module and the high-temperature crystal oscillator module, respectively, and the output terminal transmits six sets of counting results (n1, n2, n3, N1, N2, N3) to the frequency calculation module.
[0048] Frequency Calculation Module: This module typically consists of a microcontroller (MCU) and a data storage unit (such as EEPROM or Flash), responsible for core calculations. Its main functions include parameter storage and frequency calculation. The microcontroller first calculates the ratio of the pressure-sensitive beam frequency to the reference beam frequency based on the counting results transmitted from the frequency acquisition module. Then, according to a preset calculation model, it uses these ratios to calculate the final measured pressure (P) and ambient temperature (T). The module's input is connected to the frequency acquisition module, and its output is connected to a data output interface, allowing the calculated P and T results to be uploaded to a host computer or data recording system.
[0049] High-Temperature Crystal Oscillator: This solution uses a commercially available high-temperature crystal oscillator that can operate normally at high temperatures. Its core function is to provide a frequency reference clock signal, serving as a time base for cycle counting in the frequency acquisition module. To avoid time synchronization errors, the reference crystal oscillator frequency should be as high as possible, and significantly higher than the three frequency signals. This module is directly connected to the clock input of the frequency acquisition module.
[0050] like Figure 3 The diagram shows a detailed calculation flowchart of the high-temperature frequency measurement compensation method for the resonant pressure sensor based on the reference beam of the present invention. First, the closed-loop control module ensures the stable operation of the three resonant beams, and its output frequency is characterized as follows:
[0051] The first and second pressure-sensitive resonant beams I and II: their resonant frequencies vary with external pressure (P) and temperature (T), and can be expressed as follows: , : , (F1 and F2 are the corresponding calculation functions). It should be noted that the calculation functions here are only used to show that there is a certain mathematical relationship between pressure (P), temperature (T) and resonant frequency (f). The frequency can be calculated from pressure and temperature using any existing formula. The specific formula is not unique.
[0052] Reference resonant beam: Because it is insensitive to pressure and temperature, its resonant frequency is approximately fixed, and can be expressed as follows: : (a is a fixed value);
[0053] Next, the frequency acquisition module completes six sets of counts within the same measurement cycle:
[0054] The number of cycles of the three resonant beam square wave signals is counted to obtain n1 (number of cycles of resonant beam I), n2 (number of cycles of resonant beam II), and n3 (number of cycles of the reference beam).
[0055] The number of clock signal cycles output by the crystal oscillator is counted to obtain N1 (the number of crystal oscillator cycles within the counting period of the first pressure-sensitive resonant beam I), N2 (the number of crystal oscillator cycles within the counting period of the second pressure-sensitive resonant beam II), and N3 (the number of crystal oscillator cycles within the counting period of the reference resonant beam).
[0056] According to the definition of frequency, the relationship between the resonant frequency and the counting result can be obtained:
[0057] (1)
[0058] in, The frequency of the resonant beam ( ), This is the nominal frequency of the crystal oscillator. The number of periods of the resonant beam. This represents the number of crystal oscillator cycles.
[0059] The frequencies of the three beams acquired by the frequency acquisition module can be expressed as:
[0060] (2)
[0061] As can be seen from the above formula, if we use directly and Solving for temperature and pressure, crystal oscillator frequency Fluctuations will directly lead to and Measurement errors can affect the solution results.
[0062] To eliminate crystal oscillator frequency The frequency calculation module will use the effect of formula (2) in the frequency calculation module. and respectively with By analogy, we can obtain:
[0063] (3)
[0064] In formula (3), the crystal frequency f0 is completely eliminated, and the ratio result is only related to the counting result (n1, n2, n3, N1, N2, N3) and the constant a, and is not affected by the fluctuation of the crystal frequency.
[0065] When f0 is not a constant, that is, the functional relationship of f0(P,T) is equivalent to establishing a new mathematical relationship model, and this method is also applicable.
[0066] Finally, by substituting the ratio result of formula (3) into the preset solution model, the pressure and temperature can be calculated:
[0067] (4)
[0068] Wherein, G and H are solution functions, the forms of which are determined through calibration experiments.
[0069] Figures 4 to 6 Experimental comparison results were used to verify the high-temperature measurement compensation effect of the present invention. Among them, Figure 4 The measured frequency stability error curve of the high-temperature crystal oscillator in an environment above 150℃ was used to test the crystal oscillator. It was found that the crystal oscillator has a significant frequency drift under high temperature conditions (typical drift amount of 100ppm~250ppm). This drift characteristic directly affects the accuracy of traditional measurement methods. Figure 5 The study demonstrates that when using the existing frequency calculation scheme, the error of the calculated value at different temperatures drifts significantly with temperature changes because the crystal oscillator frequency drift is not compensated, resulting in a deterioration in the overall calculation accuracy. Figure 6 This demonstrates that after adopting the frequency ratio calculation scheme based on the reference beam of this invention, the calculated frequency error no longer drifts with temperature changes, and can maintain a low calculation error over a wide temperature range. The above comparison results fully verify the technical effect of this invention in eliminating the crystal oscillator frequency term in principle and effectively suppressing the influence of high-temperature crystal oscillator drift through frequency ratio calculation. This proves that the method can achieve high-precision pressure measurement under the condition of using ordinary high-temperature crystal oscillators, meeting the application requirements of high-temperature and harsh environments such as oil and gas wells.
[0070] Thirdly, the present invention provides an electronic device comprising: one or more processors; and a memory for storing one or more programs; wherein, when the one or more programs are executed by the one or more processors, the one or more processors implement the aforementioned high-temperature frequency measurement compensation method for a resonant pressure sensor based on a reference beam.
[0071] Fourthly, the present invention provides a computer-readable storage medium having executable instructions stored thereon, which, when executed by a processor, enable the processor to implement the aforementioned high-temperature frequency measurement compensation method for a resonant pressure sensor based on a reference beam.
[0072] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A high-temperature frequency measurement system for a resonant pressure sensor based on a reference beam, characterized in that, The system includes: The sensor core integrates three resonant beams: a first pressure-sensitive resonant beam, a second pressure-sensitive resonant beam, and a reference resonant beam. The closed-loop control module is used to maintain the stable vibration of the three resonant beams in the sensor core and convert the corresponding resonant signal into a square wave signal for output. The frequency acquisition module is used to perform cycle counting on the three square wave signals output by the closed-loop control module and the reference clock signal output by the high-temperature crystal oscillator connected to the frequency acquisition module within the same measurement cycle. The frequency calculation module is used to calculate the frequency ratio between the first and second pressure-sensitive beams and the reference beam based on the period counting results, and to calculate the measured pressure and ambient temperature based on the frequency ratio. The high-temperature crystal oscillator frequency term is eliminated when calculating the frequency ratio.
2. The high-temperature frequency measurement system for a resonant pressure sensor based on a reference beam according to claim 1, characterized in that, The structure of the reference resonant beam includes a pair of resonant beams, and a longitudinal support beam and a transverse support beam for connecting and supporting the resonant beams, wherein the longitudinal support beam is configured to isolate the axial stress applied to the transverse support beam from the resonant beams.
3. The high-temperature frequency measurement system for a resonant pressure sensor based on a reference beam according to claim 2, characterized in that, The surface or interior of the resonant beam is integrated with a heterogeneous material layer to regulate the temperature characteristics of the resonant beam, making it insensitive to ambient temperature.
4. The high-temperature frequency measurement system for a resonant pressure sensor based on a reference beam according to claim 3, characterized in that, The heterogeneous material layer is a silicon dioxide layer.
5. A high-temperature frequency measurement method for a resonant pressure sensor based on a reference beam, characterized in that, include: Three resonant signals from the sensor core are acquired. The sensor core integrates a first pressure-sensitive resonant beam, a second pressure-sensitive resonant beam, and a reference resonant beam. Within the same measurement cycle, the three square wave signals converted from the three resonant signals are periodically counted to obtain the first to third counting results, and the reference clock signal output by the high-temperature crystal oscillator is periodically counted to obtain the fourth to sixth counting results corresponding to the first to third counting results respectively. Based on the first to sixth counting results, a first frequency ratio between the first pressure-sensitive beam and the reference beam, and a second frequency ratio between the second pressure-sensitive beam and the reference beam are calculated; wherein the high-temperature crystal oscillator frequency term is eliminated when calculating the frequency ratio. The measured pressure and ambient temperature are calculated based on the first frequency ratio and the second frequency ratio.
6. The high-temperature frequency measurement method of the resonant pressure sensor based on a reference beam according to claim 5, characterized in that, By dividing the numerator and denominator of the fraction containing the crystal oscillator frequency term, the calculated results of the first frequency ratio and the second frequency ratio are made independent of the frequency stability of the high-temperature crystal oscillator.
7. The high-temperature frequency measurement method of the resonant pressure sensor based on a reference beam according to claim 5, characterized in that, The calculated pressure and ambient temperature are obtained through a preset calculation model that characterizes the mapping relationship between frequency ratio and pressure and temperature.
8. The high-temperature frequency measurement method of the resonant pressure sensor based on a reference beam according to claim 5, characterized in that, The reference resonant beam is a resonant beam that is insensitive to both pressure and temperature.
9. An electronic device, characterized in that, include: One or more processors; Memory, used to store one or more programs; When one or more programs are executed by the one or more processors, the one or more processors implement the high-temperature frequency measurement method of the resonant pressure sensor based on the reference beam as described in any one of claims 5-8.
10. A computer-readable storage medium, characterized in that, It stores executable instructions that, when executed by a processor, enable the processor to implement the high-temperature frequency measurement method of the resonant pressure sensor based on a reference beam as described in any one of claims 5-8.