Precise mechanical scanning equipment

By setting up a precision mechanical scanning device with multi-axis slide rails and a turntable between the X-ray emitter and the detector, the problem of the X-ray beam not being able to penetrate the workpiece at the optimal angle has been solved, enabling high-resolution full-coverage inspection of large and irregular workpieces in complex industrial environments.

CN121740915APending Publication Date: 2026-03-27CHONGQING ZHENCE SCI & TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-15
Publication Date
2026-03-27

AI Technical Summary

Technical Problem

In existing technologies, rotational motion alone cannot guarantee that the X-ray beam penetrates the critical area of ​​the workpiece at the optimal angle. Conventional rotational motion platforms cannot meet the inspection requirements of complex industrial sites, especially for large workpieces and irregularly shaped workpieces, where there are blind spots and artifacts.

Method used

Precision mechanical scanning equipment is used. A motion platform, including multi-axis slide rails and a turntable, is set between the X-ray emitter and the detector to realize the three-dimensional movement and angle adjustment of the workpiece, ensuring that the X-ray beam passes through the workpiece in the optimal path. Combined with X/Y/Z axis motion, full coverage detection is achieved.

Benefits of technology

It enables high-resolution, full-coverage inspection of large and irregular workpieces, improving the integrity and reliability of inspection, reducing blind spots and artifacts, and meeting the inspection needs of complex industrial sites.

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Abstract

The invention belongs to the field of industrial nondestructive testing, and particularly discloses precision mechanical scanning equipment which comprises an imaging mechanism and a motion platform, the imaging mechanism comprises a ray emitter and a ray detector, the ray emitter and the ray detector are oppositely arranged along the same axis, and the motion platform is arranged between the ray emitter and the ray detector; the motion platform comprises a bottom plate, a first Y-direction sliding rail arranged on the bottom plate, a first Y-direction sliding plate connected to the first Y-direction sliding rail in a sliding mode, a first X-direction sliding rail arranged on the first Y-direction sliding plate, a first X-direction sliding plate connected to the first X-direction sliding rail in a sliding mode, a Z-direction stand column arranged on the first X-direction sliding plate and a Z-direction sliding rail arranged on the Z-direction stand column. The first mounting frame is slidably connected to the Z-direction sliding rail; and the first rotary table is rotatably connected to the first mounting frame. By adopting the scheme of the invention, the problem that the conventional rotary motion platform cannot meet the detection requirement can be solved.
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Description

Technical Field

[0001] This invention belongs to the field of industrial non-destructive testing, and specifically relates to precision mechanical scanning equipment. Background Technology

[0002] Industrial nondestructive testing (NDT) is a class of techniques that detect and evaluate the internal and surface structure, properties, and state of an object without damaging or affecting its performance. Computed tomography (CT) and digital radiographs (DR) are two widely used techniques, both relying on the acquisition of information about the intensity attenuation of X-rays as they pass through an object. In classic theoretical models and early equipment, the requirement for workpiece movement was considered relatively simple: for DR inspection, theoretically, only moving the workpiece to a specific position under the X-ray beam path and keeping it stationary is needed to obtain a single projection image. For CT reconstruction, based on the idealized center slice theorem, theoretically, only a 360-degree continuous rotation of the workpiece around a single axis and the acquisition of a sufficient number of two-dimensional projections are needed to reconstruct a three-dimensional model using algorithms.

[0003] As CT / DR technology moves from the laboratory to complex industrial sites, actual industrial workpieces (such as aero-engine blades, irregularly shaped castings, and large welded structures) often have characteristics such as non-axisymmetric, free-form surfaces, and thin-walled deep cavities. Relying solely on rotational motion cannot guarantee that the X-ray beam always penetrates the critical areas of the workpiece at the optimal angle, leading to a decrease in local image quality, a lower defect detection rate, or the inability to avoid artifacts caused by structural overlap. Especially for large workpieces that far exceed the detector's field of view, pure rotation cannot achieve full coverage, and "segmented CT" or "local DR" may be required. This requires the workpiece to be able to switch positions over a wide range and with high precision in the X, Y, and Z directions, and conventional rotational motion platforms can no longer meet the inspection requirements.

[0004] In addition, when the workpiece is placed on a rotating platform, there will inevitably be contact between the bottom surface of the workpiece and the rotating platform, making it impossible to detect effectively. This is especially true for irregularly shaped workpieces, which may even require clamps for placement, further increasing the undetectable area and affecting the integrity and reliability of the detection structure. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a precision mechanical scanning device to solve the problem that relying solely on rotational motion cannot guarantee that the X-ray beam always penetrates the critical area of ​​the workpiece at the optimal angle, and that conventional rotational motion platforms can no longer meet the detection requirements.

[0006] According to embodiments of the present invention, the present invention adopts the following technical solution:

[0007] A precision mechanical scanning device includes an imaging mechanism and a motion platform. The imaging mechanism includes a radiation emitter and a radiation detector, which are arranged opposite each other along the same axis. The motion platform is positioned between the radiation emitter and the radiation detector. The motion platform includes a base plate, a first Y-axis slide rail mounted on the base plate, a first Y-axis slide plate slidably connected to the first Y-axis slide rail, a first X-axis slide rail mounted on the first Y-axis slide plate, a first X-axis slide plate slidably connected to the first X-axis slide rail, a Z-axis column mounted on the first X-axis slide plate, a Z-axis slide rail mounted on the Z-axis column, a first mounting frame slidably connected to the Z-axis slide rail, and a first turntable rotatably connected to the first mounting frame. The sliding directions of the first Y-axis slide plate, the first X-axis slide plate, and the first mounting frame are perpendicular to each other, and the rotation axis of the first turntable and the sliding direction of the first mounting frame are parallel to each other.

[0008] Compared with the prior art, the present invention has the following beneficial effects:

[0009] In this scheme, a motion platform is positioned between the X-ray emitter and the X-ray detector. The workpiece is placed on the first turntable of the motion platform. The sliding directions of the first Y-axis slide, the first X-axis slide, and the first mounting bracket are perpendicular to each other. The motion platform can adjust the position of the workpiece in real time. By rotating the first turntable, the angle of the workpiece can be adjusted to ensure that the X-rays always pass through the workpiece through the optimal path for detection. Furthermore, for large workpieces exceeding the field of view of the imaging mechanism, X / Y / Z-axis motion can be used to accurately and repeatedly position any local area of ​​the workpiece to the center of the scanning field of view, and then gradually move it to complete high-resolution full-coverage detection of large workpieces, balancing cost and performance.

[0010] Furthermore, the motion platform also includes a top plate, a second Y-axis slide rail disposed on the top plate, a second Y-axis slide plate slidably connected to the second Y-axis slide rail, a second X-axis slide rail disposed on the second Y-axis slide plate, and a second X-axis slide plate slidably connected to the second X-axis slide rail, with the top of the Z-axis column connected to the second X-axis slide plate.

[0011] Furthermore, the Z-axis column and the first X-axis sliding plate and the second X-axis sliding plate can be detachably connected.

[0012] Furthermore, a second mounting bracket is slidably connected to the Z-axis column, and a second turntable is rotatably connected to the second mounting bracket. The second turntable and the first turntable are arranged opposite to each other.

[0013] Furthermore, a first Z-axis slide plate and a second Z-axis slide plate are slidably connected on the Z-axis slide rail. A first mounting bracket is detachably connected to the first Z-axis slide plate, and a second mounting bracket is detachably connected to the second Z-axis slide plate.

[0014] Furthermore, several telescopic arms are fixed circumferentially between the top plate and the bottom plate.

[0015] Furthermore, a connecting arm is detachably connected between the top plate and the bottom plate, and an operating shaft is fixed in the middle of the connecting arm. The axis of the operating shaft is perpendicular to the rotation axis of the first turntable. The system also includes a drive component for driving the operating shaft to rotate.

[0016] Furthermore, an inclined reinforcing shaft is fixed between the operating shaft and the connecting arm.

[0017] Furthermore, there are two opposing Z-axis columns, with the first and second mounting brackets slidably connected to the two Z-axis columns on both sides respectively; and the line connecting the two Z-axis columns is perpendicular to the line connecting the ray emitter and the ray detector.

[0018] Furthermore, both the first and second turntables are equipped with adsorption components for adsorbing workpieces on their opposite sides. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present invention.

[0020] Figure 2 This is a schematic diagram of the overall structure of the motion platform in an embodiment of the present invention.

[0021] Figure 3 This is a schematic diagram of the overall structure of another design of the motion platform in an embodiment of the present invention.

[0022] Figure 4 This is a schematic diagram of the overall structure of another design of the motion platform in an embodiment of the present invention.

[0023] In the diagram: 101, Z-axis column; 102, Z-axis slide rail; 103, first Z-axis drive motor; 104, first Z-axis slide plate; 201, first Y-axis slide plate; 202, first X-axis slide rail; 203, first X-axis drive motor; 204, first X-axis slide plate; 301, base plate; 302, first Y-axis slide rail; 303, first Y-axis drive structure; 401, first turntable; 402, first mounting bracket; 501, top plate; 502, second Y-axis slide rail; 601, second Y-axis slide plate; 602, second X-axis slide rail; 603, second X-axis slide plate; 701, second Z-axis slide plate; 702, second turntable; 703, second mounting bracket; 801, radiation emitter; 802, radiation detector; 901, telescopic arm; 902, connecting arm; 903, reinforcing shaft; 904, operating shaft; 905, bracket. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings, and specific embodiments are given.

[0025] like Figure 1 , Figure 2 As shown, the precision mechanical scanning equipment includes an imaging mechanism and a motion platform. The imaging mechanism includes a radiation emitter 801 and a radiation detector 802. The radiation emitter 801 and the radiation detector 802 are arranged opposite each other along the same axis. The motion platform is arranged between the radiation emitter 801 and the radiation detector 802. The radiation emitted by the radiation emitter 801 passes through the workpiece placed on the motion platform and is received by the radiation detector 802 to achieve detection.

[0026] In practical design, the X-ray emitter 801 can be selected from existing technologies such as microfocus X-ray tubes (suitable for high-resolution, low-to-medium penetration scenarios) or electron linear accelerators (suitable for high-energy X-ray scenarios involving thick, high-density workpieces). The X-ray detector 802 is positioned opposite the X-ray emitter 801 and is used to convert X-ray photons into digital electrical signals. Specifically, it can be selected from existing technologies such as amorphous silicon flat panel detectors (widely used in DR and cone-beam CT), CMOS flat panel detectors (suitable for microfocus high-resolution CT), or linear array detectors (suitable for scanning DR or fan-beam CT). The appropriate X-ray emitter 801 and X-ray detector 802 can be selected according to the actual scanning requirements.

[0027] The motion platform includes a base plate 301, a first Y-axis slide rail 302 mounted on the base plate 301, a first Y-axis slide plate 201 slidably connected to the first Y-axis slide rail 302, a first X-axis slide rail 202 mounted on the first Y-axis slide plate 201, a first X-axis slide plate 204 slidably connected to the first X-axis slide rail 202, a Z-axis column 101 mounted on the first X-axis slide plate 204, a Z-axis slide rail 102 mounted on the Z-axis column 101, a first mounting frame 402 slidably connected to the Z-axis slide rail 102, and a first turntable 401 rotatably connected to the first mounting frame 402.

[0028] Specifically, the base plate 301 is used to place on a flat ground or workbench. In actual design, the base plate 301 can be fixed to the plane by conventional methods such as bolt connection, so that the base plate 301 can be placed stably on the plane.

[0029] A first Y-axis drive structure 303 is installed on the base plate 301. The first Y-axis drive structure 303 includes a first Y-axis rack fixed on the base plate 301. The length direction of the first Y-axis rack is parallel to the direction of the first Y-axis slide rail 302. A first Y-axis drive motor is fixed on the first Y-axis slide plate 201. A first Y-axis gear is fixed on the output shaft of the first Y-axis drive motor. The first Y-axis gear and the first Y-axis rack mesh and drive each other. When the first Y-axis drive motor drives the first Y-axis gear to rotate, the first Y-axis slide plate 201 is driven to slide along the first Y-axis slide rail 302 through meshing transmission.

[0030] A first X-axis lead screw is rotatably connected to the first Y-axis slide plate 201. The first X-axis lead screw and the first X-axis slide plate 204 are threaded together. A first X-axis drive motor 203 is fixed on the first Y-axis slide plate 201. The first X-axis drive motor 203 and the first X-axis lead screw are connected by transmission. When the first X-axis drive motor 203 drives the first X-axis lead screw to rotate, it drives the first X-axis slide plate 204 to slide along the first X-axis slide rail 202.

[0031] The above describes one gear and rack transmission method and one lead screw transmission method. Both methods can be selected in actual design. This embodiment is only one example of selection.

[0032] Two opposing Z-axis columns 101 are provided, and the line connecting the two Z-axis columns 101 is perpendicular to the line connecting the ray emitter 801 and the ray detector 802. In this embodiment, the imaging mechanism is set on the sliding path of the first Y-axis slide plate 201. Therefore, the line connecting the two Z-axis columns 101 is along the sliding direction of the first X-axis slide plate 204. The two sides of the first mounting bracket 402 are slidably connected to the two Z-axis columns 101 respectively. Specifically, the first Z-axis slide plate 104 is slidably connected to the Z-axis slide rails 102 on both sides. The first mounting bracket 402 is detachably connected to the first Z-axis slide plate 104, and the two sides of the first mounting bracket 402 are bolted to the first Z-axis slide plates 104 on both sides respectively. A first Z-axis drive motor 103 is fixed on the Z-axis column 101. A first Z-axis lead screw is rotatably connected to the Z-axis column 101. The first Z-axis lead screw and the first Z-axis slide plate 104 are threadedly connected. The first Z-axis drive motor 103 and the first Z-axis lead screw are connected by transmission. When the first Z-axis drive motor 103 drives the first Z-axis lead screw to rotate, it drives the first Z-axis slide plate 104 to rise and fall along the Z-axis slide rail 102.

[0033] The sliding directions of the first Y-axis slide plate 201, the first X-axis slide plate 204, and the first mounting bracket 402 are perpendicular to each other, so the workpiece placed on the first turntable 401 can achieve three-dimensional movement in space. The rotation axis of the first turntable 401 and the sliding direction of the first mounting bracket 402 are parallel to each other, so the workpiece placed on the first turntable 401 can perform rotational motion. A rotary motor for driving the rotation of the first turntable 401 is installed on the first mounting bracket 402.

[0034] In practical use, the workpiece is placed at the center of the first turntable 401. After the workpiece is stabilized, its position relative to the imaging mechanism is adjusted by sliding the first Y-axis slide plate 201, the first X-axis slide plate 204, and the first mounting bracket 402. The angle of the workpiece is adjusted by rotating the first turntable 401 to ensure that the X-rays from the X-ray emitter 801 can pass through the workpiece through the workpiece in the optimal path for detection. Of course, during the detection process, the sliding of the first Y-axis slide plate 201, the first X-axis slide plate 204, and the first mounting bracket 402, as well as the rotation of the first turntable 401, can be controlled in real time according to the detection needs to adjust the position and angle of the workpiece in real time for better detection.

[0035] In another embodiment of the invention, combined with Figure 3 As shown, the motion platform also includes a top plate 501, a second Y-axis slide rail 502 disposed on the top plate 501, a second Y-axis slide plate 601 slidably connected to the second Y-axis slide rail 502, a second X-axis slide rail 602 disposed on the second Y-axis slide plate 601, and a second X-axis slide plate 603 slidably connected to the second X-axis slide rail 602. The top of the Z-axis column 101 is connected to the second X-axis slide plate 603.

[0036] In this embodiment, the second Y-axis slide rail 502 and the second X-axis slide rail 602, which are both provided on the base plate 301 and the top plate 501, are equivalent to double limiting of the sliding in the X and Y directions. The movement of the workpiece in the X and Y directions is more stable. The Z-axis column 101 is also double limited by the base plate 301 and the top plate 501, so the movement of the workpiece in the X direction is also more stable, thus improving the precision of the workpiece position adjustment.

[0037] In another embodiment of the invention, combined with Figure 4 As shown, the Z-axis column 101, the first X-axis slide plate 204, and the second X-axis slide plate 603 are all detachably connected. Specifically, the bottom of the Z-axis column 101 is bolted to the first X-axis slide plate 204, and the top of the Z-axis column 101 is bolted to the second X-axis slide plate 603. Several telescopic arms 901 are fixed circumferentially between the top plate 501 and the bottom plate 301. Specifically, the telescopic arms 901 are conventional electric telescopic rods, which can adjust the distance between the top plate 501 and the bottom plate 301 to accommodate workpieces of different sizes. Furthermore, the Z-axis column 101 can be disassembled and replaced according to the actual distance between the top plate 501 and the bottom plate 301. During disassembly and replacement, since the first Z-axis slide plate 104 and the first mounting bracket 402 are also detachably connected, the first Z-axis slide plate 104 on the Z-axis column 101 can be replaced along with the Z-axis column 101, improving the convenience of replacement.

[0038] In another embodiment of the invention, combined with Figure 4As shown, a second mounting bracket 703 is slidably connected to the Z-axis column 101, and a second turntable 702 is rotatably connected to the second mounting bracket 703. The second turntable 702 and the first turntable 401 are arranged opposite to each other. The two sides of the second mounting bracket 703 are slidably connected to the two Z-axis columns 101 respectively. Specifically, a second Z-axis slide plate 701 is slidably connected to each of the two Z-axis slide rails 102. The second mounting bracket 703 is detachably connected to the second Z-axis slide plate 701, and the second mounting bracket 703 and the second Z-axis slide plate 701 are bolted together.

[0039] In this embodiment, a second turntable 702 is added, so the top plate 501 and the bottom plate 301 can be flipped as a whole. When the top plate 501 is flipped to the bottom, the workpiece can be placed on the second turntable 702 for inspection. This is suitable for workpiece inspection with high requirements, where there may be detection errors at the contact surface between the workpiece and the first turntable 401, so the workpiece needs to be flipped. However, when the workpiece size is large, the gap between the workpiece and the Z-axis columns 101 on both sides is limited. It is not easy to insert conventional clamps between the two Z-axis columns 101 to clamp the workpiece and flip it. Therefore, this embodiment presents a design idea of ​​directly flipping the entire motion platform.

[0040] Specifically, a connecting arm 902 is detachably connected between the top plate 501 and the bottom plate 301. The top of the connecting arm 902 is bolted to the top plate 501, and the bottom of the connecting arm 902 is bolted to the bottom plate 301. An operating shaft 904 is fixed in the middle of the connecting arm 902. The axis of the operating shaft 904 is perpendicular to the rotation axis of the first turntable 401, and the operating shaft 904 is located on the side of the imaging mechanism to avoid affecting the imaging mechanism. Rotating the operating shaft 904 by 180° achieves a 180° overall rotation of the motion platform. An inclined reinforcing shaft 903 is fixed between the operating shaft 904 and the connecting arm 902 to improve the connection stability between the operating shaft 904 and the connecting arm 902, thereby improving the stability of the rotation process.

[0041] In the actual design process, a drive component for rotating the operating shaft 904 is also included. This drive component can be a robotic arm that directly grips and rotates the operating shaft 904, or a motor fixed to the ground or other flat surface can be used as a transmission component. The motor's output shaft and the operating shaft 904 are connected via gears, and a bracket 905 is installed on the ground or other flat surface to stabilize the bracket 905. The bracket 905 and the operating shaft 904 are rotatably connected via bearings, thus directly driving the operating shaft 904 to rotate stably. During the flipping process, the first turntable 401 and the second turntable 702 clamp the workpiece, preventing it from falling.

[0042] In the actual design process, to facilitate the sliding of the second turntable 702 along the Z-axis after flipping, a second Z-axis drive motor is fixed on the Z-axis column 101, and a second Z-axis lead screw is rotatably connected to the Z-axis column 101. The first Z-axis lead screw and the second Z-axis lead screw are arranged side by side and do not interfere with each other. The second Z-axis lead screw and the second Z-axis slide plate 701 are threaded together, and the second Z-axis drive motor and the second Z-axis lead screw are driven together. When the second Z-axis drive motor drives the second Z-axis lead screw to rotate, it drives the second Z-axis slide plate 701 to rise and fall along the Z-axis slide rail 102.

[0043] Since the column is connected to both the first X-axis slide plate 204 and the second X-axis slide plate 603, when the first Y-axis slide plate 201 and the first X-axis slide plate 204 are driven to slide, the second Y-axis slide plate 601 and the second X-axis slide plate 603 can also slide synchronously. Therefore, the top plate 501 does not need to be equipped with a driving component. Alternatively, the top plate 501 can be designed with reference to the driving component on the bottom plate 301 to drive the second Y-axis slide plate 601 and the second X-axis slide plate 603 to slide. The two methods can be selected according to the actual situation.

[0044] In another embodiment of the present invention, adsorption components for adsorbing workpieces are installed on opposite sides of the first turntable 401 and the second turntable 702. These adsorption components fix the workpieces to prevent displacement during movement or rotation. In this embodiment, the adsorption components consist of multiple independent vacuum suction cups arranged in a two-dimensional matrix. By using a vacuum pump to adsorb the vacuum suction cups, a negative pressure adsorption zone is formed on the surfaces of the first turntable 401 and the second turntable 702, thereby adsorbing and fixing the workpieces.

[0045] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A precision mechanical scanning device, characterized in that, The system includes an imaging mechanism and a motion platform. The imaging mechanism includes a radiation emitter and a radiation detector, which are arranged opposite each other along the same axis. The motion platform is positioned between the radiation emitter and the radiation detector. The motion platform includes a base plate, a first Y-axis slide rail on the base plate, a first Y-axis slide plate slidably connected to the first Y-axis slide rail, a first X-axis slide rail on the first Y-axis slide plate, a first X-axis slide plate slidably connected to the first X-axis slide rail, a Z-axis column on the first X-axis slide plate, a Z-axis slide rail on the Z-axis column, a first mounting frame slidably connected to the Z-axis slide rail, and a first turntable rotatably connected to the first mounting frame. The sliding directions of the first Y-axis slide plate, the first X-axis slide plate, and the first mounting frame are perpendicular to each other, and the rotation axis of the first turntable and the sliding direction of the first mounting frame are parallel to each other.

2. The precision mechanical scanning device according to claim 1, characterized in that, The motion platform also includes a top plate, a second Y-axis slide rail disposed on the top plate, a second Y-axis slide plate slidably connected to the second Y-axis slide rail, a second X-axis slide rail disposed on the second Y-axis slide plate, and a second X-axis slide plate slidably connected to the second X-axis slide rail. The top of the Z-axis column is connected to the second X-axis slide plate.

3. The precision mechanical scanning equipment according to claim 2, characterized in that, The Z-axis column, the first X-axis sliding plate, and the second X-axis sliding plate can all be detachably connected.

4. The precision mechanical scanning equipment according to claim 2, characterized in that, A second mounting bracket is slidably connected to the Z-axis column, and a second turntable is rotatably connected to the second mounting bracket. The second turntable and the first turntable are arranged opposite to each other.

5. The precision mechanical scanning device according to claim 4, characterized in that, The Z-axis slide rail is slidably connected to a first Z-axis slide plate and a second Z-axis slide plate. The first mounting bracket is detachably connected to the first Z-axis slide plate, and the second mounting bracket is detachably connected to the second Z-axis slide plate.

6. The precision mechanical scanning device according to claim 2, characterized in that, Several telescopic arms are fixed circumferentially between the top plate and the bottom plate.

7. The precision mechanical scanning device according to claim 2, characterized in that, A connecting arm is detachably connected between the top plate and the bottom plate. An operating shaft is fixed in the middle of the connecting arm. The axis of the operating shaft is perpendicular to the rotation axis of the first turntable. The system also includes a driving component for driving the operating shaft to rotate.

8. The precision mechanical scanning device according to claim 7, characterized in that, An inclined reinforcing shaft is fixed between the operating shaft and the connecting arm.

9. The precision mechanical scanning device according to claim 4, characterized in that, The Z-axis column has two opposite columns, and the two sides of the first mounting bracket and the second mounting bracket are slidably connected to the two Z-axis columns respectively; and the line connecting the two Z-axis columns is perpendicular to the line connecting the ray emitter and the ray detector.

10. The precision mechanical scanning device according to claim 4, characterized in that, Both the first turntable and the second turntable have adsorption components installed on their opposite sides for adsorbing workpieces.