Image sensor and electronic device including the same

Abstract

An image sensor and an electronic device including the same are disclosed. The image sensor comprises a sensor substrate and a nanometer optical lens array, the sensor substrate comprises a plurality of photosensitive elements, and the nanometer optical lens array comprises a plurality of nanometer structures. The plurality of photosensitive elements includes a first main photosensitive element and a first angular photosensitive element that sense light of a first wavelength band and are arranged adjacent to each other in a first diagonal direction, and the nano-optical lens array includes a first main super-region corresponding to the first main photosensitive element and a first angular super-region corresponding to the first angular photosensitive element. The nanostructures arranged in the first angular super region are arranged to have symmetry based on a first axis and a second axis each passing through a center of the first angular super region, the first axis being parallel to a first diagonal direction and the second axis being parallel to a second diagonal direction different from the first diagonal direction.

Description

Technical Field

[0001] One or more exemplary embodiments of this disclosure relate to image sensors and electronic devices including such image sensors. Background Technology

[0002] Image sensors typically use color filters to sense the color of incident light. However, color filters can have low light utilization efficiency because they absorb light of colors other than the incident light. For example, when using a red-green-blue (RGB) color filter, only one-third of the incident light passes through the filter, while the remaining two-thirds are absorbed. Therefore, the light utilization efficiency is only about 33%. Consequently, in color display devices or color image sensors, most light loss occurs within the color filter. Summary of the Invention

[0003] An image sensor and an electronic device including the image sensor are provided, the image sensor including a nano-optical lens array with improved optical efficiency.

[0004] Other aspects will be set forth in part in the description which follows, and in part will be apparent from the description, or may be learned by practicing the embodiments presented in this disclosure.

[0005] According to one aspect of an exemplary embodiment of this disclosure, an image sensor includes: a sensor substrate including a plurality of photosensitive elements; and a nano-optical lens array including a plurality of nanostructures, the nano-optical lens array being configured to separate light of a first wavelength band, light of a second wavelength band different from the first wavelength band, and light of a third wavelength band different from the first and second wavelength bands from incident light, and to focus the separated light onto the plurality of photosensitive elements respectively, wherein the plurality of photosensitive elements includes a first master photosensitive element and a first corner photosensitive element, the first master photosensitive element and the first corner photosensitive element being configured to each sense light of the first wavelength band and arranged adjacent to each other in a first diagonal direction, the first corner photosensitive element having a size smaller than that of the first master photosensitive element, wherein the nano-optical lens array includes a first master superregion corresponding to the first master photosensitive element and a first corner superregion corresponding to the first corner photosensitive element. The first angular superregion contains nanostructures arranged to have symmetry based on a first axis and a second axis as axes of symmetry. The first axis passes through the center of the first angular superregion and is parallel to the first diagonal direction, and the second axis passes through the center of the first angular superregion and is parallel to the second diagonal direction, which is different from the first diagonal direction.

[0006] Nanostructures in the first angular superregion can be arranged such that their size distribution on the first axis can differ from their size distribution on the second axis.

[0007] In the nanostructures within the first angular superregion, the number of nanostructures located on the first axis can differ from the number of nanostructures located on the second axis.

[0008] The plurality of photosensitive elements may further include a second main photosensitive element and a second corner photosensitive element, each configured to sense light in a second wavelength band; a third main photosensitive element and a third corner photosensitive element, each configured to sense light in a third wavelength band; and a fourth main photosensitive element and a fourth corner photosensitive element, each configured to sense light in a first wavelength band. The first to fourth main photosensitive elements may be arranged in a 2×2 array in a first direction forming a 45° angle with respect to the second diagonal direction and in a second direction perpendicular to the first direction. The second corner photosensitive element may be arranged adjacent to the second main photosensitive element in the first diagonal direction, the third corner photosensitive element may be arranged adjacent to the third main photosensitive element in the first diagonal direction, and the fourth corner photosensitive element may be arranged adjacent to the fourth main photosensitive element in the first diagonal direction.

[0009] The nano-optical lens array may further include a second main superregion corresponding to the second main photosensitive element and a second corner superregion corresponding to the second corner photosensitive element. The nanostructures in the second corner superregion may be arranged to have symmetry based on a third axis and a fourth axis as axes of symmetry. The third axis passes through the center of the second corner superregion and is parallel to the first diagonal direction, and the fourth axis passes through the center of the second corner superregion and is parallel to the second diagonal direction.

[0010] Nanostructures in the second-angle superregion can be arranged such that their size distribution on the third axis can differ from their size distribution on the fourth axis.

[0011] The nano-optical lens array may further include a third main superregion corresponding to the third main photosensitive element and a third triangular superregion corresponding to the third corner photosensitive element. The nanostructures in the third corner superregion may be arranged to have symmetry based on the fifth axis and the sixth axis as the axes of symmetry. The fifth axis passes through the center of the third corner superregion and is parallel to the first diagonal direction, and the sixth axis passes through the center of the third corner superregion and is parallel to the second diagonal direction. The size distribution of the nanostructures in the third corner superregion on the fifth axis may be different from its size distribution on the sixth axis.

[0012] The nano-optical lens array may further include a second main superregion corresponding to the second main photosensitive region, a third main superregion corresponding to the third main photosensitive region, a fourth main superregion corresponding to the fourth main photosensitive element, a second corner superregion corresponding to the second corner photosensitive element, a third triangular superregion corresponding to the third corner photosensitive element, and a fourth corner superregion corresponding to the fourth corner photosensitive element. The arrangement of nanostructures in the first main superregion may be the same as the arrangement of nanostructures in the fourth main superregion, and the arrangement of nanostructures in the first corner superregion may be the same as the arrangement of nanostructures in the fourth corner superregion.

[0013] The first and fourth main photosensitive elements can be configured to sense green light, the second main photosensitive element can be configured to sense red light, and the third main photosensitive element can be configured to sense blue light.

[0014] The nano-optical lens array may include a first main green light condensing region configured to focus green light onto a first main photosensitive element, a first corner green light condensing region configured to focus green light onto a first corner photosensitive element, a main red light condensing region configured to focus red light onto a second main photosensitive element, a corner red light condensing region configured to focus red light onto a second corner photosensitive element, a main blue light condensing region configured to focus blue light onto a third main photosensitive element, and a corner blue light condensing region configured to focus blue light onto a third corner photosensitive element.

[0015] The width of the first angle green light gathering region along the first diagonal direction can be less than or equal to the width of the first angle super region along the first diagonal direction.

[0016] The width of the first corner green light gathering area along the second diagonal direction can be greater than the width of the first corner super area along the second diagonal direction.

[0017] The size of the first corner green light gathering area can be less than or equal to three times the size of the first corner superregion.

[0018] The nanostructures in the first-angle green light gathering region can be arranged such that their size distribution on the first axis can be different from their size distribution on the second axis.

[0019] The width of the first primary green light gathering region along the first diagonal direction can be greater than or equal to the width of the first primary super region along the first diagonal direction, and the width of the first primary green light gathering region along the second diagonal direction can be greater than the width of the first primary super region along the second diagonal direction.

[0020] The nano-optical lens array may further include a second corner superregion corresponding to the second corner photosensitive element, the size of the corner red light gathering region may be larger than the size of the second corner superregion, and the width of the corner red light gathering region in the second diagonal direction may be greater than or equal to the width of the corner red light gathering region in the first diagonal direction.

[0021] The nano-optical lens array may further include a second main superregion corresponding to the second main photosensitive element. The size of the main red light gathering region may be larger than the size of the second main superregion, and the width of the main red light gathering region in the second diagonal direction may be greater than or equal to the width of the main red light gathering region in the first diagonal direction.

[0022] The nano-optical lens array may further include a third triangular superregion corresponding to the third corner photosensitive element, the size of the corner blue light gathering region may be larger than the size of the third corner superregion, and the width of the corner blue light gathering region in the second diagonal direction may be greater than or equal to the width of the corner blue light gathering region in the first diagonal direction.

[0023] The nanostructures in the first master superregion can be arranged to have symmetry based on an axis passing through the center of the first master superregion and parallel to the first diagonal direction and an axis passing through the center of the first master superregion and parallel to the second diagonal direction as symmetry axes, or have symmetry based on an axis passing through the center of the first master superregion and parallel to a first direction forming a 45° angle with respect to the second diagonal direction and an axis passing through the center of the first master superregion and parallel to a second direction perpendicular to the first direction as symmetry axes.

[0024] According to one aspect of an exemplary embodiment of the present disclosure, an electronic device includes a lens assembly configured to form an optical image of an object, an image sensor configured to generate a signal by converting the optical image into an electrical signal, and a processor configured to process the signal generated by the image sensor.

[0025] The image sensor includes a sensor substrate and a nano-optical lens array. The sensor substrate includes multiple photosensitive elements, and the nano-optical lens array includes multiple nanostructures configured to separate light of a first wavelength band, light of a second wavelength band different from the first wavelength band, and light of a third wavelength band different from the first and second wavelength bands from incident light, and to focus the separated light onto the multiple photosensitive elements respectively. The multiple photosensitive elements include a first master photosensitive element and a first corner photosensitive element, which are configured to sense light of the first wavelength band respectively and are arranged adjacent to each other in a first diagonal direction. The first corner photosensitive element has a smaller size than the first master photosensitive element. The nano-optical lens array includes a first master superregion corresponding to the first master photosensitive element and a first corner superregion corresponding to the first corner photosensitive element. The nanostructures arranged in the first corner superregion are arranged to have symmetry based on a first axis and a second axis as axes of symmetry. The first axis passes through the center of the first corner superregion and is parallel to the first diagonal direction, and the second axis passes through the center of the first corner superregion and is parallel to a second diagonal direction different from the first diagonal direction. Attached Figure Description

[0026] The above and other aspects, features, and advantages of certain exemplary embodiments of this disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0027] Figure 1 This is a schematic block diagram of an image sensor according to an embodiment;

[0028] Figure 2 This is a plan view illustrating an example of the pixel arrangement in the pixel array of an image sensor according to an embodiment;

[0029] Figures 3A to 3C Each is a plan view illustrating an example of another pixel arrangement that can be applied to an image sensor pixel array according to an embodiment;

[0030] Figure 4 This is a plan view showing the arrangement of a plurality of photosensitive elements in a sensor substrate provided in a pixel array of an image sensor according to an embodiment;

[0031] Figure 5 This is a plan view illustrating the region division in the nano-optical lens array provided in the pixel array of an image sensor according to an embodiment;

[0032] Figure 6A This is a plan view illustrating an example arrangement of nanostructures included in a nano-optical lens array provided in a pixel array of an image sensor according to an embodiment. Figure 6B It is shown in detail Figure 6A A planar diagram of the arrangement of nanostructures in the angular hyperregion;

[0033] Figure 7A and Figure 7B These are the edges of the pixel array in the image sensor. Figure 6A A cross-sectional view taken from lines A-A' and B-B';

[0034] Figure 8 This is a plan view illustrating an example of a corner light-condensing region included in a nano-optical lens array within a pixel array of an image sensor according to an embodiment;

[0035] Figure 9 This is a plan view illustrating an example of a main light focusing region included in a nano-optical lens array within a pixel array of an image sensor according to an embodiment;

[0036] Figure 10A , Figure 10B and Figure 10C These are plan views illustrating examples of red light focusing regions, green light focusing regions, and blue light focusing regions included in the nano-optical lens array within the pixel array of an image sensor according to an embodiment.

[0037] Figure 11A and Figure 11B This is a graph showing the color separation performance of the image sensor according to the embodiment compared to a comparative example;

[0038] Figures 12A to 12C These are plan views illustrating other examples of red light focusing regions, green light focusing regions, and blue light focusing regions included in a nano-optical lens array according to another embodiment;

[0039] Figure 13 This is a plan view illustrating an example of the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0040] Figure 14 This is a plan view illustrating an example of the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0041] Figure 15 This is a plan view illustrating an example of the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0042] Figure 16 This is a plan view illustrating an example of the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0043] Figure 17AThis is a plan view illustrating an example of the axis of symmetry applied to the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0044] Figure 17B This is a plan view illustrating an example of a nano-optical lens array, in which the nanostructure is based on... Figure 17A The same axis of symmetry is arranged;

[0045] Figure 18A This is a plan view illustrating an example of the axis of symmetry applied to the arrangement of multiple nanostructures in a nano-optical lens array according to another embodiment;

[0046] Figure 18B This is a plan view illustrating an example of a nano-optical lens array, in which the nanostructure is based on... Figure 18A The same axis of symmetry is arranged;

[0047] Figure 19 It is a cross-sectional view of a pixel array in an image sensor that includes a nano-optical lens array according to another embodiment;

[0048] Figure 20 This is a block diagram of an electronic device including an image sensor according to an embodiment;

[0049] Figure 21 yes Figure 20 A block diagram of a camera module included in an electronic device;

[0050] Figure 22 It is a block diagram of an electronic device including a multi-camera module; and

[0051] Figure 23 It is provided in Figure 22 A detailed block diagram of a camera module in an electronic device. Detailed Implementation

[0052] The embodiments illustrated in the accompanying drawings will now be discussed in detail with reference to examples thereof, wherein the same reference numerals refer to the same elements throughout. In this regard, the embodiments described herein may take different forms and should not be construed as limited to the description set forth herein. Therefore, the embodiments described below are for illustrative purposes only, with reference to the accompanying drawings. As used herein, the term “and / or” includes any and all combinations of one or more of the associated listed items. Expressions such as “at least one of”, when following a list of elements, modify the entire list of elements without modifying any individual element of the list.

[0053] This disclosure will now be described in detail with reference to the accompanying drawings. The embodiments described herein are subject to various modifications and can be embodied in many different forms. In the drawings, the same reference numerals denote the same parts, and for ease of explanation, the dimensions of the parts in the drawings may be exaggerated.

[0054] In the following text, it will be understood that when a layer, region, or component is referred to as being "above" or "on" another layer, region, or component, it can be in contact with and directly on the other layer, region, or component, and there can be an intervening layer, region, or component.

[0055] It will be understood that although terms such as "first," "second," etc., may be used here to describe various components, these components should not be limited by these terms. These terms are only used to distinguish one component from another. These terms do not limit the materials or structures of the components to be different from each other.

[0056] A singular expression may encompass a plural expression unless it has a distinctly different meaning in the context. It will also be understood that when a portion is referred to as “comprising” a component, the portion may not exclude another component, but may further include another component, unless the context otherwise indicates.

[0057] Furthermore, the terms “…unit” and “…module” used herein specify a unit for performing at least one function or operation, and this can be implemented in hardware or software or a combination of hardware and software.

[0058] The use of the term "above" and similar indicative terms can correspond to both the singular and plural forms.

[0059] Furthermore, the steps of all methods described herein may be performed in any suitable order unless otherwise indicated herein or unless obviously contradicted by the context. Additionally, all exemplary terms (e.g., etc.) are used only for the purpose of describing the technical spirit, and the scope of the claims is not limited by these terms unless the context is limited by the claims.

[0060] Figure 1 This is a schematic block diagram of an image sensor 1000 according to an embodiment. (Refer to...) Figure 1 The image sensor 1000 may include a pixel array 1100, a timing controller (T / C) 1010, a line decoder 1020, and an output circuit 1030. The image sensor 1000 may be a charge-coupled device (CCD) image sensor or a complementary metal-oxide-semiconductor (CMOS) image sensor.

[0061] Pixel array 1100 may include pixels arranged in multiple rows and columns in a two-dimensional configuration. Row decoder 1020 may select one of the rows in pixel array 1100 in response to a row address signal output from timing controller 1010. Output circuit 1030 may output photosensitive signals from multiple pixels arranged in the selected row, column by column. For this purpose, output circuit 1030 may include column decoder and analog-to-digital converter (ADC). For example, output circuit 1030 may include multiple ADCs arranged in columns between column decoder and pixel array 1100, or may include a single ADC at the output of column decoder. Timing controller 1010, row decoder 1020, and output circuit 1030 may be implemented as a single chip or in separate chips. Processor for processing image signals output from output circuit 1030 may be implemented as a single chip with timing controller 1010, row decoder 1020, and output circuit 1030.

[0062] The pixel array 1100 may include multiple pixels that sense (or detect) light of different wavelengths. The pixel arrangement can be implemented in various ways.

[0063] Figure 2 An example of the pixel arrangement in the pixel array 1100 of the image sensor 1000 is shown. (Refer to...) Figure 2 The pixel array 1100 may include main pixels based on the Bayer pattern structure commonly used in image sensors and corner pixels between the main pixels. The pixel array 1100 includes multiple unit pixel structures arranged in two dimensions, each of which may include a main pixel and a corner pixel.

[0064] The main pixels may include a first green main pixel G1a, a red main pixel Ra, a blue main pixel Ba, and a second green main pixel G2a arranged in a 2×2 array in the first direction (X direction) and the second direction (Y direction). In the unit pixel structure, the red main pixel Ra and the blue main pixel Ba may be arranged in the second diagonal direction D2, and the first green main pixel G1a and the second green main pixel G2a may be arranged in the first diagonal direction D1, which intersects the second diagonal direction D2.

[0065] In the entire arrangement of the main pixels, a first row of multiple first green main pixels G1a and multiple red main pixels Ra arranged alternately in the first direction (X direction), and a second row of multiple blue main pixels Ba and multiple second green main pixels G2a arranged alternately in the first direction, can be repeatedly arranged in a second direction (Y direction) perpendicular to the first direction. The first direction and the second direction can be the directions in which the pixel array 1100 extends on the plane defined by the first direction and the second direction. For example, one side of the pixel array 1100 can extend in the first direction, and the other side of the pixel array 1100 can extend in the second direction. The first diagonal direction D1 can be the direction between the first direction and the second direction, and the second diagonal direction D2 can be the direction opposite to the first direction (negative X direction) and the direction between the second direction. The first diagonal direction D1 can be the direction forming a 45° angle with the second direction (Y direction). The second diagonal direction D2 can be the direction intersecting the first diagonal direction D1 and can be perpendicular to the first diagonal direction D1.

[0066] Corner pixels can be arranged adjacent to their corresponding main pixels along the first diagonal direction D1. For example, corner pixels may include a first green corner pixel G1b arranged to contact the first green main pixel G1a along the first diagonal direction D1, a red corner pixel Rb arranged to contact the red main pixel Ra along the first diagonal direction D1, a blue corner pixel Bb arranged to contact the blue main pixel Ba along the first diagonal direction D1, and a second green corner pixel G2b arranged to contact the second green main pixel G2a along the first diagonal direction D1. When only corner pixels are considered, multiple first green corner pixels G1b and multiple red corner pixels Rb can be arranged alternately in the first direction, and multiple blue corner pixels Bb and multiple second green corner pixels G2b can be arranged alternately in the first direction on different cross-sections in the second direction.

[0067] In the arrangement of all pixels in the pixel array 1100, the first green main pixel G1a, the first green corner pixel G1b, the second green main pixel G2a, and the second green corner pixel G2b can be arranged alternately along a cross section on the first diagonal direction D1. Therefore, only green pixels can be arranged on a cross section on the first diagonal direction D1. The first green corner pixel G1b can be arranged between the first green main pixel G1a and the second green main pixel G2a on the first diagonal direction D1, and the second green corner pixel G2b can be arranged between the second green main pixel G2a and the first green main pixel G1a on the first diagonal direction D1. Furthermore, in another cross section parallel to the first diagonal direction D1, the red main pixel Ra, the red corner pixel Rb, the blue main pixel Ba, and the blue corner pixel Bb can be arranged alternately. The red corner pixel Rb can be arranged on the first diagonal direction D1 between the red main pixel Ra and the blue main pixel Ba, and the blue corner pixel Bb can be arranged on the first diagonal direction D1 between the blue main pixel Ba and the red main pixel Ra.

[0068] In one cross-section along the second diagonal direction D2, the first green main pixel G1a, the red corner pixel Rb, the second green main pixel G2a, and the blue corner pixel Bb can be arranged alternately. Therefore, the red corner pixel Rb and the blue corner pixel Bb can be arranged between two green main pixels along the second diagonal direction D2. In another cross-section parallel to the second diagonal direction D2, the red main pixel Ra, the first green corner pixel G1b, the blue main pixel Ba, and the second green corner pixel G2b can be arranged alternately. Therefore, the first green corner pixel G1b and the second green corner pixel G2b can be arranged between the red main pixel Ra and the blue main pixel Ba along the second diagonal direction D2.

[0069] Each main pixel can have a size at least three times or more than that of a corner pixel (e.g., the width or length of one side of the pixel). For example, the width of a main pixel can be about 3 μm or more, and the width of a corner pixel can be about 1 μm or less. Therefore, the light-receiving area of ​​the main pixel can be larger than that of the corner pixel, and the sensitivity of the main pixel can be higher than that of the corner pixel. The image sensor 1000, including the pixel array 1100 having the above pixel arrangement, can be, for example, a high dynamic range (HDR) image sensor. In this case, in a low-luminance environment, an image can be generated primarily using the signal output from the main pixels, while in a high-luminance environment, an image can be generated using all the signals output from both the main pixels and the corner pixels. Therefore, by using main pixels with relatively high sensitivity and corner pixels with relatively low sensitivity, the contrast of the image can be greatly improved.

[0070] Figures 3A to 3CEach is a plan view illustrating an example of another pixel arrangement that can be applied to an image sensor pixel array according to an embodiment.

[0071] Figure 3A The diagram shows an RGBW-based layout, which includes the arrangement of main and corner pixels representing green (G), red (R), blue (B), and white (W).

[0072] Figure 3B The diagram shows an RYYB-based layout, which includes the main and corner pixels representing yellow (Y), red (R), blue (B), and yellow (Y).

[0073] Figure 3C The diagram shows a CMYY-based layout, which includes the arrangement of main and corner pixels representing yellow (Y), magenta (M), cyan (C), and yellow (Y).

[0074] In the following description, references are made for illustrative purposes. Figure 2 The example describes the pixel arrangement of an image sensor, but it should be noted that this description can be applied to modifications. Figures 3A to 3C The example shown is a pixel arrangement.

[0075] Figure 4 This is a plan view showing the arrangement of multiple photosensitive elements of a sensor substrate provided in the pixel array of an image sensor according to an embodiment.

[0076] The sensor substrate 110 may include a plurality of photosensitive elements configured to sense (or detect) incident light. The sensor substrate 110 may include a first main photosensitive element 111a and a first corner photosensitive element 111b, which are adjacent to each other, generate light of the same wavelength, and have different sizes.

[0077] The sensor substrate 110 may include a plurality of first main photosensitive elements 111a, a plurality of second main photosensitive elements 112a, a plurality of third main photosensitive elements 113a, and a plurality of fourth main photosensitive elements 114a. The sensor substrate 110 may also include a plurality of first corner photosensitive elements 111b, a plurality of second corner photosensitive elements 112b, a plurality of third corner photosensitive elements 113b, and a plurality of fourth corner photosensitive elements 114b.

[0078] Reference Figure 4 as well as Figure 2The first main photosensitive element 111a can correspond to the first green main pixel G1a, the first corner photosensitive element 111b can correspond to the first green corner pixel G1b, the second main photosensitive element 112a can correspond to the red main pixel Ra, the second corner photosensitive element 112b can correspond to the red corner pixel Rb, the third main photosensitive element 113a can correspond to the blue main pixel Ba, the third corner photosensitive element 113b can correspond to the blue corner pixel Bb, the fourth main photosensitive element 114a can correspond to the second green main pixel G2a, and the fourth corner photosensitive element 114b can correspond to the second green corner pixel G2b. Therefore, the description of the arrangement of the first green main pixel G1a, the first green corner pixel G1b, the red main pixel Ra, the red corner pixel Rb, the blue main pixel Ba, the blue corner pixel Bb, the second green main pixel G2a, and the second green corner pixel G2b provided above can be applied as is to the first main photosensitive element 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b.

[0079] The sensor substrate 110 may include a plurality of unit structures arranged in two dimensions in a first direction and a second direction. Each of the plurality of unit structures may include a first main photosensitive element 111a, a second main photosensitive element 112a, a third main photosensitive element 113a, and a fourth main photosensitive element 114a arranged in a 2×2 array. Each of the plurality of unit structures may further include a first corner photosensitive element 111b arranged in contact with the first main photosensitive element 111a in the first diagonal direction D1, a second corner photosensitive element 112b arranged in contact with the second main photosensitive element 112a in the first diagonal direction D1, a third corner photosensitive element 113b arranged in contact with the third main photosensitive element 113a in the first diagonal direction D1, and a fourth corner photosensitive element 114b arranged in contact with the fourth main photosensitive element 114a in the first diagonal direction D1. The size of the first main photosensitive element 111a (e.g., the width or length of one side) can be larger than the size of the first corner photosensitive element 111b, the size of the second main photosensitive element 112a can be larger than the size of the second corner photosensitive element 112b, the size of the third main photosensitive element 113a can be larger than the size of the third corner photosensitive element 113b, and the size of the fourth main photosensitive element 114a can be larger than the size of the fourth corner photosensitive element 114b.

[0080] Figure 5 This is a plan view illustrating the region division of a nano-optical lens array provided in the pixel array of an image sensor according to an embodiment.

[0081] The nano-optical lens array 130 can be configured to perform color separation of incident light. For example, the nano-optical lens array 130 can separate light of a first wavelength band (e.g., green light), light of a second wavelength band different from the first wavelength band (e.g., red light), and light of a third wavelength band different from the first and second wavelength bands (e.g., blue light) from the incident light, allowing the corresponding separated light to travel in different paths. The nano-optical lens array 130 can act as a lens configured to focus the color-separated light of the first wavelength band, the second wavelength band, and the third wavelength band onto a photosensitive element corresponding to the respective light.

[0082] Reference Figure 5 as well as Figure 4 The nano-optical lens array 130 may include multiple meta-regions corresponding to multiple photosensitive elements of the sensor substrate 110. For example, the nano-optical lens array 130 may include multiple first main meta-regions 131a corresponding to multiple first main photosensitive elements 111a, multiple first corner meta-regions 131b corresponding to multiple first corner photosensitive elements 111b, multiple second main meta-regions 132a corresponding to multiple second main photosensitive elements 112a, multiple second corner meta-regions 132b corresponding to multiple second corner photosensitive elements 112b, multiple third main meta-regions 133a corresponding to multiple third main photosensitive elements 113a, multiple third corner meta-regions 133b corresponding to multiple third corner photosensitive elements 113b, multiple fourth main meta-regions 134a corresponding to multiple fourth main photosensitive elements 114a, and multiple fourth corner meta-regions 134b corresponding to multiple fourth corner photosensitive elements 114b.

[0083] A first primary superregion 131a, a first angular superregion 131b, a second primary superregion 132a, a second angular superregion 132b, a third primary superregion 133a, a third angular superregion 133b, a fourth primary superregion 134a, and a fourth angular superregion 134b arranged in a group can form a unit superstructure. The first main superregion 131a, the first corner superregion 131b, the second main superregion 132a, the second corner superregion 132b, the third main superregion 133a, the third corner superregion 133b, the fourth main superregion 134a, and the fourth corner superregion 134b can be arranged to face the first main photosensitive element 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b respectively in a third direction (Z direction) perpendicular to the first and second directions.

[0084] That is, in the unit superstructure, the arrangement (or position) of the first main superregion 131a, the first corner superregion 131b, the second main superregion 132a, the second corner superregion 132b, the third main superregion 133a, the third corner superregion 133b, the fourth main superregion 134a and the fourth corner superregion 134b can be the same as the arrangement (or position) of the first main photosensitive element 111a, the first corner photosensitive element 111b, the second main photosensitive element 112a, the second corner photosensitive element 112b, the third main photosensitive element 113a, the third corner photosensitive element 113b, the fourth main photosensitive element 114a and the fourth corner photosensitive element 114b respectively in the unit pixel pattern. The size of the first primary superregion 131a (e.g., the width or length of an edge) can be greater than the size of the first corner superregion 131b, the size of the second primary superregion 132a can be greater than the size of the second corner superregion 132b, the size of the third primary superregion 133a can be greater than the size of the third corner superregion 133b, and the size of the fourth primary superregion 134a can be greater than the size of the fourth corner superregion 134b.

[0085] The first main superregion 131a, the first corner superregion 131b, the second main superregion 132a, the second corner superregion 132b, the third main superregion 133a, the third corner superregion 133b, the fourth main superregion 134a, and the fourth corner superregion 134b included in the nano-optical lens array 130 can be configured to separate light of a first wavelength band from the incident light and focus it onto the first main photosensitive element 111a, the first corner photosensitive element 111b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b; and to separate light of a second wavelength band and focus it onto the second main photosensitive element 112a and the second corner photosensitive element 112b; and to separate light of a third wavelength band and focus it onto the third main photosensitive element 113a and the third corner photosensitive element 113b.

[0086] Therefore, the nano-optical lens array 130 may include multiple nanostructures arranged according to certain rules. The multiple nanostructures may be respectively arranged in the first main superregion 131a, the first angular superregion 131b, the second main superregion 132a, the second angular superregion 132b, the third main superregion 133a, the third angular superregion 133b, the fourth main superregion 134a, and the fourth angular superregion 134b included in the nano-optical lens array 130.

[0087] Figure 6A This is a plan view illustrating an example arrangement of nanostructures included in a nano-optical lens array provided in a pixel array of an image sensor according to an embodiment. Figure 6B It is shown Figure 6A A planar diagram showing the arrangement of nanostructures in the angular hyperregion.

[0088] Reference Figure 6A and Figure 6B Each of the first principal superregion 131a, the second principal superregion 132a, the third principal superregion 133a, and the fourth principal superregion 134a may include one or more nanostructures NP. The first corner superregion 131b, the second corner superregion 132b, the third corner superregion 133b, and the fourth corner superregion 134b may each include one or more nanostructures NP.

[0089] The number of nanostructures NPs arranged in the first primary superregion 131a can be greater than the number of nanostructures NPs arranged in the first corner superregion 131b. Similarly, the number of nanostructures NPs in each of the second primary superregion 132a, the third primary superregion 133a, and the fourth primary superregion 134a can be greater than the number of nanostructures NPs in a corresponding one of the second corner superregion 132b, the third corner superregion 133b, and the fourth corner superregion 134b. However, one or more embodiments are not limited to this.

[0090] The nanostructure NP arranged in the first angular superregion 131b can have symmetry based on the first axis AX1 and the second axis AX2 as symmetry axes. The first axis AX1 can be an axis passing through the center of the first angular superregion 131b and parallel to the first diagonal direction D1, and the second axis AX2 can be an axis passing through the center of the first angular superregion 131b and parallel to the second diagonal direction D2.

[0091] The nanostructures NP in the first angular superregion 131b can be arranged such that the size distribution (or the size distribution of the nanostructures NP) on the first axis AX1 is different from the size distribution on the second axis AX2. For example... Figure 6B As shown in detail, nanostructures NP of different sizes can be arranged in the first angular superregion 131b. Nanostructures NP of the same size are represented by the same numbers, and the size distribution on the first axis AX1 and the size distribution on the second axis AX2 can be different from each other.

[0092] exist Figure 6A and Figure 6B In the first corner superregion 131b, the number of nanostructure NPs located on the first axis AX1 and the number of nanostructure NPs located on the second axis AX2 can be equal to each other, but are not limited to this. The number of nanostructure NPs located on the first axis AX1 and the number of nanostructure NPs located on the second axis AX2 in the first corner superregion 131b can be different from each other. Similar to... Figure 6B The nanostructures in the first corner superregion 131b, the second corner superregion 132b, the third corner superregion 133b, and the fourth corner superregion 134b, as shown in detail, can have similar arrangement types.

[0093] In the second angular superregion 132b, the third angular superregion 133b, and the fourth angular superregion 134b, a first axis AX1 passing through its center and parallel to the first diagonal direction D1 and a second axis AX2 passing through its center and parallel to the second diagonal direction can be defined.

[0094] The nanostructure NP arranged in the second angular superregion 132b can have symmetry based on the first axis AX1 and the second axis AX2 of the second angular superregion 132b as symmetry axes. The nanostructure NP arranged in the second angular superregion 132b can be arranged such that the size distribution on the first axis AX1 is different from the size distribution on the second axis AX2.

[0095] In the second angular superregion 132b, the number of nanostructures NP located on the first axis AX1 and the number of nanostructures NP located on the second axis AX2 can be different from each other, but are not limited thereto; that is, they can be equal to each other.

[0096] The nanostructure NP arranged in the third triangular superregion 133b can have symmetry based on the first axis AX1 and the second axis AX2 of the third triangular superregion 133b as symmetry axes. The nanostructure NP arranged in the third triangular superregion 133b can be arranged such that the size distribution on the first axis AX1 is different from the size distribution on the second axis AX2.

[0097] In the triangular superregion 133b, the number of nanostructures NP located on the first axis AX1 and the number of nanostructures NP located on the second axis AX2 can be different from each other, but are not limited thereto; that is, they can be equal to each other.

[0098] The nanostructures NP arranged in the fourth corner superregion 134b can have symmetry based on the first axis AX1 and the second axis AX2 of the fourth corner superregion 134b as symmetry axes. The nanostructures NP arranged in the fourth corner superregion 134b can be arranged such that the size distribution on the first axis AX1 is different from the size distribution on the second axis AX2.

[0099] like Figure 6A As shown, the nanostructure NPs arranged in the first corner superregion 131b and the nanostructure NPs arranged in the fourth corner superregion 134b can have the same arrangement type. However, one or more embodiments are not limited to the above example. The arrangement type of the nanostructure NPs in the first corner superregion 131b and the fourth corner superregion 134b can be a 180° rotational symmetry relationship.

[0100] Figure 7A and Figure 7B These are the edges of the pixel array in the image sensor. Figure 6A The cross-sectional view taken from lines A-A' and B-B'.

[0101] Reference Figure 7A and Figure 7B The pixel array 1100 may include a sensor substrate 110 and a nano-optical lens array 130 arranged above the sensor substrate 110. A spacer layer 120 may be disposed between the sensor substrate 110 and the nano-optical lens array 130. A color filter layer 140 may be disposed between the sensor substrate 110 and the spacer layer 120. Depending on the implementation, the color filter layer 140 may be omitted.

[0102] As shown above (refer to the reference) Figure 4 As described in detail, the sensor substrate 110 may include a first main photosensitive element 111a, a second main photosensitive element 112a, a third main photosensitive element 113a and a fourth main photosensitive element 114a, and may further include a first corner photosensitive element 111b, a second corner photosensitive element 112b, a third corner photosensitive element 113b and a fourth corner photosensitive element 114b. Figure 7A and Figure 7B It shows the respective along Figure 6A The cross sections taken by lines A-A' and B-B', the second angle photosensitive element 112b and the third angle photosensitive element 113b are not shown.

[0103] A spacer layer 120 may be disposed between the sensor substrate 110 and the nano-optical lens array 130 to maintain a constant distance between them. The spacer layer 120 may comprise a material that is transparent to visible light, such as a dielectric material having a lower refractive index than the nanostructure NP described later and having low absorption in the visible light band, such as polymethyl methacrylate (PMMA), siloxane-based spin-coated glass (SOG), SiO2, SiN4, Al2O3, etc.

[0104] The color filter layer 140 may include a plurality of color filters, each configured to transmit light of a certain wavelength band and absorb light of a different wavelength band. For example, the color filter layer 140 may include a green color filter GF configured to transmit green light and absorb light of other wavelengths, a red color filter RF configured to transmit red light and absorb light of other wavelengths, and a blue color filter BF configured to transmit blue light and absorb light of other wavelengths.

[0105] A green filter GF can be disposed on the first main photosensitive element 111a, the first corner photosensitive element 111b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b; a red filter RF can be disposed on the second main photosensitive element 112a and the second corner photosensitive element 112b; and a blue filter BF can be disposed on the third main photosensitive element 113a and the third corner photosensitive element 113b. Because the incident light is color-separated to a considerable extent by the nano-optical lens array 130, the absorption loss that may occur in the color filter layer 140 (e.g., light loss due to light absorption by the color filter layer 140) can be low even when the color filter layer 140 is used. Furthermore, color purity can be improved by using the nano-optical lens array 130 and the color filter layer 140 together.

[0106] The nano-optical lens array 130 may include a plurality of nanostructures NP, and may further include a dielectric layer DL filling the spaces between the plurality of nanostructures NP. To enable the nano-optical lens array 130 to perform the aforementioned color separation and light focusing functions, the plurality of nanostructures NP of the nano-optical lens array 130 can be configured in various ways. For example, the plurality of nanostructures NP can be arranged such that the phase of the light transmitted through the nano-optical lens array 130 changes according to their positions on the nano-optical lens array 130. The phase profile of the transmitted light achieved by the nano-optical lens array 130 can be determined based on the cross-sectional dimensions (e.g., width or diameter), cross-sectional shape, height, and / or the arrangement period (or pitch) and arrangement type of each nanostructure NP. The behavior of light passing through the nano-optical lens array 130 can be determined based on the phase profile of the transmitted light.

[0107] Nanostructured NPs can each have dimensions smaller than the wavelength of visible light. Nanostructured NPs can have dimensions smaller than, for example, the wavelength of blue light. For example, the cross-sectional width (or diameter) of a nanostructured NP can be less than 400 nm, 300 nm, or 200 nm, and can be greater than about 80 nm. The height of a nanostructured NP can be from about 500 nm to about 1500 nm, and can be greater than the cross-sectional width of the nanostructured NP.

[0108] The nanostructured NP can include materials with a relatively high refractive index and a relatively low absorption rate in the visible light band compared to the surrounding materials. For example, the nanostructured NP can include c-Si, p-Si, a-Si, and III-V compound semiconductors (GaP, GaN, GaAs, etc.), SiC, TiO2, SiN3, ZnS, ZnSe, Si3N4, and / or any combination thereof. The periphery of the nanostructured NP can be filled with a dielectric layer DL, which has a relatively low refractive index and a relatively low absorption rate in the visible light band compared to the nanostructured NP. For example, the dielectric layer DL can be filled with PMMA, SOG, SiO2, Si3N4, Al2O3, air, etc.

[0109] The refractive index of the nanostructure NP relative to light at a wavelength of approximately 630 nm can be approximately 2.0 or greater, while the refractive index of the dielectric layer DL relative to light at a wavelength of approximately 630 nm can be approximately 1.0 to approximately 2.0 or less. The difference between the refractive index of the nanostructure NP and the refractive index of the dielectric layer DL can be approximately 0.5 or greater. The nanostructure NP, with its refractive index differing from that of the surrounding material, can alter the phase of light passing through it. This is due to a phase retardation attributable to the subwavelength shape dimension of the nanostructure NP, and the degree of this phase retardation can be determined by the detailed shape dimension and arrangement of the nanostructure NP.

[0110] Due to the arrangement of the nanostructures NP, the color separation and light focusing performed by the nano-optical lens array 130 can vary depending on the color of the photosensitive element facing the nano-optical lens array 130 in the sensor substrate 110.

[0111] Although not shown in the accompanying drawings, an etch stop layer may be provided between the spacer layer 120 and the nano-optical lens array 130. The etch stop layer can be provided to protect the spacer layer 120, which is the lower structure of the nano-optical lens array 130, during the fabrication process of the nano-optical lens array 130. When the nano-optical lens array 130 is fabricated on the spacer layer 120, the dielectric layer DL can be formed over the entire spacer layer 120, and a process can be performed to etch the dielectric layer DL to a certain depth. Here, when etching is performed to a depth greater than desired, the spacer layer 120 may be damaged, and color separation performance may degrade when the thickness of the spacer layer 120 is not suitable for the distance between the nano-optical lens array 130 and the sensor substrate 110. The etch stop layer may comprise a material having a lower etch selectivity than the material layer to be etched, and therefore may not be removed during the etching process and may be retained, thus preventing damage to the spacer layer 120 during the etching process. The etch stop layer may comprise, for example, HfO2. The thickness of the etch stop layer can be determined by taking into account the etch depth (i.e., the height of the nanostructure NP), and can also be determined based on the etch dispersion in the processed wafer. For example, the etch stop layer can have a thickness of about 3 nm to about 30 nm.

[0112] Although not shown in the accompanying drawings, a protective layer for protecting the nano-optical lens array 130 may be further provided on the nano-optical lens array 130. The protective layer may include a material suitable for use as an anti-reflective layer. The anti-reflective layer can reduce light reflected from the upper surface of the nano-optical lens array 130, thus improving the light utilization efficiency of the pixel array 1100. In other words, the anti-reflective layer allows light incident on the pixel array 1100 from the outside to pass through the nano-optical lens array 130 and be sensed by the sensor substrate 110, without being reflected from the upper surface of the nano-optical lens array 130. The anti-reflective layer may have a structure in which one or more layers are stacked; for example, it may include a layer having a material different from the material included in the nano-optical lens array 130 or multiple layers of materials with different refractive indices.

[0113] Reference Figure 7A The first corner superregion 131b can separate green light from the light incident on the first corner superregion 131b and the adjacent third main superregion 133a and second main superregion 132a, and focus the separated light onto the first corner photosensitive element 111b. The fourth corner superregion 134b can separate green light from the light incident on the fourth corner superregion 134b and the adjacent second main superregion 132a and third main superregion 133a, and focus the separated light onto the fourth corner photosensitive element 114b.

[0114] The second primary superregion 132a can separate red light from the light incident on the second primary superregion 132a and the adjacent first corner superregion 131b and fourth corner superregion 134b, and focus the separated light onto the second primary photosensitive element 112a. The third primary superregion 133a can separate blue light from the light incident on the third primary superregion 133a and the adjacent first corner superregion 131b and fourth corner superregion 134b, and focus the separated light onto the third primary photosensitive element 113a.

[0115] As described above, the region of the nano-optical lens array 130 can be described as including a main blue light gathering region BLa, a first angular green light gathering region GLb1, a main red light gathering region RLa, and a second angular green light gathering region GLb2. The main blue light gathering region BLa, the first angular green light gathering region GLb1, the main red light gathering region RLa, and the second angular green light gathering region GLb2 can each have a width in the second diagonal direction D2 that is larger than the width of the corresponding one of the third main superregion 133a, the first angular superregion 131b, the second main superregion 132a, and the fourth angular superregion 134b in the second diagonal direction D2.

[0116] Reference Figure 7B The first main photosensitive element 111a, the first corner photosensitive element 111b, the fourth main photosensitive element 114a, and the fourth corner photosensitive element 114b, configured to sense green light, can be arranged in the first diagonal direction D1.

[0117] Therefore, the first corner superregion 131b can separate green light from the light incident on the first corner superregion 131 and focus the light onto the first corner photosensitive element 111b, and does not attract green light from the light incident on the first main superregion 131a and the fourth main superregion 134a adjacent to the first corner superregion 131b. The fourth corner superregion 134b can separate green light from the light incident on the fourth corner superregion 134b and focus the separated light onto the fourth corner photosensitive element 114b, and does not attract green light from the light incident on the fourth main superregion 134a and the first main superregion 131a adjacent to the fourth corner superregion 134b.

[0118] The first primary superregion 131a can separate green light from the light incident on it and focus the separated light onto the first primary photosensitive element 111a, without attracting green light from the light incident on the first corner superregion 131b and the fourth corner superregion 134b adjacent to the first primary superregion 131a. The fourth primary superregion 134a can separate green light from the light incident on it and focus the separated light onto the fourth primary photosensitive element 114a, without attracting green light from the light incident on the first corner superregion 131b and the fourth corner superregion 134b adjacent to the fourth primary superregion 134a.

[0119] As described above, the region of the nano-optical lens array 130 can be described as including a first main green light gathering region GLa1, a first corner green light gathering region GLb1, a second main green light gathering region GLa2, and a second corner green light gathering region GLb2. The first main green light gathering region GLa1, the first corner green light gathering region GLb1, the second main green light gathering region GLa2, and the second corner green light gathering region GLb2 can each have a width in the first diagonal direction D1 that is the same as the width in the first diagonal direction D1 of a corresponding one of the first main superregion 131a, the first corner superregion 131b, the fourth main superregion 134a, and the fourth corner superregion 134b.

[0120] However, this is just an example. In a modified implementation, the first angular superregion 131b and the fourth angular superregion 134b may not attract green light incident on adjacent regions, but the first main superregion 131a and the fourth main superregion 134a may attract green light incident on adjacent regions. In other words, the first angular green light gathering region GLb1 and the second angular green light gathering region GLb2 may each have the same width in the first diagonal direction D1 as the corresponding width of one of the first angular superregions 131b and the fourth angular superregion 134b in the first diagonal direction D1, and the first main green light gathering region GLa1 and the second main green light gathering region GLa2 may each have a width in the first diagonal direction D1 that is larger than the corresponding width of one of the first main superregions 131a and the fourth main superregion 134a in the first diagonal direction D1.

[0121] The following reference Figures 8 to 10C The light-gathering region included in the nano-optical lens array 130 is described in more detail.

[0122] Figure 8 This is a plan view illustrating an example of an angular light focusing region included in a nano-optical lens array within a pixel array of an image sensor according to an embodiment.

[0123] Reference Figure 8The nano-optical lens array 130 may include a first angular green light gathering region GLb1, a second angular green light gathering region GLb2, an angular red light gathering region RLb, and an angular blue light gathering region BLb.

[0124] The first corner green light focusing region GLb1 can focus the green light included in the incident light incident on the first corner green light focusing region GLb1 onto the first corner photosensitive element 111b. The second corner green light focusing region GLb2 can focus the green light included in the incident light incident on the second corner green light focusing region GLb2 onto the fourth corner photosensitive element 114b. The corner red light focusing region RLb can focus the red light included in the incident light incident on the corner red light focusing region RLb onto the second corner photosensitive element 112b. The corner blue light focusing region BLb can focus the blue light included in the incident light incident on the corner blue light focusing region BLb onto the third corner photosensitive element 113b.

[0125] The first corner green light gathering region GLb1, the second corner green light gathering region GLb2, the corner red light gathering region RLb, and the corner blue light gathering region BLb can each have different widths along the first diagonal direction D1 and the second diagonal direction D2. The width of each corner light gathering region along the first diagonal direction D1 and the second diagonal direction D2 can be determined based on whether the adjacent regions of its corresponding corner superregion face pixels of the same color.

[0126] The first corner green light gathering region GLb1, the second corner green light gathering region GLb2, the corner red light gathering region RLb, and the corner blue light gathering region BLb can each have a width in the second diagonal direction D2 that is greater than or equal to its width in the first diagonal direction D1.

[0127] In the first corner green light gathering region GLb1, the second corner green light gathering region GLb2, the corner red light gathering region RLb, and the corner blue light gathering region BLb, as follows Figure 6A and Figure 6B As shown, a first axis and a second axis can be defined. The nanostructures in each of the first angular green light gathering region GLb1, the second angular green light gathering region GLb2, the angular red light gathering region RLb, and the angular blue light gathering region BLb can have a size distribution on the first axis that is different from the size distribution on the second axis.

[0128] The width of each of the first angular green light gathering regions GLb1 and GLb2 in the first diagonal direction D1 can be equal to the width of the corresponding one of the first angular superregions 131b and 134b in the first diagonal direction D1. The width of each of the first angular green light gathering regions GLb1 and GLb2 in the second diagonal direction D2 can be greater than the width of the corresponding one of the first angular superregions 131b and 134b in the second diagonal direction D2.

[0129] The angular red light gathering region RLb can have a wider width in the first diagonal direction D1 than the second angular superregion 132b in the first diagonal direction D1, and a wider width in the second diagonal direction D2 than the second angular superregion 132b in the second diagonal direction D2. The angular red light gathering region RLb can also have a narrower width in the first diagonal direction D1 than its width in the second diagonal direction D2. This is because the second angular superregion 132b can contact the second main superregion 132a in the first diagonal direction D1, and both the second angular superregion 132b and the second main superregion 132a face pixels of the same red color.

[0130] The angular blue light gathering region BLb can have a width greater than that of the third angular superregion 133b in the first diagonal direction D1, and a width greater than that of the third angular superregion 133b in the second diagonal direction D2. The angular blue light gathering region BLb can also have a width smaller in the first diagonal direction D1 than its width in the second diagonal direction D2. The third angular superregion 133b can contact the third main superregion 133a in the first diagonal direction D1, and both the third angular superregion 133b and the third main superregion 133a can each face the same blue pixel.

[0131] exist Figure 8 In the diagram, the dimensions of the angular red light gathering region RLb and the angular blue light gathering region BLB, i.e., the area of ​​the cross-section cut along the first direction (X direction) and the second direction (Y direction) (or the area on the plane defined by the first direction and the second direction), are shown to be larger than, but not limited to, the dimensions of the first angular green light gathering region GLb1 and the second angular green light gathering region GLb2. Based on the width along the second diagonal direction D2, the dimensions of the first angular green light gathering region GLb1 and the second angular green light gathering region GLb2 can be larger than the dimensions of the angular red light gathering region RLb or the angular blue light gathering region BLB.

[0132] exist Figure 8In the diagram, the first corner green light gathering region GLb1, the corner red light gathering region RLb, the corner blue light gathering region BLb, and the second corner green light gathering region GLb2 are each shown to have a size larger than the size of the corresponding one of the first corner superregion 131b, the second corner superregion 132b, the third corner superregion 133b, and the fourth corner superregion 134b, but these are examples and not limitations. When the width of each of the first angular green light gathering region GLb1, the angular red light gathering region RLb, the angular blue light gathering region BLb, and the second angular green light gathering region GLb2 in the second diagonal direction D2 is less than the width of the corresponding one of the first angular superregion 131b, the second angular superregion 132b, the third angular superregion 133b, and the fourth angular superregion 134b in the second diagonal direction D2, each of the first angular green light gathering region GLb1, the angular red light gathering region RLb, the angular blue light gathering region BLb, and the second angular green light gathering region GLb2 may have a size smaller than the size of the corresponding one of the first angular superregion 131b, the second angular superregion 132b, the third angular superregion 133b, and the fourth angular superregion 134b.

[0133] The size of the first corner green light gathering region GLb1 can be approximately equal to or less than three times the size of the first corner superregion 131b. The size of the first corner green light gathering region GLb1 can be approximately equal to or greater than one-quarter the size of the first corner superregion 131b.

[0134] The size of the second-corner green light gathering region GLb2 can be approximately equal to or less than three times the size of the fourth-corner superregion 134b. The size of the second-corner green light gathering region GLb2 can be approximately equal to or greater than half the size of the fourth-corner superregion 134b.

[0135] The sizes of the angular red light gathering region RLb and the angular blue light gathering region BLb can be approximately equal to or greater than half the sizes of the second angular superregion 132b and the third angular superregion 133b, respectively, and approximately equal to or less than three times the sizes of the second angular superregion 132b and the third angular superregion 133b, respectively.

[0136] Figure 9 This is a plan view illustrating an example of a main light focusing region included in a nano-optical lens array within a pixel array of an image sensor according to an embodiment.

[0137] Reference Figure 9 The nano-optical lens array 130 may include a first main green light focusing region GLa1, a second main green light focusing region GLa2, a main red light focusing region RLa, and a main blue light focusing region BLa.

[0138] The first primary green light focusing region GLa1 can focus the green light incident on it onto the first primary photosensitive element 111a. The second primary green light focusing region GLa2 can focus the green light incident on it onto the fourth primary photosensitive element 114a. The primary red light focusing region RLa can focus the red light incident on it onto the second primary photosensitive element 112a. The primary blue light focusing region BLa can focus the blue light incident on it onto the third primary photosensitive element 113a.

[0139] The first primary green light gathering region GLa1, the second primary green light gathering region GLa2, the primary red light gathering region RLa, and the primary blue light gathering region BLa can each have different widths along the first diagonal direction D1 and the second diagonal direction D2. The width of each primary light gathering region along the first diagonal direction D1 and the second diagonal direction D2 can be determined based on whether the adjacent regions of its corresponding primary superregion face pixels of the same color.

[0140] The first primary green light gathering region GLa1, the second primary green light gathering region GLa2, the primary red light gathering region RLa, and the primary blue light gathering region BLa can each have a width in the second diagonal direction D2 that is greater than or equal to its width in the first diagonal direction D1. The first primary green light gathering region GLa1, the second primary green light gathering region GLa2, the primary red light gathering region RLa, and the primary blue light gathering region BLa can each have a width in the second diagonal direction D2 that is greater than its width in the first diagonal direction D1.

[0141] The widths of the first primary green light gathering region GLa1 and the second primary green light gathering region GLa2 along the first diagonal direction D1 can be equal to the widths of the first primary superregion 131a and the fourth primary superregion 134a along the first diagonal direction D1, respectively. The widths of the first primary green light gathering region GLa1 and the second primary green light gathering region GLa2 along the second diagonal direction D2 can be greater than or equal to the widths of the first primary superregion 131a and the fourth primary superregion 134a along the second diagonal direction D2, respectively.

[0142] The width of the primary red light gathering region RLa in the first diagonal direction D1 can be greater than the width of the second primary superregion 132a in the first diagonal direction D1, and the width of the primary red light gathering region RLa in the second diagonal direction D2 can be greater than the width of the second primary superregion 132a in the second diagonal direction D2. The primary red light gathering region RLa can have a width in the first diagonal direction D1 smaller than its width in the second diagonal direction D2. The second primary superregion 132a can contact the second angular superregion 132b in the first diagonal direction D1, and the second primary superregion 132a and the angular superregion 132b face pixels of the same red color.

[0143] The width of the primary blue light gathering region BLa in the first diagonal direction D1 can be greater than the width of the third primary superregion 133a in the first diagonal direction D1, and the width of the primary blue light gathering region BLa in the second diagonal direction D2 can be greater than the width of the third primary superregion 133a in the second diagonal direction D2. The primary blue light gathering region BLa can have a width in the first diagonal direction D1 smaller than its width in the second diagonal direction D2. The third primary superregion 133a can contact the third corner superregion 133b in the first diagonal direction D1, and the third primary superregion 133a and the third corner superregion 133b face the same blue pixel.

[0144] Figures 10A to 10C These are plan views illustrating examples of red light focusing regions, green light focusing regions, and blue light focusing regions included in the nano-optical lens array within the pixel array of an image sensor according to an embodiment.

[0145] Reference Figure 10A The red light focusing region RL can include a main red light focusing region RLa and an angular red light focusing region RLb. The dimensions of the main red light focusing region RLa and the angular red light focusing region RLb can be referenced as above. Figure 8 and Figure 9 The dimensions described are the same. The nano-optical lens array 130 may include an array for focusing red light in incident light onto a red light focusing region RL on a red pixel.

[0146] Reference Figure 10B The diagram illustrates a first green light focusing region GL1 and a second green light focusing region GL2. The first green light focusing region GL1 may include a first main green light focusing region GLa1 and a first corner green light focusing region GLb1. The second green light focusing region GL2 may include a second main green light focusing region GLa2 and a second corner green light focusing region GLb2. The dimensions of the first main green light focusing region GLa1, the first corner green light focusing region GLb1, the second main green light focusing region GLa2, and the second corner green light focusing region GLb2 can be referenced as above. Figure 8 and Figure 9 The dimensions described are the same. The nano-optical lens array 130 may include an array configured to focus green light in incident light onto green light focusing regions GL1 and GL2 on green pixels.

[0147] Reference Figure 10C The blue light focusing region BL can include the main blue light focusing region BLa and the corner blue light focusing region BLb. The dimensions of the main blue light focusing region BLa and the corner blue light focusing region BLb can be referenced as above. Figure 8 and Figure 9The dimensions described are the same. The nano-optical lens array 130 may include an array configured to focus blue light in incident light onto a blue light focusing region BL on a blue pixel.

[0148] Figure 11A and Figure 11B This is a graph showing the color separation performance of the image sensor according to the embodiment compared to the comparative example.

[0149] Figure 11A The spectrum of light sensed by the main pixels (i.e., the first main photosensitive element 111a, the second main photosensitive element 112a, the third main photosensitive element 113a, and the fourth main photosensitive element 114a) is shown. Figure 11B The spectrum of light sensed by the corner pixels (i.e., the first corner photosensitive element 111b, the second corner photosensitive element 112b, the third corner photosensitive element 113b, and the fourth corner photosensitive element 114b) is shown.

[0150] The comparative examples illustrate instances where the arrangement of nanostructures forming light-gathering regions, as in the example embodiments, is not applied. Figure 11A and Figure 11B As shown in the graph, in the embodiment, compared with the comparative example, the optical efficiency (e.g., as...) Figure 11A and Figure 11B The quantum efficiency (QE) shown is improved.

[0151] Figures 12A to 12C These are plan views illustrating other examples of red light focusing regions, green light focusing regions, and blue light focusing regions included in a nano-optical lens array according to another embodiment.

[0152] Reference Figure 12A The nano-optical lens array 130' according to this embodiment is the same as the one mentioned above. Figure 10A The difference in the described nano-optical lens array is that the width of the angular red light focusing region RLb in the first diagonal direction D1 is reduced, while the width of the main red light focusing region RLa in the first diagonal direction D1 is increased.

[0153] Reference Figure 12B The nano-optical lens array 130' of this embodiment is the same as the one mentioned above. Figure 10B The difference in the described nano-optical lens array may be that the width of the first angular green light gathering region GLb1 and the second angular green light gathering region GLb2 in the first diagonal direction D1 is reduced, and the width of the first main green light gathering region GLa1 and the second main green light gathering region GLa2 in the first diagonal direction D1 is increased.

[0154] Reference Figure 12C The nano-optical lens array 130' of this embodiment is the same as the one mentioned above. Figure 10C The difference in the described nano-optical lens array is that the width of the angular blue light gathering region BLb in the first diagonal direction D1 is reduced, while the width of the main blue light gathering region BLa in the first diagonal direction D1 is increased.

[0155] In the following sections, various examples of arranging nanostructures in nano-optical lens arrays that form the light-gathering regions as described above are described.

[0156] Figure 13 This is a plan view illustrating an example arrangement of multiple nanostructures in a nano-optical lens array 130A according to another embodiment.

[0157] Reference Figure 13 The angular light focusing region formed in the nano-optical lens array 130A can be larger than that formed in the... Figure 8 The angular light focusing region in the nano-optical lens array 130. For example, the width of the first angular green light focusing region GLb1 in the nano-optical lens array 130A along the second diagonal direction D2 can be greater than... Figure 8 The width of the first angular green light focusing region GLb1 in the nano-optical lens array 130 along the second diagonal direction. The widths of the angular red light focusing region RLb and the angular blue light focusing region BLb in the first diagonal direction D1 of the nano-optical lens array 130A can be greater than [missing information]. Figure 8 The width of the angular red light focusing region RLb and the angular blue light focusing region BLb in the first diagonal direction D1 of the nano-optical lens array 130.

[0158] In the first angular superregion 131b, the number of nanostructures NPs located on the first axis AX1 and the number of nanostructures NPs located on the second axis AX2 can be different from each other. In the fourth angular superregion 134b, the number of nanostructures NPs arranged on the first axis AX1 can be different from the number of nanostructures NPs arranged on the second axis AX2.

[0159] Figure 14 This is a plan view illustrating an example arrangement of multiple nanostructures in a nano-optical lens array 130B according to another embodiment.

[0160] Figure 14 The 130B nano-optical lens array can be similar in size to the light-gathering region. Figure 8 The nano-optical lens array 130 can differ from others in terms of the number or arrangement of nanostructures. Figure 8 130 nano-optical lens arrays.

[0161] Figure 15This is a plan view illustrating an example arrangement of multiple nanostructures in a nano-optical lens array 130C according to another embodiment.

[0162] The nano-optical lens array 130C of this embodiment can differ in shape from that of the angular light focusing region. Figure 8 The nano-optical lens array 130. The first corner green light gathering region GLb1, the corner red light gathering region RLb, the corner blue light gathering region BLb, and the second corner green light gathering region GLb2 can each have a square shape in which the width in the first diagonal direction D1 and the width in the second diagonal direction D2 are almost the same as each other.

[0163] This implementation can take into account adjusting the ratio between the optical efficiency of the main light focusing region and the optical efficiency of the corner light focusing region. In this implementation, the first corner green light focusing region GLb1, the corner red light focusing region RLb, the corner blue light focusing region BLb, and the second corner green light focusing region GLb2 can have improved optical efficiency.

[0164] Figure 16 This is a plan view illustrating an example arrangement of multiple nanostructures in a nano-optical lens array 130D according to another embodiment.

[0165] The nano-optical lens array 130D of this embodiment may include a corner green light focusing region with a square shape, and with Figure 15 Compared to the first and second corner green light gathering regions in the nano-optical lens array 130C, the first corner green light gathering region GLb1 and the second corner green light gathering region GLb2 in the nano-optical lens array 130D can have larger areas.

[0166] and Figure 15 Unlike the nano-optical lens array 130C, the angular red light focusing region RLb in the nano-optical lens array 130D can be rectangular, and... Figure 15 Compared to the nano-optical lens array 130C, the angular blue light focusing region BLb in the nano-optical lens array 130D can have a reduced square shape. However, one or more embodiments are not limited to this; in another embodiment, compared to... Figure 15 Compared to the nano-optical lens array 130C, the angular red light focusing region RLb can have a reduced square shape, and the angular blue light focusing region BLb can have a rectangular shape.

[0167] Figure 17A This is a plan view illustrating an example of the axis of symmetry applied to the arrangement of multiple nanostructures in a nano-optical lens array 130E according to another embodiment. Figure 17BThis is a plan view illustrating an example of a nano-optical lens array 130E1, in which the nanostructure is based on... Figure 17A The same axis of symmetry is arranged.

[0168] The first primary superregion 131a, the second primary superregion 132a, the third primary superregion 133a, and the fourth primary superregion 134a may each have a first axis AX1 and a second axis AX2 defined as passing through their center and being parallel to the first diagonal direction D1 and the second diagonal direction D2, respectively.

[0169] The nanostructures NP arranged in each of the first principal superregion 131a, the second principal superregion 132a, the third principal superregion 133a, the fourth principal superregion 134a, the first angular superregion 131b, the second angular superregion 132b, the third angular superregion 133b, and the fourth angular superregion 134b can be arranged to have symmetry about their first axis AX1 and second axis AX2.

[0170] Figure 18A This is a plan view illustrating an example of the axis of symmetry applied to the arrangement of multiple nanostructures in a nano-optical lens array 130F according to another embodiment. Figure 18B This is a plan view illustrating an example of the 130F1 nano-optical lens array, in which the nanostructure is based on... Figure 18A The same axis of symmetry is arranged.

[0171] The first primary superregion 131a, the second primary superregion 132a, the third primary superregion 133a and the fourth primary superregion 134a may each have a third axis AX3 and a fourth axis AX4 defined as passing through their center and being parallel to the first direction (X direction) and the second direction (Y direction), respectively.

[0172] The nanostructures NP arranged in the first principal superregion 131a, the second principal superregion 132a, the third principal superregion 133a and the fourth principal superregion 134a can be arranged to have symmetry about the third axis AX3 and the fourth axis AX4.

[0173] The nanostructures NP arranged in the first angular superregion 131b, the second angular superregion 132b, the third angular superregion 133b and the fourth angular superregion 134b can be arranged to have symmetry about the first axis AX1 and the second axis AX2.

[0174] Figure 19 This is a cross-sectional view of a pixel array in an image sensor, including a nano-optical lens array 130G according to another embodiment.

[0175] The nano-optical lens array 130G can have a double-layer nanostructure. For example, the nanostructure NP in the nano-optical lens array 130G can be arranged in the first lens layer LE1 and the second lens layer LE2, respectively.

[0176] Although not shown in the accompanying drawings, an etch stop layer may be further disposed between the first lens layer LE1 and the second lens layer LE2. An etch stop layer can be provided to prevent damage to the first lens layer LE1 during the fabrication of the second lens layer LE2. When the second lens layer LE2 is formed on the first lens layer LE1, the dielectric layer DL can be formed over the entire first lens layer LE1 and then etched to a certain depth. Here, the dielectric layer DL may be etched deeper than desired, thus potentially damaging the first lens layer LE1, and color separation performance may degrade when the height of the first lens layer LE1 is not suitable for the desired height adjustment. The etch stop layer formed on the first lens layer LE1 may comprise a material having a lower etch selectivity than the material layer to be etched, and may be partially retained rather than completely removed during the etching process. This prevents damage to the first lens layer LE1. The etch stop layer may comprise, for example, HfO2. The thickness of the etch stop layer can be determined taking into account the etching depth (i.e., the height of the second lens layer LE2) and may also be determined based on the etch dispersion in the processed wafer. For example, the etch stop layer may have a thickness of about 3 nm to about 30 nm.

[0177] The nanostructures NP in the first lens layer LE1 and the second lens layer LE2 are shown to have the same arrangement, but one or more embodiments are not limited thereto. By arranging the nanostructures in two layers, the aspect ratio of the nanostructure NP can be significantly increased, and the degree of freedom in designing the nanostructure NP can be improved.

[0178] The image sensor 1000 according to the embodiment can be combined with modular lenses of various functions to form a camera module and can be used in various electronic devices.

[0179] Figure 20 This is a block diagram illustrating an example of an electronic device ED01 including an image sensor 1000. (Refer to...) Figure 20In the network environment ED00, electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (e.g., a short-range wireless communication network), and / or can communicate with another electronic device ED04 and / or server ED08 via a second network ED99 (e.g., a long-range wireless communication network). Electronic device ED01 can communicate with electronic device ED04 via server ED08. Electronic device ED01 may include a processor ED20, a memory ED30, an input device ED50, a sound output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a haptic module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a user identification module ED96, and / or an antenna module ED97. In electronic device ED01, some components (e.g., display device ED60, etc.) may be omitted and / or other components may be added. Some components may be configured as an integrated circuit. For example, a sensor module ED76 (e.g., a fingerprint sensor, an iris sensor, an illuminance sensor, etc.) can be embedded and implemented in a display device ED60 (e.g., a display, etc.).

[0180] Processor ED20 can control one or more components (e.g., hardware components, software components, etc.) connected to electronic device ED01 by running software (e.g., program ED40, etc.), and can perform various data processing and / or operations. As part of the data processing and / or operations, processor ED20 can load commands and / or data received from another component (e.g., sensor module ED76, communication module ED90, etc.) into volatile memory ED32, can process the commands and / or data stored in volatile memory ED32, and can store the result data in non-volatile memory ED34. Non-volatile memory ED34 may include internal memory ED36 and external memory ED38. Processor ED20 may include a main processor ED21 (e.g., central processing unit, application processor, etc.) and an auxiliary processor ED23 (e.g., graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently of and / or with the main processor ED21. The auxiliary processor ED23 can use less power than the main processor ED21 and can perform specific functions.

[0181] When the main processor ED21 is inactive (e.g., in sleep mode), the auxiliary processor ED23 may control, on behalf of the main processor ED21, the functions and / or states associated with some components in the electronic device ED01 (e.g., display device ED60, sensor module ED76, communication module ED90, etc.). Alternatively, when the main processor ED21 is active (e.g., in application running mode), the auxiliary processor ED23 may work with the main processor ED21 to control the functions and / or states associated with some components in the electronic device ED01 (e.g., display device ED60, sensor module ED76, communication module ED90, etc.). The auxiliary processor ED23 (e.g., image signal processor, communication processor, etc.) may be implemented as part of another functionally related component (e.g., camera module ED80, communication module ED90, etc.).

[0182] Memory ED30 can store various data required by the components of electronic device ED01 (e.g., processor ED20, sensor module ED76, etc.). The data may include, for example, input and / or output data about software (e.g., program ED40, etc.) and associated commands. Memory ED30 may include volatile memory ED32 and / or non-volatile memory ED34.

[0183] The program ED40 can be stored as software in the memory ED30 and may include the operating system ED42, middleware ED44 and / or application ED46.

[0184] Input device ED50 can receive commands and / or data from outside the electronic device ED01 (e.g., from a user) to be used in components of the electronic device ED01 (e.g., processor ED20, etc.). Input device ED50 may include a microphone, mouse, keyboard, and / or digital pen (e.g., stylus).

[0185] The sound output device ED55 can output sound signals to the outside of the electronic device ED01. The sound output device ED55 may include a speaker and / or a receiver. The speaker can be used for general purposes, such as multimedia playback and / or record playback, and the receiver can be used to receive calls. The receiver can be connected as part of the speaker or can be implemented as a stand-alone device.

[0186] Display device ED60 can provide visual information to the outside of electronic device ED01. Display device ED60 may include a display, a holographic device and / or a projector, and control circuitry for controlling the corresponding device. Display device ED60 may include touch circuitry configured to sense touch and / or sensor circuitry configured to measure the intensity of the force generated by touch (e.g., a pressure sensor, etc.).

[0187] The audio module ED70 can convert sound into electrical signals and vice versa. The audio module ED70 can acquire sound through the input device ED50, or output sound through the sound output device ED55 and / or the speaker and / or headphones of another electronic device (e.g., electronic device ED02, etc.) directly or wirelessly connected to electronic device ED01.

[0188] Sensor module ED76 can sense the operating status (e.g., power, temperature, etc.) or external environmental status (e.g., user status, etc.) of electronic device ED01, and can generate electrical signals and / or data values ​​corresponding to the sensed status. Sensor module ED76 may include gesture sensors, gyroscope sensors, pressure sensors, magnetic sensors, accelerometers, grip sensors, proximity sensors, color sensors, infrared (IR) sensors, biometric sensors, temperature sensors, humidity sensors, and / or illuminance sensors.

[0189] Interface ED77 can support one or more specified protocols, allowing electronic device ED01 to connect directly or wirelessly to another electronic device (e.g., electronic device ED02, etc.). Interface ED77 may include a High Definition Multimedia Interface (HDMI), a Universal Serial Bus (USB) interface, a Secure Digital (SD) card interface, and / or an audio interface.

[0190] The connection end ED78 may include a connector through which electronic device ED01 can be physically connected to another electronic device (e.g., electronic device ED02, etc.). The connection end ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (e.g., a headphone connector, etc.).

[0191] The haptic module ED79 can convert electrical signals into mechanical stimuli (e.g., vibration, motion, etc.) or electrical stimuli that can be sensed by the user through touch or kinesthesia. The haptic module ED79 may include a motor, a piezoelectric device, and / or an electrical stimulation device.

[0192] The ED80 camera module can capture still images and / or video. The ED80 camera module may include a lens assembly containing one or more lenses. Figure 1 The image sensor 1000, image signal processor, and / or flash are included. The lens assembly included in the camera module ED80 can collect light emitted from the object (which is the object to be captured).

[0193] The power management module ED88 manages the power supplied to the electronic device ED01. The power management module ED88 can be implemented as part of a power management integrated circuit (PMIC).

[0194] Battery ED89 can supply power to components of electronic device ED01. Battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0195] Communication module ED90 can support the establishment of direct (wired) communication channels and / or wireless communication channels between electronic device ED01 and another electronic device (e.g., electronic device ED02, electronic device ED04, server ED08, etc.), and the execution of communication through the established communication channels. Communication module ED90 can operate independently of processor ED20 (e.g., application processor, etc.) and can include one or more communication processors supporting direct and / or wireless communication. Communication module ED90 may include wireless communication module ED92 (e.g., cellular communication module, short-range wireless communication module, Global Navigation Satellite System (GNSS) communication module) and / or wired communication module ED94 (e.g., local area network (LAN) communication module, power line communication module, etc.). Within the communication modules, the corresponding communication modules can be connected via a first network ED98 (e.g., a short-range communication network, such as Bluetooth). TM The communication module ED92 can communicate with another electronic device via a second network (such as WiFi Direct or Infrared Data Association (IrDA)) or a long-range communication network (e.g., a cellular network, the Internet, or a computer network (e.g., a LAN, a wide area network (WAN)). These various communication modules can be integrated into a single component (e.g., a single chip) or implemented as multiple components (e.g., multiple chips). The wireless communication module ED92 can identify and verify the electronic device ED01 in the communication network (such as the first network ED98 and / or the second network ED99) using user information (e.g., the International Mobile Subscriber Identity (IMSI)) stored in the user identification module ED96.

[0196] Antenna module ED97 can transmit signals and / or power to or from an external source (e.g., another electronic device). The antenna may include a radiator formed as a conductive pattern on a substrate (e.g., a printed circuit board (PCB)). Antenna module ED97 may include one or more antennas. When antenna module ED97 includes multiple antennas, communication module ED90 can select an antenna from the multiple antennas suitable for the communication type used in a communication network (such as a first network ED98 and / or a second network ED99). Signals and / or power can be transmitted between communication module ED90 and another electronic device via the selected antenna. Another component besides the antenna (e.g., a radio frequency integrated circuit (RFIC)) may be included as part of antenna module ED97.

[0197] Some components can be connected to each other via peripheral communication methods (e.g., bus, general purpose input / output (GPIO), serial peripheral interface (SPI), mobile industrial processor interface (MIPI), etc.) and can exchange signals (e.g., commands, data, etc.).

[0198] Commands and / or data can be sent and / or received between electronic device ED01 and external electronic device ED04 via server ED08 connected to the second network ED99. Other electronic devices ED02 and ED04 can be devices of the same or different types as electronic device ED01. All or some operations performed in electronic device ED01 can be performed in one or more of the other electronic devices ED02 and ED04, and server ED08. For example, when electronic device ED01 needs to perform a certain function and / or service, it can request one or more other electronic devices to perform some or all of the function or service, instead of performing it itself. Upon receiving the request, one or more electronic devices perform additional functions and / or services related to the request and can transmit the results of the execution to electronic device ED01. For this purpose, cloud computing, distributed computing, and / or client-server computing technologies can be used, for example.

[0199] Figure 21 It is shown that it includes Figure 20 A block diagram of an example camera module ED80 in the electronic device ED01. (Refer to...) Figure 21 The camera module ED80 may include a lens assembly 1110, a flash 1120, an image sensor 1000, an image stabilizer 1140, a memory 1150 (e.g., buffer memory, etc.), and / or an image signal processor 1160. The lens assembly 1110 can collect light emitted from the object to be captured. The camera module ED80 may include multiple lens assemblies 1110, in which case the camera module ED80 may include a dual-camera module, a 360-degree camera, or a spherical camera. Some of the multiple lens assemblies 1110 may have the same lens properties (e.g., angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens properties. The lens assembly 1110 may include a wide-angle lens or a telephoto lens.

[0200] Flash 1120 can emit light to enhance light emitted or reflected from an object. Flash 1120 can emit visible light or infrared light. Flash 1120 may include one or more light-emitting diodes (e.g., red-green-blue (RGB) light-emitting diodes (LEDs), white LEDs, infrared LEDs, ultraviolet LEDs, etc.) and / or xenon lamps. Image sensor 1000 may be as described above. Figure 1The image sensor described can convert light emitted or reflected from an object and transmitted through the lens assembly 1110 into an electrical signal to obtain an image corresponding to the object.

[0201] In response to movement of the camera module ED80 or the electronics ED01 including the camera module ED80, the image stabilizer 1140 can move one or more lenses included in the lens assembly 1110 and / or the image sensor 1000 in a certain direction, and / or control the operating characteristics of the image sensor 1000 (e.g., adjust readout timing, etc.) to compensate for the negative effects of movement. The image stabilizer 1140 can sense the movement of the camera module ED80 and / or the electronics ED01 using a gyroscope sensor (not shown) and / or an accelerometer sensor (not shown) disposed in or outside the camera module ED80. The image stabilizer 1140 can be implemented as an optical device.

[0202] Memory 1150 can store some or all of the image data acquired by image sensor 1000 for subsequent image processing operations. For example, when acquiring multiple images at high speed, the acquired raw data (e.g., Bayer patterning data, high-resolution data, etc.) can be stored in memory 1150, and a low-resolution image can be displayed. The raw data of the selected image (e.g., by user selection, etc.) can then be transferred to image signal processor 1160. Memory 1150 can be integrated with memory ED30 of electronic device ED01, and / or may include additional, independently operating memory.

[0203] The image signal processor 1160 can acquire an image using an electrical signal output from the image sensor 1000. The image signal processor 1160 can request image data of a certain format from the image sensor 1000 according to the necessary image data format.

[0204] Image signal processor 1160 can perform additional image processing on images acquired by image sensor 1000 or image data stored in memory 1150. Image processing may include depth map generation, 3D modeling, panorama generation, feature extraction, image combination and / or image compensation (e.g., noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). Image signal processor 1160 can perform control (e.g., exposure time control, readout timing control, etc.) of components included in camera module ED80 (e.g., image sensor 1000, etc.).

[0205] Images processed by image signal processor 1160 can be stored again in memory 1150 for further processing, and / or can be provided to external components of camera module ED80 (e.g., memory ED30, display device ED60, electronic device ED02, electronic device ED04, server ED08, etc.). Image signal processor 1160 can be integrated with processor ED20, or it can be configured as an additional processor operating independently of processor ED20. When image signal processor 1160 is configured separately from processor ED20 as an additional processor, images processed by image signal processor 1160 can undergo additional image processing by processor ED20 and then be displayed on display device ED60.

[0206] The image signal processor 1160 can independently receive two output signals from adjacent photosensitive units in each pixel and / or subpixel of the image sensor 1000, and can generate an autofocus signal based on the difference between the two output signals. The image signal processor 1160 can control the lens assembly 1110 such that the focus of the lens assembly 1110 can be accurately formed on the surface of the image sensor 1000 based on the autofocus signal.

[0207] Electronic device ED01 may further include having with Figure 21 The camera module ED80 has different properties and / or functions from one or more camera modules. The camera module may include those with... Figure 21 The components of the ED80 camera module are similar, including the image sensor, which can be implemented as a CCD sensor and / or a CMOS sensor and can include one or more sensors selected from image sensors with different properties, such as RGB sensors, monochrome (BW) sensors, IR sensors, or ultraviolet (UV) sensors. In this case, one of the multiple camera modules may include a wide-angle camera, and another camera module may include a telephoto camera. Similarly, one of the multiple camera modules may include a front-facing camera, and another camera module may include a rear-facing camera.

[0208] Figure 22 This is a block diagram of an electronic device 1200 that includes a multi-camera module. Figure 23 It is provided in Figure 22 A detailed block diagram of the camera module in the electronic device shown.

[0209] Reference Figure 22 The electronic device 1200 may include a camera module group 1300, an application processor 1400, a power management integrated circuit (PMIC) 1500, an external memory 1600, and an image generator 1700.

[0210] Camera module group 1300 may include multiple camera modules 1300a, 1300b, and 1300c. Although the accompanying drawings show an example of three camera modules 1300a, 1300b, and 1300c arranged, one or more embodiments are not limited thereto. In some embodiments, camera module group 1300 may be modified to include only two camera modules. In some embodiments, camera module group 1300 may be modified to include n (n is a natural number of 4 or greater) camera modules.

[0211] In the following text, refer to Figure 23 The detailed configuration of a camera module 1300b is described in detail, but the description provided below can also be applied to other camera modules 1300a and 1300c according to the embodiments.

[0212] Reference Figure 23 The camera module 1300b may include a mirror 1305, an optical path folding element (OPFE) 1310, an actuator 1330, an image sensing device 1340, and a storage unit 1350.

[0213] The reflector 1305 may include a reflective surface 1307 with a reflective material and may deform the path of light L incident from the outside.

[0214] In some embodiments, the reflector 1305 can change the path of light L incident in the first direction (R1 direction) to a second direction (R2 direction) perpendicular to the first direction (R1 direction). The reflector 1305 can rotate the reflective surface 1307 with reflective material about the central axis 1306 in direction A, such that the path of light L incident in the first direction (R1 direction) can be changed to a second direction (R2 direction) perpendicular to the first direction (R1 direction). The central axis 1306 can rotate in direction B. Here, the OPFE 1310 can also move in a third direction (R3 direction) perpendicular to the first direction (R1 direction) and the second direction (R2 direction).

[0215] In some embodiments, as shown in the figure, the maximum rotation angle of the reflector 1305 in the A direction is 15° or less in the positive A direction and greater than 15° in the negative A direction, but the embodiments are not limited thereto.

[0216] In some embodiments, the central axis 1306 can be rotated by an angle of approximately 20° in the positive or negative B direction, or by an angle between 10° and 20° or between 15° and 20°. Here, the rotation angle is the same in the positive or negative B direction, or it can be similar within a range of approximately 1°.

[0217] In some embodiments, the reflector 1305 can move the reflective surface 1307 of the reflective material in a third direction (e.g., the R3 direction) parallel to the direction in which the central axis 1306 extends.

[0218] OPFE 1310 may include, for example, an optical lens group (where m is a natural number). Here, the m lens groups move in a second direction (R2 direction) and can change the optical zoom ratio of camera module 1300b. For example, when the base optical zoom ratio of camera module 1300b is Z and the m lens groups included in OPFE 1310 move, the optical zoom ratio of camera module 1300b can be changed to 3Z, 5Z, or 10Z or greater.

[0219] Actuator 1330 can move OPFE 1310 (hereinafter referred to as optical lens) to a certain position. For example, actuator 1330 can adjust the position of optical lens so that image sensor 1342 can be located at the focal length of optical lens for precise sensing operation.

[0220] Image sensing device 1340 may include image sensor 1342, control logic 1344, and memory 1346. Image sensor 1342 senses an image of a target using light L provided via an optical lens. Control logic 1344 controls the overall operation of camera module 1300b. For example, control logic 1344 can control the operation of camera module 1300b based on control signals provided via control signal line CSLb.

[0221] The memory 1346 may store information necessary for the operation of the camera module 1300b, such as calibration data 1347. Calibration data 1347 may include information necessary for generating image data using light L provided externally via the camera module 1300b. Calibration data 1347 may include, for example, information about the degree of rotation, information about the focal length, information about the optical axis, etc. When the camera module 1300b is implemented as a multi-state camera whose focal length changes according to the position of the optical lens, calibration data 1347 may include information related to the focal length value of the optical lens according to each position (or state) and autofocus.

[0222] Storage unit 1350 can store image data sensed by image sensor 1342. Storage unit 1350 can be disposed outside image sensing device 1340 and can be stacked with sensor chip included in image sensing device 1340. In some embodiments, storage unit 1350 can be implemented as electrically erasable programmable read-only memory (EEPROM), but one or more embodiments are not limited thereto.

[0223] Reference Figure 22 and Figure 23 In some embodiments, each of the plurality of camera modules 1300a, 1300b, and 1300c may include an actuator 1330. Therefore, each of the plurality of camera modules 1300a, 1300b, and 1300c may include calibration data 1347 that is the same as or different from that of the other camera modules, depending on the operation of the actuator 1330 included therein.

[0224] In some embodiments, one of the plurality of camera modules 1300a, 1300b, and 1300c (e.g., 1300b) may be a folding lens type camera module including the aforementioned reflector 1305 and OPFE 1310, while the other camera modules (e.g., 1300a and 1300c) may be vertical type camera modules excluding the reflector 1305 and OPFE 1310. However, this disclosure is not limited thereto.

[0225] In some implementations, one of the multiple camera modules 1300a, 1300b and 1300c (e.g. 1300c) may be a vertical depth camera that extracts depth information by using infrared (IR) light.

[0226] In some embodiments, at least two camera modules (e.g., 1300a and 1300b) among the plurality of camera modules 1300a, 1300b, and 1300c may have different fields of view. In this case, for example, the optical lenses of at least two camera modules (e.g., 1300a and 1300b) among the plurality of camera modules 1300a, 1300b, and 1300c may be different from each other, but one or more embodiments are not limited thereto.

[0227] In some embodiments, the multiple camera modules 1300a, 1300b, and 1300c may have different fields of view from each other. In this case, the optical lenses included in the multiple camera modules 1300a, 1300b, and 1300c may be different from each other, but the inventive concept is not limited thereto.

[0228] In some implementations, the multiple camera modules 1300a, 1300b, and 1300c can be physically isolated from each other. That is, the sensing area of ​​an image sensor 1342 may not be divided and used by the multiple camera modules 1300a, 1300b, and 1300c, but rather the multiple camera modules 1300a, 1300b, and 1300c may each have an independent image sensor 1342 provided therein.

[0229] Refer to the return Figure 22The application processor 1400 may include an image processing device 1410, a memory controller 1420, and internal memory 1430. The application processor 1400 may be implemented separately from the plurality of camera modules 1300a, 1300b, and 1300c. For example, the application processor 1400 and the plurality of camera modules 1300a, 1300b, and 1300c may each be implemented as a separate semiconductor chip.

[0230] The image processing apparatus 1410 may include a plurality of image processors 1411, 1412 and 1413 and a camera module controller 1414.

[0231] Image data generated by each of the camera modules 1300a, 1300b, and 1300c can be provided to the image processing device 1410 via separate image signal lines ISL1, ISL2b, and ISL3c, respectively. For example, image data transmission can be performed using a camera serial interface (CSI) based on a Mobile Industrial Processor Interface (MIPI), but is not limited thereto.

[0232] Image data transmitted to image processing device 1410 may be stored in external memory 1600 before being transmitted to image processors 1411 and 1412. The image data stored in external memory 1600 may be provided to image processors 1411 and / or 1412. Image processor 1411 may correct the image data to generate video. Image processor 1412 may correct the image data to generate still images. For example, image processors 1411 and 1412 may perform preprocessing operations on the image data, such as color calibration and gamma calibration.

[0233] Image processor 1411 may include subprocessors. When the number of subprocessors is equal to the number of camera modules 1300a, 1300b, and 1300c, each subprocessor can process image data provided from one camera module. When the number of subprocessors is less than the number of camera modules 1300a, 1300b, and 1300c, at least one of the subprocessors can process image data provided from multiple camera modules using time-sharing processing. Image data processed by image processor 1411 and / or image processor 1412 may be stored in external memory 1600 before being transferred to image processor 1413. Image data stored in external memory 1600 may be transferred to image processor 1413. Image processor 1413 can perform post-processing operations on the image data, such as noise calibration, sharpening calibration, etc.

[0234] Image data processed in image processor 1413 can be provided to image generator 1700. Image generator 1700 can generate a final image based on image generation information or pattern signals using the image data provided from image processor 1413.

[0235] In detail, the image generator 1700 can generate an output image based on image generation information or a pattern signal by merging at least a portion of image data generated by camera modules 1300a, 1300b, and 1300c with different fields of view. The image generator 1700 can also generate an output image based on image generation information or a pattern signal by selecting one image data from multiple image data generated by camera modules 1300a, 1300b, and 1300c with different fields of view.

[0236] In some implementations, the image generation information may include a zoom signal or a zoom factor. In some implementations, the mode signal may be, for example, a signal based on a user-selected mode.

[0237] When the image generation information is a zoom signal (or zoom factor) and camera modules 1300a, 1300b, and 1300c have different fields of view (or angles of view), the image generator 1700 can perform different operations depending on the type of zoom signal. For example, when the zoom signal is a first signal, image data output from camera module 1300a is merged with image data output from camera module 1300c. Then, an output image can be generated using the merged image signal and image data output from camera module 1300b that was not used for merging. When the zoom signal is a second signal different from the first signal, the image generator 1700 may not perform image data merging and can generate an output image by selecting one image data from multiple image data output from camera modules 1300a, 1300b, and 1300c respectively. However, one or more embodiments are not limited to this, and the method of processing image data can be modified as needed.

[0238] The camera module controller 1414 can provide control signals to each of the camera modules 1300a, 1300b, and 1300c. The control signals generated by the camera module controller 1414 can be provided to the corresponding camera modules 1300a, 1300b, and 1300c via separate control signal lines CSLa, CSLb, and CSLc.

[0239] In some embodiments, control signals provided from camera module controller 1414 to multiple camera modules 1300a, 1300b, and 1300c may include mode information based on mode signals. The multiple camera modules 1300a, 1300b, and 1300c may operate in a first operating mode and a second operating mode related to sensing speed based on the mode information.

[0240] In the first operating mode, multiple camera modules 1300a, 1300b, and 1300c can generate image signals at a first speed (e.g., at a first frame rate), encode the image signals at a second speed faster than the first speed (e.g., at a second frame rate greater than the first frame rate), and transmit the encoded image signals to the application processor 1400. Here, the second speed can be 30 times or less than the first speed.

[0241] Application processor 1400 can store the received image signal (i.e., the encoded image signal) in internal memory 1430 provided therein or in external memory 1600 outside of application processor 1400. Then, it can read the encoded image signal from internal memory 1430 or external memory 1600 and decode it, and can display image data generated based on the decoded image signal. For example, image processors 1411 and 1412 in image processing apparatus 1410 can perform decoding and perform image processing on the decoded image signal.

[0242] In the second operating mode, multiple camera modules 1300a, 1300b, and 1300c generate image signals at a third speed slower than the first speed (e.g., at a third frame rate lower than the first frame rate), and can transmit the image signals to the application processor 1400. The image signals provided to the application processor 1400 may be unencoded signals. The application processor 1400 may perform image processing on the received image signals or store the image signals in internal memory 1430 or external memory 1600.

[0243] The PMIC 1500 can supply power (e.g., power supply voltage) to each of the multiple camera modules 1300a, 1300b, and 1300c. For example, under the control of the application processor 1400, the PMIC 1500 can supply a first power to camera module 1300a via power signal line PSLa, a second power to camera module 1300b via power signal line PSLb, and a third power to camera module 1300c via power signal line PSLc.

[0244] The PMIC 1500 can generate power corresponding to each of the multiple camera modules 1300a, 1300b, and 1300c, and can adjust the power level in response to a power control signal PCON from the application processor 1400. The power control signal PCON can include a power adjustment signal for each operating mode of the multiple camera modules 1300a, 1300b, and 1300c. For example, the operating mode can include a low-power mode, and the power control signal PCON can include information about the camera module operating in the low-power mode and set the power level. The power levels supplied to the multiple camera modules 1300a, 1300b, and 1300c can be equal or different from each other. The power levels can be changed dynamically.

[0245] The image sensor according to the embodiment includes a nano-optical lens array that performs both color separation and light focusing functions, thus improving light utilization efficiency.

[0246] Because of the nano-optical lens array provided in the image sensor according to the embodiment, light of the corresponding color can be efficiently separated and focused onto adjacent pixels in the diagonal direction, the adjacent pixels having different sizes and having the same or different colors.

[0247] The image sensor according to the embodiment can dynamically utilize pixels in low-brightness and high-brightness environments, and can be applied to, for example, high dynamic range (HDR) sensors.

[0248] It should be understood that the embodiments described herein should be considered in a descriptive sense only and not for limiting purposes. The description of features or aspects within each embodiment should generally be considered applicable to other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those skilled in the art will understand that various changes in form and detail may be made therein without departing from the spirit and scope defined by the appended claims and their equivalents.

[0249] This application is based on and claims priority to Korean Patent Application No. 10-2024-0131040, filed on September 26, 2024, with the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety.

Claims

1. An image sensor, comprising: The sensor substrate includes multiple photosensitive elements; as well as A nano-optical lens array comprises multiple nanostructures and is configured to separate light from incident light into a first wavelength band, a second wavelength band different from the first wavelength band, and a third wavelength band different from both the first and second wavelength bands, and to focus the separated light onto the multiple photosensitive elements respectively. The plurality of photosensitive elements includes a first main photosensitive element and a first corner photosensitive element. The first main photosensitive element and the first corner photosensitive element are configured to each sense light of the first wavelength band and are arranged adjacent to each other in a first diagonal direction. The first corner photosensitive element has a smaller size than the first main photosensitive element. The nano-optical lens array includes a first main superregion corresponding to the first main photosensitive element and a first angular superregion corresponding to the first angular photosensitive element, and The nanostructures in the first angular hyperregion are arranged to have symmetry based on a first axis and a second axis as axes of symmetry. The first axis passes through the center of the first angular hyperregion and is parallel to the first diagonal direction. The second axis passes through the center of the first angular hyperregion and is parallel to a second diagonal direction that is different from the first diagonal direction.

2. The image sensor according to claim 1, wherein, The nanostructures in the first angular superregion are arranged such that their size distribution on the first axis is different from their size distribution on the second axis.

3. The image sensor according to claim 1, wherein, In the first angular superregion, the number of nanostructures located on the first axis is different from the number of nanostructures located on the second axis.

4. The image sensor according to claim 1, wherein, The plurality of photosensitive elements further include: The second main photosensitive element and the second corner photosensitive element are each configured to sense light in the second wavelength band; The third main photosensitive element and the third corner photosensitive element are each configured to sense light in the third wavelength band; and The fourth main photosensitive element and the fourth corner photosensitive element are each configured to sense light in the first wavelength band. The first to the fourth main photosensitive elements are arranged in a 2×2 array in a first direction forming a 45° angle with respect to the second diagonal direction and in a second direction perpendicular to the first direction. The second corner photosensitive element is arranged adjacent to the second main photosensitive element along the first diagonal direction. Wherein, the third corner photosensitive element is arranged adjacent to the third main photosensitive element in the first diagonal direction, and The fourth corner photosensitive element is arranged adjacent to the fourth main photosensitive element in the first diagonal direction.

5. The image sensor according to claim 4, wherein, The nano-optical lens array further includes: The second main super-region corresponds to the second main photosensitive element; and The second corner super-region corresponds to the second corner photosensitive element, and The nanostructures in the second angular superregion are arranged to have symmetry based on a third axis and a fourth axis, wherein the third axis passes through the center of the second angular superregion and is parallel to the first diagonal direction, and the fourth axis passes through the center of the second angular superregion and is parallel to the second diagonal direction.

6. The image sensor according to claim 5, wherein, The nanostructures in the second angular superregion are arranged such that their size distribution on the third axis differs from their size distribution on the fourth axis.

7. The image sensor according to claim 4, wherein, The nano-optical lens array further includes: The third main super-region corresponds to the third main photosensitive element; and The third corner super-region corresponds to the third corner photosensitive element, and The nanostructures in the third-angled superregion are arranged with symmetry based on the fifth and sixth axes, the fifth axis passing through the center of the third-angled superregion and parallel to the first diagonal direction, and the sixth axis passing through the center of the third-angled superregion and parallel to the second diagonal direction. The size distribution of the nanostructure in the third corner superregion on the fifth axis is different from its size distribution on the sixth axis.

8. The image sensor according to claim 4, wherein, The nano-optical lens array further includes: The fourth main super region corresponds to the fourth main photosensitive element; and The fourth corner super-region corresponds to the fourth corner photosensitive element; The arrangement of nanostructures in the first primary superregion is the same as the arrangement of nanostructures in the fourth primary superregion. The arrangement of the nanostructures in the first corner superregion is the same as the arrangement of the nanostructures in the fourth corner superregion.

9. The image sensor according to claim 4, wherein, Each of the first and fourth main photosensitive elements is configured to sense green light. The second main photosensitive element is configured to sense red light, and The third main photosensitive element is configured to sense blue light.

10. The image sensor according to claim 9, wherein, The nano-optical lens array further includes: The first main green light focusing area is configured to focus the green light onto the first main photosensitive element; The first corner green light gathering area is configured to focus the green light onto the first corner photosensitive element; The main red light focusing area is configured to focus the red light onto the second main photosensitive element; The corner red light focusing area is configured to focus the red light onto the second corner photosensitive element; A main blue light focusing region, configured to focus the blue light onto the third main photosensitive element; and The corner blue light focusing area is configured to focus the blue light onto the third corner photosensitive element.

11. The image sensor according to claim 10, wherein, The width of the first corner green light gathering region in the first diagonal direction is less than or equal to the width of the first corner super region in the first diagonal direction.

12. The image sensor according to claim 10, wherein, The width of the first angular green light gathering region along the second diagonal direction is greater than the width of the first angular super region along the second diagonal direction.

13. The image sensor according to claim 10, wherein, The size of the first corner green light gathering region is less than or equal to three times the size of the first corner super region.

14. The image sensor according to claim 10, wherein, The nanostructures in the first corner green light gathering region are arranged such that their size distribution on the first axis is different from their size distribution on the second axis.

15. The image sensor according to claim 10, wherein, The width of the first primary green light gathering region along the first diagonal direction is greater than or equal to the width of the first primary super region along the first diagonal direction, and The width of the first main green light gathering region along the second diagonal direction is greater than the width of the first main super region along the second diagonal direction.

16. The image sensor according to claim 10, wherein, The nano-optical lens array further includes a second corner superregion corresponding to the second corner photosensitive element. Wherein, the size of the angular red light gathering region is larger than the size of the second angular super-region, and Wherein, the width of the angular red light gathering region in the second diagonal direction is greater than or equal to the width of the angular red light gathering region in the first diagonal direction.

17. The image sensor according to claim 10, wherein, The nano-optical lens array further includes a second main superregion corresponding to the second main photosensitive element. Wherein, the size of the main red light gathering region is larger than the size of the second main super region, and Wherein, the width of the main red light gathering region in the second diagonal direction is greater than or equal to the width of the main red light gathering region in the first diagonal direction.

18. The image sensor according to claim 10, wherein, The nano-optical lens array further includes a triangular superregion corresponding to the third-corner photosensitive element. Wherein, the size of the angular blue light gathering region is larger than the size of the third angular superregion, and Wherein, the width of the angular blue light gathering region in the second diagonal direction is greater than or equal to the width of the angular blue light gathering region in the first diagonal direction.

19. The image sensor according to claim 1, wherein, The nanostructures in the first master superregion are arranged as follows: It has symmetry based on an axis passing through the center of the first principal superregion and parallel to the first diagonal direction, and an axis passing through the center of the first principal superregion and parallel to the second diagonal direction as axes of symmetry, or It has symmetry based on an axis that passes through the center of the first primary superregion and is parallel to a first direction forming a 45° angle with respect to the second diagonal direction, and an axis that passes through the center of the first primary superregion and is parallel to a second direction perpendicular to the first direction as an axis of symmetry.

20. An electronic device, comprising: Lens assembly, configured to form an optical image of an object; An image sensor configured to generate a signal by converting the optical image into an electrical signal; as well as The processor is configured to process the signals generated by the image sensor. The image sensor includes: Sensor substrate, including multiple photosensitive elements; and A nano-optical lens array comprises multiple nanostructures and is configured to separate light from incident light into a first wavelength band, a second wavelength band different from the first wavelength band, and a third wavelength band different from both the first and second wavelength bands, and to focus the separated light onto the multiple photosensitive elements respectively. The plurality of photosensitive elements includes a first main photosensitive element and a first corner photosensitive element. The first main photosensitive element and the first corner photosensitive element are configured to each sense light of the first wavelength band and are arranged adjacent to each other in a first diagonal direction. The first corner photosensitive element has a smaller size than the first main photosensitive element. The nano-optical lens array includes a first main superregion corresponding to the first main photosensitive element and a first angular superregion corresponding to the first angular photosensitive element, and The nanostructures in the first angular hyperregion are arranged to have symmetry based on a first axis and a second axis as axes of symmetry. The first axis passes through the center of the first angular hyperregion and is parallel to the first diagonal direction. The second axis passes through the center of the first angular hyperregion and is parallel to a second diagonal direction that is different from the first diagonal direction.

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