Vacuum cavity water vapor capturing system

Abstract

The invention relates to the field of vacuum cavity water vapor capture, in particular to a vacuum cavity water vapor capture system which comprises a cavity, a water vapor capture device is arranged on the cavity and comprises a pipeline mechanism, a flow dividing mechanism and an energy supply mechanism, the energy supply mechanism is arranged on one side of the cavity, and the pipeline mechanism comprises an adsorption assembly. The adsorption assemblies are arranged on the inner wall of the cavity, the flow dividing mechanism is connected with the energy supply mechanism, the adsorption assemblies are all connected with the flow dividing mechanism, and the adsorption assemblies are used for adsorbing water vapor in the cavity. The effect of improving the water vapor capturing efficiency in the vacuum cavity can be achieved.

Description

Technical Field

[0001] This application relates to the field of vacuum cavity water vapor capture, and in particular to a vacuum cavity water vapor capture system. Background Technology

[0002] In the production process of solar cells, it is usually necessary to coat the silicon wafers in the solar cells. Coating is usually achieved by transporting the silicon wafers to the vacuum chamber of a vacuum coating equipment, and by evacuating the vacuum chamber, the silicon wafers are coated in a vacuum.

[0003] However, some gases, typically water vapor and oil vapor, usually remain in the vacuum chamber. The presence of these gases prolongs the vacuuming time, thus reducing production efficiency. Furthermore, water vapor can ionize under certain conditions, producing oxygen, which oxidizes the target material and alters the coating color, affecting the coating effect. Therefore, it is necessary to capture the gases in the vacuum chamber before evacuating it.

[0004] Currently, the method for capturing water vapor in a vacuum chamber is to install a water vapor trap in the vacuum chamber and a set of coils inside the vacuum chamber. The coils are then connected to the water vapor trap, and the water vapor trap causes the refrigerant to circulate in the coils, thereby cooling the coils and adsorbing the water vapor in the vacuum chamber onto the outer wall of the coils, thus achieving the capture of water vapor.

[0005] However, due to the large volume of the vacuum chamber, the length of a single coil installed in the vacuum chamber is relatively long, resulting in a longer flow time of the refrigerant in the coil. This leads to poor cooling effect of the coil and low efficiency in capturing water vapor. Summary of the Invention

[0006] In order to improve the water vapor capture efficiency in a vacuum chamber, this application provides a water vapor capture system for a vacuum chamber.

[0007] This application provides a vacuum cavity water vapor capture system, which adopts the following technical solution: A vacuum chamber water vapor capture system includes a chamber with a water vapor capture device. The water vapor capture device includes a pipeline mechanism, a diversion mechanism, and a power supply mechanism. The power supply mechanism is located on one side of the chamber. The pipeline mechanism includes adsorption components, which are located on the inner wall of the chamber. At least three sets of adsorption components are provided. The diversion mechanism is connected to the power supply mechanism. At least three sets of adsorption components are connected to the diversion mechanism. The adsorption components are used to adsorb water vapor inside the chamber.

[0008] By employing the above technical solution, at least three sets of adsorption components are arranged in the cavity, covering the bottom of the vacuum cavity. A refrigerant is introduced into the distribution mechanism via a power supply mechanism, and then the distribution mechanism delivers the refrigerant to the adsorption components, thereby cooling the components and allowing water vapor in the cavity to be adsorbed onto them. By setting at least three sets of adsorption components, each covering a portion of the cavity, the flow time of the refrigerant in each set is shortened, improving the cooling effect of the refrigerant on the coil and thus facilitating higher efficiency in water vapor capture.

[0009] In one specific implementation scheme, the power supply mechanism includes a water vapor trap, which is disposed on one side of the cavity. The water vapor trap is provided with a refrigerant outlet pipe and a refrigerant return pipe, both of which are connected to a diversion mechanism.

[0010] By adopting the above technical solution, the refrigerant is transported to the distribution mechanism through the refrigerant outlet pipe via the water vapor trap, so that the distribution mechanism can transport the refrigerant to the adsorption component. The refrigerant flowing back from the adsorption component flows back to the water vapor trap through the distribution mechanism, thereby realizing heat exchange and facilitating the reuse of the refrigerant.

[0011] In one specific implementation, the diversion mechanism includes a diversion pipe, a return pipe, and a control component. The diversion pipe is connected to the refrigerant outlet pipe, and a first branch pipe is provided on the diversion pipe. The first branch pipe is connected to the adsorption component. The return pipe is connected to the refrigerant return pipe, and a second branch pipe is provided on the return pipe. The second branch pipe is connected to the adsorption component, and the control component is disposed on the first branch pipe and the second branch pipe.

[0012] By adopting the above technical solution, the refrigerant flows from the refrigerant outlet pipe into the branch pipe, and then flows into the adsorption assembly through the first branch pipe on the branch pipe, so as to cool the adsorption assembly and thus facilitate the capture of water vapor in the cavity. Then, the refrigerant in the adsorption assembly flows back to the return pipe through the second branch pipe, and then flows back to the refrigerant return pipe from the return pipe, thus facilitating the recycling of the refrigerant.

[0013] In one specific implementation, the control component includes a control valve mounted on the first branch pipe.

[0014] By adopting the above technical solution and setting a control valve on the first branch pipe, it is convenient to control the on / off state of each first branch pipe, thereby facilitating the start and stop of the adsorption assembly connected to the first branch pipe.

[0015] In one specific implementation, the adsorption assembly includes several coils, which are coiled on the inner wall of the cavity. One end of each coil is connected to a first branch tube via a connecting assembly, and the other end of each coil is also connected to a second branch tube via a connecting assembly.

[0016] By adopting the above technical solution, the refrigerant flowing from the distribution pipe flows into the coil through the first branch pipe, thereby cooling the coil and facilitating the adsorption of water vapor in the cavity onto the coil. The refrigerant in the coil then flows back to the return pipe through the second branch pipe, enabling refrigerant circulation and facilitating continuous water vapor capture. When the coil accumulates dirt on its walls due to prolonged use, affecting its cooling effect, the connecting assembly is activated, separating the coil from the distribution mechanism for easy disassembly and replacement with a new coil, thus maintaining the coil's cooling performance.

[0017] In one specific implementation, the connection assembly includes a connector, a plug, and a locking element. The plug is installed at the end of the coil. The connector is installed at the end of the first branch pipe away from the split pipe and the end of the second branch pipe away from the return pipe. The end of the connector away from the split pipe and the return pipe has a plug groove for plugging in. The locking element is installed on the connector and is used to lock the plug plugged into the connector.

[0018] By adopting the above technical solution, when the coil needs to be disassembled, the locking mechanism is controlled to unlock the connector, and then the connector is pulled out of the connector to disassemble the coil for replacement with a new coil. After replacing the coil, the connector is reinserted into the connector and locked by the locking mechanism to complete the coil replacement.

[0019] In one specific implementation scheme, the locking component includes a locking block, a locking spring, an unlocking ring, and an unlocking torsion spring. A mounting groove is formed on the peripheral sidewall of the end of the connector. The locking block is slidably mounted in the mounting groove, with one end extending outwards from the mounting groove. The locking spring is mounted in the mounting groove, with one end connected to the bottom wall of the mounting groove and the other end connected to the end of the locking block located within the mounting groove. A locking groove is formed on the inner wall of the connector's insertion groove, for the locking block to be inserted into. The unlocking ring is rotatably mounted on the outer wall of the connector, and an unlocking block is mounted on the inner wall of the inner ring of the unlocking ring, for abutting the locking block. An unlocking groove is formed on the peripheral sidewall of the connector for the unlocking block to slide in, and the unlocking groove communicates with the locking groove. The unlocking torsion spring is mounted on the connector, with one end connected to the outer wall of the connector and the other end connected to the sidewall of the unlocking ring.

[0020] By adopting the above technical solution, when the plug is inserted into the socket of the connector, the locking block abuts against the inner wall of the socket and compresses the locking spring. When the locking block moves to the locking slot, it is inserted into the locking slot under the action of the locking spring, thereby positioning the plug on the connector to maintain a stable connection between the plug and the connector. When it is necessary to disassemble the coil, by rotating the unlocking ring, the unlocking block on the unlocking ring abuts against the locking block and pushes the locking block away from the locking slot, thereby separating the locking block from the locking slot and facilitating the separation of the plug from the connector.

[0021] In one specific implementation, one end of the unlocking block is provided with an unlocking ramp, which is used to abut against the locking block, and one end of the unlocking ramp extends from the inner sidewall of the unlocking ring in a direction away from the unlocking ring.

[0022] By adopting the above technical solution, when the unlocking ring rotates, the unlocking block rotates on the unlocking ring, so that the unlocking inclined surface on the unlocking block abuts against the end of the locking block. As the unlocking ring rotates, the unlocking inclined surface of the unlocking block slides along the end of the locking block, thereby pushing the locking block away from the unlocking ring, thus separating the unlocking block from the locking groove, which facilitates the separation of the plug and the connector.

[0023] In one specific implementation, the side wall of the connector is provided with a guide post, and the inner wall of the connector's insertion groove is provided with a guide groove for the guide post to be inserted.

[0024] By adopting the above technical solution, when the plug is inserted into the connector, the guide post on the plug is aligned with the guide groove and inserted into the guide groove, so that the plug moves along the guide groove, so that the locking block can be aligned with the locking groove, thereby facilitating the positioning of the plug on the connector.

[0025] In one specific implementation, a sealing ring is provided at the bottom wall of the insertion groove of the connector, and the sealing ring is made of rubber.

[0026] By adopting the above technical solution, when the plug is inserted into the connector, the end of the plug abuts against the sealing ring, thereby deforming the sealing ring and filling the gap between the end of the plug and the inner wall of the connector's insertion groove, thus improving the sealing performance of the plug and connector connection.

[0027] In summary, this application includes at least one of the following beneficial effects: 1. This application provides at least three sets of adsorption components, which facilitates the coverage of the entire cavity by the at least three sets of adsorption components, and greatly shortens the flow time of the refrigerant in a single adsorption component, thereby improving the cooling effect of the adsorption components and thus improving the water vapor capture efficiency in the cavity.

[0028] 2. This application provides a connecting component to facilitate the positioning of the plug-in on the connector head, thereby ensuring the stability of the connection between the plug-in and the connector head.

[0029] 3. This application provides a diversion mechanism to facilitate the refrigerant entering at least three adsorption components, thereby enabling the refrigerant to be diverted through the diversion mechanism. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the vacuum chamber water vapor capture system of this application.

[0031] Figure 2 This is a schematic diagram of the pipeline mechanism in the embodiments of this application.

[0032] Figure 3 This is a schematic diagram of the diversion mechanism in the embodiments of this application.

[0033] Figure 4 This is a schematic diagram of the coil structure in an embodiment of this application.

[0034] Figure 5 yes Figure 4 A schematic diagram of the structure at point A in the middle.

[0035] Figure 6 This is an exploded view of the connecting components in the embodiments of this application.

[0036] Figure 7 This is a cross-sectional view of the connecting component in an embodiment of this application.

[0037] Figure 8 This is a schematic diagram of the connector being inserted into the connector in an embodiment of this application.

[0038] Explanation of reference numerals in the attached figures: 1. Cavity; 11. Inlet; 12. Outlet; 2. Moisture capture device; 21. Piping mechanism; 211. Adsorption assembly; 2111. Coil; 2112. Heat-conducting block; 2113. Heat-conducting rod; 212. Connecting assembly; 2121. Connector; 2122. Insertion groove; 2123. Locking groove; 2124. Unlocking groove; 2125. Guide groove; 2126. Insertion connector; 2127. Installation 2128. Groove; 2129. Guide block; 21210. Locking block; 21210. Locking spring; 21211. Unlocking ring; 21212. Unlocking block; 21213. Unlocking torsion spring; 22. Diverting mechanism; 221. Diverting pipe; 2211. First branch pipe; 222. Return pipe; 2221. Second branch pipe; 23. Power supply mechanism; 231. Refrigerant outlet pipe; 232. Refrigerant return pipe; 3. Sealing ring. Detailed Implementation

[0039] The present application will be further described in detail below with reference to the accompanying drawings.

[0040] This application discloses a vacuum cavity water vapor capture system, referring to... Figure 1 and Figure 2 The device includes a cavity 1, with an inlet 11 at one end and an outlet 12 at the other end. A water vapor capture device 2 is installed on the cavity 1. The water vapor capture device 2 includes a pipeline mechanism 21, a diversion mechanism 22, and a power supply mechanism 23. The power supply mechanism 23 is located on one side of the cavity 1, and the pipeline mechanism 21 is located in the cavity 1. The pipeline mechanism 21 is connected to the power supply mechanism 23 through the diversion mechanism 22.

[0041] Reference Figure 1 and Figure 2 Before the cavity 1 is evacuated, the refrigerant is delivered to the distribution mechanism 22 through the power supply mechanism 23. The refrigerant is then distributed through the distribution mechanism 22 and delivered to the pipeline mechanism 21, thereby cooling the pipeline in the pipeline mechanism 21 and facilitating the collection of water vapor in the cavity 1.

[0042] Reference Figure 2 The power supply mechanism 23 includes a water vapor trap, which is existing technology in the field and will not be described in detail here. The water vapor trap is used to transport refrigerant to the piping mechanism 21. The water vapor trap is located on one side of the cavity 1, and a refrigerant outlet pipe 231 is installed at the inlet end of the water vapor trap, and a refrigerant return pipe 232 is installed at the inlet end of the water vapor trap.

[0043] Reference Figure 2 and Figure 3The diversion mechanism 22 includes a diversion pipe 221, a return pipe 222, and a control assembly. The diversion pipe 221 is fixedly installed at the end of the refrigerant outlet pipe 231 away from the water vapor trap. Four first branch pipes 2211 are fixedly installed on the side wall of the diversion pipe 221, arranged along the length of the diversion pipe 221. The return pipe 222 is fixedly installed at the end of the refrigerant return pipe 232 away from the water vapor trap. Four second branch pipes 2221 are fixedly installed on the side wall of the return pipe 222, arranged along the length of the return pipe 222. The control assembly includes four control valves (not shown in the figure), each corresponding to one of the four first branch pipes 2211, and the control valves are fixedly installed on the first branch pipes 2211.

[0044] Reference Figure 2 and Figure 3 The pipeline mechanism 21 includes four sets of adsorption components 211. Each set of adsorption components 211 corresponds to a first branch pipe 2211 and a second branch pipe 2221. The adsorption component 211 includes a coil 2111. One end of the coil 2111 is connected to the first branch pipe 2211 through a connecting component 212, and the other end of the coil 2111 is also connected to the second branch pipe 2221 through a connecting component 212.

[0045] Reference Figure 4 and Figure 5 The outer wall of the coil 2111 has several mounting holes. The adsorption assembly 211 also includes a heat-conducting component, which includes a heat-conducting block 2112 and a heat-conducting rod 2113. The heat-conducting block 2112 has a tapered cross-section, and the heat-conducting rod 2113 is fixedly installed on the bottom wall of the heat-conducting block 2112. The heat-conducting block 2112 is fixedly installed on the outer wall of the coil 2111 by welding, and the heat-conducting rod 2113 extends into the coil 2111 through the mounting holes. By setting the heat-conducting block 2112 on the outer wall of the coil 2111, the contact area between the coil 2111 and the water vapor in the cavity 1 is increased, thereby increasing the adsorption area. The heat-conducting block 2112 transfers heat to the refrigerant in the coil 2111 through the heat-conducting rod 2113, thereby achieving heat exchange. Furthermore, since the heat-conducting rod 2113 extends into the coil 2111, the cross-sectional area of ​​the coil 2111 is reduced, thereby increasing the flow rate of the refrigerant in the coil 2111 and resulting in a faster heat exchange effect.

[0046] Reference Figure 3 and Figure 6The connecting assembly 212 includes a connector 2121, a plug connector 2126, and a locking element. Two plug connectors 2126 are provided, respectively fixedly installed at both ends of the coil 2111, and each plug connector 2126 has a guide hole communicating with the coil 2111. Two connectors 2121 are also provided, respectively fixedly installed at the ends of the first branch pipe 2211 and the second branch pipe 2221. The end of the connector 2121 furthest from the first branch pipe 2211 has a insertion groove 2122. The insertion groove 2122 on the connector 2121 installed on the first branch pipe 2211 communicates with the first branch pipe 2211, and the insertion groove 2122 on the connector 2121 installed on the second branch pipe 2221 communicates with the second branch pipe 2221. The insertion groove 2122 is used for insertion of the plug connector 2126.

[0047] Reference Figure 6 and Figure 7 The locking components include a locking block 2129, a locking spring 21210, an unlocking ring 21211, and an unlocking torsion spring 21213. Two mounting grooves 2127 are formed on the outer side wall of the end of the connector 2126 away from the coil 2111. The two mounting grooves 2127 are symmetrically arranged, and their axes are perpendicular to the axis of the connector 2126. Two locking blocks 2129 are also provided, corresponding one-to-one with the two mounting grooves 2127. The locking blocks 2129 are slidably installed within the mounting grooves 2127 along their axial direction, with one end of the locking block extending outward from the mounting groove 2127. Two locking springs 21210 are also provided, each corresponding to one of the two mounting slots 2127. The locking springs 21210 are installed in the mounting slots 2127, with one end of the locking spring 21210 fixedly connected to the bottom wall of the mounting slot 2127, and the other end extending away from the bottom wall of the mounting slot 2127 and abutting against the end of the locking block 2129 located in the mounting slot 2127. The end of the locking block 2129 away from the locking spring 21210 is provided with a guide slope, with one end of the guide slope located on the side wall of the locking block 2129 near the connector 2121, and the other end extending away from the connector 2121 to the end of the locking block 2129 away from the locking spring 21210.

[0048] Reference Figure 6 and Figure 7The inner sidewall of the insertion slot 2122 is provided with a locking slot 2123 for the locking block 2129 to be inserted. The unlocking ring 21211 is rotatably mounted on the outer sidewall of the connector 2121, and the axis of the unlocking ring 21211 coincides with the axis of the connector 2121. Two unlocking blocks 21212 are fixedly installed on the inner sidewall of the unlocking ring 21211. The two unlocking blocks 21212 correspond one-to-one with the two locking blocks 2129. The length of the unlocking block 21212 is greater than the length of the locking block 2129. The unlocking block 21212 is provided with an unlocking ramp. One end of the unlocking ramp is located on the sidewall of the unlocking block 21212 near the locking block 2129, and the other end extends away from the locking block 2129 to the end of the unlocking block 21212 away from the unlocking ring 21211. The unlocking ramp is used to abut against the locking block 2129. The outer wall of the connector 2121 has an unlocking groove 2124 for the unlocking block 21212 to slide, and the unlocking groove 2124 communicates with the locking groove 2123. The unlocking torsion spring 21213 is installed on the outer wall of the connector 2121, and one end of the unlocking torsion spring 21213 is fixedly connected to the outer wall of the connector 2121, and the other end is fixedly connected to the end of the unlocking ring 21211.

[0049] Reference Figure 6 A guide block 2128 is fixedly installed on the outer wall of the connector 2126, and a guide groove 2125 is provided on the side wall of the connector 2122 for the guide block 2128 to slide. The axis of the guide groove 2125 is parallel to the axis of the connector 2121.

[0050] Reference Figure 6 and Figure 8 By aligning the guide block 2128 on the connector 2126 with the guide groove 2125 on the connector slot 2122, and inserting the connector 2126 into the connector slot 2122, the guide block 2128 is inserted into the guide groove 2125, and the connector 2126 is pushed into the connector slot 2122. When the guide ramp of the locking block 2129 abuts against the end of the connector 2121, the locking block 2129 is subjected to pressure from the connector 2121, thus automatically retracting into the mounting slot 2127 and compressing the locking spring 21210. When the locking block 2129 moves to the locking slot 2123, the locking block 2129 is inserted into the locking slot 2123 under the action of the locking spring 21210, thereby positioning the connector 2126 on the connector 2121.

[0051] Reference Figure 6 and Figure 7When it is necessary to disassemble the connector 2126, the unlocking ring 21211 is rotated, causing the unlocking ring 21211 to move the unlocking block 21212. This causes the unlocking ramp on the unlocking block 21212 to abut against the locking block 2129, pushing the locking block 2129 away from the locking groove 2123. This causes the locking block 2129 to retract into the mounting groove 2127, separating the locking block 2129 from the locking groove 2123, thus facilitating the removal of the connector 2126 from the connector 2121. Then, the unlocking ring 21211 is released, allowing it to rotate back to its original position under the action of the unlocking torsion spring 21213.

[0052] Reference Figure 6 and Figure 7 A sealing ring 3 is also installed inside the connector 2121. The sealing ring 3 is made of rubber and is located at the bottom wall of the insertion groove 2122. The diameter of the inner ring of the sealing ring 3 is larger than the diameter of the outer ring of the first branch pipe 2211 and the second branch pipe 2221.

[0053] The working principle of this embodiment is as follows: Four sets of coils 2111 are arranged on the bottom wall of the cavity 1, and the ends of the coils 2111 pass through the bottom wall of the cavity 1. Then, the guide block 2128 on the plug 2126 at one end of the coil 2111 is aligned with the guide groove 2125 in the connecting block. Then, the plug 2126 is inserted into the plug groove 2122, so that the guide block 2128 slides in the guide groove 2125. When the guide slope of the locking block 2129 on the plug 2126 abuts against the end of the connector 2121, the locking block 2129 retracts into the mounting groove 2127 under the action of the connector 2121 and compresses the locking spring 21210, so that the plug 2126 can slide smoothly in the plug groove 2122. When the locking block 2129 moves to the locking groove 2123 along with the plug 2126, the locking block 2129 is inserted into the locking groove 2123 under the action of the locking spring 21210, thereby positioning the plug 2126 on the connector 2121. At this time, the plug 2126 squeezes the sealing ring 3, thereby sealing the connection between the plug 2126 and the connector 2121.

[0054] Then, the refrigerant is transported from the refrigerant outlet pipe 231 to the branch pipe 221 through the water vapor trap. The refrigerant is then transported to the coil 2111 through the four first branch pipes 2211 on the branch pipe 221, thereby cooling the coil 2111 in the cavity 1 and absorbing water vapor in the cavity 1. After flowing through the coil 2111, the refrigerant flows through the second branch pipe 2221 to the return pipe 222, and then back from the return pipe 222 to the refrigerant return pipe 232, thus entering the water vapor trap for heat exchange and enabling the reuse of the refrigerant. Furthermore, by controlling the opening and closing of the control valve, it is easy to individually control the on / off state of one set of coils 2111, thereby facilitating the adjustment of the position of the water vapor adsorbed in the cavity 1.

[0055] After the coil 2111 has been used for a period of time, dirt will accumulate inside it, requiring disassembly and replacement to maintain its efficiency in adsorbing water vapor. During disassembly, rotating the unlocking ring 21211 causes the unlocking block 21212 to rotate, torsion the unlocking torsion spring 21213, causing the unlocking bevel on the unlocking block 21212 to contact the end of the locking block 2129 and press it back into the mounting groove 2127. This separates the locking block 2129 from the locking groove 2123, facilitating the removal of the connector 2126 from the connector 2121, thus disassembling the coil 2111. After disassembly, releasing the unlocking ring 21211 allows it to rotate back to its original position under the action of the unlocking torsion spring 21213, enabling reuse.

[0056] The above are preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made to the structure, shape and principle of this application should be included within the scope of protection of this application.

Claims

1. A vacuum chamber water vapor capture system comprising a chamber (1), characterized by: The cavity (1) is provided with a water vapor capturing device (2), the water vapor capturing device (2) comprises a pipeline mechanism (21), a shunt mechanism (22) and an energy supply mechanism (23), the energy supply mechanism (23) is arranged on one side of the cavity (1), the pipeline mechanism (21) comprises an adsorption assembly (211), the adsorption assembly (211) is arranged on the inner wall of the cavity (1), and at least three groups of the adsorption assembly (211) are arranged; the shunt mechanism (22) is connected with the energy supply mechanism (23), and at least the three groups of adsorption assemblies (211) are connected with the shunt mechanism (22); the adsorption assembly (211) is used for adsorbing water vapor in the cavity (1).

2. The vacuum chamber water vapor capture system of claim 1, wherein: The energy supply mechanism (23) comprises a water vapor trap, the water vapor trap is arranged on one side of the cavity (1), the water vapor trap is provided with a refrigerant outflow pipe (231) and a refrigerant flowback pipe (232), and the refrigerant outflow pipe (231) and the refrigerant flowback pipe (232) are connected with the shunt mechanism (22).

3. The vacuum chamber water vapor capture system of claim 2, wherein: The shunt mechanism (22) comprises a shunt pipe (221), a backflow pipe (222) and a control assembly, the shunt pipe (221) is connected with the refrigerant outflow pipe (231), the shunt pipe (221) is provided with a first branch pipe (2211), the first branch pipe (2211) is connected with the adsorption assembly (211), the backflow pipe (222) is connected with the refrigerant flowback pipe (232), the backflow pipe (222) is provided with a second branch pipe (2221), the second branch pipe (2221) is connected with the adsorption assembly (211), and the control assembly is arranged on the first branch pipe (2211) and the second branch pipe (2221).

4. The vacuum chamber water vapor capture system of claim 3, wherein: The control assembly comprises a control valve, and the control valve is mounted on the first branch pipe (2211).

5. The vacuum chamber water vapor capture system of claim 3, wherein: The adsorption assembly (211) comprises a plurality of coil pipes (2111), the coil pipes (2111) are arranged on the inner wall of the cavity (1), one end of the coil pipe (2111) is connected with the first branch pipe (2211) through a connecting assembly (212), and the other end of the coil pipe (2111) is also connected with the second branch pipe (2221) through the connecting assembly (212).

6. The vacuum chamber water vapor capture system of claim 5, wherein: The connecting assembly (212) comprises a connecting head (2121), a plug (2126) and a locking piece, the plug (2126) is mounted on the end of the coil pipe (2111), the connecting head (2121) is mounted on the end of the first branch pipe (2211) away from the shunt pipe (221) and the end of the second branch pipe (2221) away from the backflow pipe (222), a plug groove (2122) is formed in the end of the connecting head (2121) away from the shunt pipe (221) and the backflow pipe (222), the plug groove (2122) is used for plug connection of the plug (2126), and the locking piece is mounted on the connecting head (2121) and is used for locking the plug (2126) plugged into the connecting head (2121).

7. The vacuum chamber water vapor capture system of claim 6, wherein: The locking piece comprises a locking block (2129), a locking elastic sheet (21210), an unlocking ring (21211) and an unlocking torsion spring (21213), a mounting groove (2127) is formed on the peripheral side wall at the end of the plug-in connector (2126), the locking block (2129) is slidingly mounted in the mounting groove (2127), and one end of the locking block (2129) extends out of the mounting groove (2127), the locking elastic sheet (21210) is mounted in the mounting groove (2127), and one end of the locking elastic sheet (21210) is connected with the groove bottom wall of the mounting groove (2127), and the other end is connected with one end of the locking block (2129) in the mounting groove (2127), a locking groove (2123) is formed on the inner wall of the plug-in groove (2122) of the connecting head (2121), the locking groove (2123) is used for plug-in of the locking block (2129), the unlocking ring (21211) is rotationally mounted on the outer wall of the connecting head (2121), and the inner wall of the inner circle of the unlocking ring (21211) is provided with an unlocking block (21212), the unlocking block (21212) is used for abutting against the locking block (2129), an unlocking groove (2124) for sliding of the unlocking block (21212) is formed on the peripheral side wall of the connecting head (2121), the unlocking groove (2124) is communicated with the locking groove (2123), and the unlocking torsion spring (21213) is mounted on the connecting head (2121), and one end of the unlocking torsion spring (21213) is connected with the outer wall of the connecting head (2121), and the other end is connected with the side wall of the unlocking ring (21211).

8. The vacuum chamber water vapor capture system of claim 7, wherein: One end of the unlocking block (21212) is provided with an unlocking inclined surface, the unlocking inclined surface is used for abutting against the locking block (2129), and the unlocking inclined surface extends away from the unlocking ring (21211) from the inner side wall of the unlocking ring (21211).

9. The vacuum chamber water vapor capture system of claim 6, wherein: The side wall of the plug-in connector (2126) is provided with a guide column, and the inner wall of the plug-in groove (2122) of the connecting head (2121) is provided with a guide groove (2125) for plug-in of the guide column.

10. The vacuum chamber water vapor capture system of claim 6, wherein: The bottom wall of the plug-in groove (2122) of the connecting head (2121) is provided with a sealing ring (3), and the sealing ring (3) is made of rubber material.

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