Anti-sputtering mechanism for condenser pipe of vacuum evaporator

Abstract

The invention relates to the technical field of vacuum evaporation equipment, in particular to an anti-sputtering mechanism for a condenser pipe of a vacuum evaporator, which comprises a shell and a condenser pipe fixedly mounted on the inner wall of the shell, a baffle is fixedly mounted at the position of the condenser pipe in the shell, and a guide plate is further fixedly mounted on the inner wall of the shell. And a drainage mechanism is arranged between the flow guide plate and the shell and is used for discharging condensate water in real time. The baffle, the flow guide plate and the drainage mechanism are arranged on the periphery of the condensation pipe, the baffle forms a barrier, metal steam can smoothly pass through and fully exchanges heat with the condensation pipe, meanwhile, liquid drops and impurities splashed from the surface of the condensation pipe during vacuum removal can be effectively blocked, and therefore the risk that products are polluted is greatly reduced. The condensate water can be rapidly collected into the drainage mechanism through the guide plate, rapid collection and drainage of the condensate water are achieved, and the influence of the condensate water on follow-up vacuumizing is avoided.

Description

Technical Field

[0001] This invention relates to the field of vacuum evaporation equipment technology, specifically to an anti-splashing mechanism for the condenser tube of a vacuum evaporation machine. Background Technology

[0002] In the vacuum evaporation process, the condenser tube is a key component. Its core function is to capture and condense excess metal vapor and impurities in the chamber through heat exchange, so as to maintain high vacuum cleanliness and ensure coating quality.

[0003] However, existing technology has a significant drawback: during the "vacuum removal" stage after vapor deposition, the pressure inside the chamber rises sharply, causing droplets generated by heat exchange on the surface of the condenser tube to splash. Furthermore, these splashing droplets carry adsorbed impurities, contaminating the workpiece to be deposited or the surface of the already coated product, leading to a decrease in product yield.

[0004] In addition, traditional equipment lacks the collection and automatic removal of condensate, requiring manual removal of condensate to prevent it from affecting the vacuum level during the next vacuum evaporation process. This wastes manpower and makes it difficult to remove condensate in a timely manner.

[0005] In view of this, we propose an anti-splashing mechanism for the condenser tube of a vacuum evaporation machine. Summary of the Invention

[0006] The purpose of this invention is to provide an anti-splashing mechanism for the condenser tube of a vacuum evaporation machine, which solves the problems mentioned in the background art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: An anti-splashing mechanism for a condenser tube of a vacuum evaporation machine includes a housing and a condenser tube fixedly installed on the inner wall of the housing. A baffle is fixedly installed inside the housing at the position of the condenser tube. A guide plate is also fixedly installed on the inner wall of the housing. A drainage mechanism is provided between the guide plate and the housing for real-time discharge of condensate.

[0008] Preferably, the drainage mechanism includes a water storage box, which is fixedly installed on the inner wall of the housing. A sealing plate is fixedly installed inside the water storage box, and a one-way ball valve is fixedly connected to the bottom of the water storage box via a pipe.

[0009] Preferably, the sealing plate includes a first plate and a second plate, and the first plate and the second plate are fixedly connected. The first plate has a first connection hole, and the second plate has a second connection hole.

[0010] Preferably, both the first connecting hole and the second connecting hole are expanding circular holes, with the opening of the first connecting hole expanding upward and the opening of the second connecting hole expanding downward.

[0011] Preferably, a cylinder is fixedly installed at the top of the inside of the water storage box. The cylinder is connected to the air pump of the vacuum evaporation machine. A sealing ball is fixedly installed at the bottom of the output shaft of the cylinder. There are two sealing balls, and the two sealing balls are respectively adapted to the connection hole one and the connection hole two.

[0012] Preferably, a cable is fixedly installed at the bottom of one of the sealing balls, and the other end of the cable is fixedly connected to the ball core. The cable is fixedly connected to the sealing ball corresponding to the connection hole.

[0013] Preferably, the baffle is provided with a plurality of heat exchange holes, which are inclined relative to the baffle.

[0014] Preferably, the guide plate is provided with a flow-guiding groove, which is located at the center of the top of the guide plate, and flow-gathering edges are provided on both sides of the flow-guiding groove on the guide plate.

[0015] Preferably, the diversion channel is inclined, and the end closest to the water storage box is the lowest point.

[0016] Preferably, an upper water storage chamber is provided above the sealing plate inside the water storage box, and a lower water storage chamber is provided below the sealing plate inside the water storage box.

[0017] By employing the above technical solution, the present invention provides an anti-splashing mechanism for the condenser tube of a vacuum evaporation machine, which has at least the following beneficial effects: (1) This invention, by setting baffles, guide plates, and drainage mechanisms around the condenser tube, creates a physical barrier. The baffles ensure that metal vapor can pass smoothly and exchange heat fully with the condenser tube, while effectively blocking droplets and impurities splashed from the condenser tube surface during vacuuming, thus greatly reducing the risk of product contamination. The guide plates quickly collect condensate into the drainage mechanism, achieving rapid collection and discharge of condensate, reducing labor intensity and avoiding the impact of condensate on subsequent vacuuming.

[0018] (2) This invention achieves automatic collection and controllable discharge of condensate by setting up a guide plate and a drainage mechanism. The condensate is collected in the water storage box on the flow-gathering edge of the guide plate and the inclined diversion channel. The drainage mechanism drives the sealing ball with a cylinder to precisely control the connection and isolation between the upper and lower water storage rooms. During the vapor deposition process, the drainage mechanism can maintain vacuum sealing; after the work is completed, it can automatically and quickly discharge the accumulated water, avoiding the impact of accumulated water on the subsequent vacuuming efficiency and the problem of impurity caking, significantly improving the stability and maintenance convenience of the equipment.

[0019] (3) This invention links the cylinder with the main air pump system of the vacuum evaporation machine, so that the operating status of the mechanism is synchronized with the changes in the vacuum degree of the chamber in real time. This passive linkage control does not require an additional independent control unit, which not only ensures the reliability of the function, but also simplifies the system structure and realizes automated operation. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of the invention, form part of this application: Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a perspective view of the overall structure of the present invention; Figure 3 This is a schematic diagram of the cross-sectional structure of the baffle of the present invention; Figure 4 This is a schematic diagram of the flow guide plate and its connecting parts according to the present invention; Figure 5 This is an enlarged schematic diagram of the guide plate structure of the present invention; Figure 6 This is a schematic diagram of the drainage mechanism of the present invention; Figure 7 This is a schematic cross-sectional view of the drainage mechanism of the present invention; Figure 8 This is an enlarged schematic diagram of the sealing plate structure of the present invention; Figure 9 This is a schematic cross-sectional view of the sealing plate of the present invention.

[0021] In the diagram: 1. Shell; 2. Condenser; 3. Baffle; 4. Heat exchange hole; 5. Guide plate; 51. Converging edge; 52. Drainage channel; 6. Drainage mechanism; 61. Water storage box; 62. Sealing plate; 621. Plate 1; 622. Plate 2; 623. Connection hole 1; 624. Connection hole 2; 63. Sealing ball; 64. Cylinder; 65. Cable; 66. One-way ball valve; 67. Ball core; 68. Upper water storage chamber; 69. Lower water storage chamber. Detailed Implementation

[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0023] Please see Figures 1-9An anti-splashing mechanism for the condenser tube of a vacuum evaporation coating machine includes a housing 1 and a condenser tube 2 fixedly installed on the inner wall of the housing 1. The housing 1 is the fixed part of the entire vacuum evaporation coating machine, forming a sealed space with another movable part to facilitate subsequent vacuuming and thin film evaporation. The condenser tube 2 is serpentine in shape to maximize heat exchange and to capture and condense excess metal vapor and impurities generated during the evaporation process, preventing them from contaminating the vacuum chamber and affecting the coating quality.

[0024] Please see Figure 1 and Figure 2 A baffle 3 is fixedly installed inside the housing 1 at the location of the condenser tube 2. A space is formed between the baffle 3 and the housing 1, and the condenser tube 2 is located in this space and protected to prevent condensate from splashing onto the surface of the condenser tube 2 and affecting the evaporation effect. Specifically, the baffle 3 constitutes a physical barrier to block and collect splashed droplets and impurities during vacuum removal.

[0025] Please see Figure 3 The baffle 3 has multiple heat exchange holes 4 arranged in an array. The heat exchange holes 4 are inclined relative to the baffle 3, with the lower end of the inclined heat exchange holes 4 closer to the condenser tube 2. The heat exchange holes 4 do not interfere with the entry of metal vapor and impurities into the vacuum evaporation chamber, thus preventing them from affecting the operation of the condenser tube 2. Simultaneously, the inclined arrangement of the heat exchange holes 4 prevents condensed vapor and water vapor from splashing along the heat exchange holes 4 into the vacuum evaporation chamber and affecting the thin film. This provides excellent protection.

[0026] Specifically, the inclined heat exchange holes 4 ensure that metal vapor can pass through smoothly and exchange heat fully with the condenser tube 2, while effectively blocking droplets and impurities splashed from the surface of the condenser tube 2 during vacuum removal, thus preventing droplets and impurities from entering the shell 1 through the heat exchange holes 4, thereby greatly reducing the risk of product contamination.

[0027] Please see Figure 4 and Figure 5 A guide plate 5 is fixedly installed between the bottom end of the baffle 3 and the inner wall of the shell 1 to collect the condensate after condensation by the condenser tube 2, preventing water from remaining inside the shell 1 and affecting the vacuum level. Furthermore, a flow channel 52 is provided on the guide plate 5, located at the center of the top of the guide plate 5. The flow channel 52 is inclined, allowing the condensate collected in the flow channel 52 to automatically flow along the flow channel 52 under gravity, towards the lowest point of the flow channel 52. Both sides of the upper part of the guide plate 5 have converging edges 51, which are inclined, providing a rapid convergence channel for the condensate on the inner wall of the shell 1 and the baffle 3, facilitating the condensate to converge into the flow channel 52. The converging edges 51 and the inclined flow channel 52 on the guide plate 5 quickly collect the condensate, facilitating its discharge.

[0028] Please see Figure 4 One end of the guide plate 5 is fixedly connected to a drainage mechanism 6, which is used to quickly discharge the condensate and prevent the condensate from remaining in the shell 1, which would have an adverse effect on the vacuum degree and vapor deposition.

[0029] Please see Figure 6 The drainage mechanism 6 includes a water storage box 61, which is fixedly connected to and communicates with the diversion channel 52. The communication point is located at the lowest end of the diversion channel 52, so that the condensate can flow quickly into the water storage box 61 under the action of gravity.

[0030] Please see Figure 7 A sealing plate 62 is fixedly installed inside the water storage box 61. The sealing plate 62 divides the water storage box 61 into an upper water storage chamber 68 and a lower water storage chamber 69, allowing condensate to be temporarily stored in the upper water storage chamber 68 and then discharged through the lower water storage chamber 69. The sealing plate 62 includes a first plate 621 and a second plate 622, which are fixedly connected and have a height difference. A first connection hole 623 is provided on the first plate 621, and a second connection hole 624 is provided on the second plate 622. The upper water storage chamber 68 and the lower water storage chamber 69 are connected through the first connection hole 623 and the second connection hole 624. By controlling the sealing of the first connection hole 623 and the second connection hole 624, the connection between the upper water storage chamber 68 and the lower water storage chamber 69 can be controlled. This allows condensate to be discharged without disrupting the vacuum.

[0031] Please see Figure 7 A cylinder 64 is fixedly installed at the top of the interior of the water storage box 61. A sealing ball 63 is fixedly installed at the bottom of the output shaft of the cylinder 64. There are two sealing balls 63, which are respectively adapted to the connection hole 623 and the connection hole 624. This allows the sealing balls 63 to seal the connection holes 623 and 624, thus controlling the connection between the upper water storage room 68 and the lower water storage room 69 by controlling the position of the sealing balls 63. Furthermore, both the connection holes 623 and 624 are expanding circular holes, and their opening directions are opposite. The sealing balls 63 are made of a material with a certain degree of elasticity, such as rubber. This makes the contact control of the sealing balls 63 with the connection holes 623 and 624 more stable, resulting in a more thorough seal and preventing air leakage.

[0032] Please see Figure 7A one-way ball valve 66 is fixedly connected to the bottom of the water storage box 61 via a pipe, and the one-way ball valve 66 is connected to the lower water storage chamber 69, allowing condensate in the lower water storage chamber 69 to be quickly discharged through the one-way ball valve 66. A cable 65 is fixedly installed at the bottom of a sealing ball 63, and the other end of the cable 65 is fixedly connected to a ball core 67. When the sealing ball 63 blocks the connection hole 623, the cable 65 is in a slack state, allowing the ball core 67 to move freely, thereby enabling the one-way ball valve 66 to work and drain water freely.

[0033] It should be noted that when the sealing ball 63 moves downward, it seals the connection hole 623, and when it moves upward, it releases the seal on the connection hole 623. Simultaneously, the cylinder 64 and the air pump of the vacuum evaporation machine are connected via a pipeline, ensuring that the negative pressure in the cylinder 64 is proportional to the negative pressure inside the vacuum evaporation machine.

[0034] Specifically, the cylinder 64 drives the sealing ball 63 to move, thereby sealing the first connection hole 623 and the second connection hole 624, and thus precisely controlling the connection and isolation between the upper water storage chamber 68 and the lower water storage chamber 69. During the vapor deposition process, the cylinder 64 drives the sealing ball 63 upward, opening the first connection hole 623 and sealing the second connection hole 624, as well as the one-way ball valve 66, thus maintaining vacuum sealing while collecting condensate into the lower water storage chamber 69. After vacuum vapor deposition, the cylinder 64 drives the sealing ball 63 downward, sealing the first connection hole 623, opening the second connection hole 624, and opening the one-way ball valve 66, allowing the accumulated water in the lower water storage chamber 69 to be automatically and quickly discharged, avoiding the impact of accumulated water on subsequent vacuuming efficiency and the problem of impurity caking, significantly improving the stability and ease of maintenance of the equipment.

[0035] A splash-proof mechanism for the condenser tube of a vacuum evaporation coating machine, the working principle of which is as follows: When the vacuum evaporation machine is operating, the air pump simultaneously adjusts the negative pressure inside the housing 1 as it evacuates the interior. This causes the output shaft of the cylinder 64 to move upward, which in turn moves the sealing ball 63 upward, thus sealing the second connection hole 624 and opening the first connection hole 623. At this time, the sealing ball 63 moves the cable 65 upward, tightening the ball core 67, thereby keeping the one-way ball valve 66 in a closed state. This prevents the one-way ball valve 66 from affecting the vacuuming process of the housing 1.

[0036] Once the vacuum level inside the housing 1 reaches the required standard, water is circulated through the condenser tube 2 for heat exchange. This process captures and condenses excess metal vapor and impurities generated during the evaporation process, preventing them from contaminating the vacuum chamber and affecting the coating quality. Furthermore, the water vapor inside the housing 1 condenses on the surface of the condenser tube 2 to form condensate.

[0037] During the coating process, the vacuum level inside the housing 1 is uniform. The condensate on the condenser tube 2 collects under gravity on the guide plate 5 at the bottom and enters the water storage box 61 through the drainage channel 52 for collection. The condensate also enters the lower water storage chamber 69 along the connection hole 623.

[0038] When the coating is completed and the vacuum is released, the condensate on the surface of the condenser tube 2 will splash due to the drastic change in air pressure. The splashed condensate will be blocked by the baffle 3 and the inner wall of the shell 1, preventing the condensate from contaminating the vacuum-deposited film. Furthermore, when the vacuum is released, the negative pressure in the cylinder 64 is released. Under the gravity of the sealing ball 63, connection hole one 623 is sealed, connection hole two 624 is opened, and the air pressure in the lower water storage chamber 69 is consistent with the outside air pressure. The downward movement of the sealing ball 63 allows the cable 65 to relax, thus allowing the ball core 67 to move freely and releasing the limit on the one-way ball valve 66. This allows the condensate in the lower water storage chamber 69 to be quickly discharged, preventing condensate accumulation from affecting the vacuum level during subsequent vacuum deposition.

[0039] When excessive condensation affects the vacuum level during the vapor deposition process, the cylinder 64 corresponding to the connection hole 623 is pressed, causing the output shaft of the cylinder 64 to move downward and drive the sealing ball 63 to seal the connection hole 623. This prevents the upper water storage chamber 68 and the lower water storage chamber 69 from being connected, thus avoiding excessive water accumulation that could affect the vacuum level and the vacuum vapor deposition effect.

[0040] It should be noted that during the vapor deposition process, due to the negative pressure in the lower water storage chamber 69, the air pressure on both sides of the ball core 67 is inconsistent. The atmospheric pressure will press the ball core 67 against the one-way ball valve 66 to prevent water or air leakage from affecting the vacuum level.

[0041] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0042] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A splash-proof mechanism for a condenser tube of a vacuum evaporation machine, comprising a housing (1) and a condenser tube (2) fixedly installed on the inner wall of the housing (1), characterized in that: A baffle (3) is fixedly installed inside the housing (1) at the position of the condenser pipe (2). A guide plate (5) is also fixedly installed on the inner wall of the housing (1). A drainage mechanism (6) is provided between the guide plate (5) and the housing (1) for collecting and discharging condensate.

2. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 1, characterized in that: The drainage mechanism (6) includes a water storage box (61), which is fixedly installed on the inner wall of the shell (1). A sealing plate (62) is fixedly installed inside the water storage box (61), and a one-way ball valve (66) is fixedly connected to the bottom of the water storage box (61) through a pipe.

3. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 2, characterized in that: The sealing plate (62) includes a first plate (621) and a second plate (622), and the first plate (621) and the second plate (622) are fixedly connected. The first plate (621) has a first connection hole (623), and the second plate (622) has a second connection hole (624).

4. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 3, characterized in that: Both the first connecting hole (623) and the second connecting hole (624) are expanding circular holes. The opening of the first connecting hole (623) expands upward, while the opening of the second connecting hole (624) expands downward.

5. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 2, characterized in that: A cylinder (64) is fixedly installed at the top of the inside of the water storage box (61). The cylinder (64) is connected to the air pump of the vacuum evaporation machine. A sealing ball (63) is fixedly installed at the bottom of the output shaft of the cylinder (64). There are two sealing balls (63), and the two sealing balls (63) are respectively adapted to the connection hole one (623) and the connection hole two (624).

6. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 5, characterized in that: A cable (65) is fixedly installed at the bottom end of one of the plugging balls (63), and the other end of the cable (65) is fixedly connected to the ball core (67). The cable (65) is fixedly connected to the plugging ball (63) corresponding to the first connection hole (623).

7. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 1, characterized in that: The baffle (3) is provided with a plurality of heat exchange holes (4), which are inclined relative to the baffle (3).

8. The anti-splashing mechanism for the condenser tube of a vacuum evaporation machine according to claim 2, characterized in that: The guide plate (5) is provided with a flow channel (52), which is located at the center of the top of the guide plate (5). The flow channel (52) is provided with flow gathering edges (51) on both sides of the flow channel (52).

9. A splash-proof mechanism for a condenser tube of a vacuum evaporation machine according to claim 8, characterized in that: The diversion channel (52) is inclined, and the end closest to the water storage box (61) is the lowest point.

10. A splash-proof mechanism for a condenser tube of a vacuum evaporation machine according to claim 2, characterized in that: The water storage box (61) has an upper water storage chamber (68) located above the sealing plate (62), and the water storage box (61) has a lower water storage chamber (69) located below the sealing plate (62).

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