Independent guide rail type optical film thickness detection device for coating machine

Abstract

The invention discloses an independent guide rail type optical film thickness detection device for a coating machine, and relates to the technical field of coating machine optical detection, the independent guide rail type optical film thickness detection device comprises a coating machine body, a gantry is arranged at the top of the coating machine body, and a sliding frame is arranged on the gantry; a coating assembly is arranged at one end of the sliding frame, and a detection assembly is arranged at the other end of the sliding frame; the detection assembly comprises a frame installed on the sliding frame. According to the independent guide rail type optical film thickness detection device for the coating machine, through the multi-working-condition matching protection design of combined damping of the damping rod and the spring telescopic rod, air flow stabilization through the annular high-pressure spray head, arc-shaped flow guide and the L-shaped flow guide plate, and magnetic repulsive force non-detection state isolation, the detection accuracy is improved; the problems that high-frequency vibration and small-amplitude resonance suppression of an existing device are insufficient, air flow turbulence of an air floating structure, vibration conduction in a non-detection state and instant vibration impact on a probe, and consequently the detection precision is low can be solved.

Description

Technical Field

[0001] This invention relates to the field of optical inspection technology for coating machines, and particularly to an independent guide rail type optical film thickness detection device for coating machines. Background Technology

[0002] Panel coating technology is a key common process in modern manufacturing, especially in consumer electronics, automobiles, home appliances, aerospace, and semiconductor packaging. Its core lies in precisely applying adhesives with specific properties (such as thermally conductive adhesives, conductive adhesives, structural adhesives, optical adhesives, and sealants) to the surface of various substrate panels (such as glass, metal, composite materials, plastics, and ceramics) with preset patterns, thicknesses, and uniformities to achieve multiple functions such as bonding, sealing, thermal conductivity, electrical conductivity, insulation, protection, or optical coupling.

[0003] In existing technologies, the detection component and the coating component are usually installed synchronously on the sliding frame of the gantry structure of the coating machine. The sliding frame is moved along the gantry guide rail by the drive mechanism to achieve full-width detection. However, such devices generally suffer from insufficient detection accuracy caused by vibration transmission, which seriously restricts the quality control of high-end optical film production. Specifically, the detection component and the coating component share the same support structure. The mechanical vibration generated by the drive motor screw transmission and the high-frequency vibration generated by the coating action of the coating component are transmitted to the detection component through the double superposition of the sliding frame and the gantry frame.

[0004] Existing devices mostly use a single damping pad or spring structure, which can only initially reduce some low-frequency vibrations and has limited effect on suppressing high-frequency vibrations and small-amplitude resonances. Even some devices that use air flotation structures are prone to airflow turbulence due to unreasonable high-pressure gas flow design and lack of a combined air flotation and mechanical damping protection mechanism. Vibration transmission problems will still be prominent when the high-pressure pump stops supplying gas and in non-detection states. Furthermore, instantaneous vibrations during equipment start-up and shutdown, and sudden stops of the sliding frame can also impact the detection probe and shorten its service life. Existing devices suffer from insufficient vibration transmission protection, unreasonable airflow guidance, and a lack of multi-condition vibration isolation mechanisms, making it difficult to guarantee detection accuracy and failing to meet the quality control requirements of high-end optical film production.

[0005] Therefore, there are still shortcomings and deficiencies in the existing technology. How to provide an independent guide rail type optical film thickness detection device for coating machines is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide an independent guide rail type optical film thickness detection device for coating machines, which solves the technical problems of existing devices that are difficult to guarantee detection accuracy due to insufficient vibration transmission protection, unreasonable airflow guidance, and lack of multi-condition vibration isolation mechanism, thus failing to meet the quality control requirements of high-end optical film production.

[0007] To achieve the above objectives, the present invention provides an independent guide rail type optical film thickness detection device for a coating machine, comprising a coating machine body, a gantry at the top of the coating machine body, and a sliding frame on the gantry; a coating assembly is provided at one end of the sliding frame, and a detection assembly is provided at the other end of the sliding frame; the detection assembly includes a frame mounted on the sliding frame, a high-pressure pump mounted at the top of the frame, a lower float plate in the inner cavity of the frame, and high-pressure nozzles communicating with each other in the inner cavity of the lower float plate, the high-pressure nozzles being connected to the output end of the high-pressure pump through a gas pipe.

[0008] Preferably, the lower floating plate is provided with an air-floating frame at its top, a film thickness detection probe is passed through the center of the air-floating frame, the film thickness detection probe is provided with an annular frame at its top, and an upper floating plate is provided at the top of the film thickness detection probe.

[0009] Preferably, the top of the lower floating plate is provided with an arc-shaped opening, the arc-shaped bottom end of the lower floating plate is provided with a first magnetic ring, and the bottom of the lower floating plate is provided with a plurality of shock-absorbing components arranged in a ring; the shock-absorbing components include damping rods and spring telescopic rods connected to the bottom wall of the frame.

[0010] Preferably, there are multiple high-pressure nozzles, which are arranged in a ring around the center of the air float, with the air outlet of each high-pressure nozzle facing the lower float plate.

[0011] Preferably, the bottom of the air-float frame is provided with an annular opening corresponding to the position of the first magnetic ring, and a second magnetic ring is provided at the top of the annular opening. The center of the air-float frame is provided with a circular opening with the same size as the center of the lower float plate. Multiple guide plates with the same spacing are provided in the circular opening. One side of the guide plate is connected to the air-float frame and the other side is connected to the side wall of the film thickness detection probe. The multiple guide plates are respectively located between adjacent high-pressure nozzles.

[0012] Preferably, the first magnetic ring and the second magnetic ring have mutually repulsive magnetic poles on their corresponding sides.

[0013] Preferably, the bottom of the upper floating plate is provided with an annular groove that is compatible with the annular frame, the center of the upper floating plate is provided with a circular through hole, the outer side wall is provided with a threaded groove, and the upper floating plate is installed in the frame by a threaded installation method.

[0014] Preferably, the inner cavity of the frame is provided with an annular air collection chamber located between the upper and lower floating plates. The annular air collection chamber surrounds the outside of the air float frame. At the end of the annular air collection chamber away from the air float frame, there are two exhaust ports with air outlets facing the gantry. The two end sidewalls of the frame are symmetrically provided with cleaning air hoods that communicate with the exhaust ports.

[0015] The present invention has the following advantages:

[0016] (1) Compared with the above background technology, the independent guide rail type optical film thickness detection device for coating machine provided by the present invention will first transmit the vibration generated by the drive motor transmission or the operation of the coating component to the damping component composed of the damping rod and the spring telescopic rod through the frame, so as to initially and significantly reduce the vibration; after the high pressure pump is started, the gas sprayed by the high pressure nozzles arranged in a ring hits the arc-shaped top of the lower float plate, and is guided by the flow guide and the L-shaped flow guide plate on the air float to form a stable return airflow, which avoids turbulence and provides stable lift for the air float to suspend it, completely cutting off the transmission of the remaining weak vibration to the detection probe; and the first magnetic ring of the lower float plate and the second magnetic ring of the air float are of the same polarity and opposite each other, so even if the high pressure pump stops, the vibration isolation in the non-detection state can be achieved by magnetic repulsion, achieving multi-condition vibration protection; finally, it ensures that the detection probe can work stably under various conditions and the detection data is highly accurate.

[0017] (2) Compared with the above-mentioned background technology, the present invention provides an independent guide rail type optical film thickness detection device for a coating machine. The upper floating plate is threadedly connected to the frame through the outer wall thread groove. This not only provides the convenience of disassembly and installation without complicated tools, but also ensures structural stability during operation and lowers the maintenance threshold. Its convenient disassembly feature can also directly release the top limit of the film thickness detection head, allowing the combined structure of the detection head and the air float to be directly removed from the opening of the lower floating plate without disassembling the frame, high-pressure pump, or other related components. This significantly shortens the detection head replacement time, reduces equipment downtime, and is suitable for scenarios with frequent detection head replacements. At the same time, based on the threaded installation method, operators can... The rotating upper floating plate can flexibly adjust the distance between itself and the air float. This adjustment function can optimize the force balance by changing the flow space of the return gas between the two without changing the output pressure of the high-pressure pump or adjusting the gas injection volume of the high-pressure nozzle, thereby improving the suspension stability of the air float. It can also optimize the fit gap between the annular groove and the annular frame and form a stable "gas buffer layer". Combined with the like repulsion force of the first magnetic ring and the second magnetic ring, it can build a triple shock absorption system, enhance the vibration transmission and isolation effect, and quickly adapt to the shock absorption requirements under different coating speeds and different specifications of optical film production conditions. It can improve the versatility of the device without replacing the shock absorption components, which not only provides a reliable guarantee for the accuracy of optical film thickness detection, but also reduces the equipment operation and maintenance costs.

[0018] (3) Compared with the above background technology, the independent guide rail optical film thickness detection device for coating machine provided by the present invention uses high pressure gas to guide the air float frame to suspend after being pushed by the lower float plate. The resulting return gas enters the annular gas collection chamber for centralized collection and is directionally guided by the cleaning air hood to blow towards the gantry. This can not only specifically remove dust and paint particles generated during the coating process and avoid the adhesion of pollutants, but also eliminate the need for additional cleaning air source and special equipment, reducing energy consumption and equipment investment costs. At the same time, it can prevent problems such as guide rail jamming and drive component wear caused by pollutants, ensure the horizontal movement accuracy of the sliding frame, extend the service life of the equipment, simplify the cleaning and maintenance process, and improve the continuity and efficiency of the integrated coating and detection operation. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention. Figure 1 ;

[0021] Figure 2 This is a schematic diagram of the overall structure of the present invention. Figure 2 ;

[0022] Figure 3 This is a schematic diagram showing the connection relationship between the frame and the high-pressure pump of the present invention;

[0023] Figure 4 This is a schematic cross-sectional view of the frame structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the threaded groove structure of the present invention;

[0025] Figure 6 This is an exploded structural diagram of the lower floating plate, high-pressure nozzle, and upper floating plate of the present invention;

[0026] Figure 7 This is a schematic diagram showing the magnetic pole orientation of the first and second magnetic rings and the gas flow direction of the present invention.

[0027] In the diagram: 1. Coating machine body; 2. Gantry; 3. Sliding frame; 4. Coating assembly; 5. Detection assembly; 51. Frame; 511. Annular gas collection chamber; 512. Exhaust port; 513. Cleaning air hood; 52. High-pressure pump; 53. Lower float plate; 531. First magnetic ring; 532. Shock absorption assembly; 533. Damping rod; 534. Spring telescopic rod; 54. High-pressure nozzle; 55. Gas pipeline; 56. Air float frame; 561. Second magnetic ring; 562. Guide plate; 57. Film thickness detection probe; 571. Annular frame; 58. Upper float plate; 581. Annular groove; 582. Threaded groove. Detailed Implementation

[0028] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] This invention provides an independent guide rail type optical film thickness detection device for a coating machine. Through a combination of damping rod and spring telescopic rod for shock absorption, annular high-pressure nozzle + arc-shaped guide + L-shaped guide plate for airflow stabilization, and magnetic repulsion isolation in non-detection states, it can solve the problems of insufficient suppression of high-frequency vibration and small-amplitude resonance, airflow turbulence in air-float structure, vibration transmission in non-detection states, and instantaneous vibration impact on the probe in existing devices, resulting in low detection accuracy.

[0031] Please refer to this as well. Figures 1 to 7 The present invention provides an independent guide rail type optical film thickness detection device for a coating machine, comprising: a coating machine body 1, a sliding frame 3 on a gantry 2 at the top of the coating machine body 1, a drive motor on the gantry 2, the output end of the drive motor being threadedly connected to the sliding frame 3 via a lead screw, the gantry 2 serving to provide vertical sliding support for the motor-driven coating assembly 4 and detection assembly 5, the sliding frame 3 for the horizontal sliding of the coating assembly 4 and detection assembly 5 on the gantry 2, and the sliding frame 3 also serving to support the installation of the coating assembly 4 and detection assembly 5, one end of the sliding frame 3 being provided with the coating assembly 4 for coating the optical film surface to ensure uniform coating, and the other end of the sliding frame 3 being provided with the detection assembly 5;

[0032] The detection component 5 includes a frame 51 mounted on a sliding frame 3. A high-pressure pump 52 is installed at the top of the frame 51 to deliver high-pressure gas to the high-pressure nozzle 54 for ejection. The inner cavity of the frame 51 is provided with a lower float plate 53. The lower float plate 53 is not in contact with the inner side wall of the frame 51 and is connected to the inner bottom wall of the frame 51 through a shock-absorbing component 532. The lower float plate 53 is used to guide the gas ejected from the high-pressure nozzle 54. When the high-pressure gas from the high-pressure nozzle 54 is sprayed to the top of the lower float plate 53, it can generate thrust on the high-pressure nozzle 54 and the air float 56, so that the air float 56 produces a levitation effect, thereby avoiding the direct transmission of vibration and playing a shock-absorbing role. The inner cavity of the lower float plate 53 is provided with a high-pressure nozzle 54 for ejecting high-pressure gas through the small hole of the high-pressure head to increase the pressure of the ejected gas. The high-pressure nozzle 54 is connected to the output end of the high-pressure pump 52 through a gas pipe 55.

[0033] The top of the lower floating plate 53 is provided with an air-floating frame 56, and a film thickness detection probe 57 is passed through the center of the air-floating frame 56. The top of the film thickness detection probe 57 is provided with an upper floating plate 58.

[0034] Furthermore, the top of the lower floating plate 53 is provided with an arc-shaped opening, and the arc-shaped bottom end of the lower floating plate 53 is provided with a first magnetic ring 531, with the N pole of the first magnetic ring 531 facing upward and the S pole facing downward. The bottom of the lower floating plate 53 is provided with multiple shock-absorbing components 532 arranged in a ring.

[0035] The vibration damping component 532 includes a damping rod 533 and a spring telescopic rod 534 connected to the inner bottom wall of the frame 51. When the motor drives the sliding frame 3 to move on the gantry 2, the resulting vibration is transmitted to the vibration damping component 532 through the frame 51 connected to it. The damping rod 533 and the spring telescopic rod 534 perform initial vibration reduction to significantly weaken the vibration transmission and prevent the air float 56 from shaking due to large vibrations. At this time, the high-pressure pump 52 is started, and high-pressure gas enters through the gas pipe 55 and is ejected from multiple high-pressure nozzles 54, generating lift and causing the air float 56 to float. When the returning gas flows between the upper floating plate 58 and the air float 56, it pushes the air float 56 to the bottom to form pressure. Therefore, when the high-pressure nozzles 54 eject gas, both ends of the air float 56 are pushed by the gas, which can maintain a stable suspension effect. The weak vibration weakened by the vibration damping component 532 cannot be transmitted to the film thickness detection probe 57 during the transmission process, thus cutting off the transmission of vibration.

[0036] Furthermore, multiple high-pressure nozzles 54 are provided, arranged in a ring around the center of the air-float frame 56, with the outlet ports of the high-pressure nozzles 54 facing the lower float plate 53. When the multiple high-pressure nozzles 54 arranged in a ring simultaneously spray high-pressure gas, they can provide stable lift to the air-float frame 56 and the film thickness detection probe 57.

[0037] Furthermore, the bottom of the air float 56 is provided with an annular opening corresponding to the position of the first magnetic ring 531. A second magnetic ring 561 is provided on the top of the annular opening. The N pole of the second magnetic ring 561 faces downward and the S pole faces upward, which is exactly the same polarity opposite to the first magnetic ring 531. There is a repulsive force between the first magnetic ring 531 and the second magnetic ring 561. When low-frequency vibration occurs, the state of the film thickness detection probe 57 can be quickly stabilized by increasing the gas output pressure of the high-pressure pump 52 in conjunction with the repulsive force. The center of the air float 56 is provided with a circular opening with the same size as the center of the lower float plate 53. Multiple guide plates 562 with the same spacing are provided in the circular opening of the air float 56. The cross-section of the guide plates 562 is L-shaped. One side of the guide plate 562 is connected to the air float 56, and the other side of the guide plate 562 is connected to the side wall of the film thickness detection probe 57. The multiple guide plates 562 are located between multiple adjacent high-pressure nozzles 54. After the gas is ejected from the high-pressure nozzle 54, it impacts the lower float plate 53 to generate thrust. Then, guided by the arc-shaped groove of the lower float plate 53, the airflow is divided into two groups of backflows in opposite directions. The first group of gas backflows flows out through the gap between the air float 56 and the inner side of the frame 51, and the second group flows out through the gap between the central circular opening of the air float 56 and the film thickness detection probe 57. Within the circular opening, it is guided by the guide plate 562. The gas ejected from the multiple high-pressure nozzles 54 will not form turbulence, and there will be no interference between the backflowing gases, which improves the smoothness of gas flow and ensures the stability of the air float 56 when it is raised.

[0038] Furthermore, the top of the film thickness detection probe 57 is provided with an annular frame 571. When the annular frame 571 is inserted into the annular groove 581, it can prevent the gas flowing back from the circular opening of the air float 56 from entering the center of the inner cavity of the upper float plate 58, thus playing a guiding role.

[0039] Furthermore, the bottom of the upper float plate 58 is provided with an annular groove 581 that is compatible with the annular frame 571. During installation, firstly, the film thickness detection probe 57 and the air-float frame 56 fixedly connected to it are simultaneously inserted into the central circular opening of the lower float plate 53 and pass through it. Then, the upper float plate 58 is installed on the top of the frame 51 by means of threaded installation, and the annular frame 571 is inserted into the annular groove 581. This ensures that when the film thickness detection probe 57 is subjected to vibration, the annular frame 571 can move up and down inside the annular groove 581. The gap between the outer wall of the annular groove 581 and the annular frame 571 is small, allowing for... The upper floating plate 58 has a circular through hole in its center and a threaded groove 582 on its outer side wall. It is installed in the frame 51 by threading. After installation, the upper floating plate 58 can limit the position of the film thickness detection probe 57. At the same time, the arc shape at the bottom of the upper floating plate 58 matches the arc shape at the top of the air float 56, which can generate a high-quality airflow guiding effect to ensure that the return gas can smoothly enter the annular gas collection chamber 511.

[0040] Furthermore, the inner cavity of the frame 51 is provided with an annular air collection chamber 511 located between the upper float plate 58 and the lower float plate 53. The annular air collection chamber 511 surrounds the outer side of the air float frame 56 in a ring shape. At the other end of the annular air collection chamber 511, there are two exhaust ports 512 with air outlets facing the gantry 2. The return gas enters the annular air collection chamber 511 and is then discharged through the exhaust ports 512. Since the exhaust ports 512 face the gantry 2, the return gas can blow air onto the gantry 2 to reduce the adhesion of dust and paint particles generated during the coating process to the gantry 2.

[0041] The two end side walls of the frame 51 are symmetrically provided with cleaning air hoods 513 that communicate with the exhaust port 512. These hoods can concentrate the backflowing gas and discharge it through their outlet ends, thus guiding the backflowing gas to clean the gantry 2.

[0042] In this embodiment, during operation: After the system starts, the drive motor on the top gantry 2 of the coating machine body 1 drives the sliding frame 3 to move horizontally along the gantry 2 via a lead screw. The coating components 4 and the detection components 5 at both ends of the sliding frame 3 move synchronously. The coating components 4 first perform coating operations on the surface of the optical film, and the detection components 5 follow up to perform detection. At the same time, the high-pressure pump 52 at the top of the frame 51 starts, and delivers high-pressure gas to multiple ring-arranged high-pressure nozzles 54 through the gas pipe 55. The high-pressure gas is sprayed towards the arc-shaped opening of the lower float plate 53 and forms lift after being guided, pushing the air float 56 to suspend. When low-frequency vibration occurs, the gas output pressure of the high-pressure pump 52 is increased, and the like repulsive force between the first magnetic ring 531 at the bottom of the lower float plate 53 and the second magnetic ring 561 at the bottom of the air float 56 quickly stabilizes the film thickness detection probe 57. In addition, the damping rod 533 of the shock absorption component 532 on the inner bottom wall of the frame 51 and the spring The spring telescopic rod 534 reduces vibration transmission, ensuring that the film thickness detection probe 57 is in a stable state without vibration interference. The L-shaped guide plate 562 at the center of the air float 56 guides the airflow to avoid turbulence. The annular frame 571 at the top of the film thickness detection probe 57 is inserted into the annular groove 581 at the bottom of the upper float plate 58 to limit and prevent lateral displacement. The film thickness detection probe 57 performs non-contact optical detection on the coated area, collects film thickness data in real time and transmits it to the processing system. If an abnormality is detected, it is immediately fed back to the actuator of the coating component 4 for parameter adjustment. The return gas flows into the annular gas collection chamber 511 of the frame 51 and is blown directionally towards the gantry 2 through the exhaust port 512 and the cleaning air hood 513 to reduce dust and paint particle adhesion. Through the continuous process of "coating operation, vibration reduction and suspension, stable detection, data feedback and equipment cleaning", real-time and accurate online detection of coating film thickness and long-term equipment operation are achieved.

[0043] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0044] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of the present invention. It should be noted that those skilled in the art can make several improvements and modifications to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. An independent guide rail type optical film thickness detection device for a coating machine, characterized in that, The coating machine includes a coating machine body (1), a gantry (2) is provided on the top of the coating machine body (1), and a sliding frame (3) is provided on the gantry (2); a coating component (4) is provided at one end of the sliding frame (3), and a detection component (5) is provided at the other end of the sliding frame (3); The detection component (5) includes a frame (51) mounted on a sliding frame (3). A high-pressure pump (52) is mounted on the top of the frame (51). A lower float plate (53) is provided in the inner cavity of the frame (51). A high-pressure nozzle (54) is provided in the inner cavity of the lower float plate (53). The high-pressure nozzle (54) is connected to the output end of the high-pressure pump (52) through a gas pipe (55).

2. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 1, characterized in that, The lower float plate (53) is provided with an air float frame (56) at the top, and a film thickness detection probe (57) is passed through the center of the air float frame (56). The film thickness detection probe (57) is provided with an annular frame (571) at the top, and an upper float plate (58) is provided at the top of the film thickness detection probe (57).

3. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 2, characterized in that, The top of the lower floating plate (53) is set in an arc-shaped opening, the arc-shaped bottom end of the lower floating plate (53) is provided with a first magnetic ring (531), and the bottom of the lower floating plate (53) is provided with a plurality of shock-absorbing components (532) arranged in a ring. The shock absorption assembly (532) includes a damping rod (533) and a spring telescopic rod (534) connected to the bottom wall of the inner frame (51).

4. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 3, characterized in that, The high-pressure nozzles (54) are provided in multiple ways, and the multiple high-pressure nozzles (54) are arranged in a ring around the center of the air float (56), with the air outlet of the high-pressure nozzles (54) facing the lower float plate (53).

5. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 4, characterized in that, The bottom of the air-float frame (56) is provided with an annular opening corresponding to the position of the first magnetic ring (531). The top of the annular opening is provided with a second magnetic ring (561). The center of the air-float frame (56) is provided with a circular opening with the same size as the center of the lower float plate (53). Multiple guide plates (562) with the same spacing are provided in the circular opening.

6. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 5, characterized in that, The first magnetic ring (531) and the second magnetic ring (561) have mutually repulsive magnetic poles on their corresponding sides.

7. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 5, characterized in that, One side of the guide plate (562) is connected to the air float (56), and the other side is connected to the side wall of the film thickness detection probe (57). Multiple guide plates (562) are located between adjacent high-pressure nozzles (54).

8. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 2, characterized in that, The bottom of the upper floating plate (58) is provided with an annular groove (581) that is compatible with the annular frame (571). The center of the upper floating plate (58) is provided with a circular through hole, and the outer side wall is provided with a threaded groove (582). The upper floating plate (58) is installed in the frame (51) by threaded installation.

9. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 8, characterized in that, The inner cavity of the frame (51) is provided with an annular air collection chamber (511) located between the upper floating plate (58) and the lower floating plate (53). The annular air collection chamber (511) surrounds the outside of the air float frame (56). At the end of the annular air collection chamber (511) away from the air float frame (56), there are two exhaust ports (512) with air outlets facing the gantry (2).

10. The independent guide rail type optical film thickness detection device for a coating machine as described in claim 9, characterized in that, The frame (51) is provided with cleaning air hoods (513) symmetrically arranged on the two end side walls, which are connected to the exhaust port (512).

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