Calibration method and device for ATE (automatic test equipment)

Abstract

The invention relates to the technical field of semiconductor test equipment, and discloses a calibration method and device for ATE test equipment, and the method comprises the steps: transmitting a first control signal to a selection chip, and enabling a corresponding to-be-calibrated board card to be connected with external calibration equipment; calibrating the board card to be calibrated and recording a calibration result; and judging whether all the to-be-calibrated board cards are calibrated or not, if not, sending a next control signal to the selection chip to enable the selection chip to be switched to a next to-be-calibrated board card, and repeating the steps until all the to-be-calibrated board cards are calibrated. The calibration efficiency can be improved, and the equipment cost can be reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor test equipment, in particular to a calibration method and device of ATE test equipment. BACKGROUND

[0002] Automatic Test Equipment (ATE) test equipment plays a key role in the testing process of semiconductor chips, and its testing precision directly affects the quality determination of the chips. In order to ensure the testing precision, various types of boards in the ATE test equipment need to be calibrated regularly.

[0003] The traditional calibration method is to connect external calibration equipment to each board to be calibrated one by one for calibration. This method has obvious efficiency problems. On the one hand, each ATE test equipment usually contains dozens of different types of boards, and each calibration needs to frequently plug and unplug the connection cable, which is tedious and time-consuming. On the other hand, the manual plugging and unplugging of the connection cable is prone to operation errors, which may cause interface damage or calibration data recording errors.

[0004] Therefore, it is urgent to propose a calibration method and device of ATE test equipment to solve the above problems. SUMMARY

[0005] The purpose of the present application is to propose a calibration method and device of ATE test equipment, which can improve the calibration efficiency and reduce the equipment cost.

[0006] To solve the above technical problems, the present application provides a calibration method of ATE test equipment, which specifically includes the following steps: sending a first control signal to a selection chip to turn on a corresponding board to be calibrated and an external calibration equipment; calibrating the board to be calibrated and recording the calibration result; determining whether all the boards to be calibrated have completed calibration, if not, sending a next control signal to the selection chip to switch the selection chip to a next board to be calibrated, and repeating the above steps until the calibration of all the boards to be calibrated is completed.

[0007] Further, the determination of whether all the boards to be calibrated have completed calibration specifically includes: obtaining the number of boards that have completed calibration; comparing the number of boards that have completed calibration with the total number of boards to be calibrated; if the number of boards that have completed calibration is less than the total number of boards to be calibrated, calibrating the next board to be calibrated.

[0008] Furthermore, after completing the calibration of all boards to be calibrated, the process also includes: disconnecting the external calibration device from the current ATE test equipment; connecting the external calibration device to the next ATE test equipment; and repeating the above calibration steps to calibrate the boards to be calibrated on the next ATE test equipment.

[0009] Furthermore, the calibration of the board to be calibrated specifically includes: automatic execution via a host computer script, wherein the host computer script sequentially sends control signals to the selection chip to switch between different boards to be calibrated.

[0010] Furthermore, recording the calibration results specifically includes storing the calibration data and corresponding board identification information of each board to be calibrated into a database.

[0011] Furthermore, the calibration of the board to be calibrated specifically includes: the boards to be calibrated are grouped according to resource type, and the boards to be calibrated in the same resource type group are calibrated in turn. After the calibration of one group is completed, the calibration is switched to the next resource type group to continue the calibration.

[0012] Furthermore, this invention also proposes a calibration device for ATE testing equipment, used to implement the calibration method for ATE testing equipment as described above, including a main control board, a selection chip, a calibration equipment connection port, and multiple board connection ports; the control terminal of the selection chip is connected to the main control board, the input terminal of the selection chip is connected to the multiple board connection ports, and the output terminal of the selection chip is connected to the calibration equipment connection port; the selection chip conducts circuits between different board connection ports and the calibration equipment connection port according to control signals.

[0013] Furthermore, the selection chip includes a fan-out chip or a multiplexing chip.

[0014] Furthermore, the main control board sends control signals to the selection chip by writing to the register.

[0015] Furthermore, the calibration device connection port is located on the external panel of the ATE test equipment; the board connection port is located on the calibration switching board.

[0016] Through the above technical solution, the present invention has the following beneficial effects: By setting a selection chip to switch circuits between the board to be calibrated and external calibration equipment, the frequent plugging and unplugging of connecting cables in traditional methods can be avoided, significantly improving calibration efficiency and reducing the risk of interface damage caused by manual plugging and unplugging. Automatic switching between different boards to be calibrated via control signals enables automated control of the calibration process, reducing manual intervention and improving reliability. Furthermore, a mechanism to determine whether all boards to be calibrated have been completed prevents missed calibrations and improves the completeness of calibration management.

[0017] Furthermore, grouping calibration by resource type improves the organization and efficiency of the calibration process; and supporting serial calibration of multiple ATE test devices with a single external calibration device significantly reduces equipment procurement costs and storage space requirements. Attached Figure Description

[0018] Figure 1 This is a flowchart of a calibration method for an ATE test device according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the calibration board to be calibrated grouped according to resource type in the calibration method of ATE test equipment according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the calibration device of an ATE testing equipment according to an embodiment of the present invention. Detailed Implementation

[0019] Based on the teachings of this specification, those skilled in the art can form new technical solutions through cross-combination of different implementation methods without creating technical contradictions. Such variations should all be considered to fall within the protection scope of this invention.

[0020] The calibration method and apparatus for an ATE testing device according to the present invention will now be described in more detail with reference to the accompanying drawings, which illustrate preferred embodiments of the invention. It should be understood that those skilled in the art can modify the invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the invention.

[0021] The invention is described more specifically by way of example in the following paragraphs with reference to the accompanying drawings. The advantages and features of the invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the invention.

[0022] like Figures 1-2 As shown in the figure, this invention provides a calibration method for ATE testing equipment, which specifically includes the following steps: S1. Send the first control signal to the selection chip to connect the corresponding calibration board to the external calibration equipment. S2. Calibrate the board to be calibrated and record the calibration results; S3. Determine whether all boards to be calibrated have been calibrated. If not, send the next control signal to the selection chip to switch the selection chip to the next board to be calibrated, and repeat the above steps until all boards to be calibrated are calibrated.

[0023] This embodiment achieves automatic switching between the board to be calibrated and external calibration equipment by selecting a chip, which can avoid the frequent plugging and unplugging of connecting cables in traditional calibration methods, thereby improving calibration efficiency.

[0024] In this embodiment, in step S1, after the selection chip receives the first control signal, it connects the circuit between the corresponding board connection port and the calibration device connection port according to the board address information carried in the control signal, thereby establishing an electrical connection between the board to be calibrated and the external calibration device.

[0025] In one specific example, the first control signal can be a digital signal, sent to the control terminal of the selection chip via register writing. The decoding circuit inside the selection chip analyzes the control signal to determine the circuit channel that needs to be activated. This method of control via electrical signals enables fast and accurate channel switching. Compared to manually plugging and unplugging cables, it can reduce the switching time from tens of seconds to milliseconds, significantly improving calibration efficiency.

[0026] In step S2, in a preferred embodiment, calibrating the board to be calibrated specifically includes: automatic execution via a host computer script, whereby the host computer script sequentially sends control signals to the selected chip to switch between different boards to be calibrated. In a specific example, the host computer script can be written in Python, C++, or other programming languages, and the calibration process and sequence are preset in the script. When the script runs, it first reads the calibration task list, and then sends control signals to the selected chip one by one in the preset order. The control signals contain the address information of the target board. In one embodiment, the host computer script can also automatically select the corresponding calibration program and parameters according to the board type, further improving the degree of automation. This embodiment, through scripted automatic execution, can significantly reduce the workload of operators, while improving the standardization and repeatability of the calibration process.

[0027] Preferably, after the board to be calibrated is turned on, an external calibration device performs a calibration operation on it. In a specific example, the external calibration device can be a high-precision signal source, digital multimeter, oscilloscope, or spectrum analyzer, or other dedicated calibration instruments. The external calibration device sends a standard test signal to the board to be calibrated and receives the response signal from the board. By comparing the deviation between the standard value and the measured value, the calibration parameters of the board are calculated. In one embodiment, for a power supply board, the external calibration device can output a standard voltage value and measure the actual output voltage of the board to obtain the voltage calibration coefficient; for a signal acquisition board, the external calibration device can output a standard signal with known amplitude and frequency and measure the acquisition result of the board to obtain the gain and bias calibration parameters. This embodiment, through an automated calibration process, can reduce human error and improve the accuracy and consistency of calibration data.

[0028] In step S2, in another preferred embodiment, combined with Figure 2 As shown, the calibration of the boards to be calibrated specifically includes: grouping the boards to be calibrated according to resource type, calibrating the boards within the same resource type group sequentially, and switching to the next resource type group after completing the calibration of one group. This embodiment, by calibrating by resource type grouping, can reduce the number of times external calibration equipment is switched, improving the orderliness of the calibration process. In one embodiment, after completing the calibration of all boards in a certain resource type group, the system can automatically prompt the operator to change to the corresponding external calibration equipment to prepare for the calibration of the next resource type group. This group calibration method can optimize the calibration process and further improve overall calibration efficiency.

[0029] In step S2, recording the calibration results specifically includes storing the calibration data and corresponding board identification information of each board to be calibrated into a database. In a specific example, the main control board transmits the calibration data to the host computer via a network or serial port. The host computer processes the data and stores it in the database. The database can be MySQL, Oracle, or other relational databases, or it can be a non-relational database such as MongoDB. The board identification information includes information that uniquely identifies the board, such as the board serial number, board model, device number, and board location. As those skilled in the art will know, the type of database can be selected according to actual needs, and the database also includes other embodiments besides this one. This embodiment, through a systematic data storage method, enables long-term storage and rapid retrieval of calibration data, facilitating subsequent data analysis and equipment maintenance management.

[0030] In this embodiment, the step of recording calibration results can be performed immediately after each calibration of a single board to avoid the loss of calibration data.

[0031] Preferably, the calibration results include calibration parameter values, measurement errors, and a pass / fail status determined according to a preset threshold. For example, when the calibration error exceeds the allowable range, the system records the board as unqualified and generates an alarm message. During the calibration process, if abnormalities such as abnormal board connection, communication failure of the calibration equipment, or calibration timeout are detected, the system automatically records the abnormal information and skips the board, continuing to calibrate the next board. After all boards have been calibrated, the system uniformly prompts the operator to handle the abnormal boards.

[0032] In step S3, determining whether all boards to be calibrated have been calibrated specifically includes: obtaining the number of boards that have been calibrated; comparing the number of boards that have been calibrated with the total number of boards to be calibrated; if the number of boards that have been calibrated is less than the total number of boards to be calibrated, then continuing to calibrate the next board to be calibrated. In a specific example, the calibration system automatically scans the ATE test equipment upon startup, identifies all boards that need to be calibrated, and establishes a calibration task list, which records the total number of boards to be calibrated. After each board is calibrated, the system increments the completed calibration counter by 1 and compares it with the total number. This embodiment, through this automated progress management mechanism, can avoid the occurrence of missed calibrations.

[0033] In step S3, after all the boards to be calibrated have been calibrated, the following steps are also included: disconnecting the external calibration device from the current ATE test equipment; connecting the external calibration device to the next ATE test equipment; and repeating the above calibration steps to calibrate the boards to be calibrated on the next ATE test equipment. This embodiment, by using a single external calibration device to serially calibrate multiple ATE test equipment, can significantly reduce equipment procurement costs. Compared to equipping each ATE test equipment with an independent external calibration device, this embodiment can reduce the number of external calibration devices and also reduce the storage space requirements.

[0034] In addition, such as Figure 3 As shown, this embodiment also proposes a calibration device for ATE testing equipment, used to implement the calibration method for ATE testing equipment as described above. The device includes a main control board, a selection chip, a calibration equipment connection port, and multiple board connection ports. Specifically, the control terminal of the selection chip is connected to the main control board; the input terminal of the selection chip is connected to the multiple board connection ports; the output terminal of the selection chip is connected to the calibration equipment connection port; and the selection chip activates the circuit between different board connection ports and the calibration equipment connection port according to a control signal.

[0035] In this embodiment, the calibration device is integrated as a functional module of the ATE test equipment, either on the mainboard or a separate calibration switching board. Specifically, the selection chip can be implemented using a fan-out chip or a multiplexed chip, with multiple input channels, each connected to a corresponding board connection port. The output of the selection chip is connected to the calibration equipment connection port, which is typically located on the external panel of the ATE test equipment for easy connection of external calibration equipment.

[0036] In a specific example, for applications requiring the transmission of analog signals, such as the calibration of analog quantities like voltage and current, analog multiplexing chips can be selected, with common models including ADG706 and ADG708. For switching digital signals, digital multiplexing chips can be selected, with common models including 74HC4051 and 74HC4067. Those skilled in the art will understand that the specific model of the multiplexing chip can be selected according to actual needs.

[0037] In one specific example, multiple boards 5 to be calibrated are connected to the selection chip 2 via board connection ports 4. Specifically, the board connection ports can be located on a calibration switching board, and are connected to the calibration interface of the corresponding board to be calibrated via connectors or wires. Alternatively, the board connection ports can be directly located on the motherboard and connected to the calibration interfaces of each board to be calibrated via PCB traces. In one embodiment, the board connection ports can adopt various forms such as socket connectors, pin header connectors, or spring pin connectors to adapt to different board connection requirements. Those skilled in the art will understand that the number of board connection ports can be set according to actual needs.

[0038] In this embodiment, the main control board sends control signals to the selection chip by writing to registers. In a specific example, the selection chip contains several control registers, which are used to store configuration information such as channel selection and enable control. The main control board writes corresponding data to the register address of the selection chip through the control bus, thereby controlling the selection chip. In one embodiment, when it is necessary to switch to a specific board to be calibrated, the main control board first calculates the channel number corresponding to the board, then writes the channel number into the channel selection register of the selection chip, and simultaneously sets the enable register to activate the channel. This embodiment achieves fast and accurate channel control through register writing, with a response time typically in the microsecond range, meeting the real-time requirements of automated calibration.

[0039] In this embodiment, when ATE testing equipment needs to be calibrated, the external calibration device is first connected to the calibration device connection port of the calibration unit. The main control board runs the calibration script. According to the preset calibration sequence, the script sends a first control signal to the selection chip. After receiving the control signal, the selection chip connects the circuit between the connection port of the first board to be calibrated and the calibration device connection port, thus establishing a connection between the external calibration device and the first board to be calibrated. The external calibration device performs calibration testing on the board and acquires calibration data. The main control board records and stores the calibration data and board identification information in the database. After the first board is calibrated, the main control board determines whether all boards have been calibrated. If there are still uncalibrated boards, it sends the next control signal to the selection chip, which switches to the next board to be calibrated. This calibration process is repeated until all boards to be calibrated are calibrated. The entire calibration process does not require manual plugging and unplugging of connection cables; board switching is automatically completed through electronic control, which improves calibration efficiency and reduces the risk of operational errors.

[0040] In summary, the calibration method and apparatus for ATE testing equipment proposed in this invention have the following advantages: By setting a selection chip to switch circuits between the board to be calibrated and external calibration equipment, the frequent plugging and unplugging of connecting cables in traditional methods can be avoided, significantly improving calibration efficiency and reducing the risk of interface damage caused by manual plugging and unplugging. Automatic switching between different boards to be calibrated via control signals enables automated control of the calibration process, reducing manual intervention and improving reliability. Furthermore, a mechanism to determine whether all boards to be calibrated have been completed prevents missed calibrations and improves the completeness of calibration management.

[0041] Furthermore, grouping calibration by resource type improves the organization and efficiency of the calibration process; and supporting serial calibration of multiple ATE test devices with a single external calibration device significantly reduces equipment procurement costs and storage space requirements.

[0042] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A calibration method for an ATE testing device, characterized in that, Specifically, it includes the following: Send the first control signal to the selection chip to connect the corresponding board to be calibrated to the external calibration equipment; The board to be calibrated is calibrated and the calibration results are recorded; Determine whether all boards to be calibrated have been calibrated. If not, send the next control signal to the selection chip to switch the selection chip to the next board to be calibrated, and repeat the above steps until all boards to be calibrated are calibrated.

2. The calibration method for the ATE testing equipment as described in claim 1, characterized in that, The determination of whether all boards to be calibrated have been calibrated specifically includes: obtaining the number of boards that have been calibrated; comparing the number of boards that have been calibrated with the total number of boards to be calibrated; if the number of boards that have been calibrated is less than the total number of boards to be calibrated, then continuing to calibrate the next board to be calibrated.

3. The calibration method for the ATE testing equipment as described in claim 1, characterized in that, After all the boards to be calibrated have been calibrated, the process also includes: disconnecting the external calibration device from the current ATE test equipment; connecting the external calibration device to the next ATE test equipment; and repeating the above calibration steps to calibrate the boards to be calibrated on the next ATE test equipment.

4. The calibration method for the ATE testing equipment according to claim 1, characterized in that, The calibration of the board to be calibrated specifically includes: automatic execution via a host computer script, wherein the host computer script sequentially sends control signals to the selected chip to switch between different boards to be calibrated.

5. The calibration method for the ATE testing equipment according to claim 1, characterized in that, The recording of calibration results specifically includes storing the calibration data and corresponding board identification information of each board to be calibrated into a database.

6. The calibration method for the ATE testing equipment as described in claim 1, characterized in that, The calibration of the board to be calibrated specifically includes: the boards to be calibrated are grouped according to resource type, and the boards to be calibrated in the same resource type group are calibrated in turn. After the calibration of one group is completed, the calibration is switched to the next resource type group to continue the calibration.

7. A calibration apparatus for an ATE testing device, used to implement the calibration method for the ATE testing device as described in any one of claims 1-6, characterized in that, It includes a main control board, a selection chip, a calibration equipment connection port, and multiple board connection ports; the control terminal of the selection chip is connected to the main control board, the input terminal of the selection chip is connected to the multiple board connection ports, and the output terminal of the selection chip is connected to the calibration equipment connection port. The selection chip activates the circuit between different board connection ports and the calibration device connection port according to the control signal.

8. The calibration device for the ATE testing equipment as described in claim 7, characterized in that, The selection chip includes a fan-out chip or a multiplexing chip.

9. The calibration device for the ATE testing equipment as described in claim 8, characterized in that, The main control board sends control signals to the selection chip by writing to the register.

10. The calibration device for the ATE testing equipment as described in claim 7, characterized in that, The calibration equipment connection port is located on the external panel of the ATE test equipment; the board connection port is located on the calibration switching board.

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