Silicon carbide ceramic sucker and preparation method and application thereof
By combining modified short-cut carbon fibers with porous carbon loaded with Si3N4 particles, the problem of strengthening and toughening silicon carbide ceramic chucks is solved, and their mechanical properties are improved, making them suitable for porous silicon carbide ceramic chucks in integrated circuit manufacturing equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-06-02
- Publication Date
- 2026-04-10
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
Silicon carbide ceramic suction cups have shortcomings in terms of reinforcement and toughening, especially in the process of short-cut carbon fiber agglomeration and hot pressing sintering, which causes severe damage, resulting in reduced mechanical properties and limiting their widespread application.
Short-cut modified carbon fibers and porous carbon loaded with Si3N4 particles are used as reinforcing and toughening materials. The short-cut carbon fibers are treated to improve their dispersibility and stability, and hydrofluoric acid treatment is combined to expand the pores. Loading with Si3N4 particles improves the overall mechanical properties of silicon carbide ceramics.
The bending strength and fracture toughness of silicon carbide ceramic chucks have been significantly improved, making them more suitable for use in integrated circuit manufacturing equipment, especially for chucks used in photolithography, laser quenching, and laser scribing.
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Abstract
Description
Technical Field
[0001] This application relates to the field of ceramic materials technology, and more specifically, to a silicon carbide ceramic chuck, its preparation method, and its application. Background Technology
[0002] Silicon carbide porous ceramic chucks are made from microporous ceramic materials processed using a high-temperature sintering process. Silicon carbide porous materials are chemically stable, have high hardness, and will not clog, wear, or deform even after long-term use. The porous ceramic chucks have a uniform pore size distribution, and the surface of the processed porous ceramic chuck plate is smooth and flat after grinding. This allows the resulting porous silicon carbide ceramic to be well-suited for wafer support and adsorption in integrated circuit manufacturing equipment, such as chucks for photolithography, laser quenching, and laser scribing.
[0003] Currently, commonly used silicon carbide sintering processes mainly include pressureless sintering, hot pressing sintering, hot isobaric sintering, and reaction sintering. Among them, reaction sintering has advantages such as low sintering temperature (about 1600℃), small dimensional shrinkage during sintering, near-net-shape forming, and the ability to prepare complex-shaped samples as needed. Therefore, it is widely used in the industrial production of various ceramic products.
[0004] However, silicon carbide ceramics are prone to brittle fracture, which severely affects their overall performance and limits their widespread application. Reinforcing and toughening silicon carbide ceramics has been a hot research topic in recent years.
[0005] Currently, among all reinforcing materials for silicon carbide ceramics, fiber toughening is the most effective reinforcement method. Short-cut carbon fibers, when used as a reinforcing material for silicon carbide-based ceramics, have the following characteristics: 1) Excellent mechanical properties, along with good toughness, i.e., flexibility and machinability, which can improve the fracture toughness of silicon carbide-based ceramics to a certain extent; 2) Good chemical compatibility; carbon fibers have good compatibility with the silicon carbide ceramic matrix, do not chemically react with the matrix, and are chemically inert to most substances; 3) Excellent high-temperature performance; 4) When used as a carbon source, carbon fibers can react with infiltrated liquid silicon to generate a large amount of β-SiC, reducing the content of participating silicon and making the resulting sintered body more dense. The remaining unreacted carbon fibers can exert the advantages of fiber toughening while avoiding residual carbon.
[0006] The aforementioned advantages have enabled the large-scale application of chopped carbon fibers as reinforcing materials. However, during the preparation of chopped carbon fiber reinforced silicon carbide ceramic matrix composites, the small size and large specific surface area of the chopped carbon fibers make them prone to agglomeration during mixing, thus failing to achieve the desired reinforcement and toughening effect. Furthermore, it has been found that hot-pressing sintering severely damages the carbon fibers, significantly reducing the mechanical properties of the sintered fibers.
[0007] Further research and improvement are urgently needed to enhance the overall mechanical properties of silicon carbide ceramic chucks. Summary of the Invention
[0008] To further improve the overall mechanical properties of silicon carbide ceramic chucks, this application provides a silicon carbide ceramic chuck, its preparation method, and its application.
[0009] In a first aspect, this application provides a silicon carbide ceramic suction cup, which adopts the following technical solution: A silicon carbide ceramic suction cup comprises the following raw materials in parts by weight: 100-120 parts silicon carbide powder, 10-15 parts hydroxypropyl methylcellulose, 5-10 parts sintering aid, 3-8 parts pore-forming agent, 20-30 parts short-cut modified carbon fiber, and 15-25 parts porous carbon loaded with Si3N4 particles. The chopped modified carbon fiber is obtained by first impregnating chopped carbon fiber with sodium rosinate, hexamethylenetetramine, benzo-15-crown ether-5 and bis(2-ethylhexanoic acid) aluminum hydroxide, and then irradiating and crosslinking it.
[0010] By adopting the above technical solution, the silicon carbide ceramic in this application is mainly composed of silicon carbide powder, and also includes short-cut modified carbon fibers and porous carbon loaded with Si3N4 particles as reinforcing and toughening materials to improve the brittle fracture performance of silicon carbide ceramic materials. The addition of hydroxypropyl methylcellulose in this application can improve the dispersion performance of short-cut modified carbon fibers in the system, reduce their agglomeration phenomenon and thus reduce the reinforcing and toughening effect. Moreover, the short-cut modified carbon fibers in this application are first treated with sodium rosinate, hexamethylenetetramine, benzo-15-crown ether-5 and bis(2-ethylhexanoic acid) hydroxyaluminum, and then under the action of irradiation crosslinking, in conjunction with the crosslinking effect of hexamethylenetetramine, the carbon fiber surface is grafted with sodium rosinate, benzo-15-crown ether-5 and bis(2-ethylhexanoic acid) hydroxyaluminum, and cyclic structures such as benzene rings are introduced into the molecular chain, which greatly improves its stability. Moreover, it was found that after the above treatment, the carbon fiber is less damaged during sintering, and the carbon fiber can still play an excellent reinforcing and toughening role after sintering. Furthermore, it is possible that sodium rosinate has a certain surfactant effect. It was found that adding sodium rosinate during the modification process significantly improved the agglomeration of short-cut carbon fibers. Moreover, the introduction of aluminum in the modification process may generate aluminum silicate under the later sintering process, which has a stronger reinforcing and toughening effect on the final silicon carbide ceramic chuck, resulting in better mechanical properties.
[0011] In addition, porous carbon loaded with Si3N4 particles is added in this application. Si3N4 particles have a significant reinforcing effect on silicon carbide ceramics. Moreover, due to the mismatch in the coefficient of thermal expansion and elastic modulus between silicon nitride particles and silicon carbide matrix, residual stress is generated in silicon carbide ceramic materials during cooling. This causes the cracks to deflect in the silicon carbide matrix around the silicon carbide particles, thereby achieving a toughening effect. Furthermore, in this application, the Si3N4 particles are added in porous carbon, which not only solves the problem of reduced performance due to the agglomeration between particles, but also allows the porous carbon to act as a carbon source. The resulting silicon carbide ceramic suction cup has better mechanical properties.
[0012] Optionally, the porous carbon loaded with Si3N4 particles is obtained by mixing Si3N4 particles and porous carbon, soaking in hydrofluoric acid, and then calcining at high temperature.
[0013] By adopting the above technical solution, Si3N4 particles and porous carbon are mixed and then soaked in hydrofluoric acid. The Si3N4 particles dissolve in the hydrofluoric acid, while the hydrofluoric acid cleans impurities in the porous carbon, thereby expanding the pores of the porous carbon. The porous carbon is then soaked in hydrofluoric acid containing dissolved Si3N4 particles and then baked at high temperature to achieve loading of Si3N4 particles.
[0014] Optionally, the chopped modified carbon fibers are prepared by the following method: By weight, 15-20 parts of sodium rosinate, 2-5 parts of hexamethylenetetramine, 3-5 parts of benzo-15-crown-5 and 7-10 parts of bis(2-ethylhexanoic acid)aluminum hydroxide are mixed to obtain mixture A, and then chopped carbon fibers are added to immerse the chopped carbon fibers in the above mixture A. Then, after drying, the carbon fibers are irradiated under gamma rays to obtain chopped modified carbon fibers.
[0015] Optionally, the gamma ray irradiation dose is 20-30 kGy, and the dose rate is 8-10 kGy / h.
[0016] By adopting the above technical solution, the modified short carbon fiber obtained by the above solution has a better reinforcing and toughening effect on silicon carbide ceramic suction cups.
[0017] Optionally, the porous carbon loaded with Si3N4 particles is prepared by the following method: Si3N4 particles and porous carbon are mixed in a mass ratio of 1:(4-5), then soaked in hydrofluoric acid solution for 30-40 minutes, and then calcined at 380-420℃ for 1-2 hours to obtain the final product.
[0018] By adopting the above technical solution and the above loading method, porous carbon is loaded onto Si3N4 particles.
[0019] Optionally, the porous carbon is selected from carbon nanotubes and biochar in a mass ratio of 1:(1.5-2).
[0020] By adopting the above technical solution, porous carbon is selected by combining carbon nanotubes and biochar. Carbon nanotubes themselves have extremely high strength and toughness, playing an excellent role in strengthening and toughening. Moreover, their unique tubular structure makes them even better at strengthening and toughening the final silicon carbide ceramic material when used as a carrier to load Si3N4 particles. When combined with biochar, which fills the pores of the carbon nanotube wall, the combined loading of Si3N4 particles further enhances the strengthening and toughening effect on the final silicon carbide ceramic material.
[0021] Optionally, the sintering aid is selected from one or more of potassium oxide, aluminum oxide, and magnesium oxide.
[0022] Optionally, the pore-forming agent may be one or more of graphite, carbon powder, starch, or straw powder.
[0023] By adopting the above technical solution, the addition of pore-forming agent enables the formation of a porous structure during sintering, ultimately producing a silicon carbide porous ceramic suction cup.
[0024] Secondly, this application provides a method for preparing a silicon carbide ceramic chuck, which adopts the following technical solution: A method for preparing a silicon carbide ceramic chuck includes the following steps: Silicon carbide powder, hydroxypropyl methylcellulose, chopped modified carbon fibers, porous carbon loaded with Si3N4 particles, and sintering aids are mixed to obtain powder. Then, polyvinylpyrrolidone and deionized water are mixed and added to the powder to obtain the initial slurry. Add the pore-forming agent to the initial mixed slurry, stir to obtain ceramic slurry, and then dry it at 60-70℃ for 30-60 minutes and let it age for 10-12 hours. Then, the ceramic slurry is vacuum-kneaded, placed in a mold, baked at high temperature, cooled and demolded to obtain a blank; The blank is sintered at high temperature in a nitrogen atmosphere to obtain a silicon carbide ceramic chuck.
[0025] By adopting the above technical solution, the method provided in this application is simple and convenient, easy to industrialize, and the silicon carbide ceramic chuck prepared by the method of this application has excellent mechanical properties.
[0026] Thirdly, this application provides an application of a silicon carbide ceramic chuck, employing the following technical solution: Application of a silicon carbide ceramic chuck in integrated circuit manufacturing equipment.
[0027] In summary, this application has the following beneficial effects: 1. In this application, silicon carbide ceramic is mainly composed of silicon carbide powder, and short-cut modified carbon fibers and porous carbon loaded with Si3N4 particles are added as reinforcing and toughening materials to improve the brittle fracture performance of silicon carbide ceramic materials. This plays a role in strengthening and toughening silicon carbide ceramics, and ultimately the silicon carbide ceramic suction cup has better comprehensive mechanical properties. 2. In this application, the short-cut modified carbon fiber is first treated with sodium rosinate, hexamethylenetetramine, benzo-15-crown ether-5, and bis(2-ethylhexanoic acid)hydroxyaluminum. Then, under the action of radiation crosslinking, in conjunction with the crosslinking effect of hexamethylenetetramine, cyclic structures such as benzene rings are introduced into the molecular chain, which greatly improves its stability. Moreover, it was found that after the above treatment, even under high pressure during sintering, the carbon fiber is less damaged, and the carbon fiber can still play an excellent role in strengthening and toughening after sintering. The addition of sodium rosinate has a significant effect on improving the agglomeration phenomenon of short-cut carbon fiber. In addition, the introduction of aluminum element in the modification treatment may generate aluminum silicate under the action of later sintering, which has a stronger strengthening and toughening effect on the final silicon carbide ceramic chuck, and its mechanical properties are better. 3. In this application, porous carbon loaded with Si3N4 particles is added. Si3N4 particles have a significant reinforcing and toughening effect on silicon carbide ceramics. Moreover, in this application, the Si3N4 particles are added in the form of being loaded in porous carbon, which not only solves the problem of performance reduction due to the agglomeration between particles, but also allows porous carbon to act as a carbon source, resulting in better mechanical properties of the silicon carbide ceramic suction cup. 4. In this application, Si3N4 particles and porous carbon are mixed and then soaked in hydrofluoric acid. The Si3N4 particles dissolve in the hydrofluoric acid, while the hydrofluoric acid cleans impurities in the porous carbon, thereby expanding the pores of the porous carbon. The porous carbon is then soaked in hydrofluoric acid containing dissolved Si3N4 particles and then baked at high temperature to achieve loading of Si3N4 particles. Detailed Implementation
[0028] The following detailed description of this application is provided in conjunction with the embodiments. It should be noted that: unless otherwise specified, the conditions in the following embodiments are performed under conventional conditions or conditions recommended by the manufacturer. Unless otherwise specified, the raw materials used in the following embodiments are all from commercially available sources.
[0029] The biochar in the following examples and preparation examples is obtained from wood chips and straw.
[0030] The following preparation examples are examples of the preparation of chopped modified carbon fibers. Preparation Example 1 A method for preparing chopped modified carbon fibers includes the following steps: 18 kg of sodium rosinate, 4 kg of hexamethylenetetramine, 4 kg of benzo-15-crown ether-5 and 8 kg of bis(2-ethylhexanoic acid)aluminum hydroxide were mixed to obtain mixture A. Short-cut carbon fibers were then added and immersed in mixture A. The mixture was then removed, dried and irradiated with gamma rays at a dose of 25 kGy and a dose rate of 9 kGy / h to obtain short-cut modified carbon fibers.
[0031] Preparation Example 2 A method for preparing chopped modified carbon fibers includes the following steps: 15 kg of sodium rosinate, 2 kg of hexamethylenetetramine, 3 kg of benzo-15-crown ether-5 and 7 kg of bis(2-ethylhexanoic acid)aluminum hydroxide were mixed to obtain mixture A. Short-cut carbon fibers were then added and immersed in mixture A. The mixture was then removed, dried and irradiated with gamma rays at a dose of 20 kGy and a dose rate of 8 kGy / h to obtain short-cut modified carbon fibers.
[0032] Preparation Example 3 A method for preparing chopped modified carbon fibers includes the following steps: 20 kg of sodium rosinate, 5 kg of hexamethylenetetramine, 5 kg of benzo-15-crown ether-5 and 10 kg of bis(2-ethylhexanoic acid)aluminum hydroxide were mixed to obtain mixture A. Short-cut carbon fibers were then added and immersed in mixture A. The mixture was then removed, dried and irradiated with gamma rays at a dose of 30 kGy and a dose rate of 10 kGy / h to obtain short-cut modified carbon fibers.
[0033] Examples 4-8 below show the preparation of porous carbon loaded with Si3N4 particles. Preparation Example 4 A method for preparing porous carbon loaded with Si3N4 particles includes the following steps: Si3N4 particles and porous carbon were mixed at a mass ratio of 1:4.5, then soaked in hydrofluoric acid solution for 35 minutes, and then calcined at 400℃ for 1.5 hours to obtain the final product.
[0034] Among them, porous carbon is selected from carbon nanotubes and biochar with a mass ratio of 1:1.8.
[0035] Preparation Example 5 A method for preparing porous carbon loaded with Si3N4 particles includes the following steps: Si3N4 particles and porous carbon were mixed at a mass ratio of 1:4, then soaked in hydrofluoric acid solution for 30 minutes, and then calcined at 380℃ for 2 hours to obtain the final product.
[0036] Among them, porous carbon is selected from carbon nanotubes and biochar with a mass ratio of 1:1.5.
[0037] Preparation Example 6 A method for preparing porous carbon loaded with Si3N4 particles includes the following steps: Si3N4 particles and porous carbon were mixed at a mass ratio of 1:5, then soaked in hydrofluoric acid solution for 40 minutes, and then calcined at 420℃ for 1 hour to obtain the final product.
[0038] Among them, porous carbon is selected from carbon nanotubes and biochar with a mass ratio of 1:2.
[0039] Preparation Example 7 A method for preparing porous carbon loaded with Si3N4 particles is carried out according to the method of Preparation Example 4, except that the porous carbon is made of activated carbon and biochar in a mass ratio of 1:1.8.
[0040] Preparation Example 8 A method for preparing porous carbon loaded with Si3N4 particles is carried out according to the method of Preparation Example 4, except that carbon nanotubes are replaced with biochar in equal amounts.
[0041] Comparative Preparation Example 1 A method for preparing chopped modified carbon fiber is carried out according to the method in Preparation Example 1, except that sodium rosinate is not added to the raw materials.
[0042] Comparative Preparation Example 2 A method for preparing short-cut modified carbon fibers is carried out according to the method in Preparation Example 1, except that sodium rosinate in the raw materials is replaced by sodium dodecyl sulfate in an equal amount.
[0043] Comparative preparation example 3 A method for preparing chopped modified carbon fiber is carried out according to the method in Preparation Example 1, except that bis(2-ethylhexanoic acid) hydroxyaluminum is not added to the raw materials.
[0044] Comparative preparation example 4 A method for preparing chopped modified carbon fiber is carried out according to the method in Preparation Example 1, except that benzo-15-crown ether-5 is not added to the raw materials.
[0045] Example 1 A method for preparing a silicon carbide ceramic chuck includes the following steps: 110 kg of silicon carbide powder, 12 kg of hydroxypropyl methylcellulose, 25 kg of chopped modified carbon fibers prepared in Preparation Example 1, 20 kg of porous carbon loaded with Si3N4 particles prepared in Preparation Example 4, and 25 kg of sintering aid were mixed to obtain powder. Then, 12 kg of polyvinylpyrrolidone and 45 kg of deionized water were mixed and added to the powder to obtain a preliminary slurry. 5 kg of pore-forming agent was added to the preliminary slurry and stirred to obtain a ceramic slurry. The slurry was then dried at 65°C for 50 min and aged for 12 h. Then, the ceramic slurry is vacuum-kneaded, placed in a mold, baked at 80°C for 1.5 hours, cooled and demolded to obtain a blank; The blank was first sintered at 850℃ for 1.5h under a nitrogen atmosphere, and then the temperature was raised to 1410℃ for 2.5h. After the heating was completed, it was naturally cooled to room temperature to obtain a porous silicon carbide ceramic chuck.
[0046] Among them, potassium oxide is selected as the sintering aid and straw powder is selected as the pore-forming agent.
[0047] Example 2 A method for preparing a silicon carbide ceramic chuck includes the following steps: 100 kg of silicon carbide powder, 10 kg of hydroxypropyl methylcellulose, 20 kg of chopped modified carbon fibers prepared in Preparation Example 2, 15 kg of porous carbon loaded with Si3N4 particles prepared in Preparation Example 5, and 20 kg of sintering aid were mixed to obtain powder. Then, 10 kg of polyvinylpyrrolidone and 40 kg of deionized water were mixed and added to the powder to obtain a preliminary slurry. 3 kg of pore-forming agent was added to the preliminary slurry and stirred to obtain a ceramic slurry. The slurry was then dried at 60°C for 60 min and aged for 10 h. Then, the ceramic slurry is vacuum-kneaded and placed in a mold. It is then baked at 75°C for 2 hours, cooled, and demolded to obtain a blank. The blank was first sintered at 800℃ for 2 hours under a nitrogen atmosphere, and then the temperature was raised to 1400℃ for 2 hours. After the heating was completed, it was naturally cooled to room temperature to obtain a porous silicon carbide ceramic chuck.
[0048] Among them, potassium oxide is selected as the sintering aid and straw powder is selected as the pore-forming agent.
[0049] Example 3 A method for preparing a silicon carbide ceramic chuck includes the following steps: 120 kg of silicon carbide powder, 15 kg of hydroxypropyl methylcellulose, 30 kg of chopped modified carbon fibers prepared in Preparation Example 3, 25 kg of porous carbon loaded with Si3N4 particles prepared in Preparation Example 6, and 30 kg of sintering aid were mixed to obtain powder. Then, 15 kg of polyvinylpyrrolidone and 50 kg of deionized water were mixed and added to the powder to obtain a preliminary slurry. 8 kg of pore-forming agent was added to the preliminary slurry and stirred to obtain a ceramic slurry. The slurry was then dried at 70°C for 30 min and aged for 12 h. Then, the ceramic slurry is vacuum-kneaded and placed in a mold. It is then baked at 85°C for 1 hour, cooled, and demolded to obtain a blank. The blank was first sintered at 850℃ for 1 hour under a nitrogen atmosphere, and then the temperature was raised to 1450℃ for 2 hours. After the heating was completed, it was naturally cooled to room temperature to obtain a porous silicon carbide ceramic chuck.
[0050] Among them, starch is selected as the sintering aid and magnesium oxide is selected as the pore-forming agent.
[0051] Example 4 A method for preparing a silicon carbide ceramic chuck is carried out according to the method in Example 1, except that in the preparation process of porous carbon loaded with Si3N4 particles, hydrofluoric acid solution is replaced with an equal amount of deionized water solution.
[0052] Examples 5-6 A method for preparing a silicon carbide ceramic chuck is carried out according to the method in Example 1, except that the porous carbon loaded with Si3N4 particles is selected from the porous carbon loaded with Si3N4 particles prepared in Examples 7 and 8, respectively.
[0053] Comparative Examples 1-4 A method for preparing a silicon carbide ceramic suction cup is carried out according to the method in Example 1, except that the chopped modified carbon fiber is selected from the chopped modified carbon fiber prepared in Comparative Preparation Examples 1-4.
[0054] Comparative Example 5 A method for preparing a silicon carbide ceramic suction cup is carried out according to the method in Example 1, except that the short-cut modified carbon fibers are replaced with an equal amount of unmodified short-cut carbon fibers.
[0055] Comparative Example 6 A method for preparing a silicon carbide ceramic suction cup is carried out according to the method in Example 1, except that the porous carbon loaded with Si3N4 particles is replaced by an equal amount of Si3N4 particles and porous carbon mixed in a mass ratio of 1:4.5 to obtain a mixed powder, and the porous carbon is selected from carbon nanotubes and biochar in a mass ratio of 1:1.8.
[0056] Comparative Example 7 A method for preparing a silicon carbide ceramic suction cup is carried out according to the method in Example 1, except that the short-cut modified carbon fiber is replaced by an equal amount of the short-cut modified carbon fiber prepared in Comparative Preparation Example 1, and 8 kg of sodium rosinate is added along with polyvinylpyrrolidone.
[0057] Performance testing The silicon carbide ceramic chucks prepared in the embodiments and comparative examples of this application were tested for bending strength and fracture toughness. The bending strength was tested according to GB6569-86 standard. The test results are shown in Table 1 below.
[0058] Table 1: As shown in Table 1 above, the silicon carbide ceramic chuck prepared by the method of this application has excellent bending strength and excellent fracture toughness, which makes the obtained porous silicon carbide ceramic suitable for wafer bearing and adsorption in integrated circuit manufacturing equipment, such as chucks for photolithography, chucks for laser quenching and chucks for laser scribing.
[0059] Combining the test results of Examples 1 and 4, it can be seen that when Si3N4 particles are loaded on porous carbon, the loading effect is reduced after soaking in the aqueous solution, and the final reinforcement and toughening effect is also reduced. Combining the test results of Examples 5 and 6, when ordinary activated carbon and biochar are used as the porous carbon, or when only biochar is used for loading, the final reinforcement and toughening effect is also significantly reduced. When special structure carbon nanotubes are used as the composite with biochar, the final reinforcement and toughening effect is better.
[0060] Combining the test results of Example 1 and Comparative Example 1, it can be seen that when sodium rosinate was not added to the raw materials during the preparation of chopped modified carbon fibers, their bending strength and fracture toughness were significantly reduced. Furthermore, in Comparative Example 2, when an equal amount of sodium rosinate was replaced with ordinary sodium dodecyl sulfate activator, their bending strength and fracture toughness remained low, similar to Comparative Example 1. Combining the test results of Comparative Example 4, when benzo-15-crown ether-5 was not added to the raw materials during the preparation of chopped modified carbon fibers, their bending strength and fracture toughness also decreased. This may be because the introduction of benzene ring molecules on the carbon fibers improves their stability, thereby enhancing their toughening properties. Combining the test results of Example 1 and Comparative Example 3, it can be seen that when bis(2-ethylhexanoic acid)hydroxyaluminum was not added to the raw materials during the preparation of chopped modified carbon fibers, its flexural strength was significantly reduced. The introduction of aluminum is beneficial to improving its reinforcement and toughening properties. Referring to the test results of Comparative Example 5, when chopped carbon fibers were added directly without modification, their mechanical properties were poor. Combining the test results of Comparative Example 7, it can be seen that when sodium rosinate was added directly during the preparation of silicon carbide ceramics instead of during the preparation of chopped modified carbon fibers, the reinforcement and toughening effect was also low. Combining the test results of Comparative Example 6, when porous carbon and Si3N4 particles were added directly without loading, their mechanical properties were also low, possibly due to the agglomeration of Si3N4 particles leading to a reduction in reinforcement and toughening effect.
[0061] This specific embodiment is merely an explanation of this application and is not intended to limit it. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of the claims of this application.
Claims
1. A silicon carbide ceramic suction cup, characterized in that, Including the following parts by weight of raw materials: 100-120 parts silicon carbide powder, 10-15 parts hydroxypropyl methylcellulose, 5-10 parts sintering aid, 3-8 parts pore-forming agent, 20-30 parts short-cut modified carbon fiber, and 15-25 parts porous carbon loaded with Si3N4 particles. The chopped modified carbon fiber is obtained by first impregnating chopped carbon fiber with sodium rosinate, hexamethylenetetramine, benzo-15-crown ether-5 and bis(2-ethylhexanoic acid) aluminum hydroxide, and then irradiating and crosslinking it.
2. The silicon carbide ceramic suction cup according to claim 1, characterized in that: The porous carbon loaded with Si3N4 particles is obtained by mixing Si3N4 particles and porous carbon, soaking in hydrofluoric acid, and then calcining at high temperature.
3. The silicon carbide ceramic suction cup according to claim 1, characterized in that: The chopped modified carbon fiber is prepared by the following method: By weight, 15-20 parts of sodium rosinate, 2-5 parts of hexamethylenetetramine, 3-5 parts of benzo-15-crown-5 and 7-10 parts of bis(2-ethylhexanoic acid)aluminum hydroxide are mixed to obtain mixture A, and then chopped carbon fibers are added to immerse the chopped carbon fibers in the above mixture A. Then, after drying, the carbon fibers are irradiated under gamma rays to obtain chopped modified carbon fibers.
4. A silicon carbide ceramic suction cup according to claim 3, characterized in that: The gamma ray irradiation dose is 20-30 kGy, and the dose rate is 8-10 kGy / h.
5. A silicon carbide ceramic suction cup according to claim 2, characterized in that: The porous carbon loaded with Si3N4 particles was prepared by the following method: Si3N4 particles and porous carbon are mixed in a mass ratio of 1:(4-5), then soaked in hydrofluoric acid solution for 30-40 minutes, and then calcined at 380-420℃ for 1-2 hours to obtain the final product.
6. A silicon carbide ceramic suction cup according to claim 2, characterized in that: The porous carbon is selected from carbon nanotubes and biochar in a mass ratio of 1:(1.5-2).
7. A silicon carbide ceramic suction cup according to claim 1, characterized in that: The sintering aid is selected from one or more of potassium oxide, aluminum oxide, and magnesium oxide.
8. A silicon carbide ceramic suction cup according to claim 1, characterized in that: The pore-forming agent is selected from one or more of graphite, carbon powder, starch, or straw powder.
9. A method for preparing a silicon carbide ceramic chuck as described in any one of claims 1-8, characterized in that: Includes the following steps: Silicon carbide powder, hydroxypropyl methylcellulose, chopped modified carbon fibers, porous carbon loaded with Si3N4 particles, and sintering aids are mixed to obtain powder. Then, polyvinylpyrrolidone and deionized water are mixed and added to the powder to obtain the initial slurry. Add the pore-forming agent to the initial mixed slurry, stir to obtain ceramic slurry, and then dry it at 60-70℃ for 30-60 minutes and let it age for 10-12 hours. Then, the ceramic slurry is vacuum-kneaded, placed in a mold, baked at high temperature, cooled and demolded to obtain a blank; The blank is sintered at high temperature under a nitrogen atmosphere to obtain a silicon carbide ceramic chuck.
10. The application of a silicon carbide ceramic chuck as described in any one of claims 1-8 in integrated circuit manufacturing equipment.