Adjustable probe seat for vacuum passing of environmental scanning electron microscope

Abstract

The invention relates to the technical field of scanning electron microscopes and machinery, in particular to an adjustable probe seat for vacuum passing of an environment scanning electron microscope. The adjustable probe seat comprises a flange plate, wherein a first end face of the flange plate is connected with an environment scanning electron microscope; the connecting rod mechanism is located on the outer side of the first end face of the flange plate. The probe is mounted at one end, far away from the flange plate, of the connecting rod mechanism; the vacuum aviation plug is vertically inserted into the second end face of the flange plate; the magnetofluid sealing transmission shaft is vertically inserted into the second end face of the flange plate; wherein the magnetic fluid sealing transmission shaft penetrates through the flange plate and is in transmission connection with the connecting rod mechanism, so that the position of the probe can be conveniently adjusted by utilizing the connecting rod mechanism. According to the invention, the adjustable probe seat utilizes the magnetofluid sealing transmission shaft to drive the connecting rod mechanism to swing in multiple directions, so that the vacuum environment can be kept stable in the process of adjusting the position of the probe, and the position of the probe in multiple directions can be adjusted.

Description

Technical Field

[0001] This invention relates to the fields of scanning electron microscopy and mechanical technology, and in particular to an adjustable probe holder for vacuuming in environmental scanning electron microscopy. Background Technology

[0002] Environmental scanning electron microscopy (SEM) has become an indispensable analytical tool in many fields due to its advantage of enabling microscopic observation of samples under non-extreme vacuum conditions such as low vacuum and humid environments. During the SEM process, the probe, as a key actuator, must maintain a precise relative position to the sample surface to achieve functions such as signal acquisition and micro-area manipulation.

[0003] In existing technologies, probe holder adjustment methods are mainly divided into two categories: one is manual adjustment outside the vacuum, which disrupts the stability of the vacuum environment and affects detection efficiency. The other is electric adjustment inside the vacuum, which can improve the convenience of adjustment, but the complex electronic control components are prone to risks such as discharge and sealing failure in a vacuum environment, and the complex structure leads to high maintenance costs. In addition, most electric probe holders can only achieve adjustment in one direction, which cannot meet the needs of multi-dimensional detection. Summary of the Invention

[0004] This invention aims to solve the technical problems existing in related technologies. To this end, this invention proposes an adjustable probe holder for vacuuming in an environmental scanning electron microscope, so as to achieve multi-directional adjustment of the probe inside the vacuum cavity from outside the environmental scanning electron microscope.

[0005] This invention provides an adjustable probe holder for vacuum extrusion in environmental scanning electron microscopy, comprising: A flange, the first end face of which is connected to an environmental scanning electron microscope; The linkage mechanism is located on the outside of the first end face of the flange; A probe is installed at the end of the linkage mechanism furthest from the flange. A vacuum connector is vertically inserted into the second end face of the flange; A magnetohydrodynamic sealed drive shaft is vertically inserted into the second end face of the flange; The magnetohydrodynamic sealing drive shaft passes through the flange and is connected to the linkage mechanism for driving, so as to adjust the position of the probe using the linkage mechanism.

[0006] An adjustable probe holder for vacuum extrusion in an environmental scanning electron microscope, according to the present invention, comprises a linkage mechanism including: A lead screw holder, wherein a connecting lug is provided at the first end of the lead screw holder; An end fixing block is installed at the second end of the lead screw frame, and the end of the end fixing block extends outward from the outside of the lead screw frame; A first lead screw, one end of which is rotatably connected to the connecting lug, and the other end of which is rotatably connected to the end fixing block; The first lead screw slider is movably sleeved on the first lead screw and can move back and forth between the connecting lug and the end fixing block as the first lead screw rotates. The rocker arm is rotatably connected to the end of the end fixing block; The first connecting rod has one end rotatably connected to the first lead screw slider, and the other end rotatably connected to the first end of the rocker arm; The probe is mounted on the second end of the rocker arm, and the magnetohydrodynamic sealing drive shaft is connected to the first lead screw via a universal coupling.

[0007] According to the present invention, an adjustable probe holder for vacuuming in an environmental scanning electron microscope is provided, wherein the rocker arm is composed of a first segment and a second segment that are inclined to each other, the overlapping end of the first segment and the second segment is rotatably connected to the end fixing block, the other end of the first segment is rotatably connected to the first connecting rod, and the length of the first segment is less than the length of the second segment.

[0008] According to the present invention, an adjustable probe holder for vacuuming an environmental scanning electron microscope is provided, wherein two magnetohydrodynamic sealed drive shafts, two probes, two first lead screws, two first lead screw sliders, two rockers, and two first connecting rods are symmetrically arranged relative to the lead screw frame and the end fixing block.

[0009] An adjustable probe holder for vacuuming an environmental scanning electron microscope according to the present invention further includes a lifting mechanism for driving the linkage mechanism to swing up and down. The three magnetic fluid sealing drive shafts are arranged at the vertices of an equilateral triangle. The linkage mechanism is connected to the upper magnetic fluid sealing drive shaft via a universal coupling, and the lifting mechanism is connected to the lower magnetic fluid sealing drive shaft via a coupling.

[0010] An adjustable probe holder for vacuum transition in an environmental scanning electron microscope, according to the present invention, includes a support mechanism comprising: A support frame, one end of which is fixedly connected to the flange; The second lead screw has one end rotatably connected to the support frame and the other end connected to the coupling. The second lead screw slider is movably sleeved on the second lead screw; The second connecting rod has one end rotatably connected to the second lead screw slider, and the other end rotatably connected to the end fixing block.

[0011] An adjustable probe holder for vacuuming in an environmental scanning electron microscope according to the present invention further includes a probe fixing structure for adapting probes of different diameters.

[0012] An adjustable probe holder for vacuuming in an environmental scanning electron microscope, provided by the present invention, comprises: A probe connecting rod, the first end of which is connected to the rocker arm, and the second end of which is provided with a square groove; The probe spring clip is installed in the square groove.

[0013] According to the present invention, an adjustable probe holder for vacuuming in an environmental scanning electron microscope is provided, wherein the second end of the probe connecting rod is provided with a set screw hole, the set screw hole communicating with the square groove for fixing the probe.

[0014] According to the present invention, an adjustable probe holder for vacuuming in an environmental scanning electron microscope is provided, wherein the probe connecting rod is made of an insulating material and the probe spring clip is made of a conductive material.

[0015] According to the present invention, an adjustable probe holder for vacuuming an environmental scanning electron microscope is provided, wherein the vacuum insert is sealed to the flange and electrically connected to the probe.

[0016] The above-described one or more technical solutions of this invention have at least one of the following technical effects: In this invention, the adjustable probe holder is sealed to the vacuum interface of the environmental scanning electron microscope via a flange, and on the other hand, it uses a magnetohydrodynamic sealed transmission shaft to drive the linkage mechanism to swing in multiple directions. This ensures that the vacuum environment of the scanning electron microscope remains stable during the adjustment of the probe position, and also allows for adjustment of the probe position in multiple directions.

[0017] In addition to the technical problems solved by the present invention, the technical features of the technical solutions constituted by the present invention, and the advantages brought about by the technical features of these technical solutions as described above, other technical features of the present invention and the advantages brought about by these technical features will be further explained in conjunction with the accompanying drawings, or will be learned through the practice of the present invention. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a three-dimensional structural diagram of the adjustable probe holder provided in an embodiment of the present invention.

[0020] Figure 2 This is a three-dimensional structural diagram of the linkage mechanism provided in an embodiment of the present invention.

[0021] Figure 3 This is a three-dimensional structural diagram of the lifting mechanism provided in an embodiment of the present invention.

[0022] Figure 4 This is a three-dimensional structural diagram of an adjustable probe holder mounted on an environmental scanning electron microscope, as provided in an embodiment of the present invention.

[0023] Figure label: 10. Flange; 11. Sealing groove; 20. Linkage mechanism; 21. Lead screw frame; 22. End fixing block; 23. First lead screw; 24. First lead screw slider; 25. Rocker arm; 26. First connecting rod; 27. Universal coupling; 30. Probe; 40. Magnetohydrodynamic sealing drive shaft; 50. Lifting mechanism; 51. Coupling; 52. Support frame; 53. Second lead screw; 54. Second lead screw slider; 55. Second connecting rod; 60. Probe fixing structure; 61. Probe connecting rod; 62. Probe spring clip; 63. Top screw hole; 70. Environmental scanning electron microscope; 80. Vacuum airborne insert. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0025] Environmental scanning electron microscopy (SEM) has become an indispensable analytical tool in many fields due to its advantage of enabling microscopic observation of samples under non-extreme vacuum conditions such as low vacuum and humid environments. During the SEM process, the probe, as a key actuator, must maintain a precise relative position to the sample surface to achieve functions such as signal acquisition and micro-area manipulation.

[0026] In existing technologies, probe holder adjustment methods are mainly divided into two categories: one is manual adjustment outside the vacuum, which disrupts the stability of the vacuum environment and affects detection efficiency. The other is electric adjustment inside the vacuum, which can improve the convenience of adjustment, but the complex electronic control components are prone to risks such as discharge and sealing failure in a vacuum environment, and the complex structure leads to high maintenance costs. In addition, most electric probe holders can only achieve adjustment in one direction, which cannot meet the needs of multi-dimensional detection.

[0027] To address the aforementioned challenges, embodiments of the present invention introduce an adjustable probe holder for vacuum transition in environmental scanning electron microscopy.

[0028] like Figures 1 to 4 As shown, the adjustable probe holder mainly includes a flange 10, a linkage mechanism 20, a probe 30, a vacuum insert 80, and a magnetohydrodynamic sealing drive shaft 40.

[0029] The first end face of the flange 10 is connected to the environmental scanning electron microscope 70. The linkage mechanism 20 is located outside the first end face of the flange 10. The probe 30 is mounted on the end of the linkage mechanism 20 away from the flange 10.

[0030] A vacuum connector 80 is vertically inserted into the second end face of the flange 10. The vacuum connector 80 is sealed to the flange 10. Furthermore, the vacuum connector 80 is electrically connected to the probe 30.

[0031] The magnetic fluid sealing drive shaft 40 is vertically inserted into the second end face of the flange 10.

[0032] The magnetohydrodynamic (MHD) sealing drive shaft 40 passes through the flange 10. Furthermore, the MHD sealing drive shaft 40 is connected to the linkage mechanism 20 for adjusting the position of the probe 30.

[0033] Specifically, a sealing groove 11 is provided on the first end face of the flange 10. After placing a sealing ring in the sealing groove 11, it is fixedly connected to the vacuum sealing interface of the environmental scanning electron microscope 70 using bolts, thus ensuring a stable seal of the vacuum chamber of the environmental scanning electron microscope 70. In addition, the magnetohydrodynamic sealing drive shaft 40 is fixed to the flange 10 by its own seal and threads. The vacuum jet plug 80 is fixed to the flange 10 by bolts with its own seal.

[0034] Furthermore, such as Figure 2 As shown, the linkage mechanism 20 mainly includes a lead screw frame 21, an end fixing block 22, a first lead screw 23, a first lead screw slider 24, a rocker arm 25, and a first connecting rod 26.

[0035] The first end of the lead screw frame 21 is provided with a connecting lug. Specifically, the lead screw frame 21 is provided with a rectangular frame. The connecting lug protrudes outward from the first end of the rectangular frame along the length of the frame.

[0036] An end fixing block 22 is installed at the second end of the lead screw frame 21. The end of the end fixing block 22 extends outward from the outside of the lead screw frame 21.

[0037] One end of the first lead screw 23 is rotatably connected to the connecting lug. The other end of the first lead screw 23 is rotatably connected to the end fixing block 22.

[0038] The first lead screw slider 24 is movably sleeved on the first lead screw 23 and can move back and forth between the connecting lug and the end fixing block 22 as the first lead screw 23 rotates. Preferably, the first lead screw 23 is made of precision-ground stainless steel, and the first lead screw slider 24 is made of self-lubricating tin bronze to ensure that the first lead screw slider 24 and the first lead screw 23 can operate without jamming and with low wear in a vacuum environment for a long time.

[0039] The rocker arm 25 is rotatably connected to the end of the end fixing block 22. One end of the first connecting rod 26 is rotatably connected to the first lead screw slider 24. The other end of the first connecting rod 26 is rotatably connected to the first end of the rocker arm 25.

[0040] The probe 30 is mounted on the second end of the rocker arm 25. The magnetohydrodynamic sealing drive shaft 40 is connected to the first lead screw 23.

[0041] Furthermore, the rocker arm 25 is composed of a first segment and a second segment that are inclined to each other, and the overlapping ends of the first segment and the second segment are rotatably connected to the end fixing block 22.

[0042] The other end of the first segment is rotatably connected to the first connecting rod 26. The other end of the second segment extends freely outward from the end fixing block 22.

[0043] The length of the first segment is less than the length of the second segment. Preferably, the included angle between the first segment and the second segment can be customized within the range of 15° to 60° according to actual needs, thereby achieving a flexible match between the swing angle and displacement accuracy of the probe 30.

[0044] Furthermore, the two magnetic fluid sealing drive shafts 40, the two probes 30, the two first lead screws 23, the two first lead screw sliders 24, the two rockers 25, and the two first connecting rods 26 are symmetrically arranged relative to the lead screw frame 21 and the end fixing block 22.

[0045] Understandably, the first lead screw 23 is mounted on the lead screw bracket 21. One end of the first lead screw 23 is connected to the magnetohydrodynamic sealed drive shaft 40 via a universal coupling 27. The other end of the first lead screw 23 is connected to the end fixing block 22.

[0046] The end fixing block 22 is fixedly connected to the lead screw frame 21 by bolts to ensure that the first lead screw 23 will not move. The first lead screw slider 24 is connected to the first lead screw 23 by threads.

[0047] One end of the first lead screw slider 24 engages with the lead screw holder 21 to ensure that the first lead screw slider 24 performs linear motion. The other end of the first lead screw slider 24 is rotatably connected to one end of the first connecting rod 26 to form a revolute pair.

[0048] The other end of the first connecting rod 26 is rotatably connected to one end of the rocker arm 25 to form a revolute joint. The corner of the rocker arm 25 is rotatably connected to the end fixing block 22 to form a revolute joint. All three revolute joints are locked by the first lead screw slider 24.

[0049] Rotating the magnetic fluid sealing drive shaft 40 can drive the first lead screw slider 24 to move linearly, and the rocker arm 25 can swing left and right under the drive of the first connecting rod 26, thereby driving the probe 30 to swing left and right.

[0050] Furthermore, the adjustable probe holder also includes a lifting mechanism 50, which drives the linkage mechanism 20 to swing up and down.

[0051] The three magnetic fluid sealing drive shafts 40 are distributed at the vertices of an equilateral triangle. The linkage mechanism 20 is connected to the upper magnetic fluid sealing drive shaft 40 via a universal coupling 27, and the lifting mechanism 50 is connected to the lower magnetic fluid sealing drive shaft 40 via a coupling 51.

[0052] In this embodiment, the adjustable probe holder is sealed to the vacuum interface of the environmental scanning electron microscope 70 through the flange 10, and the linkage mechanism 20 is driven by the magnetohydrodynamic sealed transmission shaft 40 to swing in multiple directions. This ensures that the vacuum environment of the scanning electron microscope remains stable during the adjustment of the probe 30 position, and also allows for adjustment of the position of the probe 30 in multiple directions.

[0053] Based on the above embodiments, another embodiment of the present invention introduces an adjustable probe holder for vacuuming in environmental scanning electron microscopy.

[0054] like Figure 3 As shown, the lifting mechanism 50 mainly includes a support frame 52, a second lead screw 53, a second lead screw slider 54, and a second connecting rod 55.

[0055] One end of the support frame 52 is fixedly connected to the flange 10.

[0056] One end of the second lead screw 53 is rotatably connected to the support frame 52. The other end of the second lead screw 53 is connected to the coupling 51.

[0057] The second lead screw slider 54 is movably sleeved on the second lead screw 53. One end of the second connecting rod 55 is rotatably connected to the second lead screw slider 54. The other end of the second connecting rod 55 is rotatably connected to the end fixing block 22.

[0058] Understandably, one end of the second lead screw 53 is connected to the magnetohydrodynamic sealed drive shaft 40 via a coupling 51. The other end of the second lead screw 53 is connected to the support frame 52.

[0059] One end of the support frame 52 is fixed to the first end face of the flange 10 by bolts. The second lead screw slider 54 is connected to the second lead screw 53 by threads.

[0060] One end of the second lead screw slider 54 engages with the support frame 52 to ensure linear motion. The other end of the second lead screw slider 54 is rotatably connected to one end of the second connecting rod 55 to form a revolute joint. The other end of the second connecting rod 55 is rotatably connected to the end fixing block 22 to form a revolute joint. These two revolute joints are locked by the second lead screw slider 54.

[0061] Rotating the magnetic fluid sealed transmission shaft 40 can drive the second lead screw slider 54 to move linearly. The lead screw frame 21 swings up and down under the drive of the second connecting rod 55, thereby driving the probe 30 to swing up and down.

[0062] When using it for the first time, the magnetic fluid seal drive shaft 40 must be rotated to lift the lead screw 21 upwards to ensure a safe distance between the probe 30 and the target position of the probe 30.

[0063] Furthermore, the adjustable probe holder also includes a probe fixing structure 60 for adapting the probes 30 of different diameters.

[0064] The probe fixing structure 60 mainly includes a probe connecting rod 61 and a probe spring clip 62.

[0065] The first end of the probe connecting rod 61 is connected to the rocker arm 25, and the second end of the probe connecting rod 61 is provided with a square groove. The probe spring clip 62 is installed in the square groove.

[0066] Furthermore, the second end of the probe connecting rod 61 is provided with a set screw hole 63. The set screw hole 63 communicates with the square groove and is used to fix the probe 30.

[0067] Furthermore, the probe connecting rod 61 is made of an insulating material, and the probe spring clip 62 is made of a conductive material.

[0068] The other end of the rocker arm 25 is fixed to the probe connecting rod 61 by bolts. A square groove is provided at the second end of the probe connecting rod 61. A probe spring clip 62 is placed in the square groove. A set screw hole 63 is provided on the probe connecting rod 61 at a position corresponding to the square groove. When the probe 30 is inserted into the probe spring clip 62, a set screw can be installed in the set screw hole 63 to abut and fix the probe 30. The probe fixing structure 60, through its elastic clamping design, can adapt to probes 30 of different diameters and their postures.

[0069] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0070] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0071] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0072] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms are not limited to the same embodiments or examples. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An adjustable probe holder for vacuum transition in environmental scanning electron microscopy, characterized in that, include: A flange (10) is connected to an environmental scanning electron microscope (70) at its first end face. The linkage mechanism (20) is located on the outside of the first end face of the flange (10); A probe (30) is installed at the end of the linkage mechanism (20) away from the flange (10); Vacuum insert (80) is vertically inserted into the second end face of the flange (10); A magnetic fluid sealed drive shaft (40) is vertically inserted into the second end face of the flange (10); The magnetic fluid sealing drive shaft (40) passes through the flange (10) and is connected to the linkage mechanism (20) for transmission, so as to adjust the position of the probe (30) by means of the linkage mechanism (20).

2. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 1, characterized in that, The linkage mechanism (20) includes: A lead screw holder (21) is provided with a connecting lug at its first end; An end fixing block (22) is installed at the second end of the lead screw frame (21), and the end of the end fixing block (22) extends out of the outside of the lead screw frame (21); The first lead screw (23) has one end rotatably connected to the connecting lug and the other end rotatably connected to the end fixing block (22). The first lead screw slider (24) is movably sleeved on the first lead screw (23) and can move back and forth between the connecting ear and the end fixing block (22) as the first lead screw (23) rotates; The rocker arm (25) is rotatably connected to the end of the end fixing block (22); The first connecting rod (26) has one end rotatably connected to the first lead screw slider (24) and the other end rotatably connected to the first end of the rocker arm (25); The probe (30) is installed at the second end of the rocker arm (25), and the magnetic fluid sealing drive shaft (40) is connected to the first lead screw (23) via a universal coupling (27).

3. The adjustable probe holder for vacuum transition in environmental scanning electron microscopy according to claim 2, characterized in that, The rocker arm (25) is composed of a first segment and a second segment that are inclined to each other. The overlapping ends of the first segment and the second segment are rotatably connected to the end fixing block (22). The other end of the first segment is rotatably connected to the first connecting rod (26). The length of the first segment is less than the length of the second segment.

4. The adjustable probe holder for vacuum passing in environmental scanning electron microscopy according to claim 2 or 3, characterized in that, The two magnetic fluid sealing drive shafts (40), the two probes (30), the two first lead screws (23), the two first lead screw sliders (24), the two rockers (25), and the two first connecting rods (26) are symmetrically arranged relative to the lead screw frame (21) and the end fixing block (22).

5. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 4, characterized in that, It also includes a lifting mechanism (50) for driving the linkage mechanism (20) to swing up and down; The three magnetic fluid sealing drive shafts (40) are distributed at the vertices of an equilateral triangle. The linkage mechanism (20) is connected to the upper magnetic fluid sealing drive shaft (40) via the universal coupling (27), and the lifting mechanism (50) is connected to the lower magnetic fluid sealing drive shaft (40) via the coupling (51).

6. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 5, characterized in that, The lifting mechanism (50) includes: A support frame (52), one end of which is fixedly connected to the flange (10); The second lead screw (53) has one end rotatably connected to the support frame (52) and the other end connected to the coupling (51); The second lead screw slider (54) is movably sleeved on the second lead screw (53); The second connecting rod (55) has one end rotatably connected to the second lead screw slider (54) and the other end rotatably connected to the end fixing block (22).

7. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 6, characterized in that, It also includes a probe fixing structure (60) for adapting the probes (30) of different diameters.

8. The adjustable probe holder for vacuum passing in environmental scanning electron microscopy according to claim 7, characterized in that, The probe fixing structure (60) includes: The probe connecting rod (61) has a first end connected to the rocker arm (25) and a square groove provided at the second end of the probe connecting rod (61). The probe spring clip (62) is installed in the square groove.

9. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 8, characterized in that, The second end of the probe connecting rod (61) is provided with a set screw hole (63), which is connected to the square groove and is used to fix the probe (30).

10. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 9, characterized in that, The probe connecting rod (61) is made of insulating material, and the probe spring clip (62) is made of conductive material.

11. The adjustable probe holder for vacuuming in an environmental scanning electron microscope according to claim 10, characterized in that, The vacuum connector (80) is sealed to the flange (10) and electrically connected to the probe (30).

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