Vacuum pump tail exhaust structure, vacuum pump and manufacturing method

Abstract

The invention relates to a vacuum pump tail exhaust structure, a vacuum pump and a manufacturing method. The tail exhaust structure of the vacuum pump comprises a bottom plate, a connecting pipe and a tail exhaust pipe, the bottom plate is configured to be mounted on the vacuum pump, and an exhaust port communicated with the air outlet end of the vacuum pump is formed in the bottom plate; the connecting pipe is integrally formed on the bottom plate, and the connecting pipe is communicated with the exhaust port; the tail discharge pipe is connected with one end of the connecting pipe away from the bottom plate. Therefore, the connecting pipe and the bottom plate do not need to be subjected to structural sealing through a sealing ring, and the situation that the maintenance cost is increased due to the fact that the sealing ring is corroded by gas can be avoided.

Description

Technical Field

[0001] This application relates to the field of vacuum pump technology, and in particular to a vacuum pump tail exhaust structure, a vacuum pump, and a manufacturing method thereof. Background Technology

[0002] In related technologies, vacuum pump exhaust pipes are used to discharge exhaust gases generated during vacuum pump operation. In semiconductor, chemical production, and laboratory vacuum systems, the sealing and corrosion resistance of vacuum pump exhaust pipes are crucial. Currently, in vacuum pump exhaust pipes, the connecting pipe and the vacuum pump base plate are sealed using sealing rings, metal clamps, etc., while the connection between the connecting pipe and the exhaust pipe is typically achieved using metal gaskets, sealing rings, and clamps. With long-term operation of the vacuum pump, the sealing rings corrode, requiring frequent replacement, resulting in high material and labor costs. Simultaneously, the vacuum pump vibrates continuously during operation, which can cause clamps and other fasteners to loosen, posing a risk of gas leakage. Summary of the Invention

[0003] This application provides a vacuum pump tail exhaust structure, a vacuum pump, and a manufacturing method, which ensures the sealing reliability of the vacuum pump during long-term operation, thereby at least partially solving the above-mentioned technical problems.

[0004] To achieve the above objectives, according to a first aspect of this application, a vacuum pump exhaust structure is provided, comprising: A base plate is configured to be mounted on a vacuum pump, and an exhaust port connected to the exhaust end of the vacuum pump is formed on the base plate. A connecting pipe is integrally formed on the base plate, and the connecting pipe is connected to the exhaust port; The tailpipe is connected to the end of the connecting pipe away from the base plate.

[0005] Optionally, the end of the connecting pipe facing the tailpipe is connected to a first welding part, and the end of the tailpipe facing the connecting pipe is connected to a second welding part, wherein the first welding part is welded to the second welding part.

[0006] Optionally, the first welding part has a first end face that abuts with the second welding part, and the form and position tolerance between the first end face and the upper surface of the base plate is less than or equal to a first preset tolerance threshold. And / or, the second welded part has a second end face that abuts against the first welded part, and the form and position tolerance between the second end face and the end face of the tailpipe away from the connecting pipe is less than or equal to a second preset tolerance threshold.

[0007] Optionally, the tailpipe and the connecting pipe are integrally formed.

[0008] Optionally, a cooling element is connected to the side of the base plate away from the vacuum pump.

[0009] Optionally, the cooling element includes: The main body of the flow channel is integrally formed on the base plate. The main body of the flow channel has a flow channel groove, and a cooling medium inlet and a cooling medium outlet communicating with the flow channel groove are formed on the main body of the flow channel. A cover plate is connected to the main body of the flow channel or the bottom plate, and the cover plate closes the flow channel groove to form a cooling flow channel.

[0010] Optionally, a first sealing groove is formed on the side of the cover plate facing the main body of the flow channel, and a first sealing element is provided in the first sealing groove. The first sealing element abuts against the main body of the flow channel or the bottom plate to seal the connection interface between the cover plate and the main body of the flow channel or the bottom plate. Alternatively, a second sealing groove is formed on the side of the base plate facing the vacuum pump, and a second sealing element is provided in the second sealing groove. The second sealing element is configured to abut against the vacuum pump to seal the connection interface between the base plate and the vacuum pump.

[0011] Optionally, the connecting pipe and / or the tailpipe has an axis, the base plate has a centerline parallel to its width direction, and the axis is set at an angle to the centerline.

[0012] According to a second aspect of this application, a vacuum pump is provided, including the vacuum pump tail structure as described above.

[0013] According to a third aspect of this application, a method for manufacturing the aforementioned vacuum pump tail section structure is also provided, comprising: The base plate and the connecting pipe are provided in one piece; The tailpipe is connected to the end of the connecting pipe away from the base plate.

[0014] In the vacuum pump tail exhaust structure of this application embodiment, the exhaust gas of the vacuum pump is introduced into the connecting pipe through the exhaust port of the base plate. The exhaust gas entering the connecting pipe can be discharged through the tail exhaust pipe or enter the subsequent gas treatment device through the tail exhaust pipe. Since the connecting pipe is integrally formed on the base plate, there is no need to use a sealing ring for structural sealing between the connecting pipe and the base plate, which can avoid the increase in maintenance costs caused by gas corrosion of the sealing ring.

[0015] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] To gain a more complete understanding of this application and its beneficial effects, the following description will be provided in conjunction with the accompanying drawings, wherein the same reference numerals in the following description denote the same parts.

[0018] Figure 1 This is a schematic diagram of the vacuum pump tail section structure provided in an exemplary embodiment of this application; Figure 2 This is an exploded view of the vacuum pump tail section structure provided in an exemplary embodiment of this application; Figure 3 This is a top view of the vacuum pump tail section structure provided in an exemplary embodiment of this application; Figure 4 This is a flowchart of a manufacturing method provided in an exemplary embodiment of this application.

[0019] Explanation of reference numerals in the attached figures: 1. Base plate; 11. Exhaust port; 12. Second sealing groove; 13. Center line; 2. Connecting pipe; 21. First welded section; 211. First contraction section; 22. Axis; 3. Tailpipe; 31. Second welded section; 311. Second contraction section; 312. Second end face; 32. Elbow section; 33. Straight pipe section; 34. Reducing diameter section; 4. Cooling components; 41. Flow channel body; 411. Flow channel groove; 412. Cooling medium inlet; 413. Cooling medium outlet; 42. Cover plate. Detailed Implementation

[0020] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the protection scope of this application.

[0021] According to the first aspect of this application, referring to Figures 1 to 3This application provides a vacuum pump tail exhaust structure. The vacuum pump tail exhaust structure includes a base plate 1, a connecting pipe 2, and a tail exhaust pipe 3; the base plate 1 is configured to be installed on the vacuum pump, and an exhaust port 11 connected to the exhaust end of the vacuum pump is formed on the base plate 1; the connecting pipe 2 is integrally formed on the base plate 1, and the connecting pipe 2 is connected to the exhaust port 11; the tail exhaust pipe 3 is connected to the end of the connecting pipe 2 away from the base plate 1.

[0022] In this embodiment, the exhaust gas of the vacuum pump is introduced into the connecting pipe 2 through the exhaust port 11 of the base plate 1. The exhaust gas entering the connecting pipe 2 can be discharged through the tailpipe 3 or enter the subsequent gas treatment device through the tailpipe 3. Since the connecting pipe 2 is integrally formed on the base plate 1, there is no need to use a sealing ring for structural sealing between the connecting pipe 2 and the base plate 1, which can avoid the increase in maintenance costs caused by gas corrosion of the sealing ring.

[0023] In related technologies, the connecting pipe 2 and the base plate 1 are connected by a sealing ring, clamps, and fasteners. With long-term operation of the vacuum pump, highly corrosive gases can cause corrosion of the sealing ring, requiring frequent replacement. Since corrosion-resistant sealing rings are expensive, the overall operating cost is high. Furthermore, because the base plate 1 and connecting pipe 2 are typically located at the bottom of the vacuum pump, maintenance requires disassembling the pump for replacement, making the maintenance process complex, time-consuming, and disrupting normal production. Moreover, the vacuum pump vibrates during operation, and long-term vibration can lead to insufficient clamping force, causing the clamps to loosen and posing a risk of gas leakage, increasing the operational risk of the vacuum pump. In this embodiment, by integrally molding the connecting pipe 2 and the base plate 1, there is no risk of gas leakage at the connection interface during vacuum pump operation. Additionally, no sealing ring is needed between the connecting pipe 2 and the base plate 1, eliminating the need for sealing ring replacement due to corrosion.

[0024] In some embodiments, the base plate 1 and the connecting pipe 2 are integrally cast. For example, the base plate 1 and the connecting pipe 2 are made of stainless steel.

[0025] like Figure 2 As shown, in some embodiments, the connecting pipe 2 is a bend. The tailpipe 3 includes an elbow section 32, a straight section 33, and a reducing section 34.

[0026] like Figure 2 As shown, in some embodiments, the end of the connecting pipe 2 facing the tailpipe 3 is connected to a first welding part 21, and the end of the tailpipe 3 facing the connecting pipe 2 is connected to a second welding part 31, and the first welding part 21 is welded to the second welding part 31.

[0027] Understandably, the reliable connection between the connecting pipe 2 and the tailpipe 3 is achieved by welding the first welding part 21 and the second welding part 31. Welding eliminates the need for a sealing ring between the connecting pipe 2 and the tailpipe 3, avoiding frequent replacement of the sealing ring due to corrosion during use. Furthermore, the integrated welding of the connecting pipe 2 and the tailpipe 3 significantly reduces the risk of leakage and lowers maintenance costs.

[0028] In related technologies, the connecting pipe 2 and the tailpipe 3 are connected by a sealing ring, clamp, and fasteners. With long-term operation of the vacuum pump, highly corrosive gases can cause corrosion of the sealing ring, requiring frequent replacement. Since corrosion-resistant sealing rings are expensive, the overall operating cost is high. Furthermore, because the connecting pipe 2 and tailpipe 3 are typically located at the bottom of the vacuum pump, maintenance requires disassembling the pump for replacement, making the maintenance process complex, time-consuming, and disruptive to normal production. Moreover, the vacuum pump vibrates during operation, and long-term vibration can lead to insufficient clamping force, causing the clamps to loosen and posing a risk of gas leakage, increasing the operational risk of the vacuum pump. In this embodiment, by welding the connecting pipe 2 and tailpipe 3, there is no risk of gas leakage at the connection interface during vacuum pump operation. Additionally, no sealing ring is needed between the connecting pipe 2 and tailpipe 3, eliminating the need to replace the sealing ring due to corrosion.

[0029] In some embodiments, the first welding portion 21 is integrally formed on the connecting pipe 2. Alternatively, the first welding portion 21 is welded to the connecting pipe 2.

[0030] In some embodiments, the second welding part 31 is integrally formed on the tailpipe 3. Alternatively, the second welding part 31 is welded to the tailpipe 3.

[0031] Please continue reading. Figure 2 In some embodiments, the first weld portion 21 has a first contraction section 211 that docks with the second weld portion 31, and the first contraction section 211 has a decreasing longitudinal cross-sectional dimension along the direction from the first weld portion 21 to the second weld portion 31; and / or, the second weld portion 31 has a second contraction section 311 that docks with the first contraction section 211, and the second contraction section 311 has a decreasing longitudinal cross-sectional dimension along the direction from the second weld portion 31 to the first weld portion 21.

[0032] It is understandable that the longitudinal section of the first shrinkage section 211 has a decreasing size trend along the direction from the first welded part 21 to the second welded part 31. As a result, the longitudinal section of the first shrinkage section 211 is smaller at the end near the second welded part 31, and a receiving area for accommodating the welding equipment can be formed on the outer peripheral surface of the first welded part 21. This receiving area can keep the interface between the first welded part 21 and the second welded part 31 in the lowest region, which can realize the rapid positioning of the welding equipment.

[0033] The longitudinal section of the second shrinkage section 311 has a decreasing size trend along the direction from the second welded part 31 to the first welded part 21. As a result, the longitudinal section of the second shrinkage section 311 is smaller at the end near the first welded part 21. A receiving area for accommodating welding equipment can be formed on the outer peripheral surface of the second welded part 31. This receiving area can keep the interface between the first welded part 21 and the second welded part 31 in the lowest region, which can realize the rapid positioning of the welding equipment.

[0034] In some embodiments, the first welding portion 21 has a first contraction section 211, and the second welding portion 31 has a second contraction section 311, with the first contraction section 211 and the second contraction section 311 abutting together. It is understood that the smaller end of the first contraction section 211 abuts with the smaller end of the second contraction section 311, and the two together define a receiving area for accommodating the welding equipment at the interface. This receiving area is the lowest region, enabling rapid positioning of the welding equipment and ensuring welding accuracy.

[0035] In some embodiments, the first contraction section 211 tapers linearly along the direction from the first weld portion 21 to the second weld portion 31. Thus, the outer surface of the first contraction section 211 is a slope. Along the direction from the first weld portion 21 to the second weld portion 31, this slope is inclined towards the axis of the first weld portion 21. For example, the first contraction section 211 is configured as a frustum shape, thereby forming multiple slopes on the outer surface of the first contraction section 211.

[0036] In some embodiments, the first contraction segment 211 tapers exponentially along the direction from the first weld portion 21 to the second weld portion 31. In this case, the outer surface of the first contraction segment 211 is an arc surface. For example, the first contraction segment 211 is configured as a frustum shape, thereby forming a continuous curved arc surface on the outer surface of the first contraction segment 211.

[0037] In some embodiments, the second contraction section 311 tapers linearly along the direction from the second weld portion 31 to the first weld portion 21. Consequently, the outer surface of the second contraction section 311 is a slope. This slope is inclined towards the axis of the second weld portion 31 along the direction from the second weld portion 31 to the first weld portion 21. For example, the second contraction section 311 is configured as a frustum shape, thereby forming multiple slopes on the outer surface of the second contraction section 311.

[0038] In some embodiments, the second contraction segment 311 tapers exponentially along the direction from the second weld portion 31 to the first weld portion 21. In this case, the outer surface of the second contraction segment 311 is an arc surface. For example, the second contraction segment 311 is configured as a frustum shape, thereby forming a continuous curved arc surface on the outer surface of the second contraction segment 311.

[0039] In some embodiments, both the first welded portion 21 and the second welded portion 31 are square, and their four corners are connected by beveled surfaces to prevent stress concentration at the four corners of the first welded portion 21 and the second welded portion 31, and to avoid the first welded portion 21 and the second welded portion 31 scratching the operator during use or installation. The first contraction section 211 is adapted to the shape of the first welded portion 21, and the second contraction section 311 is adapted to the shape of the second welded portion 31.

[0040] In some embodiments, the tailpipe 3 and the connecting pipe 2 can be welded together by the first welding part 21 and the second welding part 31 under the clamping of a high-precision fixture, thereby ensuring the accuracy of the relative position of the finished product.

[0041] In some embodiments, the first welding part 21 has a first end face that abuts with the second welding part 31, and the form and position tolerance between the first end face and the upper surface of the base plate 1 is less than or equal to a first preset tolerance threshold; and / or, the second welding part 31 has a second end face 312 that abuts with the first welding part 21, and the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 away from the connecting pipe 2 is less than or equal to a second preset tolerance threshold.

[0042] Understandably, the form and position tolerance between the first end face and the upper surface of the base plate 1 is made less than or equal to a first preset tolerance threshold to compensate for angular errors during the casting process of the connecting pipe 2. By constraining the form and position tolerance of the first welded part 21 itself, the accuracy of the final product is ensured. Similarly, the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 furthest from the connecting pipe 2 is made less than or equal to a second preset tolerance threshold to compensate for angular errors during the forming process of the tailpipe 3. Again, by constraining the form and position tolerance of the second welded part 31 itself, the accuracy of the final product is ensured.

[0043] In some embodiments, a first preset tolerance threshold and a second preset tolerance threshold can be selected based on product model, product size, etc. For example, if the first tolerance threshold is 1 degree, then the deviation angle between the first end face and the upper surface of the base plate 1 is less than or equal to 1 degree. For example, if the second tolerance threshold is 3 degrees, then the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 away from the connecting pipe 2 is less than or equal to 3 degrees.

[0044] In some embodiments, the upper surface of the base plate 1 can be used as a reference surface to establish a reference coordinate system, thereby calculating the form and position tolerance of the first end face relative to the upper surface of the base plate 1 based on the coordinate system. If the form and position tolerance is greater than or equal to a first preset tolerance threshold, the first end face can be machined by milling to ensure that the form and position tolerance between the first end face and the upper surface of the base plate 1 is less than or equal to the first preset tolerance threshold.

[0045] In some embodiments, the end face of the tailpipe 3 away from the connecting pipe 2 can be used as a reference surface to establish a reference coordinate system, thereby calculating the form and position tolerance of the second end face 312 relative to the end face of the tailpipe 3 away from the connecting pipe 2 based on the coordinate system. If the form and position tolerance is greater than or equal to a first preset tolerance threshold, the second end face 312 can be machined by milling to ensure that the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 away from the connecting pipe 2 is less than or equal to the second preset tolerance threshold.

[0046] It is understandable that the dimensions of the first welding part 21 and the second welding part 31 can be redundantly set so that there is a certain adjustment margin for the first welding part 21 and the second welding part 31. If the first welding part 21 and / or the second welding part 31 do not meet the form and position tolerances, they can be processed by milling to compensate for the deformation error during the product forming process, ensure the accuracy of the relative position of the first welding part 21 and the second welding part 31, and thus ensure that the accuracy of the finished part meets the usage requirements.

[0047] In some embodiments, the tailpipe 3 and the connecting pipe 2 are integrally formed.

[0048] It is understandable that by making the tailpipe 3 and the connecting pipe 2 integrally molded, the welding process between the tailpipe 3 and the connecting pipe 2 can be reduced, thereby further reducing manufacturing costs.

[0049] In some embodiments, the tailpipe 3 and the connecting pipe 2 are integrally cast. For example, the base plate 1, the connecting pipe 2, and the tailpipe 3 are made of stainless steel.

[0050] like Figure 1 As shown, in some embodiments, a cooling element 4 is connected to the side of the base plate 1 away from the vacuum pump.

[0051] It is understandable that a cooling element 4 is installed on the side of the base plate 1 away from the vacuum pump to cool the base plate 1 and the vacuum pump above it, ensuring the safety of the vacuum pump during operation and avoiding safety hazards caused by excessively high operating temperature of the vacuum pump.

[0052] In some embodiments, the cooling component 4 is a stainless steel casting, and the cooling component 4 is integrally cast into the base plate 1.

[0053] In some embodiments, the cooling element 4 is an aluminum cooling radiator. The base plate 1 has a mounting surface on the side away from the vacuum pump, and the cooling element 4 is mounted to the mounting surface by fasteners such as bolts.

[0054] In some embodiments, the cooling component 4 is a liquid-cooled structure or an air-cooled structure.

[0055] like Figure 2 As shown, in some embodiments, the cooling component 4 includes a flow channel body 41 and a cover plate 42; the flow channel body 41 is integrally formed on the base plate 1, the flow channel body 41 is constructed with a flow channel groove 411, and a cooling medium inlet 412 and a cooling medium outlet 413 communicating with the flow channel groove 411 are formed on the flow channel body 41; the cover plate 42 is connected to the flow channel body 41 or the base plate 1, and the cover plate 42 closes the flow channel groove 411 to form a cooling flow channel.

[0056] It is understood that the main body 41 of the flow channel is integrally formed on the base plate 1 to form the flow channel groove 411, and the cover plate 42 is connected to the main body 41 of the flow channel or the base plate 1 to close the flow channel groove 411 and form a cooling flow channel. When the cooling medium enters the cooling flow channel from the cooling medium inlet 412, it can carry away the heat on the base plate 1, thereby achieving cooling.

[0057] In some embodiments, the cooling medium includes a liquid cooling medium. For example, the cooling medium is a liquid refrigerant. The cooling medium also includes an air cooling medium. For example, the cooling medium includes cold air.

[0058] In some embodiments, the flow channel body 41 is integrally cast onto the base plate 1. Since the flow channel body 41 is integrally cast onto the base plate 1, the heat exchange efficiency can be significantly improved.

[0059] like Figure 2As shown, in some embodiments, the flow channel body 41 has an irregular structure, including an annular baffle wall, and a first, second, and third isolation member disposed within the annular baffle wall. The first and second isolation members are configured in a generally Z-shaped structure, and the third isolation member is configured in a generally Y-shaped structure. The first and second isolation members are disposed on the inner wall surface of the first side of the annular baffle wall, and the first and second isolation members are spaced apart. The third isolation member is disposed on the inner wall surface of the second side of the annular baffle wall, and the third isolation member is spaced apart between the first and second isolation members. Thus, a first sub-flow channel can be formed between the first isolation member and the wall surface of the third side of the annular baffle wall, a second sub-flow channel can be formed between the first and third isolation members, a third sub-flow channel can be formed between the third and second isolation members, and a fourth sub-flow channel can be formed between the second isolation member and the wall surface of the fourth side of the annular baffle wall. The first, second, third, and fourth sub-flow channels are sequentially connected to form a flow channel groove 411, which also has the advantages of high pressure resistance and low flow resistance.

[0060] The irregularly shaped flow channel body 41 is cast into the base plate 1, which can reduce processing costs.

[0061] In some embodiments, the connecting pipe 2 is disposed on the first side of the annular baffle wall, and the exhaust port 11 penetrates the annular baffle wall. The cooling medium inlet 412 and the cooling medium outlet 413 are disposed on the second side of the annular baffle wall. The cooling medium inlet 412 is connected to the first sub-channel, and the cooling medium outlet 413 is connected to the fourth sub-channel.

[0062] In some embodiments, the lower surface of the flow channel body 41 is provided with a first threaded hole, and the cover plate 42 is provided with a through second threaded hole. The cover plate 42 covers the flow channel body 41 and seals the flow channel groove 411. The first threaded hole and the second threaded hole are connected, and the cover plate 42 and the flow channel body 41 are fixed to each other by fasteners passing through the first threaded hole and the second threaded hole.

[0063] In some embodiments, the lower surface of the base plate 1 is provided with a first threaded hole, and the cover plate 42 is provided with a through second threaded hole. The cover plate 42 covers the base plate 1 and seals the flow channel groove 411. The first threaded hole and the second threaded hole are connected, and the cover plate 42 and the base plate 1 are fixed to each other by fasteners passing through the first threaded hole and the second threaded hole.

[0064] In some embodiments, a first sealing groove is formed on the side of the cover plate 42 facing the flow channel body 41, and a first sealing element is provided in the first sealing groove. The first sealing element abuts against the flow channel body 41 or the bottom plate 1 to seal the connection interface between the cover plate 42 and the flow channel body 41 or the bottom plate 1; or, as Figure 3As shown, a second sealing groove 12 is formed on the side of the base plate 1 facing the vacuum pump. A second sealing element is provided in the second sealing groove 12. The second sealing element is configured to abut against the vacuum pump and is used to seal the connection interface between the base plate 1 and the vacuum pump.

[0065] Understandably, a first sealing groove is formed on the cover plate 42, and a first sealing element is provided within the first sealing groove. A portion of the first sealing element protrudes outward from the first sealing groove and abuts against the flow channel body 41 or the main plate, thereby achieving a sealed connection between the cover plate 42 and the flow channel body 41. This prevents the cooling medium from leaking from the connection between the cover plate 42 and the flow channel body 41 or the base plate 1.

[0066] A second sealing groove 12 is formed on the upper surface of the base plate 1, and a second sealing element is provided in the second sealing groove 12. Part of the second sealing element protrudes outward from the second sealing groove 12 and abuts against the vacuum pump, thereby achieving a sealed connection between the base plate 1 and the vacuum pump and preventing gas from leaking from the connection between the base plate 1 and the vacuum pump.

[0067] In some embodiments, the first sealing groove is an annular groove, and the first sealing groove is disposed near the periphery of the cover plate 42. The second sealing groove 12 is an annular groove, and the annular groove is disposed near the periphery of the bottom plate 1.

[0068] In some embodiments, the side of the base plate 1 facing the vacuum pump is a plane with a flatness of A, satisfying: 0.02 mm ≤ A ≤ 2 mm; and / or, the side of the base plate 1 away from the vacuum pump is a plane with a flatness of B, satisfying: 0.02 mm ≤ B ≤ 2 mm; and / or, the surface roughness of the side of the base plate 1 away from the vacuum pump is C, satisfying: C ≤ Ra 1.6; and / or, a cover plate 42 is connected to the side of the base plate 1 away from the vacuum pump, the side of the cover plate 42 facing the base plate 1 is a plane with a flatness of D, satisfying: 0.02 mm ≤ D ≤ 2 mm.

[0069] The flatness of the base plate 1 facing the vacuum pump is set within the range of 0.02 mm to 2 mm to ensure that the flatness of the base plate 1 meets the sealing requirements between the base plate 1 and the vacuum pump, and to prevent gas leakage from the connection between the base plate 1 and the vacuum pump.

[0070] If the flatness of the base plate 1 facing the vacuum pump is greater than 2 mm, the first seal will not be able to ensure the seal between the base plate 1 and the vacuum pump, posing a risk of gas leakage. If the flatness of the base plate 1 facing the vacuum pump is less than 0.02 mm, it will result in excessive machining precision for the base plate 1, increasing production costs and manufacturing difficulty.

[0071] In some embodiments, the flatness of the base plate 1 facing the vacuum pump is set to 0.02 mm, 0.1 mm, 0.5 mm, 1 mm, 1.5 mm, 2 mm, or any value between the two.

[0072] The flatness of the side of the base plate 1 facing away from the vacuum pump is set within the range of 0.02 mm to 2 mm to ensure that the flatness of the base plate 1 meets the sealing requirements between the base plate 1 and the cover plate 42, and to prevent coolant leakage from the connection between the base plate 1 and the cover plate 42.

[0073] If the flatness of the side of the base plate 1 facing away from the vacuum pump is greater than 2 mm, the second seal will not be able to ensure the seal between the base plate 1 and the cover plate 42, posing a risk of coolant leakage. If the flatness of the side of the base plate 1 facing away from the vacuum pump is less than 0.02 mm, it will result in excessive machining precision for the base plate 1, increasing production costs and production difficulty.

[0074] In some embodiments, the flatness of the side of the base plate 1 facing away from the vacuum pump is set to 0.02 mm, 0.1 mm, 0.5 mm, 1 mm, 1.5 mm, 2 mm, or any value between the two.

[0075] The roughness of the side of the base plate 1 facing away from the vacuum pump is set to be less than or equal to Ra1.6 to ensure that the roughness of the base plate 1 meets the sealing requirements between the base plate 1 and the cover plate 42, and to prevent coolant leakage from the connection between the base plate 1 and the cover plate 42.

[0076] The flatness of the cover plate 42 facing the base plate 1 is set within the range of 0.02 mm to 2 mm to ensure that the flatness of the cover plate 42 meets the sealing requirements between the base plate 1 and the cover plate 42, and to prevent coolant leakage from the connection between the base plate 1 and the cover plate 42.

[0077] If the flatness of the cover plate 42 facing the base plate 1 is greater than 2 mm, the first seal will not be able to ensure the seal between the base plate 1 and the cover plate 42, posing a risk of coolant leakage. If the flatness of the cover plate 42 facing the base plate 1 is less than 0.02 mm, it will result in excessive machining precision of the cover plate 42, increasing production costs and production difficulty.

[0078] In some embodiments, the flatness of the cover plate 42 facing the bottom plate 1 is set to 0.02 mm, 0.1 mm, 0.5 mm, 1 mm, 1.5 mm, 2 mm, or any value between the two.

[0079] like Figure 3 As shown, in some embodiments, the connecting pipe 2 and / or the tailpipe 3 have an axis 22, and the base plate 1 has a center line 13 parallel to its width direction, with the axis 22 and the center line 13 arranged at an angle.

[0080] It is understandable that the axis 22 is set at an angle to the center line 13. This allows the positions of the base plate 1 and the tailpipe 3 to be directly located before installation, which facilitates the direct positioning of the base plate 1 and the tailpipe 3 and helps to improve installation accuracy.

[0081] like Figure 3 As shown, the base plate 1 is a rectangle with a long side and a short side. The extension direction of the short side is the width direction of the base plate 1, and the extension direction of the long side is the length direction of the base plate 1. The center line 13 is parallel to the width direction of the base plate 1, and the center line 13 is located at the center of the length direction of the base plate 1.

[0082] In some embodiments, the angle between axis 22 and centerline 13 is α, and α is an acute angle.

[0083] In some embodiments, the connecting pipe 2 and the tailpipe 3 are coaxially connected.

[0084] The vacuum pump tail exhaust structure in this embodiment eliminates the sealing ring in the exhaust path and achieves plate-to-pipe and pipe-to-pipe connection through integral casting and / or welding, which reduces the leakage rate and leakage risk, improves product reliability, extends product service life, and reduces manufacturing and maintenance costs, reducing manufacturing costs by more than 60% and maintenance costs by more than 90%.

[0085] According to a second aspect of this application, a vacuum pump is provided, which includes the aforementioned vacuum pump tail exhaust structure. This vacuum pump possesses all the beneficial effects of the aforementioned vacuum pump tail exhaust structure, which will not be elaborated further herein.

[0086] According to the third aspect of this application, such as Figure 4 As shown, a method for manufacturing the vacuum pump tail section structure as described in the foregoing embodiments is provided. The method includes: S100, provides an integrally molded base plate 1 and connecting pipe 2.

[0087] S200. Connect the tailpipe 3 to the end of the connecting pipe 2 away from the base plate 1.

[0088] Understandably, by integrally molding the connecting pipe 2 onto the base plate 1, there is no need to use a sealing ring for structural sealing between the connecting pipe 2 and the base plate 1, thus avoiding increased maintenance costs due to gas corrosion of the sealing ring. Specifically, the exhaust gas from the vacuum pump is introduced into the connecting pipe 2 through the exhaust port 11 of the base plate 1. The exhaust gas entering the connecting pipe 2 can be discharged through the tailpipe 3 or enter the subsequent gas treatment device via the tailpipe 3.

[0089] In some embodiments, an integrally formed base plate 1 and connecting pipe 2 are provided, including: The base plate 1 and connecting pipe 2 are cast into one piece.

[0090] The base plate 1 and the connecting pipe 2 are integrally formed by casting, which is convenient for processing and manufacturing and has a low cost.

[0091] In some embodiments, after providing the integrally formed base plate 1 and connecting pipe 2, the method further includes: A first welding part 21 is formed on the connecting pipe 2, and the first end face of the first welding part 21 is milled so that the form and position tolerance between the first end face and the upper surface of the base plate 1 is less than or equal to the first preset tolerance threshold; wherein, the first end face is the end face of the first welding part 21 that is connected to the tail pipe 3.

[0092] Understandably, the form and position tolerance between the first end face and the upper surface of the base plate 1 is made less than or equal to a first preset tolerance threshold, thereby compensating for angular errors during the casting process of the connecting pipe 2. By constraining the form and position tolerance of the first welding part 21 itself, the accuracy of the final product is ensured.

[0093] In some embodiments, a first preset tolerance threshold can be selected based on product model, product size, etc. For example, if the first tolerance threshold is 1 degree, then the deviation angle between the first end face and the upper surface of the base plate 1 is less than or equal to 1 degree.

[0094] In some embodiments, the upper surface of the base plate 1 can be used as a reference surface to establish a reference coordinate system, thereby calculating the form and position tolerance of the first end face relative to the upper surface of the base plate 1 based on the coordinate system. If the form and position tolerance is greater than or equal to a first preset tolerance threshold, the first end face can be machined by milling to ensure that the form and position tolerance between the first end face and the upper surface of the base plate 1 is less than or equal to the first preset tolerance threshold.

[0095] The dimensions of the second welding part 31 can be redundantly set so that the first welding part 21 has a certain adjustment margin. If the first welding part 21 does not meet the form and position tolerances, it can be processed by milling to compensate for the deformation error during the product forming process, ensure the accuracy of the relative position of the first welding part 21, and thus ensure that the accuracy of the finished part meets the usage requirements.

[0096] In some embodiments, connecting the tailpipe 3 to the end of the connecting pipe 2 away from the base plate 1 includes: Prepare elbow section 32, straight pipe section 33, reducing section 34 and second welded part 31; weld elbow section 32, straight pipe section 33, reducing section 34 and second welded part 31 in sequence to form tail pipe 3; weld second welded part 31 to first welded part 21.

[0097] It is understood that the tailpipe 3 includes an elbow section 32, a straight pipe section 33, and a reducing section 34. These three sections are welded together in sequence to form the tailpipe 3. A second welded part 31 is welded to the smaller end of the reducing section 34, thereby using the second welded part 31 to weld with the first welded part 21 to achieve the fixed connection and conduction between the tailpipe 3 and the connecting pipe 2.

[0098] In some embodiments, before welding the second weld portion 31 to the first weld portion 21, the method further includes: The second end face 312 of the second welding part 31 is milled so that the form and position tolerance between the second end face 312 and the end face of the tail pipe 3 away from the connecting pipe 2 is less than or equal to the second preset tolerance threshold; wherein, the second end face 312 is the end face on the side where the second welding part 31 and the first welding part 21 are mated.

[0099] Understandably, the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 furthest from the connecting pipe 2 is made less than or equal to the second preset tolerance threshold, thereby compensating for the angular error during the forming process of the tailpipe 3. By constraining the form and position tolerance of the second welding part 31 itself, the accuracy of the final product is ensured.

[0100] In some embodiments, a second preset tolerance threshold can be selected based on product model, product size, etc. For example, if the second tolerance threshold is 3 degrees, then the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 away from the connecting pipe 2 is less than or equal to 3 degrees.

[0101] In some embodiments, the end face of the tailpipe 3 away from the connecting pipe 2 can be used as a reference surface to establish a reference coordinate system, thereby calculating the form and position tolerance of the second end face 312 relative to the end face of the tailpipe 3 away from the connecting pipe 2 based on the coordinate system. If the form and position tolerance is greater than or equal to a first preset tolerance threshold, the second end face 312 can be machined by milling to ensure that the form and position tolerance between the second end face 312 and the end face of the tailpipe 3 away from the connecting pipe 2 is less than or equal to the second preset tolerance threshold.

[0102] The dimensions of the second welding part 31 can be redundantly set to allow for a certain adjustment margin. If the second welding part 31 does not meet the form and position tolerances, it can be machined by milling to compensate for the deformation error during the product forming process, ensure the accuracy of the relative position of the second welding part 31, and thus ensure that the accuracy of the finished part meets the usage requirements.

[0103] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0104] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0105] The embodiments, implementation methods, and related technical features of this application can be combined and substituted for each other without conflict.

[0106] The above are merely preferred embodiments of this application and are not intended to limit this application in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this application without departing from the scope of the technical solution of this application shall still fall within the scope of the technical solution of this application.

Claims

1. A vacuum pump tail exhaust structure, characterized in that, include: The base plate (1) is configured to be mounted on the vacuum pump, and an exhaust port (11) is formed on the base plate (1) that communicates with the exhaust end of the vacuum pump. The connecting pipe (2) is integrally formed on the base plate (1), and the connecting pipe (2) is connected to the exhaust port (11); Tailpipe (3) is connected to the end of the connecting pipe (2) away from the base plate (1).

2. The vacuum pump tail exhaust structure according to claim 1, characterized in that, The connecting pipe (2) is connected to a first welding part (21) at one end facing the tailpipe (3), and the tailpipe (3) is connected to a second welding part (31) at one end facing the connecting pipe (2). The first welding part (21) is welded to the second welding part (31).

3. The vacuum pump tail exhaust structure according to claim 2, characterized in that, The first welding part (21) has a first end face that is mated with the second welding part (31), and the form and position tolerance between the first end face and the upper surface of the base plate (1) is less than or equal to a first preset tolerance threshold. And / or, the second welding part (31) has a second end face (312) that abuts against the first welding part (21), and the form and position tolerance between the second end face (312) and the end face of the tail pipe (3) away from the connecting pipe (2) is less than or equal to a second preset tolerance threshold.

4. The vacuum pump tail exhaust structure according to claim 1, characterized in that, The tailpipe (3) and the connecting pipe (2) are integrally formed.

5. The vacuum pump tail exhaust structure according to claim 1, characterized in that, A cooling element (4) is connected to the side of the base plate (1) away from the vacuum pump.

6. The vacuum pump tail exhaust structure according to claim 5, characterized in that, The cooling component (4) includes: The main body of the flow channel (41) is integrally formed on the bottom plate (1). The main body of the flow channel (41) is constructed with a flow channel groove (411), and a cooling medium inlet (412) and a cooling medium outlet (413) communicating with the flow channel groove (411) are formed on the main body of the flow channel (41). The cover plate (42) is connected to the main body of the flow channel (41) or the bottom plate (1), and the cover plate (42) closes the flow channel groove (411) to form a cooling flow channel.

7. The vacuum pump tail exhaust structure according to claim 6, characterized in that, The cover plate (42) has a first sealing groove on the side facing the flow channel body (41). A first sealing element is provided in the first sealing groove. The first sealing element abuts against the flow channel body (41) or the bottom plate (1) to seal the connection interface between the cover plate (42) and the flow channel body (41) or the bottom plate (1). Alternatively, a second sealing groove (12) is formed on the side of the base plate (1) facing the vacuum pump. A second sealing element is provided in the second sealing groove (12). The second sealing element is configured to abut against the vacuum pump to seal the connection interface between the base plate (1) and the vacuum pump.

8. The vacuum pump tail exhaust structure according to any one of claims 1 to 7, characterized in that, The connecting pipe (2) and / or the tailpipe (3) have an axis (22), and the base plate (1) has a center line (13) parallel to its width direction. The axis (22) and the center line (13) are set at an angle.

9. A vacuum pump, characterized in that, Includes the vacuum pump tail section structure as described in any one of claims 1 to 8.

10. A method for manufacturing a vacuum pump tail section structure as described in any one of claims 1 to 8, characterized in that, include: The base plate (1) and the connecting pipe (2) are provided as an integrally formed unit. The tailpipe (3) is connected to the end of the connecting pipe (2) away from the base plate (1).

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