Crystal ingot on-line measuring device and grinding machining system applying same

Abstract

The invention relates to a crystal ingot on-line measuring device and a grinding machining system applying the same, and relates to the field of machine tool machining. Comprising a workpiece movement cooperation system, a measuring mechanism and a data processing unit. The workpiece movement cooperation system drives the workpiece to move in the X-axis direction and / or rotate around the axis theta of the workpiece; and the measuring mechanism is used for realizing surface type sampling in the radial direction of the crystal ingot when the workpiece moves along the X direction, realizing surface type sampling in the circumferential direction of the workpiece when the workpiece rotates, and then feeding back surface type sampling data in the radial direction and the circumferential direction to the data processing unit. The thickness and surface quality of the crystal ingot workpiece can be accurately measured, the machining efficiency is improved, meanwhile, the measuring device can drive the measuring arm to rotate to avoid the grinding wheel through the servo motor, and it is guaranteed that follow-up machining is carried out smoothly.

Description

Technical Field

[0001] This invention relates to the field of machine tool processing, specifically to an online ingot measuring device and its application in a grinding system. Background Technology

[0002] In modern manufacturing, the demand for high-precision parts processing is increasing. Especially in the semiconductor industry, the thickness accuracy and surface quality during ingot grinding directly affect the performance and quality of products in subsequent processes. Traditional measurement methods are mostly offline, which are inefficient, have limited measurement accuracy, and cannot monitor the processing in real time.

[0003] To address these issues, online measurement technology has emerged. However, existing online measurement devices still have some shortcomings in practical applications. For example, most online measurement devices have relatively limited functions, often only capable of measuring a specific parameter, such as ingot thickness, and cannot simultaneously detect other important parameters such as surface shape, making it difficult to adapt to complex and ever-changing processing requirements.

[0004] Therefore, how to provide an online ingot measurement device and its application in a grinding system that can monitor the thickness and surface quality of ingots in real time and improve the grinding efficiency of ingots has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] To address at least one technical problem in the background art, the present invention provides an online ingot measuring device and a grinding system for its application, which can accurately measure the thickness and surface quality of ingot workpieces, improve processing efficiency, and the measuring device can also drive the measuring arm to rotate via a servo motor to avoid the grinding wheel, so as to ensure the smooth progress of subsequent processing.

[0006] To achieve the above objectives, the present invention provides an online ingot measurement device, comprising: a workpiece motion coordination system, a measurement mechanism, and a data processing unit; The workpiece motion coordination system drives the workpiece to move along the X-axis and / or rotate around its own axis θ. The measuring mechanism is used to sample the surface profile of the ingot in the radial direction when the workpiece moves along the X direction, and to sample the surface profile of the workpiece in the circumferential direction when the workpiece rotates. Then, the surface profile sampling data in the radial and circumferential directions are fed back to the data processing unit.

[0007] Furthermore, the measuring mechanism includes a connecting bracket, a measuring seat, a measuring arm, a drive module, and a measuring component; the connecting bracket is installed on one side of the bed, the measuring seat is installed above the end of the connecting bracket, the measuring arm is provided outside the measuring seat, the drive module is installed on the measuring arm, and the measuring component is installed at the output end of the drive module.

[0008] Furthermore, the drive module includes a linear motor, a balance cylinder A, a balance cylinder B, and a high-precision cross roller guide rail; the balance cylinder A and the balance cylinder B are located on both sides of the drive module, and their output ends are connected to the measuring component; the linear motor in the drive module drives the measuring component to move up and down through the cross roller guide rail 18 to achieve surface sampling of the workpiece.

[0009] Furthermore, the drive module also includes a grating ruler, which is mounted on the measuring arm to provide real-time feedback on the position information of the linear motor.

[0010] Furthermore, the measuring component includes a measuring instrument connecting block, a measuring instrument connecting plate, and a measuring instrument; the measuring instrument connecting block is installed at the output end of the linear motor; the measuring instrument connecting plate is installed on the measuring instrument connecting block, and the measuring instrument is installed at the end of the measuring instrument connecting plate; the probe of the measuring instrument is in perpendicular contact with the surface of the workpiece; the measuring instrument establishes communication with the data processing unit, measures the surface data of the workpiece in real time, and feeds it back to the data processing unit.

[0011] A grinding system using the online ingot measuring device described in any of the above claims further includes a servo motor and a grinding wheel; a rotating shaft is installed inside the measuring base, one end of which is connected to the measuring arm, and the other end is connected to the output shaft of the servo motor; during grinding wheel replacement and grinding, the machine tool CNC sends a servo motor controller linkage signal to the measuring device, and after receiving the signal, the servo motor drives the measuring arm to rotate the measuring instrument, providing installation space for the grinding wheel and participating in the grinding.

[0012] The beneficial effects of this invention are as follows: This invention provides an online ingot measuring device. By combining a workpiece motion coordination system with a measuring mechanism, it can not only achieve real-time measurement of workpiece height but also simultaneously detect the workpiece's surface shape, thereby determining whether there are problems such as flatness deviation, unevenness deformation, or local defects. This allows for timely adjustment of grinding parameters, improving processing efficiency. The measuring device is further equipped with a servo motor and a rotating shaft, forming a grinding system together with the grinding wheel. The servo motor can drive the measuring arm to rotate around the rotating shaft, causing the grinding wheel and measuring arm to move away from each other, thus enabling the grinding wheel to participate in grinding and be replaced. The resetting accuracy of the measuring arm can reach ±0.002°. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of the online measuring device of the present invention; Figure 2 This is a schematic diagram of the workpiece motion coordination system of the online measurement device of the present invention; Figure 3 This is a perspective view of the measuring mechanism of the online measuring device of the present invention; Figure 4This is a top view of the measuring mechanism of the online measuring device of the present invention; Figure 5 This is a flowchart of the data processing of the online measurement device of the present invention; Figure 6 This is a schematic diagram of the normal operating state of the grinding process system of the present invention; Figure 7 This is a top view of the grinding process system of the present invention in normal working condition; Figure 8 This is a schematic diagram of the grinding process system of the present invention in the state of avoiding the grinding wheel.

[0014] In the diagram: 11-Connecting bracket; 12-Servo motor; 13-Measuring seat; 14-Measuring arm; 15-Balancing cylinder A; 16-Linear motor; 17-Balancing cylinder B; 18-High-precision cross roller guide; 19-Grating ruler; 20-Measuring instrument connecting block; 21-Measuring instrument connecting plate; 22-Measuring instrument; 100-Workpiece motion coordination system; 200-Measuring mechanism; 300-Workpiece; 400-Bed; 500-Grinding wheel. Detailed Implementation

[0015] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0016] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0017] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0018] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0019] Furthermore, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0020] To achieve the above objectives, such as Figures 1 to 4 As shown, this invention provides an online ingot measurement device, comprising: a workpiece motion coordination system 100, a measuring mechanism 200, and a data processing unit; the workpiece motion coordination system 100 can drive the workpiece to move along the X-axis and / or rotate around its own axis θ; the measuring mechanism 200 is used to sample the surface profile of the ingot in the radial direction when the workpiece 300 moves along the X-axis, and to sample the surface profile of the workpiece 300 in the circumferential direction when the workpiece 300 rotates, and then feeds back the surface profile sampling data in the radial and circumferential directions to the data processing unit. The workpiece motion coordination system enables the workpiece to move back and forth along the X-axis and rotate 360° around the θ-axis, with the X-axis and θ-axis moving in tandem, synchronously outputting the workpiece's X-axis position and θ-axis angle data.

[0021] This invention utilizes the workpiece forward and backward movement mechanism and the workpiece rotation mechanism of the workpiece motion coordination system to complete the surface profile scanning of the ingot. The measuring instrument in the measuring mechanism moves up and down in real time to measure the height of the ingot surface, automatically associating it with the Z-axis height at the current X and θ coordinates to form "X-θ-Z" three-dimensional data points. The data processing unit then correlates the workpiece's X-axis position, θ-axis angle, and ingot thickness data in real time to generate a three-dimensional surface profile model of the ingot, and simultaneously calculates key parameters such as flatness and thickness uniformity. This invention enables precise online measurement of ingot thickness and surface profile with micron-level accuracy, and is suitable for grinding regular-shaped ingots such as single-crystal silicon and silicon carbide.

[0022] The measuring mechanism includes a connecting bracket 11, a measuring seat 13, a measuring arm 14, a drive module, and a measuring component; the connecting bracket 11 is installed on one side of the bed 400, the measuring seat 13 is installed above the end of the connecting bracket 11, the measuring arm 14 is provided outside the measuring seat 13, the drive module is installed on the measuring arm 14, and the measuring component is installed at the output end of the drive module.

[0023] The drive module includes a linear motor 16, a balance cylinder A15, a balance cylinder B17, and a high-precision cross roller guide 18; the balance cylinder A15 and the balance cylinder B17 are located on both sides of the drive module, and their output ends are connected to the measuring component; the linear motor 16 in the drive module drives the measuring component to move up and down through the cross roller guide 18 to achieve surface sampling of the workpiece 300.

[0024] The drive module also includes a grating ruler 19, which is mounted on the measuring arm 14 to provide real-time feedback on the position information of the linear motor 16.

[0025] The measuring assembly includes a measuring instrument connection block 20, a measuring instrument connection plate 21, and a measuring instrument 22. The measuring instrument connection block 20 is installed at the output end of the linear motor 16. The measuring instrument connection plate 21 is installed on the measuring instrument connection block 20, and the measuring instrument 22 is installed at the end of the measuring instrument connection plate 21. The probe of the measuring instrument 22 is in perpendicular contact with the surface of the workpiece. The measuring instrument 22 establishes communication with the data processing unit, measures the surface data of the workpiece 300 in real time, and feeds it back to the data processing unit.

[0026] During measurement, the ingot is first pre-processed and positioned. Then, the workpiece moves back and forth along the X-axis and rotates along the θ-axis. The measuring instrument 22 tracks each surface point on the workpiece by moving up and down, and collects thickness data in the Z-axis direction in real time. The workpiece motion coordination system synchronously outputs the X-axis position and θ-axis angle data, thus forming "X-θ-Z" three-dimensional data points. The extracted three-dimensional data points are processed, including filtering outliers and extracting valid data points. Then, an interpolation algorithm is used to interpolate the discrete data points, generating a three-dimensional surface mesh model covering the entire measurement area of ​​the ingot. Finally, the key surface and thickness parameters of the ingot are calculated. The entire data processing flowchart is shown below. Figure 5 As shown.

[0027] like Figure 3 and Figures 6-8 As shown, the present invention also provides a grinding system using the online ingot measuring device described in any of the above claims, further comprising a servo motor 12 and a grinding wheel 500; a rotating shaft is installed inside the measuring base 13, one end of which is connected to the measuring arm 14, and the other end is connected to the output shaft of the servo motor 12, thereby driving the measuring arm 14 to rotate; during grinding wheel replacement and grinding, the machine tool CNC sends a servo motor controller linkage signal to the measuring device, and after receiving the signal, the servo motor 12 drives the measuring arm 14 to rotate, providing installation space for the grinding wheel 500 and enabling it to participate in grinding. By driving the measuring arm to rotate through the servo motor, it avoids the grinding wheel 500, thus realizing the grinding of the workpiece 300. The avoidance state is as follows. Figure 8As shown, after the grinding wheel replacement and grinding process are completed, the servo motor 12 drives the connecting arm 14 to rotate in the opposite direction to reset, so that the measuring instrument 22 accurately returns to the measuring position. The measuring instrument 22 resets to... Figure 6 The position is shown. After reset, the system automatically triggers a rapid calibration process to confirm that the orientation of the measuring instrument 22 has not shifted due to rotation. Then, it automatically performs online measurement and can continue to perform ingot surface scanning without manual intervention.

[0028] This invention provides an online ingot measuring device. By combining a workpiece motion coordination system with a measuring mechanism, it can not only achieve real-time measurement of workpiece height but also simultaneously detect the workpiece's surface shape. This allows for the determination of issues such as flatness deviations, unevenness, and local defects, enabling timely adjustments to grinding parameters and improving processing efficiency. The measuring device further incorporates a servo motor and a rotating shaft, forming a grinding system together with the grinding wheel. The servo motor drives the measuring arm to rotate around the rotating shaft, moving the grinding wheel and measuring arm away from each other, thus facilitating grinding wheel participation and replacement. The measuring arm's reset accuracy can reach ±0.00. .

[0029] The above description is merely a preferred embodiment of the present invention and does not constitute any limitation on the technical scope of the present invention. Therefore, any minor modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention shall still fall within the scope of the technical solution of the present invention.

Claims

1. An online ingot measuring device, characterized in that, include: Workpiece motion coordination system (100), measuring mechanism (200), and data processing unit; The workpiece motion coordination system (100) drives the workpiece to move along the X-axis and / or rotate around its own axis θ; The measuring mechanism (200) is used to sample the surface profile of the ingot in the radial direction when the workpiece (300) moves along the X direction, and to sample the surface profile of the workpiece (300) in the circumferential direction when the workpiece (300) rotates. Then, the surface profile sampling data in the radial and circumferential directions are fed back to the data processing unit.

2. The online ingot measuring device as described in claim 1, characterized in that, The measuring mechanism includes a connecting bracket (11), a measuring seat (13), a measuring arm (14), a drive module, and a measuring component; the connecting bracket (11) is installed on one side of the bed (400), the measuring seat (13) is installed above the end of the connecting bracket (11), the measuring arm (14) is provided outside the measuring seat (13), the drive module is installed on the measuring arm (14), and the measuring component is installed at the output end of the drive module.

3. The online ingot measuring device as described in claim 2, characterized in that, The drive module includes a linear motor (16), a balance cylinder A (15), a balance cylinder B (17), and a high-precision cross roller guide (18); the balance cylinder A (15) and the balance cylinder B (17) are located on both sides of the drive module, and their output ends are connected to the measuring components; the linear motor (16) in the drive module drives the measuring components to move up and down through the cross roller guide 18 to achieve surface sampling of the workpiece (300).

4. The online ingot measuring device as described in claim 3, characterized in that, The drive module also includes a grating ruler (19), which is mounted on the measuring arm (14) to provide real-time feedback on the position information of the linear motor (16).

5. The online ingot measuring device as described in claim 4, characterized in that, The measuring component includes a measuring instrument connection block (20), a measuring instrument connection plate (21), and a measuring instrument (22); the measuring instrument connection block (20) is installed at the output end of the linear motor (16); the measuring instrument connection plate (21) is installed on the measuring instrument connection block (20), and the measuring instrument (22) is installed at the end of the measuring instrument connection plate (21). The probe of the measuring instrument (22) is in vertical contact with the surface of the workpiece. The measuring instrument (22) establishes communication with the data processing unit, measures the surface data of the workpiece (300) in real time, and feeds it back to the data processing unit.

6. A grinding system using the ingot online measuring device according to any one of claims 1-5, characterized in that, It also includes a servo motor (12) and a grinding wheel (500); a rotating shaft is installed inside the measuring seat (13), one end of which is connected to the measuring arm (14), and the other end is connected to the output shaft of the servo motor (12); when the grinding wheel is changed and grinding is performed, the machine tool CNC sends a servo motor controller linkage signal to the measuring device. After receiving the signal, the servo motor (12) drives the measuring arm (14) to rotate the measuring instrument, providing installation space for the grinding wheel (500) and participating in the grinding.

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