Apparatus for transferring substrates

Abstract

An apparatus for transferring a substrate includes: a loading plate; the inner substrate loading part is arranged on the loading plate; a rail disposed below the loading plate and extending in a first direction; a driving part disposed in an accommodation space defined in the rail and connected to the loading plate through an opening defined in an upper portion of the rail; and a plurality of inner wheels connected to two opposite sides of the driving portion in a second direction perpendicular to the first direction. Each of the plurality of inner wheels includes: a first wheel core; a second wheel core surrounding a first outer peripheral surface of the first wheel core when viewed in the second direction; and the fan blades are arranged between the first wheel core and the second wheel core. Each of the plurality of fan blades is disposed to be inclined at a first angle with respect to the second direction when viewed in the first direction.

Description

Equipment for conveying substrates Technical Field

[0001] This application claims priority to and all benefits derived therefrom of Korean Patent Application No. 10-2024-0152896, filed on October 31, 2024, the entire contents of which are incorporated herein by reference. Background Technology

[0002] This disclosure relates to an apparatus for transmitting a substrate.

[0003] Generally, a display device is characterized by a display panel comprising a plurality of pixels for generating images. The display panel is manufactured through multiple process chambers. Each pixel includes a transistor disposed on a substrate and a light-emitting element disposed on and connected to the transistor. The transistor and light-emitting element of the pixel are manufactured in the process chamber.

[0004] During the manufacturing of the display panel, the substrate is conveyed to a process chamber where predetermined devices are provided on the substrate. The substrate is then conveyed to a next process chamber for subsequent processes. A carrier is used to transport the substrate. The carrier moves along tracks to convey the substrate to the process chamber.

[0005] As the carrier moves along the track, friction between the carrier and the track generates particles. These particles can contaminate the substrate, creating a need for technologies to effectively remove these particles. Summary of the Invention

[0006] This disclosure provides an apparatus for conveying a substrate, which is capable of easily removing particles that may cause contamination.

[0007] An embodiment of the present invention provides an apparatus for conveying a substrate, the apparatus comprising: a loading plate; an inner substrate loading portion disposed on the loading plate; a track disposed below the loading plate and extending in a first direction; a drive portion disposed in a receiving space defined within the track and connected to the loading plate through an opening defined in the upper portion of the track; and a plurality of inner wheels connected to two opposite sides of the drive portion in a second direction perpendicular to the first direction, wherein each of the plurality of inner wheels comprises: a first wheel core; a second wheel core surrounding a first outer peripheral surface of the first wheel core when viewed in the second direction; and a plurality of fan blades disposed between the first wheel core and the second wheel core, and each of the plurality of fan blades being configured to be inclined at a first angle relative to the second direction when viewed in the first direction.

[0008] In one embodiment of the present invention, an apparatus for conveying a substrate includes: a loading plate; a substrate loading portion disposed on the loading plate; a driving portion disposed below the loading plate; and a plurality of wheels connected to two opposite sides of the driving portion in a first direction, wherein each of the wheels includes: a first wheel core; a second wheel core surrounding an outer peripheral surface of the first wheel core; and a plurality of fan blades disposed between the first wheel core and the second wheel core. Each of the wheels includes an inner surface facing the driving portion and an outer surface opposite to the inner surface, and each of the fan blades includes a first side adjacent to the inner surface of each of the wheels and a second side adjacent to the outer surface of each of the wheels, and when viewed in a second direction perpendicular to the first direction, the first side and the second side of the fan blades are disposed at different heights.

[0009] In one embodiment of the present invention, an apparatus for conveying a substrate includes: a loading plate; a substrate loading portion disposed on the loading plate; a driving portion disposed below the loading plate; and a plurality of wheels connected to two opposite sides of the driving portion in a specific direction. Each of the wheels includes: a first wheel core; a second wheel core surrounding an outer peripheral surface of the first wheel core; and a plurality of fan blades disposed between the first wheel core and the second wheel core. Each of the wheels includes an inner surface facing the driving portion and an outer surface opposite to the inner surface. Each of the fan blades includes a first side adjacent to the inner surface of each of the wheels and a second side adjacent to the outer surface of each of the wheels. A reference line extending from the second side of each of the fan blades in the specific direction is defined, and each of the fan blades is configured to be inclined at an acute angle relative to the reference line. Attached Figure Description

[0010] The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings:

[0011] Figure 1 is a block diagram of a panel manufacturing plant including an apparatus for conveying a substrate according to an embodiment of the present invention;

[0012] Figure 2 is a diagram of multiple vehicles and tracks arranged in the compartment shown in Figure 1;

[0013] Figure 3 is a diagram illustrating an example of a planar configuration of a substrate to be mounted on the carrier shown in Figure 2;

[0014] Figure 4 is a diagram illustrating an example of a display panel manufactured with pixels arranged on each unit substrate shown in Figure 3;

[0015] Figure 5 is an example diagram illustrating a cross-section of a pixel as shown in Figure 4;

[0016] Figure 6 is a cross-sectional view taken along line I-I' shown in Figure 2;

[0017] Figure 7 is a separate illustration of the drive unit and wheels arranged within the track shown in Figure 6;

[0018] Figure 8 is a diagram illustrating a more detailed configuration of the inner substrate mounting section shown in Figure 6;

[0019] Figure 9 is a top view of the mother substrate arranged in the loading space shown in Figure 8;

[0020] Figure 10 shows a front view of the vehicle and track shown in Figure 6, as seen from the front, defined by the direction of travel;

[0021] Figure 11 is a diagram illustrating the detailed configuration of a pair of wheels arranged in the second direction, selected from the wheels shown in Figure 7;

[0022] Figure 12 is a diagram illustrating the wheel shown in Figure 11, where the second wheel core has been removed, and the first wheel core and fan blades are shown separately.

[0023] Figure 13 is a front view of one of the fan blades shown in Figure 12;

[0024] Figure 14 is an example of the first wheel core and fan blades shown in Figure 12 from a second direction, wherein the outer surface of the first wheel core is visible;

[0025] Figure 15 is a perspective view of the comparison wheel according to a comparative embodiment;

[0026] Figure 16 is a cross-sectional view of two adjacent holes in one of the comparison wheels shown in Figure 15;

[0027] Figure 17 is an enlarged view of the vehicle and track shown in Figure 10;

[0028] Figure 18 is a diagram illustrating a comparison vehicle and track including a comparison wheel according to a comparative embodiment;

[0029] Figure 19 is a diagram illustrating the simulation results of airflow generated by wheels according to various embodiments of the present invention and the comparative wheel shown in Figure 15;

[0030] Figure 20 is a diagram illustrating the configuration of fan blades according to another embodiment of the present invention;

[0031] Figure 21 is a diagram illustrating the configuration of wheels according to another embodiment of the present invention;

[0032] Figure 22 is a diagram illustrating the configuration of one of the outer substrate mounting portions shown in Figure 1;

[0033] Figure 23 is a perspective view of the substrate transfer section shown in Figure 22;

[0034] Figure 24 is a cross-sectional view taken along line II-II' of Figure 23; and

[0035] Figures 25A to 25D illustrate the operation of one of the robotic arms set within the main body shown in Figures 22 and 23. Detailed Implementation

[0036] In this specification, it will also be understood that when a component (or area, layer, part) is referred to as being "on" another component, "connected to" or "attached to" another component, it may be directly disposed on, directly connected to or attached to the other component, or there may be an intervening third component.

[0037] The same reference numerals refer to the same elements throughout the figures. Furthermore, in the figures, the scale and dimensions (e.g., thickness) of the parts are enlarged for clarity.

[0038] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, “a,” “the,” and “at least one” do not indicate a limitation on quantity and are intended to include both the singular and the plural unless the context clearly indicates otherwise. For example, “an element” has the same meaning as “at least one element” unless the context clearly indicates otherwise. “At least one” should not be construed as limiting “a.” “Or” means “and / or.” The term “and / or” includes any and all combinations of one or more of the associated listed items.

[0039] Although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only for the purpose of distinguishing one component from another. For example, a first element referred to as a first element in one embodiment may be referred to as a second element in another embodiment without departing from the scope of the appended claims. Unless the context clearly indicates otherwise, the singular form also includes the plural form.

[0040] In addition, terms such as "below," "under," "above," and "upper" are used to describe the relationships between the components illustrated in the diagram. These terms can be relative concepts and are described based on the directions shown in the diagram.

[0041] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Furthermore, terms such as those defined in common dictionaries shall be interpreted as having the same meaning as they have in the context of the relevant art, and shall not be interpreted in an overly ideal or formal sense unless explicitly defined.

[0042] It will be understood that the terms “comprising” or “including” as used in this specification specify the presence of a descriptive feature, integer, step, operation, element, component, or combination thereof, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

[0043] Hereinafter, embodiments of the invention will be described with reference to the accompanying drawings.

[0044] Figure 1 is a block diagram of a panel manufacturing plant including a substrate conveying apparatus (hereinafter referred to as "substrate conveying apparatus") according to an embodiment of the present invention.

[0045] As an example, Figure 1 is shown as a plan view.

[0046] Referring to Figure 1, a panel manufacturing plant (FAT) may include multiple process chambers (CH) and substrate transfer equipment (STA). The process chambers (CH) may be positioned adjacent to the substrate transfer equipment (STA). Alternatively, the process chambers (CH) may be positioned surrounding the substrate transfer equipment (STA).

[0047] As an example, six process chambers CH are illustrated, but the number of process chambers CH is not limited to this. Process chambers CH may include process chambers 1 through 6: CH1, CH2, CH3, CH4, CH5, and CH6.

[0048] The substrate transfer device STA may include a compartment BOT, a fan FAN, and multiple external substrate loading sections OSL. In a plan view, the compartment BOT may have a long side extending parallel to a first direction DR1 and a short side extending parallel to a second direction DR2 that intersects the first direction DR1 perpendicularly. Therefore, the compartment BOT may extend longer in the first direction DR1 than in the second direction DR2.

[0049] In the following text, the direction that intersects substantially perpendicularly with the plane defined by the first direction DR1 and the second direction DR2 can be defined as the third direction DR3. Furthermore, in this specification, the term "plan view" may refer to the state as seen from the third direction DR3.

[0050] A fan (FAN) may be installed on the compartment bot. The fan (FAN) may include multiple fans (not shown) to blow air toward the compartment bot, thereby creating an airflow inside the compartment bot.

[0051] The outer substrate loading section (OSL) can be configured to surround the compartment (BOT). The OSL can be located between the process chamber (CH) and the compartment (BOT). As an example, six OSLs are shown, but the number of OSLs is not limited to this.

[0052] The outer substrate loading section (OSL) may include a first outer substrate loading section to a sixth outer substrate loading section (OSL1, OSL2, OSL3, OSL4, OSL5, and OSL6). The first outer substrate loading section (OSL1) to the sixth outer substrate loading section (OSL6) may be respectively configured to be adjacent to the first process chamber (CH1) to the sixth process chamber (CH6).

[0053] The first outer substrate loading section OSL1 to the sixth outer substrate loading section OSL6 can allow substrates processed in the first process chamber CH1 to the sixth process chamber CH6 to be loaded thereon, or allow substrates transported in the compartment BOT to be loaded thereon.

[0054] Figure 2 is a diagram illustrating multiple vehicles and tracks arranged in the compartment shown in Figure 1.

[0055] As an example, Figure 2 is shown as a floor plan.

[0056] Referring to Figures 1 and 2, the substrate transfer device (STA) may include a rail (RAL) and multiple carriers (VHCs). The rail (RAL) and carriers (VHCs) may be located within a compartment (BOT).

[0057] The track RAL may have a closed loop shape. The track RAL may extend within the compartment BOT along the edge of the compartment BOT. The track RAL may include multiple first straight segments ST1, multiple second straight segments ST2, and multiple curved segments CVP. The first straight segments ST1 and second straight segments ST2 may extend in a straight shape, and the curved segments CVP may extend in a curved shape.

[0058] Two first straight segments ST1 may extend parallel to the first direction DR1. Two second straight segments ST2 may be adjacent to both ends of the first straight segments ST1, extending outward from both ends of the first straight segments ST1, and may extend parallel to the second direction DR2. A curved segment CVP may extend from both ends of the first straight segments ST1 toward both ends of the second straight segments ST2. The curved segment CVP may have an outwardly convex curved shape.

[0059] Vehicles (VHCs) can be positioned on and move along the track (RAL). As an example, six vehicle VHCs are shown, but the number of vehicle VHCs is not limited to this.

[0060] The carrier VHC may include first carriers to sixth carriers VHC1, VHC2, VHC3, VHC4, VHC5, and VHC6. An inner substrate loading section (shown in Figures 8 and 9 below) may be disposed on the first carriers VHC1 to the sixth carriers VHC6, and the substrate may be loaded onto the inner substrate loading section. The first carriers VHC1 to the sixth carriers VHC6 may move along the track RAL, and the substrate may be conveyed by the first carriers VHC1 to the sixth carriers VHC6.

[0061] As an example, the first vehicle VHC1 to the sixth vehicle VHC6 are illustrated in a box shape, and a more detailed configuration of the first vehicle VHC1 to the sixth vehicle VHC6 will be shown in Figure 6 below.

[0062] The substrates processed in the first process chamber CH1 to the sixth process chamber CH6 can be transferred to the first carrier VHC1 to the sixth carrier VHC6 in the compartment BOT. The substrates can be moved along the track RAL from the first carrier VHC1 to the sixth carrier VHC6 and transferred to the first process chamber CH1 to the sixth process chamber CH6.

[0063] The first outer substrate loading unit OSL1 to the sixth outer substrate loading unit OSL6 can transfer substrates disposed in the first process chamber CH1 to the sixth process chamber CH6 to the first carrier VHC1 to the sixth carrier VHC6. Additionally, the first outer substrate loading unit OSL1 to the sixth outer substrate loading unit OSL6 can transfer substrates mounted on the first carrier VHC1 to the sixth carrier VHC6 to the first process chamber CH1 to the sixth process chamber CH6.

[0064] As an example, using the first carrier VHC1, one of the substrates to be processed can be transferred from outside the compartment BOT to inside the compartment BOT and loaded onto the first carrier VHC1. Inside the compartment BOT, the substrate disposed on the first carrier VHC1 can be transferred to the first process chamber CH1 via the first outer substrate loading section OSL1. In the first process chamber CH1, predetermined devices can be disposed on the substrate.

[0065] The substrate processed in the first process chamber CH1 can be transferred to the first carrier VHC1 via the first outer substrate loading unit OSL1. The first carrier VHC1, on which the substrate processed in the first process chamber CH1 is loaded, can move along the track RAL to a position adjacent to the second process chamber CH2.

[0066] Subsequently, the substrate mounted on the first carrier VHC1 can be transferred to the second process chamber CH2 via the second outer substrate loading unit OSL2. In the second process chamber CH2, a predetermined device can be mounted on the substrate. Subsequent processes for the substrate processed in the first process chamber CH1 can be performed in the second process chamber CH2.

[0067] The substrate processed in the second process chamber CH2 can be transferred to the first carrier VHC1 via the second outer substrate loading unit OSL2, and the first carrier VHC1 can move along the track RAL to a position adjacent to the third process chamber CH3. Subsequently, the substrate disposed on the first carrier VHC1 can be transferred to the third process chamber CH3 via the third outer substrate loading unit OSL3, and subsequent processes for the substrate processed in the second process chamber CH2 can be performed in the third process chamber CH3.

[0068] Through the same operation, the substrate mounted on the first carrier VHC1 can be transferred to the sixth process chamber CH6, and the substrate fully processed in the sixth process chamber CH6 can be loaded onto the first carrier VHC1. After the fully processed substrate is loaded onto the first carrier VHC1, the substrate can be returned to the outside of the compartment BOT.

[0069] Through similar operations, substrates disposed on second carriers VHC2 to sixth carriers VHC6 can be transferred to first process chambers CH1 to sixth process chambers CH6, and processes for the substrates can be performed in first process chambers CH1 to sixth process chambers CH6.

[0070] Although not shown, multiple robotic arms may be arranged between the compartment BOT and the first outer substrate loading units OSL1 to the sixth outer substrate loading units OSL6, and between the first outer substrate loading units OSL1 to the sixth outer substrate loading units OSL6 and the first process chamber CH1 to the sixth process chamber CH6. The substrate can be transported by the robotic arms. The robotic arms may also be arranged within the first outer substrate loading units OSL1 to the sixth outer substrate loading units OSL6. This configuration will be described in detail below.

[0071] Although not shown, a door can be defined as a path for substrate movement in a compartment BOT.

[0072] Figure 3 is a diagram illustrating an example of a planar configuration of substrates to be mounted on the first carrier VHC1 to the sixth carrier VHC6 shown in Figure 2.

[0073] Referring to Figure 3, the substrate M-SUB can be mounted on each of the first carriers VHC1 to the sixth carrier VHC6. Hereinafter, the substrate M-SUB is defined as a mother substrate. The mother substrate M-SUB may extend longer in the first direction DR1 than in the second direction DR2. The mother substrate M-SUB may include a plurality of unit substrates U-SUB.

[0074] The unit substrate U-SUB can be arranged along a first direction DR1 and a second direction DR2. The unit substrate U-SUB can extend longer in the second direction DR2 than in the first direction DR1. Pixels can be disposed on the unit substrate U-SUB through the aforementioned process chamber CH. After the pixels are disposed on the unit substrate U-SUB, the unit substrate U-SUB can be cut and separated from the mother substrate M-SUB. Pixels can be disposed on each of the unit substrates U-SUB to manufacture a display panel.

[0075] Figure 4 is an exemplary diagram illustrating the configuration of a display panel manufactured with pixels set on each of the unit substrates shown in Figure 3.

[0076] Referring to Figure 4, the display panel DP may have a rectangular shape in the plan view, having a long side extending in the first direction DR1 and a short side extending in the second direction DR2, but the shape of the display panel DP is not limited to this. The display panel DP may include a display area DA and a non-display area NDA surrounding the display area DA.

[0077] Display panel DP can be a light-emitting display panel. Display panel DP can be an organic light-emitting display panel or an inorganic light-emitting display panel. The emitting layer of an organic light-emitting display panel may include organic light-emitting materials. The emitting layer of an inorganic light-emitting display panel may include quantum dots, quantum rods, etc. Hereinafter, display panel DP is described as an organic light-emitting display panel.

[0078] The display panel DP may include multiple pixels PX, multiple scan lines SL1 to SLm, multiple data lines DL1 to DLn, multiple light emission lines EL1 to ELm, a first control line CSL1 and a second control line CSL2, a first power line PL1 and a second power line PL2, a connection line CNL, and multiple pads PD. Here, m and n are natural numbers greater than 1.

[0079] Pixel PX can be disposed in the display area DA. Each of the scan driver SDV and the light-emitting driver EDV can be disposed adjacent to each of the long sides of the display panel DP in the non-display area NDA. The data driver DDV can be disposed adjacent to one of the short sides of the display panel DP in the non-display area NDA. In a plan view, the data driver DDV can be adjacent to the bottom edge of the display panel DP.

[0080] Scan lines SL1 to SLm can extend in the second direction DR2 and connect to the pixel PX and the scan driver SDV. Data lines DL1 to DLn can extend in the first direction DR1 and connect to the pixel PX and the data driver DDV. Transmit lines EL1 to ELm can extend in the second direction DR2 and connect to the pixel PX and the transmit driver EDV.

[0081] The first power line PL1 may extend along the first direction DR1 and be disposed in the non-display area NDA. The first power line PL1 may be disposed between the display area DA and the light-emitting driver EDV.

[0082] The connecting line CNL may extend along the second direction DR2 and be arranged along the first direction DR1. The connecting line CNL may be connected to the first power line PL1 and the pixel PX. A first voltage may be applied to the pixel PX through the first power line PL1 and the connecting line CNL connected to each other.

[0083] The second power line PL2 can be located in the non-display area NDA. The second power line PL2 can extend along the long side of the display panel DP and the other short side of the display panel DP where the data driver DDV is not located. The second power line PL2 can be located outside the scan driver SDV and the light-emitting driver EDV.

[0084] Although not illustrated, a second power line PL2 may extend toward the display area DA and connect to the pixel PX. A second voltage having a lower level than the first voltage may be applied to the pixel PX via the second power line PL2.

[0085] The first control line CSL1 can be connected to the scan driver SDV and extends towards the lower end of the display panel DP in the plan view. The second control line CSL2 can be connected to the light-emitting driver EDV and extends towards the lower end of the display panel DP in the plan view. The data driver DDV can be located between the first control line CSL1 and the second control line CSL2.

[0086] The pad PD can be set on the display panel DP. The pad PD can be set closer to the lower end of the display panel DP than the data driver DDV. The data driver DDV, the first power line PL1, the second power line PL2, the first control line CSL1, and the second control line CSL2 can be connected to the pad PD. Data lines DL1 to DLn can be connected to the data driver DDV, and the data driver DDV can be connected to the pad PD corresponding to the data lines DL1 to DLn.

[0087] Although not illustrated, a timing controller for controlling the operation of the scan driver SDV, data driver DDV, and light-emitting driver EDV, as well as a voltage generator for generating the first and second voltages, can be mounted on a printed circuit board. The timing controller and voltage generator can be connected to corresponding pads PD via the printed circuit board.

[0088] The scan driver SDV generates multiple scan signals, which are applied to pixel PX via scan lines SL1 to SLm. The data driver DDV generates multiple data voltages, which are applied to pixel PX via data lines DL1 to DLn. The transmit driver EDV generates multiple transmit signals, which are applied to pixel PX via transmit lines EL1 to ELm.

[0089] Pixel PX can receive data voltage in response to a scan signal. Pixel PX can emit light with a brightness corresponding to the data voltage in response to a transmit signal to display an image. The emission time of pixel PX can be controlled by the transmit signal.

[0090] Each of the unit substrates U-SUB illustrated in Figure 3 corresponds to the display panel DP illustrated in Figure 4.

[0091] Figure 5 is an example diagram illustrating a cross-section of a pixel shown in Figure 4.

[0092] Referring to Figure 5, a pixel PX can be disposed on a substrate SUB and includes a transistor TR and a light-emitting element OLED. The substrate SUB can be defined by each of the unit substrates U-SUB shown in Figure 3. The light-emitting element OLED may include a first electrode AE, a second electrode CE, a hole control layer HCL, an electron control layer ECL, and a light-emitting layer EML. The first electrode AE ​​can be an anode electrode, and the second electrode CE can be a cathode electrode.

[0093] The transistor TR and the light-emitting element OLED can be disposed on the substrate SUB. A transistor TR is illustrated in the figure, but in essence, the pixel PX may include multiple transistors and at least one capacitor to drive the light-emitting element OLED.

[0094] The display area DA may include an emitting area PA corresponding to a pixel PX and a non-emitting area NPA surrounding the emitting area PA. The light-emitting element OLED may be disposed in the emitting area PA.

[0095] A buffer layer (BFL) may be disposed on the substrate (SUB), and the buffer layer (BFL) may be an inorganic layer. A semiconductor pattern may be disposed on the buffer layer (BFL). The semiconductor pattern may include polycrystalline silicon. However, embodiments of the present invention are not limited thereto, and the semiconductor pattern may include amorphous silicon or metal oxide.

[0096] Semiconductor patterns can be doped with N-type or P-type dopants. Semiconductor patterns can include highly doped and lightly doped regions. Highly doped regions can have higher conductivity than lightly doped regions and can essentially serve as the source and drain electrodes of a transistor (TR). Lightly doped regions can effectively correspond to the active portion (or channel) of the transistor.

[0097] The source portion S, active portion A, and drain portion D of the transistor TR can be provided by a semiconductor pattern. A first insulating layer INS1 can be disposed on the semiconductor pattern. The gate portion G of the transistor TR can be disposed on the first insulating layer INS1. A second insulating layer INS2 can be disposed on the gate portion G. A third insulating layer INS3 can be disposed on the second insulating layer INS2.

[0098] The connecting electrode CNE can be disposed between the transistor TR and the light-emitting element OLED, and connects the transistor TR to the light-emitting element OLED. The connecting electrode CNE may include a first connecting electrode CNE1 and a second connecting electrode CNE2.

[0099] A first connecting electrode CNE1 may be disposed on a third insulating layer INS3 and connected to the drain portion D through a first contact hole CTH1 defined in the first insulating layer INS1 to the third insulating layer INS3. A fourth insulating layer INS4 may be disposed on the first connecting electrode CNE1. A fifth insulating layer INS5 may be disposed on the fourth insulating layer INS4.

[0100] The second connecting electrode CNE2 may be disposed on the fifth insulating layer INS5. The second connecting electrode CNE2 may be connected to the first connecting electrode CNE1 through the second contact hole CTH2 defined in the fourth insulating layer INS4 and the fifth insulating layer INS5. The sixth insulating layer INS6 may be disposed on the second connecting electrode CNE2. Each of the first insulating layer INS1 to the sixth insulating layer INS6 may be an inorganic layer or an organic layer.

[0101] A first electrode AE ​​may be disposed on a sixth insulating layer INS6. The first electrode AE ​​may be connected to a second connecting electrode CNE2 through a third contact hole CTH3 defined in the sixth insulating layer INS6. A pixel defining layer PDL that exposes a predetermined portion of the first electrode AE ​​may be disposed on the first electrode AE ​​and the sixth insulating layer INS6. An opening PX_OP for exposing the predetermined portion of the first electrode AE ​​may be defined in the pixel defining layer PDL.

[0102] The hole control layer (HCL) can be disposed on the first electrode (AE) and the pixel definition layer (PDL). The HCL can also be disposed together in the emitter region (PA) and the non-emitter region (NPA). The HCL may include a hole transport layer and a hole injection layer.

[0103] The emission layer EML can be disposed on the hole control layer HCL. The emission layer EML can be disposed in the region corresponding to the opening portion PX_OP. The emission layer EML can include organic and / or inorganic materials. The emission layer EML can emit one of red, green, and blue light.

[0104] An electron control layer (ECL) can be disposed on the emitter layer (EML) and the hole control layer (HCL). The ECL can also be disposed together in the emitter region (PA) and the non-emitter region (NPA). The ECL may include an electron transport layer and an electron injection layer. A second electrode (CE) can be disposed on the ECL. The second electrode (CE) can also be disposed together in the emitter region (PA) and the non-emitter region (NPA).

[0105] A thin-film encapsulation layer (TFE) can be disposed on the light-emitting element (OLED). The TFE can also be disposed on the second electrode (CE) to cover the pixel (PX). The TFE may comprise at least two inorganic layers and an organic layer between the inorganic layers. The inorganic layers protect the pixel (PX) from moisture and / or oxygen. The organic layers protect the pixel (PX) from impurities such as dust particles.

[0106] A first voltage can be applied to the first electrode AE ​​via transistor TR, and a second voltage having a lower level than the first voltage can be applied to the second electrode CE. Holes and electrons injected into the light-emitting layer EML recombine with each other to form excitons, and when the excitons transition to the ground state, the light-emitting element OLED emits light.

[0107] The substrate SUB can be provided to the process chamber CH, and layers from the buffer layer BFL to the thin-film encapsulation layer TFE can be sequentially disposed on the substrate in the aforementioned process chamber CH. Additionally, the substrate SUB can be transported by the aforementioned carrier VHC.

[0108] Figure 6 is a cross-sectional view taken along line I-I' shown in Figure 2. Figure 7 is a separate illustration of the drive unit and wheels arranged within the track shown in Figure 6.

[0109] For example, Figures 6 and 7 are shown as perspective views.

[0110] The configurations of the first vehicle VHC1 through the sixth vehicle VHC6 can be identical. Accordingly, the configuration of the second vehicle VHC2, intercepted along line I-I', will be described below. Furthermore, for ease of explanation, the second vehicle VHC2, intercepted along line I-I', is depicted and described as vehicle VHC.

[0111] Referring to Figures 6 and 7, the substrate transfer device STA may further include an inner substrate loading section CST disposed on the carrier VHC. The inner substrate loading section CST may be defined as a box. The aforementioned mother substrate M-SUB may be loaded onto the inner substrate loading section CST. A more specific configuration of the inner substrate loading section CST will now be described in detail with reference to Figures 8 and 9.

[0112] The vehicle VHC may include a loading plate (LOP), a drive unit (DRV), a connecting unit (CNP), a guide plate (GIP), and multiple wheels (e.g., inner wheels) (WHL).

[0113] The loading plate LOP may have a flat shape defined by a first direction DR1 and a second direction DR2. An inner substrate loading section CST may be disposed on the loading plate LOP. The inner substrate loading section CST may be fixed to the loading plate LOP.

[0114] The drive unit DRV can be located below the load plate LOP. The drive unit DRV may extend longer in the first direction DR1 than in the second direction DR2. The drive unit DRV can be connected to the load plate LOP.

[0115] The connecting part CNP can be disposed below the loading plate LOP, and the drive unit DRV can be disposed below the connecting part CNP. The connecting part CNP can extend in the first direction DR1. The connecting part CNP can be disposed between the loading plate LOP and the drive unit DRV, connecting the loading plate LOP and the drive unit DRV to each other. Therefore, the drive unit DRV can be connected to the loading plate LOP through the connecting part CNP.

[0116] A guide plate GIP can be disposed between the loading plate LOP and the drive unit DRV. The guide plate GIP can be connected to opposite sides of the connecting unit CNP in the second direction DR2. The guide plate GIP can have a flat shape defined by the first direction DR1 and the second direction DR2. The guide plate GIP can extend in the first direction DR1.

[0117] Wheel WHL can be connected to opposite sides of the drive unit DRV in the second direction DR2. Wheel WHL can be arranged on both sides of the drive unit DRV along the first direction DR1. When viewed in the second direction DR2, wheel WHL can have a circular shape. Wheel WHL can include an inner surface IS facing the drive unit DRV in the second direction DR2 and an outer surface OS defined by the opposite surface of the inner surface IS.

[0118] Wheels WHL are rotatable in the same direction. The drive unit DRV transmits driving force to the wheels WHL to cause them to rotate. Each wheel WHL is rotatable about a rotation axis RX, which overlaps with the center of the wheel WHL and extends parallel to the second direction DR2. For example, when viewed in the second direction DR2, the wheels WHL are rotatable counterclockwise about the rotation axis RX.

[0119] The rotation axis RX can be defined as being adjacent to the lower side of the drive unit DRV. That is, the center of the wheel WHL that overlaps with the rotation axis RX can be adjacent to the lower side of the drive unit DRV.

[0120] As the wheel WHL rotates, the guide plate GIP and the loading plate LOP, connected to the connecting part CNP, become movable, and the inner substrate loading part CST on the loading plate LOP also becomes movable. As the wheel WHL rotates, the travel direction DDR of the loading plate LOP (e.g., one of the bidirectional first directions DR1) can be determined, and the forward direction FD of the loading plate LOP relative to the travel direction DDR can be defined. The forward direction FD can be defined as the space in front of the loading plate LOP relative to the travel direction DDR.

[0121] For example, the wheel WHL is shown schematically, but the wheel WHL can actually have a fan-shaped shape. The detailed configuration of the wheel WHL will be described in detail below with reference to Figures 11 and 12.

[0122] The track RAL can be located below the loading plate LOP and can extend in the first direction DR1. A receiving space ASP extending in the first direction DR1 can be defined within the track RAL. The drive unit DRV and the wheel WHL can be located within the receiving space ASP.

[0123] The opening OP can be defined in the upper part of the track RAL. The opening OP can be continuously defined in the receiving space ASP. In the plan view, the drive unit DRV, the connecting unit CNP, and the guide plate GIP can be arranged to overlap with the opening OP. The guide plate GIP can be arranged within the opening OP.

[0124] The drive unit DRV can be connected to the loading plate LOP via an opening OP. For example, the connecting part CNP connected to the drive unit DRV can extend upward through the opening OP and connect to the loading plate LOP provided on the track RAL.

[0125] The track RAL may include a bottom BP, multiple sidewalls SWP, and multiple covers COV. The bottom BP may have a flat shape defined by a first direction DR1 and a second direction DR2. The bottom BP may extend in the first direction DR1. The bottom BP may be disposed below the drive unit DRV and the wheel WHL. Multiple holes H may be defined in the bottom BP.

[0126] The bottom BP may include a first bottom BP1 and a second bottom BP2 connected to both sides of the first bottom BP1 in the second direction DR2. The hole H may be defined in the first bottom BP1.

[0127] The first bottom element BP1 can be located below the drive unit DRV and can overlap with the drive unit DRV in the plan view. The second bottom element BP2 can be located below the wheel WHL and can overlap with the wheel WHL in the plan view.

[0128] The drive unit DRV can be mounted on the first bottom BP1. The wheel WHL can be mounted on the second bottom BP2. When the wheel WHL rotates, the drive unit DRV can move along the first bottom BP1, and the wheel WHL can move along the second bottom BP2.

[0129] The sidewall SWP may extend upward from opposite sides of the second bottom BP2 in the second direction DR2 towards the third direction DR3. The sidewall SWP may extend in the first direction DR1. The sidewall SWP may have a flat shape defined by the first direction DR1 and the third direction DR3. The sidewall SWP may face the wheel WHL.

[0130] The cover portions COV may extend toward each other from the upper ends of the sidewalls SWP. The cover portions COV may extend in a first direction DR1 to face each other in a second direction DR2. The cover portions COV may have a flat shape defined by the first direction DR1 and the second direction DR2.

[0131] The accommodating space ASP can be defined as the space between the bottom BP, the side wall SWP, and the cover COV. The opening OP can be defined as the space between the cover COVs. The guide plate GIP can be disposed between the cover COVs. When the wheel WHL rotates, the guide plate GIP can move along the opening OP between the cover COVs.

[0132] Figure 8 is a diagram illustrating a more detailed configuration of the inner substrate loading section shown in Figure 6. Figure 9 is a top view showing the mother substrate arranged in the loading space shown in Figure 8.

[0133] For example, in Figure 9, the covered portion COV-1 is omitted.

[0134] Referring to Figures 8 and 9, a plurality of loading spaces LSPs can be defined in the inner substrate loading section CST. The loading spaces LSPs can be arranged along a first direction DR1 and defined in the inner substrate loading section CST so as to open in a second direction DR2. A mother substrate M-SUB can be provided in each of the loading spaces LSPs.

[0135] For example, in FIG6, the inner substrate loading section CST is shown as a box shape, but basically, as shown in FIG8, the loading space LSP opened in the second direction DR2 can be defined in the inner substrate loading section CST.

[0136] The inner substrate loading section CST may include a bottom BP-1, multiple sidewalls SWP-1, a cover COV-1, and multiple support rods SB. The bottom BP-1 may have a flat shape defined by a first direction DR1 and a second direction DR2. The bottom BP-1 may extend longer in the first direction DR1 than in the second direction DR2.

[0137] The sidewall SWP-1 may be arranged along a first direction DR1. The sidewall SWP-1 may have a flat shape defined by a second direction DR2 and a third direction DR3. The sidewall SWP-1 may extend upward from the bottom BP-1. The sidewall SWP-1 may extend upward from the two opposite sides of the bottom BP-1 in the first direction DR1 and from the center of the bottom BP-1.

[0138] A cover portion COV-1 may be disposed on the upper end of the sidewall SWP-1 to cover it. The cover portion COV-1 may extend longer in the first direction DR1 than in the second direction DR2. The cover portion COV-1 may have a flat shape defined by the first direction DR1 and the second direction DR2. The cover portion COV-1 may extend from the upper end of the sidewall SWP-1 in the first direction DR1.

[0139] The loading space LSP can be defined as the space between the bottom BP-1, the side wall SWP-1, and the cover COV-1.

[0140] The support rod SB can be connected to the side wall SWP-1. The support rod SB can be connected to the inner surfaces ISF of the side wall SWP-1 that face each other in the first direction DR1. The support rod SB can be arranged along the second direction DR2. The mother substrate M-SUB can be provided on the support rod SB.

[0141] The mother substrate M-SUB can be mounted on the support rod SB within the loading space LSP and loaded onto the inner substrate loading section CST. According to the above configuration, the mother substrate M-SUB can be loaded onto the inner substrate loading section CST and transported by the carrier VHC.

[0142] Figure 10 shows a front view of the vehicle and track shown in Figure 6, as seen from the front, defined by the direction of travel.

[0143] For example, in Figure 10, the hole H defined in the bottom BP is shown with a dashed line. Additionally, the top of the compartment BOOT and the fan FAN mounted on the compartment BOOT are schematically shown.

[0144] Referring to Figure 10, in the plan view, the drive unit DRV may overlap with the first bottom BP1. In the plan view, the hole H may be defined as overlapping with the drive unit DRV.

[0145] In the plan view, the wheel WHL may overlap with the second bottom BP2. The wheel WHL may be disposed on the second bottom BP2 and may contact the top surface of the second bottom BP2. The wheel WHL may rotate and move along the top surface of the second bottom BP2.

[0146] The sidewall SWP may face the outer surface OS of the wheel WHL. The wheel WHL may be spaced apart from the sidewall SWP. Therefore, a predetermined space can be defined between the sidewall SWP and the outer surface OS of the wheel WHL.

[0147] The guide plate GIP can be set in the opening OP and in the same plane as the cover COV.

[0148] The top of the fan (FAN) and compartment (BOT) can be mounted on the loading plate (LOP). The fan (not shown) of the fan (FAN) blows air into the compartment (BOT) through the opening (OP-1) of the compartment (BOT). Therefore, airflow (AF) can be provided within the compartment (BOT).

[0149] Airflow AF can be generated from top to bottom. Airflow AF can be supplied by a fan FAN toward the track RAL. Airflow AF can be discharged through the orifice H defined in the first bottom BP1.

[0150] Figure 11 is a diagram illustrating the detailed configuration of a pair of wheels arranged in the second direction, selected from the wheel shown in Figure 7; Figure 12 is a diagram illustrating the wheel shown in Figure 11, wherein the second wheel core is removed, and the first wheel core and the fan blades are illustrated separately.

[0151] For example, Figures 11 and 12 are shown as perspective views.

[0152] Referring to Figures 11 and 12, the wheel WHL may have a symmetrical shape with respect to the plane defined by the first direction DR1 and the third direction DR3, and may have substantially the same shape. Accordingly, the configuration of the wheel WHL disposed on the right side in Figures 11 and 12 will be described below by way of example.

[0153] The wheel WHL may include a wheel core WC and a protective layer PTV. When viewed in the second direction DR2, the outer peripheral surface OSF2 of the wheel core WC may have a circular shape. The wheel core WC may include a metal such as stainless steel or aluminum.

[0154] When viewed in the second direction DR2, the protective layer PTV can be configured to surround the outer peripheral surface OSF2 of the wheel hub WC. The protective layer PTV can have a predetermined elasticity and can protect the wheel hub WC. The protective layer PTV may include an elastic material such as urethane.

[0155] The wheel core WC may include a first wheel core WC1, a second wheel core WC2, and a plurality of fan blades FB. When viewed in the second direction DR2, the first wheel core WC1 may have a circular shape. The first wheel core WC1 may include a first outer peripheral surface OSF1 corresponding to the circular periphery of the first wheel core WC1.

[0156] The second wheel core WC2 may be configured to surround a first outer peripheral surface OSF1 of the first wheel core WC1 when viewed in the second direction DR2. When viewed in the second direction DR2, the second wheel core WC2 may have an annular shape. The second wheel core WC2 may include a second outer peripheral surface OSF2 corresponding to the circular periphery of the second wheel core WC2. The second outer peripheral surface OSF2 may define the outer peripheral surface OSF2 of the wheel core WC.

[0157] When viewed in the second direction DR2, the protective layer PTV can be configured as the second outer peripheral surface OSF2 surrounding the second wheel core WC2. The protective layer PTV can be defined as the tire.

[0158] Fan blades FB can be disposed between the first wheel core WC1 and the second wheel core WC2. Fan blades FB can be connected to the first wheel core WC1 and the second wheel core WC2. For example, each of the fan blades FB can be provided integrally with the first wheel core WC1 and the second wheel core WC2 (i.e., as a single unit). Fan blades FB can have a flat plate shape. Fan blades FB can be configured to be tilted relative to a second direction DR2.

[0159] Figure 13 is a front view of one of the fan blades shown in Figure 12. Figure 14 is a view of the first hub and fan blades shown in Figure 12 from a second direction, where the outer surface of the first hub is visible.

[0160] Figure 13 can be defined as a front view, and Figure 14 can be defined as a side view.

[0161] Referring to Figures 12 and 13, each of the fan blades FB can be configured to be tilted at a first angle θ1 relative to the second direction DR2 when viewed in the first direction DR1. For example, the contact portion between the first outer peripheral surface OSF1 and the underside of the fan blade FB is illustrated in gray.

[0162] The fan blade FB may include a first side S1 adjacent to the inner surface IS of the wheel WHL and a second side S2 adjacent to the outer surface OS of the wheel WHL. The first side S1 adjacent to the inner surface IS and the second side S2 adjacent to the outer surface OS may correspond to the two sides of the contact portion between the first outer peripheral surface OSF1 and the lower side of the fan blade FB.

[0163] When viewed in the first direction DR1, a reference line SLI extending from the second side S2 of the fan blade FB can be defined in the second direction DR2. The reference line SLI may overlap with the first outer peripheral surface OSF1. The reference line SLI may extend in a direction perpendicular to the plane of the outer surface OS and the inner surface IS.

[0164] Each of the fan blades FB can be set to tilt, thereby defining an acute angle relative to the baseline SLI. In other words, the first angle θ1 can be an acute angle. For example, the first angle θ1 can be in the range of approximately 10 degrees to approximately 45 degrees.

[0165] As shown in Figure 13, when viewed in the first direction DR1, the first side S1 and the second side S2 of each of the fan blades FB can be set at different heights. For example, when viewed in the first direction DR1, the first side S1 of each of the fan blades FB can be set lower than the second side S2 of each of the fan blades FB in the third direction DR3.

[0166] The total number of fan blades FB in each round WHL can be 4n, where n is a natural number greater than 0. For example, 12 fan blades FB are exemplified in each round WHL; however, the number of fan blades FB is not limited to this.

[0167] Referring to Figures 12 and 14, when viewed in the second direction DR2, each of the fan blades FB can be configured to be tilted, thereby defining a second angle θ2 relative to the normal NL, which extends in a direction perpendicular to the axis of rotation RX and intersects the contact portion P between the second side S2 and the outer surface OS. For example, the contact portion P between the fan blade FB (e.g., the second side S2) and the first outer peripheral surface OSF1 (e.g., the outer surface OS) is shown as a dashed line.

[0168] The second angle θ2 can be an acute angle. For example, the second angle θ2 can be in the range of approximately 10 degrees to approximately 45 degrees. Each of the fan blades FB can be set to be tilted relative to the normal NL in the direction of rotation RD of the wheel WHL.

[0169] Referring to Figures 11 to 14, the space defined between the fan blades FB can be defined as the airflow orifice AFH. When the wheel WHL rotates, the fan blades FB can generate airflow AF-1 according to the structure of the fan blades FB. When the wheel WHL rotates, airflow AF-1 can be generated from the internal space ISP between the wheel WHL toward the external space OSP of the wheel WHL, which is opposite to the internal space ISP.

[0170] Figure 15 is a perspective view of the comparison wheel according to a comparative embodiment. Figure 16 is a cross-sectional view of two adjacent holes in one of the comparison wheels shown in Figure 15.

[0171] For example, Figure 15 is a perspective view corresponding to the configuration in Figure 11.

[0172] Referring to Figures 15 and 16, each of the comparison wheels WHL' may include a comparison wheel core WC' and a protective layer PTV surrounding the outer peripheral surface of the comparison wheel core WC'. A plurality of holes H' may be defined in the comparison wheel core WC' adjacent to the protective layer PTV. The holes H' may extend parallel to the second direction DR2.

[0173] Figure 17 is an enlarged view of the vehicle and track shown in Figure 10.

[0174] For example, in Figure 17, the inner substrate loading section CST and the loading plate LOP of the carrier VHC are omitted, and the airflow generated by the fan FAN is illustrated.

[0175] Referring to Figures 11, 12, and 17, friction may occur between the protective layer PTV and the second bottom layer BP2 when the wheel WHL rotates. Due to the wear caused by friction on the protective layer PTV, particulate PTC may be generated from the protective layer PTV. When the particulate PTC is supplied to the mother substrate M-SUB loaded onto the inner substrate loading section CST, the mother substrate M-SUB may be contaminated.

[0176] Particle PTC can be removed by airflow AF generated by the fan FAN inside the compartment BOT. For example, when airflow AF is discharged through orifice H defined in the first bottom BP1, particle PTC can be discharged through orifice H together with airflow AF.

[0177] Particle PTC generated from the protective layer PTV may accumulate on the second bottom BP2 between the wheel WHL and the sidewall SWP. Airflow AF may be generated toward the hole H and may not be provided on the second bottom BP2 between the wheel WHL and the sidewall SWP.

[0178] When the wheel WHL rotates, the airflow AF-1 outside the guide wheel WHL can be generated by the fan blades FB. The airflow AF-1 generated by the fan blades FB can have a predetermined velocity. The velocity of the airflow AF-1 can correspond to the intensity of the airflow. In one embodiment, the minimum velocity of the airflow AF-1 on the portion of the second bottom BP2 located between the outer surface OS of the wheel WHL and the side wall SWP can be about 1.4 meters per second (m / s).

[0179] The airflow AF-1 generated by the fan blades FB can have a high velocity capable of dispersing particulate PTC. Airflow AF-1 can disperse the particulate PTC accumulated on the second bottom BP2 between the wheel WHL and the sidewall SWP. In this case, the particulate PTC can be discharged through the hole H by airflow AF-1 and airflow AF. Accordingly, the particulate PTC can be removed more easily, thereby preventing contamination of the mother substrate M-SUB.

[0180] Figure 18 is a diagram illustrating a comparison vehicle including a comparison wheel and a track according to a comparative embodiment.

[0181] For example, Figure 18 is a front view corresponding to the configuration in Figure 17.

[0182] Referring to Figures 15, 16, and 18, the comparison carrier VHC' may include a comparison wheel WHL'. Similar to the description in Figure 17, particulate PTC may accumulate on the second bottom BP2 between the comparison wheel WHL' and the sidewall SWP.

[0183] As shown in Figures 15 and 16, an aperture H' parallel to the second direction DR2 can be defined in the comparison wheel WHL'. In this case, an airflow AF-2 smaller than the aforementioned airflow AF-1 can be generated through the aperture H'.

[0184] The airflow AF-2 passing through orifice H' may not have a sufficient velocity to disperse the PTC particles accumulated on the second bottom BP2. Therefore, the airflow AF-2 passing through orifice H' may not be able to disperse the PTC particles accumulated on the second bottom BP2. As a result, the PTC particles accumulated on the second bottom BP2 cannot be removed (see Figure 18).

[0185] In one embodiment of the invention, the wheel WHL includes inclined fan blades FB, which generate a stronger airflow AF-1. Accordingly, the particulate PTC accumulated on the second bottom BP2 can be more easily removed by the stronger airflow AF-1 generated by the fan blades FB.

[0186] Figure 19 is a diagram illustrating the simulation results of airflow generated by wheels according to various embodiments of the present invention and the comparative wheel shown in Figure 15.

[0187] Referring to Figure 19, the number of fan blades in wheels WHL, WHL-1, and WHL-2 according to embodiments of the present invention can be varied. Wheel WHL may have twelve fan blades FB, wheel WHL-1 may have eight fan blades FB, and wheel WHL-2 may have four fan blades FB. For example, the airflow holes AFH between the fan blades of wheels WHL, WHL-1, and WHL-2 are illustrated as being in a horizontal state.

[0188] The average wind speed is the value measured in the first region AA1 of the hole H' or airflow hole AFH, and the minimum wind speed is the value measured in the second region AA2 on the second bottom BP2 under the same conditions (e.g., wheels WHL', WHL, WHL-1 and WHL-2 rotate at the same number of revolutions per minute (rpm)).

[0189] In the comparison wheel WHL', the average wind speed was measured to be approximately 1.55 m / s, and the minimum wind speed was approximately 0.1 m / s. In the wheel WHL according to one embodiment, the average wind speed was measured to be approximately 3.1 m / s, and the minimum wind speed was approximately 1.6 m / s. In the wheel WHL-1 according to another embodiment, the average wind speed was measured to be approximately 2.7 m / s, and the minimum wind speed was approximately 1.4 m / s. In the wheel WHL-2 according to yet another embodiment, the average wind speed was measured to be approximately 1.9 m / s, and the minimum wind speed was approximately 1.3 m / s.

[0190] The minimum wind speed of wheels WHL, WHL-1, and WHL-2 can be higher than that of the comparison wheel WHL'. Therefore, particulate PTC can be dispersed more effectively by the airflow generated by wheels WHL, WHL-1, and WHL-2. A wind speed of at least approximately 1.4 m / s is required for effective dispersion of particulate PTC.

[0191] When the comparison wheel WHL' and wheels WHL, WHL-1, and WHL-2 are driven, heat can be generated in the comparison wheel cores WC' and WC. This heat can raise the temperature of the protective layer PTV. When the protective layer PTV is heated, its lifespan may be reduced.

[0192] Airflow can cool metal, and the stronger the airflow, the more the metal can be cooled. As mentioned above, the wind speed of wheels WHL, WHL-1, and WHL-2 can be higher than that of the comparison wheel WHL'. In this case, the wheel core WC of wheels WHL, WHL-1, and WHL-2 can be further cooled compared to the comparison wheel core WC' of the comparison wheel WHL'.

[0193] Therefore, the protective layer PTV installed on wheels WHL, WHL-1, and WHL-2 heats up less than the protective layer PTV installed on the comparison wheel WHL'. As a result, the lifespan of the protective layer PTV installed on wheels WHL, WHL-1, and WHL-2 is longer than that of the protective layer PTV installed on the comparison wheel WHL'.

[0194] Figure 20 is a diagram illustrating the configuration of fan blades according to another embodiment of the present invention.

[0195] For example, Figure 20 is a perspective view corresponding to the configuration in Figure 12.

[0196] Referring to FIG20, in another embodiment of the invention, unlike the fan blades FB shown in FIG12, each fan blade FB-1 of wheel WHL-3 may have a wave shape.

[0197] Figure 21 is a diagram illustrating the configuration of wheels according to another embodiment of the present invention.

[0198] For example, Figure 21 is a perspective view corresponding to the configuration in Figure 11.

[0199] Referring to Figure 21, the fan blade FB of wheel WHL-4 can be manufactured separately from the first wheel core WC1 and the second wheel core WC2, and can be connected to the first wheel core WC1 and the second wheel core WC2. For example, the fan blade FB can be welded to the first wheel core WC1 and the second wheel core WC2. However, it is not limited to this, and the fan blade FB can also be connected to the first wheel core WC1 and the second wheel core WC2 by fastening units such as screws.

[0200] Figure 22 is a diagram illustrating the configuration of one of the outer substrate loading sections shown in Figure 1. Figure 23 is a perspective view of the substrate transport section shown in Figure 22. Figure 24 is a cross-sectional view taken along line II-II' of Figure 23.

[0201] For example, the outer substrate loading section OSL shown in FIG22 may be one of the outer substrate loading sections OSL that is adjacent to the long side of the compartment BOT shown in FIG1.

[0202] Referring to Figures 22, 23, and 24, the outer substrate loading section OSL may include a first substrate loading section SLO1, a second substrate loading section SLO2, and a substrate transfer section STP. The first substrate loading section SLO1 receives substrates loaded onto the inner substrate loading section CST. The first substrate loading section SLO1 and the second substrate loading section SLO2 may be spaced apart in the second direction DR2. The substrate transfer section STP may be disposed between the first substrate loading section SLO1 and the second substrate loading section SLO2.

[0203] The first substrate loading section SLO1 and the second substrate loading section SLO2 may have a configuration substantially similar to that of the inner substrate loading section CST described above. The aforementioned mother substrate M-SUB may be temporarily stored in the first substrate loading section SLO1 and the second substrate loading section SLO2.

[0204] The substrate transfer unit STP may include a pair of tracks RAL-1, a drive unit DRV-1, a main body MB, multiple wheel covers CV, and multiple wheels WHL-5. The tracks RAL-1 may extend parallel to each other in the first direction DR1. In the plan view, the drive unit DRV-1 may be disposed between the tracks RAL-1.

[0205] The robotic arm RA can be housed within the main body MB. The configuration of the robotic arm RA will be shown in Figures 25A to 25D below.

[0206] The drive unit DRV-1, wheel cover CV, and wheel WHL-5 can be installed below the main body MB. The wheel cover CV and wheel WHL-5 can be connected to the opposite sides of the drive unit DRV-1 in the second direction DR2. The wheel cover CV and wheel WHL-5 can be installed on the track RAL-1.

[0207] Wheel WHL-5 can be configured to contact the top surface of each of the rails RAL-1. Wheel caps CV can be respectively provided on wheel WHL-5 to cover wheel WHL-5. Wheel WHL-5 can be defined as "outer wheel".

[0208] The drive unit DRV-1 transmits driving force to the wheel WHL-5 to rotate it. The wheel WHL-5 can rotate about a rotation axis parallel to the second direction DR2. The wheel WHL-5 can rotate and move along the track RAL-1. Therefore, when the wheel WHL-5 rotates, the drive unit DRV-1 and the main body MB can move along the track RAL-1.

[0209] In an embodiment of the invention, as shown in FIG24, wheel WHL-5 may have the same configuration as the wheel WHL described above. Wheel WHL-5 may rotate clockwise or counterclockwise about the second direction DR2. Therefore, drive unit DRV-1 and main body MB may reciprocate along track RAL-1 in the first direction DR1.

[0210] Because wheel WHL-5 has the same configuration as wheel WHL, when wheel WHL-5 moves in the left direction (which is one of the directions of the first direction DR1), an airflow can be generated towards the outside of wheel WHL-5. Therefore, in the substrate transfer section STP, particles generated by the friction between wheel WHL-5 and track RAL-1 can be dispersed by the airflow generated by wheel WHL-5.

[0211] Figures 25A to 25D illustrate the operation of one of the robotic arms set within the main body shown in Figures 22 and 23.

[0212] Referring to FIG25A, the substrate transfer unit STP may include a support unit SUP disposed within the main body MB and a robotic arm RA connected to the support unit SUP, the robotic arm RA also being disposed within the main body MB. For example, the robotic arm RA disposed within the main body MB is illustrated in FIGS. 25A to 25D; however, in general, multiple robotic arms may be disposed within the main body MB.

[0213] The robotic arm RA may have a folding structure that allows it to expand and retract in the second direction DR2. Additionally, the robotic arm RA may be coupled to the support SUP for rotation. For example, the robotic arm RA may rotate about a rotation axis RX' defined in the support SUP, and the rotation axis RX' may be defined parallel to the third direction DR3.

[0214] When the robotic arm RA extends in the second direction DR2, the robotic arm RA can extend outward from the body MB. In Figures 22 and 23, the body MB is illustrated as a simplified box shape; however, the body MB can be opened substantially in the second direction DR2 to accommodate the movement of the robotic arm RA.

[0215] Referring to Figures 22 and 25B, the robotic arm RA can extend in the second direction DR2 and extend toward one of the first substrate loading section SLO1 and the mother substrate M-SUB disposed on the robotic arm RA. As an example, in Figure 25B, the first substrate loading section SLO1 is illustrated by dashed lines.

[0216] Referring to Figures 22 and 25C, the robotic arm RA can retract in the second direction DR2, thereby allowing the mother substrate M-SUB to be positioned within the body MB.

[0217] Referring to Figures 22, 25C, and 25D, the robotic arm RA can rotate about the rotation axis RX' and then extend toward the second substrate loading section SLO2 in the second direction DR2. The mother substrate M-SUB disposed on the robotic arm RA can be loaded onto the second substrate loading section SLO2. As an example, in Figure 25D, the second substrate loading section SLO2 is illustrated by dashed lines.

[0218] Although not illustrated, additional robotic arms may be provided between the first substrate loading section SLO1 and the compartment BOT, and between the second substrate loading section SLO2 and the process chamber CH. These additional robotic arms allow the mother substrate M-SUB to be transferred from the carrier VHC to the first substrate loading section SLO1, or from the first substrate loading section SLO1 to the carrier VHC. Furthermore, the additional robotic arms can transfer the mother substrate M-SUB from the second substrate loading section SLO2 to the process chamber CH, or from the process chamber CH to the second substrate loading section SLO2.

[0219] The substrate transfer unit STP can reciprocate along the first direction DR1 and move to the position where the first substrate loading unit SLO1 and the second substrate loading unit SLO2, in which the mother substrate M-SUB to be transferred is disposed, are located. By rotating the aforementioned wheel WHL-5, the main body MB can move along the track RAL-1 along the first direction DR1, so that the robotic arm RA can move to the position where the mother substrate M-SUB to be transferred is disposed.

[0220] According to one embodiment of the present invention, the wheels of the carrier in the substrate conveying device can generate an airflow directed from the inside to the outside, thereby dispersing contaminant particles accumulated between the wheels and the track, and allowing for easy removal of contaminant particles.

[0221] Although embodiments of this disclosure have been described, it should be understood that various changes and modifications can be made by those skilled in the art within the spirit and scope of this disclosure as claimed herein. Furthermore, the embodiments disclosed herein are not intended to limit the technical ideas of this disclosure, and all technical ideas within the appended claims and their equivalents should be construed as being included within the scope of this disclosure.

Claims

1. An apparatus for conveying a substrate, the apparatus comprising: Loading plate; inner substrate loading part, disposed on the loading plate; A track is disposed below the loading plate and extends in a first direction; A drive unit is disposed in a receiving space defined within the track and is connected to the loading plate through an opening defined in the upper part of the track; and a plurality of inner wheels connected to two opposite sides of the drive unit in a second direction perpendicular to the first direction, wherein each of the plurality of inner wheels includes: a first wheel core; a second wheel core surrounding a first outer peripheral surface of the first wheel core when viewed in the second direction; and a plurality of fan blades disposed between the first wheel core and the second wheel core, wherein each of the plurality of fan blades is configured to be inclined at a first angle relative to the second direction when viewed in the first direction.

2. The device according to claim 1, wherein each of the plurality of fan blades has a flat plate shape.

3. The device of claim 1, wherein each of the plurality of inner wheels includes an inner surface facing the drive unit and an outer surface opposite to the inner surface, and each of the plurality of fan blades includes a first side adjacent to the inner surface of each of the plurality of inner wheels and a second side adjacent to the outer surface of each of the plurality of inner wheels, wherein, When viewed in the first direction, a reference line extending from the second side of each of the plurality of fan blades in the second direction to overlap with the first outer peripheral surface of the first wheel core is defined, and each of the plurality of fan blades is configured to be inclined at an acute angle relative to the reference line.

4. The device according to claim 3, wherein, When viewed in the first direction, the first side of each of the plurality of fan blades and the second side of each of the plurality of fan blades are positioned at different heights.

5. The device of claim 3, wherein the plurality of inner wheels are configured to rotate in the same direction about a rotation axis parallel to the second direction, and when viewed from the first direction which is the travel direction of the loading plate, the first side of each of the plurality of fan blades is configured to be lower than the second side of each of the plurality of fan blades.

6. The device according to claim 3, wherein, When the inner wheel rotates, airflow is generated from the internal space between the multiple inner wheels toward the external space opposite to the internal space of the inner wheel through multiple airflow holes defined between the multiple fan blades.

7. The device of claim 6, wherein the track comprises: Sidewalls, facing the outer surface of each of the plurality of inner wheels; And at the bottom, located below the inner wheel, wherein the minimum velocity of the airflow on the portion at the bottom between the outer surface of each of the plurality of inner wheels and the sidewall is 1.4 meters per second.

8. The device according to claim 5, wherein, When viewed in the second direction, each of the plurality of fan blades is configured to be inclined at a second angle relative to the normal, which extends in a direction perpendicular to the axis of rotation and intersects the contact portion between the second side and the outer surface.

9. The device according to claim 8, wherein the second angle is an acute angle.

10. The device of claim 8, wherein each of the plurality of fan blades is configured to be inclined relative to the normal in the rotational direction of the inner wheel.

11. The device according to claim 1, wherein, When viewed in the second direction, each of the plurality of inner wheels further includes a protective layer surrounding a second outer peripheral surface of the second wheel core, the protective layer having a predetermined elasticity.

12. The device according to claim 1, wherein the total number of fan blades in each of the plurality of inner wheels is 4n, where n is a natural number greater than 0.

13. The device of claim 1, further comprising a fan disposed on the loading plate and configured to provide airflow toward the track.

14. The device of claim 13, wherein the track includes a bottom disposed below the drive unit, and a plurality of holes are defined in the bottom through which the airflow is discharged.

15. The device of claim 1, wherein each of the plurality of fan blades is provided integrally with the first wheel hub and the second wheel hub.

16. The device of claim 1, wherein each of the plurality of fan blades has a wavy shape.

17. The device of claim 1, wherein each of the plurality of fan blades is manufactured separately from the first wheel hub and the second wheel hub, and is connected to the first wheel hub and the second wheel hub.

18. The device according to any one of claims 1 to 17, further comprising: A first substrate loading section is configured to receive a substrate loaded onto the inner substrate loading section; The second substrate loading portion is spaced apart from the first substrate loading portion in the second direction; The substrate transfer unit is disposed between the first substrate loading unit and the second substrate loading unit, wherein the substrate transfer unit includes: a main body; a robotic arm disposed within the main body and capable of extending toward the first substrate loading unit and the second substrate loading unit; and a plurality of outer wheels disposed below the main body, wherein the outer wheels have the same configuration as the inner wheels.

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