Multi-stage oil-free linear valved compressor

Abstract

The embodiment of the invention provides a multi-stage oil-free linear valved compressor which comprises a compressor device, and the compressor device comprises a driving assembly and a stepped compression mechanism. The stepped compression mechanism comprises a compression piston and a cylinder body, the compression piston is provided with protrusions in the first direction to form a stepped shape, and multiple sections of air cylinders which are different in radius and communicate with one another are arranged in the cylinder body in the first direction to form multiple sections of unequal-diameter air cylinder bodies. The compression piston is in clearance fit with the multiple sections of cylinder bodies with different diameters to form at least two compression cavities with different radiuses; and the driving assembly is used for driving the compression piston to do reciprocating motion in the compression cavity in the first direction to achieve multi-stage gas compression. Multi-stage gas compression is achieved through the stepped compression mechanism, the problems of pollution, vibration and low efficiency of a traditional compressor in an oil-free environment are solved, and the oil-free compressor has the advantages of oil-free operation, efficient compression, low vibration and high reliability.

Description

Technical Field

[0001] This application relates to the technical field of mechanical manufacturing, and in particular to a multi-stage oil-free linear valved compressor. Background Technology

[0002] In industrial fields such as food processing, pharmaceutical manufacturing, semiconductor production, cryogenic engineering, and high-purity gas transportation, the purity and stability of compressed gases play a decisive role in product quality. For example, in the food industry, compressed gases are used in nitrogen filling for packaging and modified atmosphere packaging; if the gas contains oil or impurities, it may lead to food contamination. In the pharmaceutical field, high-purity compressed gases are key media in drug production and laboratory analysis; oil contamination can directly affect the purity of drug components and the accuracy of experimental data. In semiconductor manufacturing, processes such as wafer cleaning and etching require ultra-high purity compressed gases; any particles or oil molecules can cause wafer defects. In cryogenic engineering, such as liquid helium temperature refrigeration systems, the purity of the compressed gas directly affects refrigeration efficiency and system stability. Furthermore, helium and other difficult-to-compress gases are widely used in high-end fields such as nuclear magnetic resonance imaging and aerospace; their compression process must balance high pressure ratio output with gas molecule leakage control.

[0003] However, traditional compressors have piston lateral forces due to the crankshaft-connecting rod drive structure, which easily leads to vibration and wear problems, limiting the life and reliability of oil-free compressors.

[0004] Therefore, there is an urgent need for a multi-stage oil-free linear compressor with valves. A single compressor achieves multi-stage compression, integrates an intermediate heat exchanger, can achieve high-pressure ratio output, and has advantages such as being oil-free, having low vibration, and having a long service life. The structure is very simple and compact, without complex and messy piping connections. Summary of the Invention

[0005] This application provides a multi-stage oil-free linear valved compressor, which effectively solves technical problems such as oil-free compressors, low vibration, and long service life, and realizes multi-stage compression and high pressure ratio output of a single compressor.

[0006] In a first aspect, embodiments of this application provide a multi-stage oil-free linear compressor with valves, comprising:

[0007] A compressor unit, the compressor unit including a drive assembly and a stepped compression mechanism;

[0008] The stepped compression mechanism includes a compression piston and a cylinder. The compression piston is provided with a protrusion along a first direction to form a stepped shape. The cylinder has multiple interconnected cylinders with different radii along the first direction to form a multi-section unequal diameter cylinder body. The compression piston and the multi-section unequal diameter cylinder body are clearance-fitted to form at least two compression chambers with different radii.

[0009] A drive assembly is used to drive the compression piston to reciprocate within the compression chamber along a first direction to achieve multi-stage gas compression.

[0010] In one possible implementation, the multi-section unequal diameter cylinder body includes at least three unequal diameter cylinder bodies consisting of a first cylinder, a second cylinder, and a third cylinder arranged sequentially along a first direction;

[0011] The cylinders of the first cylinder, the second cylinder, and the third cylinder are interconnected to form an air passage;

[0012] The cylinders of the first cylinder, the second cylinder, and the third cylinder have different radii, forming two compression chambers with different radii.

[0013] In one possible implementation, the compressor device further includes an intermediate base, and the compressor device is provided in two parts, namely a first compressor unit and a second compressor unit, which are symmetrically arranged on the intermediate base along a first direction;

[0014] The air passages of the first compressor unit and the second compressor unit are connected in series to achieve multi-stage high-pressure ratio compression output;

[0015] Alternatively, the air passages of the first compressor unit and the second compressor unit can be connected in parallel to achieve multi-stage high-flow compression output.

[0016] In one possible implementation, the drive assembly includes a drive source and a flexible rod;

[0017] The drive source includes a housing, a motor stator, a motor mover, and a spring assembly. The motor stator is embedded in the housing, and the motor mover is movably disposed within the motor stator. The motor mover is connected to the compression piston via the flexible rod and is used to drive the compression piston to reciprocate within the compression chamber along a first direction.

[0018] The spring assembly is rigidly connected to the motor actuator.

[0019] In one possible implementation, the motor actuator of the first compressor unit and the motor actuator of the second compressor unit form a counter-moving structure;

[0020] It also includes a controller, which uses the drive source of the compressor device on one side as the main motor and the drive source of the compressor device on the other side as the slave motor. The controller controls the slave motor to run synchronously with the main motor, so that the motors on both sides perform synchronous reciprocating motion in opposite directions.

[0021] In one possible implementation, the drive assembly includes a wall cylinder and an end plate. The wall cylinder is fixedly sleeved in the inner hole of the motor stator, the outer periphery of the wall cylinder is sealed to the outer shell, and the two ends of the wall cylinder are respectively sealed to the end plate. The motor mover is movably inserted inside the wall cylinder through a first hydrostatic air bearing.

[0022] In one possible implementation, the compression piston is movably mounted on the multi-section unequal diameter cylinder body via a second hydrostatic air bearing, and a preset gap is reserved between the outer peripheral surface of the compression piston and the inner bore surface of the multi-section unequal diameter cylinder body to form the air bearing cavity of the hydrostatic air bearing.

[0023] Both ends of the compression piston are provided with throttles, which are connected to the air flotation chamber. High-pressure gas enters the air flotation chamber through the throttles to form an air film, which is used to provide radial support for the compression piston.

[0024] A first one-way valve is provided on the side of the compression piston near the intermediate base, and a second one-way valve is provided between the air inlet of the first one-way valve and the air inlet of the multi-section unequal diameter cylinder body.

[0025] In one possible implementation, the compressor unit includes an interstage heat exchange unit sleeved on the outside of the multi-section unequal-diameter cylinder body;

[0026] The interstage heat exchange unit includes a heat exchanger housing, with internal fins on the inner side of the heat exchanger housing and external fins on the outer side of the heat exchanger housing. The internal fins are arranged to fit the outer peripheral surface of the multi-section unequal diameter cylinder.

[0027] The heat exchanger is internally divided into multiple heat exchange chambers by a sealed structure, and each heat exchange chamber is corresponding to the compression chamber of the multiple unequal diameter cylinder body.

[0028] In one possible implementation, the compressor unit is provided with a mounting bracket, and the compressor unit is mounted on an external device via the mounting bracket.

[0029] In one possible implementation, the present application provides a multi-stage oil-free linear valved compressor that achieves multi-stage gas compression through a stepped compression mechanism. This solves the problems of pollution, vibration, and low efficiency of traditional compressors in an oil-free environment, and has the advantages of oil-free operation, high-efficiency compression, low vibration, and high reliability. Attached Figure Description

[0030] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0031] Figure 1 A schematic diagram of the overall structure of the multi-stage oil-free linear valved compressor provided in this application;

[0032] Figure 2 An internal sectional view of the multi-stage oil-free linear valved compressor provided in this application;

[0033] Figure 3 A schematic diagram of the drive assembly of the multi-stage oil-free linear valved compressor provided in this application;

[0034] Figure 4 A schematic diagram of the three-section unequal-diameter cylinder block of the multi-stage oil-free linear valved compressor provided in this application;

[0035] Figure 5 A schematic diagram of the structure of one of the compressor units of the multi-stage oil-free linear valved compressor provided in this application;

[0036] Figure 6 A schematic diagram of the connection structure between the interstage heat exchanger unit and the valve group of the multistage oil-free linear valved compressor provided in this application;

[0037] Figure 7 A schematic diagram of the valve assembly of the multi-stage oil-free linear compressor with valves provided in this application;

[0038] Figure 8 A schematic diagram of the interstage heat exchanger unit of the multistage oil-free linear valved compressor provided in this application.

[0039] Figure label:

[0040] 1. First compressor unit;

[0041] 2. Second compressor unit;

[0042] 3. Intermediate matrix;

[0043] 4. Install the bracket;

[0044] 5. Controller;

[0045] 11. Drive assembly; 111. Housing; 112. Motor stator; 113. Wall cylinder; 114. End plate; 115. Mover; 116. Spring assembly; 117. Flexible rod;

[0046] 12. Stepped compression mechanism; 121. Compression piston; 122. Three-section unequal diameter cylinder body; 1221. First cylinder; 1222. Second cylinder; 1223. Third cylinder; 123. Valve assembly; 1231. Valve plate; 1232. Valve disc; 124. Throttling device; 125. First check valve; 126. Air flotation chamber;

[0047] 13. Interstage heat exchanger unit; 131. Sealing structure; 132. Primary heat exchange chamber; 133. Secondary heat exchange chamber.

[0048] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concepts of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0049] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0050] Traditional compressors generally pose a risk of oil contamination during gas compression, making it difficult to meet high purity requirements. Compressors driven by conventional rotary motors, due to their complex transmission mechanisms, cause the pistons to experience lateral forces, leading to problems such as high vibration and short lifespan in oil-free operation. Existing oil-free compression solutions either suffer from wear and lifespan limitations, or experience a surge in leakage rates at high pressure ratios, and struggle to achieve both high pressure ratio output and structural compactness. While multiple compressors can be connected in series to achieve high pressure ratio output, the resulting system is bulky and has complex piping.

[0051] The multi-stage oil-free linear valved compressor provided in this application achieves multi-stage gas compression through a stepped compression mechanism, solving the problems of pollution, vibration, and low efficiency of traditional compressors in an oil-free environment. It has the advantages of oil-free operation, high-efficiency compression, low vibration, and high reliability.

[0052] The technical solution of this application and how the technical solution of this application solves the above-mentioned technical problems are described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will be described below with reference to the accompanying drawings. For ease of description, references are made to... Figure 2 The x-direction is defined as the first direction.

[0053] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 This application discloses a multi-stage oil-free linear compressor with valves, comprising:

[0054] A compressor unit, which includes a drive assembly 11 and a stepped compression mechanism 12;

[0055] The stepped compression mechanism 12 includes a compression piston 121 and a cylinder. The compression piston 121 is provided with a protrusion along the first direction to form a stepped shape. The cylinder has multiple cylinders with different radii and interconnected along the first direction to form a multi-section cylinder body with unequal diameter. The compression piston 121 and the multi-section cylinder body with unequal diameter are fitted together to form at least two compression chambers with different radii.

[0056] The drive assembly 11 is used to drive the compression piston 121 to reciprocate in the compression chamber along a first direction to achieve multi-stage gas compression.

[0057] The compressor unit refers to the integrated device that performs gas compression, which integrates the core components for driving and compression. The compressor unit can be designed as a single, integrated structure, with all functional components housed within a single casing; alternatively, it can be designed as a modular structure, where the drive assembly 11 and the stepped compression mechanism 12 are assembled as independent modules. For example, the drive assembly 11 can be electromagnetically driven, while the stepped compression mechanism 12 is mechanically coupled to the drive assembly 11.

[0058] The drive assembly 11 is responsible for providing mechanical power, and its function is to generate reciprocating motion to drive the compression piston 121. The drive assembly 11 drives the compression piston 121 to reciprocate within the compression chamber along a first direction to achieve multi-stage gas compression.

[0059] In one implementation, the drive assembly 11 can employ a traditional crank-connecting rod mechanism to convert rotary motion into linear reciprocating motion of the piston. Alternatively, a cam mechanism can be used to drive the piston in reciprocating motion. Both drive methods enable the compression piston 121 to periodically change the volume of the compression chamber within the cylinder, thereby compressing the gas in stages.

[0060] The stepped compression mechanism 12 is the core structure for achieving staged gas compression. Its design feature lies in forming chambers with different compression ratios through the special geometry of the piston and cylinder. The stepped compression mechanism 12 is key to achieving multi-stage gas compression. The stepped compression mechanism 12 mainly consists of a compression piston 121 and a cylinder.

[0061] In one implementation, the compression piston 121 can be a single casting with a stepped surface machined. The cylinder block can be formed by welding or bolting together multiple independent cylindrical components to create a single, integrated cylinder structure.

[0062] The compression piston 121 is the main moving part in the stepped compression mechanism 12. Its surface has protrusions along the first direction to form a stepped shape so as to cooperate with the multi-section cylinder body with different diameters.

[0063] Specifically, the compression piston 121 has protrusions along the first direction, thus forming a stepped shape.

[0064] A stepped structure can be achieved by directly machining segments of different diameters onto the piston body, for example, by forming multiple cylindrical segments with decreasing diameters through turning or grinding. Alternatively, ring-shaped components of different diameters can be press-fitted or welded onto the piston body to create the stepped shape.

[0065] The cylinder body is the fixed part of the stepped compression mechanism 12, and it contains multiple cylinders to provide space for the movement of the compression piston 121.

[0066] The cylinder body that cooperates with the compression piston 121 has multiple interconnected cylinder sections with different radii along the first direction, which together constitute a multi-section cylinder body with unequal diameters.

[0067] A multi-segment unequal-diameter cylinder block refers to a cylinder body containing multiple interconnected cylinder segments with different radii along a first direction. These cylinder segments together form a single, integrated cylinder structure. A multi-segment unequal-diameter cylinder block can be formed by precision boring of a single metal block, ensuring the coaxiality and connectivity of each cylinder segment. Alternatively, it can be assembled from multiple prefabricated cylindrical cylinder segments of different diameters via flange or threaded connections, ensuring unobstructed internal air passages.

[0068] The compression chamber refers to the space formed between the compression piston 121 and the multi-section cylinder body with unequal diameters, used to contain and compress gas. It contains at least two regions with different radii, corresponding to different compression stages. The compression piston 121 and the multi-section cylinder body with unequal diameters form a clearance fit, thereby constituting at least two compression chambers with different radii.

[0069] The compression chamber can be formed by controlling the diameter of each stepped segment of the compression piston 121 and the inner diameter of each cylinder segment of the multi-segment unequal-diameter cylinder body. For example, the first stage diameter of the piston and the first stage inner diameter of the cylinder are matched to form the first compression chamber, and the second stage diameter of the piston and the second stage inner diameter of the cylinder are matched to form the second compression chamber, and the radii of these chambers are different.

[0070] The multi-stage oil-free linear valved compressor proposed in this embodiment effectively avoids the gas contamination problems caused by traditional oil lubrication through the integrated design of the stepped compression mechanism and drive components, meeting the demand for high-purity compressed gases in the food and pharmaceutical industries. This structure achieves multi-stage compression through linear reciprocating motion, reducing lateral forces from traditional mechanical transmissions, helping to reduce operational vibration, and laying the foundation for long-life operation. Furthermore, its integrated design simplifies the system structure, improves compactness, and avoids the complexity of external piping connections.

[0071] Reference Figure 2 , Figure 3 , Figure 4 , Figure 5 This application also discloses that a multi-section unequal-diameter cylinder body includes at least three unequal-diameter cylinder bodies 122 consisting of a first cylinder 1221, a second cylinder 1222, and a third cylinder 1223 arranged sequentially along a first direction; the cylinders of the first cylinder 1221, the second cylinder 1222, and the third cylinder 1223 are interconnected to form an air passage; the radii of the cylinders of the first cylinder 1221, the second cylinder 1222, and the third cylinder 1223 are all different, forming two compression chambers with different radii.

[0072] Specifically, the multi-section unequal-diameter cylinder block 122 is composed of at least three cylinder sections: a first cylinder 1221, a second cylinder 1222, and a third cylinder 1223, arranged sequentially along a first direction. This three-section structure provides the basic physical framework for achieving three-stage compression.

[0073] Among them, "unequal diameter" means that the inner diameter of these three cylinders is different. It can be gradually decreasing, gradually increasing, large in the middle and small on both sides, or small in the middle and large on both sides. The stepped inner diameter design is the key to realizing multi-stage compression. It enables the compression piston 121 to form multi-stage compression chambers of different volumes when working in different cylinder sections, thereby achieving pressurization in the reciprocating motion of the piston.

[0074] Through the stepped design of the compression piston 121 and the connection method between the cylinders, the protruding part of the compression piston 121 forms a primary compression chamber between the first cylinder 1221 and the second cylinder 1222, and a secondary compression chamber between the second cylinder 1222 and the third cylinder 1223. The three cylinders are interconnected through internal channels, forming a complete compression air circuit, ensuring that gas can smoothly enter the secondary compression chamber from the primary compression chamber, thereby realizing a continuous multi-stage compression process.

[0075] The specific way the air passage is formed can be through a preset channel inside the cylinder body, a valve structure, or a direct opening connection between cylinders, which ensures that compressed gas can be smoothly transmitted between different stages and avoids gas leakage or pressure loss.

[0076] Through the above technical solution, the multi-section unequal-diameter cylinder body 122 is configured as three unequal-diameter cylinder bodies 122 consisting of a first cylinder 1221, a second cylinder 1222, and a third cylinder 1223 arranged sequentially along a first direction. These three cylinder bodies are interconnected to form an air passage, and their radii are all different to form two compression chambers with different radii. This allows the compressor to achieve more precise and efficient multi-stage compression. Combined with the stepped structure of the compression piston 121, compression chambers with different volumes and compression ratios can be precisely formed, thereby optimizing the efficiency of each compression stage and avoiding excessively high temperatures and energy losses caused by single-stage high-pressure ratio compression. When the gas passes through the interconnected air passages, it can smoothly enter the high-pressure stage from the low-pressure stage, effectively reducing interstage pressure loss.

[0077] Overall, the above technical solutions significantly improve the overall compression efficiency and output pressure stability of the compressor by clarifying and optimizing the physical structure of multi-stage compression. At the same time, they provide a foundation for achieving a wider range of compression ratios, making the compressor more adaptable to different application scenarios.

[0078] Reference Figure 2 , Figure 3 This application also discloses that the compressor device further includes an intermediate base 3, and the compressor device is provided in two parts, namely a first compressor unit 1 and a second compressor unit 2. The first compressor unit 1 and the second compressor unit 2 are symmetrically arranged in the intermediate base 3 along a first direction; the air passage of the first compressor unit 1 and the air passage of the second compressor unit 2 are connected in series to realize multi-stage high pressure ratio compression output; or, the air passage of the first compressor unit 1 and the air passage of the second compressor unit 2 are connected in parallel to realize multi-stage high flow compression output.

[0079] Specifically, the intermediate substrate 3 provides a stable and precise mounting platform for multiple compressor units.

[0080] The intermediate substrate 3 is typically made of high-strength, high-rigidity materials, such as cast iron, aluminum alloy, or steel, to ensure that it can withstand various dynamic loads and vibrations during compressor operation and maintain the precise alignment of each component.

[0081] In one implementation, the intermediate substrate 3 can be designed to integrate cooling channels, lubrication channels, or electrical wiring channels to optimize the overall system performance and integration.

[0082] The first compressor unit 1 and the second compressor unit 2 are two independent, fully functional compressor units. Each contains a drive assembly 11 and a stepped compression mechanism 12, capable of independently completing multi-stage gas compression. These two compressor units can be structurally identical, forming a mirror image of each other. The modular design allows for high flexibility and configurability of the compressor system. This symmetrical arrangement helps balance the inertial forces and vibrations generated during operation, thereby improving the operational stability and service life of the equipment.

[0083] In one implementation, the first compressor unit 1 and the second compressor unit 2 are detachably and symmetrically disposed on the intermediate base 3 along a first direction via fasteners.

[0084] Fasteners can be bolts, screws, clamps, or other detachable connectors, ensuring a secure connection between the compressor unit and the intermediate base 3, while facilitating the installation, maintenance, and replacement of the equipment.

[0085] Regarding gas path connections, this application provides two main configuration methods:

[0086] The first type is a series connection, where the air passages of the first compressor unit 1 and the second compressor unit 2 are connected in series to achieve multi-stage high-pressure ratio compression output. In this mode, the exhaust port of the first compressor unit 1 is connected to the intake port of the second compressor unit 2, so that the gas undergoes preliminary compression in the first compressor unit 1 before entering the second compressor unit 2 for further compression. This connection method can effectively superimpose the compression ratios of the two compressor units, thereby obtaining a final exhaust pressure far higher than that achievable by a single compressor unit, making it suitable for applications with strict requirements on the high-pressure ratio.

[0087] In one implementation, to improve the efficiency of series compression, an interstage cooler can be installed between the two compressor units to reduce the temperature of the gas entering the next stage of compression.

[0088] The second type is parallel connection, where the air paths of the first compressor unit 1 and the second compressor unit 2 are connected in parallel to achieve multi-stage high-flow compression output. In this mode, the air inlets of both compressor units are connected to the same air source, while their exhaust ports merge into the same exhaust pipe. This connection method allows the two compressor units to work simultaneously and process gas together, thereby significantly increasing the total flow output of the system, making it suitable for applications with high flow rate requirements.

[0089] Through the above technical solution, two independent compressor units (first compressor unit 1 and second compressor unit 2) are modularly integrated through an intermediate base 3, providing series or parallel gas path connection methods, which greatly improves the application flexibility and performance scalability of the compressor. When an extremely high compression ratio is required, by connecting the gas paths of first compressor unit 1 and second compressor unit 2 in series, the compression capabilities of both can be effectively superimposed, thereby obtaining a high pressure ratio output far exceeding that of a single compressor unit. Conversely, when the application scenario has higher flow rate requirements, by connecting the gas paths of both in parallel, the overall gas handling capacity can be significantly increased, achieving high flow rate compression output. This allows a single compressor system to adapt to various different operating conditions, avoiding the complexity of designing different compressors for different application scenarios. Moreover, the symmetrical arrangement of the compressors in the intermediate base 3 helps to balance the dynamic load during operation, reduce vibration, and improve the operational stability and reliability of the equipment.

[0090] Reference Figure 2 , Figure 4 , Figure 5 This application also discloses that the drive assembly 11 includes a drive source and a flexible rod 117; the drive source includes a housing 111, a motor stator 112, a motor mover 115 and a spring assembly 116, the motor stator 112 is embedded in the housing 111, the motor mover 115 is movably disposed in the motor stator 112, the motor mover 115 is connected to the compression piston 121 through the flexible rod 117, and is used to drive the compression piston 121 to reciprocate in the compression chamber along a first direction; the spring assembly 116 is rigidly connected to the motor mover 115.

[0091] The drive source is the core component of the drive assembly 11 that generates power. It typically uses a linear motor, which can directly output linear motion, avoiding the mechanical losses and complexity associated with converting linear motion through a crank-connecting rod mechanism in traditional rotary motors. By using a linear motor to directly drive the compression piston 121, the lateral forces generated by the traditional crankshaft-connecting rod mechanism are eliminated, frictional wear between the piston and cylinder wall is avoided, significantly extending component life and reducing vibration.

[0092] The flexible rod 117 connects the motor mover 115 of the drive source to the compression piston 121 of the stepped compression mechanism 12. Its flexibility allows for the absorption or compensation of minor alignment errors that may exist between the motor mover 115 and the compression piston 121 to a certain extent. It also provides some shock absorption, reducing impact and noise generated during operation, thereby protecting the connecting components and extending their service life. The flexible rod 117 has high axial stiffness to effectively transmit driving force, while having lower radial stiffness. This helps reduce the assembly precision requirements between the motor mover 115 and the compression piston 121, improving the system's fault tolerance.

[0093] The outer casing 111, as the external structure of the drive source, primarily serves to provide mechanical support, protection, and a good heat dissipation environment for the internal core components such as the motor stator 112 and motor mover 115. The outer casing 111 is typically made of high-strength materials to withstand the operating stress of the internal components.

[0094] The stator 112 is the stationary part of the linear motor, and it typically contains coils that generate an alternating magnetic field when energized. This magnetic field interacts with the permanent magnets or coils on the mover 115, thereby generating an electromagnetic force that drives the mover 115 to reciprocate. The stator 112 is embedded in the housing 111, ensuring its fixed position and structural stability.

[0095] The motor mover 115 is the moving part in the linear motor, and it usually integrates a permanent magnet or a coil. Under the action of the magnetic field generated by the motor stator 112, the motor mover 115 can move inside the motor stator 112 in a first direction and generate linear thrust, which in turn drives the compression piston 121 through the flexible rod 117.

[0096] The spring assembly 116 is rigidly connected to the motor rotor 115, and its function is to provide storage and release of elastic potential energy for the reciprocating motion of the motor rotor 115. In linear compressors, the spring assembly 116 is often used to achieve resonant drive. By forming a resonant system with the mass of the motor rotor 115, high-frequency, large-amplitude reciprocating motion can be achieved with lower energy consumption, thereby improving drive efficiency.

[0097] By employing a linear motor as the drive source, combined with a flexible rod 117 and a spring assembly 116, this application achieves precise and efficient reciprocating drive of the compression piston 121. The linear motor directly generates linear motion, avoiding the complexity and energy loss of traditional mechanical conversion mechanisms, making the drive assembly 11 more compact, with a faster response speed, and easier to achieve precise position and speed control. The introduction of the flexible rod 117 effectively solves the alignment problem between the motor mover 115 and the compression piston 121, and can absorb motion shocks, thereby improving the system's operational stability and reliability. The rigid connection between the spring assembly 116 and the motor mover 115 allows the drive system to utilize elastic potential energy for energy recovery and resonant drive, significantly reducing the energy consumption required for drive and improving overall efficiency. In addition, this oil-free linear drive method, in conjunction with the oil-free compression piston 121, ensures the oil-free cleanliness of the entire compression process, meeting the requirements of application scenarios with strict requirements for gas purity.

[0098] Reference Figure 1 , Figure 2 , Figure 4 , Figure 5This application also discloses that the motor mover 115 of the first compressor unit 1 and the motor mover 115 of the second compressor unit 2 form a counter-movement structure; it also includes a controller 5, which uses the drive source of the compressor unit on one side as the main motor and the drive source of the compressor unit on the other side as the slave motor. The controller 5 controls the slave motor to run synchronously with the main motor, so that the motor movers 115 on both sides perform synchronous reciprocating motion in opposite directions.

[0099] Here, "opposing structure" refers to a configuration in which two moving parts reciprocate in a synchronous and opposite direction. In this embodiment, when the motor mover 115 of the first compressor unit 1 moves in one direction, the motor mover 115 of the second compressor unit 2 moves simultaneously in the opposite direction.

[0100] The opposing structure counteracts inertial forces through the symmetry of motion. Achieving an opposing structure typically relies on a precise control system to ensure that the motion trajectories, velocities, and accelerations of the two motor movers 115 are highly synchronized in time and in opposite directions.

[0101] The controller 5 is a key component for realizing the reciprocating motion structure. It typically consists of a microprocessor, memory, input / output interfaces, and power drive circuitry. The controller 5 monitors the real-time operating status (e.g., position, speed) of the two motor actuators 115, designating one side of the compressor unit as the master motor and the other as the slave motor. The master motor operates independently according to a preset motion curve, while the slave motor, under the command of the controller 5, precisely follows the movement of the master motor, but in the opposite direction. For example, if the master motor actuator 115 moves to the left, the slave motor actuator 115 moves to the right, and their displacement, velocity, and acceleration curves remain numerically consistent, only in opposite directions, ensuring that the relative motion relationship between the two motor actuators 115 remains stable throughout the entire motion cycle.

[0102] Through the above technical solution, the motor mover 115 of the first compressor unit 1 and the motor mover 115 of the second compressor unit 2 are configured as a counter-moving structure, and the controller 5 precisely controls them to perform reverse synchronous reciprocating motion, which effectively solves the problem of inertial force imbalance generated when the two independent motor movers 115 reciprocate.

[0103] Specifically, when one motor rotor 115 generates an inertial force in a certain direction, the other motor rotor 115 simultaneously generates an equal and opposite inertial force, thus achieving mutual cancellation of inertial forces on the intermediate base 3. This dynamic balance of inertial forces significantly reduces the vibration and noise generated by the entire compressor unit during operation, improving the operational stability of the equipment.

[0104] Reduced vibration lowers the strength requirements of the equipment installation foundation and helps extend the service life of the compressor unit and its internal components. The precise synchronous control of the master and slave motors by controller 5 ensures the coordinated operation of the two compressor units, further optimizing compression efficiency and overall performance.

[0105] Reference Figure 2 , Figure 4 , Figure 5 This application also discloses that the drive assembly 11 includes a wall cylinder 113 and an end plate 114. The wall cylinder 113 is fixedly sleeved in the inner hole of the motor stator 112. The outer periphery of the wall cylinder 113 is sealed to the outer shell 111. The two ends of the wall cylinder 113 are respectively sealed to the end plate 114. The motor mover 115 is movably inserted into the interior of the wall cylinder 113 through a first hydrostatic air bearing.

[0106] Specifically, the wall cylinder 113 and the end plate 114 together form a sealed cavity for accommodating and protecting the motor mover 115. The wall cylinder 113 is designed to be fixedly fitted inside the inner hole of the motor stator 112, and its outer periphery is connected to the outer casing 111 by a reliable sealing structure, such as using O-rings, gaskets, or welding, to ensure the sealing of the drive assembly 11.

[0107] Both ends of the wall cylinder 113 are sealed to the end plate 114, thus effectively isolating the operating space of the motor mover 115. The wall cylinder 113 is typically made of materials with good mechanical strength, corrosion resistance, and non-magnetic interference, such as stainless steel, ceramic, or composite materials, to meet the cleanliness and durability requirements of oil-free compressors.

[0108] End plates 114 are used to close both ends of the wall cylinder 113 and provide necessary structural support.

[0109] The motor mover 115 is movably inserted inside the wall cylinder 113 via the first hydrostatic air bearing.

[0110] The first type of hydrostatic air bearing utilizes externally supplied pressurized gas to form an air film between moving parts, thereby achieving contactless support and movement. In this application, pressurized gas is precisely introduced into the minute gap between the motor mover 115 and the inner wall of the cylinder 113, forming a stable air film. This air film completely isolates the motor mover 115 from solid contact with the cylinder 113, thus completely eliminating friction, wear, and vibration. Air bearings typically contain precision throttling orifices or porous media to uniformly distribute gas pressure, ensuring the stability and high rigidity of the air film.

[0111] The gas source can be provided by an independent gas supply system or by the compressor itself, enabling system integration and energy efficiency optimization. The hydrostatic air bearing provides high rigidity and high precision support, ensuring the smoothness and positioning accuracy of the reciprocating motion of the motor mover 115. This, in turn, guarantees precise control of the compression piston 121 within the compression chamber, improving the efficiency and stability of multi-stage gas compression. It is particularly suitable for oil-free compression applications requiring extremely high gas purity.

[0112] Through the above technical solution, the sealing structure of the wall cylinder 113 and the end plate 114 effectively isolates the operating environment of the motor mover 115 from the external environment and the compressed gas path, thereby preventing external impurities from entering the drive mechanism and ensuring that the oil-free operating environment of the compressor unit is not contaminated. The motor mover 115 achieves contactless movement inside the wall cylinder 113 through the first hydrostatic air bearing, completely eliminating solid friction, significantly reducing energy loss, improving drive efficiency, avoiding mechanical wear, greatly extending the service life of the motor mover 115 and the wall cylinder 113, and eliminating the impact of wear-generated particulate matter on the purity of the compressed gas.

[0113] Reference Figure 2 , Figure 4 , Figure 5 , Figure 6 This application also discloses that a compression piston 121 is movably mounted in a multi-section unequal-diameter cylinder body via a second static pressure air bearing. A preset gap is reserved between the outer peripheral surface of the compression piston 121 and the inner bore surface of the multi-section unequal-diameter cylinder body to form an air bearing cavity 127 for the static pressure air bearing. Throttling devices 124 are provided at both ends of the compression piston 121. The throttle devices 124 are connected to the air bearing cavity 127. High-pressure gas enters the air bearing cavity 127 through the throttle devices 124 to form an air film, which is used to provide radial support for the compression piston 121. A first one-way valve 125 is provided on the side of the compression piston 121 near the intermediate base 3. A second one-way valve 126 is provided between the air inlet of the first one-way valve 125 and the air inlet of the multi-section unequal-diameter cylinder body. By reciprocating the compression piston 121, air can be taken from the air inlet and converted into high-pressure gas in the air bearing cavity 127 to provide a gas source for the second static pressure air bearing.

[0114] Specifically, the second hydrostatic air bearing is a type of bearing that utilizes externally supplied pressurized gas to form an air film between moving parts, thereby achieving contactless support. Here, this bearing supports the compression piston 121, ensuring that a layer of air film remains between the piston's outer circumferential surface and the cylinder's inner bore surface during its reciprocating motion within a multi-segment cylinder with unequal diameters, preventing solid-state contact. This contactless support is crucial for achieving the high efficiency, long lifespan, and high purity of the oil-free compressor. The air float chamber 127 is a precisely defined gap between the outer circumferential surface of the compression piston 121 and the inner bore surface of the multi-segment cylinder with unequal diameters; its size is typically at the micrometer level to ensure the stability and load-bearing capacity of the air film. Precise control of this gap is essential for the performance of the air bearing and is usually achieved through high-precision machining and assembly processes. This air film effectively isolates the piston from direct contact with the cylinder wall, completely eliminating friction and wear, thereby significantly improving the compressor's operating efficiency and service life, and ensuring the purity of oil-free compression.

[0115] The throttle 124 is a tiny channel or orifice used to control the flow rate and pressure of high-pressure gas. It is located at both ends of the compression piston 121 and communicates with the air flotation chamber 127. When high-pressure gas enters the air flotation chamber 127 through the throttle 124, the throttle 124 will generate a pressure drop, thereby forming a uniformly distributed gas film with sufficient load-bearing capacity in the air flotation chamber 127.

[0116] The first one-way valve 125 and the second one-way valve 126 are valves that allow gas to flow in one direction while preventing reverse flow. The first one-way valve 125 is located on the side of the compression piston 121 near the intermediate base 3 and is used to control the gas supply path from the compression chamber or air inlet to the air bearing. The second one-way valve 126 is located between the air inlet of the first one-way valve 125 and the air inlet of the multi-section unequal diameter cylinder body. Its function is to ensure that gas can be drawn in from the main air inlet and directionally delivered to the air bearing's air supply system. These two one-way valves work together to form the self-supply circuit of the air bearing.

[0117] Through the above technical solution, the reciprocating motion of the compression piston 121 within the multi-stage unequal-diameter cylinder body provides non-contact radial support for the second hydrostatic air bearing. This air bearing utilizes a pre-defined gap between the outer circumferential surface of the compression piston 121 and the inner bore surface of the multi-stage unequal-diameter cylinder body to form an air float cavity 127. High-pressure gas is introduced into the air float cavity 127 through a throttle valve 124 to form an air film. By setting a first one-way valve 125 on one side of the compression piston 121 and a second one-way valve 126 between its inlet and the inlet of the multi-stage unequal-diameter cylinder body, the reciprocating motion of the compression piston 121 itself is cleverly utilized to draw gas from the inlet and convert it into the high-pressure gas required by the air float cavity 127. This self-supplying design eliminates the need for an additional external high-pressure gas source, greatly simplifying the system structure, reducing operating costs and maintenance requirements, while ensuring the stable and reliable operation of the air float bearing, providing a high-efficiency, long-life, and clean operating foundation for the entire multi-stage oil-free linear valved compressor.

[0118] Reference Figure 2 , Figure 4 , Figure 5 , Figure 6 , Figure 7 This application also discloses that valve assemblies 123 are provided at both ends of the second cylinder 1222 along the first direction. The second cylinder 1222 serves as an intermediate stage in a multi-stage compression process, and the valve assemblies 123 at both ends are designed to precisely control the entry and exit of gas within this compression stage, ensuring that gas can efficiently enter from the previous stage, be compressed, and then be transferred to the next stage. This arrangement makes the gas flow path more direct, helping to reduce flow losses.

[0119] Specifically, the valve assembly 123 includes a valve disc 1232, with valve plates 1231 at both ends along a first direction. The valve disc 1232 is typically made of a material with a certain degree of flexibility, such as special steel or polymer materials, which deforms under the action of gas pressure difference, thereby realizing the opening and closing of the valve. The valve plates 1231 are rigid structures used to support the valve disc 1232 and define the gas flow path. This structural design allows the valve assembly 123 to automatically respond to pressure changes in the compression chamber, achieving self-excited opening and closing.

[0120] The upper half of the valve plate 1231 is a sealing plane with multiple vent holes. The sealing plane is precision-machined to ensure a reliable seal when in contact with the valve disc 1232, preventing gas leakage. The multiple vent holes increase the gas flow area, reducing flow resistance as gas passes through the valve assembly 123; they also ensure even force distribution on the valve disc 1232 during opening, extending its service life.

[0121] The lower half of the valve plate 1231 has a recessed structure with an inclined surface on it to limit the movement of the valve disc 1232. The recessed structure provides space for the valve disc 1232 when it is open, while the inclined surface acts as a limiting structure to precisely control the maximum opening stroke of the valve disc 1232. This limiting design effectively prevents fatigue damage to the valve disc 1232 due to over-opening, while ensuring that the valve disc 1232 can quickly return to its original position when closed, improving the response speed and reliability of the valve assembly 123.

[0122] The sealing plane of one valve plate 1231 on the same side is installed opposite to the recessed structure of the other valve plate 1231, forming a valve assembly 123 with both intake and exhaust valve functions by means of a valve plate sandwiched in between. This ingenious combination and installation method makes the individual valve assembly 123 highly integrated in structure, enabling it to simultaneously perform intake and exhaust functions. When the compression piston 121 moves to one side, the valve plate 1232 on one side opens under the action of pressure difference, realizing intake; when the compression piston 121 moves in the opposite direction, the valve plate 1232 on the other side opens, realizing exhaust. This bidirectional functional integration design greatly simplifies the valve assembly structure, reduces the number of components, and helps to achieve a compact compressor.

[0123] The inner diameter of the valve assembly 123 is larger than the diameter of the compression piston 121, ensuring that the compression piston 121 can smoothly pass through the central hole of the valve assembly 123 when it reciprocates in the second cylinder 1222, thus avoiding mechanical interference between the piston and the valve assembly. This is crucial for achieving high-speed and stable operation of the oil-free linear compressor, and also helps to minimize ineffective volume and improve compression efficiency.

[0124] Through the above technical solution, the integrated valve assembly 123, which has both intake and exhaust functions, is directly installed at both ends of the second cylinder 1222. This effectively solves the problem of gas flow control during multi-stage compression, significantly reduces the flow resistance of gas during inter-stage transmission, and reduces ineffective volume, thereby improving the volumetric efficiency and overall compression efficiency of the compressor. The compact integrated structure of the valve assembly 123 avoids the complex piping and additional space occupation caused by traditional independent valves, making the entire compressor unit more compact and lightweight. The self-excited working principle and limit design of the valve assembly 123 ensure the reliability and durability of valve action, further improving the stability of the compressor during long-term operation.

[0125] Reference Figure 5 , Figure 6 , Figure 8This application also discloses that the above-mentioned compressor device includes an interstage heat exchange unit 13, which is sleeved on the outside of a multi-section cylinder body with unequal diameters. The interstage heat exchange unit 13 includes a heat exchanger shell, with internal fins on the inner side of the heat exchanger shell and external fins on the outer side of the heat exchanger shell. The internal fins are attached to the outer peripheral surface of the multi-section cylinder body with unequal diameters. The heat of gas compression is conducted to the heat exchanger shell through the internal fins and then released to the external environment by external air cooling through the external fins, thereby achieving the cooling of the compressed gas.

[0126] Specifically, the interstage heat exchange unit 13 is a device specifically designed to cool the gas between different stages of the compression process. Its main function is to reduce the temperature of the gas after initial compression, thereby improving the efficiency of subsequent compression stages and protecting the internal components of the compressor from excessively high temperatures. The interstage heat exchange unit 13 is designed to be fitted onto the outside of a multi-section, unequal-diameter cylinder block. This compact integration allows heat to be transferred directly from the heated cylinder block to the heat exchange unit, thus optimizing the heat conduction path and facilitating the modular and miniaturized design of the compressor.

[0127] The core component of the interstage heat exchange unit 13 is the heat exchanger shell, which provides structural support and sealing space for the entire heat exchange process. Internal fins are arranged on the inner side of the heat exchanger shell, and these fins are tightly fitted to the outer circumferential surface of the multi-section, unequal-diameter cylinder block. The function of the internal fins is to significantly increase the contact area with the cylinder block, thereby efficiently absorbing the heat transferred from the compressed gas to the cylinder block. These fins are typically made of materials with excellent thermal conductivity (such as aluminum alloys or copper alloys) to ensure that heat can be quickly conducted from the cylinder block to the heat exchanger shell.

[0128] Meanwhile, external fins are provided on the outer side of the heat exchanger shell. These external fins are designed to maximize the contact area with the external cooling medium (usually air). After the heat of gas compression is conducted to the heat exchanger shell through the internal fins, it is then dissipated to the external environment through these external fins. The heat release is achieved through external air cooling, which means that a fan or blower is typically used to force airflow over the external fins to enhance convective heat transfer, thereby accelerating heat loss and effectively cooling the compressed gas.

[0129] By employing the aforementioned technical solution, an interstage heat exchange unit 13 is installed in the compressor unit and fitted onto the outside of a multi-section cylinder body with unequal diameters. This effectively transfers the heat generated during compression away from the cylinder body. Specifically, the heat of gas compression is first efficiently transferred to the heat exchanger shell through internal fins, and then rapidly released to the external environment via external air cooling through external fins. This design achieves effective cooling of the compressed gas, avoiding problems such as decreased compression efficiency, increased component thermal stress, and damage to compressed gas quality caused by excessively high gas temperatures. Given that the gas temperature rises significantly during multi-stage compression, the introduction of this interstage heat exchange unit 13 ensures the stability and reliability of the compressor under continuous high-pressure ratio operation, while improving overall compression efficiency and the quality of the output gas. Furthermore, the compact structure of fitting the interstage heat exchange unit 13 onto the outside of a multi-section cylinder body with unequal diameters facilitates integrated compressor design, saves space, and optimizes the heat transfer path.

[0130] Reference Figure 5 , Figure 6 , Figure 8 This application also discloses that the heat exchanger is divided into multiple heat exchange chambers by a sealing structure 131, and each heat exchange chamber is corresponding to the compression chamber of a multi-section cylinder with unequal diameter.

[0131] In one implementation, the heat exchanger interior is divided into a primary heat exchange chamber 132 and a secondary heat exchange chamber 133 by a sealing structure 131. The primary heat exchange chamber 132 and the secondary heat exchange chamber 133 are respectively located in the two compression chambers of the three-section unequal-diameter cylinder block 122.

[0132] Specifically, the sealing structure 131 is used to form a physical barrier inside the heat exchanger to ensure that the gas or cooling medium between different heat exchange zones does not mix, thereby maintaining an independent heat exchange environment for each zone.

[0133] The sealing structure 131 can be implemented in various forms, such as by welding, bonding, mechanically pressing with O-rings or gaskets, to ensure that it can still reliably perform its separation function under high temperature and high pressure environments.

[0134] The primary heat exchange chamber 132 and the secondary heat exchange chamber 133 are two independent heat exchange spaces separated by a sealing structure 131 inside the heat exchanger. They each carry gases from different compression stages and perform independent heat exchange, allowing the gas in each compression stage to be cooled in its dedicated heat exchange chamber, thus avoiding heat interference between gases from different stages.

[0135] The corresponding setup refers to the spatial or functional matching of the primary heat exchange chamber 132 and the secondary heat exchange chamber 133 with the two main compression chambers (the first-stage compression chamber and the second-stage compression chamber) formed by the three unequal diameter cylinder blocks 122.

[0136] Specifically, the primary heat exchange chamber 132 is responsible for cooling the gas discharged from the first-stage compression chamber, while the secondary heat exchange chamber 133 is responsible for cooling the gas discharged from the second-stage compression chamber. This corresponding arrangement ensures the targeted and efficient nature of the heat exchange process.

[0137] Through the above technical solution, the heat exchanger is divided into a primary heat exchange chamber 132 and a secondary heat exchange chamber 133 by a sealing structure 131, and these are respectively located in the two compression chambers of the three-section unequal-diameter cylinder block 122. This allows for independent and precise temperature control at different compression stages. The zoned heat exchange design enables targeted heat management based on the different temperature and pressure conditions of the gas in each compression chamber, thereby significantly improving interstage heat exchange efficiency, effectively reducing compressed gas temperature, minimizing heat loss, and ultimately enhancing the overall operating efficiency and reliability of the compressor. Furthermore, precise temperature control also helps protect compressor components and extend their service life.

[0138] Reference Figure 1 , Figure 2 This application also discloses that a mounting bracket 4 is provided on the compressor unit, and the compressor unit is mounted on an external device through the mounting bracket 4.

[0139] Specifically, mounting bracket 4 is a structural component specifically designed to fix and support the compressor unit.

[0140] Mounting bracket 4 can be made of various materials and structural forms, such as high-strength metal sheets, profiles or castings, to ensure that it has sufficient load-bearing capacity and rigidity.

[0141] Mounting bracket 4 can be designed with vibration-damping materials or structures, such as rubber pads or springs at the connection points between the mounting bracket 4 and the compressor unit or external equipment. This effectively absorbs and isolates vibrations generated by the compressor unit during operation, preventing vibration from being transmitted to external equipment, thereby protecting the external equipment and improving the stability of the entire system. Mounting bracket 4 can be designed with adjustable mounting holes or connection mechanisms to accommodate the installation needs of external equipment of different sizes and interfaces, improving the equipment's versatility and installation flexibility.

[0142] Mounting the compressor unit onto an external device via mounting bracket 4 means that the compressor unit is securely fixed in its intended working position. The external device can be any system requiring a compressed gas supply, such as industrial automation equipment, medical devices, laboratory equipment, refrigeration systems, or pneumatic tools.

[0143] Installation typically employs mechanical connections, such as bolts, riveting, welding, or snap-fit ​​connections, ensuring a robust and reliable connection. In this way, the compressor unit becomes an integral part of the external equipment, forming a complete system and fulfilling its intended function.

[0144] The above technical solution, by installing a mounting bracket 4 on the compressor unit and using this bracket 4 to install the compressor unit on external equipment, effectively solves the problem of how to stably and reliably integrate the compressor unit into external equipment in practical applications. The mounting bracket 4 provides a robust physical support and connection interface for the compressor unit, ensuring that the compressor unit maintains a stable working state during high-speed reciprocating motion. This significantly reduces the risk of equipment displacement, loosening, or damage caused by vibration, allowing the compressor unit to be easily and quickly physically connected to various external devices, greatly improving equipment integration efficiency and deployment flexibility. This stable installation method not only ensures the long-term reliable operation of the compressor unit itself but also avoids adverse effects on external equipment, thereby improving the overall system's operational stability and service life.

[0145] Through the synergistic effect of the above-mentioned technical features, the multi-stage oil-free linear valve compressor has successfully solved the problems of oil contamination, high vibration, short life, low compression efficiency and complex structure of traditional compressors, providing a high-performance and high-reliability solution for fields such as semiconductors that require high-purity gases.

[0146] Finally, it should be noted that other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein, and is not limited to the precise structures described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A multi-stage oil-free linear compressor with valve, characterized in that, include: A compressor unit, the compressor unit including a drive assembly and a stepped compression mechanism; The stepped compression mechanism includes a compression piston and a cylinder. The compression piston is provided with a protrusion along a first direction to form a stepped shape. The cylinder has multiple interconnected cylinders with different radii along the first direction to form a multi-section unequal diameter cylinder body. The compression piston and the multi-section unequal diameter cylinder body are clearance-fitted to form at least two compression chambers with different radii. A drive assembly is used to drive the compression piston to reciprocate within the compression chamber along a first direction to achieve multi-stage gas compression.

2. The multi-stage oil-free linear valved compressor according to claim 1, characterized in that, The multi-section unequal diameter cylinder body includes at least three unequal diameter cylinder bodies consisting of a first cylinder, a second cylinder, and a third cylinder arranged sequentially along a first direction; The cylinders of the first cylinder, the second cylinder, and the third cylinder are interconnected to form an air passage; The cylinders of the first cylinder, the second cylinder, and the third cylinder have different radii, forming two compression chambers with different radii.

3. A multi-stage oil-free linear compressor with valve according to claim 2, characterized in that, The compressor device further includes an intermediate base, and the compressor device is provided in two parts, namely a first compressor unit and a second compressor unit, which are symmetrically arranged on the intermediate base along a first direction; The air passages of the first compressor unit and the second compressor unit are connected in series to achieve multi-stage high-pressure ratio compression output; Alternatively, the air passages of the first compressor unit and the second compressor unit can be connected in parallel to achieve multi-stage high-flow compression output.

4. A multi-stage oil-free linear valved compressor according to claim 3, characterized in that, The drive assembly includes a drive source and a flexible rod; The drive source includes a housing, a motor stator, a motor mover, and a spring assembly. The motor stator is embedded in the housing, and the motor mover is movably disposed within the motor stator. The motor mover is connected to the compression piston via the flexible rod and is used to drive the compression piston to reciprocate within the compression chamber along a first direction. The spring assembly is rigidly connected to the motor actuator.

5. A multi-stage oil-free linear compressor with valve according to claim 4, characterized in that, The motor actuator of the first compressor unit and the motor actuator of the second compressor unit form a counter-moving structure; It also includes a controller, which uses the drive source of the compressor device on one side as the main motor and the drive source of the compressor device on the other side as the slave motor. The controller controls the slave motor to run synchronously with the main motor, so that the motors on both sides perform synchronous reciprocating motion in opposite directions.

6. A multi-stage oil-free linear compressor with valve according to claim 4, characterized in that, The drive assembly includes a wall cylinder and an end plate. The wall cylinder is fixedly sleeved in the inner hole of the motor stator. The outer periphery of the wall cylinder is sealed to the outer shell. The two ends of the wall cylinder are respectively sealed to the end plate. The motor mover is movably inserted inside the wall cylinder through a first hydrostatic air bearing.

7. A multi-stage oil-free linear valved compressor according to any one of claims 1-6, characterized in that, The compression piston is movably inserted into the multi-section unequal diameter cylinder body through the second hydrostatic air bearing. A preset gap is reserved between the outer peripheral surface of the compression piston and the inner bore surface of the multi-section unequal diameter cylinder body to form the air bearing cavity of the hydrostatic air bearing. Both ends of the compression piston are provided with throttles, which are connected to the air flotation chamber. High-pressure gas enters the air flotation chamber through the throttles to form an air film, which is used to provide radial support for the compression piston. A first one-way valve is provided on the side of the compression piston near the intermediate base, and a second one-way valve is provided between the air inlet of the first one-way valve and the air inlet of the multi-section unequal diameter cylinder body.

8. A multi-stage oil-free linear valved compressor according to any one of claims 1-6, characterized in that, The second cylinder is equipped with valve assemblies at both ends along the first direction; The valve assembly includes a valve plate, and the valve plate is provided with valve plates at both ends along the first direction; The upper part of the valve plate is a sealing plane, and multiple air passage holes are provided on the sealing plane; The lower half of the valve plate is a recessed structure, and the recessed structure is provided with an inclined surface for restricting the movement of the valve plate. The sealing plane of one valve plate on the same side is installed opposite to the recessed structure of the other valve plate; The inner diameter of the valve assembly is larger than the diameter of the compression piston.

9. A multi-stage oil-free linear compressor with valve according to any one of claims 2-6, characterized in that, The compressor unit includes an interstage heat exchange unit, which is sleeved on the outside of the multi-section unequal diameter cylinder body; The interstage heat exchange unit includes a heat exchanger housing, with internal fins on the inner side of the heat exchanger housing and external fins on the outer side of the heat exchanger housing. The internal fins are arranged to fit the outer peripheral surface of the multi-section unequal diameter cylinder. The heat exchanger is internally divided into multiple heat exchange chambers by a sealed structure, and each heat exchange chamber is corresponding to the compression chamber of the multiple unequal diameter cylinder body.

10. A multi-stage oil-free linear valved compressor according to any one of claims 1-6, characterized in that, The compressor unit is provided with a mounting bracket, and the compressor unit is mounted on an external device via the mounting bracket.

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