Reaction container attitude adjustment method and device, program and readable storage medium

Abstract

The invention belongs to the technical field of silicon carbide material manufacturing, and discloses a posture adjusting method and device of a reaction container, a program and a readable storage medium. According to the attitude adjustment method and the attitude adjustment device for the reaction container, an automatic control strategy is adopted, and the position detection assembly is matched with the controller, so that the detection and feedback of the real-time position of the reaction container are realized, and the accurate positioning of the reaction container in the moving process is ensured; through cooperative use of the forward blocking assembly and the lateral blocking assembly, posture adjustment of the reaction container in multiple directions is achieved, the position of the reaction container on a moving path is adjusted, the position of the reaction container in the direction perpendicular to the moving path is also adjusted, and therefore accurate connection between the reaction container and a gas supply system is ensured.

Description

Technical Field

[0001] This invention belongs to the field of silicon carbide material manufacturing technology, and specifically relates to a method, program, readable storage medium, and corresponding attitude adjustment device for adjusting the attitude of a reaction vessel used in a silicon carbide material manufacturing system. Background Technology

[0002] Silicon carbide is a representative ceramic material that is widely used in various industrial fields due to its excellent physical, chemical and electrical properties.

[0003] In recent years, with the active development of semiconductor processing components using silicon carbide materials, the importance of silicon carbide materials has been increasing. In particular, silicon carbide materials are widely used as components for etching processes in semiconductor processing due to their high plasma resistance. The traditional method for manufacturing silicon carbide for semiconductor etching process parts is to use silicon carbide materials. However, because this method cannot meet the required quality and performance standards, chemical vapor deposition is often used in the existing technology for manufacturing.

[0004] Chemical vapor deposition (CVD) of silicon carbide uses mixtures of Si-containing gases such as SiH4, SiCl2, and SiCl4, and C-containing gases such as C2H2, CH4, and C3H8, or CH3SiCl3, CH3SiH3, (CH3)3SiH, etc., as feed gases. Some deposition methods using single-wafer raw materials suffer from low productivity because the process is carried out in batch CVD furnaces. However, to improve the batch CVD furnace into a continuous CVD furnace, the attitude adjustment problem of the reaction vessel needs to be solved. Summary of the Invention

[0005] To address the shortcomings of the prior art, the first aspect of this invention discloses a method for adjusting the attitude of a reaction vessel, applied to the chemical vapor deposition of silicon carbide materials, comprising: In response to the initial positioning signal generated after the reaction vessel reaches the designated position, the forward blocking component is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component moves to the blocking position, the lateral blocking component is driven to move toward the reaction vessel and abut against the reaction vessel to push the reaction vessel to move and adjust the attitude of the reaction vessel. In response to a second blocking signal emitted after the lateral blocking assembly moves to the first set position, the reaction container is pushed to continue moving along the movement path of the reaction container so that the reaction container comes into contact with the forward blocking assembly.

[0006] Further technical solutions may also include: In response to the fully in place signal generated after the reaction vessel is fully in place, the forward and lateral barrier components are driven to reset.

[0007] Further technical solutions may also include: Acquire the movement signal generated when the position sensor detects that the reaction vessel has moved toward a specified position; In response to the movement signal, the lateral blocking assembly is driven to move to a second predetermined position to guide the movement of the reaction vessel.

[0008] A further technical solution could be that, in the step of the lateral blocking assembly pushing the reaction vessel to adjust its attitude, the specific steps include: Drive the lateral blocking components on the same side to move toward the first predetermined position; In response to a lateral positioning signal generated when one side of the lateral blocking component moves to a first set position, the other side of the lateral blocking component is driven to move and the reaction component is pushed to move.

[0009] A further technical solution may be that, in the step of the lateral blocking assembly pushing the reaction vessel to adjust the attitude of the reaction vessel, specifically including: Drive the lateral blocking assembly to move to the first predetermined position; Acquire pressure data generated by the pressure detector detecting the pressure of the lateral blocking assembly, and compare the pressure data with a set pressure data; If the pressure data detected by the pressure detector is greater than the set pressure data, the corresponding lateral blocking component will be driven to continue moving a set distance and then reset.

[0010] A further technical solution may be that the lateral blocking assembly includes a rear blocking assembly, a central blocking assembly, and a front blocking assembly arranged sequentially along the forward direction of the reaction vessel, wherein the rear blocking assembly, the central blocking assembly, and the front blocking assembly correspond to the rear, middle, and front parts of the reaction vessel, respectively. In the step of the lateral blocking assembly pushing the reaction vessel to adjust the attitude of the reaction vessel, the attitude adjustment method further includes: Acquire pressure data generated by the pressure detector detecting the pressure of the front-end blocking component and the rear-end blocking component, and compare the pressure data with the corresponding set pressure data; If the detected pressure data is greater than the corresponding set pressure data, keep the central blocking component stationary, drive the lateral blocking component corresponding to the pressure data to continue moving a set distance, and then reset.

[0011] A second aspect of the present invention also discloses a computer program that, when executed, can implement the posture adjustment method described above.

[0012] A third aspect of the present invention also discloses a readable storage medium having the computer program described above embedded therein.

[0013] A fourth aspect of the present invention also discloses a reaction vessel attitude adjustment device, applied to silicon carbide material manufacturing equipment, comprising: A forward blocking assembly, which is movable into the movement path of the reaction vessel and abuts against the reaction vessel to restrict the movement path of the reaction vessel; Lateral blocking components are located on both sides of the movement path of the reaction vessel. The lateral blocking components can move closer to or further away from the movement path. The lateral blocking components can abut against the reaction vessel and push the reaction vessel to move in order to adjust its posture. Position detection component, used to detect the position of the reaction vessel; Controller, the controller is used for: In response to the initial positioning signal generated after the reaction vessel reaches the designated position, the forward blocking component is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component moves to the blocking position, the lateral blocking component is driven to move toward the reaction vessel and abut against the reaction vessel to push the reaction vessel to move and adjust the attitude of the reaction vessel. In response to a second blocking signal emitted after the lateral blocking assembly moves to the first set position, the reaction container is pushed to continue moving along the movement path of the reaction container so that the reaction container comes into contact with the forward blocking assembly.

[0014] A further technical solution may be that the lateral blocking component includes: A blocking part is used to abut against the reaction vessel; A drive structure, connected to the blocking part, is used to drive the blocking part to move; the drive structure is electrically connected to the controller. A guide assembly, connected to the blocking part, is used to guide the movement of the blocking part; A pressure detector, electrically connected to the controller, is used to detect the pressure of the blocking part against the reaction vessel.

[0015] A further technical solution may be that the lateral blocking assembly includes a rear blocking assembly, a central blocking assembly, and a front blocking assembly arranged sequentially along the forward direction of the reaction vessel, wherein the rear blocking assembly, the central blocking assembly, and the front blocking assembly correspond to the rear, middle, and front parts of the reaction vessel, respectively.

[0016] A further technical solution may be that the guiding component includes: A guide shaft extends from outside the housing into the housing through a through hole in the housing of the manufacturing equipment, and the guide shaft is movable relative to the through hole; One end of the guide shaft located inside the housing is connected to the blocking part, and the other end is connected to the drive structure.

[0017] A further technical solution may be that the blocking part includes: The bracket is connected to the drive structure and the guide assembly, respectively. A roller, rotatably mounted on the support, is used to abut against the reaction vessel.

[0018] The attitude adjustment method and device for the reaction vessel adopt an automated control strategy. Through the cooperation of the position detection component and the controller, the real-time position of the reaction vessel is detected and fed back, ensuring the precise positioning of the reaction vessel during movement. Through the combined use of the forward blocking component and the lateral blocking component, the attitude adjustment of the reaction vessel in multiple directions is achieved. This not only adjusts the position of the reaction vessel on the movement path, but also adjusts its position in the direction perpendicular to the movement path, thereby ensuring the accurate connection between the reaction vessel and the gas supply system. Attached Figure Description

[0019] To more clearly illustrate the embodiments of the present invention or the existing technical solutions, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a flowchart illustrating the attitude adjustment method of the reaction vessel in an embodiment of the present invention; Figure 2 This is a schematic diagram of the attitude adjustment device for the reaction vessel in an embodiment of the present invention. The arrows in the diagram indicate the direction of movement of the reaction vessel. Figure 3 This is another structural schematic diagram of the attitude adjustment device of the reaction vessel in an embodiment of the present invention. The arrows in the figure indicate the direction of movement of the reaction vessel, wherein the forward blocking component is located at the blocking position and the lateral blocking component is located at the first set position. Figure 4 This is another structural schematic diagram of the attitude adjustment device for the reaction vessel in the embodiment of the invention. The arrows in the figure indicate the direction of movement of the reaction vessel, wherein the forward blocking component is located at the blocking position and the lateral blocking component is located at the second set position. Explanation of reference numerals in the attached figures: 1. Reaction vessel; A. Chamber; 2. Positive blocking component; 3. Lateral blocking assembly; 31. Blocking part; 311. Support; 312. Roller; 32. Drive structure; 33. Guide assembly; 4. Cover; 5. Back-end blocking components; 6. Central blocking assembly; 7. Front-end blocking component. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0022] To address the technical problem of low productivity in batch chemical vapor deposition (CVD) furnaces, the applicant of this patent seeks to propose a continuous CVD furnace. In this type of CVD furnace, the reaction vessel sequentially passes through a preparation chamber, a reaction chamber, and a heat treatment chamber, with atmosphere and temperature preparation completed in the preparation chamber; CVD is completed in the reaction chamber; and final heat treatment and cooling operations are completed in the heat treatment chamber.

[0023] In other words, during continuous chemical vapor deposition (CVD), the reaction vessel needs to be transported sequentially through the preparation chamber, reaction chamber, and heat treatment chamber. This is because, when using three different chambers to achieve a segmented continuous process, since each chamber is relatively independent, once a reaction vessel completes its work in one chamber and moves to the next, the previous chamber can then connect to a new reaction vessel to achieve continuous operation. In other words, when a CVD equipment supply system is provided, the preparation chamber, reaction chamber, and heat treatment chamber of the continuous CVD furnace can simultaneously operate on different reaction vessels. When a reaction vessel is transported to any chamber, it needs to be connected to the gas supply system to create the necessary atmosphere for the reaction within the reaction vessel. This gas supply system is used both to supply gas into the reaction vessel and to discharge the gas after the reaction is complete.

[0024] The applicant discovered that, during the use of a continuous chemical vapor deposition furnace, it is necessary to precisely control the orientation of the reaction vessel to ensure that the gas supply system of the reaction vessel can establish a connection with the reaction vessel.

[0025] In view of the above, the inventors of the present invention provide a method for adjusting the attitude of a reaction vessel applied in a continuous vapor deposition furnace, a program storage medium, and a corresponding attitude adjustment device to meet the above requirements.

[0026] Implementation Method 1 The first aspect of this embodiment discloses a method for adjusting the attitude of a reaction vessel, applied to the chemical vapor deposition of silicon carbide materials, such as... Figure 1 As shown, it includes: In response to the initial positioning signal generated after the reaction vessel 1 reaches the designated position, the forward blocking component 2 is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component 2 moves to the blocking position, the lateral blocking component 3 is driven to move toward the reaction container 1 and abut against the reaction container 1 to push the reaction container 1 to move and adjust the attitude of the reaction container 1. In response to the second blocking signal emitted after the lateral blocking component 3 moves to the first set position, the reaction container 1 is pushed to continue moving along the moving path of the reaction container 1 so that the reaction container 1 comes into contact with the forward blocking component 2.

[0027] Accordingly, the second aspect of this embodiment also discloses an attitude adjustment device for a reaction vessel, such as... Figure 2 As shown, the equipment used in silicon carbide material manufacturing includes: A forward blocking component 2, which is movable to the movement path of the reaction vessel 1 and used to abut against the reaction vessel 1 to restrict the movement path of the reaction vessel 1; Lateral blocking components 3 are located on both sides of the movement path of the reaction container 1. The lateral blocking components 3 can move closer to or further away from the movement path. The lateral blocking components 3 can abut against the reaction container 1 and push the reaction container 1 to move to adjust its posture. A position detection component is used to detect the position of reaction vessel 1; Controller, the controller is used for: In response to the initial positioning signal generated after the reaction vessel 1 reaches the designated position, the forward blocking component 2 is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component 2 moves to the blocking position, the lateral blocking component 3 is driven to move toward the reaction container 1 and abut against the reaction container 1 to push the reaction container 1 to move and adjust the attitude of the reaction container 1. In response to the second blocking signal emitted after the lateral blocking component 3 moves to the first set position, the reaction container 1 is pushed to continue moving along the moving path of the reaction container 1 so that the reaction container 1 comes into contact with the forward blocking component 2.

[0028] In this embodiment, the attitude adjustment device of the reaction vessel can be installed in any cavity A of the silicon carbide material manufacturing equipment to adjust the attitude of the reaction vessel 1 within cavity A. Specifically, the forward blocking component 2 is used to adjust the position of the reaction vessel 1 in the direction of its movement path; the lateral blocking component 3 is used to adjust the position of the reaction vessel 1 in the horizontal and vertical directions of its movement path.

[0029] Specifically, when reaction vessel 1 needs to move from one cavity A to another cavity A along its movement path, the position detection component detects the real-time position of reaction vessel 1 and sends the position information to the controller. When the position detection component detects that reaction vessel 1 has moved to the designated position, the controller generates a preliminary positioning signal for reaction vessel 1 and, in response to this signal, drives the forward blocking component 2 to move onto the movement path of reaction vessel 1. As reaction vessel 1 continues to move until it reaches the blocking position, the controller generates a first blocking signal. It should be noted that the designated position of reaction vessel 1 mentioned above refers to any specific point on the path from one cavity A to the next cavity A. By setting the designated position before reaction vessel 1 reaches the blocking position, sufficient preparation time can be provided for the forward blocking component 2, ensuring that it can accurately block and limit further movement of reaction vessel 1 upon arrival. This significantly improves the accuracy of reaction vessel 1 positioning and the efficiency of the manufacturing process.

[0030] In response to the first blocking signal generated after the forward blocking component 2 moves to the blocking position, the controller drives the lateral blocking component 3 to move toward the reaction container 1 and abut against the reaction container 1, so as to push the reaction container 1 to move in a direction perpendicular to the movement path of the reaction container 1 and adjust the attitude of the reaction container 1.

[0031] When the position detection component detects that the reaction container 1 has reached the first preset position, the controller generates a second blocking signal and, in response to the second blocking signal, pushes the reaction container 1 to continue moving along its movement path so that the reaction container 1 abuts against the positive blocking component 2. Figure 3 As shown. At this point, the attitude adjustment of reaction vessel 1 is complete.

[0032] It is worth noting that in some embodiments, the aforementioned blocking position refers to the vicinity of the location where the reaction container 1 is connected to the gas supply system; when the reaction container 1 is in this blocking position, its position is not adjusted by the positive blocking component 2. In this embodiment, the reaction container 1 is first pushed by the lateral blocking component 3 to adjust its position in the horizontal and vertical directions of its movement path; finally, the reaction container 1 continues to move and abuts against the positive blocking component 2 to adjust its position in the direction of its movement path.

[0033] In other embodiments, the aforementioned blocking position refers to the position where the reaction container 1 abuts against the forward blocking component 2. When the reaction container 1 is in this blocking position, its position has already been initially adjusted by the forward blocking component 2. In this embodiment, the reaction container 1 is first abutted against by the forward blocking component 2 to initially adjust its position in the direction of its movement path. Subsequently, the reaction container 1 is pushed by the lateral blocking component 3 to adjust its position in the horizontal and vertical directions of its movement path. Finally, the reaction container 1 continues to move and abuts against the forward blocking component 2 to adjust its position in the direction of its movement path. It should be noted that in this embodiment, the process of the reaction container 1 being pushed by the lateral blocking component 3 to adjust its attitude may affect its position in the direction of its movement path. Therefore, in the final step, pushing the reaction container 1 again to further adjust its attitude through the forward blocking component 2 can effectively eliminate the attitude deviation caused by the push of the reaction container 1 by the lateral blocking component 3. Furthermore, compared with the above embodiments, in this embodiment, the reaction container 1 is first preliminarily adjusted in attitude by the forward blocking component 2, which can adjust the deflection of the reaction container 1 to a certain extent, reduce the attitude adjustment range of the lateral blocking component 3 on the reaction container 1, and thus effectively improve efficiency.

[0034] In some other preferred embodiments, when the reaction container 1 reaches the blocking position, the attitude of the reaction container 1 can be adjusted repeatedly by the forward blocking component 2 and the lateral blocking component 3, which effectively eliminates the possible deviation of the reaction container 1 during the attitude adjustment process, improves the accuracy of attitude adjustment, and thus ensures that the reaction container 1 can establish a connection with the gas supply system.

[0035] The attitude adjustment method and device for the reaction vessel adopt an automated control strategy. Through the cooperation of the position detection component and the controller, the real-time position of the reaction vessel 1 is detected and fed back, ensuring the precise positioning of the reaction vessel 1 during movement. Through the combined use of the forward blocking component 2 and the lateral blocking component 3, the attitude adjustment of the reaction vessel 1 in multiple directions is realized. Not only is the position of the reaction vessel 1 on the movement path adjusted, but its position in the direction perpendicular to the movement path is also adjusted, thereby ensuring the accurate connection between the reaction vessel 1 and the gas supply system.

[0036] In some embodiments, the attitude adjustment method further includes: In response to the fully in place signal generated after the reaction vessel 1 is fully in place, the forward blocking assembly 2 and the lateral blocking assembly 3 are driven to reset.

[0037] Specifically, after the position detection component detects that the reaction container 1 is fully in place, that is, when the attitude of the reaction container 1 meets the attitude requirements for establishing a connection with the gas supply system, the controller generates a fully in place signal and drives the forward blocking component 2 and the lateral blocking component 3 to reset, so as to provide the necessary avoidance for the reaction container 1 to establish a connection with the gas supply system and to prepare for the next attitude adjustment.

[0038] The third aspect of this embodiment also discloses a computer program that, when executed, can implement the attitude adjustment method described above.

[0039] The fourth aspect of this embodiment also discloses a readable storage medium having the computer program described above embedded within it.

[0040] In some embodiments, such as Figure 2 and Figure 3 As shown, the lateral blocking assembly 3 includes: The blocking part 31 is used to abut against the reaction vessel 1; The drive structure 32 is connected to the blocking part 31 and is used to drive the blocking part 31 to move. The drive structure 32 is electrically connected to the controller. Guide component 33 is connected to the blocking part 31 and is used to guide the movement of the blocking part 31; A pressure detector, electrically connected to the controller, is used to detect the pressure of the blocking part 31 against the reaction vessel 1.

[0041] In this embodiment, such as Figure 2As shown, a blocking part 31 is disposed inside cavity A; a guide assembly 33 is disposed on cavity A; and a drive structure 32 is disposed outside cavity A. The drive structure 32 can extend into cavity A through a through hole and connect to the blocking part 31, thereby pushing the blocking part 31 to move under the guidance of the wire assembly. Specifically, the guide assembly 33 can be a guide post, one end of which is connected to the blocking part 31, and the other end is connected to a guide hole disposed on cavity A. When the drive structure 32 pushes the blocking part 31 to move, the guide post can move relative to the guide hole, so as to guide the movement of the blocking part 31 through the cooperation of the guide post and the guide hole. It is worth noting that sealing material is provided in both the through hole and the guide hole to maintain the airtightness of cavity A. In this embodiment, the drive structure 32 can be a hydraulic cylinder or an electric cylinder.

[0042] The attitude adjustment device is also equipped with a pressure detector for detecting the pressure of the blocking part 31 against the reaction vessel 1. By using this pressure detector, the contact state between the blocking part 31 and the reaction vessel 1 can be accurately determined based on the detected pressure data, thereby ensuring the accuracy of attitude adjustment. Furthermore, the pressure data provided by the pressure detector can be fed back to the controller, helping the controller adjust the action of the drive structure 32 to achieve more precise attitude control. It can also be combined with data from the position detection component to provide the controller with more comprehensive information, thereby enabling a more intelligent control strategy.

[0043] In some embodiments, the specific structure of the forward blocking component 2 is similar to that of the lateral blocking component 3 described above, and will not be described in detail here.

[0044] In some embodiments, such as Figure 2 and Figure 3 As shown, the guide component 33 includes: A guide shaft extends from outside the housing 4 into the housing 4 through a through hole in the housing 4 of the manufacturing equipment, and the guide shaft is movable relative to the through hole; One end of the guide shaft located inside the housing 4 is connected to the blocking part 31, and the other end is connected to the driving structure 32.

[0045] Implementation Method 2 This embodiment is a further improvement based on the first embodiment, wherein the improvement is that the attitude adjustment method further includes: Acquire the movement signal generated when the position sensor detects that the reaction vessel 1 has moved toward a specified position; In response to the movement signal, the lateral blocking component 3 is driven to move to a second set position to guide the movement of the reaction container 1.

[0046] The reaction vessel 1 needs to move from one cavity A to another cavity A along the movement path of the reaction vessel 1. The position detection component detects the real-time position of the reaction vessel 1. When the position detection component detects that the reaction vessel 1 is moving towards the specified position, the controller generates a movement signal.

[0047] In response to the movement signal, the controller drives the lateral blocking component 3 to move to a second predetermined position to guide the movement of the reaction vessel 1. Specifically, as... Figure 4 As shown, when the lateral blocking component 3 moves to the second predetermined position, during the movement of the reaction container 1 towards the designated position, the lateral blocking component 3 can abut against the side of the reaction container 1 to restrict the movement of the reaction container 1 in the direction perpendicular to the movement of the reaction container 1, thereby achieving the purpose of guiding the movement of the reaction container 1. The purpose of this arrangement is that, during the movement of the reaction container 1 from one cavity A to another cavity A, the lateral blocking component 3 abuts against the side of the reaction container 1 to guide the movement of the reaction container 1, so that the attitude of the reaction container 1 can be initially adjusted during the movement, thereby reducing the attitude adjustment range of the reaction container 1 after reaching the designated position, and thus effectively improving the attitude adjustment efficiency of the reaction container 1.

[0048] It is worth noting that, in this embodiment, as described above, the lateral blocking component 3 located at the second predetermined position is used to guide the movement of the reaction container 1, so as to perform preliminary attitude adjustment on the reaction container 1 during its movement from one cavity A to another cavity A. Therefore, the movement signal can be generated when the reaction container 1 begins to move from one cavity A to another cavity A, or it can be generated before the reaction container 1 reaches the position corresponding to the lateral blocking component 3. It should be noted that this movement signal serves as a drive signal to move the lateral blocking component 3 to the second predetermined position; therefore, in order to ensure that the lateral blocking component 3 can achieve its preliminary attitude adjustment function, it is only necessary to ensure that the lateral blocking component 3 is located at the second predetermined position before the reaction container 1 reaches the position corresponding to the lateral blocking component 3.

[0049] In some preferred embodiments, the lateral blocking assembly 3 includes a rear blocking assembly 5, a central blocking assembly 6, and a front blocking assembly 7 arranged sequentially along the forward direction of the reaction vessel 1, wherein the rear blocking assembly 5, the central blocking assembly 6, and the front blocking assembly 7 correspond to the rear, middle, and front parts of the reaction vessel 1, respectively.

[0050] In this embodiment, the lateral blocking assembly 3 includes a rear blocking assembly 5, a central blocking assembly 6, and a front blocking assembly 7 arranged sequentially along the forward direction of the reaction vessel 1; as shown... Figure 4As shown, when the rear-end blocking component 5, the central blocking component 6, and the front-end blocking component 7 are respectively located in their corresponding second predetermined positions, the line connecting the three components on the same side is inclined in the opposite direction to the movement path of the reaction container 1. At this time, the rear-end blocking component 5, the central blocking component 6, and the front-end blocking component 7 guide the moving reaction container 1. This arrangement further improves the guiding effect of the lateral blocking component 3 on the reaction container 1, and allows for gradual adjustment of the reaction container 1's attitude through the rear-end blocking component 5, the central blocking component 6, and the front-end blocking component 7, resulting in good attitude adjustment.

[0051] Since the lateral blocking assembly 3 needs to abut against the reaction vessel 1 during its movement, in order to avoid damage to the surface of the reaction vessel 1 during the abutment process, in some other preferred embodiments, the blocking part 31 includes: The bracket 311 is connected to the drive structure 32 and the guide assembly 33 respectively; The roller 312 is rotatably mounted on the support 311 and is used to abut against the reaction vessel 1.

[0052] With the above configuration, the contact between the roller 312, which is used to abut against the reaction container 1, and the reaction container 1 is a rolling contact, which can effectively reduce the friction between the reaction container 1 and the roller 312, thereby avoiding damage to the surface of the reaction container 1 caused by the lateral blocking component 3 during the contact process.

[0053] Implementation Method 3 This embodiment discloses a method for adjusting the attitude of a reaction vessel. This embodiment is a further improvement upon the first and second embodiments, the improvement being that the step of the lateral blocking assembly 3 pushing the reaction vessel 1 to adjust its attitude specifically includes: Drive the lateral blocking component 3 on the same side to move toward the first set position; In response to a lateral positioning signal generated when one side of the lateral blocking component 3 moves to the first set position, the other side of the lateral blocking component 3 is driven to move and the reaction component is pushed to move.

[0054] During its movement, the reaction vessel 1 may deviate horizontally or vertically in the direction of its movement path. Therefore, the lateral blocking component 3 is needed to adjust the position of the reaction vessel 1 in the horizontal and vertical directions of its movement path. Specifically, in this embodiment, when the position detection component detects that the forward blocking component 2 has moved to the blocking position, the controller generates a first blocking signal. Subsequently, in response to the first blocking signal, the controller drives the lateral blocking component 3 on the same side to move toward a first set position. And in response to the lateral positioning signal generated when the lateral blocking component 3 on one side moves to the first set position, the controller drives the lateral blocking component 3 on the other side to move to its corresponding first set position.

[0055] It should be noted that in this embodiment, when both lateral blocking components 3 are located in the first predetermined position, the lateral blocking components 3 on both sides abut against the sides of the reaction container 1, indicating that the position of the reaction container 1 in the horizontal and vertical directions of its movement path meets the requirements. It is worth mentioning that in this embodiment, the lateral blocking components 3 on both sides move sequentially to their corresponding first predetermined positions. The lateral blocking component 3 on the side that moves first can serve as a reference plane, restricting the movement of the reaction container 1 in that direction; while the lateral blocking component 3 on the other side that moves later is used to push the reaction container 1, causing the sides of the reaction container 1 to abut against the lateral blocking components 3 on both sides.

[0056] It is worth noting that in this embodiment, since the direction of offset of the reaction container 1 in the horizontal and vertical directions of its movement path is uncertain, there may be a situation where the lateral blocking component 3 on the side that moves first needs to push the reaction container 1 to move before it can move to its corresponding first set position. In this case, the lateral blocking component 3 on the side that moves first is used to make initial attitude adjustments to the reaction container 1 in the horizontal and vertical directions of its movement path; while the lateral blocking component 3 on the other side that moves later is used to make further attitude adjustments to the reaction container 1 to ensure that the position of the reaction container 1 in the horizontal and vertical directions of its movement path meets the requirements.

[0057] Additionally, it should be noted that during the movement of the reaction vessel 1, it may deflect relative to its movement path. In this case, after the lateral blocking component 3 on the side that moves first moves to its corresponding first set position, the lateral blocking component 3 on the other side that moves later will, on the one hand, push the reaction vessel 1 to move in the horizontal radial direction of its movement path, and on the other hand, push the reaction vessel 1 to rotate relative to its movement path, so that the two sides of the reaction vessel 1 abut against the lateral blocking components 3 on both sides respectively, ensuring that the position of the reaction vessel 1 in the horizontal and vertical directions of its movement path meets the requirements.

[0058] In some preferred embodiments, the step of the lateral blocking assembly 3 pushing the reaction vessel 1 to adjust the attitude of the reaction vessel 1 specifically includes: Drive the lateral blocking component 3 to move to the first predetermined position; Acquire pressure data generated by the pressure detector detecting the pressure of the lateral blocking component 3, and compare the pressure data with the set pressure data; If the pressure data detected by the pressure detector is greater than the set pressure data, the corresponding lateral blocking component 3 will be driven to continue moving a set distance and then reset.

[0059] In the above embodiments, due to the material's ability to deform slightly, when the lateral blocking components 3 are in the first predetermined position, although both sides of the lateral blocking components 3 are abutting against the sides of the reaction container 1, if there is still a slight deviation in the posture of the reaction container 1, the lateral blocking components 3 will undergo slight deformation. In other words, after the posture adjustment in the above embodiments, the position of the reaction container 1 in the horizontal and vertical directions of its movement path will have an error compared to the predetermined final position.

[0060] Therefore, in this embodiment, the pressure of the lateral blocking component 3 is detected by a pressure detector to obtain the pressure data of the lateral blocking component 3, and the pressure data is compared with the set pressure data. If the pressure data detected by the pressure detector is greater than the set pressure data, it indicates that there is an error between the position of the reaction container 1 in the horizontal and vertical directions of its movement path and the set final position. At this time, the controller drives the corresponding lateral blocking component 3 to continue moving a set distance to further finely adjust the attitude of the reaction container 1 and reset it. In this way, the attitude of the reaction container 1 can be accurately adjusted.

[0061] In the above embodiments, the lateral blocking assembly 3 includes a rear blocking assembly 5, a central blocking assembly 6, and a front blocking assembly 7 arranged sequentially along the forward direction of the reaction container 1. The rear blocking assembly 5, the central blocking assembly 6, and the front blocking assembly 7 correspond to the rear, middle, and front parts of the reaction container 1, respectively. Furthermore, in the above embodiments, to address the situation where the reaction container 1 deflects relative to its movement path during movement, the lateral blocking assembly 3 pushes the reaction container 1 to move, and during its movement, pushes the reaction container 1 to rotate to solve the deflection problem. In some preferred embodiments, to better solve the deflection problem of the reaction container 1, in the step of the lateral blocking assembly 3 pushing the reaction container 1 to adjust the attitude of the reaction container 1, the attitude adjustment method further includes: Acquire pressure data generated by the pressure detector detecting the pressure of the front end blocking component 7 and the rear end blocking component 5, and compare the pressure data with the corresponding set pressure data; If the detected pressure data is greater than the corresponding set pressure data, keep the central blocking component 6 stationary, drive the lateral blocking component 3 corresponding to the pressure data to continue moving a set distance, and then reset.

[0062] Specifically, in this embodiment, after the lateral blocking component 3 moves to its corresponding first set position, the pressure of the front blocking component 7 and the rear blocking component 5 are detected by pressure detectors to obtain their corresponding pressure data. The pressure data is compared with the corresponding set pressure data to determine the deflection of the reaction vessel 1. If the detected pressure data is greater than the corresponding set pressure data, the central blocking component 6 remains stationary, and the controller drives the lateral blocking component 3 corresponding to the pressure data to continue moving a set distance and then resets. In this embodiment, the central blocking component 6 remains stationary, and this is used to determine the rotation axis of the reaction vessel 1. Subsequently, by driving the lateral blocking component 3 (front blocking component 7 or rear blocking component 5) with the larger pressure data to move, the reaction vessel 1 is pushed to rotate around its rotation axis, thereby adjusting the attitude of the reaction vessel 1 to resolve the deflection of the reaction vessel 1.

[0063] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present invention and not to limit them. Although the embodiments of the present invention have been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solutions of the embodiments of the present invention, and these modifications or equivalent substitutions cannot cause the modified technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for adjusting the attitude of a reaction vessel, applied to the chemical vapor deposition of silicon carbide materials, characterized in that, include: In response to the initial positioning signal generated after the reaction vessel reaches the designated position, the forward blocking component is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component moves to the blocking position, the lateral blocking component is driven to move toward the reaction vessel and abut against the reaction vessel to push the reaction vessel to move and adjust the attitude of the reaction vessel. In response to a second blocking signal emitted after the lateral blocking assembly moves to the first set position, the reaction container is pushed to continue moving along the movement path of the reaction container so that the reaction container comes into contact with the forward blocking assembly.

2. The attitude adjustment method according to claim 1, characterized in that, Also includes: In response to the fully in place signal generated after the reaction vessel is fully in place, the forward and lateral barrier components are driven to reset.

3. The attitude adjustment method according to claim 2, characterized in that, Also includes: Acquire the movement signal generated when the position sensor detects that the reaction vessel has moved toward a specified position; In response to the movement signal, the lateral blocking assembly is driven to move to a second predetermined position to guide the movement of the reaction vessel.

4. The attitude adjustment method according to claim 2, characterized in that, The step of the lateral restraint assembly pushing the reaction vessel to adjust its attitude specifically includes: Drive the lateral blocking components on the same side to move toward the first predetermined position; In response to a lateral positioning signal generated when one side of the lateral blocking component moves to a first set position, the other side of the lateral blocking component is driven to move and the reaction component is pushed to move.

5. The attitude adjustment method according to claim 2, characterized in that, The step of the lateral blocking assembly pushing the reaction vessel to adjust its attitude specifically includes: Drive the lateral blocking assembly to move to the first predetermined position; Acquire pressure data generated by the pressure detector detecting the pressure of the lateral blocking assembly, and compare the pressure data with a set pressure data; If the pressure data detected by the pressure detector is greater than the set pressure data, the corresponding lateral blocking component will be driven to continue moving a set distance and then reset.

6. The attitude adjustment method according to claim 2, characterized in that, The lateral blocking assembly includes a rear blocking assembly, a central blocking assembly, and a front blocking assembly arranged sequentially along the forward direction of the reaction vessel, with the rear blocking assembly, the central blocking assembly, and the front blocking assembly corresponding to the rear, middle, and front of the reaction vessel, respectively. In the step of the lateral blocking assembly pushing the reaction vessel to adjust the attitude of the reaction vessel, the attitude adjustment method further includes: Acquire pressure data generated by the pressure detector detecting the pressure of the front-end blocking component and the rear-end blocking component, and compare the pressure data with the corresponding set pressure data; If the detected pressure data is greater than the corresponding set pressure data, keep the central blocking component stationary, drive the lateral blocking component corresponding to the pressure data to continue moving a set distance, and then reset.

7. A computer program, characterized in that, When the computer program is executed, it can implement the attitude adjustment method as described in any one of claims 1 to 6.

8. A readable storage medium, characterized in that, The readable storage medium contains the computer program as described in claim 7.

9. A reaction vessel attitude adjustment device, applied to silicon carbide material manufacturing equipment, characterized in that, include: A forward blocking assembly, which is movable into the movement path of the reaction vessel and abuts against the reaction vessel to restrict the movement path of the reaction vessel; Lateral blocking components are located on both sides of the movement path of the reaction vessel. The lateral blocking components can move closer to or further away from the movement path. The lateral blocking components can abut against the reaction vessel and push the reaction vessel to move in order to adjust its posture. Position detection component, used to detect the position of the reaction vessel; Controller, the controller is used for: In response to the initial positioning signal generated after the reaction vessel reaches the designated position, the forward blocking component is driven to move to the blocking position; In response to the first blocking signal generated after the forward blocking component moves to the blocking position, the lateral blocking component is driven to move toward the reaction vessel and abut against the reaction vessel to push the reaction vessel to move and adjust the attitude of the reaction vessel. In response to a second blocking signal emitted after the lateral blocking assembly moves to the first set position, the reaction container is pushed to continue moving along the movement path of the reaction container so that the reaction container comes into contact with the forward blocking assembly.

10. The attitude adjustment device according to claim 9, characterized in that, The lateral blocking assembly includes: A blocking part is used to abut against the reaction vessel; A drive structure, connected to the blocking part, is used to drive the blocking part to move; the drive structure is electrically connected to the controller. A guide assembly, connected to the blocking part, is used to guide the movement of the blocking part; A pressure detector, electrically connected to the controller, is used to detect the pressure of the blocking part against the reaction vessel.

11. The attitude adjustment device according to claim 10, characterized in that, The lateral blocking assembly includes a rear blocking assembly, a central blocking assembly, and a front blocking assembly arranged sequentially along the forward direction of the reaction vessel, with the rear blocking assembly, the central blocking assembly, and the front blocking assembly corresponding to the rear, middle, and front parts of the reaction vessel, respectively.

12. The attitude adjustment device according to claim 11, characterized in that, The guiding component includes: A guide shaft extends from outside the housing into the housing through a through hole in the housing of the manufacturing equipment, and the guide shaft is movable relative to the through hole; One end of the guide shaft located inside the housing is connected to the blocking part, and the other end is connected to the drive structure.

13. The attitude adjustment device according to claim 10, characterized in that, The blocking part includes: The bracket is connected to the drive structure and the guide assembly, respectively. A roller, rotatably mounted on the support, is used to abut against the reaction vessel.

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