Coating equipment with adjustable sputtering distance

Abstract

The invention discloses coating equipment with an adjustable sputtering distance, and aims to complete rotation and distance adjustment of a target material assembly through cooperation of a distance adjustment module and a driving mechanism so as to improve the coating quality. According to the technical scheme, the coating equipment comprises an equipment main body and the driving mechanism; a process cavity is formed in the equipment main body, a conveying mechanism and a target material assembly are arranged in the process cavity, a coating position is arranged on the conveying mechanism, the conveying mechanism is used for conveying a substrate frame to the coating position, and the target material assembly is used for coating a substrate on the substrate frame on the coating position in the Y-axis direction; the driving mechanism is in transmission connection with the target material assembly and is used for driving the target material assembly to rotate; wherein the equipment main body is provided with a distance adjusting module, the distance adjusting module is in transmission connection with the target material assembly and the driving mechanism, and the distance adjusting module is used for driving the target material assembly and the driving mechanism to move in the Y-axis direction so as to adjust the distance between the target material assembly and the conveying mechanism.

Description

Technical Field

[0001] This invention belongs to the field of vacuum coating, and more specifically, relates to coating equipment with adjustable sputtering distance. Background Technology

[0002] Magnetron sputtering coating refers to a coating technology that uses the coating material as the target cathode, and uses argon ions to bombard the target material to generate cathode sputtering, which sputters the target material atoms onto the workpiece to form a deposition layer. CN108774731A discloses a vacuum chamber substrate holder lifting mechanism for a vacuum coating machine. Two cylinders are fixed below the vacuum chamber floor plate, and the piston rods of the two cylinders are connected to the same end plate. Each end of the end plate is provided with a support rod, which penetrates the vacuum chamber floor plate and extends into the vacuum chamber. The top of the support rod is connected to a support seat, and a sealing plate is provided where the support rod passes through the vacuum chamber floor plate. A corrugated tube is sleeved on the support rod between the vacuum chamber and the end plate, and the two ends of the corrugated tube are respectively sealed to the sealing plate and the end plate.

[0003] In the above technical solution, two sets of cylinders extend or retract simultaneously, driving the bellows to stretch or contract and the internal support rod to descend or rise. The support seat moves linearly up and down along the guide rod. When the support seat rises, it can lift the substrate holder, causing the substrate holder to detach from the transmission mechanism. However, during coating, different substrate materials have different requirements for coating thickness. In the above technical solution, the distance between the substrate holder and the target material is fixed during coating. This makes it difficult for workers to adjust the distance between the substrate holder and the target material according to the substrate material, making it difficult to meet the diverse coating process requirements. Summary of the Invention

[0004] The main objective of this invention is to provide a coating device with adjustable sputtering distance, which aims to improve the coating quality by using a distance adjustment module and a drive mechanism to rotate and adjust the distance of the target assembly.

[0005] According to a first aspect of the present invention, a coating apparatus with adjustable sputtering distance is provided, comprising an apparatus body and a drive mechanism; the apparatus body has a process cavity, the process cavity is provided with a conveying mechanism and a target assembly, the conveying mechanism is provided with a coating position, the conveying mechanism is used to convey a substrate holder to the coating position, and the target assembly is used to coat the substrate on the substrate holder at the coating position along the Y-axis direction;

[0006] The drive mechanism is connected to the target assembly via a transmission, and the drive mechanism is used to drive the target assembly to rotate.

[0007] The main body of the equipment is equipped with a distance adjustment module, which is connected to the target assembly and the drive mechanism. The distance adjustment module is used to drive the target assembly and the drive mechanism to move along the Y-axis, thereby adjusting the distance between the target assembly and the conveying mechanism.

[0008] In the above-mentioned coating equipment with adjustable sputtering distance, the drive mechanism includes a first motor, a first bellows, and a first transmission component;

[0009] The first motor is located outside the process chamber and is connected to the pitch adjustment module. One end of the first bellows is connected to the outer wall of the main body of the equipment, and the other end of the first bellows is connected to the first motor.

[0010] One end of the shaft of the first motor passes through the first bellows and the main body of the equipment along the Y-axis and extends into the process chamber. The shaft of the first motor is movably connected to the main body of the equipment.

[0011] The first transmission component is located inside the process cavity. One end of the first transmission component is connected to the rotating shaft of the first motor, and the other end of the first transmission component is connected to the target base of the target assembly. The first motor drives the target base of the target assembly to rotate through the transmission of the first transmission component.

[0012] In the above-mentioned coating equipment with adjustable sputtering distance, the first transmission component includes a first guide rail, a first reducer, and a first synchronous belt;

[0013] The first guide rail is located inside the process cavity. The length of the first guide rail extends along the Y-axis. One end of the first guide rail is connected to the inner wall of the process cavity near the target assembly. The first guide rail is provided with a first slider.

[0014] The first reducer is fixed on the first slider, and the shaft of the first motor is connected to the first reducer; the first synchronous belt is sleeved on the target base of the target assembly and the power output end of the first reducer.

[0015] In the above-mentioned coating equipment with adjustable sputtering distance, the drive mechanism also includes a second motor, a second bellows, and a second transmission component;

[0016] The second motor is located outside the process chamber and connected to the pitch adjustment module. The second motor is located below the first motor. One end of the second corrugated pipe is connected to the outer wall of the main body of the equipment, and the other end of the second corrugated pipe is connected to the second motor.

[0017] One end of the shaft of the second motor passes through the second bellows and the main body of the equipment along the Y-axis and extends into the process chamber. The shaft of the second motor is movably connected to the main body of the equipment.

[0018] The second transmission component is located inside the process cavity. Two ends of the second transmission component are connected to the rotating shaft of the second motor, and the other end of the second transmission component is connected to the magnetic rod base of the target assembly. The second motor drives the magnetic rod base of the target assembly to rotate through the transmission of the second transmission component.

[0019] In the above-mentioned coating equipment with adjustable sputtering distance, the second transmission component includes a second guide rail, a second reducer, and a second synchronous belt;

[0020] The second guide rail is located inside the process cavity and below the first guide rail. The length of the second guide rail extends along the Y-axis. One end of the second guide rail is connected to the inner wall of the process cavity near the target assembly. The second guide rail is located below the first guide rail and has a second slider on it.

[0021] The second reducer is fixed on the second slider, and the shaft of the second motor is connected to the second reducer; the second synchronous belt is sleeved on the magnetic rod base of the target assembly and the power output end of the second reducer.

[0022] In the above-mentioned coating equipment with adjustable sputtering distance, the target assembly is arranged vertically, and the distance adjustment module includes a first linear module, a second linear module, a third linear module and a third corrugated pipe provided on the main body of the equipment. The first linear module, the second linear module and the third linear module are arranged sequentially from top to bottom.

[0023] The first linear module is equipped with a sliding component, and one end of the third bellows is connected to the outer wall of the main body of the equipment, while the other end is connected to the sliding component.

[0024] The sliding component is equipped with a connector. One end of the connector passes through the third bellows and the main body of the equipment along the Y-axis and extends into the process cavity. The connector is movably connected to the main body of the equipment. The upper end of the target material assembly is rotatably connected to the bottom of the connector. The first linear module is used to drive the sliding component to move along the Y-axis, thereby driving the target material assembly to move along the Y-axis.

[0025] The first motor is connected to the second linear module, which drives the first motor to move along the Y-axis. The second motor is connected to the third linear module, which drives the second motor to move along the Y-axis.

[0026] In the above-mentioned coating equipment with adjustable sputtering distance, the bottom wall of the process chamber is also provided with a slide rail. The length direction of the slide rail extends along the Y-axis. A sliding seat is provided on the slide rail, and the lower end of the magnetic rod base of the target assembly is rotatably connected to the sliding seat.

[0027] In the above-mentioned coating equipment with adjustable sputtering distance, there are multiple target components, which are arranged at intervals along the X-axis. The drive mechanism corresponds to each target component, and the distance adjustment module corresponds to each drive mechanism.

[0028] In the aforementioned coating equipment with adjustable sputtering distance, a vacuum system is also provided on the main body of the equipment. The vacuum system is used to create a vacuum environment in the process chamber.

[0029] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0030] In this invention, the target assembly is rotated by a drive mechanism. Furthermore, when it is necessary to adjust the distance between the target assembly and the conveying mechanism, the distance adjustment module can be activated to drive the drive mechanism and the target assembly to move along the Y-axis, thereby adjusting the distance between the substrate and the target assembly. In this way, the target assembly can be driven to rotate, and the worker can adjust the distance between the target assembly and the substrate according to the process requirements, thereby improving the coating quality. Attached Figure Description

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0032] Figure 1 This is one of the structural schematic diagrams of the coating equipment with adjustable sputtering distance according to the first embodiment of the present invention;

[0033] Figure 2 This is a second schematic diagram of the structure of the coating equipment with adjustable sputtering distance according to the first embodiment of the present invention;

[0034] Figure 3 This is the third schematic diagram of the structure of the coating equipment with adjustable sputtering distance according to the first embodiment of the present invention;

[0035] The figure labels for each figure are as follows:

[0036] 1. Equipment body; 11. Process chamber; 12. Slide rail; 121. Sliding seat; 2. Target assembly; 21. Target base; 22. Magnetic rod base; 3. Drive mechanism; 31. First motor; 32. First transmission component; 321. First guide rail; 322. First slider; 323. First reducer; 324. First synchronous belt; 325. First bellows; 33. Second motor; 34. Second transmission component; 341. Second guide rail; 342. Second slider; 343. Second reducer; 344. Second synchronous belt; 345. Second bellows; 4. Adjustment module; 41. First linear module; 411. Sliding component; 412. Connecting component; 413. Third bellows; 42. Second linear module; 43. Third linear module; 5. Substrate. Detailed Implementation

[0037] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0038] The following disclosure provides many different implementations or examples for different ways of implementing the present invention.

[0039] Reference Figures 1 to 3As shown, a coating device with adjustable sputtering distance includes a main body 1 and a drive mechanism 3. The main body 1 has a process cavity 11, and the process cavity 11 is provided with a conveying mechanism and a target assembly 2. The conveying mechanism is provided with a coating position. The conveying mechanism is used to convey the substrate 5 frame to the coating position. The target assembly 2 is used to coat the substrate 5 on the substrate 5 frame at the coating position along the Y-axis direction.

[0040] The drive mechanism 3 is connected to the target assembly 2 via a transmission, and the drive mechanism 3 is used to drive the target assembly 2 to rotate.

[0041] The main body 1 of the equipment is equipped with a distance adjustment module 4, which is connected to the target assembly 2 and the drive mechanism 3. The distance adjustment module 4 is used to drive the target assembly 2 and the drive mechanism 3 to move along the Y-axis, thereby adjusting the distance between the target assembly 2 and the conveying mechanism.

[0042] The conveying mechanism has been disclosed in Chinese patent CN104404465A, so the structure of the conveying mechanism will not be described in detail in this embodiment.

[0043] The target assembly 2 has been disclosed in Chinese patent CN223535193U, so the structure of the target assembly 2 will not be described in detail in this embodiment.

[0044] The structure of the rotating connection of the target assembly 2 can be found in Chinese CN202422922047, so the structure of the rotating connection of the target assembly 2 will not be described in detail in this embodiment.

[0045] In this design, the substrate 5 holder carries the substrate 5. The substrate 5 holder in the process cavity 11 is transported by a conveying mechanism. After the substrate 5 holder is transported to the coating position, the conveying mechanism stops. Then, the drive mechanism 3 drives the target assembly 2 to rotate to coat the substrate 5 on the substrate 5 holder along the Y-axis. When the worker needs to adjust the distance between the substrate 5 on the substrate 5 holder and the target, the distance adjustment module 4 is activated. The distance adjustment module 4 drives the target assembly 2 and the drive mechanism 3 to move along the Y-axis, thereby changing the distance between the target assembly 2 and the conveying mechanism, and thus adjusting the distance between the substrate 5 on the substrate 5 holder on the conveying mechanism and the target assembly 2. In this way, the coating distance between the target assembly 2 and the substrate 5 can be adjusted to meet the coating process requirements of different substrate 5 materials and different film thicknesses, thereby improving the coating quality.

[0046] In this embodiment, the drive mechanism 3 includes a first motor 31, a first bellows 325, and a first transmission component 32;

[0047] The first motor 31 is located outside the process cavity 11 and is connected to the pitch adjustment module 4. One end of the first bellows 325 is connected to the outer wall of the equipment body 1, and the other end of the first bellows 325 is connected to the first motor 31.

[0048] One end of the shaft of the first motor 31 passes through the first bellows 325 and the equipment body 1 along the Y-axis and then extends into the process chamber 11. The shaft of the first motor 31 is movably connected to the equipment body 1.

[0049] The first transmission component 32 is disposed in the process cavity 11. One end of the first transmission component 32 is connected to the rotating shaft of the first motor 31, and the other end of the first transmission component 32 is connected to the target base 21 of the target assembly 2. The first motor 31 drives the target base 21 of the target assembly 2 to rotate through the transmission of the first transmission component 32.

[0050] The first transmission component 32 includes a first guide rail 321, a first reducer 323, and a first synchronous belt 324;

[0051] The first guide rail 321 is disposed in the process cavity 11. The length direction of the first guide rail 321 extends along the Y-axis direction. One end of the first guide rail 321 is connected to the inner wall of the process cavity 11 near the target assembly 2. The first guide rail 321 is provided with a first slider 322.

[0052] The first reducer 323 is fixed on the first slider 322, and the shaft of the first motor 31 is connected to the first reducer 323; the first synchronous belt 324 is sleeved on the target base 21 of the target assembly 2 and the power output end of the first reducer 323.

[0053] The drive mechanism 3 also includes a second motor 33, a second bellows 345, and a second transmission component 34;

[0054] The second motor 33 is located outside the process cavity 11 and connected to the pitch adjustment module 4. The second motor 33 is located below the first motor 31. One end of the second corrugated pipe 345 is connected to the outer wall of the equipment body 1, and the other end of the second corrugated pipe 345 is connected to the second motor 33.

[0055] One end of the shaft of the second motor 33 passes through the second bellows 345 and the main body 1 along the Y-axis and extends into the process chamber 11. The shaft of the second motor 33 is movably connected to the main body 1.

[0056] The second transmission component 34 is located inside the process cavity 11. Two ends of the second transmission component 34 are connected to the rotating shaft of the second motor 33, and the other end of the second transmission component 34 is connected to the magnetic rod base 22 of the target assembly 2. The second motor 33 drives the magnetic rod base 22 of the target assembly 2 to rotate through the transmission of the second transmission component 34.

[0057] The second transmission component 34 includes a second guide rail 341, a second reducer 343, and a second synchronous belt 344;

[0058] The second guide rail 341 is disposed in the process cavity 11 and located below the first guide rail 321. The length direction of the second guide rail 341 extends along the Y-axis. One end of the second guide rail 341 is connected to the inner wall of the process cavity 11 near the target assembly 2. The second guide rail 341 is located below the first guide rail 321. A second slider 342 is provided on the second guide rail 341.

[0059] The second reducer 343 is fixed on the second slider 342, and the shaft of the second motor 33 is connected to the second reducer 343; the second synchronous belt 344 is sleeved on the magnetic rod base 22 of the target assembly 2 and the power output end of the second reducer 343.

[0060] The first reducer 323 can be fixed to the first slider 322 by bolts or welding, and the second reducer 343 can also be fixed to the second slider 342 by the same fixing method.

[0061] Generally, when it is necessary to drive the target material of the target material assembly 2 to rotate, the first motor 31 is activated to drive the power output end of the first reducer 323 to move. The power output end of the first reducer 323 drives the first synchronous belt 324 to move, thereby driving the target material base 21 of the target material assembly 2 to rotate, and then driving the target material of the target material assembly 2 to rotate.

[0062] When the magnetic rod of the target assembly 2 needs to be rotated, the second motor 33 is activated to drive the power output end of the second reducer 343 to move. The power output end of the second reducer 343 drives the second synchronous belt 344 to move, thereby driving the magnetic rod base 22 of the target assembly 2 to rotate, and then driving the magnetic rod of the target assembly 2 to rotate. This working method helps to improve the uniformity of the coating, while the first corrugated pipe 325 and the second corrugated pipe 345 can help improve the sealing performance.

[0063] Preferably, the target assembly 2 is arranged vertically, and the distance adjustment module 4 includes a first linear module 41, a second linear module 42, a third linear module 43 and a third corrugated pipe 413 disposed on the main body 1 of the equipment. The first linear module 41, the second linear module 42 and the third linear module 43 are arranged sequentially from top to bottom.

[0064] The first linear module 41 is provided with a sliding member 411, and one end of the third bellows 413 is connected to the outer wall of the main body 1 of the equipment, and the other end is connected to the sliding member 411.

[0065] The sliding member 411 is provided with a connecting member 412. One end of the connecting member 412 passes through the third bellows 413 and the equipment body 1 along the Y-axis and extends into the process cavity 11. The connecting member 412 is movably connected to the equipment body 1. The upper end of the target material assembly 2 is rotatably connected to the bottom of the connecting member 412. The first linear module 41 is used to drive the sliding member 411 to move along the Y-axis, thereby driving the target material assembly 2 to move along the Y-axis.

[0066] The first motor 31 is connected to the second linear module 42, which is used to drive the first motor 31 to move along the Y-axis. The second motor 33 is connected to the third linear module 43, which is used to drive the second motor 33 to move along the Y-axis.

[0067] Specifically, when it is necessary to adjust the distance between the target assembly 2 and the conveying mechanism, the first linear module 41, the second linear module 42, and the third linear module 43 operate synchronously. The first linear module 41 drives the sliding member 411 to move along the Y-axis direction, and drives the target assembly 2 to move along the Y-axis direction through the connecting member 412. At the same time, the second linear module 42 drives the second motor 33 to move along the Y-axis direction, and the third linear module 43 drives the third motor to move along the Y-axis direction. The first linear module 41, the second linear module 42, and the third linear module 43 cooperate to complete the movement of the target assembly 2, thereby completing the distance adjustment between the target assembly 2 and the conveying mechanism.

[0068] More preferably, the bottom wall of the process cavity 11 is also provided with a slide rail 12, the length direction of which extends along the Y-axis. A sliding seat 121 is provided on the slide rail 12, and the lower end of the magnetic rod base 22 of the target assembly 2 is rotatably connected to the sliding seat 121. The guide rail and slider can improve the stability of the target assembly 2 when it moves.

[0069] Preferably, there are multiple target material components 2, which are arranged at intervals along the X-axis. The drive mechanism 3 corresponds to each target material component 2, and the distance adjustment module 4 corresponds to each drive mechanism 3.

[0070] Specifically, multiple target material assemblies 2 are arranged at intervals along the X-axis. When the conveying mechanism transports the substrate 5 frame to the coating position, the worker can adjust the distance between the target material assembly 2 and the conveying mechanism by controlling the distance adjustment module 4 corresponding to the target material assembly 2, thereby improving the coating quality.

[0071] Preferably, the main body 1 of the equipment is also provided with a vacuum system (not shown in the figure), which is used to create a vacuum environment in the process chamber 11.

[0072] The vacuum system has been disclosed in Chinese patent CN116497337A, so the structure of the vacuum system will not be described in detail in this embodiment.

[0073] This embodiment also includes a controller, which has a PLC system well known to those skilled in the art. The drive mechanism 3, the conveying mechanism, and the pitch adjustment module 4 are electrically connected to the controller. The PLC system controls the operations mentioned above. Regarding the electrical connection, an electrical connection well known to those skilled in the art is used, or of course, a wire harness connection can also be used.

Claims

1. A coating apparatus with adjustable sputtering distance, characterized in that, The device includes a main body and a drive mechanism. The main body has a process cavity, and the process cavity is equipped with a conveying mechanism and a target assembly. The conveying mechanism is equipped with a coating position. The conveying mechanism is used to convey a substrate holder to the coating position. The target assembly is used to coat the substrate on the substrate holder at the coating position along the Y-axis direction. The drive mechanism is connected to the target assembly in a transmission manner, and the drive mechanism is used to drive the target assembly to rotate; The main body of the equipment is provided with a distance adjustment module, which is connected to the target assembly and the drive mechanism. The distance adjustment module is used to drive the target assembly and the drive mechanism to move along the Y-axis, thereby adjusting the distance between the target assembly and the conveying mechanism.

2. The coating equipment with adjustable sputtering distance according to claim 1, characterized in that, The drive mechanism includes a first motor, a first bellows, and a first transmission component; The first motor is located outside the process cavity and connected to the pitch adjustment module. One end of the first bellows is connected to the outer wall of the main body of the equipment, and the other end of the first bellows is connected to the first motor. One end of the shaft of the first motor passes through the first bellows and the main body of the equipment along the Y-axis and extends into the process cavity. The shaft of the first motor is movably connected to the main body of the equipment. The first transmission component is disposed inside the process cavity. One end of the first transmission component is connected to the rotating shaft of the first motor, and the other end of the first transmission component is connected to the target base of the target assembly. The first motor drives the target base of the target assembly to rotate through the transmission of the first transmission component.

3. The coating equipment with adjustable sputtering distance according to claim 2, characterized in that, The first transmission component includes a first guide rail, a first reducer, and a first synchronous belt; The first guide rail is disposed inside the process cavity, and the length direction of the first guide rail extends along the Y-axis direction. One end of the first guide rail is connected to the inner wall of the process cavity near the target material assembly. A first slider is provided on the first guide rail. The first reducer is fixed on the first slider, and the shaft of the first motor is connected to the first reducer; the first synchronous belt is sleeved on the target base of the target assembly and the power output end of the first reducer.

4. The coating equipment with adjustable sputtering distance according to claim 3, characterized in that, The drive mechanism also includes a second motor, a second bellows, and a second transmission component; The second motor is located outside the process cavity and connected to the pitch adjustment module. The second motor is located below the first motor. One end of the second bellows is connected to the outer wall of the main body of the equipment, and the other end of the second bellows is connected to the second motor. One end of the shaft of the second motor passes through the second bellows and the main body of the equipment along the Y-axis and extends into the process chamber. The shaft of the second motor is movably connected to the main body of the equipment. The second transmission component is located inside the process cavity. Two ends of the second transmission component are connected to the rotating shaft of the second motor, and the other end of the second transmission component is connected to the magnetic rod base of the target assembly. The second motor drives the magnetic rod base of the target assembly to rotate through the transmission of the second transmission component.

5. The coating equipment with adjustable sputtering distance according to claim 4, characterized in that, The second transmission component includes a second guide rail, a second reducer, and a second synchronous belt; The second guide rail is disposed inside the process cavity and located below the first guide rail. The length direction of the second guide rail extends along the Y-axis direction. One end of the second guide rail is connected to the inner wall of the process cavity near the target assembly. The second guide rail is located below the first guide rail and is provided with a second slider. The second reducer is fixed on the second slider, and the shaft of the second motor is connected to the second reducer; the second synchronous belt is sleeved on the magnetic rod base of the target assembly and the power output end of the second reducer.

6. The coating equipment with adjustable sputtering distance according to claim 4, characterized in that, The target assembly is arranged vertically, and the distance adjustment module includes a first linear module, a second linear module, a third linear module and a third corrugated pipe disposed on the main body of the equipment. The first linear module, the second linear module and the third linear module are arranged sequentially from top to bottom. The first linear module is provided with a sliding component, and one end of the third corrugated pipe is connected to the outer wall of the main body of the equipment, and the other end is connected to the sliding component; The sliding member is provided with a connecting member. One end of the connecting member passes through the third bellows and the main body of the equipment along the Y-axis and extends into the process cavity. The connecting member is movably connected to the main body of the equipment. The upper end of the target material assembly is rotatably connected to the bottom of the connecting member. The first linear module is used to drive the sliding member to move along the Y-axis, thereby driving the target material assembly to move along the Y-axis. The first motor is connected to the second linear module, which drives the first motor to move along the Y-axis. The second motor is connected to the third linear module, which drives the second motor to move along the Y-axis.

7. The coating equipment with adjustable sputtering distance according to claim 6, characterized in that, The bottom wall of the process chamber is also provided with a slide rail, the length of which extends along the Y-axis. A sliding seat is provided on the slide rail, and the lower end of the magnetic rod base of the target assembly is rotatably connected to the sliding seat.

8. The coating equipment with adjustable sputtering distance according to claim 1, characterized in that, There are multiple target material components, which are arranged at intervals along the X-axis. The driving mechanism corresponds to each target material component, and the distance adjustment module corresponds to each driving mechanism.

9. The coating equipment with adjustable sputtering distance according to claim 1, characterized in that, The main body of the equipment is also equipped with a vacuum system, which is used to create a vacuum environment in the process chamber.

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