Superlens array and generation and design method thereof, optical device and dodging system

Abstract

The invention discloses a super lens array and a generation and design method thereof, an optical device and a dodging system. The generation method comprises the following steps: generating a regular standard super lens array; based on the target far-field dodging pattern, performing first end-to-end optimization on the phase coefficient group of the standard super-lens array to obtain an initial phase coefficient group; randomly shifting the central position of each super-lens unit in the standard super-lens array to enable the shape of each super-lens unit to be changed into an irregular polygon, and forming an initial super-lens array; and taking the initial phase coefficient group as an initial phase coefficient of each super-lens unit in the initial super-lens array, allowing the phase coefficient of each super-lens unit to independently change, and performing secondary end-to-end optimization to obtain a final phase coefficient group of each super-lens unit in the super-lens array. According to the invention, not only is the sensitivity to the position deviation of the light source reduced, but also customization of the uniform light pattern with any intensity distribution is realized.

Description

Technical Field

[0001] The present invention relates to the field of superlens technology, and in particular to a superlens array and its generation and design method, optical device and light homogenizing system. Background Technology

[0002] As a key optical functional device, the core function of a beam homogenizer is to precisely control the intensity distribution of an incident beam. Through specific optical structures or modulation mechanisms, it transforms non-uniform beams such as those with Gaussian or Lambertian distributions into beams with uniform or specific intensity distributions and regular contours. It also possesses significant advantages such as low optical loss, high stability, and compact design, laying a core foundation for the efficient operation of subsequent optical systems. Leveraging this core capability, beam homogenizers are widely used in numerous fields, including laser technology, precision manufacturing, optoelectronic displays, and healthcare.

[0003] With the trend of miniaturization and integration of optical devices, superlenses, with their ultra-thin and lightweight characteristics, multi-functional integration potential, and high optical performance, are gradually becoming an important technological direction for achieving beam homogenization. There are currently two designs for achieving beam homogenization superlenses: The first design combines collimating phase and beam homogenization phase superposition. While this design can customize beam homogenization patterns with arbitrary intensity distributions, it requires extremely high alignment accuracy. The center of the light source or light source array must be strictly aligned with the center of the superlens's functional area. If there is lateral deviation from the center or axial defocus, the beam homogenization pattern will exhibit anomalies such as blurring or shifting, failing to meet the core requirements of subsequent systems for specific beam intensity distribution and stability. Furthermore, the stringent alignment requirements increase the assembly technology threshold and production costs. The second design is a standard superlens array, where each superlens is identical. While this design achieves low lateral and defocus sensitivity, significantly reducing alignment accuracy requirements, it is constrained by the characteristics of a single lens structure and cannot achieve beam homogenization patterns with arbitrary intensity distributions, making it difficult to adapt to diverse beam homogenization needs in different scenarios. Summary of the Invention

[0004] This invention provides a superlens array and its generation and design method, optical device, and light homogenizing system, aiming to solve the technical problem that existing light homogenizing superlenses are unable to achieve customized light homogenizing patterns with arbitrary intensity distribution while maintaining low sensitivity to light source position deviation.

[0005] In a first aspect, embodiments of the present invention provide a method for generating a superlens array, comprising: Generates a standard superlens array with rules; Based on the target far-field uniform light pattern, the phase coefficient set of the standard superlens array is optimized end-to-end for the first time to obtain the initial phase coefficient set; The center position of each superlens unit in the standard superlens array is randomly offset so that the shape of the superlens unit in the standard superlens array becomes an irregular polygon, thus forming an initial superlens array. Using the initial phase coefficient set as the initial phase coefficient of each superlens unit in the initial superlens array, and allowing the phase coefficient of each superlens unit to change independently, a second end-to-end optimization is performed to obtain the final phase coefficient set of each superlens unit in the superlens array.

[0006] Secondly, embodiments of the present invention also provide a design method for a superlens array, including: Obtain the optical specifications of the target far-field uniform light pattern, wherein the optical specifications include the field of view and intensity distribution; Based on the light source parameters and the optical specifications, determine the size and arrangement of the superlens units in the standard superlens array; The superlens array is obtained by performing the superlens array generation method described in the first aspect above.

[0007] Thirdly, embodiments of the present invention also provide a superlens array, the superlens array comprising a plurality of superlens units with irregular polygonal boundary shapes, the superlens units being configured to receive light beams from a light source and perform phase modulation, wherein the superlens array is generated by the superlens array generation method described in the first aspect above.

[0008] Fourthly, embodiments of the present invention also provide an optical device, the optical device including a light source and the superlens array described in the third aspect above, the superlens array being disposed downstream of the light path of the light source for homogenizing the light emitted by the light source.

[0009] Fifthly, embodiments of the present invention also provide a uniform light system, the uniform light system including a light source, a superlens array as described in the third aspect above, and a control device, the control device being configured to control the light source to emit light, and the light forming a uniform light field that meets preset requirements after passing through the superlens array.

[0010] This invention provides a superlens array, its generation and design method, optical device, and homogenization system. The superlens array generation method includes: generating a regular standard superlens array; performing a first end-to-end optimization on the phase coefficient set of the standard superlens array based on a target far-field homogenization pattern to obtain an initial phase coefficient set; randomly shifting the center position of each superlens unit in the standard superlens array to make the shape of the superlens units in the standard superlens array an irregular polygon, forming the initial superlens array; using the initial phase coefficient set as the initial phase coefficient of each superlens unit in the initial superlens array, and allowing the phase coefficient of each superlens unit to change independently, performing a second end-to-end optimization to obtain the final phase coefficient set of each superlens unit in the superlens array. The technical solution of this invention involves first generating a regular standard superlens array and performing a first end-to-end optimization to obtain an initial phase coefficient set; then, randomly shifting the center of each superlens unit to make its shape an irregular polygon; finally, based on the randomly formed array, using the initial phase coefficient set as the initial value, allowing the phase coefficient of each superlens unit to change independently and performing a second end-to-end optimization to obtain the final phase coefficient set. This not only reduces the sensitivity to light source position deviation but also achieves a customized uniform light pattern with arbitrary intensity distribution. Attached Figure Description

[0011] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic flowchart illustrating a method for generating a superlens array according to an embodiment of the present invention. Figure 2 A flowchart illustrating a design method for a superlens array provided in an embodiment of the present invention; Figure 3 The horizontal axis intensity distribution requirements of the target far-field uniform light pattern provided in the embodiments of the present invention; Figure 4 The vertical axis intensity distribution requirements of the target far-field uniform light pattern provided in the embodiments of the present invention; Figure 5 This is a schematic diagram of the phase of a standard superlens array provided in an embodiment of the present invention; Figure 6 This is a schematic diagram of the phase of the superlens array provided in an embodiment of the present invention; Figure 7The optimized far-field uniform light pattern provided in the embodiments of the present invention; Figure 8 A comparison diagram of the axial intensity distribution of the optimized far-field homogenizing pattern in the horizontal direction and the axial intensity of the target far-field homogenizing pattern in the horizontal direction, provided in an embodiment of the present invention. Figure 9 This is a comparison diagram of the axial intensity distribution of the optimized far-field homogenizing pattern in the vertical direction and the axial intensity of the target far-field homogenizing pattern in the vertical direction, provided in an embodiment of the present invention. Detailed Implementation

[0013] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0014] It should be understood that, when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0015] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0016] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, and includes such combinations.

[0017] As used in this specification and the appended claims, the term "if" may be interpreted, depending on the context, as "when," "once," "in response to determination," or "in response to detection." Similarly, the phrase "if determined" or "if [described condition or event] is detected" may be interpreted, depending on the context, as "once determined," "in response to determination," "once [described condition or event] is detected," or "in response to detection of [described condition or event]."

[0018] This invention proposes a superlens array, its generation and design method, optical device, and homogenizing system. It addresses the technical problem of existing homogenizing superlenses failing to maintain low sensitivity to light source position deviations while simultaneously achieving customized homogenizing patterns with arbitrary intensity distributions. In this embodiment, a regular standard superlens array is first generated and subjected to a first end-to-end optimization to obtain an initial phase coefficient set. Then, the center of each superlens unit is randomly offset, transforming its shape into an irregular polygon. Finally, based on the randomly formed array, using the initial phase coefficient set as initial values, the phase coefficient of each superlens unit is allowed to change independently, and a second end-to-end optimization is performed to obtain the final phase coefficient set. This not only reduces sensitivity to light source position deviations but also achieves customized homogenizing patterns with arbitrary intensity distributions.

[0019] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0020] Please refer to Figure 1 , Figure 1 A flowchart illustrating the method for generating a superlens array according to an embodiment of the present invention is shown, as follows: Figure 1 As shown, the method for generating the superlens array includes steps S110-S140.

[0021] S110, a standard superlens array that generates rules.

[0022] In this embodiment, the standard metalens array is composed of a large number of metalens units with identical shape, size, and phase distribution arranged periodically, for example, presenting as a regular rectangular or hexagonal grid. It should be noted that the key parameters of the standard metalens array, including the unit period (typically on the order of hundreds of nanometers to micrometers), unit size, and overall array size, need to be comprehensively determined and initialized based on optical indicators such as the target operating wavelength, the preset focal length, and the desired far-field uniform light pattern.

[0023] S120. Based on the target far-field uniform light pattern, the phase coefficient group of the standard superlens array is optimized end-to-end for the first time to obtain the initial phase coefficient group.

[0024] In this embodiment, based on the target far-field homogenization pattern, firstly, an optical propagation model is established to modulate the light source from the light source to the target far field via the standard metalens array. Then, an end-to-end optimization network is constructed, and the far-field homogenization pattern output by the optical propagation model is compared with the target far-field homogenization pattern in terms of field of view and intensity distribution. Next, the shared phase coefficient of each metalens unit in the standard metalens array is used as an optimization parameter, and an optimization algorithm is used iteratively to make the far-field pattern approximate the target pattern, thereby obtaining the initial phase coefficient set. It should be noted that the optimization algorithm is a gradient descent-based backpropagation algorithm or a global optimization algorithm.

[0025] S130. Randomly offset the center position of each superlens unit in the standard superlens array so that the shape of the superlens unit in the standard superlens array becomes an irregular polygon, forming an initial superlens array.

[0026] In this embodiment, the range of the random offset is limited to an annular region centered on the original superlens unit, wherein the annular region has a preset inner radius and an outer radius. Specifically, the center position of each regularly arranged superlens unit (such as a rectangle or hexagon) in the standard superlens array is randomly perturbed within a preset constraint range (e.g., an annular region with a specific radius centered on the original center). This random offset causes the boundaries of adjacent superlens units to intersect, and the originally regular superlens unit shape (such as a rectangle) is transformed into an irregular polygon. By introducing this spatial randomness, diffraction interference and grating lobe effects caused by periodic structures are effectively suppressed, and the sensitivity of the optical system to light source position deviations (such as lateral eccentricity and axial defocus) is significantly reduced, thereby enhancing the robustness of the homogenization effect.

[0027] S140. Using the initial phase coefficient set as the initial phase coefficient of each superlens unit in the initial superlens array, and allowing the phase coefficient of each superlens unit to change independently, a second end-to-end optimization is performed to obtain the final phase coefficient set of each superlens unit in the superlens array.

[0028] In this embodiment, based on the randomly generated initial superlens array, adjustments are made to achieve a high degree of matching between the far-field homogenization pattern and the target far-field homogenization pattern. Specifically, this step uses the initial phase coefficient set obtained from the first optimization as the starting optimization point for each superlens unit in the entire initial superlens array. This ensures that the optimization process starts from a high-performance benchmark, rather than a random search starting from zero, thereby significantly improving optimization efficiency and avoiding problems such as getting trapped in local optima or slow convergence. During the optimization process, the phase coefficient of each superlens unit is allowed to be adjusted independently and asynchronously. Since each unit in the initial superlens array has become unique in shape and spatial position after being randomly offset from the center, "tailor-made" phase coefficients for each superlens unit can fully utilize the huge design freedom brought by the irregular structure to achieve more complex and precise control. The optimization process is usually carried out in a differentiable optical propagation model. This model can accurately simulate the process of light emanating from the light source, passing through a superlens array with a specific phase distribution, and forming a light intensity distribution in the far field. Using a gradient descent-based backpropagation algorithm or a global optimization algorithm, guided by the difference between the far-field homogenizing pattern and the target far-field homogenizing pattern (as a loss function), the phase coefficients of all superlens units are automatically and iteratively adjusted. Finally, when the loss function converges to its minimum, a set of optimized phase coefficients for each superlens unit is obtained. This set of parameters defines the optimal superlens array structure capable of simultaneously achieving low sensitivity and customized homogenizing patterns with arbitrary intensity distributions. Understandably, the second end-to-end optimization process is consistent with the first end-to-end optimization process.

[0029] Please refer to Figure 2 , Figure 2 A flowchart illustrating the design method of the superlens array according to an embodiment of the present invention is shown, as follows: Figure 2 As shown, the method for generating the superlens array includes steps S210-S230.

[0030] S210. Obtain the optical specifications of the target far-field uniform light pattern, wherein the optical specifications include the field of view and intensity distribution; S220. Determine the size and arrangement of the superlens units in the standard superlens array based on the light source parameters and the optical specifications. S230. Perform the superlens array generation method as described above to obtain a superlens array.

[0031] In this embodiment, as Figure 3 and Figure 4As shown, the field of view is 74° (±37°) in the horizontal direction and 58° (±29°) in the vertical direction. It should be noted that the field of view defines the spatial geometry of the uniform light pattern in the far field of the target. Intensity distribution is crucial for achieving a customized uniform light pattern with arbitrary intensity distribution, including: Edge intensity: The light intensity at ±37° in the horizontal direction and ±29° in the vertical direction must be 50% of the light intensity in the central field of view (0°). This precisely controls the boundary sharpness and uniformity of the uniform light pattern in the far field of the target. It should also be noted that the axial intensity curve: The intensity value corresponding to each degree of field of view on the horizontal and vertical axes must satisfy... Figure 3 and Figure 4 The specific distribution shown is such that, with the intensity at the center field of view of 0° as 1, the intensity distribution first increases and then decreases as the field of view spreads outward.

[0032] In this embodiment, the light source is a vertical cavity surface-emitting laser array (VCSEL array), and the distance between it and the superlens array is 0.3 mm. As a coherent light source, the VCSEL emits a beam with a specific divergence angle and Gaussian intensity distribution. The standard superlens array is set to be composed of identical rectangular superlens units arranged periodically. The size of the superlens unit is set to 20 μm horizontally and 25 μm vertically. The determination of this size needs to take into account the following: (1) Diffraction limit and Nyquist sampling theorem: The size of the superlens unit needs to be small enough to avoid unnecessary diffraction orders (grating lobes) in the field of view and ensure effective control of light energy. (2) Phase control requirements: Each superlens unit is an independent phase modulator, and its size needs to provide sufficient phase control capability (usually covering phase changes from 0 to 2π). Then, based on the light source parameters (wavelength, divergence angle, distance) and field of view, the uniform light pattern of the light source propagating through the superlens array to the far field (the far field is 0.1 m away from the superlens array) is calculated using Fourier transform and angular spectrum propagation. Subsequently, the shared phase coefficients in the standard metalens array were optimized end-to-end for the first time, aiming to quickly obtain an initial solution that allows the far-field homogenization pattern to initially approximate the target far-field homogenization pattern. The optimized initial phase coefficient set was A=30.85, B=27.81, C=-6.09, D=-1.40. It should be noted that the phase of the standard metalens array is as follows... Figure 5 As shown, from Figure 5 It can be seen that each superlens unit has the same and regular shape, and the phase coefficient of each superlens unit is also the same, making the phase change from the center to the edge of the superlens unit the same. It should also be noted that, in this embodiment, the optical propagation model is specifically Fourier transform and angular spectrum propagation.

[0033] Based on a standard metalens array, the center of each rectangular metalens unit (20µm horizontally and 25µm vertically) is randomly offset. The offset range is limited to a concentric circle region with the original metalens unit center as the center, an inner radius of 4µm, and an outer radius of 8µm (adapting to the unit size and array spacing, ensuring no overlap between units and full coverage of the effective optical area). After offset, the boundaries of adjacent metalens units intersect, forming an irregular polygonal structure. The initial phase coefficient set (A=30.85, B=27.81, C=-6.09, D=-1.40) obtained from the first end-to-end optimization is used as the initial phase coefficients of all metalens units in the initial metalens array. The phase coefficients (A, B, C, D) of each metalens unit are allowed to vary independently for a second end-to-end optimization. Understandably, the number of optimization variables increases dramatically from 4 to 4×N (N is the total number of metalens units), which provides a huge degree of freedom for the design. The ultimate goal is to perfectly match the target far-field homogenization pattern in terms of field of view, edge intensity, and intensity distribution at each degree of field of view. The optimized far-field homogenization pattern achieves a horizontal field of view of 74° and a vertical field of view of 58°. The intensity at ±37° horizontally and ±29° vertically is 50% of that at the center field of view, and the intensity at each degree of field of view along both axes (horizontal and vertical) is perfectly matched. Figure 3 and Figure 4 The specific distribution is shown. It should be noted that the phase distribution of the entire irregular metalens array is as follows: Figure 6 As shown, by Figure 6 It is known that each superlens unit has a different and irregular shape, and the phase coefficient of each superlens unit is also different, resulting in different degrees of phase change from the center to the edge of the superlens unit; and the final generated far-field uniform light pattern is as follows: Figure 7 As shown, by Figure 7 It can be seen that as the generated far-field homogenizing pattern diffuses outward from the center, the intensity first increases and then decreases, and the intensity corresponding to each field of view on both axes is close to the intensity of the target far-field homogenizing pattern; the difference between the axial intensity distribution of the far-field homogenizing pattern in the horizontal and vertical directions and the axial intensity distribution of the target far-field homogenizing pattern in the horizontal and vertical directions is as follows: Figure 8 and Figure 9 As shown, by Figure 8 and Figure 9 It can be seen that the axial intensity distribution of the far-field homogenizing pattern in the horizontal and vertical directions is very close to that of the target far-field homogenizing pattern in the horizontal and vertical directions. It should be noted that the random offset breaks the strict periodicity, effectively suppressing diffraction interference and spot distortion caused by lateral eccentricity or axial defocusing of the light source. Furthermore, constraining the offset range not only effectively covers the optical region but also prevents overlap of the superlens units.

[0034] This invention also proposes a superlens array, which includes multiple superlens units with irregular polygonal boundary shapes. Each superlens unit is configured to receive a light beam from a light source and perform phase modulation. The superlens array is generated using the superlens array generation method described above. The phase distribution of each superlens unit is defined by a phase formula, and the phase coefficient sets of any two superlens units in the superlens array are not identical. It should be noted that the phase formula is: Where A, B, C, and D are the phase coefficients of the superlens unit, and x and y are the position coordinates in a Cartesian coordinate system with the center of the superlens unit as the origin. Understandably, the phase coefficient sets (A, B, C, D) of any two superlens units in the superlens array are not exactly the same.

[0035] This invention also proposes an optical device comprising a light source and the aforementioned superlens array. The superlens array is positioned downstream of the light source's optical path to homogenize the light emitted by the light source. It should be noted that the superlens array precisely modulates the phase of the light through specific micro / nano structures on its surface or interior, shaping a potentially non-uniform beam of light from the light source into a beam with uniform intensity distribution and a specific divergence angle within the target area. This integrated design achieves a compact homogenization solution that can be widely applied in fields requiring precise control of the light field, such as lighting, laser processing, and 3D sensing.

[0036] This invention also proposes a uniform light system, which includes a light source, the aforementioned superlens array, and a control device. The control device is configured to control the light source to emit light, and the light, after passing through the superlens array, forms a uniform light field that meets preset requirements. The control device precisely drives the light source (such as a VCSEL array or laser) to emit a specific beam, which is then incident on the irregular superlens array for phase modulation. Based on its unique "two-step optimization + randomization" design, this superlens array can efficiently reconstruct the incident non-uniform light intensity distribution (such as a Gaussian distribution) into a uniform light field that meets preset requirements. Its key performance indicators (such as spot shape, field of view, and intensity uniformity) can all be customized according to the target pattern.

[0037] In summary, the irregular design of the superlens array breaks the strict periodicity of traditional superlens arrays through random offset, effectively suppressing diffraction interference caused by the periodic structure. This makes it less sensitive to lateral eccentricity and axial defocusing of the light source, significantly reducing the stringent requirements on the alignment accuracy of the light source and lens, and significantly improving the system's robustness and assembly feasibility. By allowing the phase coefficient of each superlens unit to be adjusted independently in the second end-to-end optimization, a huge degree of design freedom is achieved, enabling the generation of customized homogenization patterns with arbitrary intensity distribution and arbitrary contours, perfectly overcoming the single-function defect of standard regular arrays. In terms of implementation path, the first end-to-end optimization provides a globally excellent starting point for the entire design with an initial set of phase coefficients. Then, randomness is introduced, and finally, a fine-grained global search is performed using a number of optimization variables far exceeding that of standard arrays. This ensures that the final generated far-field homogenization pattern can match the target far-field homogenization pattern with high precision, balancing optimization efficiency and final performance.

[0038] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and these modifications or substitutions should all be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for generating a superlens array, characterized in that, include: Generates standard superlens arrays with rules; Based on the target far-field uniform light pattern, the phase coefficient set of the standard superlens array is optimized end-to-end for the first time to obtain the initial phase coefficient set; The center position of each superlens unit in the standard superlens array is randomly offset so that the shape of the superlens unit in the standard superlens array becomes an irregular polygon, thus forming an initial superlens array. Using the initial phase coefficient set as the initial phase coefficient of each superlens unit in the initial superlens array, and allowing the phase coefficient of each superlens unit to change independently, a second end-to-end optimization is performed to obtain the final phase coefficient set of each superlens unit in the superlens array.

2. The method for generating a superlens array according to claim 1, characterized in that, The range of the random offset is limited to an annular region centered on the original superlens unit, wherein the annular region has a preset inner radius and an outer radius.

3. The method for generating a superlens array according to claim 1, characterized in that, Both the first and second end-to-end optimizations are achieved by establishing an optical propagation model from the light source through the standard superlens array to the target far field, comparing the far-field homogenization pattern output by the optical propagation model with the target far-field homogenization pattern in terms of field of view and intensity distribution, using the shared phase coefficient of each superlens unit in the standard superlens array as an optimization parameter, and iterating continuously through an optimization algorithm to make the far-field pattern approximate the target pattern.

4. The method for generating a superlens array according to claim 3, characterized in that, The optimization algorithm is either a backpropagation algorithm based on gradient descent or a global optimization algorithm.

5. A method for designing a superlens array, characterized in that, include: Obtain the optical specifications of the target far-field uniform light pattern, wherein the optical specifications include the field of view and intensity distribution; Based on the light source parameters and the optical specifications, determine the size and arrangement of the superlens units in the standard superlens array; A superlens array is obtained by performing the superlens array generation method as described in any one of claims 1-4.

6. A superlens array, characterized in that, The superlens array includes a plurality of superlens units with irregular polygonal boundary shapes, the superlens units being configured to receive light beams from a light source and perform phase modulation, wherein the superlens array is generated by the superlens array generation method as described in any one of claims 1-4.

7. The superlens array according to claim 6, characterized in that, The phase distribution of each of the superlens units is defined by a phase formula, and the phase coefficient sets of any two superlens units in the superlens array are not exactly the same.

8. An optical device, characterized in that, The optical device includes a light source and a superlens array as described in any one of claims 6-7, wherein the superlens array is disposed downstream of the light source for homogenizing the light emitted by the light source.

9. The optical device according to claim 8, characterized in that, The light source is a vertical cavity surface-emitting laser array.

10. A light homogenizing system, characterized in that, The uniform light system includes a light source, a superlens array as described in any one of claims 6-7, and a control device, wherein the control device is configured to control the light source to emit light, and the light forms a uniform light field that meets preset requirements after passing through the superlens array.

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