Honeycomb chemical filter with combined adsorption

Abstract

This invention relates to a honeycomb-shaped chemical filter with combined adsorption, mainly comprising a first adsorbent material, a first zeolite adsorbent, a second adsorbent material, and a combination of a second zeolite adsorbent. The honeycomb structures of the first and second adsorbent materials are respectively based on any one or a combination of multiple glass fibers and multiple carbon fibers. The first and second zeolite adsorbents are respectively grown as crystals in the inner diameter of any one or a combination of multiple glass fibers and multiple carbon fibers of the first and second adsorbent materials through at least one solution. The porosity of the cross-sectional area of ​​the first and second adsorbent materials in the direction perpendicular to the airflow is greater than or equal to 58% and less than or equal to 90%. Since the first and second adsorbent materials are presented in a combined manner, the combined design achieves multiple adsorption efficiency and has the characteristics of improving the adsorption capacity and non-flammability of the adsorbent.

Description

Technical Field

[0001] This invention relates to a honeycomb chemical filter with combined adsorption, particularly one that achieves multiple adsorption efficiency through combination, and has the characteristics of increasing the adsorption capacity and non-flammability of the adsorbent. It is suitable for clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, as well as adsorption rotors or similar devices for volatile organic compounds (VOCs). Background Technology

[0002] Currently, volatile organic compounds (VOCs) are generated during the manufacturing processes of the semiconductor and optoelectronic industries. These VOCs contain nitrogen oxides (NOx). x ), sulfur oxides (SO x Compounds such as ) and nitrogen oxides (NO) x ), sulfur oxides (SO x Compounds such as α are one of the important causes of photochemical smog, acid rain, and human respiratory diseases.

[0003] The process can easily generate suspended particulate matter such as carbon dioxide and carbon monoxide, as well as volatile organic compounds (VOCs) that drift into the indoor space, especially in clean rooms or dust-free rooms. Therefore, air ventilation and circulation in clean rooms or dust-free rooms become very important. However, the air in clean rooms or dust-free rooms cannot be directly discharged into the atmosphere; it must first be filtered through a chemical filter before it can be discharged.

[0004] Therefore, the filtration efficiency of chemical filters needs to be improved, especially in the semiconductor or optoelectronic industries, which require chemical filters to achieve a filtration efficiency of 3ppb or 1ppb and to extend their service life so that they can be regenerated and reused.

[0005] Therefore, in view of the above-mentioned deficiencies, the inventors aim to provide a honeycomb chemical filter with combined adsorption that achieves multiple adsorption through combination, and has the characteristics of increasing the adsorption capacity of the adsorbent and non-flammability, so that users can easily operate and assemble it. The inventors have devoted themselves to research, design and manufacture it in order to provide convenience to users, which is the motivation for the invention. Summary of the Invention

[0006] The main objective of this invention is to provide a honeycomb-shaped chemical filter with combined adsorption, primarily comprising a first adsorbent material, a first zeolite adsorbent, a second adsorbent material, and a combination of a second zeolite adsorbent. The honeycomb structures of the first and second adsorbent materials are respectively based on any one or a combination of multiple glass fibers and multiple carbon fibers. The first and second zeolite adsorbents are respectively grown as crystals in the inner diameter of any one or a combination of multiple glass fibers and multiple carbon fibers of the first and second adsorbent materials through at least one solution. The porosity of the cross-sectional area of ​​the first and second adsorbent materials in the direction perpendicular to the airflow is greater than or equal to 58% and less than or equal to 90%. Since the first and second adsorbent materials are presented in a combined manner, multiple adsorption efficiency is achieved through combination, and the adsorption capacity and non-flammability of the adsorbent are improved, thereby increasing the overall practicality.

[0007] A secondary objective of this invention is to provide a honeycomb-shaped chemical filter with combined adsorption, wherein the first zeolite adsorbent is a Y-type zeolite with an effective adsorption micropore size of less than 7 Å (angstroms) to adsorb low-boiling-point, low-molecular-weight organic compounds. The first zeolite adsorbent grows crystals through at least one solution within the inner diameter of any one or a combination of multiple glass fibers or multiple carbon fibers of the first adsorbent material. The solution contains at least one Y-type zeolite seed crystal, and the at least one Y-type zeolite seed crystal is combined with magnesium oxide (MgO), aluminum oxide (Al2O3), silicon dioxide (SiO2), and quaternary ammonium salt (R4N). + The first absorbent material is mixed with a solution of water (H2O) and immersed in the solution, so that Y-type zeolite can grow in the inner diameter of any one or combination of the plurality of glass fibers and the plurality of carbon fibers through the solution. The second zeolite adsorbent is ZSM-5 type zeolite, which has an effective adsorption micropore size greater than or equal to 7 Å (angstroms) to adsorb high-boiling-point polymeric organic compounds. This second zeolite adsorbent grows crystals through at least one solution within the inner diameter of any one or a combination of multiple glass fibers or multiple carbon fibers of the second adsorbent material. The solution contains at least one ZSM-5 type zeolite seed crystal, which is mixed with a solution of tetrapropylamine bromide (TPA-Br), sodium oxide (Na2O), potassium oxide (K2O), aluminum oxide (Al2O3), silicon dioxide (SiO2), and water (H2O). The second adsorbent material is then immersed in the aforementioned solution, allowing ZSM-5 type zeolite to grow crystals through the solution within the inner diameter of any one or a combination of multiple glass fibers or multiple carbon fibers. Therefore, this method achieves the ability to simultaneously adsorb both high-boiling-point polymeric organic compounds and low-boiling-point low-boiling-point organic compounds, thereby increasing overall efficiency.

[0008] Another objective of this invention is to provide a honeycomb-shaped chemical filter with combined adsorption. The first and second adsorbent materials can be any of the following shapes: rectangular, square, circular, elliptical, triangular, or polygonal. When the first and second adsorbent materials are rectangular, their corners can be chamfered to form polygons. Alternatively, when both are rectangular, their corners can be cut into rounded or arc shapes. This allows the first and second adsorbent materials to be adapted to different needs, providing versatility in various shapes. Furthermore, the first and second adsorbent materials are presented in a combined manner, and this combination can be achieved through a tightly packed vertical arrangement, a staggered vertical arrangement, a tightly packed horizontal arrangement, or a staggered horizontal arrangement, thus providing versatility in various combination configurations and increasing overall usability.

[0009] To further understand the features, characteristics, and technical content of this invention, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit the invention. Attached Figure Description

[0010] Figure 1 is a schematic diagram of the appearance of the combined honeycomb chemical filter.

[0011] Figure 2 is a magnified microscopic diagram of glass fiber and zeolite particles;

[0012] Figure 3 is a separate schematic diagram showing a close arrangement of elements on the left and right sides;

[0013] Figure 4 is a schematic diagram of a combination with closely arranged left and right sides;

[0014] Figure 5 is a cross-sectional schematic diagram showing the first zeolite adsorbent and the second zeolite adsorbent arranged side by side.

[0015] Figure 6 is a separate schematic diagram showing a close vertical arrangement;

[0016] Figure 7 is a schematic diagram of a combination with closely arranged vertically;

[0017] Figure 8 is a cross-sectional schematic diagram of the first adsorbent material having the first zeolite adsorbent.

[0018] Figure 9 is a cross-sectional schematic diagram of the second adsorbent material with the second zeolite adsorbent;

[0019] Figure 10 is a schematic diagram of the appearance of the first adsorbent material, which is a rectangular body with rounded corners.

[0020] Figure 11 is a schematic diagram of the appearance of the second adsorbent material, which is a rectangular body with its corners chamfered.

[0021] 10. First absorbent material;

[0022] 11. Fiberglass;

[0023] 12. Zeolite particles;

[0024] 20. First zeolite adsorbent;

[0025] 30. Second absorbent material;

[0026] 31. Fiberglass;

[0027] 32. Zeolite particles;

[0028] 40. Second zeolite adsorbent;

[0029] 50. Shelves;

[0030] 60. Frame. Detailed Implementation

[0031] Please refer to Figures 1-11, which are schematic diagrams of embodiments of the present invention. The preferred embodiment of the honeycomb chemical filter with mixed adsorption of the present invention is applied to clean rooms, dust-free rooms or similar indoor spaces in the semiconductor industry, optoelectronic industry or chemical-related industries, as well as to adsorption wheels or similar devices for volatile organic compounds (VOCs), so that multiple adsorption efficiency can be achieved through combination, and the adsorption capacity of the adsorbent is improved and the non-flammability is enhanced.

[0032] The honeycomb chemical filter with mixed adsorption of the present invention mainly includes a combination design of a first adsorbent 10, a first zeolite adsorbent 20, a second adsorbent 30 and a second zeolite adsorbent 40 (as shown in Figures 3, 4, 6 and 7). In addition to the combination design of the first adsorbent 10, the first zeolite adsorbent 20, the second adsorbent 30 and the second zeolite adsorbent 40, the present invention may also add a third adsorbent (not shown), a third zeolite adsorbent (not shown), a fourth adsorbent (not shown) and a fourth zeolite adsorbent (not shown), etc., but it is not limited to the specification or drawings of the present invention. Furthermore, the first absorbent material 10 has a honeycomb structure, and the honeycomb structure of the first absorbent material 10 uses any one or a combination of multiple glass fibers 11 and multiple carbon fibers (not shown) as the base material, and multiple zeolite particles 12 are arranged around any one or a combination of multiple glass fibers 11 and multiple carbon fibers (not shown) (as shown in Figure 2). The multiple glass fibers 11 and multiple carbon fibers (not shown) are arranged in any one of the following ways: staggered, arranged, or stacked, and the multiple zeolite particles 12 are arranged around them. The multiple zeolite particles 12 are mainly used to fill or lay the multiple glass fibers 11 and multiple carbon fibers (not shown) around or around the periphery of the multiple zeolite particles 12. Furthermore, the second absorbent material 30 has a honeycomb structure, and the honeycomb structure of the second absorbent material 30 uses any one or a combination of multiple glass fibers 31 and multiple carbon fibers (not shown) as the base material, and multiple zeolite particles 32 are arranged around any one or a combination of multiple glass fibers 31 and multiple carbon fibers (not shown) (as shown in Figure 2). The multiple glass fibers 31 and multiple carbon fibers (not shown) are arranged in any one of the following ways: interlaced, arranged, or stacked, and the multiple zeolite particles 32 are arranged around them. The multiple zeolite particles 32 are mainly used to fill or lay the multiple glass fibers 31 and multiple carbon fibers (not shown) around or around the multiple zeolite particles 32. Furthermore, the aforementioned glass fibers 11 and 31 are materials composed of many extremely fine fibers drawn from molten glass, generally exceeding 3 micrometers in diameter (ranging from a few micrometers to tens of micrometers). They are brittle and easily broken, but possess high tensile strength, high temperature resistance, acid and alkali corrosion resistance, and good insulation properties, making them the most widely used inorganic fiber materials currently. The aforementioned carbon fiber (not shown in the figure) is a high-strength and high-modulus high-temperature resistant fiber, representing a high-end variety of chemical fiber. It is primarily composed of carbon atoms, with a diameter of approximately 5-10 micrometers. To produce carbon fibers, carbon atoms are bonded together within the crystal, and the parallel arrangement of the fiber's long axis gives the carbon fiber a remarkably high strength-to-volume ratio.

[0033] Furthermore, the honeycomb structure mentioned above in this invention can be formed by stacking at least two layers of plates 50 consisting of multiple glass fibers 11 (also referred to as 31), multiple carbon fibers, or combinations thereof as the substrate, and multiple zeolite particles 12 (also referred to as 32) arranged around the multiple glass fibers 11 (also referred to as 31), multiple carbon fibers, or combinations thereof (as shown in Figures 3, 4, 6, and 7), or by bending at least two layers of fabric (not shown). The zeolite particles 12 (also referred to as 32) can be a widely distributed, highly mined, natural, and inexpensive ion exchange material. There are many types of naturally occurring zeolite particles 12 (also referred to as 32) (e.g., clinoptilolite and Mordenite are the main types). The zeolite particles can also be a porous aluminosilicate mineral with a hydrous framework structure. The most basic structure constituting the zeolite framework is a silicon-oxygen (SiO4) tetrahedron and an aluminum-oxygen (AlO4) tetrahedron. The zeolite particles 12 (also referred to as 32) are not limited to the above and can be formed from other types or substances. Furthermore, the layer 50 can be any of the following shapes: wavy, serrated, triangular, or flat. The at least two layers 50 can be any of the above shapes or combinations thereof, and the at least two layers 50 can also be a layered structure (not shown in the figures). Moreover, the honeycomb structure in the figures of this invention is an example of at least one flat layer 50 and at least one wavy layer 50 stacked together (as shown in Figures 3, 4, 6, and 7), but is not limited to the above.

[0034] Furthermore, the first absorbent material 10 and the second absorbent material 30 of the present invention can be any of the following shapes: rectangular, square, circular, elliptical, triangular, or polygonal. These shapes are primarily designed to meet the needs of the environment and equipment (not shown in the figures), but are not limited to the aforementioned shapes and can also be other shapes. In addition to the shapes described above, when the first absorbent material 10 and the second absorbent material 30 are both rectangular, the corners of the rectangular bodies can be chamfered (as shown in Figure 11) to form polygonal bodies. Alternatively, when the first absorbent material 10 and the second absorbent material 30 are both rectangular, the corners of the rectangular bodies can be cut into either rounded arc shapes (as shown in Figure 10) or arc shapes (not shown in the figures), allowing the first absorbent material 10 and the second absorbent material 30 to change their shapes to meet actual needs and achieve various shape variations.

[0035] Furthermore, the first adsorbent 10 and the second adsorbent 30 of the present invention are each honeycomb structures (in addition to the combined design of the first adsorbent 10, the first zeolite adsorbent 20, the second adsorbent 30 and the second zeolite adsorbent 40, the present invention may also add a third adsorbent (not shown), a third zeolite adsorbent (not shown), a fourth adsorbent (not shown) and a fourth zeolite adsorbent (not shown), etc., but are not limited to the specification or drawings of the present invention), and the first adsorbent 10 and the second adsorbent 30 are honeycomb structures. The materials 30 can be placed separately in their respective frames 60 (not shown) or together in a frame 60 (as shown in Figure 1) to form a honeycomb chemical filter or two honeycomb chemical filters. The frame 60 can be any shape of rectangle, square, circle, ellipse, triangle, or polygon. The size of the frame 60 and the first adsorbent material 10 and the second adsorbent material 30 are designed to match the adsorption device to be installed (not shown) so as to have a variety of different performances.

[0036] Furthermore, the first absorbent material 10 and the second absorbent material 30 of the present invention can be placed in their respective frames 60 or placed together in a frame 60. The first absorbent material 10 and the second absorbent material 30 are presented in a combined manner. When the first absorbent material 10 and the second absorbent material 30 are placed together in a frame 60, the combination of the first absorbent material 10 and the second absorbent material 30 can be any one of the following: tightly arranged vertically (as shown in Figure 7), arranged vertically with gaps (not shown), tightly arranged horizontally (as shown in Figure 4), or arranged horizontally with gaps (not shown). The gaps are gaps or openings between the first absorbent material 10 and the second absorbent material 30, so that there is a certain distance between the first absorbent material 10 and the second absorbent material 30, thereby achieving the effectiveness of multiple combination forms. Furthermore, when the first absorbent material 10 and the second absorbent material 30 are respectively placed in their respective frames 60, the combination of the frame 60 with the first absorbent material 10 and the frame 60 with the second absorbent material 30 (not shown in the figure) can be any one of the following combinations: tightly arranged vertically, spaced vertically, tightly arranged horizontally, or spaced horizontally. The space is provided by a gap or void between the frame 60 with the first absorbent material 10 and the frame 60 with the second absorbent material 30, so that there is a certain distance between the frame 60 with the first absorbent material 10 and the frame 60 with the second absorbent material 30, thus achieving the effectiveness of multiple combination forms.

[0037] Furthermore, the porosity of the first adsorbent material 10 in the cross-sectional area perpendicular to the airflow direction is greater than or equal to 58% and less than or equal to 90%, wherein the first adsorbent material 10 is located at either the upstream or downstream end of the vertical airflow direction. Similarly, the porosity of the second adsorbent material 30 in the cross-sectional area perpendicular to the airflow direction is greater than or equal to 58% and less than or equal to 90%, wherein the second adsorbent material 30 is located at either the upstream or downstream end of the vertical airflow direction. The cross-sectional area refers to the area of ​​a cross-section perpendicular to the axial direction, also known as the cross-sectional area. Porosity is the ratio of pore volume to the total material volume, always between 0 and 1, and expressed as a percentage between 0 and 100%. Gas can only enter through pores. The depths of the first adsorbent material 10 and the second adsorbent material 30 are respectively between 100 mm and 350 mm, and their depths are also referred to as thickness or width. The increased depth of the first adsorbent 10 and the second adsorbent 30 increases their adsorption area, enabling their absorption rate to reach 98% to 99% or more.

[0038] Furthermore, the first zeolite adsorbent 20 of the present invention is a Y-type zeolite, which has an effective adsorption micropore size of less than 7 Å (as shown in Figures 5 and 8) to adsorb low-boiling-point, low-molecular-weight organic compounds. The second zeolite adsorbent 40 is a ZSM-5 type zeolite, which has an effective adsorption micropore size of greater than or equal to 7 Å (as shown in Figures 5 and 9) to adsorb high-boiling-point, high-molecular-weight organic compounds. Zeolite is preferred as an adsorbent for air filtration or adsorption of volatile organic compounds (VOCs). Zeolite has better heat resistance than activated carbon, a wider applicable concentration range, and good removal efficiency for both low-boiling-point, low-molecular-weight and high-boiling-point, high-molecular-weight volatile organic compounds (VOCs). Furthermore, both the first zeolite adsorbent 20 and the second zeolite adsorbent 40 are hydrophobic zeolites with a SiO2 / Al2O3 molar ratio (SiO2 / Al2O3) greater than or equal to 40. A higher SiO2 / Al2O3 molar ratio indicates stronger hydrophobicity. Besides the SiO2 / Al2O3 molar ratio and effective adsorption micropore size, the surface area also affects the adsorption capacity and behavior of zeolites. The specific surface areas of the first zeolite adsorbent 20 and the second zeolite adsorbent 40 are 500 to 3600 m², respectively. 2 / m 3 Between these, the specific surface area refers to the surface area per unit mass of a porous solid material, and the so-called surface area refers to the internal surface area, so as to have better adsorption and filtration effects.

[0039] Furthermore, the aforementioned first zeolite adsorbent 20 grows crystals through at least one solution within the inner diameter of any one or a combination of the plurality of glass fibers 11 and the plurality of carbon fibers of the first adsorbent material 10, wherein the solution contains at least one Y-type zeolite seed crystal (not shown), and the at least one Y-type zeolite seed crystal is associated with magnesium oxide (MgO), aluminum oxide (Al2O3), silicon dioxide (SiO2), and quaternary ammonium salt (R4N). + The solution is mixed with water (H2O) and the first adsorbent 10 is immersed in the solution, so that the Y-type zeolite (not shown) can grow through the solution in the inner diameter of any one or combination of the plurality of glass fibers 11 and the plurality of carbon fibers. The Y-type zeolite is an artificial zeolite with a structure mainly composed of 12 rings. The second zeolite adsorbent 40 grows crystals through at least one solution in the inner diameter of any one or a combination of the plurality of glass fibers 31 and the plurality of carbon fibers of the second adsorbent material 30. The solution contains at least one ZSM-5 type zeolite seed crystal (not shown in the figure), and the at least one ZSM-5 type zeolite seed crystal is mixed with a solution of tetrapropylamine bromide (TPA-Br), sodium oxide (Na2O), potassium oxide (K2O), aluminum oxide (Al2O3), silicon dioxide (SiO2), and water (H2O). The second adsorbent material 30 is immersed in the above solution, so that the ZSM-5 type zeolite (not shown in the figure) can grow crystals through the above solution in the inner diameter of any one or a combination of the plurality of glass fibers 31 and the plurality of carbon fibers. The ZSM-5 type zeolite is a high silicon content zeolite with high thermal stability and hydrothermal stability.

[0040] Furthermore, when the first zeolite adsorbent 20 is the Y-type zeolite, its effective adsorption micropore size is less than 7 Å, enabling it to adsorb low-boiling-point, low-molecular-weight organic compounds, mainly sulfides such as dimethyl sulfide (DMS), dimethyl disulfide (DMDS), and hydrogen sulfide (H2S), as well as hydrocarbons such as formaldehyde and acetone acetate. When the second zeolite adsorbent 40 is the ZSM-5 type zeolite, its effective adsorption micropore size is greater than or equal to 7 Å, enabling it to adsorb high-boiling-point, high-molecular-weight organic compounds, mainly hydrocarbons such as isopropanol (IPA). Therefore, it possesses the ability to simultaneously adsorb both high-boiling-point, high-molecular-weight organic compounds and low-boiling-point, low-molecular-weight organic compounds, thereby increasing the overall efficiency.

[0041] Therefore, the present invention mainly includes a combination design of a first adsorbent 10, a first zeolite adsorbent 20, a second adsorbent 30, and a second zeolite adsorbent 40. The honeycomb structure of the first adsorbent 10 and the honeycomb structure of the second adsorbent 30 are respectively based on any one or a combination of multiple glass fibers 11, 31, and multiple carbon fibers. The first zeolite adsorbent 20 and the second zeolite adsorbent 40 are respectively grown in the inner diameter of any one or a combination of multiple glass fibers 11, 31 and multiple carbon fibers of the first adsorbent 10 and the second adsorbent 40 through at least one solution. The porosity of the cross-sectional area of ​​the first adsorbent 10 and the second adsorbent 30 in the direction perpendicular to the airflow is greater than or equal to 58% and less than or equal to 90%. The first adsorbent 10 and the second adsorbent 30 are presented in a combined manner. Therefore, the combination achieves the efficiency of multiple adsorption and has the characteristics of improving the adsorption capacity and non-flammability of the adsorbent, thereby increasing the overall practicality.

[0042] The above detailed description enables those skilled in the art to understand that the present invention can indeed achieve the aforementioned objectives and complies with the provisions of the Patent Law, thus prompting the filing of an invention patent application.

[0043] The specific embodiments described above are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any simple equivalent changes and modifications made in accordance with the claims and description of the present invention should still fall within the scope of the present invention.

Claims

1. A honeycomb-shaped chemical filter with combined adsorption, comprising: A first adsorbent material having a honeycomb structure, wherein the honeycomb structure of the first adsorbent material uses any one or a combination of multiple glass fibers and multiple carbon fibers as the base material, and multiple zeolite particles are arranged around any one or a combination of the multiple glass fibers and multiple carbon fibers, and the porosity of the first adsorbent material in the cross-sectional area perpendicular to the airflow direction is greater than or equal to 58% and less than or equal to 90%; A first zeolite adsorbent, wherein the first zeolite adsorbent grows crystals through at least one solution in the inner diameter of any one or a combination of a plurality of glass fibers or a plurality of carbon fibers of the first adsorbent material. A second adsorbent material having a honeycomb structure, wherein the honeycomb structure of the second adsorbent material uses any one or a combination of multiple glass fibers and multiple carbon fibers as a substrate, and multiple zeolite particles are arranged around any one or a combination of the multiple glass fibers and multiple carbon fibers, and the porosity of the second adsorbent material in the cross-sectional area perpendicular to the airflow direction is greater than or equal to 58% and less than or equal to 90%; and A second zeolite adsorbent, wherein the second zeolite adsorbent grows crystals through at least one solution in the inner diameter of any one or a combination of the plurality of glass fibers and the plurality of carbon fibers of the second adsorbent material. The first adsorbent material and the second adsorbent material are presented in combination.

2. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first adsorbent and the second adsorbent have depths between 100 mm and 350 mm respectively.

3. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first zeolite adsorbent is further Y-type zeolite with an effective adsorption micropore size of less than 7 Å.

4. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the solution further contains at least one Y-type zeolite seed crystal.

5. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first zeolite adsorbent further has a specific surface area of ​​500 to 3600 m². 2 / m 3 between.

6. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the second zeolite adsorbent is further ZSM-5 type zeolite with an effective adsorption micropore size greater than or equal to 7 Å.

7. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the solution further contains at least one ZSM-5 type zeolite seed crystal.

8. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the second zeolite adsorbent further has a specific surface area of ​​500 to 3600 m². 2 / m 3 between.

9. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first adsorbent and the second adsorbent are further respectively any one of a rectangular body, a square body, a circular body, an elliptical body, a triangular body, and a polygonal body.

10. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first adsorbent and the second adsorbent are further rectangular bodies, and the corners of the rectangular bodies are chamfered.

11. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first adsorbent and the second adsorbent are further rectangular bodies, and the corners of the rectangular bodies are cut into either rounded or arc shapes.

12. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the honeycomb structure is further composed of at least two layers of plates consisting of a plurality of glass fibers, a plurality of carbon fibers or a combination thereof as the substrate, and a plurality of zeolite particles are arranged around the plurality of glass fibers, a plurality of carbon fibers or a combination thereof, and the plates are further in any of the following shapes: wavy, serrated, triangular or flat.

13. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the combination of the first adsorbent and the second adsorbent is further arranged in any one of the following ways: tightly arranged vertically, spaced vertically, tightly arranged horizontally, or spaced horizontally.

14. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the first adsorbent material is further disposed at either the upstream or downstream location of the vertical airflow.

15. The honeycomb chemical filter with combined adsorption according to claim 1, wherein the second adsorbent is further disposed at either the upstream or downstream location of the vertical airflow.

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