A coating apparatus

Abstract

The application relates to the field of coating technology and discloses a coating equipment, which comprises an equipment main body, a cooling assembly and a driving mechanism, the equipment main body is provided with a coating cavity, the cooling assembly is arranged in the coating cavity, the driving mechanism is connected to the equipment main body, and the power output end of the driving mechanism is connected with the cooling assembly; the driving mechanism is used for driving the cooling assembly to move so as to shorten the distance between the cooling assembly and a substrate holder. Since the cooling assembly can move under the action of the driving mechanism to shorten the distance with the substrate holder, the heat on the substrate holder is transferred to the cooling assembly at a faster rate, and therefore, the cooling rate of the coating equipment on the substrate holder is higher.

Description

Technical Field

[0001] This invention belongs to the field of coating technology, and more specifically, relates to a coating device. Background Technology

[0002] A coating equipment is a device that forms a specific functional film layer on the surface of a substrate through methods such as vacuum sputtering. The substrate is loaded and transported into the coating equipment by a substrate holder to complete the coating process. The coating equipment is usually equipped with a heating plate and a water cooling device. The heating plate is used to regulate the ambient temperature inside the coating chamber, while the water cooling device is used to regulate the temperature of the substrate holder to prevent thermal deformation of the substrate holder due to heat radiation and heat conduction during the coating process. Currently, the water cooling device is usually fixed inside the coating equipment. After the substrate holder is input into the coating equipment, the heat of the substrate holder is transferred to the water cooling device through air heat conduction between the two. However, the distance between the water cooling device and the substrate holder is fixed, and the air heat conduction path cannot be shortened, resulting in low heat transfer efficiency. This leads to a slow cooling rate of the substrate holder by the water cooling device. Summary of the Invention

[0003] The main objective of this invention is to provide a coating apparatus with a high cooling rate for the substrate holder.

[0004] According to a first aspect of the present invention, a coating apparatus is provided, comprising an apparatus body, a cooling assembly, and a drive mechanism. The apparatus body has a coating cavity, the cooling assembly is disposed within the coating cavity, the drive mechanism is connected to the apparatus body, and the power output end of the drive mechanism is connected to the cooling assembly. The drive mechanism is used to drive the cooling assembly to move, thereby shortening the distance between the cooling assembly and the substrate holder.

[0005] In a specific embodiment of the present invention, the cooling assembly includes a cooling plate and a cooling pipe. The cooling plate has a first clearance through hole. The cooling plate is connected to the driving mechanism. The first clearance through hole is used to avoid the coating surface of the substrate on the substrate holder. The cooling pipe is connected to the cooling plate and is arranged around the first clearance through hole.

[0006] The power output end of the drive mechanism is fixedly connected to the cooling plate.

[0007] In a specific embodiment of the present invention, the cooling plate includes a plate body and a heat-conducting sub-plate. The plate body has a first clearance through hole. The heat-conducting sub-plate is annular and connected to the plate body. The heat-conducting sub-plate is arranged around the first clearance through hole and is directed toward the substrate holder. The cooling pipe is connected to the plate body and is located on the side of the heat-conducting sub-plate that is radially away from the first clearance through hole.

[0008] The power output end of the drive mechanism is fixedly connected to the plate body.

[0009] In a specific embodiment of the present invention, the driving mechanism includes a mounting plate, a driving plate, a vacuum flange connection structure, a driving rod, and a driving component. The mounting plate is fixedly connected to the main body of the equipment and disposed outside the coating cavity. The mounting plate has a second clearance through hole communicating with the coating cavity. The driving plate is disposed outside the coating cavity. The vacuum flange connection structure connects the mounting plate and the driving plate, and seals the periphery of the second clearance through hole. The driving rod is fixedly connected to the side of the driving plate facing the mounting plate, and extends through the vacuum flange connection structure and the second clearance through hole into the coating cavity and is fixedly connected to the cooling assembly. The driving component is fixedly connected to the main body of the equipment. The power output end of the driving component is fixedly connected to the driving plate. The driving component is used to drive the driving plate to move along the length direction of the driving rod, so that the driving rod drives the cooling assembly to move.

[0010] In a specific embodiment of the present invention, the driving mechanism further includes a guide rod, which is fixedly connected to the side of the mounting plate facing the driving plate. The length direction of the guide rod is parallel to the length direction of the driving rod, and the guide rod passes through the driving plate.

[0011] In a specific embodiment of the present invention, the driving mechanism further includes a connecting rod, a mounting rod, a first sensor, and a second sensor. One end of the guide rod along its length is fixedly connected to the connecting rod. The mounting rod connects the connecting rod and the mounting plate, and the mounting rod is located on one side of the driving plate. The first sensor and the second sensor are connected to the mounting rod at intervals along the length of the guide rod. Both the first sensor and the second sensor are used to detect the position of the driving plate.

[0012] In a specific embodiment of the present invention, the coating equipment further includes a heating component disposed within the coating cavity, and the heating component and the cooling component are disposed opposite to and spaced apart from each other.

[0013] In a specific embodiment of the present invention, the heating assembly includes a fixing plate, a first heating wire, and a second heating wire. The fixing plate is fixedly connected to the main body of the device. The first heating wire is fixedly connected to the fixing plate and coiled to form a rectangular first heating structure. The first heating structure extends laterally in the length direction. The second heating wire is fixedly connected to the fixing plate and coiled to form a rectangular second heating structure. The second heating structure extends vertically in the length direction.

[0014] The first heating structure is multiple, and the multiple first heating structures are arranged vertically to form a first heating zone. The first heating zone has second heating zones on both sides in the horizontal direction. The second heating zone is provided with second heating structures, and the number of second heating structures is multiple in the vertical direction.

[0015] In a specific embodiment of the present invention, the heating assembly further includes a heat reflector plate, which is fixedly connected to the fixing plate. The heat reflector plate is provided between the first heating structure and the fixing plate, and between the second heating structure and the fixing plate. The heat reflector plate is located on the side of the fixing plate facing the cooling assembly.

[0016] In a specific embodiment of the present invention, the heating assembly further includes a corrugated plate, which is fixedly connected to the fixing plate. The corrugated plate is provided on the side of the first heating structure facing away from the fixing plate and on the side of the second heating structure facing away from the fixing plate.

[0017] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0018] In practical applications, the coating equipment of the present invention introduces a flowing cooling medium into the cooling component. After the substrate holder is input into the coating chamber, the cooling component can move under the action of the driving mechanism to shorten the distance with the substrate holder. At this time, the distance between the cooling component and the substrate holder is relatively small, and the rate at which heat is transferred from the substrate holder to the cooling component is relatively fast. Based on this, the cooling rate of the coating equipment for the substrate holder is high, which can effectively prevent the substrate holder from undergoing thermal deformation due to excessive temperature. After the substrate on the substrate holder is coated, the driving mechanism drives the cooling component to reset, and the substrate holder can be output smoothly. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0020] Figure 1 This is a schematic diagram of the coating equipment of the present invention with part of the structure removed to expose the coating cavity;

[0021] Figure 2 This is a structural diagram of the cooling component and the drive mechanism in an embodiment of the present invention;

[0022] Figure 3 This is an embodiment of the present invention. Figure 2 Enlarged diagram of A in the middle;

[0023] Figure 4 This is a structural diagram of the cooperation between the drive mechanism and the cooling assembly in an embodiment of the present invention;

[0024] Figure 5This is an exploded schematic diagram of the heating component according to an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the heating assembly of the present invention without the fixing plate;

[0026] Figure 7 This is a structural diagram of the first heating wire in an embodiment of the present invention;

[0027] Figure 8 This is a structural diagram of the second heating wire in an embodiment of the present invention;

[0028] Figure 9 This is a structural diagram of the corrugated plate according to an embodiment of the present invention.

[0029] The figure labels for each figure are as follows:

[0030] 1. Main body of the equipment; 10. Coating chamber;

[0031] 2. Cooling assembly; 21. Cooling plate; 2101. First clearance through hole; 211. Plate body; 212. Heat-conducting subplate; 22. Cooling pipe;

[0032] 3. Drive mechanism; 3A. First sensor; 3B. Second sensor; 31. Mounting plate; 32. Drive plate; 33. Vacuum flange connection structure; 34. Drive rod; 35. Drive component; 36. Guide rod; 37. Connecting rod; 38. Mounting rod;

[0033] 4. Heating assembly; 41. Fixing plate; 42. First heating wire; 43. Second heating wire; 44. Heat reflector; 45. Corrugated plate. Detailed Implementation

[0034] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0035] Reference Figures 1 to 9 As shown, a preferred embodiment of the coating equipment of this application includes a main body 1, a cooling component 2 and a drive mechanism 3. The main body 1 has a coating cavity 10, the cooling component 2 is disposed in the coating cavity 10, the drive mechanism 3 is connected to the main body 1, and the power output end of the drive mechanism 3 is connected to the cooling component 2. The drive mechanism 3 is used to drive the cooling component 2 to move, so as to shorten the distance between the cooling component 2 and the substrate holder.

[0036] In practical applications, after the substrate holder is input into the coating chamber 10 of the coating equipment, the cooling component 2 can move under the action of the drive mechanism 3 to shorten the distance with the substrate holder. At this time, the distance between the cooling component 2 and the substrate holder is relatively small, and the heat on the substrate holder is transferred to the cooling component 2 at a relatively fast rate. Based on this, the cooling rate of the coating equipment on the substrate holder is high, which can effectively prevent the substrate holder from undergoing thermal deformation due to excessive temperature. After the substrate on the substrate holder is coated, the drive mechanism 3 drives the cooling component 2 to reset, and the substrate holder can be output smoothly.

[0037] It should be noted that, in the substrate holder conveying direction, one end of the coating equipment has an inlet / outlet, which communicates with the coating chamber 10. The coating equipment has a sealing mechanism to seal the inlet / outlet. The sealing mechanism can be achieved by a sealing plate and a sealing ring. The sealing plate can movably cover the inlet / outlet, and a sealing ring is provided between the sealing plate and the inlet / outlet, surrounding the inlet / outlet. The coating equipment also includes a conveying track, which is located inside the coating chamber 10 and is used to support and convey the substrate holder. This is existing technology. The present application will not elaborate on the technique in detail; in practical application, when the substrate holder is input into the coating chamber 10, the sealing mechanism is opened, and the substrate holder is input into the conveying track of the coating chamber 10 through the inlet and outlet. Then, the sealing mechanism seals the inlet and outlet, and the coating chamber 10 is evacuated to make the coating chamber 10 a vacuum state. After that, the substrate is coated. After the coating of the substrate is completed, the vacuum of the coating chamber 10 is broken, the sealing mechanism opens the inlet and outlet, and the substrate holder in the coating chamber 10 is output from the inlet and outlet.

[0038] In practical applications, the coating equipment also includes a sputtering target, which is fixedly disposed within the coating cavity 10. The substrate holder includes a frame body, which is rectangular in shape and has a rectangular inner hole. The substrate is fixed at the inner hole of the frame body. In this embodiment, the cooling assembly 2 includes a cooling plate 21 and a cooling pipe 22. The cooling plate 21 has a first clearance through hole 2101. The cooling plate 21 is connected to the driving mechanism 3. The first clearance through hole 2101 is used to avoid the coating surface of the substrate on the substrate holder. The cooling pipe 22 is connected to the cooling plate 21 and is arranged around the first clearance through hole 2101. The cooling pipe 22 is used to introduce a cooling medium. The power output end of the driving mechanism 3 is fixed to the cooling plate 21. The fixed connection and the driving mechanism 3 drive the cooling plate 21 to move. Specifically, the area of ​​the first clearance through hole 2101 is larger than the area of ​​the substrate to be coated. The sputtering target coats the substrate to be coated through the first clearance through hole 2101. Based on the setting of the first clearance through hole 2101, the substrate to be coated can be prevented from being blocked, ensuring the smooth progress of the substrate coating work. The cooling pipe 22 is set around the first clearance through hole 2101, and the area where the cooling pipe 22 is located forms a cooling area. Thus, in the axial direction of the first clearance through hole 2101, the cooling area where the cooling pipe 22 is located is directly opposite the frame body of the substrate holder. The cooling medium in the cooling pipe 22 can effectively remove the heat on the substrate holder.

[0039] It should be noted that the liquid inlet end of the cooling pipe 22 is connected to the liquid inlet pipe, and the liquid outlet end is connected to the liquid outlet pipe. The liquid inlet pipe and the liquid outlet pipe pass through the main body 1 of the equipment and are connected to the refrigeration equipment. The connection between the liquid inlet pipe and the liquid outlet pipe and the main body 1 of the equipment is sealed. Moreover, the length of the liquid inlet pipe and the liquid outlet pipe inside the coating cavity is set according to the actual application to ensure that the liquid inlet pipe and the liquid outlet pipe can be adapted to the position adjustment of the cooling components.

[0040] Furthermore, the cooling plate 21 includes a plate body 211 and a heat-conducting sub-plate 212. The plate body 211 has a first clearance through-hole 2101. The heat-conducting sub-plate 212 is annular and fixedly connected to the plate body 211. The heat-conducting sub-plate 212 is arranged around the first clearance through-hole 2101 and is oriented towards the substrate holder. The cooling pipe 22 is connected to the plate body 211 and is located on the side of the heat-conducting sub-plate 212 that is radially away from the first clearance through-hole 2101. The plate body 211 is rectangular, and the first clearance through-hole 2101 is also rectangular. The heat-conducting subplate 212 is rectangular and annular; the power output end of the drive mechanism 3 is fixedly connected to the plate body 211; specifically, the heat-conducting subplate 212 is made of copper, which has good thermal conductivity. The heat-conducting subplate 212 faces the frame body of the substrate holder, and the heat on the substrate holder can be transferred to the cooling plate 21 more efficiently and carried away by the cooling medium in the cooling pipe 22. Thus, the coating equipment has high cooling efficiency for the substrate holder; it should be noted that the plate body 211 can be made of other materials with higher strength, such as titanium alloy, to ensure structural strength. This application does not limit this.

[0041] In this embodiment, the drive mechanism 3 includes a mounting plate 31, a drive plate 32, a vacuum flange connection structure 33, a drive rod 34, and a drive component 35. The mounting plate 31 is fixedly connected to the equipment body 1 and located outside the coating cavity 10. The mounting plate 31 has a second clearance through hole (not shown in the figure), which communicates with the coating cavity 10. The drive plate 32 is located outside the coating cavity 10. The vacuum flange connection structure 33 connects the mounting plate 31 and the drive plate 32, and seals the periphery of the second clearance through hole. The drive rod 34 is fixedly connected to the side of the drive plate 32 facing the mounting plate 31, and extends through the vacuum flange connection structure 33 and the second clearance through hole into the coating cavity 10 and is fixedly connected to the cooling assembly 2. The drive component 35 is fixedly connected to the equipment body 1, and the power output end of the drive component 35 is connected to the drive plate. 32 is fixedly connected, and the driving component 35 is used to drive the driving plate 32 to move along the length direction of the driving rod 34, so that the driving rod 34 drives the cooling component 2 to move; specifically, the vacuum flange connection structure 33 is prior art, which includes two flanges, which are connected by a deformable seal. One of the two flanges is sealed and fixedly connected to the mounting plate 31, and the other is sealed and fixedly connected to the driving plate 32. This application will not elaborate on this further; wherein, the seal has an installation channel, and the driving rod 34 is disposed in the installation channel to pass through the vacuum flange connection structure 33. Based on the setting of the vacuum flange connection structure 33, the mounting plate 31, the driving plate 32, the vacuum flange connection structure 33 and the driving component 35 can be disposed outside the coating cavity 10, reducing the space occupied in the coating cavity 10. The structure is simple, easy to assemble, and can avoid interference with the substrate holder transport.

[0042] For example, the drive element 35 is an electric cylinder; in other embodiments, the drive element 35 may also be a device in the art that can achieve the same function, and this application does not limit it.

[0043] Furthermore, the drive mechanism 3 also includes a guide rod 36, which is fixedly connected to the side of the mounting plate 31 facing the drive plate 32. The length direction of the guide rod 36 is parallel to the length direction of the drive rod 34. The guide rod 36 passes through the drive plate 32. Specifically, the drive plate 32 has a guide hole through which the guide rod 36 passes. Based on the arrangement of the guide rod 36, the drive rod 34 can move smoothly under the drive of the drive member 35, and the structure is reliable. For example, there are two guide rods 36, and the drive rod 34 is located between the two guide rods 36.

[0044] Furthermore, the drive mechanism 3 also includes a connecting rod 37, a mounting rod 38, a first sensor 3A, and a second sensor 3B. One end of the guide rod 36 along its length is fixedly connected to the connecting rod 37. The mounting rod 38 connects the connecting rod 37 and the mounting plate 31, and is located on one side of the drive plate 32. The first sensor 3A and the second sensor 3B are spaced apart on the mounting rod 38 along the length of the guide rod 36. Both the first sensor 3A and the second sensor 3B are used to detect the position of the drive plate 32. Specifically, both the first sensor 3A and the second sensor 3B are photoelectric sensors. A sensing block is fixedly connected to the drive plate 32. In the axial direction of the drive rod 34, the first sensor 3A is located on the side of the second sensor 3B closer to the mounting plate 31. When the first sensor 3A detects the sensing block, it indicates that the cooling assembly 2 is in a position relative to the drive plate 32. The substrate holder is relatively close to the surface cooling assembly 2. When the first sensor 3A detects the sensing block, the surface cooling assembly 2 is in its initial position. There is a large distance between the cooling assembly 2 and the substrate holder to ensure that the substrate holder can be transported smoothly. It should be noted that the coating equipment also includes a controller. The first sensor 3A, the second sensor 3B, and the drive unit 35 are all electrically connected to the controller. The controller controls the start, stop, and movement direction of the drive unit 35 based on the position detection signals fed back by the first sensor 3A and the second sensor 3B, thereby switching the working position and initial position of the cooling assembly 2. The mounting rod 38 is fixed by the connecting rod 37 and the mounting plate 31. Its structure is simple and compact, and the connection stability of the mounting rod 38 is high. At the same time, the connecting rod 37 acts as a limit, so that the drive plate 32 can only move between the connecting rod 37 and the mounting plate 31, which ensures high reliability.

[0045] In this application, the coating equipment also includes a heating component 4, which is disposed in the coating chamber 10. The heating component 4 is opposite to and spaced apart from the cooling component 2. After the substrate holder is input into the coating chamber 10, the substrate holder is located between the heating component 4 and the cooling component 2, while the sputtering target is located on the side of the cooling component 2 away from the heating component 4. The function of the heating component 4 is to regulate the ambient temperature in the coating chamber 10 to ensure the normal operation of the coating process.

[0046] In this embodiment, the heating component 4 includes a fixing plate 41, a first heating wire 42, and a second heating wire 43. The first heating wire 42 and the second heating wire 43 generate heat when energized. The fixing plate 41 is fixedly connected to the main body 1 of the device. The first heating wire 42 is fixedly connected to the fixing plate 41 and coiled to form a rectangular first heating structure. The length of the first heating structure extends laterally. The second heating wire 43 is fixedly connected to the fixing plate 41 and coiled to form a rectangular second heating structure. The length of the second heating structure extends vertically. There are multiple first heating structures, which are arranged vertically to form a first heating area. The two sides of the first heating area in the horizontal direction are both second heating areas. The second heating area is provided with a second heating structure, and there are multiple second heating structures in the vertical direction. For example, there are ten first heating structures in the vertical direction, and two second heating areas, each with two second heating structures. With this structure, the first heating wire 42 and the second heating wire 43 are evenly distributed on the fixing plate 41, which can uniformly regulate the ambient temperature in the coating cavity 10.

[0047] Furthermore, the heating assembly 4 also includes a heat reflector 44, which is fixedly connected to the fixing plate 41. Heat reflectors 44 are provided between the first heating structure and the fixing plate 41, and between the second heating structure and the fixing plate 41. The heat reflectors 44 are located on the side of the fixing plate 41 facing the cooling assembly 2. Based on the setting of the heat reflectors 44, the heat generated by the operation of the first heating structure and the second heating structure can be reduced from the side where the fixing plate 41 is located, which is beneficial to the temperature control in the coating cavity 10.

[0048] Furthermore, the heating assembly 4 also includes a corrugated plate 45, which is fixedly connected to the fixing plate 41. The side of the first heating structure facing away from the fixing plate 41 and the side of the second heating structure facing away from the fixing plate 41 are both provided with corrugated plates 45. Specifically, the corrugated plate 45 has a large surface area. The heat generated by the operation of the first heating structure and the second heating structure is transferred to the corrugated plate 45, and then the corrugated plate 45 is evenly distributed into the coating cavity 10 by thermal radiation. The heat transfer and diffusion efficiency is high. In addition, the corrugated plate 45 can also play a physical protection role, preventing the first heating structure and the second heating structure from being directly exposed, and preventing the target particles during the sputtering process from directly adhering to the first heating structure and the second heating structure.

[0049] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A coating equipment, characterized in that, The device includes a main body (1), a cooling component (2), and a drive mechanism (3). The main body (1) has a coating cavity (10). The cooling component (2) is located in the coating cavity (10). The drive mechanism (3) is connected to the main body (1), and the power output end of the drive mechanism (3) is connected to the cooling component (2). The drive mechanism (3) is used to drive the cooling component (2) to move, so as to shorten the distance between the cooling component (2) and the substrate holder.

2. The coating equipment according to claim 1, characterized in that, The cooling assembly (2) includes a cooling plate (21) and a cooling pipe (22). The cooling plate (21) has a first clearance through hole (2101). The cooling plate (21) is connected to the driving mechanism (3). The first clearance through hole (2101) is used to avoid the coating surface of the substrate on the substrate holder. The cooling pipe (22) is connected to the cooling plate (21) and the cooling pipe (22) is arranged around the first clearance through hole (2101). The power output end of the drive mechanism (3) is fixedly connected to the cooling plate (21).

3. The coating equipment according to claim 2, characterized in that, The cooling plate (21) includes a plate body (211) and a heat-conducting sub-plate (212). The plate body (211) has a first clearance through hole (2101). The heat-conducting sub-plate (212) is annular and connected to the plate body (211). The heat-conducting sub-plate (212) is arranged around the first clearance through hole (2101). The heat-conducting sub-plate (212) is used to face the substrate holder. The cooling pipe (22) is connected to the plate body (211) and is located on the side of the heat-conducting sub-plate (212) that is radially away from the first clearance through hole (2101). The power output end of the drive mechanism (3) is fixedly connected to the plate body (211).

4. The coating equipment according to claim 1, characterized in that, The drive mechanism (3) includes a mounting plate (31), a drive plate (32), a vacuum flange connection structure (33), a drive rod (34), and a drive component (35). The mounting plate (31) is fixedly connected to the main body of the equipment (1) and located outside the coating cavity (10). The mounting plate (31) has a second clearance through hole, which communicates with the coating cavity (10). The drive plate (32) is located outside the coating cavity (10). The vacuum flange connection structure (33) connects the mounting plate (31) and the drive plate (32), and the vacuum flange connection structure (33) seals the periphery of the second clearance through hole. The drive rod (34) is fixedly connected to the side of the drive plate (32) facing the mounting plate (31), and the drive rod (34) passes through the vacuum flange connection structure (33), the second clearance through hole extends into the coating cavity (10) and is fixedly connected to the cooling assembly (2). The drive member (35) is fixedly connected to the main body of the equipment (1), and the power output end of the drive member (35) is fixedly connected to the drive plate (32). The drive member (35) is used to drive the drive plate (32) to move along the length direction of the drive rod (34) so ​​that the drive rod (34) drives the cooling assembly (2) to move.

5. The coating equipment according to claim 4, characterized in that, The drive mechanism (3) further includes a guide rod (36), which is fixedly connected to the side of the mounting plate (31) facing the drive plate (32). The length direction of the guide rod (36) is parallel to the length direction of the drive rod (34), and the guide rod (36) passes through the drive plate (32).

6. The coating equipment according to claim 5, characterized in that, The drive mechanism (3) further includes a connecting rod (37), a mounting rod (38), a first sensor (3A), and a second sensor (3B). One end of the guide rod (36) is fixedly connected to the connecting rod (37) along its length direction. The mounting rod (38) connects the connecting rod (37) and the mounting plate (31), and the mounting rod (38) is located on one side of the drive plate (32). The first sensor (3A) and the second sensor (3B) are connected to the mounting rod (38) at intervals along the length direction of the guide rod (36). The first sensor (3A) and the second sensor (3B) are both used to detect the position of the drive plate (32).

7. The coating equipment according to claim 1, characterized in that, The coating equipment also includes a heating component (4), which is located inside the coating cavity (10) and is positioned opposite to and spaced apart from the cooling component (2).

8. The coating equipment according to claim 7, characterized in that, The heating assembly (4) includes a fixing plate (41), a first heating wire (42), and a second heating wire (43). The fixing plate (41) is fixedly connected to the main body (1) of the equipment. The first heating wire (42) is fixedly connected to the fixing plate (41) and coiled to form a rectangular first heating structure. The length of the first heating structure extends laterally. The second heating wire (43) is fixedly connected to the fixing plate (41) and coiled to form a rectangular second heating structure. The length of the second heating structure extends vertically. The first heating structure is multiple, and the multiple first heating structures are arranged vertically to form a first heating zone. The first heating zone has second heating zones on both sides in the horizontal direction. The second heating zone is provided with second heating structures, and the number of second heating structures is multiple in the vertical direction.

9. The coating equipment according to claim 8, characterized in that, The heating component (4) further includes a heat reflector (44), which is fixedly connected to the fixing plate (41). The heat reflector (44) is provided between the first heating structure and the fixing plate (41) and between the second heating structure and the fixing plate (41). The heat reflector (44) is located on the side of the fixing plate (41) facing the cooling component (2).

10. The coating equipment according to claim 8 or 9, characterized in that, The heating assembly (4) also includes a corrugated plate (45), which is fixedly connected to the fixing plate (41). The corrugated plate (45) is provided on the side of the first heating structure facing away from the fixing plate (41) and on the side of the second heating structure facing away from the fixing plate (41).

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